JP2020017105A - Monitoring system for surroundings of substrate processing apparatus - Google Patents

Abstract

To enhance worker's safety when a clean room is opened by removing a grating.SOLUTION: A monitoring system that monitors the surroundings of a substrate processing apparatus placed over gratings in a clean room includes change generation means for a physical quantity extended over plural gratings while being placed on the tops of part or all of the gratings in the surroundings of the substrate processing apparatus, and an alarm system that gives the alarm on the basis of a change in the physical quantity generated by the change generation means. When one grating is lifted upwards, the change generation means changes the physical quantity.SELECTED DRAWING: Figure 1

Description

  The present disclosure relates to a monitoring system around a substrate processing apparatus.

  Patent Literature 1 discloses a clean room monitoring device for monitoring the inside of a clean room in which a removable floor surface is disposed on a floor. That is, the monitoring device of the clean room includes a monitoring camera that captures an image of the removable floor surface of a passage that can be passed by an operator. Detecting the presence or absence of the opening from which the detachable floor has been removed from the image signal obtained by the surveillance camera, and if there is an opening, determine whether or not there is a worker approaching the opening by the monitoring camera. It detects from the signal. The monitoring apparatus for a clean room includes a monitoring unit that outputs an alarm signal when the worker is detected, and an alarm generating unit that receives the alarm signal from the monitoring unit and issues an alarm.

Patent No. 6018821

  The technology according to the present disclosure improves worker safety when the grating in the cree room is removed and opened.

  One embodiment of the present disclosure is a monitoring system that monitors the periphery of a substrate processing apparatus installed on a grating in a cree room, wherein a plurality or a plurality of gratings around the periphery of the substrate processing apparatus are provided with a plurality of gratings. A physical quantity change generating means extending and arranged over the grating, and an alarm device for issuing an alarm based on a change in physical quantity by the change generating means, wherein the change generating means performs one grating. It is characterized in that when lifted upward, the physical quantity is changed.

  According to the present disclosure, it is possible to improve worker safety when the grating in the cree room is removed and opened.

It is a top view which shows typically the outline of the structure of the monitoring system concerning this embodiment. FIG. 2 is a plan view schematically showing an outline of a configuration of a unit-based monitoring system in the monitoring system of FIG. 1. FIG. 3 is a side end view schematically illustrating a connection state between tapes in the monitoring system of FIG. 2. It is a perspective view showing the installation procedure of the monitoring system concerning this embodiment, and showing the state where a tape was stuck on grating. It is a perspective view showing the installation procedure of the monitoring system concerning this embodiment, and showing the state where an insulating member is stuck on an end after sticking a tape on grating. FIG. 4 is a perspective view showing a state in which the tape has been stuck on the grating in the installation procedure of the monitoring system according to the embodiment. It is a perspective view showing the state of the monitoring system concerning this embodiment when grating is not opening. FIG. 4 is a perspective view showing a state where the monitoring system according to the present embodiment issues an alarm when one grating is lifted. It is a top view showing signs that a surveillance system concerning this embodiment was installed in a corner of grating. FIG. 10 is a plan view showing a state where the monitoring system according to the present embodiment is installed at a corner of a grating different from that of FIG. 9. It is a top view showing signs that the monitoring system concerning this embodiment was installed so that a corner part might be continuous. It is a perspective view showing signs that a surveillance system concerning an embodiment using a wire was installed. FIG. 13 is a perspective view showing a state in which an alarm is issued when one grating is lifted in the monitoring system of FIG. 12. It is a perspective view which shows the state which alerted when one grating was lifted in the monitoring system of another example. It is a perspective view showing signs that a surveillance system concerning other embodiments having a displacement sensor was installed. FIG. 16 is a perspective view showing a state in which an alarm is issued when one grating is lifted in the monitoring system of FIG. 15.

