JP2019100370A - Actuator, valve and fluid controller - Google Patents

Abstract

To provide an actuator having a booster mechanism of excellent durability, a valve, and a fluid controller.SOLUTION: According to a valve comprising an actuator, a first booster mechanism 31 has a plurality of first levers 34, and a plurality of first transmission members 37 equivalent to a first transmission unit is provided in association with the plurality of first levers 34. Each first lever 34 has a point of effort part (inner end part 34F) receiving force from a spring receiving member 22, a fulcrum part (outer end part 34E) contacting with a lower surface 17F of an intermediate casing 17 and serving as a center of rotation of each first lever 34, and a point of load part (portion of an outside part 34B contacting with an upper end part 37C of the first transmission member 37) transmitting force to the first transmission member 37. Each first transmission member 37 has a first contact part (upper end part 37C) linearly contacting with the point of load of each first lever 34.SELECTED DRAWING: Figure 2

Description

  The present invention relates to an actuator, a valve, and a fluid control device used in a fluid line such as a semiconductor manufacturing apparatus.

  Valves have been proposed that have a boosting mechanism that boosts the force with a flexible biasing member that utilizes the principle of leverage. (See, for example, Patent Document 1).

US Patent No. 6059259

  However, in the boosting mechanism disclosed in Patent Document 1, since distortion occurs in the biasing member, the durability is poor, and the valve can not be used in a valve having a large number of opening and closing times.

  Then, an object of the present invention is to provide an actuator, a valve, and a fluid control device which have a highly efficient boost mechanism.

  In order to solve the above object, the actuator according to one aspect of the present invention is provided in a casing, a reciprocating member reciprocably provided in the casing, and the casing, and drives the reciprocating member. Driving means, a first boosting portion that boosts the driving force applied to the reciprocating member by the driving means, and a first transmission portion that transmits the force boosted by the first boosting portion. And a moving member which moves by a force from the first transmission portion, the first force-in-force portion includes a plurality of first levers disposed in the circumferential direction of the reciprocating member, and the first transmission The unit has a plurality of first transmission members provided corresponding to the plurality of first levers, and each first lever abuts on the power point unit receiving a force from the reciprocating member and the casing Fulcrum that is the center of rotation of each first lever, and And a force output portion for transmitting a force to the first transmission member, the first transmission member includes a first contact portion in line contact with respect to the force output portion of the first lever.

  Further, a second power boosting portion for boosting the force transmitted by the first transmission portion, and a second transmission portion for transmitting the force boosted by the second power boosting portion to the moving member are further provided. The second force-in-force portion includes a plurality of second levers provided corresponding to the first transmission member, and the second transmission portion is provided corresponding to the plurality of second levers. And each of the second levers has a power point portion receiving a force from each of the first transmission members, and a fulcrum portion which is in contact with the casing and serves as a center of rotation of each of the second levers. And a point of action for transmitting a force to the second transmission member, wherein each first transmission member has a second contact portion in line contact with the point of force of each second lever, and each second transmission The member may have a third contact portion in line contact with the action point of each second lever.

  Further, a valve according to one aspect of the present invention includes: a body having a fluid passage formed therein; a valve body for opening and closing the fluid passage; a casing connected to the body; A reciprocating member, a driving means provided in the casing for driving the reciprocating member, a first power unit for multiplying a driving force applied to the reciprocating member by the driving means, and A first transmission portion for transmitting a force boosted by the first power portion, and allowing the valve body to open and close the fluid passage so that the fluid passage can be moved close to and away from the body, the first transmission portion A moving member that moves by a force from the first power unit, the first power unit includes a plurality of first levers arranged in the circumferential direction of the reciprocating member, and the first transmission unit includes the plurality of first levers Provided corresponding to the first lever of A plurality of first transmission members, each of the first levers having a power point portion receiving a force from the reciprocating member, and a fulcrum portion which is in contact with the casing and serves as a center of rotation of each first lever And an action point portion for transmitting a force to the first transmission member, and each first transmission member has a first contact portion in line contact with the action point portion of each first lever.

  Further, a second power boosting portion for boosting the force transmitted by the first transmission portion, and a second transmission portion for transmitting the force boosted by the second power boosting portion to the moving member are further provided. The second force-in-force portion includes a plurality of second levers provided corresponding to the first transmission member, and the second transmission portion is provided corresponding to the plurality of second levers. And each of the second levers has a power point portion receiving a force from each of the first transmission members, and a fulcrum portion which is in contact with the casing and serves as a center of rotation of each of the second levers. And a point of action for transmitting a force to the second transmission member, wherein each first transmission member has a second contact portion in line contact with the point of force of each second lever, and each second transmission The member may have a third contact portion in line contact with the action point of each second lever.

  A fluid control device according to one aspect of the present invention is a fluid control device including a plurality of fluid control devices, and at least one of the plurality of fluid control devices is the above-described valve.

