JP2019081316A - Liquid discharge device - Google Patents

Abstract

To provide a technique releasing heat generated by slide movement of a slide part.SOLUTION: A liquid discharge device comprises: a slide part slide-movable to a liquid chamber; and a drive mechanism slide-moving the slide part to the liquid chamber. The drive mechanism comprises: a first fluid chamber being brought into contact with the slide part and storing first fluid; a first fluid supply passage supplying the first fluid to a first fluid chamber; a first fluid discharge passage being a passage different from the first fluid supply passage and discharging the first fluid from the first fluid chamber; a first supply valve provided in the first fluid supply passage; and a first discharge valve provided in the first fluid discharge passage. By supplying or discharging the first fluid in the first fluid chamber by controlling the first supply valve and the first discharge valve, the slide part is slide-moved to the liquid chamber.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a liquid discharge device.

  For example, in Patent Document 1, a through hole is formed at a position corresponding to a supply flow path in order to change the flow path resistance of the supply flow path for supplying the liquid to the liquid chamber. A configuration is disclosed in which a flat plate is slid along the opening surface of the supply flow channel.

Japanese Patent Application Publication No. 2007-320042

  However, for example, when the plate is reciprocated at high speed, the plate may generate heat. In addition, when the plate generates heat, the heat may change the characteristics of the liquid, and as a result, it may be difficult to perform stable discharge.

  The present invention has been made to solve at least a part of the above-mentioned problems, and can be realized as the following modes.

(1) According to one aspect of the present invention, a liquid discharge device is provided. The liquid discharge device is in communication with a nozzle for discharging the liquid, and has a liquid chamber provided with an inflow hole for introducing the liquid, a supply flow path for supplying the liquid to the liquid chamber, the liquid chamber, and the liquid chamber There is provided a communication hole which is provided between the supply flow channel and can communicate the inflow hole and the supply flow channel, and a slide portion which can slide relative to the liquid chamber, and the slide portion A drive mechanism for slidingly moving relative to the chamber, and a control unit for controlling the drive mechanism, the drive mechanism being in contact with the slide unit, and a first fluid chamber for containing a first fluid; A first fluid supply flow channel for supplying the first fluid to the first fluid chamber, and a flow channel different from the first fluid supply flow channel, the first fluid chamber from the first fluid chamber Fluid discharge channel for discharging the fluid, and the first fluid supply channel A first supply valve provided and a first discharge valve provided in the first fluid discharge flow path, the control unit comprising the first supply valve and the first discharge valve The slide unit is slid relative to the liquid chamber by supplying or discharging the first fluid in the first fluid chamber by controlling the first fluid chamber. According to the liquid discharge apparatus of such a configuration, even if heat is generated by the slide movement of the slide portion, the heat can be dissipated by the first fluid in the first fluid chamber.

(2) In the liquid discharge device of the above aspect, the first supply valve and the first discharge valve may be provided with piezo actuators. According to such a liquid discharge device, as a result of being able to rapidly perform supply and discharge of the first fluid in the first fluid chamber, it is possible to slide the slide portion relative to the liquid chamber quickly. .

(3) In the liquid discharge device of the above aspect, the drive mechanism is further provided on the opposite side to the first fluid chamber with respect to the slide portion, and in contact with the slide portion, a second fluid A second fluid chamber for storing the second fluid, a second fluid supply channel for supplying the second fluid to the second fluid chamber, and a second fluid discharge passage for discharging the second fluid from the second fluid chamber And two fluid discharge channels. According to the liquid discharge device of such a configuration, even if heat is generated by the slide movement of the slide portion, the heat can be dissipated by the second fluid in the second fluid chamber.

(4) In the liquid discharge device of the above aspect, an elastic member may be provided in the second fluid chamber for sliding the slide portion. According to the liquid discharge device of such a form, the slide portion can be slid by the elastic member.

