JP2019195877A - Method of manufacturing cutting blade - Google Patents

Abstract

To form a plurality of recessed parts, shifting from one another in a rotating direction of a cutting blade, on both side faces of a cutting edge of the cutting blade.SOLUTION: There is provided a method of manufacturing a cutting blade, the method comprising: a grindstone compact preparing process of mixing abrasive grains and a binder for fixing the abrasive grains so as to prepare a ring-shaped grindstone compact having pluralities of recessed parts arranged in a circumferential direction of the ring-shaped grindstone compact at respective outer peripheral parts of a first side face and a second side face; and a burning process of burning the grindstone compact after the grindstone compact preparing process to prepare the cutting blade. The ring-shaped grindstone compact prepared in the grindstone compact preparing process has the plurality of recessed parts of the outer peripheral part of the first side face and the plurality of recessed parts of the outer peripheral part of the second side face shifting from each other in the circumferential direction.SELECTED DRAWING: Figure 6

Description

  The present invention relates to a method for manufacturing a cutting blade mounted on a cutting device.

  The surface of a substantially disk-shaped wafer made of semiconductor is partitioned by a plurality of division lines arranged in a lattice pattern, and each partitioned region is made up of IC (Integrated Circuit), LSI (Large-Scale Integration), etc. A device is formed. When the wafer is finally divided along the division lines, individual device chips are formed.

  In recent years, with the downsizing and thinning of electronic devices, there is an increasing demand for downsizing and thinning of device chips mounted on the electronic devices. Further, as a technology for reducing the mounting area of the device chip, technologies called CSP (Chip Size Package) and QFN (Quad Flat Non-leaded Package) have been developed. In CSP and QFN, a semiconductor package substrate formed by embedding a plurality of devices in a resin such as a mold resin is divided to form individual device chips.

  In the manufacturing process of a chip-type multilayer ceramic capacitor in which a large number of dielectrics and electrodes are stacked, first, a plurality of unsintered ceramic (green ceramics) plate-like materials are stacked. Then, when the laminated plate-like material is divided into individual chip capacitors and the ceramics are sintered, a multilayer ceramic capacitor is formed (see Patent Document 1).

  The semiconductor package substrate and the laminated ceramics are divided by being cut along a planned dividing line by a cutting device equipped with an annular cutting blade, for example. In the cutting apparatus, an optimum type of cutting blade is selected and mounted in accordance with the nature of the workpiece, the details of scheduled processing, and the like. The cutting blade is formed by dispersing and fixing abrasive grains with a binder such as metal or resin. In particular, when cutting a hard material such as CSP, QFN, and raw ceramic, a cutting blade having high strength formed by a method called electroforming is used.

  When a workpiece such as a semiconductor package substrate or laminated ceramics is cut by the cutting blade, machining scraps are generated and scattered on the workpiece. Further, processing heat is generated by friction between the cutting blade and the workpiece. Therefore, when the workpiece is cut with the cutting blade, the cutting fluid is supplied to the workpiece and the cutting blade. Machining waste and heat generated by cutting the workpiece are taken in and removed by the cutting fluid.

  And in order to discharge | emit cutting waste favorably, and in order to acquire a high cooling effect, the several slit which has the function to supply cutting water favorably to a process point is formed in the outer periphery of the cutting blade of a cutting blade There is a case. In particular, when cutting a hard material, it is preferable that the slit is formed in the cutting edge of the cutting blade.

  However, when the slit is formed, the strength of the cutting blade decreases. In recent years, in order to increase the production efficiency of device chips and multilayer ceramic capacitors, the division lines set for the workpiece tend to be narrowed, and a thin cutting blade tends to be used for cutting. In a thin cutting blade, the influence of the strength reduction accompanying formation of a slit is remarkable.

  Therefore, a cutting blade is known in which concave portions that do not penetrate in the thickness direction are formed on the outer peripheral portions of both side surfaces (see Patent Document 2). In the cutting blade, a plurality of recesses are formed on both side surfaces so as to be shifted from each other in the rotation direction of the cutting blade, so that the cutting water can be satisfactorily supplied to the processing point and the strength of the cutting blade is sufficiently ensured.

