JP2019215635A - Control system, control unit, image processing apparatus, and program - Google Patents

Abstract

To provide a control system that can determine the position of an object with high accuracy.SOLUTION: An image processing apparatus specifies the position of a feature portion of an object on the basis of an image obtained through an imaging operation. A movement control unit controls a movement mechanism such that the position of the object comes closer to a target position on the basis of the position specified by the image processing apparatus. An estimation unit, on the basis of the position of the feature portion specified on the basis of an image obtained through a first imaging operation and information from the movement mechanism, estimates the locus of movement of the feature portion during an exposure period in the subsequent second imaging operation. The image processing apparatus performs shake correction of the image obtained through the second imaging operation on the basis of the movement locus.SELECTED DRAWING: Figure 1

Description

  The present technology relates to a control system, a control device, an image processing device, and a program for positioning an object.

  In FA (Factory Automation), various technologies (positioning technology) for adjusting the position of an object to a target position have been put to practical use. At this time, as a method of measuring the deviation of the position of the object from the target position, there is a method of using an image obtained by imaging the object.

  Japanese Patent Laying-Open No. 2014-203365 (Patent Literature 1) discloses that an image of an object is captured while moving a moving mechanism that changes the position of the object, image data is acquired, and the position of a characteristic portion included in the image data is acquired. A control system for positioning an object at a target position based on the object is disclosed.

JP 2014-203365 A JP 2006-129236 A

  According to the technique disclosed in Patent Document 1, the position of the characteristic portion is specified using image data obtained by imaging a moving target, so that the positioning can be speeded up. However, image blur occurs because the moving target is imaged. When the position of the characteristic portion is specified using the image data in which the image blur has occurred, the positional accuracy of the characteristic portion is reduced. As a result, the positioning accuracy also decreases.

  The present invention has been made in view of the above problems, and an object of the present invention is to provide a control system, a control device, an image processing device, and a program capable of positioning an object with high accuracy.

  According to an example of the present disclosure, a control system that controls a moving mechanism that moves an object to position the object includes an image processing device, a movement control unit, and an estimation unit. The image processing device obtains an image obtained by performing an imaging operation on the object in each imaging cycle, and specifies a position of a characteristic portion of the object based on the obtained image. The movement control unit controls the movement mechanism based on the position of the characteristic portion specified by the image processing device so that the position of the target object approaches the target position. The estimating unit includes a position including the position of the characteristic portion specified by the image processing device based on the image obtained by the first imaging operation, and at least one of information from the moving mechanism and information generated by the moving control unit. Based on the information, the movement trajectory of the characteristic portion during the exposure period in the second imaging operation following the first imaging operation is estimated. The image processing device performs shake correction on an image obtained by the second imaging operation based on the movement trajectory.

  According to this disclosure, the reference information including at least one of the information from the moving mechanism and the information generated by the movement control unit is information directly indicating the movement of the moving mechanism. Therefore, the estimating unit can accurately estimate the movement locus of the characteristic portion during the exposure period of the second imaging operation. Accordingly, the image processing apparatus can accurately perform the image blur correction, and can accurately specify the position of the characteristic portion. As a result, the object can be positioned with high accuracy.

  According to an example of the present disclosure, the moving mechanism includes a motor driven to move the object. The reference information includes information indicating a driving amount of the motor from the first imaging operation.

  According to this disclosure, the information indicating the driving amount of the motor during the exposure period directly indicates the moving amount of the moving mechanism from the first imaging operation. Therefore, the estimating unit can more accurately estimate the movement locus of the characteristic portion during the exposure period of the second imaging operation.

  According to an example of the present disclosure, the movement control unit generates a movement command for the movement mechanism in each control cycle. The reference information includes information indicating a movement command generated by the movement control unit after the first imaging operation.

  The movement command is a command for moving the moving mechanism, and is directly related to the movement of the moving mechanism. Therefore, according to this disclosure, the estimation unit can more accurately estimate the movement locus of the characteristic portion during the exposure period of the second imaging operation. Further, the estimating unit can estimate the movement trajectory of the characteristic portion in the exposure period at the start time of the control cycle overlapping the end time of the exposure period. That is, the estimating unit can estimate the movement locus before the end of the exposure period. Therefore, the image processing apparatus can immediately start the blur correction after the end of the second imaging operation.

  According to an example of the present disclosure, the movement control unit determines the target trajectory of the moving mechanism based on the deviation of the position specified by the image processing device with respect to the target position, and causes the moving mechanism to move according to the determined target trajectory. Control. The reference information includes information indicating the target trajectory.

  According to this disclosure, the estimating unit can also estimate the movement locus before the end of the exposure period. Therefore, the image processing apparatus can immediately start the blur correction after the end of the second imaging operation.

  According to an example of the present disclosure, the movement control unit generates a speed command for the moving mechanism in each control cycle, and generates a constant speed command in a control cycle that overlaps with the exposure period.

  According to this disclosure, the characteristic portion moves at a constant speed during the exposure period. Therefore, the time required for the blur correction processing in the image processing apparatus is reduced.

  According to an example of the present disclosure, the moving mechanism includes a first mechanism that translates and a second mechanism that rotates. The movement control unit stops the second mechanism during the exposure period.

  According to this disclosure, the image processing apparatus does not need to perform blur correction for removing blur due to rotation blur. Therefore, the time required for the blur correction processing in the image processing apparatus is reduced.

  According to an example of the present disclosure, a moving mechanism that moves an object, an image obtained by an imaging operation of the object in each imaging cycle is acquired, and a position of a characteristic portion of the object is specified based on the acquired image. A control device that controls an image processing device for performing positioning to position an object includes a movement control unit, an estimation unit, and an instruction unit. The movement control unit controls the movement mechanism based on the position of the characteristic portion specified by the image processing device so that the position of the target object approaches the target position. The estimating unit includes a position including the position of the characteristic portion specified by the image processing device based on the image obtained by the first imaging operation, and at least one of information from the moving mechanism and information generated by the moving control unit. Based on the information, the movement trajectory of the characteristic portion during the exposure period in the second imaging operation following the first imaging operation is estimated. The instructing unit instructs an image processing apparatus that performs blur correction of an image obtained by the second imaging operation based on the movement trajectory.

  According to an example of the present disclosure, the image processing apparatus acquires an image obtained by an imaging operation in each imaging cycle for an object in response to an instruction from a control device that controls a moving mechanism that moves the object, and acquires the image. The position of the characteristic portion of the object is specified based on the image thus obtained. The control device controls the moving mechanism based on the position of the characteristic portion specified by the image processing device so that the position of the target object approaches the target position. The image processing device includes an estimating unit and a correcting unit. The estimating unit includes a position of a characteristic portion specified by the image processing device based on an image obtained by the first imaging operation, and information from a moving mechanism. A movement trajectory of a characteristic portion during an exposure period in a second imaging operation subsequent to the first imaging operation is estimated based on the reference information including at least one of information generated by the control device. The correction unit performs shake correction on an image obtained by the second imaging operation based on the movement trajectory.

  According to an example of the present disclosure, a program for controlling a moving mechanism that moves an object and supporting a control system that positions the object causes a computer to execute first to third steps. The control system includes an image processing device for acquiring an image obtained by an imaging operation of the object in each imaging cycle, and identifying a position of a characteristic portion of the object based on the acquired image. The first step is a step of controlling the moving mechanism based on the position of the characteristic portion specified by the image processing device so that the position of the target object approaches the target position. The second step includes a position of the characteristic portion specified by the image processing device based on the image obtained by the first imaging operation, and at least one of information from the moving mechanism and information generated by the controlling step. This is a step of estimating a movement trajectory of a characteristic portion during an exposure period in a second imaging operation subsequent to the first imaging operation, based on the reference information. The third step is a step of instructing the image processing apparatus that performs blur correction of the image obtained by the second imaging operation based on the movement trajectory.

  According to these disclosures, the image processing apparatus can perform image blur correction with high accuracy, and can specify the position of the target with high accuracy. As a result, the object can be positioned with high accuracy.

  According to the present invention, an object can be positioned with high accuracy.

FIG. 1 is a schematic diagram illustrating an overall configuration of a control system according to the present embodiment. FIG. 2 is a schematic diagram illustrating a hardware configuration of an image processing apparatus included in the control system according to the present embodiment. FIG. 2 is a schematic diagram illustrating a hardware configuration of a motion controller included in the control system according to the embodiment. FIG. 2 is a block diagram illustrating a functional configuration of the control system illustrated in FIG. 1. FIG. 4 is a diagram illustrating a method for estimating a movement amount of a work. It is a flowchart which shows an example of the flow of the positioning process of a control system. 9 is a flowchart illustrating an example of a flow of a control process of a moving mechanism by a movement control unit. FIG. 14 is a block diagram illustrating a functional configuration of a control system according to a third modification. It is a figure showing an example of a target trajectory. 9 is a flowchart illustrating a flow of a process in a target trajectory determination unit.

  Embodiments of the present invention will be described in detail with reference to the drawings. Note that the same or corresponding parts in the drawings are denoted by the same reference numerals and description thereof will not be repeated.

§1 Application Example First, an application example of the control system according to the present embodiment will be described. FIG. 1 is a schematic diagram illustrating an overall configuration of a control system 1 according to the present embodiment. The control system 1 shown in FIG. 1 performs alignment using image processing. The alignment typically means a process of arranging an object (hereinafter, also referred to as “work”) at an original position of a production line in a manufacturing process of an industrial product or the like. As an example of such alignment, the control system 1 controls the positioning of the work 2 with respect to the exposure mask 4 before the circuit pattern is printed on the work 2 which is a glass substrate in a liquid crystal panel production line. The workpiece 2 is provided with marks 5a and 5b, which are characteristic portions for positioning, at predetermined positions. The control system 1 realizes positioning of the work 2 by imaging the marks 5b, 5b provided on the work 2 and performing image processing on an image obtained by the imaging.

