JP2020060491A - Flaw detection device and flaw detection method of light transmissive product - Google Patents
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本発明は透明フィルムに生じた疵を良好に検出できる疵検出装置等に関するものである。 The present invention relates to a flaw detection device and the like that can favorably detect flaws formed on a transparent film.
特許文献1には光透過性フィルムに生じた疵(欠陥)を検出する方法が示されており、ここでは光透過性フィルムの一方の面に、所定の格子間隔を有する二値の基準透過型格子像を投影して、光透過性フィルムを通過してその他方の面に現れる基準透過型格子像を撮像し、前記光透過性フィルムの光透過性欠陥によって透過光が屈折させられることにより、撮像された基準透過型格子像の画像データに生じる濃淡領域を抽出することで光透過性欠陥の有無を検出している。 Patent Document 1 discloses a method for detecting a flaw (defect) generated in a light transmissive film. Here, a binary reference transmission type having a predetermined lattice spacing on one surface of the light transmissive film. By projecting a lattice image, a reference transmission type lattice image that appears on the other surface through the light transmissive film is captured, and the transmitted light is refracted by the light transmissive defect of the light transmissive film, The presence / absence of a light transmissive defect is detected by extracting a shaded area that occurs in the image data of the captured reference transmission type lattice image.
上記従来の疵検出方法は光透過性フィルムに生じた疵を良好に検出することができるが、特に細長く延びる線状疵の検出は未だ十分でないという問題があった。 The above-described conventional flaw detection method can satisfactorily detect flaws formed on the light-transmissive film, but there is a problem that particularly linear flaws extending long and thin are still insufficient.
そこで、本発明はこのような課題を解決するもので、光透過性製品に生じた疵、特に線状疵を簡易かつ確実に検出することが可能な光透過性製品の疵検出装置および疵検出方法を提供することを目的とする。 Therefore, the present invention solves such a problem, and a flaw detection device and a flaw detection device for a light-transmissive product capable of easily and surely detecting flaws generated in the light-transmissive product, particularly linear flaws. The purpose is to provide a method.
上記目的を達成するために、本第1発明の光透過性製品の疵検出装置では、拡散光源(5)からの光を透過させる透光領域(42a)と透過させない非透光領域(42b)が形成され、前記透光領域(42a)を透過した光が光透過性製品(2)上に入射するように位置させられたフィルタ部材(4)と、前記光透過性製品(2)を挟んで前記フィルタ部材(4)と反対側に位置させられて前記光透過性製品(2)の製品表面を撮像し、前記非透光領域(42b)に対応する製品表面に現れる疵像(Fw)を取得する撮像手段(6)とを具備している。 In order to achieve the above object, in the flaw detection device for a light transmissive product according to the first aspect of the present invention, a light transmitting region (42a) that transmits light from a diffused light source (5) and a non-light transmitting region (42b) that does not transmit light. And the filter member (4) positioned so that the light transmitted through the light transmitting region (42a) is incident on the light transmissive product (2) and the light transmissive product (2). A flaw image (Fw) appearing on the product surface corresponding to the non-light-transmitting region (42b) by imaging the product surface of the light-transmitting product (2) positioned on the side opposite to the filter member (4). And an image pickup means (6) for acquiring
本第1発明において、光源からの拡散光は、フィルタ部材の透光領域を通過して当該領域に正対する製品表面のみならず非透光領域に正対する製品表面にも入射する。フィルタ部材の透光領域を略垂直に通過して当該領域に正対する製品表面に入射する出力光はほぼ全てが撮像手段に入射して撮像画像上の白色領域を生成するのに対して、透光領域を斜めに通過してフィルタ部材の非透光領域に正対する製品表面に入射した出力光は撮像手段へは殆ど入射しないから撮像画像上の黒色領域を生成する。光透過性製品の製品表面に疵があると、出力光が疵部分で散乱させられて撮像手段に入射するようになるから黒色領域に輝度の高い疵像が生じる。白色領域では全体の輝度が高いため疵像は埋没して見えない。 In the first aspect of the present invention, the diffused light from the light source passes through the light-transmitting region of the filter member and enters not only the product surface facing the region but also the product surface facing the non-light-transmitting region. Almost all output light that passes through the light-transmitting region of the filter member substantially vertically and is incident on the surface of the product that faces the region is almost incident on the image capturing means to generate a white region on the captured image. The output light that obliquely passes through the light region and is incident on the surface of the product that faces the non-light-transmitting region of the filter member is hardly incident on the image pickup means, so that a black region on the captured image is generated. If there is a flaw on the product surface of the light transmissive product, the output light is scattered by the flaw and enters the image pickup means, so that a flaw image with high brightness is generated in the black region. In the white area, the overall brightness is high and the flaw image is buried and invisible.
