JP2019177501A - Piezoelectric actuator, liquid discharge head, liquid discharge unit, and liquid discharge device - Google Patents

Abstract

To reduce variation of a drive characteristic.SOLUTION: A common electrode wiring member 116 connected to a common external electrode 124 of a piezoelectric element 112 in each row passes between a bottom face of the piezoelectric member 12 and a base member 13 and is drawn to outside faces 13a and 13a sides of the base member 13 in a portion 116b along a direction orthogonal to a lamination direction of the piezoelectric element 112, and is bent in a direction along the lamination direction of the piezoelectric element 112. A portion 116a in a direction along the lamination direction of the piezoelectric element 112 is drawn to an opposite side of a surface for holding the piezoelectric member 12 of the base member 13 along the side face 13a of the base member 13.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a piezoelectric actuator, a liquid discharge head, a liquid discharge unit, and an apparatus for discharging liquid.

  Some liquid ejection heads that eject liquid use piezoelectric actuators.

  Conventionally, it has a piezoelectric member in which a plurality of columnar stacked piezoelectric elements are arranged, and the other end face electrode is drawn to the one end face electrode side through the internal electrode at the non-driven portion at both ends in the arrangement direction, and the same face of the piezoelectric element In addition, there is known an arrangement in which an end face electrode to be an individual electrode and an end face electrode to be a common electrode are arranged and a flexible wiring board having individual electrode wiring and common electrode wiring is connected (Patent Document 1).

JP-A-10-286951

  However, in the configuration disclosed in Patent Document 1, there is a difference in the distance from the common electrode wiring arranged at both ends of the flexible wiring board to the end face electrode that is the common electrode of each piezoelectric element. Therefore, in the arrangement direction of the piezoelectric elements, there is a problem that the impedance at the center is larger than the impedance at both ends, and the drive characteristics vary due to voltage fluctuation.

  The present invention has been made in view of the above-described problems, and an object thereof is to reduce variation in driving characteristics.

In order to solve the above problems, the piezoelectric actuator according to the present invention is:
Piezoelectric layers and internal electrodes are alternately stacked, and the internal electrodes are alternately drawn out to different end faces and arranged in a plurality of rows of columnar piezoelectric elements respectively connected to the end face electrodes,
An individual electrode wiring member connected to one end face electrode of the piezoelectric element in each row;
A common electrode wiring member connected to the other end face electrode of the piezoelectric element in each row,
At least one of the common electrode wiring and the individual electrode wiring member in each row is configured to include a portion along the stacking direction of the piezoelectric elements and a portion along a direction orthogonal to the stacking direction. .

  According to the present invention, variation in drive characteristics can be reduced.

It is a disassembled perspective explanatory drawing of the piezoelectric actuator which concerns on 1st Embodiment of this invention. It is a cross-sectional explanatory drawing along the direction orthogonal to the arrangement direction of piezoelectric elements. It is side surface explanatory drawing by the side of the one end surface electrode (individual external electrode) along the arrangement direction of a piezoelectric element similarly. It is side sectional explanatory drawing by the side of the other end surface electrode (common external electrode) along the arrangement direction of a piezoelectric element similarly. It is sectional explanatory drawing which follows the direction orthogonal to the arrangement direction of the piezoelectric element of the piezoelectric actuator which concerns on 2nd Embodiment of this invention. FIG. 3 is an external perspective view illustrating an example of a liquid discharge head according to the present invention. It is sectional explanatory drawing of the direction orthogonal to the nozzle arrangement direction of the head. It is a schematic explanatory drawing of an example of the apparatus which discharges the liquid which concerns on this invention. It is a plane explanatory view of an example of a head unit of the device. It is a block explanatory view of an example of a liquid circulation device. It is principal part plane explanatory drawing of the other example of the apparatus which discharges the liquid which concerns on this invention. It is principal part side explanatory drawing of the apparatus. It is principal part plane explanatory drawing of the other example of the liquid discharge unit which concerns on this invention. It is front explanatory drawing of the further another example of the liquid discharge unit which concerns on this invention.

