JP2019149705A - Vibration element and vibrator including the same - Google Patents

Abstract

To provide a vibration element, achieving a reduction in stray capacitance.SOLUTION: A vibration element 10 includes: a base 50; a first vibration arm 60a and a second vibration arm 60b extending from the base 50; a support arm 70 extending from the base 50 and having a first main surface 12A and a second main surface 12B facing to each other; a first excitation electrode 82a and a second excitation electrode 82b provided to the first vibration arm 60a and the second vibration arm 60b, respectively; a first connection electrode 86a and a second connection electrode 86b provided on the first main surface 12A of the support arm 70; a first extraction electrode 84a provided on the first main surface 12A of the support arm 70 to electrically connect the first excitation electrode 82a and the first connection electrode 86a; and a second extraction electrode 84b provided on the second main surface 12B of the support arm 70 to electrically connect the second excitation electrode 82b and the second connection electrode 86b. In plan view of the first main surface 12A of the support arm 70, a hole 76 is formed in the support arm 70, the hole overlapping with at least a part of the second extraction electrode 84b and being surrounded at least partially by the first extraction electrode 86a.SELECTED DRAWING: Figure 3

Description

  The present invention relates to a vibration element used for a timing device, a load sensor, and the like and a vibrator including the vibration element.

  In electronic devices such as mobile computers, portable game machines, mobile phones, IC cards, and communication base stations, vibrators are widely used as electronic devices such as timing devices and vibration gyro sensors. Along with the downsizing and high performance of electronic equipment, the vibrator is also required to be downsized and high performance.

  For example, Patent Document 1 discloses a vibration element in which a hole is formed in a support arm portion and vibration leakage from the vibration arm portion can be suppressed.

  For example, Patent Document 2 discloses a vibrator including a hole formed in a support arm, a connection electrode provided to surround the hole, and a conductive holding member filled in the hole. Has been. According to the vibrator, the bonding strength between the vibration element and the conductive holding member can be improved.

  For example, Patent Document 3 discloses a vibrator including a hole formed in a support arm, a connection member provided on an inner peripheral surface of the hole, and a conductive holding member that enters the hole. Is disclosed. According to the vibrator, the bonding strength between the vibration element and the conductive holding member can be improved.

  However, in the vibration element and the vibrator disclosed in Patent Documents 1 to 3, when the vibration element is to be reduced in size, the electrodes approach or face each other at the support arm portion. In particular, if the extraction electrode is to be widened to reduce the electrical resistance, stray capacitance is generated, and effective resistance Re (Re = R1 × (1 + C0 / CL), R1: equivalent series resistance, C0: stray capacitance, CL : Load capacity) may increase.

  In Patent Document 4, the first connection electrode and the first extraction electrode provided on the first main surface of the support arm portion, and the second connection electrode and the second extraction electrode provided on the second main surface of the support arm portion. And the first connection electrode is provided with a hole that overlaps at least a part of the second extraction electrode, and a resonator element capable of reducing stray capacitance is disclosed.

JP-A-2015-88866 JP 2006-345519 A JP 2014-22965 A Japanese Patent Application Laid-Open No. 2006-149664

  However, when the vibration element described in Patent Document 4 is mounted on a substrate, the conductive holding member that has entered the hole may fill the internal space of the hole in the process of solidifying the conductive holding member. In this case, the stray capacitance between the second extraction electrode and the conductive holding member that are close to each other increases, which causes a problem that the stray capacitance cannot be sufficiently reduced.

  The present invention has been made in view of such circumstances, and an object thereof is to provide a vibration element and a vibrator capable of reducing stray capacitance.

  A resonator element according to an aspect of the present invention includes a base, a first vibrating arm and a second vibrating arm that extend from the base, and a first main surface and a second main surface that extend from the base and face each other. A supporting arm portion, a first excitation electrode and a second excitation electrode provided on the first vibrating arm portion and the second vibrating arm portion, a first connection electrode provided on the first main surface of the supporting arm portion, and a first 2 connection electrodes, a first lead electrode provided on the first main surface of the support arm, electrically connecting the first excitation electrode and the first connection electrode, and provided on a second main surface of the support arm. And a second extraction electrode that electrically connects the second excitation electrode and the second connection electrode, and when the first main surface of the support arm portion is viewed in plan, the support arm portion includes a second extraction electrode. A hole is formed that overlaps at least a part of the first connection electrode and is surrounded by the first connection electrode.

  ADVANTAGE OF THE INVENTION According to this invention, it becomes possible to provide the vibration element and vibrator | oscillator which can aim at reduction of stray capacitance.

FIG. 1 is an exploded perspective view schematically showing a configuration of a tuning fork type crystal resonator according to the first embodiment. FIG. 2 is a cross-sectional view schematically showing a cross-sectional configuration along the line II-II of the tuning fork type crystal resonator shown in FIG. FIG. 3 is a perspective plan view schematically showing the configuration of the first main surface side as seen through from the second main surface side of the tuning-fork type crystal resonator element according to the first embodiment. FIG. 4 is a plan view schematically showing the configuration of the second main surface side of the tuning fork type crystal resonator element according to the first embodiment. FIG. 5 is a cross-sectional view schematically showing a cross-sectional configuration along the line VV of the tuning-fork type crystal vibrating element shown in FIGS. 3 and 4. FIG. 6 is an enlarged plan view schematically showing a configuration of a tuning fork type crystal vibrating element centering on the first connection electrode and the hole. 7 is a cross-sectional view schematically showing a cross-sectional configuration along the line VII-VII of the tuning fork type crystal resonator shown in FIG. FIG. 8 is a cross-sectional view schematically showing a configuration of a tuning fork type crystal resonator according to the second embodiment.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. However, in the second and subsequent embodiments, the same or similar components as those in the first embodiment are denoted by the same or similar reference numerals as those in the first embodiment, and detailed description thereof is omitted as appropriate. Moreover, about the effect acquired in embodiment after 2nd Embodiment, description is abbreviate | omitted suitably about the thing similar to 1st Embodiment. The drawings of the embodiments are exemplifications, the dimensions and shapes of the respective parts are schematic, and the technical scope of the present invention should not be understood as being limited to the embodiments.

  Each drawing includes a first direction D1, a second direction D2, and a third direction D3 for the sake of convenience in order to clarify the relationship between the drawings and to help understand the positional relationship between the members. An orthogonal coordinate system may be attached. The first direction D1, the second direction D2, and the third direction D3 mean the three reference directions shown in FIG. 1, and are the positive direction (the direction of the arrow) and the negative direction (the direction opposite to the arrow), respectively. ). In addition, the first direction D1, the second direction D2, and the third direction D3 shown in the drawing are, for example, directions that are orthogonal to each other, but are not limited to these as long as they intersect each other. The directions may intersect each other at an angle other than 90 °.

