JP2020038174A - Machine diagnosing device and machine diagnosing program - Google Patents

Abstract

To provide a machine diagnosing device and a machine diagnosing program which can attain a visual picture of the state of degradation of a driving mechanism.SOLUTION: A machine diagnosing device 200-1 includes a resonance characteristic identification unit 21 for identifying the resonance characteristics of a driving mechanism 34 to which a vibration torque is applied, on the basis of machine rotation information showing at least one of the position and the rate of rotation and the acceleration of the motor obtained when a vibration torque is applied to the driving mechanism 34 by a motor 32 so that the driving mechanism 34 will be vibrated. The machine diagnosing device 200-1 has a display controller 23 for making the tendency of changes of the resonance characteristics identified by the resonance characteristic identification unit 21 displayed in a display unit 300 in a temporal sequence.SELECTED DRAWING: Figure 4

Description

  The present invention relates to a machine diagnostic device and a machine diagnostic program for diagnosing a state of a drive mechanism driven by a motor.

  Patent Literature 1 discloses a technique for diagnosing an abnormality occurring in a driving mechanism having a ball screw or the like. According to Patent Literature 1, an expected value of a motor torque is calculated based on a friction parameter, and abnormality of a drive mechanism is diagnosed based on a comparison result between a specified value of the motor torque and the calculated model torque.

Japanese Patent No. 6324641

  However, in the technology disclosed in Patent Literature 1, although an alarm is output when the abnormality diagnosis result is determined to be equal to or more than the reference value, the deterioration state of the drive mechanism determined to be abnormal cannot be visually grasped. There was a problem that response to abnormalities was delayed.

  The present invention has been made in view of the above, and an object of the present invention is to provide a machine diagnostic device and a machine diagnostic program that can visually grasp a deterioration state of a drive mechanism.

  In order to solve the above-described problems and achieve the object, a machine diagnostic device according to the present invention is a machine diagnostic device that diagnoses a state of a drive mechanism driven by a motor. Based on mechanical vibration information indicating at least one of a motor rotation position, a motor rotation speed, and a motor acceleration obtained when an excitation torque is applied to the drive mechanism, the resonance characteristics of the drive mechanism to which the excitation torque is applied are determined. A resonance characteristic identification unit for identification. The machine diagnostic device includes a display control unit that graphically displays a change tendency of the resonance characteristic identified by the resonance characteristic identification unit on a display in a time-series order.

  ADVANTAGE OF THE INVENTION According to this invention, there exists an effect that the deterioration state of a drive mechanism can be grasped | ascertained visually.

Configuration diagram of a machine diagnostic system including a machine diagnostic device according to Embodiment 1. FIG. 4 is a diagram for explaining an abnormality factor occurring in the drive mechanism shown in FIG. 1 and a method for detecting the abnormality. The figure which shows the model of the drive mechanism used as the diagnostic object in the machine diagnostic apparatus which concerns on Embodiment 1. FIG. 1 is a diagram showing a configuration of a machine diagnostic device according to a first embodiment. Sequence chart for explaining the operation of the machine diagnostic device according to the first embodiment Flowchart for explaining operation of the machine diagnostic device according to the first embodiment The figure which shows the 1st content displayed graphically in chronological order by the machine diagnostic apparatus according to Embodiment 1. The figure which shows the 2nd content displayed in tabular form by the machine diagnostic apparatus concerning Embodiment 1. The figure which shows the content displayed in tabular form by the machine diagnostic apparatus according to Embodiment 1. The figure which shows the frequency response displayed by the machine diagnostic apparatus which concerns on a comparative example. The figure which expanded a part of frequency response shown in FIG. FIG. 4 is a diagram showing a first modification of the machine diagnostic device according to the first embodiment. Flow chart for explaining the operation of the machine diagnostic device shown in FIG. The figure which shows the content displayed by a graph by the machine diagnostic apparatus shown in FIG. FIG. 9 is a diagram showing a second modification of the machine diagnostic device according to the first embodiment. Sequence chart for explaining the operation of the machine diagnostic device shown in FIG. Flow chart for explaining the operation of the machine diagnostic device shown in FIG. FIG. 9 is a diagram showing a third modification of the machine diagnostic device according to the first embodiment. Sequence chart for explaining the operation of the machine diagnostic device shown in FIG. Flow chart for explaining the operation of the machine diagnostic device shown in FIG. The figure which shows the content compared by the machine diagnostic apparatus shown in FIG. The figure which shows the example in which the display was provided in the machine diagnostic apparatus which concerns on Embodiment 1. FIG. 2 is a diagram showing an example in which the machine diagnostic device according to the first embodiment and a display are connected via a server. The figure which shows the example which displays on the display via the external memory the resonance frequency etc. which were identified by the machine diagnostic apparatus which concerns on Embodiment 1. FIG. 2 is a diagram illustrating an example of a hardware configuration of a machine diagnostic device according to the first embodiment. Configuration diagram of a machine diagnosis system including a machine diagnosis device according to Embodiment 2. The figure which shows the model of the drive mechanism used as a diagnostic object in the machine diagnostic apparatus which concerns on Embodiment 2. The figure which shows the structure of the machine diagnostic apparatus which concerns on Embodiment 2. Sequence chart for explaining the operation of the machine diagnostic device according to Embodiment 2. Flowchart for explaining operation of the machine diagnostic device according to the second embodiment FIG. 1 shows the contents displayed as a graph by the machine diagnostic device according to the second embodiment. FIG. 2 is a diagram showing contents displayed in a graph by the machine diagnostic device according to the second embodiment. FIG. 9 is a diagram showing a first modification of the machine diagnostic device according to the second embodiment. Sequence chart for explaining the operation of the machine diagnostic device shown in FIG. Flow chart for explaining the operation of the machine diagnostic device shown in FIG. FIG. 9 is a diagram showing a second modification of the machine diagnostic device according to the second embodiment. Flowchart for explaining the operation of the machine diagnostic device shown in FIG. The figure which shows the content displayed graphically by the machine diagnostic apparatus shown in FIG. FIG. 36 is a diagram showing an example in which a plurality of torques as load information are displayed in a graph in a superimposed manner by the machine diagnostic device shown in FIG. 36. FIG. 36 is a diagram showing contents displayed in a graph in chronological order by the machine diagnostic device shown in FIG. 36. The figure which shows the content displayed in tabular form by the machine diagnostic apparatus shown in FIG. FIG. 10 is a diagram showing a third modification of the machine diagnostic device according to the second embodiment. Sequence chart for explaining the operation of the machine diagnostic device shown in FIG. 42 Flowchart for explaining the operation of the machine diagnostic device shown in FIG. The figure which shows the content compared by the machine diagnostic apparatus shown in FIG. The figure which shows the example in which the display was provided in the machine diagnostic apparatus which concerns on Embodiment 2. The figure which shows the example in which the machine diagnostic apparatus and display which concern on Embodiment 2 are connected via a server. The figure which shows the example which displays the load information etc. which were calculated by the machine diagnostic apparatus which concerns on Embodiment 2 via an external memory on a display. FIG. 6 is a diagram illustrating an example of a hardware configuration of a machine diagnostic device according to a second embodiment. Configuration diagram of a machine diagnosis system including a machine diagnosis device according to Embodiment 3. The figure which shows the model of the drive mechanism used as a diagnostic object in the machine diagnostic apparatus which concerns on Embodiment 3. The figure which shows the structure of the machine diagnostic apparatus which concerns on Embodiment 3. Sequence chart for explaining operation of the machine diagnostic device according to Embodiment 3. Flowchart for explaining operation of the machine diagnostic device according to the third embodiment The figure which shows the content displayed graphically in chronological order by the machine diagnostic apparatus which concerns on Embodiment 3. The figure which shows the content displayed in tabular form by the machine diagnostic apparatus concerning Embodiment 3. FIG. 14 is a diagram showing a first modification of the machine diagnostic device according to the third embodiment. Sequence chart for explaining the operation of the machine diagnostic device shown in FIG. 57 Flowchart for explaining the operation of the machine diagnostic device shown in FIG. FIG. 14 is a diagram showing a second modification of the machine diagnostic device according to the third embodiment. Sequence chart for explaining the operation of the machine diagnostic device shown in FIG. 60 Flowchart for explaining the operation of the machine diagnostic device shown in FIG. The figure which shows the content compared by the machine diagnostic apparatus shown in FIG. The figure which shows the example in which the display was provided in the machine diagnostic apparatus which concerns on Embodiment 3. The figure which shows the example in which the machine diagnostic apparatus which concerns on Embodiment 3 and a display are connected via a server. The figure which shows the example which displays on a display via the external memory the frictional force etc. which were calculated by the machine diagnostic apparatus which concerns on Embodiment 3. FIG. 9 is a diagram illustrating an example of a hardware configuration of a machine diagnostic device according to a third embodiment.

  Hereinafter, a machine diagnostic device and a machine diagnostic program according to an embodiment of the present invention will be described in detail with reference to the drawings. The present invention is not limited by the embodiment.

Embodiment 1 FIG.
FIG. 1 is a configuration diagram of a machine diagnosis system including a machine diagnosis device according to Embodiment 1 of the present invention. The machine diagnostic system 100-1 includes, for example, a motion controller 2, an operation panel 1 as a user interface connected to the motion controller 2, a machine 3 whose operation is controlled by the motion controller 2, and a machine connected to the machine 3. The diagnostic device includes a diagnostic device 200-1 and a display 300 connected to the machine diagnostic device 200-1.

