JP2019100867A - Cell for measuring physical property of particle and instrument for measuring physical property of particle using the same - Google Patents

Abstract

To provide a cell for measuring physical properties of particles, capable of reducing a measurement error due to reflected light without applying a reflective coating film when a detection object with high concentration or large absorption coefficient is optically measured without dilution.SOLUTION: A cell for measuring physical properties of particles, includes a first aperture plate having a first outer face and a first inner face opposite to the first outer face, a second aperture plate having a second inner face and a second outer face opposite to the second inner face and arranged so that the second inner face is opposite to the first inner face, and a gap formed between the first inner face and the second inner face for storing a detection object. In a light transmitting area where light penetrates at least the first aperture plate and the second aperture plate, at least one face of the first outer face, the first inner face, the second inner face and the second outer face is inclined to a part or all of faces of the others.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a cell for measuring particle physical properties and a particle physical property measuring device using the same.

  As a particle physical property measuring device, there is a particle diameter distribution measuring device which measures the particle diameter distribution of particles contained in a test object. In the conventional particle size distribution measuring apparatus, as shown in Patent Document 1, for example, in the case of measuring a high concentration and low viscosity test object such as a stock solution of ink, between a pair of parallel plate-shaped window plates The cell for measuring the physical properties of particles, which is configured by sandwiching a spacer, is used.

  Here, for example, in order to measure the particle size distribution without diluting a high concentration test target, the thickness of the test target stored in the particle physical property measurement cell is reduced to obtain a predetermined transmittance. Thus, it is necessary to shorten the optical path length to, for example, several micrometers to several tens of micrometers. In addition, when the value of the light absorption coefficient is large even if the concentration of the test object is small, in order to measure the particle size distribution without dilution, it is also necessary to shorten the optical path length.

  By the way, as shown in FIG. 7A, when a very short gap is formed between the parallel flat plate-like window plates 21A and 22A, reflection of part of the light is repeated at the interface of each window plate, as shown in FIG. As shown in 7 (b), not only the spot P1 of the transmitted light but also another spot P2 may be generated on the ring detector which is the detector 5B due to the interference of the reflected light. If the interference of the reflected light is thus detected by the detector 5B, it will appear as a measurement error.

  For this reason, in the case of a so-called high concentration cell used when the conventional test object has a high concentration or a large absorption coefficient, the inner surface or the outer surface of the window material in order to suppress the influence of the interference light as described above. Anti-reflective coating is applied.

  However, the manufacturing cost is increased as much as the anti-reflection coating process is applied to the window material, and the materials that can be used for the window material are also limited to those capable of providing the anti-reflection coating. Furthermore, it is not possible to introduce a liquid that would dissolve the anti-reflection film into the gap, and the sample that can be measured is also limited.

Patent No. 2910596

  The present invention has been made in view of the problems as described above, and for example, when performing optical measurement without dilution of a test subject having a high concentration or a large molar absorption coefficient, An object of the present invention is to provide a particle physical property measuring cell capable of reducing a measurement error due to reflected light without being applied, and a particle physical property measuring device using the same.

  That is, the cell for measuring particle physical properties according to the present invention faces a first window plate having a first outer surface and a first inner surface facing the first outer surface, a second inner surface, and the second inner surface. A second window plate which has a second inner surface and is disposed so as to face the first inner surface, and is formed between the first inner surface and the second inner surface. A particle physical property measuring cell comprising a gap for containing an object, wherein at least the first window plate and the second window plate in a light passing region through which light passes, the first outer surface, At least one of the first inner surface, the second inner surface, or the second outer surface is characterized by being inclined with respect to some other surface or all other surfaces. .

  If it is such, even if the light passing through the first window plate and the second window plate is reflected at the interface, at least one surface that is inclined makes the reflection direction a measurement target. The direction of travel of light or scattered light can be different.

  Therefore, interference due to reflected light can be made less likely to occur, and measurement errors can be reduced, for example, when particle physical properties such as particle size distribution measurement are measured based on light.

  In addition, since reflected light may be generated at each interface between the first window plate and the second window plate, it is necessary to form an anti-reflection coating film on the first inner surface or the second inner surface as in the prior art. There is no Therefore, the material of the first window plate and the second window plate is not restricted by the anti-reflection coating process, and various materials can be selected.

