JP2019113333A - pressure sensor - Google Patents

Abstract

To provide a pressure sensor in which a sensor supporting member made of metal and a cover made of non-metallic material can be fixed to each other highly reliably.SOLUTION: A pressure sensor includes: a sensor element 5; a sensor supporting member 4 made of a metallic material, on which a sensor element 5 is equipped; a terminal 6, passing through the sensor supporting member 4; a case 9 made of a non-metallic material, equipped to the sensor supporting member 4; and an adhesive layer 15 arranged between the sensor supporting member 4 and the case 9. The adhesive layer 15 includes a thicker part 151, a part of which is thicker than the other part, and the side of the thicker part 151 near the case 9 overlaps with a region of the sensor supporting member 4 in the axial direction.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a pressure sensor.

  BACKGROUND Conventionally, pressure sensors for detecting the pressure of a fluid such as liquid or gas are known. For example, the pressure sensor described in Patent Document 1 includes a semiconductor pressure detection element, a base, a receiving member disposed opposite to the base, and a diaphragm interposed between the base and the receiving member, which are provided in the cover. Housed in Here, a pressure receiving space in which oil is enclosed is formed between the base and the diaphragm. The semiconductor pressure detection element is provided on the base in a state of being disposed in the pressure receiving space. The base, the receiving member and the diaphragm are each made of metal. The cover is made of metal such as stainless steel and is joined to the outer peripheral portion of the receiving member by laser welding. The inside of the cover is filled with an epoxy resin or a urethane resin.

JP, 2016-45172, A

  In the pressure sensor described in Patent Document 1, since the cover is made of metal such as stainless steel, it is difficult to reduce the weight. Therefore, it is considered that the cover is made of nonmetal such as resin. However, in the pressure sensor described in Patent Document 1, when the cover is made of non-metal, the cover is fixed to the base only by the adhesive force of the resin filled in the cover. In such a case, if the adhesive strength is lowered, the cover may be detached from the base together with the resin and parts in the cover, which may cause failure.

  An object of the present invention is to provide a pressure sensor capable of reliably fixing a metal sensor support member and a nonmetal cover to each other with high reliability.

An exemplary invention of the present application is a sensor element that outputs a signal according to the pressure of fluid.
A sensor support member having a first main surface on one side and a second main surface on the other side opposite to the first main surface, the sensor element being mounted on the first main surface, and made of a metal material When,
A terminal electrically connected to the sensor element and penetrating the sensor support member from the one side to the other side;
A case made of a non-metallic material attached to the sensor support member and covering the second main surface of the sensor support member;
An adhesive layer disposed between the sensor support member and the case;
The adhesive layer has a portion having a thickness thicker than another portion, and the other side of the thick portion is characterized in that a part of the sensor support member is overlapped in the axial direction. Pressure sensor.

  According to an exemplary invention of the present application, since the sensor support member partially overlaps in the axial direction on the case side (the other side) of the thick portion of the adhesive layer, the sensor effect is supported by the excellent anchor effect of the adhesive layer. It becomes difficult to separate from the member. Therefore, the metal sensor support member and the nonmetal cover can be fixed to each other with high reliability.

FIG. 1 is a longitudinal sectional view (a view cut along an axis ax) showing a schematic configuration of a pressure sensor according to a first embodiment of the present invention. FIG. 2 is a longitudinal sectional view (a partially enlarged view of FIG. 1) showing a sensor support member and a case. FIG. 3 is a longitudinal sectional view schematically showing a fixed state of the sensor support member and the case. FIG. 4 is a longitudinal sectional view schematically showing a fixed state of a sensor support member and a case of a pressure sensor according to a second embodiment of the present invention. FIG. 5 is a longitudinal sectional view schematically showing a fixed state of a sensor support member and a case of a pressure sensor according to a third embodiment of the present invention. 6 is a plan view showing the arrangement of the recess of the sensor support member shown in FIG. FIG. 7 is a plan view schematically showing a sensor support member of a pressure sensor according to a fourth embodiment of the present invention.

