JP2020030082A - Optical module for optical displacement measurement, and heat radiation method of optical module for optical displacement measurement - Google Patents

Abstract

To provide an optical module for optical displacement measurement in which heat transferred from a laser source to a housing is reduced to suppress heat deformation of the housing.SOLUTION: An optical module 1 for optical displacement measurement that optically measures displacement of a measurement object, comprises: a first laser light source 2 and a second laser light source 3; a first light detector 5 and a second light detector 6; a housing 7; a first cover 8 provided on one surface of the housing 7; and a second cover 9 provided on a surface opposite to the one surface. wherein one surface of the first laser light source 2 is attached to the housing 7 via an adhesive 10a, one surface of the second laser light source 3 is attached to the housing 7 via an adhesive 10b, the surface of the first laser light source 2 facing the first cover 8 is connected to the first cover 8 via a heat conductive member 11a having a higher thermal conductivity than that of the adhesive 10a, and the surface of the second laser light source 3 facing the second cover 9 is connected to the second cover 9 via a heat conductive member 11b having a higher thermal conductivity than that of the adhesive 10b.SELECTED DRAWING: Figure 1

Description

  The present invention relates to an optical module for optical displacement measurement and a method for radiating heat of the optical module for optical displacement measurement, and more particularly to an optical module for optical displacement measurement suitable for optically measuring the displacement of a test object. The present invention relates to a heat radiation method for an optical module for optical displacement measurement.

As an optical displacement measurement optical module that measures the displacement of the measurement object, it is used for optical displacement measurement that irradiates the measurement object with laser light using a laser light source and measures the displacement of the measurement object from the reflected light Various optical modules are known.

  For example, the laser light emitted from the laser light source is focused by an objective lens so that the laser beam emitted from the laser light source is focused on the surface of the object to be measured. A technique for detecting the displacement of an object to be measured as a signal related to the amount of displacement by amplifying and calculating a photocurrent detected by an amplifier using an amplifier is known from Japanese Patent Application Laid-Open No. 7-4919.

JP-A-7-4919

  When measuring the displacement of the measurement object using the laser light, the measurement is performed with the focus of the laser light set near the surface of the measurement object. At this time, if the change in the position of the measurement object is larger than the displacement detection range of the detection optical system, the object may not be detected during the measurement. Therefore, by displacing the displacement detection range by using a plurality of laser light sources and detectors corresponding to the plurality of laser beams, even if the displacement of the measurement object is large, the displacement can be detected by any one of the detection optical systems. The possibility of entering can be increased.

  When a plurality of laser light sources emit light at the same time, the amount of heat generated increases according to the number of light sources. When such heat is transmitted to the housing of the optical displacement measuring optical module, the temperature of the housing increases, and the housing expands thermally. Due to this thermal expansion, the position of the objective lens attached to the housing changes, and the distance to the measurement object changes. This is erroneously detected as if the position of the measurement object has changed. Therefore, in order to reduce the temperature rise of the laser light source, it is necessary to consider thermal deformation accompanying the temperature rise of the housing. That is, it is required to reduce heat transmitted from the laser light source to the housing, suppress a rise in temperature of the housing, and suppress thermal deformation of the housing.

  An object of the present invention is to provide an optical module for optical displacement measurement and a method of radiating heat of the optical module for optical displacement measurement in which thermal deformation of a housing is suppressed.

  In order to achieve the above object, the present invention provides an optical displacement measurement optical module for optically measuring a displacement of a measurement object, comprising: a first laser light source, a second laser light source, and a first light detection device. Container, a second photodetector, a housing, a first cover provided to cover the housing, and a second cover that covers the housing on a side facing the first cover. Comprising, the light of the measurement target based on light from the first laser light source is detected by the first photodetector, the light of the measurement target based on the light from the second laser light source The light is detected by the second light detector, and the first laser light source is attached to the housing or a wall extended from the housing via an adhesive, and the second laser light source is attached to the second laser light source. A laser light source is attached to the housing or a wall extended from the housing via an adhesive. The first laser light source is connected to the first cover via a heat conductive member having a higher thermal conductivity than the adhesive, and the second laser light source has a higher thermal conductivity than the adhesive It is configured to be connected to the second cover via a heat conducting member.

