JP2019215163A - Flow rate sensing device - Google Patents

Abstract

To provide a flow rate sensing device capable of accurately detecting a flow rate (flow velocity) of a fluid from a direction parallel to the axial direction of the substrate, and a direction orthogonal to the axial direction.SOLUTION: A flow sensor device (1) in the present invention comprising a substrate (2) and a first sensor element (3) provided with a temperature-sensitive resistance element, which is spaced apart from the substrate, is characterized in that the first sensor element being arranged to be obliquely inclined with respect to an axial direction (O) of the substrate. According to the present invention, a flow rate (flow velocity) of a fluid from a direction parallel to the axial direction of the substrate, and a direction orthogonal to the axial direction can be accurately detected.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a flow sensor device.

  Patent Document 1 discloses an invention relating to a wind speed sensor including a plurality of temperature-sensitive resistance elements.

  In Patent Literature 1, a plurality of temperature-sensitive resistance elements are arranged so as not to overlap with and perpendicular to the direction of airflow.

  When a measurement airflow hits a plurality of temperature-sensitive resistance elements, the temperature-sensitive resistance elements are deprived of heat, and the temperature decreases, and the resistance value changes. The voltage change due to the change in the resistance value is extracted and output to the outside as a measured value of the wind speed.

Japanese Patent No. 552498

  In Patent Literature 1, the direction of an airflow as a measurement target is determined to be a direction orthogonal to the vertical arrangement of a plurality of temperature-sensitive resistance elements. Therefore, Patent Document 1 does not consider airflow measurement from a direction parallel to the vertical arrangement of the plurality of temperature-sensitive resistance elements, and cannot realize wind detection in two orthogonal directions. That is, Patent Document 1 can be applied to a mode in which the airflow direction is always one direction, but cannot be applied to a mode in which the airflow direction changes by 90 degrees.

  The present invention has been made in view of the above problems, and has a flow rate capable of accurately detecting a flow rate (flow velocity) of a fluid from a direction parallel to an axial direction of a substrate and a width direction of the substrate orthogonal to the axial direction. It is an object to provide a sensor device.

  A flow sensor device according to the present invention includes a substrate and a sensor element provided with a temperature-sensitive resistance element, which is disposed apart from the substrate, and the sensor element is inclined with respect to an axial direction of the substrate. It is characterized by being arranged to be inclined.

  In the present invention, it is preferable that the sensor element is arranged to be obliquely inclined with respect to the axial direction when viewed in a plan arrow.

  In the present invention, it is preferable that the sensor element is inclined by 45 degrees with respect to the axial direction.

  In the aspect of the invention, it is preferable that the sensor element is disposed apart from the substrate along the axial direction.

  In the present invention, the sensor element includes a first sensor element including a flow rate detecting resistance element, and a second sensor element including a temperature compensation resistance element, wherein the first sensor element and the second sensor are provided. The elements are preferably arranged at the same angle with respect to the axial direction.

  In the present invention, a first lead wire connected to the first sensor element, and a second lead wire connected to the second sensor element are fixed to the substrate, and the first lead wire is The second lead wire extends from one surface of the substrate in a direction away from the substrate and outwardly of the substrate along the axial direction, and the second lead wire extends from the other surface of the substrate to the first lead. The wire goes in the opposite direction to the wire and extends outward of the substrate in the same direction as the first lead wire, and the first sensor element and the second sensor element are the same with respect to the substrate, respectively. Preferably, it is arranged on the outside of the side.

  In the present invention, it is preferable that a through hole is formed in the substrate.

  ADVANTAGE OF THE INVENTION According to this invention, the flow volume (flow velocity) of the fluid from the direction parallel to the axial direction of a board | substrate, and the width direction of the board | substrate orthogonal to an axial direction can be detected accurately.

It is a perspective view of the flow sensor device of this embodiment. It is a top view of the flow sensor device of this embodiment. It is a front view of the flow sensor device of this embodiment. It is a partial perspective view of the state where the flow sensor device of this embodiment was set up. It is a conceptual diagram for explaining the detection range of the airflow in the flow sensor device of this embodiment. It is a perspective view in the state where a case and a part of a light transmitting case which constitute a flow sensor device of this embodiment were removed. It is a circuit diagram of a flow sensor device of this embodiment. It is sectional drawing of the sensor element of this embodiment. It is the perspective view which looked at the flow sensor device of this embodiment from the back side. It is a perspective view which shows the sensor unit which carried out multiple connection of the flow sensor apparatus of this embodiment.

