JP2020098801A - Ceramic heater - Google Patents

Ceramic heater Download PDF

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JP2020098801A
JP2020098801A JP2020030615A JP2020030615A JP2020098801A JP 2020098801 A JP2020098801 A JP 2020098801A JP 2020030615 A JP2020030615 A JP 2020030615A JP 2020030615 A JP2020030615 A JP 2020030615A JP 2020098801 A JP2020098801 A JP 2020098801A
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ceramic
heating resistor
lead
thickness
ceramic heater
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JP6957663B2 (en
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祥二 井筒
Shoji Izutsu
祥二 井筒
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Kyocera Corp
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Abstract

To improve long-term reliability of a ceramic heater.SOLUTION: A ceramic heater 10 is a ceramic heater 10 comprising: a ceramic laminate 1 in which a plurality of ceramic layers are stacked; a belt-shaped heat element 2 that is embedded between the layers of the ceramic laminate 1; and belt-shaped leads 3 that are embedded between the layers of the ceramic laminate 1 and connected to ends of the heat element 2 in an overlapping manner. The heat element 2 protrudes, at connection parts with the leads 3, to both sides in a width direction from the ends of the leads 3, and a thickness of a protruding portion is smaller than a thickness of a portion overlapping the leads 3. This configuration can improve long-term reliability of the ceramic heater 10.SELECTED DRAWING: Figure 2

Description

本発明は、セラミックヒータに関するものである。 The present invention relates to a ceramic heater.

ガスレンジ、車載暖房装置、石油ファンヒータまたは自動車エンジンのグロープラグあるいは燃料の予備加熱等に用いられるヒータとして、セラミックヒータが知られている。セラミックヒータとしては、例えば、特許文献1に開示されたセラミックヒータが挙げられる。 A ceramic heater is known as a heater used for a gas stove, a vehicle-mounted heating device, an oil fan heater, a glow plug of an automobile engine, or preheating of fuel. Examples of the ceramic heater include the ceramic heater disclosed in Patent Document 1.

特許文献1に開示されたセラミックヒータは、セラミック構造体と、このセラミック構造体に埋設された発熱抵抗体と、この発熱抵抗体に接続されてセラミック構造体の表面に引き出された給電線とを備えている。 The ceramic heater disclosed in Patent Document 1 includes a ceramic structure, a heating resistor embedded in the ceramic structure, and a power supply line connected to the heating resistor and drawn to the surface of the ceramic structure. I have it.

特開2000−156275号公報JP, 2000-156275, A

特許文献1に開示されたセラミックヒータは、高温環境下で繰り返し使用した場合に給電線と発熱抵抗体との接続部において、給電線および発熱抵抗体に熱応力が生じることによって、クラックが生じる場合があった。その結果、セラミックヒータを高温環境下において繰り返し使用した場合の長期信頼性を向上させることが困難であった。 When the ceramic heater disclosed in Patent Document 1 is repeatedly used in a high temperature environment, cracks are generated in the connecting portion between the power supply line and the heating resistor due to thermal stress in the power supply line and the heating resistor. was there. As a result, it has been difficult to improve long-term reliability when the ceramic heater is repeatedly used in a high temperature environment.

本発明の1つの態様に基づくセラミックヒータは、複数のセラミック層が積層されてなるセラミック積層体と、該セラミック積層体の層間に埋設された帯状の発熱抵抗体と、前記セラミック積層体の前記層間に埋設されて前記発熱抵抗体の端部に重ねて接続された帯状のリードとを具備したセラミックヒータであって、前記発熱抵抗体は、前記リードとの接続部において前記リードの端部から幅方向の両側に張り出しており、前記リードに重なっている部分の厚みに比べて張り出している部分の厚みが薄いことを特徴とする。 A ceramic heater according to one aspect of the present invention is a ceramic laminate in which a plurality of ceramic layers are laminated, a strip-shaped heating resistor embedded between layers of the ceramic laminate, and the interlayer of the ceramic laminate. And a strip-shaped lead embedded in and connected to an end portion of the heating resistor so as to overlap with each other, wherein the heating resistor has a width from an end portion of the lead at a connecting portion with the lead. It is characterized in that it overhangs on both sides in the direction, and the thickness of the overhanging portion is smaller than the thickness of the portion overlying the lead.