  The control system 1 includes a moving mechanism 100, a driver unit 200, a visual sensor 300, and a motion controller 400.

  The moving mechanism 100 moves the work 2. The moving mechanism 100 may have any degree of freedom as long as the mechanism can arrange the work 2 at the target position. The moving mechanism 100 is, for example, an XYθ stage that can apply horizontal translational movement and rotational movement to the work 2.

  The moving mechanism 100 of the example shown in FIG. 1 includes an X stage 110X, a Y stage 110Y, a θ stage 110θ, and servomotors 120X, 120Y, 120θ. In the example shown in FIG. 1, each of the servomotors 120X, 120Y, and 120θ is constituted by a rotary motor. The servo motor 120X translates and drives the X stage 110X along the X-axis direction. The servo motor 120Y translates and drives the Y stage 110Y along the Y-axis direction. The servo motor 120θ drives the θ stage 110θ to rotate about an axis parallel to the Z axis. The X stage 110X, the Y stage 110Y, and the servomotors 120X, 120Y constitute a mechanism for performing translational movement. stage 110θ and servo motor 120θ constitute a mechanism for rotating and moving.

  Driver unit 200 performs feedback control on moving mechanism 100 according to a moving command received at each control cycle Ts. As shown in FIG. 1, the driver unit 200 includes servo drivers 200X, 200Y, and 200θ. Servo driver 200X performs feedback control on servo motor 120X such that the movement amount of X stage 110X approaches the movement command. The servo driver 200Y performs feedback control on the servomotor 120Y so that the movement amount of the Y stage 110Y approaches the movement command. The servo driver 200θ performs feedback control on the servomotor 120θ so that the movement amount of the θ stage 110θ approaches the movement command.

  The visual sensor 300 includes one or more cameras (cameras 302a and 302b in the example of FIG. 1) and an image processing device 304. The image processing device 304 acquires images obtained by the imaging operations of the cameras 302a and 302b for the imaging cycle Tb on the work 2, and specifies the positions of the marks 5a and 5b on the work 2 based on the obtained images. .

  The motion controller 400 is, for example, a PLC (programmable logic controller), and performs various FA controls. The motion controller 400 controls the moving mechanism 100 based on the positions of the marks 5a and 5b specified by the image processing device 304 so that the position of the work 2 approaches the target position. Specifically, the motion controller 400 generates a movement command for bringing the position of the work 2 closer to the target position for each control cycle Ts, and outputs the generated movement command to the driver unit 200.

  The motion controller 400 generates trajectory information indicating the trajectory of the marks 5a and 5b during the exposure period of the cameras 302a and 302b based on the information from the moving mechanism 100. The information from the moving mechanism 100 is information indicating a moving amount of the moving mechanism 100, and is, for example, an encoder value indicating a driving amount (a rotation amount in this case) of the servomotors 120X, 120Y, 120θ.

  The image processing device 304 uses the trajectory information generated by the motion controller 400 to perform blur correction on images captured by the cameras 302a and 302b. Accordingly, the image processing device 304 can accurately specify the positions of the marks 5a and 5b included in the image on which the blur correction has been performed. As a result, the positioning accuracy of the work 2 can be improved.

§2 Specific Example Next, a specific example of the control system 1 according to the present embodiment will be described.

<2-1. Hardware configuration of image processing device>
FIG. 2 is a schematic diagram illustrating a hardware configuration of an image processing apparatus included in the control system according to the present embodiment. Referring to FIG. 2, image processing apparatus 304 typically has a structure according to a general-purpose computer architecture, and executes various programs described below by executing a program installed in advance by a processor. Implement image processing.

  More specifically, the image processing device 304 includes a processor 310 such as a CPU (Central Processing Unit) and an MPU (Micro-Processing Unit), a RAM (Random Access Memory) 312, a display controller 314, and a system controller 316. , An I / O (Input Output) controller 318, a hard disk 320, a camera interface 322, an input interface 324, a motion controller interface 326, a communication interface 328, and a memory card interface 330. These units are connected to each other so as to enable data communication with the system controller 316 at the center.

  The processor 310 exchanges programs (codes) and the like with the system controller 316 and executes them in a predetermined order, thereby realizing the intended arithmetic processing.

  The system controller 316 is connected to the processor 310, the RAM 312, the display controller 314, and the I / O controller 318 via buses, respectively, exchanges data with each unit, and performs processing of the entire image processing apparatus 304. Govern

  The RAM 312 is typically a volatile storage device such as a DRAM (Dynamic Random Access Memory), and includes programs read from the hard disk 320, images (image data) acquired by the cameras 302a and 302b, images , And the work data, etc. are retained.

  The display controller 314 is connected to the display unit 332, and outputs a signal for displaying various information to the display unit 332 according to an internal command from the system controller 316.

  The I / O controller 318 controls data exchange between a recording medium connected to the image processing apparatus 304 and an external device. More specifically, the I / O controller 318 is connected to the hard disk 320, camera interface 322, input interface 324, motion controller interface 326, communication interface 328, and memory card interface 330.

  The hard disk 320 is typically a nonvolatile magnetic storage device, and stores various setting values in addition to the control program 350 executed by the processor 310. The control program 350 installed on the hard disk 320 is distributed while being stored in a memory card 336 or the like. Instead of the hard disk 320, a semiconductor storage device such as a flash memory or an optical storage device such as a DVD-RAM (Digital Versatile Disk Random Access Memory) may be employed.

  The camera interface 322 corresponds to an input unit that receives image data generated by photographing a workpiece, and mediates data transmission between the processor 310 and the cameras 302a and 302b. The camera interface 322 includes image buffers 322a and 322b for temporarily storing image data from the cameras 302a and 302b, respectively. Although a single image buffer that can be shared between cameras may be provided for a plurality of cameras, it is preferable to independently arrange a plurality of cameras in association with each camera in order to speed up processing.

  The input interface 324 mediates data transmission between the processor 310 and input devices such as a keyboard 334, a mouse, a touch panel, and a dedicated console.

  Motion controller interface 326 mediates data transmission between processor 310 and motion controller 400.

  The communication interface 328 mediates data transmission between the processor 310 and another personal computer or server device (not shown). The communication interface 328 is typically made of Ethernet (registered trademark), USB (Universal Serial Bus), or the like.

  The memory card interface 330 mediates data transmission between the processor 310 and the memory card 336 as a recording medium. The memory card 336 distributes the control program 350 executed by the image processing device 304 in a stored state, and the memory card interface 330 reads the control program from the memory card 336. The memory card 336 includes a general-purpose semiconductor storage device such as SD (Secure Digital), a magnetic recording medium such as a flexible disk (Flexible Disk), and an optical recording medium such as a CD-ROM (Compact Disk Read Only Memory). Become. Alternatively, a program downloaded from a distribution server or the like may be installed in the image processing device 304 via the communication interface 328.

  When using a computer having a structure according to the general-purpose computer architecture as described above, an OS for providing basic functions of the computer in addition to an application for providing functions according to the present embodiment (Operating System) may be installed. In this case, the control program according to the present embodiment executes a process by calling necessary modules in a predetermined order and / or timing among program modules provided as a part of the OS. Is also good.

  Further, the control program according to the present embodiment may be provided by being incorporated in a part of another program. Even in such a case, the program itself does not include a module included in another program to be combined as described above, and the process is executed in cooperation with the other program. That is, the control program according to the present embodiment may be a form incorporated in such another program.

  Alternatively, part or all of the functions provided by executing the control program may be implemented as a dedicated hardware circuit.

<2-2. Hardware Configuration of Motion Controller>
FIG. 3 is a schematic diagram illustrating a hardware configuration of the motion controller 400 included in the control system according to the embodiment. The motion controller 400 includes a chipset 412, a processor 414, a nonvolatile memory 416, a main memory 418, a system clock 420, a memory card interface 422, a communication interface 428, an internal bus controller 430, and a field bus controller. 438. The chipset 412 and other components are respectively connected via various buses.

  The processor 414 and the chipset 412 typically have a configuration according to a general-purpose computer architecture. That is, the processor 414 interprets and executes the instruction codes sequentially supplied from the chipset 412 according to the internal clock. The chipset 412 exchanges internal data with various connected components and generates an instruction code necessary for the processor 414. The system clock 420 generates a system clock having a predetermined cycle and provides the system clock to the processor 414. The chip set 412 has a function of caching data and the like obtained as a result of execution of arithmetic processing by the processor 414.

  The motion controller 400 has a nonvolatile memory 416 and a main memory 418 as storage means. The non-volatile memory 416 non-volatilely stores data definition information, log information, and the like, in addition to the control program 440 executed by the processor 414. The control program 440 is distributed while being stored in the recording medium 424 or the like. The main memory 418 is a volatile storage area that holds various programs to be executed by the processor 414 and is also used as a working memory when executing various programs.

  The motion controller 400 has a communication interface 428 and an internal bus controller 430 as communication means. These communication circuits transmit and receive data.

  The communication interface 428 exchanges data with the image processing device 304. The internal bus controller 430 controls data exchange via the internal bus. More specifically, the internal bus controller 430 includes a buffer memory 436, a DMA (Dynamic Memory Access) control circuit 432, and an internal bus control circuit 434.

  The memory card interface 422 connects the recording medium 424 detachable to the motion controller 400 and the processor 414.