  In the following description, as an example of a piezoelectric vibrator (Piezoelectric Resonator Unit), a crystal vibrator (Quartz Crystal Resonator Unit) having a quartz crystal resonator element (Quartz Crystal Resonator) will be described as an example. The quartz resonator element uses a quartz piece (Quartz Crystal Element) formed of artificial quartz as a piezoelectric body that vibrates according to an applied voltage. A crystal resonator corresponds to an example of a resonator, a crystal resonator element corresponds to an example of a resonator element, and a crystal piece corresponds to an example of a vibration substrate.

Note that the vibration substrate according to the embodiment of the present invention is not limited to a crystal piece. The vibration substrate may be a piezoelectric piece formed of an arbitrary piezoelectric material such as a piezoelectric single crystal, a piezoelectric ceramic, a piezoelectric thin film, and a piezoelectric polymer film. As an example, the piezoelectric single crystal can include lithium niobate (LiNbO ₃ ). Similarly, piezoelectric ceramics include barium titanate (BaTiO ₃ ), lead titanate (PbTiO ₃ ), lead zirconate titanate (Pb (Zr _x Ti _1-x ) O 3; PZT), aluminum nitride (AlN), niobium. Lithium oxide (LiNbO ₃ ), lithium metaniobate (LiNb ₂ O ₆ ), bismuth titanate (Bi ₄ Ti ₃ O ₁₂ ) lithium tantalate (LiTaO ₃ ), lithium tetraborate (Li ₂ B ₄ O ₇ ), langa Site (La ₃ Ga ₅ SiO ₁₄ ), tantalum pentoxide (Ta ₂ O ₅ ), and the like can be given. Examples of the piezoelectric thin film include a film obtained by forming the above piezoelectric ceramic on a substrate such as quartz or sapphire by a sputtering method or the like. Examples of the piezoelectric polymer film include polylactic acid (PLA), polyvinylidene fluoride (PVDF), and vinylidene fluoride / trifluoroethylene copolymer (P (VDF / TrFE)). The various piezoelectric materials described above may be used by being stacked on each other, or may be stacked on other members. Further, the vibration element according to the embodiment of the present invention is not limited to the piezoelectric vibration element. At this time, the vibration substrate may be formed of an insulating material having no piezoelectricity, or an insulating material having low piezoelectricity, or may be formed of a semiconductor material or a conductive material.

<First Embodiment>
First, the configuration of a tuning-fork quartz crystal resonator unit (Tuning-Fork Quartz Crystal Resonator Unit) 1 according to the first embodiment of the present invention will be described with reference to FIGS. FIG. 1 is an exploded perspective view schematically showing a configuration of a tuning fork type crystal resonator according to the first embodiment. FIG. 2 is a cross-sectional view schematically showing a cross-sectional configuration along the line II-II of the tuning fork type crystal resonator shown in FIG. FIG. 3 is a perspective plan view schematically showing the configuration of the first main surface side as seen through from the second main surface side of the tuning-fork type crystal resonator element according to the first embodiment. FIG. 4 is a plan view schematically showing the configuration of the second main surface side of the tuning fork type crystal resonator element according to the first embodiment. FIG. 5 is a cross-sectional view schematically showing a cross-sectional configuration along the line VV of the tuning-fork type crystal vibrating element shown in FIGS. 3 and 4. 1 and 2, some or all of the electrode groups such as the excitation electrode, the connection electrode, and the extraction electrode provided in the tuning fork type crystal resonator element 10 are omitted.

  The tuning fork type crystal resonator 1 is a kind of piezoelectric resonator and corresponds to the resonator. As shown in FIG. 1, the tuning fork crystal resonator 1 includes a tuning fork crystal resonator element 10, a lid member 20, a base member 30, and a bonding member 40. The tuning fork type crystal vibrating element 10 is a kind of vibrating element and corresponds to a piezoelectric driving type vibrating element. The base member 30 and the lid member 20 are holders for housing the tuning fork type crystal resonator element 10. In the example illustrated here, the lid member 20 has a concave shape, specifically, a box shape having an opening, and the base member 30 has a flat plate shape. The shapes of the lid member 20 and the base member 30 are not limited to the above. For example, the base member may have a concave shape, and both the lid member and the base member have a concave shape having openings on the sides facing each other. It may be.

  The tuning fork type crystal resonator element 10 includes a crystal piece 11, a first excitation electrode 82a, a second excitation electrode 82b, a first extraction electrode 84a, a second extraction electrode 84b, a first connection electrode 86a, and a second connection electrode 86b. ing. The crystal piece 11 is referred to as a plane parallel to a plane specified by the X axis and the Y ′ axis (hereinafter referred to as “XY ′ plane”) in an orthogonal coordinate system including the X axis, the Y ′ axis, and the Z ′ axis. This also applies to the surface specified by the axis or other direction.) Is the principal surface, and the quartz crystal substrate is cut and polished so that the direction parallel to the Z ′ axis is the thickness, The quartz substrate is processed into a tuning fork type.

  The Y ′ axis is an axis obtained by rotating the Y axis so that the + Y side is tilted to the + side of the Z axis when the X axis is the rotation axis. The Z ′ axis is an axis formed by rotating the Z axis so that the + Z side is inclined to the − side of the Y axis. The X axis, the Y axis, and the Z axis are crystal axes of the artificial quartz crystal, the X axis corresponds to the electric axis (polarity axis), the Y axis corresponds to the mechanical axis, and the Z axis corresponds to the optical axis. In addition, from the viewpoint of reducing the resonance frequency change due to the temperature change, the rotation inclination is performed in the range of −5 degrees to 15 degrees. Therefore, the embodiment of the present invention includes a configuration in which the Y ′ axis and the Z ′ axis become the Y axis and the Z axis, respectively.

  In the first embodiment, the tuning fork type crystal resonator element 10 has the Y ′ axis parallel to the first direction D1, the X axis parallel to the second direction D2, and the Z ′ axis parallel to the third direction D3. Is arranged. Hereinafter, directions parallel to the X axis, the Y ′ axis, and the Z ′ axis are referred to as an X axis direction, a Y ′ axis direction, and a Z ′ axis direction, respectively. Further, in the X-axis direction, the + X-axis direction is the positive direction of the second direction D2, and the -X-axis direction is the negative direction of the second direction D2. Similarly, in the Y′-axis direction, the + Y′-axis direction is the positive direction of the first direction D1, and the −Y′-axis direction is the negative direction of the first direction D1. In the Z′-axis direction, the + Z′-axis direction is the positive direction of the third direction D3, and the −Z′-axis direction is the negative direction of the third direction D3.

