JP2020056635A - Shape measuring device, shape measuring method, and shape measuring program - Google Patents

Abstract

To provide a shape measuring device with which the accuracy of measuring the prescribed portion of a measurement object is heightened.SOLUTION: A shape measuring device for measuring the shape of a measurement object M comprises a light projection device, an imaging device, and a measurement unit. The light projection device projects projection light L to the measurement object M. The imaging device generates the image data of a strain image derived by adding strain to an image that includes the measurement object M having had the projection light L projected thereto. The measurement unit generates, on the basis of the image data of strain image generated by the imaging device and the amount of added strain, point group data in which point group density differs at positions in the image of the measurement object M.SELECTED DRAWING: Figure 11

Description

  The present invention relates to a shape measuring device, a shape measuring method, and a shape measuring program.

  Conventionally, as a shape measuring device, a measurement target object is irradiated with measurement light such as a line beam, the measurement target object irradiated with the measurement light is photographed by an image sensor such as a CCD, and the measurement light in the photographed image is measured. A displacement sensor that measures displacement based on an image is known (for example, see Patent Document 1). Here, it is required to improve the measurement accuracy of the shape at a predetermined portion of the measurement target object.

International Publication No. 2001/057471

  According to the first aspect, a shape measuring device that measures the shape of a measurement target includes a light projection unit that projects projection light onto the measurement target, and an image including the measurement target onto which the projection light is projected. An imaging unit that generates image data of a distorted image in which distortion is applied to the object to be measured based on the image data of the distorted image generated by the imaging unit and the amount of the applied distortion. A shape calculation unit that generates point cloud data in which the density of the point cloud differs depending on the upper position.

  According to a second aspect, a measurement shape method executed by a shape measurement device that measures a shape of a measurement target includes: projecting projection light onto the measurement target; Generating image data of a distorted image in which the image including the object is distorted; and, based on the image data of the distorted image and the amount of the applied distortion, a position on the measurement object. And generating point cloud data having different point cloud densities.

  According to a third aspect, a shape measurement program for measuring the shape of a measurement target includes: projecting projection light onto the measurement target on a shape measurement device; and setting the measurement target on which the projection light is projected. Generating image data of a distorted image in which an image is distorted, based on the image data of the distorted image and the given amount of distortion, Generating point cloud data with different cloud densities.

FIG. 1 is a diagram illustrating a partial configuration of a system including the shape measuring apparatus according to the first embodiment. FIG. 2 is a diagram illustrating an appearance of the shape measuring apparatus according to the first embodiment. FIG. 3 is a schematic diagram illustrating a schematic configuration of the shape measuring apparatus according to the first embodiment. FIG. 4 is a schematic diagram illustrating an optical probe of the shape measuring apparatus according to the first embodiment. FIG. 5 is a diagram illustrating an example of an image captured by the imaging device. FIG. 6 is a diagram showing a coordinate system of the optical probe. FIG. 7 is a block diagram illustrating a schematic configuration of the control device. FIG. 8 is a schematic diagram illustrating an imaging optical system of the shape measuring apparatus according to the first embodiment. FIG. 9 is a perspective view illustrating a measurement target of the shape measuring apparatus according to the first embodiment. FIG. 10 is an explanatory diagram illustrating a measuring operation of the shape measuring device according to the first embodiment. FIG. 11 is a diagram illustrating an example of an imaging region of the imaging element. FIG. 12 is a flowchart illustrating a process in the teaching mode of the shape measuring apparatus according to the first embodiment. FIG. 13 is a diagram illustrating a screen for setting an enlarged image area. FIG. 14 is a diagram relating to setting of an enlarged image area on an image. FIG. 15 is a diagram illustrating an example of an image of projection light in which an enlarged image area is set on an image. FIG. 16 is an explanatory diagram of an example regarding each position of the image of the projection light. FIG. 17 is a diagram of an example showing coordinates at each position of the image of the projection light. FIG. 18 is an example of an angle of the galvanomirror at each position of the image of the projection light. FIG. 19 is a diagram illustrating an example of a rotation operation of the galvano scanner. FIG. 20 is an explanatory diagram of an example regarding each position of the image of the projection light. FIG. 21 is a diagram illustrating an example of coordinates at each position of the image of the projection light. FIG. 22 is a diagram illustrating an example of the angle of the galvanomirror at each position of the image of the projection light. FIG. 23 is a diagram illustrating an example of a rotation operation of the galvano scanner. FIG. 24 is a flowchart illustrating a measuring operation of the shape measuring apparatus according to the first embodiment. FIG. 25 is an explanatory diagram illustrating a measuring operation of the shape measuring device according to the second embodiment. FIG. 26 is a diagram illustrating a corrected distortion image. FIG. 27 is a flowchart illustrating a measuring operation of the shape measuring apparatus according to the second embodiment. FIG. 28 is a diagram illustrating a configuration of an inline system including the shape measuring device according to the third embodiment. FIG. 29 is a diagram illustrating a configuration of an inline system including the shape measuring device according to the fourth embodiment. FIG. 30 is a schematic diagram illustrating an imaging optical system of the shape measuring apparatus according to the fifth embodiment. FIG. 31 is a diagram illustrating a partial configuration of a system including the shape measuring apparatus according to the sixth embodiment. FIG. 32 is an explanatory diagram illustrating a measuring operation of the shape measuring device according to the sixth embodiment. FIG. 33 is a schematic diagram showing a configuration of a system having a shape measuring device. FIG. 34 is a diagram illustrating the configuration of the structure manufacturing system. FIG. 35 is a flowchart showing the structure manufacturing method.

  Hereinafter, embodiments of the present disclosure will be described in detail with reference to the drawings. The components described in the following embodiments include those that can be easily assumed by those skilled in the art, those that are substantially the same, and those that are in an equivalent range. Furthermore, the components described below can be appropriately combined.

  In the following description, two coordinate systems are set. One coordinate system is a three-dimensional coordinate system. For example, an XYZ orthogonal coordinate system is set as the three-dimensional coordinate system. In the XYZ orthogonal coordinate system, the Z-axis direction is set, for example, in the vertical direction, and the X-axis direction and the Y-axis direction are set, for example, in directions parallel to the horizontal direction and orthogonal to each other. The rotation (tilt) directions around the X axis, Y axis, and Z axis are defined as θX, θY, and θZ axis directions, respectively. The other one coordinate system is a two-dimensional coordinate system. For example, an ij orthogonal coordinate system is set as the two-dimensional coordinate system. In the ij orthogonal coordinate system, the i direction and the j direction are set, for example, in directions orthogonal to each other. The ij rectangular coordinate system can be converted into an XYZ rectangular coordinate system using a predetermined formula.

[First Embodiment]
FIG. 1 is a diagram illustrating a partial configuration of a system including the shape measuring apparatus according to the first embodiment. The system illustrated in FIG. 1 is, for example, a structure manufacturing system 200 including the shape measuring device 1. The details of the structure manufacturing system 200 will be described later. FIG. 1 shows a part of a structure manufacturing system 200. The structure manufacturing system 200 includes the shape measuring device 1 and two transfer devices 206 provided on both sides of the shape measuring device 1. Of the two transfer devices 206, one transfer device 206 carries the object M to be measured (measurement object) processed in the previous process into the shape measuring device 1. The pre-process is, for example, a forming process of forming the measuring object M. The transport device 206 on the other side unloads the measurement target M whose shape has been measured by the shape measuring device 1 and transports it to a subsequent process. The post-process includes, for example, a heat treatment process of heat-treating the measurement target M, a cleaning process of cleaning the measurement target M, a second molding process of molding a different portion of the measurement target M from the previous process, and a shape defect. And a repairing step of repairing the measured object M. Each transport device 206 is, for example, a multi-axis manipulator. The structure manufacturing system 200 is a so-called in-line system that transports the measurement target M in series in the order of the one-side transport device 206, the shape measuring device 1, and the other-side transport device 206.

  Next, the shape measuring device 1 will be described with reference to FIGS. FIG. 2 is a diagram illustrating an appearance of the shape measuring apparatus according to the first embodiment. FIG. 3 is a schematic diagram illustrating a schematic configuration of the shape measuring apparatus according to the first embodiment.

  The shape measuring device 1 measures a three-dimensional shape of the measurement target M using, for example, a light cutting method. The shape measuring device 1 includes a probe moving device 2, an optical probe 3, a control device 4, and a holding and rotating device 7. FIG. 2 shows the appearance of the probe moving device 2, the optical probe 3, and the holding and rotating device 7 in the shape measuring device 1. FIG. 3 shows the entire configuration of the shape measuring device 1.

  The shape measuring device 1 measures the shape of the measuring object M held by the holding and rotating device 7 provided on the base B. The shape measuring device 1 is a moving mechanism in which the probe moving device 2 and the holding and rotating device 7 move the optical probe 3 and the measuring object M relatively. The optical probe 3 projects the linear projection light L onto the measurement target M while projecting the projection light L in a linear pattern onto the measurement target M while relatively moving with respect to the measurement target M. Is imaged. The shape measuring device 1 processes the image of the image of the measurement target M onto which the linear projection light L captured by the optical probe 3 is projected by the control device 4, and measures the shape of the measurement target M.

  The probe moving device 2 controls the optical probe 3 so that the linear projection light L projected from the optical probe 3 is projected onto a measurement range in which the shape of the measurement target M is measured. The object M is moved. Here, the measurement range is a predetermined range set for measuring the shape of the measurement target M, and specifically, at least a part of the range set as a measurement target on the surface of the measurement target M. Has become. That is, the measurement range is a range where the projection light L is projected when the projection light L is moved while projecting the linear projection light L. The probe moving device 2 moves the optical probe 3 with respect to the measurement target M so that the projection position of the linear projection light L can sequentially move on the measurement target M.

  As shown in FIG. 3, the probe moving device 2 includes a driving unit 10 for moving the optical probe 3 and a position detecting unit 11 for detecting the position of the optical probe 3. The driving unit 10 includes an X moving unit 50X, a Y moving unit 50Y, a Z moving unit 50Z, a first rotating unit 53, and a second rotating unit 54. The position detecting unit 11 is a three-dimensional space (XYZ orthogonal coordinates) using position detecting means such as an encoder provided in the X moving unit 50X, the Y moving unit 50Y, the Z moving unit 50Z, the first rotating unit 53, and the second rotating unit 54. System), the position of the optical probe 3 is detected.

  The X moving unit 50X is provided movably in the direction of arrow 62 with respect to the base B, that is, in the X-axis direction. The Y moving unit 50Y is provided so as to be movable with respect to the X moving unit 50X in the direction of arrow 63, that is, in the Y axis direction. The Y moving part 50Y is provided with a holding body 52 extending in the Z-axis direction. The Z moving unit 50Z is provided movably with respect to the holder 52 in the direction of arrow 64, that is, in the Z-axis direction. The probe moving device 2 is an XYZ moving mechanism that enables the X moving unit 50X, the Y moving unit 50Y, and the Z moving unit 50Z to move the optical probe 3 in the X-axis direction, the Y-axis direction, and the Z-axis direction. The probe moving device 2 according to the first embodiment includes an X moving unit 50X, a Y moving unit 50Y, and a Z moving unit 50Z, and moves the optical probe 3 in three axes of the X-axis direction, the Y-axis direction, and the Z-axis direction. Although a possible mechanism was used, the present invention is not limited to this. The probe moving device 2 may be configured not to include a part of the X moving unit 50X, the Y moving unit 50Y, and a part of the Z moving unit 50Z, that is, a device having two axes and one axis of movement. Further, the shape measuring apparatus 1 may have a structure in which the optical probe 3 is not moved in the XYZ axes, and in this case, a structure in which the measurement target M is moved.

  The first rotating unit 53 rotates the optical probe 3 supported by a holding member 55 described later in a rotation direction about a rotation axis (rotation axis) 53a parallel to the X axis, that is, the direction of the arrow 65 (in other words, the θX axis Direction) to change the attitude of the optical probe 3. The second rotating portion 54 rotates the optical probe 3 supported by the holding member 55 around an axis parallel to a direction in which a first holding portion 55A described later extends, that is, the direction of the arrow 66 (in other words, (in the θZ axis direction) to change the attitude of the optical probe 3. The probe moving device 2 is a θ moving mechanism that enables the first rotating unit 53 and the second rotating unit 54 to rotate the optical probe 3 in the directions indicated by arrows 65 and 66. The probe moving device 2 according to the first embodiment includes the first rotating unit 53 and the second rotating unit 54, but is not limited thereto. The probe moving device 2 may have a structure including only one rotating unit. The shape measuring device 1 may have a structure in which the optical probe 3 does not rotate, and in this case, a structure in which the measurement target M is rotated.

  Further, the shape measuring device 1 has a reference sphere 73a and a reference sphere 73b. The reference sphere 73a and the reference sphere 73b are arranged on the base B. The shape measuring device 1 uses the reference sphere 73a and the reference sphere 73b to calibrate the optical probe 3 that is moved by the probe moving device 2.

  As shown in FIGS. 2 and 3, the holding and rotating device 7 includes a table 71 for holding the measurement target M, a rotation driving unit 72 for rotating the table 71 in the θZ axis direction, that is, a direction of an arrow 68, and a table 71. And a position detection unit 73 for detecting the position in the rotation direction of. The position detection unit 73 is an encoder device that detects the rotation of the rotation axis Ax of the table 71 or the rotation drive unit 72. The holding and rotating device 7 rotates the table 71 by the rotation driving unit 72 based on the result detected by the position detection unit 73.

  The driving of the probe moving device 2 and the holding and rotating device 7 is controlled by the control device 4 based on the detection results of the position detection unit 11 and the position detection unit 73. The shape measuring device 1 projects the linear projection light L projected from the optical probe 3 onto an arbitrary measurement range of the measuring object M by driving the holding / rotating device 7 and the probe moving device 2. That is, the probe moving device 2 rotates the optical probe 3 in the rotation directions of the arrows 65 and 66 by the first rotating unit 53 and the second rotating unit 54 to change the attitude of the optical probe 3, thereby obtaining the optical probe 3. At least one of a projection direction of the projection light L projected on the measurement target M by the (light projection device 8 described later) and a photographing direction in which the optical probe 3 (imaging device 9 described later) captures the measurement target M. To change. In addition, the holding and rotating device 7 rotates the measurement target M in the rotation direction of the arrow 68 so that the position at which the projection light L is projected by the optical probe 3 and the position at which the measurement target M is imaged by the optical probe 3 are set. Change.

  The holding member 55 supports the optical probe 3. The holding member 55 extends in a direction orthogonal to the rotation axis 53a, and is provided with a first holding portion 55A supported by the first rotating portion 53, and provided at the + Z side end of the first holding portion 55A and the rotation axis 53a. And a second holding portion 55B extending in parallel. The first holding unit 55 </ b> A has an end on the + Z side farther from the measurement target M than the optical probe 3. And the second holder 55B are orthogonal to the first holder 55A. The optical probe 3 is supported at an end on the + X side of the second holding unit 55B. The first rotating unit 53 is arranged such that the position of the rotation axis 53 a is closer to the measuring object M than the optical probe 3. A counterbalance 55c is provided at an end of the first holding unit 55A on the side closer to the measurement target M. Therefore, the moment generated on the holding member 55 side and the moment generated on the counterbalance 55c side are balanced with respect to the rotation axis 53a of the first rotating part 53.

  An XYZ orthogonal coordinate system is set in the probe moving device 2 and the holding and rotating device 7. That is, the coordinate system for moving the optical probe 3 and the coordinate system for moving the measurement target M are XYZ orthogonal coordinate systems. For this reason, the position of the optical probe 3 and the position of the measuring object M can be acquired as positions in the XYZ orthogonal coordinate system.

  The optical probe 3 includes a light projecting device 8 and an imaging device 9. The light projecting device 8 functions as a light projecting unit that projects the projection light L onto the measuring object M. The imaging device 9 functions as an imaging unit that captures an image including the measurement target M onto which the projection light L is projected. The light emitting device 8 and the imaging device 9 are fixed by a common housing. Therefore, the mutual positional relationship between the projection direction of the linear projection light by the light projection device 8 and the imaging direction by the imaging device 9 is kept fixed. Then, based on the projection direction of the linear projection light, the imaging direction of the imaging device 9, and the positional relationship between the two, the position of the image of the linear projection light L detected by the imaging device 9 is determined by triangulation. Based on this, coordinates in a three-dimensional space are obtained for an area on the measurement target M onto which the linear projection light L is projected. Note that the positional relationship between the light emitting device 8 and the imaging device 9 may be variable.

  The light projecting device 8 projects the linear projection light L as measurement light onto the measurement range of the measurement target M held by the holding and rotating device 7. The light emitting device 8 is controlled by the control device 4. The light projecting device 8 includes a light source 12 and a projection optical system 13. The light source 12 of the present embodiment includes, for example, a laser diode. Note that the light source 12 may include a solid-state light source such as a light emitting diode (LED) other than the laser diode. In addition, the light amount of the light source 12 is controlled by the control device 4.

  The projection optical system 13 adjusts the spatial light intensity distribution of the light emitted from the light source 12 to generate linear projection light L. In other words, the projection optical system 13 condenses the light from the light source 12 in one axis direction within a plane orthogonal to the projection direction of the projection light L, and generates the linear projection light L. The uniaxial direction is a direction on a plane orthogonal to the projection direction of the projection light L, and is a direction in which the projection light L is collected. The projection optical system 13 includes a condenser lens 15 and a cylindrical lens 16. The condenser lens 15 condenses the light from the light source 12 to a focal point. The cylindrical lens 16 diverges the light from the condensing lens 15 in a direction orthogonal to the projection direction of the projection light in a direction orthogonal to the uniaxial direction, thereby forming linear projection light L. Note that the projection optical system 13 is not limited to the configuration including the condenser lens 15 and the cylindrical lens 16. The projection optical system 13 may be one optical element or may include a plurality of optical elements. The light emitted from the light source 12 is condensed by the projection optical system 13 in a plane perpendicular to the projection direction in one axis direction, so that a linear projection light having a direction perpendicular to the one axis direction as a longitudinal direction. L. The linear projection light L is emitted from the light projecting device 8 in a projection direction toward the measurement target M.

