JP2019105631A - Vibrating-mass gyroscope system - Google Patents

Abstract

To provide a vibrating-mass gyroscope system capable of obtaining a rotation of a vibrating mass about each of three orthogonal axes by only one system.SOLUTION: The gyroscope system includes: a vibrating mass 60; multiple electrodes 66, 68, 70 each arranged to provide one of a driving force and a force rebalance in the direction of each of three orthogonal axes; and a gyroscope controller that provides a drive signal to a first electrode 66 to facilitate an in-plane periodic oscillatory motion of the vibrating mass 60 along a first axis X of the three orthogonal axes. The gyroscope controller also generates a force-rebalance signal provided to each of a second electrode 68 and a third electrode 70 associated with a second axis Y and a third axis Z, respectively, of the three orthogonal axes to calculate a rotation of the gyroscope system about the respective second axis Y and third axis Z of the three orthogonal axes.SELECTED DRAWING: Figure 2

Description

  The present invention relates generally to sensor systems, and more particularly to a vibrating mass gyroscope system.

  There are many different types of vibrating mass gyroscope systems that can be configured to determine rotation about a sensitive (e.g., input or sensing) axis. One type of gyroscope is the Coriolis vibration gyroscope (CVG). For example, there are many CVGs, such as vibrating mass gyroscopes and tuning fork gyroscopes. As an example, in CVG, at least one mass may oscillate in a plane along the drive axis. In response to an angular velocity applied about an input axis parallel to the vibrating mass, the Coriolis force causes the vibrating mass to vibrate out of plane (eg, 90 ° with respect to the drive axis) along the sensing axis. The amplitude of out-of-plane motion in an open-loop instrument, or the force required to rebalance in an open-loop instrument to zero out-of-plane motion, corresponds to the magnitude of the angular velocity applied about the input axis. obtain.

  One embodiment includes a gyroscope system. The system comprises an oscillating mass and a plurality of electrodes, each arranged to provide the oscillating mass with one of a driving force and a force-rebalance in each of three orthogonal axes. And a sensor system. The system also provides a driving force by generating a drive signal applied to the first of the group of electrodes to provide in-plane periodic vibration of the vibrating mass along the first of three orthogonal axes. A gyroscope controller is included to facilitate in-plane periodic motion. Also, the gyroscope controller may be configured to apply a force to each of the second and third electrodes of the plurality of electrodes respectively associated with the second and third axes of the three orthogonal axes. A rebalance signal is generated to determine rotation of the gyroscope system about each of the second and third axes of the three orthogonal axes.

  Another embodiment includes a method for measuring rotation about each of three orthogonal axes via a gyroscope system. The method comprises applying a drive signal to the first electrode in a first period to apply a drive force to the vibrating mass along a first of three orthogonal axes; and in the first period , Applying a first force rebalance signal to a second electrode to apply a first force rebalance to the vibrating mass in a direction of a second one of the three orthogonal axes, the first force rebalance signal Determining the rotation of the gyroscope system about the second axis based on Also, the method applies a second force rebalance signal to the third electrode during the first period to cause the second force rebalance to be directed to the vibrating mass in the direction of the third of the three orthogonal axes. Determining the rotation of the gyroscope system about the third axis based on the second force rebalance signal, and providing the drive signal to the second electrode in the second period, Applying a driving force to the vibrating mass along a second axis. The method applies a first force rebalance signal to the first electrode during a second time period to apply a first force rebalance to the vibrating mass in a direction of a first axis, and a first force rebalance The method further includes determining rotation of the gyroscope system about the first axis based on the signal.

  Another embodiment includes a gyroscope system. The gyroscope system includes a first sensor system. The first sensor system includes a first vibrating mass, a first driving force in a direction of a first of three orthogonal axes, and a first force rebalance in a third of three orthogonal axes. A first set of electrodes, arranged to provide a first vibrating mass in the direction of two axes and in the direction of the third of three orthogonal axes, with a second force rebalance Equipped with The system also includes a second sensor system. The second sensor system has a second vibrating mass, a second driving force in the direction of the second axis, a third force rebalance in the direction of the first axis, and a fourth force rebalance And a second set of electrodes arranged to provide the second vibrating mass in the direction of the third axis. The system further includes a gyroscope controller. The gyroscope controller provides respective first and second drive forces by generating a first drive signal and a second drive signal provided to each of the first and second sets of electrodes, Facilitating in-plane periodic oscillatory motion of the first and second vibrating masses along respective first and second axes to generate a first force rebalance signal provided to the first set of electrodes Determining the rotation of the gyroscope system about the respective second and third axes, generating a second force rebalance signal to be applied to the second set of electrodes, and the respective first and third Configured to determine the rotation of the gyroscope system about the axis of.

FIG. 1 shows an example of a vibrating mass gyroscope system. FIG. 2 shows an example of a sensor system. FIG. 3 shows an illustrative example of the movement of the sensor system. FIG. 4 shows another example of a sensor system. FIG. 5 shows another illustrative example of the movement of the sensor system. FIG. 6 shows another example of a gyroscope system. FIG. 7 shows yet another example of a gyroscope system. FIG. 8 shows another illustrative example of the movement of the sensor system. FIG. 9 shows an illustrative example of the first calibration period. FIG. 10 shows an illustrative example of the second calibration period. FIG. 11 shows an illustrative example of the third calibration period. FIG. 12 shows an illustrative example of the fourth calibration period. FIG. 13 shows an illustrative example of the fifth calibration period. FIG. 14 shows an illustrative example of the sixth calibration period. FIG. 15 shows an illustrative example of the seventh calibration period. FIG. 16 shows an illustrative example of the eighth calibration period. FIG. 17 shows an illustrative example of a ninth calibration period. FIG. 18 illustrates an example of a method for measuring rotation about each of three orthogonal axes via a gyroscope system.

  The present invention relates generally to sensor systems, and more particularly to a vibrating mass gyroscope system. The vibrating mass gyroscope system includes a sensor system and a gyroscope controller. The sensor system may include at least one vibrating mass, which may be configured as a substantially flat vibrating mass, and a set of electrodes. The electrodes receive a drive signal from the gyroscope controller and provide a driving force of the vibrating mass along a first of three orthogonal axes to provide an in-plane vibrating motion of the vibrating mass. May be included. The electrodes also include a second electrode receiving a first force rebalance signal provided by the gyroscope controller and a third electrode receiving a second force rebalance signal provided by the gyroscope controller, the vibration Force rebalance of the mass may be provided for each of the second and third axes of the three orthogonal axes. As a result, the gyroscope controller may determine rotation about the second and third axes of the gyroscope system based on the force rebalance signal (e.g., based on the amplitude of the force rebalance signal). Only one sensor system may control the driving and / or force rebalancing of each of the three orthogonal axes of the vibrating mass.

  As an example, the gyroscope system may include multiple sensor systems. The gyroscope controller provides drive to the respective vibrating masses along separate axes by applying drive signals to each of the sensor systems, and for each of the sensor systems, forces are applied to the other axes of the three orthogonal axes. It may be configured to provide a rebalance signal. As a result, the gyroscope controller may determine rotation of the gyroscope system about three orthogonal axes based on the separate force rebalance signals applied to the three orthogonal axes. Furthermore, the gyroscope controller may be configured to alternate the axes along which the drive signals (and hence also the force rebalance signal) applied to each of the sensor systems are respectively. As a result, a given sensor system may be configured to facilitate determining rotation of the gyroscope system about three orthogonal axes in different time periods. Further, for multiple sensor systems, rotation about a given axis of the gyroscope system is calculated differentially in two separate time periods to allow rotation relative to that axis of the gyroscope system. It may facilitate calibration of the sensor system.

  FIG. 1 illustrates an example vibrating mass gyroscope system 10. The vibrating mass gyroscope system 10 may be implemented in various applications where accurate measurement of rotation may be required, such as aeronautics and voyages. The vibrating mass gyroscope system 10 includes a sensor system 12 and a gyroscope controller 14.

  Sensor system 12 includes at least one vibrating mass 16 that may be configured as a substantially flat inertial mass. As an example, the vibrating mass 16 is configured as an even quantity (e.g., four) vibrating masses arranged in pairs. For example, the vibrating mass 16 may be fabricated as a single layer of silicon and may be made generally square to allow in-plane movement along three orthogonal axes. In the example of FIG. 1, the sensor system 12 includes one or more sets of X-axis electrodes 18, one or more sets of Y-axis electrodes 20, and one or more sets of Z-axis electrodes 22. Each of the X, Y and Z axis electrodes 18, 20, 22 is connected to a respective one of the vibrating masses 16, such that each of the vibrating masses 16 is X, Y, and Z axis electrodes 18, 20, 22 may be associated with each respective set.

  By way of example, the set of X, Y and Z axis electrodes 18, 20, 22 are arranged around the vibrating mass 16 and the in-plane periodic oscillatory movement and force of the vibrating mass 16 in each of the three orthogonal axes are oriented. May provide rebalancing. For example, each of the sets of X, Y, and Z axis electrodes 18, 20, 22 may include capacitively coupled electrode pairs. These electrode pairs generate an electrostatic attractive force on the vibrating mass 16 to move the vibrating mass 16 to the fixed housing (for example, the X, Y and Z axis electrodes 18, 20, 22 are connected). Configured to move the As used herein, at a given time during operation of sensor system 12, one of X, Y, and Z axis electrodes 18, 20, 22 vibrates to facilitate in-plane periodic oscillatory movement. The drive force applied to mass 16 corresponds to the drive axis along which the other two of X, Y and Z axis electrodes 18, 20, 22 are centered about the respective sense axes of gyroscope system 10 It may correspond to a sensing axis for determining rotation.

