JP2019167951A - Vacuum device - Google Patents

Abstract

To provide a vacuum device that can be manufactured at a low cost and at the same time with reduced risk of misassembly.SOLUTION: This invention relates to a vacuum device (111), in particular, a vacuum pump, a vacuum measurement device, a leakage searching device and/or a vacuum chamber, having at least one device component (225) and in particular having one electronic device (227) for device control and/or device adjustment. In this case, the electronic device (227) is connected to an interface (229) of the device component (225) and a state changing of the electronic device (227) is carried out through connection in order to define a device operative constitution.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a vacuum device, in particular a vacuum pump, device components, and an electronic device for the vacuum device, and a method for the assembly and / or start-up of the vacuum device. The invention likewise relates to an electronic device and a method for assembly and / or start-up of the electronic device.

  It is known that a vacuum device, for example a vacuum pump, is constructed with an electronic device, which ensures, for example, pump control and / or pump adjustment. For this reason, such an electronic device can be provided with a characteristic resistance which is evaluated by the connected driving device. This allows the detection and application of pump operating parameters with such a drive.

  Different electronic devices are provided for the various pumps. This is because the operating parameters may vary depending on the pump usage. This, in part, requires the manufacture and storage of numerous variations of electronic devices. This results in high cost consumption. Furthermore, there is a risk of misassembly due to the increased variation. This can cause pump damage.

  From such a background, an object of the present invention is to provide a vacuum apparatus that can be manufactured at a low cost and at the same time with a reduced risk of misassembly. A further object is to provide a vacuum device and an electronic device for the vacuum device and a method for the assembly and / or start-up of the vacuum device. The problem is also to provide an electronic device and a method for assembly and / or start-up of the electronic device.

  With respect to the vacuum device, this problem is solved by the features of claim 1. The device component according to the invention is the subject of claim 11, and the electronic device according to the invention is the subject of claim 12. The electronic device according to the invention is described in claim 13, and the method according to the invention is described in claims 14 and 15, respectively. Advantageous embodiments are described in the dependent claims and are described in detail below.

  The vacuum device according to the invention can in particular be a vacuum pump, a vacuum measuring device, a vacuum analysis device, a leak probe device or a vacuum chamber device. The vacuum pump can advantageously be formed as a turbomolecular pump. Similarly, the vacuum pump can be a pre-pump, particularly for a pumping device that also has a turbomolecular pump. As a result, the description of “vacuum device” in the sense of the present invention should be extended to pumps that are only formed for the transport of incompressible fluids. The invention thus also relates to a pump that does not necessarily have to be formed for the generation of a vacuum.

  The vacuum device according to the invention comprises at least one device component and an electronic device. Electronic devices can be specifically configured for device control and / or device adjustment. In this case, the electronic device is connected to the interface of the device component. In accordance with the invention, the connection is intended to cause an electronic device state change to determine the device operating configuration.

  In accordance with the invention, only one type of electronic device can be used for a variety of device types or device component types. The device operating configuration is determined by a state change caused by connecting to the interface. Therefore, since a device configuration is generated according to each type of state change, it is no longer necessary to determine a specific configuration in advance. The risk of misassembly can thus be reduced.

  Furthermore, the manufacturing costs can be reduced by the universal availability of each type of electronic device. During the manufacture of various device types, or device component types, it is possible to ensure universal use of certain types of electronic devices in particular. Manufacturing costs and storage costs are reduced.

  In the case of a vacuum pump, the device component is formed as a pump component, and connecting the electronic device to the pump component interface causes a change in the state of the electronic device to determine the pump operating configuration. It is. The pump operating configuration can define pump operating parameters, such as rated speed, maximum speed, pump inlet pressure, and / or pump outlet pressure, or operating characteristic line. Thereby, a high degree of functional safety can be ensured.

  According to an advantageous embodiment, the state change of the electronic device is irreversibly caused by the connection at the interface. An irreversible state change means that the state cannot be changed later, or at least the use of tools and / or programming operations, and / or electronic, electronic, and / or mechanical It should be understood that component replacement is necessary. Overall, reverse state changes should thus be prevented. This prevents the risk that an electronic device is mistakenly assembled into the device components of the device after it is pulled away from the interface, thereby causing possible damage.

  According to another aspect, the electronic device is completely detached and / or partially separated, thereby causing further state changes, in particular an interface formed to determine the invalid configuration. ing. The risk of misuse of the electronic device, in particular after being pulled away from the device component interface, can be reduced thereby.