(5) In the liquid discharge device of the above aspect, the wall surfaces in contact with the slide portion of the first fluid chamber and the second fluid chamber may be respectively formed by a diaphragm. According to the liquid discharge apparatus of such a form, it is possible to suppress the first fluid from leaking out of the first fluid chamber, and to suppress the second fluid from leaking out of the second fluid chamber.

(6) In the liquid discharge device of the above aspect, the slide portion may further include a sensor that detects an amount of sliding movement with respect to the liquid chamber. According to the liquid discharge apparatus of such a form, the sensor can detect the amount of sliding movement of the slide portion relative to the liquid chamber.

  The present invention can be realized in various forms other than the above-described form as the liquid discharge apparatus. For example, the present invention can be realized in the form of a liquid ejection method executed by a liquid ejection device, a computer program for controlling the liquid ejection device, or a non-temporary tangible recording medium in which the computer program is recorded.

Explanatory drawing which shows schematic structure of the liquid discharge apparatus in 1st Embodiment of this invention. Sectional drawing which shows schematic structure of a head part. The figure which shows the state which interrupted | blocked the supply of the liquid to a liquid chamber. Sectional drawing which shows schematic structure of the head part of 2nd Embodiment. Sectional drawing which shows schematic structure of the head part of 3rd Embodiment. The figure which shows the state which interrupted | blocked the supply of the liquid to a liquid chamber. Sectional drawing which shows schematic structure of the head part of 4th Embodiment. Sectional drawing which shows schematic structure of the head part of 5th Embodiment. Sectional drawing which shows schematic structure of the head part of 6th Embodiment.

A. First embodiment:
A1. Configuration of liquid discharge device:
FIG. 1 is an explanatory view showing a schematic configuration of a liquid ejection device 100 according to a first embodiment of the present invention. The liquid discharge apparatus 100 includes a tank 10, a pressure pump 20, a supply flow passage 30, a head unit 200, a control unit 40, a discharge flow passage 50, a liquid storage unit 60, and a negative pressure generation source 70. , And a circulation channel 80.

  The tank 10 contains a liquid. As the liquid, for example, an ink having a predetermined viscosity can be exemplified. As predetermined viscosity, 50 mPa * s or more and 40,000 mPa * s or less can be illustrated at room temperature (25 degreeC). The liquid in the tank 10 is supplied to the head unit 200 through the supply flow path 30 by the pressurizing pump 20. The pressurizing pump 20 applies a pressure of, for example, 10 kPa to 10 MPa to the liquid. The liquid supplied to the head unit 200 is discharged by the head unit 200. The operation of the head unit 200 is controlled by the control unit 40.

  The control unit 40 is configured as a computer including a CPU and a memory, and realizes various processes by executing a control program stored in the memory. The control program may be recorded on various non-temporary tangible recording media.

  The discharge flow path 50 is connected to the liquid chamber 210 of the head unit 200. In the present embodiment, the liquid not discharged from the liquid chamber 210 is discharged to the liquid storage unit 60 through the discharge flow channel 50. A negative pressure generation source 70 is connected to the liquid storage unit 60. The negative pressure generation source 70 sucks the liquid from the head unit 200 through the discharge flow channel 50 by making the inside of the liquid storage unit 60 negative pressure. The negative pressure source 70 can be configured, for example, using a pump. In the present embodiment, the pressurizing pump 20 and the negative pressure generation source 70 function as a liquid supply unit that generates a differential pressure in the supply flow passage 30 and the discharge flow passage 50 and supplies the liquid to the supply flow passage 30. Note that either one of the pressure pump 20 and the negative pressure generation source 70 may be omitted, and the liquid supply unit may be configured of either the pressure pump 20 or the negative pressure generation source 70 alone.

  In the present embodiment, the liquid storage unit 60 and the tank 10 are connected by the circulation channel 80. The liquid stored in the liquid storage unit 60 is returned to the tank 10 through the circulation flow path 80, and is again supplied to the head unit 200 by the pressure pump 20. That is, the circulation flow path 80 has a function of re-supplying the liquid discharged from the discharge flow path 50 to the supply flow path 30. The circulation channel 80 may be provided with a pump for suctioning the liquid from the liquid storage unit 60. Further, the circulation channel 80 may be provided with a foreign matter removal filter or a degassing module. It is also possible to omit the circulation flow passage 80 and to make the liquid discharge device 100 not circulate the liquid.