本発明の1つの態様に基づくセラミックヒータによれば、高温環境下において繰り返し使用した場合の長期信頼性を向上させることができる。 The ceramic heater according to one aspect of the present invention can improve long-term reliability when it is repeatedly used in a high temperature environment.

本発明の実施形態の例のセラミックヒータを示す縦断面図である。It is a longitudinal section showing a ceramic heater of an example of an embodiment of the present invention. 図1に示すセラミックヒータをA−A'線で切断した横断面図である。It is a cross-sectional view which cut|disconnected the ceramic heater shown in FIG. 1 by the AA' line.

以下、本発明のいくつかの実施形態の例のセラミックヒータ10について図面を参照して説明する。 Hereinafter, ceramic heaters 10 according to some embodiments of the present invention will be described with reference to the drawings.

図1に示すように、本発明の実施形態の例のセラミックヒータ10は、セラミック積層体1と、セラミック積層体1の内部に設けられた発熱抵抗体2と、セラミック積層体1の内部に設けられて発熱抵抗体2に接続されたリード3とを備えている。このようなセラミ
ックヒータ10は、例えば、自動車エンジンのグロープラグあるいは燃料の予備加熱用に、またはガスレンジの着火用等に用いることができる。
As shown in FIG. 1, a ceramic heater 10 according to an embodiment of the present invention includes a ceramic laminate 1, a heating resistor 2 provided inside the ceramic laminate 1, and a heating resistor 2 provided inside the ceramic laminate 1. And a lead 3 connected to the heating resistor 2. Such a ceramic heater 10 can be used, for example, for preheating a glow plug or fuel of an automobile engine or for igniting a gas range.

セラミック積層体1の内部には、リード3および発熱抵抗体2が埋設されている。セラミック積層体1の内部にリード3および発熱抵抗体2を設けることによって、リード3および発熱抵抗体2の耐環境性を向上させることができる。セラミック積層体1は、例えば、棒状または板状(これらを合わせて柱状ともいえる)の部材である。セラミック積層体1は、複数のセラミック層が積層されてなる。 A lead 3 and a heating resistor 2 are embedded inside the ceramic laminate 1. By providing the lead 3 and the heating resistor 2 inside the ceramic laminate 1, the environment resistance of the lead 3 and the heating resistor 2 can be improved. The ceramic laminated body 1 is, for example, a rod-shaped or plate-shaped member (which can be collectively referred to as a column). The ceramic laminated body 1 is formed by laminating a plurality of ceramic layers.

セラミック積層体1は、例えば、酸化物セラミックス、窒化物セラミックスまたは炭化物セラミックス等の電気的な絶縁性を有するセラミックスから成る。具体的には、セラミック積層体1は、アルミナ質セラミックス、窒化珪素質セラミックス、窒化アルミニウム質セラミックスまたは炭化珪素質セラミックス等から成る。 The ceramic laminated body 1 is made of an electrically insulating ceramic such as oxide ceramics, nitride ceramics, or carbide ceramics. Specifically, the ceramic laminate 1 is made of alumina ceramics, silicon nitride ceramics, aluminum nitride ceramics, silicon carbide ceramics, or the like.

窒化珪素質セラミックスから成るセラミック積層体1は、以下の方法で得ることができる。具体的には、例えば、主成分の窒化珪素に対して、焼結助剤として5〜15質量%のY、YbまたはEr等の希土類元素酸化物、0.5〜5質量%のAlおよび焼結体に含まれるSiOの量が1.5〜5質量%となるように量が調整されたSiOを混合する。そして、所定の形状に成形した後に1650〜1780℃での温度で焼成することによって、窒化珪素質セラミックスから成るセラミック積層体1を得ることができる。焼成には、例えばホットプレス法を用いることができる。 The ceramic laminated body 1 made of silicon nitride ceramics can be obtained by the following method. Specifically, for example, 5 to 15% by mass of a rare earth element oxide such as Y 2 O 3 , Yb 2 O 3 or Er 2 O 3 as a sintering aid with respect to silicon nitride as a main component, 0. the amount of SiO 2 contained in the Al 2 O 3 and sintering of 5-5% by weight amount such that 1.5 to 5 wt% is mixed SiO 2 that has been adjusted. Then, after being formed into a predetermined shape, it is fired at a temperature of 1650 to 1780° C., whereby the ceramic laminated body 1 made of silicon nitride ceramics can be obtained. For the firing, for example, a hot press method can be used.