  Embodiments of the present invention will be described below with reference to the accompanying drawings. A first embodiment of the present invention will be described with reference to FIGS. FIG. 1 is an exploded perspective view of the piezoelectric actuator according to the embodiment, and FIG. 2 is a cross-sectional view along the direction orthogonal to the arrangement direction of the piezoelectric elements. 3 is an explanatory side view of one end face electrode (individual external electrode) along the arrangement direction of piezoelectric elements, and FIG. 4 is an explanatory side view of the other end face electrode (common external electrode) side along the arrangement direction of piezoelectric elements. FIG.

  The piezoelectric actuator 11 includes two laminated piezoelectric members 12 and 12 which are bonded and held on a base member 13 with an adhesive 114. The piezoelectric member 12 forms the required number of columnar piezoelectric elements 112 (112A, 112B) in a comb shape at a predetermined interval by processing the grooves 130 by half-cut dicing. Thereby, the columnar piezoelectric elements 112 are arranged on the base member 13 in a plurality of rows (here, two rows).

  In the present embodiment, the piezoelectric element 112A has a bi-pitch configuration that is used as a driving piezoelectric element, and the piezoelectric element 112B is used as a non-driving piezoelectric element. However, it is possible to adopt a normal pitch configuration in which both the piezoelectric elements 112A and 112B are used as driving piezoelectric elements.

  The piezoelectric element 112 (piezoelectric member 12) is obtained by alternately stacking piezoelectric layers 121 and internal electrodes 122 (122A, 122B). Note that the lower portion of the piezoelectric member 12 lower than the internal electrode 122 (on the base member 13 side) is formed of only the piezoelectric layer 121 without the internal electrode 122 being provided.

  The internal electrodes 122A and 122B are alternately drawn out from both end faces in the direction orthogonal to the arrangement direction of the piezoelectric elements 112, and are connected to the individual external electrodes 123 and the common external electrode 124, which are end face electrodes, respectively.

  At this time, the two piezoelectric members 12 and 12 are arranged so that the common external electrodes 124 of the piezoelectric element 112 face each other.

  The individual electrode wiring member 115 connected to the individual external electrode 123 that is one end face electrode of the piezoelectric element 112 (in this embodiment, the piezoelectric element 112A), and the common external electrode 124 that is the other end face electrode of the piezoelectric element 112. And a common electrode wiring member 116 connected to.

  The individual electrode wiring member 115 has a wiring pattern 115A connected to the individual external electrode 123 of the piezoelectric element 112A. The individual electrode wiring member 115 is disposed along the outer surface 13a of the base member 13 in a direction along the stacking direction of the piezoelectric elements 112, and is drawn out to the opposite side of the surface of the base member 13 that holds the piezoelectric member 12. Yes.

  The common electrode wiring member 116 has a wiring pattern 116A connected to the common external electrode 124 of the piezoelectric element 112A. The width of the wiring pattern 116A in the piezoelectric element array direction is made wider than the width of the common external electrode 124, but is not limited to this.

  The common electrode wiring member 116 is bent toward the bottom surface side of the piezoelectric member 12 and passes between the bottom surface of the piezoelectric member 12 and the base member 13 at a portion 116b along a direction orthogonal to the stacking direction of the piezoelectric elements 112. 13 is drawn to the outer surface 13a side.

  The common electrode wiring member 116 is bent at the outer surface 13a of the base member 13 in a direction along the stacking direction of the piezoelectric elements 112, and a portion 116a in the direction along the stacking direction of the piezoelectric elements 112 is a side surface 13a of the base member 13. Is extended to the opposite side of the surface of the base member 13 that holds the piezoelectric member 12.

  In this way, the individual electrode wiring member 115 and the common electrode wiring member 116 are pulled out along the stacking direction of the piezoelectric elements 112 and integrated by the integration member 117. In the present embodiment, the base member 13 is integrated in the vicinity of the side opposite to the surface holding the piezoelectric member 12.