本第2発明の光透過性製品の疵検出装置では、前記フィルタ部材(4)を平面体で構成し、当該フィルタ部材(4)における透光領域(42a)と非透光領域(42b)を所定幅の平行な帯状で交互に形成する。 In the flaw detection device for a light transmissive product according to the second aspect of the present invention, the filter member (4) is composed of a flat body, and the translucent region (42a) and the non-translucent region (42b) of the filter member (4) are formed. The strips are alternately formed in parallel with a predetermined width.
本第2発明によれば、光透過性製品の製品表面に生じた細長く続く線状疵を検出するのに有効である。 According to the second aspect of the present invention, it is effective for detecting a long and continuous linear flaw generated on the product surface of the light transmissive product.
本第3発明の光透過性製品の疵検出装置では、前記透過性フィルム(2)と、前記フィルタ部材(4)および撮像手段(6)とを所定速度で相対移動させるとともに、撮像手段(6)を当該相対移動に応じた周期で作動させるようにする。 In the flaw detection device for a light-transmitting product according to the third aspect of the present invention, the transparent film (2), the filter member (4) and the image pickup means (6) are relatively moved at a predetermined speed, and the image pickup means (6) is moved. ) Is operated at a cycle corresponding to the relative movement.
本第3発明によれば、光透過性製品が長く続く帯状である場合等に、製品表面に局所的に生じる疵を確実に検出することができる。 According to the third aspect of the present invention, when the light transmissive product is in the form of a strip that continues for a long time, it is possible to reliably detect a flaw locally generated on the product surface.
本第4発明の光透過性製品の疵検出方法では、光源(5)からの光を透過させる透光領域(42a)と透過させない非透光領域(42b)を形成し、前記透光領域(42a)を透過した光を前記光透過性製品(2)上に入射させて当該光透過性製品(2)の製品表面を撮像して前記非透光領域(42b)に対応する製品表面に現れる疵像(Fw)を取得する。 In the flaw detection method for a light transmitting product according to the fourth aspect of the present invention, a light transmitting region (42a) that transmits light from the light source (5) and a non-light transmitting region (42b) that does not transmit light are formed, and the light transmitting region (42b) is formed. The light transmitted through 42a) is incident on the light transmissive product (2), and the product surface of the light transmissive product (2) is imaged to appear on the product surface corresponding to the non-light transmissive region (42b). Acquire a flaw image (Fw).
本第4発明においても本第1発明と同様の作用効果を得ることができる。 Also in the fourth invention, the same operational effect as in the first invention can be obtained.
上記カッコ内の符号は、後述する実施形態に記載の具体的手段との対応関係を参考的に示すものである。 The reference numerals in the parentheses refer to corresponding relationships with specific means described in the embodiments described later.
以上のように、本発明によれば、光透過性製品に生じた疵を簡易かつ確実に検出することができる。 As described above, according to the present invention, it is possible to easily and surely detect a flaw generated in a light transmissive product.
なお、以下に説明する実施形態はあくまで一例であり、本発明の要旨を逸脱しない範囲で当業者が行う種々の設計的改良も本発明の範囲に含まれる。 The embodiments described below are merely examples, and various design improvements made by those skilled in the art are also included in the scope of the present invention without departing from the scope of the present invention.
図1には疵検出装置の全体構成を示す。図1において、図の斜め前後方向へ搬送ローラ11,12上を光透過性製品の一例としての一定幅の帯状光透過性フィルム2が搬送されている。光透過性フィルム2はテンションローラ13によって一定の張力が付与されており、この状態で搬送ローラ11に接する駆動ローラ14によって一定速度で図中矢印方向へ搬送されている。駆動ローラ14はモータ15に連結されており、モータ15はモータ制御ユニット31の出力で回転制御されている。 FIG. 1 shows the overall structure of the flaw detection device. In FIG. 1, a band-shaped light-transmitting film 2 having a constant width is conveyed as an example of a light-transmitting product on the conveying rollers 11 and 12 in the diagonal front-back direction. A constant tension is applied to the light-transmitting film 2 by a tension roller 13, and in this state, the driving roller 14 in contact with the conveying roller 11 conveys the light-transmitting film 2 at a constant speed in the direction of the arrow in the figure. The drive roller 14 is connected to a motor 15, and the motor 15 is rotationally controlled by the output of the motor control unit 31.
