JP2020034578A5 - - Google Patents

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JP2020034578A5
JP2020034578A5 JP2019215459A JP2019215459A JP2020034578A5 JP 2020034578 A5 JP2020034578 A5 JP 2020034578A5 JP 2019215459 A JP2019215459 A JP 2019215459A JP 2019215459 A JP2019215459 A JP 2019215459A JP 2020034578 A5 JP2020034578 A5 JP 2020034578A5
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end portion
gap
force
change
detection structure
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JP2020034578A (en
JP7021174B2 (en
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Claims (11)

第１端部と、
前記第１端部と対向する第２端部と、
前記第１端部から前記第２端部に向かう第１方向に沿って前記第１端部と前記第２端部とを弾性的に連結する連結部と、
前記連結部の弾性変形を伴う前記第１端部と前記第２端部との前記第１方向に交差する平面に沿う方向の相対変位を検出する検出部とを具備し、
前記検出部は、
前記第１端部と前記第２端部との間に設けられ、前記相対変位に伴い変化する少なくとも２個の第１ギャップと、
前記第１ギャップとは異なる位置で前記第１端部と前記第２端部との間に設けられ、前記相対変位に伴い変化する少なくとも２個の第２ギャップと、
前記第１ギャップに生じる逆位相の変化を処理することにより、第１移動データとして検出する第１差動検出部と、
前記第２ギャップに生じる逆位相の変化を処理することにより、第２移動データとして検出する第２差動検出部とを備える
力検出構造。 The first end and
The second end facing the first end and
A connecting portion that elastically connects the first end portion and the second end portion along a first direction from the first end portion to the second end portion .
; And a said connecting portion detecting unit that detect the direction of the relative displacement along a plane that intersects the first direction between the first end portion with the elastic deformation and the second end of,
The detection unit
At least two first gaps provided between the first end and the second end and changing with the relative displacement .
At least two second gaps that are provided between the first end and the second end at a position different from the first gap and change with the relative displacement .
By processing the changes in opposite phase occurring before Symbol first gap, and the first differential detecting unit for detecting as the first moving data,
Wherein by processing the change in opposite phase generated in the second gap, Bei example Ru force detection structure and a second differential detector for detecting as a second movement data. 前記検出部は、前記第１方向に沿う軸周りの前記第１端部と前記第２端部との相対的な回転に伴い前記第１ギャップと前記第２ギャップとに生じる逆位相の変化を処理することにより、回転データとして検出する第３差動検出部と、を備える請求項１に記載の力検出構造。The detection unit detects a change in antiphase between the first gap and the second gap due to the relative rotation of the first end portion and the second end portion around the axis along the first direction. The force detection structure according to claim 1, further comprising a third differential detection unit that detects rotation data by processing. 前記検出部は、前記第１移動データと前記第２移動データと前記回転データに基づいて、前記第１端部と前記第２端部に生じる力成分及びモーメント成分を取得するための検出値を出力する請求項２に記載の力検出構造。Based on the first movement data, the second movement data, and the rotation data, the detection unit obtains detection values for acquiring force components and moment components generated in the first end portion and the second end portion. The force detection structure according to claim 2, which is to be output. 前記検出値に基づいて、前記力成分及び前記モーメント成分を演算する演算部をさらに具備する、請求項３に記載の力検出構造。 Based on the detected value, further comprising a calculator for calculating the pre-Symbol ChikaraNaru min and the moment component force detection structure according to claim 3. 前記第１差動検出部は、前記第１ギャップの前記変化を、静電容量、渦電流、磁気パーミアンス又は光量を用いて検出する、請求項１に記載の力検出構造。 Wherein the first differential detecting unit before Symbol the change in the first gap, capacitance, eddy currents are detected using the magnetic permeance or quantity, force detection structure according to claim 1. 前記第２差動検出部は、前記第２ギャップの前記変化を、静電容量、渦電流、磁気パーミアンス又は光量を用いて検出する、請求項１に記載の力検出構造。 The second differential detecting unit before Symbol the change of the second gap, capacitance, eddy currents are detected using the magnetic permeance or quantity, force detection structure according to claim 1. 前記第３差動検出部は、前記第１ギャップの前記変化及び前記第２ギャップの前記変化を、静電容量、渦電流、磁気パーミアンス又は光量を用いて検出する、請求項２に記載の力検出構造。 The force according to claim 2 , wherein the third differential detection unit detects the change in the first gap and the change in the second gap using capacitance, eddy current, magnetic permeance, or light intensity. Detection structure. 前記連結部は、前記１方向に沿って延びる複数の弾性柱を備え、該複数の弾性柱の各々は、力を受けたときに、前記第１端部と前記第２端部との前記相対的な移動又は前記相対的な回転を生ずるように弾性変形する、
請求項１に記載の力検出構造。 The connecting portion includes a plurality of elastic columns extending along the one direction , and each of the plurality of elastic columns is said to be relative to the first end portion and the second end portion when a force is applied. Elastically deformed to cause such movement or relative rotation,
The force detection structure according to claim 1 . 第１端部と、The first end and
前記第１端部と対向する第２端部と、 The second end facing the first end and
前記第１端部から前記第２端部に向かう第１方向に沿って前記第１端部と前記第２端部とを弾性的に連結する連結部と、 A connecting portion that elastically connects the first end portion and the second end portion along a first direction from the first end portion to the second end portion.
前記連結部の弾性変形を伴う前記第１端部と前記第２端部との前記第１方向に交差する平面に沿う方向の相対変位を検出する検出部とを具備し、 A detection unit for detecting a relative displacement of the first end portion and the second end portion with elastic deformation of the connecting portion in a direction along a plane intersecting the first direction is provided.
前記検出部は、 The detection unit
前記第１端部と前記第２端部との間に設けられ、前記相対変位に伴い逆位相に変化可能な少なくとも２個の第１ギャップと、 At least two first gaps provided between the first end and the second end and capable of changing in opposite phase with the relative displacement.
前記第１ギャップとは異なる位置で前記第１端部と前記第２端部との間に設けられ、前記相対変位に伴い逆位相に変化可能な少なくとも２個の第２ギャップと、 At least two second gaps that are provided between the first end and the second end at a position different from the first gap and that can change in opposite phase with the relative displacement.
を備える力検出構造。 Force detection structure with. 請求項１乃至９のいずれか１項に記載の力検出構造を備えた力センサ。 A force sensor having the force detection structure according to any one of claims 1 to 9 . 請求項１０に記載の力センサを備えたロボット。The robot provided with the force sensor according to claim 10.
JP2019215459A 2019-11-28 2019-11-28 Displacement detection type force detection structure and force sensor Active JP7021174B2 (en)

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JP2017227703A Division JP6626074B2 (en) 2017-11-28 2017-11-28 Displacement detection type force detection structure and force sensor

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JP2020034578A JP2020034578A (en) 2020-03-05
JP2020034578A5 true JP2020034578A5 (en) 2020-10-22
JP7021174B2 JP7021174B2 (en) 2022-02-16

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Family Cites Families (13)

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JP2010210558A (en) * 2009-03-12 2010-09-24 Mitsubishi Electric Corp Multiple spindle force sensor and method of manufacturing the same
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