  As shown in FIG. 1, the crystal piece 11 has a base 50, a first vibrating arm 60 a, a second vibrating arm 60 b, and a support arm 70. As shown in FIG. 2, the crystal piece 11 has a first main surface 12A and a second main surface 12B that face each other. The first main surface 12A is located on the base member 30 side, and the second main surface 12B is located on the lid member 20 side.

First, the base 50 of the crystal piece 11 will be described.
The base 50 is provided in a substantially flat plate shape at the end of the crystal piece 11 on the −Y′-axis direction (first direction D1 negative direction) side. The base 50 connects the first vibrating arm 60 a, the second vibrating arm 60 b, and the support arm 70. The length along the Y′-axis direction of the base 50 is, for example, 50 μm or more and 300 μm or less.

Next, the first vibrating arm portion 60a and the second vibrating arm portion 60b of the crystal piece 11 will be described.
The first vibrating arm portion 60a and the second vibrating arm portion 60b extend from the base portion 50 in the + Y′-axis direction (first direction D1 positive direction). A pair of the first vibrating arm portion 60a and the second vibrating arm portion 60b are arranged side by side, and the first vibrating arm portion 60a is provided on the + X axis direction (second direction D2 positive direction) side of the second vibrating arm portion 60b. ing. As shown in FIGS. 3 and 4, the first vibrating arm portion 60a has an arm portion 62a and a weight portion 64a, and the second vibrating arm portion 60b has an arm portion 62b and a weight portion 64b. The arm part 62a and the arm part 62b are connected to the base part 50, and the weight part 64a and the weight part 64b are connected to the arm part 62a and the arm part 62b, respectively. That is, when the first main surface 12A of the crystal piece 11 is viewed in plan, the external shape of the crystal piece 11 is provided in a substantially U shape by the base 50 and the pair of first vibrating arm portion 60a and the second vibrating arm portion 60b. It has been.

  The arm portion 62a of the first vibrating arm portion 60a is formed with a bottomed groove portion 63a that opens to the first main surface 12A side and the second main surface 12B side. The arm portion 62b of the second vibrating arm portion 60b is formed with a bottomed groove portion 63b that opens to the first main surface 12A side and the second main surface 12B side. The groove 63a and the groove 63b extend along the Y′-axis direction (first direction D1). As shown in FIGS. 3 and 4, the tip of the groove 63a is located at the boundary between the arm 62a and the weight 64a, and the proximal end of the groove 63a is located at the boundary between the base 50 and the arm 62a. Yes. The same applies to the distal end and the proximal end of the groove 63b. As shown in FIG. 5, the arm part 62a and the arm part 62b have a substantially H-shaped cross-sectional shape. Thus, by providing the groove 63a and the groove 63b, the tuning fork type crystal vibrating element 10 improves the ease of movement of the first vibrating arm 60a and the second vibrating arm 60b, and the first vibrating arm 60a and Vibration leakage from the second vibrating arm portion 60b to the base portion 50 can be suppressed. Further, the equivalent series resistance and CI (Crystal Impedance) value of the tuning fork type crystal resonator element 10 can be reduced, and the power consumption can be reduced. In addition, the length of the groove part 63a and the groove part 63b is not specifically limited, Each may be formed also in the weight part 64a and the weight part 64b, and may be formed also in the base part 50, respectively.

  The weight portion 64a of the first vibrating arm portion 60a has a substantially flat plate shape. As shown in FIGS. 3 and 4, the width W1 along the X-axis direction (second direction D2) of the weight portion 64a is larger than the width W2 along the X-axis direction (second direction D2) of the arm portion 62a. large. The ratio of the width W1 to the width W2 (W1 / W2) is preferably 2 or more and 10 or less, and more preferably 5 or more and 7 or less. The same applies to the weight portion 64b of the second vibrating arm portion 60b. As a result, the tuning fork type quartz resonator element 10 reduces the thermoelastic loss caused by the loss of vibration energy caused by the heat conduction generated between the compression portion and the extension portion of the quartz resonator element that bends and vibrates. Vibration leakage due to twisting of the portion 64a and the weight portion 64b can be suppressed.

  Note that the shape of the weight portion is not limited to the above as long as the mass per unit length is larger than that of the arm portion. For example, the weight part may have a width that is the same as the width of the arm part and may be thicker than the arm part. Further, the weight portion may be configured by forming a surface of a vibrating arm corresponding to the weight portion or a concave portion and providing a metal such as gold there. Furthermore, the weight portion may be made of a material having a mass density higher than that of the arm portion.

Next, the support arm part 70 of the crystal piece 11 will be described.
The support arm portion 70 extends in the + Y′-axis direction (first direction D1 positive direction) from the base portion 50, and is provided between the first vibrating arm portion 60a and the second vibrating arm portion 60b. The support arm portion 70, the first vibrating arm portion 60a, and the second vibrating arm portion 60b are aligned with each other along the X-axis direction. The length of the support arm 70 along the Y′-axis direction is smaller than the length of the first vibrating arm 60 a and the second vibrating arm 60 b along the Y′-axis. As shown in FIGS. 3 and 4, the distal end of the support arm portion 70 is located closer to the base portion 50 than the weight portion 64a and the weight portion 64b. According to this, the tuning fork type crystal resonator element 10 can suppress deterioration of vibration characteristics due to the weight portions 64 a and 64 b coming into contact with the support arm portion 70.

  The support arm portion 70 includes, for example, a constricted portion 72 connected to the base portion 50 and a wide portion 74 connected to the constricted portion 72. When the first main surface 12A of the crystal piece 11 is viewed in plan, the constricted portion 72 is provided between the base portion 50 and the wide portion 74 and has a smaller width than the width of the wide portion 74 along the X-axis direction. It is. In the tuning fork type crystal resonator element 10, the constricted portion 72 can separate the resonance frequency of the in-phase bending vibration mode in the X-axis direction from the resonance frequency of the anti-phase bending vibration mode in the X-axis direction. The in-phase bending vibration mode is a bending vibration mode in which the first vibrating arm portion 60a and the second vibrating arm portion 60b are sequentially displaced in the + X-axis direction and then displaced in the −X-axis direction sequentially. Further, in the antiphase bending vibration mode, one of the first vibrating arm portion 60a and the second vibrating arm portion 60b is displaced in the + X-axis direction and the other is displaced in the -X-axis direction, and then one is -X. This is a bending vibration mode in which the displacement in the axial direction and the other in the + X-axis direction are sequentially repeated. According to this, the coupling between the in-phase bending vibration mode is suppressed by suppressing the coupling between the in-phase bending vibration mode and the anti-phase bending vibration mode, and the vibration state of the in-phase bending vibration mode is reduced. Vibration leakage can be reduced.