  Hereinafter, the pressure sensor of the present invention will be described in detail based on an embodiment shown in the attached drawings.

First Embodiment
FIG. 1 is a longitudinal sectional view (a view cut along an axis ax) showing a schematic configuration of a pressure sensor according to a first embodiment of the present invention. FIG. 2 is a longitudinal sectional view (a partially enlarged view of FIG. 1) showing a sensor support member and a case. First, based on FIG. 1 and FIG. 2, the outline of the pressure sensor 1 shown to these figures is demonstrated.

  In the following, for convenience of explanation, the description will be made using axis ax shown in FIG. 1 as appropriate. Here, the direction parallel to the axis ax (vertical direction in FIG. 1) is "axial direction", the direction orthogonal to the axis ax is "radial direction", and the direction around the axis centered on the axis ax is "circumferential" Say. Further, in the axial direction, the side (attachment member 2 side) closer to the mounting body described later is “one side” or “lower side”, and the far side (opposite side to attachment member 2) is “other side” or “upper side” Say.

  The axis ax is a central axis of the pressure sensor 1, and is a line segment passing through the center of the sensor support member 4 described later and extending in the thickness direction of the sensor support member 4. Also, “upper side” and “lower side” do not indicate the positional relationship and direction when the pressure sensor 1 is actually attached to the mounted body.

  The pressure sensor 1 shown in FIG. 1 is a sensor that is used by being attached to a mount (not shown) and detects the pressure of fluid from the mount. Here, the mounted body is not particularly limited, and is, for example, an on-vehicle control valve used for an automatic transmission (AT) or a continuously variable transmission (CVT) of an automobile. Further, the fluid (fluid to be measured) is not particularly limited, and may be either gas or liquid. Furthermore, conditions such as the type of fluid, temperature, pressure and the like are not limited, but, for example, in the case where the mounted body is the above-described on-vehicle control valve, the fluid is oil such as ATF (Automatic Transmission Fluid).

  The pressure sensor 1 includes, as shown in FIG. 1, an attachment member 2 detachably attached to a mount, a sensor support member 4 joined to the attachment member 2 via a diaphragm 3, and a sensor support member 4. It has the sensor element 5 mounted, and the case 9 attached to the sensor support member 4.

  The mounting member 2 is disposed on one side (lower side) with respect to the sensor support member 4 and has a through hole 21 penetrating along the axial direction. The fluid from the mounted body is introduced into the through hole 21 from the lower side. That is, the through holes 21 constitute a flow path for guiding the fluid from the mounted body toward the sensor element 5. The mounting member 2 also has an external thread 22 disposed along the axial direction, and a head 23 provided at the upper end of the external thread 22. The male screw portion 22 is screwed into a female screw provided on the mounted body. The head 23 has, for example, a hexagonal shape when viewed in the axial direction, and can be sandwiched by a tool such as a spanner.

  With the pressure sensor 1 having such a mounting member 2, the pressure sensor 1 can be attached to the mounting body relatively easily. In addition, the pressure sensor 1 can be removed from the mounted body to perform maintenance and the like. Further, an O-ring 14 made of, for example, rubber is disposed at an end of the male screw portion 22 on the head 23 side. The O-ring 14 can ensure sealing performance between the pressure sensor 1 and the mounted body in a state where the pressure sensor 1 is attached to the mounted body. In addition, the attachment member 2 should just be attached to a to-be-attached body, and is not limited to the form which has the external thread part 22 mentioned above.

  The mounting member 2 is made of a metal material. The metal material is not particularly limited, but for example, stainless steel such as SUS304 is preferably used. By forming the mounting member 2 with such a metal material, the heat resistance of the mounting member 2, resistance to fluid, and the like can be enhanced. The mounting member 2 is manufactured, for example, by casting and cutting.

  The sensor support member 4 is attached to the upper end of the attachment member 2 via the diaphragm 3. Here, the diaphragm 3 and the sensor support member 4 are each made of a metal material such as stainless steel, and are joined to the mounting member 2 by welding.

