JP2020080360A - Substrate housing container - Google Patents

Abstract

To provide a substrate housing container that can easily accommodate substrates with different diameters.SOLUTION: A substrate housing container 1 includes a container body 10 having an opening 11 on the front, a substrate support portion 30 provided on a rear wall 10b opposite to the opening 11, a lid 20 that closes the opening 11, and a substrate pressing portion 50 provided on the lid 20, and the substrate supporting portion 30 includes a substrate supporting piece 40 that supports a substrate W1, and a plurality of engaging portions 12, 13, and 14 provided on the back wall 10b, and it is possible to support the substrates W1, W2, and W3 having different diameters by making it possible to select the engagement position between the substrate supporting piece 40 and the engaging portions 12, 13, and 14.SELECTED DRAWING: Figure 6

Description

  The present invention relates to a substrate storage container that stores a plurality of substrates.

  Substrate storage containers store substrates such as semiconductor wafers in an internal space and are used for storage in warehouses, transportation between semiconductor processing devices, transportation between factories, and the like. For this reason, the substrate storage container is designed to protect the stored substrate from vibration, shock, and the like during transportation.

  By the way, in the semiconductor manufacturing process, since a plurality of substrates are processed or transported in the same batch process, a plurality of substrates having the same diameter are stored in the substrate storage container. May be different.

  Therefore, for example, in Patent Document 1, in a substrate storage container that includes a container body having an opening on the front surface and a lid that closes the opening of the container body, a substrate position restricting body provided on the back side of the container body. It is disclosed that a substrate pressing portion provided on the lid body is further provided, and by changing the mounting position of the substrate position restricting body, substrates of different diameters can be stored.

JP, 2013-182938, A

  However, in such a substrate storage container, the substrate position restricting body is inserted and fixed in a plurality of insertion holes formed in the top wall and the bottom wall of the container body, but airtightness is required. In the substrate storage container, it is necessary to insert and fix a dummy member in an unused insertion hole. Therefore, when changing the insertion position of the substrate position restricting body so that substrates with different diameters can be stored, the number of work steps is large and inefficient, and since the insertion hole penetrates the container body, it is airtight. Measures were also needed.

  Therefore, the present invention has been made in view of the above problems, and an object of the present invention is to provide a substrate storage container that can easily accommodate substrates of different diameters.

(1) One aspect according to the present invention is a container main body having an opening in a front surface, a substrate support portion provided on a rear wall opposite to the opening, a lid body closing the opening, and the lid. A substrate holding container provided with a substrate holding part provided on the body, wherein the substrate supporting part has a substrate supporting piece for supporting a substrate, and an engaging part provided on the back wall, By making it possible to select the separation distance from the tip of the substrate support piece to the substrate pressing portion, it is possible to support substrates having different diameters.
(2) Another aspect according to the present invention is a container main body having an opening on the front surface, a substrate support portion provided on a back wall opposite to the opening, and a lid for closing the opening. A substrate storage container comprising: a substrate pressing portion provided on the lid, wherein the substrate supporting portion includes a substrate supporting piece for supporting a substrate, and a plurality of engaging portions provided on the back wall. By making it possible to select the engaging position between the substrate supporting piece and the engaging portion, substrates having different diameters can be supported.
(3) In the above aspect (1) or (2), the substrate support piece may be provided with an engaged portion that detachably engages with the engaging portion.
(4) In any one of the above aspects (1) to (3), the substrate support portion has a plurality of substrate support pieces having different lengths protruding from the substrate support piece toward the inner surface of the lid. May have.
(5) In the aspect of the above (4), an offset member arranged between the substrate supporting piece and the engaging portion may be further provided.
(6) In any one of the above aspects (1) to (5), the substrate supporting portion is based on a plane that is orthogonal to a plane in which the opening extends and that passes through the center of the accommodated substrate. A pair may be symmetrically arranged.
(7) In any one of the above aspects (1) to (6),
The substrate support piece may be formed of a material having a lower friction property than the material forming the container body.