  Hereinafter, one embodiment of the present invention (hereinafter, abbreviated as “embodiment”) will be described in detail. The present invention is not limited to the following embodiments, and can be implemented with various modifications within the scope of the invention.

  FIG. 1 is a perspective view of the flow sensor device of the present embodiment. FIG. 2 is a plan view of the flow sensor device of the present embodiment. FIG. 3 is a front view of the flow sensor device of the present embodiment. FIG. 4 is a partial perspective view of the flow sensor device of the present embodiment in an upright state. FIG. 5 is a conceptual diagram for explaining an airflow detection range in the flow sensor device of the present embodiment. FIG. 6 is a perspective view of the flow sensor device of the present embodiment in a state where a housing and a part of a light transmitting case are removed. FIG. 7 is a circuit diagram of the flow sensor device of the present embodiment. FIG. 8 is a sectional view of the sensor element of the present embodiment. FIG. 9 is a perspective view of the flow sensor device of the present embodiment as viewed from the rear side. FIG. 10 is a perspective view showing a sensor unit in which a plurality of flow rate sensor devices of the present embodiment are connected.

  The X and Y directions shown in FIGS. 1 to 6, 9 and 10 indicate two directions orthogonal to each other in a plane, and the Z direction is a height orthogonal to the X and Y directions. Point in the direction.

  The flow sensor device 1 according to the present embodiment illustrated in FIG. 1 includes a substrate 2, a plurality of sensor elements 3 and 4, a housing 5, and a light transmissive case 6 and is integrally configured.

  The substrate 2 is an insulating substrate, and is not particularly limited, but is preferably a general printed circuit board in which glass cloth is impregnated with an epoxy resin. For example, an FR4 board can be presented.

  FIG. 6 shows a state where the first housing 5a and the first light transmissive case 6a shown in FIG. 1 have been removed. As shown in FIG. 6, the substrate 2 has a long flat plate shape in which the length in the Y direction is longer than the width in the X direction. The Y direction which is the longitudinal direction of the substrate 2 is defined as “axial direction O”.

  As shown in FIGS. 1 and 2, the substrate 2 is accommodated in the housing 5 and the light transmissive case 6 except for the tip 2 a. The distal end portion 2a of the substrate 2 projects forward from the distal end of the light transmissive case 6 and is exposed.

  In this embodiment, the front end 2a of the substrate 2 has notches 2d at both ends in the width direction (X direction) of the substrate 2, as shown in FIG. Point.

  As shown in FIG. 1 and the like, the sensor elements 3 and 4 are arranged separately from the substrate 2 via lead wires 7 and 8, respectively.

  The structure of the sensor elements 3 and 4 will be described with reference to FIG. As shown in FIG. 8, the sensor elements 3 and 4 include a temperature-sensitive resistance element 10, electrode caps 11 arranged on both sides of the temperature-sensitive resistance element 10, and an insulation covering the temperature-sensitive resistance element 10 and the electrode cap 11. And a film 12. Then, lead wires 7 and 8 extend outward from both sides of the sensor elements 3 and 4 from the electrode cap 11.

  The temperature-sensitive resistance element 10 shown in FIG. 8 is formed, for example, by forming a resistance film on the surface of a cylindrical substrate such as ceramic. Although not shown, the surface of the resistance film of the temperature-sensitive resistance element 10 is trimmed to adjust the resistance.

  As shown in FIG. 8, the temperature-sensitive resistance element 10 is formed long in one direction. Therefore, the sensor elements 3 and 4 including the temperature-sensitive resistance element 10 also have a shape that is long in one direction. Here, “long in one direction” refers to a state longer than any length perpendicular to one direction.

  Hereinafter, the sensor element 3 will be described as a first sensor element 3, a sensor element 4, a second sensor element 4, a lead wire 7, a first lead wire 7, and a lead wire 8 as a second lead wire 8. .

  The first sensor element 3 includes a flow rate detecting resistance element 13 as the temperature-sensitive resistance element 10. The second sensor element 4 includes a temperature-compensating resistance element 14 as the temperature-sensitive resistance element 10.