セラミック積層体1の形状が棒状である場合、より具体的には四角柱状である場合には、セラミック積層体1の長さは例えば20〜100mmに設定される。また、セラミック積層体1の断面は、例えば厚さが1〜6mm、幅が2〜40mmの四角形に設定される。 When the shape of the ceramic laminated body 1 is rod-shaped, more specifically, when it is a quadrangular prism, the length of the ceramic laminated body 1 is set to 20 to 100 mm, for example. Further, the cross section of the ceramic laminate 1 is set to a quadrangle having a thickness of 1 to 6 mm and a width of 2 to 40 mm, for example.

発熱抵抗体2は、電圧が加えられることによって発熱する帯状の部材である。発熱抵抗体2は、セラミック積層体1の複数のセラミック層の層間に埋設されている。発熱抵抗体2に電圧が加えられることによって電流が流れ、発熱抵抗体2が発熱する。この発熱によって生じた熱がセラミック積層体1の内部を伝わって、セラミック積層体1の表面が高温になる。そして、セラミック積層体1の表面から被加熱物に対して熱が伝わることによって、セラミックヒータ10が機能する。セラミック積層体1の表面から熱を伝えられることになる被加熱物としては、例えば自動車用ディーゼルエンジンの燃料噴射装置に供給される軽油等が挙げられる。 The heating resistor 2 is a strip-shaped member that generates heat when a voltage is applied. The heating resistor 2 is embedded between the plurality of ceramic layers of the ceramic laminate 1. When a voltage is applied to the heating resistor 2, a current flows and the heating resistor 2 generates heat. The heat generated by this heat generation is transmitted inside the ceramic laminated body 1 and the surface of the ceramic laminated body 1 becomes high in temperature. Then, the heat is transferred from the surface of the ceramic laminate 1 to the object to be heated, so that the ceramic heater 10 functions. Examples of the object to be heated to which heat is transferred from the surface of the ceramic laminated body 1 include light oil supplied to a fuel injection device of an automobile diesel engine.

発熱抵抗体2は、セラミック積層体1の先端側に設けられている。発熱抵抗体2は、縦断面(発熱抵抗体2の長さ方向に対して平行な面)の形状が、例えば折返し形状になっている。発熱抵抗体2はセラミック積層体1の先端付近で折り返している。発熱抵抗体2の先端から発熱抵抗体2の後端までの長さは、例えば発熱抵抗体2の長さ方向において2〜15mmに設定される。 The heating resistor 2 is provided on the tip side of the ceramic laminated body 1. The heating resistor 2 has a vertical cross section (a plane parallel to the length direction of the heating resistor 2) that is, for example, a folded shape. The heating resistor 2 is folded back near the tip of the ceramic laminate 1. The length from the front end of the heating resistor 2 to the rear end of the heating resistor 2 is set to, for example, 2 to 15 mm in the length direction of the heating resistor 2.

発熱抵抗体2は、例えば、タングステン(W)、モリブデン(Mo)またはチタン(Ti)等の炭化物、窒化物または珪化物等を主成分とする。セラミック積層体1が窒化珪素質セラミックスから成る場合には、発熱抵抗体2の主成分が炭化タングステンから成ることが好ましい。これにより、セラミック積層体1の熱膨張率と発熱抵抗体2の熱膨張率とを近付けることができる。 The heating resistor 2 contains, for example, a carbide such as tungsten (W), molybdenum (Mo), or titanium (Ti), a nitride, a silicide, or the like as a main component. When the ceramic laminate 1 is made of silicon nitride ceramics, the heating resistor 2 is preferably made of tungsten carbide as a main component. Thereby, the coefficient of thermal expansion of the ceramic laminated body 1 and the coefficient of thermal expansion of the heating resistor 2 can be made close to each other.