  A hole 76 is formed in the wide portion 74 of the support arm 70. As shown in FIGS. 4 and 5, the hole 76 is formed in a bottomed groove shape having an opening on the first main surface 12A of the support arm 70 and having a bottom surface 76A and an inner surface 76B. The hole 76 has a rectangular shape having a long side along the Y-axis direction (first direction D1) that is the extending direction of the support arm 70 when the first main surface 12A is viewed in plan. The shape of the hole 76 when the first main surface 12A is viewed in plan is not limited to the above. For example, when the first main surface 12A is viewed in plan, the hole 76 has a convex polygonal shape such as a square shape or a hexagonal shape, a concave polygonal shape such as a cross shape, a circular elliptical shape, or a combination thereof. May be.

  The hole 76 is formed, for example, by forming the first connection electrode 86a on the first main surface 12A of the support arm 70, and then removing the first connection electrode 86a and the crystal piece 11 by etching. According to such a forming process, the alignment of the positions of the first connection electrode 86a and the hole 76 can be improved.

Next, the first excitation electrode 82a and the second excitation electrode 82b will be described.
The first excitation electrode 82a and the second excitation electrode 82b form an electric field in the first vibration arm portion 60a and the second vibration arm portion 60b by the supplied applied voltage, and the first vibration arm portion 60a and the second vibration electrode portion 60b by the piezoelectric effect. The two vibrating arms 60b are excited.

  As shown in FIGS. 3 and 4, the first excitation electrode 82a and the second excitation electrode 82b are provided on the first vibrating arm portion 60a and the second vibrating arm portion 60b. As shown in FIG. 5, in the arm portion 62a of the first vibrating arm portion 60a, the first excitation electrode 82a is provided on the surface of the arm portion 62a inside the groove portion 63a. The second excitation electrode 82b is provided on the outer side surface of the arm portion 62a so as to face the first excitation electrode 82a in the X-axis direction (second direction D2). In the arm portion 62b of the second vibrating arm portion 60b, the second excitation electrode 82b is provided inside the groove portion 63b, and the first excitation electrode 82a is provided on the outer side surface of the arm portion 62b. Further, as shown in FIGS. 3 and 4, the second excitation electrode 82b is provided on the first main surface 12A and the second main surface 12B of the weight portion 64a of the first vibrating arm portion 60a. A first excitation electrode 82a is provided on the first main surface 12A and the second main surface 12B of the weight portion 64b of the second vibrating arm portion 60b.

Next, the first extraction electrode 84a and the second extraction electrode 84b will be described.
The first extraction electrode 84a electrically connects the first excitation electrode 82a provided on the first vibrating arm 60a and the first excitation electrode 82a provided on the second vibrating arm 60b. Further, the first extraction electrode 84a electrically connects the first excitation electrode 82a and the first connection electrode 86a. The second extraction electrode 84b electrically connects the second excitation electrode 82b provided on the first vibrating arm 60a and the second excitation electrode 82b provided on the second vibrating arm 60b. Further, the second extraction electrode 84 b electrically connects the second excitation electrode 82 b and the second connection electrode 86 b via front and back conductive electrodes that connect the front and back main surfaces of the tuning fork type crystal resonator element 10. Although not shown, the front and back conductive electrodes are provided on the side surfaces connecting the front and back main surfaces of the tuning fork type crystal resonator element 10.

  The first extraction electrode 84 a and the second extraction electrode 84 b are provided on the base portion 50 and the support arm portion 70. In the base 50, the first extraction electrode 84a and the second extraction electrode 84b are provided on both the first main surface 12A side and the second main surface 12B side. In the support arm portion 70, the first extraction electrode 84a is provided on the first main surface 12A side, and the second extraction electrode 84b is provided on the second main surface 12B side. As shown in FIG. 3, the width along the X-axis direction (second direction D2) of the first extraction electrode 84a is substantially equal to the width along the X-axis direction (second direction D2) of the constricted portion 72. The first extraction electrode 84 a is provided in a substantially linear shape along the Y′-axis direction (first direction D <b> 1) that is the extending direction of the support arm portion 70. As shown in FIG. 4, the width along the X-axis direction (second direction D2) of the second extraction electrode 84b is substantially equal to the width along the X-axis direction (second direction D2) of the constricted portion 72. The second extraction electrode 84 b is provided in a substantially linear shape along the Y′-axis direction (first direction D <b> 1) that is the extending direction of the support arm 70. Accordingly, the first extraction electrode 84a and the second extraction electrode 84b overlap each other in the support arm portion 70 when the first main surface 12A is viewed in plan. Further, a part of the second extraction electrode 84 b overlaps the first connection electrode 86 a and the hole 76 of the support arm 70 when the first main surface 12 </ b> A is viewed in plan.

Next, the first connection electrode 86a and the second connection electrode 86b will be described.
A pair of drive signals having different applied potentials are supplied to the first connection electrode 86a and the second connection electrode 86b from the outside. The first connection electrode 86a supplies one drive signal to the first excitation electrode 82a through the first extraction electrode 84a. The second connection electrode 86b supplies the other drive signal paired with the one drive signal to the second excitation electrode 82b through the second extraction electrode 84b.

  The first connection electrode 86 a and the second connection electrode 86 b are provided on the first main surface 12 </ b> A side in the wide portion 74 of the support arm portion 70. The first connection electrode 86a and the second connection electrode 86b are arranged along the Y′-axis direction (first direction D1). The first connection electrode 86 a is located on the base end portion of the wide portion 74, that is, on the base 50 side of the support arm portion 70. The second connection electrode 86b is located at the tip of the wide portion 74, that is, on the weights 64a and 64b side of the vibrating arm portions 60a and 60b. When the first main surface 12A is viewed in plan, the first connection electrode 86a is located between the second connection electrode 86b and the base 50.

  As shown in FIG. 3, the width of the first connection electrode 86a along the X-axis direction (second direction D2) is along the X-axis direction (second direction D2) of the first extraction electrode 84a in the support arm portion 70. Greater than the width. The width along the X-axis direction (second direction D2) of the first connection electrode 86a is larger than the width along the X-axis direction (second direction D2) of the constricted portion 72, and the X-axis direction (first direction of the wide portion 74). It is smaller than the width along the two directions D2). As shown in FIG. 4, the width of the second connection electrode 86b along the X-axis direction (second direction D2) is along the X-axis direction (second direction D2) of the second extraction electrode 84b in the support arm portion 70. Greater than the width. The width along the X-axis direction (second direction D2) of the second connection electrode 86b is larger than the width along the X-axis direction (second direction D2) of the constricted portion 72, and the X-axis direction (first direction of the wide portion 74). It is substantially equal to the width along the two directions D2). For example, the second connection electrode 86b has a substantially rectangular shape when the first main surface 12A is viewed in plan. Thus, even if the tuning fork type crystal resonator element 10 is downsized by forming the first connection electrode 86a and the second connection electrode 86b wider than the first extraction electrode 84a and the second extraction electrode 84b, the tuning fork The quartz crystal resonator element 10 can suppress a reduction in the bonding area with the conductive holding members 36a and 36b described later. That is, the tuning fork type crystal resonator element 10 can suppress a decrease in bonding strength to the base member 30 due to downsizing. The width along the X-axis direction (second direction D2) of the first connection electrode 86a may be substantially equal to the width along the X-axis direction (second direction D2) of the wide portion 74.