Japanese Patent Laid-Open No. 4-179505 JP 2012-111005 A

  The recess is formed, for example, by partially removing the outer peripheral portions on both side surfaces of the cutting blade. For example, the concave portion can be formed by etching the cutting blade. However, in etching, it is not easy to suppress variation in depth from the side surfaces of the plurality of recesses formed, and it is not easy to control the depth with high accuracy. This is because when etching is performed on the cutting blade, it is not easy to control the processing time and to manage the etchant.

  In particular, with a thin cutting blade, it is not easy to form the recess itself, and the depth of the recess is likely to vary, and the influence of the accuracy of the depth of the recess on the performance of the cutting blade is significant. It is inefficient and time-consuming to carry out the recess forming step having a high degree of difficulty at the end of the manufacturing method of the cutting blade.

  The present invention has been made in view of such a problem, and an object of the present invention is to provide a cutting blade that can easily form a plurality of recesses that are shifted from each other in the rotational direction of the cutting blade on both side surfaces of the cutting blade. It is to provide a manufacturing method.

  According to one aspect of the present invention, there is provided a method for manufacturing a cutting blade, in which abrasive grains and a binder for fixing the abrasive grains are mixed, and the outer peripheries of each of the first side face and the second side face are mixed. A grindstone molded body producing step for producing a ring shaped grindstone molded body having a plurality of recesses arranged in the circumferential direction of the ring shaped grindstone molded body, and after the grindstone molded body producing step, A ring-shaped grindstone molded body produced in the grindstone molded body production step, and a plurality of recesses in the outer peripheral portion of the first side surface. A cutting blade manufacturing method is provided in which the plurality of recesses in the outer peripheral portion of the second side surface are displaced from each other in the circumferential direction.

  Preferably, the binding material is a metal material. Alternatively, preferably, the binding material is a resin material.

  In the manufacturing method of the cutting blade which concerns on 1 aspect of this invention, a grindstone molded object preparation process is implemented, a grindstone molded object is produced, and a baking process is implemented after that, and a cutting blade is produced. A cutting blade produced by firing a grindstone molded body is so hard that it can withstand the cutting of a workpiece, and is not easily deformed or molded.

  On the other hand, the grindstone molded body before firing is easy to mold. Therefore, when producing a cutting blade having a plurality of recesses shifted from each other in the rotational direction of the cutting blade on both side surfaces of the cutting blade, the plurality of recesses are formed on both side surfaces of the cutting blade in the state of a grindstone formed body, Thereafter, the grindstone compact is fired to produce a cutting blade. In this case, the cutting blade having the plurality of recesses can be formed more easily than when etching is performed on the fired cutting blade, and variations in the depth of the formed recesses are suppressed.

  Therefore, according to one aspect of the present invention, there is provided a method for manufacturing a cutting blade capable of easily forming a plurality of recesses shifted from each other in the rotation direction of the cutting blade on both side surfaces of the cutting blade.

It is a perspective view which shows a cutting device typically. It is a disassembled perspective view which shows the structure of a cutting unit typically. It is a perspective view which shows a cutting blade typically. FIG. 4 (A) is an exploded perspective view of a mold used in the grindstone molding production process, and FIG. 4 (B) is a perspective view schematically showing the mold when a binder is introduced. is there. FIG. 5A is a perspective view schematically showing the lower punch, and FIG. 5B is a perspective view schematically showing the upper punch. FIG. 6 (A) is a cross-sectional view schematically showing the introduction of the binding material into the mold, and FIG. 6 (B) is a cross-sectional view schematically showing the leveling of the binding material introduced into the mold. FIG. 6C is a cross-sectional view schematically showing the alignment of the upper punch, and FIG. 6D is a cross-sectional view schematically showing the binding material press. FIG. 7A is a plan view schematically showing the grindstone molded body before joining, and FIG. 7B is a perspective view schematically showing the joining of the grindstone shaped bodies.

  Embodiments according to the present invention will be described. FIG. 1 is a perspective view schematically showing a cutting device 2 for cutting a workpiece such as a wafer or ceramics as an example of a cutting device using a cutting blade manufactured by the method for manufacturing a cutting blade according to the present embodiment. is there. The casing 4 of the cutting apparatus 2 accommodates a cutting unit 10 to which the cutting blade 12 is attached. A holding table 8 that holds a workpiece is disposed below the cutting unit 10.

