JP2019173128A - Vacuum processing apparatus - Google Patents

Abstract

To maintain a shield state.SOLUTION: Provided is a slide seal members 110 and 210 slidable corresponding to thermal deformation occurring when the temperature of a shower plate 105 rises and falls, slidable to seal a space 101b surrounded by the shower plate, an electrode flange 104 and an insulation shield 106 and connecting a peripheral portion of the shower plate to the electrode flange.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a vacuum processing apparatus, and more particularly to a technique suitable for use in performing processing using plasma.

    2. Description of the Related Art Conventionally, plasma processing apparatuses that perform film surface treatment, particularly plasma CVD or etching, as a treatment using plasma, are known. In this plasma processing apparatus, a processing chamber is constituted by an insulating flange sandwiched between a chamber and an electrode flange so as to have a film formation space (reaction chamber). In the processing chamber, there are provided a shower plate connected to the electrode flange and having a plurality of jets, and a heater on which the substrate is disposed.

A space formed between the shower plate and the electrode flange is a gas introduction space into which the source gas is introduced. That is, the shower plate partitions the processing chamber into a film formation space where a film is formed on the substrate and a gas introduction space.
A high frequency power source is connected to the electrode flange. The electrode flange and shower plate function as a cathode electrode.

  In such a configuration, since the processing temperature is high during the plasma processing, the shower plate expands thermally, and contracts when the temperature is lowered, such as at the end of the processing.

Patent Document 1 exemplifies a gas distribution plate (shower plate) 20 suspended from a side wall or suspension 24 made of a thin flexible sheet metal.
Here, if the width of the diffuser 20 expands or contracts in response to temperature changes during normal operation of the chamber, the flexible sidewall or suspension 24 is bent to a certain amount to absorb this deformation, and It is described that the sidewall 24 obtains good RF current contact with the gas distribution plate 20 and that two adjacent sidewall 24 portions fit in the vicinity of each of the four corners of the diffuser.

Japanese Patent No. 4430253

  However, in the technique of Patent Document 1, since the side wall 24 and the like are made of a flexible metal, when performing large area processing such as FPD having a side of 1800 mm or more, the thermal contraction of the shower plate However, the amount of deformation of the side wall 24 cannot be dealt with, and the number of parts handling processes is reduced. In a severe case, there is a problem that it becomes almost disposable.

  Furthermore, in the technique described in Patent Document 1, for example, gas leaked to the outside of the peripheral edge of the shower plate is such that “a gas-tight seal is not required between the upper lips 26 of the flexible side wall 24”. I don't care about reaching the substrate to be processed. In particular, since the seal at the corner described as “four corners of the diffuser” is incomplete, there is a demand to solve this.

  Patent Document 1 states that “the preferred temperature of the gas distribution plate 20 during the plasma CVD operation is at least 200 ° C., preferably 250 ° C. to 325 ° C., and most preferably about 300 ° C.”. However, in recent years, an apparatus capable of processing temperatures exceeding 400 ° C. is required.

The present invention has been made in view of the above circumstances, and intends to achieve the following object.
1. To improve the gas seal leaking from around the shower plate.
2. Capable of responding to thermal expansion and contraction of shower plate in large area processing.
3. To be able to cope with the increase in processing temperature over 400 ° C.

The vacuum processing apparatus of the present invention is a vacuum processing apparatus that performs plasma processing,
In the chamber, an electrode flange connected to a high-frequency power source, a shower plate spaced apart from and opposed to the electrode flange and serving as a cathode together with the electrode flange, an insulating shield provided around the shower plate, and the shower A processing chamber in which a substrate to be processed is arranged on the opposite side of the plate from the electrode flange;
Have
The shower plate is slidable in response to thermal deformation that occurs when the temperature of the shower plate is raised and lowered, and a space enclosed by the shower plate, the electrode flange, and the insulating shield can be sealed and slid. The said subject was solved by providing the slide seal member which connects the peripheral part of a plate to the said electrode flange.
In the present invention, the shower plate has a substantially rectangular outline,
The slide seal member comprises a bracket attached to the shower plate, and a support portion attached to the electrode flange corresponding to the bracket,
The bracket includes a base attached to the peripheral edge of the shower plate on the electrode flange side, a wall connected to the base and erected from the shower plate toward the electrode flange, and a tip of the wall A slide portion having a sliding seal surface parallel to the main surface of the shower plate,
The support portion includes a slide slide surface that is in contact with the slide seal surface and is positioned closer to the shower plate than the slide portion, and a fixing portion that fixes the support slide portion to the electrode flange. It is more preferable.
The present invention is such that the slide portion of the bracket is arranged from the contour of the shower plate toward the inner center,
The slide part of the bracket may be arranged outward from the contour of the shower plate.
Moreover, in this invention, the means by which the said bracket and the said support part are arrange | positioned corresponding to four sides of the said shower plate made into a rectangular outline shape can also be employ | adopted.
In addition, a corner member that seals the end portions of the slide seal member so as to be slidable may be provided at corner portions of the shower plate having a rectangular outline shape.
Further, the corner member can be sealed with the slide portion of the bracket parallel to the main surface of the shower plate, and with the wall portion of the bracket parallel to the outline of the shower plate. It is preferable that a slip-seal surface is provided.
In the present invention, the sliding seal surface of the corner member can be sealed even when the corner member, the bracket, and the support portion extend and contract in a direction parallel to the side of the shower plate having a rectangular outline shape. Can be arranged.
In addition, a gap that allows the shower plate to thermally expand can be provided between the peripheral surface of the shower plate and the insulating shield.

The vacuum processing apparatus of the present invention is a vacuum processing apparatus that performs plasma processing,
In the chamber, an electrode flange connected to a high-frequency power source, a shower plate spaced apart from and opposed to the electrode flange and serving as a cathode together with the electrode flange, an insulating shield provided around the shower plate, and the shower A processing chamber in which a substrate to be processed is arranged on the opposite side of the plate from the electrode flange;
Have
The shower plate is slidable in response to thermal deformation that occurs when the temperature of the shower plate is raised and lowered, and a space enclosed by the shower plate, the electrode flange, and the insulating shield can be sealed and slid. By providing a slide seal member that connects the peripheral edge of the plate to the electrode flange, the slide seal member slides when the shower plate rises in temperature, particularly when thermal expansion occurs. It absorbs the deformation that elongates without affecting the electrode flange and the insulation shield. At the same time, as the slide seal member slides, the sealed state in the space surrounded by the shower plate, the electrode flange, and the insulating shield can be maintained.
Further, when the shower plate that has been thermally expanded at the time of temperature reduction contracts, the slide seal member slides to absorb the deformation that shrinks the size of the shower plate without affecting the electrode flange and the insulating shield. At the same time, as the slide seal member slides, the sealed state in the space surrounded by the shower plate, the electrode flange, and the insulating shield can be maintained.
Here, the sealing state in the space surrounded by the shower plate, the electrode flange, and the insulating shield is that the source gas supplied to this space moves to the substrate to be processed through the through holes formed in the shower plate. This means that the gas leaks along a route other than the route to be performed.