  Correspondingly, an electronic device is caused to undergo further state changes, particularly when it is in an invalid configuration, due to a complete and / or partial separation from the interface and / or by connection to the interface of other device components. It can be configured to make a decision. Thus, after pulling away from the interface, a further state change of the electronic device is already triggered, which can trigger an invalid configuration. Similarly, it is also possible that further state changes are only triggered by connections to other device components, in particular other device interfaces. It can thus be prevented that the electronic device is undesirably reused and / or reused causing damage.

  Furthermore, it may be further advantageous when an interface is formed to cause a change in the state of the electronic device. State changes caused to electronic devices can thus be specific to each vacuum device or specific to each device component. The type of state change can thus be triggered depending on the vacuum device or device component.

  Preferably, device-specific device operating configurations can be determined by device-specific state changes. Thus, the connection of an electronic device that can be used for a plurality of vacuum devices can cause a device-specific configuration, thereby establishing a device-specific device operating configuration.

  Prior to the first connection of the electronic device, this can be suitable for use in various vacuum devices. Correspondingly, the electronic device can be configured in such a way that various state changes are triggered in response to the vacuum device or device components before the first connection. Different state changes can also trigger different operating personalities, thus providing a universal area of use for only one type of electronic device.

  According to one embodiment of the vacuum device, it is possible that the state change is triggered in stages, in particular by a transition between two separate states of the electronic device. This can be a “binary” state change. That is, a change between two fixedly defined states. Each desired state change can thereby be achieved with high safety and accuracy.

  Similarly, state changes can be triggered steplessly. That is caused by a stepless transition between the two states. In such a stepless transition between two states, a continuous state change can be made. In continuous state changes, multiple intermediate states occur, in particular, until the desired final state is achieved. An electronic device that allows stepless state change can guarantee a particularly high degree of flexibility. A stepless state change in particular allows the triggering of a large number of final states, whereby a large number of different device operating configurations can be established.

  It may be advantageous for the connection at the interface to cause multiple state changes. In so doing, multiple state changes can be triggered in parallel. Similarly, multiple state changes can be triggered in series.

  In multiple state changes, on the one hand, the safety in causing the desired final state can be increased. The risk of a final condition that can be apologized is reduced. At the same time, multiple state changes increase the functionality of the electronic device. This is because the number of possible final states and thus the number of possible operating configurations are increased. Before the first electronic device is connected, the universal usability can thus be further improved.

  According to a further aspect of the vacuum device, an interface can be formed to cause a mechanical, electronic, magnetic, and / or optical state change of the electronic device. Correspondingly, the electronic device can be configured to cause a mechanical, electronic, magnetic and / or optical state change by connection to the interface. Such a state change can be made with high safety at the same time only at low cost.

  According to another embodiment of the vacuum device, the interface has a mechanical shape for changing the state of the electronic device. Such mechanical shaping can be made inexpensively and at the same time guarantees a high degree of functional safety. Suitably, such mechanical shaping is at least one protrusion, in particular a mandrel-like or web-like protrusion, and / or can be at least one notch. Preferably, a plurality of protrusions and / or notches can be provided. Such protrusions or notches can provide mechanical coding in a particularly simple manner. This coding generates each desired state change of the electronic device.

  When an electronic device state change is formed by at least one material exclusion and / or by at least one material interruption, especially when formed by interruption of a conductor path in the wiring board of the electronic device Can be advantageous. Such material exclusions or material interruptions can be particularly clearly perceived during assembly, so that when the electronic device is connected, the achievement of each final position in the interface is either by the operator or the assembly. Can be easily determined by a person.

  Furthermore, the electronic device state change may be formed by at least an electronic conductivity change and / or at least a color change. Since electronic conductivity changes, or color changes, can be made in a stepless manner, a large number of possible final states can be generated.

  Similarly, the state change can be formed by program selection. Correspondingly, a plurality of programs, in particular computer program products, can be stored or installed in the electronic device. It is possible to select a program from the device component to the electronic device via the interface by connecting the electronic device, by signal transmission, in particular by automatic signal transmission. Such a program selection can be made irreversibly in particular. The interface, in such exemplary aspects, can be a physical interface or a logical interface. This in particular enables wireless signal transmission and / or data transmission.

  Electronic device state changes can be electronically, optically, magnetically and / or mechanically detectable. This is associated with a high degree of detection safety and can be done at low cost at the same time.

  A further aspect of the invention relates to an apparatus component for a vacuum apparatus. In particular, it relates to apparatus components for the vacuum apparatus described above. The device component can be, for example, a vacuum pump component, a vacuum measurement device component, a vacuum analysis device component, a leak probe device component, or a vacuum chamber device component. The device component according to the invention has an interface for the connection of an electronic machine, in particular for device control and / or device adjustment, in which case the connection of the electronic device results in an electronic device. The interface is configured to generate a state change to determine the device operating configuration.

