JP2019207031A - Rotary joint - Google Patents

Abstract

To provide a rotary joint capable of making a case body compact.SOLUTION: A rotary joint 1 is equipped with a cylindrical case body 2 formed with a plurality of first channels 11; a shaft body 3 formed with a plurality of second channels 12; rolling bearings 5 and 6 provided in an annular space 7 formed between the case body 2 and the shaft body 3; a plurality of cylindrical members 30 provided in the annular space 7 and formed with a third channel 13 for connecting the first channels 11 and the second channels 12; a first seal 41 which prevents the leakage of a fluid flowing in the first channels 11 and the third channels 13; and a second seal 42 which prevents the leakage of a fluid flowing in the third channels 13 and the second channels 12. The case body 2 is composed of an integrated and inseparable cylindrical member which is longer in the axial direction than axial dimensions L1 of an inner structure 10 including the rolling bearings 5 and 6 aligned in an axial direction in the annular space 7 and the cylindrical members 30.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a rotary joint.

  The rotary joint is used in a relative rotating portion of various rotating devices such as a semiconductor manufacturing apparatus, a medical device, and a food device. This rotary joint has a first member and a second member that rotate relative to each other, and it is necessary to cause a plurality of different types of fluids to flow in different paths between these two members. For this purpose, a plurality of first flow paths are formed in the first member, a plurality of second flow paths are formed in the second member, and a pair of one first flow path and one second flow path is formed. It is provided with a configuration for connecting fluids to flow fluids (see, for example, Patent Document 1).

  FIG. 4 is a cross-sectional view of a conventional rotary joint. The rotary joint 90 includes a cylindrical case body 91 (the first member) and a shaft body 92 (the second member) provided inside the case body 91. Two upper and lower first flow paths 95 are formed in the case body 91, and two upper and lower second flow paths 96 are formed in the shaft body 92. The opening of the upper first flow path 95 and the opening of the upper second flow path 96 are arranged at the same position in the axial direction, and the flow paths 95 and 96 are connected to form one flow path 97. It is composed. Further, the opening of the lower first flow path 95 and the opening of the lower second flow path 96 are arranged at the same position in the axial direction, and the flow paths 95 and 96 are connected to form one flow path. 97. A plurality of seal rings 93 are provided between the case body 91 and the shaft body 92 in order to prevent the fluid flowing through the upper and lower flow paths 97 and 97 from leaking to the outside.

JP 2002-22076 A

As shown in FIG. 4, the case body 91 is configured by arranging a plurality of ring bodies 99 in the axial direction. This is because a plurality of seal rings 93 are incorporated between the case body 91 and the shaft body 92. That is, since the case body 91 has the convex part 98 in which a part of the first flow path 95 is formed in the radially inner region, the seal ring 93 is adjacent to the axial direction of the convex part 98. This is because it is necessary to assemble another ring body 99 on top of each other every time the seal ring 93 is attached next to the convex portion 98 in order to provide it.
In the rotary joint 90, a plurality of ring bodies 99 are integrated by bolts 94.

  Thus, in the conventional rotary joint 90, it is necessary to divide the case body 91 into a plurality of ring bodies 99 for assembly, and a (first) bolt for integrating the plurality of ring bodies 99 together. 94 is required. And since the seal ring 93 is arrange | positioned in the area | region inside radial direction of the case body 91 (each ring body 99), the bolt hole (not shown) which penetrates the volt | bolt 94 is the case body 91 (each ring body). 99) in the radially outer region.

Further, in order to enable relative rotation between the case body 91 and the shaft body 92, a pair of rolling bearings 89 are provided between them, and in order to prevent the rolling bearings 89 from falling off, an annular shape is provided on both sides in the axial direction. A member 88 is installed. The annular member 88 is fixed to the ring body 99 by a second bolt 87, and the annular member 88 functions as a stopper for the rolling bearing 89.
As described above, it is necessary to form a bolt hole for the second bolt 87 in the radially outer region of the case body 91 (each ring body 99). Since the bolt 94 is provided, the case body 91 becomes large in the radial direction.

  SUMMARY OF THE INVENTION An object of the present invention is to provide a rotary joint that can make the case body compact.

