JP2019174140A - Magnetic sensor - Google Patents

Abstract

To provide a magnetic sensor capable of stably supporting an external magnetic body and reducing the influence of a diamagnetic field without generating an offset with respect to a magnetosensitive element.SOLUTION: The magnetic sensor includes a sensor board 20 mounted on a mounting surface 12 of a mounting substrate 10 and on which magnetosensitive elements R1-R4 are formed on an element formation surface 21 perpendicular to the mounting surface 12, an external magnetic body 40 which collects magnetic flux in the z direction to the magnetosensitive elements R1-R4, and a non-magnetic support 50 which is arranged between the mounting substrate 10 and the external magnetic body 40 so that the external magnetic body 40 is supported and positioned at a prescribed height from the mounting surface 12. According to the present invention, even when the length of the external magnetic body 40 is long, the external magnetic body 40 can be stably supported. Moreover, since the magnetic sensor is provided with the non-magnetic support 50, the external magnetic body 40 can be made to have an elongated shape without generating an offset with respect to the magnetosensitive elements R1-R4, thereby reducing the influence of the diamagnetic field.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a magnetic sensor, and more particularly to a magnetic sensor including an external magnetic body that collects magnetic flux in a magnetosensitive element.

  In addition to a sensor substrate on which a magnetosensitive element is formed, an external magnetic material for collecting magnetic flux on the magnetosensitive element may be used for the magnetic sensor. For example, in FIG. 6 of Patent Document 1, a mounting substrate (B), a sensor substrate (10) mounted on the mounting substrate so that the element forming surface is parallel to the mounting surface, and an element forming surface of the sensor substrate A magnetic sensor comprising an external magnetic body (21) placed thereon is disclosed. If an external magnetic body is placed on the element formation surface of the sensor substrate as in the magnetic sensor described in Patent Document 1, it is possible to increase the detection sensitivity for a magnetic field in the vertical direction.

  In the magnetic sensor described in Patent Document 1, in order to further increase the detection sensitivity with respect to the magnetic field in the vertical direction, the height of the external magnetic body may be increased. However, when the height of the external magnetic body is increased, it becomes difficult to stably support the external magnetic body. In order to solve such a problem, as described in Patent Document 2, a method of mounting the sensor substrate on the mounting substrate so that the element formation surface is perpendicular to the mounting surface is conceivable. . According to this, since the external magnetic body can be fixed to the mounting substrate, the support of the external magnetic body does not become unstable even when the length of the external magnetic body is long.

JP 2009-276159 A JP 2017-90192 A

  However, since the height of the external magnetic body in the direction perpendicular to the mounting surface is substantially the same as the height of the sensor substrate in the magnetic sensor described in Patent Document 2, the size of the sensor substrate and the external magnetic body Depending on the length, there is a problem that the influence of the demagnetizing field becomes large and the detection characteristic of the magnetic field is deteriorated.

  In order to solve this, it is only necessary to make the external magnetic body more elongated by reducing the height of the external magnetic body. In this case, the height position of the external magnetic body is on the sensor substrate. There was a problem of offset with respect to the magnetosensitive element.

  Accordingly, an object of the present invention is to provide a magnetic sensor that can stably support an external magnetic body and can reduce the influence of a demagnetizing field without causing an offset with respect to a magnetic sensitive element.

  A magnetic sensor according to the present invention includes a mounting substrate having a mounting surface, a sensor substrate mounted on the mounting surface of the mounting substrate and having a magnetosensitive element formed on an element forming surface perpendicular to the mounting surface, and an element forming surface. A first external magnetic body that collects magnetic flux in a direction perpendicular to the magnetic sensing element and a mounting substrate and the first external magnetic body are disposed, and the first external magnetic body is disposed at a predetermined height from the mounting surface. And a first non-magnetic support member that supports the first non-magnetic support member.

