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Description
上述した課題を解決するために、本発明の一実施形態による空間光変調器は、複数の画素を有し、周期的に時間変化する駆動信号の振幅に応じて入射光の位相若しくは強度を画素毎に変調する変調部と、駆動信号を変調部に提供する駆動回路と、を備える。変調部の複数の画素は、所定の方向を長手方向とする第１の画素群と、該方向を長手方向とする第２の画素群とを含み、第１の画素群と前記第２の画素群とは、該方向と交差する方向に交互に並んでいる。駆動回路は、複数の画素のうち第１の画素群に提供する駆動信号の位相と、複数の画素のうち第２の画素群に提供する駆動信号の位相とを互いに反転させるように制御し、第１の画素群と第２の画素群との境界線を可変制御する。第１の画素群の少なくとも一部、及び第２の画素群の少なくとも一部は、入射光の照射領域内にある。 In order to solve the above-mentioned problems, the spatial light modulator according to the embodiment of the present invention has a plurality of pixels, and the phase or intensity of the incident light is determined according to the amplitude of the drive signal that changes with time periodically. It includes a modulation unit that modulates each unit and a drive circuit that provides a drive signal to the modulation unit. The plurality of pixels of the modulation unit include a first pixel group having a predetermined direction as the longitudinal direction and a second pixel group having the direction as the longitudinal direction, and the first pixel group and the second pixel The groups are arranged alternately in a direction intersecting the direction. The drive circuit controls so that the phase of the drive signal provided to the first pixel group of the plurality of pixels and the phase of the drive signal provided to the second pixel group of the plurality of pixels are inverted from each other . The boundary line between the first pixel group and the second pixel group is variably controlled. At least a part of the first pixel group and at least a part of the second pixel group are in the irradiation region of the incident light.
本発明の一実施形態による空間光変調器の駆動方法は、複数の画素を有し、周期的に時間変化する駆動信号の振幅に応じて入射光の位相若しくは強度を画素毎に変調する変調部を備える空間光変調器を駆動する方法であって、変調部の複数の画素は、所定の方向を長手方向とする第１の画素群と、該方向を長手方向とする第２の画素群とを含み、第１の画素群と第２の画素群とは、該方向と交差する方向に交互に並んでおり、複数の画素のうち第１の画素群に提供する駆動信号の位相と、複数の画素のうち第２の画素群に提供する駆動信号の位相とを互いに反転させ、第１の画素群と第２の画素群との境界線を可変とする。第１の画素群の少なくとも一部、及び第２の画素群の少なくとも一部は、入射光の照射領域内にある。 The method for driving a spatial optical modulator according to an embodiment of the present invention is a modulation unit having a plurality of pixels and modulating the phase or intensity of incident light for each pixel according to the amplitude of a drive signal that changes periodically over time. A method of driving a spatial optical modulator comprising the above, wherein a plurality of pixels of the modulation unit include a first pixel group having a predetermined direction as a longitudinal direction and a second pixel group having that direction as a longitudinal direction. The first pixel group and the second pixel group are alternately arranged in a direction intersecting the direction, and the phase of the drive signal provided to the first pixel group among the plurality of pixels and a plurality of The phases of the drive signals provided to the second pixel group among the pixels of the above are inverted with each other, and the boundary line between the first pixel group and the second pixel group is made variable . At least a part of the first pixel group and at least a part of the second pixel group are in the irradiation region of the incident light.
これらの空間光変調器及び駆動方法においては、複数の画素のうち第１の画素群に提供する駆動信号の位相と、複数の画素のうち第２の画素群に提供する駆動信号の位相とが互いに反転するので、変調部から出力される変調後の光が集光される際、第１の画素群からの光のゆらぎと第２の画素群からの光のゆらぎとが互いに打ち消し合う。これにより、変調後の光に生じるゆらぎを低減することができる。なお、各画素の位相は駆動信号の振幅に応じて定まるので、駆動信号の位相の反転にかかわらず所望の位相パターンが得られる。また、第１の画素群と第２の画素群との境界線を可変とすることにより、入射光の照射領域の位置に応じて境界線を移動させ、第１の画素群からの光のゆらぎの大きさと、第２の画素群からの光のゆらぎの大きさとを互いに近づけることができる。従って、これらのゆらぎをより効果的に打ち消し合わせて、変調後の光のゆらぎを更に低減することができる。 In these spatial light modulators and driving methods, the phase of the drive signal provided to the first pixel group among the plurality of pixels and the phase of the drive signal provided to the second pixel group among the plurality of pixels are different. Since they are inverted to each other, when the modulated light output from the modulation unit is focused, the fluctuation of the light from the first pixel group and the fluctuation of the light from the second pixel group cancel each other out. Thereby, the fluctuation generated in the light after modulation can be reduced. Since the phase of each pixel is determined according to the amplitude of the drive signal, a desired phase pattern can be obtained regardless of the phase inversion of the drive signal. Further, by making the boundary line between the first pixel group and the second pixel group variable, the boundary line is moved according to the position of the irradiation region of the incident light, and the fluctuation of the light from the first pixel group. And the magnitude of the fluctuation of light from the second pixel group can be brought close to each other. Therefore, these fluctuations can be canceled out more effectively, and the fluctuation of light after modulation can be further reduced.
