JP2020076875A - Lens alignment device and lens alignment method - Google Patents

Abstract

To solve such problems that, when a lens is aligned (especially, in a case of aligning a high output laser), while oscillating a laser diode, a temperature of a lens holding part increases due to stray light, etc. and the lens holding part thermally expands, and that, when a position of the lens holding part is changed by thermal expansion, the laser beam becomes invisible from a visual field range of an observation camera, and it becomes impossible to align the lens according to a lens alignment flow.SOLUTION: A lens holding part is comprised of a member with a small linear expansion coefficient, or a heat insulating material is installed at an appropriate position in a stage so as not to transfer heat from a temperature rise portion near the lens to the stage or a device mechanism part. Alternatively, an amount of thermal expansion of the alignment device is calculated from a measurement result of a temperature sensor installed in the alignment device to perform control of moving the position of the lens holding part by the measured amount.SELECTED DRAWING: Figure 2

Description

  The present application relates to a lens alignment device and a lens alignment method.

  A laser diode (hereinafter sometimes abbreviated as LD) is combined with an optical component such as a lens to convert divergent light into parallel light or condensed light, and is used in various devices. Here, the optical axes of the LD and the optical components such as the lens are adjusted by adjusting the lens position so that the observed image has an optimum position or an optimum shape when the light beam image after passing through the lens is observed by a camera or the like. ing.

JP 2008-283117 A (FIG. 4)

When aligning the lens while oscillating the LD, particularly when aligning a high-power laser, the temperature of the lens gripping portion rises and thermally expands due to stray light or the like.
If the installation position of the lens gripper moves due to thermal expansion, the light beam may be out of the field of view of the observation camera installed in the irradiation direction, and the light beam may not be visible, so alignment can be performed according to the optical axis alignment flow. Disappear.

  At the time of alignment, it is necessary to accurately match the beam width, position, brightness, and beam overlap (beam overlap between the emitters of the LD bar) of the laser light. For that purpose, the lens position of the LD lens unit is adjusted by the 6-axis stage while acquiring the light beam emitted from the LD lens unit (lens attached to the LD) using an image sensor or the like. Align with. After highly accurate centering (position adjustment), the lens is fixed with an adhesive or the like so as not to be displaced with respect to the LD.

  However, with the recent increase in the output power of LDs or LD bars, when performing highly accurate lens alignment while irradiating a light beam, especially in the initial stage (immediately after the start) of the alignment of the lens, Since the proportion of stray light or the like of the light beam that does not enter strikes the lens grip portion, the temperature of the lens grip portion rises. The heat generated by this temperature rise is conducted to the outside from the lens holding portion during the lens alignment, so that the temperature of the entire lens holding mechanism rises and thermal expansion occurs. Due to this thermal expansion, the position of the lens grip changes, so if the amount of change is large, the light beam emitted from the LD or LD bar can be imaged by the image sensor observing the light beam. There were cases where the lens was out of the range and the lens alignment could not be performed.

  The present application discloses a technique for solving the above-mentioned problems, and by using a heat insulating material, it is possible to prevent heat from the vicinity of the lens grip portion from being conducted to the outer portion of the lens grip portion. By reducing the amount of change in the light beam position recognized by the sensor, the light beam is prevented from reaching the outside of the image sensor, and the centering work can be easily completed in a short time. The purpose is to realize.

The lens alignment device disclosed in the present application,
A lens for converting the light beam from the laser diode into parallel light or condensed light,
A lens gripper for gripping the lens,
A 6-axis stage that supports the lens gripping portion and changes the setting position of the lens gripping portion in order to align the lens;
A beam position acquisition unit that recognizes and stores the position of the converted light beam,
A stage controller for independently driving and controlling each stage, which is a component of the 6-axis stage,
A heat insulating material for blocking heat transfer from the lens gripping portion to the 6-axis stage or heat transfer between components of the 6-axis stage;
Adjusting the position of the lens gripper to align the lens by driving and controlling the stage controller based on the position information of the light beam of the beam position acquisition unit and the beam shape and brightness information. It is characterized by.

  According to the lens alignment device disclosed in the present application, by using the heat insulating material, it is possible to prevent heat from the vicinity of the lens gripping portion from being conducted to the outer portion of the lens gripping portion, and to detect the light beam position recognized by the image sensor. It is possible to realize a lens aligning device and a lens aligning method that prevent the light beam from reaching the outside of the image sensor and can easily complete the aligning work in a short time by reducing the amount of change.