  Furthermore, according to the present invention, it is possible to measure with high accuracy according to the present invention, because it is an object to be examined which has the property that the antireflective coating film is corroded.

  At least one of the faces is inclined relative to the other by the structure of the first pane or the second pane itself so that the reflected light does not reach the detector The first window plate or the second window plate may be a wedge substrate.

  Even if the position at which light is incident on the particle physical property measurement cell is slightly shifted, the change in the optical path length through which light passes through the test object is less likely to appear, and the reflected light does not reach the detector. For this purpose, the first inner surface and the second inner surface are disposed parallel to each other, the first outer surface is inclined to the first inner surface, and the second outer surface is inclined. It may be inclined with respect to the second inner circle, and the first outer surface and the second outer surface may be disposed so as not to be parallel to each other.

  In order to be able to inexpensively manufacture a configuration in which at least one surface of the first window material and the second window material is inclined with respect to the other surface, the first window plate has the first outer surface and the first surface. A parallel plate in which the first inner surface is disposed in parallel, and the second window plate is a parallel plate in which the second outer surface and the second inner surface are disposed in parallel; What is necessary is just to further provide a wedge-shaped spacer provided between the second window plate.

  For example, in order to be able to realize the inclination angle with high accuracy when the first window member is inclined with respect to the second window member, the spacer may be provided on the first inner surface or the second inner surface. What is necessary is just to be vapor-deposited and formed so that the thickness may become large as it goes along the face plate direction.

In addition, in another expression of the cell for measuring particle physical properties according to the present invention, the present invention has a first outer surface and a first window plate having a first inner surface facing the first outer surface, and a second inner surface, And a second window plate having a second inner surface opposed to the second inner surface, the second window plate being arranged such that the second inner surface is opposed to the first inner surface, the first inner surface and the second inner surface And a gap in which the test subject is accommodated, the absorption coefficient of the test subject housed in the gap is ε, and the dispersoid concentration of the test subject housed in the gap is c. And the light absorption characteristic value f of the subject is 1 × 10 ² m ⁻¹ ≦ f ≦ 2 × 10 ⁵ m ⁻¹ where the light absorption characteristic value which is the product of ε and c is f. In the measurement cell, at least a part of the gap is such that the optical path length L in the test object is 0.1 μm ≦ L ≦ 1000 μm The first outer surface, the first inner surface, the second inner surface, or the second inner surface, at least in the first window plate and the light passing region through which light passes in the second window plate. It is characterized in that at least one surface of the outer surface is configured to be inclined with respect to some other surface or all other surfaces.

  With such a configuration, even when the optical measurement is performed by diluting the test object having a large light absorption characteristic value f, interference due to the reflected light is less likely to occur, and the measurement accuracy can be improved as compared with the conventional case.

Although the light absorption characteristic value f is so large that it is called a so-called high concentration sample, it is necessary to reduce the optical path length L in the measurement without dilution, but the object to be examined which invades the antireflective coating is Conventionally, interference of reflected light causes a measurement error, making it difficult to obtain accurate particle characteristics. As a more preferable configuration that enables accurate measurement even with such a test subject, the light absorption characteristic value f of the test subject is 1 × 10 ³ m ⁻¹ ≦ f ≦ 1 × 10 ⁴ m ^{− 1} and at least a part of the gap is configured such that the optical path length L of the test object is 1 μm ≦ L ≦ 500 μm.

Example In order to make the transmittance of light passing through the cell for measuring particle physical properties to have a desired value while inclining the first window member relative to the second window member, the first window plate is The parallel plate in which the first outer surface and the first inner surface are arranged in parallel, and the second window plate is a parallel plate in which the second outer surface and the second inner surface are arranged in parallel, A wedge-shaped spacer provided between the first window plate and the second window plate, the wedge angle being an angle between the first inner surface and the second inner surface being θ, When the outer diameter dimension of the window plate and the second window plate is 2R, the optical path length in the test object is L, the absorption characteristic value of the test object is f, and the target transmittance is T, the spacer The shape of X may be configured to satisfy θ ≦ −2 sin ⁻¹ (log T / 2 f R).