  Gyroscope controller 14 is configured to receive pickoff signal PO, which may be associated with X, Y and Z axis electrodes 18, 20, 22 collectively, to provide force rebalancing of vibrating mass 16. The gyroscope controller 14 also generates one or more drive signals DRV to be applied to one of the set of X, Y and Z axis electrodes 18, 20, 22 in a given time period, Electrostatic forces may be generated to provide in-plane periodic oscillatory motion of the vibrating mass 16 along respective drive axes associated with one of the orthogonal axes. For example, the drive signal DRV may be a resonant frequency associated with one or more flexures that connect the vibrating mass 16 to the corresponding housing to which the X, Y and Z axis electrodes 18, 20, 22 are connected. Can have a frequency approximately equal to By way of example, as will be described in more detail herein, in the case of a plurality of vibrating masses 16, an in-plane periodic oscillatory motion 180 ° out of phase is provided for each given pair of vibrating masses 16. The counteracting motion of the vibrating mass 16 can be provided. Thus, as described herein, the sensor system 12 responds to the drive signal DRV to which the vibrating mass 16 is applied to any of the respective X, Y and Z axis electrodes 18, 20, 22. When driven along any of the three orthogonal axes, it is configured to be driven in substantially the same manner in either case.

Also, the gyroscope controller 14 drives each of the drive signals DRV by generating a force rebalance signal FRB applied to the other two sets of X, Y and Z axis electrodes 18, 20, 22. An electrostatic force is generated along each sense axis orthogonal to the axis, and responsive to rotation about each sense axis of the sensor system 12 (eg, in response to the sense pickoff signal PO) a vibrating mass Sixteen sense pickoffs and movement are configured to be zero. For example, the force rebalance signal FRB is not received the driving signals DRV X, Y, and Z-axis electrode first force rebalance signal FRB ₁ and the second given to each two of the 18, 20, 22 It may include a force rebalance signal FRB _2. As an example, the force rebalance signal FRB may have a frequency approximately equal to the frequency of the drive signal DRV (e.g. approximately equal to the resonance frequency of the corresponding bending portion).

  The drive signal DRV and the force rebalance signal FRB may be generated with an amplitude based on the demodulation pickoff signal shown as the signal PO in the example of FIG. As an example, the demodulation sense pickoff signal PO may have a frequency (e.g., an order of magnitude or more) significantly greater than the frequency of the force rebalance signal FRB. Thus, rotation of the sensor system 12 about a given axis may result in Coriolis force-induced motion of the vibrating mass 16 that is orthogonal to the in-plane periodic oscillatory motion associated with the drive axis. Thus, the electrostatic force generated by the force rebalance in the direction of the other two orthogonal axes in response to the force rebalance signal FRB forces the vibrating mass 16 to be maintained at a zero position along its respective sensing axis. obtain. As used herein, the term "zero position" corresponds to the position of the vibrating mass 16 along the sensing axis that corresponds to the approximately zero value associated with the demodulated pickoff signal.

  The gyroscope controller 14 includes a processor 24, a signal generator 26, and a demodulator system 28. The signal generator 26 is configured to generate the drive signal DRV and the force rebalance signal FRB applied to the X, Y and Z axis electrodes 18, 20, 22. In response to the application of drive signal DRV and force rebalance signal FRB, pickoff signal PO is provided to demodulator system 28. As an example, pickoff signal PO may correspond to an amplitude modulated pickoff signal capacitively coupled to X, Y and Z axis electrodes 18, 20, 22 in response to movement of vibrating mass 16. Thus, the pickoff signal PO is demodulated via the demodulator system 28 to determine the appropriate magnitude of the respective drive signal DRV and / or the force rebalance signal FRB, and thus the faces of the vibrating mass 16 respectively. The inner periodic oscillatory motion may be maintained, and the oscillating mass 16 may be maintained at the zero position on the sensing axis.

  In this manner, processor 24 may determine the magnitude of force rebalance signal FRB to indicate an angular rotational velocity about each sensing axis of sensor system 12. As an example, the magnitude of the force rebalance signal FRB required to maintain the vibrating mass 16 at a zero position along a given one of the sensing axes, and thus the electrostatic force, may be detected by each sensing of the sensor system 12 It can correspond to rotational speeds about an axis. Thus, the magnitude of the force rebalance signal FRB may be implemented by the processor 24 to determine an angular rotation about the respective sensing axis of the sensor system 12. Thus, the gyroscope controller 14 may provide a measure of the angular velocity of rotation about the respective sense axis as the output signal ROT.

  FIG. 2 shows an example sensor system 50. Sensor system 50 may correspond to sensor system 12 in the example of FIG. Therefore, reference is made to the example of FIG. 1 in the example of FIG. 2 below.

  Sensor system 50 is shown in two orthogonal plan views 52 and 54, as shown by Cartesian coordinate systems 56 and 58. Sensor system 50 includes a vibrating mass 60 connected to housing 62 via a group 64 of spring flexures. Although the example of FIG. 2 shows that the vibrating mass 60 is connected to each of the inner walls of the housing 62 via a pair of spring curved portions 64, the curved portions 64 have any configuration. obtain. The group of flexures 64 is configured to facilitate movement of each of the three orthogonal axes relative to the housing 62 of the vibrating mass 60 in response to electrostatic and / or Coriolis forces. Furthermore, sensor system 50 also includes sets of electrodes, shown as X-axis electrode 66, Y-axis electrode 68, and Z-axis electrode 70 in the example of FIG. In order to simplify the drawing, the Z-axis electrode 70 is not seen in the first plan view 52, and the Y-axis electrode is not seen in the second plan view 54.

  Thus, as shown in the example of FIG. 2, the sensor system 50 is generally symmetrical about each of the three orthogonal axes, and the drive signal DRV is given multiple sets of electrodes 66, 68 at one time. , And 70, with its axis as the drive axis, and in-plane periodic oscillatory motion along that axis, and thus the other of the sets of electrodes 66, 68, and 70 , Each of which is based on applying the respective force rebalance signal to the other two of the plurality of sets of electrodes 66, 68, and 70, rotation about the respective sensing axes of the sensor system 50. Can correspond to a sensing axis for determining

  FIG. 3 shows an illustrative example 100 of the movement of the sensor system 50. The illustration 100 shows the sensor system 50 and the relevant components of the sensor system 50. Thus, in the example of FIG. 3 below, like reference numerals are used and reference is made to FIGS.

The illustration 100 comprises a first movement 102 of the sensor system 50. In the first movement 102, the drive signal DRV is given to the X-axis electrode 66, and the in-plane periodic vibration movement along the X-axis of the vibrating mass 60 (+ X direction shown in 102 and -X direction shown in 102) give. As an example, drive signal DRV may include a single signal applied to one of X-axis electrodes 66 to provide electrostatic attraction in one phase (eg, + X direction) in one phase, and a spring bending portion Group 64 provides repulsive motion of vibrating mass 60 in the opposite direction in antiphase (eg, 180 °). As another example, the drive signals DRV may include a pair of drive signals DRV that are 180 ° out of phase with each other and provide electrostatic attraction in mutually opposite X axis directions in opposite phases. As an example, the gyroscope controller 14 provides the first force rebalance signal FRB ₁ to the Y-axis electrode 68 while applying the drive signal DRV to the X-axis electrode 66 in the first movement 102, and the second force rebalance giving signal FRB ₂ in the Z-axis electrode 70 may maintain the seismic mass 60 to the zero position along each of Y and Z sense axis.

The illustration 100 comprises a second movement 104 of the sensor system 50. In the second movement 104, the drive signal DRV is given to the Y-axis electrode 68, and the in-plane periodic vibration movement along the Y-axis of the vibrating mass 60 (+ Y direction shown in 104 and -Y direction shown in 104) give. As an example, drive signal DRV may include a single signal that is applied to one of Y-axis electrodes 68 to provide electrostatic attraction in one phase (eg, + Y direction) in one phase, and a spring curve Group 64 provides repulsive motion of vibrating mass 60 in the opposite direction in antiphase (eg, 180 °). As another example, the drive signals DRV may include a pair of drive signals DRV that are 180 ° out of phase with each other and provide electrostatic attraction in opposite Y axis directions in opposite phases. As an example, the gyroscope controller 14 provides the first force rebalance signal FRB ₁ to the X-axis electrode 66 while applying the drive signal DRV to the Y-axis electrode 68 in the second movement 104, and the second force rebalance giving signal FRB ₂ in the Z-axis electrode 70 may maintain the seismic mass 60 to the zero position along each of the X and Z sense axis.

The illustration 100 comprises a third movement 106 of the sensor system 50. In the third movement 106, the drive signal DRV is given to the Z-axis electrode 70, and the in-plane periodic vibration movement along the Z-axis of the vibrating mass 60 (+ Z direction shown in 106 and -Z direction shown in 106) give. As an example, drive signal DRV may include a single signal applied to one of Z-axis electrodes 70 to provide electrostatic attraction in one phase (eg, + Z direction) in one phase, and spring bending. The group of parts 64 provides the recoiling motion of the vibrating mass 60 in the opposite direction in opposite phase (e.g. 180 [deg.]). As another example, the drive signals DRV may include a pair of drive signals DRV that are 180 ° out of phase with each other and provide electrostatic attraction in mutually opposite Z axis directions in opposite phases. As an example, the gyroscope controller 14 provides the first force rebalance signal FRB ₁ to the X-axis electrode 66 while applying the drive signal DRV to the Z-axis electrode 70 in the third movement 106, and the second force rebalance giving signal FRB ₂ in the Y-axis electrode 68 may maintain the seismic mass 60 to the zero position along each of the X and Y sensing axis.

  FIG. 4 shows another example sensor system 150. Sensor system 150 may correspond to sensor system 12 of the example of FIG. Thus, in the example of FIG. 4 below, reference is made to the example of FIG.

