JP2019166532A - Manufacturing apparatus and method - Google Patents

Abstract

To provide a manufacturing apparatus capable of suppressing a time required for treatment by preventing a gas leakage out of the junction of a housing.SOLUTION: A manufacturing apparatus comprises a housing 1, a compression means 2, a gas supply means 2, a concentration measurement means 4, and a control means 5. The housing 1 has a body part 6 and a lid part 7 joined via an elastic member 8. The compression means 2 applies pressure for pressing at least one of the body part 6 and the lid part 7 on the other. The gas supply means 3 introduces a first gas into the housing 1. The concentration measurement means 4 measures the concentration of a second gas. The control means 5 controls pressure on the basis of the time from the start of introducing the first gas to the reach of concentration of the second gas to a reference concentration or less.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a manufacturing apparatus, and more particularly to a control technique for a manufacturing apparatus.

  In the reflow process when soldering electronic components to the board, in order to suppress the oxidation of the electrodes and the oxidation of the solder material, the reflow device is filled with an inert gas, nitrogen, in a low oxygen concentration atmosphere. Reflow processing is performed.

  In many cases, the furnace body of a reflow apparatus has a structure in which a lid is opened for maintenance. Moreover, packing is attached to the furnace body so that nitrogen to be filled does not leak when the lid is closed. However, when the packing deteriorates due to the heat of the reflow device, a gap is formed between the furnace body and the lid, and nitrogen leaks out. When nitrogen leaks, the state in which the set oxygen concentration is not reached or the time to reach the set oxygen concentration increases, which may cause problems due to oxidation and a prolonged reflow process. Therefore, it is desirable that there is a technique capable of controlling the oxygen concentration in the furnace within an appropriate range even when the packing is deteriorated in the reflow process, and related techniques are being developed. As a technique for controlling the oxygen concentration in the furnace in the reflow process, for example, a technique as disclosed in Patent Document 1 is disclosed.

  Patent Document 1 relates to a reflow apparatus having a function of correcting deformation of a casing. The reflow device of Patent Document 1 includes a tension device that pulls two points on the upper surface of the upper casing and two points on the lower surface of the lower casing in the directions of each other. Japanese Patent Application Laid-Open No. 2004-228561 describes that the airtightness between the upper housing and the lower housing can be maintained by correcting the deformation of the housing using a tension device.

JP 2008-170072 A

  However, the technique of Patent Document 1 is not sufficient in the following points. The reflow device of Patent Document 1 tries to maintain the airtightness by correcting the deformation of the casing by applying a pulling force to the casing. However, when the packing attached between the upper housing and the lower housing is deteriorated, there is a possibility that sufficient airtightness cannot be maintained, for example, new leakage occurs only by correcting the deformation amount of the housing. . Therefore, the technique of Patent Document 1 is not sufficient as a technique for preventing gas leakage from the joint and suppressing the time required for processing.

  In order to solve the above-described problems, an object of the present invention is to provide a manufacturing apparatus that can suppress gas leakage from a joint portion of a housing even when deterioration occurs in a member. .

  In order to solve the above problems, the manufacturing apparatus of the present invention includes a housing, a pressurizing unit, a gas supply unit, a concentration measuring unit, and a control unit. The housing includes a main body part and a lid part joined to the main body part via an elastic member. The pressurizing means applies pressure to push at least one of the main body and the lid to the other side. The gas supply means introduces the first gas into the housing. The concentration measuring means measures the concentration of the second gas in the housing. The control means controls the pressure based on the introduction amount or time of the first gas from the start of the introduction of the first gas until the concentration of the second gas becomes equal to or lower than the reference concentration.

  The control method of the present invention introduces the first gas into the inside of a housing having a main body portion and a lid portion joined to the main body portion via an elastic member. The control method of the present invention measures the concentration of the second gas in the housing. According to the control method of the present invention, the pressure to push at least one of the main body portion and the lid portion to the other side is started until the concentration of the second gas becomes equal to or lower than the reference concentration after the introduction of the first gas is started. The control is performed based on the introduction amount or time of the first gas.

  According to the present invention, it is possible to suppress gas leakage from the joint portion of the housing.