  As shown in FIG. 3, the first connection electrode 86 a surrounds a part of the hole 76. The hole 76 faces the second extraction electrode 84b. When the first main surface 12 </ b> A is viewed in plan, the first connection electrode 86 a has a substantially U shape surrounding the base end side of the hole 76. In other words, the hole 76 has the + X axis direction (second direction D2 positive direction), the −X axis direction (second direction D2 negative direction), and the −Y ′ axis direction when the first main surface 12A is viewed in plan. In the three directions (the first direction D1 negative direction), it is adjacent to the first connection electrode 86a. According to this, the tuning fork type crystal resonator element 10 can reduce the facing area between the first connection electrode 86a and the second extraction electrode 84b. The hole 76 may be surrounded by the frame-shaped first connection electrode 86a when the first main surface 12A is viewed in plan. That is, the hole 76 may be adjacent to the first connection electrode 86a in the four directions. The hole 76 may be adjacent to the first connection electrode 86a in one direction or two directions when the first main surface 12A is viewed in plan.

  Further, when the first main surface 12 </ b> A of the support arm 70 is viewed in plan, the first connection electrode 86 a is separated from the hole 76. In other words, the first connection electrode 86 a is provided outside the hole 76. According to this, the tuning fork type crystal resonator element 10 can increase the distance between the first connection electrode 86a and the second extraction electrode 84b. Since the inside of the hole 76 is in a state filled with a gas having a relative dielectric constant lower than that of the crystal piece 11 or in a vacuum state, the tuning fork type crystal resonator element 10 includes the first connection electrode 86a and the second extraction electrode 84b. The dielectric constant between can be reduced. From the above, the tuning fork type crystal resonator element 10 can reduce the stray capacitance formed between the first connection electrode 86a and the second extraction electrode 84b. The position of the first connection electrode 86a with respect to the hole 76 is not limited to the above. From the viewpoint of reducing the stray capacitance, the first connection electrode 86a is desirably separated from the bottom surface 76A of the hole 76, and more desirably separated from the inner surface 76B.

Next, the lid member 20 will be described.
The lid member 20 has a concave shape and has a box shape opened toward the first main surface 32 a of the base member 30. The lid member 20 is joined to the base member 30 to provide an internal space 26 surrounded by the lid member 20 and the base member 30, and the tuning fork type crystal resonator element 10 is accommodated in the internal space 26. The lid member 20 has, for example, a long side parallel to the first direction D1, a short side parallel to the second direction D2, and a height parallel to the third direction D3. The material of the lid member 20 is not particularly limited, but is made of a conductive material such as metal. By including the conductive material, the lid member 20 can have an electromagnetic shielding function that shields at least a part of electromagnetic waves entering and exiting the internal space 26.

  The lid member 20 is connected to the top surface portion 21 facing the first main surface 32 a of the base member 30 and the outer edge of the top surface portion 21 and extends in a direction intersecting the main surface of the top surface portion 21. Part 22. The shape of the lid member 20 is not particularly limited as long as the tuning fork type crystal resonator element 10 can be accommodated. For example, the lid member 20 has a substantially rectangular shape when viewed from the normal direction of the main surface of the top surface portion 21. There is no. As shown in FIG. 2, the lid member 20 has an inner surface 24 and an outer surface 25. The inner surface 24 is a surface on the inner space 26 side, and the outer surface 25 is a surface opposite to the inner surface 24. The lid member 20 has a facing surface 23 that faces the first main surface 32a of the base member 30 at the concave opening end (the end of the side wall 22 on the side close to the base member 30). The facing surface 23 extends in a frame shape so as to surround the periphery of the tuning fork type crystal resonator element 10.

Next, the base member 30 will be described.
The base member 30 holds the tuning-fork type crystal resonator element 10 so that it can be excited. The base member 30 has a flat plate shape. The base member 30 has a long side parallel to the first direction D1, a short side parallel to the second direction D2, and a thickness parallel to the third direction D3. The base member 30 has a base 31. The base 31 has a first main surface 32A (front surface) and a second main surface 32B (back surface) that face each other. The base 31 is a sintered material such as insulating ceramic (alumina). The base 31 is preferably made of a heat resistant material.

  The base member 30 includes a first electrode pad 33a and a second electrode pad 33b provided on the first main surface 32A, and a first external electrode 35a and a second external electrode 35b provided on the second main surface 32B. Have. The first electrode pad 33 a and the second electrode pad 33 b are terminals for electrically connecting the base member 30 and the tuning fork type crystal vibrating element 10. The first external electrode 35 a and the second external electrode 35 b are terminals for electrically connecting a circuit board (not shown) and the tuning fork type crystal resonator 1. The first electrode pad 33a and the second electrode pad 33b are arranged along the first direction D1. The first external electrode 35a and the second external electrode 35b are arranged along the first direction D1. The first electrode pad 33a is electrically connected to the first external electrode 35a via the first via electrode 34a extending in the third direction D3, and extends along the first direction D1. The second electrode pad 33b is electrically connected to the second external electrode 35b via the second via electrode 34b extending in the third direction D3, and extends along the first direction D1. The first via electrode 34a and the second via electrode 34b are formed in a via hole that penetrates the base 31 in the third direction D3. Note that, on the second main surface 32B side of the base member 30, a dummy electrode as an external electrode through which an electric signal or the like is not input / output, and a ground potential for supplying a ground potential to the lid member 20 to improve the electromagnetic shielding function of the lid member 20 An electrode or the like may be provided.

Next, the first conductive holding member 36a and the second conductive holding member 36b will be described.
The first conductive holding member 36a and the second conductive holding member 36b are provided between the first main surface 32A of the base member 30 and the first main surface 12A of the support arm portion. The first conductive holding member 36a electrically connects the first connection electrode 86a and the first electrode pad 33a. The second conductive holding member 36b electrically connects the second connection electrode 86b and the second electrode pad 33b. Further, the first conductive holding member 36a and the second conductive holding member 36b are tuned fork-type spaced apart from the base member 30 so that the first vibrating arm portion 60a and the second vibrating arm portion 60b can be excited. The crystal resonator element 10 is held. The first conductive holding member 36a and the second conductive holding member 36b are made of, for example, a conductive adhesive containing a thermosetting resin or an ultraviolet curable resin mainly composed of an epoxy resin or a silicone resin, Additives such as conductive particles for imparting conductivity to the adhesive are included. The first conductive holding member 36a and the second conductive holding member 36b cure the conductive adhesive pace by a chemical reaction caused by heating, ultraviolet irradiation, etc. after the conductive adhesive paste as a precursor is applied. Provided. Furthermore, a filler may be added to the adhesive for the purpose of increasing the strength or maintaining the distance between the base member 30 and the tuning fork type crystal resonator element 10. The first conductive holding member 36a and the second conductive holding member 36b may be provided by metal solder.

