JP2019114479A - Induction heating device - Google Patents
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- General Induction Heating (AREA)
Abstract
Description
本発明は、誘導加熱装置に関する。 The present invention relates to induction heating devices.
半導体材料である炭化珪素（ＳｉＣ）は、現在広くデバイス用基板として使用されているＳｉ（珪素）に比べてバンドギャップが広いことから、単結晶ＳｉＣ基板を使用してパワーデバイス、高周波デバイス、高温動作デバイス等を作製する研究が行われている。 Silicon carbide (SiC), which is a semiconductor material, has a wider band gap than Si (silicon), which is widely used today as a substrate for devices. Therefore, power devices, high frequency devices, high temperature using a single crystal SiC substrate Research has been conducted to produce motion devices and the like.
炭化珪素を結晶成長させるとき、焼成するとき等に炉を加熱する方式として、高周波電流による誘導加熱方式が用いられている。誘導加熱方式は、コイルに高周波電流を流すことによって発生する誘導磁界を被加熱体に作用させ、そこに誘起される電流を利用して被加熱体を発熱させるものである（特許文献１、２）。 When crystal growth of silicon carbide is performed, as a method of heating the furnace when firing or the like, an induction heating method by high frequency current is used. In the induction heating method, an induction magnetic field generated by flowing a high frequency current through a coil is caused to act on the body to be heated, and the body to be heated is heated using the current induced therein (Patent Documents 1 and 2) ).
この方式では、単位時間に多くのエネルギーを供給することができるため、高速・高温加熱が可能であるが、上述した被加熱体での発熱量が、被加熱体とコイルとの位置関係に依存するため、被加熱体を均一に加熱することが難しい。例えば、コイルが螺旋形状を有し、その内側に被加熱体が配されている場合、被加熱体の中央部分で発熱しやすく、そこでの温度が相対的に高くなる。 In this method, a large amount of energy can be supplied per unit time, so high speed and high temperature heating are possible, but the calorific value of the above-mentioned object to be heated depends on the positional relationship between the object to be heated and the coil. Therefore, it is difficult to uniformly heat the object to be heated. For example, when the coil has a helical shape and the object to be heated is disposed inside the coil, heat is likely to be generated in the central portion of the object to be heated, and the temperature there is relatively high.
所定のタイミングでコイルを駆動し、コイルと被加熱体との位置関係を変動させれば、発熱しやすい部分が移動し、被加熱体の全体にわたって温度を均一化させられる可能性はある。しかしながら、近年用いられている誘導加熱装置では、炉とともにコイルが巨大化する傾向にあり、その駆動を制御することが難しくなっている。 If the coil is driven at a predetermined timing to change the positional relationship between the coil and the body to be heated, there is a possibility that the easily heated portion may be moved and the temperature may be made uniform throughout the body to be heated. However, in the induction heating apparatus used in recent years, the coil tends to be enlarged with the furnace, and it is difficult to control the drive.
本発明は、かかる事情に鑑みてなされたものであり、コイルを動かすことなく、被加熱体を均一に加熱することが可能な誘導加熱装置を提供することを目的とする。 The present invention has been made in view of such circumstances, and it is an object of the present invention to provide an induction heating device capable of uniformly heating an object to be heated without moving a coil.
上記課題を解決するため、本発明は以下の手段を採用している。 In order to solve the above-mentioned subject, the present invention adopts the following means.
（１）本発明の一態様に係る誘導加熱装置は、被加熱体を収容する容器と、前記容器の外側に配されたコイルと、前記コイルに電流を流した際に発生する誘導磁界を制御する誘導制御部材と、前記誘導制御部材を駆動する駆動機構と、を備えている。 (1) An induction heating apparatus according to an aspect of the present invention controls a container for containing a body to be heated, a coil disposed outside the container, and an induction magnetic field generated when current flows through the coil. And a drive mechanism for driving the guidance control member.
（２）前記（１）に記載の誘導加熱装置において、前記コイルが螺旋形状を有し、前記コイルで囲まれる空間に前記容器が配されていてもよい。 (2) In the induction heating device according to (1), the coil may have a helical shape, and the container may be disposed in a space surrounded by the coil.
（３）前記（１）または（２）のいずれかに記載の誘導加熱装置において、前記誘導制御部材が、前記コイルで囲まれる空間の外側に配されていてもよい。 (3) In the induction heating device according to any one of (1) and (2), the induction control member may be disposed outside the space surrounded by the coil.
（４）前記（３）に記載の誘導加熱装置において、前記誘導制御部材が、前記コイルの軸と平行な方向において、前記コイルの少なくとも一端側に配されていてもよい。 (4) In the induction heating device according to (3), the induction control member may be disposed on at least one end side of the coil in a direction parallel to the axis of the coil.
（５）前記（３）に記載の誘導加熱装置において、前記誘導制御部材が、前記コイルの軸と垂直な方向において、前記コイルの周囲に配されていてもよい。 (5) In the induction heating device according to (3), the induction control member may be disposed around the coil in a direction perpendicular to the axis of the coil.
（６）前記（１）または（２）のいずれかに記載の誘導加熱装置において、前記誘導制御部材が、前記コイルと前記容器とで挟まれた空間に配されていてもよい。 (6) In the induction heating apparatus according to any one of (1) and (2), the induction control member may be disposed in a space sandwiched between the coil and the container.
（７）前記（１）に記載の誘導加熱装置において、前記コイルが渦巻き形状を有し、前記コイルの軸方向における一端側に前記容器が配されていてもよい。 (7) In the induction heating device according to (1), the coil may have a spiral shape, and the container may be disposed at one end side in the axial direction of the coil.
（８）前記（７）に記載の誘導加熱装置において、前記誘導制御部材が、前記コイルを挟んで前記容器と反対側に配されていてもよい。 (8) In the induction heating device according to (7), the induction control member may be disposed on the opposite side to the container with the coil interposed therebetween.