6A and 6B are a top view and a side view for explaining a state in which an aligned lens is fixed to an LD package. FIG. 3 is a front view showing a lens alignment device for aligning a lens with the LD body according to the first embodiment. FIG. 3 is a side view showing a lens alignment device for aligning a lens with the LD body according to the first embodiment. It is a flowchart figure which shows an example of the centering method of the lens to LD main body. It is a figure which shows the amount of change of the position of a lens holding part by electricity supply to LD.

Embodiment 1.
An example of the lens alignment device according to the first embodiment will be described below with reference to the drawings.
FIG. 1 shows a state in which the lens 23, which is adjusted in position and aligned, is fixed to the laser diode package 14 by the adhesive layer 24 via the tab portion 25 that is in contact with the lens 23 and directly supports the lens. It is a figure for explaining. Here, the LD package 14 includes an LD body 13 (comprising an LD or an LD bar; the same applies to the following), a wire for conducting current to the LD body 13, or a conducting wire (not shown) such as a ribbon, and for cooling the LD body. The LD heat sink 12 of FIG. Further, FIG. 1A is a plan view showing a state after lens alignment, and FIG. 1B is a front view showing a state after lens alignment. As can be seen from FIG. 1B, the lens is often fixed at a position where the laser light emitted from the LD main body passes through substantially the center of the shape of the lens 23 (however, depending on the application). ).

FIG. 2 is a front view showing an example of a lens centering device for centering the lens 23 on the LD body 13 according to the first embodiment.
FIG. 3 is a side view showing an example of a lens centering device for centering a lens on the LD body according to the first embodiment.

  As shown in FIGS. 2 and 3, the LD package 14 has, as its components, an LD body 13 (that is, an LD or an LD bar) that serves as a light source, and a current (not shown) for supplying a current to the LD body 13. It has a lead wire such as a wire or a ribbon, and an LD heat sink 12 for cooling the LD body 13. The LD body 13 is mounted on the LD heat sink 12 and installed on the LD pedestal 11. The tab 23 of the lens 23 is gripped by the lens chuck 21, and the final position is adjusted after confirming the shape and position of the light beam emitted from the LD main body 13 and adjusting the position to the optimum position. Then, the adhesive layer 24 is cured by using the UV lamp 50 and is fixed to the LD heat sink 12.

Since the lens alignment device adjusts the lens while emitting the light beam, dust and the like may be burned by the light beam.Therefore, it is necessary to cover the entire device to prevent dust and the like from entering. is there. Therefore, as shown in FIGS. 2 and 3, the entire apparatus is covered with a platen cover 51.
Further, if there is vibration during the lens alignment, the position of the light beam changes and alignment becomes difficult. Therefore, each of the components of the lens alignment device is a surface plate 10 which is a seismic isolation table. It is installed on top of.
As described above, the lens centering device has a structure for preventing the influence of wind or the influence of vibration from the outside.

  Next, details of the lens alignment device will be described below. The lens alignment device has the configuration shown in FIGS. 2 and 3. As shown in these drawings, the lens alignment device includes a 6-axis stage 40 including a θy stage 41, a θz stage 42, a θx stage 43, a y stage 44, a z stage 45, an x stage 46, and a stage fixed. Lens bracket 20, a lens chuck 21, an air chuck mechanism 22, and a lens grip L bracket 31, a screen 61, a lens group 62, an image sensor (here, for example, a CCD camera). A beam position acquisition unit 64 configured by 63 and a UV lamp 50 are assumed. Here, the emitted light from the LD main body reaches the screen 61, the lens group 62, the image sensor 63, etc. along the laser optical path LB.

  At the tip of the 6-axis stage 40, there is a lens grip 20 that opens and closes with an air chuck, and the lens grip 20 grips the lens 23. Further, the 6-axis stage 40 is provided with a motor and an actuator (not shown) and is connected to the stage controller. By using the 6-axis stage 40, the lens 23 can be moved linearly in the x, y, and z directions and can be rotationally moved in the θx, θy, and θz directions to adjust the position of the lens. The six axes can be adjusted independently using each stage.

