JP2019056565A - Vibration detector - Google Patents

Abstract

To provide a vibration detector capable of isolating and detecting vibrations acting in different directions.SOLUTION: A vibration detector 1 includes: a plurality of vibration sensor units 12 to 18; a weight 40 disposed on one surface of each of the vibration sensor units 12 to 18 in the thickness direction; and a control unit 50 that performs detection processing of information related to the vibration of the device TD on the basis of the sensor output from each of the vibration sensor units 12 to 18. Each of the vibration sensor units 12 to 18 is configured to include a film-like piezoelectric element 121 and a pair of film-like electrodes 122 and 123 disposed on both sides in the thickness direction of the piezoelectric element 121. The control unit 50 is configured to detect the vibration component in the thickness direction on the basis of the total value of the sensor output of each of the vibration sensor units 12 to 18, and vibration components in at least one direction in a plane orthogonal to the thickness direction on the basis of the output distribution of the sensor output of each of the vibration sensor units 12 to 18.SELECTED DRAWING: Figure 2

Description

  The present disclosure relates to a vibration detector that detects vibration.

  2. Description of the Related Art Conventionally, as a vibration detector, one having a polymer piezoelectric element and detecting information related to vibration based on an output from the polymer piezoelectric element is known (for example, see Patent Document 1).

JP-A-9-294730

  However, Patent Document 1 does not describe any direction or the like of the vibration component detected by the vibration detector, and it is considered that vibration components acting in different directions cannot be separated and detected.

  In order to isolate and detect vibration components acting in different directions, it may be possible to arrange the sensor elements in a three-dimensional manner. In this case, however, the structure of the vibration detector is complicated, so Deterioration and cost increase are inevitable.

  An object of this indication is to provide the vibration detector which can isolate | separate and detect the vibration which acts in a different direction with a simple structure in view of the said point.

The invention described in claim 1 is directed to a vibration detector that detects a device (TD) in which vibration occurs. In order to achieve the above object, in the invention described in claim 1,
A plurality of vibration sensor units (12, 14, 16, 18) including a film-shaped piezoelectric element (121) and a pair of film-shaped electrodes (122, 123) disposed on both sides in the thickness direction of the piezoelectric element;
A weight (40) disposed on one surface in the thickness direction of the plurality of vibration sensor units;
A detection processing unit (50) that performs detection processing of information related to device vibration based on sensor outputs from the plurality of vibration sensor units.

  The plurality of vibration sensor units are arranged adjacent to each other with respect to a predetermined installation surface (IS) in the device. The detection processing unit detects a vibration component in the thickness direction based on the sum of the sensor outputs of the plurality of vibration sensor units, and is orthogonal to the thickness direction based on the output distribution of the sensor outputs of the plurality of vibration sensor units. The vibration component in at least one direction in the plane is detected.

  In the vibration detector of the present disclosure, when the device vibrates in the thickness direction of each vibration sensor unit, the weight vibrates in the thickness direction of each vibration sensor unit as the device vibrates. At this time, the load due to the vibration of the weight acts on each vibration sensor part substantially evenly. For this reason, the vibration component of the thickness direction of each vibration sensor part among the vibrations of the equipment can be detected based on the sum of the sensor outputs from the vibration sensor parts among the vibrations of the equipment.

  In the vibration detector of the present disclosure, when the device vibrates in the surface direction of each vibration sensor unit, the weight vibrates in the surface direction of each vibration sensor unit in accordance with the vibration of the device. At this time, the load due to the vibration of the weight acts unevenly on each vibration sensor unit. And the load which acts on each vibration sensor part changes according to the vibration direction of an apparatus. For this reason, based on the output distribution of the sensor output from each vibration sensor unit, the vibration component in the surface direction of each vibration sensor unit can be detected among the vibrations of the device.

  In particular, in the vibration detector of the present disclosure, it is only necessary to arrange the thin vibration sensor unit so as to be adjacent to the installation surface of the device, so vibrations acting in different directions can be separated and detected with a simple structure. It is.

  In addition, the code | symbol in the parenthesis of each means described in this column and the claim shows an example of a correspondence relationship with the specific means described in the embodiment described later.