  Alternatively, in an optical displacement measurement optical module that optically measures the displacement of a measurement object, a first laser light source, a second laser light source, a first light detector, and a second light detector And a housing, a first cover provided on one surface of the housing, and a second cover provided on a surface opposite to the one surface of the housing, One surface of one laser light source is attached to the housing via an adhesive, and one surface of the second laser light source is attached to the housing via an adhesive, the first laser light source The surface facing the first cover is connected to the first cover via a heat conductive member having a higher thermal conductivity than the adhesive, and faces the second cover of the second laser light source. The second cover has a heat conducting member whose heat conductivity is higher than that of the adhesive. And connected to each other.

  According to the present invention, thermal deformation of the housing can be suppressed.

FIG. 1 is a perspective view of an optical module for optical displacement measurement according to a first embodiment of the present invention. It is a front view of the optical module for optical displacement measurement concerning Example 1 of the present invention. It is a side view of the optical module for optical displacement measurement concerning Example 1 of the present invention. FIG. 3 is an explanatory diagram of displacement measurement of a measurement object by the optical displacement measurement optical module according to the first embodiment of the present invention. It is a perspective view of the optical module for optical displacement measurement concerning Example 2 of the present invention. It is a side view of the optical module for optical displacement measurement concerning Example 2 of the present invention. It is a perspective view of the optical module for optical displacement measurement concerning Example 3 of the present invention. FIG. 11 is a diagram illustrating a first cover in an optical displacement measuring optical module according to a fourth embodiment of the present invention. FIG. 13 is a diagram illustrating a second cover in the optical displacement measuring optical module according to the fourth embodiment of the present invention.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  First Embodiment An optical displacement measuring optical module 1 according to a first embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a perspective view of an optical displacement measuring optical module 1 of the present embodiment. The optical displacement measuring optical module 1 includes a first laser light source 2, a second laser light source 3, an objective lens 4, a first light detector 5, and a second light detector 6 in a housing. Prepare for 7. A first cover 8 is provided on one surface of the housing 7, and a second cover 9 is provided on a surface opposite to the one surface of the housing 7 on which the first cover 8 is provided. In FIG. 1, the first laser light source 2, the second laser light source 3, the objective lens 4, the first photodetector 5, and the second photodetector 6 provided inside the housing 7 are indicated by broken lines. Is shown. Further, adhesives 10a and 10b and heat conductive members 11a and 11b, which will be described later, are connected to the first laser light source 2 and the second laser light source 3, and in FIG. 1, these adhesives 10a and 10b and the heat conductive members 11a and 11b are also indicated by broken lines. The adhesives 10a and 10b are, for example, general ultraviolet curable adhesives. The heat conducting members 11a and 11b are, for example, rubber-like heat dissipation sheets, and are so-called heat dissipation silicones made of a silicon-containing organic compound. Here, the first laser light source 2 and the heat conductive member 11a are in direct contact, the heat conductive member 11a and the first cover 8 are in direct contact, and the first laser light source 2 is Is pressed and held by the first cover 8 with the heat conducting member 11a interposed therebetween. Further, the second laser light source 3 and the heat conductive member 11b are in direct contact, the heat conductive member 11b and the second cover 9 are in direct contact, and the second laser light source 3 is It is pressed and held by the second cover 9 with the heat conducting member 11b interposed therebetween.

  FIG. 2 is a front view of the optical displacement measuring optical module 1 and shows a configuration of the optical system in a state where the first cover 8 is not displayed.

  The optical displacement measuring optical module 1 according to the embodiment of the present invention includes two laser light sources and two photodetectors in order to expand a coaxial detection range of an object to be measured. The first laser light source 2 and the second laser light source 3 have one surface attached to walls 7a, 7b provided inside the housing 7 via adhesives 10a, 10b. The walls 7a and 7b are integrally formed of the same material as the housing 7. The thickness of the walls 7a and 7b and the thickness of the housing 7 are substantially the same, and the thermal conductivity of the walls 7a and 7b and the thermal conductivity of the housing 7 are substantially the same. Therefore, the heat generated by the first laser light source 2 or the second laser light source 3 is first transmitted to the walls 7a and 7b (having substantially the same thermal conductivity as the housing 7), and then transmitted to the housing 7. Convey. In the present embodiment, the walls 7a and 7b are described as being included in the housing 7, or the walls 7a and 7b are described as walls 7a and 7b that are formed by extending the housing 7.