In the present invention, the shower plate has a substantially rectangular outline,
The slide seal member comprises a bracket attached to the shower plate, and a support portion attached to the electrode flange corresponding to the bracket,
The bracket includes a base attached to the peripheral edge of the shower plate on the electrode flange side, a wall connected to the base and erected from the shower plate toward the electrode flange, and a tip of the wall A slide portion having a sliding seal surface parallel to the main surface of the shower plate,
The support portion includes a slide slide surface that is in contact with the slide seal surface and is positioned closer to the shower plate than the slide portion, and a fixing portion that fixes the support slide portion to the electrode flange. As a result, the bracket is attached so that it extends to each side of the shower plate contour and is sealed between the shower plate, and is supported between the electrode flange at a position corresponding to the bracket as a sealed state. Since the bracket and the support part slide on each other on the sliding seal surface, the relative position change between the electrode flange and the shower plate contour can be accommodated while maintaining the sealed state. it can.
Here, the bracket can be attached with the base portion of the bracket in a sealed state between the shower plate and the bracket. Further, the wall portion can electrically connect the electrode flange and the shower plate while sealing between the separated electrode flange and the shower plate. Further, the slide portion can slide relative to the support portion and the sliding seal surface to cope with the relative position change between the electrode flange and the shower plate contour while maintaining the sealed state.

The present invention is such that the slide portion of the bracket is arranged toward the inner center from the contour of the shower plate,
When the slide portion of the bracket is disposed outward from the contour of the shower plate, the contour of the shower plate and the contour of the slide seal member are viewed in plan view when the slide portion is directed inward. Therefore, the slide seal member does not extend to the insulating shield side. In addition, when the slide part goes to the outside, the slide part moves toward the outside when the shower plate is heated, so that the sliding seal surface in contact with the support part is increased, and the seal state w is more reliably secured. Can be.

  Further, in the present invention, the bracket and the support portion are arranged corresponding to the four sides of the shower plate having a rectangular outline shape so as to extend to each side of the shower plate outline, and The bracket can be attached to the shower plate in a sealed state, and the support portion can be attached to the position corresponding to the bracket in a sealed state between the electrode flange, and the bracket and the support portion can slip. By sliding each other on the sealing surface, it is possible to cope with the relative position change between the electrode flange and the shower plate contour while maintaining the sealing state.

  Further, the corner of the shower plate having a rectangular contour shape is provided with a corner member that slidably seals the end portions of the slide seal member, so that the contour of the shower plate is caused by a temperature change. When deformed, the position of the bracket end portion in the contour side direction of the shower plate changes, but this change can be absorbed and slid so as to maintain the sealed state.

  Further, the corner member can be sealed with the slide portion of the bracket parallel to the main surface of the shower plate, and with the wall portion of the bracket parallel to the outline of the shower plate. By providing a slip seal surface, the direction in which each slide seal surface slides is set to a direction that expands and contracts due to thermal deformation of the shower plate, so that the corner member and the bracket or the corner member and the support portion Even if it slides, the sealing state can be maintained. Further, with respect to these slides due to thermal expansion, the corner member and the bracket, or the corner member and the support portion slide to change the position during thermal contraction due to the temperature decrease, and the sealed state can be maintained.

  In the present invention, the sliding seal surface of the corner member can be sealed even when the corner member, the bracket, and the support portion extend and contract in a direction parallel to the side of the shower plate having a rectangular outline shape. Therefore, when thermal expansion or contraction occurs, the deformation direction of the shower plate is the largest in the diagonal direction, and at the same time, the bracket is in the direction of the outer side of the outer contour. Thus, the sealing state can be maintained without absorbing the change in position and generating extra stress in each member.

  In addition, a gap portion is provided between the peripheral surface of the shower plate and the insulation shield so that the shower plate can be thermally expanded. Thus, the sealing state can be maintained without generating extra stress in each member.

  According to the present invention, it is possible to improve the gas seal leaking from around the shower plate, to cope with the heat expansion and contraction of the shower plate in the large area processing, and to cope with the increase in the processing temperature exceeding 400 ° C. An effect can be produced.

1 is a schematic cross-sectional view showing a first embodiment of a vacuum processing apparatus according to the present invention. It is a top view which shows the shower plate in 1st Embodiment of the vacuum processing apparatus which concerns on this invention. It is sectional drawing which shows the slide seal member and shower plate peripheral part in 1st Embodiment of the vacuum processing apparatus which concerns on this invention. It is sectional drawing which shows the heat | fever elongation state of the slide seal member and shower plate peripheral part in 1st Embodiment of the vacuum processing apparatus which concerns on this invention. It is a top view which shows the slide seal member and corner member in 1st Embodiment of the vacuum processing apparatus which concerns on this invention. It is a cross-sectional arrow figure which shows the slide seal member and corner member in 1st Embodiment of the vacuum processing apparatus which concerns on this invention. It is a cross-sectional arrow figure which shows the slide seal member and corner member in 1st Embodiment of the vacuum processing apparatus which concerns on this invention. It is a cross-sectional arrow figure which shows the slide seal member and corner member in 1st Embodiment of the vacuum processing apparatus which concerns on this invention. It is a cross-sectional arrow figure which shows the slide seal member and corner member in 1st Embodiment of the vacuum processing apparatus which concerns on this invention. It is a cross-sectional arrow figure which shows the slide seal member and corner member in 1st Embodiment of the vacuum processing apparatus which concerns on this invention. It is sectional drawing which shows the slide seal member and shower plate peripheral part in 2nd Embodiment of the vacuum processing apparatus which concerns on this invention. It is sectional drawing which shows the heat | fever elongation state of the slide seal member and shower plate peripheral part in 2nd Embodiment of the vacuum processing apparatus which concerns on this invention. It is a top view which shows the slide seal member and corner member in 2nd Embodiment of the vacuum processing apparatus which concerns on this invention. It is a cross-sectional arrow figure which shows the slide seal member and corner member in 2nd Embodiment of the vacuum processing apparatus which concerns on this invention. It is a cross-sectional arrow figure which shows the slide seal member and corner member in 2nd Embodiment of the vacuum processing apparatus which concerns on this invention. It is a cross-sectional arrow figure which shows the slide seal member and corner member in 2nd Embodiment of the vacuum processing apparatus which concerns on this invention.