  According to the present invention, it is possible to provide an actuator, a valve, and a fluid control device having a boost mechanism with excellent durability.

FIG. 2 is a longitudinal cross-sectional view of the valve in a closed state according to an embodiment of the present invention. It is a section perspective view near a boost mechanism. It is a perspective view of the state which combined the boosting mechanism and the movement part. It is a disassembled perspective view of a boosting mechanism and a moving part. (A) is a side view of a 1st lever, (b) is a side view of a 1st transmission member, (c) is a side view of a 2nd transmission member. (A) is a plan view of the boosting mechanism and the moving part in the closed state of the valve, and FIG. 6 (b) is a cross-sectional view taken along the line VI-VI of (a). (A) is a top view of the boosting mechanism and the moving part when the valve is in an open state, and FIG. 7 (b) is a cross-sectional view taken along the line VII-VII of (a). The schematic of a semiconductor manufacturing apparatus is shown.

  An actuator, a valve, and a fluid control device according to an embodiment of the present invention will be described with reference to the drawings.

  FIG. 1 is a longitudinal sectional view of the valve 1 in the closed state in the present embodiment. As shown in FIG. 1, the valve 1 is a diaphragm valve and is used in a gas line (for example, the most upstream side of the gas line) configured by a plurality of fluid control devices of the fluid control device 55 (FIG. 8) It is a valve.

  The valve 1 includes a body 2 and an actuator 3. In the following description, the actuator 3 of the valve 1 will be described as the upper side and the body 2 side as the lower side.

  The body portion 2 has a body 5 and a diaphragm 11.

  In the body 5, a cylindrical valve chamber 5a and an inflow passage 5b and an outflow passage 5c communicating with the valve chamber 5a are formed. An annular valve seat 5D protruding toward the casing 10 is provided on the periphery (the opening of the inflow path 5b) of the portion where the inflow path 5b of the body 5 and the valve chamber 5a communicate with each other. The valve seat 5D is made of the same metal material as the body 5. The body 5 is provided so as to extend upward, has a cylindrical shape, and has a cylindrical portion 5E having an internal thread portion formed on the inner peripheral portion.

  The diaphragm 11 is composed of a plurality of diaphragms and is disposed in the valve chamber 5a. The outer peripheral edge portion of the diaphragm 11 is narrowed by the annular pressing adapter 12 and held against the body 5. The diaphragm 11 which is a valve body has a substantially spherical shell shape, and a substantially arc shape convex upward is in a natural state. When the diaphragm 11 abuts and separates from the valve seat 5D, communication or blocking between the inflow passage 5b and the outflow passage 5c is performed. When the valve 1 is in the closed state, the diaphragm 11 abuts on the valve seat 5D, and the inflow passage 5b and the outflow passage 5c are shut off. When the valve 1 is in the open state, the diaphragm 11 is separated from the valve seat 5D, and the inflow passage 5b and the outflow passage 5c communicate with each other.

  The actuator 3 has a casing 10, a pressing adapter 12, a diaphragm press 13, a rod 14, a moving unit 15, a driving unit 20, and first to fourth O-rings 4A to 4D.

  The casing 10 comprises a bonnet 16, an intermediate casing 17, an actuator cap 18 and a support ring 19.

  The bonnet 16 has a substantially cylindrical shape, and is fixed to the body 5 by screwing the male screw portion on the outer periphery of the lower end portion thereof with the female screw portion of the cylindrical portion 5E of the body 5. A female screw portion is formed on the inner circumference of the upper end portion of the bonnet 16.

  The intermediate casing 17 is substantially cylindrical and has an upper portion 17A and a lower portion 17B. A through hole 17c is formed in the upper side portion 17A, and an accommodation hole 17d having a larger inside diameter than the through hole 17c is formed in the lower side portion 17B. An outwardly projecting protrusion 17E is provided on the outer periphery of the lower side 17B. Male screw parts are formed on the outer peripheral surface of the lower side part 17B and above and below the projecting part 17E. The intermediate casing 17 is fixed to the bonnet 16 by screwing the lower male screw portion of the protruding portion 17E to the female screw portion at the upper end of the bonnet 16. The lower end of the lower side portion 17B has an annular lower surface 17F, and the inner diameter side of the lower surface 17F is configured to be positioned inside the inner peripheral surface of the support ring 19 described later. A first O-ring 4A is provided on the outer periphery of the upper portion 17A to prevent the drive fluid from leaking from a fluid introduction chamber 21d described later.

  The actuator cap 18 has a substantially cylindrical shape, and is fixed to the intermediate casing 17 by screwing an internal thread provided on the inner periphery of the lower end portion thereof with an external thread on the upper side of the projecting portion 17E of the intermediate casing 17. ing. The actuator cap 18 is formed with a fluid inflow path 18a into which the driving fluid flows, and an upper end portion of the fluid inflow path 18a is formed with a threaded portion 18b for screwing a pipe joint (not shown). .