  2. Description of the Related Art Conventionally, for example, in a semiconductor manufacturing line for manufacturing a semiconductor device, a large number of semiconductor manufacturing apparatuses are arranged in a clean room in a clean atmosphere. In such a clean room, a grating having a large number of lattice-shaped ventilation portions is provided on a floor portion. In the lower space of the grating, piping, various electric devices, pumps, a chemical solution tank, and the like are accommodated. For example, at the time of installation, maintenance, or failure of these pipes, various electric devices, pumps, etc., it is necessary for an operator to go down to the lower space of the grating to perform work.

  With the grating removed in this way, a worker can enter the space below the grating to perform work. However, when the grating is removed, there is an opening in the floor of the clean room formed by a large number of gratings, and there is a risk that an operator may fall from this opening into the lower space. In particular, for workers performing other work on the grating, they may be working without knowing that the opening is formed, and it has been usual to call attention to the worker. .

  The technology described in Patent Document 1 detects the presence or absence of a grating-removed opening based on a monitoring camera that captures grating and an image signal obtained by the monitoring camera. , An alarm signal is output and an alarm is issued from the alarm generating means.

  Although this technology has improved the safety of workers, it requires costly equipment such as installation of surveillance cameras, and also requires a large number of units to be installed without blind spots. And the installation work itself is troublesome. Accordingly, the present disclosure provides a monitoring system that is simpler and can be easily installed. Hereinafter, a monitoring system according to an embodiment will be described. In the specification and the drawings, elements having substantially the same function and structure are denoted by the same reference numerals, and redundant description is omitted.

FIG. 1 is a plan view schematically showing an outline of the entire configuration of a monitoring system 1 according to the present embodiment. This monitoring system 1 includes a substrate processing apparatus 2 installed on a grating G in a clean room. It is a monitoring system. In the substrate processing apparatus 2, one of the four surfaces, for example, the back surface is installed in the gratings G ₂₀₂ to G ₂₁₁ , and the front surface opposite to the one surface is installed in G ₅₀₂ to the grating G ₅₁₁ . One side of the substrate processing apparatus 2 is installed on gratings G ₂₀₂ , G ₃₀₂ , G ₄₀₂ and G ₅₀₂ , and the other side is installed on gratings G ₂₁₁ , G ₃₁₁ , G ₄₁₁ and G ₅₁₁ .

In the present embodiment, the rows around the substrate processing apparatus 2 installed in that way, specifically, the rows around the substrate processing apparatus 2 are gratings G ₁₀₁ to G ₁₁₂ , gratings G ₆₀₁ to G ₆₁₂ , and columns. Monitors the aperture of each grating G from grating G ₁₀₁ to grating G ₆₀₁ and grating G ₁₁₂ to grating G ₆₁₂ .

  In the present embodiment, a conductive member is employed as the means for generating a change in the physical quantity, and specifically, a flat tape 21 is used as shown in FIGS. The tape 21 has a configuration of a flat cable. That is, the upper surface 22 and the lower surface 23 of the tape 21 are made of an insulating material, and the flat conductive portion 24 is accommodated therein. The lower surface 23 of the tape 21 is coated with an adhesive, and can be attached to the upper surface of the grating G. Therefore, the tape 21 has a function of a release tape.

  The lower surface 23 at one end of each tape 21 is partially cut away, and the conductive portion 24 is exposed. On the other hand, the upper surface 22 of the other end of each tape 21 is partially cut away, and the conductive portion 24 is exposed. The length of the tape 21 is set to be slightly longer than the width (length in the left-right direction in FIG. 1) of the grating G to be installed. For example, as for the upper surface 22, the length from one end to the cutout at the other end is set to be the same as the width of the grating G.

In each tape 21, a plurality of, for example, two or more conductive parts 24 are accommodated in parallel. The insulating member 31 is attached to the notch on the upper surface of the tape 21E installed on the grating G ₆₁₂ located at the end of the monitoring target. In the tape 21E, the conductive portions 24 are connected to each other at the cutout portions.