（９）前記（７）に記載の誘導加熱装置において、前記誘導制御部材が、前記コイルと前記容器とで挟まれた空間に配されていてもよい。 (9) In the induction heating device according to (7), the induction control member may be disposed in a space sandwiched between the coil and the container.
（１０）前記（７）に記載の誘導加熱装置において、前記誘導制御部材が、前記コイルの軸と垂直な方向において、前記コイルの周囲に配されていてもよい。 (10) In the induction heating device according to (7), the induction control member may be disposed around the coil in a direction perpendicular to the axis of the coil.
（１１）前記（１）〜（１０）のいずれか一つに記載の誘導加熱装置において、前記誘導制御部材が、円筒形状を有し、その軸が前記コイルの軸と平行となるように配されていることが好ましい。 (11) In the induction heating device according to any one of the above (1) to (10), the induction control member has a cylindrical shape and is disposed such that its axis is parallel to the axis of the coil. Is preferred.
（１２）前記（１）〜（１１）のいずれか一つに記載の誘導加熱装置において、前記誘導制御部材と前記コイルとの離間距離が、被加熱体とコイルの距離より小さくなる距離まで駆動可能であることが好ましい。 (12) In the induction heating device according to any one of (1) to (11), driving is performed to such a distance that the separation distance between the induction control member and the coil is smaller than the distance between the body to be heated and the coil. Preferably it is possible.
本発明の誘導加熱装置では、コイルに電流を流した際に、コイルの周囲に発生する磁界のうち誘導制御部材に近い部分が、誘導制御部材との磁気的相互作用によって強制的に歪められる。その影響により、被加熱体のうち誘導制御部材に近い部分に作用する磁界は、他の部分に作用する磁界に比べて弱まることになる。そして、誘導制御部材に近い部分では、誘起される電流が相対的に小さくなり、これに伴う発熱の量が、他の部分での発熱の量に比べて小さくなる。 In the induction heating apparatus of the present invention, when current is supplied to the coil, a portion close to the induction control member in the magnetic field generated around the coil is forcibly distorted by the magnetic interaction with the induction control member. Due to the influence, the magnetic field acting on the portion close to the induction control member in the body to be heated becomes weaker than the magnetic field acting on the other portion. Then, in the portion close to the induction control member, the induced current becomes relatively small, and the amount of heat generation accompanying this becomes smaller than the amount of heat generation in the other portion.
本発明では、駆動機構を用いて誘導制御部材を駆動し、誘導制御部材とコイルとの距離を調整することにより、誘導加熱部材の近くに発生する磁界の歪み具合を変えることができる。したがって、本発明では、被加熱体において作用する磁界が相対的に弱まる位置を自在に変えることができる。つまり、コイルを動かすことなく、被加熱体の発熱量が小さくなる部分の位置を変えることにより、発熱量が大きくなる部分すなわち加熱中心の位置を自在に変えることができ、ひいては被加熱体を均一に加熱することができる。 In the present invention, the distortion of the magnetic field generated near the induction heating member can be changed by driving the induction control member using the drive mechanism and adjusting the distance between the induction control member and the coil. Therefore, in the present invention, the position at which the magnetic field acting on the object to be heated is relatively weak can be freely changed. That is, by changing the position of the portion where the calorific value of the body to be heated decreases without moving the coil, it is possible to freely change the portion where the calorific value becomes large, that is, the position of the heating center. It can be heated to
以下、本発明について、図を適宜参照しながら詳細に説明する。以下の説明で用いる図面は、本発明の特徴を分かりやすくするために、便宜上特徴となる部分を拡大して示している場合があり、各構成要素の寸法比率等は実際とは異なっていることがある。また、以下の説明において例示される材料、寸法等は一例であって、本発明はそれらに限定されるものではなく、本発明の効果を奏する範囲で適宜変更して実施することが可能である。 Hereinafter, the present invention will be described in detail with appropriate reference to the drawings. In the drawings used in the following description, in order to make features of the present invention intelligible, the features that are the features may be enlarged and shown for convenience, and the dimensional ratio of each component is different from the actual one. There is. In addition, the materials, dimensions, etc. exemplified in the following description are merely examples, and the present invention is not limited to them, and can be appropriately modified and implemented within the scope of the effects of the present invention. .
＜第一実施形態＞
図１（ａ）は、本発明の第一実施形態に係る誘導加熱装置１００の概略構成を示す斜視図である。図１（ｂ）は、図１（ａ）の誘導加熱装置１００の縦断面図である。
First Embodiment
Fig.1 (a) is a perspective view which shows schematic structure of the induction heating apparatus 100 which concerns on 1st embodiment of this invention. FIG.1 (b) is a longitudinal cross-sectional view of the induction heating apparatus 100 of Fig.1 (a).
誘導加熱装置１００は、被加熱体Ｍを収容する容器（坩堝）１０１と、容器１０１の外側に配されたコイル１０２と、コイル１０２に電流を流した際に発生する誘導磁界を制御する誘導制御部材１０３と、誘導制御部材１０３を駆動する駆動機構１０４と、を備えている。誘導加熱装置１００は、例えば高温の加熱処理を必要とする炭化珪素の昇華炉、溶融炉、黒鉛化炉、結晶成長炉として活用することができる。 The induction heating apparatus 100 controls the induction magnetic field generated when a current is supplied to the container 102 that contains the object to be heated M, the coil 102 disposed outside the container 101, and the coil 102. A member 103 and a drive mechanism 104 for driving the guidance control member 103 are provided. The induction heating apparatus 100 can be used, for example, as a silicon carbide sublimation furnace, a melting furnace, a graphitization furnace, or a crystal growth furnace which requires high-temperature heat treatment.