  The rotary joint of the present invention includes a cylindrical case body in which a plurality of first flow paths opening at different positions in the axial direction are formed on the inner peripheral surface, and a position different in the axial direction on the outer peripheral surface provided inside the case body. A shaft body in which a plurality of second flow paths are formed, and an annular space formed between the case body and the shaft body, so that the case body and the shaft body are relatively rotatable. A bearing portion to support, a plurality of cylindrical members provided in the annular space and formed with a third flow path for connecting the first flow path and the second flow path; the first flow path and the first flow path; A first seal for preventing fluid flowing through the three flow paths from leaking between the case body and the cylindrical member; and a fluid flowing through the third flow path and the second flow path; A second seal that prevents leakage from between the shaft body, Serial case body is composed of a long integral part of the cylindrical member in the axial direction than the axial dimension of the internal structure including the bearing unit and the tubular member are arranged in the axial direction in the annular space.

  According to the present invention, the flow path (third flow path) that connects the first flow path on the case body side and the second flow path on the shaft body side is formed in the cylindrical member that is separate from the case body. Even if the case body does not have a divided structure as in the prior art, that is, even if the case body is an inseparable cylindrical member, the rotary joint can be assembled. Therefore, a bolt for integrating the case body as in the prior art is unnecessary, and the case body can be made compact.

The rotary joint further includes a stopper that is detachably provided in the annular space, and in a state where the stopper is mounted, the shaft body that sandwiches the bearing portion and the cylindrical member and the shaft In a state where the relative movement in the axial direction with respect to the case body is restricted and the stopper is removed, it is preferable that the movement is enabled.
According to this configuration, the shaft body and the case body can be attached while being moved relative to each other in the axial direction with the bearing and the cylindrical member sandwiched therebetween with the stopper removed.

  Moreover, it is preferable that the second seal is attached to a recess formed in the cylindrical member. According to this configuration, it is possible to perform an operation of attaching the second seal integrally with the cylindrical member.

The first seal is an O-ring, and the cylindrical member is formed with an inclined surface that is inclined with respect to an inner peripheral surface of the case body, and the inner surface of the inclined surface and the case body is formed. It is preferable that the O-ring is mounted in a triangular space formed between a part of the circumferential surface and a part of the side surface of the member provided adjacent to the cylindrical member in the axial direction.
According to this configuration, the O-ring can enhance the function of preventing the cylindrical member from rotating with respect to the case body.

The second seal includes an annular main body portion, and an inner cylindrical lip portion and an outer cylindrical lip portion that extend in the axial direction from the radial inner portion and the radial outer portion of the main body portion, respectively. It is preferable to adopt a configuration.
According to this elastic seal ring, it is easy to attach by moving in the axial direction along the outer peripheral surface of the shaft body, and the cylindrical member integrated with the case body and the shaft body rotate relative to each other when the attachment is completed. However, it is possible to ensure a sealing property between them.

  According to the present invention, since the case body is made of an inseparable cylinder member, a bolt for integrating the case body as in the conventional case is unnecessary, and the case body can be made compact.

It is a longitudinal cross-sectional view of a rotary joint. It is an enlarged view which shows an upper cylindrical member and its periphery. It is explanatory drawing in case the concave groove of a cross-section which has three inner wall surfaces is an attachment site | part of an O-ring (1st seal). It is sectional drawing of the conventional rotary joint.

Embodiments of the present invention will be described below.
[About overall configuration]
FIG. 1 is a longitudinal sectional view of the rotary joint 1. The rotary joint 1 (hereinafter also referred to as a joint 1) includes a cylindrical case body 2 and a shaft body 3 provided inside the case body 2. The posture of the joint 1 may be other than the posture shown in FIG. 1, but in the following description, the upper side shown in FIG. 1 is called “upper” of the joint 1 and the lower side is called “lower” of the joint 1. Sometimes. In the present embodiment, the axial direction is a direction along the center line C of the rotary joint 1 (including a direction parallel to the center line C), and the center lines of the case body 2 and the shaft body 3 are respectively This coincides with the center line C.