  The machine diagnosis device 200-1 is a device that diagnoses a deterioration state of the drive mechanism 34 provided in the machine 3, visualizes the diagnosis result, and displays the result on the display 300. The drive mechanism 34 is a belt conveyor or the like driven by the motor 32. The drive mechanism 34 may be driven by the motor 32, and is not limited to a belt conveyor. The motor 32 is driven by electric power supplied from the servo amplifier 31. The servo amplifier 31 is controlled by the motion controller 2. When the operation panel 1 is operated, the motor 32 operates at a specific rotation speed and rotation amount.

  The motor 32 is provided with a rotor (not shown). The motor 32 is connected to a drive mechanism 34 via a shaft connected to the rotor. The rotational position of the rotor of the motor 32 is detected by, for example, an encoder 33 provided in the motor 32, and is input to the servo amplifier 31 as information indicating the motor rotational position and used for position control of the motor 32. 200-1. The position information indicating the motor rotation position is transmitted to the machine diagnostic device 200-1 as machine vibration information when the drive mechanism 34 is excited. The mechanical vibration information may be information indicating that the drive mechanism 34 is vibrated by the motor 32, and is not limited to the position information indicating the motor rotation position, but may be information indicating the motor rotation speed, the motor acceleration, and the like. .

  The display 300 connected to the machine diagnostic device 200-1 is a liquid crystal display, a touch panel, or the like. In the machine diagnostic system 100-1 according to Embodiment 1, the resonance frequency and the like identified by the machine diagnostic device 200-1 are visualized and displayed on the display 300. Details of the functions of the machine diagnostic device 200-1 and the contents displayed on the display 300 will be described later.

  FIG. 2 is a diagram for explaining a cause of an abnormality occurring in the drive mechanism shown in FIG. 1, a method of detecting the abnormality, and the like. When the drive mechanism 34 is a belt conveyor, as the operation time increases, the belt elongation increases, the backlash between the pulleys increases, and the backlash between the pulleys increases. There is. In the belt conveyor, there is a case in which foreign matter is caught between the pulley and the belt. When the drive mechanism 34 is, for example, a transfer device including a ball screw for moving the transfer table in the direction in which the linear guide extends, the parallelism of the ball screw with respect to the linear guide may change due to the transfer of the transfer device. Further, in the transfer device, as the operation time becomes longer, the wear of the sliding portion progresses, the lubricant deteriorates, and the lubrication becomes insufficient.

  For example, in a belt conveyor, when the amount of elongation of the belt increases and the backlash increases, the resonance frequency detected when the drive mechanism 34 is vibrated, the frequency response, and the like, before the amount of elongation of the belt or The value is different from before the backlash increases. Therefore, by using the resonance frequency identified when the drive mechanism 34 is vibrated or the calculated frequency response, it is possible to grasp the tendency such as the amount of belt elongation and the amount of backlash increase.

  In addition, when a foreign substance is caught in the belt, for example, a partial load change occurs during a full stroke of the belt, so that the motor current, the motor voltage, and the like are lower than in a case where no bite occurs. , A large value. Therefore, by detecting the motor current, the motor voltage, and the like at the time of driving the motor, it is possible to detect that the belt has been jammed. The motor current is a current supplied to the motor 32 when the drive mechanism 34 is driven. The motor voltage is a voltage applied to the motor 32 when the driving mechanism 34 is driven.

  Further, in the transfer device, when a change in parallelism, progress of wear, insufficient lubrication, etc. occur, the frictional force of the sliding portion increases or decreases. The value is different from the value when no change occurs. Therefore, a tendency such as a change in parallelism can be grasped by utilizing the frictional force identified when the drive mechanism 34 is driven.

  The mechanical diagnostic device 200-1 according to the first embodiment has a deteriorated state of the drive mechanism 34, for example, an increase in the amount of belt elongation, an increase in backlash of the pulley, and an increase in backlash. This is a device that allows the user to easily understand that the user is present. The machine diagnostic device 200-1 diagnoses these deterioration states, that is, diagnoses abnormalities by calculating a resonance frequency or identifying a frequency response when vibration is applied to the drive mechanism 34, and determines a diagnosis result. The display 300 is configured to be visualized and displayed.

  FIG. 3 is a diagram showing a model of a drive mechanism to be diagnosed by the machine diagnostic device according to the first embodiment. The drive mechanism 34 shown in FIG. 3 includes two cylindrical pulleys 34a and a belt 34b stretched between the two pulleys 34a. The shaft 32a of the motor 32 is connected to the pulley 34a. The belt 34b is, for example, a toothed belt having a tooth portion provided on an inner peripheral surface thereof. The pulley 34a is a toothed pulley provided with teeth on the outer peripheral surface where the teeth of the belt 34b mesh. When the shaft 32a of the motor 32 rotates, the pulley 34a rotates, and the belt 34b rotates.

  FIG. 4 is a diagram illustrating a configuration of the machine diagnostic device according to the first embodiment. The machine diagnostic device 200-1 includes a resonance characteristic identification unit 21, a storage unit 22, a display control unit 23, and a frequency response calculation unit 30.

  The resonance characteristic identification unit 21 is configured to output at least one of a motor rotation position, a motor rotation speed, and a motor acceleration output from the motor 32 when a vibration torque is applied to the drive mechanism 34 by the motor 32 so that the drive mechanism 34 vibrates. The frequency response is calculated based on the position information indicating the motor rotation position based on the mechanical vibration information indicating the one and the peak of the calculated frequency response is identified, and the resonance characteristic is identified based on the identified frequency response peak. . That is, the resonance characteristic identification unit 21 identifies the peak of the frequency response of the drive mechanism 34 to which the excitation torque is given and the resonance characteristic. The resonance characteristic is one or both of the resonance frequency of the drive mechanism 34 to which the excitation torque is given and the peak value of the frequency response.

  As a method of calculating the frequency response, a known method such as a periodogram FFT method, an ARX model identification, and a subspace method can be used. An example of the details of these methods is described in "System Identification for Control by MATLAB" (Tokyo Denki Shuppan), R.A. Pintelon, J .; Since it is described in “System Identification” (IEEE Press) by Schoukens, the description is omitted here. If the frequency response can be calculated correctly, the resonance characteristics of the mechanical system can be identified.

  In the storage unit 22, for example, a plurality of resonance characteristics identified at different timings are stored, and information indicating a time when each of the plurality of resonance characteristics is identified is stored in association with each other.

  The display control unit 23 causes the display 300 to graphically display the identified change tendency of the resonance characteristic in chronological order. In the display control unit 23, for example, a reference value 24 predetermined as a resonance characteristic of the drive mechanism 34 to be satisfied at the time of manufacturing and a shipment value 25 of the resonance characteristic of the drive mechanism 34 measured at the time of shipment are set. You. The reference value 24 and the shipment value 25 may be stored in the storage unit 22 in advance, or may be transmitted from an external device of the machine diagnostic device 200-1.

  Next, the operation of the machine diagnostic device 200-1 will be described. FIG. 5 is a sequence chart for explaining the operation of the machine diagnostic device according to the first embodiment. FIG. 6 is a flowchart for explaining the operation of the machine diagnostic device according to the first embodiment.

  When a diagnosis start operation is performed on the operation panel 1 (step S1), a signal indicating the diagnosis start operation is transmitted to the motion controller 2, and the motion controller 2 receiving the signal starts the servo amplifier 31 and the machine diagnosis device 200-1. (Step S2).

  The machine diagnostic device 200-1 having received the diagnosis start command outputs a vibration command to the servo amplifier 31 (step S3). The servo amplifier 31 that has received the vibration command outputs the sinusoidal AC power whose frequency changes from a low value to a high value to the motor 32. As a result, the drive mechanism 34 is vibrated (step S4). At this time, the resonance characteristic identification unit 21 receives position information indicating the motor rotation position output from the encoder 33 as mechanical vibration information.

  The resonance characteristic identification unit 21 calculates the frequency response based on the position information indicating the motor rotation position (step S5), and identifies the resonance characteristic by detecting the peak of the calculated frequency response (step S6). Further, the resonance characteristic identification unit 21 causes the storage unit 22 to store the information on the identified resonance characteristic and the information indicating the time at which the resonance characteristic was identified in association with each other.

  The display control unit 23 reads out the information indicating the resonance characteristics stored in the storage unit 22 and the time when the resonance characteristics were identified, and generates display information indicating a change tendency of the identified resonance characteristics (Step S7). ). As a result, information indicating the change tendency of the resonance characteristics is displayed on the display 300 in a chronological order in a graph. Note that the display control unit 23 may display at least one of the reference value 24 and the shipment value 25 when displaying the resonance characteristics in a graph in chronological order.

  FIG. 7 is a diagram showing a first content graphically displayed in chronological order by the machine diagnostic device according to the first embodiment. The horizontal axis represents time, and the vertical axis represents frequency. The solid line represents the change tendency of the resonance frequency identified by the resonance characteristic identification unit 21. The solid line is a plot of the resonance frequency identified a plurality of times, for example, from January 2015 to October 2017. The alternate long and short dash line is the reference value 24 of the resonance frequency. The broken line is the shipment value 25 of the resonance frequency.

  As described above, when the amount of elongation of the belt increases, the average value of the resonance frequencies when vibrated tends to decrease. Even when the backlash of the pulley increases and the backlash increases, the average value of the resonance frequencies shows the same tendency. Focusing on this point, the machine diagnostic apparatus 200-1 according to the first embodiment displays the identified resonance frequencies in a chronological order in a graph, so that the abnormal state of the drive mechanism 34, that is, the deterioration of the drive mechanism 34 The trend is provided to the user as a medium- to long-term change tendency. Thereby, the user can easily grasp the tendency of deterioration such as elongation of the belt.