  Here, the directions of the axes are based on the LD heat sink surface having the adhesive layer of the lens as a reference, and the directions orthogonal to each other on the surface are x and y directions, and the z direction is a direction orthogonal to these x and y directions. And the θx, θy, and θz directions are the directions of rotation around these axes about the x-axis, the y-axis, and the z-axis, which are axes indicating the x, y, and z directions, respectively. It is set.

  When there is no heat insulating material 70 between the components of the 6-axis stage 40, the LD is caused to emit light, the light is passed through the lens, and the position of the lens is moved by the 6-axis stage 40 while confirming the shape and position of the beam. When the centering is started by doing so, the lens chuck 21 and the like are warmed by the light beam that does not particularly pass through the lens immediately after the start, and the heat is transmitted to the entire lens centering device, so that the entire lens centering device may be expanded, and in particular 100 W When the above high-power LD is used as a light source, it is assumed that the frequency will increase.

  Therefore, in the present embodiment, the z-stage 45 and the stage-fixing L bracket are used by using the stage-fixing L bracket 32 arranged in a portion connecting the z-stage 45 and the x-stage 46 that form the 6-axis stage 40. For example, the heat insulating material 70 a is inserted between 32.

  As described above, when the heat insulating material 70 (here, the heat insulating material 70a) is inserted, an effect of preventing the expansion of the entire lens alignment device, particularly the displacement in the y direction, can be expected. In particular, it has an effect of preventing heat from being transferred to the stage-fixing L bracket 32 that is largely displaced in the y direction when thermally expanded due to the size effect. By inserting the heat insulating material 70, particularly the lens chuck 21 portion is heated. Since it is possible to reduce the amount of change in the position due to the influence of, the position of the lens can be adjusted according to the alignment procedure.

  In the above, the heat insulating material 70 may be inserted in any place where the effect is great depending on the configuration of the aligning device, and is not limited to the installation place shown in FIG. Further, the place to be inserted is not fixed to the above-mentioned one place, but may be inserted, for example, between the θy stage 41 and the lens holding L bracket 31 (here, the heat insulating material 70b is inserted). Further, it is not necessary to limit the insertion position of the heat insulating material to only one place, and both of the heat insulating material 70a and the heat insulating material 70b may be simultaneously inserted into the above described places. The detailed reason for this will be described later.

As described above, by using the heat insulating material 70, it is possible to prevent heat transfer from the vicinity of the lens gripping part from being conducted to other parts other than the lens gripping part, and to reduce the amount of lens position change.
However, at a position that is too close to the lens 23 (for example, a position closer to the lens 23 than the lens-holding L bracket), there is a possibility that heat may be trapped in this lens gripping portion, so that the heat insulating material 70 of It is better to avoid placement.

  In the above, as a main material of the heat insulating materials 70, 70a, 70b, borate-based binders, phosphate-based binders, heat-resistant epoxy resins, iso-based unsaturated polyesters, cements, glass fibers and the like can be mentioned.

Next, the process of using the heat insulating material in the centering of the lens will be described below.
In the actual alignment, power is supplied to the LD package 14 and a light beam is emitted. When the light beam is emitted, although depending on the initial position of the lens 23, more than half of the light emitted from the LD main body 13 enters the lens 23, and the remaining light is diffused to the LD peripheral portion, and the diffused light is Particularly, when the lens chuck 21 is hit, the temperature of the portion hit by the diffused light rises. Further, as shown in the figure, since the aligning device is covered with the surface plate cover 51 for dustproofing, the air in the surface plate cover is also heated at the same time, and the temperature of the entire device is gradually increased.

  In this case, when the temperature of the lens chuck 21 portion rises, the heat is transferred to other portions of the lens alignment device, and the temperature of that portion gradually rises.

After that, the position of the lens 23 is adjusted one axis at a time using the 6-axis stage 40 in accordance with the alignment procedure and moved to the optimum position.
During this adjustment, the temperature of the entire lens centering device rises, so that thermal expansion occurs and the position of the lens chuck 21 moves. Then, even if each axis is adjusted to the optimum position and the adjustment of the next axis is started, the position of the lens chuck 21 changes due to the influence of this thermal expansion, which leads to the position of the lens 23 deviating from the optimum adjustment position. ..