  The support ring 19 has a cylindrical shape, and is disposed on the step portion 16A provided on the inner periphery of the bonnet 16. The upper end of the support ring 19 abuts on the lower surface 17 F of the intermediate casing 17, and the lower end of the support ring 19 abuts on a step portion 16 A provided on the inner periphery of the bonnet 16. Thus, the support ring 19 can not move up and down with respect to the bonnet 16. In addition, on the inner circumference of the support ring 19, an inward projecting portion 19A is provided.

  The diaphragm presser 13 is provided on the upper side of the diaphragm 11, supported movably in the vertical direction by the presser adapter 12, and can press the central portion of the diaphragm 11.

  The rod 14 is provided on the upper side of the diaphragm presser 13, supported movably in the vertical direction by the presser adapter 12, and capable of pressing the diaphragm presser 13.

  The moving unit 15 is supported by the lower end portion of the bonnet 16 so as to be movable in the vertical direction. The detailed configuration of the moving unit 15 will be described later.

  The drive unit 20 is configured of a piston 21, a spring support member 22, two coil springs 23, and a power boosting mechanism 30. The drive unit 20 is an air pressure drive type drive unit. The piston 21 and the two coil springs 23 correspond to driving means, and the spring receiving member 22 corresponds to a reciprocating member.

  The piston 21 has a substantially disc-shaped base 21A, a first upper extension 21B extending upward from the center of the base 21A, and a first lower extension 21C extending downward from the center of the base 21A. Equipped with

  The base 21 </ b> A is located above the upper portion 17 </ b> A of the intermediate casing 17 in the actuator cap 18. A second O-ring 4B is provided on the outer peripheral edge of the base 21A. The second O-ring 4B suppresses the radial movement of the base 21A when the base 21A moves in the vertical direction. The lower surface of the base 21A and the upper surface of the upper portion 17A of the intermediate casing 17 form a fluid introduction chamber 21d. The second O-ring 4B prevents the drive fluid from leaking from the fluid introduction chamber 21d.

  The upper portion of the first upward extending portion 21B is inserted into the fluid inflow path 18a. The third O-ring 4C suppresses the radial movement of the first upper extending portion 21B when the first upper extending portion 21B moves in the vertical direction. In addition, the third O-ring 4C prevents the drive fluid from leaking to the outside. The piston 21 is formed with a fluid introduction passage 21e which extends from the upper end of the first upward extension 21B to the lower surface of the base 21A and communicates with the fluid introduction chamber 21d.

  The first lower extending portion 21C penetrates the through hole 17c, and the radial direction of the first lower extending portion 21C when the first lower extending portion 21C moves up and down by the fourth O-ring 4D. Movement is suppressed. The fourth O-ring 4D prevents the drive fluid from leaking from the fluid introduction chamber 21d. A male screw portion is formed on the outer periphery of the lower end portion of the first lower extending portion 21C.

  The spring receiving member 22 is located below the piston 21 and includes a spring receiving portion 22A, a second upper extending portion 22B, and a second lower extending portion 22C. The spring receiving member 22 is provided so as to be capable of reciprocating in the vertical direction in the casing 10 together with the piston 21.

  The spring receiving portion 22A includes a disc-shaped main body portion 22D, a disc-shaped upper projecting portion 22E projecting upward from the upper surface of the main body portion 22D, and a disc-like projecting downward from the lower surface of the main body portion 22D. And a lower protrusion 22F. The main body 22D is located inside the intermediate casing 17, and the diameter of the main body 22D is smaller than the inner diameter of the accommodation hole 17d of the intermediate casing 17.

  The second upper extension 22B has a cylindrical shape with a bottom, and is provided to extend upward from the central portion of the upper protrusion 22E. A female screw is formed on the inner peripheral surface of the second upper extension 22B, and is screwed into the male screw of the first lower extension 21C. Thus, the piston 21 and the spring receiving member 22 are integrally configured.

  The second lower extending portion 22C has a regular hexagonal column shape, and is provided to extend downward from the central portion of the lower protruding portion 22F. The lower end of the second lower extending portion 22C is configured to be positioned in a recess 15m of a moving portion 15 described later.

  The two coil springs 23 are disposed in the accommodation hole 17d of the intermediate casing 17 between the lower surface of the upper portion 17A and the upper surfaces of the main portion 22D of the spring receiving portion 22A and the upper protrusion 22E. The two coil springs 23 always bias the spring receiving member 22 downward, whereby the piston 21 is always biased downward.

  Next, the boosting mechanism 30 and the moving unit 15 will be described.

  FIG. 2 is a cross-sectional perspective view of the vicinity of the boosting mechanism 30. FIG. 3 is a perspective view of a state in which the boosting mechanism 30 and the moving unit 15 are combined. FIG. 4 is an exploded perspective view of the boosting mechanism 30 and the moving unit 15. 5 (a) is a side view of the first lever 34 (second lever 38), FIG. 5 (b) is a side view of the first transmission member 37, and FIG. 5 (c) is a second view. It is a side view of transmission member 15A.