Next, the sealing member 37 and the joining member 40 will be described.
A sealing member 37 is provided on the first main surface 32 </ b> A of the base member 30. In the example shown in FIG. 1, the sealing member 37 has a rectangular frame shape when the first main surface 32A is viewed in plan. When the first main surface 32A is viewed in plan, the first electrode pad 33a and the second electrode pad 33b are disposed inside the sealing member 37, and the sealing member 37 surrounds the tuning-fork type crystal resonator element 10. It is provided as follows. The sealing member 37 is made of a conductive material. For example, by forming the sealing member 37 with the same material as the first electrode pad 33a and the second electrode pad 33b, the sealing member 37 is provided at the same time in the step of providing the first electrode pad 33a and the second electrode pad 33b. Thus, the manufacturing process can be simplified.

  The joining member 40 is provided over the entire circumference of the lid member 20 and the base member 30. Specifically, the joining member 40 is provided on the sealing member 37 and is formed in a rectangular frame shape. The sealing member 37 and the joining member 40 are sandwiched between the facing surface 23 of the side wall portion 22 of the lid member 20 and the first main surface 32 </ b> A of the base member 30.

  When the lid member 20 and the base member 30 are joined together with the sealing member 37 and the joining member 40 interposed therebetween, the tuning fork type crystal resonator element 10 is surrounded by the lid member 20 and the base member 30 (inside space ( Cavity) 26 is sealed. The internal space 26 preferably has an atmospheric pressure lower than the atmospheric pressure, and more preferably in a vacuum state. According to this, oxidation of electrode groups, such as the 1st excitation electrode 82a and the 2nd excitation electrode 82b, can be suppressed. Accordingly, it is possible to reduce the time-dependent fluctuation of the frequency characteristics of the tuning fork type crystal resonator 1 and the occurrence of malfunction of the tuning fork type crystal resonator 1 due to the deterioration of the electrode group. The sealing member 37 may be provided in a discontinuous frame shape, and the joining member 40 may be provided in a discontinuous frame shape.

Next, the operation of the tuning fork type crystal resonator element 10 will be described.
An electric field is generated in the tuning fork type crystal resonator element 10 by a drive signal (alternating voltage) applied to the first excitation electrode 82a and the second excitation electrode 82b from the outside via the first connection electrode 86a and the second connection electrode 86b. . Then, the tuning fork type crystal resonator element 10 has the first vibrating arm portion 60a and the second vibrating arm portion with the root portions of the first vibrating arm portion 60a and the second vibrating arm portion 60b as fulcrums due to the piezoelectric effect of the crystal piece 11. The bending vibration which 60b displaces so that it may bend alternately in the arrow A direction and arrow B direction which are shown in FIG.3 and FIG.4 is generated. An arrow A direction is a direction in which the first vibrating arm portion 60a and the second vibrating arm portion 60b are separated from each other, and an arrow B direction is a direction in which the first vibrating arm portion 60a and the second vibrating arm portion 60b are close to each other. That is, the tuning fork type crystal resonator element 10 vibrates the first vibrating arm portion 60a and the second vibrating arm portion 60b in the bending vibration mode having the opposite phase in the X-axis direction.

  Note that the vibration (drive) method of the vibration element according to the embodiment of the present invention is not limited to piezoelectric drive. For example, the vibration element according to an embodiment of the present invention is a vibration element such as an electrostatic drive type using electrostatic force or a Lorentz drive type using magnetic force, in addition to a piezoelectric drive type using a piezoelectric substrate. There may be.

  Next, referring to FIGS. 6 and 7, the hole 76 and the surrounding structure will be described in more detail.

  FIG. 6 is an enlarged plan view schematically showing a configuration of a tuning fork type crystal vibrating element centering on the first connection electrode and the hole. 7 is a cross-sectional view schematically showing a cross-sectional configuration along the line VII-VII of the tuning fork type crystal resonator shown in FIG. FIG. 6 shows the configuration of the second main surface 12B side when the second main surface 12B of the support arm portion 70 is viewed in plan and the configuration viewed through the first main surface 12A in an overlapping manner. FIG. 6 shows a configuration on the second main surface 12B side by a solid line and a configuration on the first main surface 12A side by a broken line.

  When the second main surface 12B of the support arm 70 is viewed in plan, a part of the hole 76 overlaps the first conductive holding member 36a, and the other part of the hole 76 is outside the first conductive holding member 36a. positioned. As shown in FIG. 6, the part of the hole 76 that overlaps the first conductive holding member 36 a is a portion on the base end side of the support arm 70, and is outside the first conductive holding member 36 a. The other portion that is positioned is a portion of the support arm portion 70 on the distal end side. According to this, the tuning fork type crystal resonator 1 can secure a gas flow path inside the hole 76. Therefore, when the tuning-fork type crystal vibrating element 10 is mounted on the base member 30 by the first conductive holding member 36a in a reduced pressure environment, the inside of the hole 76 can be reduced in pressure.

  A gap is formed between the bottom surface 76A of the hole 76 and the first conductive holding member 36a. As shown in FIG. 7, the first conductive holding member 36a enters only a part of the hole 76 having a depth T11 along the third direction D3. Thus, a vacuum layer or an air layer having a thickness T12 along the third direction D3 is formed between the bottom surface 76A of the hole 76 and the first conductive holding member 36a. According to this, the tuning fork type quartz crystal resonator 1 is different from the configuration in which the first conductive holding member 36a is in contact with the bottom surface 76A of the hole 76 with the second extraction electrode 84b and the first conductive holding member 36a. The distance between them can be increased. Further, a dielectric layer between the second extraction electrode 84b and the first conductive holding member 36a is formed by forming a vacuum layer or a gas layer between the second extraction electrode 84b and the first conductive holding member 36a. Can be increased. That is, the tuning fork type crystal resonator 1 can suppress an increase in stray capacitance formed between the second extraction electrode 84b and the first conductive holding member 36a. Furthermore, in order to suppress stray capacitance, a configuration in which the first conductive holding member 36a does not enter the hole 76 at all is more preferable.