  An annular space 7 is formed between the case body 2 and the shaft body 3, and a bearing portion is provided in the annular space 7. The bearing portions of this embodiment are rolling bearings 5 and 6, particularly deep groove ball bearings. The rolling bearings 5 and 6 support the case body 2 and the shaft body 3 so as to be relatively rotatable.

  In the joint 1, N (N = 2 or more, N = 2 in the illustrated example) fluid passages 4 are formed. Each fluid passage 4 has one first flow path 11 provided in the case body 2 and one second flow path 12 provided in the shaft body 3 via a third flow path 13 described later. Composed by connecting. One fluid passage 4 is provided independently of the other fluid passage 4, and the fluid flowing through one fluid passage 4 is configured not to be mixed with the fluid flowing through the other fluid passage 4. .

[About shaft body 3 and case body 2]
The shaft body 3 is made of a linear member that is long in the vertical direction, and has a circular cross section (transverse cross section). Two second flow paths 12 are formed in the shaft body 3. As for each of the 2nd flow paths 12, one side is opened by the end surface 3a of an axial direction, and the other is opened by the outer peripheral surface 3b. And these 2nd flow paths 12 are opened in the position which differs about an axial direction in the outer peripheral surface 3b. That is, one second flow path 12 is opened at the upper position, and the other second flow path 12 is opened at the lower position. Moreover, the 2nd flow path 12 of this embodiment is opened in the position (position 180 degree apart) which is different also about the circumferential direction. In addition, the outer circumferential surface 3 b is formed with the same number of concave grooves 16 that are continuous in the circumferential direction as the second flow paths 12, and the second flow paths 12 are opened at a part of the concave grooves 16. Yes. A lid member 17 that closes the second flow path 12 is attached to the upper end of the shaft body 3.

  The outer peripheral surface 3b of the shaft body 3 is formed with the concave groove 16 and a groove 48 for attaching a snap ring 47 to be described later, but the other part is a cylindrical surface that is straight along the axial direction. . In particular, the outer peripheral surface 3b is a machined smooth machined surface.

  The case body 2 is made of a cylindrical member, and the contour shape of the inner peripheral surface 2b is circular. Two first flow paths 11 are formed in the case body 2. As for each 1st flow path 11, one side is opened by the outer peripheral surface 2a, and the other is opened by the inner peripheral surface 2b. And these 1st flow paths 11 are opened in the axial direction different position in the internal peripheral surface 2b. That is, one first flow path 11 opens at the upper position, and the other first flow path 11 opens at the lower position. Moreover, the 1st flow path 11 of this embodiment is opened in the position (position 180 degree apart) which is different also about the circumferential direction. The first flow path 11 is a port for connecting external piping outside the figure.

  The case body 2 is provided with a protruding portion 21 that protrudes radially inward on the inner peripheral side of one axial end portion (upper end portion). The inner peripheral surface 2b of the case body 2 is formed with a projection 46 and a groove 46 for attaching a snap ring 45, which will be described later, but the other part is from a cylindrical surface that is straight along the axial direction. Become. In particular, the inner peripheral surface 2b is a machined smooth machined surface. And this case body 2 consists of an inseparable cylinder member long in the axial direction.

  From the above, between the case body 2 and the shaft body 3, an annular space in which the cross-sectional shape does not change along the axial direction except for the portions where the concave grooves 16, the grooves 48, the protrusions 21, and the grooves 46 are formed. 7 is formed. In addition to the rolling bearings 5, 6, a cylindrical member 30, spacers 31, 32, 33, a first seal 41, and a second seal 42 are provided in the annular space 7. These members provided in the annular space 7 are collectively referred to as an internal structure 10.

[Internal structure 10]
The upper rolling bearing 5 includes an inner ring 5a, an outer ring 5b, a ball (rolling element) 5c interposed between the inner ring 5a and the outer ring 5b, and a retainer (not shown) that holds the balls 5c. Have. The inner ring 5 a is fitted and attached to the outer peripheral surface 3 b of the shaft body 3, and the outer ring 5 b is fitted and attached to the inner peripheral surface 2 b of the case body 2. When the outer ring 5b comes into contact with the protrusion 21 from the axial direction, the rolling bearing 5 is restricted from moving in the axial direction (upward in the axial direction).