  FIG. 2 is a cross-sectional view showing a schematic configuration of the head unit 200. As shown in FIG. The head unit 200 includes a nozzle 211, a liquid chamber 210, a volume change unit 220, a slide unit 250, and a drive mechanism 260.

  The liquid chamber 210 is a chamber to which liquid is supplied. The liquid chamber 210 is in communication with the nozzle 211 for discharging the droplet to the outside, and includes an inflow hole 212 into which the liquid flows.

  As shown in FIG. 2, one wall surface of the liquid chamber 210 is configured by the volume changing unit 220. The volume changer 220 is a member that changes the volume of the liquid chamber 210. In the present embodiment, the volume changing unit 220 includes a vibrating plate 222 and an actuator 224. The volume change unit 220 is controlled by the control unit 40. The controller 40 pushes the diaphragm 222 into the liquid chamber 210 by extending the actuator 224 to reduce the volume of the liquid chamber 210, and then reduces the pressure of the liquid chamber 210 by contracting the actuator 224. As a result, droplets are discharged from the nozzle 211.

  The liquid chamber 210 is supplied with liquid from the supply flow path 30 via the slide portion 250. The slide portion 250 is provided between the liquid chamber 210 and the supply flow path 30, and is a member that can slide relative to the liquid chamber 210. The slide portion 250 includes a communication hole 256 capable of communicating with the inflow hole 212 of the liquid chamber 210, and in the present embodiment, includes a discharge hole 258 capable of communicating with the discharge flow path 50. Here, "communication" indicates that "the fluid is connected so as to be able to flow". In the present embodiment, the slide portion 250 and the main body member constituting the liquid chamber 210 are formed of metal.

  The drive mechanism 260 is a mechanism that slides the slide portion 250 relative to the liquid chamber 210. The drive mechanism 260 is controlled by the control unit 40. In the present embodiment, the drive mechanism 260 includes the first fluid chamber 270, the first fluid supply passage 272, the first supply valve 273, the first fluid discharge passage 274, and the first discharge. A valve 275 and a second fluid chamber 280 are provided.

  The first fluid chamber 270 is in contact with the slide portion 250 and is a chamber that contains the first fluid. In the present embodiment, gas is used as the first fluid stored in the first fluid chamber 270, but it may be liquid. By using gas as the first fluid, supply and discharge of the first fluid in the first fluid chamber 270 can be performed quickly. Further, when a liquid is used as the first fluid, heat generated in the slide portion 250 can be efficiently released by the liquid as the first fluid.

  In the present embodiment, the first fluid chamber 270 includes the protrusion 279 for locking the slide movement of the slide unit 250, but the present invention is not limited to this. The first fluid chamber 270 may not include the protrusion 279 and may lock the slide movement of the slide portion 250 by the wall surface of the first fluid chamber 270 facing the slide portion 250. In the present embodiment, a seal member 254 is provided at an end of the slide portion 250 on the side of the first fluid chamber 270 from the viewpoint of suppressing fluid leakage.

  The first fluid supply channel 272 is a channel that supplies the first fluid to the first fluid chamber 270. In the present embodiment, compressed air is supplied from the first fluid supply channel 272 to the first fluid chamber 270. The first fluid supply flow path 272 is provided with a first supply valve 273. The first supply valve 273 is a valve that can shut off the supply of the first fluid from the first fluid supply flow path 272 to the first fluid chamber 270. In the present embodiment, the first supply valve 273 includes a piezo actuator. By doing this, the supply and stop of supply of the first fluid from the first fluid supply channel 272 to the first fluid chamber 270 can be changed rapidly.