  FIG. 4 is a schematic diagram illustrating an optical probe of the shape measuring apparatus according to the first embodiment. FIG. 4 shows a case where one axial direction of the cylindrical lens 16 in the projection optical system 13 of the light projection device 8 is orthogonal to the projection direction of the projection light L and the axial direction (X-axis direction) of the rotation axis 53a. In FIG. 4, the plane including the projection direction of the projection light L and the imaging direction of the imaging device 9 is a plane orthogonal to the axial direction (X-axis direction) of the rotation axis 53a. Further, in FIG. 4, the projection direction of the projection light L is the Z-axis direction. As shown in FIGS. 3 and 4, a part of the surface along the projection direction of the linear projection light L projected from the light projecting device 8 is an imaging surface (imaging surface) of the imaging device 20 described in detail later. And conjugate. Hereinafter, this surface is referred to as a measurement surface 21a. Here, the blur in the direction (Y-axis direction) orthogonal to the longitudinal direction (X-axis direction) of the linear projection light L changes along the Z-axis around the focal point of the projection optical system 13. Therefore, the range of the measurement surface 21a in the Z-axis direction is set based on the degree of blur in the direction orthogonal to the longitudinal direction of the linear projection light L. As an example, assuming that the center position of the measurement surface 21a is O, the projection optical system 13 and the imaging device 9 described later are installed so that the projection optical system 13 is focused on the center position O. When the light projecting device 8 has the positional relationship shown in FIG. 4, the measurement surface 21a is a surface including the longitudinal direction (X-axis direction) of the projection light L and the projection direction (Z-axis direction) of the projection light L. 3 and a plane perpendicular to the plane of FIG. 3 and FIG. The measurement surface 21a is a surface including the focal point of the projection optical system 13. Further, the measurement surface 21a is a surface that intersects with a surface of the measurement target M that is a measurement range. That is, the projection optical system 13 controls the optical system of the condensing lens 15 and the cylindrical lens 16 so that the measurement surface 21a including the focal point of the linear projection light L intersects the surface of the measurement target M which is the measurement range. An element is arranged. The area of the measurement surface 21a (also referred to as the measurement surface area) corresponds to the area of the imaging visual field of the imaging device 9, that is, the range where the image is captured by the imaging device 9, and is a rectangular area. Here, assuming that the center position of the measurement surface 21a is O, the center position O of the measurement surface 21a corresponds to the center position O 'of the measurement visual field region 26 on the imaging surface of the imaging element 20 described later in detail.

  FIG. 3 shows a case where one axial direction of the cylindrical lens 16 in the projection optical system 13 of the light projecting device 8 is orthogonal to the projection direction of the projection light L and the axial direction (X-axis direction) of the rotation axis 53a. In FIG. 3, the plane including the projection direction of the projection light L and the imaging direction of the imaging device is a plane orthogonal to the axial direction (X-axis direction) of the rotation axis 53a. When the light projecting device 8 has the positional relationship shown in FIG. 3, the shape measuring device 1 has a plane in which the projection light L emitted from the light projecting device 8 is orthogonal to the projection direction from the light projecting device 8. When projected on the measurement target M, the longitudinal direction of the projection light L is parallel to the rotation axis 53a. When the projection light L has the positional relationship shown in FIG. 3, the projection light L has a longitudinal direction parallel to the rotation axis 53a. By rotating the projection optical system 13, if the one axis direction is not orthogonal to the axis direction (X-axis direction) of the rotation axis 53a, the longitudinal direction of the projection light L is not parallel to the rotation axis 53a.

  As described above, the direction of the projection light L can be changed by rotating the optical probe 3 by the second rotating unit 54 in the longitudinal direction of the linear projection light L projected on the measurement target M. It is not limited to being parallel to the rotation axis 53a. Here, the term “direction of the projection light L” indicates the direction of the projection light L in the longitudinal direction. For example, by changing the direction of the longitudinal direction of the linear projection light L so as to follow the direction in which the surface of the measurement target M spreads, the shape of the measurement target M can be efficiently measured. Further, by changing the projection direction of the projection light L by the second rotating unit 54, the shooting direction by the imaging device 9 also changes. Therefore, for example, even if the measurement target M has a shape in which convex portions such as gears are arranged, the shape of the tooth bottom can also be measured by setting the longitudinal direction and the photographing direction of the projection light L along the tooth trace. can do.

  The projection optical system 13 uses an optical element including a condenser lens 15 and a cylindrical lens 16 to convert the light from the light source 12 into a linear projection light. It may be. For example, instead of the condenser lens 15 and the cylindrical lens 16, a diffractive optical element such as CGH may be used, and the light from the light source 12 may be used as linear projection light. A projection optical system 13 including a diffractive optical element such as CGH adjusts a spatial light intensity distribution of light emitted from the light source 12.

  As shown in FIGS. 3 and 4, the imaging device 9 captures an image of the measurement target M including the projection light L projected on the surface of the measurement target M, and generates image data of the captured image. Things. The imaging device 9 includes an imaging element 20, an imaging optical system 21, a diaphragm 23, and a diaphragm driving unit 24. The projection light L projected on the measuring object M from the light projecting device 8 is scattered on the surface of the measuring object M, and at least a part of the light is incident on the imaging optical system 21. The imaging optical system 21 functions as an imaging unit that forms an image including the measurement target M. Specifically, the linear projection light L projected on the measurement target M by the light projecting device 8 is used. The image of the measuring object M including the image of the image is formed on the image sensor 20. The imaging element 20 captures an image formed by the imaging optical system 21. The image sensor 20 generates image data by performing image processing based on the received light reception signal. The control device 4 is connected to the image sensor 20 and outputs the generated image data to the control device 4. The diaphragm 23 has an opening whose size can be changed, and the amount of light passing through the imaging optical system 21 can be controlled by changing the size of the opening. The size of the opening of the diaphragm 23 can be adjusted by the diaphragm driving unit 24. The diaphragm driving unit 24 is controlled by the control device 4.

  As shown in FIGS. 3 and 4, the imaging optical system 21 forms an image of the measurement target M onto which the projection light L is projected on the imaging surface 20 a of the imaging device 20. Here, the imaging optical system 21 is configured such that the measurement surface 21a, which is a surface including the focal point of the projection light L, and the imaging surface 20a (imaging surface) of the imaging device 20 have a conjugate relationship. For this reason, the imaging optical system 21 makes the measurement surface 21a and the imaging surface 20a of the imaging device 20 conjugate surfaces, so that the image on the measurement surface 21a is different from the image focused on the imaging surface 20a of the imaging device 20. Become. When the position of the surface of the measurement target M intersecting with the measurement surface 21a changes in the projection direction of the projection light L (that is, when the shape of the measurement target M changes), the imaging is performed in accordance with the change. The position of the image of the projection light L formed on the imaging surface 20a of the element 20 changes.

  FIG. 5 is a diagram illustrating an example of an image captured by the imaging device. FIG. 6 is a diagram showing a coordinate system of the optical probe. An image 28 illustrated in FIG. 5 is an image captured in the imaging region 25 on the imaging surface 20a of the imaging device 20. The imaging region 25 is a range in which the imaging device 20 can capture an image. As shown in FIG. 6, the imaging region 25 of the imaging element 20 is a square region including a plurality of pixels, and thus the image 28 illustrated in FIG. 5 is also a square region. The imaging region 25 can be said to be all regions of the image 28 captured by the imaging device 20.

  A region formed by forming an image of the measurement surface 21a on the imaging surface 20a of the imaging device 20 is referred to as a measurement visual field region 26. The measurement visual field area 26 is an area smaller than the imaging area 25 of the imaging element 20. The measurement visual field area 26 is not limited to an area smaller than the imaging area 25, and may be, for example, an area having the same size as the imaging area 25. That is, the measurement visual field region 26 may be the imaging region 25 of the imaging device 20. The measurement visual field region 26 is formed on the imaging surface 20a of the imaging device 20, and is a region corresponding to the region of the measurement surface 21a. That is, when the imaging magnification of the imaging device 9 is a predetermined imaging magnification, the area including the measurement surface 21a is enlarged or reduced based on the imaging magnification, so that the measurement visual field region 26 formed on the imaging surface 20a is enlarged. Is enlarged or reduced. The image 28 captured by the image sensor 20 includes a measurement image area 27 which is an image area corresponding to the measurement visual field area 26. Since the measurement image area 27 is an image of the image of the measurement surface 21a, the measurement image area 27 is an image including the image of the measurement target M onto which the linear projection light L is projected.

  Here, an ij orthogonal coordinate system is set for the optical probe 3. For this reason, the coordinate system of the imaging region 25 in the imaging device 20 of the optical probe 3 is an ij orthogonal coordinate system. The coordinate system of the image 28 captured by the image sensor 20 is also the ij orthogonal coordinate system. Specifically, the image 28 is a rectangular image in which the j direction is the horizontal direction (the horizontal direction in FIG. 5) and the i direction is the vertical direction (the vertical direction in FIG. 5). The position on the image 28 can be obtained as a position in the ij orthogonal coordinate system.

  The measurement image area 27 is calibrated so as to have a predetermined positional relationship with the image 28. In other words, the measurement visual field region 26 is calibrated so as to have a predetermined positional relationship with the imaging region 25 of the imaging device 20. For example, the measurement image area 27 (or the measurement field area 26) is calibrated so as to be located at the center in the i direction and the center in the j direction with respect to the image 28 (or the imaging area 25). I have. The longitudinal direction of the image of the projection light L included in the measurement image area 27 is a direction along the j direction.

Further, in the imaging area 25 of the image sensor 20, the sensor origin I _b is set at ij orthogonal coordinate system. Therefore, the sensor origin _Ib is also defined in the measurement image area 27 of the image 28 captured by the image sensor 20. The sensor origin _Ib is a reference position indicating the positional relationship between the ij rectangular coordinate system and the XYZ rectangular coordinate system. That is, the sensor origin _Ib is a position serving as a reference for converting a position in the ij rectangular coordinate system into a position in the XYZ rectangular coordinate system based on the positional relationship between the ij rectangular coordinate system and the XYZ rectangular coordinate system. ing. The sensor origin _Ib may be set at any position on the image 28, for example, set at the center of the image 28. The sensor origin _Ib is used to measure the shape of the measurement target M (generate point cloud data).

  Although details will be described later, the imaging device 9 of the present embodiment forms an image by changing the state of the image including the measurement target M by the imaging optical system 21, and forms an image whose state changes by the imaging element 20. An image is taken and image data of a distorted image distorted with respect to the image is generated.

  Next, the control device 4 will be described with reference to FIG. FIG. 7 is a block diagram illustrating a schematic configuration of the control device. The control device 4 controls each part of the shape measuring device 1. The control device 4 calculates the three-dimensional shape of the measurement range of the measurement target M by performing arithmetic processing based on the imaging result of the optical probe 3 and the position information of the probe moving device 2 and the holding and rotating device 7. The shape information in the present embodiment includes information indicating at least one of the shape, dimensions, unevenness distribution, surface roughness, and the position (coordinates) of a point group on the measurement range for at least a part of the measurement target M. . The control device 4 includes a control unit 30, a storage unit 31, an input unit 32, and a display unit 33, as shown in FIG.

  The control device 4 is connected to the probe moving device 2, the optical probe 3, and the holding and rotating device 7 of the shape measuring device 1. That is, the control device 4 may be, for example, a computer connected to each of the devices 2, 3, and 7 of the shape measuring device 1, or a host provided in a building in which each of the devices 2, 3, and 7 of the shape measuring device 1 is installed. A computer may be used. Further, the shape measuring device 1 physically separates the control device 4 from the probe moving device 2, the optical probe 3, and the holding and rotating device 7, and separates the control device 4 from the probe moving device 2, the optical probe 3 and the holding and rotating device. The control device 4 is connected to the probe moving device 2, the optical probe 3, and the holding and rotating device 7 using a communication means such as the Internet, provided at a position away from the building where the device 7 is installed. You may. Further, in the control device 4, the control unit 30, the storage unit 31, the input unit 32, and the display unit 33 may be arranged in different places.

  The control unit 30 includes a measurement range setting unit 36, a dimming region setting unit 37, a dimming control unit 38, an image region setting unit 34, a measurement unit (shape calculation unit) 39, and an operation control unit 40. It is provided as a functional part. Here, the control unit 30 includes a measurement range setting unit 36, a dimming region setting unit 37, a dimming control unit 38, an image region setting unit 34, a measuring unit (shape calculating unit) 39, and an operation control unit. Forty functions may be realized by hardware, these functions may be realized by software, or hardware and software may be realized in combination.

  The measurement range setting unit 36 sets a measurement range in which the shape of the measurement target M is measured. The measurement range setting unit 36 sets a measurement range based on an instruction input from the input unit 32. Further, the measurement range setting unit 36 sets the measurement range based on an area specified in advance in the design data or the CAD data of the measurement target M included in the specification data 49 described later stored in the storage unit 31. You may.

  The light control area setting unit 37 sets a light control area. The dimming area is an area for detecting the brightness of the captured image in the image 28 captured by the image sensor 20. The light control area setting unit 37 sets a light control area settable range based on the set position information of the measurement range, and sets the light control area based on the set light control area settable range. The light control area settable range is a range set based on the position information of the measurement range in the image 28 captured by the imaging device 9, and is a range in which the light control area can be set. The light control area setting unit 37 may set a light control area settable range based on an instruction input from the input unit 32. Further, the light control area setting unit 37 sets the light control area based on the area specified in advance in the design data or CAD data of the measurement target M included in the specification data 49 described later stored in the storage unit 31. A possible range may be set.

  The dimming control unit 38 acquires the pixel value of the brightest pixel for each pixel row detected in the dimming region. The dimming control unit 38 controls a signal for controlling the amount of light projected on the light source 12, a signal for controlling the diaphragm driving unit 24, or a signal obtained when the imaging device 20 performs imaging according to the magnitude of the acquired pixel value. And outputs a signal for controlling the exposure time. Regarding the control of the exposure time, the exposure time when acquiring image data of one image 28 is controlled, and the time during which the imaging surface 20a is exposed by a mechanical shutter (not shown) incorporated in the imaging device 20 is controlled. Or you may. The dimming control unit 38 controls the amount of light emitted from the light source 12, the amount of light received by the image sensor 20, the amount of exposure when the image sensor 20 generates image data, or The input / output characteristics of the element 20 (such as sensitivity or an amplification factor for a signal detected by each pixel of the imaging element), that is, various conditions (dimming conditions) when image data is acquired by the optical probe 3 are controlled.

  The image area setting unit 34 sets the predetermined area as an area corresponding to an enlarged image area in which a part of the image area of the image 28 is enlarged. Hereinafter, for convenience of description, this predetermined area is referred to as an enlargement target area. The enlargement target area is an area in a predetermined range arbitrarily set by, for example, an operator's input or the like. When the enlargement target area is set by the image area setting unit 34, the enlargement target area is enlarged by the imaging device 9, thereby generating the image 28 including the enlarged image area. The enlargement target area may be an image area set for the image 28 or an area set for the measurement shape of the measurement target M obtained by shape measurement (point cloud area described later). It may be. The image area setting unit 34 sets the enlargement target area so that the image 28 captured by the imaging device 9 is a distorted image including the enlarged image area. Note that the image area setting unit 34 may set a predetermined area other than the enlargement target area set as the area corresponding to the enlarged image area as the area corresponding to the reduced image area. Hereinafter, for convenience of description, a predetermined area set as an area corresponding to the reduced image area is referred to as a reduction target area. This reduced image area is an image area reduced compared to the enlarged image area. Further, the image area setting unit 34 may set the enlargement target area such that the entire image area in the image 28 becomes the enlarged image area. The enlarged image area is an image area for measuring the shape of the measurement target M in detail (with high resolution). The reduced image region is a region where the shape is roughly measured as compared with the enlarged image region, that is, the shape is measured with a lower resolution than the enlarged image region. Since the enlargement target area is set by the image area setting unit 34, the image 28 captured by the imaging device 9 includes at least the enlarged image area. That is, since the image 28 captured by the imaging device 9 includes at least the enlarged image region, the image 28 includes the enlarged image region and the reduced image region, or includes only the enlarged image region. The image area setting unit 34 sets at least an enlargement target area based on an instruction input from the input unit 32 of the control device 4, design data of the measurement target M, information on the shape of the measurement target M, and the like. ing. The image area setting unit 34 outputs the information on the set position of the enlargement target area to the storage unit 31 as the area setting data 43 of the image area. That is, when the enlargement target area to be set is input, the image area setting unit 34 associates the set enlargement target area, the position of the enlargement target area, and the enlargement magnification set in the enlargement target area. Then, it is generated as information on the position of the enlargement target area. The information on the position of the enlargement target area is the coordinates of the set image area in the image 28, and is the coordinates of the position in the ij orthogonal coordinate system.

  The measurement unit 39 measures the shape of the measurement target M in the set measurement range. The image data of the image 28 generated by the imaging device 20 of the imaging device 9 is input to the measurement unit 39. In addition, information on the operation of each unit, specifically, information on the relative position between the optical probe 3 and the measurement target M is input from the operation control unit 40 to the measurement unit 39. The information on the relative position is acquired based on, for example, the position (coordinates) of the measurement target M and the position (coordinates) of the optical probe 3. The position of the optical probe 3 is obtained based on the position detected by the position detector 11 of the probe moving device 2. The position of the measurement target M is obtained based on the position detected by the position detection unit 73 of the holding and rotating device 7. Then, based on the position of the optical probe 3 detected by the position detection unit 11 and the position of the measurement target M detected by the position detection unit 73, information on the relative position is generated. The measuring unit 39 detects a linear image of the projection light L included in the measurement image area 27 of the image 28, and detects the position of the image of the projection light L, the position of the optical probe 3, and the position of the measurement target M in the image 28. Based on the above, the shape of the measurement target M is measured.

As an example, a specific process of measuring the shape of the measurement target M by the measurement unit 39 will be described. The measurement unit 39 acquires the position of the image of the projection light L located in the measurement image area 27 of the image 28. The position of the image of the projection light L located in the measurement image area 27 of the image 28 is a position in the ij orthogonal coordinate system. The measuring unit 39 acquires the position of the pixel corresponding to the image of the linear projection light L on the image 28 in the ij orthogonal coordinate system. Measuring unit 39 obtains the position of a pixel corresponding to the image of the projection light L, obtains the positional relationship between the position and the sensor home I _b of the pixel. That is, the measurement unit 39 acquires the position of the pixel relative to the sensor origin I _b.