本発明の一実施形態による光変調装置は、上記の空間光変調器と、変調後の光の強度を検出する光検出器と、を備える。駆動回路は、光検出器から提供される光強度の周期的な変動に基づいて、該変動が最小値に近づくように、第１の画素群と第２の画素群との境界線の位置を定める。同様に、上記の駆動方法において、変調後の光の強度を検出し、該光強度の周期的な変動に基づいて、該変動が最小値に近づくように、第１の画素群と第２の画素群との境界線の位置を定めてもよい。これにより、入射光の照射領域の位置に応じて境界線を自動的に移動させ、第１の画素群からの光のゆらぎの大きさと、第２の画素群からの光のゆらぎの大きさとを容易に近づけることができる。 The light modulator according to one embodiment of the present invention includes the above spatial light modulator and a photodetector that detects the intensity of the modulated light. Based on the periodic fluctuation of the light intensity provided by the photodetector, the drive circuit positions the boundary line between the first pixel group and the second pixel group so that the fluctuation approaches the minimum value. Determine. Similarly, in the above driving method, the first pixel group and the second pixel group and the second pixel group and the second pixel group so that the intensity of the light after modulation is detected and the variation approaches the minimum value based on the periodic variation of the light intensity. The position of the boundary line with the pixel group may be determined. As a result, the boundary line is automatically moved according to the position of the irradiation region of the incident light, and the magnitude of the fluctuation of the light from the first pixel group and the magnitude of the fluctuation of the light from the second pixel group are adjusted. It can be easily approached.
この光変調装置は、光源から出力された光を変調部へ導く導光光学系を更に備えてもよい。そして、導光光学系は、変調部における光の入射位置を可変としてもよい。同様に、上記の駆動方法において、光を変調部へ導く導光光学系を設け、導光光学系により変調部における光の入射位置を可変としてもよい。これにより、入射光の照射範囲における第１及び第２の画素群の面積割合が互いに近づくように光の入射位置を移動させ、第１の画素群からの光のゆらぎの大きさと、第２の画素群からの光のゆらぎの大きさとを互いに近づけることができる。従って、これらのゆらぎをより効果的に打ち消し合わせて、変調後の光のゆらぎを更に低減することができる。この場合、光変調装置は、変調後の光の強度を検出する光検出器と、導光光学系を制御する導光光学系制御部と、を更に備え、導光光学系制御部は、光検出器から提供される光強度の周期的な変動に基づいて、該変動が最小値に近づくように、変調部における光の入射位置を定めてもよい。同様に、上記の駆動方法において、変調後の光の強度を検出し、該光強度の周期的な変動に基づいて、該変動が最小値に近づくように、変調部における光の入射位置を定めてもよい。これにより、入射光の照射範囲における第１及び第２の画素群の面積割合に応じて光の入射位置を自動的に移動させ、第１の画素群からの光のゆらぎの大きさと、第２の画素群からの光のゆらぎの大きさとを容易に近づけることができる。 This optical modulation device may further include a light guide optical system that guides the light output from the light source to the modulation unit. Then, the light guide optical system may have a variable incident position of light in the modulation unit. Similarly, in the above driving method, a light guide optical system that guides light to the modulation unit may be provided, and the incident position of light in the modulation unit may be made variable by the light guide optical system. As a result, the incident positions of the light are moved so that the area ratios of the first and second pixel groups in the irradiation range of the incident light are close to each other, and the magnitude of the fluctuation of the light from the first pixel group and the second The magnitude of the fluctuation of light from the pixel group can be brought close to each other. Therefore, these fluctuations can be canceled out more effectively, and the fluctuation of light after modulation can be further reduced. In this case, the optical modulator further includes an optical detector that detects the intensity of the modulated light and a light guide optical system control unit that controls the light guide optical system, and the light guide optical system control unit is light. Based on the periodic fluctuation of the light intensity provided by the detector, the incident position of the light in the modulation unit may be determined so that the fluctuation approaches the minimum value. Similarly, in the above driving method, the intensity of the light after modulation is detected, and based on the periodic fluctuation of the light intensity, the incident position of the light in the modulation unit is determined so that the fluctuation approaches the minimum value. You may. As a result, the incident position of the light is automatically moved according to the area ratio of the first and second pixel groups in the irradiation range of the incident light, and the magnitude of the fluctuation of the light from the first pixel group and the second The magnitude of the fluctuation of light from the pixel group of can be easily approached.