  The fieldbus controller 438 is a communication interface for connecting to a field network. The motion controller 400 is connected to the servo drivers 200X, 200Y, 200θ via the fieldbus controller 438. For the field network, for example, EtherCAT (registered trademark), EtherNet / IP (registered trademark), CompoNet (registered trademark), or the like is employed.

<2-3. Functional Configuration of Image Processing Device>
FIG. 4 is a block diagram showing a functional configuration of the control system 1 shown in FIG. Upon receiving the imaging trigger TR from the motion controller 400, the image processing device 304 controls the cameras 302a and 302b to perform an imaging operation, and obtains an image obtained by the imaging operation. As shown in FIG. 4, the image processing device 304 includes a correction unit 32 and a position identification unit 34.

<2-3-1. Correction section>
Using the trajectory information received from the motion controller 400, the correction unit 32 performs blur correction for removing blur due to image blur from images captured by the cameras 302a and 302b. The trajectory information is information indicating the movement trajectory of the marks 5a and 5b on the image during the exposure period.

  The correction unit 32 performs blur correction based on the movement trajectories of the marks 5a and 5b indicated by the trajectory information using a known technique described in, for example, JP-A-2006-129236 (Patent Document 2). .

  Specifically, the correction unit 32 creates a point spread function based on the movement locus of the mark 5a. The point spread function is a spatial filter for generating a blurred image due to image blur from an image not blurred due to image blur. The correction unit 32 obtains a correction function having an inverse characteristic of the point spread function, and can use the correction function to remove blur caused by image blurring from an image obtained by the imaging operation of the camera 302a. For example, the correction unit 32 can generate an image close to the state of the mark 5a at the exposure start time by removing the blur due to the image blur from the exposure start time. Similarly, the correction unit 32 performs shake correction on an image obtained by the imaging operation of the camera 302b based on the movement locus of the mark 5b.

<2-3-2. Position specifying part>
The position specifying unit 34 specifies the position of the mark 5a (hereinafter, referred to as “measurement position PSa”) included in the image captured by the camera 302a. The position specifying unit 34 specifies the position of the mark 5b (hereinafter, referred to as “measurement position PSb”) included in the image captured by the camera 302b. The position specifying unit 34 recognizes the marks 5a and 5b from the image using a known pattern recognition technique, and measures the coordinates of the recognized marks 5a and 5b. The coordinates of the marks 5a and 5b are indicated in the local coordinate system of the cameras 302a and 302b, respectively. The position specifying unit 34 outputs the coordinates of the measured positions PSa and PSb of the specified mark 5a to the motion controller 400.

  When the correcting unit 32 receives the trajectory information from the motion controller 400, the position specifying unit 34 searches for the marks 5a and 5b in the image on which the blur correction has been performed by the correcting unit 32, respectively. When the correcting unit 32 has not received the trajectory information from the motion controller 400, the position specifying unit 34 searches for the marks 5a and 5b from the images captured by the cameras 302a and 302b.

<2-4. Functional Configuration of Motion Controller>
Referring to FIG. 4, motion controller 400 includes a movement control unit 41, an instruction unit 45, and an estimation unit 46. The movement control unit 41, the instruction unit 45, and the estimation unit 46 are realized by the processor 414 illustrated in FIG.

  Further, as shown in FIG. 4, the moving mechanism 100 includes an encoder 130. The encoder 130 generates a pulse signal corresponding to the amount of movement of each of the servomotors 120X, 120Y, 120θ. Encoder 130 counts the number of pulses included in the pulse signal corresponding to servo motor 120X, and measures the translation amount of X stage 110X in the X direction from the initial position as encoder value PVmX. The count value of the number of pulses and the movement amount are related by a predetermined coefficient. Therefore, the encoder 130 can measure the movement amount by multiplying the count value of the number of pulses by the coefficient. Similarly, encoder 130 measures the translation amount of Y stage 110Y in the Y direction from the initial position as encoder value PVmY, and measures the rotational movement amount of θ stage 110θ from the initial position as encoder value PVmθ. The encoder 130 measures and outputs the encoder values PVmX, PVmY, PVmθ at the same cycle as the control cycle Ts.

<2-3-1. Movement control section>
The movement control unit 41 controls the movement mechanism 100 based on the measurement position PSa of the mark 5a and the measurement position PSb of the mark 5b specified by the image processing device 304 such that the position of the work 2 approaches the target position SP. .

  The target position SP of the work 2 is determined in advance for each production process. For example, the midpoint between the mark 5a and the mark 5b is located at a predetermined coordinate, and an angle between a straight line connecting the mark 5a and the mark 5b and the X axis or the Y axis is a predetermined angle. Such a position of the work 2 is set as the target position SP.

  Alternatively, the cameras 302a and 302b may image two target marks provided on the exposure mask 4 (see FIG. 1) together with the marks 5a and 5b of the work 2. In this case, the target position SP is set according to the positions of the two target marks included in the captured image. For example, the position of the work 2 where the mark 5a matches one of the two target marks and the mark 5b matches the other of the two target marks is set as the target position SP.

  The movement control unit 41 generates a movement command for bringing the position of the work 2 closer to the target position SP based on the measurement position PSa of the mark 5a and the measurement position PSb of the mark 5b specified by the image processing device 304.

  The measurement positions PSa and PSb are specified for each imaging cycle Tb. On the other hand, the movement command is generated for each control cycle Ts. As an example, the imaging cycle Tb varies according to the imaging situation and the like, and is, for example, about 60 ms. The control cycle Ts is fixed, for example, 1 ms. Thus, the imaging cycle Tb is longer than the control cycle Ts. Therefore, if the moving mechanism 100 is controlled using only the measurement positions PSa and PSb specified by the image processing device 304, overshoot and vibration are likely to occur. In order to avoid such overshoot and vibration, the movement control unit 41 determines the estimated position PV of the work 2 using the measured positions PSa and PSb and the encoder values PVmX, PVmY and PVmθ, and sets the estimated position PV as the estimated position PV. A control command is generated based on the control command.

  As shown in FIG. 4, the movement control unit 41 includes a position determination unit 42, a subtraction unit 43, and a calculation unit 44.

  The position determination unit 42 determines the estimated position PV of the workpiece 2 based on the measured position PSa of the mark 5a and the measured position PSb of the mark 5b specified by the image processing device 304 and the encoder values PVmX, PVmY, PVmθ in the control cycle Ts. Determined for each. Details of the method of determining the estimated position PV will be described in an operation example described later.

  The subtraction unit 43 outputs a deviation of the estimated position PV from the target position SP. The calculation unit 44 performs calculations (for example, P calculation, PID calculation, and the like) so that the deviation of the estimated position PV from the target position SP converges to 0, and calculates the movement commands MVX, MVY, and MVθ for each control cycle Ts. The movement command MVX is a movement command for the X stage 110X. The movement command MVY is a movement command for the Y stage 110Y. The movement command MVθ is a movement command for the θ stage 110θ. The calculation unit 44 outputs the calculated movement commands MVX, MVY, MVθ to the servo drivers 200X, 200Y, 200θ, respectively. The movement commands MVX, MVY, MVθ are, for example, position commands or speed commands.

<2-3-2. Instructor>
The instruction unit 45 outputs an operation instruction to the visual sensor 300. The instruction unit 45 outputs the imaging trigger TR to the image processing device 304 according to the imaging cycle Tb. Accordingly, the image processing apparatus 304 that has received the imaging trigger controls the cameras 302a and 302b to expose the image for the preset exposure time Ta. However, a certain delay time occurs from when the instruction unit 45 outputs the imaging trigger TR to when the cameras 302a and 302b start exposure. The delay time is confirmed in advance by an experiment or the like.

  Further, when the trajectory information described later is generated by the estimation unit 46, the instruction unit 45 instructs the image processing apparatus 304 to perform image blur correction using the trajectory information.

<2-3-3. Estimation part>
The estimating unit 46 estimates the movement trajectory of the marks 5a and 5b of the work 2 on the image during the exposure period of the cameras 302a and 302b based on the encoder values PVmX, PVmY and PVmθ. Hereinafter, a procedure of estimating the movement trajectory of the marks 5a and 5b on the image by the estimating unit 46 will be described.

  The estimating unit 46 calculates an exposure start time and an exposure end time at each imaging timing of the cameras 302a and 302b based on the time at which the imaging trigger TR is output from the instruction unit 45 (hereinafter, referred to as “trigger output time”). I do. Specifically, the estimating unit 46 calculates, as the exposure start time, a time at which the above-described delay time, which has been confirmed in advance at the trigger output time, has elapsed. Further, the estimating unit 46 calculates a time when the exposure time Ta has elapsed from the exposure start time as an exposure end time. In the present embodiment, the exposure time Ta is a time that is an integral multiple of the control cycle Ts.

  The estimating unit 46 specifies a plurality of times at the control cycle Ts interval during the exposure period of the k-th (k is an integer of 2 or more) imaging operation. Specifically, when the exposure time Ta is n times the control cycle Ts, the estimating unit 46 sets the exposure start time of the k-th (k is an integer of 2 or more) imaging operation (hereinafter, referred to as “time tk0”). , And (n + 1) times tki (i is an integer from 0 to n) from the exposure end time (hereinafter, referred to as “time tkn”). The time tk (i + 1) is a time when the control cycle Ts has elapsed from the time tki.