It is a schematic diagram which shows schematic structure of the vibration detector of 1st Embodiment. It is a typical top view of the detection part of the vibration detector of a 1st embodiment. It is III-III sectional drawing of FIG. It is explanatory drawing for demonstrating the load which acts on each vibration sensor part when the apparatus used as the detection object of vibration vibrates to a Z-axis direction. It is explanatory drawing for demonstrating the load which acts on each vibration sensor part when the apparatus used as the detection object of vibration vibrates to a Z-axis direction. It is explanatory drawing for demonstrating the detection method of the vibration component when the apparatus used as the detection object of vibration vibrates. It is explanatory drawing for demonstrating the load which acts on each vibration sensor part when the apparatus used as the detection object of a vibration vibrates to the X-axis direction. It is a schematic diagram which shows schematic structure of the vibration detector used as the modification of 1st Embodiment. It is a typical top view of the detection part of the vibration detector of a 2nd embodiment. It is a typical top view of the detection part of the vibration detector of a 3rd embodiment. It is a typical top view of the detection part of the vibration detector of a 4th embodiment. It is a typical top view of the detection part of the vibration detector of a 5th embodiment. It is a schematic diagram which shows schematic structure of the vibration detector of 5th Embodiment.

  Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. In the following embodiments, the same or equivalent parts as those described in the preceding embodiments are denoted by the same reference numerals, and the description thereof may be omitted. Further, in the embodiment, when only a part of the constituent elements are described, the constituent elements described in the preceding embodiment can be applied to the other parts of the constituent elements. The following embodiments can be partially combined with each other even if they are not particularly specified as long as they do not cause any trouble in the combination.

(First embodiment)
The present embodiment will be described with reference to FIGS. The vibration detector 1 of the present embodiment detects a vibration generated in the device TD with the device TD that generates vibration as a detection target. As shown in FIG. 1, the vibration detector 1 is installed on a flat installation surface IS in the device TD. The vibration detector 1 is bonded with an adhesive or the like so as not to be peeled off from the installation surface IS of the device TD.

  The vibration detector 1 includes a detection unit 10, a weight 40, and a control unit 50. The detection part 10 and the weight 40 which comprise the vibration detector 1 are mutually joined by the adhesive material etc.

  The detection unit 10 is bonded to the installation surface IS of the device TD. The detection unit 10 includes a plate-like substrate 100 having a front surface 101 and a back surface 102. The detection unit 10 is provided with a plurality of vibration sensor units 12, 14, 16, and 18.

  The plurality of vibration sensor units 12, 14, 16, and 18 generate an electromotive force due to the piezoelectric effect due to a load acting in the thickness direction of the substrate 100 constituting the detection unit 10. In the present embodiment, the thickness direction of the detection unit 10 is defined as the Z-axis direction. In the present embodiment, one direction in a plane orthogonal to the Z-axis direction is defined as the X-axis direction, and the other direction orthogonal to both the Z-axis direction and the X-axis direction is defined as the Y-axis direction.

  As shown in FIG. 2, the detection unit 10 has a plurality of vibration sensor units 12, 14, 16, and 18 arranged in a matrix so as to be adjacent to each other. In other words, the plurality of vibration sensor units 12, 14, 16, and 18 are installed on the installation surface IS so as to be adjacent to each other. In FIG. 2, the portions that function as the vibration sensor units 12, 14, 16, and 18 in the detection unit 10 are hatched with dot patterns. Further, in FIG. 2, for convenience of explanation, illustration of a front-side protection member 120 of the substrate 100 described later is omitted.

  Specifically, in the detection unit 10 of the present embodiment, the first to fourth vibration sensor units 12, 14, 16, and 18 are appropriately connected to each other so that they are arranged in a matrix (that is, 2 rows and 2 columns). They are arranged at intervals.

  In the detection unit 10, the first vibration sensor unit 12 and the third vibration sensor unit 16 are arranged along the X-axis direction, and the second vibration sensor unit 14 and the fourth vibration sensor unit 18 are arranged along the X-axis direction. The vibration sensor units 12, 14, 16, and 18 are arranged so as to line up.

  Further, in the detection unit 10, the first vibration sensor unit 12 and the second vibration sensor unit 14 are arranged along the Y-axis direction, and the third vibration sensor unit 16 and the fourth vibration sensor unit 18 are arranged in the Y-axis direction. The vibration sensor units 12, 14, 16, and 18 are arranged so as to line up along the line.

  As described above, in the detection unit 10 of the present embodiment, some of the plurality of vibration sensor units 12, 14, 16, and 18 are different from the other vibration sensor units in the X-axis direction and the Y-axis. It is arranged to overlap in the direction. For example, the first vibration sensor unit 12 is disposed so as to overlap the second vibration sensor unit 14 in the Y-axis direction and to overlap the third vibration sensor unit 16 in the X-axis direction.

  Each vibration sensor part 12, 14, 16, 18 of this embodiment has a substantially square shape. And the shape of the area | region which each vibration sensor part 12, 14, 16, 18 in the detection part 10 occupies is also substantially square shape.

  In addition, each of the vibration sensor units 12, 14, 16, and 18 is electrically independent. Each of the vibration sensor units 12, 14, 16, and 18 is connected to a wiring pattern 101 a and a terminal 101 b formed on the substrate 100. In addition, the specific structure of each vibration sensor part 12, 14, 16, 18 is mentioned later.