It is a figure which shows the outline | summary of a structure of the 1st Embodiment of this invention. It is a figure which shows the outline | summary of a structure of the 2nd Embodiment of this invention. It is a figure which shows the structure of the reflow apparatus of the 2nd Embodiment of this invention. It is the figure which showed typically the state which opened the furnace cover of the reflow apparatus of the 2nd Embodiment of this invention. It is a figure which shows the structure of the control apparatus of the 2nd Embodiment of this invention. It is a figure which shows the outline | summary of the operation | movement flow of the 2nd Embodiment of this invention. It is a figure which shows the outline | summary of a structure of the 3rd Embodiment of this invention. It is a figure which shows the structure of the reflow apparatus of the 3rd Embodiment of this invention. It is a figure which shows the structure of the control apparatus of the 3rd Embodiment of this invention. It is a figure which shows the outline | summary of the operation | movement flow of the 3rd Embodiment of this invention. It is a figure which shows the outline | summary of the operation | movement flow of the 3rd Embodiment of this invention.

(First embodiment)
A first embodiment of the present invention will be described in detail with reference to the drawings. FIG. 1 shows an outline of the configuration of the manufacturing apparatus of this embodiment. The manufacturing apparatus according to the present embodiment includes a housing 1, a pressurizing unit 2, a gas supply unit 3, a concentration measuring unit 4, and a control unit 5. The housing 1 includes a main body portion 6 and a lid portion 7 that is joined to the main body portion 6 via an elastic member 8. The pressurizing means 2 applies a pressure that pushes at least one of the main body portion 6 and the lid portion 7 to the other side. The gas supply unit 3 introduces a first gas into the housing 1. The concentration measuring unit 4 measures the concentration of the second gas in the housing 1. The control means 5 controls the pressure based on the introduction amount or time of the first gas from the start of the introduction of the first gas until the concentration of the second gas becomes equal to or lower than the reference concentration.

  In the manufacturing apparatus of the present embodiment, the first gas is introduced into the housing 1, and the concentration measuring means 4 measures the concentration of the second gas. In addition, in the manufacturing apparatus of the present embodiment, the control unit 5 starts the introduction of the first gas, and the introduction amount or time of the first gas until the concentration of the second gas becomes equal to or lower than the reference concentration. On the basis of the pressure, the pressurizing means 2 controls the pressure when the main body 6 and the lid 7 are pushed to the other side. As described above, the manufacturing apparatus according to the present embodiment is provided between the main body portion 6 and the lid portion 7 based on the concentration of the second gas that is discharged out of the housing 1 when the first gas is introduced. The force applied to the elastic member 8 is adjusted. Therefore, the manufacturing apparatus of this embodiment can adjust the airtightness between the main-body part 6 and the cover part 7 by changing the force applied to the elastic member 8 based on the density | concentration of 2nd gas. As a result, the manufacturing apparatus of the present embodiment can suppress gas leakage from the joint portion of the housing.

(Second Embodiment)
A second embodiment of the present invention will be described in detail with reference to the drawings. FIG. 2 shows an outline of the configuration of the reflow processing system of this embodiment. The reflow processing system of the present embodiment includes a reflow device 10, a control device 20, and a storage device 30. The reflow processing system of the present embodiment is a manufacturing apparatus that performs a reflow process when an electronic component is soldered to a wiring board or the like in the reflow apparatus 10. The reflow process is performed in the furnace of the reflow apparatus 10 by heating in a nitrogen atmosphere.

  A configuration of the reflow apparatus 10 will be described. FIG. 3 shows a configuration of the reflow apparatus 10 of the present embodiment. FIG. 4 schematically shows a state in which the furnace cover is opened in the reflow apparatus 10 of the present embodiment. 3 and 4 are cross-sectional views in a direction perpendicular to the conveying direction of the members of the reflow device 10. The reflow apparatus 10 of the present embodiment includes a furnace body 11, a furnace body lid 12, a packing 13, an opening / closing cylinder 14, an oxygen concentration measuring unit 15, a supply port 16, a pipe 17, and a control valve 18. I have.

  The furnace body 11 is a main body of a reflow furnace, and includes units corresponding to a reflow process such as a transport unit such as a transport rail and a heating unit. The heating unit may be attached to the furnace body lid 12 side. A pipe 17 for introducing nitrogen from the outside is connected to the furnace body 11, and a nitrogen supply port 16 is formed inside the furnace body 11. Nitrogen introduced through the supply port 16 is filled in a furnace formed by a casing composed of the furnace body 11 and the furnace body lid 12, and the oxygen present in the interior as the amount of nitrogen increases. Etc. are discharged outside the housing. The amount of nitrogen supplied into the furnace is adjusted by the control device 20 controlling the control valve 18.