  According to the present invention, it is possible to provide a substrate storage container that can easily accommodate substrates having different diameters.

It is a disassembled schematic perspective view which shows the board|substrate storage container of 1st Embodiment. It is a horizontal sectional view showing a substrate storage container of a 1st embodiment. FIG. 6A is an enlarged vertical cross-sectional view of the substrate supporting portion and FIG. 4B is an enlarged vertical cross-sectional view of the substrate mounting portion showing a substrate mounting state in the substrate storage container with the lid removed. 4A is an enlarged vertical cross-sectional view of a substrate supporting portion, FIG. 4B is an enlarged vertical cross-sectional view of a substrate mounting portion, and FIG. 4C is an enlarged vertical cross-sectional view of a substrate pressing portion. It is a horizontal sectional view showing the state where the substrate of the intermediate diameter was stored in the substrate storage container of the first embodiment. It is a horizontal sectional view showing the state where the substrate of large diameter was stored in the substrate storage container of a 1st embodiment. It is a horizontal sectional view showing the state where a substrate with a small diameter was stored in a substrate storage container of a 1st embodiment. It is a horizontal sectional view showing the state where a substrate with a small diameter was stored in a substrate storage container of a 1st embodiment using an auxiliary support piece. It is a horizontal sectional view showing a substrate storage container of a 2nd embodiment. It is a horizontal sectional view showing the state where the substrate of the intermediate diameter was stored in the substrate storage container of the second embodiment. It is a horizontal sectional view showing the state where the substrate of large diameter was stored in the substrate storage container of a 2nd embodiment. It is a horizontal sectional view showing the state where an offset member is attached to a substrate support piece of a 2nd embodiment.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the embodiments of the present specification, the same members are designated by the same reference numerals throughout.

(First embodiment)
First, the substrate storage container 1 will be described. FIG. 1 is an exploded schematic perspective view showing a substrate storage container 1 of the first embodiment. FIG. 2 is a horizontal sectional view showing the substrate storage container 1 of the first embodiment. In FIG. 1, when the substrate storage container 1 in which the surface of the substrate W is horizontally stored is viewed from the lid body 20 side, the horizontal direction is the X axis direction, the vertical direction is the Z axis direction, and the lid body 20 and the back surface. The front-rear direction connecting the wall 10b is defined as the Y-axis direction. Also in the following figures, the X axis, the Y axis, and the Z axis are shown as necessary. Further, in FIG. 2, the substrate supporting piece 40 of the substrate supporting portion 30 is omitted.

  The substrate storage container 1 shown in FIG. 1 stores a plurality of substrates W, and includes a container body 10 and a lid 20. The substrate W stored in the substrate storage container 1 is, for example, a semiconductor wafer or mask glass having a diameter of 300 mm or 450 mm, but is not limited to this.

  The container body 10 is a box-shaped one including an opening frame 10a forming a front opening 11, a back wall 10b, a right side wall 10c, a left side wall 10d, a top wall 10e, and a bottom wall 10f, It is a so-called front open type.

  The container body 10 is provided with a pair of substrate support portions 30 and a pair of substrate placement portions 60 for mounting or supporting the substrate W (see also FIG. 2).

  The substrate support portions 30 are provided on the left and right sides of the rear wall 10b and on the rear wall 10b side behind the substrate mounting portion 60. More specifically, the substrate supporting portions 30 are provided in a pair symmetrically with respect to a plane that is orthogonal to the plane in which the opening 11 extends and that passes through the center of the accommodated substrate W. Further, as will be described later in detail, the substrate supporting portion 30 has a substrate supporting piece 40 that supports the substrate W (see FIG. 5 and the like), and the substrate supporting piece 40 has a plurality of grooves in the height direction. Are formed.

  On the other hand, the substrate platform 60 is formed so as to face two insides of the right side wall 10c and the left side wall 10d. Further, the substrate mounting portion 60 is configured by so-called groove teeth, and is configured by a plurality of grooves formed in the height direction. Then, the substrate W is inserted and stored in each groove. The number of grooves of the substrate supporting portion 30 and the number of grooves of the substrate mounting portion 60 are the same.