  Returning to FIG. 1, the weight 40 applies a load to the vibration sensor units 12, 14, 16, and 18 of the detection unit 10 following the vibration of the device TD. The weight 40 has a size capable of covering the entire area occupied by the vibration sensor units 12, 14, 16, and 18 in the detection unit 10. The weight 40 is disposed on the surface 101 side which is the opposite surface to the surface in contact with the device TD in the detection unit 10. The weight 40 is bonded to the detection unit 10 with an adhesive or the like.

  The control unit 50 is a detection processing unit that performs detection processing of information related to vibration of the device TD based on the sensor outputs of the vibration sensor units 12, 14, 16, and 18. The control unit 50 includes a processor, a known microcomputer having a memory, and its peripheral circuits. The memory of the control unit 50 is composed of a non-transitional tangible storage medium.

  The control unit 50 is connected to the terminals 101 b of the vibration sensor units 12, 14, 16, and 18 via the sensor wiring 51. Thereby, the control part 50 becomes a structure into which each sensor output of each vibration sensor part 12, 14, 16, 18 is input.

  The control unit 50 performs detection processing for detecting the vibration of the device TD based on the sensor output of each of the vibration sensor units 12, 14, 16, and 18. Although not shown, the control unit 50 is connected to a display device that displays information related to the vibration of the device TD on the output side. The control unit 50 is configured to output information related to the vibration of the device TD detected based on the sensor output of each of the vibration sensor units 12, 14, 16, and 18 to the display device.

  Next, a specific structure of the detection unit 10 will be described with reference to FIG. In the detection unit 10, the vibration sensor units 12, 14, 16, and 18 having the same structure are formed on one substrate 100. Each vibration sensor part 12, 14, 16, 18 is comprised with the piezoelectric polymer film. In addition, since each vibration sensor part 12, 14, 16, 18 has the same internal structure, the structure of the 1st vibration sensor part 12 is demonstrated below and the 2nd-4th vibration sensor part 14, A description of the structures 16 and 18 is omitted.

  As shown in FIG. 3, the first vibration sensor unit 12 includes a film-shaped piezo element 121, a pair of film-shaped electrodes 122 and 123 arranged on both sides in the thickness direction of the piezo element 121, and the electrodes 122 and 123. It has the front side protection member 120 and the back side protection member 130 which cover an outer side.

  The piezo element 121 is an element that converts vibration and pressure into voltage by the piezoelectric effect and outputs the voltage. The piezo element 121 of the present embodiment is composed of a flexible piezoelectric element containing polyvinylidene fluoride (that is, PVDF).

  Here, as the piezo element 121, for example, a piezoelectric element mainly composed of a ceramic containing lead zirconate titanate (that is, PZT) can be used. It is desirable to employ a piezoelectric element mainly composed of a polymer material.

  The pair of electrodes 122 and 123 are arranged so as to sandwich the piezo element 121 from both surfaces. The pair of electrodes 122 and 123 is formed of a conductive metal film such as copper or silver. Although not shown, the wiring pattern 101 a is connected to the pair of electrodes 122 and 123.

  The front-side protection member 120 and the back-side protection member 130 are protection members that cover the pair of electrodes 122 and 123 from the side not in contact with the piezo element 121. The front-side protection member 120 and the back-side protection member 130 are formed into a flexible film shape using a synthetic resin material or the like, and are joined to the electrodes 122 and 123, respectively.

  In addition, the electrodes 122 and 123 constituting the vibration sensor units 12, 14, 16 and 18 of the present embodiment are covered with a common front side protection member 120 and back side protection member 130. That is, the front-side protection member 120 and the back-side protection member 130 are not provided in each of the vibration sensor units 12, 14, 16, 18, but are common to protect each of the vibration sensor units 12, 14, 16, 18. It is a protective member. Thereby, each vibration sensor part 12,14,16,18 is prescribed | regulated each other arrangement | positioning by being covered with a common protective member.

  Next, sensor outputs of the vibration sensor units 12, 14, 16, 18 when the device TD vibrates, a vibration detection method in the control unit 50, and the like will be described with reference to FIGS.

  As shown in FIGS. 4 and 5, when the device TD vibrates in the Z-axis direction, the weight 40 vibrates with the vibration of the device TD, and the load of the weight 40 causes each vibration sensor unit 12, 14, 16, 18 to move. A tensile load and a compressive load act alternately.

  Specifically, when the weight 40 is displaced to one side in the Z-axis direction, a tensile load acts on each of the vibration sensor units 12, 14, 16, and 18, as shown in FIG. Further, when the weight 40 is displaced to the other side in the Z-axis direction, as shown in FIG. 5, a compressive load is applied to each of the vibration sensor units 12, 14, 16, and 18.