  The furnace body lid 12 is attached to the furnace body 11 as a lid that can be opened and closed. A packing 13 is attached between the furnace body 11 and the furnace body lid 12 so that airtightness is maintained when the furnace body lid 12 is closed. The furnace body lid 12 changes the interval with the furnace body 11 according to the operation of the opening / closing cylinder 14.

  The packing 13 is an elastic member attached to the furnace body 11 and the furnace lid 12 and having a function of maintaining the airtightness of the joint between the furnace body 11 and the furnace lid 12. The packing 13 is formed of heat-resistant rubber such as silicone rubber or fluorine rubber, for example. When the gap between the furnace body 11 and the furnace body lid 12 is narrowed, the packing 13 is deformed by receiving pressure, thereby maintaining the airtightness by filling the gap between the joints of the furnace body 11 and the furnace body lid 12. For example, the packing 13 is continuously attached to the joint between the furnace body 11 and the furnace body lid 12 with respect to the conveying direction of the reflow apparatus 10.

  The furnace body 11, the furnace body lid 12, and the packing 13 of the present embodiment correspond to the housing 1 of the first embodiment. The furnace body 11 of the present embodiment corresponds to the main body 6 of the first embodiment. Moreover, the furnace body lid | cover 12 of this embodiment is corresponded to the cover part of 1st Embodiment. Further, the packing 13 of the present embodiment corresponds to the elastic member 8 of the first embodiment.

  The opening / closing cylinder 14 has a function of opening and closing the furnace body lid 12 and a function of adjusting the interval between the furnace body 11 and the furnace body lid 12. The opening / closing cylinder 14 adjusts the opening / closing of the furnace body lid 12 and the interval between the furnace body 11 and the furnace body lid 12 by changing the length by expanding and contracting the cylinder based on the control of the control device 20. When the opening / closing cylinder 14 contracts, the gap between the furnace body 11 and the furnace body lid 12 becomes narrow, and the pressure applied to the packing 13 increases. The opening / closing cylinder 14 of the present embodiment corresponds to the pressurizing means 2 of the first embodiment.

  The oxygen concentration measuring unit 15 has a function of measuring the oxygen concentration in the reflow furnace. The oxygen concentration measurement unit 15 sends information on the measurement result of the oxygen concentration to the oxygen concentration input unit 23 of the control device 20. Further, the oxygen concentration measurement unit 15 of the present embodiment corresponds to the concentration measurement unit 4 of the first embodiment.

  The supply port 16 is an introduction port for introducing nitrogen into the reflow apparatus 10. A plurality of supply ports 16 may be provided inside the reflow apparatus 10.

  The pipe 17 is a pipe that supplies nitrogen from the outside to the inside of the reflow device 10. When there are a plurality of supply ports 16, the pipe 17 may have a branch structure.

  The control valve 18 controls the flow rate of nitrogen introduced into the reflow device 10 from the pipe 17 through the supply port 16. Moreover, the supply port 16, the piping 17, and the control valve 18 of this embodiment are corresponded to the gas supply means 3 of 1st Embodiment.

  The configuration of the control device 20 will be described. FIG. 5 shows a configuration of the control device 20 of the present embodiment. The control device 20 includes a furnace control unit 21, a cylinder control unit 22, and an oxygen concentration input unit 23.

  The furnace control unit 21 performs control related to a pallet conveying system on which a member for performing reflow processing is placed, temperature control in the reflow furnace, and other operations related to the reflow furnace. Further, the furnace control unit 21 controls the control valve 18 to start and stop the supply of nitrogen into the reflow apparatus 10 and control the flow rate.

  The cylinder control unit 22 has a function of controlling the expansion / contraction operation of the opening / closing cylinder 14. The cylinder control unit 22 controls the expansion / contraction operation of the opening / closing cylinder 14 to open / close the furnace body lid 12 and adjust the interval between the furnace body 11 and the furnace body lid 12. That is, the cylinder control unit 22 adjusts the pressure applied from the furnace body lid 12 to the furnace body 11 side at the joint by controlling the expansion and contraction of the opening / closing cylinder 14.

  The oxygen concentration input unit 23 receives data of oxygen concentration measurement results from an oxygen concentration meter. Moreover, the function of the control apparatus 20 of this embodiment is corresponded to the control means 5 of 1st Embodiment.