Hereinafter, a vacuum processing apparatus according to a first embodiment of the present invention will be described with reference to the drawings.
FIG. 1 is a schematic cross-sectional view showing a vacuum processing apparatus in the present embodiment. In the figure, reference numeral 100 denotes a vacuum processing apparatus.

In this embodiment, a film forming apparatus using a plasma CVD method will be described.
The vacuum processing apparatus 100 according to the present embodiment performs film formation by a plasma CVD method, and includes a processing chamber 101 having a film formation space 101a as a reaction chamber, as shown in FIG. The processing chamber 101 includes a vacuum chamber 102 (chamber), an electrode flange 104, and an insulating flange 103 sandwiched between the vacuum chamber 102 and the electrode flange 104.

An opening is formed in the bottom 102 a (inner bottom surface) of the vacuum chamber 102. A support column 145 is inserted into the opening, and the support column 25 is disposed in the lower portion of the vacuum chamber 2. A plate-like support portion 141 is connected to the tip of the column 145 (in the vacuum chamber 102). The vacuum chamber 102 is provided with a vacuum pump (exhaust means) 148 via an exhaust pipe. The vacuum pump 148 reduces the pressure so that the vacuum chamber 102 is in a vacuum state.
The support column 145 is connected to an elevating mechanism (not shown) provided outside the vacuum chamber 2, and can move up and down in the vertical direction of the substrate S.

The electrode flange 104 has an upper wall 104a and a peripheral wall 104b. The electrode flange 104 is disposed such that the opening of the electrode flange 104 is positioned below in the vertical direction of the substrate S. A shower plate 105 is attached to the opening of the electrode flange 104. Thereby, a space 101 b is formed between the electrode flange 104 and the shower plate 105. Further, the upper wall 104 a of the electrode flange 104 faces the shower plate 105. A gas supply means 142 is connected to the upper wall 104a via a gas inlet.
The space 101b functions as a gas introduction space into which process gas is introduced.

The electrode flange 104 and the shower plate 105 are each made of a conductive material. Specifically, it can be aluminum.
A shield cover is provided around the electrode flange 104 so as to cover the electrode flange 104. The shield cover is not in contact with the electrode flange 104 and is disposed so as to be connected to the peripheral edge of the vacuum chamber 102. Further, an RF power source (high frequency power source) 147 provided outside the vacuum chamber 102 is connected to the electrode flange 104 via a matching box. The matching box is attached to the shield cover, and the vacuum chamber 102 is grounded via the shield cover.

  The electrode flange 104 and the shower plate 105 are configured as cathode electrodes. The shower plate 105 is formed with a plurality of gas outlets 105a. The process gas introduced into the space 101 b is ejected from the gas ejection port 105 a into the film formation space 101 a in the vacuum chamber 102.

  At the same time, the electrode flange 104 and the shower plate 105 supplied with power from the RF power source 147 become cathode electrodes, and plasma is generated in the film formation space 101a to perform processes such as film formation.

FIG. 2 is a top view of the shower plate 105 in plan view.
The shower plate 105 is supported by being suspended from the electrode flange 104 by a rod-shaped fixed shaft 109 and a deformation shaft 108.
The fixed shaft 109 is fixedly attached to the center position of the shower plate 105 in plan view. The deformation shaft 108 is arranged at the vertex of a rectangle centered on the fixed shaft 109 and the midpoint of the four sides.

  Unlike the fixed shaft 109, the deformed shaft 108 is connected to the shower plate 105 by a spherical bush provided at the lower end corresponding to the thermal expansion of the shower plate 105, and corresponds to the deformation of the shower plate 105 in the horizontal direction. And can be supported.

FIG. 3 is an enlarged cross-sectional view of the vicinity of the edge of the shower plate 105.
An insulating shield 106 is provided around the outer periphery of the shower plate 105 so as to be separated from the edge of the shower plate 105. The insulation shield 106 is attached to the electrode flange 104b (104). At the outer positions of the insulating shield 106 and the peripheral edge of the shower plate 105, a thermal expansion absorption space (gap) 106a is formed.

  A slide seal member 110 is provided around the periphery of the shower plate 105, and the edge of the shower plate 105 is suspended and supported by the electrode flange 104 by the slide seal member 110.

  As shown in FIGS. 1 to 3, the slide seal member 110 is slidable in response to thermal deformation that occurs when the temperature of the shower plate 105 is raised and lowered, and includes the shower plate 105, the electrode flange 104, and the insulating shield 106. The enclosed gas introduction space 101b is sealed and slidable, and the periphery of the shower plate 105 is electrically connected to the electrode flange 104.

  As shown in FIG. 2, the slide seal member 110 has a rectangular outline that is substantially the same as the peripheral edge of the shower plate 105 in a plan view, and has a width dimension that is substantially equal around the shower plate 105. The slide seal member 110 is made of a metal such as aluminum, for example.

  As shown in FIG. 3, the slide seal member 110 includes a bracket 111 attached to the shower plate 105 and a support portion 117 attached to the electrode flange 104 corresponding to the bracket 111.

  As shown in FIG. 3, the bracket 111 is fixedly attached to a peripheral portion on the electrode flange 104 side of the shower plate 105, and a base portion 112 connected to the base portion 112 and substantially perpendicular to the main surface of the shower plate 105. A wall portion 113 erected toward the electrode flange 104, and a slide portion 114 having a sliding seal surface 114 a parallel to the main surface of the shower plate 105 at the electrode flange 104 side tip of the wall portion 113.

  On the electrode flange 104 side (upper side) of the base 112, a pressing plate 112 e extending with substantially the same width is provided and pressed against the shower plate 105. The holding plate 112e is screwed to the upper surface of the shower plate 105 by a fixing bolt 112d or the like, and the space between the base 112 and the shower plate 105 can be sealed.

As shown in FIG. 3, the bracket 111 is formed so that the cross-sectional shape orthogonal to the contour of the shower plate 105 is a U-shape.
In the bracket 111, as shown in FIG. 3, the slide portion 114 is arranged from the outer peripheral contour of the shower plate 105 toward the inner center. That is, the slide part 114 is arranged from the tip of the wall part 113 toward the inner center of the shower plate 105.