  Therefore, when the device TD vibrates in the Z-axis direction, an electromotive force due to the piezoelectric effect is generated in each vibration sensor unit 12, 14, 16, and 18 by a load acting in the Z-axis direction. At this time, the electromotive forces generated in the vibration sensor units 12, 14, 16, and 18 have the same polarity. That is, each vibration sensor part 12, 14, 16, 18 outputs the electromotive force of the same polarity to the control part 50 as a sensor output.

  As a result, when the device TD vibrates in the Z-axis direction, an electromotive force having the same polarity is input to the control unit 50 from each of the vibration sensor units 12, 14, 16, and 18 as a sensor output. For this reason, in the control part 50, it becomes possible to detect the total value of the sensor output of each vibration sensor part 12, 14, 16, 18 as a vibration component of a Z-axis direction. The control unit 50 detects the vibration component Fz in the Z-axis direction by using, for example, FIG. 6 or a mathematical formula F1 shown below.

Fz = V1 + V2 + V3 + V4... F1
However, in the above formula F1, the sensor output of the first vibration sensor unit 12 is the first output V1, and the sensor output of the second vibration sensor unit 14 is the second output V2. Further, in the above-described mathematical formula F1, the sensor output of the third vibration sensor unit 16 is the third output V3, and the sensor output of the fourth vibration sensor unit 18 is the fourth output V4. The same applies to formulas F2 and F3 described later.

  Subsequently, as shown in FIG. 7, when the device TD vibrates in the X-axis direction, the weight 40 vibrates with the vibration of the device TD. At this time, when the weight 40 is displaced to one side in the X-axis direction, the detection unit 10 applies a compressive load to one side in the X-axis direction and a tensile load acts on the other side in the X-axis direction due to the load of the weight 40. To do. When the weight 40 is displaced to the other side in the X-axis direction, the detection unit 10 applies a tensile load to one side in the X-axis direction and a compressive load to the other side in the X-axis direction due to the load of the weight 40. .

  Therefore, when the device TD vibrates in the X-axis direction, an electromotive force due to the piezoelectric effect is generated in each of the vibration sensor units 12, 14, 16, and 18. At this time, the electromotive force generated in the first vibration sensor unit 12 and the second vibration sensor unit 14 and the electromotive force generated in the third vibration sensor unit 16 and the fourth vibration sensor unit 18 have opposite polarities. That is, the first vibration sensor unit 12 and the second vibration sensor unit 14 output to the control unit 50 a sensor output having a polarity opposite to the sensor outputs of the third vibration sensor unit 16 and the fourth vibration sensor unit 18.

  As a result, when the device TD vibrates in the X-axis direction, the control unit 50 reverses from the first vibration sensor unit 12 and the second vibration sensor unit 14, and from the third vibration sensor unit 16 and the fourth vibration sensor unit 18. Polar electromotive force is input as sensor output. That is, when the device TD vibrates in the X-axis direction, the control unit 50 indicates that the sensor output of each vibration sensor unit 12, 14, 16, 18 has an output distribution different from that in the case where the device TD vibrates in the Z-axis direction. Is input.

  For this reason, in the control part 50, based on the output distribution of the sensor output of each vibration sensor part 12, 14, 16, 18, it becomes possible to detect as a vibration component of an X-axis direction. The control unit 50 detects the vibration component Fx in the X-axis direction by using, for example, FIG.

Fx = (V1 + V2)-(V3 + V4) ... F2
Subsequently, when the device TD vibrates in the Y-axis direction, the weight 40 vibrates with the vibration of the device TD. At this time, when the weight 40 is displaced to one side in the Y-axis direction, the detection unit 10 causes a compressive load to act on one side in the Y-axis direction and a tensile load to act on the other side in the Y-axis direction. To do. When the weight 40 is displaced to the other side in the Y-axis direction, the detection unit 10 applies a tensile load to one side in the Y-axis direction and a compressive load to the other side in the Y-axis direction due to the load of the weight 40. .

  Therefore, when the device TD vibrates in the Y-axis direction, an electromotive force due to the piezoelectric effect is generated in each of the vibration sensor units 12, 14, 16, and 18. At this time, the electromotive force generated in the first vibration sensor unit 12 and the third vibration sensor unit 16 and the electromotive force generated in the second vibration sensor unit 14 and the fourth vibration sensor unit 18 have opposite polarities. That is, the first vibration sensor unit 12 and the third vibration sensor unit 16 output to the control unit 50 a sensor output having a polarity opposite to the sensor outputs of the second vibration sensor unit 14 and the fourth vibration sensor unit 18.