  Next, the lid 20 closes the opening 11 of the container body 10 to form an internal space of the substrate storage container 1. Further, a packing (not shown) is arranged between the container body 10 and the lid 20. When the lid 20 is attached to the container body 10, the packing can ensure the airtightness of the substrate storage container 1 and reduce the intrusion of dust, moisture and the like from the outside into the substrate storage container 1.

  The lid 20 is provided with a substrate pressing portion 50 in the center of the lid 20 in the X-axis direction. The substrate pressing unit 50 has an arm member 52 that presses the substrate W, and a plurality of the arm members 52 are vertically formed according to the number of substrates W that can be stored.

  Each arm member 52 is formed at two places along the X-axis direction, and holds and supports the substrate W at these two places. The arm member 52 is, for example, elastically deformable, and when the opening 11 of the container body 10 is closed by the lid 20, the elasticity causes the contact portion 51 at the tip end to contact the substrate W, and the substrate W is placed on the back surface. It is designed to be pressed toward the wall 10b side.

  The contact portions 51 are provided at the tips of the two arm members 52, respectively. However, for example, two contact portions 51 may be provided on one arm member 52, for a total of four contact portions. In this case, the substrate W is normally supported by the two inner or outer contact portions 51. However, in order to prevent the substrate W from being damaged or dropped from the supported state due to an impact when the substrate storage container 1 is transported, the substrate W is momentarily supported. The remaining two contact portions 51 may be supported.

  The arm member 52 may have a left-right independent structure, that is, not a cantilever structure extending from the lid 20, but a double-end structure in which the contact portions 51 are connected by a connecting member.

  Examples of the material of the container body 10 and the lid body 20 include thermoplastic resins such as polycarbonate, cycloolefin polymer, polyetherimide, polyetherketone, polyetheretherketone, polybutylene terephthalate, polyacetal, liquid crystal polymer and alloys thereof. Is mentioned.

  The same material as the container body 10 can be used as the material of the substrate support portion 30, but in particular, as the material of the substrate support piece 40, the container body 10 is formed in order to improve the slipperiness of the substrate W. It may be formed of a material having a lower friction property than that of the above-mentioned material, or may contain an additive.

  As the material of the substrate pressing portion 50, the same material as that of the lid body 20 can be used, but like the substrate supporting portion 30, the container body 10 is formed in order to improve the slipperiness of the substrate W. It may be formed of a material having a lower friction property than that of the material or may contain an additive.

  The same material as the container body 10 can be used as the material of the substrate mounting portion 60, but like the substrate support portion 30 described above, the container body 10 is formed to improve the slipperiness of the substrate W. It may be formed of a material having a lower friction property than that of the above-mentioned material, or may contain an additive.

  Here, the storage state of the substrate W in the substrate storage container 1 when the lid body 20 is removed from the container body 10, and the state of the substrate W in the substrate storage container 1 when the lid body 20 is attached to the container body 10. The stored state will be described. 3A and 3B are (a) an enlarged vertical cross-sectional view of the substrate supporting portion 30 and (b) an enlarged vertical cross-sectional view of the substrate placing portion 60 showing the placement state of the substrate W in the substrate storage container 1 with the lid 20 removed. is there. 4A and 4B show a support state of the substrate W in the substrate storage container 1. FIG. 4A is a vertical sectional enlarged view of the substrate supporting portion 30, FIG. 4B is a vertical sectional enlarged view of the substrate mounting portion 60, and FIG. FIG.

  When the substrate W is stored in the container body 10, the substrate W is inserted into the grooves of the same height of the pair of substrate mounting portions 60 facing each other through the opening 11 on the front surface of the container body 10, and the pair of left and right substrate mounting portions is provided. Only by 60, the substrate W is accommodated in a state in which the surface of the substrate W is placed in the horizontal direction (see FIG. 3). When the substrate W is placed only by the substrate placing section 60, the rear wall 10b side of the substrate W does not come into contact with (below the V-shaped groove formed in the substrate supporting piece 40) the substrate supporting section 30.