  The first fluid discharge flow path 274 is a flow path different from the first fluid supply flow path 272, and is a flow path for discharging the first fluid from the first fluid chamber 270. The first fluid discharge flow path 274 is provided with a first discharge valve 275. The first discharge valve 275 is a valve that can shut off the discharge of the first fluid from the first fluid chamber 270 to the first fluid discharge channel 274. In the present embodiment, the first discharge valve 275 comprises a piezo actuator. By doing this, it is possible to rapidly change the discharge of the first fluid from the first fluid chamber 270 to the first fluid discharge channel 274 and the stop of the discharge.

  The second fluid chamber 280 is in contact with the slide portion 250 and is a chamber for containing the second fluid. The second fluid chamber 280 is provided on the opposite side of the slide portion 250 from the first fluid chamber 270. In the present embodiment, gas is used as the second fluid contained in the second fluid chamber 280, but it may be liquid.

  In the present embodiment, the second fluid chamber 280 is provided with the projection 289 for locking the slide movement of the slide 250, but the present invention is not limited to this. The second fluid chamber 280 may not include the projection 289, and the slide movement of the slide portion 250 may be locked by the wall surface of the second fluid chamber 280 opposite to the slide portion 250. In the present embodiment, a seal member 252 is provided at an end of the slide unit 250 on the second fluid chamber 280 side in order to suppress fluid leakage. In the present embodiment, the pressure in the second fluid chamber 280 is lower than the pressure on the upstream side of the first supply valve 273 of the first fluid supply passage 272, and the pressure in the first fluid discharge passage 274 is The pressure is higher than the pressure downstream of the first discharge valve 275.

  FIG. 2 shows a state in which the liquid chamber 210 and the supply flow path 30 are in communication with each other. That is, a state in which the inflow hole 212 of the liquid chamber 210 and the communication hole 256 of the slide portion 250 communicate with each other is shown. In the present embodiment, in this state, the communication between the supply flow passage 30 and the discharge flow passage 50 is blocked. That is, the communication between the discharge flow path 50 and the discharge hole 258 of the slide portion 250 is blocked. By doing this, it is possible to quickly supply the liquid from the supply flow path 30 to the liquid chamber 210.

  In the present embodiment, in a state in which the supply of the liquid to the liquid chamber 210 is shut off, the volume change unit 220 is controlled to discharge the liquid from the nozzle 211. By doing this, the force from the volume change unit 220 to the liquid chamber 210 can be efficiently used for liquid discharge.

  FIG. 3 is a view showing a state in which the supply of the liquid to the liquid chamber 210 is shut off. The control unit 40 controls the first supply valve 273 to bring the first fluid supply flow path 272 into communication, and controls the first discharge valve 275 to control the first fluid discharge flow path 274. Communication is blocked. By doing this, the pressure in the first fluid chamber 270 is increased, and the pressure in the first fluid chamber 270 is increased as compared with the pressure in the second fluid chamber 280. Move to the second fluid chamber 280 side. In the present embodiment, the slide portion 250 moved to the second fluid chamber 280 side is stopped by coming into contact with the projection 289 in the second fluid chamber 280.

  In the present embodiment, when the supply of the liquid to the liquid chamber 210 is shut off, the supply flow path 30 can communicate with the discharge flow path 50 via the discharge hole 258 of the slide portion 250. By doing this, the liquid can be circulated efficiently. As a result, it is possible to discharge while suppressing settling of the component with respect to the passage of time of the liquid containing materials such as settling pigments, metal particles, and fillers, and the liquid can be efficiently used.

  After discharging the liquid from the nozzle 211, the control unit 40 controls the first supply valve 273 to shut off the communication of the first fluid supply flow path 272, thereby the first discharge valve 275. The first fluid discharge flow path 274 is brought into communication with each other by controlling (see FIG. 2). By doing this, the pressure in the first fluid chamber 270 is reduced, and the pressure in the first fluid chamber 270 is reduced compared to the pressure in the second fluid chamber 280, so that the slide portion 250 is reduced. Moves to the first fluid chamber 270 side. In the present embodiment, the slide portion 250 moved to the first fluid chamber 270 side is stopped by coming into contact with the projection 279 in the first fluid chamber 270.