容器１０１は、坩堝として機能する公知の材料からなるものである。例えば、昇華法による炭化珪素の単結晶成長に用いる場合には、２０００℃〜２５００℃程度の高温に耐えられる黒鉛、炭化タンタル等の材料からなるものが用いられる。被加熱体Ｍは、容器内１０１において、容器１０１と同等の耐熱性を有する支持部材１０６等によって支持されている。 The container 101 is made of a known material that functions as a crucible. For example, when using for the single crystal growth of silicon carbide by the sublimation method, what consists of materials, such as graphite which can endure high temperature about 2000 ° C-2500 ° C, tantalum carbide, is used. The to-be-heated body M is supported by the support member 106 etc. which have the heat resistance equivalent to the container 101 in the inside 101 of a container.
容器１０１は、内部の温度を維持し、かつ容器１０１が発する熱によってコイル１０２がダメージを受けるのを防ぐために、図１に示すように断熱材１０５で覆われていることが好ましい。断熱材１０５としては、例えば、炭素繊維等のカーボン材料からなるものが用いられる。 The container 101 is preferably covered with a heat insulating material 105 as shown in FIG. 1 in order to maintain the internal temperature and to prevent the coil 102 from being damaged by the heat emitted by the container 101. As the heat insulating material 105, for example, one made of a carbon material such as carbon fiber is used.
容器１０１は、コイル１０２で囲まれる空間に配されている。コイル１０２は、螺旋形状を有し、高周波発振器（不図示）に接続されている。コイル１０２を構成する複数のリング部分１０２Ａは、それぞれ容器１０１の側壁からの離間距離ｄを保って配置される。離間距離ｄは、誘導加熱装置や容器（坩堝）等の大きさによって適宜選択される。 The container 101 is disposed in a space surrounded by the coil 102. The coil 102 has a helical shape and is connected to a high frequency oscillator (not shown). The plurality of ring portions 102A that constitute the coil 102 are disposed at a distance d from the side wall of the container 101, respectively. The separation distance d is appropriately selected according to the size of the induction heating device, the container (the crucible), and the like.
本実施形態に係る誘導制御部材１０３は、コイル１０２で囲まれる空間の外側であって、コイルの軸１０２ａと平行な方向において、コイル１０３の少なくとも一端側に配されている。図１では、誘導制御部材１０３が、コイルの一端１０２ｂ側（上側）、他端１０２ｃ側（下側）に、それぞれ１つずつ配されている場合について例示している。つまり、２つの誘導制御部材１０３Ａ、１０３Ｂが、コイル１０２を間に挟むように配されている。これらは、互いに同じ材料からなり、同じ形状、同じ大きさを有することが好ましい。２つの誘導制御部材１０３Ａ、１０３Ｂの中心軸同士は、略一致していることが好ましい。 The induction control member 103 according to the present embodiment is disposed outside the space surrounded by the coil 102 and at least one end side of the coil 103 in a direction parallel to the axis 102 a of the coil. FIG. 1 exemplifies a case where one guidance control member 103 is disposed on each of the one end 102 b side (upper side) and the other end 102 c side (lower side) of the coil. That is, two induction control members 103A and 103B are disposed to sandwich the coil 102 therebetween. These are preferably made of the same material as each other, and have the same shape and the same size. It is preferable that central axes of the two guidance control members 103A and 103B substantially coincide with each other.
誘導制御部材１０３としては、非磁性で、導電性を示し、耐熱性を有するものであることが好ましく、例えば銅、銅合金、金、プラチナ、銀、パラジウム等の導電材料からなるものを用いることができ、銅または銅合金が好ましい。銅合金としては、亜鉛、スズ、ニッケル、クロム、銀等との合金を用いることができ、亜鉛を主とした銅合金が好ましい。 The induction control member 103 is preferably nonmagnetic, conductive, and heat resistant. For example, copper, a copper alloy, gold, platinum, silver, palladium, or another conductive material may be used. And copper or copper alloys are preferred. As the copper alloy, an alloy with zinc, tin, nickel, chromium, silver or the like can be used, and a copper alloy mainly composed of zinc is preferable.
誘導制御部材１０３は、誘導加熱の過程において温度が上がり過ぎるのを防ぐため、冷却水の供給等の機能を有する冷却手段（不図示）を備えている。 The induction control member 103 is provided with a cooling means (not shown) having a function such as the supply of cooling water in order to prevent the temperature from rising excessively in the process of induction heating.
誘導制御部材１０３は、フレキシブルな部材、あるいは構造であってもよい。この場合、誘導制御部材１０３の形状を変化させることによって、コイルから磁界の歪め方を自在に調整することができる。 The guidance control member 103 may be a flexible member or a structure. In this case, by changing the shape of the induction control member 103, it is possible to freely adjust how the magnetic field is distorted from the coil.
均熱性を高める観点から、容器１０１、誘導制御部材１０３の形状は、いずれも両端が開口した略円筒状であることが好ましく、コイルの軸１０２ａと容器の中心軸１０１ａと誘導制御部材の中心軸１０３ａとが、略一致していることが好ましい。 From the viewpoint of enhancing the heat uniformity, the shape of the container 101 and the induction control member 103 is preferably substantially cylindrical with both ends open, and the axis 102a of the coil and the central axis 101a of the container and the central axis of the induction control member It is preferable that 103a substantially coincide with each other.
この場合、誘導制御部材１０３は、その内部を容器１０２が貫通した配置をとることができるため、容器１０２に遮られることなく、誘導制御部材１０３とコイルとの距離を自在に調整することができる。 In this case, since the guidance control member 103 can be arranged such that the container 102 penetrates the inside, the distance between the guidance control member 103 and the coil can be freely adjusted without being blocked by the container 102. .