  As a result, when the device TD vibrates in the Y-axis direction, the controller 50 reverses from the first vibration sensor unit 12 and the third vibration sensor unit 16, and the second vibration sensor unit 14 and the fourth vibration sensor unit 18. Polar electromotive force is input as sensor output. In other words, when the device TD vibrates in the Y-axis direction, the control unit 50 indicates that the sensor output of each of the vibration sensor units 12, 14, 16, 18 is when the device TD vibrates in the Z-axis direction or the X-axis direction. Input with different output distribution.

  For this reason, in the control part 50, based on the output distribution of the sensor output of each vibration sensor part 12, 14, 16, 18, it becomes possible to detect as a vibration component of a Y-axis direction. The control unit 50 detects the vibration component Fx in the X-axis direction by using, for example, FIG. 6 or a mathematical formula F3 shown below.

Fy = (V1 + V3) − (V2 + V4)... F3
Next, an outline of the vibration detection process of the device TD executed by the control unit 50 of the present embodiment will be described. First, the control unit 50 reads sensor outputs from the vibration sensor units 12, 14, 16, and 18. And the control part 50 detects the vibration component of the X-axis, Y-axis, and 3-axis direction based on the sensor output from each vibration sensor part 12,14,16,18.

  The control unit 50 according to the present embodiment detects a vibration component in the Z-axis direction based on the sum of sensor outputs from the vibration sensor units 12, 14, 16, and 18. Further, the control unit 50 detects the vibration component in the X-axis direction and the vibration component in the Y-axis direction based on the output distribution of the sensor outputs of the vibration sensor units 12, 14, 16, and 18.

  Subsequently, the control unit 50 outputs the vibration components in the three axial directions to the display device as information related to the vibration of the device TD. Thereby, the information regarding the vibration of the device TD is provided to the user via the display device. Note that the control unit 50 may be configured to calculate the direction, magnitude, acceleration, and the like of the vibration of the device TD calculated from the vibration components in the three-axis directions, and output the calculation result to the display device. .

  The vibration detector 1 described above simultaneously detects vibrations of the device TD acting in different directions based on the sum of the sensor outputs of the vibration sensor units 12, 14, 16, and 18 and the output distribution of the sensor outputs. be able to. Specifically, since the vibration detector 1 of the present embodiment can detect vibration components in three axial directions such as X, Y, and Z orthogonal to each other, it can detect various vibrations acting on the device TD. Can do.

  In particular, the vibration detector 1 of the present embodiment has a simple structure because it is only necessary to arrange the thin vibration sensor parts 12, 14, 16, 18 adjacent to the installation surface IS of the device TD. Vibrations acting in different directions can be separated and detected.

  In the vibration detector 1 of the present embodiment, the electrodes 122 and 123 constituting the vibration sensor units 12, 14, 16 and 18 are covered with a common protective member such as the front side protective member 120 and the back side protective member 130. . According to this, it becomes possible to set each positional relationship of each vibration sensor part 12, 14, 16, 18 accurately at the time of manufacture. As a result, calibration of the sensor output of each vibration sensor unit 12, 14, 16, 18 is facilitated, so that the accuracy of vibration detection based on the sensor output of each vibration sensor unit 12, 14, 16, 18 is improved. be able to.

  Here, in the vibration detector 1 of the present embodiment, the piezoelectric elements 121 of the vibration sensor units 12, 14, 16, and 18 are configured by flexible piezoelectric elements, and other members are also configured in a film shape. Therefore, it has flexibility as a whole. For this reason, the vibration detector 1 can be applied not only to the flat installation surface IS but also to the installation surface IS having some unevenness.

  In the present embodiment, an example in which the control unit 50 detects vibration components in the X-axis direction and the Y-axis direction by adding and subtracting the sensor outputs of the vibration sensor units 12, 14, 16, and 18 has been described. It is not limited to.

  For example, the control unit 50 refers to a control map that preliminarily defines sensor outputs of the vibration sensor units 12, 14, 16, 18 and vibration components in the X-axis direction and the Y-axis direction. The vibration component in the direction may be detected. The control map can be created by measuring the sensor output of each of the vibration sensor units 12, 14, 16, 18 and the polarity of the sensor output when the device TD vibrates in the X-axis direction and the Y-axis direction. This control map may be stored in the memory as data so that the control unit 50 can refer to it appropriately.

(Modification of the first embodiment)
In each of the above-described embodiments, the example in which the weight 40 having a size capable of covering the entire area occupied by each vibration sensor unit 12, 14, 16, 18 has been described on the surface of the detection unit 10 has been described. However, it is not limited to this. As shown in FIG. 8, the weight 40 may be provided with a notch 41 at a portion corresponding to each of the vibration sensor units 12, 14, 16, and 18, for example. However, if the weight 40 is composed of a plurality of independent members, the sensor output characteristics of each of the vibration sensor units 12, 14, 16, 18 will change, so that the weight 40 is composed of a single member. It is desirable.