  As described above, the common electrode wiring member 116 connected to the common external electrode 124 which is the opposing end face electrode of the piezoelectric element 112A includes a portion 116a along the stacking direction of the piezoelectric element 112 and a portion 116b along the direction orthogonal to the stacking direction. It is arranged including.

  As a result, the common electrode wiring member 116 connected to the common external electrode 124 that is the two end-face electrodes facing each other can be drawn out of the base member 13 and integrated with the individual electrode wiring member 115.

  Accordingly, the wiring pattern 116A of the common electrode wiring member 116 can be connected to the common external electrode 124 of each piezoelectric element 112A in the piezoelectric element array direction of the piezoelectric member 12.

  As a result, variation in impedance due to a difference in distance from the wiring pattern 116A to the common external electrode 124 is reduced between the piezoelectric elements 112A, so that variation in drive characteristics is reduced.

  Next, a second embodiment of the present invention will be described with reference to FIG. FIG. 5 is a cross-sectional explanatory diagram along a direction orthogonal to the arrangement direction of the piezoelectric elements of the piezoelectric actuator according to the embodiment.

  In the present embodiment, a through hole 113 is formed in the base member 13 along the stacking direction of the piezoelectric elements 112.

  The common electrode wiring members 116, 116 connected to the piezoelectric members 12, 12 are bent after passing through the through holes 113 through the portions 116 a in the direction along the stacking direction of the piezoelectric elements 112, A portion 116b in a direction along the orthogonal direction is drawn to the outer surfaces 13a and 13a along the surface 13c opposite to the surface of the base member 13 that holds the piezoelectric member 12.

  The common electrode wiring member 116 drawn to the side surfaces 13 a and 13 a of the base member 13 is integrated with the individual electrode wiring member 115.

  With this configuration, since the common electrode wiring member 116 does not pass between the piezoelectric member 12 and the base member 13, the bonding strength of the piezoelectric member 12 to the base member 13 is increased, and the piezoelectric element 112 is driven. Drive characteristics are improved.

  In this embodiment, a driver IC (driving IC) 150 that drives the piezoelectric element 112 </ b> A is mounted on the individual electrode wiring member 115, and the driver IC 150 is disposed in contact with the base member 13.

  As a result, the base member 13 can also be used as a heat dissipation member for the driver IC 150.

  Further, in each of the above embodiments, the example in which the opposite end face electrodes of the two rows of the piezoelectric elements 112 are common external electrodes is described, but the end face electrodes of each row are individual external electrodes, It can also be set as the structure which connects an electrode wiring member. In addition, one of the opposing end face electrodes of the row of the two piezoelectric elements 112 may be an individual external electrode and the other is a common external electrode, and the individual electrode wiring member and the common electrode member may be connected to each other.

  Furthermore, the number of rows of piezoelectric elements can be three or more. Further, the piezoelectric elements in each row are not integrated, and may be configured to be individually joined and held on the base member.

  Next, an example of the liquid discharge head according to the present invention will be described with reference to FIGS. FIG. 6 is an external perspective view of the head, and FIG. 7 is a cross-sectional explanatory view along a direction orthogonal to the nozzle arrangement direction of the head. Here, only one row of piezoelectric elements is shown.

  In the liquid discharge head 100, a nozzle plate 1, a flow path plate 2, and a vibration plate member 3 as a wall surface member are laminated and joined. And the piezoelectric actuator 11 which concerns on this invention which displaces the vibration area | region (diaphragm) 30 of the diaphragm member 3, and the common flow path member 20 which serves also as the frame member of the head are provided.

  The nozzle plate 1 has a plurality of nozzles 4 that discharge liquid.

  The flow path plate 2 includes a plurality of individual liquid chambers 6 that communicate with the plurality of nozzles 4 via the nozzle communication passages 5, a plurality of supply-side fluid resistance units 7 that respectively communicate with the plurality of individual liquid chambers 6, and 1 or 2. As described above, one or a plurality of supply-side liquid introduction portions 8 that communicate with the supply-side fluid resistance portion 7 are formed. The supply side liquid introduction part 8 communicates with the supply side common flow path 10 through the supply side opening 9 of the diaphragm member 3.

