JP2020088279A - Substrate housing container - Google Patents

Abstract

To provide a substrate housing container reducing the number of components by integrating a member for opening and closing the valve body, and any one of components constituting the valve body, and capable of controlling distribution of gas.SOLUTION: A valve body 40 to be attached to a substrate housing container has a valve body 42, a block body 41 for housing the valve body 42, and a valve energization body 43 for energizing the valve body 42. The block body 41 includes a valve storage space 411a for storing the valve body 42, and a valve seating face 416 for seating the valve body 42, and the valve energization body 43 may include an elastic part 432 for energizing the valve body 42, and a shaft part 433 for guiding the valve body 42.SELECTED DRAWING: Figure 2

Description

The present invention relates to a substrate storage container provided with a valve body that controls the flow of gas into a container body.

A substrate storage container that stores a substrate includes a container body, a lid body that closes an opening of the container body, and a valve body that controls the flow of gas to the container body. This valve body allows the supplied gas to flow through the container body and discharge the gas from the container body to the outside in order to store the substrate in the substrate storage container in an airtight state.

Specifically, this valve body has a check valve function, and includes at least a valve body and an elastic member for opening and closing the valve body, and is composed of a large number of parts for assembling these (for example, , Patent Document 1 and Patent Document 2).

JP, 2008-066330, A JP, 2004-179449, A

By the way, since the check valve function of the valve body controls the flow of gas in one direction, the valve body itself may be replaced or the valve body and the elastic member may be recombined in order to provide the flow valve in accordance with the flow direction of gas. However, the valve bodies disclosed in the above-mentioned Patent Documents 1 and 2 need to be assembled by combining a large number of parts, and the assembling workability is not good.

Therefore, the present invention has been made in view of the above problems, and reduces the number of parts by integrating a member for opening and closing the valve body and any one of the components forming the valve body, and An object of the present invention is to provide a substrate storage container provided with a valve body whose flow can be controlled.

(1) One aspect according to the present invention is a substrate storage including a container body that stores a substrate, a lid body that closes an opening of the container body, and a valve body that controls the flow of gas to the container body. In the container, the valve body includes a valve body, a block body that stores the valve body, and a valve biasing body that biases the valve body.
(2) In the aspect of (1) above, the valve biasing body passes through the biasing main body portion, an elastic portion that biases the valve body, a shaft portion that guides the valve body, and the gas. And a communication opening.
(3) In the aspect of (2) above, the block body is fitted with a valve storage space for storing the valve body, a valve seat surface on which the valve body is seated, and the biasing main body portion. It may include a groove, a fitting hole into which the shaft portion is fitted, and a communication hole that connects the outside and the inside of the container body.
(4) In the aspect of (3) above, the valve body is movably inserted into the valve body, which is seated on the valve seat surface, the rib biased by the elastic portion, and the shaft portion. A guide hole may be included.
(5) In the aspect of (4), the valve body may have a curved surface that is seated on the valve seat surface.
(6) In any one of the above aspects (1) to (5), the block body may be made of an elastic material, and the valve biasing body may be made of a resin material.

According to the present invention, a substrate storage container provided with a valve body capable of controlling the flow of gas while reducing the number of parts by integrating a member for opening and closing the valve body and any one of the components forming the valve body. Can be provided.

It is a schematic exploded perspective view showing a substrate storage container of an embodiment concerning the present invention. It is a section perspective view showing a valve body of an embodiment. It is a (a) top view and a (b) sectional view showing a block body of an embodiment. It is the (a) top view and the (b) side view showing the valve body of an embodiment. It is a (a) top view and a (b) side view showing a valve energizer of an embodiment. It is sectional drawing which shows the valve closed state of the valve body of embodiment. It is sectional drawing which shows the valve opening state of the valve body of embodiment. FIG. 9A is an enlarged cross-sectional view of Modified Example 1 and FIG. 9B is an enlarged cross-sectional view of Modified Example 1 showing a valve body and a valve biasing body having a rotation stopping means. (C) Sectional perspective view of modification 3 showing a valve element and valve biasing element which have a rotation stop means, (d) Sectional perspective view of modification 4;

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the embodiments of the present specification, the same members are denoted by the same reference symbols throughout.

FIG. 1 is a schematic exploded perspective view showing a substrate storage container 1 according to an embodiment of the present invention.
As shown in FIG. 1, the substrate storage container 1 is provided between the container body 10 that stores the substrate W, a lid 20 that closes the opening 11 of the container body 10, and the container body 10 and the lid body 20. And an annular packing 30.