  When the second main surface 12B of the support arm 70 is viewed in plan, the length L11 of the hole 76 along the first direction D1 is greater than the length L12 of the first connection electrode 86a along the first direction D1. Large (L11> L12). The length L13 along the first direction D1 of the first conductive holding member 36a is smaller than the length L12 along the first direction D1 of the first connection electrode 86a (L12> L13). That is, the length L11 of the hole 76 along the first direction D1 is larger than the length L13 of the first conductive holding member 36a along the first direction D1 (L11> L13). According to this, when the 2nd main surface 12B of the support arm part 70 is planarly viewed, a part of hole part 76 can be provided in the outer side of the 1st electroconductive holding member 36a. According to this, the tuning fork type crystal resonator 1 can secure a gas flow path inside the hole 76.

  When the second main surface 12B of the support arm 70 is viewed in plan, the width W11 along the second direction D2 of the hole 76 is along the second direction D2 of the second extraction electrode 84b in the region overlapping the hole 76. Larger than the width W12 (W11> W12). According to this, the tuning fork type crystal resonator 1 includes the stray capacitance formed between the second extraction electrode 84b and the first connection electrode 86a, and the second extraction electrode 84b and the first conductive holding member 36a. The stray capacitance formed between them can be further reduced. The width W13 along the second direction D2 of the first conductive holding member 36a is larger than the width W11 along the second direction D2 of the hole 76 (W13> W11). When the width W11 is sufficiently smaller than the width W13, the first conductive holding member 36a can be prevented from entering the hole 76.

  The depth T11 along the third direction D3 of the hole 76 is larger than the width W13 along the second direction D2 of the hole 76 (T11> W13). According to this, the tuning fork type crystal resonator 1 can prevent the first conductive holding member 36a from entering the hole 76. That is, the stray capacitance formed between the second extraction electrode 84b and the first conductive holding member 36a can be further reduced. Further, the tuning fork type crystal resonator 1 can secure a gas flow path inside the hole 76.

  The thickness T12 is smaller than the depth T11 (T11> T12). The thickness T12 may be greater than the depth T11. For example, when a conductive adhesive paste having a high viscosity is used as a precursor before solidification of the first conductive holding member 36a, or because the width W11 is small, the conductive adhesive paste enters the hole 76 due to surface tension. If not, the thickness T12 can be greater than the depth T11.

  As described above, according to the first embodiment, the resonator element 10 includes the base 50, the first vibrating arm 60 a and the second vibrating arm 60 b extending from the base 50, and the base 50, and each other. Support arm portion 70 having first main surface 12A and second main surface 12B facing each other, and first excitation electrode 82a and second excitation electrode 82b provided on first vibration arm portion 60a and second vibration arm portion 60b, The first connection electrode 86a and the second connection electrode 86b provided on the first main surface 12A of the support arm 70, and the first excitation electrode 82a and the first connection electrode 86b provided on the first main surface 12A of the support arm 70. A first lead electrode 84a that is electrically connected to the connection electrode 86a, and a second main electrode 12B that is provided on the second main surface 12B of the support arm 70, and that electrically connects the second excitation electrode 82b and the second connection electrode 86b. A first main electrode of the support arm 70. When viewed in plan 12A, the support arm portion 70, at least a portion overlapping and at least part of the second lead electrode 84b is a hole portion 76 surrounded by the first connection electrode 86a is formed.

  However, the number of hole portions is not limited to one, and a plurality of hole portions may be formed in the wide portion of the support arm portion. For example, when a plurality of holes are formed in a comb shape, it is possible to inhibit the penetration of the holes by the conductive adhesive paste that is a precursor of the first conductive holding member. Therefore, the tuning fork type crystal resonator can reduce the stray capacitance formed between the second extraction electrode and the first conductive holding member.

  Further, the shape of the hole is not limited to the bottomed groove shape opened in the first main surface of the support arm portion. The hole portion may be formed in a bottomed groove shape opening in the second main surface of the support arm portion. At this time, the hole only has to overlap with at least a part of the first connection electrode when the first main surface of the support arm part is viewed in plan view, and at least a part of the hole is surrounded by the second extraction electrode. Good. Note that the hole portion may have a through-hole shape that opens on both the first main surface and the second main surface of the support arm portion. At this time, a part of the hole is surrounded by the first connection electrode when the first main surface of the support arm is viewed in plan, and a part of the hole when the second main surface of the support arm is viewed in plan May be surrounded by the second extraction electrode.

Second Embodiment
Next, the configuration of a tuning fork type crystal resonator 201 according to the second embodiment will be described with reference to FIG. FIG. 8 is a cross-sectional view schematically showing a configuration of a tuning fork type crystal resonator according to the second embodiment. In the second embodiment, the cross-sectional view shown in FIG. 8 corresponds to the cross-sectional view shown in FIG. 7 in the first embodiment. In the following embodiment, description of matters common to the first embodiment is omitted, and only different points will be described. In particular, the same operation effect by the same configuration will not be mentioned sequentially. In addition, the configuration given the same reference numerals as in the first embodiment has the same configuration and function as the configuration in the first embodiment.

  Similar to the tuning fork type crystal resonator 1 according to the first embodiment, the tuning fork type crystal resonator 201 according to the second embodiment is mounted on the base member 230 via the base member 230 and the first conductive holding member 236a. And a tuning fork type crystal vibrating element 210. The tuning fork type crystal resonator element 210 includes a support arm portion 270, a second extraction electrode 284b, and a first connection electrode 286a. The support arm 270 is formed with a hole 276 that opens to the first main surface 212A side.

  The tuning fork type crystal resonator 201 according to the second embodiment is different from the tuning fork type crystal resonator 1 according to the first embodiment in that a low dielectric material portion 277 is provided inside the hole portion 276. . The low dielectric material portion 277 is provided by a material having a relative dielectric constant smaller than that of the support arm portion 270, that is, the crystal piece. The low dielectric material portion 277 fills at least part of the hole portion 276. The first conductive holding member 236a is in contact with the first connection electrode 286a and the low dielectric material portion 277. According to this, the tuning fork type crystal resonator 201 can inhibit the inside of the hole 276 from entering with the conductive adhesive paste which is the precursor of the first conductive holding member 236a. Therefore, the tuning fork crystal resonator 201 can reduce stray capacitance formed between the second extraction electrode 284b and the first conductive holding member 236a. Further, the tuning fork crystal resonator 201 can suppress a decrease in mechanical strength of the support arm portion 270 due to the formation of the hole portion 276, and can suppress a deterioration in impact resistance.

  Note that the first connection electrode may be provided on the low dielectric material portion. According to this, the contact area between the first connection electrode and the first conductive holding member can be increased. Such a tuning fork type crystal resonator can reduce the electric resistance between the first connection electrode and the first conductive holding member, and the bonding strength between the first connection electrode and the first conductive holding member. Can be improved.