リード3は、セラミック積層体1の内部において、複数のセラミック層の層間に埋設されて一端がセラミック積層体1の側面に引き出された帯状の部材である。リード3は発熱抵抗体2に電気的に接続されている。リード3は発熱抵抗体2と外部の電源とを電気的に
接続するために用いられる。
The lead 3 is a strip-shaped member that is embedded in the layers of the plurality of ceramic layers inside the ceramic laminated body 1 and has one end pulled out to the side surface of the ceramic laminated body 1. The lead 3 is electrically connected to the heating resistor 2. The lead 3 is used to electrically connect the heating resistor 2 and an external power source.

リード3は、発熱抵抗体2のそれぞれに対応して、セラミック積層体1の長さ方向に沿って2本設けられており、セラミック積層体1の後端側で折り曲げられてセラミック積層体1の側面に引き出されている。リード3は、セラミック積層体1の後端側において90°に曲げられて、セラミック積層体1の側面に引き出されている。 Two leads 3 are provided along the length direction of the ceramic laminated body 1 corresponding to each of the heating resistors 2, and are bent at the rear end side of the ceramic laminated body 1 so that the lead 3 of the ceramic laminated body 1 is bent. It is pulled out to the side. The lead 3 is bent at 90° on the rear end side of the ceramic laminated body 1 and is drawn out to the side surface of the ceramic laminated body 1.

リード3は、例えばWまたはMo等の耐熱性に優れた金属材料が用いられる。特に、熱膨張率の観点から発熱抵抗体2と同じ炭化タングステンを用いることが好ましい。リード3は、例えば、幅が1〜20mm、発熱抵抗体2の長さ方向に沿った部分の長さが10〜80mm、セラミック積層体1の側面に引き出されるために、発熱抵抗体2の長さ方向に対して垂直な方向に延びた部分の長さが2〜30mm、厚みが10〜50μm程度に設定される。 The lead 3 is made of a metal material having excellent heat resistance such as W or Mo. In particular, from the viewpoint of the coefficient of thermal expansion, it is preferable to use the same tungsten carbide as the heating resistor 2. The lead 3 has, for example, a width of 1 to 20 mm, a length of a portion along the length direction of the heating resistor 2 is 10 to 80 mm, and since the lead 3 is pulled out to the side surface of the ceramic laminate 1, the length of the heating resistor 2 is long. The length of the portion extending in the direction perpendicular to the depth direction is set to 2 to 30 mm and the thickness is set to about 10 to 50 μm.

図2は、図1に示すセラミックヒータ10のうち、発熱抵抗体2とリード3との接続部を通るA−A'線で切断した横断面図である。なお、図2においては、複数のセラミック
層の境界の一部を点線で示している。図2に示す通り、発熱抵抗体2はリード3との接続部においてリード3の端部から幅方向の両側に張り出している(張り出し部20)。そして、発熱抵抗体2のうちリード3に重なっている部分の厚みに比べて張り出している部分の厚みが薄い。
FIG. 2 is a cross-sectional view of the ceramic heater 10 shown in FIG. 1, taken along the line AA′ passing through the connection between the heating resistor 2 and the lead 3. In addition, in FIG. 2, a part of the boundary of the plurality of ceramic layers is shown by a dotted line. As shown in FIG. 2, the heating resistor 2 projects from the end of the lead 3 to both sides in the width direction at the connecting portion with the lead 3 (projection 20). The thickness of the overhanging portion of the heating resistor 2 is smaller than the thickness of the portion overlapping the lead 3.

これらの結果、発熱抵抗体2に熱応力が生じた場合に、張り出している部分に熱応力を集中しやすくすることができる。そのため、発熱抵抗体2のうちリード3に重なっている部分にクラックが生じる可能性を低減できる。これらの結果、セラミックヒータ10を高温環境下において繰り返し使用した場合の長期信頼性を向上させることができる。 As a result, when thermal stress is generated in the heating resistor 2, the thermal stress can be easily concentrated on the protruding portion. Therefore, it is possible to reduce the possibility that a crack will occur in the portion of the heating resistor 2 that overlaps the lead 3. As a result, it is possible to improve long-term reliability when the ceramic heater 10 is repeatedly used in a high temperature environment.