  The lower rolling bearing 6 includes an inner ring 6a, an outer ring 6b, a ball 6c interposed between the inner ring 6a and the outer ring 6b, and a retainer (not shown) that holds the balls 6c. Yes. The inner ring 6 a is fitted and attached to the outer peripheral surface 3 b of the shaft body 3, and the outer ring 6 b is fitted and attached to the inner peripheral surface 2 b of the case body 2. When the outer ring 6 b comes into contact with the snap ring 45 from the axial direction, the rolling bearing 5 is restricted from moving in the axial direction (downward in the axial direction).

  The cylindrical member 30 is a cylindrical member, and the inner diameter is (slightly) larger than the outer diameter of the shaft body 3 and the outer diameter is (slightly) smaller than the inner diameter of the case body 2. The same number of cylindrical members 30 as the fluid passages 4 are provided in the annular space 7. That is, two cylindrical members 30 are provided. The upper cylindrical member 30 is provided between the upper first flow path 11 and the second flow path 12 that are open at the same position in the axial direction. A third flow path 13 for connecting the path 11 and the second flow path 12 is formed. Similarly, the lower cylindrical member 30 is provided between the lower first flow path 11 and the second flow path 12 that are open at the same position in the axial direction. In FIG. 30, a third flow path 13 for connecting the first flow path 11 and the second flow path 12 is formed.

  FIG. 2 is an enlarged view showing the upper cylindrical member 30 and its periphery. In addition, all the cylindrical members 30 are the same shape. The cylindrical member 30 has a cylindrical main body 35 and an annular ridge 36 protruding radially inward from the center of the main body 35, and the main body 35 and the ridge 36 are connected to the cylindrical member 30. A third flow path 13 is formed so as to penetrate. A groove 37 that is continuous in the circumferential direction is formed on the outer peripheral side of the main body portion 35, and the third flow path 13 is opened at a part of the groove 37. The third flow path 13 opens toward the concave groove 16 formed in the shaft body 3 on the radially inner side. Thereby, the first flow path 11 is continuously connected to the second flow path 12 via the third flow path 13.

And the 1st seal | stickers 41 and 41 are provided in the outer peripheral part of the axial direction both sides of the cylindrical member 30, The fluid which flows through the 1st flow path 11 and the 3rd flow path 13 by these seals 41 and 41 is provided. The leakage from between the case body 2 and the cylindrical member 30 is prevented.
Further, second seals 42, 42 are provided on the inner peripheral portions on both axial sides of the cylindrical member 30, and the seals 42, 42 flow through the third flow path 13 and the second flow path 12. The fluid is prevented from leaking between the cylindrical member 30 and the shaft body 3.

  On both sides in the axial direction of the main body 35 of the cylindrical member 30, inclined surfaces 39 for attaching the first seal 41 are formed. The inclined surface 39 is a tapered surface that is inclined with respect to the inner peripheral surface 2 b of the case body 2. The first seal 41 is an O-ring, a member provided on the inclined surface 39, a part of the inner peripheral surface 2b of the case body 2 and the axial direction of the cylindrical member 30 (on the upper side, the first spacer 31). On the lower side, a first seal (O-ring) 41 is mounted in a triangular space 43 formed between a part of the side surface 34 of the second spacer 32).

An annular recess 38 for attaching the second seal 42 is formed on both axial sides of the raised portion 36 of the cylindrical member 30. The concave portion 38 has a shape opened in two directions, ie, radially inside and axially outside.
The second seal 42 is an elastic seal ring having an annular main body 50, an inner cylindrical lip 51, and an outer cylindrical lip 52. The inner cylindrical lip portion 51 and the outer cylindrical lip portion 52 have a cylindrical shape, and extend in the axial direction from the radially inner portion and the radially outer portion of the main body portion 50. In the second seal 42, the main body portion 50, the inner cylindrical lip portion 51, and the outer cylindrical lip portion 52 are made of PTFE (polytetrafluoroethylene), but along the inner cylindrical lip portion 51 and the outer cylindrical lip portion 52. A metal spring is provided, and the second seal 42 is self-sealing. The material of the main body portion 50, the inner cylindrical lip portion 51, and the outer cylindrical lip portion 52 of the second seal 42 may be a material other than a fluororesin such as another fluororesin or a rubber material.