In order to prevent the reflected light generated at the interface from entering the detector, the distance between the cell for measuring the particle property of the particle and the position where the light passing through the second window plate is detected is L, and the light is detected. The shape of the spacer may be configured to satisfy (1/2) tan ⁻¹ (r / L) <θ, where r is the detectable radius at the position where the sensor is to be positioned.

  As a method of inclining the surface where the effects of the present invention become remarkable, at least one surface of the first outer surface, the first inner surface, the second inner surface, or the second outer surface is the light When an angle formed with respect to a virtual plane perpendicular to the optical axis is φ, one configured to satisfy 0.024 ° ≦ φ ≦ 0.11 ° may be mentioned.

  A particle physical property measurement comprising: a cell for measuring particle physical properties according to the present invention, a light source for irradiating light to the cell for measuring particle physical properties, and a detector for detecting light having passed through the cell for measuring particle physical properties In the case of an apparatus, for example, the light absorption characteristic value f is large, it is difficult to measure without dilution, and it is difficult to measure conventionally because it has such a property as to attack the antireflective coating film. Also, it is possible to accurately measure particle physical properties without dilution.

  As described above, according to the cell for measuring physical properties of particles according to the present invention, at least one surface of the first window material or the second window material is inclined with respect to the other surface, and the reflected light is reflected. Can be made different from the traveling direction of the scattered light or the transmitted light. Therefore, the reflected light that affects the measurement can be hardly detected by the detector.

  Further, even if reflected light is generated in the particle physical property measuring cell, a measurement error can be prevented from occurring, so it is not necessary to provide an antireflective coating film as in the prior art. For this reason, the restriction on the material of the window material is reduced, and measurement can be performed even on an object to be inspected that corrodes the antireflective coating film.

BRIEF DESCRIPTION OF THE DRAWINGS The cell for particle physical-property measurement which concerns on 1st Embodiment of this invention, and the schematic diagram which shows the structure of a particle physical-property measurement apparatus. BRIEF DESCRIPTION OF THE DRAWINGS The typical perspective view of the cell for particle physical-property measurement in 1st Embodiment. Typical sectional drawing which shows the structure of the window material of the cell for particle physical-property measurement in 1st Embodiment. The schematic diagram which shows the structure of the cell for particle physical-property measurement which concerns on 2nd Embodiment of this invention. The schematic diagram which shows the relationship between wedge angle (theta) in 2nd Embodiment, and the advancing direction of reflected light. The schematic diagram which shows the cell for particle physical-property measurement which concerns on other embodiment of this invention. The schematic diagram which shows the problem of the interference by the reflected light which arises in the conventional cell for particle physical-property measurement.

  A first embodiment of a particle physical property measuring device using a particle physical property measuring cell according to the present invention will be described with reference to the drawings.

  The particle physical property measuring device 100 according to the present embodiment uses the fact that the light intensity distribution according to the spread angle of the diffracted / scattered light generated when the particles are irradiated with light is determined by the particle diameter from the MIE scattering theory. This particle size distribution measuring device measures particle size distribution by detecting diffracted / scattered light.

  Specifically, as shown in FIG. 1 and FIG. 2, the particle physical property measuring device 100 is, for example, a batch type cell 2 for particle physical property measurement set in a cell holder 7 and an object X to be detected in the cell 2 for particle physical property measurement. And a plurality of light detectors 5A, 5 for detecting the light intensity of the diffracted / scattered light generated by the irradiation of the laser light according to the spread angle, and the laser device 4 serving as a light source for irradiating the laser light through the lens 3 The arithmetic unit 6 is provided to receive the light intensity signals output from the light detectors 5A and 5 and calculate the particle size distribution of the particles contained in the test object X. The photodetector 5A provided on the optical axis of the laser beam and disposed at a position where the light transmitted through the particle physical property measuring cell 2 can be detected is, for example, a ring detector.