Claims (13)
前記駆動信号を前記変調部に提供する駆動回路と、を備え、
前記変調部の前記複数の画素は、所定の方向を長手方向とする第１の画素群と、該方向を長手方向とする第２の画素群とを含み、前記第１の画素群と前記第２の画素群とは、該方向と交差する方向に交互に並んでおり、
前記駆動回路は、前記第１の画素群に提供する前記駆動信号の位相と、前記第２の画素群に提供する前記駆動信号の位相とを互いに反転させるように制御し、前記第１の画素群と前記第２の画素群との境界線を可変制御し、
前記第１の画素群の少なくとも一部、及び前記第２の画素群の少なくとも一部は、前記入射光の照射領域内にある、空間光変調器。 A modulation unit that has a plurality of pixels and modulates the phase or intensity of incident light for each pixel according to the amplitude of a drive signal that changes periodically over time.
A drive circuit that provides the drive signal to the modulation unit is provided.
The plurality of pixels of the modulation unit include a first pixel group having a predetermined direction as a longitudinal direction and a second pixel group having the direction as a longitudinal direction, and the first pixel group and the first pixel group. The two pixel groups are alternately arranged in a direction intersecting the direction.
Wherein the driving circuit, and a phase of the drive signal provided before Symbol first pixel group, and controls the phase of the drive signal provided before Symbol second pixel group to reverse to each other, the first The boundary line between the pixel group and the second pixel group is variably controlled.
A spatial light modulator in which at least a part of the first pixel group and at least a part of the second pixel group are in an irradiation region of the incident light.
変調後の光の強度を検出する光検出器と、を備え、
前記駆動回路は、前記光検出器から提供される光強度の周期的な変動に基づいて、該変動が最小値に近づくように、前記第１の画素群と前記第２の画素群との境界線の位置を定める、光変調装置。 The spatial light modulator according to any one of claims 1 to 3,
Equipped with a photodetector that detects the intensity of the modulated light,
The drive circuit is based on the periodic fluctuation of the light intensity provided by the photodetector, and the boundary between the first pixel group and the second pixel group so that the fluctuation approaches the minimum value. An optical modulator that determines the position of a line.
前記入射光を前記変調部に提供する光源と、
前記変調部から出力された変調後の光を集光する集光光学系と、を備える、光変調装置。 The spatial light modulator according to any one of claims 1 to 3 and
A light source that provides the incident light to the modulation unit,
An optical modulation device including a condensing optical system that collects the modulated light output from the modulation unit.
前記導光光学系は、前記変調部における光の入射位置を可変とする、請求項５に記載の光変調装置。 A light guide optical system that guides the light output from the light source to the modulation unit is further provided.
The optical modulation device according to claim 5 , wherein the light guide optical system changes the incident position of light in the modulation unit.
前記導光光学系を制御する導光光学系制御部と、を更に備え、
前記導光光学系制御部は、前記光検出器から提供される光強度の周期的な変動に基づいて、該変動が最小値に近づくように、前記変調部における光の入射位置を定める、請求項６に記載の光変調装置。 A photodetector that detects the intensity of the modulated light,
A light guide optical system control unit for controlling the light guide optical system is further provided.
The light guide optical system control unit determines the incident position of light in the modulation unit based on the periodic fluctuation of the light intensity provided by the photodetector so that the fluctuation approaches the minimum value. Item 6. The optical modulation device according to Item 6.
前記変調部の前記複数の画素は、所定の方向を長手方向とする第１の画素群と、該方向を長手方向とする第２の画素群とを含み、前記第１の画素群と前記第２の画素群とは、該方向と交差する方向に交互に並んでおり、
前記第１の画素群に提供する前記駆動信号の位相と、前記第２の画素群に提供する前記駆動信号の位相とを互いに反転させ、前記第１の画素群と前記第２の画素群との境界線を可変とし、
前記第１の画素群の少なくとも一部、及び前記第２の画素群の少なくとも一部は、前記入射光の照射領域内にある、空間光変調器の駆動方法。 A method of driving a spatial light modulator having a plurality of pixels and having a modulator that modulates the phase or intensity of incident light for each pixel according to the amplitude of a drive signal that changes with time periodically.
The plurality of pixels of the modulation unit include a first pixel group having a predetermined direction as a longitudinal direction and a second pixel group having the direction as a longitudinal direction, and the first pixel group and the first pixel group. The two pixel groups are alternately arranged in a direction intersecting the direction.
A phase of the drive signal provided before Symbol first pixel group, before Symbol together by inverting the phase of the drive signal provided to the second pixel group, and the first pixel group and the second The boundary line with the pixel group is variable,
A method of driving a spatial light modulator in which at least a part of the first pixel group and at least a part of the second pixel group are in an irradiation region of the incident light.
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| JP4786291B2 (en) * | 2005-10-19 | 2011-10-05 | 浜松ホトニクス株式会社 | Optical tweezers |
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| US10310355B2 (en) * | 2016-08-01 | 2019-06-04 | Boulder Nonlinear Systems, Inc. | Reflective spatial light modulator with high spatial frequency border |
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