The grating G ₆₀₂ located at the other end of the monitoring target is covered with the insulating member 32, and the inside conductive part 24 is connected to the alarm device 42 via the cable 41. The alarm device 42 has a built-in power supply and forms a closed circuit with the conductive portion in the tape 21. When the closed circuit is opened, an alarm is issued to the outside based on the open state. As the type of alarm, for example, a type that appeals to hearing, such as a buzzer, a voice, or a siren, a type that appeals to hearing, such as blinking of a light, or a combination thereof is adopted.

  The procedure for attaching the tape 21 in such a monitoring system 1 is as shown in FIGS. First, as shown in FIG. 4, the tape 21a is attached to the grating G1 on the side close to the alarm device 42. Then, another tape 21b is attached to the grating G2 such that the conductive portion 24 exposed on the lower surface side of one end thereof is in contact with the conductive portion exposed on the other upper surface of the tape 21a. In this manner, the tape 21 is sequentially attached onto the corresponding grating G, and the tape 21E is attached to the grating G3 located at the end. Then, as shown in FIG. 5, the insulating member 31 is attached on the conductive portion 24 exposed at the other end of the tape 21E. Then, as shown in FIG. 6, the tapes 21 and 21E as the physical quantity change generating means are attached to all of the gratings G to be monitored.

  In this way, a unit-based monitoring system U, which is connected to the alarm device 42 and extends over the plurality of gratings G in an elongated manner with the plurality of tapes 21 is completed. As shown in FIG. 1, one monitoring system U for each unit is arranged on each of four surfaces around the substrate processing apparatus 2 installed on the grating G in the clean room. That is, a unit-based monitoring system U1 is provided on the back of the substrate processing apparatus 2, a unit-based monitoring system U2 is provided on the front, a unit-based monitoring system U3 is provided on one side, and a unit-based monitoring system is provided on the other side. A system U4 is provided.

  Next, the operation of the monitoring system U will be described. In the state shown in FIG. 7, the gratings G1, G2, and G3 are installed, and a closed circuit is formed by the conductive unit 24 between the alarm device 42 and the tapes 21a, 21b, and 21E. Then, as shown in FIG. 8, for example, when the grating G2 located in the middle is lifted, the tape 21b stuck on the upper surface of the grating G2 is lifted as it is. Then, the connection between the tape 21b and the tapes 21a and 21E is released, and the closed circuit is opened at the position of the tape 21b. That is, it is shut off.

  When the closed circuit is cut off in this way, in the alarm device 42, the alarm transmission circuit operates in accordance with the opening of the circuit, and an alarm is issued. Therefore, the worker at the site can immediately know that the grating G is open. Therefore, even while the work is in progress, the operator perceives that the grating G is open while the alarm is being issued, performs the work, and accidentally falls from the opening. Can be prevented.

  According to the monitoring system 1 shown in FIG. 1, since the monitoring systems U <b> 1 to U <b> 4 in unit units are arranged on the four surfaces of the substrate processing apparatus 2, there is no blind spot, and the grating G surrounding the substrate processing apparatus 2 is formed. The opening can be detected and an alarm can be issued. Therefore, it is possible to construct a surveillance system so that there is no blind spot more easily than installing a surveillance camera.

  Moreover, such a monitoring system can be constructed simply by pasting the tape 21 sequentially on the grating G to be monitored, so that the construction work can be performed extremely simply and quickly. Of course, it is easy to set the existing grating.

  In the example shown in FIG. 1, the monitoring system 1 is constructed by pasting the tape 21 on the grating G around the substrate processing apparatus 2 so as to be a single layer. It is also easy to paste 21 and set multiple gratings G to be monitored. Needless to say, the monitoring system according to the embodiment may be constructed not only in the vicinity of such a device but also in a passage where a worker passes in a clean room.