  In addition, the display control unit 23 of the machine diagnostic device 200-1 may be configured to graphically display at least one of the reference value 24 and the shipment value 25 on the display 300 together with the identified resonance frequency. Thereby, the user can easily understand how much the belt elongation has progressed and how much the backlash has increased with respect to at least one of the reference value 24 and the shipping value 25.

  FIG. 8 is a diagram showing a second content graphically displayed in chronological order by the machine diagnostic device according to the first embodiment. The horizontal axis represents time, and the vertical axis represents frequency response. The solid line represents the change tendency of the frequency response calculated by the resonance characteristic identification unit 21. The solid line is a plot of the peak value of the frequency response identified a plurality of times, for example, from January 2015 to October 2017. An alternate long and short dash line is a reference value of the peak value of the frequency response. The reference value is, for example, a value predetermined as a peak value of the frequency response of the drive mechanism 34 to be satisfied at the time of manufacturing. The broken line is the shipment value of the peak value of the frequency response. This shipment value is the peak value of the frequency response of the drive mechanism 34 calculated at the time of shipment. By displaying the peak value of the frequency response in a time-series graph in this manner, the abnormal state of the drive mechanism 34, that is, the deterioration tendency of the drive mechanism 34 can be provided to the user as a medium-to-long-term change tendency. Thereby, the user can easily grasp the tendency of deterioration such as elongation of the belt. The display control unit 23 of the machine diagnostic device 200-1 causes the display 300 to graphically display at least one of the reference value and the shipping value of the peak value of the frequency response together with the calculated peak value of the frequency response. May be configured. This allows the user to easily understand how much the belt elongation has progressed and how large the backlash has been with respect to at least one of the reference value of the frequency response peak value and the shipment value. it can.

  The display control unit 23 of the machine diagnosis device 200-1 is configured to display at least one of the reference value 24 and the shipment value 25 of the resonance frequency together with the identified resonance frequency on the display 300 in a table format. May be. FIG. 9 is a diagram showing contents displayed in a table format by the machine diagnostic device according to the first embodiment. As shown in FIG. 9, the display 300 of FIG. 4 lists, in a table format, a shipment value 25 of the resonance characteristic, a reference value 24 of the resonance characteristic, and an identified resonance characteristic. By displaying the resonance characteristics in a list as described above, the user can use the trend display shown in FIG. 7 to specifically determine the degree of deterioration of the drive mechanism 34 with respect to at least one of the reference value 24 and the shipment value 25. I can understand.

  The display control unit 23 of the machine diagnostic device 200-1A causes the display 300 to display at least one of the reference value of the peak value of the frequency response and the shipping value together with the calculated peak value of the frequency response in a table format. It may be configured as follows. On the display 300 of FIG. 4, the peak values of the shipping value of the frequency response, the reference value of the frequency response, and the calculated frequency response are listed in a table format as shown in FIG. By displaying the list of the peak values of the frequency response in this manner, the user can use the graph display shown in FIG. 8 together with the degree of deterioration of the driving mechanism 34 with respect to at least one of the reference value and the shipment value of the frequency response. Can be grasped concretely.

  FIG. 10 is a diagram illustrating a frequency response displayed by the machine diagnostic device according to the comparative example. FIG. 11 is an enlarged view of a part of the frequency response shown in FIG. The display 300 in FIG. 10 shows that when the deflection amount of the belt 34b shown in FIG. 3 is 3.2 mm and the belt tension is changed in five steps so that the deflection load becomes 2.0 N to 9.8 N. The measured frequency responses are displayed. When the appropriate value of the deflection load is, for example, 4.8 N to 6.0 N, it can be said that the belt is too loose with a deflection load of 3.1 N or less. As shown in FIG. 11, the resonance frequency detected when the drive mechanism 34 is vibrated has a tendency to decrease as the belt tension decreases, and the peak value of the frequency response corresponding to the resonance frequency tends to decrease. Is shown. However, these changes are not so large as to be visually distinguishable. Therefore, it is difficult for the user to grasp the tendency of deterioration of the drive mechanism 34 only by displaying these frequency responses.

  In the machine diagnostic apparatus 200-1 according to the first embodiment, the change tendency of the resonance frequency identified by the resonance characteristic identification unit 21 is graph-displayed on the display 300 in chronological order as shown in FIG. Is displayed. Further, in the machine diagnosis device 200-1, the change tendency of the frequency response calculated by the resonance characteristic identification unit 21 is displayed in a graph. Therefore, the user can easily grasp the change tendency of the belt tension.

  FIG. 12 is a diagram showing a first modified example of the machine diagnostic device according to the first embodiment. The machine diagnostic device 200-1A illustrated in FIG. 12 includes a frequency response calculation unit 30, a storage unit 22, and a display control unit 23. The frequency response calculation unit 30 is configured to output at least the motor rotation position, the motor rotation speed, and the motor acceleration output from the motor 32 when the driving mechanism 34 vibrates so that the driving mechanism 34 vibrates. Based on the information indicating one, the frequency response of the drive mechanism 34 to which the excitation torque is given is calculated. As described above, a known method such as a periodogram FFT method, an ARX model identification, and a subspace method can be used to calculate the frequency response.

  The storage unit 22 stores, for example, a plurality of frequency responses calculated at different timings, and also stores information indicating a time at which each of the plurality of frequency responses was calculated in association with each other.

  The display controller 23 causes the display 300 to graphically display the frequency response calculated by the frequency response calculator 30 together with at least one of the reference value 24A and the shipment value 25A. The reference value 24A is, for example, a value predetermined as a frequency response of the drive mechanism 34 to be satisfied at the time of manufacturing, and the shipment value 25A is a frequency response of the drive mechanism 34 calculated at the time of shipment. The reference value 24A and the shipment value 25A may be stored in the storage unit 22 in advance, or may be transmitted from an external device of the machine diagnostic device 200-1A.

  Next, the operation of the machine diagnostic device 200-1A will be described. FIG. 13 is a flowchart for explaining the operation of the machine diagnostic device shown in FIG. The operations from step S1 to step S4 are the same as the above-described operations, and thus the description is omitted.

  After the operation in step S4, the frequency response calculation unit 30 calculates the frequency response based on the position information indicating the motor rotation position (step S8), and stores the calculated frequency response information in the storage unit 22. The display control unit 23 reads the information indicating the frequency response stored in the storage unit 22 on the screen of the display 300 having the frequency on the horizontal axis, at least the reference value 24A of the frequency response and the shipping value 25A. Together with one, display information to be displayed is generated (step S9).

  FIG. 14 is a diagram showing the contents displayed as a graph by the machine diagnostic device shown in FIG. The horizontal axis represents frequency. The waveform shown by the thick line represents the calculated frequency response (calculated value). The waveform shown by the normal line is at least one of the frequency response reference value 24A and the shipping value 25A. For example, when the operation is continued after shipping, the amount of belt elongation increases, the backlash of the pulley increases, and the backlash tends to increase. In this case, the resonance frequency corresponding to the peak value of the frequency response tends to decrease. At least one of the reference value 24A and the shipment value 25A is graphically displayed on the display 300 together with the calculated frequency response, so that the frequency response of at least one of the reference value 24A and the shipment value 25A is peaked. It is possible to determine how much the peak value deviates. Therefore, it is possible to easily understand how much the drive mechanism 34 has deteriorated with respect to the reference value 24A and the shipment value 25A.

  The display 300 may display both the reference value 24A and the shipment value 25A, or only one of the reference value 24 and the shipment value 25. However, from the viewpoint of making it easier for the drive mechanism 34 to grasp the tendency of deterioration, it is desirable to display both the reference value 24A and the shipment value 25A.

  Further, the frequency response calculation unit 30 of the machine diagnostic device 200-1A calculates the frequency response a plurality of times at different timings, and the display control unit 23 sends the plurality of frequency responses calculated at the different timings to the display 300. You may comprise so that it may overlap and display a graph. As described above, by displaying the plurality of resonance frequencies calculated at different timings in a graph, the user can grasp the deterioration tendency of the drive mechanism 34 without displaying the reference value 24A and the shipment value 25A.

  The frequency response calculation cycle is set according to the type of the drive mechanism 34 to be diagnosed, and may be, for example, one month or several months.

  FIG. 15 is a diagram showing a second modified example of the machine diagnostic device according to the first embodiment. The machine diagnostic device 200-1B illustrated in FIG. 15 includes a resonance characteristic identification unit 21, a storage unit 22, a display control unit 23, and a frequency response calculation unit 30.

  Next, the operation of the machine diagnostic device 200-1B will be described. FIG. 16 is a sequence chart for explaining the operation of the machine diagnostic device shown in FIG. FIG. 17 is a flowchart for explaining the operation of the machine diagnostic device shown in FIG.

  When a diagnosis start operation is performed on the operation panel 1 (step S1), the motion controller 2 outputs a drive command to move the drive mechanism 34 to a preset location to the servo amplifier 31 (step S100). As a result, the motor 32 rotates, and the drive mechanism 34 is moved to a preset location (step S110). The preset location is, for example, a location where a frequency response is likely to appear when the drive mechanism 34 is vibrated, a place where it is safe to vibrate the drive mechanism 34, or a location that satisfies both. Are set in advance in the motion controller 2 as diagnostic positions.