  Then, when the lid 20 is attached to the container body 10 from the state where the substrate W is placed only by the substrate placing section 60, the substrate W is sandwiched between the substrate supporting section 30 and the substrate holding section 50, The substrate W is lifted from the substrate platform 60 and supported by the substrate retainer 50 and the substrate support 30 (see FIG. 4).

  More specifically, a V-shaped groove is formed in the substrate holding part 50 (see FIG. 4C), and when the lid 20 is attached to the container body 10, the front side of the substrate W is the substrate holding part. It is designed to fit in the V-shaped groove of 50. After that, when the substrate W is pushed backward by the substrate pressing portion 50, the substrate W is V-shaped in the substrate supporting portion 30 from the state shown in FIG. 3A to the state shown in FIG. 4A. Slide up the groove to reach the bottom of the V-shaped groove.

  In this way, the substrate W stored in the substrate storage container 1 is supported by the substrate supporting unit 30 and the substrate pressing unit 50 while being lifted from the substrate mounting unit 60. Then, when the lid 20 is removed from the container body 10, the substrate W is placed only by the substrate placing section 60.

  By the way, the board|substrate support part 30 has the board|substrate support piece 40 which supports the board|substrate W, and several engaging parts 12, 13, 14 provided in the back surface wall 10b (refer FIG. 2).

FIG. 5 is a horizontal cross-sectional view showing a state where the substrate W2 having the intermediate diameter D2 is stored in the substrate storage container 1 of the first embodiment. FIG. 6 is a horizontal sectional view showing a state where the substrate W1 having the large diameter D1 is stored in the substrate storage container 1 of the first embodiment. FIG. 7 is a horizontal cross-sectional view showing a state where the substrate W3 having the small diameter D3 is stored in the substrate storage container 1 of the first embodiment. FIG. 8 is a horizontal cross-sectional view showing a state where the substrate W3 having the small diameter D3 is stored in the substrate storage container 1 of the first embodiment using the auxiliary support piece 70.
However, it is assumed that the substrate storage container 1 is manufactured to have a size within a range defined by the SEMI standard when a substrate W2 having a diameter D2 (for example, a wafer having a diameter of 300 mm) is stored. Further, the expressions of the large diameter D1, the intermediate diameter D2, and the small diameter D3 only indicate the relative size of the diameter D2 with respect to the substrate W2, and the diameter D of the different substrate W is the above three types. It is not limited.

  First, the substrate support piece 40 is formed of a plurality of grooves arranged in the height direction, and the engaging portion 13 formed between the engaging portion 12 and the engaging portion 12 and the groove portion 41 that contacts the substrate W. To be engaged with. The substrate support piece 40 has a length L such that the substrate support piece 40 can appropriately support the substrate W2 having the intermediate diameter D2 when engaged with the engagement portion 13 formed between the engagement portion 12 and the engagement portion 14. Is set to.

  Next, the plurality of engaging portions 12, 13, 14 make it possible to select an engaging position for engaging the substrate supporting piece 40, and thus a plurality of substrates W1, W2, W3 having different diameters D1, D2, D3. Can be supported, and they are formed in the same shape so as to project from the rear wall 10b toward the opening 11 side.

  The engaging portion 13 is formed within the range of the installation position of the substrate supporting portion 30 defined by the above-mentioned SEMI standard. For example, when the lid 20 is viewed from the front, the engaging portion 13 exists in a range of 0 mm or more and 125 mm or less in the left-right direction from the center line in the vertical direction (Z-axis direction) that passes through the center of the container body 10. Good. However, the center of the container body 10 is a position corresponding to the center of the substrate W stored in the substrate storage container 1.

  In other words, it is preferable that the engagement portion 13 exists at least in the range of 0 mm or more and 125 mm or less in the left-right direction from the center line in the front-rear direction (Y-axis direction) that passes through the center of the container body 10.