  According to the liquid discharge apparatus 100 of the present embodiment described above, even if heat due to friction is generated as the slide portion 250 slides relative to the liquid chamber 210, part of the heat is a slide It is transmitted to the first fluid in the first fluid chamber 270 in contact with the portion 250. For this reason, according to the liquid discharge device 100 of the present embodiment, heat can be released from the slide portion 250. For this reason, according to the liquid discharge apparatus 100 of the present embodiment, it is possible to suppress the change in the characteristics of the liquid due to heat, and it is possible to stably discharge the liquid. In particular, in the present embodiment, the slide portion 250 is slid every time the liquid is discharged. For this reason, there is a high possibility that frictional heat is generated at the slide portion 250. However, according to the liquid discharge device 100 of the present embodiment, this heat can be released efficiently.

  Further, in the present embodiment, the first supply valve 273 and the first discharge valve 275 include piezo actuators. For this reason, as a result of being able to drive the first supply valve 273 and the first discharge valve 275 quickly, the slide portion 250 can slide in the liquid chamber 210 quickly.

B. Second Embodiment FIG. 4 is a cross-sectional view showing a schematic configuration of a head unit 200 b according to a second embodiment. The second embodiment is different from the first embodiment in that the drive mechanism 260b further includes a flow path 281 for supplying and discharging a second fluid in the second fluid chamber 280, but the second embodiment is different from the first embodiment in that The other is the same.

  According to the second embodiment, the pressure can be kept constant regardless of the volume in the second fluid chamber 280. As a result, when the pressure in the first fluid chamber 270 increases, the slide portion 250 moves quickly to the second fluid chamber 280 side, and when the pressure in the first fluid chamber 270 decreases, the slide The part 250 moves quickly to the first fluid chamber 270 side. That is, according to the second embodiment, the slide portion 250 can be slid quickly relative to the liquid chamber 210.

C. Third Embodiment FIG. 5 is a cross-sectional view showing a schematic configuration of a head unit 200c according to a third embodiment. The third embodiment further includes a second fluid supply flow channel 282, a second supply valve 283, and a second fluid discharge flow channel 284 as a drive mechanism 260c, as compared with the first embodiment. The second discharge valve 285 is different, but the other is the same.

  The second fluid supply channel 282 is a channel that supplies the second fluid in the second fluid chamber 280. The second fluid supply flow path 282 is provided with a second supply valve 283 which can shut off the supply of the second fluid from the second fluid supply flow path 282 to the second fluid chamber 280. In the present embodiment, the second supply valve 283 comprises a piezo actuator. By doing this, it is possible to rapidly change the supply and the stop of the supply of the second fluid from the second fluid supply flow path 282 to the second fluid chamber 280.

  The second fluid discharge channel 284 is a channel that discharges the second fluid from the second fluid chamber 280. The second fluid discharge flow path 284 is provided with a second discharge valve 285 capable of blocking the discharge of the second fluid from the second fluid chamber 280 to the second fluid discharge flow path 284. In the present embodiment, the second discharge valve 285 comprises a piezo actuator. By doing this, it is possible to rapidly change the discharge of the second fluid from the second fluid chamber 280 to the second fluid discharge channel 284 and the stop of the discharge.

  In the present embodiment, when sliding the slide unit 250 toward the second fluid chamber 280 by the controller 40, the controller 40 controls the pressure in the first fluid chamber 270 in the same manner as in the first embodiment. In addition to the above, the control of the pressure in the second fluid chamber 280 is also performed.

  FIG. 5 shows a state in which the liquid chamber 210 and the supply flow path 30 are in communication with each other. In order to achieve this state, the control unit 40 performs the following control. Specifically, the control unit 40 controls the first supply valve 273 to shut off the communication of the first fluid supply flow path 272, and controls the first discharge valve 275. The first fluid discharge channel 274 is in communication. Furthermore, the control unit 40 controls the second supply valve 283 to bring the second fluid supply flow path 282 into communication, and controls the second discharge valve 285 to control the second fluid discharge flow. The communication of the passage 284 is cut off. By doing this, the pressure in the first fluid chamber 270 is reduced, and the pressure in the second fluid chamber 280 is increased, and the first fluid is compared with the pressure in the second fluid chamber 280. As the pressure in the chamber 270 decreases, the slide portion 250 moves to the first fluid chamber 270 side.