The container body 10 is a box-shaped body, and is a front open type in which an opening 11 is formed on the front surface. The opening 11 is formed in a curved shape with a step so as to spread to the outside, and the surface of the stepped portion is formed at the inner peripheral edge of the front surface of the opening 11 as a sealing surface 12 with which the packing 30 contacts. The container body 10 is preferably a front open type because it is easy to insert a substrate W having a diameter of 300 mm or a diameter of 450 mm, but may be a bottom open type in which the opening 11 is formed on the lower surface.

Supports 13 are arranged on the left and right sides inside the container body 10. The support 13 has a function of placing and positioning the substrate W. A plurality of grooves are formed in the support body 13 in the height direction to form a so-called groove tooth. The substrate W is placed on the groove teeth at two left and right sides having the same height. The material of the support 13 may be the same as that of the container body 10, but different materials may be used in order to enhance the cleaning property and the slidability.

The substrate W is supported by the support 13 and is housed in the container body 10. A silicon wafer is given as an example of the substrate W, but it is not particularly limited, and may be, for example, a quartz wafer or a gallium arsenide wafer.

A robotic flange 14 is detachably provided at the center of the ceiling of the container body 10. The substrate storage container 1 in which the substrate W is airtightly stored in a clean state is transported to the processing device for each step of processing the substrate W by the robot in the factory, holding the robotic flange 14.

Further, manual handles 15 to be gripped by an operator are detachably attached to central portions of outer surfaces of both sides of the container body 10.

An air supply unit 16 and an exhaust unit 17 are provided on the inner bottom surface of the container body 10, and valve bodies 40, 50 described later are attached to the outer bottom surface of the container body 10. By supplying an inert gas such as nitrogen gas or dry air from the air supply unit 16 to the inside of the substrate storage container 1 closed by the lid 20 and discharging the dry air from the exhaust unit 17 as necessary, By replacing the gas inside the substrate storage container 1, maintaining a low-humidity airtight state, and blowing away impurities on the substrate W, the cleanliness inside the substrate storage container 1 is maintained. There is. In addition to supplying gas from the gas supply unit 16, the gas exhaust unit 17 may be connected to the negative pressure (vacuum) generator to forcefully discharge the gas from the gas exhaust unit 17.

Further, by detecting the gas exhausted from the exhaust unit 17, it is possible to confirm whether the inside of the substrate storage container 1 has been replaced by the introduced gas. It is preferable that the air supply unit 16 and the exhaust unit 17 are located at positions deviating from the positions where the substrate W is projected on the bottom surface, but the numbers and positions of the air supply unit 16 and the exhaust unit 17 are not limited to the illustrated ones. Instead, they may be located at the four corners of the bottom surface of the container body 10. Further, the air supply unit 16 and the exhaust unit 17 may be attached to the lid 20 side.

On the other hand, the lid 20 has a substantially rectangular shape attached to the front of the opening 11 of the container body 10. The lid 20 has a locking mechanism (not shown), and is locked by fitting a locking claw into a locking hole (not shown) formed in the container body 10. An elastic front retainer (not shown) that horizontally holds the front edge of the substrate W is detachably attached or integrally formed at the center of the lid 20.

Like the groove teeth of the support 13 and the substrate holding portion, this front retainer is a portion that is in direct contact with the wafer, and therefore is made of a material having good cleaning properties and slidability. The front retainer can also be provided on the lid body 20 by insert molding or fitting.

The lid 20 is formed with a mounting groove 21 for mounting the packing 30. More specifically, a convex portion 22 smaller than the stepped portion of the opening 11 is formed in a ring shape on the surface of the lid body 20 on the container body 10 side, so that a mounting groove 21 having a substantially U-shaped cross section is formed in a ring shape. ing. When the lid body 20 is attached to the container body 10, the convex portion 22 penetrates deeper than the stepped portion of the opening 11.

Examples of materials for the container body 10 and the lid 20 include thermoplastic resins such as polycarbonate, cycloolefin polymer, polyetherimide, polyethersulfone, polyetheretherketone, and liquid crystal polymer. To this thermoplastic resin, conductive carbon, conductive fibers, metal fibers, conductive agents such as conductive polymers, various antistatic agents, ultraviolet absorbers and the like may be further appropriately added.

Next, the packing 30 has an annular shape corresponding to the front shape of the lid 20 (and the shape of the opening 11 of the container body 10), and has a rectangular frame shape in the present embodiment. However, the ring-shaped packing 30 may have a ring shape before being attached to the lid body 20.