  A further aspect of the invention relates to an electronic device for a vacuum device. In particular, it relates to an electronic device for the vacuum device described above. Correspondingly, it can be a vacuum pump, a vacuum measuring device or an electronic device for a vacuum analysis device, a leak probe device or a vacuum chamber device. The electronic device according to the invention has at least one connecting part for connecting to the interface of the device component and has at least one component device for determining the device operating configuration, wherein the device component By connecting the connecting portion to the interface, the component device is formed so that the state change for determining the device operation configuration is performed.

  Yet another aspect of the present invention relates generally to electronic devices. This can be, for example, a vacuum pump, a vacuum assumption device, a vacuum analysis device, a leak probe device, or a vacuum chamber device. Reference to vacuum technology is possible in this apparatus, but is not essential. The electronic device according to the invention comprises at least one device component and an electronic device, in particular for device control and / or device adjustment, wherein the electronic device is a device component. An electronic device state change is generated by the connection to determine the device operating configuration, and the electronic device state change is at least one material. Formed by exclusion and / or by at least one material interruption.

  The invention also relates in particular to the device components of such electronic devices. Such a device component has an interface for the connection of an electronic machine, in particular for device control and / or device adjustment, in which case the connection of the electronic device results in an electronic device. , An interface is formed to generate a state change to determine the device operating configuration.

  The invention finally also relates to an electronic device, in particular the electronic device described above. Such an electronic device has at least one connecting part for connecting to the interface of the device component and has at least one component device for determining the device operating configuration, wherein the device component By connecting the connecting portion to the interface, the component device is formed so that the state change for determining the device operation configuration is performed.

  Yet another aspect of the present invention relates to a method for assembling and / or starting a vacuum apparatus, particularly the vacuum apparatus described above. Here, at least one device component is provided. Here, at least one electronic device is provided in particular for device control and / or device adjustment. Here, an electronic device is connected to the interface of the device component, and a connection causes an electronic device state change to occur to determine the device operating configuration.

  Yet another aspect of the invention relates to a method for the assembly and / or start-up of an electronic device, in particular the electronic device described above. Here, at least one device component is provided. Here, at least one electronic device is provided in particular for device control and / or device adjustment. Here, an electronic device is connected to the interface of the device component, and the connection changes the state of the electronic device in the form of material exclusion and / or in the form of material interruption. Because it is generated.

  The above description for the device according to the invention accordingly corresponds to the device component according to the invention, to the electronic device according to the invention, to the electronic device according to the invention and to the device component. It is also effective for a method for assembling and / or starting a vacuum device for the electronic device and for a method for assembling and / or starting an electronic device.

  In the following, the invention will be described on the basis of advantageous embodiments with reference to the accompanying drawings. The diagram shows the following briefly.

Perspective view of turbo molecular pump Bottom view of the turbomolecular pump in FIG. Sectional view of a turbomolecular pump along line AA shown in FIG. Sectional view of the turbomolecular pump along line BB shown in FIG. Sectional view of the turbomolecular pump along line CC shown in FIG. Simplified illustration of the vacuum device according to the first embodiment before connecting the electronic device to the device component Simplified illustration of the vacuum device according to the first embodiment before connecting the electronic device to the device component Simplified illustration of a vacuum device according to the second embodiment before connecting the electronic device to the device component Simplified illustration of a vacuum device according to the second embodiment before connecting the electronic device to the device component Simplified illustration of the vacuum device according to the third embodiment before connecting the electronic device to the device component Simplified illustration of the vacuum device according to the third embodiment before connecting the electronic device to the device component

  The turbo molecular pump 111 shown in FIG. 1 has a pump inlet 115 surrounded by an inlet flange 113. A recipient not shown in the figure can be connected to the pump inlet by a known method. Gas from the recipient can be aspirated from the recipient via pump inlet 115 and conveyed through the pump to pump outlet 117. A pre-vacuum pump (for example, a rotary vane pump) can be connected to the pump outlet.

  The inlet flange 113 forms the upper end of the housing 119 of the vacuum pump 111 in the direction of the vacuum pump of FIG. The housing 119 has a lower portion 121. In this, an electronics housing 123 is provided on the side. An electronic housing 123 houses the electronic and / or electronic components of the vacuum pump 111. These are, for example, for operating an electric motor 125 arranged in the vacuum pump. The electronics housing 123 is provided with a plurality of connecting portions 127 for accessories. Furthermore, a data interface 129 (for example, in accordance with the RS485 standard) and a power supply connection 131 are provided in the electronics housing 123.