(Second Embodiment)
Next, a second embodiment will be described with reference to FIG. In the present embodiment, an example in which the detection unit 10 is provided with two vibration sensor units 12A and 14A will be described. In FIG. 9, illustration of the front-side protection member 120 of the substrate 100 is omitted for convenience of explanation.

  As shown in FIG. 9, in the detection unit 10 of the present embodiment, a first vibration sensor unit 12A and a second vibration sensor unit 14A having the same internal structure are arranged at an appropriate interval from each other. Specifically, in the detection unit 10, the first vibration sensor unit 12A and the second vibration sensor unit 14A are arranged so as to be aligned along the Y-axis direction.

  Each vibration sensor part 12A and 14A of this embodiment has a substantially rectangular shape. And the shape of the area | region which each vibration sensor part 12A, 14A in the detection part 10 occupies is substantially square shape.

  In the detection unit 10 of the present embodiment, when the device TD vibrates in the Z-axis direction, the electromotive forces generated in the vibration sensor units 12A and 14A have the same polarity. That is, each of the vibration sensor units 12A and 14A outputs an electromotive force having the same polarity to the control unit 50 as a sensor output. For this reason, in the control part 50, it becomes possible to detect the total value of the sensor output of each vibration sensor part 12A, 14A as a vibration component of a Z-axis direction.

  Further, in the detection unit 10 of the present embodiment, when the device TD vibrates in the Y-axis direction, the electromotive force generated in the vibration sensor units 12A and 14A has a reverse polarity. That is, each of the vibration sensor units 12A and 14A outputs an electromotive force having a reverse polarity to the control unit 50 as a sensor output. For this reason, in the control part 50, it becomes possible to detect as a vibration component of a Y-axis direction based on the output distribution of the sensor output of each vibration sensor part 12A, 14A.

  In the detection unit 10 of the present embodiment, even if the device TD vibrates in the X-axis direction, almost no electromotive force is generated in each of the vibration sensor units 12A and 14A. For this reason, the control unit 50 cannot detect the vibration component in the X-axis direction.

  Other configurations are the same as those of the first embodiment. According to the vibration detector 1 of the present embodiment, the vibration of the device TD acting in different directions such as the Z-axis direction which is the thickness direction of the vibration sensor units 12A and 14A and the Y-axis direction in a plane perpendicular to the thickness direction. Can be detected simultaneously.

  Here, in the present embodiment, the example in which the first vibration sensor unit 12A and the second vibration sensor unit 14A are arranged so as to be aligned along the Y-axis direction has been described, but the present invention is not limited thereto. For example, the detection unit 10 may be configured such that the first vibration sensor unit 12A and the second vibration sensor unit 14A are arranged along the X-axis direction. According to this, it is possible to simultaneously detect the vibrations of the device TD acting in different directions such as the Z-axis direction which is the thickness direction of the vibration sensor units 12A and 14A and the X-axis direction in the plane orthogonal to the thickness direction. Become.

(Third embodiment)
Next, a third embodiment will be described with reference to FIG. In the present embodiment, an example will be described in which the shape of the region occupied by the four vibration sensor units 12B, 14B, 16B, and 18B in the detection unit 10 is substantially circular. In FIG. 10, illustration of the front-side protection member 120 of the substrate 100 is omitted for convenience of explanation.

  As shown in FIG. 10, in the detection unit 10 of the present embodiment, the vibration sensor units 12B, 14B, 16B, and 18B having the same internal structure are arranged in a matrix (that is, 2 rows and 2 columns). These are arranged at an appropriate interval from each other.

  Specifically, in each of the vibration sensor units 12B, 14B, 16B, and 18B, the first vibration sensor unit 12B and the third vibration sensor unit 16B are arranged along the X-axis direction, and the second vibration sensor unit 14B and the second vibration sensor unit 14B. The four vibration sensor units 18B are arranged so as to be aligned along the X-axis direction.

  Each of the vibration sensor units 12B, 14B, 16B, and 18B includes a first vibration sensor unit 12B and a second vibration sensor unit 14B arranged along the Y-axis direction, and a third vibration sensor unit 16 and a fourth vibration sensor. The parts 18 are arranged so as to be aligned along the Y-axis direction.

  Each vibration sensor unit 12B, 14B, 16B, 18B of the present embodiment has a fan shape. Specifically, each of the vibration sensor units 12B, 14B, 16B, and 18B has a shape obtained by further dividing the semicircle into half. And each vibration sensor part 12B, 14B, 16B, 18B is arrange | positioned so that the shape of the area | region which each vibration sensor part 12B, 14B, 16B, 18B in the detection part 10 occupies may become a substantially circular shape.