  The upper surface of the holding table 8 serves as a holding surface that holds the workpiece. The holding table 8 includes a suction mechanism (not shown) inside, and the suction mechanism is connected to the holding surface. When the workpiece is placed on the holding surface and the suction mechanism is operated, the workpiece is sucked and held by the holding table 8. A processing feed unit (not shown) for processing and feeding the holding table 8 along the X-axis direction is disposed below the holding table 8. When the processing feed unit is operated, the workpiece sucked and held on the holding table 8 can be processed and fed.

  A touch panel display monitor 14 is disposed on the front surface of the casing 4 of the cutting apparatus 2. The display monitor 14 displays the operating status of the cutting device 2 and the like. The operator of the cutting device 2 can input a command to the cutting device 2 using the display monitor 14. In the corner portion of the casing 4 of the cutting device 2, a mounting table 6 is provided on which a cassette for storing a plurality of workpieces is mounted. The mounting table 6 is configured to be movable in the vertical direction, and the cassette is positioned at a predetermined height when the workpiece is carried in and out.

  The workpiece of the cutting apparatus 2 is, for example, a substantially disk-shaped semiconductor wafer having a plurality of devices formed on the surface, a semiconductor package substrate formed by embedding a plurality of devices in a resin such as a mold resin, and the like. is there. When a semiconductor wafer or a semiconductor package substrate is divided for each device, individual device chips are formed.

  Further, the workpiece of the cutting device 2 is, for example, a plurality of ceramic (green ceramics) plates before sintering divided in a manufacturing process of a chip-type multilayer ceramic capacitor in which a large number of dielectrics and electrodes are stacked. It is a layered product. When the multilayer body is divided into individual chip capacitors and the ceramics are sintered, a multilayer ceramic capacitor is formed.

  The workpiece is held on the holding table 8, and the holding table 8 is rotated so that the scheduled division line of the workpiece is aligned with the machining feed direction (X-axis direction) of the holding table 8. Then, the cutting unit 10 is positioned at a predetermined height position, and the holding table 8 is processed and fed in the X-axis direction while the cutting blade 12 is rotated. When the rotating cutting blade 12 contacts the workpiece, the workpiece is cut. Note that the cutting unit 10 is indexed and fed in the Y-axis direction perpendicular to the X-axis direction, and the workpiece is similarly cut along other division lines.

  Next, the detailed structure of the cutting unit 10 is demonstrated using FIG. FIG. 2 is an exploded perspective view schematically showing the structure of the cutting unit 10. The cutting unit 10 includes, for example, a spindle housing 16 that is fixed to an index feed mechanism (not shown) of the cutting device 2. A spindle 18 extending in the front-rear direction (Y-axis direction) is rotatably supported in the spindle housing 16. The tip end portion (front end portion) of the spindle 18 projects forward from the spindle housing 16.

  A rear flange 20 is attached to the tip of the spindle 18. The rear flange 20 includes a flange portion 22 that extends radially outward, and a boss portion 24 that protrudes forward from the surface (front surface) of the flange portion 22. The surface on the outer peripheral side of the flange portion 22 serves as a contact surface 22b that contacts the side surface on the back side of the cutting blade 12. The contact surface 22b is formed in an annular shape when viewed from the axial direction of the spindle 18 (Y-axis direction). The boss portion 24 is formed in a cylindrical shape, and a screw thread is provided on the outer peripheral surface 24a.

  A circular opening 28 through which the boss 24 is inserted is formed in the center of the cutting blade 12, and the cutting blade 12 is attached to the rear flange 20 by inserting the boss 24 into the opening 28.

  The front flange 30 includes a flange portion that extends outward in the radial direction, and the rear surface on the outer peripheral side of the flange portion serves as a contact surface that contacts the front side surface of the cutting blade 12. The contact surface is formed in an annular shape when viewed from the axial direction (Y-axis direction) of the spindle 18. The front flange 30 includes an opening 30 a that is penetrated by the boss portion 24 of the rear flange 20.