  Light emitted from the first laser light source 2 becomes parallel light by the collimating lens 12a, is reflected by the beam splitter 13a and the beam splitter 13b, is condensed by the objective lens 4, and is irradiated on the object to be measured. The light emitted from the second laser light source 3 becomes parallel light by the collimating lens 12b, passes through the beam splitter 13a, is reflected by the beam splitter 13b, is condensed by the objective lens 4, and is irradiated on the object to be measured. . The light from the first laser light source 2 reflected by the measurement object passes through the objective lens 4, passes through the beam splitter 13b and the beam splitter 13c, is collected by the detection lens 14a, and is collected by the first photodetector 5 Incident on. The light from the second laser light source 3 reflected by the measurement object passes through the objective lens 4, passes through the beam splitter 13b, is reflected by the beam splitter 13c, is collected by the detection lens 14b, and is collected by the detection lens 14b. The light enters the detector 6.

  The measurement of the displacement of the measurement target is calculated from a change in the distance between the objective lens 4 and the measurement target. The distance between the objective lens 4 and the object to be measured can be measured by a detection method such as an astigmatism method or a knife edge method. In the detection of the laser light from the first laser light source 2 and the second laser light source 3 by the first photodetector 5 and the second photodetector 6, the condensing position, propagation time, spatial phase The change in the distance between the objective lens 4 and the object to be measured is detected based on the relative deviation of the temporal phase and the like. At this time, if the change in the position of the measurement target is larger than the focus detection range of each detection method, the target may not be detected during measurement. Therefore, by using a plurality of laser light sources and targeting measurement ranges with different displacements, the displacement of the measurement target can be measured even when the displacement is large.

  FIG. 3 is a side view of the optical displacement measuring optical module 1, and includes a first laser light source 2, a second laser light source 3, an objective lens 4, and a first photodetector 5 provided inside a housing 7. And the heat conducting members 11a and 11b are indicated by broken lines. The first laser light source 2 has a surface facing the first cover 8 connected to the first cover 8 via the heat conducting member 11a. The surface of the second laser light source 3 facing the second cover 9 is connected to the second cover 9 via the heat conducting member 11b.

  Here, the heat conductive members 11a and 11b are members having higher thermal conductivity than the adhesives 10a and 10b. That is, the thermal resistance of the path transmitted from the first laser light source 2 to the first cover 8 via the heat conducting member 11a is smaller than the thermal resistance of the path transmitted from the first laser light source 2 to the housing 7 via the adhesive 10a. The thermal resistance is smaller than the thermal resistance of the path transmitted from the second laser light source 3 to the housing 7 via the adhesive 10b from the second laser light source 3, and the second cover from the second laser light source 3 via the heat conducting member 11b. 9 has a smaller thermal resistance.

  With such a configuration, the heat from the first laser light source 2 to the housing 7 via the adhesive 10a can be applied to the first cover 8 from the first laser light source 2 via the heat conducting member 11a. The heat transmitted from the second laser light source 3 to the second cover 9 via the heat conducting member 11b is larger than the heat transmitted from the second laser light source 3 to the housing 7 via the adhesive 10b. Can be bigger.

  Further, heat generated by the first laser light source 2 and the second laser light source 3 is radiated to the first cover 8 and the second cover 9, respectively, thereby reducing thermal interference and securing a heat radiation area. it can.

  FIG. 4 is an explanatory diagram in the case of measuring the displacement of the measuring object 15 using the optical displacement measuring optical module 1. FIG. 4 shows a case where the surface position of the measurement object 15 is largely divided into two types, such as a first surface 15a and a second surface 15b. The optical displacement measuring optical module 1 is attached to the fixing member 17, and the optical displacement measuring optical module 1 is moved in the optical axis direction of the objective lens 4 by an adjustment mechanism (not shown) so that the focal position of the objective lens 4 is adjusted. It is set near the measurement object 15. Using the light emitted from the first laser light source 2, the distance h 1 between the first surface 15 a of the measurement object 15 and the objective lens 4 is detected, and using the light emitted from the second laser light source 3. The distance h2 between the second surface 15b of the measurement object 15 and the objective lens 4 is detected.

  At the time of such measurement, when the heat generated by the light emission of the first laser light source 2 and the second laser light source 3 is transmitted to the housing 7, the housing 7 thermally expands due to a rise in the temperature of the housing 7. . When the position of the objective lens 4 attached to the housing 7 changes due to this thermal expansion, the object to be measured is erroneously detected as being displaced. In order to prevent this, it is necessary to reduce the heat transmitted from the laser light source to the housing 7. When a plurality of laser light sources are activated at the same time as in the present embodiment, the amount of heat generated is increased as compared with the case of a single laser light source. Becomes extremely important.