  In this embodiment, the supply flow path 41 is constituted by the supply side opening 9, the supply side liquid introduction part 8 and the supply side fluid resistance part 7, and the supply side flow path is constituted by the supply flow path 41 and the supply side common flow path 10. It is composed. In the present embodiment, the flow path plate 2 is formed by laminating a plurality of plate-like members 2A to 2E, but is not limited thereto.

  The vibration plate member 3 has a deformable vibration region 30 that forms the wall surface of the individual liquid chamber 6 of the flow path plate 2. Here, the diaphragm member 3 has a two-layer structure (not limited), and is formed of a first layer that forms a thin portion and a second layer that forms a thick portion from the flow path plate 2 side. A deformable vibration region 30 is formed in a portion corresponding to the individual liquid chamber 6.

  The piezoelectric actuator 11 that deforms the vibration region 30 of the diaphragm member 3 is disposed on the opposite side of the diaphragm member 3 from the individual liquid chamber 6. The piezoelectric element 112 </ b> A of the piezoelectric actuator 11 is joined to the vibration region (vibration plate) 30 of the vibration plate member 3.

  The flow path plate 2 includes a plurality of individual recovery flow paths 56 along the surface direction of the flow path plate 2 that respectively communicate with the plurality of individual liquid chambers 6 via the nozzle communication paths 5 and one or more individual recovery flows. One or a plurality of recovery side liquid lead-out portions 58 communicating with the passage 56 are formed. The recovery-side liquid lead-out portion 58 communicates with the recovery-side common flow channel 50 via the recovery-side opening 59 of the diaphragm member 3.

  The common flow path member 20 forms the supply side common flow path 10 and the recovery side common flow path 50. The supply-side common flow channel 10 communicates with the supply port 71, and the recovery-side common flow channel 50 communicates with the collection port 72.

  In the liquid discharge head 100, for example, the voltage applied to the piezoelectric element 112A is lowered from the reference potential (intermediate potential), so that the piezoelectric element 112A contracts, and the vibration region 30 of the diaphragm member 3 is drawn, so that the individual liquid chamber 6 As the volume expands, the liquid flows into the individual liquid chamber 6.

  Thereafter, the voltage applied to the piezoelectric element 112A is increased to extend the piezoelectric element 112A in the stacking direction, and the vibration region 30 of the diaphragm member 3 is deformed in the direction toward the nozzle 4 to contract the volume of the individual liquid chamber 6. As a result, the liquid in the individual liquid chamber 6 is pressurized, and the liquid is discharged from the nozzle 4.

  Further, the liquid that is not discharged from the nozzle 4 passes through the nozzle 4 and is collected from the individual collection flow path 56 to the collection side common flow path 50, and from the collection side common flow path 50 to the supply side common flow path 10 through the external circulation path. Will be supplied again.

  Note that the driving method of the head is not limited to the above example (drawing-pushing), and it is also possible to perform striking or pushing depending on the direction to which the drive waveform is given.

  Thus, since the liquid ejection head 100 includes the piezoelectric actuator 11 according to the present invention, variations in ejection characteristics due to variations in drive characteristics are reduced.

  Next, an example of a device for ejecting liquid according to the present invention will be described with reference to FIGS. FIG. 8 is a schematic explanatory view of the apparatus, and FIG. 9 is an explanatory plan view of an example of a head unit of the apparatus.

  The printing apparatus 500, which is a device for discharging the liquid, includes a carry-in means 501 for carrying in the continuous body 510, a guide carrying means 503 for guiding and carrying the continuous body 510 carried from the carry-in means 501 to the printing means 505, and a continuous body. A printing unit 505 that performs printing to form an image by discharging a liquid to 510, a drying unit 507 that dries the continuum 510, and an unloading unit 509 that unloads the continuum 510 are provided.