  As described above, if all of the mounting member 2, the diaphragm 3, and the sensor support member 4 are made of a metal material, for example, when the mounted body is a vehicle-mounted control valve, the measurement of the pressure sensor 1 is performed. Even if the fluid is high temperature oil, the pressure sensor 1 can exhibit excellent durability.

  The diaphragm 3 has a plate shape or a sheet shape, is disposed between the mounting member 2 and the sensor support member 4, and closes the other opening of the through hole 21 of the mounting member 2 described above. Therefore, on the lower side of the diaphragm 3, a first chamber S1 is formed by the through hole 21 of the mounting member 2 described above. Then, the diaphragm 3 is bent and deformed by the pressure of the fluid in the first chamber S1. On the other hand, above the diaphragm 3, a second chamber S <b> 2 is formed between the diaphragm 3 and the sensor support member 4. In the second chamber S2, a sensor element 5 is accommodated, and a pressure transmission medium for transmitting the pressure, which the diaphragm 3 receives from the liquid in the first chamber S1, to the sensor element 5 is filled (accommodated).

  Thus, by transmitting the pressure of the fluid to the sensor element 5 using the diaphragm 3 and the pressure transfer medium, even if the sensor element 5 is not resistant to the fluid, the sensor element 5 is not damaged by the fluid. The pressure of the fluid can be detected while preventing. A liquid is suitably used as the pressure transfer medium. In particular, it is preferable to use, for example, a liquid such as silicone oil as the pressure transfer medium from the viewpoint of reducing the adverse effect on the sensor element 5 and reducing the characteristic change of the pressure transfer medium due to temperature change. It is because silicone oil has good insulation, excellent chemical stability and high boiling point. If the sensor element 5 is resistant to fluid, the diaphragm 3 and the pressure transfer medium may be omitted.

  Further, the sensor support member 4 is formed of a plate having a thickness direction in the axial direction, and is formed, for example, by press processing so that the central portion is dome-shaped toward the other side (upper side). The sensor support member 4 has a first main surface 43 on one side and a second main surface 44 on the other side facing the first main surface 43. The first major surface 43 forms a second chamber S <b> 2 between itself and the diaphragm 3. The sensor element 5 is mounted on the central portion of such a first main surface 43. Here, the sensor element 5 is bonded to the first major surface 43 by an adhesive such as a fluorine-based adhesive.

  The sensor element 5 is an element that outputs a signal according to the pressure reception. Although not shown, the sensor element 5 has, for example, a silicon substrate having a diaphragm in which a piezoresistive element is disposed, and a glass substrate joined to the silicon substrate. A sealed space is formed between these substrates, and the diaphragm is bent and deformed by pressure receiving on the basis of the pressure in the space. Then, the piezoresistive element outputs a signal corresponding to the bending deformation. In addition, the system which detects the bending deformation of the said diaphragm is not limited to the system which used the piezoresistance element, For example, an electrostatic capacitance system etc. may be sufficient.

  Further, the sensor support member 4 has a plurality of through holes 45 opened in the first major surface 43 and the second major surface 44. The terminals 6 pass through the plurality of through holes 45, and the sealing material 7 is filled in the gaps between the wall surfaces defining the through holes 45 and the terminals 6. The terminal 6 is a lead pin, and is made of, for example, a metal material such as an iron-nickel alloy. Lower ends of at least two of the plurality of terminals 6 are connected to the sensor element 5 via bonding wires. The sealing material 7 is made of, for example, a glass material such as borosilicate glass, and seals the gap described above.

  The case 9 is attached to the second major surface 44 of the sensor support member 4. Here, the case 9 is adhered to the second major surface 44 by an adhesive layer 15 such as an epoxy adhesive. Thus, the sensor support member 4 and the case 9 are joined via the adhesive layer 15. Thereby, the case 9 can be fixed to the sensor support member 4. In addition, by filling the gap between the sensor support member 4 and the case 9 with the adhesive layer 15, the sealing performance in the case 9 can be enhanced.