発熱抵抗体2のうちリード3に重なっている部分の厚みと張り出している部分の厚みとの比較は、以下の方法で行なうことができる。具体的には、リード3に重なっている部分および張り出している部分のそれぞれの厚みの平均値を求めて、これを比較すればよい。厚みの平均値は、例えば、以下の方法で求めることができる。まず、リード3に重なっている部分および張り出している部分を幅方向に3等分する。次に、3等分された各々の部分の厚みを求める。そして、3等分された各々の部分の厚みを足して3で割って算出された値を厚みの平均値として見なす。なお、上述の例では、平均値を求める対象の部分を幅方向に3等分してそれぞれの厚みの平均を求めたが、これに限られない。具体的には、4等分してもよいし、5(またはそれ以上の数)等分でもよい。 The thickness of the portion of the heating resistor 2 that overlaps the lead 3 and the thickness of the portion that overhangs can be compared by the following method. Specifically, the average value of the thickness of each of the portion overlapping the lead 3 and the protruding portion may be obtained and compared. The average value of the thickness can be obtained by the following method, for example. First, the portion overlapping the lead 3 and the protruding portion are divided into three equal parts in the width direction. Next, the thickness of each of the three divided parts is obtained. Then, a value calculated by adding the thicknesses of the respective three divided parts and dividing by 3 is regarded as an average value of the thicknesses. In addition, in the above-mentioned example, the target portion for which the average value is to be obtained is divided into three equal parts in the width direction and the average of the respective thicknesses is obtained, but the present invention is not limited to this. Specifically, it may be divided into four equal parts, or five (or more) parts.

発熱抵抗体2の厚みは、例えば、中央部の厚みを3〜5μm、張り出した部分の厚みを1〜3μmに設定できる。また、リード3の厚みは、中心部の厚みを10〜15μmに設定できる。発熱抵抗体2の幅は、張り出している部分を含めて10〜50μmに設定できる。 Regarding the thickness of the heating resistor 2, the thickness of the central portion can be set to 3 to 5 μm, and the thickness of the protruding portion can be set to 1 to 3 μm. The thickness of the lead 3 can be set to 10 to 15 μm at the center. The width of the heating resistor 2 can be set to 10 to 50 μm including the protruding portion.

さらに、発熱抵抗体2は、張り出している部分の厚みが外辺に向かって薄くなっている。張り出している部分の厚みが外辺に向かって薄いことにより、張り出している部分の中でも特に先端部に応力が集中しやすくなる。そのため、発熱抵抗体2のうちリード3に重なっている部分にクラックが生じる可能性をさらに低減できる。これらの結果、セラミックヒータ10を高温環境下において繰り返し使用した場合の長期信頼性をさらに向上させることができる。 Further, in the heating resistor 2, the thickness of the protruding portion is reduced toward the outer side. Since the thickness of the protruding portion is thinner toward the outer side, stress is likely to be concentrated particularly on the tip portion of the protruding portion. Therefore, it is possible to further reduce the possibility of cracks in the portion of the heating resistor 2 that overlaps the lead 3. As a result, it is possible to further improve the long-term reliability when the ceramic heater 10 is repeatedly used in a high temperature environment.

さらに、リード3は、発熱抵抗体2との接続部において厚みが両側の外辺に向かって薄くなっている。これにより、発熱抵抗体2とリード3とを一体として捉えたときに、両側
の外辺に向かって細くなる形状になるため、発熱抵抗体2とリード3とに生じる熱応力がリード3の外辺側において集中しやすくなる。その結果、発熱抵抗体2とリード3の主要部分にはクラックが生じにくくなるので、セラミックヒータ10の長期信頼性を向上できる。
Further, the lead 3 has a thickness that becomes thinner toward the outer sides on both sides at the connection portion with the heating resistor 2. As a result, when the heating resistor 2 and the lead 3 are taken as a unit, the heating resistor 2 and the lead 3 are tapered toward the outer edges on both sides. It becomes easier to concentrate on the side. As a result, cracks are less likely to occur in the main parts of the heating resistor 2 and the leads 3, so that the long-term reliability of the ceramic heater 10 can be improved.