誘導制御部材１０３が略円筒状を有する場合、発生する磁界を効果的に歪める観点から、側壁の厚みｔ１や軸方向の長さｔ２は、容器（坩堝）の大きさやコイルの大きさに応じて、誘導制御部材の効果が得られる範囲で適宜選択される。誘導制御部材１０３は、コイル１０２との離間距離ｄ１が被加熱体Ｍとコイル１０２の距離より小さくなる位置まで駆動可能である。誘導制御部材とコイルとの離間距離ｄ１は誘導制御部材の効果が得られる範囲内の遠さで、かつ放電しない範囲内の近さで選択される。放電が起こる距離は、電力、真空度、ガス雰囲気などによって異なるため、使用する環境に応じて定めることができる。 When the induction control member 103 has a substantially cylindrical shape, the thickness t1 of the side wall and the axial length t2 depend on the size of the container (容器) and the size of the coil from the viewpoint of effectively distorting the generated magnetic field. And the range which can obtain the effect of the guidance control member. The induction control member 103 can be driven to a position where the separation distance d1 from the coil 102 is smaller than the distance between the object M to be heated and the coil 102. The separation distance d1 between the induction control member and the coil is selected at a distance within the range where the effect of the induction control member can be obtained and within the range not discharging. Since the distance at which the discharge occurs varies depending on the power, the degree of vacuum, the gas atmosphere, and the like, it can be determined according to the environment used.
駆動機構１０４は、誘導制御部材１０３を所定の方向に駆動する機能を有している。誘導制御部材１０３の駆動方向は、コイル１０２と誘導制御部材１０３の位置関係によって決定される。本実施形態では、誘導制御部材１０３Ａ、１０３Ｂを、それぞれ駆動機構１０４Ａ、１０４Ｂを用いて、コイルの軸１０２ａ方向（図１では上下方向）に駆動するように構成されている。 The drive mechanism 104 has a function of driving the guidance control member 103 in a predetermined direction. The driving direction of the induction control member 103 is determined by the positional relationship between the coil 102 and the induction control member 103. In the present embodiment, the guidance control members 103A and 103B are configured to be driven in the direction of the coil axis 102a (vertical direction in FIG. 1) using the drive mechanisms 104A and 104B, respectively.
本実施形態では、誘導制御部材１０３Ａ、１０３Ｂのそれぞれを、駆動機構１０４Ａ、１０４Ｂで個別に駆動する方式を例示しているが、誘導制御部材１０３Ａ、１０３Ｂ間の距離が制限されている場合には、１つの駆動機構で駆動する方式に置き替えてもよい。 In the present embodiment, a method of individually driving each of the guidance control members 103A and 103B by the drive mechanisms 104A and 104B is exemplified, but in the case where the distance between the guidance control members 103A and 103B is limited, , And may be replaced with a system driven by one drive mechanism.
上述した構成においてコイル１０２に高周波電流を流した場合、コイル１０２の周囲に発生する磁界（誘導磁界）が被加熱体Ｍに作用し、そこに電流（誘導電流）が誘起される。そして、電流の誘起に伴うジュール熱によって、被加熱体Ｍの温度が上昇する。 When a high frequency current flows through the coil 102 in the configuration described above, a magnetic field (induced magnetic field) generated around the coil 102 acts on the body M to be heated, and a current (induced current) is induced there. And the temperature of the to-be-heated body M rises by the Joule heat accompanying induction of an electric current.
図２（ａ）は、図１の誘導加熱装置１００において、誘導加熱部材１０３Ａ、１０３Ｂを駆動させ、一端１０２ｂ側の誘導加熱部材１０３Ａをコイル１０２に近づけ、他端１０２ｃ側の誘導加熱部材１０３Ｂをコイル１０２から遠ざけた状態について説明する図である。 In FIG. 2A, in the induction heating apparatus 100 of FIG. 1, the induction heating members 103A and 103B are driven to bring the induction heating member 103A on one end 102b closer to the coil 102 and the induction heating member 103B on the other end 102c. It is a figure explaining the state away from the coil 102. FIG.
図２（ｂ）は、この状態でコイル１０２に高周波電流を流した場合について、誘導加熱装置の片側部分（右側部分）１００Ａにおける、温度分布のシミュレーション結果を示す図である。温度分布は色の濃淡で表されており、濃い領域ほど温度が高いことを示している（以下に示す図でも同様）。上昇した温度の分布は、図２（ｂ）に示すように一様ではなく、誘導加熱部材１０３Ａに近い側の部分の温度が、他の部分に比べて低くなる。誘導加熱装置の他の片側部分（左側部分）においては、図２（ｂ）の分布と境界線Ｃを中心とした軸対称な分布を示す。 FIG. 2B is a diagram showing a simulation result of the temperature distribution in one side portion (right side portion) 100A of the induction heating apparatus in the case where a high frequency current is supplied to the coil 102 in this state. The temperature distribution is represented by shades of color, and it is shown that the darker the region is, the higher the temperature is (the same applies to the figures shown below). The distribution of the elevated temperature is not uniform as shown in FIG. 2B, and the temperature of the portion closer to the induction heating member 103A is lower than that of the other portions. In the other one side portion (left side portion) of the induction heating device, the distribution of FIG. 2 (b) and the axisymmetric distribution centering on the boundary line C are shown.
図３（ａ）は、図１の誘導加熱装置１００において、誘導加熱部材１０３Ａ、１０３Ｂを駆動させ、誘導加熱部材１０３Ａをコイル１０２から遠ざけ、誘導加熱部材１０３Ｂをコイル１０２に近づけた状態について説明する図である。 FIG. 3A illustrates a state in which the induction heating members 103A and 103B are driven to move the induction heating member 103A away from the coil 102 and the induction heating member 103B approaches the coil 102 in the induction heating device 100 of FIG. FIG.