  Sensor system 150 is shown in plan view along the Z-axis, as shown by Cartesian coordinate system 152. Sensor system 150 includes four vibrating masses 154 connected to housing 156 via a group of spring flexures 158. In the example shown in FIG. 4, each of the vibrating mass groups 154 is connected to the inner wall of each of the casings 156 through the pair of spring-curved portions 158, but the curved portions 158 may have any configuration. The group of flexures 158 is configured to facilitate movement of each of the three orthogonal axes relative to the housing 156 of the vibrating mass 154 in response to electrostatic and / or Coriolis forces. As an example, the in-plane periodic oscillatory motion of the oscillating mass group 154 is provided 180 ° out of phase for each given oscillating mass group 154 to offset the movement of the oscillating mass 154. Furthermore, the sensor system 150 further includes a plurality of sets of electrodes (in the example of FIG. 4, a plurality of sets of X-axis electrodes 160, a plurality of sets of Y-axis electrodes 162, and a plurality of sets of Z-axis electrodes (example of FIG. Not shown))).

  Thus, as shown in the example of FIG. 4, the sensor system 150 is generally symmetrical about each of three orthogonal axes, and multiple sets of electrodes 160, 162 at one given drive signal DRV. , And a given one of the Z-axis electrodes, with that axis as the drive axis, and in-plane periodic oscillatory motion along that axis, so that the sets of electrodes 160, 162, and Z-axis electrodes are Each of the other two of the sensor axes of the sensor system 150 is based on the application of the respective force rebalance signal to the other two of the plurality of sets of electrodes 160, 162 and Z-axis electrodes. Can correspond to a sensing axis for determining a rotation around.

  FIG. 5 shows an illustrative example 200 of the movement of sensor system 150. Diagram 200 shows sensor system 150 and associated components of sensor system 150. Thus, in the following example shown in FIG. 5, like reference numerals are used and reference is made to FIGS.

The illustration 200 includes the movement of the sensor system 150. In this movement, drive signal DRV is applied to a plurality of sets of X-axis electrodes 160 to provide in-plane periodic vibrational motion along group X of vibration masses 154. In the example of FIG. 5, the vibrating masses 154 are shown to be approximately 180 ° out of phase for each pair of vibrating masses 154 so that each pair of vibrating masses 154 is simultaneously in the + X direction and You are moving in both directions. Similar to the above, the drive signal DRV is applied to a given one of the plurality of sets of X-axis electrodes 160 to provide a single signal that provides electrostatic attraction in one direction (eg, + X direction) in one phase. A group of spring flexures 158 may be included and provide repulsive motion of the vibrating mass 154 in opposite directions in opposite phase (e.g., 180 [deg.]). As another example, the drive signals DRV may include a pair of drive signals DRV that are 180 ° out of phase with each other and provide electrostatic attraction in mutually opposite X axis directions in opposite phases. As an example, the gyroscope controller 14 provides the first force rebalance signal FRB _Y to the multiple sets of Y-axis electrodes 162 while providing the drive signal DRV to the multiple sets of X-axis electrodes 160, and performs the second force rebalance. Signal FRB _Z may be provided to sets of Z-axis electrodes (not shown in the examples of FIGS. 4 and 5) to maintain the vibrating mass 154 at a zero position along each of the Y and Z sensing axes.

  Although the example of FIG. 5 shows only the movement of the vibrating mass group 154 along the X axis, the drive signal DRV is given to a plurality of sets of Y axis electrodes 162 or a plurality of sets of Z axis electrodes. Similar to the explanation in the example, the in-plane periodic oscillatory motion along the Y and Z axes is given.

  Refer again to the example of FIG. As noted above, the gyroscope system 10 provides the drive signal DRV to one of the sets of electrodes 18, 20 and 22 to cause the vibrating mass 16 to move along the corresponding one of the orthogonal axes. By determining the rotational speed ROT about two of the orthogonal axes based on the actuation and by applying a force rebalance signal FRB to the other two sets of electrodes 18, 20 and 22 , Rotation rates ROT about corresponding two orthogonal axes associated with the other two sets of electrodes 18, 20 and 22, respectively. However, because the vibrating mass 16 is configured to be driven along any of the three orthogonal axes, the gyroscope controller 14 changes the drive axis during operation of the gyroscope system 10, thus: The sensing axis of gyroscope system 10 may be configured to change. As a result, one given sensor system 12 is responsive to varying the drive axis in different time periods, and calculates the rotational speed ROT about any two of the orthogonal axes in each of the different time periods. It may be configured to facilitate. As an example, by changing the drive axis based on applying the drive signal DRV to different ones of the plurality of sets of electrodes 18, 20 and 22, the rotational speeds about two other orthogonal axes respectively The measurement of ROT is alternately facilitated, so that one sensor system 12 makes it possible to measure the rotational speed ROT about all three orthogonal axes over different time periods. As another example, implementing multiple sensor systems 12 may facilitate simultaneous calculation of rotational ROT about all three orthogonal axes, as described in more detail herein. And calibration of one or more of the sensor systems 12 may be possible.

  As an example, gyroscope system 10 may include multiple substantially identical sensor systems 12. As one example, gyroscope system 10 may include two substantially identical sensor systems 12. As another example, gyroscope system 10 may include three substantially identical sensor systems 12. For example, the sensor systems 12 may be arranged substantially on a common, ie on the same plane. In one example of multiple sensor systems 12, drive signal DRV may be provided to different sets of electrodes 18, 20 and 22 in each of the different sensor systems 12. Thus, the rotational speed ROT can be determined simultaneously for each of the three orthogonal axes. Furthermore, the rotational speed ROT about at least one of the axes may be determined redundantly. For example, such redundancy may facilitate calibration of each sensor system 12 about a given one of orthogonal axes.

  FIG. 6 shows another example gyroscope system 250. Gyroscope system 250 corresponds to a portion of gyroscope system 10 in the example of FIG. In the example of FIG. 6, gyroscope system 250 includes a first sensor system 252 and a second sensor system 254. By way of example, each of sensor systems 252 and 254 may be configured substantially similar to sensor system 50 in the example of FIG. 2 or sensor system 150 in the example of FIG. Accordingly, in the description of the example of FIG. 6 below, reference is made to the examples of FIGS.

In the example of FIG. 6, the first sensor system 252 is schematically shown to be provided with the X axis drive signal DRV _X1 to facilitate in-plane periodic oscillatory motion along the X axis of the oscillatory mass . Thus, in the example of FIG. 6, the X axis corresponds to the drive axis for the first sensor system 252. The first sensor system 252 is also provided with a Y-axis force rebalance signal FRB _Y1 to facilitate force rebalance in the direction of the Y-axis of the vibrating mass and to receive a Z-axis force rebalance signal FRB _Z1. It is schematically shown that facilitating force rebalance in the direction of the Z axis of the vibrating mass. As a result, the gyroscope controller 14 rotates the first sensor system 252 about the Y and Z axes based on the pickoff signal PO resulting from the Coriolis force acting on the vibrating mass relative to the Y and Z axes. It may be configured to determine the speed for each.

Similarly, the second sensor system 254 is schematically shown to be provided with a Y-axis drive signal DRV _Y2 to facilitate in-plane periodic oscillatory motion along the Y axis of the oscillatory mass. Thus, in the example of FIG. 6, the Y axis corresponds to the drive axis for the second sensor system 254. The second sensor system 254 is also provided with an X-axis force rebalance signal FRB _X2 to facilitate force rebalance in the direction of the X axis of the vibrating mass and to receive a Z-axis force rebalance signal FRB _Z2. It is schematically shown that facilitating force rebalance in the direction of the Z axis of the vibrating mass. As a result, the gyroscope controller 14 rotates the second sensor system 254 about the X and Z axes based on the pickoff signal PO resulting from the Coriolis force acting on the vibrating mass relative to the X and Z axes. It may be configured to determine the speed for each.

As an example, the first and second sensor systems 252 and 254 can simultaneously receive the drive signals DRV _X1 and DRV _Y2 , respectively, and similarly the force rebalance signals FRB _Y1 and FRB _Z1 and the force rebalance signal FRB, respectively. _X2 and FRB _Z2 can be given simultaneously. Thus, gyroscope system 250 may be configured to measure rotational rates ROT about the Y and Z axes based on the force rebalance signals FRB _Y1 and FRB _Z1 associated with the first sensor system 252, And, based on the force rebalance signals FRB _X2 and FRB _Z2 associated with the second sensor system 254, the rotational speed ROT about the X and Z axes may be measured. Thus, gyroscope system 250 may be configured to simultaneously determine the rotational speed of gyroscope system 250 about all three orthogonal axes using only two sensor systems 252 and 254. As a result, gyroscope system 250 may be implemented at lower cost and ease than gyroscope systems that implement separate sensor systems for each orthogonal axis. In addition, the first and second sensor systems 252 and 254 may be fabricated on a common plane, so that the gyroscope system 250 may be fabricated in a more compact and flat configuration to reduce the occupied space.

Further, as noted above, the gyroscope controller 14 changes the drive axis of each of the sensor systems 252 and 254 in each of the different time periods to drive the drive axes of each of the sensor systems 252 and 254, and thus the sense axis, It can be configured to change. As an example, in the example of FIG. 6, the first sensor system 252 is driven along the X axis to measure the rotational speed ROT about the Y axis and the Z axis, and the second sensor system 254 is the Y axis , And the gyroscope controller 14 may change the respective drive axes alternately or simultaneously. For example, gyroscope controller 14 may provide Y axis drive signal DRV _Y1 , X axis force rebalance signal FRB _X1 , and Z axis force rebalance signal FRB _Z1 to first sensor system 252 in a later time period, Z The axis drive signal DRV _Z2 , the X axis force rebalance signal FRB _X2 , and the Y axis force rebalance signal FRB _Y2 may be provided to the second sensor system 254. As a result, in a later period, the first sensor 252 can be driven along the Y axis to measure the rotational speed ROT about the X and Z axes, and the second sensor system 254 can It can be driven along an axis to measure rotational speeds ROT about the X and Y axes. As an example, the gyroscope controller 14 may stop the in-plane periodic oscillatory motion along the drive axis of the previous period based on the force rebalance signal FRB, and when changing the drive axis, two orthogonal axes Before determining the rotational speed ROT about H, we can wait until the vibrating mass is zero along its axis. While one of the sensor systems 252 and 254 changes from one drive axis to another, the other of the sensor systems 252 and 254 continues the rotational speed ROT about two orthogonal axes in real time You can ask for.