  In the particle physical property measuring apparatus 100 of the present embodiment, the cell holder 7 is provided on the slide member 9 sliding on the rail 8, and the particle physical property measuring cell 2 set in the cell holder 7 is positioned on the light path. It is configured to be movable between a light irradiation position and a retracted position retracted from the light path. In FIG. 1, an example in which a plurality of cell holders 7 in which cells 2 for measuring particle physical properties are set is provided on a slide member 9 is shown. In addition, on the slide member 9, a cell holder in which plural kinds of measurement cells (dry cell, wet flow cell or the like) different from the particle physical property measurement cell 2 may be provided.

  It may be as follows taking advantage of the configuration having the slide member 9.

  For example, the first cell holder 7 holding only the dispersion medium and holding the cell 2 for measuring particle physical properties whose optical path length is set to 1 μm, and the test object X consisting of particles that are the dispersion medium and the dispersoid, The second cell holder 7 holding the particle physical property measuring cell 2 whose optical path length is set to 1 μm is set on the slide member 9. It may have another cell holder 7.

  Then, the cell 2 for measuring particle physical properties of the first cell holder 7 is moved to the light irradiation position to perform background measurement (transmission light measurement). Thereafter, the particle physical property measuring cell 2 of the second cell holder 7 is moved to the light irradiation position to measure the transmitted light.

  Next, the particle physical property measuring cell 2 will be described with reference to FIGS. 2 and 3. In addition, in FIG. 3, in order to clarify description, the inclination angle of the thickness of each member or the one part surface is exaggerated and shown.

The particle physical property measuring cell 2 is a batch type that accommodates the test target X having a predetermined viscosity. The cell for measuring particle physical properties 2 of the present embodiment is for containing a sample with high concentration and low viscosity such as ink, and for example, to analyze the test object X having a viscosity of 0.1 cP to 100 cP. Used. In other words, this cell for measuring particle physical properties 2 is a so-called high concentration sample to be tested X, and the optical path length is, for example, in μm so that the particle size distribution can be measured without dilution. It is. The test target X is the test target X when the absorption coefficient of the test target X is ε, the dispersoid concentration of the test target X is c, and the product of ε and c is the light absorption characteristic value f. The light absorption characteristic value f has 1 × 10 ² m ⁻¹ ≦ f ≦ 1 × 10 ⁵ m ⁻¹ . In addition, the cell 2 for measuring particle physical properties may contain an alcohol or an organic solvent.

  Specifically, as shown in FIG. 2, the particle physical property measuring cell 2 is a pair of window plates, and the first window plate 21 and the second window provided so that their inner surfaces face each other to form a gap S. A plate 22 and a holding mechanism 23 for holding and holding the window plates 21 and 22 from the outside are provided. In the first window plate 21, two holes for introducing the test object X are formed in the gap S penetrated in the thickness direction, and the two holes 28 are covered with plugs 29 respectively. . In FIG. 3 used in the following description, the holding mechanism 23, the hole 28, and the plug 29 are omitted, and only the spacer 24 provided between the first window plate 21 and the second window plate 22 is described. There is.

The first window plate 21 and the second window plate 22 are made of, for example, quartz glass (SiO ₂ ) that transmits the laser light emitted from the light source 4. As shown in FIG. 3, the first window plate 21 and the second window plate 22 are wedge substrates each having a wedge.

  The first window plate 21 is a window member disposed on the incident side of the laser beam, and the first outer surface 21 b on which the laser beam is incident from the outside and the gap S in which the test target X is accommodated is a second window plate 22. And a first inner surface 21a that forms a gap S. As shown in FIG. 3, the first window plate 21 has a trapezoidal shape in which the leg on the side facing the second window plate 22 in the longitudinal cross section vertically intersects the upper bottom and the lower bottom. It has a shape in which one end face is cut obliquely. That is, the first outer surface 21b is inclined by a predetermined wedge angle θ with respect to the first inner surface 21a.

  On the other hand, the second window plate 22 is a window material disposed on the side from which the laser light having passed through the test object X is emitted, and the second window plate 22 faces the first window plate 21 to form a gap S. An inner surface 22a and a second outer surface 22b from which light having passed through the subject X is emitted to the outside are provided. The second window plate 22 also has the same shape as the first window plate 21. The second outer surface 22b is inclined by a predetermined wedge angle θ with respect to the second inner surface 22a. That is, the second window plate 22 is disposed so as to be laterally symmetrical with respect to the first window plate 21 with reference to a predetermined plane so that the first inner surface 21a and the second inner surface 22b are parallel to each other. Further, the first outer surface 21 b and the second outer surface 22 b are configured to be inclined with respect to the optical axis so that the laser light does not enter vertically.