  Thus, a pair of first seals 41, 41 are provided on the outer peripheral side of the cylindrical member 30, and a pair of second seals 42, 42 are provided on the inner peripheral side. 30, the pair of first seals 41, 41 and the pair of second seals 42, 42 constitute one unit. This unit is disposed between the first flow path 11 and the second flow path 12.

  In FIG. 1, a first spacer 31, a second spacer 32, and a third spacer 33 are annular members, which function as spacers for disposing the cylindrical member 30 at a desired axial position. A function for arranging and holding the first seal 41 and the second seal 42 between the cylindrical member 30 is also provided. Each of the first spacer 31, the second spacer 32, and the third spacer 33 has an inner diameter (slightly) larger than the outer diameter of the shaft body 3, and the outer diameter is smaller (slightly) than the inner diameter of the case body 2.

In the annular space 7, the upper cylindrical member 30, the second spacer 32, the first and the first provided together with the rolling bearing 5, the first spacer 31, the first and second seals 41, 42 in order from the upper side. The lower cylindrical member 30, the third spacer 33, and the rolling bearing 6 provided with the two seals 41 and 42 are arranged.
As described above, the rolling bearings 5 and 6, the cylindrical member 30, and the like are provided in the annular space 7 side by side in the axial direction. The case body 2 is composed of an inseparable cylindrical member that is longer in the axial direction than the axial dimension L1 of the internal structure 10 including the rolling bearings 5 and 6 and the cylindrical member 30 and the like. That is, the case body 2 is configured to be longer than the axial dimension from the upper rolling bearing 5 to the lower rolling bearing 6, and the case body 2 is not divided and is formed of an integral cylindrical member. .

  The rolling bearing 6 is sandwiched in the axial direction by the snap ring 47 attached to the groove 48 of the shaft body 3 and the large diameter portion 25 which is a part of the shaft body 3. Movement in the axial direction relative to the body 3 is restricted. The internal structure 10 including the rolling bearing 6 is sandwiched in the axial direction between the snap ring 45 attached to the groove 46 of the case body 2 and the protrusion 21 that is a part of the case body 2. As a result, the case body 2 cannot move in the axial direction with respect to the rolling bearing 6 fixed to the shaft body 3. That is, according to these snap rings 45 and 47, the case body 2 and the shaft body 3 are immovable in the axial direction with the internal structure 10 interposed therebetween. The snap rings 45 and 47 are C-shaped retaining rings.

As described above, the snap ring 45 on the case body 2 side is detachably attached to the groove 46 of the case body 2. The snap ring 45 is attached to the case body 2 (groove 46), and the shaft body 3 and the case body 2 sandwich the internal structure 10 including the rolling bearing portions 5 and 6 and the cylindrical member 30 therebetween. It is a stopper that restricts relative movement in the axial direction.
The state in which the movement is restricted in this way is the assembly completed state, the case body 2 and the shaft body 3 can be relatively rotated, and the case body 2 and the shaft body 3 have a plurality of different types ( Two types of fluids can flow in different paths (separate fluid passages 4).
When the case body 2 is a stationary member and the shaft body 3 rotates with respect to the case body 2, in addition to the shaft body 3, the lid member 17, inner rings 5 a and 6 a, balls 5 c and 6 c, and a snap ring 47 Is included in the rotating member, in addition to the case body 2, the outer rings 5b and 6b, the first spacer 31, the second spacer 32, the third spacer 33, the upper and lower cylindrical members 30, and the first and second seals 41, 42 is included in the stationary member.

Here, the assembly of the joint 1 will be described. The rolling bearing 5, the two cylindrical members 30, the spacers 31, 32, 33, the first seal 41, and the second seal 42 are inserted inside the case body 2. Further, the snap ring 45, the rolling bearing 6, and the snap ring 47 are attached to the outside of the shaft body 3. The inner snap ring 47 is fitted in the groove 48, but the outer snap ring 45 is placed on the flange 3c of the shaft body 3 (not fitted in the groove 46) and can be freely moved. Then, the shaft body 3 is inserted into the case body 2, and the snap ring 45 is fitted into the groove 46 of the case body 2. Thereafter, the lid member 17 is attached to the end of the shaft body 3.
As described above, when the snap ring (stopper) 45 is attached to the groove 46, the case body 2 and the shaft body 3 cannot be moved relative to each other in the axial direction with the internal structure 10 interposed therebetween. In a state where the snap ring 45 is disengaged from the groove 46, the axial movement between the shaft body 3 and the case body 2 is possible.