The packing 30 is attached to the lid body 20 and is arranged between the container body 10 and the lid body 20. When the opening 20 of the container body 10 is closed by the lid body 20, the packing 30 is attached to the sealing surface 12 of the container body 10. The close contact ensures the airtightness of the substrate storage container 1, reduces the invasion of dust and moisture from the outside into the substrate storage container 1, and reduces the leakage of gas from the inside to the outside. Conversely, the packing 30 may be attached to the container body 10 side and the sealing surface 12 may be formed on the lid 20 side.

As a material of the packing 30, a thermoplastic elastomer such as polyester elastomer, polyolefin elastomer, fluorine elastomer, urethane elastomer, or an elastic material such as fluororubber, ethylene propylene rubber, or silicone rubber is used. Can be used. From the viewpoint of modifying the adhesion, these materials include fillers such as carbon, glass fiber, mica, talc, silica and calcium carbonate, and resins such as polyethylene, polyamide, polyacetal, fluororesin and silicone resin. A predetermined amount may be selectively added.

Here, the valve body 40 of the first embodiment will be described. FIG. 2 is a cross-sectional perspective view showing the valve body 40 of the embodiment. 3A and 3B are a plan view and a sectional view, respectively, showing the block body 41 of the embodiment. FIG. 4 is a (a) plan view and a (b) side view showing the valve body 42 of the embodiment. FIG. 5 is a plan view (a) and a side view (b) showing the valve biasing body 43 of the embodiment.

The valve body 40 controls the flow of gas to and from the container body 10, and when attached to the container body 10, communicates with the air supply unit 16 via a gas flow path (not shown).

As shown in FIG. 2, the valve body 40 has a substantially columnar shape or a truncated cone shape that is fitted into a mounting hole 18 (see FIG. 6) formed by a rib 180 or the like on a wall surface such as a bottom surface of the container body 10 from below. It has a block body 41, a valve body 42 and a valve urging body 43 for controlling the flow of gas.

First, as shown in FIG. 3, the block body 41 defines a valve storage space 411a by a frustoconical peripheral wall 411 that widens upward and a conical projection 412. A fitting groove 413 for fitting and fixing a valve biasing body 43, which will be described later, is formed in the upper portion of the peripheral wall 411.

On the other hand, the protrusion 412 has a plurality of (for example, four) communication holes 414 formed in the peripheral wall, and a fitting hole 415 formed in the center. The communication hole 414 communicates the outside and the inside of the container body 10. Further, the fitting hole 415 is a through hole, and it is difficult for the cleaning water to remain during cleaning, but when the internal force of the substrate storage container 1 is set to be high, it is on the lower side (the side opposite to the valve storage space 411a). ) May be a closed recess (fixing hole).

A portion of the protrusion 412 above the communication hole 414 constitutes a part of the valve seat surface 416 on which the valve body 42 is seated, together with the peripheral wall 411, and the valve body 42 and the valve seat surface 416 form an inner periphery. By making contact (double) on two sides, the outer side and the outer side, the flow of gas from the communication hole 414 is blocked.

Further, the block body 41 has a convex ring-shaped seal portion 47 formed on the outer peripheral surface thereof, and the outside air entering the inside of the container body 10 from between the outer peripheral surface of the block body 41 and the inner peripheral surface of the mounting hole 18. It is possible to block the cleaning liquid and the gas leaking from the inside of the container body 10. When the block body 41 is made of a rubber-based material, which will be described later, the integrally formed seal portion 47 is also elastically deformed, but only the seal portion 47 is two-color molded with the rubber-based material, or the seal portion 47 is formed. An O-ring may be used instead of 47. Further, a filter 46, which will be described later, may be attached to the upper surface of the block body 41 (see FIG. 6).

Next, as shown in FIG. 4, the valve body 42 includes a valve body 421 having a concave shape such as a cake angel frame or a hollow donut cut in half, and an upward from the inside of the concave shape. And a plurality of (for example, four) ribs 422 that extend (see also FIG. 2 ).

Since the valve main body 421 has the above-described shape, a hole is formed at the center, and this hole is used as a guide hole 423 for guiding the valve opening/closing operation of the valve body 42. Further, the curved annular outer peripheral surface (outer edge side and guide hole 423 side) of the valve main body 421 is adapted to be seated on the peripheral wall 411 and the valve seat surface 416 of the protrusion 412 when the valve is closed (see FIG. 6). ..