With this, even if the shape and position of the light beam are adjusted to the optimum according to the procedure of lens alignment, each axis is displaced by thermal expansion, and as a result, each axis does not converge to the optimum position. And the alignment work is not completed.
Therefore, it is necessary to prevent the lens chuck 21 from being affected by thermal expansion, and the heat insulating material 70 is used for that purpose.

  By the way, in the adjustment of the lens, the light emitted from the LD is used as a monitor. In practice, however, electric power is supplied to the LD package 14 and one rectangular light beam emitted from the LD body is emitted to the LD bar. It employs a method of emitting light in the z direction as many as the number of emitters of the mounted LDs.

  In adjusting the lens, it is necessary to confirm the shape and position of the light beam. Therefore, as shown in FIG. 3, the screen 61, the lens group 62, and the image sensor 63 are installed in this order in the z direction in which the light beam is irradiated. At this time, the center position of the shape of the image sensor is set at the optimum position of the light beam after position adjustment so that the target light beam position and the amount of deviation from the position can be easily understood. Instead of the screen 61, a light reducing means such as an ND filter may be used to form the light beam on the image sensor.

  Further, in FIG. 2, the UV lamp 50 is installed so that the entire adhesive layer 24 is uniformly irradiated with ultraviolet rays. After adjusting the lens 23 to the optimum position by using this ultraviolet ray, the adhesive layer 24 is cured and the lens 23 is fixed to the LD heat sink 12 via the tab portion 25. After fixing the lens 23, the lens chuck 21 releases the air chuck of the lens 23.

  Next, the outline of the lens alignment procedure will be described below. The lens alignment method in this case will be described with reference to the flowchart shown in FIG. This flowchart is an example of the procedure when using a FAC lens (FAC is an abbreviation for fast axis collimation) which is a cylindrical lens that collimates the LD in the fast axis direction in order to efficiently collect light from the LD bar. (If using other lenses, the flow chart will be different). The lens used for lens alignment may be one that can withstand the high output of the LD (for example, a glass material or a coated one). Hereinafter, steps for aligning the FAC lens on the assumption that the FAC lens is used will be sequentially described.

First, the air chuck mechanism 22 of the lens chuck 21 grips the tab portion 25 that is in contact with the lens 23 and directly supports the lens.
Then, the lens 23 is moved to the alignment start position.

Next, with respect to the y-direction position of the lens 23, the y stage 44 is used so that the emitter of the LD body 13 comes to a position where the outer shape of the lens 23 is assumed to be the optical center. The reason for this is that the LD is thick and the active layer emits light, so that this emitter portion becomes the starting point of light spreading. Therefore, if the lens center is placed at this portion, almost all the emitted light enters the lens, and stray light can be reduced.
Further, in order to match the shape center position of the lens with the shape center position of the LD, the position of the lens 23 in the x direction is set to the center position of the outer shape of the lens 23 in the x direction by using the x stage 46. Arrange so that the center positions of the outer shapes are aligned.

Further, the position of the lens 23 in the z direction is set at a position (actually, several tens of μm depending on the lens to be used) apart from the LD front end face 13a (see FIG. 1) by using the z stage 45 (actually). In this case, it is installed so that it is about 10 μm away from this place). The reason for this is to prevent the lens from accidentally colliding with the LD end face during the alignment work.
It should be noted that θx is adjusted by using the θx stage 43 so that the tangent line of the arc of the radius of curvature of the lens 23 is parallel to the front end face of the LD body 13.
Here, the outer shape of the lens 23 and the outer shape of the LD body may be visually checked, or may be moved to the initial position while checking an image with a CCD camera (not shown) or the like.

  Next, the LD package is supplied with power and irradiated with a light beam. If a large current (a current value of about 80% of the current that can be input to the LD body. For example, 150 A to 220 A. The same applies below) is passed when the position adjustment of the lens is not completed, the light beam advances in a direction that is not expected. Since there is a possibility that a place not to be heated may be heated, first, a small current (a value that is about 10% larger than the minimum threshold current value at which the LD body starts oscillating, for example, 30 A to 50 A. The same applies below), The lens position is adjusted based on the beam image obtained by the image sensor 63 after the beam passes through the screen 61 and the lens group 62.