  FIG. 7 shows another example gyroscope system 300. Gyroscope system 300 may correspond to a portion of gyroscope system 10 in the example of FIG. In the example of FIG. 7, gyroscope system 300 includes a first sensor system 302, a second sensor system 304, and a third sensor system 306. By way of example, each of sensor systems 302, 304, and 306 may be configured substantially similar to sensor system 50 in the example of FIG. 2 or sensor system 150 in the example of FIG. Accordingly, in the description of the example of FIG. 7 below, reference is made to the example of FIGS.

In the example of FIG. 7, the first sensor system 302 is schematically shown to be provided with an X-axis drive signal DRV _X1 to facilitate in-plane periodic oscillatory motion along the X axis of the oscillatory mass . Thus, in the example of FIG. 7, the X axis corresponds to the drive axis for the first sensor system 302. The first sensor system 302 is also provided with a Y-axis force rebalance signal FRB _Y1 to facilitate force rebalance in the direction of the Y-axis of the vibrating mass and to receive a Z-axis force rebalance signal FRB _Z1. 4 schematically illustrates facilitating force rebalancing in the direction of the Z axis of the vibrating mass. As a result, the gyroscope controller 14 rotates the first sensor system 302 about the Y and Z axes based on the pickoff signal PO resulting from the Coriolis force acting on the vibrating mass relative to the Y and Z axes. It may be configured to determine the speed for each.

Similarly, the second sensor system 304 is schematically shown to be provided with a Y-axis drive signal DRV _Y2 to facilitate in-plane periodic oscillatory motion along the Y axis of the oscillatory mass. Thus, in the example of FIG. 7, the Y axis corresponds to the drive axis for the second sensor system 304. The second sensor system 304 is also provided with an X-axis force rebalance signal FRB _X2 to facilitate force rebalance in the direction of the X axis of the vibrating mass and to receive a Z-axis force rebalance signal FRB _Z2. It is schematically shown that facilitating force rebalance in the direction of the Z axis of the vibrating mass. As a result, the gyroscope controller 14 rotates the second sensor system 304 about the X and Z axes based on the pickoff signal PO resulting from the Coriolis force acting on the vibrating mass relative to the X and Z axes. It may be configured to determine the speed for each.

Similarly, the third sensor system 306 is schematically shown to be provided with the Z-axis drive signal DRV _Z3 to facilitate in-plane periodic oscillatory motion along the Z-axis of the oscillatory mass. Thus, in the example of FIG. 7, the Z-axis corresponds to the drive axis for the third sensor system 306. The third sensor system 306 is also provided with an X-axis force rebalance signal FRB _X3 to facilitate force rebalance in the direction of the X axis of the vibrating mass and to receive a Y-axis force rebalance signal FRB _Y3. It is schematically shown that facilitating force rebalance in the direction of the Y axis of the vibrating mass. As a result, the gyroscope controller 14 rotates the third sensor system 306 about the X and Y axes based on the pickoff signal PO resulting from the Coriolis force acting on the vibrating mass relative to the X and Y axes. It may be configured to determine the speed for each.

As an example, sensor systems 302, 304, and 306 may simultaneously receive drive signals DRV _X1 , DRV _Y2 , and DRV _Z3 , respectively, and similarly, force rebalance signals FRB _Y1 and FRB _Z1 , force rebalance signal FRB _X2 And FRB _Z2 , and the force rebalance signals FRB _X3 and FRB _Y3 can be provided simultaneously. Thus, gyroscope system 300 may be configured to measure rotational rates ROT about Y and Z axes based on force rebalance signals FRB _Y1 and FRB _Z1 associated with first sensor system 302. , Based on the force rebalance signals FRB _X2 and FRB _Z2 associated with the second sensor system 304, the rotational speed ROT about the X and Z axes may be measured and associated with the third sensor system 306 Based on the force rebalance signals FRB _X3 and FRB _Y3 , the rotational speed ROT about the X and Y axes can be measured. Thus, gyroscope system 300 may be configured to simultaneously determine the rotational speed of gyroscope system 300 about all three orthogonal axes. Furthermore, the sensor systems 302, 304, and 306 may be fabricated on a common plane so that the gyroscope system 300 may be fabricated in a compact and flat configuration to reduce footprint.

Further, as noted above, the gyroscope controller 14 changes the drive axis of each of the sensor systems 302, 304, and 306 in each of the different time periods to drive the drive axes of each of the sensor systems 302, 304, and 306; And thus the sensing axis may be configured to change. As an example, in the example of FIG. 7, the first sensor system 302 is driven along the X axis to measure the rotational speed ROT about the Y axis and the Z axis, and the second sensor system 304 is the Y axis. Is driven to measure the rotational speed ROT around the X and Z axes, and the third sensor system 306 is driven along the Z axis and the rotational speed ROT around the X and Y axes. Indicates to measure. However, as noted above, gyroscope controller 14 may change the respective drive axes alternately or simultaneously. For example, gyroscope controller 14 may provide Y-axis drive signal DRV _Y1 , X-axis force rebalance signal FRB _X1 , and Z-axis force rebalance signal FRB _Z1 to first sensor system 302 in a later time period, Z An axis drive signal DRV _Z2 , an X axis force rebalance signal FRB _X2 , and a Y axis force rebalance signal FRB _Y2 may be provided to the second sensor system 304, and an X axis drive signal DRV _X3 and a Y axis force rebalance signal FRB _Y3. And a Z-axis force rebalance signal FRB _Z3 may be provided to the third sensor system 306. As a result, in a later period, the first sensor 302 may be driven along the Y axis to measure the rotational speed ROT about the X and Z axes, and the second sensor system 304 may Driven along an axis to measure rotational speeds ROT about the X and Y axes, a third sensor system 306 is driven along the X axis and centered on the Y and Z axes. The rotational speed ROT can be measured. Thus, as described in more detail herein, one of the sensor systems 302, 304, and 306 changes from one drive axis to another, but the sensor systems 302, 304, and 306 The other two together may continuously determine the rotational speed ROT about the three orthogonal axes in real time to provide continuous operation.

  FIG. 8 shows another illustrative example 350 of the movement of sensor systems 352, 354 and 356. The illustration 350 may correspond to the gyroscope system 300 of the example of FIG. Here, the first sensor system 352 corresponds to the first sensor system 302, the second sensor system 354 corresponds to the second sensor system 304, and the third sensor system 356 is a third. It corresponds to the sensor system 306. Therefore, in the description of the example of FIG. 8 below, reference is made to the example of FIG.

The illustration 350 includes the movement of the first sensor system 352. In this movement, drive signal DRV is applied to a plurality of sets of X-axis electrodes 358 to provide in-plane periodic vibrational movement along the X-axis of vibration mass group 360. In the example of FIG. 8, vibrating mass group 360 is shown to be approximately 180 ° out of phase for each vibrating mass group 360 pair, so each pair 360 of vibrating mass group 360 is simultaneously in the + X direction. And in the -X direction. Similar to the above, drive signal DRV _X1 is applied to a given one of a plurality of sets of X-axis electrodes 358 to provide a single electrostatic attraction in one phase (eg, + X direction) in one phase. A signal may be included, and the group of spring flexures 362 provides a repulsive motion of the vibrating mass 360 in the opposite direction in antiphase (eg, 180 °). As another example, drive signal DRV _X1 may include a pair of drive signals DRV _X1 that are 180 ° out of phase with each other and provide electrostatic attraction in mutually opposite X axis directions in opposite phases. . As an example, the gyroscope controller 14 provides the first force rebalance signal FRB _Y1 to the multiple sets of Y-axis electrodes 364 while providing the drive signal DRV _X1 to the multiple sets of X-axis electrodes 358, and A balance signal FRB _Z1 may be provided to sets of Z-axis electrodes 366 to maintain the vibrating mass 360 at a zero position along each of the Y and Z sensing axes.

The illustration 350 includes the movement of the second sensor system 354. In this movement, drive signal DRV _Y2 is applied to sets of Y-axis electrodes 364 to provide in-plane periodic vibrational movement along the Y-axis of vibration mass group 360. In the example of FIG. 8, vibrating masses 360 are shown to be approximately 180 degrees out of phase for each pair of vibrating masses 360, so each pair of vibrating masses 360 is simultaneously in the + Y direction and You are moving in both directions. Similar to the above, drive signal DRV _Y2 is applied to a given one of sets of Y-axis electrodes 364 to provide a single electrostatic attraction in one phase (eg, + Y direction) in one phase. A signal may be included, and the group of spring flexures 362 provides a repulsive motion of the vibrating mass 360 in the opposite direction in antiphase (eg, 180 °). As another example, the drive signal DRV _Y2 is 180 ° out of phase with respect to each other, it may include a pair of driving signals DRV _Y2 providing electrostatic attraction to each Y-axis direction opposite to each other in opposite respective phases . As an example, the gyroscope controller 14 provides the first force rebalance signal FRB _X2 to the multiple sets of X-axis electrodes 358 while providing the drive signal DRV _Y2 to the multiple sets of Y-axis electrodes 364, and A balance signal FRB _Z2 may be provided to sets of Z-axis electrodes 366 to maintain the vibrating mass 360 at a zero position along each of the X and Z sensing axes.