  The processing in each part of the control device 20 is performed by executing a computer program on the information processing device, for example. The computer program for performing each of such processes can be recorded on a recording medium and distributed. As the recording medium, for example, a magnetic tape such as a data recording magnetic tape or a hard disk can be used. As the recording medium, an optical disk such as a CD-ROM (Compact Disc Read Only Memory) or a DVD (Digital Versatile Disc), or a magneto-optical disk may be used. A nonvolatile semiconductor memory device may be used as a recording medium. Moreover, the process in each part of the control apparatus 20 may be performed by a semiconductor processing apparatus such as an FPGA (Field-Programmable Gate Array).

  The storage device 30 stores each setting information of the reflow device 10 and each data used when the control device 20 controls the reflow device 10. The storage device 30 is configured by, for example, a nonvolatile semiconductor storage device or a hard disk. The storage device 30 may be integrated with the control device 20, or may be connected to a storage area provided in a production management system or the like via a network.

  The operation of the reflow processing system of this embodiment will be described. FIG. 6 shows an outline of the operation flow of the reflow processing system of this embodiment.

  First, the reflow device 10, the control device 20, and the storage device 30 are activated by an operator turning on the power or operating a switch (step S11).

  When the start-up is performed, the furnace control unit 21 of the control device 20 reads a reflow setting file, which is a file in which each setting value related to the reflow processing is stored, from the storage device 30. In the reflow setting file, setting value data for performing reflow processing such as a setting value of the temperature and oxygen concentration in the furnace of the reflow apparatus 10 and a setting value of the rail width of the transfer unit is stored for each substrate to be processed. Yes. The furnace control unit 21 sets each unit in the reflow apparatus 10 based on the data of the reflow setting file.

  When the reflow device 10 is activated, the furnace control unit 21 stores the time when the reflow device 10 is activated in the storage device 30 (step S12).

  If the starting time of the reflow apparatus 10 is preserve | saved, the furnace control part 21 will start supply of nitrogen to the inside of the furnace of the reflow apparatus 10, and will fill nitrogen in a furnace (step S13). When nitrogen is supplied into the furnace of the reflow device 10, oxygen concentration in the furnace gradually decreases by causing oxygen to be expelled from the furnace.

  When the supply of nitrogen is started, the furnace control unit 21 monitors oxygen concentration data in the furnace of the reflow apparatus 10 input via the oxygen concentration input unit 23. The furnace control unit 21 confirms whether the oxygen concentration in the furnace is equal to or lower than a preset reference value.

  When the oxygen concentration is equal to or less than a preset reference value (Yes in step S14), the furnace control unit 21 calculates the time from the activation time of the reflow device 10 to the time when the oxygen concentration becomes equal to or less than the reference (step S15). ). When the time until the time when the oxygen concentration becomes equal to or lower than the reference is calculated, the furnace control unit 21 stores the calculated time in the storage device 30.

  When the time until the time when the oxygen concentration becomes below the reference is calculated, the furnace control unit 21 compares the calculated time with a time set in advance as a reference for the time when the oxygen concentration reaches below the reference.

  When the time until the oxygen concentration becomes below the reference is less than the preset time (Yes in step S16), the furnace control unit 21 determines that the pressurization state by the opening / closing cylinder 14 is appropriate. When the time until the oxygen concentration falls below the reference is within a preset range, when the temperature in the furnace reaches the set temperature (step S17), the preparation for operation of the reflow device 10 is completed (step S18). When the preparation for operation of the reflow apparatus 10 is completed, reflow processing is sequentially performed.

  When the time until the oxygen concentration becomes equal to or lower than the reference is equal to or longer than a preset time (Yes in Step S16), the furnace control unit 21 increases the pressurization by the opening / closing cylinder 14 via the cylinder control unit 22 ( Step S24). The furnace control unit 21 controls the opening / closing cylinder 14 to be shorter via the cylinder control unit 22 and increases the amount of pressurization by narrowing the interval between the furnace body 11 and the furnace body lid 12.

  When the oxygen concentration is higher than a preset reference value (No in step S14), the furnace control unit 21 confirms whether the elapsed time exceeds the upper limit. When the elapsed time does not exceed the upper limit (No in step S19), the filling of nitrogen in step S13 is continued, and the furnace control unit 21 monitors the oxygen concentration data in the furnace of the reflow device 10.