The measuring section 39 acquires the position of the optical probe 3 at the time of acquiring the image data from the position detecting section 11 and acquires the position of the measuring object M from the position detecting section 73. That is, the measuring unit 39 acquires the positions of the X moving unit 50X, the Y moving unit 50Y, the Z moving unit 50Z, the first rotating unit 53, and the second rotating unit 54 from the position detecting unit 11, and Is acquired from the position detection unit 73. The position of the optical probe 3 and the position of the measuring object M are in the XYZ orthogonal coordinate system. When acquiring the position of the optical probe 3 and the position of the measuring object M, the measuring unit 39 acquires the positional relationship between the position of the optical probe 3 and the position of the measuring object M, and the position of the optical probe 3 and the sensor. obtaining a positional relationship between the origin I _b. That is, the measurement unit 39 obtains the relative position of the optical probe 3 relative to the position of the measuring object M, the position of the optical probe 3 relative to the sensor origin I _b. Measurement unit 39, the relative position of the optical probe 3 relative to the position of the measuring object M, based on the position of the optical probe 3 relative to the sensor origin I _b, to obtain the position of the measuring object M with respect to the sensor origin I _b.

The measurement unit 39, the position of the pixel of the image of the projection light L to the sensor origin I _b, on the basis of the position of the measuring object M with respect to the sensor origin I _b, the projection light L with respect to the position of the measuring object M By acquiring the positions of the pixels of the image, the shape of the measurement target M is calculated (point cloud data of the measurement target M is generated). That is, when measuring the shape of the measuring object M, the measuring unit 39 generates point cloud data of a point cloud from the image of the projection light L included in the measurement image area 27 of the image 28. The point group is a plurality of points generated by calculating three-dimensional (XYZ) coordinate values of each pixel of the captured image 28 and displayed on the display unit 33 described later in detail. That is, this point group is a point representing the shape of the measurement object. The point cloud data is data of three-dimensional coordinate values at each point of the point cloud. In the point group, a plurality of points are generated along the longitudinal direction of the image of the projection light L. The point group is the number of points corresponding to pixels arranged in the longitudinal direction corresponding to the image of the projection light L. On the other hand, for example, one point group is generated in a direction (lateral direction) orthogonal to the longitudinal direction of the image of the projection light L. Therefore, a point group of one line along the image of the projection light L is obtained for one image 28. The coordinate value of each point of the point group is calculated based on the position of the pixel corresponding to the image of the projection light L in the measurement image area 27. That is, the measurement unit 39, the position of the pixel of the image of the projection light L, based on the sensor origin I _b, it is converted to the XYZ orthogonal coordinate system. Further, the measuring unit 39 adds the position of the measurement target M with respect to the sensor origin _Ib to the position of the pixel of the image of the projection light L in the XYZ orthogonal coordinate system, so that each point group in the image of the projection light L The coordinate value of the point in the XYZ orthogonal coordinate system is calculated. Thus, the measurement unit 39, the position of the pixel to be two-dimensional coordinates, relative to the sensor origin I _b, by converting the 3-dimensional coordinates, to generate a point cloud data of the point group.

  In addition, the measuring unit 39 relatively moves the optical probe 3 and the measuring object M by the probe moving device 2 and the holding / rotating device 7, thereby sequentially moving the position where the projection light L is projected. An image 28 including the measurement image area 27 is captured by the imaging device 9. The measurement unit 39 acquires the position information of the probe moving device 2 and the holding and rotating device 7 from the position detection unit 11 and the position detection unit 73 at the timing when the image is captured by the imaging device 9. The measurement unit 39 performs optical measurement based on the acquired position information of the probe moving device 2 and the holding / rotating device 7 and the image data of the image 28 including the image of the projection light L of the measurement image area 27 acquired by the imaging device 9. Point cloud data of a point cloud in the direction in which the probe 3 moves is generated.

  Thereby, the point cloud is generated along the longitudinal direction of the image of the projection light L and along the direction in which the projection light L moves. That is, the measurement unit 39 moves the projection light L (the optical probe 3) relative to the measurement target M by the driving unit 10 and the rotation driving unit 72, and captures a plurality of images 28 at predetermined intervals. Generates a point cloud of a plurality of lines. Then, the measurement unit 39 measures the shape of the measurement target M based on the coordinate values for each point group generated along the longitudinal direction of the image of the projection light L and the direction in which the projection light L moves. Note that the direction in which the projection light L (the optical probe 3) is moved when generating a point group of a plurality of lines is a direction that intersects the longitudinal direction of the projection light L.

  Here, in the point group arranged in the longitudinal direction of the projection light L, the interval between the points is set based on the area setting data 43 of the image area set by the image area setting unit 34. In the point group arranged in the direction in which the projection light L (the optical probe 3) moves, the interval between the points is set based on the measurement point interval information. The measurement point interval information is information for setting an interval between points arranged in a direction in which the projection light L moves, and can be set by an operator. The shape measuring device 1 arranges the imaging timing of the imaging device 9 at a constant interval, and controls the moving speed of the driving unit 10 and the rotation driving unit 72 based on the measurement point interval information, so that the projection light L is arranged in the moving direction. Let the interval between points be the set interval.

  The operation control unit 40 controls the operation of each unit of the shape measuring device 1 including the probe moving device 2, the optical probe 3, and the holding and rotating device 7. The operation control unit 40 controls the operation of the probe moving device 2, the optical probe 3, and the holding / rotating device 7 based on the operation control information created by the control unit 30. The operation control unit 40 outputs operation control information to the measurement unit 39.

  The storage unit 31 is a storage device that stores various programs and data, such as a hard disk and a memory. The storage unit 31 has area setting data 43 of an image area, rotation operation information 44, a condition table 46, a shape measurement program 48, and specification data 49. The storage unit 31 stores various programs and data used for controlling the operation of the shape measuring device 1 in addition to these programs and data.

  The area setting data 43 of the image area includes information on the position of the enlargement target area set by the image area setting unit 34. When the enlargement target area is an image area set for the image 28, the information on the position of the enlargement target area includes the position in the measurement image area 27 in the longitudinal direction of the image of the projection light L and the enlargement image area at the position. The information is information in which the enlargement magnification set in the enlargement target area is associated with the enlargement magnification.

  Note that the region setting data 43 of the image region may include information on the position of the reduction target region set by the image region setting unit 34. When the reduction target area is an image area set for the image 28, the information on the position of the reduction target area includes the longitudinal position of the image of the projection light L in the measurement image area 27 and the reduced image area at the position. The information is information in which the enlargement ratio or the reduction ratio of the reduction target area is associated.

  The area setting data 43 includes data in which information on the positions of the enlargement target area and the reduction target area is associated with information on the relative position between the optical probe 3 and the measurement target M. The region setting data 43 is stored in the storage unit 31 by being set by the image region setting unit 34. In the area setting data 43, the position of the image of the projection light L in the longitudinal direction may be directly associated with the magnification and reduction of the image 28.

  The enlarged image area is an area where the density of the point group is higher than that of the image 28 captured by the imaging device 9, in other words, an area where the magnification of the image 28 is larger than 1 ×. As an example, the image area setting unit 34 sets an enlargement target area at a predetermined position in the longitudinal direction of the image of the projection light L with respect to the image of the projection light L in the measurement image area 27 on the image 28, Generates information on the position of the enlargement target area. That is, the image area setting unit 34 associates the position of the enlargement target area, the enlargement image area corresponding to the enlargement target area, and the enlargement magnification of the enlargement target area (that is, the enlargement magnification of the enlargement image area), Generates information on the position of the enlargement target area. Then, the image area setting unit 34 generates area setting data 43 in which information on the position of the enlargement target area and information on the relative position between the optical probe 3 and the measurement target M are associated with each other, and stored in the storage unit 31. I do.

  The reduced image area is an area in which the density of the point cloud is sparse compared to the image 28 captured by the imaging device 9 as compared with the enlarged image area, in other words, the magnification of the image 28 is enlarged in the enlarged image area. This is an area smaller than the magnification. For this reason, since the reduced image area only needs to be an enlargement magnification smaller than the enlargement magnification of the enlarged image area, the enlargement magnification of the image 28 may be larger than 1 ×, or the enlargement magnification of the image 28 may be 1 ×. A smaller reduction ratio may be used. As an example, the image area setting unit 34 sets an enlargement target area at a predetermined position in the longitudinal direction of the image of the projection light L on the image 28. In this case, the image area setting unit 34 sets an area other than the enlargement target area as the reduction target area, and generates information on the position of the reduction target area. That is, the image area setting unit 34 determines the position of the reduction target area, the reduced image area corresponding to the reduction target area, and the enlargement or reduction magnification of the reduction target area (that is, the enlargement or reduction magnification of the reduced image area). And information on the position of the reduction target area is generated. Then, the image region setting unit 34 generates region setting data 43 in which information on the position of the reduction target region and information on the relative position between the optical probe 3 and the measurement target M are associated with each other, and stored in the storage unit 31. Let it.

  As described above, the area setting data 43 is data in which the enlargement target area and the reduction target area are set at the position in the longitudinal direction of the image of the projection light L on the image 28. The region setting data 43 may be data in which only the enlargement target region and the reduction target region are associated with the longitudinal position of the image of the projection light L on the image 28. Further, the area setting data 43 may be data in which the magnification of the image 28 continuously changes along the longitudinal direction of the image of the projection light L on the image 28. Furthermore, in the area setting data 43, the enlargement magnification of the image 28 is associated with the enlargement target area and the reduction target area. However, the point group density may be associated with the enlargement target area and the reduction target area. Good. When the enlargement target area and the reduction target area are areas set for the point group generated at the time of measuring the shape of the measurement target M, the information of the position of the enlargement target area or the reduction target area is the point group. , The position of the enlargement target area or the reduction target area, the enlarged image area or the reduced image area corresponding to the enlargement target area or the reduction target area, the enlargement magnification (or reduction magnification) of the enlarged image area or the reduced image area, and May be associated with the information.

  The area setting data 43 is data used when setting a rotation operation of the galvano scanner 82 described later. The control device 4 generates the turning operation information 44 by setting the turning operation of the galvano scanner 82 based on the area setting data 43.

  The rotation operation information 44 is information obtained when the rotation operation of the galvano scanner 82 is set. The rotation operation information 44 indicates the rotation operation of the galvano scanner 82 according to the magnification of the image 28 in the enlarged image area and the reduced image area set at the position in the longitudinal direction of the image of the projection light L on the image 28. This is information for control. The rotation operation information 44 includes information on the amount by which the position of the image of the measurement target M including the image of the projection light L is changed on the imaging surface 20a. The amount by which the position of the image of the measurement target M including the image of the projection light L is changed on the imaging surface 20a is, specifically, a movement amount of the image of the projection light L in the longitudinal direction. As will be described later in detail, examples of the rotation operation information 44 include information shown in FIGS. 17 to 19 and information shown in FIGS. 21 to 23. The operation control unit 40 acquires the rotation operation information 44. The operation control unit 40 controls the rotation operation of the galvano scanner 82 based on the rotation operation information 44. The rotating motion information 44 is used when the measuring unit 39 generates point cloud data of the point cloud.

  The condition table 46 stores measurement conditions set by the control unit 30 and various conditions input in advance. The measurement conditions include a measurement range set by the measurement range setting unit 36, dimming conditions for dimming control by the dimming control unit 38, and an image area set by the image area setting unit 34. In addition, the measurement conditions include operation conditions related to various operations of the probe moving device 2, the optical probe 3, and the holding and rotating device 7 controlled by the operation control unit 40. The shape measurement program 48 stores a program for executing processing of each unit of the control device 4 based on measurement conditions and the like included in the condition table 46. That is, by executing the program stored in the shape measurement program 48, the control device 4 sequentially reproduces the operation of each unit described above, so that the projection is performed on the measurement target M while sequentially shifting the measurement range. Control is performed to capture an image of the projection light L. The shape measurement program 48 is a program executed by the shape measurement device 1. The shape measurement device 1 measures the shape of the measurement target M by executing the shape measurement program 48. Note that the shape measurement program 48 may be stored in the storage unit 31 in advance, but is not limited thereto. The shape measurement program 48 may be read from a storage medium in which the shape measurement program 48 is stored, and may be stored in the storage unit 31, or may be obtained from outside through communication. The specification data 49 stores design data, CAD data, condition data for defining the shape of the measurement object M, and the like.

  The control device 4 controls the drive unit 10 of the probe moving device 2 and the rotation drive unit 72 of the holding and rotating device 7 so that the relative position between the optical probe 3 and the measurement target M has a predetermined positional relationship. The control device 4 acquires the position information of the optical probe 3 from the position detection unit 11 of the probe moving device 2 and acquires the position information of the measurement target M from the position detection unit 73 of the holding and rotating device 7. Then, information on the relative position between the measuring object M and the optical probe 3 is acquired. Further, the control device 4 acquires image data of an image 28 including the measurement image area 27 from the optical probe 3. Then, the control device 4 determines the position of the image of the projection light L on the image 28 of the image data according to the relative position, the position of the optical probe 3, the projection direction of the projection light L, the position of the imaging device 9, and the imaging direction. Based on the above, the position (coordinate value) of each pixel on the image of the projection light L of the captured image 28 is calculated. The control device 4 generates the point cloud data of the point cloud along the longitudinal direction of the image of the projection light L based on the calculated position of each pixel on the image of the projection light L of the image 28. In addition, the control device 4 generates a plurality of point cloud data of the point cloud along the direction in which the projection light L moves. The control device 4 calculates shape information on the three-dimensional shape of the measurement target M based on the point group in the longitudinal direction of the image of the projection light L and the point group in the direction in which the projection light L moves. To get.

  The display unit 33 is configured by a display such as a liquid crystal display and an organic electroluminescence display. The display unit 33 displays a control result of the control unit 30 and input contents from an operator and the like, and displays measurement information related to measurement of the shape measuring device 1. The measurement information is, for example, a measurement range set for the measurement target M, an image 28 captured by the image sensor 20, information indicating the position of the measurement image area 27 set on the image 28, and information set on the image 28. Information indicating the position of the dimming area can be displayed. The position information of the measurement image area 27 is displayed so as to be superimposed on the image 28 captured by the image sensor 20. The measurement information also includes setting information indicating settings related to the measurement, progress information indicating the progress of the measurement, shape information indicating the result of the measurement, and the like. The display unit 33 of the first embodiment is supplied with image data of an image related to measurement information from the control unit 30, and displays an image related to measurement information according to the image data.

  The input unit 32 is a device to which information from an operator can be input, and is configured by various input devices such as a keyboard, a mouse, a joystick, a trackball, and a touchpad. The input unit 32 receives input of various information to the control device 4. The various information includes, for example, command information indicating a command (command) for starting measurement by the shape measuring device 1, setting information on measurement by the shape measuring device 1, and an operation for manually operating at least a part of the shape measuring device 1. Including information. In addition, the operator operates the input unit 32 to set, for example, an image area such as the enlarged image area 75. The display unit 33 and the input unit 32 may be a touch panel in which the display unit 33 and the input unit 32 are integrated.

  Next, the imaging device 9 will be described in detail with reference to FIGS. FIG. 8 is a schematic diagram illustrating an imaging optical system of the shape measuring apparatus according to the first embodiment. FIG. 9 is a perspective view illustrating a measurement target of the shape measuring apparatus according to the first embodiment. FIG. 10 is an explanatory diagram illustrating a measuring operation of the shape measuring device according to the first embodiment. FIG. 11 is a diagram illustrating an example of an imaging region of the imaging element.

  Hereinafter, as shown in FIG. 9, as an example, a case will be described where the shape measuring apparatus 1 measures the shape of the measurement target Ma in which the shape is repeatedly formed in the circumferential direction. The shape measuring device 1 projects the projection light L onto a tooth, which is one unit of the repetitive shape of the measurement target Ma, and acquires an image including an image of the projection light L projected on the measurement target Ma. The shape of the measurement object Ma is measured. The shape measuring apparatus 1 of the first embodiment moves the projection light L (the optical probe 3) along the direction of the tooth trace, and moves the image 28 including the image of the projection light L projected on the measurement target Ma. Is obtained, the shape of one tooth can be measured. The shape measuring device 1 can measure the shape of the measurement target Ma by sequentially measuring the shape of the teeth of the measurement target Ma. The measuring object Ma is, for example, a bevel gear in which teeth having substantially the same shape in design are formed at predetermined intervals in a circumferential direction. In the shape measuring apparatus 1 of the present embodiment, the measuring object Ma is a bevel gear, but the shape can be measured by using objects having various shapes as the measuring objects. That is, the measuring object M is not limited to a gear, but may be any object having irregularities formed at predetermined intervals, for example, a turbine blade. Further, the measurement target M is not limited to an object having irregularities formed at predetermined intervals, but may be any object whose shape is to be measured. Of course, when the measurement object M is a gear, the type of the gear is not particularly limited. The measuring object Ma may be a spur gear, a helical gear, a helical gear, a worm gear, a pinion, a hypoid gear, or the like, in addition to the bevel gear. In addition, the shape measuring device 1 is not limited to measuring the shape of one tooth of the measuring object Ma or measuring the entire shape of the measuring object M, but the shape of any one point of the measuring object M Can also be measured.

  The imaging device 9 according to the first embodiment generates image data of a distorted image, which is an image obtained by distorting the image of the measurement target M. Specifically, the imaging device 9 enlarges or reduces at least a part of the image area of the image 28 in the longitudinal direction of the image of the projection light L. As shown in FIGS. 4 and 8, the imaging optical system 21 of the imaging device 9 includes an objective lens 81, a galvano scanner 82, and an imaging lens 83 in order to enlarge or reduce a partial image area of the image. And As will be described in detail in the following paragraphs, the distortion given to the image of the measurement target M is at least one of enlargement and reduction, and the distortion image given the distortion is an image of the measurement target M. Is an image in which at least a part of the image of the measurement target M is enlarged or reduced, or an image in which at least a part of the image of the measurement target M is reduced.

  Here, the process of generating the image data of the distorted image in which the image of the measuring object M is distorted includes, for example, distorting the image of the measuring object M formed on the imaging surface 20a to generate a distortion image. There is a case where image data is generated, and a case where image data of a distorted image is generated so that an image (image) of the measuring object M included in the image 28 is distorted. That is, in the distorted image in which the image of the measurement object M is distorted, the image of the measurement object M is the image of the measurement object M formed on the imaging surface 20a and the measurement image included in the distortion image. And an image (image) of the object M.

  In the imaging device 9 of the first embodiment, image data of a distorted image is generated so that an image (image) of the measurement target M included in the image 28 is distorted. Specifically, in the imaging device 9 of the first embodiment, when generating image data of a distorted image in which an image of the measurement object M is distorted, the image data of the measurement object M formed on the imaging surface 20a is generated. By moving the image of the measurement target M on the imaging surface 20a without distorting the image, the image (image) of the measurement target M is distorted at the time of imaging.