  In addition, the engagement portion 12 can be handled by replacing the same substrate support piece 40 from the engagement portion 13 to the engagement portion 12 when the substrate W1 having the large diameter D1 is stored in the substrate storage container 1. It is formed at a position separated from the joining portion 13 by a distance P1 (see FIG. 2). This distance P1 can be calculated from the difference between the large diameter D1 and the intermediate diameter D2.

  Further, similarly, the engagement portion 14 can also be adapted by replacing the same substrate support piece 40 from the engagement portion 13 to the engagement portion 14 when the substrate W3 having the small diameter D3 is stored in the substrate storage container 1. , Is formed at a position separated from the engaging portion 13 by a distance P3 (see FIG. 2). This distance P3 can be calculated from the difference between the small diameter D3 and the intermediate diameter D2.

  In the present embodiment, the engaging structure that detachably engages the engaging portions 12, 13, 14 and the engaged portion 42 has a ridge that continuously extends from the top wall 10e to the bottom wall 10f, and a groove. However, the engagement structure is not limited to this, and may be, for example, a ridge that extends intermittently.

  With such a configuration of the substrate supporting portion 30, (1) when the substrate W1 having the large diameter D1 is stored in the substrate storing container 1, the substrate supporting piece 40 is engaged with the engaging portion 12, and (2) the intermediate diameter. When the substrate W2 of D2 is stored in the substrate storage container 1, the substrate support piece 40 is engaged with the engaging portion 13, and (3) when the substrate W3 of the small diameter D3 is stored in the substrate storage container 1, the substrate support is supported. By engaging the piece 40 with the engaging portion 14, that is, by selecting the engagement position of the substrate supporting piece 40, the substrate storage container 1 is provided with a plurality of substrates W1, W2, W2 having different diameters D1, D2, D3. W3 can be supported. By selecting the engagement position of the substrate support piece 40, the separation distance from the tip of the substrate support piece 40 to the substrate pressing portion 50 can also be selected.

  By the way, as shown in FIG. 8, an auxiliary supporting piece 70 having a length L2 different from the length L of the substrate supporting piece 40 is engaged with the vacant engaging portion 12, and the auxiliary supporting piece 70 is provided on the rear wall 10b side. It is preferable to support the substrate support piece 40 or the auxiliary support piece 70 at two places and the substrate holding portion 50 at two places because the substrate W3 can be more stably supported. The auxiliary support piece 70 also has a contact portion 71 and an engaged portion 72, similarly to the substrate support piece 40.

  As described above, the substrate storage container 1 according to the first embodiment of the present invention includes the container body 10 having the opening 11 on the front surface, and the substrate support portion 30 provided on the back wall 10b opposite to the opening 11. The substrate storage container 1 includes a lid 20 that closes the opening 11, and a substrate retainer 50 that is provided in the lid 20, and the substrate support 30 includes a substrate support piece 40 that supports the substrate W. , A plurality of engaging portions 12, 13, 14 provided on the back wall 10b, and by making it possible to select an engaging position between the substrate supporting piece 40 and the engaging portions 12, 13, 14, The substrates W1, W2, W3 having different diameters D1, D2, D3 can be supported.

  Thereby, as seen in Patent Document 1, there is no need to perform work from the inside and the outside of the container body 10, there is no need to form a hole that penetrates the container body 10 from the inside to the outside, and By performing a simple operation of changing the engaging position of the substrate support piece 40, the substrates W1, W2, W3 having different diameters D1, D2, D3 can be stored in the substrate storage container 1. Further, for example, in the case of the substrate storage container 1 manufactured to store the substrate W2 having a diameter of 300 mm, the substrate W1 having a maximum diameter of 330 mm can be stored by changing the engaging position of the substrate support piece 40. It will be possible.