  As shown in FIG. 3, the support portion 117 has a slide seal surface 118 a that is slidably in contact with the slide seal surface 114 a of the slide portion 114, and a support slide portion 118 positioned closer to the shower plate 105 than the slide portion 114. And a fixing portion 119 for fixing the support slide portion 118 to the electrode flange 104.

  The fixed portion 119 is disposed closer to the inner center of the shower plate 105 than the support slide portion 118. The fixing portion 119 is screwed to the lower surface of the electrode flange 104 by a fixing bolt 119d so as to be sealable. The fixing portion 119 can also be fixed by arranging a pressing plate corresponding to the pressing plate 112e.

The bracket 111 and the support part 117 are arranged corresponding to four sides of the shower plate 105 having a rectangular outline shape.
Further, the thermal expansion absorption space (gap portion) 106a has a height corresponding to the height of the shower plate 105 and the bracket 111, and when the shower plate 105 is thermally expanded, the heat expansion absorption space (gap portion) 106a integrally faces outward of the shower plate 105. It is set so that the moving bracket 111 does not contact.

The slide seal surface 114a of the slide portion 114 in the bracket 111 and the slide seal surface 118a of the support slide portion 118 in the support portion 117 are both provided with an alumite treatment layer 116 to be slidable and sealable. ing.
As described above, the slide seal surface 114a of the slide portion 114 and the slide seal surface 118a of the support slide portion 118 are in contact with each other, so that the load on the peripheral portion of the shower plate 105 passes through the bracket 111 and the support portion 117. Supported by the electrode flange.

FIG. 4 is an enlarged cross-sectional view of the vicinity of the edge portion of the shower plate 105 in a thermally stretched state.
When the apparatus described later is used, the shower plate 105 undergoes thermal expansion (thermal deformation) because it is heated. At the time of this thermal elongation, as shown in FIG. 4, the shower plate 105 expands outward in the in-plane direction around the fixed shaft 109.

The peripheral edge portion of the shower plate 105 that has been thermally stretched does not come into contact with the insulation shield 106 by extending to the thermal elongation absorption space (gap portion) 106a, so that the expansion of the shower plate 105 is applied to the electrode flange 104, the insulation shield 106, and the like. Absorbed so as not to give stress.
At this time, the deformable shaft 108 can support the deformed shower plate 105 by the spherical bush at the lower end.

  Furthermore, the bracket 111 fixed to the peripheral portion of the shower plate 105 that has been thermally expanded moves as a unit toward the outer periphery of the shower plate 105, and as shown in FIG. 4, a thermal expansion absorption space (gap portion) 106a. Narrows. Since the bracket 111 does not contact the insulating shield 106, the movement of the bracket 111 is absorbed so as not to apply stress to the electrode flange 104, the insulating shield 106, and the like.

  Further, as the bracket 111 moves, the slide portion 114 of the bracket 111 also moves toward the outer periphery of the shower plate 105 as a unit. On the other hand, since the support slide part 118 in the support part 117 is fixed to the electrode flange 104 by the fixing part 119, the relative position with respect to the electrode flange 104 and the insulation shield 106 does not change. Therefore, the slide seal member 110 is not deformed, and the slide seal surface 114a of the slide portion 114 and the slide seal surface 118a of the support slide portion 118 in the support portion 117 slide, and the shower plate remains in a sealed state. 105 becomes a heat | fever elongation state.

  Thus, in this embodiment, the sliding seal surface 114a of the slide portion 114 in the bracket 111 of the slide seal member 110 and the slide seal surface 118a of the support slide portion 118 in the support portion 117 are thermally expanded. Since it is slidable in the direction, it can maintain the sealing state and maintain the load supporting state of the shower plate 105 by maintaining the contact state without being deformed even during thermal elongation. .

5 is an enlarged view of the vicinity of the corner portion of the shower plate 105, and is a plan view showing a slide seal member and a corner member. FIG. 6 is a cross-sectional view taken along the line vi-vi in FIG. FIG. 8 is a cross-sectional view taken along the line vii-vii in FIG. 5, FIG. 8 is a cross-sectional view taken along the line viii-viii in FIG. 5, and FIG. 9 is a cross-sectional view taken along the line ix-ix in FIG. These are the xx cross-section arrow directional views in FIG.
In this embodiment, a corner member 120 that seals the end portions of the slide seal member 110 so as to be slidable is provided at the corner position of the shower plate 105 having a rectangular outline shape.

The corner member 120 is also provided so as to slidably seal the end portions of the bracket 111 and the end portions of the support portion 117 when the shower plate 105 is thermally expanded.
As shown in FIG. 5, the corner member 120 has a quarter arc-shaped outer contour and is erected at the corner of the shower plate 105.

  As shown in FIGS. 5 to 7 and 9, the corner member 120 is fixedly attached to a peripheral corner portion on the electrode flange 104 side of the shower plate 105 and has a slide slide surface 122 a, 122 b, 122 c. A wall slide portion 123 that is connected to the lower slide portion 122 and is erected from the main surface of the shower plate 105 substantially vertically to the electrode flange 104 and has a sliding seal surface 123b; An upper slide portion 124 having sliding seal surfaces 124a, 124b, and 124c is provided at the tip of the electrode flange 104 side.

  In the corner member 120, the upper slide portion 124 has a thickness of the slide portion 114 on the upper surface so that the end portion of the slide portion 114 of the bracket 111 can be combined and sealed as shown in FIGS. A notch (concave portion) 124A corresponding to is formed. The rear side of the notch 124A in the direction along the contour line of the shower plate 105 is formed in a straight line perpendicular to the contour line of the shower plate 105.

  As shown in FIGS. 5 to 7 and 9, the lower side of the notch 124 </ b> A penetrates the shower plate 105 contour inner side downward. Further, a slip seal surface 124a is formed upward at the bottom surface of the contour of the shower plate 105 below the notch 124A.

  As shown in FIG. 5 to FIG. 7 and FIG. 9, a slip seal surface 124 b is formed at the notch 124 </ b> A contour outer side surface position toward the inside of the shower plate 105 contour. A portion corresponding to the thickness of the wall 113 is further cut out at the end of the bracket 111 at the outer side of the contour of the shower plate 105 of the cutout 124A.

As shown in FIG. 5 to FIG. 7 and FIG. 9, a slip seal surface 124 c is formed on the notch 124 </ b> A on the inner side of the contour of the shower plate 105 toward the outer side of the contour of the shower plate 105.
The sliding seal surface 124 a is formed in the horizontal direction along the contour side straight line of the shower plate 105. These sliding seal surfaces 124b and 124c are both formed in a vertical direction along the contour line of the shower plate 105.
The slip seal surface 124b outside the notch 124A is formed to be shorter than the outside of the slide seal surface 124c inside the notch 124A.