  As shown in FIG. 8, the imaging optical system 21 bends the optical path from the objective lens 81 to the imaging lens 83 by 90 ° in the galvano scanner 82. That is, in the imaging optical system 21, the galvano scanner 82 is arranged so that the imaging direction from the measurement target M to the objective lens 81 is orthogonal to the imaging direction from the imaging lens 83 to the imaging device 20. . In FIG. 4, for ease of explanation, the optical path in the imaging direction from the measurement target M to the objective lens 81 and the optical path in the imaging direction from the imaging lens 83 to the imaging device 20 obliquely intersect. It is illustrated as follows. However, in practice, the optical path in the shooting direction from the imaging lens 83 to the image sensor 20 in FIG. 8 is in the depth direction (X-axis direction) in FIG. That is, in FIG. 4, when the projection direction of the projection light L is in the Z-axis direction, the galvano scanner 82, the imaging lens 83, and the image sensor 20 are arranged side by side in the X-axis direction.

  The objective lens 81 is a lens provided on the measurement object M side, and receives light from the measurement object M onto which the linear projection light L is projected. The light from the measurement target M is light scattered on the surface of the measurement target M. The objective lens 81 converts the incident light into parallel light, and emits the parallel light toward the imaging lens 83. The objective lens 81 may be composed of a single lens or a plurality of lenses, and is not particularly limited.

  The imaging lens 83 is a lens provided on the imaging device 20 side, and receives parallel light emitted from the objective lens 81. The imaging lens 83 collects the incident parallel light. The imaging lens 83 forms an image of the measurement target M onto which the linear projection light L is projected on the imaging surface 20a of the imaging device 20. The imaging lens 83 may be composed of a single lens or a plurality of lenses, and is not particularly limited.

  The galvano scanner 82 is provided in the optical path between the objective lens 81 and the imaging lens 83, and changes the direction of the reflection surface of the mirror to change the direction of the projection light L imaged on the imaging surface 20a of the imaging device 20. The position of the image of the measurement target M including the image on the imaging surface 20a is changed. That is, the galvano scanner 82 moves the image of the projection light L included in the image of the measurement target M along the longitudinal direction with respect to the imaging surface 20a. The galvano scanner 82 moves the image of the projection light L along the longitudinal direction with respect to the imaging surface 20a, so that the measurement visual field region 26 moves. The galvano scanner 82 has a rotation shaft 85, a galvanometer mirror 86, and a rotation drive unit 87.

  3 and FIG. 4, the surface including the projection direction of the projection light L and the imaging direction of the imaging device 9 is perpendicular to the axial direction of the rotation axis 53a. In this case, the direction is orthogonal to the axial direction of the rotation axis 53a. That is, the axial direction of the rotating shaft 85 is a direction on a plane including the projection direction of the projection light L and the imaging direction of the imaging device 9.

The galvanomirror 86 includes a reflection surface 86 a that is parallel to a plane including the axial direction of the rotation axis 85, and the reflection angle is variable about the rotation axis 85. When the galvanomirror 86 is in the rotation stopped state, that is, in the state of the initial position, as shown in FIG. 11, the measurement visual field area 26 is the same as the measurement visual field area 26a located at the center of the imaging area 25 of the image sensor 20. Has become. In this case, the sensor origin I _b that is set in the measurement image region 27 of the image 28 is positioned on the sensor origin I _{b a.}

The galvanomirror 86 rotates about a rotation shaft 85 in a first rotation direction (arrow 91). Then, as shown in FIG. 11, on the imaging area 25 of the image sensor 20, the measurement visual field area 26 becomes a measurement visual field area 26b moved to the left side of FIG. 11 with respect to the measurement visual field area 26a. That is, the image of the projection light L (the image of the measurement target M) moves to the left side in FIG. 11 by rotating the galvanometer mirror 86 in the first rotation direction. The movement of the image of the projection light L, the sensor origin I _b that is set in the measurement image region 27 of the image 28 becomes displaced by the amount of moving the image of the projection light L (the moving amount Δd to be described later) located It becomes the sensor origin I _bb .

Further, the galvanomirror 86 rotates about the rotation shaft 85 in a second rotation direction (arrow 92). Then, as shown in FIG. 11, on the imaging area 25 of the image sensor 20, the measurement visual field area 26 becomes a measurement visual field area 26c which has moved to the right side of FIG. 11 with respect to the measurement visual field area 26a. That is, by rotating the galvanometer mirror 86 in the second rotation direction, the image of the projection light L (the image of the measurement target M) moves to the right in FIG. The movement of the image of the projection light L, the sensor origin I _b that is set in the measurement image region 27 of the image 28 becomes displaced by the amount of moving the image of the projection light L (the moving amount Δd to be described later) located the sensor origin _{I b} c.

  The rotation drive unit 87 drives the galvanometer mirror 86 about the rotation shaft 85 in the rotation directions of the arrows 91 and 92. The rotation drive unit 87 is connected to the control device 4 and is controlled by the operation control unit 40 of the control device 4.

  Here, as the imaging element 20, for example, a rolling shutter type CMOS image sensor is used. The imaging element 20 has a plurality of pixels, and the plurality of pixels are arranged in a matrix in a row direction and a column direction. The imaging element 20 sequentially exposes each pixel along a scan direction from one side of the row direction to the other side of each row, and sequentially exposes from one row in the column direction to the other row. I have. The scanning direction of the imaging device 20 is a direction along the longitudinal direction of the image of the linear projection light L on the imaging surface 20a (that is, the scanning direction of the imaging device 20 and the linear projection light L on the imaging surface 20a). 11 are parallel to each other), and in FIG. 11, the direction is from left to right (arrow 93). Note that, on the imaging surface 20a, the scanning direction of the imaging device 20 and the longitudinal direction of the image of the projection light L need not be parallel. For example, the longitudinal direction of the image of the projection light L and the scan direction of the image sensor 20 need not be orthogonal to each other, and may be any intersection.

  The galvanomirror 86 rotates an image of the measurement target M including the image of the projection light L formed on the imaging surface 20 a of the imaging device 20 by rotating in the first rotation direction 91. It is moved in a direction opposite to the scanning direction 93. By matching the exposure of each pixel in the imaging device 20 with the movement of the image of the measurement object M by the galvanomirror 86, the image 28 of the image of the measurement object M acquired by the imaging device 20 becomes A distorted image 28 reduced in the longitudinal direction of the image is obtained. At this time, the higher the rotation speed in the first rotation direction 91, the larger the reduction ratio. As described above, when the image of the measurement target M is captured by the image sensor 20 while rotating the galvanometer mirror 86 in the first rotation direction 91, the image of the measurement target M on the generated image 28 is distorted. (At least a part of the image of the measurement target M on the image 28 is reduced). Therefore, image data of the image 28 in which the image of the measurement target M is distorted (that is, the distorted image) is obtained.

  On the other hand, the galvanomirror 86 rotates in the second rotation direction 92 to convert the image of the measurement target M including the image of the projection light L formed on the imaging surface 20a of the imaging device 20 into the imaging device. 20 is moved in the same direction as the scan direction 93. By matching the exposure of each pixel in the imaging device 20 with the movement of the image of the measurement object M by the galvanomirror 86, the image 28 of the image of the measurement object M acquired by the imaging device 20 becomes The distorted image 28 is enlarged in the longitudinal direction of the image. At this time, the rate of enlargement increases as the rotation speed in the second rotation direction 92 increases. As described above, when the image of the measurement target M is captured by the imaging device 20 while rotating the galvanometer mirror 86 in the second rotation direction 92, the image of the measurement target M on the generated image 28 is distorted. (At least a part of the image of the measurement target M on the image 28 is enlarged). Therefore, image data of the image 28 in which the image of the measurement target M is distorted (that is, the distorted image) is obtained. Note that the distorted image 28 captured by the imaging device 20 is caused by aberrations caused by refraction and reflection by the optical elements included in the imaging optical system 21, particularly, distortion of the measurement target M due to distortion of the image. The image is distorted. Further, the image is not limited to the distortion, and the image of the measurement target M may be distorted due to other aberrations.

  Image data of a distorted image obtained by rotating the galvanomirror 86 becomes image data of an image in which at least a part of the image of the measurement target M on the image 28 is enlarged. The image data of the distorted image is data including a luminance value of each pixel of the image 28 and a coordinate value of each pixel of the ij orthogonal coordinate system (two-dimensional coordinate system).

  Note that the image of the measurement target M including the image of the projection light L formed on the imaging surface 20a of the imaging device 20 does not move when the galvanomirror 86 is stopped rotating. In this case, the image 28 of the measurement target M acquired by the imaging device 20 is not reduced or enlarged in the longitudinal direction of the projection light L, and becomes an image 28 without distortion.

  In the galvano scanner 82, the rotation of the galvanometer mirror 86 is set based on the amount of movement of moving the image of the measurement target M in the longitudinal direction of the image of the projection light L. The moving amount is set based on the magnification of the image 28 corresponding to the enlarged image area and the reduced image area set by the image area setting unit 34. For this reason, the control device 4 derives a movement amount for moving the projection light L in the longitudinal direction of the image based on the magnification of the image 28, and sets the rotation operation of the galvanometer mirror 86 based on the movement amount. When operating the galvano scanner 82, the operation control unit 40 of the control device 4 controls, for example, based on a rotating operation of the galvanometer mirror 86 set in a teaching mode described later. The operation control unit 40 controls the rotation drive unit 87 to rotate the galvanomirror 86 based on the set rotation operation. The rotation operation of the galvanometer mirror 86 includes a rotation speed and a rotation acceleration in the rotation directions 91 and 92. The rotation operation of the galvanomirror 86 is acquired in the following teaching mode.

  Further, the galvano scanner 82 rotates the galvanometer mirror 86 so as to perform a predetermined rotation operation with respect to exposure of the image sensor 20 in the scanning direction. That is, the galvano scanner 82 sets the image of the projection light L such that the magnification of the image in the enlarged image area and the reduced image area becomes the set magnification with respect to the exposure speed in the scanning direction in each row of the image sensor 20. Is controlled in the longitudinal direction. Here, the galvano scanner 82 starts driving the galvanometer mirror 86 in synchronization with the start of scanning of the image sensor 20 (exposure of the first pixel). The exposure operation of the image sensor 20 and the rotation operation of the galvano scanner 82 are independent operations. The exposure speed of the image sensor 20 in the scanning direction is constant, and the galvano scanner 82 varies the moving speed of the image of the projection light L in the longitudinal direction with respect to the image sensor 20 having the constant exposure speed. . At this time, the galvano scanner 82 may rotate the galvanometer mirror 86 continuously. Also, the galvano scanner 82 stops the rotation of the galvanometer mirror 86 during the exposure of each pixel of the imaging device 20 and rotates the galvanometer mirror 86 after the exposure of each pixel of the imaging device 20, The galvanomirror 86 may be rotated intermittently. Note that the galvano scanner 82 may rotate the galvanometer mirror 86 in synchronization with the scan of the image sensor 20. That is, the rotating operation of the galvano scanner 82 may be coordinated with the exposure operation of the image sensor 20. For example, the galvano scanner 82 may control the image sensor 20 to move the moving speed of the image of the projection light L in the longitudinal direction. The exposure speed in the scanning direction may be varied according to the moving speed of the image of the projection light L in the longitudinal direction.

  The above-described imaging device 9 generates image data of the image 28 by performing image processing based on a light reception signal received by the imaging element 20. At this time, as described above, when a partial image area of the image 28 is enlarged or reduced in the longitudinal direction of the projection light L, the image sensor 20 generates image data of a distorted image. Then, the imaging element 20 outputs the generated image data of the distorted image to the measurement unit 39 of the control device 4.

  When acquiring the image data of the distorted image, the measuring unit 39 generates point cloud data having different point cloud densities from the image data of the distorted image. That is, the measurement unit 39 generates point cloud data having different density of the point cloud based on the image data of the strain image in which the image including the measurement target M is distorted and the amount of the applied distortion. ing. Here, as described above, since the distortion is at least one of enlargement and reduction, the amount of distortion is determined by the enlargement magnification (a predetermined magnification to be enlarged) and the reduction magnification (a predetermined magnification to be reduced). At least one of them. In the first embodiment, by rotating the galvano scanner 82, a predetermined enlargement magnification or a predetermined reduction magnification is set to generate image data of a distorted image in which an image including the measurement target M is distorted. doing. For this reason, in the first embodiment, when generating point cloud data having different point cloud densities based on the enlargement ratio and the reduction ratio, specifically, a galvano scanner calculated based on the enlargement ratio and the reduction ratio On the basis of the turning operation information 44 which is information on the turning operation of 82, point group data having different point cloud densities is generated. That is, the measuring unit 39 corrects the point cloud data using the rotation operation information 44. The measurement unit 39 corrects the three-dimensional coordinate values of the point group in consideration of the amount of distortion of the image of the measurement target M on the image 28. The amount of this distortion is a predetermined enlargement magnification and a predetermined reduction magnification. In the first embodiment, the rotation of the galvano scanner 82 is set based on the predetermined enlargement magnification and the predetermined reduction magnification. , The amount of movement of the image of the projection light L in the longitudinal direction is set. The information on the movement amount is included in the rotation operation information 44 stored in the storage unit 31.

  Next, referring to FIG. 10, a measurement target M onto which the projection light L is projected (FIG. 10A), a distortion image captured by the imaging device 9 (FIG. 10B), A point group generated from the image data of the distorted image by the measuring unit 39 (FIG. 10C) and a corrected point group generated from the image data of the distorted image by the measuring unit 39 (FIG. 10D) ) Will be described. In FIG. 10, the measurement object M and the distorted image are modeled in a grid pattern to simplify the description. FIG. 10 shows a modeled grating and projected light L for the point group to facilitate comparison with the measurement object M and the distorted image. Further, the direction from the left side to the right side in the distortion image in FIG. 10 is the scan direction 93 of the image sensor 20.

  FIG. 10A shows the measurement target M onto which the projection light L is projected. The imaging device 9 operates the galvano scanner 82 to image the measurement target M shown in FIG. Then, the shape measuring apparatus 1 acquires a distortion image as shown in FIG. 10B, for example. This distorted image is an image 28 obtained by enlarging the image area at the central portion in the longitudinal direction of the image of the projection light L. In other words, the imaging device 9 rotates the galvanomirror 86 in the second rotation direction 92 to make an enlarged image region at the central portion in the longitudinal direction of the image of the projection light L as an enlarged image region.

  Further, the distorted image is obtained by comparing the image regions on both outer sides in the longitudinal direction of the image of the projection light L, that is, the image regions on both sides in the longitudinal direction of the image of the projection light L with the enlarged image region therebetween, as compared with the enlarged image region. To reduce the image area. In this case, as an example, the imaging device 9 rotates the galvanomirror 86 at a rotation speed that is lower than the rotation speed in the second rotation direction 92 in the enlarged image area outside the distortion image in the longitudinal direction. Further, as an example, the imaging device 9 stops the rotation of the galvanomirror 86 on the outer side in the longitudinal direction of the distorted image. Further, as an example, the imaging device 9 rotates the galvanomirror 86 in the first rotation direction 91 outside the longitudinal direction of the distorted image. Thereby, the imaging device 9 sets the reduced image area on both outer sides in the longitudinal direction of the image of the projection light L as a reduced image area. In this way, in the distorted image shown in FIG. 10B captured by the imaging device 9, the central portion in the longitudinal direction of the image of the projection light L is an enlarged image area, and the outer side in the longitudinal direction of the image of the projection light L Is a reduced image area smaller than the enlarged image area.

  Here, in the distorted image shown in FIG. 10B, the image sensor 20 has a plurality of pixels at equal intervals in the row direction and the column direction. That is, the positions of the plurality of pixels on the image sensor 20 are equally spaced in the longitudinal direction of the image of the projection light L. For this reason, the point group of the point group data generated based on the image data of the distorted image has uniform intervals in the longitudinal direction of the image of the projection light L, as shown by a plurality of black points shown in FIG. Become.

  FIG. 10D shows a point cloud of the point cloud data generated using the rotation motion information 44. The generated point cloud is a point cloud obtained by correcting the point cloud of the point cloud data generated based on the image data of the strain image in consideration of the amount of distortion of the strain image. Specifically, in the distorted image, in the enlarged image area, by generating the point group in consideration of the amount of distortion, the interval between the generated point groups is shortened in the longitudinal direction of the image of the projection light L. That is, the density of the generated point group corresponding to the enlarged image area of the distortion image is increased. On the other hand, in the distorted image, the reduced image area generates a point group in consideration of the amount of distortion, so that the corrected interval between the point groups is reduced to the enlarged image area in the longitudinal direction of the image of the projection light L. It is longer than that. That is, the density of the generated point cloud corresponding to the reduced image area of the distorted image becomes low. In this way, the generated point groups have unequal intervals in the longitudinal direction of the image of the projection light L. That is, in the corrected point group shown in FIG. 10D, the point group corresponding to the enlarged image region of the distortion image becomes dense, and the point group corresponding to the reduced image region of the distortion image becomes sparse. For this reason, the generated point groups have different densities in the longitudinal direction of the image of the projection light L. In other words, when it is desired to make the point cloud dense, the image area setting unit 34 sets the corresponding image area in the image captured by the image sensor 20 so as to be the enlarged image area. In the diagram shown in FIG. 10D, since the interval between the point groups corresponding to the central enlarged image area in the longitudinal direction of the image of the projection light L becomes shorter, the point group of the enlarged image area is different from other areas. It will be denser than that. Further, since the interval between the point groups corresponding to the reduced image areas on both outer sides in the longitudinal direction of the image of the projection light L becomes longer, the point group in the reduced image area becomes sparser than other areas. When the point cloud is desired to be sparse, the image area setting unit 34 may set the reduction target area so that the corresponding image area becomes the reduced image area in the image 28 captured by the image sensor 20.

  The shape measuring device 1 measures the outer shape by the measuring unit 39 based on the corrected point cloud. At this time, if the point group is dense, the outer shape can be precisely measured, so that the measurement target M in the part where the point group is dense can be accurately measured. That is, in FIG. 10, the measurement target M at the center in the longitudinal direction of the image of the projection light L can be measured with high accuracy.

  The corrected point group shown in FIG. 10D is an example. The change in the density of the point cloud, that is, the position of the enlarged image area can be arbitrarily set. For example, the enlarged image area is set in advance by the operator in the teaching mode via the input unit 32 of the shape measuring device 1. Also, for example, the reduced image area is set to an image area other than the enlarged image area by setting the enlarged image area.