  The gap S between the first inner surface 21a and the second inner surface 22a arranged in parallel is, for example, the transmittance T when measuring the test target X which is a high concentration sample without dilution, as shown in FIG. Is set to an optical path length L where 80% to 95%. In other words, in the first embodiment, the optical path length L, which is the width dimension of the gap S, is 2.2 μm ≦ for the laser beam passing region through which the laser beam passes in the central portion of each window plate 21 and 22 shown in FIG. It is set to satisfy L ≦ 9.7 μm.

  Further, between the first window plate 21 and the second window plate 22, a spacer 24 having a constant thickness substantially the same as the optical path length L is provided over the entire circumference on the outer peripheral portion. In the state in which the window material 21 and the second window material 22 are held, the gap S of the optical path length L is formed.

  In the first embodiment, no anti-reflection coating film is formed on the laser light passing region in the gap S for both the first inner surface 21a and the second inner surface 22a.

  According to the particle physical property measuring cell 2 of the first embodiment configured as described above, the first window member 21 and the second window member 22 are formed of a wedge substrate, and the inner surface at a predetermined wedge angle θ Since the outer surface is inclined with respect to the above, even if the reflected light is generated when passing through the interface between the first window plate 21 and the second window plate 22, the laser beam passing without being reflected proceeds The directions can be different.

  Therefore, interference can be prevented from occurring due to the reflected light generated by the first window plate 21 and the second window plate 22, and a plurality of spots appear especially in the detector 5A which is a ring detector, and the particle diameter It is possible to prevent the occurrence of measurement errors in the measurement results of the distribution. That is, the reflected light can be prevented from entering the detector 5A and not being detected, so that only light necessary to calculate the particle size distribution can be detected.

  Furthermore, since the first window plate 21 and the second window plate 22 are formed of a wedge substrate and a wedge is formed only on one side, the first inner surface 21a and the second inner surface 22a are opposed in parallel, A fixed separation distance can be formed over the entire laser light passage area, and the light path length L can be kept constant. For this reason, even if the installation position of the particle physical property measurement cell 2 is shifted and the incident point of the laser light is slightly changed, the designed optical path length L can be realized. Therefore, the sensitivity of the measurement error to the installation error of the particle physical property measurement cell 2 can be reduced.

  Next, the cell for measuring particle physical properties 2 of the second embodiment will be described with reference to FIG. In addition, suppose that the same code | symbol is attached to the member corresponding to the member demonstrated in 1st Embodiment.

  In the particle physical property measuring cell 2 of the second embodiment, the first window plate 21 and the second window plate 22 are parallel flat plates, respectively, and the spacer 24 provided between the first window plate 21 and the second window plate 22. Is wedge-shaped to form a wedge as the cell 2 for measuring particle physical properties.

That is, as shown in FIG. 4, the spacer 24 formed in a wedge shape defines two parameters of the wedge angle θ which determines the inclination of the first window plate 21 and the second window plate 22 and the optical path length L. It is In the second embodiment, the angle formed by the first inner surface 21a and the second inner surface 22a is defined as a wedge angle, and the optical path length is the distance between the first inner surface 21a and the second inner surface 22a in the direction along the optical axis of laser light. Defined as a distance. Also in this second embodiment, when the dispersoid concentration is c and the product of ε and c is the light absorption characteristic value f, the light absorption characteristic value f of the test object X is 1 × satisfy ^{10 2 m -1 ≦ f ≦ 1} × 10 5 m -1 and has a high absorption characteristics. In order to be able to measure the particle physical properties without dilution even in the case of the test object X having such characteristics, the particle physical property measuring cell 2 is configured to satisfy the following conditions. Here, the wedge angle θ in the first embodiment is the same angle as the angle φ formed by the first window plate 21 and the second window plate 22 with respect to the virtual plane PL perpendicular to the optical axis.