  The boosting mechanism 30 has a first boosting portion 31, a first transmission portion 32, and a second boosting portion 33. As shown in FIG. 3, on the moving unit 15, the second booster 33, the first transmission unit 32, and the first booster 31 are stacked in this order.

  The first boosting portion 31 has six first levers 34 and a first support member 35.

  The six first levers 34 independently have the same shape, and are arranged at equal intervals along the circumferential direction of the actuator 3 around the second lower extension 22C. Each first lever 34 is made of metal (for example, stainless steel), resin, ceramic or the like, and has a hardness that does not deform (do not distort) when the valve 1 is opened and closed. That is, each first lever 34 functions as a rigid body for the opening / closing operation of the valve 1.

  Each first lever 34 has an inner portion 34A and an outer portion 34B, and is tapered from the outer portion 34B toward the inner portion 34A. The outer side portion 34B is connected to be bent upward with respect to the inner side portion 34A.

  As shown in FIG. 5 (a), the first lever 34 has an upper surface 34C and a lower surface 34D. The portions constituting the inner portion 34A and the outer portion 34B of the upper surface 34C and the lower surface 34D are each planar.

  The outer end 34E and the inner end 34F of each first lever 34 extend parallel to the tangential direction of a circle centered on the axis of the actuator 3. Then, as shown in FIG. 2, the outer end 34E of each first lever 34 makes line contact with the lower surface 17F of the intermediate casing 17, and the inner end 34F is a regular hexagonal column of the second lower extension 22C. Are in line contact with the lower surface 22G of the lower protrusion 22F.

  The first support member 35 is made of an elastic material having flexibility, such as rubber, and has a substantially hexagonal ring shape in a plan view, and an insertion hole 35a is formed. An inner portion 34A of each first lever 34 is bonded to a portion of each side of the substantially hexagonal shape of the first support member 35 by an adhesive or the like. Thus, the six first levers 34 and the first support member 35 are integrated.

  The second lower extending portion 22C having a regular hexagonal column shape is inserted into the substantially hexagonal insertion hole 35a of the first support member 35. Since the insertion hole 35a has a dimension slightly larger than the outer diameter of the second lower extending portion 22C, the rotation of the first boosting portion 31 with respect to the second lower extending portion 22C is suppressed.

  The first transmission portion 32 is located below the first power boosting portion 31 and has a ring member 36 and six first transmission members 37. The six first transmission members 37 correspond to a first transmission unit.

  The ring member 36 is made of, for example, a metal (for example, stainless steel), a resin, a ceramic, or the like, has an annular shape, and is formed with a regular hexagonal insertion hole 36a. The outer circumferential surface 36B of the ring member 36 is tapered downward.

  The second lower extension 22C of the regular hexagonal column is inserted into the regular hexagonal insertion hole 36a of the ring member 36. Since the insertion hole 36a has a dimension slightly larger than the outer diameter of the second lower extension 22C, the rotation of the ring member 36 with respect to the second lower extension 22C is suppressed.

  Each first transmission member 37 is made of, for example, a plate material such as metal (for example, stainless steel), resin, ceramics, etc., and has a hardness that does not deform (do not distort) at the opening / closing operation of the valve 1. It has a shape. As shown in FIG. 5B, each first transmission member 37 has an upper surface 37A and a lower surface 37B. As shown in FIG. 4, the first transmission members 37 are arranged at equal intervals along the circumferential direction of the actuator 3 around the second lower extending portion 22C, and the upper surface 37A of each first transmission member 37 is The outer circumferential surface 36B of the ring member 36 is joined by an adhesive, brazing or welding. Thus, each first transmission member 37 is inclined with respect to the axial direction of the actuator 3, and the upper end portion 37C is located radially outward of the lower end portion 37D.

  Further, the upper end portion 37C and the lower end portion 37D of each first transmission member 37 extend in parallel to the tangential direction of a circle centered on the axis of the actuator 3. And, as shown in FIG. 2, the upper end portion 37C of each first transmission member 37 makes line contact with the lower surface 34D on the side of the outer portion 34B of each first lever 34, and the lower end 37D has a second lower extension. It faces each surface of the regular hexagonal column of the protrusion 22C. Further, each first transmission member 37 is configured to be tapered from the upper end 37C toward the lower end 37D. The upper end portion 37C of each first transmission member 37 corresponds to a first contact portion.

  The second boosting portion 33 is located below the first transmission portion 32 and includes six second levers 38 and a second support member 39. The six second levers 38 and the second support members 39 have the same configuration and shape as the six first levers 34 and the first support members 35, respectively.