  The continuous body 510 is fed out from the original winding roller 511 of the carry-in means 501, guided and conveyed by the rollers of the carry-in means 501, the guide conveyance means 503, the drying means 507, and the carry-out means 509, and the take-up roller 591 of the carry-out means 509 It is wound up by.

  The continuous member 510 is transported on the transport guide member 559 by the printing unit 505 so as to face the head unit 550 and the head unit 555, and an image is formed by the liquid ejected from the head unit 550. Post-processing is performed with the processing liquid.

  Here, the head unit 550 includes, for example, full-line head arrays 551A, 551B, 551C, and 551D for four colors from the upstream side in the transport direction (hereinafter referred to as “head array 551” when colors are not distinguished). Is arranged.

  Each head array 551 is a liquid ejecting unit, and ejects black K, cyan C, magenta M, and yellow Y liquids to the transported continuous body 510, respectively. The type and number of colors are not limited to this.

  The head array 551 includes, for example, the liquid ejection heads according to the present invention (which are also simply referred to as “heads”) 100 arranged in a staggered manner on the base member 552, but is not limited thereto.

  Next, an example of the liquid circulation device will be described with reference to FIG. FIG. 10 is a block diagram of the circulation device. Although only one head is illustrated here, when a plurality of heads are arranged, a supply-side liquid path and a recovery-side liquid path are respectively provided on the supply side and the recovery side of the plurality of heads via a manifold or the like. Will be connected.

  The liquid circulation device 600 includes a supply tank 601, a recovery tank 602, a main tank 603, a first liquid feed pump 604, a second liquid feed pump 605, a compressor 611, a regulator 612, a vacuum pump 621, a regulator 622, and a supply side pressure sensor 631. And a recovery-side pressure sensor 632.

  Here, the compressor 611 and the vacuum pump 621 constitute means for generating a differential pressure between the pressure in the supply tank 601 and the pressure in the recovery tank 602.

  The supply-side pressure sensor 631 is connected between the supply tank 601 and the head 100 and connected to a supply-side liquid path connected to the supply port 71 of the head 100. The recovery side pressure sensor 632 is connected between the head 1 and the recovery tank 602 and is connected to a recovery side liquid path connected to the recovery port 72 of the head 100.

  One of the recovery tanks 602 is connected to the supply tank 601 via the first liquid feed pump 604, and the other of the recovery tanks 602 is connected to the main tank 603 via the second liquid feed pump 605.

  As a result, the liquid flows from the supply tank 601 through the supply port 71 into the head 100 and is recovered from the recovery port 72 to the recovery tank 602, and the liquid is supplied from the recovery tank 602 to the supply tank 601 by the first liquid feed pump 604. By being sent, a circulation path through which the liquid circulates is configured.

  Here, a compressor 611 is connected to the supply tank 601 and is controlled so that a predetermined positive pressure is detected by the supply-side pressure sensor 631. On the other hand, a vacuum pump 621 is connected to the recovery tank 602 and is controlled so that a predetermined negative pressure is detected by the recovery side pressure sensor 632.

  Thereby, the negative pressure of the meniscus can be kept constant while circulating the liquid through the head 100.

  Further, when liquid is discharged from the nozzle 4 of the head 100, the amount of liquid in the supply tank 601 and the recovery tank 602 decreases. Therefore, the liquid is replenished from the main tank 603 to the recovery tank 602 using the second liquid feeding pump 605 as appropriate.

  The liquid replenishment timing from the main tank 603 to the recovery tank 602 is provided in the recovery tank 602 such that liquid replenishment is performed when the liquid level in the recovery tank 602 falls below a predetermined level. It can be controlled by the detection result of a liquid level sensor or the like.

  Next, another example of a printing apparatus as an apparatus for ejecting a liquid according to the present invention will be described with reference to FIGS. FIG. 11 is an explanatory plan view of the main part of the apparatus, and FIG. 12 is an explanatory side view of the main part of the apparatus.