  Then, from the beam image obtained by the image sensor 63, it is determined whether to start the subsequent axis alignment in the alignment flow according to the beam width, the brightness, and the beam position. When the LD body 13 is an LD bar, that is, when there are a plurality of emitters, the light beam distribution and position of each emitter are confirmed in addition to the beam width, brightness, and beam position.

  Based on the image obtained by the image sensor 63, when one light beam position or the light beam position of each emitter is at different positions on the left and right when viewed from the center, that is, the light beam is linearly formed. If the straight line is tilted with respect to the reference line in a state in which is distributed, the θz stage 42 is used to adjust the angle of θz, and when viewed from the center, Make sure there is no difference in position. When the light beams are distributed in the LD body 13 by the number of emitters, the positions of the light beams at the left and right ends are confirmed and the positions are the same without any difference.

  Next, the angle of θy is adjusted. When the left and right beam widths are different when viewed from the image obtained by the image sensor 63, the θy stage 41 is used to adjust the θy angle (a range that does not hit the LD front end face when rotated), and the left and right beams are adjusted. Make the width the same. When the light beams are distributed in the LD main body 13 by the number of emitters, the beam widths of the light beams distributed at the left and right ends are left and right even and have the same width.

Next, the process proceeds to the adjustment of the z-direction position. Using the z stage 45, the z direction position is adjusted to a position where the brightness of the light beam is high and the beam width is the narrowest when viewed in the image obtained by the image sensor 63 (moving back and forth to move to the optimum position). .. When the light beams are distributed by the number of emitters in the LD body 13, the beam brightness of only that number (the total number of light beams) is the highest as the average value, and the beam width is the highest as the average value. Set the position so that it becomes narrower.
This completes the adjustment of all 6 axes, and in the case of the above-mentioned small current, the light beam is in the target position (see step S1 to step S6 in the figure).

Therefore, next, the above-mentioned large current is passed through the LD body 13 to emit a light beam to the optical system in which this LD package is actually incorporated.
In this case, the amount of heat generated by the LD body 13 is increased by supplying a large current to the LD body, so that the LD heat sink 12 and the LD pedestal 11 in contact with the LD body also generate heat and expand. Moreover, since the light emission of the LD body increases, the stray light also increases. Due to these effects, even if the lens is adjusted with a small current, the position of the LD main body 13 and the position of the lens gripping portion are changed by flowing a large current, so that the adjustment is required again.

  Therefore, the six axes of the lens 23 are re-aligned while confirming the light beam image with the image obtained by the image sensor 63 or so as to satisfy the conditions required for the optical system in which the LD package is actually incorporated ( (See steps S7 to S15 in the figure).

  However, since the lens 23 is moved during this realignment, the amount of stray light and the beam condensing position change, and the position of the lens gripping portion is displaced during the adjustment due to the influence of heat. Further, when the time for adjusting the optical axis with a large current is extended, the temperature of the entire alignment device rises, and the heat gradually moves the positions of the lens 23 and the LD body 13.

  Due to these influences, the positions of the lens 23 and the LD main body 13 may be displaced in addition to the intentional movement by the axis adjustment by the centering, so that it becomes difficult to complete the centering. In addition, the light beam image may deviate from the screen of the monitor that monitors the light beam image, so caution is required.

  Therefore, in order to prevent the light beam image from disappearing from the screen of the monitor 84 where the light beam image acquired by the image sensor should be projected due to the expansion of the lens grip portion due to the influence of this heat, By attaching a temperature sensor (not shown) to the LD pedestal, the movement direction and the movement amount of the LD pedestal 11 on which the lens gripping portion and the LD package 14 are mounted can be changed before the lens alignment operation. Then, by performing feedback control using these data, a method is added in which the positional displacement due to the thermal expansion of the lens gripping portion and the positional displacements of the LD pedestal 11 and the LD heat sink 12 are respectively moved to be cancelled. Think about what to do.

  Specifically, the image information obtained by the image sensor 63 is processed by the image processing board 81, the processed image information is output to the monitor 84, and the data from the temperature sensor is received through the wiring 91 and the wiring 92. The output from the logger 82 is input, and the displacement amount of the lens gripping portion and the displacement amount of the LD pedestal are calculated and calculated based on the processed image information and the data of the temperature sensor, and are calculated by the stage controller 83 (described later). And a stage controller 83 that can move each stage, which is a component of the 6-axis stage 40, in a predetermined movement direction independently of the other stages, and an arithmetic device. A monitor 84 for displaying image information from 80 and the data logger 82 are used by being installed outside the surface plate cover 51. The arithmetic unit 80, the stage controller 83, and the data logger 82 are collectively referred to as a control unit (see FIGS. 2 and 3).

