JP2019138898A5 - - Google Patents

Claims (6)

In a surface shape measuring machine that measures the surface shape of the surface to be measured,
A stylus that is swingably supported around a swing fulcrum, a stylus that is provided at the tip of the stylus and extends in one direction perpendicular to or diagonally to the longitudinal direction of the stylus, and the tip of the stylus. The stylus is attached to the skid provided at a position away from the portion in one direction and the stylus in the first rotation direction in which the stylus rotates in one direction among the rotation directions centered on the swing fulcrum. A detector including an urging member that urges the tip of the stylus to project in one direction with respect to the skid.
A first elastic support member that swingably supports the detector in the first rotation direction and the second rotation direction opposite to the first rotation direction.
A drive unit that moves the first elastic support member along a drive direction that is perpendicular to the axial direction of the swing fulcrum and parallel to the surface to be measured.
A linear detector guide that movably supports the detector driven by the drive unit via the first elastic support member along the surface to be measured.
A guide support member to which the include one or more of the first contact point into contact with the surface to be measured is supported lifting the detector guide,
A surface shape measuring machine equipped with. When the stylus is rotated in the second rotation direction from a predetermined reference rotation position against the urging force of the urging member, the tip of the stylus is the rotation angle of the stylus in the second rotation direction. The surface shape measuring machine according to claim 1, wherein the surface shape measuring machine protrudes in one direction from the skid until the surface shape reaches a certain angle. When the rotation angle of the stylus in the second rotation direction reaches the constant angle and a force on the side opposite to the one direction side is applied to the skid, the detector causes the first elasticity. The surface shape measuring machine according to claim 2, which rotates in the second rotation direction with the support member as a reference. A case for accommodating a part of the detector, the first elastic support member, and the drive unit, which is formed on the case wall surface perpendicular to the drive direction and the case wall surface through which the detector is inserted. A case with a detector insertion hole and
A second elastic support member provided in the case, and a second elastic support member that swingably supports the detector guide in the first rotation direction and the second rotation direction.
The surface shape measuring machine according to any one of claims 1 to 3. The surface shape measuring machine according to any one of claims 1 to 4 , wherein the guide support member contacts the surface to be measured at three first contact points. The surface shape measuring machine according to any one of claims 1 to 5 , wherein the skid has a stylus insertion hole through which the stylus is inserted.