  The estimating unit 46 sets the time from the exposure start time (hereinafter, referred to as “time t (k−1)”) to the time tki (i is an integer of 0 to n) of the (k−1) th imaging operation. The moving amount Δpi = (ΔXi, ΔYi, Δθi) of the work 2 is estimated. ΔXi indicates the translation amount of the X stage 110X in the X direction. ΔYi indicates a translation amount of the Y stage 110Y in the Y direction. Δθi indicates the amount of rotational movement of the θ stage 110θ.

  FIG. 5 is a diagram illustrating a method of estimating the movement amount of the work 2 from time t (k−1) to time tki. As shown in FIG. 5, the estimation unit 46 estimates the movement amount Δpi based on the encoder value PVm (k-1) at time t (k-1) and the encoder value PVm (ki) at time tki. . Note that PVm (j) at time tj is represented by (PVmX (j), PVmY (j), PVmθ (j)). PVmX (j), PVmY (j), PVmθ (j) are encoder values PVmX, PVmY, PVmθ output from the encoder 130 at time tj, respectively. Alternatively, if the time tj is different from the detection time of the encoder 130, PVmX (j) is an interpolation value of the encoder value PVmX output from the encoder 130 at two detection times close to the time tj. Similarly, PVmY (j) is an interpolation value of the encoder value PVmY output from the encoder 130 at two detection times close to the time tj. PVmθ (j) is an interpolation value of the encoder value PVmθ output from the encoder 130 at two detection times close to the time tj. The method of calculating the interpolation value will be described later.

  The estimation unit 46 calculates the difference between the encoder value PVm (k-1) at time t (k-1) and the encoder value PVm (ki) at time tki from time t (k-1) 0 to time tki. It is estimated as the movement amount Δpi of the work 2. That is, the estimation unit 46 estimates the movement amount Δpi according to the following equation (1).

Δpi = (ΔXi, ΔYi, Δθi)
= (PVmX (ki) -PVmX (k-1), PVmY (ki) -PVmY (k-1), PVmθ (ki) -PVmθ (k-1) Equation (1)
The estimating unit 46 estimates movement amounts Δp0,..., Δpn for times tk0,.

  The estimating unit 46 predicts the predicted position PEai of the mark 5a at the time tki based on the measured position PSa of the mark 5a specified from the image obtained in the (k-1) th imaging operation and the movement amount Δpi. I do.

  The estimating unit 46 converts the coordinates of the measurement position PSa (the local coordinate system of the camera 302a) received from the image processing device 304 into the coordinates of the world coordinate system (the mechanical coordinate system of the moving mechanism 100). The estimating unit 46 obtains the XY coordinates (xsa, ysa) of the measurement position PSa in the world coordinate system using the first calibration data that associates the local coordinate system of the camera 302a with the world coordinate system.

  The estimating unit 46 obtains the coordinates of the predicted position PEai in the world coordinate system using a conversion formula from the measured position PSa to the predicted position PEai when the work 2 has moved by the movement amount Δpi = (ΔXi, ΔYi, Δθi). . The conversion equation is shown in the following equation (2).

Eai = Ti (Rai (Sa)) Equation (2)
In the equation (2), Sa represents (xsa, ysa) ^T which is a transposed matrix of the X coordinate xsa and the Y coordinate ysa of the measurement position PSa in the world coordinate system. Ra () indicates a conversion formula corresponding to the rotational movement, and is determined based on the distance between the rotational center of the θ stage 110θ and the measurement position PSa and the rotational movement amount Δθi of the θ stage 110θ. Ti () indicates a conversion equation corresponding to the translational movement, and is determined according to the movement amount ΔXi of the X stage 110X and the movement amount ΔYi of the Y stage 110Y. Eai indicates (xeai, yeai) ^T which is a transposed matrix of the X coordinate xeai and the Y coordinate yeai of the predicted position PEai in the world coordinate system.

  The estimating unit 46 uses the first calibration data to inversely transform the coordinates of the predicted position PEai in the world coordinate system into coordinates in the local coordinate system corresponding to the camera 302a. Thereby, the estimation unit 46 can obtain the coordinates of the predicted position PEai in the local coordinate system. In this way, the estimation unit 46 calculates the coordinates of the predicted positions PEa0,..., PEan for the times tk0,.

  In a similar manner, the estimation unit 46 predicts the predicted position PEbi of the mark 5b at the time tki. That is, the estimation unit 46 converts the coordinates of the measurement position PSb (the local coordinate system of the camera 302b) received from the image processing device 304 into the coordinates of the world coordinate system. The estimating unit 46 obtains the XY coordinates (xsb, ysb) of the measurement position PSb in the world coordinate system using the second calibration data that associates the local coordinate system of the camera 302b with the world coordinate system.

  The estimating unit 46 obtains the coordinates of the predicted position PEbi in the world coordinate system using a conversion formula from the measured position PSb to the predicted position PEbi when the work 2 moves by the moving amount Δpi = (ΔXi, ΔYi, Δθi). . The conversion equation is shown in the following equation (3).

Ebi = Ti (Rbi (Sb)) Equation (3)
In Expression (3), Sb represents (xsb, ysb) ^T which is a transposed matrix of the X coordinate xsb and the Y coordinate ysb of the measurement position PSb in the world coordinate system. Rbi () indicates a conversion formula corresponding to the rotational movement, and is determined based on the distance between the rotational center of the θ stage 110θ and the measurement position PSb and the rotational movement amount Δθi of the θ stage 110θ. Ti () indicates a conversion equation corresponding to the translational movement, and is determined according to the movement amount ΔXi of the X stage 110X and the movement amount ΔYi of the Y stage 110Y. Ebi indicates (xebi, yebi) ^T which is a transposed matrix of the X coordinate xebi and the Y coordinate yebi of the predicted position PEai in the world coordinate system.

  The estimating unit 46 converts the coordinates of the predicted position PEbi in the world coordinate system into coordinates in the local coordinate system corresponding to the camera 302b using the second calibration data. Thus, the estimation unit 46 can obtain the coordinates of the predicted position PEbi in the local coordinate system. Thus, the estimating unit 46 calculates the coordinates of the predicted positions PEb0,..., PEbn at times tk0,.

  , PEan indicate the coordinates of the predicted position of the mark 5a on the image at times tk0,..., Tkn. Therefore, the estimation unit 46 estimates a trajectory connecting the predicted positions PEa0,..., PEan in this order as a movement trajectory of the mark 5a on the image during the exposure period of the k-th camera 302a imaging operation. The estimating unit 46 generates a function indicating a trajectory connecting the predicted positions PEa0,..., PEan in this order as trajectory information of the mark 5a. The function may indicate a straight line connecting two consecutive predicted positions, or may indicate an approximate curve of the predicted positions PEa0,..., PEan.

  The coordinates of the predicted positions PEb0,..., PEbn (local coordinate system) indicate the coordinates of the predicted position of the mark 5b on the image at times tk0,. Therefore, the estimation unit 46 estimates a trajectory connecting the predicted positions PEb0,..., PEbn in this order as a movement trajectory of the mark 5b on the image during the exposure period of the k-th camera 302b imaging operation. The estimating unit 46 generates a function indicating a trajectory connecting the predicted positions PEb0,..., PEbn in this order as trajectory information of the mark 5b. The function may indicate a straight line connecting two consecutive predicted positions, or may indicate an approximate curve of the predicted positions PEb0,..., PEbn.

  When the exposure time Ta is 1 (= n) times the control cycle Ts, the estimation unit 46 sets the mark 5a at the exposure start time (time tk0) and the exposure end time (time tk1) of the k-th imaging operation. The predicted position PEa0 and the predicted position PEa1 are predicted respectively. In this case, the movement locus of the mark 5a on the image during the exposure period of the k-th imaging operation of the camera 302a is indicated by a vector having the predicted position PEa0 as a start point and the predicted position PEa1 as an end point. Similarly, the estimation unit 46 predicts the predicted position PEb0 and the predicted position PEb1 of the mark 5b at the exposure start time (time tk0) and the exposure end time (time tk1). The movement trajectory of the mark 5b on the image during the exposure period of the k-th imaging operation of the camera 302b is indicated by a vector having the predicted position PEb0 as a start point and the predicted position PEb1 as an end point.

§3 Operation example <3-1. Flow of positioning process of control system>
An example of the flow of the positioning process of the control system 1 will be described with reference to FIG. FIG. 6 is a flowchart illustrating an example of the flow of the positioning process of the control system.

  First, in step S1, the motion controller 400 initializes the estimated position PV and the encoder values PVmX, PVmY, PVmθ. Next, in step S <b> 2, when the work 2 is placed on the moving mechanism 100, the instruction unit 45 outputs an imaging trigger TR to the visual sensor 300. Thus, with the moving mechanism 100 stopped, the cameras 302a and 302b perform the first imaging operation on the workpiece 2.

  Next, in step S3, the image processing device 304 measures the measurement position PSa of the mark 5a included in the image obtained by the imaging operation of the camera 302a and the measurement position PSa of the mark 5b included in the image obtained by the imaging operation of the camera 302b. The position PSb is specified. Next, in step S4, the movement control unit 41 starts movement control of the movement mechanism 100.

  Next, in step S5, the movement control unit 41 determines whether the deviation of the estimated position PV from the target position SP is less than a threshold. The threshold value is predetermined according to the required positioning accuracy. If the deviation of the estimated position PV from the target position SP is smaller than the threshold (YES in step S5), the movement control unit 41 ends the movement control of the movement mechanism 100. Thus, the positioning process ends.

  If the deviation of the estimated position PV from the target position SP is not less than the threshold (NO in step S5), the processing in steps S6 to S10 is repeated for each imaging cycle Tb. Note that the movement control by the movement control unit 41 is also performed in parallel between steps S6 to S10.