  Other configurations are the same as those of the first embodiment. The vibration detector 1 according to the present embodiment can obtain the effects obtained from the configuration common to the first embodiment in the same manner as the first embodiment. That is, even in a configuration in which the shape of the area occupied by the four vibration sensor units 12B, 14B, 16B, and 18B in the detection unit 10 is substantially circular as in this embodiment, X, Y, and Z that are orthogonal to each other. The vibration components in the three axis directions can be detected simultaneously.

(Fourth embodiment)
Next, a fourth embodiment will be described with reference to FIG. In this embodiment, an example in which the detection unit 10 is provided with three vibration sensor units 12C, 14C, and 16C will be described. In addition, in FIG. 11, illustration of the front side protection member 120 of the board | substrate 100 is abbreviate | omitted for convenience of explanation.

  As shown in FIG. 11, first to third vibration sensor units 12 </ b> C, 14 </ b> C, and 16 </ b> C having the same internal structure are arranged in the detection unit 10 of the present embodiment with appropriate intervals. Each vibration sensor unit 12C, 14C, 16C of the present embodiment has a fan shape. Specifically, each of the vibration sensor units 12C, 14C, and 16C has a shape obtained by dividing a circle into three substantially equal parts. And each vibration sensor part 12C, 14C, 16C is arrange | positioned so that the shape of the area | region which each vibration sensor part 12C, 14C, 16C in the detection part 10 occupies may become a substantially circular shape.

  Each of the vibration sensor units 12C, 14C, and 16C is arranged so that the first vibration sensor unit 12C is aligned with the second vibration sensor unit 14C and the third vibration sensor unit 16C along the X-axis direction. The second vibration sensor unit 14C and the third vibration sensor unit 16C are arranged so as to be aligned along the Y-axis direction. A gap between the second vibration sensor unit 14C and the third vibration sensor unit 16C extends along the X-axis direction.

  In the detection unit 10 of the present embodiment, when the device TD vibrates in the Z direction, the electromotive forces generated in the vibration sensor units 12C, 14C, and 16C have the same polarity. That is, each of the vibration sensor units 12C, 14C, and 16C outputs an electromotive force having the same polarity to the control unit 50 as a sensor output. For this reason, in the control part 50, it becomes possible to detect the total value of the sensor output of each vibration sensor part 12C, 14C, 16C as a vibration component of a Z-axis direction.

  In the detection unit 10 of the present embodiment, when the device TD vibrates in the X-axis direction or the Y-axis direction, an electromotive force is generated in each of the vibration sensor units 12C, 14C, and 16C. At this time, the polarity of the electromotive force generated in each of the vibration sensor units 12C, 14C, and 16C depends on the arrangement of the vibration sensor units 12C, 14C, and 16C with respect to the X-axis direction and the Y-axis direction.

  For this reason, the control unit 50 multiplies the sensor output of each of the vibration sensor units 12C, 14C, and 16C by a predetermined coefficient, and detects vibration components in the X-axis direction and the Y-axis direction based on the multiplication result. To do. The coefficient in the sensor output of each vibration sensor unit 12C, 14C, 16C is the polarity of the sensor output or sensor output of each vibration sensor unit 12C, 14C, 16C when the device TD vibrates in the X-axis direction and the Y-axis direction. May be set based on the measurement result.

  Other configurations are the same as those of the first embodiment. The vibration detector 1 according to the present embodiment can obtain the effects obtained from the configuration common to the first embodiment in the same manner as the first embodiment. That is, even in a configuration in which the shape of the region occupied by the three vibration sensor units 12C, 14C, and 16C in the detection unit 10 is substantially circular as in the present embodiment, the three axes X, Y, and Z that are orthogonal to each other. The vibration component in the direction can be detected simultaneously.

  Here, in the present embodiment, the example in which the second vibration sensor unit 14C and the third vibration sensor unit 16C are arranged to be aligned in the Y-axis direction has been described, but the present invention is not limited to this. For example, the detection unit 10 may be arranged such that the second vibration sensor unit 14C and the third vibration sensor unit 16C are arranged in the X-axis direction. The detection unit 10 has a configuration in which, for example, the first vibration sensor unit 12C and the second vibration sensor unit 14C or the third vibration sensor unit 16C are arranged so as to be aligned in the X-axis direction or the Y-axis direction. Also good.

  In the present embodiment, the control unit 50 multiplies the sensor outputs of the vibration sensor units 12C, 14C, and 16C by a predetermined coefficient, and based on the multiplication result, the X-axis direction and the Y-axis direction. Although the example which detects a vibration component was demonstrated, it is not limited to this.