  The front flange 30 is attached to the rear flange 20 so that the boss portion 24 penetrates the opening 30a, the cutting blade 12 is sandwiched between the front flange 30 and the rear flange 20, and a fixing nut 32 for fixing the front flange 30 is attached to the boss portion. Tighten to 24.

  Thereafter, the screw portion 26 a of the bolt 26 is tightened into the screw hole 18 b formed in the opening 18 a at the tip of the spindle 18. The cutting blade 12 is attached to the cutting unit 10 as described above.

  A blade cover 34 is provided on the front surface of the spindle housing 16 to accommodate the cutting blade 12 mounted on the spindle 18. The blade cover 34 includes a blade cover main body 36 fixed to the front surface of the spindle housing 16 and a slide cover 38 that can slide in the left-right direction (X-axis direction) with respect to the blade cover main body 36.

  The slide cover 38 is connected to the blade cover main body 36 via the air cylinder 40 and slides with air supplied through the connector 42. After the cutting blade 12 is mounted on the spindle 18, the cutting blade 12 can be accommodated inside the blade cover 34 by sliding the slide cover 38 and closing the blade cover 34.

  A pair of substantially L-shaped nozzles 44 that sandwich the lower portion of the cutting blade 12 forward and backward are fixed to the slide cover 38. Cutting water is supplied to the nozzle 44 through a connector 42 a provided on the slide cover 38. A plurality of jet nozzles (not shown) are formed on the tip side of the nozzle 44 so as to face the cutting blade 12. Cutting water is supplied to the cutting blade 12 and the workpiece through the plurality of jets.

  On the other hand, the blade cover main body 36 is provided with an ejection port (not shown) for supplying cutting water to the cutting blade 12. This spout is connected to a connector 42b provided on the blade cover body 36, and is supplied from the supply hole through the connector 42b.

  Next, the cutting blade 12 manufactured by the cutting blade manufacturing method according to the present embodiment and attached to the cutting unit 10 will be described. FIG. 3 is a perspective view schematically showing the cutting blade 12. The cutting blade 12 is, for example, a cutting blade called a washer type including a cutting edge portion.

  The cutting blade 12 has a binding material formed of resin or metal, and diamond abrasive grains dispersed in the binding material, and is formed in an annular shape having a through hole in the center. When the cutting blade 12 is mounted on the cutting unit 10 and rotated around an axis along the penetration direction of the through hole and brought into contact with the workpiece, the workpiece is cut.

  When the workpiece is cut by the cutting blade 12, machining scraps are generated and scattered on the workpiece. Further, processing heat is generated by friction between the cutting blade 12 and the workpiece. When cutting with the cutting blade 12, cutting fluid is supplied to the cutting blade 12 and the workpiece by the cutting unit 10, and machining waste and heat are taken in and removed by the cutting fluid.

  A cutting blade is known in which a plurality of slits having a function of supplying cutting water to a processing point is formed on the outer periphery of the cutting blade in order to discharge the cutting waste well and to obtain a high cooling effect. ing. However, when the slit is formed, the strength of the cutting blade decreases.

  Therefore, in the cutting blade 12 formed by the method for manufacturing a cutting blade according to the present embodiment, a plurality of rows arranged along the circumferential direction of the cutting blade 12 on the outer peripheral portions of the first side surface 46a and the second side surface 46b. A recess 48 is formed. Each of the plurality of recesses 48 has a predetermined length in the circumferential direction, radial direction, and thickness direction of the cutting blade 12.

  The length of the recess 48 in the radial direction is, for example, greater than the depth at which the cutting blade 12 cuts into the workpiece so that the cutting fluid can enter the recess 48 when the cutting blade 12 cuts the workpiece. Set to The circumferential length of the recess 48 is set within a range in which the cutting ability of the cutting blade 12 can be sufficiently secured and the cutting water can be sufficiently supplied to the portion to be processed. The length of the concave portion 48 in the thickness direction is set to, for example, half or less the thickness of the cutting blade 12 in order to ensure the necessary strength of the cutting blade 12.