First, the radius of the first window material 21 or the second window material 22 is R, that is, the outer diameter dimension along the flat plate direction is 2R, the optical path length is L, the wedge angle is θ, and the laser light is the first window material 21 When passing through the center of the second window member 22, L = 2R sin (θ / 2) (1) holds from the geometrical relationship as shown in FIG. 4. Also, assuming that the target transmittance of the laser light is T, the absorption coefficient of the test object X is ε, the dispersoid concentration of the test object X is c, and the optical path length is L, from the Lambert-Beer law, log ₁₀ T =-Ε c L is satisfied (2).

Here, in order to realize the transmittance larger than the target transmittance T in order to realize the measurement of the particle physical property, it is necessary to satisfy L ≦ − (log ₁₀ T) / (εc) (3).

Therefore, solving (1) to (3) for the wedge angle θ yields θ ≦ −2R sin ⁻¹ ((log ₁₀ T) / (2 fR)) (4). That is, when the target transmittance T and the light absorption characteristic value f of the test target X are determined, the upper limit of the wedge angle θ is determined by the inequality (4).

The lower limit value of the wedge angle θ which determines the shape of the spacer 24 is determined by determining the wedge angle θ so that the light reflected by the first window member 21 does not enter the detector 5A. That is, assuming that the distance from the second window member 22 to the detector 5A is D, and the detection radius of the detector 5A is r, the particle physical property measuring cell 2 reflects twice on each inner surface and the detector 5A The angle formed by the optical axis of the reflected light when coming out to the side is 2θ with respect to the optical axis of the light source 4. From the geometrical condition, if Dtan 2θ> r, the reflected light is sent to the detector 5A. It will not be incident. Therefore, in the second embodiment, the wedge angle θ is set to satisfy (1⁄2) tan ⁻¹ (r / D) <θ (5).

That is, the spacer 24 is formed such that the wedge angle θ satisfies (1⁄2) tan ⁻¹ (r / D) <θ ≦ −2R sin ⁻¹ ((log ₁₀ T) / 2 fR).

In order to form the spacer 24 having such a wedge angle θ, vapor deposition of SiO ₂ or the like so that the thickness becomes larger as it proceeds along the surface plate direction with respect to the second inner surface 22 a of the second window member 22 Spacer 24 is formed.

  As described above, in the case of the optical cell according to the second embodiment, the wedge substrate may not be used for the first window member 21 and the second window member 22 themselves, and the wedge angle θ is formed using a general parallel plate. As compared with the first embodiment, it can be manufactured at low cost.

  Moreover, even if it is such a thing, the reflected light which generate | occur | produces in the optical measurement cell 2 is formed by wedge angle (theta) of the range of said Formula (5), and it prevents that reflected light injects into detector 5A. The transmittance of the laser light passing through the test object X can be within the range suitable for measuring particle physical properties.

  Therefore, it is possible to realize, for example, measurement in which the measurement error due to the reflected light is eliminated in the measurement of the particle size distribution or the like.

  In addition, it is not necessary to form an anti-reflection coating film on the cell 2 for measuring particle physical properties, and the restriction on the material of the window material is also reduced, so for example, it has a high light absorption characteristic value f and reflection It becomes possible to measure the particle physical properties even for an object to be measured whose particle physical properties have been difficult to measure because the protective coating film and the window material itself are attacked.

In the particle physical property measuring cell 2 of the second embodiment, the transmittance T to the test object X having an absorption characteristic value of 100 m ⁻¹ ≦ f ≦ 2.4 × 10 ⁴ m ⁻¹ is at least 0.1. In order to prevent the detector 5A from detecting the reflected light generated by the particle physical property measuring cell 2 while satisfying the above, it may be configured to satisfy 0.048 ° <θ ≦ 0.22 °. In other words, the angle φ formed by at least one of the surfaces of the first flat plate 21 and the second flat plate 22 with the virtual plane PL perpendicular to the optical axis is 0.024 ° <φ ≦ 0.11 °. It should be configured as follows. This is because θ is twice as large as φ according to the geometrical relationship in the second embodiment. Further, for example, in order to satisfy the transmittance T of 0.7 or more for the object X having an absorption characteristic value of 100 m ⁻¹ ≦ f ≦ 2.4 × 10 ⁴ , 0.08 ° ≦ φ ≦ 0 It may be configured to be 9 °. The same applies to the case where a wedge substrate as in the first embodiment is used for φ.