  Here, as shown in FIG. 2, in the portion of the second main surface 44 in contact with the adhesive layer 15, a recess 41 is provided along the circumferential direction. The adhesive layer 15 enters the recess 41 and has a thick portion. Thereby, the adhesion between the sensor support member 4 and the case 9 by the adhesive layer 15 can be enhanced by the anchor effect. The adhesive layer 15 and matters related thereto will be described in detail later.

  As shown in FIG. 2, the case 9 has a bottomed cylindrical case main body 91 that opens downward. The case main body 91 is provided with a concave portion 93 opened to the sensor support member 4 side. Further, as shown in FIG. 1, the case 9 has a recess 131 into which a male connector (not shown) is inserted, and a terminal 12 projecting into the recess 131. The terminal 12 is electrically connected to the terminal 6 described above. The terminal 12 may be directly connected to the terminal 6 or may be connected to the terminal 6 via an electronic component such as a circuit board.

  From the viewpoint of reducing the weight of the case 9, the constituent material of the case 9 may be a nonmetal material and may be a ceramic material or the like, but is preferably a resin material. By making the case 9 out of a resin material, not only the weight reduction of the case 9 can be achieved, but even if the shape of the case 9 is complicated, for example, the case 9 can be formed easily and accurately by injection formation. be able to. Moreover, the adhesiveness by the adhesive bond layer 15 of case 9 can also be improved. The resin material is not particularly limited, and examples thereof include PPS (polyphenylene sulfide) resin and the like which are excellent in heat resistance. In addition, fibers such as glass fibers and carbon fibers, and inorganic fillers such as alumina particles and zirconia particles may be added to the resin material.

  The outline of the pressure sensor 1 has been described above. As described above, the pressure sensor 1 includes the sensor element 5 that outputs a signal according to the pressure of the fluid, the sensor support member 4 on which the sensor element 5 is mounted, and the sensor support member 4 from one side to the other side. It has the terminal 6 penetrated, the case 9 attached to the sensor support member 4, and the adhesive layer 15 disposed between the sensor support member 4 and the case 9.

  Here, the sensor support member 4 has a first main surface 43 on one side and a second main surface 44 on the other side facing the first main surface 43, and is made of a metal material. The sensor element 5 is mounted on the central portion of the first major surface 43. Moreover, the terminal 6 penetrates the sensor support member 4 from one side to the other side. On the other hand, the case 9 covers the second main surface 44 of the sensor support member 4 and is made of a nonmetallic material. The adhesive layer 15 has a portion 151 thicker in part than the other portion, and a part of the sensor support member 4 in the axial direction on the case 9 side (the other side) of the thick portion 151 overlapping. As a result, the adhesive layer 15 is less likely to peel off from the sensor support member 4 due to the excellent anchor effect. Therefore, the metal sensor support member 4 and the nonmetal case 9 can be fixed to each other with high reliability. Hereinafter, based on FIG. 3, the adhesive layer 15 and the matters related thereto will be described in detail.

FIG. 3 is a longitudinal sectional view schematically showing a fixed state of the sensor support member and the case.
As shown in FIG. 3, the second main surface 44 of the sensor support member 4 is shaped such that the central portion is dome-shaped upward in the axial direction. The portion of the second main surface 44 joined to the case 9 through the adhesive layer 15 has a side surface inclined with respect to the axial direction. The side surface is provided with a recess 41 having a substantially rectangular shape in a cross section (hereinafter, referred to as a “longitudinal section”) cut along a plane including the axis ax. Then, a part of the adhesive layer 15 is in the recess 41. Thus, the adhesive layer 15 has a portion 151 (thickness t2) thicker than the other portions of the thickness t1. The thicknesses t1 and t2 are the length of the adhesive layer 15 in the opposing direction of the sensor support member 4 and the case 9 in the region (adhesion region) sandwiching the adhesive layer 15.