(Second embodiment)
Next, the substrate storage container 1B of the second embodiment will be described. In the substrate storage container 1B of the second embodiment, the shape of the substrate support portion 130 is different from that of the first embodiment, and the other portions are the same as those of the first embodiment, so description will be omitted as appropriate. .
FIG. 9 is a horizontal sectional view showing the substrate storage container 1B of the second embodiment. FIG. 10 is a horizontal cross-sectional view showing a state where the substrate W4 having the intermediate diameter D4 is stored in the substrate storage container 1B of the second embodiment. FIG. 11 is a horizontal sectional view showing a state in which a substrate W5 having a large diameter D5 is stored in the substrate storage container 1B of the second embodiment.

  As shown in FIG. 9, the substrate support portion 130 has engaging portions 112 formed on the left and right sides of the rear wall 10b on the rear wall 10b side behind the substrate mounting portion 60.

  Further, the substrate supporting portion 130 has a substrate supporting piece 140 that supports the substrate W4 having the intermediate diameter D4 and a substrate supporting piece 240 that supports the substrate W5 having the large diameter D5 (see FIGS. 10 and 11). It is assumed that the substrate storage container 1B of the second embodiment is manufactured according to the size of the substrate W4 having the intermediate diameter D4, but the substrate W4 having the intermediate diameter D4 has the intermediate diameter D2 of the first embodiment. It may be the same as or different from the substrate W2. The relationship between the substrate W5 having the large diameter D5 and the substrate W1 having the large diameter D1 is also the same.

  The substrate support piece 140 and the substrate support piece 240 are formed by a plurality of grooves arranged in the height direction, and the groove portions 141 and 241 contacting the substrate W and the engaged portions 142 engaged with the engaging portion 112, And 242, respectively.

  The groove portion 141 is set to have a radius of curvature R4 (=[D4]/2) that can appropriately support the substrate W4 having the intermediate diameter D4 when the substrate support piece 140 is engaged with the engagement portion 112. . Similarly, the groove 241 is set to have a radius of curvature R5 (=[D5]/2) that can appropriately support the substrate W5 having the large diameter D5 when the substrate support piece 240 is engaged with the engagement portion 112. Has been done. However, most of the grooves 141 and 241 do not need to contact and support the corresponding substrates W4 and W5, and have a length that does not drop out or shift when supporting the substrates W4 and W5. It suffices to have and support it, and for the same reason, the curvature radii R4 and R5 may adopt any value other than the above.

  In addition, the substrate support pieces 140 and 240 have a height protruding from the rear wall 10b toward the lid body 20 (or the substrate holding portion 50), that is, a position farthest from the lid body 20 in the groove portions 141 and 241. The heights H4 and H5 are also different.

  With such a configuration of the substrate support portion 130, (4) when the substrate W4 having the intermediate diameter D4 is stored in the substrate storage container 1B, the substrate support piece 140 is engaged with the engagement portion 12, and (5) large diameter When the substrate W5 of D5 is stored in the substrate storage container 1B, the substrate supporting piece 240 is engaged with the engaging portion 12, that is, the separation distance from the tips of the substrate supporting pieces 140 and 240 to the substrate holding portion 50 is set. By making it selectable, the substrate storage container 1B can support a plurality of substrates W4, W5 having different diameters D4, D5.

  As described above, the substrate storage container 1B according to the second embodiment of the present invention includes the container body 10 having the opening 11 on the front surface, and the substrate supporting portion 130 provided on the back wall 10b opposite to the opening 11. A substrate storage container 1B including a lid body 20 that closes the opening 11 and a substrate holding portion 50 provided on the lid body 20. The substrate support portion 130 includes a substrate support piece 140 that supports the substrate W, 240 and the engaging portion 112 provided on the back wall 10b, and by making it possible to select the separation distance from the tips of the substrate supporting pieces 140, 240 to the substrate pressing portion 50, the diameters D4, D5 of This makes it possible to support different substrates W4 and W5.

  Thereby, as seen in Patent Document 1, there is no need to perform work from the inside and the outside of the container body 10, there is no need to form a hole that penetrates the container body 10 from the inside to the outside, and By performing a simple operation of replacing the substrate support pieces 140 and 240, the substrates W4 and W5 having different diameters D4 and D5 can be stored in the substrate storage container 1B.