In the corner member 120, the wall slide portion 123 has a thickness of the wall portion 113 on the outer surface so that the end portion of the wall portion 113 of the bracket 111 can be combined and sealed as shown in FIGS. A notch (concave portion) 123A corresponding to the height is formed.
In the notch (recessed portion) 123 </ b> A, a slip seal surface 123 b is formed at a position outside the contour of the shower plate 105. The notch (recessed portion) 123 </ b> A is disposed along the entire length of the wall slide portion 123 in the height direction.

  In the corner member 120, the bottom slide portion 122 corresponds to the thickness of the base portion 112 on the lower surface so that the end portion of the base portion 112 of the bracket 111 can be combined and sealed as shown in FIGS. 5 to 7 and 9. A cutout (recessed portion) 122A is formed. The cutout (recessed portion) 122A is formed to have substantially the same contour shape as the cutout 124A in plan view. The back side of the notch 122A in the direction along the contour line of the shower plate 105 is formed in a straight line perpendicular to the contour line of the shower plate 105.

Unlike the notch 124A, the entire upper surface of the notch 122A does not penetrate upward, and a slip seal surface 122a is formed downward on the entire surface.
As shown in FIG. 5 to FIG. 7 and FIG. 9, a slip seal surface 122 b is formed at the notch 122 </ b> A contour outer side surface position toward the inner side of the shower plate 105 contour. A portion corresponding to the thickness of the wall 113 is further cut out at the end of the bracket 111 at the outer side surface position of the contour of the shower plate 105 of the cutout 122A.

As shown in FIGS. 5 to 7 and 9, a slip seal surface 122 c is formed on the inner side of the notch 122 </ b> A on the inner side of the contour of the shower plate 105 so as to face the outer side of the shower plate 105.
The sliding seal surface 122a is formed in the horizontal direction along the contour side straight line of the shower plate 105. Further, both of the sliding seal surfaces 122b and 122c are formed in a vertical direction along a straight line of the shower plate 105 contour side.

  The sliding seal surface 124a is formed so that the outer side and the bracket 111 side are continuous with the sliding seal surface 123b.

  As shown in FIGS. 5 to 8 and 10, slip seal surfaces 112 a to 114 c corresponding to the slide seal surfaces 122 a to 124 c of the corner member 120 are formed at the end of the bracket 111.

In the bracket 111, the slide portion 114 corresponds to a notch (concave portion) 124A so that the end of the upper slide portion 124 of the corner member 120 can be combined and sealed, as shown in FIGS. 114A is formed.
The front end side of the convex portion 114A along the contour line of the shower plate 105 is formed in a straight line corresponding to the notch (concave portion) 124A and orthogonal to the contour line of the shower plate 105.

  The thickness of the convex portion 114A is substantially equal to the depth dimension of the notch (concave portion) 124A, and the sliding seal surface 114a is slidable on the sliding seal surface 124a at the lower position of the convex portion 114A. Is formed downward.

  As shown in FIGS. 5, 8, and 10, a slip seal surface 114 b that can slide on the slide seal surface 124 b is formed on the outer side of the contour of the shower plate 105 on the convex portion 114 </ b> A. ing. The position of the convex portion 114 </ b> A in the contour line inside / outside direction of the shower plate 105 is set at a further inner position than the inner surface of the wall portion 113.

A slip seal surface 114c slidable on the slide seal surface 124c is formed on the inner side of the contour of the shower plate 105 on the convex portion 114A so as to face the contour of the shower plate 105.
These slip seal surfaces 114a, 114b, and 114c are all formed in a direction along the straight line of the shower plate 105.
The slip seal surface 114b outside the convex portion 114A is formed to be shorter than the outside of the slide seal surface 114c inside the convex portion 114A.

In the bracket 111, as shown in FIGS. 5, 8, and 10, the wall 113 is an inward facing surface of the shower plate 105 so that the end of the wall slide portion 123 of the corner member 120 can be combined and sealed. The sliding seal surface 123b is formed to be slidable with the sliding seal surface 123b.
The sliding seal surface 113b is formed along the entire length of the wall 113 in the height direction. Further, the sliding seal surface 113b is formed in a vertical direction along the contour line of the shower plate 105.

In the bracket 111, the base 112 has a notch (recess) 122A on the lower surface side so that the bottom slide 122 end of the corner member 120 can be combined and sealed as shown in FIGS. A convex portion 112A corresponding to the height dimension is formed. The convex portion 112A is formed to have substantially the same contour shape as the cutout (concave portion) 122A and the cutout 124A in plan view.
The front end side of the convex portion 112A in the direction along the contour line of the shower plate 105 is formed in a straight line perpendicular to the contour line of the shower plate 105 corresponding to the notch 122A.

As shown in FIGS. 5, 8, and 10, on the upper side of the convex portion 112 </ b> A, the sliding seal surface 122 a and the sliding seal surface 112 a slidable on the entire upper surface corresponding to the notch 122 </ b> A are formed downward. .
A slide seal surface 122b and a slidable slide seal surface 112b slidably formed on the outer side of the contour of the shower plate 105 on the convex portion 112A.

A slip seal surface 112c slidable with the slide seal surface 122c is formed on the inner side of the shower plate 105 contour on the convex portion 112A so as to face the contour of the shower plate 105.
The sliding seal surface 112a is formed in the horizontal direction along the contour side straight line of the shower plate 105. These sliding seal surfaces 112b and 112c are both formed in a vertical direction along the contour line of the shower plate 105.

  As shown in FIG. 5, the corner member 120 has notches 124 </ b> A, 123 </ b> A, and 122 </ b> A, respectively, at the ends of the bracket 111 that are orthogonal to the adjacent side straight lines in the shower plate 105 contour.

  When the apparatus described later is used, the shower plate 105 undergoes thermal expansion (thermal deformation) because it is heated. During this thermal expansion, the shower plate 105 expands outward in the in-plane direction around the fixed shaft 109.