In the rotary joint 1 having the above-described configuration, unlike the conventional rotary joint 90 (see FIG. 4), a third connecting the first flow path 11 on the case body 2 side and the second flow path 12 on the shaft body 3 side. The flow path 13 is formed in a cylindrical member 30 that is a separate body from the case body 2. For this reason, the case body 91 does not have to be divided as in the conventional case (see FIG. 4), that is, the rotary joint 1 can be assembled even if the case body 2 is an integral cylinder member.
More specifically, with the snap ring 45 detached from the case body 2, the shaft body 3 and the case body 2 are relatively moved in the axial direction with the rolling bearings 5, 6 and the cylindrical member 30 interposed therebetween. This allows the rotary joint 1 to be assembled.

  Since the case body 2 is made of an inseparable cylinder member in this way, bolts (bolts 94 and 87 in FIG. 4) for integrating the case body 2 as in the prior art are unnecessary, and the case body 2 Can be made compact.

  In order to make it possible to assemble the rotary joint 1 in this way, the inner diameter of the inner peripheral surface 2b, which is a straight shape of the case body 2, is set so that each part of the internal structure 10 (the rolling bearings 5 and 6, the cylindrical member 30). , And spacers 31, 32, and 33) are set to be substantially the same (same or slightly larger). The first seal (O-ring) 41 comes into contact with the inner peripheral surface 2b of the case body 2 so that the outer diameter thereof is the same as the inner diameter of the inner peripheral surface 2b. Thereby, the case body 2 can be assembled to the shaft body 3 by sliding along the outer periphery of the internal structure 10.

In the present embodiment (see FIG. 2), the second seal 42 is attached to the recess 38 formed in the cylindrical member 30, so that the second seal 42 is integrated with the cylindrical member 30. Thus, it is possible to perform the work of attaching to the inner peripheral side of the case body 2.
Further, as described above, the second seal 42 has the inner cylindrical lip portion 51 and the outer cylindrical lip portion 52 that extend from the main body portion 50. According to this configuration, the second seal 42 and the shaft body 3 can be easily moved relative to each other in the axial direction, and the cylindrical member 30 integrated with the case body 2 and the shaft body 3 can be relatively moved in the attached state. Although it rotates, it is possible to ensure the sealing property between them.

  Further, according to this embodiment, it is easy to mount the first seal 41 made of an O-ring (hereinafter, the first seal 41 may be referred to as an O-ring 41). That is, as shown in FIG. 3, a groove 80 having a rectangular cross section having three inner wall surfaces a, b, and c is formed on the outer peripheral surface of the cylindrical member 30, and this groove 80 is formed into an O-ring ( In the case where the first seal) 41 is attached, in order to place the O-ring 41 at a predetermined position, the O-ring 41 is fitted in the groove 80 of the tubular member 30, and the case body 2 is against this. Is moved in the axial direction, so that the O-ring 41 moves in the axial direction along the inner peripheral surface 2 b of the case body 2. However, in this case, the O-ring 41 is easy to bite between the case body 2 and the cylindrical member 30, and scratches may occur. However, as in the present embodiment (see FIG. 2), the inclined surface 39 is formed on the cylindrical member 30, and the mounting portion of the O-ring (first seal) 41 becomes a cross-sectional triangular space 43. In addition, it becomes difficult for the O-ring (first seal) 41 to bite between the surrounding members, and the O-ring 41 can be prevented from being damaged.