  The resistance element 13 for flow rate detection and the resistance element 14 for temperature compensation constitute a circuit shown in FIG. As shown in FIG. 7, a bridge circuit 18 is configured by the flow rate detection resistance element 13, the temperature compensation resistance element 14, and the resistors 16 and 17. As shown in FIG. 7, a first series circuit 19 is formed by the flow rate detecting resistance element 13 and the resistor 16, and a second series circuit 20 is formed by the temperature compensation resistance element 14 and the resistor 17. ing. Then, the first series circuit 19 and the second series circuit 20 are connected in parallel to form a bridge circuit 18.

  As shown in FIG. 7, the output unit 21 of the first series circuit 19 and the output unit 22 of the second series circuit 20 are connected to a differential amplifier (amplifier) 23, respectively. A feedback circuit 24 including a differential amplifier 23 is connected to the bridge circuit 18. The feedback circuit 24 includes a transistor (not shown) and the like.

  The resistors 16 and 17 have a smaller temperature coefficient of resistance (TCR) than the resistance element 13 for flow rate detection and the resistance element 14 for temperature compensation. The flow rate detecting resistance element 13 has a predetermined resistance value Rs1 in a heating state controlled to be higher than a predetermined ambient temperature by a predetermined value, for example, and the temperature compensation resistance element 14 is, for example, , At the above-mentioned ambient temperature, so as to have a predetermined resistance value Rs2. Note that the resistance value Rs1 is smaller than the resistance value Rs2. The resistor 16 forming the first series circuit 19 together with the flow detection resistor 13 is, for example, a fixed resistor having the same resistance value R1 as the resistance value Rs1 of the flow detection resistor 13. The resistor 17 forming the second series circuit 20 together with the temperature compensating resistance element 14 is, for example, a fixed resistor having the same resistance value R2 as the resistance value Rs2 of the temperature compensating resistance element 14.

  The temperature of the first sensor element 3 is set higher than the ambient temperature, and when the first sensor element 3 receives wind, the temperature of the resistance element 13 for flow rate detection, which is a heating resistor, decreases. For this reason, the potential of the output unit 21 of the first series circuit 19 to which the flow rate detecting resistance element 13 is connected fluctuates. Thus, a differential output is obtained by the differential amplifier 23. Then, the feedback circuit 24 applies a drive voltage to the flow rate detecting resistance element 13 based on the differential output. Then, based on a change in voltage required for heating the flow rate detecting resistance element 13, a microcomputer (not shown) can convert and output a wind speed. The microcomputer is installed, for example, on the surface of the substrate 2 in the housing 5 and electrically connected to the sensor elements 3 and 4 via the lead wires 7 and 8 and a wiring pattern (not shown) on the surface of the substrate 2. Connected.

  The temperature compensating resistance element 14 provided in the second sensor element 4 detects the temperature of the fluid itself and compensates for the influence of the temperature change of the fluid. As described above, by providing the temperature compensating resistance element 14, it is possible to reduce the influence of the temperature change of the fluid on the flow rate detection, and it is possible to accurately perform the flow rate detection. As described above, the resistance element 14 for temperature compensation has sufficiently higher resistance than the resistance element 13 for flow rate detection, and the temperature is set near the ambient temperature. Therefore, even when the second sensor element 4 receives wind, the potential of the output section 22 of the second series circuit 20 to which the temperature compensation resistance element 14 is connected hardly changes. Therefore, it is possible to accurately obtain a differential output based on a resistance change of the flow rate detecting resistance element 13 using the potential of the output unit 22 as a reference potential.

  Note that the circuit configuration shown in FIG. 7 is an example, and the circuit configuration is not limited to this.

  In the present embodiment, as shown in FIGS. 1 and 2, the first sensor element 3 and the second sensor element 4 are separated from the substrate 2 and at the same time with respect to the axial direction O (Y direction) of the substrate 2. They are arranged obliquely.

  As shown in FIG. 2, the first sensor element 3 is preferably arranged to be inclined by θ with respect to the axial direction O when viewed in a plan arrow. “Plane arrow view” is an arrow view of a plane formed by the axial direction O and the width direction (X direction) of the substrate 2 viewed from the Z direction. At this time, the first sensor element 3 can be tilted obliquely with respect to the Z direction, but is more preferably tilted by θ with respect to the axial direction O in the XY plane. The inclination angle θ is defined by an angle between the longitudinal direction of the first sensor element 3 and the axial direction O. When the first sensor element 3 is not long, the inclination angle θ may be defined by the angle between the inter-electrode direction of the first sensor element and the axial direction O.