  The printing apparatus 500 is a serial type apparatus, and the carriage 403 is reciprocated in the main scanning direction by the main scanning moving mechanism 493. The main scanning movement mechanism 493 includes a guide member 401, a main scanning motor 405, a timing belt 408, and the like. The guide member 401 spans the left and right side plates 491A and 491B and holds the carriage 403 so as to be movable. The carriage 403 is reciprocated in the main scanning direction by the main scanning motor 405 via the timing belt 408 spanned between the driving pulley 406 and the driven pulley 407.

  The carriage 403 is equipped with a liquid discharge unit 440 in which the liquid discharge head 100 and the head tank 441 according to the present invention are integrated. The liquid discharge head 100 of the liquid discharge unit 440 discharges, for example, yellow (Y), cyan (C), magenta (M), and black (K) liquids. Further, the liquid ejection head 100 is mounted with a nozzle row composed of a plurality of nozzles arranged in the sub-scanning direction orthogonal to the main scanning direction, and the ejection direction facing downward.

  The liquid discharge head 100 is connected to the liquid circulation device 600 described above, and a liquid of a required color is circulated and supplied.

  The printing apparatus 500 includes a transport mechanism 495 for transporting the paper 410. The transport mechanism 495 includes a transport belt 412 serving as transport means, and a sub-scanning motor 416 for driving the transport belt 412.

  The conveyance belt 412 adsorbs the sheet 410 and conveys it at a position facing the liquid ejection head 100. The transport belt 412 is an endless belt and is stretched between the transport roller 413 and the tension roller 414. The adsorption can be performed by electrostatic adsorption or air suction.

  The transport belt 412 rotates in the sub-scanning direction when the transport roller 413 is rotationally driven by the sub-scanning motor 416 via the timing belt 417 and the timing pulley 418.

  Further, on one side of the carriage 403 in the main scanning direction, a maintenance / recovery mechanism 420 that performs maintenance / recovery of the liquid ejection head 100 is disposed on the side of the transport belt 412.

  The maintenance / recovery mechanism 420 includes, for example, a cap member 421 for capping the nozzle surface (surface on which the nozzle is formed) of the liquid ejection head 100, a wiper member 422 for wiping the nozzle surface, and the like.

  The main scanning movement mechanism 493, the maintenance / recovery mechanism 420, and the transport mechanism 495 are attached to a housing including the side plates 491A and 491B and the back plate 491C.

  In the printing apparatus 500 configured as described above, the paper 410 is fed and sucked onto the transport belt 412, and the paper 410 is transported in the sub-scanning direction by the circular movement of the transport belt 412.

Therefore, the liquid ejection head 100 is driven according to the image signal while moving the carriage 403 in the main scanning direction, thereby ejecting liquid onto the stopped paper 410 to form an image.

  Next, another example of the liquid discharge unit according to the present invention will be described with reference to FIG. FIG. 13 is an explanatory plan view of the main part of the unit.

  Of the members constituting the liquid ejection unit 440 and the device for ejecting the liquid, a casing portion composed of side plates 491A, 491B and a back plate 491C, a main scanning movement mechanism 493, a carriage 403, and a liquid The discharge head 100 is configured.

  A liquid discharge unit in which the above-described maintenance / recovery mechanism 420 is further attached to, for example, the side plate 491B of the liquid discharge unit 440 can be configured.

  Next, still another example of the liquid discharge unit according to the present invention will be described with reference to FIG. FIG. 14 is an explanatory front view of the unit.

  The liquid discharge unit 440 includes a liquid discharge head 100 to which a flow path component 444 is attached, and a tube 456 connected to the flow path component 444.

  The flow path component 444 is disposed inside the cover 442. A head tank 441 may be included instead of the flow path component 444. In addition, a connector 443 that is electrically connected to the liquid ejection head 100 is provided above the flow path component 444.

  In the present application, the liquid to be ejected is not particularly limited as long as it has a viscosity and surface tension that can be ejected from the head, and the viscosity becomes 30 mPa · s or less at room temperature, normal pressure, or by heating and cooling. It is preferable. More specifically, solvents such as water and organic solvents, colorants such as dyes and pigments, functional materials such as polymerizable compounds, resins, and surfactants, and biocompatible materials such as DNA, amino acids, proteins, and calcium. , Edible materials such as natural pigments, etc., suspensions, emulsions, etc. These include, for example, inkjet inks, surface treatment liquids, components of electronic elements and light emitting elements, and formation of electronic circuit resist patterns It can be used in applications such as a liquid for use, a material liquid for three-dimensional modeling.