  That is, each second lever 38 is made of metal (for example, stainless steel), resin, ceramic or the like, has a hardness that does not deform (do not distort) at the time of opening / closing operation of the valve 1 described later. And an outer side 38B. The outer end 38E and the inner end 38F of each second lever 38 extend parallel to the tangential direction of a circle centered on the axis of the actuator 3. Further, as shown in FIG. 5A, the second lever 38 has an upper surface 38C and a lower surface 38D, and the portions constituting the inner portion 38A and the outer portion 38B of the upper surface 38C and the lower surface 38D are planar. There is no.

  Then, as shown in FIG. 2, the outer end 38E of each second lever 38 makes line contact with the lower surface 19B of the projection 19A of the support ring 19, and each upper surface 38C of the inner end 38F A lower end portion 37D of the first transmission member 37 is in line contact. The lower end portion 37D of each first transmission member 37 corresponds to a second contact portion.

  The second support member 39 is made of an elastic material having flexibility, such as rubber, and has a substantially hexagonal ring shape in a plan view, and an insertion hole 39a is formed. An inner portion 38A of each second lever 38 is bonded to a portion of each side of the substantially hexagonal shape of the second support member 39 by an adhesive or the like. Thereby, the six second levers 38 and the second support members 39 are integrated.

  The second lower extending portion 22C having a regular hexagonal column shape is inserted into the substantially hexagonal insertion hole 39a of the second support member 39. Since the insertion hole 39a has a dimension slightly larger than the outer diameter of the second lower extending portion 22C, the rotation of the second boosting portion 33 with respect to the second lower extending portion 22C is suppressed.

  The moving unit 15 has six second transmission members 15A and a moving member 15B. The six second transmission members 15A correspond to a second transmission unit.

  The six second transmission members 15A have the same configuration and shape as the six first levers 34 except for the size thereof.

  That is, each second transmission member 15A is made of metal (for example, stainless steel), resin, ceramic or the like, has a hardness that does not deform (do not distort) at the time of opening / closing operation of the valve 1 described later , And an outer portion 15D. The outer end 15G and the inner end 15H of each second transmission member 15A extend parallel to the tangential direction of a circle centered on the axis of the actuator 3. Further, as shown in FIG. 5C, the second transmission member 15A has an upper surface 15E and a lower surface 15F, and the portions constituting the inner portion 15C and the outer portion 15D of the upper surface 15E and the lower surface 15F are planar I am

  Then, as shown in FIG. 2, the outer end 15G of each second transmission member 15A makes line contact with the lower surface 38D on the inner side 38A side of each second lever 38, and the inner end 15H is a second It opposes each surface of the regular hexagonal column of lower extending part 22C. The outer end 15G of each second transmission member 15A corresponds to a third contact portion.

  The moving member 15B is made of metal (for example, stainless steel), resin, ceramic or the like, and has a cylindrical base 15J and a protrusion 15K.

  The lower surface of the cylindrical base portion 15J can press the rod 14. The protrusion 15K is provided on the outer peripheral edge of the upper surface of the cylindrical base 15J so as to protrude upward and radially outward. The protrusion 15K has an annular shape, and the protrusion 15K forms a recess 15m. Six second transmission members 15A are fixed to the upper surface 15N of the protrusion 15K by an adhesive, brazing, welding or the like so as to be equally spaced along the circumferential direction of the actuator 3.

  Next, the opening and closing operation of the valve 1 will be described.

  6 (a) is a plan view of the boosting mechanism 30 and the moving part 15 when the valve 1 is in a closed state, and FIG. 6 (b) is a cross-sectional view taken along the line VI-VI of FIG. 6 (a). is there. FIG. 7 (a) is a plan view of the boosting mechanism 30 and the moving unit 15 when the valve 1 is in the open state, and FIG. 7 (b) is a cross-sectional view taken along the line VII-VII in FIG. 7 (a). is there. In FIGS. 6 and 7, the first support member 35 and the second support member 39 are not shown.

  As shown in FIG. 1, when the valve 1 is in the closed state, the drive fluid does not flow into the fluid introduction chamber 21d, and the spring receiving member 22 is biased downward by the two coil springs 23. Located at the lowest end. When the valve 1 changes from the open state shown in FIG. 7 to the closed state shown in FIG. 6, the inner end 34F of each first lever 34 is pushed by the lower surface 22G of the lower projection 22F, and each first lever 34 It pivots around an outer end 34E that abuts the lower surface 17F of the intermediate casing 17. As a result, the upper end portions 37C of the first transmission members 37 that contact the first levers 34 from below are pushed downward, and the ring member 36 and the first transmission members 37 move downward.

  As each first transmission member 37 is moved downward, the inner end 38F of each second lever 38 is pushed by the lower end 37D of each first transmission member 37, and each second lever 38 It pivots around an outer end 38E that abuts on the lower surface 19B of the protrusion 19A of the support ring 19. As a result, the outer end portions 15G of the second transmission members 15A, which abut the second lever 38 from below, are pushed downward, and the moving members 15B of the moving unit 15 move downward.