  Next, with reference to FIGS. 12 to 23, a teaching mode in which an enlarged image area is set for the image 28 and a rotating operation of the galvano scanner 82 is set will be described.

  The shape measuring apparatus 1 sets measurement conditions for measuring the shape of the measurement target M when measuring the shape of the measurement target M. FIG. 12 is a flowchart illustrating a process in the teaching mode of the shape measuring apparatus according to the first embodiment. The shape measuring apparatus 1 sets the measurement conditions of the measurement target M in the teaching mode processing. Teaching refers to an operation of adjusting and determining the measurement conditions of the shape measuring device 1 in order to accurately measure the three-dimensional shape of the measurement target M. That is, teaching is an operation of setting measurement conditions of the shape measuring device 1. With reference to FIG. 12, a process regarding the teaching mode will be described.

  First, the imaging device 9 has, for example, the following specifications. Note that the specifications of the imaging device 9 are merely examples for simplifying the description, and are not particularly limited. The size of the area of the measurement surface 21a (also referred to as the measurement surface area) is a square area of 20 mm × 20 mm. The length in the longitudinal direction of the projection light L on the measurement surface 21a is 20 mm. The imaging magnification of the imaging device 9 is 0.1 times. That is, when the size of the area of the measurement surface 21a is 20 mm × 20 mm, the size of the measurement visual field region 26 on the imaging surface 20a of the image sensor 20 is 2 mm × 2 mm, and the projection light L Is 2 mm in the longitudinal direction. The focal length of the objective lens 81 up to the measurement surface 21a is 100 mm. The focal length of the imaging lens 83 to the imaging surface 20a is 10 mm. The size of the imaging area 25 of the imaging element 20 is 10 mm × 10 mm. The number of pixels of the imaging device 20 is 1000 pixels × 1000 pixels, that is, 1 million pixels. Therefore, the size of one pixel is 10 μm × 10 μm. As described above, the image sensor 20 is of the rolling shutter type, and the exposure time for exposing one image 28 is 100 ms.

  As shown in FIG. 12, when detecting the operation of the operator on the input unit 32, the control device 4 of the shape measuring device 1 selects the teaching mode (Step S1). When the teaching mode is selected, the shape measuring device 1 displays a screen for setting measurement conditions on the display unit 33. When an operation of the operator who visually recognizes the screen is input from the input unit 32, the control device 4 sets a measurement condition (Step S3). The measurement conditions to be set include, for example, a measurement range, an interval between point groups in a direction in which the projection light L moves, a speed in a direction in which the projection light L moves, a relative position between the optical probe 3 and the measurement target M, a projection. The projection direction of the light L, the imaging direction of the imaging device 9, the operation of the probe moving device 2, the operation of the holding / rotating device 7, the rotation operation of the galvano scanner 82, and the like. The measurement condition set in step S3 is a condition for stopping the rotation of the galvano scanner 82 with respect to the rotation of the galvano scanner 82. The control device 4 stores the set measurement conditions in the storage unit 31 as the condition table 46.

  After setting the measurement conditions, the control device 4 captures an image of the measurement target M onto which the projection light L is projected from the light projecting device 8 by the imaging device 9 based on the measurement conditions, and obtains an image 28 (step S5). ). In step S5, the image 28 obtained when the rotation of the galvano scanner 82 is stopped is acquired. When acquiring the image 28 of the image of the measurement target M including the projection light L captured by the imaging device 9, the measurement unit 39 of the control device 4 generates a point cloud based on the image data of the image 28 (Step S7). ). In step S7, the measuring unit 39 calculates the position (coordinate value) of each pixel on the image of the projection light L of the acquired image 28, and stores the position of each pixel on the image of the calculated projection light L of the image 28. Based on this, point group data along the longitudinal direction of the image of the projection light L is generated.

  When the control device 4 generates the point cloud, the image area setting unit 34 sets an enlargement target area corresponding to the enlarged image area (step S9). The setting of the enlargement target area may be set using, for example, a screen 60 shown in FIG. FIG. 13 is a diagram illustrating a screen for setting an enlarged image area. The display unit 33 displays a screen 60 for setting an enlarged image area shown in FIG. The screen 60 displays a part of the measurement shape of the measurement target M based on the point cloud data of the point cloud generated in the teaching mode. A part of the measurement shape of the measurement target M displayed on the screen 60 is a part of the measurement shape of the measurement target M measured in the measurement range 74. The enlargement target area 75 corresponding to the enlarged image area and the enlargement magnification thereof (enlargement magnification of the enlarged image area) are based on the input from the input unit 32 with respect to the measurement range 74 of the measurement target M displayed on the screen 60. Is set. That is, since a part of the measurement shape of the measurement target M displayed on the screen 60 is a shape generated by the point group, the enlargement target area 75 is set for the point group. On the screen 60, an enlargement magnification is set for the set point group of the enlargement target area 75. The control device 4 generates the area setting data 43 by setting the enlargement target area 75 on the screen 60 in FIG. That is, the control device 4 sets the enlargement target area 75 in which the position of the enlargement target area 75 set in the point group, the enlarged image area corresponding to the enlargement target area 75, and the enlargement magnification of the enlarged image area are associated with each other. Generate location information for. Further, the control device 4 generates the region setting data 43 by associating the information on the position of the enlargement target region 75 with the information on the relative position between the optical probe 3 and the measurement target M.

  The image area setting unit 34 may set only the enlargement target area 75 on the screen 60 in FIG. In this case, the maximum enlargement magnification that can be set in the set enlargement target area 75 may be automatically set. The image area setting unit 34 may set only the enlargement magnification on the screen 60 in FIG. In this case, the maximum enlargement target area 75 that can be set at the set enlargement magnification may be automatically set.

  When the enlargement target area 75 is set on the screen 60 in FIG. 13, the image area setting unit 34 sets the image sensor 20 based on the position of the enlargement target area 75 set in the point group as shown in FIG. The enlargement target area 75 is set for the measurement image area 27 including the image of the projection light L of the image 28 picked up by. Here, FIG. 14 is a diagram relating to the setting of the enlarged image area on the image. The control device 4 sets the enlargement target area 75 set as the point cloud in FIG. 13 as a corresponding image area in the image 28 in FIG. The control device 4 sets the position of the enlargement target area 75 set on the image 28 and the enlarged image area corresponding to the enlargement target area 75 by setting the enlargement target area 75 on the image 28 in FIG. The area setting data 43 of the image area in which the enlargement magnification of the enlarged image area is associated with the area setting data 43 may be generated.

  As described above, in step S9, the control device 4 operates the operator who visually recognizes the point group on the display unit 33 through the input unit 32 to increase the area of the point group (the area where the point group is to be dense). ) And magnification. Then, the control device 4 sets the position of the enlargement target area 75 in the longitudinal direction of the image of the projection light L with respect to the image 28 captured by the image sensor 20. When setting the enlargement target area 75, the control device 4 sets an area other than the enlargement target area 75 in the image 28 as the reduction target area. Then, the control device 4 stores the positions of the enlargement target region 75 and the reduction target region set in the image in the storage unit 31 as the region setting data 43 of the image region. It is not necessary to set the enlargement target area 75 and the enlargement magnification for the point group of the measurement object M displayed on the screen 60, and the image 28 acquired to generate the point cloud data in step S7. May be used to set the enlargement target area 75 and its enlargement magnification. In this case, for example, the image 28 acquired in step S7 may be displayed on the screen 60, and the enlargement target area 75 and the enlargement magnification of the image 28 may be set via the input unit 32.

  Subsequently, the control device 4 sets the rotation operation of the galvano scanner 82 based on the set enlarged image area and reduced image area (step S11). In step S11, the control device 4 sets the rotation of the galvano scanner 82 based on the area setting data 43 set in step S9. That is, the control device 4 rotates the galvano scanner 82 with respect to the position of the enlargement target area 75 in the longitudinal direction of the image of the projection light L based on the enlargement magnification of the enlarged image area associated with the enlargement target area 75. The operation is set. Further, when the rotation operation of the galvano scanner 82 is set, the control device 4 generates information about the set rotation operation of the galvano scanner 82 as the rotation operation information 44 and stores the information in the storage unit 31.

  The setting of the rotation operation of the galvano scanner 82 in step S11 will be described with reference to FIGS. Here, FIG. 15 is a diagram illustrating an example of an image of projection light in which an enlarged image area is set on an image. FIG. 16 is an explanatory diagram of an example regarding each position of the image of the projection light. FIG. 17 is a diagram of an example showing coordinates at each position of the image of the projection light. FIG. 18 is an example of an angle of the galvanomirror at each position of the image of the projection light. FIG. 19 is a diagram illustrating an example of a rotation operation of the galvano scanner.

  As shown in FIG. 15, for example, a case will be described in which the length of the image of the projection light L in the longitudinal direction is 2 mm, and the image area in the central 1 mm range in the longitudinal direction is enlarged five times. 15 and 16, the image of the projection light L is schematically illustrated as a rectangular region that is long in the longitudinal direction, for the sake of simplicity. 15 and 16, the image of the schematic projection light L is divided into four in the longitudinal direction. Further, for the sake of explanation, the longitudinal direction of the image of the projection light L is the same as the j direction of the image 28.

  FIG. 15A illustrates an image of the projection light L included in the measurement image area 27 before the enlargement target area 75 is set and enlarged. In the drawing of FIG. 16A, the image of the projection light L has a position at the left end in the longitudinal direction, a position at the right side in the longitudinal direction with respect to the position a, and a position at the center in the longitudinal direction. Is c, the position on the right side in the longitudinal direction with respect to the position c is d, and the position of the right end in the longitudinal direction is e. The image of the projection light L is divided into four regions: a region from position a to position b, a region from position b to position c, a region from position c to position d, and a region from position d to position e. The four regions have the same length in the longitudinal direction. Here, since the length of the image of the projection light L in the longitudinal direction is 2 mm, the length of each region in the longitudinal direction is 0.5 mm.

  FIG. 15B shows an image of the projection light L included in the measurement image area 27 after the enlargement target area 75 is set and enlarged. In the drawing of FIG. 16B, the image of the projection light L is represented by a ′ at the position of the left end in the longitudinal direction, b ′ at the right position in the longitudinal direction with respect to the position a ′, and The center position is c ', the position on the right side of the position c' in the longitudinal direction is d ', and the position of the right end in the longitudinal direction is e'. The image of the projection light L is divided into a region from position a 'to position b', a region from position b 'to position c', a region from position c 'to position d', and a position from position d 'to position e'. Are divided into four, and the two central regions in the longitudinal direction are enlarged image regions 78 magnified 5 times, and the two regions on both outer sides in the longitudinal direction are 1 × Area. Here, since the length of the image of the projection light L in the longitudinal direction is 2 mm, the two central regions each have a length of 2.5 mm in the longitudinal direction, and the two regions on both outer sides. Has a length in the longitudinal direction of 0.5 mm.

  Next, the magnification of the enlarged image area 78 in the above specification will be described. Since the size of the imaging device 20 is limited, an upper limit is also set for the magnification. That is, the upper limit of the magnification is set so that the image of the projection light L included in the enlarged measurement image area 27 is included in the image 28 captured by the image sensor 20. In the above specification, since the size of the imaging element 20 is 10 mm × 10 mm, the length of the enlarged projection light L in the longitudinal direction is set to 10 mm or less. For example, as shown in FIG. 15, when the two central regions in the longitudinal direction are set as the enlarged image region 78, in order to reduce the length of the image of the enlarged projection light L in the longitudinal direction to 10 mm or less, the central region is required. The magnification of the two regions is set to 9 times or less. When the two outer regions are reduced, the enlargement magnification of the two central regions can be 9 times or more, but is set smaller than 10 times.

From the above, the length in the longitudinal direction of the image of the projection light L before the enlargement target area 75 is enlarged is L. The length in the longitudinal direction of the image sensor 20 is W. The ratio of the enlargement target area 75 set to the entire area of the image of the projection light L is a%. The upper limit of the magnification is b _max . In this case, the enlargement magnification upper limit b _max of the enlarged image area 78 is represented by the following equation (1).
b _max = W / (L × (a / 100)) (1)

  Note that the two regions on both outer sides may protrude from the image 28 captured by the image sensor 20. In this case, the magnification of the two central regions is set to 10 times or less.

  FIG. 17 is a diagram illustrating an example of the coordinates of each position in the j direction of the image of the projection light. Referring to FIG. 17A, in the image of the projection light L before the enlargement target area 75 is set and enlarged, the positions a, b, c, d, and e in the longitudinal direction are j. The coordinates in the direction will be described. Also, referring to FIG. 17B, in the image of the projection light L after the enlargement target area 75 is set and enlarged, the positions a ′, b ′, c ′, and d in the longitudinal direction are obtained. The coordinates of ', position e' in the j direction will be described. In FIG. 17, the positions c and c 'are set as reference positions (zero points). As for the image of the projection light L before the enlargement, the position a becomes −1.0 mm, the position b becomes −0.5 mm, the position d becomes 0.5 mm, and the position e becomes 1.0 mm. Further, in the image of the projection light L after the enlargement, the position a becomes −3.0 mm, the position b becomes −2.5 mm, and the position d becomes 2.5 mm when the position c ′ is set to 0 with respect to the coordinates in the j direction. And the position e becomes 3.0 mm.

  Since the position a in the image of the projection light L before the enlargement is the position a 'in the image of the projection light L after the enlargement, the movement amount Δd in the j direction is −2.0 mm. Further, since the position b in the image of the projection light L before the enlargement is the position b 'in the image of the projection light L after the enlargement, the movement amount Δd in the j direction is −2.0 mm. Further, since the position c in the image of the projection light L before the enlargement is the position c ′ in the image of the projection light L after the enlargement, the movement amount Δd in the j direction is 0 mm, that is, the same position. Further, since the position d in the image of the projection light L before the enlargement is the position d 'in the image of the projection light L after the enlargement, the movement amount Δd in the j direction is +2.0 mm. Further, since the position e in the image of the projection light L before the enlargement is the position e 'in the image of the projection light L after the enlargement, the movement amount Δd in the j direction is +2.0 mm.

Here, as shown in FIG. 8, the focal length f of the imaging lens 83 is assumed. The optical axis of the imaging optical system 21 that connects the objective lens 81 and the imaging lens 83 is denoted by A. The angle between the reflection surface 86a of the galvanometer mirror 86 and the optical axis A connecting the galvanometer mirror 86 and the imaging lens 83 is defined as a galvanometer mirror angle θ. In this case, the movement amount Δd is represented by the following equation (2). In equation (2), the galvanomirror angle θ when the position c is the reference position is 45 °.
Δd = f × tan (45 ° −θ) (2)

  FIG. 18 is an example of an angle of the galvanomirror at each position of the image of the projection light. As shown in FIG. 18, the galvanomirror angle θ at the position a ′ is about 56.3 ° from Expression (2). Further, the galvanomirror angle θ at the position b ′ is about 56.3 °. Further, the galvanomirror angle θ at the position c ′ is 45 °. Further, the galvanomirror angle θ at the position d ′ is about 33.7 °. Further, the galvanomirror angle θ at the position e ′ is about 33.7 °.

  Here, the galvanometer scanner 82 rotates the galvanometer mirror 86 so as to perform a predetermined rotation operation with respect to the exposure of the image sensor 20 in the scanning direction 93. The exposure time from the position a 'to the position e' in the image of the enlarged projection light L will be described.

The exposure time of one image 28 is set to t seconds. It is assumed that the number of pixels of the image sensor 20 is N. For a size of one pixel, h is the vertical length in the j direction, and w is the horizontal length in the j direction. In this case, the exposure speed v that travels on the image sensor 20 in the j direction is expressed by the following equation (3).
v = w × N / t (3)

As described above, the exposure time t for exposing one image 28 is 100 ms, that is, 0.1 s. The number N of pixels of the image sensor 20 is one million pixels. The horizontal length w of one pixel is 10 μm. For this reason, the exposure speed v is 10 ⁵ mm / s.

Here, assuming that the position a ′ is a reference time (0 second), the elapsed time from the position a ′ to the position b ′ is 0 mm since the distance from the position a ′ to the position b ′ is 0.5 mm. 0.5 mm × v− ¹ , which is 5 × 10 ⁻⁶ s, that is, 5 μs. Further, since the distance from the position a ′ to the position c ′ is 3.0 mm, the elapsed time from the position a ′ to the position c ′ is 30 μs. Further, since the distance from the position a ′ to the position d ′ is 5.5 mm, the elapsed time from the position a ′ to the position d ′ is 55 μs. Further, since the distance from the position a ′ to the position e ′ is 6.0 mm, the elapsed time from the position a ′ to the position e ′ is 60 μs.

  From the above, the rotation operation of the galvano scanner 82 is the operation shown in FIG. FIG. 19 is a diagram illustrating an example of a rotation operation of the galvano scanner. In FIG. 19, the horizontal axis represents the elapsed time, and the vertical axis represents the galvanomirror angle θ. As shown in FIG. 19, the point at which the elapsed time is 0 second is the point at the position a ', and the galvanomirror angle θ at the position a' is about 56.3 °. The point at which the elapsed time is 5 μs is the point at the position b ′, and the galvanomirror angle θ at the position b ′ is about 56.3 °. The point where the elapsed time is 30 μs is the point at the position c ′, and the galvanomirror angle θ at the position c ′ is 45 °. The point where the elapsed time is 55 μs is the point at the position d ′, and the galvanomirror angle θ at the position d ′ is about 33.7 °. The point at which the elapsed time is 60 μs is the point at the position e ′, and the galvanomirror angle θ at the position e ′ is about 33.7 °.

  That is, the galvano scanner 82 sets the galvanomirror angle θ of the reflection surface 86a of the galvanomirror 86 to about 56.3 ° at the position a ′. Further, the galvano scanner 82 stops rotating until 5 μs elapses, and maintains the galvanomirror angle θ at about 56.3 °. After the elapse of 5 μs, the galvanometer scanner 82 rotates the galvanomirror 86 in the second rotation direction 92 so that the galvanomirror angle θ changes from about 56.3 ° to 45 ° until 30 μs elapses. After a lapse of 30 μs, the galvanometer scanner 82 rotates the galvanometer mirror 86 in the second rotation direction 92 so that the galvanomirror angle θ changes from 45 ° to about 33.7 ° until 55 μs elapses. After the elapse of 55 μs, the galvano scanner 82 stops rotating until the elapse of 60 μs, and maintains the galvanomirror angle θ at about 33.7 °.