  According to the present invention, since the sensor substrate is laid and mounted on the mounting substrate so that the element formation surface is perpendicular to the mounting surface, even if the length of the external magnetic body is long, A magnetic body can be supported stably. In addition, since the first non-magnetic support body that supports the first external magnetic body at a predetermined height is provided, the external magnetic body is made more elongated without causing an offset with respect to the magnetosensitive element. It becomes possible. Thereby, the influence of a demagnetizing field is reduced.

  In the present invention, the first external magnetic body is a rod-shaped body whose longitudinal direction is a direction perpendicular to the element formation surface, and one end in the longitudinal direction may cover the element formation surface. According to this, since the magnetic flux collected by the first external magnetic body collides with the element forming surface, it is possible to efficiently apply the magnetic flux to the magnetosensitive element.

  In the present invention, the magnetosensitive element includes first and second magnetosensitive elements, and the first magnetic layer and the first magnetic gap are provided on the element formation surface of the sensor substrate via the first magnetic gap. A second magnetic layer facing the magnetic layer and a third magnetic layer facing the first magnetic layer via the second magnetic gap are provided, and the first magnetosensitive element includes: The second magnetic sensitive element is disposed on the magnetic path formed by the second magnetic gap, and one end of the first external magnetic body is disposed on the first magnetic gap. The magnetic layer may be covered. According to this, since the magnetic flux collected by the first external magnetic body is distributed to the second and third magnetic layers via the first magnetic layer, the first magnetosensitive element and It is possible to apply a reverse magnetic flux to the second magnetosensitive element.

  In the present invention, the magnetosensitive element further includes third and fourth magnetosensitive elements, and on the element forming surface of the sensor substrate, a first magnetic layer facing the first magnetic layer via a third magnetic gap is provided. 4 magnetic layers and a fifth magnetic layer facing the first magnetic layer through the fourth magnetic gap are provided, and the third magnetosensitive element is formed by the third magnetic gap. The fourth magnetosensitive element is disposed on the magnetic path formed by the fourth magnetic gap, and the center position of the height of the first external magnetic body with respect to the mounting surface is It may be located between the first and fourth magnetosensitive elements and the second and third magnetosensitive elements. According to this, since the magnetic flux collected by the first external magnetic body is distributed to the second to fifth magnetic layers via the first magnetic layer, the first and third sensations are obtained. It is possible to apply a magnetic flux in the opposite direction to the magnetic element and the second and fourth magnetic sensitive elements. In addition, since the center position of the height of the first external magnetic body is located between the first and fourth magnetic sensitive elements and the second and third magnetic sensitive elements, the first to fourth sensitive elements are provided. It is possible to reduce variations in magnetic flux applied to the magnetic element.

  The magnetic sensor according to the present invention further includes a second external magnetic body and a second nonmagnetic support that supports the second external magnetic body so as to be positioned at a predetermined height from the mounting surface. The second external magnetic body further comprising: a back surface located on the opposite side of the element forming surface; and first and second side surfaces perpendicular to the element forming surface and the mounting surface and located on the opposite sides of each other. May cover the first side surface, the second side surface and the back surface of the sensor substrate. According to this, since the magnetic flux collected by the second external magnetic body is applied to the element formation surface via the back surface and the side surface of the sensor substrate, it is possible to efficiently apply the magnetic flux to the magnetosensitive element. Become.

  In the present invention, the second external magnetic body may further cover the element formation surface of the sensor substrate. According to this, it becomes possible to further reduce the leakage of magnetic flux.

  As described above, the magnetic sensor according to the present invention can stably support the external magnetic body and can reduce the influence of the demagnetizing field without causing an offset with respect to the magnetosensitive element.