The illustration 350 includes the movement of the third sensor system 356. In this movement, drive signal DRV _Z3 is applied to sets of Z-axis electrodes 366 to provide in-plane periodic vibrational motion along the Z-axis of vibrating mass group 360. In the example of FIG. 8, vibrating masses 360 are shown to be approximately 180 ° out of phase for each pair of vibrating masses 360, so each pair of vibrating masses 360 is simultaneously in the + Z direction and -Move in both directions of Z. Similar to the above, drive signal DRV _Z3 is applied to a given one of a plurality of sets of Z-axis electrodes 366 to provide electrostatic attraction in one phase in one phase (eg, + Z direction). A signal may be included, and the group of spring flexures 362 provides a repulsive motion of the vibrating mass 360 in the opposite direction in antiphase (eg, 180 °). As another example, the drive signal DRV _Z3 are 180 ° out of phase with respect to each other, may include a pair of driving signals DRV _Z3 providing electrostatic attraction to each Z-axis direction opposite to each other in opposite respective phases . As an example, the gyroscope controller 14 provides the first force rebalance signal FRB _X3 to the plurality of sets of X-axis electrodes 358 while providing the drive signal DRV _Z3 to the sets of Z-axis electrodes 366, and A balance signal FRB _Y3 may be provided to sets of Y-axis electrodes 364 to maintain the vibrating mass 360 at a zero position along each of the X and Y sensing axes.

As an example, sensor systems 352, 354 and 356 may simultaneously receive drive signals DRV _X1 , DRV _Y2 and DRV _Z3 respectively, as well as force rebalance signals FRB _Y1 and FRB _Z1 and force rebalance signal FRB _X2. And FRB _Z2 , and the force rebalance signals FRB _X3 and FRB _Y3 can be provided simultaneously. Thus, gyroscope system 350 may be configured to measure rotational rates ROT about Y and Z axes based on force rebalance signals FRB _Y1 and FRB _Z1 associated with first sensor system 352. , The rotational speed ROT about the X and Z axes may be measured based on the force rebalance signals FRB _X2 and FRB _Z2 associated with the second sensor system 354 and associated with the third sensor system 356 Based on the force rebalance signals FRB _X3 and FRB _Y3 , the rotational speed ROT about the X and Y axes can be measured. Thus, gyroscope system 350 may be configured to simultaneously determine the rotational speed of gyroscope system 350 about all three orthogonal axes. Furthermore, sensor systems 352, 354, and 356 may be fabricated on a common plane so that gyroscope system 350 may be fabricated in a compact and flat configuration to reduce footprint.

  As noted above, implementing redundant sensor systems 352, 354, and 356 facilitates calibration of rotational speed ROT about a given one of the orthogonal axes of each sensor system 12 It can be done. For example, the calculation of the rotational speed ROT about a given one of the orthogonal axes may be a rotation about that one of the orthogonal axes and the driving mode of the vibrating mass 360 along the corresponding drive axis Based on the vector cross product with the signal. If the gyroscope controller 14 cycles between different drive axes for a given one of the sensor systems 352, 354, and 356, the vector cross product changes polarity based on the switching of the cross product function variable. As a result, for a given one of the orthogonal axes, the rotational speed about that orthogonal axis is differentially calculated for two different time periods in which the drive axis has changed from one axis to another, thus It can be calculated with the opposite polarity. As a result, any bias errors associated with the corresponding one of the sensor systems 352, 354, and 356 for a given drive axis are equal and opposite to each other between the calculations of the rotational speed ROT for two different time periods. Substantially offset by As a result, as described in the example of FIGS. 9-17 below, the gyroscope system 350 can be calibrated over each cycle of change of the drive axis for each of each of the sensor systems 352, 354, and 356.

  Each example of FIGS. 9-17 illustrates three sensor systems, referred to as “sensor system 1”, “sensor system 2”, and “sensor system 3”. These may correspond to the three sensor systems as described above (e.g., sensor systems 352, 354, and 356, respectively). Each of the examples of FIGS. 9-17 may correspond to different time periods that may occur during completion of calibration of the gyroscope system that includes the respective sensor system. Thus, the following description of the examples of FIGS. 9-17 may correspond generally to the sequence of calibration of the respective gyroscope system (e.g., the gyroscope system 350). In the example of FIGS. 9-17, the sensor system is shown by only three respective orthogonal axes, and as provided herein, whether the drive axis is changing or the drive signal DRV is applied to each electrode The force rebalance signal is either applied to the respective electrodes and the rotational speed Ω about the respective axis is measured.

FIG. 9 shows an illustrative example 400 of a first calibration period. During a first calibration period, the first sensor system is shown to change the drive axis from the X axis to the Y axis. Here, the X and Y axes are indicated by dashed lines, and the transitions are indicated by arrows 402. As an example, the Y-axis may begin to be provided with the Y-axis drive signal DRV _Y1 after being provided with the X-axis drive signal DRV _X1 in the immediately preceding period (eg, immediately before the first calibration period). Furthermore, as an example, the X-axis electrode may be provided with a force rebalance signal FRB _X1 to make the vibrating mass zero for the X axis, and may be provided with a force rebalance signal FRB _Z1 for immediately before the vibrating mass for the Z axis. May be maintained at zero from a period of (e.g., immediately before the first calibration period). Therefore, the first sensor system does not facilitate the calculation of the rotational speed ROT in the first calibration period.

Also, illustration 400 shows the normal operating condition of the second sensor system. During the first calibration period, the second sensor system is provided with the Y-axis drive signal DRV _Y2 to provide in-plane periodic oscillatory motion along the Y-axis corresponding to the drive axis of the oscillatory mass. Further, the second sensor system, given a force rebalance signal FRB _X2 and FRB _Z2, the calculation of the rotational speed around the X-axis Omega _X and the rotational speed Omega _Z around the Z axis easily Do. As mentioned above, the rotational speed is determined based on the vector cross product of the drive axis and each sensing axis. Thus, in the example of FIG. 9, the second sensor system provides a positive rotation rate + Ω _X2 around the X axis and a negative rotation rate −Ω _Z2 around the Z axis.

Similarly, diagram 400 further illustrates the normal operating condition of the third sensor system. During the first calibration period, the third sensor system is provided with the Z-axis drive signal DRV _Z3 to provide in-plane periodic oscillatory motion along the Z-axis corresponding to the drive axis of the oscillatory mass. Further, a third sensor system is given a force rebalance signal FRB _X3 and FRB _Y3, the X axis calculated rotational speed Omega _Y centered and the rotation speed Omega _X and Y-axis around easily Do. As mentioned above, the rotational speed is determined based on the vector cross product of the drive axis and each sensing axis. Thus, in the example of FIG. 9, the third sensor system provides a positive rotation rate + Ω _X3 around the X axis and a negative rotation rate −Ω _Y3 around the Y axis.

FIG. 10 shows an illustrative example 410 of a second calibration period. The second calibration period may be the first calibration illustrated by diagram 400 in the example of FIG. 9, such as in response to a complete transition of the drive and sense axes of the first sensor system in diagram 400. It may be a period that immediately follows the period. Diagram 410 shows the normal operating condition of the first sensor system. After changing the drive axis in the first calibration period, in the second calibration period, the first sensor system is supplied with the Y-axis drive signal DRV _Y1, and Y corresponding to the drive axis of the vibrating mass Provides in-plane periodic oscillatory motion along an axis. Further, the first sensor system is given a force rebalance signal FRB _X1 and FRB _Z1, the calculation of the rotational speed around the X-axis Omega _X and the rotational speed Omega _Z around the Z axis easily Do. In the example of FIG. 10, the first sensor system provides a positive rotation rate + Ω _X1 around the X axis and a negative rotation rate −Ω _Z1 around the Z axis.

During the second calibration period, the second sensor system is shown to change the drive axis from the Y axis to the Z axis. Here, the Y and Z axes are indicated by dashed lines and the transitions are indicated by arrows 412. As an example, the Z-axis may start to be provided with the Z-axis drive signal DRV _Z2 after being given the Y-axis drive signal DRV _Y2 in the first calibration period. Furthermore, as an example, the Y-axis electrode may be provided with a force rebalance signal FRB _Y2 to make the vibrating mass zero for the Y axis, and may be provided with a force rebalancing signal FRB _Z2 so that the vibrating mass may be It can be maintained at zero from the calibration period of Therefore, the second sensor system does not facilitate calculation of the rotational speed ROT in the second calibration period.

Diagram 410 further illustrates the normal operating condition of the third sensor system. During the second calibration period, the third sensor system is provided with the Z-axis drive signal DRV _Z3 to provide in-plane periodic oscillatory motion along the Z-axis corresponding to the drive axis of the oscillatory mass. Further, a third sensor system is given a force rebalance signal FRB _X3 and FRB _Y3, the X axis calculated rotational speed Omega _Y centered and the rotation speed Omega _X and Y-axis around easily Do. In the example of FIG. 10, the third sensor system provides a negative rotational velocity about the _X axis-Ω _X3 and a negative rotational velocity about the Y axis-Ω _Y3 .

FIG. 11 shows a graphical example 420 of a third calibration period. The third calibration period is a second calibration illustrated by diagram 410 in the example of FIG. 10, such as in response to a complete transition of the drive and sense axes of the second sensor system in diagram 410. It may be a period that immediately follows the period. Diagram 420 shows the normal operating condition of the first sensor system. During the third calibration period, the first sensor system is provided with the Y-axis drive signal DRV _Y1 to provide in-plane periodic oscillatory motion along the Y-axis corresponding to the drive axis of the oscillatory mass. Further, the first sensor system is given a force rebalance signal FRB _X1 and FRB _Z1, the calculation of the rotational speed around the Y axis Omega _Y and rotational speed Omega _Z around the Z axis easily Do. In the example of FIG. 11, the first sensor system provides a positive rotation rate + Ω _X1 around the X axis and a negative rotation rate −Ω _Z1 around the Z axis.