When the contact portion of the valve body 421 with the valve seat surface 416 has a curved shape (R shape in cross section), the gas passing through the gap between the valve body 421 and the valve seat surface 416 is the surface of the valve body 42. It can flow smoothly without any resistance. The shape of the contact portion of the valve body 421 may be conical like the peripheral wall 411 of the block body 41 and the peripheral wall of the protrusion 412, or may be simply a disk shape. However, if the contact portion has an angular portion, turbulent flow may be caused when the gas passes through the gap, and the valve body 421 and the valve seat surface 416 make a line contact in a ring shape, The contact position may be easily displaced, or the surface pressure of the contact portion may increase, and a bite mark may remain on the peripheral wall 411. Therefore, the contact portion of the valve body 421 may have a curved shape. preferable.

As shown in FIG. 5, the valve urging body 43 has a ring-shaped urging body portion 431, and a shaft portion 433 depending from the urging body portion 431 to the center via a plurality of reinforcing ribs 434 and 435. Has been done. The biasing main body 431 is attached to the fitting groove 413 of the block body 41 (see FIG. 2).

The shaft portion 433 is inserted and fitted in the fitting hole 415 of the block body 41 and fixed, and when the valve body 42 is biased by the elastic portion 432, which will be described later, the valve body 42 tilts and the valve seat surface. It is inserted into the guide hole 423 of the valve body 42 so as not to go around one side of the valve body 416, and guides the vertical movement of the valve body 42. At this time, the shaft portion 433 and the fitting hole 415 are sealed so that gas does not leak, but the shaft portion 433 and the guide hole 423 are in a non-contact state and slide. It is preferable that it does not become a resistance.

Further, in the valve urging body 43, a communication opening 436 is formed between the urging body portion 431 and the reinforcing ribs 434 and 435. The communication opening 436 is a portion through which the gas that has passed through the communication hole 414 when the valve is opened passes, and can further flow toward the inside of the container body 10.

Further, in the valve urging body 43, a plurality of elastic portions 432, which are the same number as the ribs 422 of the valve body 42, are radially extended from the central reinforcing rib 435. The elastic portion 432 urges the valve body 42 toward the valve seat surface 416, and when the elastic body 432 is attached to the block body 41, the elastic portion 432 elastically deforms to use the restoring force as the urging force (FIG. 7). The thickness is preferably 0.1 mm or more and 1 mm or less, and the width thereof is preferably about 1 mm or more and 5 mm or less. Although the elastic portion 432 extends from the reinforcing rib 435, the elastic portion 432 may extend from the biasing main body portion 431 side toward the center, and is not in a cantilevered shape, and the biasing main body portion 431 and It may have a double-sided shape connected to the reinforcing rib 435.

Then, as the material of the block body 41, various kinds of rubber or thermoplastic elastomer resin can be used. For example, a polyester-based elastomer, a polyolefin-based elastomer, a fluorine-based elastomer, a thermoplastic elastomer such as a urethane-based elastomer, or an elastic material such as fluororubber, ethylene propylene rubber, or silicone-based rubber can be used.

Examples of the material of the valve body 42 include thermoplastic resins such as polyacetal, polycarbonate, cycloolefin polymer, polyetherimide, polyethersulfone, polyetheretherketone, and liquid crystal polymer.

Examples of the material of the valve urging body 43 include thermoplastic resins such as polycarbonate, cycloolefin polymer, polyetherimide, polyethersulfone, polyetheretherketone, and liquid crystal polymer.

The filter 46 is for filtering the gas to be supplied or discharged, and is a porous membrane made of tetrafluoroethylene, polyester fiber, fluororesin, etc., a molecular filtration filter made of glass fiber, etc., and a filter material such as activated carbon fiber. It is selected from a chemical filter in which a chemical adsorbent is supported.

One or more filters 46 are held on the upper surface of the block body 41. When a plurality of filters 46 are used, the filters may be of the same type, but it is more preferable to combine filters of different properties because contamination of organic substances other than particles can be prevented. preferable. For example, the filter 46 also has a function of suppressing passage of a liquid such as water or a cleaning liquid when the container body 10 is washed so that the liquid does not stay, and therefore, one of the filters 46 has a hydrophobic or hydrophilic material. May be used to further suppress liquid permeation.

Next, a state in which the valve body 40 of the present embodiment controls the flow of gas will be described. FIG. 6 is a sectional view showing a valve closed state of the valve body 40 of the embodiment. FIG. 7: is sectional drawing which shows the valve opening state of the valve body 40 of embodiment.

