JP2020073905A - Magnetic sensor - Google Patents

Abstract

To provide a magnetic sensor less susceptible to environmental magnetic field.SOLUTION: A magnetic sensor comprises magnetic detection elements MR1-MR4 positioned on a first plane P1; and a magnetic material 30A provided on a second plane P2. The magnetic material 30A includes: first and second leg parts 41, 42; a first main body part 51 positioned between the first and second leg parts 41, 42, and forming a first space 61 between the second plane P2 and itself. The magnetic detection elements MR1-MR4 are covered by the first main body part 51. According to the invention, while a magnetic field to be detected is collected on the first and second leg parts 41, 42, an environmental magnetic field serving as noise via the first main body part 51 can be bypassed since the magnetic detection elements MR1-MR4 are covered by the first main body part 51. This can reduce the influence of the environmental magnetic field.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a magnetic sensor, and more particularly to a magnetic sensor including a magnetic body for collecting magnetic flux in a magnetic detection element.

  Magnetic sensors using magnetoresistive elements and the like are widely used in ammeters, magnetic encoders, and the like. The magnetic sensor may be provided with a magnetic body for collecting magnetic flux in the magnetic detection element. In this case, the magnetic body is arranged offset from the magnetic detection element (see Patent Documents 1 and 2). As a result, the direction of the magnetic flux is bent by the magnetic body to the fixed magnetization direction, which enables highly sensitive detection.

Japanese Patent No. 5500785 JP, 2014-182096, A

  However, the magnetic sensors described in Patent Documents 1 and 2 have a problem in that most of the magnetic detection elements are exposed from the magnetic body, and thus are susceptible to the environmental magnetic field that becomes noise.

  Therefore, it is an object of the present invention to provide a magnetic sensor that is not easily affected by an environmental magnetic field.

  A magnetic sensor according to the present invention includes a plurality of magnetic detection elements including at least a first magnetic detection element located on a first plane, and a magnetic body provided on a second plane parallel to the first plane. The magnetic body includes a first body portion forming a first space between the magnetic body and the second plane, and a first leg portion fixed to the second plane. The first magnetic detection element is characterized in that it is covered with the first main body.

  According to the present invention, while the magnetic field to be detected is collected in the first leg portion, while the first magnetic detection element is covered by the first main body portion, noise is generated via the first main body portion. The environmental magnetic field can be bypassed. This makes it possible to reduce the influence of the environmental magnetic field. Here, the magnetic body is preferably made of a soft magnetic material.

  In the present invention, the plurality of magnetic detection elements further include a second magnetic detection element covered by the first main body portion, the magnetic body protruding from the first main body portion, the second magnetic detection element, Further comprising a second leg portion fixed to the plane of the first body, the first body portion is located between the first leg portion and the second leg portion, and the first magnetic detection element is the It is preferable that the second magnetic detection element is arranged offset to the first leg side, and the second magnetic detection element is arranged offset to the second leg side. According to this, since the magnetic fields collected in the first and second legs are applied to the first and second magnetic detection elements, respectively, it is possible to obtain a differential signal. Moreover, since the first and second magnetic detection elements are sandwiched between the first and second legs in plan view and covered by the first main body, the invasion of the environmental magnetic field into the first space is prevented. Effectively blocked. This makes it possible to further reduce the influence of the environmental magnetic field.

  In this case, the cross-sectional shape of the first space in the direction intersecting the first and second planes and crossing the first and second legs may be polygonal. The bottom surface of the first main body portion in the direction intersecting the first and second planes and crossing the first and second legs may have a curved portion.

  In the present invention, the plurality of magnetic detection elements further include a second magnetic detection element, and the magnetic body further includes a second body portion that forms a second space between the magnetic body and the second plane, It is also preferable that the first leg portion is located between the first main body portion and the second main body portion, and the second magnetic detection element is covered by the second main body portion. Also in this case, it is possible to obtain a differential signal by the first and second magnetic detection elements.