  The second sensor element 4 also has the same inclination angle θ as the first sensor element 3. The effect of arranging the sensor elements 3 and 4 so as to be inclined with respect to the axial direction O of the substrate 2 will be described with reference to FIGS.

  As shown in FIG. 4, when the wind acts on the flow rate sensor device 1 from the lateral direction A1 parallel to the X direction, and from the vertical direction B1 parallel to the axial direction O (Y direction), Let us consider the case where it worked.

  The first sensor element 3 including the flow rate detecting resistance element 13 is inclined with respect to the horizontal direction A1 and the vertical direction B1. For this reason, the detection surface (peripheral surface in the longitudinal direction) of the first sensor element 3 appropriately contacts both the wind in the horizontal direction A1 and the wind in the vertical direction B1. In addition, the wind having a slope between the horizontal direction A1 and the vertical direction B1 appropriately hits the detection surface of the first sensor element 3. That is, since the contact area has a large contact area with respect to the wind directions in the horizontal direction A1 and the vertical direction B1 which are orthogonal to each other, and the wind direction therebetween, the resistance value of the flow rate detecting resistance element 13 of the first sensor element 3 is And change appropriately. Therefore, it is possible to accurately detect the flow rate of the fluid in the horizontal direction A1, the vertical direction B1, and the wind direction therebetween.

  This will be described in more detail with reference to FIG. As shown in FIG. 5, lines are drawn in the X and Y directions from the center of the first sensor element 3, and the obtained four quadrants are divided into a first quadrant I and a second quadrant II in a counterclockwise direction from the upper right in the figure. , A third quadrant III and a fourth quadrant IV.

  In FIG. 5, the first sensor element 3 is inclined such that the left end is inclined to the upper left and the right end is inclined to the lower right. The first sensor element 3 may be inclined such that the right end is inclined to the upper right and the left end is inclined to the lower left.

  As shown in FIG. 5, the first sensor element 3 is arranged to be inclined, so that the left end (left electrode) of the first sensor element 3 is located within the second quadrant II at the right end (right side) of the first sensor element 3. (Electrodes) are respectively arranged in the fourth quadrant IV.

  As shown in FIG. 5, when the wind acts in the horizontal direction A1, the vertical direction B1, and the direction between them, that is, the wind in the direction from the first quadrant I to the first sensor element 3 is One sensor element 3 appropriately contacts in the longitudinal direction. Therefore, it is possible to accurately detect the flow rate of the fluid in the horizontal direction A1, the vertical direction B1, and the wind direction therebetween.

  Further, when the wind acts in the horizontal direction A2, the vertical direction B2, and the direction between them, that is, the wind in the direction from the third quadrant III to the first sensor element 3 When contact is made in the longitudinal direction, it is possible to detect the flow rate of the fluid with respect to the horizontal direction A2, the vertical direction B2, and the wind direction therebetween. However, in the present embodiment, the wind from the third quadrant III may have a blind spot, and the detection of the wind from the third quadrant III need not be assumed.

  In the present embodiment, the point that the wind parallel to the axial direction O (Y direction) of the substrate 2 and the wind from the lateral direction parallel to the width direction of the substrate 2 orthogonal to the axial direction O can be appropriately detected. Has a characteristic part.

  That is, when the first sensor element 3 shown in FIG. 5 is arranged in parallel in the horizontal direction (X direction), the wind from the vertical direction parallel to the axial direction O can be properly detected, but the detection of the wind from the horizontal direction is possible. Sensitivity decreases.

  On the other hand, when the first sensor element 3 shown in FIG. 5 is arranged parallel to the axial direction O (Y direction), wind from the vertical direction parallel to the horizontal direction (X direction) can be properly detected, but the axial direction O The detection sensitivity of the wind from (Y direction) decreases.

  On the other hand, in the present embodiment, the first sensor element 3 is disposed obliquely from the axial direction O (Y direction) toward the width direction of the substrate 2, so that the wind parallel to the axial direction O can be obtained. And the wind in the lateral direction (X direction) can be appropriately detected.