  The process of step S110 is repeated until the movement is completed (step S110, No). When the movement is completed (step S110, Yes), the motion controller 2 diagnoses the servo amplifier 31 and the machine diagnostic device 200-1B. A start command is output (step S2). The operations from step S2 to step S7 are the same as the above-described operations, and thus the description is omitted.

  According to the machine diagnostic device 200-1B, the vibration is started after the drive mechanism 34 is moved to a preset location, so that the vibration can be prevented from being performed in a place not intended by the user, and the safety can be reduced. Calculation of the frequency response and identification of the resonance frequency are possible. In addition, by driving the drive mechanism 34 to a preset location, it is possible to execute vibration at a position where a frequency response is likely to appear. Furthermore, since the resonance characteristics change depending on the excitation location, it is necessary to apply the excitation at the same location every time for accurate measurement. Further, in the machine diagnostic device 200-1B, it is also possible to cause only a specific drive axis to vibrate even in the drive mechanism 34 having a plurality of drives such as the X axis, the Y axis, and the Z axis. The accuracy of the information necessary for the trend display shown in FIG. 7 or FIG. 8 is improved.

  FIG. 18 is a diagram showing a third modification of the machine diagnostic device according to the first embodiment. The machine diagnostic device 200-1C illustrated in FIG. 18 includes a signal output unit 40 in addition to the resonance characteristic identification unit 21, the frequency response calculation unit 30, the storage unit 22, and the display control unit 23. In the signal output unit 40, a reference value 41, a shipment value 42, a first specified value 43, and a second specified value 44 are set. The reference value 41 corresponds to the above-described reference value 24A. The shipment value 42 corresponds to the above-mentioned shipment value 25A. Note that the signal output unit 40 can be combined with each of the machine diagnostic device 200-1, the machine diagnostic device 200-1A, and the machine diagnostic device 200-1B.

  Next, the operation of the machine diagnostic device 200-1C will be described. FIG. 19 is a sequence chart for explaining the operation of the machine diagnostic device shown in FIG. FIG. 20 is a flowchart for explaining the operation of the machine diagnostic device shown in FIG. FIG. 21 is a diagram showing the contents compared by the machine diagnostic device shown in FIG.

  The operations from step S1 to step S7 are the same as the above-described operations, and thus the description is omitted. After the operation in step S7, the signal output unit 40 compares the first peak value of the reference value 41 or the shipment value 42 displayed on the graph with the second peak of the resonance frequency displayed on the graph. When the first difference between the first peak value and the second peak value is equal to or greater than the first specified value 43 (Step S120, Yes), the signal output unit 40 determines that the first difference is equal to or greater than the first specified value 43. An alarm signal is output (step S130). FIG. 21 shows a first difference compared by the signal output unit 40. When the first difference is less than the first specified value 43 (No at Step S130), the process ends without outputting an alarm signal.

  The signal output unit 40 determines that the second difference between the first value of the resonance frequency corresponding to the first peak value and the second value of the resonance frequency corresponding to the second peak is equal to or greater than the second specified value 44 In this case, an alarm signal indicating that the second difference is equal to or larger than the second specified value 44 may be output.

  The proper range of the belt tension is provided by the belt maker. For example, when the belt deflection load is 4.9 N when the belt deflection amount is 3.2 mm, the belt tension is within the proper range, and the belt deflection load is If it is less than 4.9 N, the belt tension is out of the proper range. As the belt tension decreases, the peak value of the frequency response decreases and the resonance frequency tends to decrease. Therefore, the signal output unit 40 calculates the difference between both the peak value of the frequency response and the resonance frequency and outputs an alarm signal, whereby the elongation of the belt can be easily determined.

  Next, a connection configuration of the display to the machine diagnostic device according to the first embodiment will be described. FIG. 22 is a diagram illustrating an example in which a display is provided in the machine diagnostic device according to the first embodiment. As shown in FIG. 22, the display 300 may be provided integrally with the machine diagnostic device 200-1, or may be installed near the machine diagnostic device 200-1 and may be provided via a signal cable or the like. It may be connected to -1. Thereby, the user can check the diagnosis result of the drive mechanism 34 at the place where the machine diagnosis device 200-1 is installed.

  FIG. 23 is a diagram illustrating an example in which the machine diagnostic device according to Embodiment 1 and a display are connected via a server. As shown in FIG. 23, the display 300 may be connected to the machine diagnostic device 200-1 via the server 400. As a result, even if the machine diagnostic device 200-1 is installed away from the place where the machine diagnostic device 200-1 is installed, the state of the diagnosis target can be immediately confirmed. And can be supported from remote locations.

  FIG. 24 is a diagram illustrating an example in which the resonance frequency and the like identified by the machine diagnostic device according to Embodiment 1 are displayed on a display via an external memory. The external memory 500 stores information indicating the identified resonance frequency, information indicating the calculated frequency response, the reference value 24, the shipment value 25, and the like. The machine diagnostic device 200-1 and the display 300 are configured to be able to write information to and read information from the external memory 500. According to the configuration shown in FIG. 24, data can be transferred even in an environment where there is no communication means, so that the maker, administrator, and the like of the drive mechanism 34 can easily use the data.

  The display 300 shown in FIGS. 22 to 24 is connected to a machine diagnostic device 200-1A, a machine diagnostic device 200-1B, or a machine diagnostic device 200-1C instead of the machine diagnostic device 200-1. Is also good.

  FIG. 25 is a diagram illustrating a hardware configuration example for realizing the machine diagnostic device according to the first embodiment. The machine diagnostic device 200-1 can be realized by a processor 601, a memory 602 including a random access memory (RAM), a read only memory (ROM), and an input / output interface 603 for connecting to a network. It is possible. The processor 601, the memory 602, and the input / output interface 603 are connected to a bus 604, and can exchange data, control information, and the like via the bus 604.

  When the machine diagnostic device 200-1 is realized, a program for the machine diagnostic device 200-1 is stored in the memory 602, and the processor 601 executes the program to identify resonance characteristics of the machine diagnostic device 200-1. The unit 21, the frequency response calculation unit 30, the display control unit 23, and the like are realized. The program for the machine diagnostic device 200-1 is a program that executes functions of the resonance characteristic identification unit 21, the frequency response calculation unit 30, the display control unit 23, and the like. The input / output interface 603 is used when transmitting information to / from the servo amplifier 31 or the encoder 33 and when transmitting information to / from the display 300.

  When implementing the machine diagnostic device 200-1A, a program for the machine diagnostic device 200-1A is stored in the memory 602, and the program is executed by the processor 601 to calculate the frequency response of the machine diagnostic device 200-1A. The unit 30, the display control unit 23, and the like are realized. The program for the machine diagnostic device 200-1A is a program that executes functions of the frequency response calculation unit 30, the display control unit 23, and the like.

  When implementing the machine diagnostic device 200-1B, the program for the machine diagnostic device 200-1B is stored in the memory 602, and the processor 601 executes the program to identify the resonance characteristics of the machine diagnostic device 200-1B. The unit 21, the frequency response calculation unit 30, the display control unit 23, and the like are realized. The program for the machine diagnostic device 200-1B is a program that executes functions of the resonance characteristic identification unit 21, the frequency response calculation unit 30, the display control unit 23, and the like.

  When implementing the machine diagnostic device 200-1C, the program for the machine diagnostic device 200-1C is stored in the memory 602, and the processor 601 executes the program to identify the resonance characteristics of the machine diagnostic device 200-1C. The unit 21, the frequency response calculation unit 30, the display control unit 23, the signal output unit 40, and the like are realized. The program for the machine diagnostic device 200-1C is a program that executes functions such as the resonance characteristic identification unit 21, the frequency response calculation unit 30, the display control unit 23, and the signal output unit 40.

Embodiment 2 FIG.
FIG. 26 is a configuration diagram of a machine diagnosis system including the machine diagnosis device according to the second embodiment. A machine diagnostic system 100-2 illustrated in FIG. 26 includes a machine diagnostic device 200-2 according to the second embodiment. FIG. 27 is a diagram illustrating a model of a drive mechanism to be diagnosed by the machine diagnostic device according to the second embodiment. In the driving mechanism 34 shown in FIG. 27, the foreign matter 35 adheres to the pulley 34a and the belt 34b, so that the rotation of the motor 32 causes the foreign matter 35 to bite.

  The machine diagnostic device 200-2 according to the second embodiment is designed to allow a user to easily grasp the degraded state of the drive mechanism 34, for example, the bite of the foreign matter 35 between the pulley 34a and the belt 34b. Device. The machine diagnostic device 200-2 is configured to diagnose a biting of the foreign matter 35 by detecting a torque fluctuation or the like when the drive mechanism 34 is driven, and visualize and display the diagnostic result on the display 300. Is done.

  FIG. 28 is a diagram illustrating a configuration of a machine diagnostic device according to the second embodiment. The machine diagnostic device 200-2 includes a load information calculation unit 50, a storage unit 22, and a display control unit 23.

  The load information calculation unit 50 calculates the drive mechanism 34 based on the position information indicating the motor rotation position when the drive mechanism 34 is driven and the drive current information of the motor 32 detected when the drive mechanism 34 is driven. The load information, which is the information indicating the load state, is calculated in association with the moving position of the drive mechanism 34. The drive current information of the motor 32 is, for example, information on a current output from the servo amplifier 31 when the drive mechanism 34 is driven. The load information includes, for example, a motor torque, a motor average torque, a motor effective torque, a peak torque of the motor 32, a load torque of a load connected to the motor 32, a rotation speed change amount of the motor 32, a position control deviation of the motor 32, and the like. is there. The position control deviation is a deviation of the position detection value signal from the position command value signal. In the present embodiment, the configuration and operation of the machine diagnostic device 200-2 will be described using the motor torque as load information.