  The housing 119 of the turbo molecular pump 111 is provided with a flow inlet 133, particularly in the form of a flow valve. Through this, the vacuum pump 111 can receive overflow. In the region of the lower portion 121, a seal gas connection portion 135 (also referred to as a cleaning gas connection portion) is further provided. Through this, the cleaning gas can be taken into the motor chamber 137 to protect the electric motor 15 against the gas conveyed by the pump. An electric motor 125 of the vacuum pump 111 is accommodated in the motor chamber. Two cooling medium connecting portions 139 are further provided in the lower portion 121. In this case, one cooling medium connection is provided as an inlet for the cooling medium, and the other cooling medium connection is provided as an outlet. The cooling medium can be introduced into the vacuum pump for cooling purposes.

  Since the lower surface of the vacuum pump can be used as an upstanding surface, the vacuum pump 111 can be operated upright on the lower surface 141. However, the vacuum pump 111 can also be fixed to the recipient via the inlet flange 113, so that it can be suspended and actuated. Furthermore, the vacuum pump 111 can be configured to be able to be activated when it is oriented differently than that shown in FIG. It is also possible to realize an embodiment of a vacuum pump in which the lower side 141 is arranged facing towards or up rather than facing down.

  Various screws 143 are further provided on the lower surface 141 shown in FIG. By these, the members of the vacuum pump not specified in detail here are fixed to each other. For example, the bearing cover 145 is fixed to the lower side surface 145.

  A fixing hole 147 is further provided in the lower side surface 141. Through this, the pump 111 can be fixed to the mounting surface, for example.

  2 to 5 show the cooling medium piping 148. In this, the cooling medium introduced or led out via the cooling medium connecting part 139 can be circulated.

  As shown in the cross-sectional views of FIGS. 3-5, the vacuum pump has a plurality of process gas pump stages. This is for conveying the process gas that reaches the pump inlet 115 to the pump outlet 117.

  A rotor 149 is disposed in the housing 119. This rotor has a rotor shaft 153 that can rotate around a rotation shaft 151.

  The turbo-molecular pump 111 has a plurality of pump stages connected in series to each other so as to produce a pump effect. These pump stages have a plurality of radial rotor disks 155 fixed to a rotor shaft 153 and a stator disk 157 disposed between the rotor disks 155 and fixed in the housing 119. In this case, one rotor disk 155 and one stator disk 157 adjacent thereto form one turbo molecular pump stage. The stator disks 157 are held at a desired axial distance from each other by the spacer ring 159.

  The vacuum pump further comprises a Holbeck pump stage that is nested in the radial direction and serially connected to each other to perform the pumping action. The rotor side of the Holbeck pump stage has a rotor hub 161 provided on the rotor shaft 153 and two holbeck rotor sleeves 163 and 165 fixed to the rotor hub 161 and supported by the cylinder side surface. Yes. They are oriented coaxially with the rotating shaft 151 and are connected to one another in the radial direction. Further, two holbek stator sleeves 167 and 169 having a cylinder side surface shape are provided. They are likewise oriented coaxially with respect to the axis of rotation 151 and are connected in a nested manner to each other when viewed in the radial direction.

  The surface of the Holbeck pump stage that exhibits the pumping effect is formed by the side surfaces, that is, by the inner surface and / or the outer surface of the Holbeck rotor sleeves 163 and 165 and the Holbeck stator sleeves 167 and 169. The radially inner surface of the outer Holbeck stator sleeve 167 faces the radially outer surface of the outer Holbeck rotor sleeve 163, forming a radial Holbeck gap 171, and the turbomolecular pump A subsequent first Holbeck pump stage is formed. The radially inner surface of the outer holbeck rotor sleeve 163 faces the radially outer surface of the inner holbeck stator sleeve 169, forming a radial holbeck gap 173, and the second holbeck rotor sleeve 163. Form a Beck pump stage. The radially inner surface of the inner holbeck stator sleeve 169 faces the radially outer surface of the inner holbeck rotor sleeve 165, forming a radial holbeck gap 175, and the third holbeck stator sleeve 169. Form a Beck pump stage.

  A radially extending channel may be provided at the lower end of the Holbeck rotor sleeve 163. Through this, the Holbeck gap 171 located radially outward is connected to the central Holbeck gap 173. Further, the upper end of the Holbeck stator sleeve 169 may be provided with a radially extending channel. Through this, the central Holbeck gap 173 is connected to the Holbeck gap 175 located on the radially inner side. Thereby, a plurality of Holbeck pump stages connected in a nested manner are serially connected to each other. A connecting channel 179 to the outlet 117 can be further provided at the lower end of the Holbeck rotor sleeve 165 located radially inward.

