JP2019537205A - 可変圧力シールドビームランプを操作するための装置及び方法 - Google Patents
可変圧力シールドビームランプを操作するための装置及び方法 Download PDFInfo
- Publication number
- JP2019537205A JP2019537205A JP2019520543A JP2019520543A JP2019537205A JP 2019537205 A JP2019537205 A JP 2019537205A JP 2019520543 A JP2019520543 A JP 2019520543A JP 2019520543 A JP2019520543 A JP 2019520543A JP 2019537205 A JP2019537205 A JP 2019537205A
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- plasma
- pressure level
- lamp
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims abstract description 24
- 238000012423 maintenance Methods 0.000 claims abstract description 17
- 230000001965 increasing effect Effects 0.000 claims abstract description 10
- 230000003247 decreasing effect Effects 0.000 claims abstract description 5
- 238000005286 illumination Methods 0.000 claims abstract description 4
- 230000005540 biological transmission Effects 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 abstract description 12
- 229910052724 xenon Inorganic materials 0.000 description 35
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 35
- 239000007789 gas Substances 0.000 description 34
- 239000000835 fiber Substances 0.000 description 18
- 230000009977 dual effect Effects 0.000 description 11
- 230000006870 function Effects 0.000 description 11
- 229910052594 sapphire Inorganic materials 0.000 description 11
- 239000010980 sapphire Substances 0.000 description 11
- 230000003287 optical effect Effects 0.000 description 10
- 239000000463 material Substances 0.000 description 9
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 9
- 229910052721 tungsten Inorganic materials 0.000 description 9
- 239000010937 tungsten Substances 0.000 description 9
- 238000001816 cooling Methods 0.000 description 7
- 238000003384 imaging method Methods 0.000 description 7
- 238000007789 sealing Methods 0.000 description 7
- 238000000576 coating method Methods 0.000 description 6
- 239000011521 glass Substances 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 238000010521 absorption reaction Methods 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 5
- 230000008878 coupling Effects 0.000 description 5
- 238000010168 coupling process Methods 0.000 description 5
- 238000005859 coupling reaction Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 239000013307 optical fiber Substances 0.000 description 5
- 239000012780 transparent material Substances 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 238000004891 communication Methods 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000005855 radiation Effects 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 238000005219 brazing Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 230000005484 gravity Effects 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 239000000356 contaminant Substances 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 229910052743 krypton Inorganic materials 0.000 description 2
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000001902 propagating effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 230000032258 transport Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910001313 Cobalt-iron alloy Inorganic materials 0.000 description 1
- KGWWEXORQXHJJQ-UHFFFAOYSA-N [Fe].[Co].[Ni] Chemical compound [Fe].[Co].[Ni] KGWWEXORQXHJJQ-UHFFFAOYSA-N 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000006117 anti-reflective coating Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000000872 buffer Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004590 computer program Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000013523 data management Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 230000008713 feedback mechanism Effects 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000007726 management method Methods 0.000 description 1
- 238000004476 mid-IR spectroscopy Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 231100000252 nontoxic Toxicity 0.000 description 1
- 230000003000 nontoxic effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000002918 waste heat Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/025—Associated optical elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/24—Means for obtaining or maintaining the desired pressure within the vessel
- H01J61/28—Means for producing, introducing, or replenishing gas or vapour during operation of the lamp
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/30—Vessels; Containers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/54—Igniting arrangements, e.g. promoting ionisation for starting
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Electromagnetism (AREA)
- Non-Portable Lighting Devices Or Systems Thereof (AREA)
- Vessels And Coating Films For Discharge Lamps (AREA)
- Lasers (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US15/333,634 | 2016-10-25 | ||
| US15/333,634 US10186416B2 (en) | 2014-05-15 | 2016-10-25 | Apparatus and a method for operating a variable pressure sealed beam lamp |
| PCT/US2017/058216 WO2018081220A1 (en) | 2016-10-25 | 2017-10-25 | Apparatus and a method for operating a variable pressure sealed beam lamp |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2019537205A true JP2019537205A (ja) | 2019-12-19 |
Family
ID=60268509
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019520543A Pending JP2019537205A (ja) | 2016-10-25 | 2017-10-25 | 可変圧力シールドビームランプを操作するための装置及び方法 |
Country Status (3)
| Country | Link |
|---|---|
| EP (1) | EP3533079A1 (de) |
| JP (1) | JP2019537205A (de) |
| WO (1) | WO2018081220A1 (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2023536367A (ja) * | 2020-08-06 | 2023-08-24 | アイエスティーイーキュー ビー．ヴィー． | 高輝度レーザー励起プラズマ光源および収差低減方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014528641A (ja) * | 2011-10-11 | 2014-10-27 | ケーエルエー−テンカー コーポレイション | レーザー維持プラズマ光源向けプラズマ・セル |
| US20150332908A1 (en) * | 2014-05-15 | 2015-11-19 | Excelitas Technologies Corp. | Laser Driven Sealed Beam Lamp |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3900803A (en) | 1974-04-24 | 1975-08-19 | Bell Telephone Labor Inc | Lasers optically pumped by laser-produced plasma |
| JP4321721B2 (ja) * | 2006-05-22 | 2009-08-26 | 国立大学法人名古屋大学 | 放電光源 |
-
2017
- 2017-10-25 EP EP17794880.9A patent/EP3533079A1/de active Pending
- 2017-10-25 WO PCT/US2017/058216 patent/WO2018081220A1/en unknown
- 2017-10-25 JP JP2019520543A patent/JP2019537205A/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014528641A (ja) * | 2011-10-11 | 2014-10-27 | ケーエルエー−テンカー コーポレイション | レーザー維持プラズマ光源向けプラズマ・セル |
| US20150332908A1 (en) * | 2014-05-15 | 2015-11-19 | Excelitas Technologies Corp. | Laser Driven Sealed Beam Lamp |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2023536367A (ja) * | 2020-08-06 | 2023-08-24 | アイエスティーイーキュー ビー．ヴィー． | 高輝度レーザー励起プラズマ光源および収差低減方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2018081220A1 (en) | 2018-05-03 |
| EP3533079A1 (de) | 2019-09-04 |
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| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20201016 |
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| A977 | Report on retrieval |
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| A601 | Written request for extension of time |
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| A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20220128 |
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| A02 | Decision of refusal |
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