  The moving member 15B presses the rod 14 downward, and the rod 14 presses the diaphragm retainer 13 downward, whereby the diaphragm 11 is pressed and abuts on the valve seat 5D, and the communication between the inflow path 5b and the outflow path 5c Is blocked. In addition, since the first support member 35 and the second support member 39 are made of an elastic material, the first support member 35 and the second support member are rotated by the rotation of the first levers 34 and the second levers 38. The diameters of the outer peripheral portion and the inner peripheral portion of 39 are deformed so as to expand and contract.

  In this embodiment, the force (driving force) by which the two coil springs 23 push the spring receiving portion 22A of the spring receiving member 22 is boosted by the power boosting mechanism 30 to press the moving portion 15. It is done. That is, the contact point A1 of the outer end 34E of the first lever 34 with respect to the lower surface 17F of the intermediate casing 17 is a fulcrum, and the contact point B1 of the lower protrusion 22F of the inner end 34F of the first lever 34 with the lower surface 22G is a force point The force is multiplied by the principle of leverage and transmitted to the first transmission member 37, with the contact portion C1 of the outer portion 34B of the first lever 34 against the upper end 37C of the first transmission member 37 as an action point. Thus, the inner end 34F of the first lever 34 is the point of force, the outer end 34E is the fulcrum, and the portion of the outer portion 34B of the first lever 34 that contacts the upper end 37C of the first transmission member 37 is It corresponds to the point of action.

  Furthermore, the contact portion A2 of the outer end 38E of the second lever 38 with the lower surface 19B of the protrusion 19A of the support ring 19 is a fulcrum, and the inner end 38F of the second lever 38 is lower than the lower end 37D of the first transmission member 37. With the contact portion B2 as the force point and the contact portion C2 with the outer end portion 15G of the second transmission member 15A of the inner portion 38A of the second lever 38 as the action point, the force is boosted by the principle, and the moving portion 15 is moved. Transmitted to The inner end 38F of the second lever 38 functions as a force application portion, the outer end 38E as a fulcrum, and the portion of the inner portion 38A of the second lever 38 that abuts against the outer end 15G of the second transmission member 15A functions It corresponds to the point section.

  Thus, the biasing force of the two coil springs 23 is configured to be boosted by the boosting mechanism 30 to press the moving portion 15. Thereby, even if the biasing force of the two coil springs 23 is small, the diaphragm 11 is pressed against the pressure of the fluid flowing in the inflow path 5b to interrupt the communication between the inflow path 5b and the outflow path 5c. be able to.

  Further, by introducing the drive fluid into the fluid introduction chamber 21d via the fluid inflow passage 18a and the fluid introduction passage 21e, an upward force of air pressure acts on the piston 21 and the spring receiving member 22. By making this force larger than the biasing force of the two coil springs 23, the piston 21 and the spring receiving member 22 move upward. As a result, there is no force for pushing the moving member 15B, so the diaphragm 11 is pushed up by the pressure of the fluid flowing in the inflow path 5b and the restoring force of the diaphragm 11, and is separated from the valve seat 5D, and the valve is opened.

  At this time, the diaphragm presser 13 and the rod 14 are pushed up by the diaphragm 11 being pushed up, and the moving part 15 is also pushed up. As a result, as shown in FIG. 7, the second lever 38 is pushed upward by the outer end 15G of the second transmission member 15A, and the second lever 38 pivots about the outer end 38E. , The inner end 38F is pushed up. As a result, the lower end 37D of the first transmission member 37 is pushed upward by the inner end 38F of the second lever 38, and the first lever 34 is pushed upward by the upper end 37C of the first transmission member 37. The first lever 37 is pivoted about its outer end 34E to push up the inner end 34F.

  The air pressure required to open the valve may be slightly larger than the biasing force of the two coil springs 23, and the biasing force of the two coil springs 23 can be reduced by the boosting mechanism 30. As such, the air pressure required to open the valve may be small.

  As described above, according to the valve 1 including the actuator 3 of the present embodiment, the first electromotive force unit 31 includes the plurality of first levers 34, and the plurality of first transmission members corresponding to the first transmission unit. 37 are provided corresponding to the plurality of first levers 34. Each of the first levers 34 is a force point portion (inner end portion 34F) that receives a force from the spring receiving member 22 and a fulcrum portion that abuts on the lower surface 17F of the intermediate casing 17 and serves as a center of rotation of each first lever 34 (The outer end portion 34E) and an action point portion (a portion abutted against the upper end portion 37C of the first transmission member 37 of the outer portion 34B) for transmitting a force to the first transmission member 37; The member 37 has a first contact portion (upper end portion 37C) in line contact with the action point portion of each first lever 34.