図３（ｂ）は、この状態でコイル１０２に高周波電流を流した場合について、誘導加熱装置１００の温度分布のシミュレーション結果を示す図である。上昇した温度の分布は、図３（ｂ）に示すように一様ではなく、誘導加熱部材１０３Ｂに近い側の部分の温度が、他の部分に比べて低くなる。誘導加熱装置の他の片側部分（左側部分）においては、図３（ｂ）の分布と境界線Ｃを中心とした軸対称な分布を示す。 FIG. 3B is a view showing a simulation result of the temperature distribution of the induction heating apparatus 100 in the case where a high frequency current is supplied to the coil 102 in this state. The distribution of the elevated temperature is not uniform as shown in FIG. 3B, and the temperature of the portion closer to the induction heating member 103B is lower than that of the other portions. In the other one side portion (left side portion) of the induction heating device, the distribution of FIG. 3B and an axially symmetric distribution centering on the boundary line C are shown.
図２、３に示すように、本実施形態に係る誘導加熱装置１００では、コイル１０２に電流を流した際に、コイル１０２の周囲に発生する磁界のうち誘導制御部材１０３に近い部分が、誘導制御部材１０３との磁気的相互作用によって強制的に歪められる。その影響により、被加熱体Ｍのうち誘導制御部材１０３に近い部分に作用する磁界は、他の部分に作用する磁界に比べて弱まることになる。そして、誘導制御部材１０３に近い部分では、誘起される電流が相対的に小さくなり、これに伴う発熱の量が、他の部分での発熱の量に比べて小さくなる。 As shown in FIGS. 2 and 3, in the induction heating apparatus 100 according to the present embodiment, when a current is supplied to the coil 102, a portion near the induction control member 103 in the magnetic field generated around the coil 102 is induced. The magnetic interaction with the control member 103 forcibly distorts. Due to the influence, the magnetic field acting on the portion of the body to be heated M close to the induction control member 103 becomes weaker than the magnetic field acting on the other portion. Then, in the portion near the induction control member 103, the induced current becomes relatively small, and the amount of heat generation accompanying this becomes smaller than the amount of heat generation in the other portions.
本実施形態では、駆動機構１０４を用いて誘導制御部材１０３を駆動し、誘導制御部材１０３とコイル１０２との距離を調整することにより、誘導加熱部材１０３の近くに発生する磁界の歪み具合を変えることができる。したがって、本実施形態では、被加熱体Ｍにおいて作用する磁界が相対的に弱まる位置を自在に変えることができる。つまり、コイル１０２を動かすことなく、被加熱体Ｍの発熱量が小さくなる部分の位置を変えることにより、発熱量が大きくなる部分すなわち加熱中心の位置を自在に変えることができ、ひいては被加熱体Ｍを均一に加熱することができる。 In the present embodiment, the drive control unit 104 is used to drive the induction control member 103, and the distance between the induction control member 103 and the coil 102 is adjusted to change the distortion of the magnetic field generated near the induction heating member 103. be able to. Therefore, in the present embodiment, it is possible to freely change the position at which the magnetic field acting on the object to be heated M is relatively weakened. That is, by changing the position of the portion where the calorific value of the body to be heated M becomes small without moving the coil 102, the portion where the calorific value becomes large, that is, the position of the heating center can be freely changed. M can be heated uniformly.
＜第二実施形態＞
図４（ａ）は、本発明の第二実施形態に係る誘導加熱装置２００の縦断面図である。誘導加熱装置２００では、誘導制御部材２０３が、コイル２０２の軸と垂直な方向において、コイル２０２の周囲に配されている。すなわち、誘導制御部材２０３の内壁面がコイル２０２と対向している。誘導制御部材２０３以外の構成は、第一実施形態に係る誘導加熱装置１００の構成と同様であり、誘導加熱装置１００と同等の効果を奏する。
Second Embodiment
FIG. 4A is a longitudinal sectional view of an induction heating device 200 according to a second embodiment of the present invention. In the induction heating device 200, an induction control member 203 is disposed around the coil 202 in a direction perpendicular to the axis of the coil 202. That is, the inner wall surface of the guidance control member 203 is opposed to the coil 202. The configuration other than the induction control member 203 is the same as the configuration of the induction heating device 100 according to the first embodiment, and exhibits the same effect as the induction heating device 100.
発生する磁界を効果的に歪める観点から、誘導制御部材２０３は、コイルの軸２０２ａに垂直な平面視におけるコイル２０２との離間距離ｄ２が、容器２０１とコイル２０２の距離より小さい範囲を含んで駆動されることが好ましい。すなわち、誘導制御部材２０３は、コイル２０２との離間距離ｄ２が被加熱体Ｍとコイル２０２の距離より小さくなる位置まで駆動可能であることが好ましい。 From the viewpoint of effectively distorting the generated magnetic field, the induction control member 203 is driven such that the distance d2 between the coil 202 and the coil 202 in a plan view perpendicular to the axis 202a of the coil is smaller than the distance between the container 201 and the coil 202. Preferably. That is, it is preferable that the induction control member 203 can be driven to a position where the distance d2 between the induction control member 203 and the coil 202 is smaller than the distance between the object M and the coil 202.