  In this embodiment, as described above, the first laser light source 2 and the second laser light source 3 use the first cover rather than the heat transmitted from the first laser light source 2 and the second laser light source 3 to the housing 7. 8. By increasing the heat transmitted to the second cover 9, the heat transmitted from the first laser light source 2 and the second laser light source 3 to the housing 7 is reduced, and the temperature rise of the housing 7 is suppressed. Thermal deformation of the body 7 can be suppressed.

  The first cover 8 and the second cover 9 are attached to the housing 7 using screws (not shown), so that the heat of the first cover 8, the second cover 9, and the housing 7 can be reduced. Connection points are limited. Thereby, the heat transmitted from the first laser light source 2 and the second laser light source 3 to the first cover 8 and the second cover 9 can be reduced from being transmitted to the housing 7 again.

  Next, an optical displacement measuring optical module 101 according to a second embodiment of the present invention will be described with reference to FIGS. In the following embodiments, the same parts as those in the first embodiment are denoted by the same reference numerals as those in the first embodiment, and detailed description thereof will be omitted.

  FIG. 5 is a perspective view of the optical displacement measuring optical module 101 of the present embodiment, and FIG. 6 is a side view thereof. The optical displacement measurement optical module 101 includes a first laser light source 2, a second laser light source 3, an objective lens 4, a first photodetector 5, and a second photodetector 6 in a housing. Prepare for 7. A first cover 8 is provided on one surface of the housing 7, and a second cover 9 is provided on a surface opposite to the one surface of the housing 7 on which the first cover 8 is provided.

  The first laser light source 2 has one surface attached to a wall provided inside the housing 7 via an adhesive 10a, and a surface facing the first cover 8 via a heat conductive member 11a. The surface which is connected to the first cover 8 and faces the second cover 9 is connected to the second cover 9 via the heat conducting member 11c. The second laser light source 3 has one surface attached to a wall provided inside the housing 7 via an adhesive 10b, and a surface facing the second cover 9 via a heat conducting member 11b. The surface which is connected to the second cover 9 and faces the first cover 8 is connected to the first cover 8 via the heat conducting member 11d. The heat conductive member 11c and the heat conductive member 11d are configured similarly to the heat conductive member 11a and the heat conductive member 11b. Other configurations of the optical system and a method of detecting the displacement of the measurement target are the same as those in the first embodiment.

  Here, the heat conductive members 11a, 11b, 11c, and 11d are members having higher thermal conductivity than any of the adhesives 10a and 10b.

  With this configuration, heat can be radiated from the first laser light source 2 to the first cover 8 via the heat conducting member 11a and to the second cover 9 via the heat conducting member 11c, and Heat can be radiated from the laser light source 3 to the second cover 9 via the heat conductive member 11b and to the first cover 8 via the heat conductive member 11d. Thereby, heat can be efficiently transmitted from the first laser light source 2 and the second laser light source 3 to the first cover 8 and the second cover 9, and the heat transmitted to the housing 7 can be reduced. The temperature rise of the body 7 can be suppressed, and the thermal deformation of the housing 7 can be suppressed.

  Further, with this configuration, even when the first laser light source 2 and the second laser light source 3 generate different amounts of heat, the first laser light source 2 and the second laser light source 3 separate the first cover 8 from the first laser light source 2. Also, there is an effect that heat radiation to the second cover 9 can be made equal.

  Next, an optical displacement measuring optical module 201 according to a third embodiment of the present invention will be described with reference to FIG.

  FIG. 7 is a perspective view of the optical displacement measuring optical module 201 of the present embodiment. The optical module 201 for optical displacement measurement includes a first laser light source 2, a second laser light source 3, an objective lens 4, a first light detector 5, and a second light detector 6 in a housing. Prepare for 7. A first cover 208 is provided on a part of one surface of the housing 7, and a third cover 210 is provided on another part of the one surface of the housing 7 on which the first cover 208 is provided. A second cover 209 is provided on a surface opposite to one surface of the housing 7 provided with the one cover 208 and the third cover 210.

  The first laser light source 2 has one surface attached to a wall provided inside the housing 7 via an adhesive 10a, and a surface facing the first cover 208 via a heat conductive member 11a. Connected to first cover 208. The second laser light source 3 has one surface attached to a wall provided inside the housing 7 via an adhesive 10b, and a surface facing the second cover 209 via a heat conductive member 11b. It is connected to the second cover 209.