FIG. 1 is a schematic perspective view showing the appearance of the magnetic sensor 1 according to the first embodiment of the present invention. FIG. 2 is an xy plan view of the magnetic sensor 1. FIG. 3 is a circuit diagram for explaining a connection relationship between the magnetic sensitive elements R1 to R4. FIG. 4 is a schematic perspective view showing the appearance of the magnetic sensor 1A according to the first modification. FIG. 5 is a schematic perspective view showing the appearance of the magnetic sensor 1B according to the second modification. FIG. 6 is a schematic perspective view showing the appearance of the magnetic sensor 2 according to the second embodiment of the present invention. FIG. 7 is an xy plan view of the magnetic sensor 2. FIG. 8 is a schematic perspective view showing the appearance of the magnetic sensor 2A according to the third modification. FIG. 9 is a schematic perspective view showing the appearance of a magnetic sensor 2B according to a fourth modification. FIG. 10 is a schematic perspective view showing the appearance of the magnetic sensor 3 according to the third embodiment of the present invention. FIG. 11 is a schematic perspective view showing the appearance of the magnetic sensor 4 according to the fourth embodiment of the present invention. FIG. 12 is a schematic perspective view showing the appearance of the magnetic sensor 5 according to the fifth embodiment of the present invention.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

<First Embodiment>
FIG. 1 is a schematic perspective view showing the appearance of the magnetic sensor 1 according to the first embodiment of the present invention. FIG. 2 is an xy plan view of the magnetic sensor 1.

  As shown in FIGS. 1 and 2, the magnetic sensor 1 according to the present embodiment includes a mounting substrate 10, a sensor substrate 20 mounted on the mounting surface 12 of the mounting substrate 10, a first external magnetic body 40, and a first substrate. And a nonmagnetic support 50. The mounting substrate 10 is a mother board or a module substrate, and the mounting surface 12 forms an xz plane.

  The sensor substrate 20 has a substantially rectangular parallelepiped shape, and includes an element forming surface 21 that forms an xy plane, first and second side surfaces 23 and 24 that are positioned on opposite sides of the yz plane, and an element forming surface 21. It has a back surface 22 located on the opposite side and constituting the xy plane. The side surfaces 23 and 24 are surfaces that are substantially orthogonal to the element formation surface 21, but need not be completely orthogonal. Further, the back surface 22 is a surface substantially parallel to the element forming surface 21, but does not have to be completely parallel.

  Magnetosensitive elements R1 to R4 and magnetic layers 31 to 35 are formed on the element forming surface 21 of the sensor substrate 20. The magnetosensitive elements R1 to R4 are not particularly limited as long as the physical characteristics change depending on the magnetic flux density, but are preferably magnetoresistive elements whose electric resistance changes according to the direction of the magnetic field. In the present embodiment, the sensitivity directions (fixed magnetization directions) of the magnetic sensitive elements R1 to R4 are all aligned on the plus side in the x direction.

  The magnetic layers 31 to 35 function as magnetic paths on the element formation surface 21. The magnetic layers 31 to 35 may be a film made of a composite magnetic material in which a magnetic filler is dispersed in a resin material, or may be a thin film or foil made of a soft magnetic material such as nickel or permalloy. It may be a thin film or a bulk sheet made of ferrite or the like.

  The magnetic layer 31 is disposed at a substantially central portion in the x direction of the element forming surface 21, and the magnetic layers 32 and 34 are disposed on one side (left side) in the x direction when viewed from the magnetic layer 31. The magnetic layers 33 and 35 are arranged on the other side (right side) in the x direction when viewed from the layer 31. The magnetic layers 32 and 34 and the magnetic layers 33 and 35 are symmetrical with respect to a virtual yz plane that crosses the center of the magnetic layer 31 in the x direction. The magnetic layer 32 and the magnetic layer 34, and the magnetic layer 33 and the magnetic layer 35 are symmetrical with respect to a virtual xz plane that crosses the center of the magnetic layer 31 in the y direction.