図４（ａ）では、誘導加熱部材２０３を駆動させ、誘導加熱部材２０３をコイルの軸２０２ａ方向における一端側（上側）２０２ｂに近づけた状態を示している。図４（ｂ）は、この状態でコイル２０２に高周波電流を流した場合について、誘導加熱装置の一部分（右側半分）２００Ａにおける、温度分布のシミュレーション結果を示す図である。上昇した温度の分布は、図４（ｂ）に示すように一様ではなく、誘導加熱部材２０３に近い側の部分の温度が、他の部分に比べて低くなる。誘導加熱装置の他の片側部分（左側部分）においては、図４（ｂ）の分布と境界線Ｃを中心とした軸対称な分布を示す。 FIG. 4A shows a state in which the induction heating member 203 is driven to bring the induction heating member 203 close to one end side (upper side) 202 b in the direction of the axis 202 a of the coil. FIG. 4B is a diagram showing a simulation result of the temperature distribution in a part (right half) 200A of the induction heating apparatus in the case where a high frequency current is supplied to the coil 202 in this state. The distribution of the increased temperature is not uniform as shown in FIG. 4B, and the temperature of the portion closer to the induction heating member 203 is lower than that of the other portions. In the other one side portion (left side portion) of the induction heating device, the distribution of FIG. 4B and the axially symmetric distribution centering on the boundary C are shown.
図５（ａ）では、誘導加熱部材２０３を駆動させ、誘導加熱部材２０３をコイルの軸２０２ａ方向における他端側（下側）２０２ｃに近づけた状態を示している。図５（ｂ）は、この状態でコイル２０２に高周波電流を流した場合について、誘導加熱装置の一部分（右側半分）２００Ａにおける、温度分布のシミュレーション結果を示す図である。上昇した温度の分布は、図５（ｂ）に示すように一様ではなく、誘導加熱部材２０３に近い側の部分の温度が、他の部分に比べて低くなる。誘導加熱装置の他の片側部分（左側部分）においては、図５（ｂ）の分布と境界線Ｃを中心とした軸対称な分布を示す。 FIG. 5A shows a state in which the induction heating member 203 is driven to bring the induction heating member 203 close to the other end side (lower side) 202c in the direction of the axis 202a of the coil. FIG. 5B is a diagram showing a simulation result of the temperature distribution in a part (right half) 200A of the induction heating apparatus in the case where a high frequency current is supplied to the coil 202 in this state. The distribution of the elevated temperature is not uniform as shown in FIG. 5B, and the temperature of the portion closer to the induction heating member 203 is lower than that of the other portions. In the other one side portion (left side portion) of the induction heating device, the distribution in FIG. 5 (b) and the axisymmetric distribution centering on the boundary line C are shown.
図４、５に示すように、本実施形態に係る誘導加熱装置２００でも、コイル２０２に電流を流した際に、コイル２０２の周囲に発生する磁界のうち誘導制御部材２０３に近い部分が、誘導制御部材２０３との磁気的相互作用によって強制的に歪められる。したがって、駆動機構２０４を用いて誘導制御部材２０３の位置を調整することにより、被加熱体における加熱中心の位置を自在に変えることができ、ひいては被加熱体を均一に加熱することができる。 As shown in FIGS. 4 and 5, in the induction heating apparatus 200 according to the present embodiment as well, when a current is supplied to the coil 202, a portion close to the induction control member 203 in the magnetic field generated around the coil 202 is induced. The magnetic interaction with the control member 203 forcibly distorts. Therefore, by adjusting the position of the induction control member 203 using the drive mechanism 204, the position of the heating center in the body to be heated can be freely changed, and consequently the body to be heated can be uniformly heated.
＜第三実施形態＞
図６（ａ）は、本発明の第三実施形態に係る誘導加熱装置３００の縦断面図である。誘導加熱装置３００では、誘導制御部材３０３が、コイル３０２の軸と垂直な方向において、コイル３０２と容器３０１とで挟まれた空間に配されている。すなわち、誘導制御部材３０３の内壁面は容器３０１と対向し、誘導制御部材３０３の外壁面はコイル３０２と対向している。誘導制御部材３０３以外の構成は、第一実施形態に係る誘導加熱装置１００の構成と同様であり、誘導加熱装置１００と同等の効果を奏する。
Third Embodiment
FIG. 6A is a longitudinal sectional view of an induction heating device 300 according to a third embodiment of the present invention. In the induction heating device 300, the induction control member 303 is disposed in a space sandwiched between the coil 302 and the container 301 in a direction perpendicular to the axis of the coil 302. That is, the inner wall surface of the guidance control member 303 faces the container 301, and the outer wall surface of the guidance control member 303 faces the coil 302. The configuration other than the induction control member 303 is the same as the configuration of the induction heating device 100 according to the first embodiment, and exhibits the same effect as the induction heating device 100.
本実施形態では、誘導制御部材３０３が、被加熱体Ｍよりコイル３０２に近い位置に配置されることになり、その位置関係を維持して駆動することにより効率的に誘導制御を行うことができる。 In the present embodiment, the induction control member 303 is disposed at a position closer to the coil 302 than the object M to be heated, and induction control can be efficiently performed by maintaining the positional relationship and driving. .
図６（ａ）では、誘導加熱部材３０３を駆動させ、誘導加熱部材３０３をコイルの軸３０２ａ方向における一端側（上側）３０２ｂに近づけた状態を示している。図６（ｂ）は、この状態でコイル３０２に高周波電流を流した場合について、誘導加熱装置の一部分（右側半分）３００Ａにおける、温度分布のシミュレーション結果を示す図である。上昇した温度の分布は、図６（ｂ）に示すように一様ではなく、誘導加熱部材３０３に近い側の部分の温度が、他の部分に比べて低くなる。誘導加熱装置内の温度分布は、図６（ｂ）の分布と境界線Ｃを中心とした軸対称な分布を示す。 FIG. 6A shows a state in which the induction heating member 303 is driven to bring the induction heating member 303 close to one end side (upper side) 302 b in the direction of the axis 302 a of the coil. FIG. 6B is a diagram showing a simulation result of the temperature distribution in a part (right half) 300A of the induction heating apparatus when the high frequency current is supplied to the coil 302 in this state. The distribution of the elevated temperature is not uniform as shown in FIG. 6B, and the temperature of the portion closer to the induction heating member 303 is lower than that of the other portions. The temperature distribution in the induction heating apparatus shows the distribution in FIG. 6 (b) and an axially symmetric distribution centered on the boundary C.