At the peripheral edge of the shower plate 105 that has been thermally stretched, the bracket 111 fixed to the peripheral edge of the shower plate 105 and the corner member 120 are separated in a direction along the contour line of the shower plate 105.
At this time, the sliding seal surface 112a and the sliding seal surface 122a, the sliding sealing surface 112b and the sliding sealing surface 122b, the sliding sealing surface 112c and the sliding sealing surface 122c, the sliding sealing surface 113b and the sliding sealing surface 123b, and the sliding sealing surface 114a and the sliding sealing are included. The surface 124a, the sliding seal surface 114b and the sliding seal surface 124b, and the sliding seal surface 114c and the sliding seal surface 124c slide in the direction along the contour line of the shower plate 105, respectively, so that the bracket is maintained while maintaining the sealed state. 111 and the corner member 120 can be separated from each other.

Next, an operation when a film is formed on the processing surface of the substrate S using the vacuum processing apparatus 100 will be described.
First, the vacuum chamber 102 is depressurized using the vacuum pump 148. The substrate S is loaded from the outside of the vacuum chamber 2 toward the film formation space 101a in a state where the inside of the vacuum chamber 102 is maintained at a vacuum. The substrate S is placed on a support part (heater) 141. The support column 145 is pushed upward, and the substrate S placed on the heater 141 also moves upward. As a result, the distance between the shower plate 105 and the substrate S is determined as desired so that the distance is necessary for proper film formation, and this distance is maintained.

Thereafter, the process gas is introduced from the process gas supply means 142 into the gas introduction space 101b through the gas introduction pipe and the gas introduction port. Then, a process gas is ejected from the gas ejection port 105a of the shower plate 105 into the film formation space 101a.
Next, the RF power source 147 is activated to apply high frequency power to the electrode flange 104.

Then, a high-frequency current flows from the surface of the electrode flange 104 to the surface of the shower plate 105, and a discharge is generated between the shower plate 105 and the heater 141. Then, plasma is generated between the shower plate 105 and the processing surface of the substrate S.
The process gas is decomposed in the plasma thus generated to obtain a plasma process gas, a vapor phase growth reaction occurs on the processing surface of the substrate S, and a thin film is formed on the processing surface.

  During the processing of the vacuum processing apparatus 100, the shower plate 105 is thermally stretched (thermally deformed), but the sealed state is maintained by the slide seal member 110 and the corner member 120, and the gas inlet space 101b is connected to the portions other than the gas outlet 105a. It is possible to reduce leakage through the film formation space 101a. Further, since there is no part that is forced to deform due to the thermal expansion of the shower plate 105, the life of the part can be extended.

Hereinafter, 2nd Embodiment of the vacuum processing apparatus which concerns on this invention is described based on drawing.
FIG. 11 is a cross-sectional view showing the slide seal member and the peripheral portion of the shower plate in the present embodiment. In the present embodiment, the difference from the first embodiment described above is the point related to the slide portion in the bracket. The components corresponding to those in the first embodiment described above are denoted by the same reference numerals, and the description thereof is omitted.

  In the slide seal member 210 according to the present embodiment, the slide portion 214 of the bracket 211 is arranged outward from the upper end position of the wall portion 213 toward the contour of the shower plate 105. In addition, in this embodiment, the code | symbol in the slide seal member 210 respond | corresponds by replacing the code | symbol in the slide seal member 110 in 1st Embodiment mentioned above from the 100th to the 200th.

  In the slide seal member 210, the base portion 212 of the bracket 211 is fixedly connected to the side surface of the end portion of the shower plate 105 instead of the peripheral edge portion of the upper surface of the shower plate 105. Therefore, the base 212 is positioned closer to the center of the shower plate 105 contour than the end surface of the shower plate 105 and extends in the vertical direction. The base 212 is screwed to the upper surface of the shower plate 105 with fixing bolts 212d and the like. The space between 212 and the shower plate 105 can be sealed.

  The wall portion 213 of the bracket 211 is disposed at a position substantially coincident with the four sides of the contour line of the shower plate 105 in plan view, and is erected in a substantially vertical direction.

  In the bracket 211, as shown in FIG. 11, the slide portion 214 is arranged from the outer peripheral contour of the shower plate 105 toward the outside (opposite the inner center). That is, the slide part 214 is arranged from the tip of the wall part 213 toward the outside of the shower plate 105. The slide part 214 has a sliding seal surface 214a parallel to the main surface of the shower plate 105 on the upper side surface.

  As shown in FIG. 11, the support portion 217 has a slide seal surface 218 a that slidably contacts the slide seal surface 214 a of the slide portion 214, and a support slide portion 218 positioned on the shower plate 105 side with respect to the slide portion 214. And a fixing portion 219 for fixing the support slide portion 218 to the electrode flange 104.

  The fixing portion 219 is arranged as a further outer position of the shower plate 105 than the support slide portion 218. The fixing portion 219 is screwed to the lower surface of the electrode flange 104 by a fixing bolt 219d so as to be sealable. Note that the insulating shield 106 is positioned below the fixed portion 219 and the support slide portion 218.

Further, the thermal expansion absorption space (gap portion) 106a has a height corresponding to the height of the shower plate 105 and the bracket 211, and when the shower plate 105 is thermally expanded, the heat expansion absorption space (gap) is integrally formed outwardly of the shower plate 105. It is set so that the moving bracket 211 does not contact.
The support slide part 218 is located above the thermal expansion absorption space (gap part) 106a and the insulation shield 106 (on the electrode flange 104 side), and the support slide part 218 is insulated from the insulation shield 106 when the shower plate 105 is thermally expanded. And it penetrates between the electrode flanges 104.

Each of the slide seal surface 214a of the slide portion 214 in the bracket 211 and the slide seal surface 218a of the support slide portion 218 in the support portion 217 is provided with an alumite treatment layer 216 so as to be slidable and sealable. ing.
As described above, the slide seal surface 214a of the slide portion 214 and the slide seal surface 218a of the support slide portion 218 are in contact with each other, so that the load on the peripheral portion of the shower plate 105 passes through the bracket 211 and the support portion 217. Supported by the electrode flange.

FIG. 12 is an enlarged cross-sectional view of the vicinity of the edge portion of the shower plate 105 in the thermally stretched state according to the present embodiment.
When the apparatus is used, the shower plate 105 is heated (heat-deformed) because it is heated. At the time of this thermal elongation, the shower plate 105 expands outward in the in-plane direction around the fixed shaft 109 as shown in FIG.

  Furthermore, the bracket 211 fixed to the peripheral portion of the shower plate 105 that has been thermally expanded moves as a unit toward the outer periphery of the shower plate 105, and as shown in FIG. 12, the thermal expansion absorption space (gap portion) 106a. Narrows. Since the bracket 211 does not contact the insulating shield 106, the movement of the bracket 211 is absorbed so as not to apply stress to the electrode flange 104, the insulating shield 106, and the like.