  In the above-described embodiment, the configuration is such that the tape is a long conductive member that forms a closed loop with the alarm device 42, and each tape can be separated for each grating G to be attached. It is something to take. The alarm device 42 has a function of issuing an alarm when the closed loop is opened. Therefore, in this embodiment, the configuration is such that the current flows or does not flow as a change in the physical quantity.

  In the above examples, the monitoring system is an example in which the tapes 21 are linearly arranged. However, as shown in FIG. 9 and FIG. That is, in the example shown in FIG. 9, the case where the grating GC is connected to another tape 21 is shown, and as shown in FIG. 9, it is bent at a right angle and extends to two adjacent surfaces of the grating GC. This is possible if a corner tape 21c that can be connected to another tape 21 is prepared. In the example shown in FIG. 10, an example is shown in which the tape 21 is bent at a right angle in a direction opposite to that of FIG. FIG. 11 shows a method of attaching the tapes 21a and 21c and the corner tape 21c in the case of bending twice at right angles and returning in the direction of the grating G1 located at the end. By preparing the tape 21c which is bent at a right angle in a plan view, it is possible to construct a monitoring system extending in various directions.

  In the above-described embodiment, the tape 21 which is a flat cable which is a conductive member is used as the physical quantity change generating means, but instead, a wire, for example, a wire 51 is used as shown in FIG. You may.

  In the example shown in FIG. 12, one wire 51 is arranged so as to straddle the upper surfaces of the gratings G1 to G3, and one end of the wire 51 is fixed to the upper surface of the grating G3 located at the end by a fixing member 52, and The end is connected to an alarm device 42. In the alarm device 42, the other end of the wire 51 is wound around a reel (not shown), for example. On the other hand, on the gratings G1 to G3, for example, a cable guide provided on the upper surface of the grating (see FIG. (Not shown), and is disposed on the gratings G1 to G3.

  On the other hand, if the wire 51 is left exposed on the gratings G1 to G3, there is a problem in safety when a worker passes. Therefore, the tape 53 is stuck on the wire 51 for each of the gratings G1 to G3. In this case, it is preferable that a space is not secured in the portion of the wire 51 or the adhesive is not applied so that the movement of the wire 51 and the lifting of the grating are not hindered.

  According to the embodiment having the above configuration, as shown in FIG. 13, when the grating G2 located in the middle is lifted, the wire 51 is pulled up accordingly. At this time, since one end of the wire is fixed by the fixing member 52, the other end of the wire 51 is pulled in the direction of the arrow in the drawing. Then, the wire 51 is pulled out from the alarm device 42, and the length of the wire 51 coming out of the alarm device 42 changes. That is, the physical quantity changes. By utilizing this, for example, by providing a wire displacement sensor for outputting the wire withdrawal amount in the alarm device 42, when the withdrawal amount of a predetermined value or more is output, the grating G2 is lifted to open the opening. What is necessary is just to comprise so that it may judge that it has occurred and issue a warning. Known sensors having various configurations can be used as the wire displacement sensor. For example, a structure in which the spool rotates by an amount corresponding to the wire 51 pulled out and the axis of the rotary sensor fixed to the axis of the spool rotates in conjunction with the change of the voltage value or the pulse count is exemplified. In addition, if an alarm circuit, a switch, or the like for issuing an alarm is provided in the alarm device 42 in accordance with the rotation of the reel, an alarm is issued when the wire 51 is pulled out, and a warning is given to a worker. It is possible.

  In the above example, a change in the length of the wire 51 coming out of the wire alarm device 42 is regarded as a change in the physical quantity, and an alarm is issued based on the change. Alternatively, as shown in FIG. 14, the other end of the wire 51 may be detached from the alarm device 42 when the wire 51 is pulled out.