  Further, since the mounting portion of the O-ring 41 becomes a triangular space 43, the O-ring 41 presses the case body 2 in the radial direction, presses the cylindrical member 30 in the axial direction, and the spacers 31 (32, 32, 33) is also configured to press. For this reason, the function of preventing rotation of the cylindrical member 30 (and the spacers 31, 32, 33) can be enhanced with respect to the case body 2 by the O-ring 41. That is, when the shaft body 3 rotates with respect to the case body 2, the second seal 42 comes into sliding contact with the outer peripheral surface 3 b of the shaft body 3, so that the second seal 42 and the cylindrical member attached with the second seal 42 are attached. A rotational force is applied to 30 from the shaft body 3. However, the frictional force resulting from the pressing of the O-ring 41 can resist this rotational force, and the cylindrical member 30 is prevented from rotating.

The embodiments disclosed above are illustrative in all respects and not restrictive. That is, the rotary joint of the present invention is not limited to the illustrated form, and may be of another form within the scope of the present invention.
In the above embodiment, the number (N) of the fluid passages 4 is “2”, but other numbers may be used. In this case, the same number of cylindrical members 30 as the fluid passages 4 are provided in the annular space 7. Even if the number of fluid passages 4 increases, the cylindrical members 30 have the same shape, and there is no need to manufacture the ring body 99 having a complicated shape as in the conventional case. In addition, the case body 2 becomes longer, but the inner peripheral surface 2b may be a straight cylindrical surface, and manufacturing of each part (including machining) is easier than in the past, which reduces costs. Can contribute.

  Moreover, the rotary joint 1 of this embodiment can be used for the relative rotation part of various rotary devices, such as a semiconductor manufacturing apparatus, a medical device, and food equipment, for example, and also for the relative rotation part of other industrial machines. Can be used.

1: Rotary joint 2: Case body 2b: Inner peripheral surface 3: Shaft body 3b: Outer peripheral surface 5, 6: Rolling bearing (bearing portion)
7: Annular space 10: Internal structure 11: First flow channel 12: Second flow channel 13: Third flow channel 30: Cylindrical members 31, 32, 33: Spacer 34: Side surface 38: Recessed portion 39: Inclined surface 41: First seal (O-ring)
42: Second seal 43: Triangular space 45: Snap ring (stopper) 50: Main body 51: Inner cylindrical lip 52: Outer cylindrical lip L1: Axial dimension

Claims (4)

A cylindrical case body in which a plurality of first flow paths opening at different positions in the axial direction on the inner peripheral surface are formed;
A shaft body in which a plurality of second flow paths are formed inside the case body and open at positions different from each other in the axial direction on the outer peripheral surface;
A bearing portion provided in an annular space formed between the case body and the shaft body and supporting the case body and the shaft body so as to be relatively rotatable;
A plurality of cylindrical members provided in the annular space and formed with a third flow path for connecting the first flow path and the second flow path;
A first seal that prevents fluid flowing through the first flow path and the third flow path from leaking between the case body and the tubular member;
A second seal for preventing fluid flowing through the third flow path and the second flow path from leaking between the cylindrical member and the shaft body;
With
The case body is composed of an inseparable cylindrical member that is longer in the axial direction than the axial dimension of the internal structure including the bearing portion and the cylindrical member provided side by side in the annular space in the annular space,
The first seal is an O-ring;
The cylindrical member is formed with an inclined surface that is inclined with respect to the inner peripheral surface of the case body,
In the triangular space formed between the inclined surface, a part of the inner peripheral surface of the case body, and a part of the side surface of the member provided adjacent to the cylindrical member in the axial direction, the O-ring is provided. Is installed,
The said cylindrical member is a rotary joint which is a member which does not rotate with respect to the said case body, and is a member which rotates relatively with the said shaft body. It further comprises a stopper provided as detachable in the annular space,
In the state where the stopper is mounted, relative movement in the axial direction between the shaft body and the case body sandwiching the bearing portion and the cylindrical member is restricted, and in the state where the stopper is removed, The rotary joint according to claim 1, which enables relative movement.   The rotary joint according to claim 1 or 2, wherein the second seal is attached to a recess formed in the cylindrical member. The second seal has an annular main body portion, and an inner cylindrical lip portion and an outer cylindrical lip portion that extend in the axial direction from the radially inner portion and the radially outer portion of the main body portion, respectively. The rotary joint as described in any one of Claims 1-3 .

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