  Thus, the sensor support member 4 has a recess 41 that accommodates part of the thick portion 151. Thereby, the contact area of the adhesive layer 15 and the sensor support member 4 can be enlarged. Therefore, the anchor effect of the adhesive layer 15 to the sensor support member 4 can be enhanced. In addition, the longitudinal cross-sectional shape of the recessed part 41 is not limited to the shape of illustration.

  Here, the recess 41 opens radially outward, and a part of the sensor support member 4 overlaps the upper side of the thick portion 151 in the vertical direction. This can prevent the thick portion 151 from moving upward relative to the sensor support member 4. Therefore, the adhesive layer 15 can be made difficult to peel off from the sensor support member 4. Further, the concave portion 41 opened radially outward has an advantage that it can be easily formed by processing such as lathe cutting and press processing.

  The concave portion 41 (thick portion 151) may be disposed in at least a part of the sensor support member 4 in the circumferential direction, but preferably extends along the circumferential direction. Thereby, the contact area of an adhesive bond layer and a case can be enlarged. Therefore, the anchor effect of the adhesive layer to the case can be enhanced. From the viewpoint of enhancing the anchoring effect, the recess 41 is preferably disposed over the entire area in the circumferential direction. When the recess 41 is disposed in a part of the sensor support member 4 in the circumferential direction, a plurality of recesses 41 (grooves) having a linear shape when viewed from the axial direction are disposed on the side surface of the sensor support member 4 can do.

  The thickness t2 of the thick portion 151, in other words, the sum of the thickness t1 of the other portion of the adhesive layer 15 and the depth of the recess 41 is not particularly limited, but the thickness t1 of the other portion of the adhesive layer 15 The ratio is preferably 1.1 times or more and 5 times or less, and more preferably 1.2 times or more and 3 times or less. Thereby, the anchor effect mentioned above can be heightened. On the other hand, when the thickness t2 is too thin, the above-mentioned anchor effect tends to be sharply reduced. On the other hand, even if the thickness 2 is too thick, the above-described anchor effect does not increase further, which makes it difficult to manufacture the sensor support member 4 and reduces the mechanical strength of the sensor support member 4.

  The length of the recess 41 in the axial direction is not particularly limited, but is preferably 0.1 times to 5 times the thickness t2 from the viewpoint of enhancing the above-described anchor effect, and 1 time It is more preferable that it is 3 times or more.

  Further, from the viewpoint of enhancing the anchor effect described above, it is preferable that the surfaces of the sensor support member 4 and the case 9 be roughened to the adhesion region. Although the method of this surface roughening is not specifically limited, For example, a blasting process, an etching process, cutting etc. are mentioned.

  The constituent material (adhesive agent) of the adhesive layer 15 is not particularly limited, but it is preferable to use a curable (heat-curable, photo-curable, anaerobic-curable, etc.) adhesive such as an epoxy adhesive or an acrylic adhesive. In particular, it is preferable to use a thermosetting adhesive. That is, the adhesive layer 15 preferably contains a curable resin. Thereby, durability, adhesiveness, etc. of the adhesive layer 15 can be made excellent. In addition, fibers such as glass fibers and carbon fibers, and inorganic fillers such as alumina particles and zirconia particles may be added to the adhesive layer 15.

Second Embodiment
FIG. 4 is a longitudinal sectional view schematically showing a fixed state of a sensor support member and a case of a pressure sensor according to a second embodiment of the present invention. Hereinafter, although 2nd Embodiment shown in FIG. 4 is described, the description is abbreviate | omitted about the matter similar to 1st Embodiment mentioned above. In FIG. 4, the same components as those in the above-described embodiment are denoted by the same reference numerals.