  The magnetic material layer 31 and the magnetic material layers 32 to 35 are opposed to each other via magnetic gaps G1 to G4 extending in the y direction, and a magnetic sensitive element R1 is formed on a magnetic path formed by these magnetic gaps G1 to G4. To R4 are arranged. The width direction of the magnetic gaps G1 to G4 does not have to be the x direction, and may be the z direction, or may be an oblique direction having an x direction component and a z direction component. Furthermore, the magnetic sensitive elements R1 to R4 do not have to be strictly positioned between the magnetic gaps G1 to G4, and may be positioned on the magnetic path formed by the presence of the magnetic gap.

  The external magnetic body 40 is a magnetic current collector made of a soft magnetic material having a high magnetic permeability such as ferrite, and plays a role of collecting magnetic flux in the z direction in the magnetic sensitive elements R1 to R4. The external magnetic body 40 is a rod-like body whose longitudinal direction is the z direction, and one end 41 in the z direction covers a substantially central portion of the magnetic layer 31 formed on the element forming surface 21. For this reason, the magnetic flux collected by the external magnetic body 40 is distributed almost evenly to the magnetic sensing elements R1 to R4.

  FIG. 3 is a circuit diagram for explaining a connection relationship between the magnetic sensitive elements R1 to R4.

  As shown in FIG. 3, the magnetosensitive element R1 is connected between the terminal electrodes E3 and E6, the magnetosensitive element R2 is connected between the terminal electrodes E4 and E5, and the magnetosensitive element R3 is connected between the terminal electrodes E3 and E4. The magnetosensitive element R4 is connected between the terminal electrodes E5 and E6. Here, the power supply potential Vcc is applied to the terminal electrode E6, and the ground potential GND is applied to the terminal electrode E4. Since all the magnetic sensitive elements R1 to R4 have the same magnetization fixed direction, when the magnetic flux collected by the external magnetic body 40 is distributed to the magnetic sensitive elements R1 to R4, the external magnetic body 40 is used. There is a difference between the resistance change amounts of the magnetosensitive elements R1 and R3 located on one side as viewed from the viewpoint and the resistance change amounts of the magnetosensitive elements R2 and R4 located on the other side as viewed from the external magnetic body 40. Thereby, the magnetic sensitive elements R1 to R4 constitute a differential bridge circuit, and a change in the electric resistance of the magnetic sensitive elements R1 to R4 according to the magnetic flux density appears in the terminal electrodes E3 and E5.

  Differential signals output from the terminal electrodes E3 and E5 are input to the mounting substrate 10 or a differential amplifier 14 provided outside thereof. The output signal of the differential amplifier 14 is fed back to the terminal electrode E2. As shown in FIG. 3, a compensation coil C is connected between the terminal electrode E <b> 1 and the terminal electrode E <b> 2, whereby the compensation coil C generates a magnetic field according to the output signal of the differential amplifier 14. With this configuration, when a change in the electrical resistance of the magnetosensitive elements R1 to R4 corresponding to the magnetic flux density appears in the terminal electrodes E3 and E5, a current corresponding to the magnetic flux density flows to the compensation coil C, and a magnetic flux in the reverse direction is generated. . Thereby, the external magnetic flux is canceled out. If the current output from the differential amplifier 14 is converted into current and voltage by the detection circuit 16, the strength of the external magnetic flux can be detected.

  The nonmagnetic support 50 is made of a nonmagnetic material such as silicon, glass, or resin, and plays a role of supporting the external magnetic body 40 so as to be positioned at a predetermined height from the mounting surface 12. That is, the height of the external magnetic body 40 in the y direction is lower than the height of the sensor substrate 20 in the y direction. Therefore, when the external magnetic body 40 is directly fixed to the mounting substrate 10, the position of the external magnetic body 40 in the y direction. Is displaced from the center position of the magnetic layer 31, but by raising the external magnetic body 40 by interposing the nonmagnetic support 50 between the mounting substrate 10 and the external magnetic body 40, The one end 41 can be disposed at the center of the magnetic layer 31. However, it is not essential that the one end 41 of the external magnetic body 40 is located at the complete center of the magnetic layer 31, and the center position of the height of the external magnetic body 40 in the y direction is the magnetosensitive elements R1, R4 and the magnetosensitive elements. It suffices if it is located between the elements R2 and R3.