Similarly, illustration 420 further illustrates the normal operating condition of the second sensor system. After changing the drive axis in the second calibration period, in the third calibration period, the second sensor system is provided with the Z-axis drive signal DRV _Z2 to correspond to the drive axis of the vibrating mass. Provides in-plane periodic oscillatory motion along an axis. Further, the second sensor system, given a force rebalance signal FRB _X2 and FRB _Y2, the X axis calculated rotational speed Omega _Y centered and the rotation speed Omega _X and Y-axis around easily Do. In the example of FIG. 11, the second sensor system provides a negative rotational velocity about the _X axis-Ω _X2 and a negative rotational velocity about the Y axis-Ω _Y2 .

During the third calibration period, the third sensor system is shown to change the drive axis from the Z axis to the X axis. Here, the X and Z axes are indicated by dashed lines and the transitions are indicated by arrows 422. As an example, the X-axis may begin to receive the X-axis drive signal DRV _X3 after being provided with the Z-axis drive signal DRV _Z3 in the second calibration period. Further, as an example, the Z-axis electrode may be provided with a force rebalance signal FRB _Z3 to make the vibrating mass zero for the Z axis, and may be provided with a force rebalance signal FRB _Y3 . It can be maintained at zero from the calibration period of Therefore, the third sensor system does not facilitate calculation of the rotational speed ROT in the third calibration period.

FIG. 12 shows a graphical example 430 of a fourth calibration period. The fourth calibration period of the third calibration period illustrated by illustration 420 in the example of FIG. 11, such as in response to a complete transition of the drive and sense axes of the third sensor system in illustration 420. It may be a period immediately following. During the fourth calibration period, the first sensor system is shown to change the drive axis from the Y axis to the Z axis. Here, the Y and Z axes are indicated by dashed lines, and the transitions are indicated by arrows 432. As an example, the Z-axis may begin to be provided with the Z-axis drive signal DRV _Z1 after being given the Y-axis drive signal DRV _Y1 in the third calibration period. Furthermore, as an example, the Y-axis electrode may be provided with a force rebalance signal FRB _Y1 to zero the vibrating mass for the Y axis, and may be provided with a force rebalance signal FRB _X1 for providing the vibrating mass for the X axis It can be maintained at zero from a calibration period of three. Therefore, the first sensor system does not facilitate calculation of the rotational speed ROT in the fourth calibration period.

Also, the illustration 430 shows the normal operating state of the second sensor system. During the fourth calibration period, the second sensor system is provided with the Z-axis drive signal DRV _Z2 to provide in-plane periodic oscillatory motion along the Z-axis corresponding to the drive axis of the oscillatory mass. Further, the second sensor system, given a force rebalance signal FRB _X2 and FRB _Y2, the X axis calculated rotational speed Omega _Y centered and the rotation speed Omega _X and Y-axis around easily Do. In the example of FIG. 11, the second sensor system provides a negative rotational velocity about the _X axis-Ω _X2 and a negative rotational velocity about the Y axis-Ω _Y2 .

Similarly, diagram 430 further illustrates the normal operating condition of the third sensor system. After changing the drive axis in the third calibration period, in the fourth calibration period, the third sensor system is supplied with the X-axis drive signal DRV _X3, and X corresponding to the drive axis of the vibrating mass Provides in-plane periodic oscillatory motion along an axis. In addition, the third sensor system is provided with force rebalance signals FRB _Y3 and FRB _Z3 to facilitate the calculation of the rotation speed Ω _Y around its Y axis and the rotation speed Ω _Z around Z axis Do. In the example of FIG. 12, the third sensor system provides a positive rotation speed + Ω _Y3 around the Y axis and a positive rotation speed + Ω _Z3 around the Z axis.

FIG. 13 shows an illustrative example 440 of a fifth calibration period. The fourth calibration period of the fourth calibration period illustrated by diagram 430 in the example of FIG. 12, such as in response to a complete transition of the drive and sense axes of the first sensor system in diagram 430. It may be a period immediately following. Illustration 440 shows the normal operating condition of the first sensor system. After changing the drive axis in the fourth calibration period, in the fifth calibration period, the first sensor system is provided with the Z-axis drive signal DRV _Z1 to correspond to the drive axis of the vibrating mass. Provides in-plane periodic oscillatory motion along an axis. Further, the first sensor system is given a force rebalance signal FRB _X1 and FRB _Y1, the X axis calculated rotational speed Omega _Y centered and the rotation speed Omega _X and Y-axis around easily Do. In the example of FIG. 13, the first sensor system provides a negative rotational velocity about the _X axis-Ω _X1 and a negative rotational velocity about the Y axis-Ω _Y1 .

During the fifth calibration period, the second sensor system is shown to change the drive axis from the Z axis to the X axis. Here, the X and Z axes are indicated by dashed lines, and the transitions are indicated by arrows 442. As an example, the X-axis may begin to receive the X-axis drive signal DRV _X2 after being supplied with the Z-axis drive signal DRV _Z2 in the fourth calibration period. Furthermore, as an example, the Z-axis electrode may be provided with a force rebalance signal FRB _Z2 to zero the vibrating mass for the Z axis, and may be provided with a force rebalance signal FRB _Y2 for providing the vibrating mass for the Y axis It can be maintained at zero from the 4 calibration period. Therefore, the second sensor system does not facilitate calculation of the rotational speed ROT in the fifth calibration period.

The illustration 440 further shows the normal operating state of the third sensor system. During the fifth calibration period, the third sensor system is provided with the X-axis drive signal DRV _X3 to provide in-plane periodic oscillatory motion along the X-axis corresponding to the drive axis of the oscillatory mass. Further, a third sensor system is given a force rebalance signal FRB _Y3 and FRB _Z3, facilitates the calculation of rotational speed Omega _Z centered respective Y axis center and the rotational speed Omega _Y and Z-axis Make it In the example of FIG. 13, the third sensor system provides a positive rotation speed + Ω _Y3 around the Y axis and a positive rotation speed + Ω _Z3 around the Z axis.

FIG. 14 shows a graphical example 450 of a sixth calibration period. The sixth calibration period corresponds to the fifth calibration period illustrated by illustration 440 in the example of FIG. 13, such as in response to a complete transition of the drive and sense axes of the second sensor system in illustration 440. It may be a period immediately following. The illustration 450 shows the normal operating state of the first sensor system. In the sixth calibration period, the first sensor system is provided with the Z-axis drive signal DRV _Z1 to provide in-plane periodic oscillatory motion along the Z-axis corresponding to the drive axis of the oscillatory mass. Further, the first sensor system is given a force rebalance signal FRB _X1 and FRB _Y1, to facilitate the calculation of the rotational speed around the X-axis Omega _X and the rotational speed Omega _Y around the Y axis . In the example of FIG. 14, the first sensor system provides a negative rotational velocity about the _X axis −Ω _{X 1} and a negative rotational velocity about the Y axis −Ω _{Y 1} .

Similarly, diagram 450 further illustrates the normal operating condition of the second sensor system. After changing the drive axis in the fifth calibration period, in the sixth calibration period, the second sensor system is supplied with the X-axis drive signal DRV _X2, and X corresponding to the drive axis of the vibrating mass Provides in-plane periodic oscillatory motion along an axis. Further, the second sensor system, given a force rebalance signal FRB _Y2 and FRB _Z2, to facilitate the calculation of the Y rotational speed around the axis Omega _Y and rotational speed Omega _Z around the Z axis . In the example of FIG. 14, the second sensor system provides a positive rotational speed + Ω _Y2 about the _Y axis and a positive rotational speed + Ω _Z2 about the Z axis.

During the sixth calibration period, the third sensor system is shown to change the drive axis from the X axis to the Y axis. Here, the X and Y axes are indicated by dashed lines and the transitions are indicated by arrows 452. As an example, the Y-axis may begin to be provided with the Y-axis drive signal DRV _Y3 after being provided with the X-axis drive signal DRV _X3 in the fifth calibration period. Furthermore, as an example, the X-axis electrode may be provided with a force rebalance signal FRB _X3 to make the vibrating mass zero for the X axis, and may be provided with a force rebalancing signal FRB _Z3 ; It can be maintained at zero from the calibration period of Therefore, the third sensor system does not facilitate calculation of the rotational speed ROT in the sixth calibration period.

FIG. 15 shows a graphical example 460 of a seventh calibration period. The seventh calibration period is responsive to a complete transition of the drive and sense axes of the third sensor system in diagram 450, such as in response to the sixth calibration period illustrated by diagram 450 in the example of FIG. It may be a period immediately following. During the seventh calibration period, the first sensor system is shown to change the drive axis from the Z axis to the X axis. Here, the X and Z axes are indicated by dashed lines, and the transitions are indicated by arrows 462. As an example, the X-axis may begin to be provided with the X-axis drive signal DRV _X1 after being provided with the Z-axis drive signal DRV _Z1 in the sixth calibration period. Furthermore, as an example, the Z-axis electrode may be provided with a force rebalance signal FRB _Z1 to make the vibrating mass zero with respect to the Z axis, and may be provided with a force rebalance signal FRB _Y1 with It can be maintained at zero from a calibration period of six. Therefore, the first sensor system does not facilitate calculation of the rotational speed ROT in the seventh calibration period.