水平に搬送される光透過性フィルム2の下方には、両側を保持枠41によって保持されてフィルム面に平行に板状のフィルタ部材4が配置されている。フィルタ部材4はその横幅(図の左右方向)が光透過性フィルム2の幅と同程度、縦幅は光透過性フィルム2の移動速度に応じて後述する線状疵の全体像を把握できるに十分な長さとしてある。そしてフィルタ部材4には、光を透過させる透明な透光領域42aと透過させない黒色の非透光領域42b(図3参照)が、光透過性フィルム2の移動方向たる長手方向へ所定幅の平行な帯状に交互に形成されている。非透光領域42bは、透光性の材料で成形されたフィルタ部材4の表面に非透光性の薄膜を形成する等によって形成される。 Below the horizontally transparent light-transmitting film 2, a plate-shaped filter member 4 is arranged in parallel with the film surface by being held by holding frames 41 on both sides. The lateral width (left and right direction in the figure) of the filter member 4 is approximately the same as the width of the light transmissive film 2, and the vertical width thereof makes it possible to grasp the overall image of linear defects described later according to the moving speed of the light transmissive film 2. It is long enough. Then, in the filter member 4, a transparent light-transmitting region 42a that transmits light and a black non-light-transmitting region 42b (see FIG. 3) that does not transmit light are parallel to each other with a predetermined width in the longitudinal direction, which is the moving direction of the light-transmitting film 2. The strips are alternately formed. The non-translucent region 42b is formed by forming a non-translucent thin film on the surface of the filter member 4 formed of a translucent material.
フィルタ部材4の下方にはこれよりも大径の矩形の平面光源5が配置されている。平面光源5は多数の白色LEDを平面上に並べた拡散光源で、平面光源5の出力光はフィルタ部材4の下方からその全面に入射している。平面光源5は電源ユニット51に接続されている。 Below the filter member 4, a rectangular flat light source 5 having a larger diameter than that is arranged. The flat light source 5 is a diffused light source in which a large number of white LEDs are arranged on a flat surface, and the output light of the flat light source 5 is incident on the entire surface of the filter member 4 from below. The flat light source 5 is connected to the power supply unit 51.
水平に搬送される光透過性フィルム2の上方には撮像手段としてのCCDカメラ6がその焦点を光透過性フィルム2上に合わせて設けてある。CCDカメラ6は画像処理ユニット61に接続されており、一定時間間隔で下方の光透過性フィルム2のフィルム面を撮像し、取得された画像は画像処理ユニット61へ送られる。ここで、CCDカメラ6と光透過性フィルム2の間の距離の一例は600mmであり、光透過性フィルム2とフィルタ部材4の間の距離の一例は40〜100mmである。 A CCD camera 6 as an image pickup means is provided above the light-transmitting film 2 conveyed horizontally so that the focus thereof is on the light-transmitting film 2. The CCD camera 6 is connected to the image processing unit 61, images the film surface of the lower light-transmitting film 2 at regular time intervals, and the acquired image is sent to the image processing unit 61. Here, an example of the distance between the CCD camera 6 and the light transmissive film 2 is 600 mm, and an example of the distance between the light transmissive film 2 and the filter member 4 is 40 to 100 mm.
CCDカメラ6でフィルム面を撮像して得た画像の一例を図2に示す。画像は、光透過性フィルム2の背後にあるフィルタ部材4の帯状の透光領域42aと非透光領域42bに対応して帯状の白色領域Rwと黒色領域Rbが交互に現れたものとなる。その理由は、平面光源5からの出力光は拡散光であるから、フィルタ部材4の透光領域42aを通過して当該領域42aに正対するフィルム面のみならず非透光領域42bに正対するフィルム面にも入射する。この場合、フィルタ部材4の透光領域42aを略垂直に通過して当該領域42aに正対するフィルム面に入射する出力光はほぼ全てがCCDカメラ6に入射して上記白色領域Rwを生成するのに対して、透光領域42aを斜めに通過してフィルタ部材4の非透光領域42bに正対するフィルム面に入射した出力光はCCDカメラ6へは殆ど入射しないから上記黒色領域Rbが生成されるのである。 An example of an image obtained by picking up the film surface with the CCD camera 6 is shown in FIG. The image is such that strip-shaped white regions Rw and black regions Rb alternately appear corresponding to the strip-shaped translucent regions 42a and the non-translucent regions 42b of the filter member 4 behind the light transmissive film 2. The reason is that since the output light from the flat light source 5 is diffused light, the film that passes through the transparent region 42a of the filter member 4 and faces the non-transparent region 42b as well as the film surface that faces the region 42a. It also enters the surface. In this case, almost all of the output light that passes through the light transmitting region 42a of the filter member 4 substantially vertically and is incident on the film surface facing the region 42a is incident on the CCD camera 6 to generate the white region Rw. On the other hand, the output light that obliquely passes through the transparent region 42a and is incident on the film surface of the filter member 4 facing the non-transparent region 42b is hardly incident on the CCD camera 6, so that the black region Rb is generated. It is.