  Further, as the bracket 211 moves, the slide portion 214 in the bracket 211 also moves integrally toward the outer periphery of the shower plate 105. On the other hand, since the support slide part 118 in the support part 217 is fixed to the electrode flange 104 by the fixing part 219, the relative position with respect to the electrode flange 104 and the insulation shield 106 does not change.

  Therefore, the slide seal surface 214a of the slide portion 214 and the slide seal surface 218a of the support slide portion 218 in the support portion 217 slide, and the shower plate 105 is in a heat stretched state while maintaining the seal state.

  At this time, the slide portion 214 moves so as to be close to the outer periphery of the shower plate 105, that is, close to the support slide portion 218 of the support portion 217. The contact area with 218a is increased. Therefore, the seal state of the slide seal member 210 is more reliable when the heat is extended than when the room temperature is normal.

  As described above, in this embodiment, the sliding seal surface 214a of the slide portion 214 in the bracket 211 of the slide seal member 210 and the slide seal surface 218a of the support slide portion 218 in the support portion 217 are thermally expanded. Since they are slidable in the direction, even when they are hot stretched, they maintain a contact state, so that a more reliable sealing state and a load supporting state of the shower plate 105 can be maintained.

13 is an enlarged view of the vicinity of the corner portion of the shower plate 105, and is a plan view showing a slide seal member and a corner member. FIG. 14 is a cross-sectional view taken along xiv-xiv in FIG. FIG. 16 is an xv-xv cross-sectional arrow view in FIG. 13, and FIG. 16 is an xvi-xvi cross-sectional arrow view in FIG.
In this embodiment, a corner member 220 that seals the end portions of the slide seal member 210 so as to be slidable is provided at the corner position of the shower plate 105 having a rectangular outline shape.

The corner member 220 is also provided so as to slidably seal the end portions of the bracket 211 and the end portions of the support portion 217 when the shower plate 105 is heated.
As shown in FIG. 13, the corner member 220 includes a wall slide portion 223 that is fixedly installed at a peripheral corner portion on the electrode flange 104 side of the shower plate 105, and a shower plate 105 that has a lower wall than the wall slide portion 223. And an upper slide portion 224 attached to the electrode flange 104 at a position outside the contour.

The wall slide part 223 is formed in a cylindrical shape, its bottom is closed as a lower part 222, and the lower part 222 is fixed to the shower plate 105 with bolts 222b or the like.
The wall slide part 223 has sliding seal surfaces 223 a, 223 b, and 223 c, and the upper slide part 224 has a sliding seal surface 224 a, which are slidably sealed with the bracket 211.

  As shown in FIGS. 13 to 15, the end portion of the slide portion 214 of the bracket 211 is combined and sealed at the center side of the shower plate 105 at the end portion of the bracket 211 of the upper slide portion 124 in the corner member 120. A notch (concave portion) 224A corresponding to the thickness of the slide portion 214 is formed on the upper surface.

  The notch 224 </ b> A is formed in a planar shape in which two adjacent sides of the rectangle are open corresponding to the corner outline of the slide portion 214. On the bottom surface of the notch 224A, a slip seal surface 224a is formed upward. The sliding seal surface 224a is configured such that a part of the sliding seal surface 214a provided on the lower surface of the slide portion 214 can slide.

A support protrusion 224 </ b> B that protrudes toward the center in the in-plane direction of the shower plate 105 is formed at the corner top position of the shower plate 105 in the upper slide portion 124.
The support protrusion 224 </ b> B is provided from the corner apex of the shower plate 105 toward the center, that is, along the direction in which the thermal expansion of the shower plate 105 is greatest.

The support protrusion 224B is inserted into a support horizontal hole 223B provided on the outer side of the contour of the shower plate 105 of the wall slide part 223, and the insertion position of the support protrusion 224B and the support horizontal hole 223B is set to be variable. ing.
The load on the peripheral edge of the shower plate 105 to which the lower portion 222 of the wall slide portion 223 provided with the support lateral hole 223B is fixed is applied to the support protrusion 224B that is suspended and fixed to the electrode flange 104. This can be supported.

  In the corner member 220, as shown in FIGS. 13 to 15, the wall slide portion 223 has a wall on the inner surface that is the center side of the shower plate 105 so that the end of the wall portion 213 of the bracket 211 can be sealed together. A notch (concave portion) 223A corresponding to the thickness of the portion 213 is formed.

  The notch (concave portion) 223 </ b> A is formed in the entire length in the height direction of the wall slide portion 223. In the notch (concave portion) 223A, a vertical sliding seal surface 223b is formed outwardly at the inner position of the shower plate 105 contour. In addition, a vertical sliding seal surface 223c is formed in the notch (recessed portion) 223A at the inner position of the contour of the shower plate 105 toward the inner side.

  The sliding seal surface 223b and the sliding seal surface 223c are slidable between the sliding seal surface 213b and the sliding seal surface 213c located on the front and back surfaces (inner and outer surfaces) of the wall 213. The slip seal surface 223b and the slide seal surface 223c are disposed at positions facing each other in a parallel state.

  In the notch (recessed portion) 223A, the upper end of the slip seal surface 223c at the outer position is set to be shorter corresponding to the thickness of the slide portion 214 than the slip seal surface 223b at the center position. The upper end of 223c is continuous with the sliding seal surface 223a extending to the outer position. The notch (concave portion) 223A has a shape in which the upper end outside position is further notched.

The sliding seal surface 223a is configured such that a portion adjacent to the wall portion 213 of the sliding seal surface 214a provided on the lower surface of the slide portion 214 can slide.
The sliding seal surface 223a is formed in the horizontal direction along the contour side straight line of the shower plate 105. These slide seal surfaces 223b and 223c are both formed in a vertical direction along the contour line of the shower plate 105.

As shown in FIGS. 13 and 16, slip seal surfaces 213 b to 214 a corresponding to the slide seal surfaces 223 a to 224 a of the corner member 220 are formed at the end of the bracket 211.
The end of the bracket 211 is formed in a substantially straight line perpendicular to the contour line of the shower plate 105.

  In the bracket 211, on the lower surface of the slide portion 214, as shown in FIG. 13 and FIG. The sliding seal surface 214a is slidable downward.

The slip seal surface 224a and the slide seal surface 223a are separated from each other, but the slide seal surface 214a is slidable in both of them.
The slip seal surface 214a is formed in the horizontal direction along the contour side straight line of the shower plate 105.