Also, an illustration 460 shows a normal operating state of the second sensor system. In the seventh calibration period, the second sensor system is provided with the X-axis drive signal DRV _X2 to provide in-plane periodic oscillatory motion along the X-axis corresponding to the drive axis of the oscillatory mass. Further, the second sensor system, given a force rebalance signal FRB _Y2 and FRB _Z2, the calculation of the rotational speed around the Y axis Omega _Y and rotational speed Omega _Z around the Z axis easily Do. In the example of FIG. 15, the second sensor system provides a positive rotational speed + Ω _Y2 about the _Y axis and a positive rotational speed + Ω _Z2 about the Z axis.

Similarly, diagram 460 further illustrates the normal operating condition of the third sensor system. After changing the drive axis in the sixth calibration period, in the seventh calibration period, the third sensor system is supplied with the Y-axis drive signal DRV _Y3, and Y corresponding to the drive axis of the vibrating mass Provides in-plane periodic oscillatory motion along an axis. Further, a third sensor system is given a force rebalance signal FRB _X3 and FRB _Z3, the calculation of the rotational speed around the X-axis Omega _X and the rotational speed Omega _Z around the Z axis easily Do. In the example of FIG. 15, the third sensor system provides a positive rotation rate + Ω _X3 around the X axis and a negative rotation rate −Ω _Z3 around the Z axis.

FIG. 16 shows an illustrative example 470 of an eighth calibration period. The eighth calibration period of the seventh calibration period illustrated by illustration 460 in the example of FIG. 15, such as in response to a complete transition of the drive and sense axes of the first sensor system in the illustration 460. It may be a period immediately following. Diagram 470 shows the normal operating condition of the first sensor system. After changing the drive axis in the seventh calibration period, in the eighth calibration period, the first sensor system is given an X-axis drive signal DRV _X1 and X corresponding to the drive axis of the vibrating mass Provides in-plane periodic oscillatory motion along an axis. Further, the first sensor system is given a force rebalance signal FRB _Y1 and FRB _Z1, the calculation of the rotational speed around the Y axis Omega _Y and rotational speed Omega _Z around the Z axis easily Do. In the example of FIG. 16, the first sensor system provides a positive rotational speed + Ω _Y1 about the Y axis and a positive rotational speed + Ω _Z1 about the Z axis.

During the eighth calibration period, the second sensor system is shown to change the drive axis from the X axis to the Y axis. Here, the X and Y axes are indicated by dashed lines, and the transitions are indicated by arrows 472. As an example, the Y-axis may begin to be provided with the Y-axis drive signal DRV _Y2 after being provided with the X-axis drive signal DRV _X2 in the seventh calibration period. Furthermore, as an example, the X-axis electrode may be provided with a force rebalance signal FRB _X2 to make the vibrating mass zero for the X axis, and may be provided with a force rebalancing signal FRB _Z2 so that the vibrating mass is for the Z axis It can be maintained at zero from the calibration period of Therefore, the second sensor system does not facilitate calculation of the rotational speed ROT in the eighth calibration period.

Drawing 470 further illustrates the normal operating condition of the third sensor system. During the eighth calibration period, the third sensor system is provided with the Y-axis drive signal DRV _Y3 to provide in-plane periodic oscillatory motion along the Y-axis corresponding to the drive axis of the oscillatory mass. Further, a third sensor system is given a force rebalance signal FRB _X3 and FRB _Z3, the calculation of the rotational speed around the X-axis Omega _X and the rotational speed Omega _Z around the Z axis easily Do. In the example of FIG. 16, the third sensor system provides a positive rotation rate + Ω _X3 around the X axis and a negative rotation rate −Ω _Z3 around the Z axis.

FIG. 17 shows an illustration 480 of a ninth calibration period. The ninth calibration period of the eighth calibration period illustrated by illustration 480 in the example of FIG. 16, such as in response to a complete transition of the drive and sense axes of the second sensor system in the illustration 470. It may be a period immediately following. Illustration 480 shows the normal operating condition of the first sensor system. In a ninth calibration period, the first sensor system is given an X-axis drive signal DRV _X1 to provide in-plane periodic oscillatory motion along the X-axis corresponding to the drive axis of the oscillatory mass. Further, the first sensor system is given a force rebalance signal FRB _Y1 and FRB _Z1, the calculation of the rotational speed around the Y axis Omega _Y and rotational speed Omega _Z around the Z axis easily Do. In the example of FIG. 17, the first sensor system provides a positive rotational speed + Ω _Y1 about the Y axis and a positive rotational speed + Ω _Z1 about the Z axis.

Similarly, diagram 480 further illustrates the normal operating condition of the second sensor system. After changing the drive axis in the eighth calibration period, in the ninth calibration period, the second sensor system is supplied with the Y-axis drive signal DRV _Y2, and Y corresponding to the drive axis of the vibrating mass Provides in-plane periodic oscillatory motion along an axis. Further, the second sensor system, given a force rebalance signal FRB _X2 and FRB _Z2, the calculation of the rotational speed around the X-axis Omega _X and the rotational speed Omega _Z around the Z axis easily Do. In the example of FIG. 17, the second sensor system provides a positive rotation speed + Ω _X2 around the X axis and a negative rotation speed −Ω _Z2 around the Z axis.

During the ninth calibration period, the third sensor system is shown to change the drive axis from the Y axis to the Z axis. Here, the Y and Z axes are indicated by dashed lines and the transitions are indicated by arrows 482. As an example, the Z-axis may begin to be provided with the Z-axis drive signal DRV _Z3 after being provided with the Y-axis drive signal DRV _Y3 in the eighth calibration period. Furthermore, as an example, the Y-axis electrode may be provided with a force rebalance signal FRB _Y3 to make the vibrating mass zero for the Y axis, and may be provided with a force rebalancing signal FRB _X3 . It can be maintained at zero from the calibration period of Therefore, the third sensor system does not facilitate calculation of the rotational speed ROT in the ninth calibration period.

  The corresponding gyroscope system, including the sensor system of the example of FIGS. 9-17, thus circulates nine calibration periods continuously, one of three sensor systems in a given period. One can be made to change the drive axis. By way of example, the gyroscope system may also include a normal operating mode. In the normal operating mode, each of the three sensor systems has separate orthogonal axes provided with the drive signal DRV along the drive axis. Gyroscope controller 14 also determines, based on the respective differential measurements of rotation at the drive axis and rotation rate about a given one of said axes, for a given one of the sensor systems, It may be configured to perform calibration of the sensor system. As an example, processor 24 may be configured to identify bias errors based on differential measurements of rotational speed, and may substantially offset bias errors from the calculation of rotational speed in real time.

By way of example, in the example of FIGS. 10 and 11, the first sensor system provides a negative rotational velocity about the Z-axis-Ω _Z1 . In the example of FIGS. 16 and 17, the first sensor system provides a positive rotational speed + Omega _Z1 around the Z axis. Similarly, in the example of FIGS. 10 and 11, the first sensor system provides a positive rotational velocity about the X axis + Ω _X1 . In FIGS. 13 and 14, the first sensor system provides a negative rotational velocity about the X axis-Ω _X1 . Similarly, in FIGS. 13 and 14, the first sensor system provides a negative rotational velocity about the Y axis-Ω _Y1 . In the example of FIGS. 16 and 17, the first sensor system provides a positive rotation rate + Ω _Y1 about the Y axis. Thus, the first sensor system is configured to provide a calculation of positive and negative rotational speeds Ω of each of the three orthogonal axes in each of the different time periods. As noted above, any bias error associated with one of the sensor systems (eg, sensor systems 352, 354, and 356) for a given drive axis may calculate the rotational speed ROT for two different time periods Between and substantially offset each other equally and reversely. As a result, the gyroscope controller 14 determines, based on the differential measurements given by the positive and negative rotational speeds, each of the rotational speeds Ω _X1 , Ω _Y1 and Ω _Z1 provided by the first sensor system over a calibration period. It may be configured to perform calibration of the measurement. In other words, bias errors may be identified based on differential measurements by gyroscope controller 14 so that bias errors may be offset in a given calculation of the rotational speed of the sensor system at a given point in time.

Similarly, the second and third sensor systems may be similarly calibrated over nine calibration periods. In particular the rotation, the second sensor system, based on the rotational speed - [omega] _X2 calculated in the example of FIGS. 11 and 12 with respect to the rotational speed + Omega _X2 calculated in the example of FIGS. 9 and 17, around the X axis It can be calibrated for speed. The rotation, the second sensor system, based on the rotational speed - [omega] _Y2 calculated in the example of FIGS. 11 and 12 with respect to the rotational speed + Omega _Y2 calculated in the example of FIGS. 14 and 15, around the Y axis It can be calibrated for speed. The rotation, the second sensor system, based on the rotational speed - [omega] _Z2 calculated in the example of FIG. 9 and 17 with respect to the rotational speed + Omega _Z2 calculated in the example of FIGS. 14 and 15, around the Z axis It can be calibrated for speed. Similarly, the third sensor system, based on the rotational speed - [omega] _X3 calculated in the example of FIG. 9 and 10 with respect to the rotational speed + Omega _X3 calculated in the example of FIGS. 15 and 16, around the X axis It can be calibrated for rotational speed. The rotation, the third sensor system, based on the rotational speed - [omega] _Y3 calculated in the example of FIG. 9 and 10 with respect to the rotational speed + Omega _Y3 calculated in the example of FIGS. 12 and 13, around the Y axis It can be calibrated for speed. The rotation, the third sensor system, based on the rotational speed - [omega] _Z3 calculated in the example of FIGS. 15 and 16 with respect to the rotational speed + Omega _Z3 calculated in the example of FIGS. 12 and 13, around the Z axis It can be calibrated for speed. Thus, gyroscope system 10 calibrates substantially continuously without interrupting normal operation of gyroscope system 10 to determine rotational rates about all three orthogonal axes of gyroscope system 10. It can be done.