  In step S6, the instruction unit 45 determines whether or not the current time is the output time of the imaging trigger TR. The output time of the imaging trigger TR is determined according to the imaging cycle Tb. If the current time is not the output time of the imaging trigger TR (NO in step S6), the process returns to step S5.

  If the current time is the output time of the imaging trigger TR (YES in step S6), the instruction unit 45 outputs the imaging trigger TR to the image processing device 304. Accordingly, in step S7, the image processing device 304 that has received the imaging trigger TR controls the cameras 302a and 302b to capture an image, and obtains images captured by the cameras 302a and 302b.

  Next, in step S8, the estimation unit 46 estimates the movement trajectories of the marks 5a and 5b on the images during the exposure periods of the cameras 302a and 302b, respectively, and generates trajectory information indicating the estimated movement trajectories. Then, the instruction unit 45 instructs the image processing device 304 to perform image blur correction using the generated trajectory information.

  Next, in step S9, the correction unit 32 of the image processing device 304 performs blur correction of the images captured by the cameras 302a and 302b using the trajectory information. In step S10, the position specifying unit 34 specifies the measurement positions PSa and PSb of the marks 5a and 5b included in the image subjected to the shake correction, respectively. After step S10, the process returns to step S5.

<3-2. Processing of movement control unit>
FIG. 7 is a flowchart illustrating an example of a flow of a control process of the moving mechanism by the movement control unit. First, in step S11, the position determination unit 42 acquires the latest measurement positions PSa and PSb specified by the image processing device 304. In step S12, the position determination unit 42 acquires the imaging time that is the basis for calculating the measurement positions PSa and Psb. For example, the position determining unit 42 may acquire the exposure start time calculated by the estimating unit 46 as the imaging time.

  Next, in step S13, the position determination unit 42 acquires the encoder values PVmX, PVmY, PVmθ at a plurality of times close to the imaging time.

  Next, in step S14, the position determination unit 42 calculates an interpolation value of the encoder value PVmX at a plurality of times, and sets the interpolation value as the encoder value PVmsX at the imaging time. Similarly, the position determination unit 42 calculates an interpolation value of the encoder value PVmY at a plurality of times, and sets the interpolation value as the encoder value PVmsY at the imaging time. The position determination unit 42 calculates an interpolation value of the encoder value PVmθ at a plurality of times, and sets the interpolation value as the encoder value PVmsθ at the imaging time.

  Specifically, the position determination unit 42 calculates an interpolation value as follows. The encoder value PVmX detected by the encoder 130 at the detection time t (j) is defined as an encoder value PVmX (j). The position determining unit 42 specifies two times close to the imaging time tvi, for example, a detection time t (q) and a detection time t (q + 1) sandwiching the imaging time tvi on the time axis.

  The position determination unit 42 acquires the encoder value PVmX (q) at the detection time t (q) and the encoder value PVmX (q + 1) at the detection time t (q + 1). The encoder values detected in the past are stored in the storage unit of the motion controller 400 (for example, the nonvolatile memory 416 or the main memory 418 (see FIG. 3)).

  The position determination unit 42 calculates an encoder value PVmsX (vi) at the imaging time tvi using an interpolation value between the encoder value PVmX (q) and the encoder value PVmX (q + 1). Specifically, the position determination unit 42 calculates the encoder value PVmsX (vi) at the imaging time tvi using the following equation (4).

PVmsX (vi) = PVmX (q) + Kk * (PVmX (q + 1) -PVmX (q)) (4)
Here, Kk is an interpolation coefficient. When the control cycle is Ts, the transmission delay time of the encoder value PVmX is Ted, and the transmission delay time of the imaging trigger TR is Tsd, and Ts−Ted ≦ Tsd <2Ts−Ted, the interpolation coefficient Kk is expressed by the following equation. It is calculated using (5).

Kk = {Tsd- (Ts-Ted)} / Ts (5)
By using such a method of calculating the interpolation value, the encoder value PVmsX (vi) at the imaging time tvi can be calculated with high accuracy. Similarly, encoder values PVmsY (vi) and PVmsθ (vi) at the imaging time tvi are calculated. If the imaging time matches the calculation time of the encoder value, the encoder value may be used as it is.

  Next, in step S15, the position determination unit 42 estimates using the latest measurement positions PSa and PSb, the encoder values PVmX, PVmY, and PVmθ after the imaging time, and the encoder values PVmsX, PVmsY, and PVmsθ at the imaging time. The position PV is calculated.

  Specifically, the measurement position PSa is translated by (PVmX−PVmsX) in the X direction, translated by (PVmY−PVmsY) in the Y direction, and rotationally moved by (PVmθ−PVmsθ) in the Y direction. The position PSwa after the input and the affine transformation is calculated. Similarly, the measurement position PSb is input to the affine transformation equation, and the position PSwb after the affine transformation is calculated. The position determination unit 42 determines the position of the work 2 when the mark 5a is located at the position PSwa and the mark 5b is located at the position PSwb as the estimated position PV. That is, the position determination unit 42 determines the coordinates of the midpoint between the positions PSwa and PSwb, and the angle between the straight line connecting the positions PSwa and PSwb and the X axis or the Y axis, as information for specifying the estimated position PV. Is calculated as

  Next, in step S16, the calculation unit 44 generates the movement commands MVX, MVY, MVθ by, for example, P calculation based on the deviation of the estimated position PV from the target position SP, and sends it to the servo drivers 200X, 200Y, 200θ, respectively. Output.

  By executing such processing, the motion controller 400 determines the estimated position PV using the high-precision measurement positions PSa and PSb at the time when the high-precision measurement positions PSa and PSb are input by the image processing. It is possible to calculate and realize high-accuracy positioning control. Here, the time interval at which the measurement positions PSa and PSb are input is the imaging period Tb, which is longer than the control period Ts at which the encoder values PVmX, PVmY, and PVmθ are input. However, between the input times of the adjacent measurement positions PSa and PSb on the time axis, the position determination unit 42 determines the estimated position PV for each input time of the encoder values PVmX, PVmY, and PVmθ having a short input cycle. The movement of the movement mechanism 100 is controlled. This enables high-accuracy and short-period positioning control. Further, the position determination unit 42 performs a process using the above-described simple four arithmetic operations. Therefore, high-speed and high-accuracy positioning by a simple configuration and processing can be realized.

<3-3. Action / Effect>
As described above, the control system 1 includes the image processing device 304 and the movement control unit 41. The image processing device 304 acquires an image obtained by performing an imaging operation on the work 2 in each imaging cycle, and specifies the measurement positions PSa and PSb of the marks 5a and 5b of the work 2 based on the obtained image. The movement control unit 41 controls the movement mechanism 100 based on the measurement positions PSa and PSb specified by the image processing device 304 so that the position of the work 2 approaches the target position SP. Further, the control system 1 includes an estimation unit 46. The estimating unit 46 performs the k-th measurement based on the measurement positions PSa and PSb specified based on the image obtained by the (k−1) -th imaging operation and the reference information including the information from the moving mechanism 100. The movement trajectory of the marks 5a and 5b during the exposure period in the imaging operation is estimated. The image processing device 304 performs shake correction on an image obtained by the k-th imaging operation based on the movement trajectories of the marks 5a and 5b.

  The information from the moving mechanism 100 is information directly indicating the movement of the moving mechanism 100. Therefore, the trajectory information accurately indicates the movement trajectory of the marks 5a and 5b during the exposure period of the cameras 302a and 302b. Accordingly, the image processing device 304 can accurately perform the image blur correction, and can accurately specify the positions of the marks 5a and 5b. As a result, the workpiece 2 can be positioned with high accuracy.

  The information from the moving mechanism 100 is encoder values PVmX, PVmY, PVmθ indicating the rotation amounts of the servo motors 120X, 120Y, 120θ driven to move the work 2 respectively. The encoder values PVmX, PVmY, PVmθ during the exposure period of the cameras 302a, 302b directly indicate the amount of movement of the moving mechanism 100. Therefore, the trajectory information generated by the estimation unit 46 accurately indicates the trajectories of the marks 5a and 5b during the exposure period.

§4 Modification <4-1. Modification 1>
The estimating unit 46 acquires the movement commands MVX, MVY, MVθ generated by the movement control unit 41 after the (k−1) -th imaging operation as reference information, and obtains a trajectory based on the movement commands MVX, MVY, MVθ. Information may be generated.

  The moving mechanism 100 on which the work 2 is placed moves according to the movement commands MVX, MVY, MVθ. Therefore, from the exposure start time of the (k-1) th imaging operation (time t (k-1)) to the time tki (i is an integer of 0 to n) during the exposure period of the kth imaging operation. The translational movement amount ΔXi of the workpiece 2 in the X direction during the period is estimated from the movement command MVX generated during the period. Similarly, the movement amount ΔYi of the workpiece 2 in the Y direction during the period from the time t (k−1) to the time tki is estimated from the movement command MVY generated during the period. The rotational movement amount Δθi of the work 2 during the period from the time t (k−1) to the time tki is estimated from the movement command MVθ generated during the period.

  For example, assuming that the movement command MVX is a speed command and the value of the movement command MVX at time t is MVX (t), the estimating unit 46 calculates the time from time t (k−1) to time tki according to the following equation (6) Is calculated in the X direction during the period of. MVX (t) is constant during the control cycle Ts.

  Similarly, the estimating unit 46 calculates the translational movement amount ΔYi in the Y direction and the rotational movement amount Δθi in the period from time t (k−1) to time tki in accordance with the following equations (7) and (8). calculate. In equation (7), MVY (t) indicates the value of the movement command MVY at time t. In equation (8), MVθ (t) indicates the value of the movement command MVθ at time t. The movement commands MVY and MVθ are speed commands, and MVY (t) and MVθ (t) are constant during the control cycle Ts.