  The pressure sensor 1A shown in FIG. 4 has the case 9A in place of the case 9 of the first embodiment, and the sensor support member 4 and the case 9A are joined via the adhesive layer 15A as described above. The configuration is the same as that of the first embodiment. The portion of the case 9A joined to the sensor support member 4 via the adhesive layer 15 has a first surface which is a side surface inclined with respect to the axial direction, and a second surface orthogonal to the axial direction. The first surface is provided with a recess 94 whose vertical cross section is a right triangle, and the second surface is provided with a recess 95 whose vertical cross section is an isosceles triangle. Then, a part of the adhesive layer 15A is intruded into the concave portions 94 and 95, respectively. Thus, the adhesive layer 15A has a portion 152 (thickness t3) thicker than the other portions of the thickness t1 and a portion 153 (thickness t4) thicker than the other portions of the thickness t1.

  Thus, the case 9A has the concave portions 94 and 95 for housing a part of the adhesive layer 15A. Thereby, the contact area of adhesive agent layer 15A and case 9A can be enlarged. Therefore, the anchor effect of adhesive layer 15A to case 9A can be heightened. In the illustrated configuration, the positions and ranges in the axial direction of the recess 94 and the recess 41 coincide with each other, but the present invention is not limited thereto, and these positions may be offset in the axial direction. May be different from each other.

  Also in the second embodiment as described above, as in the first embodiment described above, the metal sensor support member 4 and the nonmetal case 9 can be fixed to each other with high reliability.

Third Embodiment
FIG. 5 is a longitudinal sectional view schematically showing a fixed state of a sensor support member and a case of a pressure sensor according to a third embodiment of the present invention. 6 is a plan view showing the arrangement of the recess of the sensor support member shown in FIG. Hereinafter, although 3rd Embodiment shown to FIG. 5 and FIG. 6 is described, the description is abbreviate | omitted about the matter similar to 1st Embodiment mentioned above. In FIGS. 5 and 6, the same components as those of the above-described embodiment are denoted by the same reference numerals.

  The pressure sensor 1B shown in FIGS. 5 and 6 has a sensor support member 4B in place of the sensor support member 4 of the first embodiment, and the sensor support member 4B and the case 9 are joined via the adhesive layer 15B. Except for the above, the configuration is the same as that of the first embodiment described above. The portion of the second main surface 44 of the sensor support member 4B joined to the case 9 via the adhesive layer 15B is a second surface orthogonal to the first surface, which is a side surface inclined with respect to the axial direction And. In such first and second surfaces, a plurality of recesses 42 are provided. Each recess 42 is disposed across the first surface and the second surface. Moreover, as shown in FIG. 6, the several recessed part 42 is arrange | positioned along with the circumferential direction. Then, a part of the adhesive layer 15B is intruded in each of the concave portions 42. Thus, the adhesive layer 15B has a portion 154 (thickness t5) thicker than the other portions of the thickness t1.

  Thus, the sensor support member 4B has a recess 42 that accommodates a portion of the thick portion 154. Thus, the contact area between the adhesive layer 15B and the sensor support member 4B can be increased. Therefore, the anchor effect of adhesive layer 15B to sensor support member 4B can be heightened. In addition, although the number of the recessed parts 42 is four in FIG. 6, it is not limited to this, The number of the recessed parts 42 may be one or more and three or less or five or more. Moreover, although the recessed part 42 is arrange | positioned by equal angle intervals along the circumferential direction in FIG. 6, arrangement | positioning of the recessed part 42 is not limited to this. Further, the shape of the recess 42 is not limited to the illustrated shape.

  Here, the concave portion 42 has a portion 421 whose width is narrowed toward the opening side. In other words, the width of the recess 42 has a portion that widens toward the bottom of the recess 42. Thereby, the said part of adhesive bond layer 15B becomes difficult to remove from the recessed part 42 of the sensor support member 4B. Therefore, the anchor effect of adhesive layer 15B to sensor support member 4B can be heightened.

  Also in the third embodiment as described above, as in the first embodiment described above, the metal sensor support member 4 and the nonmetal case 9B can be fixed to each other with high reliability.

Fourth Embodiment
FIG. 7 is a plan view schematically showing a sensor support member of a pressure sensor according to a fourth embodiment of the present invention. Hereinafter, although 4th Embodiment shown in FIG. 7 is described, the description is abbreviate | omitted about the matter similar to 1st Embodiment mentioned above. In FIG. 7, the same components as those in the above-described embodiment are denoted by the same reference numerals.