図７（ａ）では、誘導加熱部材３０３を駆動させ、誘導加熱部材３０３をコイルの軸３０２ａ方向における他端側（下側）３０２ｃに近づけた状態を示している。図７（ｂ）は、この状態でコイル３０２に高周波電流を流した場合について、誘導加熱装置の一部分（右側半分）３００Ａにおける、温度分布のシミュレーション結果を示す図である。上昇した温度の分布は、図７（ｂ）に示すように一様ではなく、誘導加熱部材３０３に近い側の部分の温度が、他の部分に比べて低くなる。誘導加熱装置内の温度分布は、図７（ｂ）の分布と境界線Ｃを中心とした軸対称な分布を示す。 FIG. 7A shows a state in which the induction heating member 303 is driven to bring the induction heating member 303 close to the other end side (lower side) 302 c in the direction of the axis 302 a of the coil. FIG. 7B is a diagram showing a simulation result of the temperature distribution in a part (right half) 300A of the induction heating apparatus when the high frequency current is supplied to the coil 302 in this state. The distribution of the elevated temperature is not uniform as shown in FIG. 7B, and the temperature of the portion closer to the induction heating member 303 is lower than that of the other portions. The temperature distribution in the induction heating apparatus shows the distribution in FIG. 7B and an axially symmetrical distribution centered on the boundary C.
図６、７に示すように、本実施形態に係る誘導加熱装置でも、コイルに電流を流した際に、コイルの周囲に発生する磁界のうち誘導制御部材に近い部分が、誘導制御部材との磁気的相互作用によって強制的に歪められる。したがって、駆動機構を用いて誘導制御部材３０３の位置を調整することにより、被加熱体における加熱中心の位置を自在に変えることができ、ひいては被加熱体を均一に加熱することができる。 As shown in FIGS. 6 and 7, in the induction heating apparatus according to the present embodiment as well, when a current is supplied to the coil, a portion close to the induction control member in the magnetic field generated around the coil is the same as the induction control member. It is forcibly distorted by magnetic interaction. Therefore, by adjusting the position of the induction control member 303 using the drive mechanism, the position of the heating center in the body to be heated can be freely changed, and consequently the body to be heated can be uniformly heated.
＜第四実施形態＞
図８（ａ）は、本発明の第四実施形態に係る誘導加熱装置４００の概略構成を示す斜視図である。誘導加熱装置４００では、コイル４０２が渦巻き形状（蚊取り線香形状）を有し、コイルの軸４０２ａ方向における一端側（上側）に容器４０１が配されている。誘導制御部材４０３は、コイル４０２を挟んで容器４０１と反対側に配されている。
Fourth Embodiment
Fig.8 (a) is a perspective view which shows schematic structure of the induction heating apparatus 400 which concerns on 4th embodiment of this invention. In the induction heating device 400, the coil 402 has a spiral shape (a mosquito coil shape), and the container 401 is disposed on one end side (upper side) of the coil in the direction of the shaft 402a. The induction control member 403 is disposed on the opposite side to the container 401 with the coil 402 interposed therebetween.
均熱性を高める観点から、容器４０１、誘導制御部材４０３の形状は、いずれも両端が開口した略円筒状であることが好ましく、コイルの軸４０２ａと容器の中心軸４０１ａと誘導制御部材の中心軸４０３ａとが、略一致していることが好ましい。コイル４０２および誘導制御部材４０３以外の構成は、第一実施形態に係る誘導加熱装置１００の構成と同様であり、誘導加熱装置１００と同等の効果を奏する。 From the viewpoint of improving the heat uniformity, the shape of the container 401 and the induction control member 403 is preferably substantially cylindrical with both ends open, and the axis 402a of the coil and the central axis 401a of the container and the central axis of the induction control member It is preferable that 403a substantially matches. The configuration other than the coil 402 and the induction control member 403 is the same as the configuration of the induction heating device 100 according to the first embodiment, and the same effect as the induction heating device 100 can be obtained.
図８（ｂ）は、誘導制御部材４０３を、駆動機構４０４を用いてコイルの軸４０２ａ方向（上下方向）に駆動した場合における、被加熱体Ｍの外表面の温度分布を示すグラフである。このグラフにおいて、横軸は容器の中心軸４０１ａ、誘導制御部材の中心軸４０２ａからの距離［ｍｍ］を示し、縦軸はコイル４０２と対向する被加熱体Ｍの表面の温度［℃］を示している。破線がコイル４０２と誘導制御部材４０３との離間距離ｄ４を大きくした場合に対応し、実線がコイル４０２と誘導制御部材４０３との離間距離ｄ４を小さくした場合に対応している。 FIG. 8B is a graph showing the temperature distribution on the outer surface of the object to be heated M when the induction control member 403 is driven in the coil axis 402 a direction (vertical direction) using the drive mechanism 404. In this graph, the horizontal axis indicates the central axis 401a of the container and the distance [mm] from the central axis 402a of the induction control member, and the vertical axis indicates the temperature [° C.] of the surface of the object M to be heated facing the coil 402. ing. The broken line corresponds to the case where the separation distance d4 between the coil 402 and the induction control member 403 is increased, and the solid line corresponds to the case where the separation distance d4 between the coil 402 and the induction control member 403 is reduced.
離間距離ｄ４を大きくした場合には、被加熱体Ｍの外表面の温度が中心軸付近で著しく下がっており、加熱される領域がドーナツの形状（リング状）を有している。一方、離間距離ｄ４を小さくした場合には、中心軸付近での温度の下がり具合が若干軽減されている。 When the separation distance d4 is increased, the temperature of the outer surface of the object to be heated M is significantly lowered near the central axis, and the region to be heated has a donut shape (ring shape). On the other hand, when the separation distance d4 is reduced, the degree of temperature decrease near the central axis is somewhat reduced.