  The estimation unit 46 may estimate the movement trajectory using ΔXi, ΔYi, and Δθi calculated as described above.

  According to the control system according to Modification 1, the estimation unit 46 can generate the trajectory information at the start time of the control cycle Ts that overlaps with the exposure end time. That is, the estimation unit 46 can generate the trajectory information before the exposure end time. Therefore, the correction unit 32 of the image processing device 304 can immediately perform blur correction on images captured by the cameras 302a and 302b. Thereby, the time from when the imaging trigger TR is output to when the measurement positions PSa and PSb are specified can be reduced.

<4-2. Modification 2>
The estimating unit 46 sets the time tki (i is an integer of 0 to n) during the exposure period of the k-th imaging operation to the first half (time tki (i is an integer of 0 to s (s is 1 or more and less than n)). The estimation unit 46 may determine the exposure start time (time t (k-1) of the (k-1) -th imaging operation at the time tki (i is an integer of s + 1 to n). )) To the first half of time tki (i is an integer of 0 to s)) to calculate the movement amount Δpi of the work 2 using the encoder value.The estimating unit 46 calculates the time t (k−1). Is calculated using the movement commands MVX, MVY, and MVθ in the same manner as in the first modification, from the time tki to the latter half of the time tki (i is an integer of s + 1 to n).

  As a result, the movement trajectory indicated by the trajectory information is closer to the actual trajectories of the marks 5a and 5b than in the control system according to the first modification. As a result, the image blur-corrected by the correction unit 32 of the image processing device 304 becomes clearer, and positioning accuracy can be improved. Further, similarly to the first modification, the estimating unit 46 can generate the trajectory information before the exposure end time. Therefore, the time from when the imaging trigger TR is output to when the measurement positions PSa and PSb are specified can be reduced.

<4-3. Modification 3>
In the above description, the movement control unit 41 generates the movement commands MVX, MVY, MVθ so that the estimated position PV approaches the target position SP. However, the target trajectory of the moving mechanism 100 for moving the workpiece 2 more smoothly may be determined, and the moving mechanism 100 may be controlled according to the determined target trajectory. In this case, the work 2 moves according to the determined target trajectory. Therefore, before outputting the imaging trigger TR, the control system can generate trajectory information indicating the movement trajectory of the marks 5a and 5b during the exposure period based on the target trajectory. Thus, similarly to the first and second modifications, the time from when the imaging trigger TR is output to when the measurement positions PSa and PSb are specified can be reduced. Further, the motion controller can output the imaging trigger TR and the trajectory information to the image processing device 304 at the same time. As a result, the communication sequence between the image processing device 304 and the motion controller 400 can be simplified.

<4-3-1. Functional configuration of control system>
FIG. 8 is a block diagram illustrating a functional configuration of a control system 1A according to the third modification. As shown in FIG. 8, the control system 1A is different from the control system 1 shown in FIG. 4 in that a motion controller 400A is provided instead of the motion controller 400. The motion controller 400A is different from the motion controller 400 in that the motion controller 400A includes a movement control unit 41A and an estimation unit 46A instead of the movement control unit 41 and the estimation unit 46, respectively. The movement control unit 41A is different from the movement control unit 41 in that a target trajectory determination unit 47 and a calculation unit 44A are provided instead of the position determination unit 42, the subtraction unit 43, and the calculation unit 44.

<4-3-1-1. Target trajectory determination unit>
The target trajectory determination unit 47 determines a target trajectory of the moving mechanism 100 based on the measurement positions PSa and PSb specified by the image processing device 304 and the target position SP. Specifically, the target trajectory is determined as follows.

  The target trajectory determination unit 47 specifies the actual position of the work 2 based on the measurement positions PSa and PSb specified by the image processing device 304. The target trajectory determination unit 47 calculates a required moving distance Lo of the moving mechanism 100 for moving the specified work 2 from the actual position to the target position SP. The target trajectory determination unit 47 divides the required moving distance Lo of the moving mechanism 100 into the required moving distance LX in the X-axis direction, the required moving distance LY in the Y-axis direction, and the required moving distance Lθ in the rotation direction.

  The target trajectory determining unit 47 determines a target trajectory TGX of the X stage 110X based on the required moving distance LX and the target position SPX of the X stage 110X. The target trajectory determination unit 47 determines a target trajectory TGY of the Y stage 110Y based on the required moving distance LY and the target position SPY of the Y stage 110Y. The target trajectory determination unit 47 determines the target trajectory TGθ of the θ stage 110θ based on the required moving distance Lθ and the target position SPX of the θ stage 110θ.

  FIG. 9 is a diagram illustrating an example of the target trajectories TGX, TGY, and TGθ. The target trajectory TGX is determined so that the function LX (t) indicating the time change of the deviation between the position of the target trajectory TGX at time t and the target position SPX is a fifth-order or higher-order function. The function LX (t) is a function in which the required moving distance LX and the time t are at least explanatory variables. Similarly, the target trajectory TGY is determined such that the function LY (t) indicating the time change of the deviation between the position of the target trajectory TGY and the target position SPY at the time t is a fifth-order or higher-order function. The target trajectory TGθ is determined so that the function Lθ (t) indicating the time change of the deviation between the position of the target trajectory TGθ at time t and the target position SPθ is a multidimensional function of order 5 or higher.

  The target trajectory determination unit 47 calculates functions LX (t), LY (t), and Lθ (t) indicating the time change of the deviation between the determined target trajectories TGX, TGY, TGθ and the target positions SPX, SPY, SPθ, respectively. Output to the unit 44A. The functions LX (t), LY (t), Lθ (t) are information indicating the target trajectories TGX, TGY, TGθ, respectively.

  The target trajectory determination unit 47 updates the functions LX (t), LY (t), and Lθ (t) according to the latest actual position of the work 2 specified by the image processing device 304 for each imaging cycle Tb.

<4-3-1-2. Arithmetic unit>
The calculation unit 44A calculates the movement commands MVX, MVY, MVθ for each control cycle Ts based on the functions LX (t), LY (t), Lθ (t). Specifically, the arithmetic unit 44A calculates the deviation of the position of the current time t on the target trajectory TGX from the target position SPX by substituting the current time t into the function LX (t). Arithmetic unit 44A calculates movement command MVX by performing, for example, P operation on the calculated deviation. The calculation unit 44A calculates the movement commands MVY and MVθ by the same method.

<4-3-1-3. Estimation part>
The estimating unit 46A acquires information indicating the target trajectories TGX, TGY, TGθ as reference information. Based on the target trajectories TGX, TGY, and TGθ, the estimating unit 46A estimates the time during the exposure period of the k-th imaging operation from the exposure start time of the (k-1) -th imaging operation (time t (k-1)). The movement amount Δpi of the work 2 during a period up to tki (i is an integer from 0 to n) is calculated. Specifically, as shown in FIG. 9, the estimating unit 46A calculates the movement amount from the time t (k-1) to the time tki on the target trajectory TGX as the translation movement amount ΔXi of the work 2 in the X direction. I do. Similarly, the estimating unit 46A calculates the movement amount from the time t (k-1) to the time tki on the target trajectory TGY as the translation movement amount ΔYi of the work 2 in the Y direction. The estimating unit 46A calculates the movement amount from the time t (k-1) to the time tki on the target trajectory TGθ as the rotation movement amount Δθi of the work 2.

  The estimation unit 46A may estimate the movement trajectory using ΔXi, ΔYi, and Δθi calculated as described above.

<4-3-2. Processing of target trajectory determination unit>
FIG. 10 is a flowchart illustrating a flow of processing in the target trajectory determination unit. The process shown in FIG. 10 is performed for each imaging cycle Tb.

  In step S21, the target trajectory determining unit 47 acquires the measurement positions PSa and PSb of the marks 5a and 5b from the image processing device 304, respectively.

  In step S22, the target trajectory determination unit 47 specifies the actual position of the work 2 based on the measurement positions PSa and PSb of the marks 5a and 5b. Then, the target trajectory determination unit 47 calculates the required movement distance LX in the X-axis direction, the required movement distance LY in the Y-axis direction, and the required movement distance in the rotation direction for moving the specified work 2 from the actual position to the target position SP. Lθ is calculated.

  In step S23, the target trajectory determination unit 47 corrects the required movement distances LX, LY, Lθ. The correction is performed in order to suppress the slip of the work 2 on the moving mechanism 100 and the residual vibration after the positioning of the moving mechanism 100. If the slip or residual vibration of the work 2 is so small as to be negligible, step S23 may be omitted.

  The correction method in step S23 is as follows. The target trajectory determination unit 47 calculates, as an error, a position deviation En (t) between the actual position of the moving mechanism 100 determined based on the encoder value from the encoder 130 and the current time position on the target trajectory determined last time. . The position deviation En (t) is decomposed into a component EnX (t) in the X-axis direction, a component EnY (t) in the Y-axis direction, and a component Enθ (t) in the rotation direction.

  The target trajectory determination unit 47 calculates the required moving distance LXm after correction by correcting the necessary moving distance LX with the position deviation EnX (t). Similarly, the target trajectory determination unit 47 calculates the corrected required moving distance LYm by correcting the required moving distance LY with the position deviation EnY (t). The target trajectory determining unit 47 calculates the corrected required moving distance Lθm by correcting the required moving distance Lθ with the position deviation Enθ (t).