  In this case, the magnetic body further includes second and third leg portions fixed to the second plane, and the first body portion is provided between the first leg portion and the second leg portion. And the second body portion is located between the first leg portion and the third leg portion, and the first and second magnetic detection elements are both on the first leg portion side. It is preferable that they are arranged offset from each other. According to this, the first magnetic detection element is sandwiched between the first and second legs in the plan view, and the second magnetic detection element is sandwiched between the first and third legs in the plan view. It is possible to further reduce the influence of the environmental magnetic field.

  In the present invention, it is preferable that the first magnetic detection element is arranged at a position where it does not overlap with the first leg portion. According to this, it becomes possible to apply more magnetic field components parallel to the first plane to the first magnetic detection element.

  In the present invention, each of the plurality of magnetic detection elements has a first direction parallel to the first and second planes as a magnetization fixed direction, is parallel to the first and second planes, and has the magnetization fixed direction. The length of the magnetic body in the second direction intersecting with is preferably longer than the length of each of the plurality of magnetic detection elements in the second direction. According to this, a magnetic field parallel to the magnetization fixed direction is obtained over a wider area in the second direction, so that it is possible to further enhance the magnetic detection sensitivity of the magnetic sensor.

  In the present invention, it is preferable that all of the plurality of magnetic detection elements are covered with the magnetic body. According to this, the magnetic field to be detected can be efficiently given to each magnetic detection element, and each magnetic detection element can be effectively shielded from the environmental magnetic field.

  According to the present invention, it is possible to provide a magnetic sensor capable of reducing the influence of the environmental magnetic field.

FIG. 1 is a schematic perspective view showing the outer appearance of a magnetic sensor 10A according to the first embodiment of the present invention. FIG. 2 is a sectional view of the magnetic sensor 10A. FIG. 3 is a top view of the magnetic sensor 10A. FIG. 4 is a schematic diagram for explaining the flow of the magnetic flux φz in the z direction in the first embodiment. FIG. 5 is a schematic diagram for explaining the flow of the magnetic flux φx in the x direction in the first embodiment. FIG. 6 is a circuit diagram for explaining the connection relationship between the magnetic detection elements MR1 to MR4. FIG. 7 is a cross-sectional view of the magnetic sensor 10A ₁ according to the first modification. FIG. 8 is a sectional view of the magnetic sensor 10A ₂ according to the second modification. FIG. 9 is a schematic perspective view showing the outer appearance of the magnetic sensor 10B according to the second embodiment of the present invention. FIG. 10 is a sectional view of the magnetic sensor 10B. FIG. 11 is a top view of the magnetic sensor 10B. FIG. 12 is a schematic diagram for explaining the flow of the magnetic flux φz in the z direction in the second embodiment. FIG. 13 is a schematic diagram for explaining the flow of the magnetic flux φx in the x direction in the second embodiment. FIG. 14 is a schematic perspective view showing the external appearance of the magnetic sensor 10C according to the third embodiment of the present invention. FIG. 15 is a sectional view of the magnetic sensor 10C. FIG. 16 is a top view of the magnetic sensor 10C. FIG. 17 is a schematic diagram for explaining the flow of the magnetic flux φz in the z direction in the third embodiment. FIG. 18 is a schematic diagram for explaining the flow of the magnetic flux φx in the x direction in the third embodiment.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

<First Embodiment>
FIG. 1 is a schematic perspective view showing the outer appearance of a magnetic sensor 10A according to the first embodiment of the present invention. 2 is a sectional view of the magnetic sensor 10A, and FIG. 3 is a top view of the magnetic sensor 10A. In particular, FIG. 2 shows a cross section taken along the line AA shown in FIG.

  As shown in FIGS. 1 to 3, the magnetic sensor 10A according to the present embodiment includes a sensor chip 20 and a magnetic body 30A fixed to the sensor chip 20.