  Although the preferred embodiments of the present invention have been described in detail above, the present invention is not limited to the above-described embodiments, and various modifications within the scope of the gist of the present invention described in the claims. It can be changed.

(Modification)
In each of the above embodiments, the substrate platform 60 may be integrally formed with the container body 10 or may be attached to the container body 10 as a separate component.

  In the second embodiment, the offset member 370 may be attached to the substrate supporting piece 240 having the height H5 to temporarily set the height H5 of the substrate supporting piece 240 to the height H4. FIG. 12 is a horizontal sectional view showing a state where the offset member 370 is assembled to the substrate support piece 240 of the second embodiment.

  The offset member 370 is disposed between the substrate supporting piece 240 and the engaging portion 112, and is arranged between the second engaging portion 371 that engages with the engaged portion 242 of the substrate supporting piece 240 and the container body 10. A second engaged portion 372 that engages with the engaging portion 112 is formed.

  At this time, it is preferable that the groove portion 241 of the substrate support piece 240 has a shape in which two radii of curvature R4 and R5 are combined, but it is formed with either one of the radii of curvature R4 and R5 and comes into contact with the substrates W4 and W5. The areas may be different.

  The offset member 370 may be applied to the substrate support portion 30 of the first embodiment.

1,1B Substrate storage container 10 Container body, 10a Opening frame, 10b Rear wall, 10c Right sidewall, 10d Left sidewall, 10e Top wall, 10f Bottom wall, 11 Opening 12,13,14 Engaging portion 20 Lid 30 Substrate support Section 40 Substrate support piece, 41 Groove section, 42 Engagement section 50 Substrate pressing section, 51 Contact section, 52 Arm member 60 Substrate placement section 70 Auxiliary support piece, 71 Contact section, 72 Engagement section 112 Engagement section 130 Substrate supporting portion 140 Substrate supporting piece, 141 groove portion, 142 Engagement portion 240 Substrate supporting piece, 241 groove portion, 242 Engagement portion 370 Offset member, 371 Second engagement portion, 372 Second engaged portion Wn Substrate

Claims (7)

A container body having an opening on the front,
A substrate supporting portion provided on the back wall opposite to the opening,
A lid for closing the opening,
A substrate container provided with a substrate pressing portion provided on the lid,
The substrate support portion, a substrate support piece for supporting the substrate,
An engaging portion provided on the back wall,
By making it possible to select the separation distance from the tip of the substrate support piece to the substrate pressing portion, it is possible to support substrates having different diameters,
A substrate storage container characterized by the above. A container body having an opening in the front,
A substrate supporting portion provided on the back wall opposite to the opening,
A lid for closing the opening,
A substrate storage container comprising: a substrate pressing portion provided on the lid,
The substrate support part, a substrate support piece for supporting the substrate,
A plurality of engaging portions provided on the back wall,
By making it possible to select the engagement position between the substrate support piece and the engagement portion, it is possible to support substrates having different diameters.
A substrate storage container characterized by the above. The board supporting piece is provided with an engaged portion that is detachably engaged with the engaging portion,
The substrate storage container according to claim 1 or 2, characterized in that. The substrate support portion has a plurality of substrate support pieces having different lengths protruding from the substrate support piece toward the inner surface of the lid body,
The substrate storage container according to any one of claims 1 to 3, wherein the substrate storage container is a substrate storage container. Further comprising an offset member arranged between the substrate support piece and the engaging portion,
The substrate storage container according to claim 4, wherein. The substrate support portions are arranged in a pair symmetrically with respect to a plane that is orthogonal to a plane in which the opening extends and that passes through the center of the accommodated substrate.
The substrate storage container according to any one of claims 1 to 5, wherein The substrate support piece is formed of a material having a lower friction than the material forming the container body,
The substrate storage container according to any one of claims 1 to 6, characterized in that.

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