  In step S24, the target trajectory determination unit 47 initializes the measurement time t to zero. In step S25, the target trajectory determination unit 47 calculates the trajectory time T. The trajectory time T represents the time required to move the moving mechanism 100 from the start point to the end point of the target trajectories TGX, TGY, TGθ. As an example, the trajectory time T is calculated based on the following equation (9).

T = max {f (Amax), Tmin} (9)
“Amax” shown in the above equation (9) represents the maximum acceleration. “F ()” is a function for calculating the trajectory time required when the necessary moving distance is moved to the moving mechanism 100 at the maximum acceleration Amax. “Tmin” is a predetermined minimum trajectory time. “Max (α, β)” is a function for obtaining the maximum value from the numerical values α and β.

  According to the above equation (9), the orbit time T is determined so as not to be less than the minimum orbit time Tmin. If the minimum trajectory time Tmin is not provided, the moving mechanism 100 immediately reaches the target position when the required moving distance L is very small, so that the time until the next imaging timing is wasted. Become. However, by providing the minimum trajectory time Tmin, when the required movement distance Lo is extremely small, the moving mechanism 100 moves at an acceleration lower than the maximum acceleration, and the moving mechanism 100 moves smoothly. Can be. As an example, the minimum trajectory time Tmin is calculated by multiplying the average imaging interval by a fixed ratio (for example, 50%).

  In step S26, the target trajectory determination unit 47 sets the target trajectories TGX, TGY, and TGθ on the basis of the necessary movement distances LXm, LYm, and Lθm obtained in step S23 and the trajectory time T calculated in step S25. decide.

  Specifically, the target trajectory determining unit 47 sets the target trajectory such that the function LX (t) indicating the time change of the deviation between the position of the target trajectory TGX and the target position SPX is represented by the following equation (10). Determine TGX. The target trajectory determination unit 47 determines the target trajectory TGY such that a function LY (t) indicating the time change of the deviation between the position of the target trajectory TGY and the target position SPY is represented by the following equation (11). The target trajectory determining unit 47 determines the target trajectory TGX such that a function Lθ (t) indicating the time change of the deviation between the position of the target trajectory TGθ and the target position SPθ is represented by the following equation (12).

LX (t) = LXm * [1- (t / T) ³ {10-15 (t / T) +6 (t / T) ² }] (10)
LY (t) = LYm * [1- (t / T) ³ {10-15 (t / T) +6 (t / T) ² }] (11)
Lθ (t) = Lθm * [1− (t / T) ³ {10−15 (t / T) +6 (t / T) ² }} (12)
As shown in Expressions (10) to (12), the functions LX (t), LY (t), and Lθ (t) use the necessary movement distances LXm, LYm, Lθm and time t at least as explanatory variables, and This is a multi-dimensional function using deviations from the positions SpX, SPY, and SPθ as objective variables.

  The functions LX (t), LY (t) and Lθ (t) shown in the above equations (10) to (12) are quintic functions, but the functions LX (t), LY (t) and Lθ (T) may be a sixth-order or higher order function.

  When the maximum acceleration Amax is given, the trajectory time T is calculated by the following equations (13) to (15). In equation (10), Lm is LXm, LYm, Lθm.

f (Amax) = C ₁ * Lm / Amax (13)
^{_{C 1 = 60C 2 (2C 2}} 2 -3C 2 +1) ··· (14)
^{_{C 2 = 0.5-3 1/2 / 6 ···}} (15)
In this manner, every time the measurement positions PSa and PSb are specified, the target trajectory determination unit 47 sets the functions LX indicating the target trajectories TGX, TGY, and TGθ until the moving mechanism 100 reaches the target position SP. (T), LY (t), and Lθ (t) are collectively calculated.

<4-4. Modification 4>
When the work 2 is moving at a constant speed, the time required for the blur correction processing in the correction unit 32 of the image processing device 304 is reduced. Therefore, it is preferable that the movement control unit 41 use the movement commands MVX, MVY, and MVθ generated during the exposure periods of the cameras 302a and 302b as constant speed commands.

<4-5. Modification 5>
In general, the time required for processing is shorter in blur correction that removes only blur due to translational shake than in blur correction that removes blur due to both translation and rotation. Therefore, it is preferable that the movement control unit 41 controls the movement mechanism 100 so as not to rotate during the exposure periods of the cameras 302a and 302b. That is, the movement control unit 41 stops the θ stage 110θ and the servomotor 120θ, which are the rotating mechanisms of the moving mechanism 100. Specifically, when the movement command MVθ is a position command, the movement control unit 41 sets the movement command MVθ generated during the exposure period to a constant value. Alternatively, when the movement command MVθ is a speed command, the movement control unit 41 sets the movement command MVθ generated during the exposure period to 0.

  By combining Modification 4 and Modification 5, the moving mechanism 100 linearly moves at a constant speed during the exposure period of the cameras 302a and 302b. Thereby, the time required for the blur correction processing by the correction unit 32 can be further reduced. In this case, the trajectory information indicating the movement trajectory of the mark 5a during the exposure period is represented by a movement vector whose start point is the position of the mark 5a at the exposure start time and whose end point is the position of the mark 5a at the exposure end time. Similarly, the trajectory information indicating the movement trajectory of the mark 5b during the exposure period is indicated by a movement vector whose start point is the position of the mark 5b at the exposure start time and whose end point is the position of the mark 5b at the exposure end time. Therefore, the time required for the generation of the trajectory information by the estimation unit 46 can also be shortened.

<4-6. Other variations>
In the above description, the moving mechanism 100 is an XYθ table. However, the moving mechanism 100 may be a θXY table, a UVW table, an XY table, an XYZ table, an articulated robot, or the like.

  In the above description, the work 2 is positioned using the marks 5a and 5b provided on the work 2 as characteristic portions of the work 2. However, the work 2 may be positioned using another part of the work 2 as a characteristic part of the work 2. For example, a screw or a screw hole provided in the work 2 may be used as a characteristic portion of the work 2. Alternatively, a corner of the work 2 may be used as a characteristic portion of the work 2.

  In the above description, the estimation units 46 and 46A are included in the motion controllers 400 and 400A, respectively. However, the estimation units 46 and 46A may be included in the image processing device 304. In this case, the estimation unit 46 included in the image processing device 304 acquires encoder values PVmX, PVmY, and PVmθ, which are information from the moving mechanism 100, and generates trajectory information. Alternatively, the estimation unit 46 included in the image processing device 304 acquires the movement commands MVX, MVY, and MVθ, which are information generated by the movement control unit 41, and generates trajectory information. Alternatively, the estimating unit 46A included in the image processing device 304 uses the information (functions LX (t), LY (t), Lθ (t) indicating the target trajectories TGX, TGY, TGθ generated by the movement control unit 41A. Obtain and generate trajectory information.

  The servomotors 120X, 120Y, 120θ may be linear motors instead of rotary motors. Further, the encoder 130 may be a linear encoder. In this case, the estimation unit 46 may acquire information indicating the position of the linear axis as information indicating the drive amount of the motor, and estimate the movement amount Δp based on the acquired information.

§5 Supplement As described above, the present embodiment and modifications include the following disclosure.

(Configuration 1)
A control system (1, 1A) for controlling a moving mechanism (100) for moving an object (2) to position the object (2),
An image for acquiring an image obtained by an imaging operation of the object (2) for each imaging cycle, and specifying the position of a characteristic portion (5a, 5b) of the object (2) based on the acquired image A processing device (304);
For controlling the moving mechanism (100) such that the position of the object (2) approaches a target position based on the position of the characteristic portion (5a, 5b) specified by the image processing device (304). A movement control unit (41, 41A);
The position of the characteristic portion specified by the image processing device (304) based on the image obtained by the first imaging operation, information from the moving mechanism (100), and the movement control units (41, 41A) The movement trajectory of the characteristic portion (5a, 5b) during the exposure period in the second imaging operation subsequent to the first imaging operation, based on the reference information including at least one of the information generated by the first and second imaging operations. And an estimating unit (46, 46A) for
The control system (1, 1A), wherein the image processing device (304) performs shake correction of an image obtained by the second imaging operation based on the movement trajectory.

(Configuration 2)
The moving mechanism (100) includes a motor (120X, 120Y, 120θ) driven to move the object (2),
The control system (1) according to Configuration 1, wherein the reference information includes information indicating a driving amount of the motor (120X, 120Y, 120θ) from the first imaging operation.

(Configuration 3)
The movement control unit (41) generates a movement command for the movement mechanism (100) for each control cycle,
The control system (1) according to configuration 1, wherein the reference information includes information indicating a movement command generated by the movement control unit (41) after the first imaging operation.

(Configuration 4)
The movement control unit (41A) determines a target trajectory of the moving mechanism (100) based on a deviation of the position specified by the image processing device (304) from the target position, and moves according to the determined target trajectory. Controlling the moving mechanism (100) so that
The control system (1A) according to Configuration 1, wherein the reference information includes information indicating the target trajectory.

(Configuration 5)
The movement control unit (41, 41A)
Generating a speed command for the moving mechanism (100) for each control cycle;
The control system (1, 1A) according to any one of Configurations 1 to 4, wherein a constant speed command is generated in the control cycle overlapping the exposure period.

(Configuration 6)
The moving mechanism (100) includes a first mechanism (110X, 110Y, 120X, 120Y) that translates and a second mechanism (110θ, 120θ) that rotates.
The control system (1, 1A) according to any of Configurations 1 to 5, wherein the movement control unit (41, 41A) stops the second mechanism (110θ, 120θ) during the exposure period.