  In addition, the hole part in which the low dielectric material part was provided may open to the 2nd main surface side of a support arm part. At this time, the second extraction electrode may be provided on the low dielectric material portion. According to this, since the tuning fork type crystal resonator bypasses the hole portion, it is not necessary to form a narrow portion or a bent portion in a part of the second extraction electrode. Such a tuning fork type crystal resonator can suppress an increase in electrical resistivity of the second extraction electrode. The hole portion may have a through-hole shape opened on both the first main surface side and the second main surface side of the support arm portion, and the first connection electrode is a surface on the first main surface side of the low dielectric material portion. The second extraction electrode may be provided on the surface on the second main surface side of the low dielectric material portion.

<Appendix>
Hereinafter, some or all of the embodiments of the present invention will be described as supplementary notes. The present invention is not limited to the following supplementary notes.

  According to one aspect of the present invention, a support having a base, a first vibrating arm and a second vibrating arm extending from the base, and a first main surface and a second main surface extending from the base and facing each other. Arm part, first excitation electrode and second excitation electrode provided on first vibration arm part and second vibration arm part, first connection electrode and second connection provided on first main surface of support arm part An electrode, a first lead electrode provided on the first main surface of the support arm, electrically connecting the first excitation electrode and the first connection electrode, and provided on a second main surface of the support arm; A second extraction electrode that electrically connects the two excitation electrodes and the second connection electrode, and when the first main surface of the support arm portion is viewed in plan, the support arm portion includes at least the second extraction electrode. There is provided a vibration element in which a hole that overlaps with a part and at least a part of which is surrounded by a first connection electrode is formed.

  When the first main surface of the support arm is viewed in plan, the first connection electrode may be separated from the hole.

  When the first main surface of the support arm portion is viewed in plan, the hole portion may have a long side along a first direction parallel to the extending direction of the support arm portion.

  When the first main surface of the support arm is viewed in plan, the width along the second direction intersecting the first direction of the hole is the width along the second direction of the second extraction electrode in the region overlapping the hole. May be larger.

  The depth of the hole may be larger than the width along the second direction intersecting the first direction of the hole.

  When the first main surface of the support arm is viewed in plan, the length of the hole along the first direction may be larger than the length of the first connection electrode along the first direction.

  At least a part of the hole portion may be filled with a material having a relative dielectric constant smaller than that of the support arm portion.

  The first vibrating arm portion and the second vibrating arm portion are arranged in a second direction extending along the first direction and intersecting the first direction, and the supporting arm portion is the first vibrating arm portion and the second vibrating arm. And a constricted portion connected to the base portion and a wide portion connected to the constricted portion.

  According to another aspect of the present invention, the vibration element, the substrate on which the vibration element is mounted, the first conductive holding member that electrically connects the substrate and the first connection electrode, the substrate, and the first And a second conductive holding member that electrically connects the two connection electrodes, and a resonator is provided in which a gap is formed between the bottom surface of the hole and the first conductive holding member. .

  When the second main surface of the support arm is viewed in plan, a part of the hole may overlap the first conductive holding member, and the other part of the hole may be disposed outside the first conductive holding member. .

  As described above, according to one embodiment of the present invention, it is possible to provide a vibration element and a vibrator that can reduce stray capacitance.

  The embodiments described above are for facilitating the understanding of the present invention, and are not intended to limit the present invention. The present invention can be changed / improved without departing from the spirit thereof, and the present invention includes equivalents thereof. In other words, those obtained by appropriately modifying the design of each embodiment by those skilled in the art are also included in the scope of the present invention as long as they include the features of the present invention. For example, each element included in each embodiment and its arrangement, material, condition, shape, size, and the like are not limited to those illustrated, and can be changed as appropriate. In addition, each element included in each embodiment can be combined as much as technically possible, and combinations thereof are included in the scope of the present invention as long as they include the features of the present invention.

1 ... Tuning fork type crystal resonator (vibrator)
10 ... Tuning fork type crystal vibrating element (vibrating element)
11 ... quartz substrate (piezoelectric substrate)
12A ... 1st main surface 12B ... 2nd main surface 20 ... Lid member 30 ... Base member 33a, 33b ... Electrode pad 36a, 36b ... Conductive holding member 40 ... Joining member 50 ... Base 60a, 60b ... Vibrating arm 62a, 62b ... arm portions 64a, 64b ... weight portions 63a, 63b ... groove portions 70 ... support arm portions 72 ... constricted portions 74 ... wide portions 76 ... hole portions 82a, 82b ... excitation electrodes 84a, 84b ... extraction electrodes 86a, 86b ... connection electrodes

Claims (10)

The base,
A first vibrating arm and a second vibrating arm extending from the base;
A support arm portion extending from the base and having a first main surface and a second main surface facing each other;
A first excitation electrode and a second excitation electrode provided on the first vibrating arm portion and the second vibrating arm portion;
A first connection electrode and a second connection electrode provided on the first main surface of the support arm,
A first extraction electrode provided on the first main surface of the support arm and electrically connecting the first excitation electrode and the first connection electrode;
A second lead electrode provided on the second main surface of the support arm and electrically connecting the second excitation electrode and the second connection electrode;
With
When the first main surface of the support arm is viewed in plan, the support arm overlaps at least a part of the second extraction electrode and at least a part of the hole surrounded by the first connection electrode A vibrating element is formed. When the first main surface of the support arm portion is viewed in plan, the first connection electrode is separated from the hole portion,
The vibration element according to claim 1. When the first main surface of the support arm is viewed in plan, the hole has a long side along a first direction parallel to the extending direction of the support arm.
The vibration element according to claim 1. When the first main surface of the support arm portion is viewed in plan, the width along the second direction intersecting the first direction of the hole portion is the width of the second extraction electrode in the region overlapping the hole portion. Greater than the width along the second direction,
The vibration element according to claim 3. The depth of the hole is greater than a width along a second direction intersecting the first direction of the hole,
The vibration element according to claim 3 or 4. When the first main surface of the support arm is viewed in plan, the length of the hole along the first direction is larger than the length of the first connection electrode along the first direction.
The vibration element according to claim 3. At least a part of the hole is filled with a material having a relative dielectric constant smaller than that of the support arm,
The vibration element according to claim 1. The first vibrating arm portion and the second vibrating arm portion are arranged in a second direction that extends along the first direction and intersects the first direction,
The support arm is
Provided between the first vibrating arm portion and the second vibrating arm portion;
A constricted portion connected to the base portion, and a wide portion connected to the constricted portion,
The vibration element according to claim 1. The vibration element according to claim 8,
A substrate on which the vibration element is mounted;
A first conductive holding member that electrically connects the substrate and the first connection electrode;
A second conductive holding member that electrically connects the substrate and the second connection electrode;
With
A vibrator in which a gap is formed between a bottom surface of the hole and the first conductive holding member. When the second main surface of the support arm portion is viewed in plan view,
A part of the hole overlaps the first conductive holding member;
The other part of the hole is disposed outside the first conductive holding member,
The vibrator according to claim 9.