  In the present embodiment, the inclination angle θ of the sensor elements 3 and 4 with respect to the axial direction O is preferably 10 degrees or more and 80 degrees or less, more preferably 30 degrees or more and 60 degrees or less, and 40 degrees or more and 50 degrees. The angle is more preferably equal to or less than 45 degrees, and most preferably 45 degrees. By setting the inclination angle θ to 45 degrees, the manner in which the wind hits the sensor elements 3 and 4 is the same between when the wind from the lateral direction A1 acts and when the wind from the longitudinal direction B1 acts. In addition, the detection accuracy for winds from two orthogonal directions can be effectively improved.

  As shown in FIGS. 1 and 2 and the like, it is preferable that the sensor elements 3 and 4 are arranged at a distance in front of the substrate 2 along the axial direction O (Y direction). That is, the sensor elements 3 and 4 do not face the substrate 2 in the height direction (Z direction). Here, the opposing configuration is also an embodiment of the present embodiment, but in such a configuration, depending on the wind direction, turbulence in the airflow or the like occurs due to obstruction of the substrate 2 or the housing 5 and the like, and the detection accuracy of the wind is reduced. descend. Therefore, by separating the sensor elements 3 and 4 in front of the substrate 2, the airflow in the vicinity of the sensor elements 3 and 4 can be stabilized, and the detection accuracy of the wind can be improved.

  The second sensor element 4 including the temperature compensation resistance element 14 is preferably arranged as shown in FIG. 1 or the like, as described later, but is arranged at a position where the temperature change of the fluid can be observed in principle. Just do it. For example, the second sensor element 4 may not be arranged at a position facing the substrate 2 or may be arranged so as not to be inclined with respect to the axial direction O of the substrate 2.

  However, as shown in FIGS. 1 to 3 and the like, the first sensor element 3 and the second sensor element 4 are inclined at the same inclination angle θ with respect to the axial direction O of the substrate 2 and are opposed to each other while being separated in the Z direction. Is preferred.

  Thus, the first sensor element 3 and the second sensor element 4 are arranged close to each other. For this reason, the temperature of the fluid observed by the second sensor element 4 is not different from the ambient temperature of the first sensor element 3, and the temperature change of the fluid can be accurately compensated. The first sensor element 3 and the second sensor element 4 are inclined at the same inclination angle θ. As a result, the first sensor element 3 and the second sensor element 4 do not enter each other's shadow, so that two sensor elements such as the first sensor element 3 and the second sensor element 4 are arranged close to each other. Thus, it is possible to prevent the detection accuracy from being deteriorated. As described above, the detection accuracy can be more effectively improved.

  As shown in FIG. 3, when the flow sensor device 1 is viewed from the front, the width direction (X direction) of the substrate 2 and the extending directions of the sensor elements 3 and 4 are arranged in parallel. Preferably, they are arranged. That is, the distance between the substrate 2 and the first sensor element 3 in the Z direction and the distance between the substrate 2 and the second sensor element 4 in the Z direction are preferably constant.

  Thereby, turbulence does not easily occur in the air flow near the front end portion 2a of the substrate 2, and the detection accuracy can be more effectively improved.

  Next, each lead wire (lead terminal) 7, 8 connected to each sensor element 3, 4 will be described.

  The first lead wire 7 connected to the first sensor element 3 and the second lead wire 8 connected to the second sensor element 4 are fixed to the tip 2a of the substrate 2, respectively. In FIG. 1 and the like, concave notches are formed on both side surfaces of the front end portion 2a of the substrate 2, and the lead wires 7, 8 are fixed to the notches with an adhesive or the like. Preferably, a plurality of holes are formed in the front end portion 2a of the substrate 2, and the lead wires 7, 8 are inserted and fixed in the holes.

  A wiring pattern (not shown) is formed on the surface of the substrate 2, and each of the lead wires 7, 8 is electrically connected to the wiring pattern.

  As shown in FIG. 1 and the like, the first lead wire 7 extends upward from the upper surface (one surface) 2 b of the substrate 2, and further extends forward of the tip 2 a of the substrate 2. The first lead wire 7 is bent at a position in front of the distal end portion 2a so that the first sensor element 3 has a predetermined inclination angle θ.