  Here, the feedback control for moving the lens gripper by the above control device can be performed by being included in the flow of the lens alignment using the six types of stage constituent elements described above. By this feedback control, it is possible to easily prevent the influence of thermal expansion caused by the temperature rise of the device caused by stray light or the like during the centering according to the temperature.

  As a method of aligning the lens 23 when a large current is passed through the LD body 13, the beam diameter or the beam position is adjusted according to each alignment procedure of the 6-axis stage so as to satisfy the condition required by the optical system. , Adjust while watching power etc.

  When the lens 23 is a FAC lens, when performing the centering of the lens in the same order as the procedure described above, feedback control for canceling the amount of displacement due to the heat described above is performed when moving to adjustment of each axis.

Therefore, first, a simulation study was conducted to examine the effect of heat and the effect of inserting a heat insulating material. That is, the influence of the heat insulating material on the positional displacement amount of the lens during alignment when a large current was passed through the LD was investigated. The result is shown in FIG.
As shown in this figure, the amount of positional displacement of the lens in the x direction when a large current is applied is plotted on the vertical axis, and the energization time to the LD (the elapsed time from the start of energization to the LD. (Corresponding to the heating time) is on the horizontal axis.

  Specifically, when the heat insulating material is not inserted (see the curve shown by the solid line in the figure), when the heat insulating material 70b is arranged between the lens holding L bracket 31 and the θy stage 41 (indicated by the broken line in the figure). When the heat insulating material 70a is disposed between the z stage 45 and the stage fixing L bracket 32 (see the curve indicated by the one-dot chain line in the figure), the heat insulating material 70a is connected to the z stage 45 and the stage. When the lens holding L bracket 31 is arranged between the fixing L brackets 32 and the lens holding L bracket 31 is made of a material having a linear expansion coefficient lower than that of iron or the like at room temperature (specifically, room temperature ± 3 ° C.), for example, Invar (see FIG. The amount of lens displacement when four types of models (see the curve indicated by the chain double-dashed line in the figure) was used, and the results are shown.

  From this figure, it can be seen that the displacement amount of the lens 23 becomes particularly large without the heat insulating material. In fact, it was confirmed that in the case where the heat insulating material was not provided, the light beam image taken by the CCD camera in the middle of the alignment would be out of the monitor screen and the alignment would be impossible. Further, it was actually confirmed that the amount of movement of the lens 23 can be reduced by inserting a heat insulating material between each stage constituent element and its supporting component, and that the lens alignment using the monitor screen is possible. ..

  In addition, from the above simulation results, in particular, not only the heat insulating material but also the heat insulating material and the material of the lens gripping portion having a small linear expansion coefficient are used in combination, so that the influence of the thermal expansion can be prevented by the heat insulating material alone. Since it can be suppressed more effectively than when it is used, it can be expected that the amount of positional change of the lens can be further reduced.

As described above, by inserting the heat insulating material 70a or the like to reduce the amount of change in the position of the lens 23, the light beam image in the middle of the alignment can be accommodated within the monitor screen. Accordingly, it is possible to complete the lens alignment to the target position.
Then, the lens position is adjusted according to this alignment flow, and after the position adjustment of the lens 23 is finally completed (here, when a large current is supplied to the LD main body, the procedure on the right side in the flowchart of FIG. 4 is performed. In some cases, the alignment may not be completed by performing the steps S8 to S14 only once, in which case the steps S8 to S14 are repeatedly performed until the alignment is completed. ), UV light is irradiated from the UV lamp 50 to cure the adhesive layer 24, and the lens 23 is fixed to the LD heat sink 12 via the tab portion 25 described above.
In this way, when the fixing of the lens 23 is completed, the chuck of the air chuck mechanism 22 of the lens chuck 21 is removed.
As a result, the centered lens is fixed to the LD package shown in FIG. 1 described first.