  If the elapsed time exceeds the upper limit (Yes in step S19), the furnace control unit 21 increases the pressurization by the opening / closing cylinder 14 via the cylinder control unit 22 (step S20). The furnace control unit 21 controls the opening / closing cylinder 14 to be shorter via the cylinder control unit 22 and increases the amount of pressurization by narrowing the interval between the furnace body 11 and the furnace body lid 12.

  When the pressurization amount is increased, the furnace control unit 21 confirms whether the oxygen concentration in the furnace is decreasing. When the oxygen concentration is decreasing (Yes in step S21), the furnace control unit 21 continues to fill nitrogen until the oxygen concentration becomes equal to or lower than the reference. When the oxygen concentration decreases and the oxygen concentration becomes lower than the reference (step S22), the furnace control unit 21 increases the temperature until the temperature in the furnace reaches the set temperature. When the temperature in the furnace reaches the set temperature (step S17), the preparation for operation of the reflow apparatus 10 is completed (step S18). When the preparation for operation of the reflow apparatus 10 is completed, reflow processing is sequentially performed.

  When the oxygen concentration does not decrease even when the amount of pressurization is increased (No in step S21), the furnace control unit 21 determines that the packing 13 is deteriorated or malfunctions of each unit, and issues an alarm. The alarm is notified to an operator or the like via a display device or an audio output device connected to the control device 20. The alarm may be sent to a production management system or the like via a network.

  The control device 20 according to the present embodiment reads a setting file in which temperature settings, oxygen concentration settings, rail width settings, and the like are stored from the storage device 30 and starts the reflow device 10 with the read settings. When the reflow device 10 is activated, introduction of nitrogen from an external supply source is started in the furnace.

  After a lapse of time after the start of nitrogen introduction, the furnace reaches the set oxygen concentration. Time A reaches the oxygen concentration set in the furnace. When the oxygen concentration reaches the set value, the control device 20 adjusts the flow rate of nitrogen so as to maintain the set oxygen concentration. However, when the packing 13 is deteriorated and a gap is formed between the furnace body 11 and the furnace body lid 12, the time A for reaching the set oxygen concentration increases because the inflowing nitrogen flows out of the gap.

  The control device 20 measures the time A, and when the time A is statistically compared with the past data and has increased beyond the arbitrarily set range, the pressure set in the direction in which the opening / closing cylinder 14 is contracted is set. In addition, the gap between the furnace body 11 and the furnace body lid 12 is eliminated by pressurizing the packing 13. Moreover, the control apparatus 20 pressurizes the packing 13 similarly, also when the elapsed time B after starting exceeds the preset upper limit time C. Further, the control device 20 displays an alarm prompting replacement of the packing 13 when the packing 13 is pressurized to a set pressure and the oxygen concentration has not decreased even after the reference time has elapsed.

  The reflow processing system of the present embodiment prevents nitrogen leakage by pressurizing the packing 13 based on the change in the arrival time of the oxygen concentration to the reference value. The change in the arrival time of the oxygen concentration to the reference value can be caused by nitrogen leakage due to deterioration of the packing 13. In the reflow processing system of the present embodiment, when nitrogen leakage due to deterioration of the packing 13 occurs, the pressure applied to the packing 13 is increased to improve the airtightness, so that the reference value of the oxygen concentration due to nitrogen leakage is increased. It is possible to avoid an increase in the arrival time. Further, in the reflow processing system of the present embodiment, the time required to start up the reflow device can be shortened by suppressing the time required for the oxygen concentration to reach the reference value, and the amount of nitrogen consumed due to nitrogen leakage can be reduced. Increase can be suppressed. Further, in the reflow processing system of the present embodiment, the number of replacements can be reduced by using the packing 13 that has deteriorated by preventing nitrogen leakage by pressurizing the packing 13, thereby reducing the maintenance man-hours of the reflow apparatus 10. .