  With this configuration, each first transmission member 37 contacts the respective first levers 34 not by a point but by a line, so that the forces are concentrated at the mutually contacting portions of the respective first levers 34 and the respective first transmission members 37. Can be prevented. Therefore, even if the required number of opening / closing operations of the actuator 3 and the valve 1 is, for example, 10 million times or more, it is possible to provide the actuator 3 and the valve 1 having excellent durability satisfying the requirements.

  Further, according to the valve 1 including the actuator 3 of the present embodiment, the second power boosting unit 33 has a plurality of second levers 38 provided corresponding to the first transmission member 37, and the second transmission unit The plurality of second transmission members 15A corresponding to the above are provided corresponding to the plurality of second levers 38. Each of the second levers 38 is in contact with the power point portion (inner end portion 38F) receiving the force from the first transmission member 37 and the lower surface 19B of the projecting portion 19A of the support ring 19 to rotate the second levers 38. There is a fulcrum portion (outer end 38E) as a center, and an action point (a portion of the inner portion 38A that abuts against the outer end 15G of the second transmission member 15A) for transmitting a force to the second transmission member 15A. Each of the first transmission members 37 has a second contact portion (lower end portion 37D) in line contact with the power point portion of each of the second levers 38, and each of the second transmission members 15A is of the respective second levers 38. It has a third contact portion (outer end 15G) in line contact with the action point.

  With this configuration, each first transmission member 37 contacts each second lever 38 with a line instead of a point, so that the forces are concentrated at the mutually contacting portions of each second lever 38 and each first transmission member 37. Can be prevented. Similarly, since each second transmission member 15A contacts each second lever 38 not by a point but by a line, the forces are concentrated at the mutually contacting portions of each second lever 38 and each second transmission member 15A. Can be prevented. Therefore, even if the required number of opening / closing operations of the actuator 3 and the valve 1 is, for example, 10 million times or more, it is possible to provide the actuator 3 and the valve 1 having excellent durability satisfying the requirements.

  Next, the semiconductor manufacturing apparatus 60 provided with the fluid control device 55 and the fluid control device 55 in which the valve 1 described above is used will be described.

  FIG. 8 is a schematic view of a semiconductor manufacturing apparatus 60. As shown in FIG. The semiconductor manufacturing apparatus 60 is, for example, a CVD apparatus, has a gas supply unit 50 having a fluid control unit 55, a vacuum chamber 70, and an exhaust unit 80, and forms a passivation film (oxide film) on a wafer. Device.

  The gas supply means 50 includes a gas supply source 51, a pressure gauge 52, and a fluid control device 55. The fluid control device 55 has a plurality of gas lines configured of a plurality of fluid control devices, and includes on-off valves 53 and 54 and MFCs 1 to 4 (mass flow controllers) as fluid control devices. An open / close valve 61 is provided between the gas supply means 50 and the vacuum chamber 70. The vacuum chamber 70 includes a mounting table 71 for mounting the wafer 72 and an electrode 73 for forming a thin film on the wafer 72. A commercial power supply 62 is connected to the vacuum chamber 70. The exhaust means 80 includes an exhaust pipe 81, an open / close valve 82, and a dust collector 83.

  When forming a thin film on the wafer 72, the supply of gas to the vacuum chamber 70 is controlled by opening and closing the on-off valves 53 and 54, and the MFCs 1 to 4 and the on-off valve 61. Further, when removing the particulate matter which is a by-product generated when a thin film is formed on the wafer 72, the on-off valve 82 is opened, and the particulate matter is removed by the dust collector 83 through the exhaust pipe 81. Ru.

  The valve 1 in the present embodiment can be applied to the on-off valves 53, 54, 61, and 82. As described above, since the valve 1 is excellent in durability, the fluid control device 55 excellent in durability can be provided.

  In addition, although the case where the semiconductor manufacturing apparatus 60 was a CVD apparatus was demonstrated, a sputtering apparatus or an etching apparatus may be sufficient. The etching apparatus (dry etching apparatus) includes a processing chamber, a gas supply unit (fluid control apparatus), and an exhaust unit, and is an apparatus for processing a material surface or the like by a corrosive action of a reactive gas. The sputtering apparatus comprises a target, a vacuum chamber, gas supply means (fluid control device), and exhaust means, and is an apparatus for forming a film on the surface of a material.

  Note that the present embodiment is not limited to the above-described embodiment. Those skilled in the art can make various additions and modifications within the scope of the present invention.

  For example, although the boosting mechanism 30 in the above embodiment includes the first boosting portion 31, the first transmission portion 32, and the second boosting portion 33, the first boosting portion 31 and the first boosting portion It may be configured by only the transmission unit 32 or only by the first boosting unit 31. When the boosting mechanism 30 includes only the first boosting portion 31 and the first transmission portion 32, the lower end portion 37D of each first transmission member 37 corresponds to the inner portion 15C of each second transmission member 15A. Alternatively, the lower end portion 37D of each first transmission member 37 may press the projection 15K of the moving member 15B without providing the six second transmission members 15A in the moving portion 15.