  Further, as shown in FIG. 1 and the like, the second lead wire 8 extends downward from the lower surface (the other surface) 2c of the substrate 2 and further extends forward of the distal end portion 2a of the substrate 2. I have. The second lead wire 8 is bent at a position in front of the tip 2 a so that the second sensor element 4 has the same inclination angle θ as the first sensor element 3.

  In this way, by arranging the lead wires 7 and 8 vertically above and below the substrate 2 and bending them, the sensor elements 3 and 4 can be easily and appropriately positioned in front of the distal end portion 2a of the substrate 2. They can be arranged at the same inclination angle θ and spaced apart in the Z direction.

  As shown in FIGS. 1, 2, 6, etc., a through hole 30 is formed in the tip 2 a of the substrate 2. The through hole 30 penetrates from the upper surface 2b to the lower surface 2c of the substrate 2.

  By providing the through-holes 30 in the substrate 2 in this manner, the thermal resistance of the substrate 2 can be secured, and the thermal effects from the microcomputer disposed on the substrate 2 and the light-emitting element 31 described later are applied to the sensor elements 3 and 4. On the other hand, it can be reduced. Further, by providing the through-hole 30, even when an impact is applied to the flow rate sensor device 1, the impact is reduced, and the influence of the impact on the sensor elements 3, 4 can be reduced.

  In the present embodiment, as shown in FIG. 6, a light emitting element 31 such as an LED is arranged on the surface of the substrate 2. The light emitting element 31 is located behind the through hole 30. Although not shown, a light emitting element is also arranged on the back surface of the substrate 2. These light emitting elements 31 are preferably arranged at the same position on the front and back surfaces of the substrate 2. As shown in FIG. 1 and the like, the light emitting elements 31 are covered by a first light transmitting case 6a and a second light transmitting case 6b, respectively. Each of the optically transparent cases 6a and 6b may be a transparent case or a translucent case.

  The light emitting element 31 is controlled so that the display changes based on the wind detection information from the sensor elements 3 and 4. For example, control can be performed so that the emission color changes based on the wind speed. Light from each light emitting element 31 passes through each light transmissive case 6a, 6b and is emitted to the outside. In the present embodiment, both surfaces of the flow sensor device 1 emit light.

  As shown in FIG. 1 and the like, a housing 5 is arranged behind the light transmissive case 6. The housing 5 is divided into a first housing 5a and a second housing 5b. The first housing 5a is disposed on the front surface side of the substrate 2, and the second housing 5b is disposed on the back surface of the substrate 2. Placed on the side.

  For example, the first housing 5a and the second housing 5b are each formed of a non-transmissive colored case. For this reason, the light from the light emitting element 31 does not pass through the first housing 5a and the second housing 5b, and is emitted outside only from the first light transmitting case 6a and the second light transmitting case 6b. You.

  As in the present embodiment, the substrate 2 is accommodated in the housing 5 and the light transmissive case 6 except for the tip 2a. Thereby, the light emitting element 31 disposed on the surface of the substrate 2, the element (not shown), and the electronic component can be appropriately protected from the outside.

  The first housing 5a, the second housing 5b, the first light transmissive case 6a, and the second light transmissive case 6b are in a state where the front end portion 2a of the substrate 2 is protruded to the outside (see the through hole 30 in FIG. 1 and the like). Are also exposed to the outside) and each of the housings 5a and 5b and each of the light transmitting cases 6a and 6b are connected to the substrate 2 by a fastening member 33 such as a screw shown in FIG. It is fixed across.

  As shown in FIG. 9, external connection terminals 34 and 35 are provided on the rear end face of the flow sensor device 1. The external connection terminals 34 and 35 are, for example, USB terminals.

  Then, as shown in FIG. 10, the plurality of flow sensor devices 1 are electrically connected via the communication cable 40 on the external connection terminals 34 and 35 side. The external connection terminal 34 for input of one flow sensor device 1 and the external connection terminal 35 for output of the other flow sensor device 1 are respectively connected to form a multiple sensor unit 100.