  The surfaces of the Holbeck stator sleeves 163 and 165 that exhibit the pump effect described above have a plurality of Holbeck grooves extending in the axial direction while circling around the rotation shaft 151 in a spiral shape. On the other hand, the opposite side of the Holbeck rotor sleeve 163, 165 is smooth and drives the gas for the operation of the vacuum pump 111 into the Holbeck groove.

  A roller bearing 181 is provided in the area of the pump inlet 117, and a permanent magnet bearing 183 is provided in the area of the pump outlet 115 for the rotatable support of the rotor shaft 153.

  In the region of the roller bearing 181, a conical splash nut 185 is provided on the rotor shaft 153. This has an outer diameter that increases towards the roller bearing 181. Splash nut 185 is in sliding contact with at least one skimmer (German) in the working medium reservoir. The working medium storage unit has a plurality of absorbent disks 187 stacked on each other. These disks are impregnated with a working medium for the roller bearing 181 such as a lubricant.

  During operation of the vacuum pump 111, the working medium is transferred from the working medium reservoir to the rotating splash nut 185 through the skimmer by the capillary effect, and along the splash nut 185 by centrifugal force, It is conveyed toward the roller bearing portion 181 in the direction of the outer diameter. Here, for example, a lubricating function is exhibited. The roller support portion 181 and the working medium storage portion are surrounded by a tank-shaped insert 189 and a support portion cover 145 in the vacuum pump.

  The permanent magnet bearing 183 has a rotor-side bearing half 191 and a stator-side bearing half 193. Each of these has one ring stack. The ring lamination part is composed of a plurality of rings 195 and 197 of permanent magnets laminated together in the axial direction. The ring magnets 195 and 197 face each other while forming a radial bearing portion gap 199. At this time, the ring magnet 195 on the rotor side is radially outward, and the ring magnet 197 on the stator side is radially inward. Is provided. The ground existing in the bearing gap 199 causes a magnetic repulsion between the ring magnets 195 and 197. This achieves radial support of the rotor shaft 153. The rotor-side ring magnet 195 is supported by the carrier portion 201 of the rotor shaft 153. This surrounds the ring magnet 195 radially outward. The stator side ring magnet 197 is carried by the stator side carrier portion 203. This extends through the ring magnet 197 and is suspended on the support member 205 of the housing 119. A rotor-side ring magnet 195 is fixed in parallel with the rotation shaft 151 by a cover element 207 connected to the carrier portion 203. The stator side ring magnet 197 is fixed in one direction parallel to the rotation shaft 151 by a fixing ring 209 connected to the carrier portion 203 and by a fixing ring 211 connected to the carrier portion 203. In addition, a spring spring 213 can be provided between the fixing ring 211 and the ring magnet 197.

  An emergency or safety support 215 is provided inside the magnet support. This occurs only during the normal operation of the vacuum pump when the rotor 149 slips in a non-contact manner and the rotor 149 is excessively displaced in the radial direction with respect to the stator. This is to form a radial stopper for the rotor 149. This is because the rotor side structure is prevented from colliding with the stator side structure. The safety bearing 215 is formed as a non-lubricated roller bearing and forms a radial gap with the rotor 149 and / or the stator. This clearance serves to prevent the safety bearing 215 from acting during normal pump operation. The radial gap through which the safety bearing acts is sized sufficiently large so that the safety bearing 215 does not act during normal operation of the vacuum pump and at the same time is sufficiently small so that the rotor The side structure is prevented from colliding with the stator side structure in all situations.

  The vacuum pump 111 has an electric motor 125 for driving the rotor 149 to rotate. The anchor of the electric motor 125 is formed by a rotor 149. The rotor shaft 153 extends through the motor stator 217. A portion of the rotor shaft 153 that extends through the motor stator 217 may be provided with a permanent magnet device radially outward or embedded. An intermediate space 219 is provided between the portion of the rotor 149 that extends through the motor stator 217 and the motor stator 217. This has a radial motor gap. Through this, the motor stator 217 and the permanent magnet device can be magnetically influenced for transmitting the driving torque.

  The motor stator 217 is fixed inside a motor chamber 137 provided for the electric motor 125 in the housing. A seal gas (also referred to as a cleaning gas, which can be, for example, air or nitrogen) reaches the motor chamber 137 via the seal gas connection portion 135. Through the sealing gas, the electric motor 125 can be protected against process gas, for example corrosive parts of the process gas. The motor chamber 137 can also be evacuated via the pump outlet 117, that is, the motor chamber 137 is at least approximately pre-vacuum realized by a read vacuum pump connected to the pump outlet 117. It has become.

  A so-called known labyrinth seal 223 can be further provided between the wall 221 defining the motor chamber 137 and the rotor hub 161. In particular, this is to achieve better sealing of the motor chamber 217 against the Holbeck pump stage located radially outward.