  The sensor chip 20 includes a substrate 21 having a substantially rectangular parallelepiped shape, and four magnetic detection elements MR1 to MR4 are formed on an element formation surface 21a of the substrate 21. The element formation surface 21a is an xy plane and constitutes a part of the first plane P1. The element forming surface 21a is covered with an insulating film 22, and the surface thereof forms a second plane P2 parallel to the first plane P1. As a method for manufacturing the sensor chip 20, a method is generally used in which a large number of sensor chips 20 are simultaneously formed on a collective substrate and separated to separate a large number of them, but the present invention is not limited to this. Alternatively, each sensor chip 20 may be manufactured separately.

  The magnetic detection elements MR1 to MR4 are not particularly limited as long as they are elements whose physical characteristics change according to the magnetic flux density, but in the present embodiment, magnetoresistive effect elements (MR elements) whose electric resistance changes according to the direction of the magnetic field. Is used. The magnetization fixed directions of the magnetic detection elements MR1 to MR4 are all aligned with the first direction (the positive side in the x direction) indicated by the arrow B in FIGS. 2 and 3.

  The magnetic body 30A is a block made of a soft magnetic material having a high magnetic permeability such as ferrite, and is placed on the second plane P2. 30 A of magnetic bodies are provided with the 1st main-body part 51 and the 1st and 2nd leg parts 41 and 42 which protruded with respect to the 1st main-body part 51. The first leg portion 41 is a portion fixed to the mounting area 23 located on the second plane P2, and the second leg portion 42 is fixed to the mounting area 24 located on the second plane P2. It is a part. The first and second leg portions 41, 42 can be fixed with an adhesive or the like. Magnetic detection elements MR1 and MR3 are arranged on the plus side of the mounting region 23 in the x direction. Magnetic detection elements MR2 and MR4 are arranged on the negative side of the mounting region 24 in the x direction.

  The first main body 51 is located between the first leg 41 and the second leg 42, and the bottom surface 51b thereof is separated from the second plane P2 by a predetermined distance H. As a result, a first space 61 is formed between the second plane P2 and the first body 51. The first main body portion 51 covers the magnetic detection elements MR1 to MR4 via the first space 61 in a plan view (viewed from the z direction). Among these, the magnetic detection elements MR1 and MR3 are arranged offset to the first leg portion 41 side, and the magnetic detection elements MR2 and MR4 are arranged offset to the second leg portion 42 side. That is, the magnetic detection elements MR1 and MR3 are arranged on the minus side in the x direction with respect to the center of the magnetic body 30A in the x direction, and the magnetic detection elements MR2 and MR4 are located on the plus side in the x direction with respect to the center of the magnetic body 30A in the x direction. Is located in. The magnetic detection elements MR1 and MR3 are arranged in the y direction which is the second direction, and the magnetic detection elements MR2 and MR4 are also arranged in the y direction. In addition, the magnetic detection elements MR1 and MR2 are arranged in the x direction which is the first direction, and the magnetic detection elements MR3 and MR4 are also arranged in the x direction.

  Here, the magnetic detection elements MR1 to MR4 are preferably arranged at positions where the entire magnetic detection elements MR1 to MR4 are covered with the first main body 51. In other words, it is preferable that a part of the magnetic detection elements MR1 to MR4 is arranged at a position where it does not overlap the first leg portion 41 or the second leg portion 42 in plan view. This is because when a part of the magnetic detection elements MR1 to MR4 overlaps the first leg portion 41 or the second leg portion 42 in plan view, the x-direction component of the magnetic field applied to the magnetic detection elements MR1 to MR4 decreases. Therefore, the detection sensitivity is reduced accordingly.

  As shown in FIG. 4, the magnetic body 30A collects the magnetic flux φz in the z direction, distributes half of the magnetic flux φz to the first leg 41, and distributes the other half to the second leg 42. A part of the magnetic flux distributed to the first leg portion 41 is bent to the plus side in the x direction and applied to the magnetic detection elements MR1 and MR3. Further, a part of the magnetic flux distributed to the second leg portion 42 is bent to the minus side in the x direction and applied to the magnetic detection elements MR2 and MR4. As a result, magnetic fluxes in opposite directions are applied to the magnetic detection elements MR1 and MR3 and the magnetic detection elements MR2 and MR4. As described above, since the magnetization fixed direction of the magnetic detection elements MR1 to MR4 is oriented in the x-plus direction indicated by the arrow B, it has sensitivity to the x-direction component of the magnetic flux.