  As described above, in the present embodiment, since the sensor substrate 20 is mounted on the mounting substrate 10 so that the element formation surface 21 is perpendicular to the mounting surface 12, the z direction of the external magnetic body 40 is Even if the length at is long, the external magnetic body 40 can be stably supported. In addition, since the position of the external magnetic body 40 in the y direction is raised using the nonmagnetic support 50, the height of the external magnetic body 40 in the y direction is reduced and the substantially central portion of the magnetic layer 31 is reduced. Magnetic flux can be collected. Thereby, compared with the case where the height of the external magnetic body 40 in the y direction is substantially the same as the height of the sensor substrate 20 in the y direction, the external magnetic body 40 has a more elongated shape, thereby reducing the influence of the demagnetizing field. It becomes possible to do. Since the magnetic flux collected by the external magnetic body 40 is supplied to the substantially central portion of the magnetic layer 31, the magnetic flux can be distributed almost evenly to the magnetic sensing elements R1 to R4.

  In the example shown in FIG. 1, the length in the z direction and the width in the x direction of the external magnetic body 40 and the nonmagnetic support 50 are the same, but this point is not essential in the present invention. Therefore, like the magnetic sensor 1A according to the first modification shown in FIG. 4, the nonmagnetic support 50 may be divided into a plurality of parts, or like the magnetic sensor 1B according to the second modification shown in FIG. In addition, the width of the nonmagnetic support 50 in the x direction may be wider than the width of the external magnetic body 40 in the x direction.

<Second Embodiment>
FIG. 6 is a schematic perspective view showing the appearance of the magnetic sensor 2 according to the second embodiment of the present invention. FIG. 7 is an xy plan view of the magnetic sensor 2.

  As shown in FIGS. 6 and 7, the magnetic sensor 2 according to the present embodiment further includes a second external magnetic body 60 and a second nonmagnetic support 70 mounted on the mounting surface 12 of the mounting substrate 10. Is different from the magnetic sensor 1 according to the first embodiment. Since the other basic configuration is the same as that of the magnetic sensor 1 according to the first embodiment, the same elements are denoted by the same reference numerals, and redundant description is omitted.

  The external magnetic body 60 is made of the same soft magnetic material as the external magnetic body 40, covers the side surfaces 23 and 24 and the back surface 22 of the sensor substrate 20, and has a shape with the z direction as the longitudinal direction. Thereby, compared with the magnetic sensor 1 by 1st Embodiment, it becomes possible to further improve the directivity with respect to the external magnetic field of az direction. In the present embodiment, a part of the external magnetic body 60 covers a part of the magnetic layers 32 to 35 formed on the element forming surface 21. According to this, since the leakage magnetic flux is reduced in the magnetic path passing through the external magnetic body 40, the magnetic layers 31 to 35, and the external magnetic body 60 in this order, higher detection sensitivity can be obtained.

  The nonmagnetic support 70 is made of a nonmagnetic material similar to the nonmagnetic support 50 and plays a role of supporting the external magnetic body 60 so as to be positioned at a predetermined height from the mounting surface 12. That is, the height of the external magnetic body 60 in the y direction is lower than the height of the sensor substrate 20 in the y direction. Therefore, when the external magnetic body 60 is directly fixed to the mounting substrate 10, the external magnetic body 60 is moved to the magnetosensitive element R1. Although offset in the y direction with respect to ~ R4, the offset is eliminated by raising the external magnetic body 60 by interposing the non-magnetic support 70 between the mounting substrate 10 and the external magnetic body 60. Can do.

  Thus, since the magnetic sensor 2 according to the present embodiment includes the second external magnetic body 60, the directivity with respect to the external magnetic field in the z direction can be further increased. In addition, since the position of the external magnetic body 60 in the y direction is raised using the nonmagnetic support 70, the height of the external magnetic body 60 in the y direction is reduced and the y with respect to the magnetosensitive elements R1 to R4 is reduced. The direction offset can be eliminated. Thereby, since the external magnetic body 60 becomes a more elongated shape, it becomes possible to reduce the influence of a demagnetizing field.