  FIG. 6 is a view showing a state in which the supply of the liquid to the liquid chamber 210 is shut off. In order to achieve this state, the control unit 40 performs the following control. The control unit 40 controls the first supply valve 273 to bring the first fluid supply flow path 272 into communication, and controls the first discharge valve 275 to control the first fluid discharge flow path 274. Communication is blocked. Furthermore, the control unit 40 controls the second supply valve 283 to shut off the communication of the second fluid supply flow path 282, and controls the second discharge valve 285 to control the second fluid. The discharge flow path 284 is in communication. By doing this, the pressure in the first fluid chamber 270 is increased, and the pressure in the second fluid chamber 280 is decreased, and the first fluid is compared with the pressure in the second fluid chamber 280. As the pressure in the chamber 270 increases, the slide portion 250 moves to the second fluid chamber 280 side.

  According to the present embodiment, it is possible to increase the difference between the pressure in the second fluid chamber 280 and the pressure in the first fluid chamber 270 when sliding the slide portion 250 relative to the liquid chamber 210. . As a result, the slide portion 250 can be quickly slid relative to the liquid chamber 210, and the amount of displacement of the slide movement can be increased.

D. Fourth Embodiment FIG. 7 is a cross-sectional view showing a schematic configuration of a head unit 200d according to a fourth embodiment. In the fourth embodiment, as compared with the first embodiment, an elastic member 290 for sliding the slide portion 250 relative to the liquid chamber 210 is further provided as a drive mechanism 260 d in the second fluid chamber 280. But the rest is the same. In the present embodiment, the elastic member 290 applies a force to push the slide portion 250 toward the first fluid chamber 270, but the present invention is not limited to this. The elastic member 290 may move the slide portion 250 to the second fluid chamber 280 side. You may apply the pulling force. In addition, the elastic member 290 may be provided in the first fluid chamber 270.

  According to the present embodiment, when sliding the slide portion 250 with respect to the liquid chamber 210, the force by the elastic member 290 can be used. Although a spring is used as the elastic member 290 in the present embodiment, the present invention is not limited to this, and for example, synthetic rubber or natural rubber may be used. As synthetic rubber, silicone rubber can be mentioned, for example.

E. Fifth Embodiment FIG. 8 is a cross-sectional view showing a schematic configuration of a head unit 200 e according to a fifth embodiment. The fifth embodiment is different from the first embodiment in that a diaphragm 232, 234 is further provided as a drive mechanism 260e, but the other is the same. In the present embodiment, wall surfaces in contact with the slide portion 250 of the first fluid chamber 270 and the second fluid chamber 280 are formed by the diaphragms 232 and 234, respectively. Note that a wall surface in contact with the slide portion 250 of either the first fluid chamber 270 or the second fluid chamber 280 may be formed by a diaphragm.

  According to the present embodiment, the first fluid can be suppressed from leaking out of the first fluid chamber 270, and the second fluid can be suppressed from leaking out of the second fluid chamber 280.

F. Sixth Embodiment FIG. 9 is a cross-sectional view showing a schematic configuration of a head unit 200f according to a sixth embodiment. The sixth embodiment is different from the fourth embodiment in that a sensor 236 for detecting the amount of displacement of the slide unit 250 sliding relative to the liquid chamber 210 is different, but the other points are the same. In the present embodiment, the sensor 236 is provided in the first fluid chamber 270, but may be provided in the second fluid chamber 280. Further, in the present embodiment, a micro displacement sensor is used as the sensor 236, but the present invention is not limited to this. For example, by providing a pressure sensor that detects the pressure applied to the elastic member 290 as the sensor 236, the displacement amount of the slide movement may be calculated from the pressure obtained by the sensor 236. Further, by providing a temperature sensor and a pressure sensor in the second fluid chamber 280 as the sensor 236, the displacement of the slide movement is performed using the temperature and pressure obtained by the respective sensors 236 and Boyle-Charles's law. The amount may be calculated.