本実施形態に係る誘導加熱装置４００でも、コイル４０２に電流を流した際に、コイル４０２の周囲に発生する磁界のうち誘導制御部材４０３に近い部分が、誘導制御部材４０３との磁気的相互作用によって強制的に歪められる。したがって、駆動機構４０４を用いて誘導制御部材４０３の位置を調整することにより、被加熱体Ｍにおける加熱中心の位置を自在に変えることができ、ひいては被加熱体Ｍを均一に加熱することができる。 Also in the induction heating device 400 according to the present embodiment, when a current is supplied to the coil 402, a portion close to the induction control member 403 in the magnetic field generated around the coil 402 has a magnetic interaction with the induction control member 403. Forced to be distorted by Therefore, by adjusting the position of the induction control member 403 using the drive mechanism 404, the position of the heating center in the body M to be heated can be freely changed, and consequently the body to be heated M can be uniformly heated. .
なお、誘導制御部材４０３は、コイル４０２と容器４０１とで挟まれた空間に配されていてもよい。また、誘導制御部材４０３は、コイルの軸４０２ａと垂直な方向において、コイル４０２の周囲に配されていてもよい。いずれの場合にも、誘導制御部材４０３をコイルの軸４０２ａと平行な方向に駆動することにより、被加熱体Ｍにおける加熱中心の位置を変えることができ、被加熱体Ｍを均一に加熱することができる。 The guidance control member 403 may be disposed in a space sandwiched between the coil 402 and the container 401. Further, the induction control member 403 may be disposed around the coil 402 in a direction perpendicular to the axis 402 a of the coil. In any case, by driving the induction control member 403 in a direction parallel to the axis 402a of the coil, the position of the heating center in the object M to be heated can be changed, and the object M to be heated can be uniformly heated. Can.
本発明は、炭化珪素の結晶成長、焼成等の高温の熱処理を伴うあらゆる製造プロセスにおいて、広く利用することができる。 The present invention can be widely used in any manufacturing process involving high temperature heat treatment such as crystal growth of silicon carbide and firing.
１００、２００、３００、４００・・・誘導加熱装置
１００Ａ、２００Ａ、３００Ａ、４００Ａ・・・誘導加熱装置の片側部分
１０１、２０１、３０１、４０１・・・容器
１０２、２０２、３０２、４０２・・・コイル
１０２Ａ、２０２Ａ、３０２Ａ・・・リング部分
１０１ａ、１０２ａ、１０３ａ、４０１ａ、４０２ａ、４０３ａ・・・中心軸
１０２ｂ、２０２ｂ、３０２ｂ・・・コイルの一端
１０２ｃ、２０２ｃ、３０２ｃ・・・コイルの他端
１０３、１０３Ａ、１０３Ｂ、２０３、３０３、４０３・・・誘導制御部材
１０４、１０４Ａ、１０４Ｂ、２０４、３０４、４０４・・・駆動機構
１０５、２０５、３０５、４０５・・・断熱材
Ｃ・・・境界線
ｄ、ｄ１、ｄ２、ｄ３、ｄ４・・・離間距離
Ｍ・・・被加熱体
ｔ１・・・側壁の厚み
ｔ２・・・軸方向の長さ
100, 200, 300, 400 ... induction heating device 100A, 200A, 300A, 400A ... one side portion of the induction heating device 101, 201, 301, 401 ... container 102, 202, 302, 402 ... Coils 102A, 202A, 302A ... ring portions 101a, 102a, 103a, 401a, 402a, 403a ... central axes 102b, 202b, 302b ... one end of a coil 102c, 202c, 302c ... the other end of a coil 103, 103A, 103B, 203, 303, 403 ... induction control member 104, 104A, 104B, 204, 304, 404 ... drive mechanism 105, 205, 305, 405 ... insulation material C ... boundary Line d, d1, d2, d3, d4 ... separation distance M ... heated body t1 ... thickness of side wall The length of the 2 ... axis direction
Claims (12)
前記容器の外側に配されたコイルと、
前記コイルに電流を流した際に発生する誘導磁界を制御する誘導制御部材と、
前記誘導制御部材を駆動する駆動機構と、を備えていることを特徴とする誘導加熱装置。 A container for containing the object to be heated;
A coil disposed outside the container;
An induction control member for controlling an induction magnetic field generated when a current is supplied to the coil;
And a drive mechanism for driving the induction control member.
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| JP2005063753A (en) * | 2003-08-08 | 2005-03-10 | Japan Ajax Magnethermic Co Ltd | Induction heating device and induction heating method |
| US20070246459A1 (en) * | 2006-04-24 | 2007-10-25 | Loveless Don L | Electric induction heat treatment of an end of tubular material |
| JP2008103356A (en) * | 2008-01-04 | 2008-05-01 | Matsushita Electric Ind Co Ltd | Induction heating apparatus |
| JP2011178622A (en) * | 2010-03-02 | 2011-09-15 | Sumitomo Electric Ind Ltd | Silicon carbide crystal, and method and apparatus for producing the same, and crucible |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2005063753A (en) * | 2003-08-08 | 2005-03-10 | Japan Ajax Magnethermic Co Ltd | Induction heating device and induction heating method |
| US20070246459A1 (en) * | 2006-04-24 | 2007-10-25 | Loveless Don L | Electric induction heat treatment of an end of tubular material |
| JP2008103356A (en) * | 2008-01-04 | 2008-05-01 | Matsushita Electric Ind Co Ltd | Induction heating apparatus |
| JP2011178622A (en) * | 2010-03-02 | 2011-09-15 | Sumitomo Electric Ind Ltd | Silicon carbide crystal, and method and apparatus for producing the same, and crucible |
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