  The rotation operation of the galvano scanner 82 shown in FIG. 19 is an operation for one row of pixel columns in the scanning direction 93 of the image sensor 20. Since the imaging element 20 is of a rolling shutter type, the image pickup device 20 performs the rotation operation shown in FIG. 19 for each row (in accordance with the exposure for each row), thereby obtaining the distorted image shown in FIG. Generate In FIGS. 16 to 18, the positions a to e and the positions a ′ to e ′ have been described for simplicity, but actually the positions a to e and the positions a ′ to e 'Is the position of the pixel of the image sensor 20.

  The rotating operation of the galvano scanner 82 shown in FIG. 19 is the rotating operation of the galvano scanner 82 when the enlarged image area shown in FIG. 16 is set, and is not limited to this operation. For example, the rotation operation of the galvano scanner 82 shown in FIGS. 20 to 23 may be performed. FIG. 20 is an explanatory diagram of an example regarding each position of the image of the projection light. FIG. 21 is a diagram illustrating an example of coordinates at each position of the image of the projection light. FIG. 22 is a diagram illustrating an example of the angle of the galvanomirror at each position of the image of the projection light. FIG. 23 is a diagram illustrating an example of a rotation operation of the galvano scanner.

  For example, as shown in FIG. 20A, the image of the projection light L before the enlargement target area 75 is set and enlarged is divided into four areas as in FIG. The length of the image of the projection light L in the longitudinal direction is 2 mm. As shown in FIG. 20B, the image of the projection light L after the enlargement target area 75 has been set and enlarged is an area in which two central areas in the longitudinal direction are enlarged by 1.5 times. And the two regions on both outer sides in the longitudinal direction are regions reduced by 0.5 times. In this case, as shown in FIG. 21A, in the image of the projection light L before the enlargement, assuming that the position c is 0 with respect to the coordinates in the j direction, the position a becomes −1.0 mm and the position b becomes −1.0 mm. The position becomes 0.5 mm, the position d becomes 0.5 mm, and the position e becomes 1.0 mm. Further, as shown in FIG. 21B, the position of the image of the projection light L after the enlargement is −1.0 mm when the position c ′ is 0 with respect to the coordinates in the j direction, and the position b is − It becomes 0.75 mm, the position d becomes 0.75 mm, and the position e becomes 1.0 mm.

  Since the position a in the image of the projection light L before the enlargement is the position a 'in the image of the projection light L after the enlargement, the movement amount Δd in the j direction is 0 mm, that is, the same position. Further, since the position b in the image of the projection light L before the enlargement is the position b 'in the image of the projection light L after the enlargement, the movement amount Δd in the j direction is −0.25 mm. Further, since the position c in the image of the projection light L before the enlargement is the position c ′ in the image of the projection light L after the enlargement, the movement amount Δd in the j direction is 0 mm, that is, the same position. Further, since the position d in the image of the projection light L before the enlargement is the position d 'in the image of the projection light L after the enlargement, the movement amount Δd in the j direction is +0.25 mm. Further, since the position e in the image of the projection light L before the enlargement is the position e 'in the image of the projection light L after the enlargement, the movement amount Δd in the j direction is 0 mm, that is, the same position.

  As shown in FIG. 22, the galvanomirror angle θ at the position a ′ is 45 ° according to Expression (2). The galvanomirror angle θ at the position b ′ is about 46.4 °. Further, the galvanomirror angle θ at the position c ′ is 45 °. The galvanomirror angle θ at the position d ′ is about 43.6 °. In addition, the galvanomirror angle θ at the position e ′ is 45 °.

  Here, assuming that the position a ′ is a reference time (0 second), the elapsed time from the position a ′ to the position b ′ is 25 mm because the distance from the position a ′ to the position b ′ is 0.25 mm. .5 μs. Since the distance from the position a 'to the position c' is 1.0 mm, the elapsed time from the position a 'to the position c' is 10 [mu] s. Since the distance from the position a 'to the position d' is 1.75 mm, the elapsed time from the position a 'to the position d' is 17.5 [mu] s. Since the distance from the position a 'to the position e' is 2.0 mm, the elapsed time from the position a 'to the position e' is 20 [mu] s.

  From the above, the rotation operation of the galvano scanner 82 is the operation shown in FIG. In FIG. 23, the horizontal axis is the elapsed time, and the vertical axis is the galvanomirror angle θ. As shown in FIG. 23, the point at which the elapsed time is 0 second is the point at the position a ', and the galvanomirror angle θ at the position a' is 45 °. The point where the elapsed time is 2.5 μs is the point at the position b ′, and the galvanomirror angle θ at the position b ′ is about 46.4 °. The point where the elapsed time is 10 μs is the point at the position c ′, and the galvanomirror angle θ at the position c ′ is 45 °. The point at which the elapsed time is 17.5 μs is the point at the position d ′, and the galvanomirror angle θ at the position d ′ is about 43.6 °. The point at which the elapsed time is 60 μs is the point at the position e ′, and the galvanomirror angle θ at the position e ′ is 45 °.

  That is, the galvano scanner 82 sets the galvanomirror angle θ of the reflecting surface 86a of the galvanomirror 86 to 45 ° at the position a ′. Further, the galvano scanner 82 rotates the galvanometer mirror 86 in the first rotation direction 91 so that the galvanomirror angle θ is changed from 45 ° to about 46.4 ° until 2.5 μs elapses. After 2.5 μs elapses, the galvanometer scanner 82 rotates the galvanomirror 86 in the second rotation direction 92 so that the galvanomirror angle θ changes from about 46.4 ° to 45 ° until 10 μs elapses. . After the elapse of 10 μs, the galvanometer scanner 82 rotates the galvanomirror 86 in the second rotation direction 92 so that the galvanomirror angle θ is changed from 45 ° to about 43.6 ° until 17.5 μs elapses. . After a lapse of 17.5 μs, the galvanometer scanner 82 rotates the galvanometer mirror 86 in the first rotation direction 91 so that the galvanomirror angle θ changes from about 43.6 ° to 45 ° until 20 μs elapses. .

  In the rotation operation of the galvano scanner 82 shown in FIG. 23, the galvanometer mirror angle θ can be set to the same angle at the start point and the end point of the rotation operation. For this reason, when the rotation operation of the galvano scanner 82 is repeatedly performed over a plurality of rows in the direction orthogonal to the scan direction 93 of the image sensor 20, the rotation operation of the galvano scanner 82 can be performed continuously.

  In step S11, when the rotation operation of the galvanometer mirror 86 as shown in FIGS. 19 and 23 is set, the control device 4 acquires the rotation operation information 44 regarding the rotation operation of the galvanometer mirror 86. As the rotation operation information, information on the graphs shown in FIGS. 19 and 23, information on the movement amount Δd corresponding to each position shown in FIGS. 17 and 21, correspondence between the pixel position in the j direction and the galvanomirror angle θ This is the information and the like shown in FIGS. 18 and 22 attached. The control device 4 stores information on the rotating operation of the galvanometer mirror 86 shown in FIGS. 19 and 23 in the storage unit 31 as the measurement condition of the condition table 46 (Step S13). That is, the measurement condition set in step S13 is a measurement condition in which the point cloud is dense and dense. After execution of step S13, the control device 4 ends the processing related to the teaching mode.

  In FIG. 12, in step S9, the control device 4 sets the enlargement target area 75 based on the operation of the operator who visually recognizes the screen 60 of FIG. 13 displayed on the display unit 33. The enlargement target area 75 may be set by an operation of an operator who visually recognizes M itself.

  The control device 4 may set the enlargement target area 75 based on the design data of the measurement target M included in the specification data 49. That is, the design data of the measurement target M includes information in which a predetermined region of the measurement target M is associated with the enlargement target region 75. The image area setting unit 34 acquires the design data of the measurement target M, and uses the imaging device 20 based on the information in which the predetermined area of the measurement target M and the enlargement target area 75 included in the design data are associated. An enlargement target area 75 corresponding to the enlarged image area 78 may be set in the captured image 28.

  Further, the control device 4 may set the enlargement target area 75 based on the CAD data of the measurement target M included in the specification data 49. That is, the CAD data of the measurement target M includes information on the outer shape of the measurement target M. The image area setting unit 34 sets the enlarged image area so that the density of the point group increases when the change amount of the external shape is larger than a preset threshold value, that is, when the external shape changes rapidly. An enlargement target area 75 corresponding to 78 is set. Note that the image area setting unit 34 determines that the density of the point group is low when the change amount of the external shape is equal to or less than a preset threshold value, that is, when the change of the external shape is gradual, A reduction target area corresponding to the area may be set.

  Further, in FIG. 12, the enlargement target area 75 is set in the image 28 captured by the image sensor 20, but the enlarged image area 78 has the same enlargement magnification over the entire image area of the image 28. The enlargement target area 75 may be set. Further, the steps from step S5 to step S13 in FIG. 12 may not be performed at the time of teaching (in the teaching mode), and may be performed at the time of actual measurement of the measuring object M (at the time of main measurement).

  Next, with reference to FIG. 24, a description will be given of a process related to the shape measuring method of the measurement target M performed by the shape measuring device 1. FIG. 24 is a flowchart illustrating a measuring operation of the shape measuring apparatus according to the first embodiment. The control device 4 of the shape measuring device 1 executes the shape measuring program 48 and, based on the measurement conditions of the condition table 46 set in the teaching mode of FIG. An image is taken by the imaging device 9. The imaging device 9 captures an image of the measurement target M including the projection light L, and generates image data of a distortion image. The control device 4 causes the measurement unit 39 to acquire image data of the distorted image generated by the imaging device 9 (Step S21). In step S21, the control device 4 controls the galvano scanner 82 so that the image acquired by the imaging of the imaging device 9 becomes a distorted image including the enlarged image area 78 set in the teaching mode. That is, the control device 4 controls the galvano scanner 82 based on the rotation operation information 44 so that the rotation operation is performed as shown in FIG. 19 or FIG. Then, in step S21, the imaging element 20 outputs the acquired image data of the distorted image to the measuring unit 39.

Subsequently, the measuring unit 39 generates the point cloud data of the point cloud based on the acquired image data of the strain image and in consideration of the amount of the distortion given to the strain image, so that the measurement target M is measured. The shape is measured (Step S23). In step S23, specifically, the measurement unit 39 acquires one peak detection position of the image of the projection light L in the pixel row in the i direction from the image data of the distorted image. The peak detection position is the position of the center of gravity in the pixel row in the i direction. The peak detection position is calculated using the pixel value of the brightness of each pixel in the pixel row in the i direction. In addition, the measurement unit 39 acquires the peak detection position in the i direction over the j direction from the image data of the distortion image. Peak detection position _{P i} becomes a ij orthogonal coordinate _{system, P i = (i p,} j p) is represented by.

Here, as shown in FIG. 11, when the galvanomirror 86 is in the initial position state, that is, the galvanomirror angle θ is 45 °, and the measurement visual field area 26 a is located at the center of the imaging area 25 of the imaging element 20. If is located, coordinates in ij orthogonal coordinate system of the sensor origin _{I b is, I b = (i b,} j b) has become. On the other hand, when the galvanometer mirror 86 rotates from the initial position, the measurement visual field area 26 moves by the moving amount Δd in the j direction with respect to the imaging area 25 of the image sensor 20, and the measurement visual field area 26b or the measurement visual field The viewing area 26c is obtained. In this case, the sensor origin _Ib also moves by the moving amount Δd in the j direction. Therefore, the coordinates of the sensor origin _{Ib in} the ij orthogonal coordinate system are expressed by the following equation (4).
_{I b = (i b, j} b -Δd) = (i b, j b -f × tan (45 ° -θ))
... (4)

Then, measuring section 39, the peak detection position _{P i} as a ij orthogonal coordinate system, using the sensor origin _{I b} shown in equation (4) is converted to the XYZ orthogonal coordinate system. Here, the relative position between the optical probe 3 and the measurement object M obtained from the position detection unit 11 and the position detection unit 73 in the XYZ orthogonal coordinate system is defined as _pb . A rotation matrix indicating the attitude of the image sensor 20 in the XYZ orthogonal coordinate system is _defined as R _pos . The peak detection position in the XYZ rectangular coordinate system is defined as _pi . Peak detection position p _i of the XYZ orthogonal coordinate system, the position of the point group. Further, the size of the pixel is set to k (mm / pixel). XYZ orthogonal coordinate system composed of the peak detection position _{p i} is given by to the following equation (5). Note that T indicates a transposed matrix.
_{p i = kR pos [0,} i p -i b, j p - (j b -Δd)] T + p b
... (5)

Here, the movement amount Δd is associated with the peak detection position j _p of the j direction to be ij orthogonal coordinate system. That is, the movement amount Δd of the measurement visual field region 26 when the exposure is performed at the pixel position in the j direction of the image 28 is known. In other words, the galvanomirror angle θ at the time of exposure at the pixel position in the j direction of the image 28 is known as shown in FIG. Therefore, in (5), the moving amount Δd is, the movement amount Δd is given associated with the peak detection position j _p of the j-direction. To explain with reference to FIG. 18, as an example, as the galvano mirror angle θ corresponding to the position j _p of the pixel at the position a ', that is given 56.5 °, from (5), the XYZ orthogonal coordinate system becomes the peak detection position p _i, i.e., the position of the points in the XYZ orthogonal coordinate system is calculated. Then, the point group generated in step S23 is generated as a corrected point group having different densities as shown in FIG. That is, the measuring unit 39 calculates the position of the point group in the XYZ orthogonal coordinate system from Expression (5) using the rotation operation information 44 shown in FIG.

  Then, in step S23, the measurement unit 39 of the control device 4 measures the external shape of the measurement target M by generating point cloud data of the point cloud. After execution of step S25, the control device 4 ends the processing related to the shape measurement of the measurement target M.

  As described above, according to the first embodiment, in the image 28 captured by the imaging device 9, the points generated along the longitudinal direction of the image of the projection light L are dense in the enlarged image area 78. be able to. For this reason, it is possible to accurately measure the shape of the portion of the measurement object M where the point cloud is dense. In other words, in the measurement target M, the interval between the point groups in the longitudinal direction of the image of the projection light L is conventionally set to be equal to the portion requiring high measurement accuracy. In one embodiment, the enlargement target area 75 corresponding to the enlarged image area 78 can be set so that the interval between the point groups in the longitudinal direction of the image of the projection light L is closer than before. For this reason, the measurement accuracy at a predetermined portion of the measurement target M can be improved.

  Conventionally, in order to measure the shape of the measurement target M with high accuracy, in order to increase the density of the point group to be higher than the density of the pixels of the image sensor 20, at least a part of the measurement range 74 of the measurement target M is measured. It was necessary to obtain a plurality of images 28 in duplicate. That is, the points of the equally spaced point group obtained in one image 28 in a certain area are interpolated by the equally spaced point group points obtained in another image 28 obtained by imaging the same area. This can increase the density of the point cloud. In the conventional case, since a plurality of images 28 are obtained as described above, the measurement time of the shape of the measurement target M becomes long. On the other hand, in the first embodiment, in one image 28, the density of the point group can be increased with respect to the portion of the measurement target M that requires high measurement accuracy. For this reason, since only one image 28 needs to be acquired, it is possible to suppress an increase in measurement time.

  Further, according to the first embodiment, it is possible to use the galvano scanner 82 which has high responsiveness and can be driven with high accuracy, and to use the imaging element 20 of the rolling shutter system. Therefore, the image of the measurement target M by the galvano scanner 82 can be moved in accordance with the exposure of each pixel in the scanning direction on the imaging surface 20a of the imaging device 20.

  Further, according to the first embodiment, in the measuring unit 39 of the control device 4, the point cloud data of the point cloud having different densities is obtained from the image data of the distorted image captured by the imaging device 9 using the rotation operation information 44. Can be generated.

  Further, according to the first embodiment, using the screen 60 shown in FIG. 13, the image area setting unit 34 corresponds to the enlarged image area 78 for the part of the measurement target M requiring the measurement accuracy. The enlargement target area 75 can be set. Then, in the set enlargement target area 75, the density of the point group can be increased. Therefore, the operability of setting the density of the point cloud by the operator can be improved.

  In the first embodiment, the image of the measurement target M received on the imaging surface 20a of the imaging device 20 is moved in the scanning direction by rotating the galvanomirror 86. The configuration may be such that the galvano scanner 82 is omitted. In this case, a moving mechanism for moving the imaging device 20 in the scanning direction 93 is provided, and the imaging surface 20a of the imaging device 20 is moved in the scanning direction 93 by this moving mechanism.

  Further, in the first embodiment, the projection light L is a linear projection light that is long in the longitudinal direction. However, the projection light L is not particularly limited to the linear projection light, and may be projection light having another existing intensity distribution. As an example, the intensity distribution of the projection light that the light projecting device 8 projects on the measurement target M may be a stripe-like intensity distribution (a plurality of line-like intensity distributions) or a dot-like intensity distribution. You can. An existing configuration can be applied to the configuration of the light projection device that projects the projection light having these intensity distributions.

  In the first embodiment, the measuring unit 39 calculates the coordinate value of each pixel of the captured image in the ij orthogonal coordinate system, and calculates the point group of the XYZ rectangular coordinate system based on the calculated coordinate value of each pixel. Although the shape of the measurement target M is measured by calculating the coordinate values, the measurement target M may be displayed in a polygon based on the calculated point group.

[Second embodiment]
Next, a second embodiment will be described with reference to FIGS. FIG. 25 is an explanatory diagram illustrating a measuring operation of the shape measuring device according to the second embodiment. FIG. 26 is a diagram illustrating a corrected distortion image. FIG. 27 is a flowchart illustrating a measuring operation of the shape measuring apparatus according to the second embodiment. In the second embodiment, parts different from the first embodiment will be described in order to avoid redundant description, and parts having the same configuration as the first embodiment will be described with the same reference numerals.

  In the first embodiment, the measurement unit 39 generates the point cloud data of the point cloud from the acquired image data of the distorted image in consideration of the movement amount Δd, thereby converting the point cloud data of the point cloud having different densities. Generated. On the other hand, in the second embodiment, the control device 4 corrects the image data of the distorted image in consideration of the moving amount Δd, and generates point cloud data of a point cloud from the corrected image data of the distorted image. I have. In addition, in the imaging device 9 of the second embodiment, similarly to the first embodiment, image data of a distorted image is generated so that the image (image) of the measurement target M included in the image 28 is distorted. I have. That is, in the imaging device 9 according to the second embodiment, when generating image data of a distorted image in which the image of the measurement target M is distorted, the image of the measurement target M formed on the imaging surface 20a is generated. By moving the image of the measurement target M on the imaging surface 20a without giving distortion, the image (image) of the measurement target M is distorted at the time of imaging.