  According to the present embodiment, it is possible to detect the amount of displacement of the slide portion 250 sliding relative to the liquid chamber 210. Thus, according to the present embodiment, it can be determined whether the slide unit 250 is moving as controlled by the control unit 40.

G. Other embodiments:
Although the case where the supply flow path 30 and the liquid chamber 210 are in communication with each other and the case where the communication is interrupted by the slide portion 250 has been described in the above embodiment, the present invention is not limited to this. For example, the supply flow rate of the liquid supplied from the supply flow path 30 to the liquid chamber 210 may be controlled without completely blocking the supply flow path 30 and the liquid chamber 210 by the slide portion 250.

  In the above-described embodiment, when sliding the slide portion 250 to the second fluid chamber 280 side, the communication of the first fluid discharge flow path 274 is blocked by the first discharge valve 275, but the first The fluid discharge channel 274 may be in communication. By doing this, the heat generated by the slide portion 250 can be efficiently circulated. Further, the first fluid discharged from the first fluid discharge flow path 274 may be circulated to the first fluid supply flow path 272. Similarly, when the slide portion 250 is slid toward the first fluid chamber 270, the second discharge valve 285 blocks the communication of the second fluid discharge channel 284. However, the second fluid discharge channel 284 may be in communication. By doing this, the heat generated by the slide portion 250 can be efficiently circulated. In addition, the second fluid discharged from the second fluid discharge flow channel 284 may be circulated to the second fluid supply flow channel 282.

  Instead of the piezo actuator in the above-described embodiment, various actuators such as a solenoid and a magnetostrictive element may be used, and an enlargement displacement mechanism may be further provided to expand the amount of extension.

  In the above-mentioned embodiment, although the 2nd fluid room 280 is provided as drive mechanism 260, it is not restricted to this, It is not necessary to provide the 2nd fluid room 280 as drive mechanism 260.

Although the present invention can be used for the liquid discharge apparatus 100 that discharges ink, the present invention is not limited to this, and can be applied to any liquid discharge apparatus that discharges droplets other than ink. For example, the present invention is applicable to various liquid ejection devices as described below.
(1) Image recording apparatus such as a facsimile machine.
(2) Color material discharge device used for manufacturing a color filter for an image display device such as a liquid crystal display.
(3) An electrode material discharge device used to form an electrode of an organic EL (Electro Luminescence) display, a surface emission display (Field Emission Display, FED) or the like.
(4) A liquid discharge apparatus that discharges a liquid containing a bioorganic substance used for producing a biochip.
(5) A sample ejection device as a precision pipette.
(6) Lubricant discharge device.
(7) Dispensing device for resin liquid.
(8) A liquid discharge device that discharges lubricating oil at precision points such as watches and cameras at pinpoints.
(9) A liquid discharge apparatus for discharging a transparent resin liquid such as an ultraviolet curable resin liquid onto a substrate to form a micro hemispherical lens (optical lens) or the like used for an optical communication element or the like.
(10) A liquid discharge apparatus which discharges an acidic or alkaline etching solution to etch a substrate or the like.
(11) A liquid discharge apparatus including a liquid discharge head that discharges droplets of any other minute amount.

  The “droplet” refers to the state of the liquid discharged from the liquid discharge device, and includes granular, teardrop-like, and threadlike tails. Further, the “liquid” referred to here may be any material that can be consumed by the liquid discharge device. For example, the “liquid” may be any material in the liquid phase when the substance is in the liquid phase, and is a liquid material in high or low viscosity, sol, gel water, other inorganic solvents, organic solvents, solutions, Materials in a liquid state such as liquid resin and liquid metal (metal melt) are also included in the “liquid”. Moreover, not only the liquid as one state of the substance, but also those obtained by dissolving, dispersing or mixing particles of functional materials consisting of solid matter such as pigment and metal particles in a solvent are included in the “liquid”. Typical examples of the liquid include ink and liquid crystal. Here, the ink includes general aqueous inks and oil-based inks, and various liquid compositions such as gel inks and hot melt inks.