  Note that the present application describes exemplary embodiments, but the various features, aspects, and functions described in the embodiments are not limited to those described, and independently, Alternatively, various combinations can be applied as the embodiment. For example, in addition to applying both a heat insulating material and a low linear expansion material, a temperature sensor for measuring the temperature of the LD package is further provided, and the temperature of the device is converted based on the measured temperature data to obtain the temperature. The amount of thermal expansion generated by the rise may be calculated, and the amount obtained by converting the amount of thermal expansion into the position displacement amount of the stage may be fed back to perform the lens alignment. By doing so, it becomes possible to further improve the alignment accuracy.

  10 surface plate, 11 LD pedestal, 12 LD heat sink, 13 LD body, 13a LD front end surface, 14 LD package, 20 lens gripping part, 21 lens chuck, 22 air chuck mechanism, 23 lens, 24 adhesive layer, 25 tab part, 31 lens holding L bracket, 32 stage fixing L bracket, 40 6-axis stage, 41 θy stage, 42 θz stage, 43 θx stage, 44 y stage, 45 z stage, 46 x stage, 50 UV lamp, 51 surface plate Cover, 61 screen, 62 lens group, 63 image sensor, 64 beam position acquisition unit, 70, 70a, 70b heat insulating material, 80: arithmetic unit, 81 image processing board, 82 data logger, 83 stage controller, 84 monitor, 91, 92 wiring, LB laser optical path

Claims (5)

A lens for converting the light beam from the laser diode into parallel light or condensed light,
A lens gripper for gripping the lens,
A 6-axis stage that supports the lens gripping portion and changes the setting position of the lens gripping portion in order to align the lens;
A beam position acquisition unit that recognizes and stores the position of the converted light beam,
A stage controller for independently driving and controlling each stage, which is a component of the 6-axis stage,
A heat insulating material for blocking heat transfer from the lens gripping portion to the 6-axis stage or heat transfer between components of the 6-axis stage;
Adjusting the position of the lens gripper to align the lens by driving and controlling the stage controller based on the position information of the light beam of the beam position acquisition unit and the beam shape and brightness information. A lens aligning device. The lens centering device according to claim 1, wherein a material of the lens grip portion has a coefficient of linear expansion smaller than that of iron at around room temperature. The heat insulating material is arranged at a plurality of positions between the lens gripping portion and the 6-axis stage or between each component of the 6-axis stage. The described lens centering device. A laser diode package including a laser diode body and a laser diode heat sink as a component, and a temperature sensor for measuring the temperature of the lens gripping portion, based on the measured temperature of the laser diode package and the lens gripping portion, The lens alignment device according to claim 1, wherein the stage controller adjusts the position of the lens gripper. A lens for converting the light beam from the laser diode into parallel light or condensed light,
A lens gripper for gripping the lens,
A 6-axis stage that supports the lens gripping portion and changes the setting position of the lens gripping portion in order to align the lens;
A stage controller for independently driving and controlling each component of the 6-axis stage;
A beam position acquisition unit that recognizes and stores the position of the light beam after passing through the lens,
A heat insulating material that blocks heat transfer from the lens gripping portion to the 6-axis stage or between each component of the 6-axis stage;
A laser diode package including a laser diode body and a laser diode heat sink as a component, and a temperature sensor for measuring the temperature of the lens grip portion,
A UV lamp that emits UV light,
A lens aligning method for aligning the lens using a lens aligning device provided,
Among the respective components of the 6-axis stage based on the outer shape of the lens, an x-stage for adjusting the position in the x-direction, a y-stage for adjusting the position in the y-direction, a z-stage for adjusting the position in the z-direction, and around the x-axis. And a step of moving the position of the lens gripper by adjusting the θx stage for adjusting the rotation angle of
Energizing the laser diode with a lower current than usual,
Based on the image obtained by the beam position acquisition unit, the θz stage for adjusting the rotation angle around the z axis, the θy stage for adjusting the rotation angle around the y axis, and the z stage for adjusting the z direction position are adjusted. And a step of moving the position of the lens gripper,
Energizing the laser diode with a higher current than usual,
Based on the image obtained by the beam position acquisition unit and the measured temperatures of the laser diode package and the lens holding unit, adjustment by a θz stage that adjusts a rotation angle around the z axis, lens holding by the measured temperature The position of the lens gripper is adjusted by the θy stage that adjusts the rotation angle around the y-axis, and the z stage that adjusts the z-direction position. Fixing the position of
A method for aligning a lens, comprising:

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