  In the example shown in FIG. 6, both the nonmagnetic support 50 and the nonmagnetic support 70 are used, but this point is not essential in the present invention. Therefore, unlike the magnetic sensor 2A according to the third modification shown in FIG. 8, the nonmagnetic support 70 is omitted, and the height of the external magnetic body 60 in the y direction is set to the height of the sensor substrate 20 in the y direction as a whole. The nonmagnetic support 50 is omitted and the height of the external magnetic body 40 in the y direction is set to the height of the sensor substrate 20 as in the magnetic sensor 2B according to the fourth modification shown in FIG. You may make it substantially correspond with the height in the y direction as a whole.

<Third Embodiment>
FIG. 10 is a schematic perspective view showing the appearance of the magnetic sensor 3 according to the third embodiment of the present invention.

  As shown in FIG. 10, the magnetic sensor 3 according to the present embodiment is the second embodiment in that the external magnetic body 40 has a tapered shape in which the height in the y direction is enlarged in the vicinity of the sensor substrate 20. It is different from the magnetic sensor 2 according to the form. Accordingly, the height of the nonmagnetic support 50 in the y direction is reduced in the vicinity of the sensor substrate 20. Since the other basic configuration is the same as that of the magnetic sensor 2 according to the second embodiment, the same elements are denoted by the same reference numerals, and redundant description is omitted.

  According to the present embodiment, since the height of the external magnetic body 40 in the y direction is enlarged in the vicinity of the sensor substrate 20, the magnetic flux collected by the external magnetic body 40 is efficiently supplied to the magnetic layer 31. It becomes possible to do. In addition, since the height of the external magnetic body 40 in the y direction is reduced in the portion away from the sensor substrate 20, the influence of the demagnetizing field can be reduced as in the first and second embodiments. It becomes possible.

  As illustrated in the present embodiment, in the present invention, the height of the external magnetic body 40 in the y direction does not have to be constant, and a partial height may be enlarged.

<Fourth Embodiment>
FIG. 11 is a schematic perspective view showing the appearance of the magnetic sensor 4 according to the fourth embodiment of the present invention.

  As shown in FIG. 11, the magnetic sensor 4 according to the present embodiment is different from the magnetic sensor 2 according to the second embodiment in that the height of the external magnetic body 60 in the y direction is enlarged in the vicinity of the sensor substrate 20. It is different. Accordingly, the height of the nonmagnetic support 70 in the y direction is reduced in the vicinity of the sensor substrate 20. Since the other basic configuration is the same as that of the magnetic sensor 2 according to the second embodiment, the same elements are denoted by the same reference numerals, and redundant description is omitted.

  According to the present embodiment, since the height in the y direction of the external magnetic body 60 is enlarged in the vicinity of the sensor substrate 20, the magnetic layers 32 to 35 efficiently collect the magnetic flux collected by the external magnetic body 60. It becomes possible to supply to. In addition, since the height of the external magnetic body 60 in the y direction is reduced in the portion away from the sensor substrate 20, the influence of the demagnetizing field can be reduced as in the first and second embodiments. It becomes possible.

  As illustrated in the present embodiment, in the present invention, the height of the external magnetic body 60 in the y direction need not be constant, and the height of a part of the external magnetic body 60 may be enlarged.

<Fifth Embodiment>
FIG. 12 is a schematic perspective view showing the appearance of the magnetic sensor 5 according to the fifth embodiment of the present invention.