  In the multiple sensor unit 100, each flow sensor device 1 may be arranged so as to face in the same direction as shown in FIG. 10, or each flow sensor device 1 may face in a different direction. Good. As shown in FIG. 10, in a configuration in which the respective flow sensor devices 1 face in the same direction, a horizontal wind parallel to the X direction and a vertical wind parallel to the axial direction O (Y direction) are appropriately detected. Although it is possible, since the first sensor element and the second sensor element overlap in the height direction with respect to the wind from the height direction (Z direction) orthogonal to the X direction and the Y direction, the detection accuracy is reduced. Therefore, for example, by setting the flow sensor device 1 of FIG. 1 at 90 degrees so that the wind in the Z direction can be appropriately detected, the wind in the Z direction can also be appropriately detected. Therefore, in the multiple sensor unit 100 shown in FIG. 1, for example, by arranging the flow sensor devices 1 at every other position by 90 degrees, the wind directions in the X direction, the Y direction, and the Z direction are appropriately adjusted. It becomes possible to detect.

  Then, by using the multiple sensor unit 100 as shown in FIG. 9, multi-point light emission can be performed in a wide area, and can be applied to various applications. For example, it can be used for indoor or outdoor illumination, or for analysis of wind speed.

  Further, by arranging the respective flow rate sensor devices 1 in a matrix, the appearance of the wind gradually weakening and the direction in which the wind is blowing as the distance from the place where the wind hits strongly increases, and the change in the light emission of the matrix can be visually determined. It becomes possible to catch.

  In the present embodiment, in particular, since good detection accuracy can be obtained with respect to the wind in the axial direction O of the substrate 2 and the width direction of the substrate 2, the case where the wind direction is the axial direction O and the case where the wind direction is the width direction of the substrate 2 Can be preferably used in both cases.

  The wind does not have to be applied to the second sensor element 4. For example, under conditions where the ambient temperature can be maintained, the periphery of the second sensor element 4 may be covered with a case or the like. May be possible.

  In the above description, the flow sensor device 1 is described as detecting the wind, but the fluid to be detected may be a gas or a liquid other than the wind.

  In the present invention, since the flow rate (flow velocity) of the fluid from the direction parallel to the axial direction of the substrate and the direction perpendicular to the axial direction can be accurately detected, the case where the wind direction is the axial direction O and the width of the substrate 2 In both cases, in the case of the direction, it can be preferably applied. In the flow sensor device of the present embodiment, a display unit such as a light emitting element can be disposed, and it can be applied to various applications as a display mode using fluid detection, and can be applied for analysis and the like. It is also possible.

1: Flow rate sensor device 2: Board 2a: Tip 2b: Upper surface 2c: Lower surface 2d: Notch 3: First sensor element 4: Second sensor element 5: Housing 5a: First housing 5b: Second housing 6: light-transmitting case 6a: first light-transmitting case 6b: second light-transmitting case 7: first lead wire 8: second lead wire 10: temperature-sensitive resistance element 13: flow detection resistance element 14: temperature Compensation resistance element 18: Bridge circuit 23: Differential amplifier 24: Feedback circuit 30: Through hole 31: Light emitting element 33: Fastening members 34 and 35: External connection terminal 40: Communication cable 100: Sensor units A1, A2: Lateral direction B1, B2: vertical direction O: axial direction θ: inclination angle

Claims (7)

A substrate and a sensor element provided with a temperature-sensitive resistance element, which is disposed separately from the substrate,
The flow sensor device, wherein the sensor element is disposed obliquely with respect to an axial direction of the substrate.   The flow sensor device according to claim 1, wherein the sensor element is disposed obliquely with respect to the axial direction as viewed in a plan arrow.   The flow sensor device according to claim 2, wherein the sensor element is inclined by 45 degrees with respect to the axial direction.   The flow sensor device according to any one of claims 1 to 3, wherein the sensor element is arranged apart from the substrate along the axial direction.   The sensor element includes a first sensor element including a resistance element for flow rate detection, and a second sensor element including a resistance element for temperature compensation. The first sensor element and the second sensor element The flow sensor device according to any one of claims 1 to 4, wherein the flow sensor device is arranged to be inclined at the same angle with respect to the axial direction. A first lead wire connected to the first sensor element and a second lead wire connected to the second sensor element are fixed to the substrate;
The first lead wire extends from one surface of the substrate in a direction away from the substrate and extends outwardly of the substrate along the axial direction.
The second lead wire extends from the other surface of the substrate in a direction opposite to the first lead wire, and extends outward of the substrate in the same direction as the first lead wire,
The flow sensor device according to claim 5, wherein the first sensor element and the second sensor element are respectively arranged on the same side and the outside of the substrate. The flow sensor device according to claim 1, wherein a through hole is formed in the substrate.

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