In the valve body 40, if no positive pressure is applied to the communication hole 414 or if a positive pressure is applied from the communication opening 436 side, the valve body 42 comes into close contact with the valve seat surface 416 of the block body 41 as shown in FIG. Thus, the flow of gas is blocked on either side.

Conversely, when a positive pressure equal to or higher than a predetermined value is applied to the communication hole 414, the valve body 42 is pushed upward as shown in FIG. 7, and the elastic portion 432 elastically deforms according to the magnitude of the positive pressure. The valve body 42 is separated from the valve seat surface 416 to form a gap. Then, the gas from the side of the communication hole 414 passes through this gap, flows to the side of the communication opening 436, and is supplied to the inside of the container body 10.

As described above, the valve body 40 of the present embodiment can only allow the flow of gas from the outside. At this time, the predetermined value of the pressure at which the gas can flow can be adjusted by changing the material, hardness, width, thickness of the elastic portion 432, the outer diameter of the valve body 421, and the like.

By the way, in the valve body 42, the guide hole 423 is inserted into the shaft portion 433 of the valve urging body 43 and is guided in the vertical direction at the time of opening and closing. However, depending on the opening/closing operation of the valve body 42, the valve body 42 is It may rotate around the shaft portion 433.

Therefore, a detent means 60 for detenting the valve body 42 may be added.
FIG. 8 is an enlarged cross-sectional view of (a) Modification 1 showing a valve body 42 and a valve biasing body 43 having a rotation stopping means 60, and (b) an expansion cross-sectional view of Modification 2. FIG. 9 is a cross-sectional perspective view of Modification Example 3 (c) showing a valve body 42 and a valve biasing body 43 having the rotation stopping means 160 and 260, and (d) a cross-sectional perspective view of Modification Example 4.

As shown in FIGS. 8A and 8B, the rotation stopping means 60 of the modified examples 1 and 2 has a concave cutout portion 62 formed in the guide hole 423 of the valve body 42 and the valve biasing body 43. The protrusion 63 formed on the shaft portion 433 and the protrusion 63 are provided in the first modified example, and the rotation preventing means 60 is provided at one place in the first modification, and the plurality of rotation preventing means 60 is provided in the second modification (e.g., four places). ) Is provided.

As shown in FIG. 9C, the rotation stopping means 160 of the modified example 3 includes two guide pins 162 formed at the tips of the ribs 422 of the valve body 42 so that the elastic portion 432 of the valve urging body 43 can be prevented. It is configured to be sandwiched. The rotation stopping means 160 may be provided in at least one place of the plurality of ribs 422, and may be provided corresponding to all the elastic portions 432.

As shown in FIG. 9D, in the rotation stopping means 260 of the modified example 4, one guide pin 162 formed at the tip of the rib 422 of the valve body 42 is attached to the elastic portion 432 of the valve urging body 43. It is configured to be inserted into the formed guide groove 263. The rotation stopping means 260 may be provided in at least one place of the plurality of ribs 422, or may be provided corresponding to all the elastic portions 432.

Finally, the exhaust valve body 50 will be described. The valve body 50 controls the flow of gas to and from the container body 10. When the valve body 50 is attached to the container body 10, the gas is exhausted through a gas flow passage (not shown). It communicates with the part 17 (see FIG. 1). The valve body 50 is upside down from the air supply valve body 40, and the valve body 42 is connected to the communication hole 414 of the block body 41 located on the bottom side of the container body 10 by the valve urging body 43. It is arranged so as to be urged upward and closed, and allows the gas to be exhausted from the inside of the container body 10 to the outside, but cannot supply the gas to the inside of the container body 10. It is supposed to do.

As described above, the substrate storage container 1 according to the embodiment of the present invention has the container body 10 for storing the substrate W, the lid 20 for closing the opening 11 of the container body 10, and the gas flow to the container body 10. In the substrate storage container 1 including the valve body 40 that controls, the valve body 40 includes a valve body 42, a block body 41 that stores the valve body 42, and a valve urging body 43 that urges the valve body 42. Is to have.

As a result, in the valve bodies 40 and 50 of the substrate storage container 1, without using a coil spring for the member that opens and closes the valve body 42, the member that opens and closes the valve body 42 and the components that form the valve bodies 40 and 50 Since any one of them is integrated (in the embodiment, the elastic portion 432 of the valve urging body 43 and the shaft portion 433 that guides the valve body 42 are integrated), the valve body. The number of parts of 40 and 50 can be reduced (the number of parts of the embodiment is the block body 41, the valve body 42, and the valve urging body 43). Therefore, the number of assembling steps can be reduced, and malfunction (impossible) due to defective assembly and defective parts hardly occurs.