  In addition, although the first force boosting portion 31 has six first levers 34, two or more may be sufficient, and the first transmission member 37, the second lever 38, and the second transmission member 15A are The number may be the same as that of the first lever 34.

  Further, although the biasing means is the two coil springs 23, it may be a disc spring. The two coil springs 23 are provided on the lower side of the piston 21 to bias the spring receiving member 22. However, the two coil springs 23 are provided on the upper side of the piston 21 to bias from the upper side of the piston 21 You may

  Moreover, in said embodiment, although the drive means was comprised by piston 21 and the two coiled springs 23, you may be another structure. Further, in the above embodiment, the actuator 3 includes the presser adapter 12, the diaphragm presser 13, and the rod 14. However, the actuator 3 may not be provided. Further, although the valve seat 5D is made of the same metal material as the body 5, the valve seat may be configured by embedding an annular sheet made of resin.

1: Valve, 5: Body, 5b: Inflow path, 5c: Outflow path, 3: Actuator, 10: Casing, 11: Diaphragm, 15: Moving part, 15A: Second transmission member, 15B: Moving member, 16: Bonnet , 17: intermediate casing, 18: actuator cap, 19: support ring, 20: drive part, 21: piston, 22: spring receiving member, 23: coil spring, 31: first power boosting part, 32: first transmission part , 33: second boosting portion, 34: first lever, 37: first transmission member, 38: second lever, 55: fluid control device

Claims (5)

With the casing,
A reciprocating member reciprocably provided in the casing;
Drive means provided in the casing for driving the reciprocating member;
A first power boosting unit that boosts a driving force applied to the reciprocating member by the driving unit;
A first transmission unit for transmitting the force boosted by the first boosting unit;
A moving member that moves by a force from the first transmission unit;
The first power boosting portion includes a plurality of first levers disposed in the circumferential direction of the reciprocating member,
The first transmission unit includes a plurality of first transmission members provided corresponding to the plurality of first levers,
Each of the first levers has an action point portion receiving a force from the reciprocating member, a fulcrum portion which is in contact with the casing and serves as a center of rotation of each first lever, and an action of transmitting the force to the first transmission member Have a point and
An actuator, wherein each first transmission member has a first contact portion in line contact with the action point of each first lever. A second boost unit that boosts the force transmitted by the first transmission unit;
And a second transmission unit for transmitting the force boosted by the second boosting unit to the moving member.
The second boosting portion has a plurality of second levers provided corresponding to the first transmission member,
The second transmission unit includes a plurality of second transmission members provided corresponding to the plurality of second levers,
Each second lever transmits a force to a power point portion receiving a force from the first transmission portion, a fulcrum portion which is in contact with the casing and serves as a center of rotation of each second lever, and the second transmission member Having a point of action,
Each first transmission member has a second contact portion in line contact with the power point portion of each second lever,
The actuator according to claim 1, wherein each second transmission member has a third contact portion in line contact with the action point portion of each second lever. A body having a fluid passage formed therein;
A valve body for opening and closing the fluid passage;
A casing connected to the body;
A reciprocating member reciprocably provided in the casing;
Drive means provided in the casing for driving the reciprocating member;
A first power boosting unit that boosts a driving force applied to the reciprocating member by the driving unit;
A first transmission unit for transmitting the force boosted by the first boosting unit;
And a moving member provided close to and away from the body so as to open and close the fluid passage by the valve body, and moving by a force from the first transmission portion.
The first power boosting portion includes a plurality of first levers disposed in the circumferential direction of the reciprocating member,
The first transmission unit includes a plurality of first transmission members provided corresponding to the plurality of first levers,
Each of the first levers has an action point portion receiving a force from the reciprocating member, a fulcrum portion which is in contact with the casing and serves as a center of rotation of each first lever, and an action of transmitting the force to the first transmission member Have a point and
Each first transmission member has a first contact portion in line contact with the action point of each first lever. A second boost unit that boosts the force transmitted by the first transmission unit;
And a second transmission unit for transmitting the force boosted by the second boosting unit to the moving member.
The second boosting portion has a plurality of second levers provided corresponding to the first transmission member,
The second transmission unit includes a plurality of second transmission members provided corresponding to the plurality of second levers,
Each second lever transmits a force to a power point portion receiving a force from each first transmission member, a fulcrum portion that abuts on the casing and serves as a center of rotation of each second lever, and the second transmission member Having a point of action,
Each first transmission member has a second contact portion in line contact with the power point portion of each second lever,
The valve according to claim 3, wherein each second transmission member has a third contact portion in line contact with the action point of each second lever. A fluid control device comprising a plurality of fluid control devices, comprising:
A fluid control device in which at least one of the plurality of fluid control devices is a valve according to claim 3 or 4.

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