  The pressure sensor 1C shown in FIG. 7 is configured in the same manner as the third embodiment described above, except that it has a sensor support member 4C instead of the sensor support member 4B of the third embodiment. The sensor support member 4C is the same as the sensor support member 4B of the third embodiment except that the sensor support member 4C has a recess 47 in place of the recess 42 of the third embodiment.

  The recess 47 is circular when viewed in the axial direction, and the width of the recess 47 has a portion 471 that widens toward the bottom of the recess 47. Thereby, the same effect as the concave portion 42 of the first embodiment described above is obtained. The shape, the arrangement, the number, and the like of the recesses 47 are not limited to the illustrated shapes, the arrangement, and the number, and the like.

  Also in the fourth embodiment as described above, as in the first embodiment described above, the metal sensor support member 4 and the nonmetal case 9 can be fixed to each other with high reliability.

  Although the pressure sensor of the present invention has been described above based on the illustrated embodiment, the present invention is not limited to this, and the configuration of each part may be replaced with an arbitrary configuration having the same function. Can. In addition, any other component may be added to the present invention.

DESCRIPTION OF SYMBOLS 1 ... pressure sensor 1A ... pressure sensor 1B ... pressure sensor 1C ... pressure sensor 2 ... attachment member 3 ... diaphragm 4 ... sensor support member 4B ... sensor support member 4C ... sensor support member 5 ... sensor element 6 ... terminal 7 ... sealing material 9: Case 9A: Case 9B: Case 12: Terminal 14: O ring 15: Adhesive layer 15A: Adhesive layer 15B: Adhesive layer 21: Through hole 22: Male thread 23: Head 41: Recess 42: Recess 43: first main surface 44: second main surface 45: through hole 47: concave portion 91: case main body 93: concave portion 94: concave portion 95: concave portion 131: concave portion 151: portion 152: portion 153: portion 154 ... portion 421: portion 421 471 ... part S1 ... first chamber S2 ... second chamber ax ... axis

Claims (10)

A sensor element that outputs a signal according to the pressure of the fluid;
A sensor support member having a first main surface on one side and a second main surface on the other side opposite to the first main surface, the sensor element being mounted on the first main surface, and made of a metal material When,
A terminal electrically connected to the sensor element and penetrating the sensor support member from the one side to the other side;
A case made of a non-metallic material attached to the sensor support member and covering the second main surface of the sensor support member;
An adhesive layer disposed between the sensor support member and the case;
The adhesive layer has a portion having a thickness thicker than another portion, and the other side of the thick portion is characterized in that a part of the sensor support member is overlapped in the axial direction. Pressure sensor.   The pressure sensor according to claim 1, wherein the sensor support member has a recess that accommodates a part of the thick portion.   The pressure sensor according to claim 2, wherein the width of the recess has a portion that widens toward the bottom of the recess.   The pressure sensor according to any one of claims 1 to 3, wherein the case has a recess for housing a part of the adhesive layer.   The pressure sensor according to any one of claims 1 to 4, wherein the thick portion extends along a circumferential direction of the sensor support member or the case.   The pressure sensor according to any one of claims 1 to 5, wherein the adhesive layer contains a curable resin.   The pressure sensor according to any one of claims 1 to 6, wherein the nonmetallic material is a resin material.   The flow path which arrange | positions the said one side with respect to the said sensor support member, and which guide | induces the said fluid to the said sensor element is provided, It has an attachment member removably attached to a to-be-attached body. The pressure sensor according to item 1. A diaphragm disposed between the mounting member and the sensor support member;
9. The pressure sensor according to claim 8, further comprising: a pressure transmission medium accommodated in a space formed between the diaphragm and the sensor support member and transmitting the pressure of the fluid applied to the diaphragm to the sensor element. . 10. The pressure sensor according to claim 8, wherein the mounting body is a control valve for use in a vehicle.