  The storage unit 22 stores the load information calculated by the load information calculation unit 50 in association with the moving position of the drive mechanism 34. The storage unit 22 stores, for example, a plurality of pieces of load information calculated at different times.

  The display controller 23 causes the display 300 to display the load information calculated by the load information calculator 50 in a graph in association with the moving position of the drive mechanism 34.

  Next, the operation of the machine diagnostic device 200-2 will be described. FIG. 29 is a sequence chart for explaining the operation of the machine diagnostic device according to Embodiment 2. FIG. 30 is a flowchart for explaining the operation of the machine diagnostic device according to the second embodiment.

  When a diagnosis start operation is performed on the operation panel 1 (step S11), a signal indicating the diagnosis start operation is transmitted to the motion controller 2, and the motion controller 2 receiving the signal starts the servo amplifier 31 and the machine diagnosis device 200-2. (Step S12). The servo amplifier 31 that has received the diagnosis start command drives the motor 32 (step S13). At this time, the load information calculation unit 50 receives position information indicating the motor rotation position output from the encoder 33. Further, the load information calculation unit 50 receives drive current information output from the servo amplifier 31.

  The load information calculation unit 50 calculates the load information (Step S14), and stores the calculated load information in the storage unit 22 in association with the moving position.

  The display control unit 23 reads the load information and the movement position stored in the storage unit 22, and generates display information to be displayed on the display 300 in association with the read load information and the movement position (Step S15). ). As a result, the position where the load (torque) fluctuates is displayed on the display 300 as a graph.

  FIG. 31 is a first diagram illustrating the contents displayed as a graph by the machine diagnostic device according to the second embodiment. The vertical axis represents torque, which is an example of load information, and the horizontal axis represents position. The waveform of the solid line represents, for example, a torque fluctuation when the driving mechanism 34 having a belt length of 636 mm, a number of pulley teeth of 25, and a pulley tooth pitch of 3 mm is driven. Fluctuates greatly every 75 mm. In the present embodiment, a large fluctuation of the torque waveform is called a load jump, and a load jump means that a torque much larger than a steady torque is generated in a section shorter than a cycle of one rotation of the pulley. . Note that 75 mm is a value obtained by multiplying the number of pulley teeth by the pulley tooth pitch.

  If the horizontal axis is the time axis, the period of one rotation of the pulley to which the foreign matter adheres is 75 mm (= 50 r / min / 60 sec * 1.2 sec * 75 mm / rev). However, even if such a cycle is displayed, the position of the load jump and the cycle cannot be correlated, and it is difficult to grasp whether the torque fluctuation is due to the adhesion of foreign matter to the pulley or other factors. .

  According to the machine diagnostic device 200-2 according to the second embodiment, since the torque associated with the position is displayed instead of the time, it is easy to associate the position when the pulley makes one rotation with the torque fluctuation position. That is, it can be easily grasped that the torque fluctuation is caused by the adhesion of foreign matter to the pulley.

  FIG. 32 is a second diagram showing the contents displayed as a graph by the machine diagnostic device according to the second embodiment. The vertical axis represents torque, which is an example of load information, and the horizontal axis represents position. The waveform of the solid line represents the torque fluctuation when a foreign matter is attached to one portion of the belt of the drive mechanism 34 using the above-described belt and pulley.

  Assuming that the horizontal axis is the time axis, the cycle of the half rotation of the belt to which the foreign matter adheres is 318 mm (= 20 r / min / 60 sec * 12.7 sec * 75 mm / rev). However, even if such a cycle is displayed, the position of the load jump and the cycle cannot be correlated, and it is difficult to grasp whether the torque fluctuation is due to the adhesion of foreign matter to the belt or another factor. .

  According to the machine diagnostic device 200-2 according to the second embodiment, not the time but the torque associated with the position is displayed. Therefore, the correspondence between the position when the belt makes a 回 転 rotation and the torque fluctuation position. This makes it easy to understand that the torque fluctuation is caused by the adhesion of foreign matter to the belt or the pulley.

  Note that the machine diagnostic device 200-2 continuously acquires the load information and the position information when the drive mechanism 34 operates, and sequentially acquires the load information and the position information. After individually calculating the corresponding position information, display information in which the load information is associated with the position information may be generated.

  29 and FIG. 30, the operation in which the drive mechanism 34 detects the entry of a foreign substance during the normal operation has been described. Before or after the normal operation, a configuration may be adopted in which a diagnostic operation for detecting the entry of foreign matter is performed. In the diagnostic operation, the drive mechanism 34 is repeatedly operated, for example, within the same moving range and moving speed, and the operation at this time detects the foreign matter being caught. FIG. 33 is a diagram showing a first modification of the machine diagnostic device according to the second embodiment. The machine diagnostic device 200-2A illustrated in FIG. 33 includes a load information calculation unit 50, a storage unit 22, and a display control unit 23. Information relating to the diagnostic operation is set in the motion controller 2 from the diagnostic operation setting unit 60 shown in FIG. The information on the diagnostic operation includes, for example, an operating range, an operating speed, and an operating time. Each time the diagnostic operation is performed, the drive mechanism 34 is repeatedly operated in the same movement range, and the drive mechanism 34 is moved in the same movement. This is information for repeatedly operating at a speed. Information on the diagnostic operation of the diagnostic operation setting unit 60 is input to the motion controller 2. The diagnostic operation setting unit 60 may be provided in the machine diagnostic device 200-2A or may be provided in the motion controller 2.

  Next, the operation of the machine diagnostic device 200-2A will be described. FIG. 34 is a sequence chart for explaining the operation of the machine diagnostic device shown in FIG. FIG. 35 is a flowchart for explaining the operation of the machine diagnostic device shown in FIG. For example, when an operation for executing a diagnosis operation is performed on the operation panel 1 while information on a diagnosis operation is set in the motion controller 2 (step S1100), a signal indicating a diagnosis start operation is transmitted to the motion controller 2. Then, the motion controller 2 having received the signal outputs a diagnosis start command to start a diagnosis operation to the servo amplifier 31 and the machine diagnosis device 200-2A (step S1200). The operations from step S13 to step S15 after step S1200 are the same as the above-described operations, and thus the description is omitted.

  According to the machine diagnostic device 200-2A, the drive mechanism 34 can be repeatedly operated at a specific timing in at least one of the same moving range and the same moving speed. The increase can be suppressed, and the resources of the storage unit 22 can be used effectively. Further, since the movement range of the drive mechanism 34 can be limited to a specific range, the movement of the drive mechanism 34 that the user does not intend is suppressed, and the load information can be obtained safely.

  FIG. 36 is a diagram showing a second modification of the machine diagnostic device according to the second embodiment. In the machine diagnostic device 200-2B shown in FIG. 36, the reference value 4 and the shipping value 5 are set in the display control unit 23. The reference value 4 is, for example, a value predetermined as a value of a load state of the drive mechanism 34 to be satisfied at the time of manufacturing. The shipment value 5 is a value of the load state of the drive mechanism 34 measured at the time of shipment. The reference value 4 and the shipping value 5 may be stored in the storage unit 22 in advance, or may be transmitted from an external device of the machine diagnostic device 200-1B. The reference value 4 and the shipment value 5 may be set in the respective display control units 23 of the machine diagnostic device 200-2 and the machine diagnostic device 200-2A.

  The display control unit 23 of the machine diagnostic device 200-2B causes the display 300 to graphically display at least one of the reference value 4 and the shipment value 5 together with the load information calculated by the load information calculation unit 50.

  Next, the operation of the machine diagnostic device 200-1B will be described. FIG. 37 is a flowchart for explaining the operation of the machine diagnostic device shown in FIG. The operations from step S11 to step S14 are the same as the above-described operations, and thus the description is omitted. After the operation of step S14, the display control unit 23 reads the information indicating the load information stored in the storage unit 22, and reads the read load information together with at least one of the reference value 4 and the shipment value 5 on the display unit. The display information to be displayed on 300 is generated (step S18).

  FIG. 38 is a diagram showing the contents displayed as a graph by the machine diagnostic device shown in FIG. The horizontal axis represents the position. The solid-line waveform represents the calculated load information (calculation result). The dashed waveform is the shipping value 5. The dashed line is the reference value 4. In the machine diagnostic device 200-2B, at least one of the reference value 4 and the shipment value 5 is graphically displayed on the display 300 together with the calculated load information. Thereby, the user can know the degree of the change of the load information with respect to the reference value 4 or the shipment value 5, and can understand that the load change due to the biting occurs.

  Further, the machine diagnostic device 200-2B may be configured to superimpose the load information calculated at different timings on the display 300 and display the load information on a graph. FIG. 39 is a diagram showing an example in which a plurality of torques as load information are displayed in a graph in a superimposed manner by the machine diagnostic device shown in FIG. For example, the load information calculation unit 50 of the machine diagnostic device 200-2B calculates the load information a plurality of times at different timings, and the display control unit 23 sends the plurality of load information calculated at the different timings to the display 300. Overlay and display the graph.

  In addition, the display control unit 23 of the machine diagnostic device 200-2B displays the change tendency of the load information calculated by the load information calculation unit 50 on the display 300 in chronological order as shown in FIG. You may comprise. FIG. 40 is a diagram showing the contents displayed as a graph in chronological order by the machine diagnostic device shown in FIG. The vertical axis represents a singular point of the torque, and the singular point of the torque is, for example, an average of the maximum values of the torque shown in FIG. The display control unit 23 of the machine diagnostic device 200-2B causes the display 300 to graphically display the change tendency of the load information calculated by the load information calculation unit 50 in chronological order as shown in FIG. Thereby, the user can easily grasp the tendency of torque fluctuation due to biting.