  In the reflow processing system of the present embodiment, the control device 20 calculates the time from the start of introduction of nitrogen into the reflow device 10 until the oxygen concentration in the furnace becomes below the reference, and the calculated time is above the reference. In this case, the opening / closing cylinder 14 is contracted. By contracting the opening / closing cylinder 14, the interval between the joint portions of the furnace body 11 and the furnace body lid 12 is narrowed, and the pressure applied to the packing 13 is increased, so that the airtightness of the joint portion is increased. Therefore, even when the packing 13 deteriorates, nitrogen leakage occurs, and the time from when the introduction of nitrogen is started until the oxygen concentration in the furnace becomes below the standard becomes longer, the airtightness of the joint portion It is possible to suppress the time until nitrogen is filled. Moreover, the consumption of nitrogen can be suppressed by improving the airtightness of the junction. As mentioned above, the reflow processing system of this embodiment can prevent the gas leak from the junction part of a housing | casing, and can suppress the time which a process requires.

(Third embodiment)
A third embodiment of the present invention will be described in detail with reference to the drawings. FIG. 7 shows an outline of the configuration of the reflow processing system of this embodiment. The reflow processing system of this embodiment includes a reflow device 40, a control device 50, and a storage device 30. The configuration and function of the storage device 30 of this embodiment are the same as those of the storage device 30 of the second embodiment.

  The configuration of the reflow device 40 will be described. FIG. 8 shows a configuration of the reflow apparatus 40 of the present embodiment. The reflow device 40 according to the present embodiment includes a furnace body 11, a furnace body lid 12, a packing 13, and an opening / closing cylinder 14. Further, the reflow apparatus 10 includes an oxygen concentration measurement unit 15, a supply port 16, a pipe 17, a control valve 18, and a nitrogen flow rate measurement unit 41. The configurations and functions of the furnace body 11, the furnace body lid 12, the packing 13, the opening / closing cylinder 14, the oxygen concentration measuring unit 15, the supply port 16, the piping 17, and the control valve 18 of the present embodiment are the same as those of the second embodiment. It is the same as the part of the name.

  The nitrogen flow rate measuring unit 41 measures the nitrogen flow rate introduced into the furnace of the reflow device 40 and outputs the measurement result to the control device 50. The nitrogen flow rate measuring unit 41 may be formed as a module integrated with the control valve 18.

  The configuration of the control device 50 will be described. FIG. 9 shows the configuration of the control device 50 of the present embodiment. The control device 50 includes a furnace control unit 51, a nitrogen flow rate analysis unit 52, a cylinder control unit 53, an oxygen concentration input unit 54, and a nitrogen flow rate input unit 55. The configurations and functions of the cylinder control unit 53 and the oxygen concentration input unit 54 of the present embodiment are the same as the parts having the same names in the second embodiment.

  The furnace controller 51 has the same function as the furnace controller 21 of the second embodiment. In addition, the furnace control unit 51 of the present embodiment determines whether or not there is nitrogen leakage based on the information on the nitrogen flow rate sent from the nitrogen flow rate analysis unit 52.

  The nitrogen flow rate analysis unit 52 has a function of analyzing the nitrogen flow rate and determining the presence or absence of nitrogen leakage. The nitrogen flow rate analysis unit 52 acquires nitrogen flow rate data, and stores the nitrogen integrated flow rate data in the storage device 30 in association with the recipe, that is, the reflow processing conditions. The nitrogen flow rate analysis unit 52 statistically compares the nitrogen flow rate with the nitrogen flow rate in the past process when the reflow process is performed. The nitrogen flow rate analysis unit 52 outputs information indicating that the nitrogen flow rate has increased beyond the reference to the furnace control unit 51 when the nitrogen flow rate has increased by a predetermined reference value or more than the nitrogen flow rate in the past process.

  The nitrogen flow rate input unit 55 receives data of the measurement result of the nitrogen flow rate from the nitrogen flow rate measurement unit 41.

  The operation of the reflow processing system of this embodiment will be described. 10 and 11 show the operation flow of the reflow processing system of this embodiment.

  First, the reflow device 40, the control device 50, and the storage device 30 are activated by an operator turning on the power, operating a switch, or the like (step S31).

  When the start-up is performed, the furnace control unit 51 of the control device 50 reads a reflow setting file that is a file in which each setting value related to the reflow processing is stored from the storage device 30. In the reflow setting file, setting value data for performing the reflow processing such as the setting value of the temperature and oxygen concentration in the furnace of the reflow apparatus 40 and the setting value of the rail width of the transfer unit is stored for each substrate to be processed. Yes. The furnace control unit 51 sets each unit in the reflow apparatus 40 based on the data of the reflow setting file.

  When the reflow device 40 is activated, the furnace control unit 51 stores the time when the reflow device 40 is activated in the storage device 30 (step S32).