  The present invention may also be used in 3D printers.

  The present invention is not limited to the above-described embodiment, and can be realized in various configurations without departing from the scope of the invention. For example, the technical features of the embodiment corresponding to the technical features in the respective forms described in the section of the summary of the invention are for solving some or all of the problems described above, or a part of the effects described above It is possible to replace or combine as appropriate to achieve all or all. Also, if the technical features are not described as essential in the present specification, they can be deleted as appropriate.

    DESCRIPTION OF SYMBOLS 10 ... Tank, 20 ... Pressurization pump, 30 ... Supply flow path, 40 ... Control part, 50 ... Discharge flow path, 60 ... Liquid storage part, 70 ... Negative pressure generation source, 80 ... Circulation flow path, 100 ... Liquid discharge Device, 200, 200b, 200c, 200d, 200f, 200f: head unit, 210: liquid chamber, 211: nozzle, 212: inlet, 220: volume changer, 222: diaphragm, 224: actuator, 232, 234: Diaphragm 236 sensor 250 sliding portion 252, 254 seal member 256 communication hole 258 exhaust hole 260 260b 260c 260d 260e drive mechanism 270 first fluid chamber 272 ... 1st fluid supply channel, 273 ... 1st supply valve, 274 ... 1st fluid discharge channel, 275 ... 1st discharge valve, 279 ... projection part, 280 ... 2nd Body chamber, 281: flow passage, 282: second fluid supply flow passage, 283: second supply valve, 284: second fluid discharge flow passage, 285: second discharge valve, 289: projection, 290 ... elastic member,

Claims (6)

A liquid discharge device,
A liquid chamber including an inflow hole communicating with a nozzle for discharging the liquid and having the liquid flowing therein;
A supply flow path for supplying the liquid to the liquid chamber;
A slide portion which is provided between the liquid chamber and the supply flow channel and which can communicate the inflow hole with the supply flow channel, and which can slide relative to the liquid chamber;
A drive mechanism for sliding the slide portion relative to the liquid chamber;
A control unit that controls the drive mechanism;
The drive mechanism is
A first fluid chamber in contact with the slide and containing a first fluid;
A first fluid supply channel for supplying the first fluid to the first fluid chamber;
A first fluid discharge channel which is different from the first fluid supply channel, and which discharges the first fluid from the first fluid chamber;
A first supply valve provided in the first fluid supply flow path;
A first discharge valve provided in the first fluid discharge channel;
The control unit controls the first supply valve and the first discharge valve to supply or discharge the first fluid in the first fluid chamber, thereby controlling the slide unit. Liquid discharge device that slides relative to the liquid chamber. The liquid discharge device according to claim 1, wherein
The first discharge valve and the first discharge valve each include a piezo actuator. The liquid ejection apparatus according to claim 1 or 2, wherein
The drive mechanism further comprises:
A second fluid chamber provided on the opposite side of the first fluid chamber with respect to the slide portion, in contact with the slide portion, and containing a second fluid;
A second fluid supply channel for supplying the second fluid to the second fluid chamber;
A second fluid discharge channel for discharging the second fluid from the second fluid chamber. The liquid discharge device according to claim 3, wherein
An elastic member is provided in the second fluid chamber to slide the slide portion. The liquid discharge device according to claim 3 or 4, wherein
The wall surface which contacts the said slide part of said 1st fluid chamber and said 2nd fluid chamber is each formed by the diaphragm, The liquid discharge apparatus. The liquid discharge device according to any one of claims 1 to 5, further comprising:
The liquid discharge device, comprising a sensor that detects an amount of sliding movement of the slide portion relative to the liquid chamber.

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