  Then, by monitoring with a sensor that detects that the wire 51 has come off, for example, a proximity sensor that detects the other end of the wire 51, it detects that the other end of the wire 51 has come off, and outputs a warning signal. Is turned on. Further, a suitable socket may be provided at the other end of the wire 51, and the warning issuance circuit may be turned on when the socket is removed. In any case, an alarm can be issued from the alarm device 42 based on a change in the physical quantity that the wire 51 comes off.

  Further, as shown in FIG. 15, the other end of the wire 51 may be connected to an alarm device 62 having a displacement sensor 61. The alarm device 62 has a displacement sensor 61 and a support 63 that supports the displacement sensor 61, and the other end of the wire 51 is fixed to the displacement sensor 61. For example, an inclination sensor can be adopted as the displacement sensor 61. The arrangement and fixing method of the wires 51 with respect to the gratings G1 to G3 are the same as those in the example of FIG.

  According to such a configuration, when the grating G2 located in the middle is lifted, the wire 51 is pulled up accordingly. At this time, since one end of the wire is fixed by the fixing member 52, the other end of the wire 51 is pulled in the direction of the arrow in the drawing. Then, since the other end of the wire 51 is fixed to the displacement sensor 61, the displacement sensor 61 tilts or falls as shown in FIG. That is, the physical quantity changes. An alarm may be issued from the alarm device 62 based on this. As the displacement sensor 61, for example, an inclination sensor can be used. In addition, a switch that operates when the member to which the other end of the wire 51 is fixed is provided on the alarm device 62 may be provided so that an alarm is generated by the operation of the switch.

  The embodiments disclosed above are illustrative in all aspects and not restrictive. The above embodiments may be omitted, replaced, or modified in various forms without departing from the scope and spirit of the appended claims.

  The following configuration belongs to the technical scope of the present disclosure.

(1) A monitoring system around a substrate processing apparatus installed on a grating in a clean room, wherein the system extends over a plurality of gratings on an upper surface of a part or all of the grating around the substrate processing apparatus. And a warning device that issues an alarm based on the change in the physical quantity by the change generating means, wherein the change generating means is configured to generate a physical quantity when one grating is lifted upward. A monitoring system around the substrate processing apparatus.
Here, the change in the physical quantity includes whether an electric current flows, whether or not the object moves, whether or not the connection of the object is released, and a change in the length of the appearing object.

(2) The change generating means is a conductive member through which a current flows, and one end of the conductive member is fixed to a grating located at an end of the grating on which the change generating means is arranged;
The other end of the conductive member is connected to the alarm device, and the conductive member is covered with an insulating material. When one grating is lifted upward, electrical conduction is cut off at the grating. The monitoring system around the substrate processing apparatus according to (1), wherein the alarm device issues an alarm when current stops flowing through the conductive member based on the interruption. .

(3) The conductive member is configured so as to be electrically connected to and disengageable from a conductive member on another adjacent grating for each of the arranged gratings. When one grating is lifted upward, The monitoring system around the substrate processing apparatus according to (2), wherein an electrical connection with another grating conductive member adjacent to the grating is released.

(4) The change generating means is a wire, one end of the wire is fixed to a grating located at an end of the grating on which the change generating means is arranged, and the other end of the wire is Connected to the alarm device, when one grating is lifted upward, the other end of the wire is pulled out from the alarm device, and the alarm device issues an alarm based on the wire being pulled out. The monitoring system around the substrate processing apparatus according to (1), wherein the monitoring is performed. It does not matter whether the wire used herein has conductivity.

(5) The change generating means is a wire, one end of the wire is fixed to a grating located at an end of the grating on which the change generating means is arranged, and the other end of the wire is When the grating is connected to the alarm device and one grating is lifted upward, the other end of the wire is detached from the alarm device by the lifting, and the other end of the wire is detached from the alarm device. The monitoring system around the substrate processing apparatus according to (1), wherein the alarm device is configured to generate an alarm. It does not matter whether the wire used herein has conductivity.