  If the starting time of the reflow apparatus 40 is preserve | saved, the furnace control part 51 will start supply of the nitrogen into the furnace of the reflow apparatus 40, and will fill nitrogen in a furnace (step S33). When nitrogen is supplied into the furnace of the reflow device 40, the oxygen concentration in the furnace gradually decreases.

  When the supply of nitrogen is started, the furnace control unit 51 acquires nitrogen flow rate data from the nitrogen flow rate measurement unit 41 via the nitrogen flow rate input unit 55. The furnace control unit 51 stores the acquired nitrogen flow rate data in the storage device 30 as time-series data (step S34).

  The furnace control unit 51 monitors oxygen concentration data in the furnace of the reflow apparatus 40 input via the oxygen concentration input unit 54. The furnace control unit 51 confirms whether the oxygen concentration in the furnace is equal to or lower than a preset reference value.

  When the oxygen concentration is equal to or lower than a preset reference value (Yes in step S35), the furnace control unit 51 stores the time when the oxygen concentration reaches the reference value in the storage device 30 (step S36).

  When the time when the oxygen concentration becomes lower than the standard is stored, the nitrogen flow rate analysis unit 52 refers to the data in the storage device 30, and the nitrogen from the start of the reflow device 10 to the time when the oxygen concentration becomes lower than the standard. An integrated value of consumption is calculated (step S37). When the integrated value of nitrogen consumption is calculated, the nitrogen flow rate analysis unit 52 stores data of the calculated integrated value of nitrogen consumption in the storage device 30.

  When the integrated value data of the nitrogen consumption is stored in the storage device 30, the nitrogen flow rate analysis unit 52 statistically analyzes the newly measured and stored nitrogen consumption data and the past nitrogen consumption data of the same recipe. Compare to. The same recipe means, for example, that the reflow setting file has the same processing condition. The nitrogen flow rate analysis unit 52 compares, for example, the average value or median value of the past nitrogen consumption of the same recipe with the data of nitrogen consumption newly measured and stored.

  When the newly stored nitrogen consumption is greater than the newly set standard by the past data (Yes in step S38), the nitrogen flow rate analysis unit 52 is connected to the open / close cylinder 14 via the cylinder control unit 53. The pressurization by is increased (step S47). The furnace control unit 51 controls the opening / closing cylinder 14 to be shortened via the cylinder control unit 53 and increases the amount of pressurization by narrowing the interval between the furnace body 11 and the furnace body lid 12.

  When the oxygen concentration is higher than a preset reference value (No in step S35), the furnace control unit 51 confirms whether the elapsed time exceeds the upper limit. When the elapsed time does not exceed the upper limit (No in step S41), nitrogen filling in step S33 is continued, and the furnace control unit 51 monitors the oxygen concentration data in the furnace of the reflow device 40.

  If the elapsed time exceeds the upper limit (Yes in step S41), the furnace control unit 51 increases the pressurization by the opening / closing cylinder 14 via the cylinder control unit 53 (step S42). The furnace control unit 51 controls the opening / closing cylinder 14 to contract via the cylinder control unit 53 and increases the amount of pressurization by narrowing the interval between the furnace body 11 and the furnace body lid 12.

  When the pressurization amount is increased, the furnace control unit 51 confirms whether the oxygen concentration in the furnace is decreasing. When the oxygen concentration is decreasing (Yes in step S44), the furnace control unit 51 continues filling with nitrogen until the oxygen concentration becomes equal to or lower than the reference. When the oxygen concentration decreases and the oxygen concentration falls below the reference (step S45), the furnace control unit 51 increases the temperature until the temperature in the furnace reaches the set temperature. When the temperature in the furnace reaches the set temperature (step S39), the preparation for operation of the reflow device 40 is completed (step S40). When the operation preparation of the reflow device 40 is completed, the reflow process is sequentially performed.

  When the oxygen concentration does not decrease even if the amount of pressurization is increased (No in step S44), the furnace control unit 51 determines that the packing 13 is deteriorated or malfunctions of each unit, and issues an alarm. The alarm is notified to an operator or the like via a display device or a sound output device connected to the control device 50. The alarm may be sent to a production management system or the like via a network.