  As shown in FIG. 40, the display control unit 23 of the machine diagnostic device 200-2B displays at least one of the reference value 4 and the shipment value 5 together with the load information calculated by the load information calculation unit 50. The apparatus 300 may be configured to display a graph. Thereby, the user can easily grasp the degree of torque fluctuation due to biting with respect to the reference value 4 or the like.

  FIG. 41 is a diagram showing contents displayed in a table format by the machine diagnostic device shown in FIG. The display 300 shown in FIG. 36 displays a list of the shipment value 5 of the load information, the reference value 4 of the load information, the calculated load information, and the like in a table format. By displaying the load information in a list as described above, the user can specifically grasp the degree of the load change due to the biting while using the trend display shown in FIG.

  FIG. 42 is a diagram showing a third modification of the machine diagnostic device according to the second embodiment. The machine diagnostic device 200-2C illustrated in FIG. 42 includes a signal output unit 70 in addition to the load information calculation unit 50, the storage unit 22, and the display control unit 23. In the signal output unit 70, a reference value 71, a shipment value 72, and a specified value 73 are set. Reference value 71 corresponds to reference value 4 described above. The shipping value 72 is equivalent to the shipping value 5 described above. Note that the signal output unit 70 can be combined with each of the machine diagnostic device 200-2, the machine diagnostic device 200-2A, and the machine diagnostic device 200-2B.

  Next, the operation of the machine diagnostic device 200-2C will be described. FIG. 43 is a sequence chart for explaining the operation of the machine diagnostic device shown in FIG. FIG. 44 is a flowchart for explaining the operation of the machine diagnostic device shown in FIG. FIG. 45 is a diagram showing the contents compared by the machine diagnostic device shown in FIG.

  The operations from step S11 to step S15 are the same as the above-described operations, and thus the description is omitted. After the operation in step S15, the signal output unit 70 compares the reference value 71 or the shipment value 72 displayed on the graph with the load information displayed on the graph. When the difference that is the result of the comparison is equal to or greater than the specified value 73 (Yes in step S19), the signal output unit 70 outputs an alarm signal indicating that the difference is equal to or greater than the specified value 73 (step S20). FIG. 45 shows the difference compared by the signal output unit 70. When the difference is less than the specified value 73 (Step S19, No), the process ends.

  In the machine diagnostic device 200-2C, a difference between the reference value 71 or the shipment value 72 displayed on the graph and the load information displayed on the graph is obtained, and an alarm signal is output. Can be easily determined.

  The machine diagnostic device 200-2C obtains a first difference between the reference value 71 and the load information, further obtains a second difference between the shipment value 72 and the load information, and then obtains both the first difference and the second difference. An arrangement may be made wherein an alarm signal is output when the value exceeds the prescribed value 73.

  Next, a connection configuration of the display to the machine diagnostic device 200-2 according to the second embodiment will be described. FIG. 46 is a diagram illustrating an example in which a display is provided in the machine diagnostic device according to the second embodiment. As shown in FIG. 46, the display 300 may be provided integrally with the machine diagnostic device 200-2, or may be installed near the machine diagnostic device 200-2, and may be provided via a signal cable or the like. -2 may be connected. Thereby, the user can check the diagnosis result of the drive mechanism 34 at the place where the machine diagnosis device 200-2 is installed.

  FIG. 47 is a diagram illustrating an example in which the machine diagnostic device according to the second embodiment and a display are connected via a server. As shown in FIG. 47, the display 300 may be connected to the machine diagnostic device 200-2 via the server 400. Accordingly, the state of the diagnosis target can be immediately confirmed even in a place away from the place where the machine diagnostic device 200-2 is installed, so that the worker who exists in the place where the machine diagnostic device 200-2 is installed can be And can be supported from remote locations.

  FIG. 48 is a diagram showing an example in which load information or the like calculated by the machine diagnostic device according to Embodiment 2 is displayed on a display via an external memory. The external memory 500 stores the calculated load information, the reference value 4, the shipment value 5, and the like. The machine diagnostic device 200-2 and the display 300 are configured to be able to write information to the external memory 500 and read information. According to the configuration shown in FIG. 48, data can be transferred even in an environment where there is no communication means, so that the maker, administrator, and the like of the drive mechanism 34 can easily use the data.

  Note that, instead of the machine diagnostic device 200-2, a machine diagnostic device 200-2A, a machine diagnostic device 200-2B, or a machine diagnostic device 200-2C is connected to the display 300 shown in FIGS. Is also good.

  FIG. 49 is a diagram illustrating a hardware configuration example of a machine diagnostic device according to the second embodiment. The machine diagnostic device 200-2 can be realized by a processor 601, a memory 602 including a RAM and a ROM, and an input / output interface 603 for connecting to a network. The processor 601, the memory 602, and the input / output interface 603 are connected to a bus 604, and can exchange data, control information, and the like via the bus 604.

  When implementing the machine diagnostic device 200-2, a program for the machine diagnostic device 200-2 is stored in the memory 602, and this program is executed by the processor 601 to calculate the load information of the machine diagnostic device 200-2. The unit 50, the display control unit 23, and the like are realized. The program for the machine diagnostic device 200-2 is a program that executes functions of the load information calculation unit 50, the display control unit 23, and the like. The input / output interface 603 is used when transmitting information to / from the servo amplifier 31 or the encoder 33 and when transmitting information to / from the display 300.

  When the machine diagnostic device 200-2A is realized, a program for the machine diagnostic device 200-2A is stored in the memory 602, and the program is executed by the processor 601 to calculate load information of the machine diagnostic device 200-2A. The unit 50, the display control unit 23, the diagnostic operation setting unit 60, and the like are realized. The program for the machine diagnostic device 200-2A is a program that executes functions of the load information calculation unit 50, the display control unit 23, the diagnosis operation setting unit 60, and the like.

  When implementing the machine diagnostic device 200-2B, a program for the machine diagnostic device 200-2B is stored in the memory 602, and the processor 601 executes the program to calculate load information of the machine diagnostic device 200-2B. The unit 50, the display control unit 23, and the like are realized. The program for the machine diagnostic device 200-2B is a program that executes functions of the load information calculation unit 50, the display control unit 23, and the like.

  When implementing the machine diagnostic device 200-2C, a program for the machine diagnostic device 200-2C is stored in the memory 602, and the processor 601 executes this program to calculate load information of the machine diagnostic device 200-2C. The unit 50, the display control unit 23, the signal output unit 70, and the like are realized. The program for the machine diagnostic device 200-2C is a program that executes functions of the load information calculation unit 50, the display control unit 23, the signal output unit 70, and the like.

Embodiment 3 FIG.
FIG. 50 is a configuration diagram of a machine diagnosis system including the machine diagnosis device according to the third embodiment. A machine diagnostic system 100-3 illustrated in FIG. 50 includes a machine diagnostic device 200-3 according to the third embodiment. FIG. 51 is a diagram illustrating a model of a drive mechanism to be diagnosed by the machine diagnostic device according to the third embodiment. The drive mechanism 34 shown in FIG. 51 includes a linear guide 341, a ball screw 342 driven by the motor 32, and a transfer table 343 that is moved by the ball screw 342 in the extending direction of the linear guide 341.

  When the drive mechanism 34 shown in FIG. 51 is moved or the like, the parallelism of the ball screw 342 with respect to the linear guide 341 changes, and the friction of the sliding portion between the carrier 343 moving on the linear guide 341 and the linear guide 341. The resistance changes. In the driving mechanism 34, as the operation time becomes longer, the wear of the sliding portion between the linear guide 341 and the transfer table 343 progresses, and the wear of the slide section between the ball screw 342 and the transfer table 343 progresses. By doing so, the frictional resistance at these sliding portions changes. Further, in the drive mechanism 34, the lubricant provided in these sliding portions deteriorates or the lubricant comes off, and the frictional resistance changes due to insufficient lubrication.

  The machine diagnostic device 200-3 according to Embodiment 3 allows the user to easily grasp the degree of change in the degree of parallelism of the linear guide 341 with respect to the ball screw 342, the degree of progress of wear of the sliding portion, insufficient lubrication, and the like. It is a device for performing. The machine diagnostic device 200-3 diagnoses the degree of change in parallelism by identifying the frictional force when the drive mechanism 34 shown in FIG. 51 is driven, and visualizes the diagnostic result on the display 300. Is configured to be displayed.

  FIG. 52 is a diagram showing a configuration of a machine diagnostic device according to the third embodiment. The machine diagnostic device 200-3 includes a frictional force identification unit 80, a storage unit 22, and a display control unit 23.

  The frictional force identification unit 80 identifies the frictional force of the drive mechanism 34 based on the drive current information of the motor 32 detected when the drive mechanism 34 is driven. The method of identifying the frictional force is described, for example, in the document “Estimation of Individual Friction of Servo Motor System Using Observer and Application to Positioning Control (Ichiro Yamada)” (Transactions of the Society of Instrument and Control Engineers Vol. 24, No. 2, pp. 162-162). 169). The document discloses a method for identifying friction based on observer theory. The frictional force identification unit 80 may identify the frictional force separately into the static frictional force and the dynamic frictional force, or may identify the frictional force as a value obtained by adding the static frictional force and the dynamic frictional force.

  The storage unit 22 stores, for example, a plurality of frictional forces identified at different timings, and stores information indicating a time at which each of the plurality of frictional forces is identified in association with each other.