  On the other hand, as shown in FIG. 5, the magnetic flux φx in the x direction is sucked into the first leg portion 41 or the second leg portion 42 and guided to the first main body portion 51. In the example shown in FIG. 5, the magnetic flux φx sucked into the second leg portion 42 is emitted from the first leg portion 41 via the first main body portion 51. As a result, the magnetic flux φx hardly penetrates into the first space 61, and therefore the influence of the magnetic flux φx on the magnetic detection elements MR1 to MR4 becomes very small. As described above, the magnetic body 30A has a function of keeping the magnetic flux φx in the x direction away from the magnetic detection elements MR1 to MR4 and bypassing it, so that the influence of the environmental magnetic field, which is noise, is significantly reduced.

Here, when the length in the y direction of each magnetic detection element MR1 to MR4 is w0 and the width in the y direction of the magnetic body 30A is w1,
w0 <w1
Is preferred. As a result, the magnetic flux bent in the x direction by the magnetic body 30A is applied to a wider region in the y direction of the magnetic detection elements MR1 to MR4. That is, since the magnetic field component in the x direction is obtained over a wider area in the y direction, the magnetic detection sensitivity is enhanced. Moreover, with respect to the environmental magnetic field, which is noise, the shielding effect of the magnetic body 30A becomes wider in the y direction, so that the effect of the environmental magnetic field is more effectively reduced.

  The height of the magnetic body 30A in the z direction is not particularly limited, but by increasing the height in the z direction, the selectivity of the magnetic flux in the z direction can be increased. In the present embodiment, the bottom surface of the magnetic body 30A includes the two leg portions 41 and 42, and since these leg portions 41 and 42 are fixed to the second plane P2, the height of the magnetic body 30A in the z direction is set. It has the advantage that it can be supported relatively stably even if the height is increased.

  FIG. 6 is a circuit diagram for explaining the connection relationship between the magnetic detection elements MR1 to MR4.

  In the example shown in FIG. 6, a constant voltage source 71 is used, and magnetic detection elements MR1 and MR2 are serially connected in this order between both ends thereof, and magnetic detection elements MR4 and MR3 are serially connected in this order. .. The voltage detection circuit 72 is connected between the connection point C1 of the magnetic detection elements MR1 and MR2 and the connection point C2 of the magnetic detection elements MR4 and MR3, whereby the level of the output voltage appearing between the connection points C1 and C2. Is detected.

  The magnetic detection elements MR1 and MR3 are arranged offset to the first leg portion 41 side in a plan view, and the magnetic detection elements MR2 and MR4 are arranged offset to the second leg portion 42 side in a plan view. Therefore, the magnetic detection elements MR1 to MR4 form a differential bridge circuit, and it becomes possible to detect a change in the electric resistance of the magnetic detection elements MR1 to MR4 according to the magnetic flux density with high sensitivity.

  Specifically, the magnetic flux φz in the z direction attracted to the magnetic body 30A is distributed to the mounting regions 23 and 24 of the sensor chip 20 and then returns to the magnetic flux generation source while rotating on both sides in the x direction. At this time, since the magnetic detection elements MR1 to MR4 all have the same magnetization fixed direction, the resistance change amounts of the magnetic detection elements MR1 and MR3 located on the plus side in the x direction when viewed from the mounting region 23, A difference occurs between the resistance change amounts of the magnetic detection elements MR2 and MR4 located on the minus side in the x direction when viewed from the mounting region 24. This difference is doubled by the differential bridge circuit shown in FIG. 6 and detected by the voltage detection circuit 72.