  The reflow processing system of this embodiment has the same effect as that of the second embodiment. Further, the reflow processing system of the present embodiment calculates an integrated consumption amount of nitrogen, and determines the presence or absence of nitrogen leakage from a change from past data. Therefore, the reflow processing system of this embodiment can appropriately detect nitrogen leakage and adjust the pressure applied to the packing 13 even when the change in the nitrogen flow rate is large.

  In the reflow devices of the second and third embodiments, one of the furnace body lids is fixed to the furnace body in the direction perpendicular to the transport direction, and the other is operated by an opening / closing cylinder to Opening and closing and the distance between the furnace body and the furnace body lid are adjusted. Instead of such a configuration, the operation of the furnace lid may be controlled by attaching opening and closing cylinders on both sides of the furnace lid. Further, a plurality of opening / closing cylinders may be provided in the long side direction of the reflow device.

  The technology of the second and third embodiments can be used for a manufacturing apparatus other than the reflow apparatus as long as the apparatus is configured to replace the gas component in the housing. For example, the techniques of the second and third embodiments can also be used in manufacturing apparatuses for flat panel displays, semiconductor devices, secondary batteries, and other electronic devices that are manufactured by controlling the atmosphere in the housing.

DESCRIPTION OF SYMBOLS 1 Case 2 Pressurization means 3 Gas supply means 4 Concentration measurement means 5 Control means 10 Reflow apparatus 11 Furnace body 12 Furnace body cover 13 Packing 14 Opening and closing cylinder 15 Oxygen concentration measurement part 16 Supply port 17 Piping 18 Control valve 20 Control apparatus DESCRIPTION OF SYMBOLS 21 Furnace control part 22 Cylinder control part 23 Oxygen concentration input part 30 Memory | storage device 40 Reflow apparatus 41 Nitrogen flow measuring part 50 Control apparatus 51 Furnace control part 52 Nitrogen flow analysis part 53 Cylinder control part 54 Oxygen concentration input part 55 Nitrogen flow rate input part

Claims (10)

A housing having a main body, and a lid joined to the main body through an elastic member;
Pressurizing means for applying pressure to push at least one of the main body and the lid to the other side;
Introducing means for introducing a first gas into the housing;
Concentration measuring means for measuring the concentration of the second gas in the housing;
Control means for controlling the pressure based on the introduction amount or time of the first gas from the start of the introduction of the first gas until the concentration of the second gas becomes a reference concentration or less. A manufacturing apparatus comprising:   When the time from the start of the introduction of the first gas until the concentration of the second gas becomes equal to or lower than a reference concentration is longer than a preset reference time, the control means The manufacturing apparatus according to claim 1, wherein the pressure applied by the means is increased.   The control means, when the introduction amount of the first gas from the start of the introduction of the first gas until the concentration of the second gas becomes equal to or less than the reference, The manufacturing apparatus according to claim 1, wherein the pressure applied by the pressurizing unit is increased.   3. The manufacturing method according to claim 2, wherein the reference of the introduction amount of the first gas is set on the basis of the introduction amount of the first gas when the same processing is performed previously. apparatus.   When the time from the start of the introduction of the first gas exceeds a second reference time before the concentration of the second gas becomes equal to or lower than the reference, the pressure control means The manufacturing apparatus according to claim 1, wherein the pressure applied is increased.   The time from the start of the introduction of the first gas exceeds the second reference time before the concentration of the second gas becomes below the reference, and the pressure applied by the pressurizing means is increased. The manufacturing apparatus according to claim 5, further comprising an alarm output unit configured to output an alarm when the concentration of the second gas does not become equal to or lower than a reference concentration. Conveying means for conveying a member to be processed in the housing;
Heating means for heating the inside of the housing,
The manufacturing apparatus according to claim 1, wherein the first gas is nitrogen and the second gas is oxygen. Introducing a first gas into a housing having a main body part and a lid part joined to the main body part via an elastic member;
Measuring the concentration of the second gas in the housing;
From the start of the introduction of the first gas to the pressure that pushes at least one of the main body and the lid to the other side, the concentration of the second gas is equal to or lower than a reference concentration, A control method comprising controlling based on an introduction amount or time of the first gas.   The pressure is increased when the time from the start of the introduction of the first gas until the concentration of the second gas becomes equal to or lower than a reference concentration is longer than a preset reference time. The control method according to claim 8.   The pressure is increased when the introduction amount of the first gas from the start of the introduction of the first gas until the concentration of the second gas becomes below the reference is above the reference. The control method according to claim 8.

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