  The turbomolecular pump of FIGS. 1 to 5 forms the device according to the invention or the electronic device according to the invention. FIGS. 6 to 11 show details that may also be contemplated in the turbomolecular pumps of FIGS. 1 to 5 even though they are not explicitly shown therein.

  6 and 7 show a simplified diagram of a vacuum apparatus according to a first embodiment of the present invention. The vacuum device of FIGS. 6 and 7 can in particular be a turbomolecular pump 111. The turbomolecular pump 111 shown in FIG. 6 has at least one device component 225 and an electronic device 227. The device component 225 can be, for example, a housing 1119 and / or a lower portion 119 of a turbomolecular pump. The electronic device 227 can be, for example, an electronics housing 123. Similarly, the electronic device can be an electronic component provided within the electronics housing 123. The electronic device 227 can be configured for device control and / or device adjustment, in particular for the operation of an electric motor 125 provided in the turbomolecular pump.

  FIG. 6 shows the turbomolecular pump 111 in a state before the electronic device 227 is connected to the device component 225, and FIG. 7 shows the turbomolecular pump in a state after the electronic device 227 is connected to the device component 225. 111 is shown. In order to connect the electronic component 227 to the device component 225, the device component has an interface 229. Connecting the electronic device 227 to the device component 225 causes a change in state of the electronic device 227 to determine the device operating configuration.

  The electronic device 227 is provided with a plurality of break setting points 231. This allows the intended material exclusion 233 to be performed as shown in FIG. Thus, the interface 229 of the device component 225 can be formed by protrusions 235 on a plurality of webs. Due to the connection of the electronic device 227 in the device component 225, the protrusion 235 comes into contact with the material portion to be excluded of the electronic device 227, and along each break setting point 231 as shown in FIG. Intentional material exclusion 233 is performed. The area surrounding the break setting location 231 thus forms a connection for the connection of the device component 225 to the interface 229.

  The material exclusion 233 can interrupt the conductor path 237 of the electronic device 227, which can be detected by the evaluation unit 239 of the electronic device 227. 6 and 7, conductor paths 237a to 237f are particularly provided. Depending on which conductor track 237 and how many conductor tracks 237 are interrupted, various state changes can be adjusted. These can correspond to various device operating configurations that can be determined by the evaluation unit 239.

The fracture setting location 231 or the material part that can be excluded can form a constituent part. This component implements a state change to determine the device operating configuration by connecting the connection portion of the device component 225 to the interface 229.
6 and 7, the interface 229 is formed in a special arrangement by four protrusions 235 as a whole. These create four special material exclusions 233 as a whole after the connection of the electronic device 227. This leads to interruption of the special conductor path as well, ie to interruption of the conductor paths 237a, 237b, 237d and 237f. On the other hand, the conductor paths 237c and 237e do not form an interruption. This can be detected by the evaluation unit 239 and subsequently enables the determination of the corresponding device operating configuration.

  Based on the possible state changes that can be made with the electronic device 227, it is suitable for universal use within a plurality of vacuum devices. After the initial connection, special state changes can be made. Other state changes can be made after removal and / or reconnection at other device components. This state change may correspond to an invalid configuration. The change of state by removal can be achieved, for example, by a return at the interface 229 and by a corresponding removable material part in the electronic device 227. This is not shown. Since the reuse of the electronic device 227 in another vacuum device can be avoided by such an aspect, the risk of misassembly is reduced.

  In the embodiment of FIGS. 6 and 7, multiple material exclusions 233 can be generated in parallel in the electronic device 227.

  8 and 9 show a simplified diagram of a vacuum apparatus according to a second embodiment of the present invention. The vacuum apparatus of FIGS. 8 and 9 can in particular be a turbomolecular pump 111, as FIGS. 1 to 5 show. The embodiment of FIGS. 8 and 9 differs from the embodiment of FIGS. 6 and 7 in that multiple material exclusions can simply be generated in series. For this reason, the electronic device 227 has a plurality of break setting points 231 arranged to generate the material exclusion 233 serially as shown in FIG. The interface 229 of the device component 225 is formed by a web-like protrusion 235 in the embodiment of FIGS.

  Due to the connection of the electronic device 227 in the device component 225, the protrusion 235 comes into contact with the material portion to be excluded of the electronic device 227, and along each break setting point 231 as shown in FIG. Intentional material exclusion 233 is performed.

  According to FIGS. 8 and 9, the conductor path 237 of the electronic device 227 can be interrupted by the material exclusion 233. This can be detected by the evaluation unit 239. In the embodiment of FIGS. 8 and 9, in particular conductor paths 237a to 237c are provided. At this time, the quantity or range of material exclusion and the interruption of the conductor path are in accordance with the size of the protrusion 235. Depending on how many conductor tracks 237 are interrupted, various state changes can be adjusted. These can correspond to various device operating configurations.