  Other embodiments will be described.

  In the particle physical property measuring cell 2 according to the present invention, at least one surface of the first outer surface 21b, the first inner surface 21a, the second inner surface 22a, and the second outer surface 22b is configured to be inclined with respect to the other surface. It should be done. For example, as shown in FIG. 6A, the first window member 21 is formed of a wedge substrate, and the second window member 22 is formed of parallel flat plates, and only the first outer surface 21b is formed on the other three surfaces. You may comprise so that it may incline with respect to it.

  Further, as shown in FIG. 6B, when the first window plate 21 and the second window plate 22 are formed using a wedge substrate, the surface on which the wedge is formed is referred to as the first inner surface 21a, the first You may use as 2 inner surface 22a. In this case, as described in the second embodiment, the spacer 24 itself may be formed in a wedge shape so as to have a wedge. With regard to the shape of the spacer 24, if the ring-shaped member is cut obliquely, it is possible to form a wedge on each surface while sealing the entire outer periphery of the first window member 21 and the second window member 22. it can.

  Furthermore, in the particle physical property measuring cell 2 according to the second embodiment, the particle physical property measuring cell 2 is disposed so that the laser light is obliquely incident on the first outer surface 21b, as shown in FIG. As shown, the laser light may be arranged to be incident perpendicularly to the first outer surface 21 b.

  In addition, it is not necessary that the first outer surface 21b, the first inner surface 21a, the second inner surface 22a, and the second outer surface 22b are all inclined. It may be configured as follows.

  The thicknesses of the first window member 21 and the second window edge 22 may be the same or different. For example, one of them may be thinly formed to easily cause a temperature change, and the temperature in the particle physical property measuring cell 2 may be easily detected by a radiation thermometer or the like.

  The spacer 24 is a vapor deposition film formed using a vapor deposition method, a sputtered film formed using a sputtering method, a plating film formed using a plating method, and a printed film formed using a printing method. I don't care. That is, it is sufficient that the thickness can be changed continuously.

The optical measurement cell 2 according to the present invention is, for example, a particle physical property measurement cell having an absorption characteristic value f of 1 × 10 ² m ⁻¹ ≦ f ≦ 2 × 10 ⁵ m ⁻¹ and at least a part of the gap S However, the optical path length L in the test subject may be configured to be 0.11 μm ≦ L ≦ 0.48 μm. In other words, even in such applications, the optical measurement cell 2 according to the present invention can obtain particle physical properties while reducing measurement errors without dilution.

  The particle physical property measuring cell 2 described in each embodiment is a batch type, but may be a flow type. In this case, the flow type can be obtained by continuously introducing the test object X from the hole 28.

  In addition, although the particle size distribution measuring device 100 of the above embodiment is of the so-called diffraction / scattering type, the object to be detected in the cell for measuring particle physical properties is irradiated with laser light, and at that time the sample is It may be a so-called dynamic light scattering type configured to measure the particle size distribution by analyzing fluctuations of the scattered light generated due to the Brownian motion of the particles of. Further, the object to be detected is not limited to the liquid to be detected which includes the dispersion medium and the dispersoid, and may be formed of only the particles and the gas in the state of being accommodated in the gap.

  Furthermore, the cell for measuring physical properties of particles according to the present invention may be used for an optical analysis device using, for example, infrared spectroscopy, in addition to the particle diameter distribution measurement device.

  In addition, it goes without saying that the present invention is not limited to the above embodiments, and that each embodiment can be combined or various modifications can be made without departing from the scope of the invention.