  Further, in the magnetic sensor 10A according to the present embodiment, as described with reference to FIG. 5, the magnetic flux φx in the x direction, which is noise, passes through the magnetic body 30A, and the magnetic flux φx is almost applied to the magnetic detection elements MR1 to MR4. Not done. That is, since the magnetic body 30A has a shielding effect on the magnetic flux φx in the x direction, the influence of the environmental magnetic field can be significantly reduced.

  Further, the magnetic body 30A has leg portions 41 and 42 on both sides in the x direction in a plan view, while corresponding leg portions are not provided on both sides in the y direction in a plan view. Since the magnetic detection elements MR1 to MR4 are elements having sensitivity to magnetic flux in the x direction, it is necessary to dispose the magnetic detection elements MR1 to MR4 adjacent to the leg portions 41 and 42 in the x direction in plan view. This is because when such legs are provided on both sides in the y direction, the magnetic flux φz in the z direction to be detected flows into the legs, and the magnetic field component to be detected is reduced. For this reason, it is preferable not to provide the magnetic body 30A with legs on both sides in the y direction. In other words, the first space 61 is preferably open on both sides in the y direction.

In the magnetic sensor 10A described above, the xz cross section of the first space 61 is quadrangular, but the present invention is not limited to this. For example, as in the magnetic sensor 10A ₁ according to the first modification shown in FIG. 7, a magnetic body 30A ₁ having an inclined bottom surface 51b of the first body 51 is used, whereby the xz cross section of the first space 61 is It may be a triangle. When molding the magnetic body 30A ₁ using a mold, there is an advantage that the magnetic body 30A ₁ can be easily taken out from the mold. The xz cross section of the first space 61 may be a polygon other than a triangle or a quadrangle.

Further, as the magnetic sensor 10A ₂ of the second modification shown in FIG. 8, may be formed a curved portion by curving the bottom surface 51b of the first body portion 51 such as an arc shape or arcuate .. According to this, when the magnetic body 30A ₂ is molded using the mold, the magnetic body 30A ₂ can be taken out from the mold more easily. In this case, the entire bottom surface 51b may be curved, or a part thereof may be linear and the rest may be curved.

<Second Embodiment>
FIG. 9 is a schematic perspective view showing the outer appearance of the magnetic sensor 10B according to the second embodiment of the present invention. 10 is a sectional view of the magnetic sensor 10B, and FIG. 11 is a top view of the magnetic sensor 10B. In particular, FIG. 10 shows a cross section taken along the line AA shown in FIG.

  As shown in FIGS. 9 to 11, the magnetic sensor 10B according to the present embodiment differs from the magnetic sensor 10A according to the first embodiment in that a magnetic body 30B having a different shape is used instead of the magnetic body 30A. It's different. Since the other configurations are basically the same as those of the magnetic sensor 10A according to the first embodiment, the same elements are designated by the same reference numerals, and duplicate description will be omitted.

  The magnetic body 30B has a first leg portion 41 and first and second body portions 51 and 52. The first leg portion 41 is a portion fixed to the mounting area 25 located on the second plane P2, and is located between the first main body portion 51 and the second main body portion 52. The magnetic detection elements MR1 and MR3 are arranged on the negative side of the mounting region 25 in the x direction, and the magnetic detection elements MR2 and MR4 are arranged on the positive side of the x direction.

  The first main body portion 51 is provided on the plus side of the first leg portion 41 in the x direction, and the bottom surface 51b thereof is separated from the second plane P2 by a predetermined distance H. As a result, a first space 61 is formed between the second plane P2 and the first body 51. The first main body portion 51 covers the magnetic detection elements MR2 and MR4 via the first space 61 in a plan view. The magnetic detection elements MR2 and MR4 are arranged in the y direction along the first leg portion 41.

  The second body portion 52 is provided on the minus side of the first leg portion 41 in the x direction, and the bottom surface 52b thereof is separated from the second plane P2 by a predetermined distance H. As a result, a second space 62 is formed between the second plane P2 and the second main body 52. The second main body 52 covers the magnetic detection elements MR1 and MR3 via the second space 62 in a plan view. The magnetic detection elements MR1 and MR3 are arranged in the y direction along the first leg portion 41.