  As energy generation sources for discharging liquid, piezoelectric actuators (laminated piezoelectric elements and thin film piezoelectric elements), thermal actuators using electrothermal transducers such as heating resistors, electrostatic actuators consisting of a diaphragm and counter electrode are used. To be included.

  The “liquid ejection unit” is a unit in which functional parts and mechanisms are integrated with a liquid ejection head, and includes an assembly of parts related to liquid ejection. For example, the “liquid discharge unit” includes a head tank, a carriage, a supply mechanism, a maintenance / recovery mechanism, a main scanning movement mechanism, and a liquid circulation device in which at least one of the configurations of the liquid circulation unit is combined.

  Here, the term “integrated” refers to, for example, a liquid discharge head, a functional component, and a mechanism that are fixed to each other by fastening, adhesion, engagement, etc., and one that is held movably with respect to the other. Including. Further, the liquid discharge head, the functional component, and the mechanism may be configured to be detachable from each other.

  For example, there is a liquid discharge unit in which a liquid discharge head and a head tank are integrated. Also, there are some in which the liquid discharge head and the head tank are integrated by being connected to each other by a tube or the like. Here, a unit including a filter may be added between the head tank and the liquid discharge head of these liquid discharge units.

  In addition, there is a liquid discharge unit in which a liquid discharge head and a carriage are integrated.

  In addition, there is a liquid discharge unit in which the liquid discharge head and the scanning movement mechanism are integrated by holding the liquid discharge head movably on a guide member that constitutes a part of the scanning movement mechanism. In some cases, a liquid discharge head, a carriage, and a main scanning movement mechanism are integrated.

  Also, there is a liquid discharge unit in which a cap member that is a part of the maintenance / recovery mechanism is fixed to a carriage to which the liquid discharge head is attached, and the liquid discharge head, the carriage, and the maintenance / recovery mechanism are integrated .

  In addition, there is a liquid discharge unit in which a tube is connected to a liquid discharge head to which a head tank or a flow path component is attached, and the liquid discharge head and a supply mechanism are integrated. The liquid from the liquid storage source is supplied to the liquid discharge head via this tube.

  The main scanning movement mechanism includes a guide member alone. The supply mechanism includes a single tube and a single loading unit.

  The “apparatus for ejecting liquid” includes an apparatus that includes a liquid ejection head or a liquid ejection unit and that ejects liquid by driving the liquid ejection head. The apparatus for ejecting a liquid includes not only an apparatus capable of ejecting a liquid to an object to which the liquid can adhere, but also an apparatus for ejecting the liquid into the air or liquid.

  This “apparatus for discharging liquid” may include means for feeding, transporting, and discharging a liquid to which liquid can adhere, as well as a pre-processing apparatus and a post-processing apparatus.

  For example, as a “liquid ejecting device”, an image forming device that forms an image on paper by ejecting ink, a powder is formed in layers to form a three-dimensional model (three-dimensional model) There is a three-dimensional modeling apparatus (three-dimensional modeling apparatus) that discharges a modeling liquid onto the powder layer.

  Further, the “apparatus for ejecting liquid” is not limited to an apparatus in which significant images such as characters and figures are visualized by the ejected liquid. For example, what forms a pattern etc. which does not have a meaning in itself, and what forms a three-dimensional image are also included.

  The above-mentioned “applicable liquid” means that the liquid can be attached at least temporarily and adheres and adheres, or adheres and penetrates. Specific examples include recording media such as paper, recording paper, recording paper, film, and cloth, electronic parts such as electronic substrates and piezoelectric elements, powder layers (powder layers), organ models, and test cells. Yes, unless specifically limited, includes everything that the liquid adheres to.