  As shown in FIG. 12, the magnetic sensor 5 according to the present embodiment has the magnetic sensor 2 according to the second embodiment in that the width in the x direction of the external magnetic body 60 is reduced at a portion away from the sensor substrate 20. Is different. Accordingly, the planar shape of the nonmagnetic support body 70 is processed so as to match the planar shape of the external magnetic body 60. However, the planar shape of the nonmagnetic support body 70 is the nonmagnetic support in the second embodiment. The shape of the body 70 may be the same. Since the other basic configuration is the same as that of the magnetic sensor 2 according to the second embodiment, the same elements are denoted by the same reference numerals, and redundant description is omitted.

  According to the present embodiment, since the width of the external magnetic body 60 in the x direction is reduced at a portion away from the sensor substrate 20, the external magnetic body 60 becomes a more elongated shape. Thereby, it is possible to further reduce the influence of the demagnetizing field as compared with the second embodiment.

  The preferred embodiments of the present invention have been described above, but the present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the spirit of the present invention. Needless to say, it is included in the range.

1 to 5, 1A, 1B, 2A, 2B Magnetic sensor 10 Mounting substrate 12 Mounting surface 14 Differential amplifier 16 Detection circuit 20 Sensor substrate 21 Element formation surface 22 Back surface 23, 24 Side surfaces 31 to 35 Magnetic body layer 40 First external Magnetic body 41 One end 50 of the external magnetic body First nonmagnetic support body 60 Second external magnetic body 70 Second nonmagnetic support body C Compensation coil E1 to E6 Terminal electrodes G1 to G4 Magnetic gaps R1 to R4 Magnetosensitive element

Claims (6)

A mounting substrate having a mounting surface;
A sensor substrate mounted on the mounting surface of the mounting substrate and having a magnetosensitive element formed on an element forming surface perpendicular to the mounting surface;
A first external magnetic body that collects magnetic flux in a direction perpendicular to the element formation surface on the magnetosensitive element;
A first non-magnetic support disposed between the mounting substrate and the first external magnetic body and supporting the first external magnetic body at a predetermined height from the mounting surface; The magnetic sensor according to claim 1, further comprising:   The first external magnetic body is a rod-shaped body having a longitudinal direction in a direction perpendicular to the element formation surface, and one end in the longitudinal direction covers the element formation surface. Item 2. The magnetic sensor according to Item 1. The magnetosensitive element includes first and second magnetosensitive elements,
On the element formation surface of the sensor substrate, a first magnetic layer, a second magnetic layer facing the first magnetic layer via a first magnetic gap, and a second magnetic layer A third magnetic layer facing the first magnetic layer through a gap is provided,
The first magnetosensitive element is disposed on a magnetic path formed by the first magnetic gap;
The second magnetosensitive element is disposed on a magnetic path formed by the second magnetic gap;
The magnetic sensor according to claim 2, wherein the one end of the first external magnetic body covers the first magnetic body layer. The magnetic sensitive element further includes third and fourth magnetic sensitive elements,
On the element formation surface of the sensor substrate, a fourth magnetic layer facing the first magnetic layer via a third magnetic gap, and the first magnetic layer via a fourth magnetic gap. A fifth magnetic layer facing the magnetic layer, and
The third magnetosensitive element is disposed on a magnetic path formed by the third magnetic gap;
The fourth magnetosensitive element is disposed on a magnetic path formed by the fourth magnetic gap;
The center position of the height of the first external magnetic body with respect to the mounting surface is located between the first and fourth magnetic sensitive elements and the second and third magnetic sensitive elements. The magnetic sensor according to claim 3. A second external magnetic material;
A second non-magnetic support that supports the second external magnetic body so as to be positioned at a predetermined height from the mounting surface;
The sensor substrate further includes a back surface located on the opposite side of the element formation surface, and first and second side surfaces that are perpendicular to the element formation surface and the mounting surface and located on the opposite sides. ,
The magnetic sensor according to claim 1, wherein the second external magnetic body covers the first side surface, the second side surface, and the back surface of the sensor substrate.   The magnetic sensor according to claim 5, wherein the second external magnetic body further covers the element formation surface of the sensor substrate.

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