(Configuration 7)
A moving mechanism (100) for moving the object (2), and an image obtained by an imaging operation of the object (2) in each imaging cycle are acquired, and based on the acquired image, a characteristic portion of the object ( A control device for controlling the position of the object (2) by controlling an image processing device (304) for specifying the position of 5a, 5b);
For controlling the moving mechanism (100) such that the position of the object (2) approaches a target position based on the position of the characteristic portion (5a, 5b) specified by the image processing device (304). A movement control unit (41, 41A);
The position of the characteristic portion specified by the image processing device (304) based on the image obtained by the first imaging operation, information from the moving mechanism (100), and the movement control units (41, 41A) The movement trajectory of the characteristic portion (5a, 5b) during the exposure period in the second imaging operation subsequent to the first imaging operation, based on the reference information including at least one of the information generated by the first and second imaging operations. Estimating units (46, 46A) for
A control device comprising: an instruction unit (45) for instructing the image processing device (304) that performs blur correction of an image obtained by the second imaging operation based on the movement trajectory.

(Configuration 7 ')
A control device (400, 400A) used in the control system (1, 1A) according to any one of the configurations 1 to 6,
Said movement control unit (41, 41A);
The estimation unit (46, 46A);
A control unit (400, 400A) comprising: an instruction unit (45) for instructing the image processing device (304) that performs shake correction of an image obtained by the second imaging operation based on the movement trajectory. .

(Configuration 8)
In accordance with an instruction from a control device (400, 400A) that controls a moving mechanism (100) for moving the object (2), an image obtained by an imaging operation of the object (2) in each imaging cycle is acquired. An image processing device (304) for specifying a position of a characteristic portion (5a, 5b) of the object based on the acquired image,
The control device (400, 400A) controls the position of the object (2) based on the position of the characteristic portion (5a, 5b) specified by the image processing device (304) so as to approach the target position. Controlling the moving mechanism (100),
The image processing device (304) includes:
The position of the characteristic portion specified by the image processing device (304) based on the image obtained by the first imaging operation, information from the moving mechanism (100), and the control device (400, 400A) For estimating a movement locus of the characteristic portion (5a, 5b) during an exposure period in a second imaging operation subsequent to the first imaging operation, based on reference information including at least one of the generated information. Estimation unit (46, 46A),
An image processing device (304), comprising: a correction unit (32) for performing shake correction of an image obtained by the second imaging operation based on the movement trajectory.

(Configuration 8 ')
An image processing device (304) used in the control system (1, 1A) according to any one of the configurations 1 to 6,
The estimation unit (46, 46A);
An image processing device (304), comprising: a correction unit (32) for performing shake correction of an image obtained by the second imaging operation based on the movement trajectory.

(Configuration 9)
A program (440) for supporting a control system (1, 1A) for controlling a moving mechanism (100) for moving the object (2) and positioning the object (2),
The control system (1, 1A) acquires an image obtained by an imaging operation of the object (2) in each imaging cycle, and, based on the acquired image, a characteristic portion (5a, 5b) of the object. An image processing device (304) for specifying a position,
On the computer,
Controlling the moving mechanism (100) such that the position of the object (2) approaches a target position based on the position of the characteristic portion (5a, 5b) specified by the image processing device (304); ,
The position of the characteristic portion specified by the image processing device (304) based on the image obtained by the first imaging operation, information from the moving mechanism (100), and information generated by the controlling step Estimating a movement locus of the characteristic portion (5a, 5b) during an exposure period in a second imaging operation subsequent to the first imaging operation, based on reference information including at least one of the following:
Instructing the image processing device (304) to perform shake correction of an image obtained by the second imaging operation based on the movement trajectory.

(Configuration 9 ')
A program for supporting the control system (1, 1A) according to any one of the configurations 1 to 6,
On the computer,
Controlling the moving mechanism (100) based on the position specified by the image processing device (304) such that the position of the object (2) approaches a target position;
The position of the characteristic portion specified by the image processing device (304) based on the image obtained by the first imaging operation, information from the moving mechanism (100), and information generated by the controlling step Estimating a movement locus of the characteristic portion (5a, 5b) during an exposure period in a second imaging operation subsequent to the first imaging operation, based on reference information including at least one of the following:
Instructing the image processing device (304) that performs blur correction of an image obtained by the second imaging operation based on the movement trajectory.

  The embodiments disclosed this time should be considered in all respects as illustrative and not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims. Further, it is intended that the inventions described in the embodiments and the respective modified examples are implemented alone or in combination as much as possible.

  1, 1A control system, 2 work, 4 exposure mask, 5a, 5b mark, 32 correction unit, 34 position identification unit, 41, 41A movement control unit, 42 position determination unit, 43 subtraction unit, 44, 44A calculation unit, 45 Instruction unit, 46, 46A estimation unit, 47 target trajectory determination unit, 100 moving mechanism, 110XX stage, 110YY stage, 110θ stage, 120X, 120Y, 120θ servomotor, 130 encoder, 200 driver unit, 200X, 200Y, 200θ Servo driver, 300 visual sensor, 302a, 302b camera, 304 image processing device, 310,414 processor, 312 RAM, 314 display controller, 316 system controller, 318 I / O controller, 320 hard disk, 32 Camera interface, 322a, 322b image buffer, 324 input interface, 326 motion controller interface, 328, 428 communication interface, 330, 422 memory card interface, 332 display unit, 334 keyboard, 336 memory card, 350, 440 control program, 400, 400A motion controller, 412 chipset, 416 non-volatile memory, 418 main memory, 420 system clock, 424 recording medium, 430 internal bus controller, 432 DMA control circuit, 434 internal bus control circuit, 436 buffer memory, 438 field bus controller.

Claims (9)

A control system that controls a moving mechanism that moves the object, and positions the object,
An image processing apparatus for acquiring an image obtained by an imaging operation for each imaging cycle for the target object, and identifying a position of a characteristic portion of the target object based on the obtained image,
A movement control unit for controlling the movement mechanism such that the position of the target object approaches a target position, based on the position of the characteristic portion specified by the image processing device,
A reference including a position of the characteristic portion specified by the image processing device based on an image obtained by the first imaging operation, and at least one of information from the moving mechanism and information generated by the movement control unit. And an estimating unit for estimating a movement trajectory of the characteristic portion during an exposure period in a second imaging operation subsequent to the first imaging operation, based on the information.
The control system, wherein the image processing device performs shake correction of an image obtained by the second imaging operation based on the movement trajectory. The moving mechanism includes a motor driven to move the object,
The control system according to claim 1, wherein the reference information includes information indicating a drive amount of the motor from the first imaging operation. The movement control unit generates a movement command for the movement mechanism for each control cycle,
The control system according to claim 1, wherein the reference information includes information indicating a movement command generated by the movement control unit after the first imaging operation. The movement control unit determines a target trajectory of the moving mechanism based on a deviation of the position specified by the image processing device from the target position, and controls the moving mechanism to move according to the determined target trajectory. ,
The control system according to claim 1, wherein the reference information includes information indicating the target trajectory. The movement control unit includes:
Generating a speed command for the moving mechanism for each control cycle;
The control system according to any one of claims 1 to 4, wherein a constant speed command is generated in the control cycle overlapping the exposure period. The moving mechanism includes a first mechanism that translates and a second mechanism that rotates.
The control system according to claim 1, wherein the movement control unit stops the second mechanism during the exposure period. A moving mechanism for moving the object, and an image processing apparatus for acquiring an image obtained by an imaging operation of the object for each imaging cycle and identifying a position of a characteristic portion of the object based on the acquired image Controlling the positioning of the object,
A movement control unit for controlling the movement mechanism such that the position of the target object approaches a target position, based on the position of the characteristic portion specified by the image processing device,
A reference including a position of the characteristic portion specified by the image processing device based on an image obtained by the first imaging operation, and at least one of information from the moving mechanism and information generated by the movement control unit. An estimating unit for estimating a movement trajectory of the characteristic portion during an exposure period in a second imaging operation subsequent to the first imaging operation, based on the information;
A control unit for instructing the image processing apparatus to perform shake correction on an image obtained by the second imaging operation based on the movement trajectory. In accordance with an instruction from a control device that controls a moving mechanism that moves the object, an image obtained by an imaging operation of the object for each imaging cycle is acquired, and a characteristic portion of the object is acquired based on the acquired image. An image processing device for specifying the position of
The control device controls the moving mechanism such that the position of the target object approaches a target position based on the position of the characteristic portion specified by the image processing device,
The image processing apparatus includes:
Reference information including a position of the characteristic portion specified by the image processing device based on an image obtained by the first imaging operation, and at least one of information from the moving mechanism and information generated by the control device. An estimating unit for estimating a movement locus of the characteristic portion during an exposure period in a second imaging operation subsequent to the first imaging operation, based on
An image processing apparatus, comprising: a correction unit configured to perform shake correction on an image obtained by the second imaging operation based on the movement trajectory. A program for controlling a moving mechanism for moving an object, and supporting a control system for positioning the object,
The control system acquires an image obtained by an imaging operation for each imaging cycle for the object, and includes an image processing device for specifying the position of a characteristic portion of the object based on the acquired image.
On the computer,
Based on the position of the characteristic portion specified by the image processing apparatus, controlling the moving mechanism so that the position of the target object approaches a target position,
Reference including at least one of the position of the characteristic portion specified by the image processing device based on the image obtained by the first imaging operation, information from the moving mechanism, and information generated by the controlling step. Estimating a movement trajectory of the characteristic portion during an exposure period in a second imaging operation subsequent to the first imaging operation, based on the information;
Instructing the image processing apparatus to perform shake correction on an image obtained by the second imaging operation based on the movement trajectory.