  The display control unit 23 causes the display to graphically display the identified change tendency of the frictional force in chronological order. In the display control unit 23, a reference value 27 which is a predetermined value as a friction force of the drive mechanism 34 to be satisfied at the time of manufacturing and a shipment value 28 of the friction force of the drive mechanism 34 measured at the time of shipment are set. Is done. The reference value 27 and the shipment value 28 may be stored in the storage unit 22 in advance, or may be transmitted from an external device of the machine diagnostic device 200-3. Further, each of the reference value 27 and the shipment value 28 may be both a static friction force and a dynamic friction force, or may be a friction force obtained by adding the static friction force and the dynamic friction force.

  Next, the operation of the machine diagnostic device 200-3 will be described. FIG. 53 is a sequence chart for explaining the operation of the machine diagnostic device according to the third embodiment. FIG. 54 is a flowchart for explaining the operation of the machine diagnostic device according to the third embodiment.

  When a diagnosis start operation is performed on the operation panel 1 (step S21), a signal indicating the diagnosis start operation is transmitted to the motion controller 2, and the motion controller 2 receiving the signal starts the servo amplifier 31 and the machine diagnosis device 200-3. (Step S22). The servo amplifier 31 that has received the diagnosis start command drives the motor 32 (step S23). At this time, the frictional force identification unit 80 receives position information indicating the motor rotation position output from the encoder 33. Further, the frictional force identification unit 80 receives drive current information output from the servo amplifier 31.

  The frictional force identification unit 80 identifies the frictional force (step S24), and stores the information on the identified frictional force in the storage unit 22 in association with the information indicating the time when the frictional force was identified.

  The display control unit 23 reads the information on the frictional force and the information indicating the time stored in the storage unit 22 and generates display information indicating the tendency of the change in the identified frictional force (Step S25). Thereby, the information indicating the tendency of the change in the frictional force is graphically displayed on the display 300 in chronological order. Note that the display control unit 23 may display at least one of the reference value 27 and the shipment value 28 when displaying the frictional force in a graph in chronological order.

  FIG. 55 is a diagram showing the contents displayed as a graph in chronological order by the machine diagnostic device according to the third embodiment. Here, an example will be described in which the frictional force is displayed separately for the static frictional force and the dynamic frictional force. The horizontal axis represents time. The vertical axis indicates the ratio of the identified frictional force to the reference frictional force.

  Normally, a solid line indicates a change tendency of the identified static friction force (identification result). The normal solid line is a plot of the static friction force identified a plurality of times, for example, from January 2015 to October 2017. Normally, the one-dot chain line is the reference value 27 of the static friction force. The dashed line indicates the shipment value 28 of the static friction force.

  The thick solid line represents the tendency of the identified dynamic friction force (identification result) to change. The thick solid line is a plot of the dynamic friction force identified multiple times between January 2015 and October 2017, for example. The thick dashed line indicates the reference value 27 of the dynamic friction force. The heavy chain line indicates the shipping value 28 of the dynamic friction force.

  As described above, when the parallelism of the linear guide 341 to the ball screw 342 decreases, the frictional force tends to increase. Further, when the wear of the sliding portion progresses, the lubricant deteriorates, or the lubrication is insufficient, the frictional force fluctuates. However, it is difficult to determine the fluctuation of the frictional force by a short-term measurement. For example, when the parallelism is intentionally changed stepwise, and the frictional force identified by driving the motor 32 at that time is measured, the value of the torque identified corresponding to each change in the parallelism is Are different from each other. However, if the driving mechanism 34 is driven for only a few hours, it is difficult for the torque to change over time. Therefore, the user cannot intuitively grasp the degree of change in the degree of parallelism simply by displaying the torque fluctuation when the drive mechanism 34 is driven for several hours on the display 300.

  Paying attention to this point, the machine diagnostic device 200-3 according to the third embodiment displays the identified frictional force in a chronological order in a graph, and makes these abnormalities a mid- to long-term change tendency. To provide. Thereby, the user can easily grasp the degree of change of the parallelism.

  The display control unit 23 of the machine diagnostic device 200-3 causes the display 300 to graphically display at least one of the reference value 27 and the shipment value 28 together with the identified friction force. Thus, the user can easily grasp how much the parallelism has changed and how much wear has progressed with respect to at least one of the reference value 27 and the shipping value 28.

  The display control unit 23 of the machine diagnostic device 200-3 may be configured to display at least one of the reference value 27 and the shipment value 28 on the display 300 in a table format together with the identified frictional force. FIG. 56 is a diagram showing contents displayed in a table format by the machine diagnostic device according to the third embodiment. On the display 300 shown in FIG. 52, the reference value 27, the shipment value 28, the identified frictional force, and the like are listed in a table format. By displaying the frictional force in a list as described above, the user can specifically grasp the degree of deterioration of the drive mechanism 34 with respect to the reference value 27 or the like while using the trend display shown in FIG.

  In FIGS. 53 and 54, the operation in which the drive mechanism 34 identifies the frictional force during the normal operation has been described. However, the mechanical diagnostic device 200-3 according to the third embodiment has a specific timing, for example, before the normal operation or The diagnostic operation for identifying the frictional force after the normal operation may be performed. In the diagnostic operation, the driving mechanism 34 is repeatedly operated in the same operation, for example, in the same moving range and moving speed, and the frictional force is identified by the operation at this time. FIG. 57 is a diagram showing a first modified example of the machine diagnostic device according to the third embodiment. The machine diagnostic device 200-3A illustrated in FIG. 57 includes a frictional force identification unit 80, a storage unit 22, and a display control unit 23. Information on the diagnostic operation is set from the diagnostic operation setting unit 81 shown in FIG. The information on the diagnostic operation includes, for example, an operating range, an operating speed, and an operating time. Each time the diagnostic operation is performed, the drive mechanism 34 is repeatedly operated in the same movement range, and the drive mechanism 34 is moved in the same movement. This is information for repeatedly operating at a speed. Information on the diagnostic operation of the diagnostic operation setting unit 81 is input to the motion controller 2. The diagnostic operation setting unit 81 may be provided in the machine diagnostic device 200-3A or may be provided in the motion controller 2.

  Next, the operation of the machine diagnostic device 200-3A will be described. FIG. 58 is a sequence chart for explaining the operation of the machine diagnostic device shown in FIG. FIG. 59 is a flowchart for explaining the operation of the machine diagnostic device shown in FIG. For example, when an operation for executing a diagnosis operation is performed on the operation panel 1 while information on a diagnosis operation is set in the motion controller 2 (step S2100), a signal indicating a diagnosis start operation is transmitted to the motion controller 2. Then, the motion controller 2 having received the signal outputs a diagnosis start command to start a diagnosis operation to the servo amplifier 31 and the machine diagnosis device 200-3A (step S2200). The operations from step S23 to step S25 after step S2200 are the same as the above-described operations, and thus the description is omitted.

  According to the machine diagnostic device 200-3A, the drive mechanism 34 can be repeatedly operated at a specific timing in at least one of the same moving range and the same moving speed. Increase can be suppressed and resources can be used effectively. Further, since the movement range of the drive mechanism 34 can be limited to a specific range, the movement of the drive mechanism 34 that is not intended by the user is suppressed, and information on the frictional force can be obtained safely.

  FIG. 60 is a diagram showing a second modified example of the machine diagnostic device according to Embodiment 3. The machine diagnostic device 200-3B illustrated in FIG. 60 includes a signal output unit 90 in addition to the frictional force identification unit 80, the storage unit 22, and the display control unit 23. In the signal output unit 90, a reference value 91, a shipping value 92, and a specified value 93 are set. The reference value 91 corresponds to the above-described reference value 27. The shipping value 82 corresponds to the shipping value 28 described above. The signal output unit 90 can be combined with each of the machine diagnostic device 200-3 and the machine diagnostic device 200-3A.

  Next, the operation of the machine diagnostic device 200-3B will be described. FIG. 61 is a sequence chart for explaining the operation of the machine diagnostic device shown in FIG. FIG. 62 is a flowchart for explaining the operation of the machine diagnostic device shown in FIG. FIG. 63 is a diagram showing the contents compared by the machine diagnostic device shown in FIG.

  The operations from step S21 to step S25 are the same as the above-described operations, and thus the description is omitted. After the operation in step S25, the signal output unit 90 compares the reference value 91 or the shipping value 92 displayed on the graph with the frictional force displayed on the graph. When the difference, which is the result of the comparison, is equal to or greater than the specified value 93 (Yes in step S28), the signal output unit 90 outputs an alarm signal indicating that the difference is equal to or greater than the specified value 93 (step S29). FIG. 63 shows the difference compared in the signal output unit 90. When the difference is less than the specified value 93 (Step S28, No), the process ends.

  In the machine diagnostic device 200-3B, an alarm signal is output by calculating the difference between the reference value 91 or the shipping value 92 displayed on the graph and the frictional force displayed on the graph. The degree and the like can be easily determined.

  Next, a connection configuration of a display to the machine diagnostic device 200-3 according to the third embodiment will be described. FIG. 64 is a diagram illustrating an example in which a display is provided in the machine diagnostic device according to Embodiment 3. As shown in FIG. 64, the display 300 may be provided integrally with the machine diagnostic device 200-3, or may be installed near the machine diagnostic device 200-3, and may be provided via a signal cable or the like. -3 may be connected. Thus, the user can check the diagnosis result of the drive mechanism 34 at the place where the machine diagnosis device 200-3 is installed.