ここで、光透過性フィルムのフィルム面に線状疵があると、図2に示すようにその一部の像Fwが黒色領域Rbに生じる。この理由は、線状疵があると平面光源5からの出力光が線状疵部分で散乱させられてCCDカメラ6に入射するようになって線状疵の像が生じるが、透光領域42aに対応した画像上の白色領域Rwでは全体(背景)の輝度(明度)が高いため当該領域Rwに生じる線状疵の像は埋没して見えない。これに対して非透光領域42bに対応する画像上の黒色領域Rbでは、全体(背景)の輝度が低いため線状疵の部分の輝度が周囲よりも高くなってその白色像Fwが現れるのである。 Here, if there is a linear flaw on the film surface of the light transmissive film, a part of the image Fw is generated in the black region Rb as shown in FIG. The reason for this is that if there is a linear flaw, the output light from the flat light source 5 is scattered by the linear flaw portion and enters the CCD camera 6 to form an image of the linear flaw, but the transparent area 42a. In the white region Rw on the image corresponding to, the entire (background) luminance (brightness) is high, and thus the image of the linear flaw generated in the region Rw is buried and cannot be seen. On the other hand, in the black region Rb on the image corresponding to the non-light-transmitting region 42b, the luminance of the whole (background) is low, so that the luminance of the linear flaw portion is higher than that of the surrounding area and the white image Fw appears. is there.
フィルム面に線状疵を生じた光透過性フィルム2がフィルタ部材4の上方を移動通過する際にCCDカメラ6で得られるフィルム面の画像の一例を図3に概念的に示す。図3は光透過性フィルム2がフィルタ部材4に対して図の矢印方向へ通過している場合を示すもので、光透過性フィルム2上に線状疵があると、一定時間毎の撮像に伴って図3の(1)から(3)に示すように、移動する線状疵の部分的な白色像Fwが黒色領域Rbに生じた画像が得られる。そこで、画像処理によって各画像における線状疵の白色像Fwを黒色像として抽出して、これら画像の時間位置を合わせて重ねると、図4に示すような白色の背景に線状疵全体の黒色像Fbが得られる。 FIG. 3 conceptually shows an example of an image of the film surface obtained by the CCD camera 6 when the light transmissive film 2 having a linear flaw on the film surface moves and passes over the filter member 4. FIG. 3 shows a case where the light transmissive film 2 is passing through the filter member 4 in the direction of the arrow in the figure. If there is a linear flaw on the light transmissive film 2, the image is taken at regular intervals. Accordingly, as shown in (1) to (3) of FIG. 3, an image in which a partial white image Fw of a moving linear flaw is generated in the black region Rb is obtained. Therefore, the white image Fw of the linear flaw in each image is extracted as a black image by image processing, and when the time positions of these images are aligned and overlapped, the black of the entire linear flaw is displayed on a white background as shown in FIG. The image Fb is obtained.
なお、線状疵全体を黒色の背景に白色像として得る代わりに白色の背景に黒色像として得るようにしても良い。また、静止した光透過性フィルムに対してフィルタ部材とCCDカメラを移動させるようにしても良い。さらに、光透過性フィルム(光透過性製品)全体をカバーできる大きさのフィルタ部材であれば両者を相対移動させる必要はない。また、透光領域と非透光領域は必ずしも所定幅の平行な帯状に交互に形成される必要は無い。さらに、本発明が検出対象とする疵は線状疵には限られず、点状あるいは面状の疵(欠陥)であっても良い。光透過性製品としてはフィルムに限られず、プラスチックやガラス等の平板や、平板に限らず立体的なものも含まれる。 Instead of obtaining the entire linear flaw as a white image on a black background, it may be obtained as a black image on a white background. Further, the filter member and the CCD camera may be moved with respect to the stationary light transmissive film. Further, as long as the filter member has a size capable of covering the entire light-transmitting film (light-transmitting product), it is not necessary to move the both members relatively. Further, the light-transmitting regions and the non-light-transmitting regions do not necessarily have to be alternately formed in parallel strips having a predetermined width. Furthermore, the flaws to be detected by the present invention are not limited to linear flaws, but may be spot-like or plane-like flaws (defects). The light-transmissive product is not limited to a film, and includes flat plates such as plastic and glass, and three-dimensional products other than flat plates.
2…光透過性フィルム、4…フィルタ部材、42a…透光領域、42b…非透光領域、5…平面光源、(拡散光源)、6…CCDカメラ(撮像手段)、Fw…(疵像)。 2 ... Light transmissive film, 4 ... Filter member, 42a ... Translucent region, 42b ... Non-translucent region, 5 ... Flat light source, (diffuse light source), 6 ... CCD camera (imaging means), Fw ... (defect image) .
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CN116730056A (en) * | 2023-08-15 | 2023-09-12 | 江苏铭丰电子材料科技有限公司 | Copper foil coiling mechanism of measurable defect |
CN116730056B (en) * | 2023-08-15 | 2023-10-27 | 江苏铭丰电子材料科技有限公司 | Copper foil coiling mechanism of measurable defect |
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