  In the bracket 211, as shown in FIGS. 13 and 16, the end portion of the wall portion 213 can be combined and sealed at the position inserted into the notch 223A formed in the wall slide portion 223 of the corner member 220. A slip seal surface 213b that is slidable with the slide seal surface 223b is formed on the inward facing surface of the shower plate 105. Further, a slip seal surface 213c that can slide with the slide seal surface 223c is formed on the end of the wall portion 213 on the surface outward of the contour of the shower plate 105.

  The slip seal surface 213b and the slide seal surface 213c are formed over the entire length of the wall portion 213 in the height direction. Further, the sliding seal surface 213b and the sliding seal surface 213c are formed in a vertical direction along the contour line of the shower plate 105.

  As shown in FIG. 13, the corner member 220 is formed with notches 224 </ b> A and 223 </ b> A with respect to the end of the orthogonal bracket 211 corresponding to the adjacent side straight line in the shower plate 105 contour.

  When the apparatus is used, the shower plate 105 is heated (heat-deformed) because it is heated. During this thermal expansion, the shower plate 105 expands outward in the in-plane direction around the fixed shaft 109.

At the peripheral edge of the shower plate 105 that has been thermally stretched, the bracket 211 fixed to the peripheral edge of the shower plate 105 and the corner member 220 are separated in a direction along the contour line of the shower plate 105.
At the same time, the position of the upper slide portion 224 fixed to the electrode flange 104, the bracket 211, and the corner member 220 changes.

  At this time, the sliding seal surface 214a, the sliding seal surface 224a, the sliding seal surface 223a, the sliding seal surface 213b, the sliding seal surface 213b, the sliding seal surface 213c, and the sliding seal surface 213c are respectively along the contour line of the shower plate 105. By sliding in the direction, the bracket 211 and the corner member 220 can be separated while maintaining the sealed state.

  In addition, the support protrusion 224B and the support lateral hole 223B of the upper slide part 224 slide in the diagonal direction of the shower plate 105, which is the axial direction in which the support protrusion 224B is provided, so that the load support state is It can be supported even when stretched.

  In this embodiment, in addition to these, the same effects as those of the first embodiment described above can be obtained.

  As an application example of the present invention, there can be mentioned a plasma processing apparatus for performing surface treatment of a substrate such as film formation, particularly plasma CVD or etching as a treatment using plasma.

DESCRIPTION OF SYMBOLS 100 ... Vacuum processing apparatus 101 ... Processing chamber 101a ... Film-forming space 101b ... Gas introduction space 102 ... Vacuum chamber 103 ... Insulating flange 104 ... Electrode flange 104a ... Upper wall 104b ... Perimeter wall 105 ... Shower plate 105a ... Gas ejection port 106 ... Insulation Shield 106a ... Heat elongation absorption space (gap)
DESCRIPTION OF SYMBOLS 108 ... Deformation shaft 109 ... Fixed shaft 141 ... Support part 142 ... Gas supply means 145 ... Support | pillar 147 ... RF power supply (high frequency power supply)
148 ... Vacuum pump (exhaust means)
110, 210 ... slide seal members 111, 211 ... brackets 112, 212 ... bases 112a, 112b, 112c, 113b, 114a, 114b, 114c, 118a ... slip seal surfaces 112A, 114A ... convex portions 112d, 119d, 212d, 219d ... Fixing bolt 112e ... Presser plates 113, 213 ... Wall portions 114, 214 ... Slide portions 117,217 ... Support portions 118,218 ... Support slide portions 119,219 ... Fixing portion 106a ... Heat elongation absorbing space (gap portion)
120, 220 ... Corner member 122 ... Lower slide part 123, 223 ... Wall slide part 124 ... Upper slide part 122A, 123A, 124A, 223A, 224A ... Notch (recess)
122a, 122b, 122c, 123b, 124a, 124b, 124c ... slip seal surface 224 ... slide portion 223B ... support lateral hole 224B ... support projection 222 ... lower portion 222d ... fixing bolts 223a, 223b, 223c, 123b, 224a ... slip seal surface

Claims (8)

A vacuum processing apparatus for performing plasma processing,
In the chamber, an electrode flange connected to a high-frequency power source, a shower plate spaced apart from and opposed to the electrode flange and serving as a cathode together with the electrode flange, an insulating shield provided around the shower plate, and the shower A processing chamber in which a substrate to be processed is arranged on the opposite side of the plate from the electrode flange;
Have
The shower plate is slidable in response to thermal deformation that occurs when the temperature of the shower plate is raised and lowered, and a space enclosed by the shower plate, the electrode flange, and the insulating shield can be sealed and slid. A vacuum processing apparatus comprising a slide seal member for connecting a peripheral edge of the plate to the electrode flange. The shower plate has a substantially rectangular contour;
The slide seal member comprises a bracket attached to the shower plate, and a support portion attached to the electrode flange corresponding to the bracket,
The bracket includes a base attached to the peripheral edge of the shower plate on the electrode flange side, a wall connected to the base and erected from the shower plate toward the electrode flange, and a tip of the wall A slide portion having a sliding seal surface parallel to the main surface of the shower plate,
The support portion includes a slide slide surface that is in contact with the slide seal surface and is positioned closer to the shower plate than the slide portion, and a fixing portion that fixes the support slide portion to the electrode flange. The vacuum processing apparatus according to claim 1. The slide portion of the bracket is arranged toward the inner center from the contour of the shower plate,
The vacuum processing apparatus according to claim 2, wherein the slide portion of the bracket is arranged outward from the contour of the shower plate.   The vacuum processing apparatus according to claim 2, wherein the bracket and the support portion are arranged corresponding to four sides of the shower plate having a rectangular outline shape.   The vacuum according to any one of claims 1 to 3, wherein a corner member that slidably seals the end portions of the slide seal member is provided at a corner position of the shower plate having a rectangular outline shape. Processing equipment.   The corner member includes a slide seal surface that can be sealed with the slide portion of the bracket in parallel with the main surface of the shower plate, and a slide that can be sealed with the wall portion of the bracket in parallel with the contour line of the shower plate. The vacuum processing apparatus according to claim 5, further comprising a sealing surface.   The sliding seal surface of the corner member is disposed so that it can be sealed even when the corner member, the bracket, and the support portion extend and contract in a direction parallel to the side of the shower plate having a rectangular outline shape. The vacuum processing apparatus according to claim 6.   The vacuum processing apparatus according to any one of claims 1 to 7, wherein a gap is provided between the peripheral surface of the shower plate and the insulating shield so that the shower plate can be thermally expanded.

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