  As shown in FIG. 12, the magnetic body 30B collects the magnetic flux φz in the z direction in the first leg portion 41, bends a part of the magnetic flux φz in the negative direction in the x direction, and emits it to the magnetic detection elements MR1 and MR3 side. Is partly bent to the plus side in the x direction and emitted to the magnetic detection elements MR2 and MR4 side. As a result, since magnetic fluxes in opposite directions are applied to the magnetic detection elements MR1 and MR3 and the magnetic detection elements MR2 and MR4, the intensity of the magnetic flux φz in the z direction can be detected.

  On the other hand, as shown in FIG. 13, the magnetic flux φx in the x direction, which is the magnetic sensitive direction, is transmitted from one of the first main body 51 and the second main body 52 to the other. As a result, the magnetic flux φx penetrating the first space 61 and the second space 62 is reduced, so that the influence of the magnetic flux φx on the magnetic detection elements MR1 to MR4 is reduced.

  However, unlike the first embodiment, since the first space 61 and the second space 62 are not closed in the x direction and one of them in the x direction is open, the magnetic flux φx in the x direction is bypassed. The function that causes it is slightly reduced. However, the present embodiment has an advantage that the size of the magnetic body 30B in the x direction can be easily reduced. Further, the magnetic body 30B has an advantage that the signal level obtained becomes higher than that in the first embodiment because the magnetic flux φz in the z direction is concentrated on the first leg portion 41.

<Third Embodiment>
FIG. 14 is a schematic perspective view showing the external appearance of the magnetic sensor 10C according to the third embodiment of the present invention. 15 is a sectional view of the magnetic sensor 10C, and FIG. 16 is a top view of the magnetic sensor 10C. In particular, FIG. 15 shows a cross section taken along the line AA shown in FIG.

  As shown in FIGS. 14 to 16, the magnetic sensor 10C according to the present embodiment is different from that according to the first and second embodiments in that a magnetic body 30C having a different shape is used instead of the magnetic bodies 30A and 30B. It is different from the magnetic sensors 10A and 10B. Since the other configurations are basically the same as those of the magnetic sensors 10A and 10B according to the first and second embodiments, the same reference numerals are given to the same elements, and redundant description will be omitted.

  The magnetic body 30C has first to third leg portions 41 to 43 and first and second body portions 51 and 52. The first to third leg portions 41 to 43 are portions fixed to the mounting areas 25 to 27 located on the second plane P2, respectively. The magnetic detection elements MR1 and MR3 are arranged on the negative side of the mounting region 25 in the x direction, and the magnetic detection elements MR2 and MR4 are arranged on the positive side of the x direction.

  The first main body 51 is located between the first leg 41 and the second leg 42, and the bottom surface 51b thereof is separated from the second plane P2 by a predetermined distance H. As a result, a first space 61 is formed between the second plane P2 and the first body 51. The first main body portion 51 covers the magnetic detection elements MR2 and MR4 via the first space 61 in a plan view. The magnetic detection elements MR2 and MR4 are arranged in the y direction along the first leg portion 41.

  The second body portion 52 is located between the first leg portion 41 and the third leg portion 43, and the bottom surface 52b thereof is separated from the second plane P2 by a predetermined distance H. As a result, a second space 62 is formed between the second plane P2 and the second main body 52. The second main body 52 covers the magnetic detection elements MR1 and MR3 via the second space 62 in a plan view. The magnetic detection elements MR1 and MR3 are arranged in the y direction along the first leg portion 41.

  As shown in FIG. 17, the magnetic body 30C collects the magnetic flux φz in the z direction and guides a part of the magnetic flux φz to the first leg portion 41. Part of the magnetic flux that has passed through the first leg portion 41 is bent to the minus side in the x direction and is emitted to the magnetic detection elements MR1 and MR3 side, and the other part is bent to the plus side in the x direction and magnetized. It is emitted to the side of the detection elements MR2 and MR4. As a result, since magnetic fluxes in opposite directions are applied to the magnetic detection elements MR1 and MR3 and the magnetic detection elements MR2 and MR4, the intensity of the magnetic flux φz in the z direction can be detected.