  The plurality of recesses 48 on the outer periphery of the first side surface 46a and the plurality of recesses 48 on the outer periphery of the second side surface 46b are offset from each other in the circumferential direction. When the plurality of recesses 48 are thus formed on both side surfaces of the cutting blade 12, cutting water can be satisfactorily supplied to the processing point, and the strength of the cutting blade 12 is sufficiently ensured.

  Next, a method for manufacturing the cutting blade according to this embodiment will be described. When forming the cutting blade 12 in which a plurality of concave portions 48 are formed on both side surfaces, it is conceivable to partially remove the outer peripheral portion of the cutting blade by a method such as etching with respect to the annular cutting blade.

  However, it is not easy to form a plurality of recesses 48 of a predetermined size with high accuracy and with reduced variations. In particular, in recent years, thin cutting blades tend to be used for cutting. However, it is particularly difficult to form the recesses 48 with high accuracy while suppressing variations, and the influence of the variations is also remarkable. It becomes. Therefore, in the method for manufacturing the cutting blade 12 according to the present embodiment, the plurality of recesses 48 are formed at the stage of the ring-shaped grindstone molded body before being fired to become the cutting blade 12.

  In the manufacturing method, first, a grindstone molding process is performed in which abrasive grains and a binder for fixing the abrasive grains are mixed to produce a ring-shaped grindstone compact. An example of a grindstone molding production process will be described. FIG. 4A is an exploded perspective view of a mold used in the grindstone molding production process, and FIG. 4B is a perspective view schematically showing a mold into which a binder is introduced.

  The metal mold | die used at this grindstone molded object production process is demonstrated. As shown in FIG. 4 (A), the mold includes a disk-like floor board 50, an outer peripheral ring 52, an annular lower punch 54, a cylindrical intermediate punch 56, and an annular upper punch 58. ,including.

  The floor board 50 has a flat upper surface and a lower surface, and is formed in a disk shape having a diameter larger than the diameter of the cutting blade 12 to be formed. The outer peripheral ring 52 has an outer diameter corresponding to the outer diameter of the bottom plate 50, has an inner diameter corresponding to the outer diameter of the formed cutting blade 12, and is thicker than the thickness of the cutting blade 12. .

  The lower punch 54 has an outer diameter corresponding to the outer diameter of the cutting blade 12, an inner diameter corresponding to the inner diameter of the cutting blade 12, and is thinner than the thickness of the outer peripheral ring 52. The middle punch 56 has an outer diameter corresponding to the inner diameter of the cutting blade 12 and has a thickness similar to the thickness of the outer peripheral ring 52. The upper punch 58 has an outer diameter corresponding to the outer diameter of the cutting blade 12 and has an inner diameter corresponding to the inner diameter of the cutting blade 12.

  In the grindstone forming process, as shown in FIG. 4B, the outer ring 52 is placed on the bottom plate 50, the lower punch 54 is accommodated in the through hole 52 a of the outer ring 52, and the through hole 54 a of the lower punch 54 is placed. The middle punch 56 is accommodated. Then, a groove-like space having the upper surface of the lower punch 54 as a bottom is formed between the outer peripheral ring 52 and the middle punch 56. At this time, the outer peripheral ring 52, the lower punch 54, and the middle punch 56 are supported by the bottom plate 50.

  A more detailed structure of the lower punch 54 and the upper punch 58 will be described in detail with reference to FIGS. 5 (A) and 5 (B). FIG. 5A is a perspective view schematically showing the lower punch 54, and FIG. 5B is a perspective view schematically showing the upper punch 58.

  The upper surface 54b and the bottom surface 54c of the lower punch 54 are flat, and as shown in FIG. 5A, a plurality of convex portions 54d are arranged at equal intervals on the outer peripheral portion of the upper surface 54b. The plurality of convex portions 54d are formed in shapes and positions corresponding to the shapes and positions of the concave portions 48 formed in the outer peripheral portion of the first side surface 46a of the cutting blade 12 to be manufactured.

  Further, the upper surface 58b and the bottom surface 58c of the upper punch 58 are flat, and as shown in FIG. 5B, a plurality of convex portions 58d are arranged at equal intervals on the outer peripheral portion of the bottom surface 58c. The plurality of convex portions 58d are formed in a shape and position corresponding to the shape and position of the concave portion 48 formed in the outer peripheral portion of the second side face 46b of the cutting blade 12. The lower punch 54 and the upper punch 58 may be members having the same shape.