Further, a humidity holding test was conducted using the substrate storage container 1 of the embodiment, but there was no significant difference in the humidity decrease over time from the conventional one, so that the airtightness is also good. Can be said.

The block body 41 of the embodiment includes a valve storage space 411a for storing the valve body 42, a valve seat surface 416 on which the valve body 42 is seated, a fitting groove 413 into which the biasing main body portion 431 is fitted, and a shaft portion. The valve body 42 includes a fitting hole 415 into which the container 433 is fitted and a communication hole 414 that allows the outside and the inside of the container body 10 to communicate with each other. The valve body 42 is seated on the valve seat surface 416; The valve urging body 43 includes the urging body 431 and the valve body 42, and includes a rib 422 urged by 432 and a guide hole 423 movably inserted into the shaft portion 433. The elastic portion 432, the shaft portion 433 that guides the valve body 42, and the communication opening 436 through which gas passes are included.

As a result, gas is introduced from one side of the valve bodies 40, 50 (becomes a positive pressure), and when the pressure value reaches a predetermined value, the valve body 42 is pressed by the gas and the elastic portion 432 of the valve urging body 43 is deformed. (Bent) and the valve body 42 separates from the valve seat surface 416 to connect the communication hole 414 and the communication opening 436, so that the introduced gas flows to the other side through the valve bodies 40 and 50. Will be done.

Although the preferred embodiments of the present invention have been described in detail above, the present invention is not limited to the above-described embodiments, and various modifications within the scope of the gist of the present invention described in the claims. It can be changed.

(Modification)
In the above-described embodiment, the valve body 40 is configured to be attached to the attachment hole 18 formed in at least one of the container body 10 and the lid body 20, but the gas flow path (pipe) provided in the container body 10 or the like. ), for example, it may be configured to be attached in the middle of a gas flow path communicating with at least one of the air supply unit 16 and the exhaust unit 17.

1 Substrate Storage Container 10 Container Body, 11 Opening, 12 Sealing Surface, 13 Supporting Body, 14 Robotic Flange, 15 Manual Handle, 16 Air Supply Section, 17 Exhaust Section, 18 Mounting Hole, 180 Rib 20 Lid, 21 Mounting Groove , 22 Convex portion 30 Packing 40 Valve body (for air supply)
41 block body, 411 peripheral wall, 411a valve storage space, 412 protrusion, 413 fitting groove, 414 communication hole, 415 fitting hole, 416 valve seat surface 42 valve body, 421 valve body, 422 rib, 423 guide hole 43 valve Biasing body, 431 Biasing body part, 432 Elastic part, 433 Shaft part, 434 Reinforcing rib, 435 Reinforcing rib, 436 Communication opening 46 Filter 47 Seal part 50 Valve body (for exhaust)
60 anti-rotation means, 62 notch portion, 63 convex portion 160 anti-rotation means, 162 guide pin 260 anti-rotation means, 262 guide pin, 263 guide groove W substrate

Claims (6)

A container body that stores the substrate,
A lid for closing the opening of the container body,
In a substrate storage container provided with a valve body for controlling the flow of gas to the container body,
The valve body is
Valve body,
A block body for storing the valve body,
A valve urging body for urging the valve body,
A substrate storage container characterized by the above. The valve biasing body,
A biasing body,
An elastic portion for urging the valve body,
A shaft portion for guiding the valve body,
A communication opening through which the gas passes,
The substrate storage container according to claim 1, wherein: The block body is
A valve storage space for storing the valve body,
A valve seat surface on which the valve element is seated,
A fitting groove into which the biasing main body is fitted,
A fitting hole into which the shaft portion is fitted,
A communication hole that connects the outside and the inside of the container body,
The substrate storage container according to claim 2, wherein: The valve body is
A valve body seated on the valve seat surface,
A rib biased by the elastic portion,
A guide hole that is movably inserted into the shaft portion,
The substrate storage container according to claim 3, wherein: The valve body has a curved surface to be seated on the valve seat surface,
The substrate storage container according to claim 4, wherein. The block body is made of an elastic material,
The valve biasing body is made of a resin material,
The substrate storage container according to any one of claims 1 to 5, characterized in that.

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