  The material of the above-mentioned “material to which liquid can adhere” is not limited as long as liquid such as paper, thread, fiber, fabric, leather, metal, plastic, glass, wood, ceramics can be adhered even temporarily.

  In addition, the “device for ejecting liquid” includes a device in which the liquid ejection head and the device to which the liquid can adhere move relatively, but is not limited thereto. Specific examples include a serial type apparatus that moves the liquid discharge head, a line type apparatus that does not move the liquid discharge head, and the like.

  In addition, as the “device for ejecting liquid”, other than the above, a treatment liquid coating apparatus that ejects a treatment liquid onto a sheet in order to apply the treatment liquid to the surface of the sheet for the purpose of modifying the surface of the sheet, There is an injection granulation apparatus that granulates raw material fine particles by spraying a composition liquid in which raw materials are dispersed in a solution through a nozzle.

  Note that the terms “image formation”, “recording”, “printing”, “printing”, “printing”, “modeling” and the like in the terms of the present application are all synonymous.

DESCRIPTION OF SYMBOLS 100 Liquid discharge head 1 Nozzle plate 4 Nozzle 2 Flow path plate 3 Vibration plate member 6 Individual liquid chamber 10 Supply side common flow path 11 Piezoelectric actuator 12 Piezoelectric member 13 Base member 20 Common flow path member 41 Supply flow path 42 Recovery flow path 50 Collection side common flow path 112 Piezoelectric element 115 Individual electrode wiring member 116 Common electrode wiring member 121 Piezoelectric layer 122A, 122B Internal electrode 123 Individual external electrode (end face electrode 124 Common external electrode (end face electrode 403 Carriage 440) Liquid discharge unit 500 Printing device ( Liquid discharge device)
550 Head unit 600 Liquid circulation device

Claims (8)

Piezoelectric layers and internal electrodes are alternately laminated, and the internal electrodes are alternately drawn out to different end faces and arranged in a plurality of rows of columnar piezoelectric elements connected to the end face electrodes, respectively.
An individual electrode wiring member connected to one end face electrode of the piezoelectric element in each row;
A common electrode wiring member connected to the other end face electrode of the piezoelectric element in each row,
At least one of the common electrode wiring and the individual electrode wiring member in each row is arranged to include a portion along the stacking direction of the piezoelectric elements and a portion along a direction orthogonal to the stacking direction. A piezoelectric actuator. The plurality of rows of piezoelectric elements are held on a base member,
One of the common electrode wiring member and the individual electrode wiring member in each row is bent in a direction orthogonal to the stacking direction, passes between the piezoelectric element and the base member, and is on the outer surface side of the base member. The piezoelectric actuator according to claim 1, wherein the piezoelectric actuator is drawn out and bent in a direction along the stacking direction. The plurality of rows of piezoelectric elements are held on a base member,
The base member is provided with a through hole in a direction along the stacking direction between the rows,
One of the common electrode wiring member and the individual electrode wiring member in each row is drawn through the through hole to a surface opposite to the surface of the base member that holds the piezoelectric element, and is orthogonal to the stacking direction. The piezoelectric actuator according to claim 1, wherein the piezoelectric actuator is bent and arranged. A drive IC for driving the piezoelectric element is mounted on the individual electrode wiring,
The piezoelectric actuator according to claim 2, wherein the driving IC is in contact with the base member. A liquid discharge head comprising the piezoelectric actuator according to claim 1.   A liquid discharge unit comprising the liquid discharge head according to claim 5. A head tank for storing liquid to be supplied to the liquid discharge head, a carriage on which the liquid discharge head is mounted, a supply mechanism for supplying liquid to the liquid discharge head, a maintenance / recovery mechanism for maintaining and recovering the liquid discharge head, and the liquid The liquid discharge unit according to claim 6, wherein the liquid discharge head is integrated with at least one of a main scanning movement mechanism that moves the discharge head in the main scanning direction.   An apparatus for ejecting liquid, comprising the liquid ejection head according to claim 5 or the liquid ejection unit according to claim 6 or 7.

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