  Next, the grindstone molding production process will be described in detail. FIG. 6A is a cross-sectional view schematically showing introduction of a binding material into a mold. First, as shown in FIG. 6A, a bonding material 60 containing abrasive grains is introduced into a groove-like space formed by the outer peripheral ring 52, the lower punch 54, and the middle punch 56.

  FIG. 6B is a cross-sectional view schematically showing the leveling of the binder introduced into the mold. Next, as shown in FIG. 6B, using the leveling jig 62, the upper surface of the bonding material 60 introduced into the groove-shaped space of the mold is flattened while the bonding material 60 is in the bonding material 60. The binding material 60 is pushed into the bottom of the groove-like space so that no gap remains.

  Next, the upper punch 58 is disposed above the groove-like space with the bottom surface 58c of the upper punch 58 facing downward. FIG. 6C is a cross-sectional view schematically showing the alignment of the upper punch 58. At this time, a convex portion 54d (see FIG. 5A) formed on the upper surface 54b of the lower punch 54 and a convex portion 58d (see FIG. 5B) formed on the bottom surface 58c of the upper punch 58 are formed. The direction of the upper punch 58 is adjusted so as not to overlap each other.

  FIG. 6D is a cross-sectional view schematically showing the pressing of the binder. Next, the upper punch 58 is lowered into the groove-shaped space, and the bonding material 60 is sandwiched between the upper surface 54b of the lower punch 54 and the bottom surface 58c of the upper punch 58, and the bonding material 60 is pressed to grindstone compact 64. Form.

  At this time, the shape of the formed grindstone formed body 64 is a shape reflecting the shapes of the upper surface 54 b of the lower punch 54 and the bottom surface 58 c of the upper punch 58. That is, the grindstone molded body 64 to be manufactured has the same shape as the shape of the cutting blade 12 shown in FIG. 3, and the outer circumferential portions of the first side surface and the second side surface are along the circumferential direction of the grinding stone molded body. A shape having a plurality of recesses arranged side by side. The plurality of recesses in the outer peripheral portion of the first side surface and the plurality of recesses in the outer peripheral portion of the second side surface are shifted from each other in the circumferential direction.

  In the method for manufacturing a cutting blade according to the present embodiment, after the grindstone molded body producing step, the firing step of firing the grindstone molded body to produce the cutting blade 12 is performed. When the firing step is performed, the grindstone molded body 64 is fired, and the cutting blade 12 having a hardness that can withstand the cutting of the workpiece is obtained. The firing temperature in the firing step is, for example, 600 ° C to 1000 ° C.

  The produced cutting blade 12 has a plurality of recesses 48 arranged along the circumferential direction on the outer peripheral portions of the first side surface 46a and the second side surface 46b. The plurality of recesses 48 on the outer periphery of the first side surface 46a and the plurality of recesses 48 on the outer periphery of the second side surface 46b are offset from each other in the circumferential direction.

  In the cutting blade manufacturing method according to the present embodiment, the cutting blade produced in the firing step is not partially removed to form the recess 48, but the grindstone molded body having the recess 48 before the firing step is performed. 64 is formed. The grindstone molded body 64 before firing is not harder than the cutting blade 12 after firing, and the recess 48 is easily formed. Therefore, according to the present embodiment, it is possible to easily form a plurality of recesses 48 that are shifted from each other in the rotational direction of the cutting blade 12 on both side surfaces of the cutting blade 12.

  In particular, in the method for manufacturing a cutting blade according to the present embodiment, it is easy to manufacture a thin cutting blade having a recess 48. In the thin-side cutting blade, the influence of variations in the depth or the like of the recess 48 on the performance of the cutting blade is remarkable. However, in the manufacturing method, the recess 48 can be formed with a small variation. Can be manufactured.

  In addition, this invention is not limited to description of the said embodiment, A various change can be implemented. For example, in the above-described embodiment, the grindstone molded body 64 including the concave portion is formed by a mold including the lower punch 54 having the convex portion 54d and the upper punch 58 having the convex portion 58d. It is not limited to this.