特に、図2に示すように、セラミックヒータ10の横断面を見たときに、リード3の外周と発熱抵抗体2の外周のうちリード3に覆われていない部分とが、滑らかに連続していることが好ましい。これにより、仮に、セラミック積層体1と発熱抵抗体2のうち張り出している部分との間にクラックが生じたとしても、このクラックが進展して、発熱抵抗体2とリード3との間に侵入してしまうおそれを低減できる。 In particular, as shown in FIG. 2, when the ceramic heater 10 is viewed in cross section, the outer periphery of the lead 3 and the portion of the outer periphery of the heating resistor 2 which is not covered by the lead 3 are smoothly continuous. Is preferred. As a result, even if a crack is generated between the ceramic laminate 1 and the protruding portion of the heating resistor 2, the crack propagates and penetrates between the heating resistor 2 and the lead 3. It is possible to reduce the risk of doing so.

1:セラミック積層体
2:発熱抵抗体
3:リード
10:セラミックヒータ
1: Ceramic laminate 2: Heating resistor 3: Lead 10: Ceramic heater

Claims (5)

複数のセラミック層が積層されてなるセラミック積層体と、該セラミック積層体の層間に埋設された帯状の発熱抵抗体と、前記セラミック積層体の前記層間に埋設されて前記発熱抵抗体の端部に重ねて接続された帯状のリードとを具備したセラミックヒータであって、
前記発熱抵抗体は、横断面視したときに、前記リードとの接続部において、
前記リードの端部から幅方向の両側で前記セラミック層の積層方向と直行する方向に張り出しており、
前記リードの厚みが前記発熱抵抗体の厚みよりも厚く、前記リードの外周と前記発熱抵抗体の外周のうち前記リードに覆われていない部分とが滑らかに連続していることを特徴とするセラミックヒータ。
A ceramic laminated body in which a plurality of ceramic layers are laminated, a strip-shaped heating resistor embedded between layers of the ceramic laminated body, and an end portion of the heating resistor embedded between the layers of the ceramic laminated body A ceramic heater having strip-shaped leads connected to each other,
The heating resistor, when viewed in cross section, at the connection portion with the lead,
Overhanging in a direction orthogonal to the stacking direction of the ceramic layers on both sides in the width direction from the ends of the leads,
The thickness of the lead is thicker than the thickness of the heating resistor, and the outer circumference of the lead and a portion of the outer circumference of the heating resistor that is not covered by the lead are smoothly continuous. heater.
前記発熱抵抗体は、前記リードに重なっている部分の厚みに比べて張り出している部分の厚みが薄いことを特徴とする請求項1に記載のセラミックヒータ。 2. The ceramic heater according to claim 1, wherein the heating resistor has a projecting portion thinner than a portion overlapping the lead. 前記発熱抵抗体は、張り出している部分の厚みが外辺に向かって薄くなっていることを特徴とする請求項1に記載のセラミックヒータ。 The ceramic heater according to claim 1, wherein the heating resistor has a projecting portion whose thickness is reduced toward the outer side. 前記リードは、前記発熱抵抗体との接続部において厚みが両側の外辺に向かって薄くなっていることを特徴とする請求項1に記載のセラミックヒータ。 The ceramic heater according to claim 1, wherein the lead has a thickness that decreases toward outer edges on both sides at a connection portion with the heating resistor. 前記発熱抵抗体と前記リードとの接続部において、横断面視したときに、
前記発熱抵抗体において、前記リードとの接触面は該接触面と対向する面よりも前記セラミック層の積層方向における外側への張り出しが大きいことを特徴とする請求項1に記載のセラミックヒータ。
At the connecting portion between the heating resistor and the lead, when viewed in cross section,
The ceramic heater according to claim 1, wherein, in the heating resistor, a contact surface with the lead has a larger outward protrusion in a stacking direction of the ceramic layers than a surface facing the contact surface.
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