(6) The change generating means is a wire, and one end of the wire is fixed to a grating located at an end of the grating on which the change generating means is arranged, and the other end of the wire is It is configured to be connected to a displacement sensor that is provided in the alarm device and that detects inclination, and when one grating is lifted upward, the inclination that is detected by the displacement sensor is displaced, and an alarm is generated by the displacement. The monitoring system around the substrate processing apparatus according to (1), wherein It does not matter whether the wire used herein has conductivity.

(7) The change generating means is a wire, one end of the wire is fixed to a grating located at an end of the grating on which the change generating means is arranged, and the other end of the wire is When the one grating is connected to the switch member of the alarm device and the one grating is lifted upward, the other end of the wire turns on the switch member by the lifting, so that the alarm device issues an alarm. The monitoring system around the substrate processing apparatus according to (1), wherein the monitoring system is configured. It does not matter whether the wire used herein has conductivity.

DESCRIPTION OF SYMBOLS 1 Monitoring system 2 Substrate processing apparatus 21 Tape 22 Upper surface 23 Lower surface 24 Conductive part 31, 32 Insulating member 41 Cable 42 Alarm device 51 Wire 52 Fixing member 53 Tape 61 Displacement sensor 62 Alarm device 63 Supporting part G Grating

Claims (7)

A monitoring system for monitoring the periphery of a substrate processing apparatus installed on a grating in a cree room,
On the upper surface of some or all of the gratings around the substrate processing apparatus, a physical quantity change generating means extending and disposed over a plurality of gratings,
An alarm device that issues an alarm based on a change in a physical quantity by the change generating unit,
A monitoring system around a substrate processing apparatus, wherein the change generating means changes a physical quantity when one grating is lifted upward. The change generating means is a conductive member through which a current flows,
One end of the conductive member is fixed to the grating located at the end of the grating where the change generating means is arranged,
The other end of the conductive member is connected to the alarm device,
The conductive member is coated with an insulating material,
When the grating 1 is lifted upward, the electrical conduction is interrupted at the location of the grating, and no current flows through the conductive member based on the interruption, so that the alarm device issues an alarm. The monitoring system around a substrate processing apparatus according to claim 1, wherein the monitoring system is configured. The conductive member is configured to be electrically connectable to and disconnectable from a conductive member on another adjacent grating for each of the arranged gratings,
3. The structure according to claim 2, wherein when one of the gratings is lifted upward, an electrical connection with a conductive member of another grating adjacent to the grating is released. Monitoring system around substrate processing equipment. The change generating means is a wire rod,
One end of the wire is fixed to the grating located at the end of the grating where the change generating means is arranged,
The other end of the wire is connected to the alarm device,
When the grating is lifted upward, the other end of the wire is pulled out from the alarm device, and the alarm device issues an alarm based on the wire being pulled out. A monitoring system around a substrate processing apparatus according to claim 1. The change generating means is a wire rod,
One end of the wire is fixed to the grating located at the end of the grating where the change generating means is arranged,
The other end of the wire is connected to the alarm device,
When the grating 1 is lifted upward, the other end of the wire is detached from the alarm device by the lifting,
2. The monitoring system according to claim 1, wherein the alarm device issues an alarm when the other end of the wire comes off the alarm device. 3. The change generating means is a wire rod,
One end of the wire is fixed to the grating located at the end of the grating where the change generating means is arranged,
The other end of the wire is connected to a displacement sensor that is provided in the alarm device and detects inclination.
When the grating 1 is lifted upward, the inclination detected by the displacement sensor is displaced,
The monitoring system according to claim 1, wherein an alarm is issued by the displacement. The change generating means is a wire rod,
One end of the wire is fixed to the grating located at the end of the grating where the change generating means is arranged,
The other end of the wire is connected to a switch member of the alarm device,
When the grating is lifted upward, the other end of the wire turns on the switch member by the lifting, so that the alarm device issues an alarm. Item 2. A monitoring system around a substrate processing apparatus according to Item 1.

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