  In addition, the measurement unit 39 generates point cloud data having different point cloud densities based on the image data of the strain image in which the image including the measurement target M is distorted and the amount of the applied distortion. ing. Specifically, the measuring unit 39 corrects the image data of the distorted image in which the image including the measurement target M is distorted based on the given amount of distortion, and, from the corrected image data of the distorted image, Point cloud data with different point cloud densities is generated. Here, as described above, since the distortion is at least one of enlargement and reduction, the amount of distortion is determined by the enlargement magnification (a predetermined magnification to be enlarged) and the reduction magnification (a predetermined magnification to be reduced). At least one of them. In the second embodiment, when the image data of the distorted image is corrected, the correction based on the enlargement ratio and the reduction ratio is performed. Therefore, the density of the point group is different based on the enlargement ratio and the reduction ratio. Generating data.

In the second embodiment, the measuring unit 39 performs a correction process on the acquired image data of the distorted image before deriving the peak detection position P _i to generate corrected image data. I do.

  Referring to FIG. 25, measurement object M (FIG. 25 (a)) onto which projection light L is projected, a distorted image ((b) of FIG. 25) captured by imaging device 9, and measurement unit 39 A description will be given of a corrected distortion image (FIG. 25C) and a point group generated from the corrected distortion image data (FIG. 25D). Note that the measurement target M onto which the projection light L is projected and the distorted image captured by the imaging device 9 are the same as those shown in FIG.

  As shown in FIG. 25C, in the distorted image corrected by the measuring unit 39, the enlarged image area at the center in the longitudinal direction of the image of the projection light L is the same as the distorted image in FIG. The image becomes the magnification. On the other hand, in the corrected distorted image, the reduced image area outside the image of the projection light L in the longitudinal direction is enlarged by the correction. That is, the reduced image area is enlarged so as to have the same enlargement magnification as the enlarged image area. For this reason, the image size of the distorted image is extended in the j direction by the correction. Therefore, the image size of the corrected distortion image is larger than the image size of the distortion image before correction.

  Here, as shown in FIG. 26, when the image size of the distorted image is extended in the j direction by correction, the reduced image area 79 is enlarged so as to have the same enlargement magnification as the enlarged image area 78. As shown in FIG. 26A, in the measurement image area 27 of the distortion image before correction, the image of the projection light L is divided into four areas in the longitudinal direction. In the image of the projection light L, similarly to FIG. 15B and FIG. 1B, the two central regions in the longitudinal direction are enlarged image regions 78, and the region is magnified 5 times. It has become. In the image of the projection light L, two regions on both outer sides in the longitudinal direction form a 1-times reduced image region 79 that is not enlarged. In FIG. 26, for the sake of explanation, the number of pixel columns in the j direction is the number of columns according to the magnification. As shown in FIG. 26A, the number of pixel rows L1 in the i direction of the enlarged image area 78 is five in the j direction, and the number of pixel rows L2 in the i direction of the reduced image area 76 is one in the j direction. Become.

  FIG. 26B shows a corrected image that is a corrected distortion image. When the reduced image area 79 has the same enlargement magnification as the enlarged image area 78 in the measurement image area 27 of the corrected distortion image, four pixel rows L3 in the i direction are inserted into the reduced image area 79. And five rows in the j direction. At this time, in the reduced image area 79, two i-directional pixel rows L3 serving as buffers are provided on both sides of the pixel row L2 such that the i-directional pixel row L2 of the reduced image area 79 is located at the center in the j direction. Insert each. The i-directional pixel row L3 serving as a buffer is a pixel row that does not generate a point cloud.

The measurement unit 39 generates corrected image data of a corrected image obtained by correcting the distortion image, as illustrated in (b) of FIG. The corrected image data is image data of a corrected image obtained by correcting a distortion image. The corrected image data of the corrected image is data including a luminance value at each pixel of the image 28 and a coordinate value of the ij orthogonal coordinate system (two-dimensional coordinate system) at each pixel. At this time, as shown in FIG. 26, the distorted image is elongated in the j direction by the correction, and thus the coordinate value of each pixel in the ij orthogonal coordinate system (two-dimensional coordinate system) is the density of each pixel in the j direction. Have different coordinate values. Then, the measuring unit 39 generates point cloud data of the point cloud based on the corrected image data. At this time, since the measurement unit 39 uses the corrected image data, it is not necessary to consider the movement amount Δd. That is, the equation for obtaining the point group in consideration of the movement amount Δd is the expression (5) described in the first embodiment, but by eliminating the movement amount Δd included in the expression (5), the movement amount Δd can be reduced. A group of points that are not taken into account is obtained by the following equation (6).
_{p i = kR pos [0,} i p -i b, j p -j b)] T + p b ··· (6)

  As shown in FIG. 26B, the pixel density of the corrected distorted image corresponding to the reduced image area 79 of the distorted image is reduced by the correction. For this reason, in the reduced image area, the interval between the plurality of pixels on the corrected distortion image becomes longer in the longitudinal direction (j direction) of the image of the projection light L. Further, the pixel density of the corrected distortion image corresponding to the enlarged image area 78 of the distortion image is relatively higher than the reduced image area 79. For this reason, in the enlarged image region 78, the interval between the plurality of pixels on the corrected distortion image is shorter in the longitudinal direction (j direction) of the image of the projection light L than in the reduced image region 79. Then, as shown in (d) of FIG. 25, the point group generated based on the image data of the corrected distorted image is obtained by enlarging the distorted image as in (d) of FIG. 10 of the first embodiment. The point group corresponding to the image area 78 becomes dense, and the point group corresponding to the reduced image area 79 of the distorted image becomes sparse. For this reason, the points generated from the corrected distortion image have different densities in the longitudinal direction of the image of the projection light L.

  Next, with reference to FIG. 27, a description will be given of a process related to the shape measuring method of the measurement target M performed by the shape measuring device 1. The control device 4 of the shape measuring device 1 executes the shape measuring program 48 and, based on the measurement conditions of the condition table 46 set in the teaching mode, captures an image of the measurement target M onto which the projection light L is projected, by the imaging device 9. To capture an image. The imaging device 9 captures an image of the measurement target M including the projection light L, and generates image data of a distortion image. The control device 4 acquires the image data of the distorted image generated by the imaging device 9 in the measurement unit 39 (Step S31).

  Subsequently, the measuring unit 39 corrects the acquired image data of the distorted image as shown in FIG. 26, and acquires the corrected image data of the distorted image (Step S33). In step S33, the image data of the corrected distortion image is obtained by correcting the position of each pixel of the distortion image before correction. Then, the control device 4 measures the shape of the measurement target M by generating point cloud data of the point cloud based on the corrected image data of the distorted image (step S35). In step S35, the measurement unit 39 of the control device 4 measures the external shape of the measurement target M by generating the point cloud data of the point cloud using Expression (6). After execution of step S35, the control device 4 ends the processing related to the shape measurement of the measurement target M.

  As described above, also in the second embodiment, in the image 28 captured by the imaging device 9, the points generated along the longitudinal direction of the image of the projection light L are dense in the enlarged image area 78. Can be. For this reason, it is possible to accurately measure the shape of the portion of the measurement object M where the point cloud is dense.

  Further, according to the second embodiment, as in the first embodiment, in one image 28, the density of the point cloud is increased for a part of the measurement target M that requires high measurement accuracy. Can be. For this reason, since only one image 28 needs to be acquired, it is possible to suppress an increase in measurement time.

  According to the second embodiment, the measuring unit 39 of the control device 4 corrects the distorted image picked up by the image pickup device 9 and generates the point cloud point group data from the corrected image data of the corrected distorted image. Can be. For this reason, since the measuring unit 39 can generate the point cloud data of the point cloud without considering the movement amount Δd, it is possible to execute the processing regarding the generation of the point cloud without changing.

[Third embodiment]
FIG. 28 is a diagram illustrating a configuration of an inline system including the shape measuring device according to the third embodiment. In the first embodiment, the measurement target M is set on the table 71 of the shape measuring device 1 and the table 71 is rotated by the rotation drive unit 72. However, in the third embodiment, the measuring object M is adjacent to the shape measuring device 101. The table 71 is provided on the transport device 206 on one side, the table 71 of the transport device 206 on one side is rotated, and the shape of the measuring object M is measured by the shape measuring device 101.

  As shown in FIG. 28, as in the first embodiment, for example, a multi-axis manipulator is applied to one side of the transfer device 206, and the holding and rotating device 7 is provided at the tip thereof. The holding and rotating device 7 has the same configuration as that of the first embodiment, and includes a table 71 for holding the measurement object M, a rotation driving unit 72 for rotating the table 71 in the rotation direction, that is, the direction of the arrow 102, A position detector 73 for detecting the position of the table 71 in the rotation direction. In the second embodiment, since the holding / rotating device 7 is provided in the transfer device 206, the shape measuring device 101 of the second embodiment has a configuration in which the holding / rotating device 7 is omitted. Therefore, the shape measuring device 101 moves the position of the optical probe 3 by the probe moving device 2, and the transport device 206 rotates the position of the measuring object M in the direction of the arrow 102 by the holding and rotating device 7.

  Here, the shape measurement by the shape measuring apparatus 101 using the transport device 206 on one side will be described. The transfer device 206 on one side carries the measurement target M into the shape measurement device 101 from a previous process in a state where the measurement target M is set on the table 71 of the holding and rotating device 7. At the time of loading of the measuring object M into the shape measuring device 101, the one-side transport device 206 has a predetermined positional relationship between the holding and rotating device 7 of the one-side transport device 206 and the shape measuring device 1. It is carried so that it becomes. The predetermined positional relationship is, for example, the positional relationship between the probe moving device 2 and the holding and rotating device 7 arranged on the base B of the first embodiment. When the shape measuring device 101 and the holding / rotating device 7 have a predetermined positional relationship, the shape measuring device 101 executes the shape measurement of the measuring object M. The shape measuring device 101 obtains the position of the optical probe 3 moved by the probe moving device 2 by the position detecting unit 11, and determines the position of the measurement target M rotated by the holding and rotating device 7 of the transport device 206 on one side. The relative position between the optical probe 3 and the measurement target M is acquired by the position detection unit 73. Further, the projection light L is projected from the light projecting device 8 onto the measurement target M, and an image of the measurement target M is captured by the imaging device 9 to generate image data. Then, the shape measuring device 1 measures the shape of the measurement target M based on the relative position and the image data acquired at the relative position. After the shape measurement by the shape measuring device 1, the transport device 206 on the other side unloads the measurement object M installed on the holding and rotating device 7 of the transport device 206 on the one side from the shape measuring device 1 and unloads the measurement object. The object M is transported to a subsequent process.

  As described above, according to the third embodiment, when the measuring object M is carried into the shape measuring device 101 from one of the transport devices 206, the work of installing the measuring object M on the shape measuring device 101 is omitted. In addition, since the shape of the measurement target M can be measured, the tact time related to the shape measurement can be shortened, and the work efficiency can be improved. In the second embodiment, the XYZ movement mechanism and the θ movement mechanism of the probe moving device 2 may be omitted, or a part of each movement mechanism may be omitted. Further, the configuration may be such that the rotation drive unit 72 of the holding and rotating device 7 is omitted.

[Fourth embodiment]
FIG. 29 is a diagram illustrating a configuration of an inline system including the shape measuring device according to the fourth embodiment. In the first embodiment, the measuring object M is set on the table 71 of the shape measuring apparatus 1 and the table 71 is rotated by the rotation drive unit 72. However, in the third embodiment, the measurement is performed on the endless transport belt 223. The shape of the measuring object M is measured by the shape measuring device 110 by rotating the optical probe 3 provided above the endless transport belt 223 with the measuring object M placed thereon.

  As shown in FIG. 29, the structure manufacturing system 200 includes a transfer device 220 and a shape measuring device 110 provided above the transfer device 220 in the vertical direction. The transport device 220 includes a pair of transport rollers 221 and 222 including a drive roller 221 and a driven roller 222, and an endless transport belt 223 that is bridged between the pair of transport rollers 221 and 222. The transport device 220 transports the measurement target M placed on the transport belt 223 in the transport direction by rotating the transport belt 223 by the pair of transport rollers 221 and 222. In addition, the transport device 220 stops the transport of the measurement target M at a position below the shape measurement device 110, and in this state, measures the shape by the shape measurement device 110, and then measures the measurement target after the shape measurement. M is conveyed to a post-process.

  In the shape measuring device 110 of the fourth embodiment, the probe moving device 2 detects the θ rotation unit 113 that rotates the optical probe 3 in the θ direction, that is, the direction of the arrow 112, and detects the position of the θ rotation unit 113 in the rotation direction. And a position detector (not shown). The position detection unit is an encoder device that detects the rotation of the rotation axis of the θ rotation unit 113. The probe moving device 2 causes the θ rotation unit 113 to rotate the optical probe 3 based on the result detected by the position detection unit. In the third embodiment, since the θ rotating unit 113 is provided in the probe moving device 2, the shape measuring device 110 of the third embodiment has a configuration in which the holding and rotating device 7 is omitted. Further, the θ rotation unit 113 provided in the probe moving device 2 has the same configuration as the rotation drive unit 72 of the first embodiment, and thus the description is omitted.

  As described above, according to the fourth embodiment, the transport of the measurement target M and the shape measurement can be performed while the measurement target M is placed on the transport belt 223 of the transport device 220. Tact time related to shape measurement can be shortened, and work efficiency can be improved.

[Fifth Embodiment]
FIG. 30 is a schematic diagram illustrating an imaging optical system of the shape measuring apparatus according to the fifth embodiment. In order to generate image data of a distorted image that is distorted with respect to the image of the measurement target M including the image of the projection light L, the imaging device 9 of the fifth embodiment includes the imaging optical system 21 of the first embodiment. Instead, the imaging optical system 121 is a fisheye lens. The fisheye lens is a lens having relatively large distortion.

  Here, in the imaging device 9 of the fifth embodiment, image data of a distorted image is generated by applying a distortion to the image of the measurement target M formed on the imaging surface 20a. Specifically, in the imaging device 9 of the fifth embodiment, when generating image data of a distorted image in which the image of the measurement target M is distorted, the image data of the measurement target M formed on the imaging surface 20a is generated. The image is distorted by a fish-eye lens, and the distorted image of the measurement target M is formed on the imaging surface 20a, so that the image of the measurement target M is distorted. Image data is being generated.

  In addition, the measurement unit 39 generates point cloud data having different point cloud densities based on the image data of the strain image in which the image including the measurement target M is distorted and the amount of the applied distortion. ing. Specifically, the measuring unit 39 corrects the image data of the distorted image in which the image including the measurement target M is distorted based on the given amount of distortion, and, from the corrected image data of the distorted image, Point cloud data with different point cloud densities is generated. Here, as described above, since the distortion is at least one of enlargement and reduction, the amount of distortion is determined by the enlargement magnification (a predetermined magnification to be enlarged) and the reduction magnification (a predetermined magnification to be reduced). At least one of them. In the fifth embodiment, the image including the measurement target M is distorted by the fisheye lens, and when correcting the image data of the distorted image, the correction based on the amount of distortion given by the fisheye lens is performed. In addition, point group data having different point cloud densities is generated from the image data of the corrected distortion image.

  As shown in FIG. 30, the imaging optical system 121 of the imaging device 9 includes a fisheye lens 125, and the fisheye lens 125 is configured by a lens group including a plurality of lenses 126 including a meniscus lens and an aspheric lens. Note that the fisheye lens 125 does not have to be constituted by a plurality of lenses such as a meniscus lens and an aspherical lens, may be constituted by other existing plural lenses, or may be constituted by an existing single lens. Good.

  The fisheye lens 125 distorts the image of the measurement target M including the image of the projection light L, and forms the distorted image of the measurement target M on the imaging surface 20a of the image sensor 20. The fisheye lens 125 is a lens having a predetermined distortion that enlarges or reduces the image of the measurement target M projected on the imaging surface 20a of the imaging device 20 in the longitudinal direction of the projection light L. The fish-eye lens 125 has a distortion that is point-symmetric with respect to the optical axis as a center point. The fisheye lens 125 is, for example, a lens having barrel distortion, in which the center of an image captured by the image sensor 20 is enlarged and the outside of the image is reduced. In other words, a plurality of fisheye lenses 125 are prepared according to the amount of distortion of the distorted image, in other words, the magnification of a predetermined image area in the distorted image, or the type of point cloud density in the corrected image. The plurality of fisheye lenses 125 include, for example, a first fisheye lens and a second fisheye lens having different distortions. Then, by attaching or replacing a predetermined fisheye lens 125 to the imaging device 9 from among the plurality of fisheye lenses 125, it becomes possible to form a predetermined dense and dense point cloud.

  The fisheye lens 125 is replaced by a lens replacement unit that replaces the fisheye lens 125 with a predetermined fisheye lens 125 corresponding to the enlargement target area 75 from the plurality of fisheye lenses 125 based on the enlargement target area 75 set by the image area setting unit 34. You may. The lens exchange unit has a mechanism for selectively replacing the fisheye lens 125, for example, replacing the first fisheye lens with a second fisheye lens. Here, assuming that the optical axis of the imaging optical system 121 is A, one of the fisheye lenses 125 is disposed on the optical axis A. When replacing the first fisheye lens with the second fisheye lens, the lens replacement unit removes the first fisheye lens arranged on the optical axis A from the optical axis A, and arranges the second fisheye lens on the optical axis A. Then, the fisheye lens 125 is replaced. The lens exchange section is connected to the control device 4. The lens exchange unit exchanges a predetermined fisheye lens 125 based on the enlargement target area 75 set by the image area setting unit 34 of the control device 4.

  The measurement of the shape of the measurement target M by the shape measuring device 1 when the fisheye lens 125 is used will be described. When the enlargement target area 75 is set for the image 28 captured by the image sensor 20 by the image area setting unit 34, the control device 4 sets the enlarged image area 78 corresponding to the set enlargement target area 75. The fisheye lens 125 is selected based on the magnification, and the selected fisheye lens 125 is attached to the imaging device 9 by the lens exchange unit. Thereafter, the measurement unit 39 of the control device 4 captures an image of the measurement target M by the imaging device 9 and acquires image data of a distortion image.