  On the other hand, as shown in FIG. 18, the magnetic flux φx in the x direction, which is the magnetic sensitive direction, is sucked into the first leg portion 41 or the third leg portion 43, and is transferred to the first or second main body portion 51, 52. Will be led. In the example shown in FIG. 18, the magnetic flux φx sucked into the second leg portion 42 passes through the first body portion 51, the first leg portion 41, and the second body portion 52, and then the third leg portion. Emitted from 43. As a result, the magnetic flux φx hardly penetrates into the first and second spaces 61 and 62, and therefore the influence of the magnetic flux φx on the magnetic detection elements MR1 to MR4 becomes very small. As described above, the magnetic body 30C has a function of keeping the magnetic flux φx in the x direction away from the magnetic detection elements MR1 to MR4 and bypassing it, so that the influence of the environmental magnetic field, which is noise, is significantly reduced.

  Although the preferred embodiments of the present invention have been described above, the present invention is not limited to the above embodiments, and various modifications can be made without departing from the gist of the present invention. It goes without saying that it is included in the range.

  For example, in the above embodiment, four magnetic resistance elements (MR elements) are used as magnetic detection elements, but the type and number of magnetic detection elements are not particularly limited.

  In each of the above-described embodiments, the first plane P1 on which the magnetic detection elements MR1 to MR4 are formed and the second plane P2 on which the magnetic bodies 30A to 30C are fixed have different positions in the z direction. However, they may be formed on the same plane. That is, the magnetic bodies 30A to 30C may be fixed to the first plane P1.

  Furthermore, the first and second spaces 61 and 62 are not necessarily required to be complete cavities, and the first and second spaces 61 and 62 may be filled with a non-magnetic material.

1OA - _1OC, 10A 1, 10A ₂ magnetic sensor 20 sensor chip 21 substrate 21a element forming surface 22 insulating film 23 to 27 mounting region 30A through _30C, 30A 1, 30A ₂ magnetic body 41 first leg 42 second leg Part 43 Third leg part 51 First body part 51b First body part bottom surface 52 Second body part 52b Second body part bottom surface 61 First space 62 Second space 71 Constant voltage source 72 Voltage detection circuits C1, C2 Connection points MR1 to MR4 Magnetic detection element P1 First plane P2 Second plane Magnetic flux in φx x direction Magnetic flux in φz z direction

Claims (6)

A first direction is a magnetization fixed direction, and a first and a second magnetic detection element having a second direction intersecting the first direction as a longitudinal direction, and a magnetic body,
The first and second magnetic detection elements are arranged in the first direction,
The magnetic body is located between the first and second magnetic detection elements when viewed from a third direction that intersects the first and second directions, and the first and second magnetic A first portion that does not overlap with the detection element, a second portion that overlaps with the first magnetic detection element when viewed from the third direction, and a second magnetic detection element when viewed from the third direction Including a third portion that overlaps,
The bottom surface of the first portion of the magnetic body is closer to the first and second magnetic detection elements in the third direction than the bottom surfaces of the second and third portions of the magnetic body. ,
The distance between the first magnetic detection element and the second portion of the magnetic body in the third direction is constant,
A magnetic sensor, wherein a distance between the second magnetic detection element and the third portion of the magnetic body in the third direction is constant.   The magnetic sensor according to claim 1, wherein a space is not formed between the second portion and the third portion of the magnetic body and is filled with the magnetic body.   The magnetic sensor according to claim 1, wherein each of the first to third portions of the magnetic body is filled with the magnetic body without forming a space.   The magnetic sensor according to claim 2, wherein upper surfaces of the first to third portions of the magnetic body are flat.   The magnetic sensor according to any one of claims 1 to 4, wherein a length of the magnetic body in the first direction is longer than a length of the magnetic body in the second direction.   The magnetic sensor according to claim 1, wherein a longitudinal direction of the first portion of the magnetic body extends in the second direction.

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