  FIG. 65 is a diagram illustrating an example in which the machine diagnostic device according to Embodiment 3 and a display are connected via a server. As shown in FIG. 65, the display 300 may be connected to the machine diagnostic device 200-3 via the server 400. As a result, the state of the diagnosis target can be immediately confirmed even at a place away from the place where the machine diagnostic device 200-3 is installed, and therefore, the worker present at the place where the machine diagnostic device 200-3 is installed can be And can be supported from remote locations.

  FIG. 66 is a diagram showing an example in which a frictional force or the like calculated by the machine diagnostic device according to Embodiment 3 is displayed on a display via an external memory. The external memory 500 stores information on the identified frictional force, the reference value 27, the shipping value 28, and the like. The machine diagnostic device 200-3 and the display 300 are configured to be able to write information to the external memory 500 and read information. According to the configuration shown in FIG. 66, data can be transferred even in an environment where there is no communication means, so that the maker, administrator, and the like of the drive mechanism 34 can easily use the data.

  Note that the display 300 shown in FIGS. 64 to 66 may be connected to a machine diagnostic device 200-3A or a machine diagnostic device 200-3B instead of the machine diagnostic device 200-3.

  FIG. 67 is a diagram illustrating an example of a hardware configuration of the machine diagnostic device according to the third embodiment. The machine diagnostic device 200-3 can be realized by a processor 601, a memory 602 including a RAM and a ROM, and an input / output interface 603 for connecting to a network. The processor 601, the memory 602, and the input / output interface 603 are connected to a bus 604, and can exchange data, control information, and the like via the bus 604.

  When implementing the machine diagnostic device 200-3, a program for the machine diagnostic device 200-3 is stored in the memory 602, and the processor 601 executes this program to identify the frictional force of the machine diagnostic device 200-3. The unit 80, the display control unit 23, and the like are realized. The program for the machine diagnostic device 200-3 is a program that executes functions such as the frictional force identification unit 80 and the display control unit 23. The input / output interface 603 is used when transmitting information to / from the servo amplifier 31 or the encoder 33 and when transmitting information to / from the display 300.

  When implementing the machine diagnostic device 200-3A, a program for the machine diagnostic device 200-3A is stored in the memory 602, and the processor 601 executes the program to identify the frictional force of the machine diagnostic device 200-3A. The unit 80, the display control unit 23, the diagnostic operation setting unit 81, and the like are realized. The program for the machine diagnostic device 200-3A is a program that executes functions such as the frictional force identification unit 80, the display control unit 23, and the diagnostic operation setting unit 81.

  When implementing the machine diagnostic device 200-3B, a program for the machine diagnostic device 200-3B is stored in the memory 602, and the processor 601 executes the program to identify the frictional force of the machine diagnostic device 200-3B. The unit 80, the display control unit 23, the signal output unit 90, and the like are realized. The program for the machine diagnostic device 200-3B is a program that executes functions such as the frictional force identification unit 80, the display control unit 23, and the signal output unit 90.

  In the configuration described in the above embodiment, the machine diagnostic device is provided separately from the servo amplifier. However, the function of the machine diagnostic device may be provided in the servo amplifier or the motion controller. Further, the configuration shown in the above embodiment is an example of the content of the present invention, and can be combined with another known technology, and the configuration is not deviated from the gist of the present invention. Can be omitted or changed.

  1 operation panel, 2 motion controller, 3 machines, 4 reference values, 5 shipping values, 21 resonance characteristic identification section, 22 storage section, 23 display control section, 24 reference values, 24A reference values, 25 shipping values, 25A shipping values, 27 reference value, 28 shipment value, 29 frequency response calculation unit, 30 frequency response calculation unit, 31 servo amplifier, 32 motor, 32a shaft, 33 encoder, 34 drive mechanism, 34a pulley, 34b belt, 35 foreign matter, 40 signal output unit , 41 reference value, 42 shipping value, 43 first specified value, 44 second specified value, 50 load information calculation unit, 60 diagnostic operation setting unit, 70 signal output unit, 71 reference value, 72 shipping value, 73 specified value , 80 frictional force identification section, 81 diagnostic operation setting section, 82 shipping value, 90 signal output section, 91 reference value, 92 shipping value, 93 Specified value, 100-1, 100-2, 100-3 Machine diagnosis system, 200-1 Machine diagnosis device, 200-1A, 200-1B, 200-1C, 200-2, 200-2A, 200-2B, 200 -2C, 200-3, 200-3A, 200-3B, 300 Display, 341 linear guide, 342 ball screw, 343 carrier, 400 server, 500 external memory, 601 processor, 602 memory, 603 input / output interface, 604 bus .

Claims (16)

A machine diagnostic device for diagnosing a state of a drive mechanism driven by a motor,
Based on mechanical vibration information indicating at least one of a motor rotation position, a motor rotation speed, and a motor acceleration obtained when a vibration torque is applied to the drive mechanism by the motor so that the drive mechanism vibrates. A resonance characteristic identification unit that identifies resonance characteristics of the drive mechanism to which a vibration torque is given;
A display control unit that displays the change tendency of the resonance characteristics identified by the resonance characteristic identification unit on a display in a chronological order in a graph.
A machine diagnostic device comprising: The display control unit,
A predetermined reference value of the resonance characteristic of the drive mechanism, and at least one of a shipment value of the resonance characteristic of the drive mechanism measured at the time of shipment, together with the resonance characteristic identified by the resonance characteristic identification unit, The machine diagnostic device according to claim 1, wherein a graph is displayed on a display. The display control unit,
A predetermined reference value of the resonance characteristic of the drive mechanism, and at least one of a shipment value of the resonance characteristic of the drive mechanism measured at the time of shipment, together with the resonance characteristic identified by the resonance characteristic identification unit, The machine diagnostic device according to claim 1, wherein the display is displayed on a display in a table format.   4. The machine diagnostic apparatus according to claim 2, wherein the resonance characteristic is one or both of a resonance frequency of the drive mechanism to which the excitation torque is applied and a peak value of a frequency response. 5.   The machine diagnostic device according to claim 1, wherein the resonance characteristic is one or both of a resonance frequency of the drive mechanism to which the excitation torque is applied and a peak value of a frequency response. A machine diagnostic device for diagnosing a state of a drive mechanism driven by a motor,
The vibration torque is determined based on information indicating at least one of a motor rotation position, a motor rotation speed, and a motor acceleration obtained when a vibration torque is applied to the drive mechanism by the motor such that the drive mechanism vibrates. A frequency response calculation unit that calculates the frequency response of the drive mechanism given,
A reference value of the predetermined frequency response of the drive mechanism and at least one of a shipment value of the frequency response of the drive mechanism measured at the time of shipment, together with the frequency response calculated by the frequency response calculation unit, are displayed. A display control unit for displaying a graph on the container,
A machine diagnostic device comprising: The frequency response calculation unit calculates the frequency response multiple times at different timings,
The machine diagnostic device according to claim 6, wherein the display control unit displays a plurality of the frequency responses calculated at different timings on the display unit in a graph.   Before the excitation torque is applied to the drive mechanism, the drive mechanism is moved to a specific position, and after the movement of the drive mechanism to the position is completed, the drive mechanism is excited by the motor. The machine diagnostic device according to any one of claims 1 to 7, further comprising a driving mechanism moving unit that causes the driving mechanism to move.   When the first difference between the resonance frequency of the reference value or the shipment value graphically displayed on the display and the resonance frequency graphically displayed on the display is equal to or greater than a first specified value, the first The machine diagnostic device according to claim 4, further comprising a signal output unit that outputs an alarm signal indicating that a difference is equal to or greater than the first prescribed value.   A second difference between the peak value of the frequency response of the reference value or the shipment value graphically displayed on the display and the peak value of the frequency response graphically displayed on the display is equal to or greater than a second specified value. The machine diagnostic device according to claim 4, wherein an alarm signal indicating that the second difference is greater than or equal to the second prescribed value is output.   The machine diagnostic device according to any one of claims 1 to 10, comprising the display.   The machine diagnostic device according to any one of claims 1 to 10, wherein the display is connected to the machine diagnostic device via a network.   The machine diagnostic device according to any one of claims 1 to 5, wherein an external memory that stores information indicating the resonance characteristics identified by the resonance characteristic identification unit is connected to the display.   The machine diagnostic device according to claim 6, wherein an external memory that stores information indicating the frequency response calculated by the frequency response calculation unit is connected to the display. A machine diagnostic program for diagnosing a state of a drive mechanism driven by a motor,
The vibration torque is determined based on information indicating at least one of a motor rotation position, a motor rotation speed, and a motor acceleration obtained when a vibration torque is applied to the drive mechanism by the motor such that the drive mechanism vibrates. A resonance characteristic identification step of identifying resonance characteristics of the drive mechanism that is given,
A change step of the resonance characteristics identified in the resonance characteristic identification step, a display step of displaying a graph on a display in chronological order,
Diagnostic program that causes a computer to execute A machine diagnostic program for diagnosing a state of a drive mechanism driven by a motor,
The vibration torque is determined based on information indicating at least one of a motor rotation position, a motor rotation speed, and a motor acceleration obtained when a vibration torque is applied to the drive mechanism by the motor such that the drive mechanism vibrates. A frequency response calculating step of calculating a frequency response of the driving mechanism given,
A reference value of a predetermined frequency response of the drive mechanism and at least one of a shipment value of a frequency response of the drive mechanism measured at the time of shipment are displayed together with the frequency response calculated in the frequency response calculation step. A display step for displaying a graph on the container;
Diagnostic program that causes a computer to execute

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