  In the embodiment of FIGS. 8 and 9, the material path 237a and 237b will be interrupted, but the material exclusion 233 will be sized to prevent interruption of the conductor path 237c.

  The material exclusion 233 according to the first and second embodiments, as shown in FIGS. 7 and 9, is a phased state change, i.e. two separate states, i.e. a state without material exclusion 233 and a material. A bridge between states with exclusion 233.

  10 and 11 show a simplified diagram of a vacuum apparatus according to a third embodiment of the present invention. The vacuum apparatus of FIGS. 10 and 11 can also be a turbomolecular pump 111, as shown in FIGS. The embodiment of FIGS. 10 and 11 differs from the embodiment of FIGS. 6 and 9 in that a conductivity change can be generated simply in place of multiple material exclusions. For this reason, the electronic device 227 of FIGS. 10 and 11 has a removal device 241 connected to the conductor track 237. The removal device 241 is made of a particularly conductive and removable material. In doing so, a change in electronic conductivity can be caused by the removal of the material. In particular, the material of the removal device 241 can be polished. 10 and 11, the interface 229 of the device component 225 is formed by a web-like protrusion 235.

  Due to the connection of the electronic device 227 in the device component 225, the protrusion 235 contacts the removal device 241. This causes the conductive material of the removal device 241 to be polished or otherwise mechanically removed, which can be detected by the evaluation unit 239. Since the material removal can be performed in a stepless manner, the change in conductivity of the removal device 241 can be gradually adjusted. The degree of material removal and thus the change in conductivity depends on the dimensions of the protrusions 235. Depending on how far the protrusion 235 has entered the removal device 241, the state change can be adjusted to various degrees. These can correspond to various device operating configurations.

  According to a preferred embodiment, which can be realized in particular by the concept described in FIGS. 6 to 11, the electronic device 227 can in particular be a pump substrate. This is, for example, attached to the device component 225 of the pump 111, thereby being the intended member of the pump 111. The configuration of the pump 111 is determined by the mounting action. This can then preferably be evaluated accordingly by the drive. The drive device can be replaceable. At that time, it is possible for the other drive units to be used after replacement to evaluate the previously determined configuration in the same manner. As an alternative, there is a possibility that the mechanical interface 229 of each pump 111 will cause a state change in this directly in the drive which can be replaced by the connection of the drive. The drive device can thereby be generally fixed to each pump 111 or to each vacuum device, and can no longer be used for other devices depending on the manner of state change. .

  As described above, the concepts described based on FIGS. 6 to 11 can be arbitrarily combined with each other.

  The device components and electronic devices shown in normative form in FIGS. 6 to 11 and the concept generally described at the top of the specification are likewise described in detail in the embodiment according to FIGS. Even if not represented or described, it may be contemplated. This is valid for all details regarding the connection of electronic devices to each device component, as well as for the construction produced thereby. Similarly, general or individual details of the turbomolecular pump 111 represented in FIGS. 1 to 5 and described accordingly are also shown in FIGS. 6 to 11 of the turbomolecular pump 111. Can also be contemplated in certain embodiments.

111 Turbo molecular pump 113 Inlet flange 115 Pump inlet 117 Pump outlet 119 Housing 121 Lower portion 123 Electronics housing 125 Electric motor 127 Accessory connection 129 Data interface 131 Power supply connection 133 Flow inlet 135 Seal gas connection 137 Motor chamber 139 Cooling medium Connection part 141 Lower side surface 143 Screw 145 Bearing part cover 147 Fixing hole 148 Cooling medium piping 149 Rotor 151 Rotor shaft 153 Rotor shaft 155 Rotor disk 157 Stator disk 159 Spacer ring 161 Rotor hub 163 Holbeck rotor sleeve 165 Holbeck rotor sleeve 167 Hol Beck stator sleeve 169 Holbex Theta sleeve 171 Holbeck gap 173 Holbeck gap 175 Holbeck gap 179 Connection channel 181 Roller bearing part 183 Permanent magnet bearing part 185 Splash nut 187 Disk 189 Insert 191 Rotor side bearing half part 193 Stator side bearing half part 195 Ring magnet 197 Ring magnet 199 Bearing part gap 201 Carrying part 203 Carrying part 205 Radial column 207 Cover element 209 Support ring 211 Fixing ring 213 Belleville spring 215 Emergency or safety support part 217 Motor stator 219 Intermediate space 221 Wall part 223 Labyrinth seal 225 Device component 227 Electronic device 229 Interface 231 Break setting point 233 Material exclusion 235 Protrusion 237 Conductor path 239 Evaluation unit Knit 241 removal device