  A heat conducting member 11e is provided between the first photodetector 5 and the third cover 210, and thermally connects the first photodetector 5 and the third cover 210. Here, the heat conductive member 11e is configured similarly to the heat conductive member 11a, the heat conductive member 11b, the heat conductive member 11c, and the heat conductive member 11d. In FIG. 7, the third cover 210 is provided on the surface of the housing 7 provided with the first cover 208, but is provided on the surface of the housing 7 provided with the second cover 209. You may. Although the first photodetector 5 and the third cover 210 are thermally connected, the second photodetector 6 and the third cover 210 may be thermally connected.

  Other configurations of the optical system and a method of detecting the displacement of the measurement object are the same as those in the first or second embodiment.

  With this configuration, heat can be efficiently transmitted from the photodetector 5 to the third cover 210 via the heat conducting member 11e, and the heat transmitted from the photodetector 5 to the housing 7 is reduced. be able to. Thereby, the temperature rise of the housing 7 can be suppressed, and the thermal deformation of the housing 7 can be suppressed.

  Here, the surface area of the third cover 210 is smaller than the surface area of the first cover 208. By providing the third cover 210, the surface area of the first cover 208 becomes smaller than that of the first embodiment, so that the efficiency of the heat transmitted from the first laser light source 2 to the first cover 208 and radiated to the outside is reduced. . However, by making the surface area of the third cover 210 smaller than the surface area of the first cover 208, it is possible to secure the path of heat transmitted from the photodetector 5 to the third cover 210, From the first cover 208 to the outside, and the efficiency of heat radiation to the outside can be limited.

  When the third cover 210 is provided on the same side as the second cover 209, the surface area of the third cover 210 may be smaller than the surface area of the second cover 209.

  Next, the first cover 308 and the second cover 309 in the optical displacement measuring optical module according to the fourth embodiment of the present invention will be described with reference to FIGS.

  A part of the first cover 308 near the portion connected to the first laser light source 2 is bent in the direction of the first laser light source 2 so that the bent portion 308a of the first cover 308 and the first laser light source 2 are connected. Connect thermally. Note that the bent portion 308a of the first cover 308 and the first laser light source 2 may be in direct contact with each other, or may be connected through a heat conducting member.

  A part of the second cover 309 in the vicinity of connection with the second laser light source 3 is bent in the direction of the second laser light source 3 so that the bent portion 309a of the second cover 309 and the second laser light source 3 are connected. Connect thermally. The bent portion 309a of the second cover 309 may be in direct contact with the second laser light source 3, or may be connected via a heat conducting member.

  The other configuration is the same as any one of the first to third embodiments.

  With this configuration, the distance between the bent portion 308a of the first cover 308 and the first laser light source 2 and the distance between the bent portion 309a of the second cover 309 and the second laser light source 3 can be shortened. The thermal resistance from the first laser light source 2 to the first cover 308 and the thermal resistance from the second laser light source 3 to the second cover 309 can be reduced. Thereby, the temperature rise of the housing can be suppressed, and the thermal deformation of the housing can be suppressed.

  As described above, according to the embodiment of the present invention, it is possible to provide an optical module for optical displacement measurement that can reduce the displacement of the objective lens and has a small measurement error.

  It should be noted that the present invention is not limited to the above embodiments, but includes various modifications. For example, the above embodiments have been described in detail in order to make the present invention easy to understand, and the present invention is not necessarily limited to an aspect having all the described configurations. Further, a part of the configuration of one embodiment can be replaced with the configuration of another embodiment. It is also possible to add the configuration of another embodiment to the configuration of one embodiment. Further, for a part of the configuration of each embodiment, the configuration of another embodiment can be added, deleted, or replaced.

DESCRIPTION OF SYMBOLS 1 ... Optical displacement measuring optical module, 2 ... First laser light source, 3 ... Second laser light source, 4 ... Objective lens, 5 ... First photodetector, 6 ... second photodetector, 7 ... housing, 8 ... first cover, 9 ... second cover, 10a, 10b ... adhesive, 11a, 11b, 11c , 11d, 11e: heat conducting member, 12a, 12b: collimating lens, 13a, 13b, 13c: beam splitter, 14a, 14b: detecting lens, 15, 16: measuring object, 17 ... fixing member

Claims (9)