  A modified example of the grindstone forming process will be described with reference to FIGS. 7 (A) and 7 (B). In this modified example, two identically shaped grindstone molded bodies having a plurality of slits penetrating in the thickness direction formed on the outer peripheral portion were combined, and a plurality of concave portions were formed on each of the outer peripheral portions on both side surfaces. A grindstone compact is produced. It is a top view which shows typically the grindstone molded object before a coupling | bonding, and FIG.7 (B) is a perspective view which shows typically the coupling | bonding of a grindstone molded object.

  FIG. 7A shows a single grindstone molded body 64a, 64b before joining. The grindstone molded bodies 64a and 64b are produced by forming a plurality of slits 64d penetrating in the thickness direction on the outer periphery of the annular grindstone molded body. For example, the slit 64d can be formed by a method such as etching.

  Note that the formation of the slit 64 by a method such as etching is easier than the formation of the concave portion by a method such as etching. This is because when forming the recess, it is necessary to control the process with high accuracy for stopping the etching at a predetermined degree of progress. However, when forming the slit 64d, it is not necessary to control the process with such high accuracy. .

  Next, as shown in FIG. 7B, the grindstone molded body 64a and the grindstone molded body 64b are overlapped and joined. At this time, the grindstone molded body 64a and the grindstone molded body 64b are coupled so that the respective through holes 64c are completely overlapped and the respective slits 64d are not overlapped.

  In this case, the slit 64d formed in the grindstone molded body 64a is closed by the grindstone molded body 64b, and the slit 64d formed in the grindstone molded body 64b is closed by the grindstone molded body 64a. In other words, each of the first side surface and the second side surface has a plurality of concave portions arranged in the circumferential direction on the outer peripheral portion, the plurality of concave portions on the outer peripheral portion of the first side surface, and the second side surface A grindstone molded body 64 that is displaced from each other in the circumferential direction can be formed with the plurality of recesses in the outer peripheral portion. Thereafter, the cutting blade 12 can be formed by firing the grindstone molded body 64.

  In addition, the structure, method, and the like according to the above-described embodiment can be appropriately modified and implemented without departing from the scope of the object of the present invention.

2 Cutting device 4 Housing 6 Mounting table 8 Holding table 10 Cutting unit 12 Cutting blade 14 Display monitor 16 Spindle housing 18 Spindle 18a, 22a, 28, 30a, 32a Open 18b Screw hole 20 Rear flange 22 Flange 22b Contact surface 24 Boss portion 24a Outer peripheral surface 26 Fixing bolt 26a Screw portion 30 Front flange 32 Fixing nut 34 Blade cover 36 Blade cover main body 38 Slide cover 40 Air cylinder 42, 42a, 42b Connector 44 Nozzle 46a, 46b Side surface 48 Recess 50 Bottom plate 52 Outer ring 54 Lower punch 52a, 54a, 58a, 64c Through hole 54b, 58b Upper surface 54c, 58c Bottom surface 54d, 58d Protrusion 56 Middle punch 58 Upper punch 60 Binding material 62 Leveling jigs 64, 64a, 6 b grindstone molded body 64d slit

Claims (3)

A method for manufacturing a cutting blade, comprising:
A plurality of recesses mixed with abrasive grains and a binding material for fixing the abrasive grains and arranged along the circumferential direction of the ring-shaped grindstone molded body on the outer peripheral portions of the first side surface and the second side surface, respectively. A grindstone molded body producing step for producing a ring-shaped grindstone molded body having
A firing step of firing the grinding wheel compact to produce the cutting blade after the grinding stone compact preparation step,
The ring-shaped grindstone molded body produced in the grinding wheel molded body production process includes the plurality of concave portions on the outer peripheral portion of the first side surface and the plurality of concave portions on the outer peripheral portion of the second side surface. A method for manufacturing a cutting blade, characterized by being offset from each other in the circumferential direction.   The method for manufacturing a cutting blade according to claim 1, wherein the binder is a metal material.   The method for manufacturing a cutting blade according to claim 1, wherein the binder is a resin material.