Claims (15)

A vacuum device (111), in particular a vacuum pump, a vacuum measuring device, a leak probe device and / or a vacuum chamber device, having at least one device component (225) and in particular device control and / or device For adjustment, it has one electronic device (227), wherein the electronic device (227) is connected to the interface (229) of the device component (225), and by connection, A vacuum device (111), characterized in that a state change of the electronic device (227) is triggered to determine the device operating configuration. 2. Vacuum device (111) according to claim 1, characterized in that the state change of the electronic device (227) is irreversibly caused by a connection at the interface (229). By complete and / or partial removal of the electronic device (227), an interface (229) is formed so that further state changes can be generated in this, in particular for the determination of the invalid configuration, And / or by further and / or partial removal of the interface (229) and / or by connection to the interface of other device components, further state changes are received, in particular for determining the invalid configuration A vacuum device (111) according to claim 1 or 2, characterized in that an electronic device (227) is formed. An interface (229) is formed to cause a device-specific state change of the electronic device (227), preferably with the device-specific state change to determine the device-specific device operating configuration. 4. A vacuum device (111) according to at least one of claims 1 to 3, characterized in that: The state change is generated in stages, in particular by the transition between two separate states of the electronic device (227), or the state change is not made in particular by a stepless transition between the two states. 5. Vacuum device (111) according to at least one of claims 1 to 4, characterized in that it is generated in stages. 6. A plurality of state changes are generated by the connection in the interface (229), in particular a plurality of state changes generated in parallel or in series are generated. The vacuum apparatus (111) according to at least one item. An interface (229) is formed for the occurrence of a mechanical, electronic, magnetic and / or optical state change of the electronic device (227) and / or the electronic device is 7. Vacuum according to at least one of claims 1 to 6, characterized in that it is configured to undergo a mechanical, electronic, magnetic and / or optical state change by connection to an interface (229). Device (111). The interface (229) has a mechanical shaping for changing the state of the electronic device, in which case the mechanical shaping is preferably performed by at least one projection (235), in particular a mandrel. 8. Vacuum device (111) according to at least one of claims 1 to 7, characterized in that it is formed by a ridge or web-like projection (235) and / or by at least one notch. The state change of the electronic device (227) is formed by at least one material exclusion (233) and / or by at least one material interruption, in particular a conductor in the wiring board of the electronic device (227). Formed by interruption of the path (237) and / or a change in the state of the electronic device (227) is formed at least by a change in electronic conductivity and / or at least by a change in color 9. A vacuum device (111) according to at least one of claims 1 to 8, characterized in that 10. The state change of the electronic device (227) can be detected electronically, optically, magnetically and / or mechanically, in particular by an evaluation unit. The vacuum apparatus (111) according to at least one of the above. Device component (225) for a vacuum device (111) according to any one of the preceding claims, in particular an electronic machine for device control and / or device adjustment The interface (229) is connected to the electronic device (227), and the electronic device (227) changes the state for determining the device operation configuration. Device component (225) characterized in that an interface (229) is formed to occur. 11. Electronic device for a vacuum device (111) according to any one of claims 1 to 10, wherein at least one connection for connecting to an interface (229) of a device component (225) And having at least one component for determining the device operating configuration, wherein the device operating configuration is determined by connecting the connecting portion to the interface (229) of the device component (225) An electronic device characterized in that a component device is formed to receive a state change for An electronic device (111), in particular a vacuum pump, a vacuum chamber or a leak probe device, having at least one device component (225) and in particular for device control and / or device adjustment Having an electronic device (227), wherein the electronic device (227) is connected to the interface (229) of the device component, wherein the connection is for determining the device operating configuration. A state change of the electronic device (227) has occurred and the state change of the electronic device (227) is formed by at least one material exclusion (233) and / or by at least one material interruption. An electronic device (111), characterized in that A method for the assembly and / or start-up of a vacuum device (111) according to any one of claims 1 to 10, characterized in that
At least one device component (225) is provided;
At least one electronic device (227) is provided, in particular for device control and / or device adjustment,
An electronic device (227) is connected to the interface (229) of the device component (225); and
Method, characterized in that the connection causes a change in the state of the electronic device (227) to determine the device operating configuration. A method for assembling and / or starting an electronic device (111) according to claim 13, in particular.
At least one device component (225) is provided;
At least one electronic device (227) is provided, in particular for device control and / or device adjustment,
An electronic device (227) is connected to the interface (229) of the device component (225), and the connection changes the state of the electronic device (227) in the form of material exclusion (233) and / or A method characterized in that it is generated in the form of a material interruption for the determination of the device operating configuration.

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