  In view of the above structural and functional features, the method in various aspects of the present invention may be better understood by referring to FIG. Although the method of FIG. 18 is illustrated and described as being performed sequentially for ease of explanation, the present invention is not limited to the illustrated order. Aside from the illustrations and descriptions herein, in accordance with the present invention, several aspects may be performed in a different order and / or may be performed concurrently with other aspects. Moreover, not all illustrated features may be required to implement the methodologies of certain aspects of the present invention.

  FIG. 18 illustrates an example method 500 of measuring rotation about each of three orthogonal axes via a gyroscope system (e.g., the gyroscope system 10). In step 502, in the first period (for example, the first calibration period shown in FIG. 400), the drive signal (for example, the drive signal DRV) has the first electrode (for example, a plurality of pairs of electrodes 18, 20, 22). And one) to apply a driving force to the vibrating mass (e.g., vibrating mass 16) along a first of three orthogonal axes. In step 504, in a first time period, a first force rebalance signal (eg, force rebalance signal FRB) is coupled to a second electrode (eg, another one of the plurality of sets of electrodes 18, 20, 22). A first force rebalance to the vibrating mass in the direction of a second one of the three orthogonal axes, and based on the first force rebalance signal, the second axis of the gyroscope system Find a rotation around. At step 506, a second force rebalance signal is provided to a third electrode (eg, another one of the plurality of sets of electrodes 18, 20, 22) for a first time period to generate a second force rebalance signal. Force rebalance is applied to the vibrating mass on the third of three orthogonal axes, and based on the second force rebalance signal, the rotation of the gyroscope system about the third axis is determined. At step 508, a drive signal is applied to the second electrode in a second period (e.g., a second calibration period of illustration 410) to apply a drive force to the vibrating mass along a second axis. In step 510, in a second time period, a first force rebalance signal is applied to the first electrode to apply a first force rebalance to the vibrating mass in a direction of a first axis, a first force rebalance. The rotation of the gyroscope system about the first axis is determined based on the balance signal.

  The above is an example of the present invention. While it is of course not possible to describe every conceivable combination of components and methods for the purpose of illustrating the invention, it is understood by those skilled in the art that there may be many additional combinations and permutations of the invention. Ru. Accordingly, the present invention is intended to embrace all such alterations, modifications, and variations that fall within the scope of the present application, including the appended claims. Furthermore, elements described in the present specification and claims ("one element", "an element", "first element", "another element", equivalents thereof, etc.) are Elements are considered to be included, and it is not mandatory or excluded that such elements be more than one. As used herein, the term "comprising" is meant to be inclusive, but not limiting. The term "based on" means based at least in part.

Claims (15)

A sensor system comprising: a vibrating mass; and a plurality of electrodes, each arranged to apply one of a driving force and a force rebalance to said vibrating mass in each of three orthogonal axes in an orientation.
The drive force is applied by generating a drive signal applied to a first electrode of the plurality of electrodes, and the in-plane of the vibrating mass along a first axis of the three orthogonal axes. To each of the second and third electrodes of the plurality of electrodes that facilitate periodic oscillatory motion and are respectively associated with the second and third axes of the three orthogonal axes Gyroscope comprising a given force rebalance signal to determine rotation of the gyroscope system about each of the second and third axes of the three orthogonal axes system.   The gyroscope controller alternately provides the drive signal to one of a plurality of sensors associated with the first axis in each of different time periods to provide the force rebalance signal of the plurality of sensors. 2. The method according to claim 1, wherein the rotation of the gyroscope system about the second axis and the third axis is determined in each of the different time periods, alternately given to another of the sensors. System described.   The gyroscope controller applies the force rebalance signal to the second and third electrodes to determine rotation of the gyroscope system about the second and third orthogonal axes during a first time period. The force rebalance is applied to apply the drive signal to the first electrode while applying simultaneously, and to determine rotation of the gyroscope system about the first and third orthogonal axes in a second period. The gyroscope system with the drive signal applied to the second electrode while simultaneously applying a signal to the first and third electrodes, and centered on the first and second orthogonal axes in a second period To simultaneously apply the force rebalance signal to the first and second electrodes to determine the rotation of the Configured to provide the third electrode system of claim 2.   The sensor system comprises a plurality of vibrating masses, wherein the plurality of electrodes imparts one of a driving force and a force rebalance to each of the plurality of vibrating masses in the orientation of each of three orthogonal axes. The system of claim 1 disposed.   The plurality of vibrating masses comprises a pair of vibrating masses, and the gyroscope controller generates the drive signal to be applied to the first electrode of the plurality of electrodes of each vibrating mass of the pair of vibrating masses. By providing the driving force to facilitate equal and opposite in-plane periodic oscillatory motion along the first axis of the three orthogonal axes of each of the oscillatory masses, The system of claim 4. The gyroscope system comprises a plurality of sensor systems, and the gyroscope controller generates the drive signal to be applied to the first electrode of a first sensor system of the plurality of sensor systems to perform the driving signal. Facilitating in-plane periodic oscillatory motion along the first of the three orthogonal axes of the vibrating mass associated with the first sensor system, the second sensor of the plurality of sensor systems Generating the drive signal applied to the second electrode of the system, in a plane along the second of the three orthogonal axes of the vibrating mass associated with the second sensor system Configured to facilitate periodic oscillatory motion,
The gyroscope controller is provided to each of the second electrode and the third electrode of the first sensor system, and to the first electrode and the third electrode of the second sensor system. The system of claim 1, further configured to generate the force rebalance signal to determine rotation of the gyroscope system about the three orthogonal axes.   The system of claim 6, wherein the plurality of sensor systems are disposed on a common plane. The plurality of sensor systems are
A first driven in the direction of the first axis to facilitate calculation of rotation of the gyroscope system about the second axis and the third axis via the gyroscope controller Sensor systems, and
A second driven in the direction of the second axis to facilitate calculation of rotation of the gyroscope system about the first axis and the third axis via the gyroscope controller Sensor systems, and
A third driven in the direction of the third axis to facilitate calculation of rotation of the gyroscope system about the first axis and the second axis via the gyroscope controller The system of claim 6, comprising the sensor system of   The gyroscope controller calculates a difference between the rotation of the gyroscope system about the first axis through the second and third sensor systems, and the gyro about the second axis. The rotation of the scope system is differentially calculated through the first and third sensor systems, and the rotation of the gyroscope system about the third axis is referred to the respective second and third sensor systems The system of claim 8, wherein the system is configured to calculate differences via.   The gyroscope controller alternates the axis along which each of the first, second, and third sensor systems are driven through the drive signal in each of a plurality of time periods. For differential calculation of rotation of the gyroscope system about a given one of the orthogonal axes in two of the plurality of time periods for each of the first, second and third sensor systems 9. The system of claim 8, configured to alternately calibrate the first, second, and third sensor systems based thereon. A method for measuring rotation about each of three orthogonal axes via a gyroscope system,
Applying a drive signal to the first electrode during a first time period to apply a drive force to the vibrating mass along a first one of the three orthogonal axes;
During the first period, a first force rebalance signal is applied to the second electrode to apply the first force rebalance to the vibrating mass in the direction of the second of the three orthogonal axes. Determining the rotation of the gyroscope system about the second axis based on the first force rebalance signal;
In the first period, a second force rebalance signal is applied to a third electrode to apply a second force rebalance to the vibrating mass in the direction of a third one of the three orthogonal axes. Determining the rotation of the gyroscope system about the third axis based on the second force rebalance signal;
Applying the drive signal to the second electrode during a second period to apply the drive force to the vibrating mass along the second axis;
During the second period, the first force rebalance signal is applied to the first electrode to apply the first force rebalance to the vibrating mass in the direction of the first axis; Determining the rotation of the gyroscope system about the first axis based on a force rebalance signal of
Method including.   During the second period, the second force rebalance signal is applied to the third electrode to apply the second force rebalance to the vibrating mass in the direction of the third axis, and the second The method of claim 11, further comprising: determining rotation of the gyroscope system about the third axis based on a force rebalance signal of.   The application of the second force rebalance signal to the third electrode may be performed based on the second force rebalance signal centered on the third axis during the first and second periods. Calibration of the gyroscope system relative to the calculation of the rotation of the gyroscope system about the third axis based on the second force rebalance signal by differentially calculating the rotation of the gyroscope system 13. The method of claim 12, comprising performing. Applying the drive signal to the third electrode in a third period to apply the drive force to the vibrating mass along the third axis;
During the third period, the first force rebalance signal is applied to the first electrode to apply the first force rebalance to the vibrating mass in the direction of the first axis; Determining the rotation of the gyroscope system about the first axis based on a force rebalance signal of
During the third period, the second force rebalance signal is applied to the second electrode to apply the second force rebalance to the vibrating mass in the direction of the second axis; Determining the rotation of said gyroscope system about said second axis based on the force rebalance signal of
The method of claim 11, further comprising The vibrating mass is a first vibrating mass associated with a first sensor system, the drive signal is a first drive signal, and the method comprises
During the first period, a second drive signal is applied to a fourth electrode to drive a second drive force to a second vibrating mass associated with a second sensor system along the second axis. Giving and
During the first period, a third force rebalance signal is applied to a fifth electrode to apply a third force rebalance to the second vibrating mass in the direction of the first axis, and the third Determining the rotation of the gyroscope system about the first axis based on a force rebalance signal of
In the first period, a fourth force rebalance signal is applied to a sixth electrode to apply a fourth force rebalance to the second vibrating mass in the direction of the third axis, the fourth Determining the rotation of the gyroscope system about the third axis based on the force rebalance signal of
Applying the second drive signal to the fourth electrode during the second period to apply the drive force to the second vibrating mass along the first axis;
Applying the third force rebalance signal to the fifth electrode in the second period to apply the third force rebalance to the second vibrating mass in the direction of the second axis; The method of claim 11, further comprising: determining rotation of the gyroscope system about the second axis based on the third force rebalance signal.

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