JP2020003370A5 - 3D magnetic field detector - Google Patents

3D magnetic field detector Download PDF

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JP2020003370A5
JP2020003370A5 JP2018123769A JP2018123769A JP2020003370A5 JP 2020003370 A5 JP2020003370 A5 JP 2020003370A5 JP 2018123769 A JP2018123769 A JP 2018123769A JP 2018123769 A JP2018123769 A JP 2018123769A JP 2020003370 A5 JP2020003370 A5 JP 2020003370A5
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図1(b)、図2(c)および図2(d)を用いて説明する。
直方体台座31は、プラスチック、セラミックなどの固い絶縁素材を用いて、その大きさは底面の短辺(幅)0.6mm以下、長辺(厚さ)0.7mm以下、長さ3mm以下である。
This will be described with reference to FIGS. 1 (b) , 2 (c) and 2 (d) .
The rectangular parallelepiped pedestal 31 uses a hard insulating material such as plastic or ceramic, and its size is 0.6 mm or less on the short side (width), 0.7 mm or less on the long side (thickness), and 3 mm or less on the bottom surface. ..

このようにして本発明の3次元磁界検出装置は、底辺の長辺0.8mm以下、対角線の長さ1.0mm以下、側面の長辺の長さ3mm以下の細長い直方体形状からなるために、細長いパイプ状のカテーテル先端部に内蔵することができる(図2(d))
As described above, the three-dimensional magnetic field detection device of the present invention has an elongated rectangular parallelepiped shape having a base long side of 0.8 mm or less, a diagonal length of 1.0 mm or less, and a side surface long side of 3 mm or less. It can be built into the tip of an elongated pipe-shaped catheter (Fig. 2 (d)) .

また、本発明の3次元磁界検出装置において、
その縦軸方向磁界検出用のASIC一体型GSRセンサは、ASIC表面保護被膜上の絶縁性レジスト層からなる基板皮膜の長さ方向にアモルファス磁性ワイヤ(以下、磁性ワイヤという。)を基板皮膜に形成された溝に取り付け、磁性ワイヤの周りに検出コイルを巻き付けて形成し、磁性ワイヤにパルス電流を通電するための2個のワイヤ電極と検出コイルに発生するコイル電圧を測定する2個のコイル電極からなるGSR素子と幅0.5mm以下、厚さ0.2mm以下、長さ3mm以下の大きさのASICとからなる。GSR素子とASICとは上記の4つの電極を介して連結されている。
Further, in the three-dimensional magnetic field detection device of the present invention,
The ASIC integrated GSR sensor for detecting the magnetic field in the vertical axis direction forms an amorphous magnetic wire (hereinafter referred to as magnetic wire) on the substrate film in the length direction of the substrate film composed of the insulating resist layer on the ASIC surface protective film. Two wire electrodes for applying a pulse current to the magnetic wire and two coil electrodes for measuring the coil voltage generated in the detection coil are formed by winding the detection coil around the magnetic wire. It is composed of a GSR element having a width of 0.5 mm or less, a thickness of 0.2 mm or less, and an ASIC having a length of 3 mm or less. The GSR element and the ASIC are connected via the above four electrodes.

Claims (1)

請求項1において、
前記縦軸方向磁界検出用のGSR素子は、
ASIC表面保護被膜上に形成された絶縁性レジスト層からなる基板皮膜にアモルファス磁性ワイヤ(以下、磁性ワイヤという。)を前記基板皮膜の長さ方向に形成された溝に設置し、前記磁性ワイヤの周りに検出コイルを形成し、前記磁性ワイヤにパルス電流を通電するための2個のワイヤ電極と前記検出コイルに発生するコイル電圧を測定する2個のコイル電極を備え、
前記縦軸方向磁界検出用のGSR素子と幅0.8mm以下、厚さ0.2mm以下、長さ3mm以下の大きさの前記ASICは前記4つの電極を介して連結する縦軸方向磁界検出用のASIC一体型GSRセンサを形成し、
前記横軸方向磁界検出用のGSR素子は、
ASIC表面保護被膜上に形成された絶縁性レジスト層からなる基板皮膜に前記磁性ワイヤを前記基板皮膜の幅方向に形成された溝に設置し、前記磁性ワイヤの周りに検出コイルを形成し、前記磁性ワイヤにパルス電流を通電するための2個のワイヤ電極と前記検出コイルに発生する電圧を測定する2個のコイル電極を備え、
前記横軸磁界検出用のGSR素子と幅0.8mm以下、厚さ0.2mm以下、長さ3mm以下の大きさの前記ASICは前記4つの電極を介して連結する横軸方向磁界検出用のASIC一体型GSRセンサを形成し、
前記直方体台座の前記長辺の1つの面に前記縦軸方向磁界検出用のASIC一体型GSRセンサを、前記長辺の他の隣接する2つの面に前記横軸方向磁界検出用のASIC一体型GSRセンサを取り付けて底面の長辺0.8mm以下、対角線1.0mm以下、側面の長さ3mm以下の大きさの直方体形状からなり、
3つの前記ASICは外部制御装置と各々配線ケーブルで連結されていることを特徴とする3次元磁界検出装置。
In claim 1,
The GSR element for detecting the magnetic field in the vertical axis direction is
ASIC surface protective amorphous magnetic wire to the substrate film made of an insulating resist layer formed on the film (hereinafter, referred to as magnetic wire.) Was placed in the formed in the longitudinal groove of the substrate film, said magnetic wire the detection coil is formed around, with two coil electrodes for measuring the coil voltage generated in the two wire electrode and the detection coil for energizing the pulse current to said magnetic wire,
The ASIC having a width of 0.8 mm or less, a thickness of 0.2 mm or less, and a length of 3 mm or less is connected to the GSR element for detecting the magnetic field in the vertical axis direction via the four electrodes for detecting the magnetic field in the vertical axis direction. Formed an ASIC integrated GSR sensor
The GSR element for detecting the magnetic field in the horizontal axis direction is
Installing said magnetic wire to the substrate film comprising formed on ASIC surface protection on coating insulating resist layer in the width direction to form a groove of the substrate film to form a detection coil around the magnetic wire, the with two coil electrodes for measuring a voltage generated in the two wire electrode and the detection coil for energizing the pulse current to the magnetic wire,
The ASIC having a width of 0.8 mm or less, a thickness of 0.2 mm or less, and a length of 3 mm or less is connected to the GSR element for horizontal axis magnetic field detection via the four electrodes for horizontal axis direction magnetic field detection. Forming an ASIC integrated GSR sensor,
The ASIC-integrated GSR sensor for detecting the vertical magnetic field is on one surface of the long side of the rectangular parallelepiped pedestal, and the ASIC-integrated type for detecting the horizontal magnetic field is on the other two adjacent surfaces of the long side. It consists of a rectangular parallelepiped with a long side of 0.8 mm or less on the bottom surface, a diagonal of 1.0 mm or less, and a side length of 3 mm or less with the GSR sensor attached.
The three ASICs are three-dimensional magnetic field detection devices, each of which is connected to an external control device by a wiring cable.
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