100 ... particle physical property measuring device 2 ... cell for particle physical property measurement 21 ... first window plate 22 ... second window plate 21 a ... first inner surface 22 a ... second inner surface 21 b ... First outer surface 22b Second outer surface 24 Spacer 28 Hole 29 Plug

Claims (11)

A first window plate having a first outer surface and a first inner surface opposite to the first outer surface;
A second window plate having a second inner surface and a second inner surface opposite to the second inner surface, the second window panel being disposed such that the second inner surface faces the first inner surface;
It is a particle | grain physical-property measurement cell provided with the clearance gap formed between the said 1st inner surface and the said 2nd inner surface and in which a test subject is accommodated, Comprising:
At least the first window plate and the light passing region through which light passes in the second window plate, at least one of the first outer surface, the first inner surface, the second inner surface, or the second outer surface A cell for measuring particle properties of particles characterized in that one surface is inclined with respect to some other surface or all other surfaces.   The cell for measuring particle physical properties according to claim 1, wherein the first window plate or the second window plate is a wedge substrate. The first inner surface and the second inner surface are disposed parallel to each other,
The first outer surface is inclined to the first inner surface, and the second outer surface is inclined to the second inner circle,
The cell for measuring particle physical properties according to claim 2, wherein the first outer surface and the second outer surface are arranged not to be parallel to each other. The first window plate is a parallel flat plate in which the first outer surface and the first inner surface are disposed in parallel,
The second window plate is a parallel flat plate in which the second outer surface and the second inner surface are disposed in parallel,
The cell for measuring particle physical properties according to claim 1, further comprising a wedge-shaped spacer provided between the first window plate and the second window plate.   5. The particle physical property measurement according to claim 4, wherein the spacer is vapor-deposited on the first inner surface or the second inner surface and formed so as to increase in thickness as it proceeds along the face plate direction. cell. A first window plate having a first outer surface and a first inner surface opposite to the first outer surface;
A second window plate having a second inner surface and a second inner surface opposite to the second inner surface, the second window panel being disposed such that the second inner surface faces the first inner surface;
A gap formed between the first inner surface and the second inner surface and containing the object to be detected, the absorption coefficient of the object to be detected contained in the gap being ε, the member is accommodated in the gap The light absorption characteristic value f of the test object is 1 × 10 ² m ⁻¹ ≦ f ≦ 2 × where the light absorption characteristic value f which is the product of c and ε and c is the dispersoid concentration of the test object. A cell for measuring the physical properties of particles, which is 10 ⁵ m ⁻¹ ,
At least a part of the gap is configured such that the optical path length L in the test target is 0.1 μm ≦ L ≦ 1000 μm,
At least the first window plate and the light passing region through which light passes in the second window plate, at least one of the first outer surface, the first inner surface, the second inner surface, or the second outer surface A cell for measuring particle properties of particles, wherein one surface is configured to be inclined with respect to some other surface or all other surfaces. The light absorption characteristic value f of the test object is 1 × 10 ³ m ⁻¹ ≦ f ≦ 1 × 10 ⁴ m ⁻¹ ,
The cell for measuring particle physical properties according to claim 6, wherein at least a part of the gap is configured such that an optical path length L of the test object is 1 μm ≦ L ≦ 500 μm. The first window plate is a parallel flat plate in which the first outer surface and the first inner surface are disposed in parallel,
The second window plate is a parallel flat plate in which the second outer surface and the second inner surface are disposed in parallel,
And a wedge-shaped spacer provided between the first window plate and the second window plate,
The wedge angle, which is the angle between the first inner surface and the second inner surface, is θ, the outer diameter of the first window plate and the second window plate in the flat plate direction is 2R, and the optical path length in the test object is L , Where f is the light absorption characteristic value of the test object, and T is the target transmittance,
The cell for measuring particle physical properties according to claim 1, wherein the shape of the spacer is configured to satisfy θ ≦ −2 sin ⁻¹ (log T / 2 fR). When the distance between the cell for measuring particle physical properties and the position where light passing through the second window plate is detected is D, and the detectable radius at the position where light is detected is r.
9. The cell for measuring particle physical properties according to claim 8, wherein the shape of the spacer is configured to satisfy (1/2) tan ⁻¹ (r / D) <θ.   When at least one of the first outer surface, the first inner surface, the second inner surface, or the second outer surface makes an angle φ with an imaginary plane perpendicular to the optical axis of the light The cell for measuring particle physical properties according to any one of claims 1 to 9, wherein 0.024 ° ≦ φ40.11 ° is satisfied. A cell for measuring particle physical properties according to any one of claims 1 to 10.
A light source for irradiating light to the cell for measuring particle physical properties;
And a detector for detecting light that has passed through the particle physical property measuring cell.