  In the optical displacement measurement optical module for optically measuring the displacement of the measurement object, a first laser light source, a second laser light source, a first photodetector, and a second photodetector, A housing, a first cover provided to cover the housing, and a second cover covering the housing on a side facing the first cover, wherein Light of the measurement object based on light is detected by the first photodetector, and light of the measurement object based on light from the second laser light source is detected by the second photodetector. Wherein the first laser light source is attached to the housing or a wall extended from the housing via an adhesive, and the second laser light source is attached to the housing via an adhesive. Alternatively, the first laser light source is attached to a wall extended from the housing, and the first laser light source is attached to the wall. The second laser light source is connected to the first cover via a heat conductive member having a higher thermal conductivity than the second cover via the heat conductive member having a higher thermal conductivity than the adhesive. An optical module for optical displacement measurement, wherein the optical module is connected to the optical module.   2. The optical module for optical displacement measurement according to claim 1, wherein the first laser light source and the second laser light source emit light simultaneously.   In Claim 1, from the first laser light source to the first cover via the heat conducting member, than the thermal resistance of the path transmitted from the first laser light source to the housing via the adhesive. The thermal resistance of the path that is transmitted is small, and the thermal resistance of the path that is transmitted from the second laser light source to the housing through the adhesive from the second laser light source is smaller than the thermal resistance of the second laser light source through the heat conductive member. An optical module for optical displacement measurement, wherein the thermal resistance of a path transmitted to the cover is small.   2. The device according to claim 1, wherein a surface of the first laser light source facing the first cover is connected to the first cover via a heat conductive member having a higher heat conductivity than the adhesive. The surface of the laser light source facing the second cover is connected to the second cover via a heat conductive member having a higher thermal conductivity than the adhesive, and the second laser light source The surface facing the cover is connected to the second cover via a heat conductive member having a higher thermal conductivity than the adhesive, and the surface of the second laser light source facing the first cover is bonded to the second cover. An optical module for optical displacement measurement, wherein the optical module is connected to the first cover via a heat conductive member having a higher heat conductivity than the agent.   2. The first laser light source according to claim 1, wherein a surface of the laser light source facing the first cover is connected to the first cover via a heat conductive member having a higher heat conductivity than the adhesive. An optical module for optical displacement measurement, wherein a surface facing the second cover is connected to the second cover via a heat conductive member having a higher heat conductivity than the adhesive.   2. The device according to claim 1, wherein a part of the first cover is bent in the direction of the first laser light source, and a surface of the first laser light source facing the first cover is bent. Part, and a part of the second cover is bent in the direction of the second laser light source, and the surface of the second laser light source facing the second cover is the second laser light source. An optical module for optical displacement measurement, which is thermally connected to a bent portion of a cover.   In the optical displacement measurement optical module for optically measuring the displacement of the measurement object, a first laser light source, a second laser light source, a first photodetector, and a second photodetector, A housing, a first photodetector that detects light reflected on the measurement target from the first laser light source, and light reflected on the measurement target from the second laser light source. A second photodetector to be detected, a first cover provided to cover the housing, and a second cover that covers the housing on a side facing the first cover, A first cover or a third cover that covers the housing on the same side as the second cover, wherein the first laser light source is attached to the housing via an adhesive, and the second laser A light source is attached to the housing via an adhesive, and the first laser light source is The second laser light source is connected to the first cover via a heat conductive member having a higher thermal conductivity than the adhesive, and the second laser light source is connected to the second cover via a heat conductive member having a higher thermal conductivity than the adhesive. The optical module for optical displacement measurement, wherein the first photodetector or the second photodetector is connected to the third cover via a heat conducting member.   The optical module for measuring an optical displacement according to claim 7, wherein a surface area of the third cover is smaller than a surface area of the first cover or the second cover.   A first laser light source, a second laser light source, a first photodetector, a second photodetector, a housing, and a first cover provided to cover the housing, A second cover that covers the housing on a side facing the first cover, and the light of the measurement object based on light from the first laser light source is detected by the first photodetector. The light of the object to be measured based on light from the second laser light source is a method of radiating an optical displacement measurement optical module detected by the second photodetector, wherein the first A laser light source is attached to the housing or a wall extended from the housing via an adhesive, and the first laser light source is connected to the first laser light source via a heat conductive member having a higher thermal conductivity than the adhesive. The cover is connected to a cover to dissipate heat, and the second laser light source is connected to the housing or the front via an adhesive. Attached to a wall extended from the housing, the second laser light source is connected to the second cover via a heat conductive member having a higher heat conductivity than the adhesive, and dissipates heat for optical displacement measurement. Heat dissipation method for optical modules.

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