  The image data of the distorted image including the image of the measurement target M formed by using the fisheye lens 125 is the image data of an image in which at least a part of the image of the measurement target M on the image 28 is enlarged. The image data of the distorted image is data including a luminance value of each pixel of the image 28 and a coordinate value of each pixel of the ij orthogonal coordinate system (two-dimensional coordinate system).

  Subsequently, the measuring unit 39 corrects the distorted image from the acquired image data of the distorted image based on the distortion of the fisheye lens 125 of the imaging device 9. Image data of the corrected image obtained by correcting the distorted image is data including a luminance value of each pixel of the image 28 and a coordinate value of each pixel of the ij orthogonal coordinate system (two-dimensional coordinate system). Since the corrected distorted image is corrected based on the distortion of the fisheye lens 125, the coordinate value of each pixel in the ij orthogonal coordinate system (two-dimensional coordinate system) is a coordinate value having a different density in the j direction of each pixel. It has become. The measuring unit 39 generates point cloud data of the point cloud from the corrected image data of the corrected distortion image. Specifically, since the distortion of the fisheye lens 125 of the imaging device 9 is known in advance, the measurement unit 39 determines that the magnification of the image of the measurement target M is known from the distortion of the fisheye lens 125 of the imaging device 9. Has become. The measurement unit 39 corrects the image data of the distorted image based on the magnification that is the amount of distortion so that the image data is substantially similar to the image of the measurement target M (an image having no distortion). The measurement unit 39 corrects the image data of the distorted image, and generates point cloud data of a point cloud from the corrected image data of the distorted image. Then, the measuring unit 39 measures the outer shape of the measuring object M by the measuring unit 39 based on the generated point cloud data.

  As described above, according to the fourth embodiment, as compared with the imaging optical system 21 including the galvano scanner 82, the imaging optical system 121 using the fisheye lens 125 is simplified, so that the imaging optical system 121 is simplified. Configuration. When changing the distortion of the distorted image, the distortion can be easily changed by replacing the fisheye lens 125. Note that, instead of the fisheye lens 125, another existing optical member that gives distortion to the image of the measurement target M including the image of the projection light L may be applied. For example, a free-form surface lens capable of free distortion may be applied.

[Sixth embodiment]
FIG. 31 is a diagram illustrating a partial configuration of a system including the shape measuring apparatus according to the sixth embodiment. FIG. 32 is an explanatory diagram illustrating a measuring operation of the shape measuring device according to the sixth embodiment. The shape measuring apparatus 130 according to the fifth embodiment further includes an inclined portion 131 that inclines the table 71 with respect to the rotation axis Ax of the table 71, in addition to the configuration of the first embodiment.

  By the way, as shown in FIG. 32, a slit extending in the longitudinal direction may be formed on the measurement target M by cutting or the like in some cases. Since the measurement object M is rotated by the holding and rotating device 7 and the linear projection light L is projected, the longitudinal direction of the slit and the longitudinal direction of the linear projection light L are aligned, and The projection light L may overlap. In this case, the projection light L is scattered by the crevices, and the amount of diffracted light incident on the imaging optical system 21 increases as compared with the case where the crevices and the projection light do not overlap. When the amount of diffracted light increases, the image of the projection light L on the imaging surface 20a of the imaging device 20 becomes an inappropriate image, and thus the accuracy of shape measurement of the measurement target M may be reduced. Here, the shape measuring device 130 measures, for example, the amount of light in the light control area set by the light control area setting unit 37.

  For this reason, in the shape measuring device 130 of the sixth embodiment, as shown in FIG. 31, an inclined portion 131 is provided on the rotation axis Ax of the table of the holding and rotating device 7. The tilt portion 131 tilts the table 71 about a rotation axis Ax1 orthogonal to the rotation axis Ax. Further, the holding and rotating device 7 is provided with a rotation position detection unit (not shown) that detects the position of the inclined portion 131 in the rotation direction. The holding / rotating device 7 causes the inclined portion 131 to rotate the table 71 based on the result detected by the rotating position detection unit. The linear projection light L projected from the optical probe 3 by the holding and rotating device 7 and the probe moving device 2 is projected by changing the direction of an arbitrary measurement range of the measurement target M by tilting the table 71. can do.

  When measuring the shape of the measuring object Ma shown in FIG. 9 in which teeth are formed at predetermined intervals in the circumferential direction, the shape measuring device 130 rotates the measuring object Ma in the circumferential direction while rotating the measuring object Ma in the circumferential direction. The shape of the measuring object Ma is measured by sequentially measuring the shape of the Ma teeth. At this time, before measuring the shape of the measuring object Ma, the shape measuring device 130 does not tilt the rotation axis Ax by the tilt portion 131, that is, straightens the rotation axis Ax of the table 71 in the Z-axis direction. In this state, the measuring object Ma is rotated by one turn in the circumferential direction (the first turn in FIG. 32). Then, as shown in FIG. 32, in the shape measuring device 1, the amount of diffracted light incident on the imaging optical system 21 increases at a predetermined position in the rotation direction of the table 71. The shape measuring device 130 detects a predetermined position where the amount of diffracted light is increased by the position detection unit 73, and acquires the detected predetermined position. The measuring object Ma is not limited to an object having teeth formed at predetermined intervals in the circumferential direction, and may be any object whose shape is to be measured.

  After that, the shape measuring device 130 rotates the measuring object Ma further by one rotation in the circumferential direction, and measures the shape of the measuring object Ma (second round in FIG. 32). At this time, the shape measuring device 130 executes the tilt of the rotation axis Ax by the tilt portion 131 at a predetermined position in the rotation direction of the acquired table 71. Then, the shape measuring device 130 changes the direction of an arbitrary measurement range of the measurement target M by tilting the table 71. Accordingly, the shape measuring apparatus 130 prevents the fold and the projection light L from overlapping each other when the longitudinal direction of the linear projection light L projected from the optical probe 3 and the longitudinal direction of the fold are aligned. In addition, the amount of diffracted light incident on the imaging optical system 21 is reduced.

  As described above, according to the sixth embodiment, it is possible to suppress a decrease in the accuracy of the shape measurement of the measurement target M due to the overlap of the fold and the projection light.

  The shape measuring apparatus 1 (101, 110, 130) of the above-described embodiment performs processing by one apparatus, but a plurality of shapes may be combined. FIG. 33 is a schematic diagram showing a configuration of a system having a shape measuring device. Next, a shape measuring system 300 having a shape measuring device will be described with reference to FIG. The shape measuring system 300 includes a shape measuring device 1, a plurality of (two in the figure) shape measuring devices 1a, and a program creating device 302. The shape measuring devices 1 and 1a and the program creating device 302 are connected by a wired or wireless communication line. The shape measuring device 1a has the same configuration as the shape measuring device 1 except that the shape measuring device 1a does not include the galvano scanner 82 of the imaging optical system 21 of the first embodiment. The program creating device 302 creates various settings and programs created by the control device 4 of the shape measuring device 1 described above. Specifically, the program creation device 302 creates information on the measurement range, a shape measurement program including the information on the measurement range, and the like. The program creating device 302 outputs the created program and data to the shape measuring devices 1 and 1a. The shape measuring device 1a acquires area information and a shape measuring program from the shape measuring device 1 and the program creating device 302, and performs processing using the acquired data and program. The shape measurement system 300 uses the data and programs created by the shape measurement device 1 and the program creation device 302 to execute measurement with the shape measurement device 1a, thereby effectively utilizing the created data and programs. be able to.

  Next, a structure manufacturing system including the above-described shape measuring device will be described with reference to FIG. FIG. 34 is a block diagram of the structure manufacturing system. The structure manufacturing system 200 of the present embodiment includes a shape measuring device 201 (1, 101, 110, 130), a design device 202, a molding device 203, and a control device (inspection device) as described in the above embodiment. ) 204 and a repair device 205. The control device 204 includes a coordinate storage unit 210 and an inspection unit 211.

  The design device 202 creates design information on the shape of the structure, and transmits the created design information to the molding device 203. The design device 202 stores the created design information in the coordinate storage unit 210 of the control device 204. The design information includes information indicating the coordinates of each position of the structure.

  The molding device 203 creates the above-mentioned structure based on the design information input from the design device 202. The molding by the molding device 203 includes, for example, casting, forging, cutting, and the like. The shape measuring device 201 measures the coordinates of the created structure (measurement target M), and transmits information (shape information) indicating the measured coordinates to the control device 204.

  The coordinate storage unit 210 of the control device 204 stores design information. The inspection unit 211 of the control device 204 reads out the design information from the coordinate storage unit 210. The inspection unit 211 compares the information (shape information) indicating the coordinates received from the shape measuring device 201 with the design information read from the coordinate storage unit 210. The inspection unit 211 determines whether or not the structure has been formed according to the design information based on the comparison result. In other words, the inspection unit 211 determines whether or not the created structure is non-defective. The inspection unit 211 determines whether the structure can be repaired when the structure is not formed according to the design information. When the structure can be repaired, the inspection unit 211 calculates a defective portion and a repair amount based on the comparison result, and transmits information indicating the defective portion and information indicating the repair amount to the repair device 205.

  The repair device 205 processes the defective portion of the structure based on the information indicating the defective portion and the information indicating the repair amount received from the control device 204.

  FIG. 35 is a flowchart showing the flow of processing by the structure manufacturing system. In the structure manufacturing system 200, first, the design device 202 creates design information on the shape of the structure (step S301). Next, the molding device 203 creates the structure based on the design information (Step S302). Next, the shape measuring device 201 measures the shape of the created structure (step S303). Next, the inspection unit 211 of the control device 204 compares the shape information obtained by the shape measurement device 201 with the above-mentioned design information to check whether or not the structure has been created according to the design information (step). S304).

  Next, the inspection unit 211 of the control device 204 determines whether the created structure is non-defective (step S305). When the inspection unit 211 determines that the created structure is non-defective (Yes in step S305), the structure manufacturing system 200 ends the processing. When the inspection unit 211 determines that the created structure is not a non-defective product (No in step S305), the inspection unit 211 determines whether the created structure can be repaired (step S306).

  In the structure manufacturing system 200, when the inspection unit 211 determines that the created structure can be repaired (Yes in Step S306), the repair device 205 performs the rework of the structure (Step S307), and proceeds to Step S303. Return to processing. When the inspection unit 211 determines that the created structure cannot be repaired (No in step S306), the structure manufacturing system 200 ends the processing. Thus, the structure manufacturing system 200 ends the processing of the flowchart illustrated in FIG.

  In the structure manufacturing system 200 of the present embodiment, since the shape measuring device 201 in the above embodiment can measure the coordinates of the structure with high accuracy, it is determined whether or not the created structure is good. be able to. In addition, when the structure is not good, the structure manufacturing system 200 can perform rework of the structure and repair it.

  Note that the repairing process performed by the repairing device 205 in the present embodiment may be replaced by a process in which the molding device 203 re-executes the molding process. At this time, when the inspection unit 211 of the control device 204 determines that the repair can be performed, the molding device 203 re-executes the molding process (forging, cutting, and the like). Specifically, for example, the molding device 203 cuts a portion of the structure that is to be cut originally and is not cut. Thus, the structure manufacturing system 200 can accurately create the structure.

  As described above, the present embodiment has been described with reference to the accompanying drawings. However, the shapes, combinations, and the like of the respective constituent members shown in the above-described examples are merely examples, and the design requirements and the like are not deviated from the spirit of the present embodiment. Various changes can be made on the basis of.

  For example, although the configuration in which the holding member 55 holds the optical probe 3 in a cantilever manner is illustrated in the shape measuring apparatus 1 in the above embodiment, the configuration is not limited to this, and a configuration in which the holding member 55 holds the optical probe 3 in a double-sided manner may be used. By holding it with both ends, deformation occurring in the holding member 55 during rotation can be reduced, and measurement accuracy can be improved.

  Further, in the above-described embodiment, the linear projection light L is projected from the optical probe 3 and an image of the measurement target M onto which the projection light L is projected is captured, but the type of the optical probe 3 is not limited thereto. Absent. The projection light emitted from the optical probe 3 may be of a type that is projected onto a predetermined plane at a time. For example, the method described in US Pat. No. 6,075,605 may be used. The projection light emitted from the optical probe 3 may be in a form of projecting a spot-like spot light.

  Further, the shape measuring device 201 is suitable for measuring the measurement target M having a shape that has a repetitive shape in the circumferential direction and has an uneven shape extending in a direction different from the circumferential direction, as in the above embodiment. Can be used. The shape measuring apparatus 201 can use the set conditions for the measurement of another repeated shape by setting a measurement region for one of the repeated shapes. The measuring object M is not limited to a shape having a repetitive shape in the circumferential direction and having an uneven shape extending in a direction different from the circumferential direction, and does not include various shapes, for example, a repetitive shape. It may be shaped.

Reference Signs List 1 shape measuring device 2 probe moving device 3 optical probe 4 control device 7 holding / rotating device 8 light projecting device 9 imaging device 10 driving unit 11 position detecting unit 12 light source 13 projection optical system 20 imaging element 20a imaging surface 21 imaging optical system 21a Measurement surface 25 Imaging area 26 Measurement field area 27 Measurement image area 28 Image 30 Control unit 31 Storage unit 32 Input unit 33 Display unit 34 Image area setting unit 36 Measurement range setting unit 37 Dimming area setting unit 38 Dimming control unit 39 Measurement Unit 40 operation control unit 43 area setting data of image area 44 rotation operation information 46 condition table 48 shape measurement program 49 specification data 50X, 50Y, 50Z moving unit 51X, 51Y, 51Z guide unit 52 holder 53 first rotating unit 53a Rotation axis 54 Second rotating part 55 Holding member 55A First holding part 55B Second holding unit 62, 63, 64, 65, 66, 68 Arrow 71 Table 72 Rotation driving unit 73a, 73b Reference sphere 81 Objective lens 82 Galvano scanner 83 Imaging lens 85 Rotation axis 86 Galvano mirror 91 First rotation direction 92 Second rotation direction 93 Scan direction 101 Shape measurement device 102 Arrow 110 Shape measurement device 112 Arrow 113 θ rotation unit 125 Fisheye lens 130 Shape measurement device 131 Inclined unit 200 Structure manufacturing system 201 Shape measurement device 202 Design device 203 Molding device 204 Control device 205 Repair device 206 Transport device 210 Coordinate storage unit 211 Inspection unit 220 Transport device 221 Drive roller 222 Driven roller 223 Transport belt 300 Shape measurement system 302 Program creation device Ax Rotation axis Ax1 Rotation axis B Base M Measurement target L Throw Shadow light

Claims (15)

A shape measuring device for measuring the shape of a measurement object,
A light projection unit that projects projection light onto the measurement object,
An imaging unit that generates image data of a distorted image in which distortion is applied to an image including the measurement target onto which the projection light is projected,
Shape calculation for generating point cloud data having different point cloud densities depending on positions on the measurement target based on the image data of the strain image generated by the imaging unit and the given amount of the distortion. Department and
A shape measuring device having: The shape calculation unit,
The shape measuring apparatus according to claim 1, wherein, from the image data of the distortion image, point group data having different point cloud densities depending on positions on the measurement object is generated using the amount of distortion. The shape calculation unit,
The image data of the distorted image is corrected based on the amount of distortion to generate corrected image data, and from the corrected image data, the point cloud data having a different density of point clouds depending on a position on the measurement object is obtained. The shape measuring device according to claim 1, wherein the shape measuring device generates the shape. The imaging unit,
An imaging unit that forms an image including the measurement object,
An image sensor that captures the image formed by the imaging unit and generates the image data of the distorted image distorted with respect to the image.
The shape measuring device according to any one of claims 1 to 3, further comprising: The image sensor is a rolling shutter type image sensor,
5. The shape according to claim 4, wherein the imaging unit forms an image by changing a position of an image including the measurement target formed on the imaging surface of the imaging element with time on the imaging surface. 6. measuring device. The imaging unit includes:
An objective lens on which light from the measurement object enters,
An imaging lens that collects light emitted from the objective lens and forms an image including the measurement target;
The shape measuring apparatus according to claim 5, further comprising: an image moving unit that changes a position of an image including the measurement target on the imaging surface of the imaging element with time.   7. The galvano scanner according to claim 6, wherein the image moving unit is provided in an optical path between the objective lens and the imaging lens, and moves an image including the measurement target on an imaging surface of the imaging device. The shape measuring device as described in the above. The imaging unit includes:
The shape measuring apparatus according to claim 4, further comprising a fisheye lens that gives distortion to an image including the measurement target. The fisheye lens includes a first lens and a second lens having different distortions,
The shape measuring apparatus according to claim 8, further comprising a lens exchanging unit that exchanges the first lens disposed on an optical axis with the second lens. The imaging unit generates the image data of the distorted image including an enlarged image region in which a part of the image is enlarged, and a reduced image region reduced in comparison with the enlarged image region,
The shape calculation unit generates the point cloud data in which the density of the point cloud in the enlarged image area is high and the density of the point cloud in the reduced image area is lower than the density of the point cloud in the enlarged image area. The shape measuring device according to claim 1. An image region setting unit that sets a predetermined region as a region corresponding to the enlarged image region in the distortion image,
The shape measuring apparatus according to claim 10, wherein the imaging unit enlarges the predetermined area set by the image area setting unit and generates the image data of the distortion image including the enlarged image area.   The image area setting unit, based on at least one input of an input of the predetermined area to be set and an input of an enlargement magnification of the enlarged image area included in the distortion image, the predetermined area, the distortion The shape measuring apparatus according to claim 11, wherein the apparatus is set as an area corresponding to the enlarged image area in an image. The projection light is linear light extending in the longitudinal direction,
13. The image capturing unit according to claim 1, wherein the image data of the distorted image in which the distortion is given in the longitudinal direction of the image including the measurement target object onto which the linear light is projected is generated. Item 2. The shape measuring device according to item 1. A measurement shape method executed by a shape measurement device that measures the shape of a measurement target,
Projecting the projection light onto the measurement target, and generating image data of a distorted image in which the image including the measurement target on which the projection light is projected is distorted.
The image data of the distortion image, based on the amount of the given distortion, the step of generating point cloud data having a different density of point clouds depending on the position on the measurement object,
A shape measuring method having: In a shape measuring device that measures the shape of the measurement object,
Projecting the projection light onto the measurement target, and generating image data of a distorted image in which the image including the measurement target on which the projection light is projected is distorted.
The image data of the distortion image, based on the amount of the given distortion, the step of generating point cloud data having a different density of point clouds depending on the position on the measurement object,
A shape measurement program that executes

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