  For example, the control unit 50 refers to a control map that preliminarily defines sensor outputs of the vibration sensor units 12C, 14C, and 16C and vibration components in the X-axis direction and the Y-axis direction. The vibration component may be detected. The control map can be created by measuring the sensor output of each vibration sensor unit 12C, 14C, 16C and the polarity of the sensor output when the device TD vibrates in the X-axis direction and the Y-axis direction. This control map may be stored in the memory as data so that the control unit 50 can refer to it appropriately.

(Fifth embodiment)
Next, a fifth embodiment will be described with reference to FIGS. In the present embodiment, an example in which the vibration detector 1 includes four detection units 10A, 10B, 10C, and 10D will be described. In FIG. 18, illustration of the front-side protection member 120 of the substrates 100A, 100B, 100C, and 100D is omitted for convenience of explanation.

  As shown in FIGS. 12 and 13, each of the detection units 10 </ b> A, 10 </ b> B, 10 </ b> C, and 10 </ b> D is configured by four substrates 100 </ b> A, 100 </ b> B, 100 </ b> C, and 100 </ b> D. Each detection unit 10A, 10B, 10C, 10D is provided with a single vibration sensor unit 12, 14, 16, 18 respectively. The vibration sensor units 12, 14, 16, and 18 of the detection units 10A, 10B, 10C, and 10D are similarly configured.

  In the vibration detector 1 of the present embodiment, the vibration sensor units 12, 14, 16, and 18 whose internal structure is configured in the same manner as in the first embodiment are configured in different substrates 100A, 100B, 100C, and 100D. This is different from the first embodiment. And in the vibration detector 1 of this embodiment, the electrodes 122 and 123 which comprise each vibration sensor part 12, 14, 16, 18 are covered with the different protection member. Moreover, the weight 40 of this embodiment is provided with the notch part 41 in the site | part corresponding between each vibration sensor part 12, 14, 16, 18 similarly to the modification of 1st Embodiment mentioned above. .

  Other configurations are the same as those of the first embodiment. The vibration detector 1 according to the present embodiment can obtain the effects obtained from the configuration common to the first embodiment in the same manner as the first embodiment. That is, even in the configuration in which the vibration sensor units 12, 14, 16, and 18 are provided on the four substrates 100A, 100B, 100C, and 100D as in the present embodiment, X, Y, and Z that are orthogonal to each other. Such vibration components in the three axial directions can be detected simultaneously.

  Here, although the example which provided the notch part 41 with respect to the weight 40 was demonstrated in this embodiment, it is not limited to this. For example, the weight 40 may have a configuration in which the notch 41 is not provided.

(Other embodiments)
As mentioned above, although typical embodiment of this indication was described, this indication is not limited to the above-mentioned embodiment, for example, can be variously changed as follows.

  In each of the above-described embodiments, the example in which the control unit 50 outputs the vibration components in different directions to the display device as information related to the vibration of the device TD has been described, but the present invention is not limited to this. For example, the control unit 50 may be configured to output vibration components in different directions as information related to the vibration of the device TD to the device-side control device that controls the device TD.

  In each of the above-described embodiments, the example in which the weight 40 is arranged directly on the surface of the vibration detection unit 10 has been described. However, the present invention is not limited to this. For example, the vibration detector 1 may be configured such that rubber or the like is interposed between the vibration detection unit 10 and the weight 40 in order to protect the vibration detection unit 10.

  However, when rubber or the like is interposed between the vibration detection unit 10 and the weight 40, there is a concern that the vibration detection accuracy in the vibration detection unit 10 is lowered due to the pyroelectric effect due to the viscous resistance inside the rubber. . For this reason, it is desirable that the vibration detector 1 has a configuration in which rubber or the like is not interposed between the vibration detection unit 10 and the weight 40.

  In each of the above-described embodiments, an example in which a piezoelectric element mainly composed of polyvinylidene fluoride is employed as the piezoelectric element 121 for each vibration sensor unit 12, 14, 16, and 18 is not limited to this. As the piezo element 121, elements other than those described above may be employed as long as the elements can convert vibration into voltage and output the same.

  In each of the above-described embodiments, the vibration detector 1 provided with two to four vibration sensor units has been described. However, the present invention is not limited to this. The vibration detector 1 may have a configuration in which five or more vibration sensor units are provided.

  In the above-described embodiment, it is needless to say that elements constituting the embodiment are not necessarily indispensable except for the case where it is clearly indicated that the element is essential and the case where it is considered that it is clearly essential in principle.

  In the above-described embodiment, when numerical values such as the number, numerical value, quantity, range, etc. of the constituent elements of the embodiment are mentioned, it is particularly limited to a specific number when clearly indicated as essential and in principle. Except in some cases, the number is not limited.

  In the above embodiment, when referring to the shape, positional relationship, etc. of the component, etc., the shape, positional relationship, etc. unless otherwise specified and in principle limited to a specific shape, positional relationship, etc. It is not limited to etc.

(Summary)
According to the first aspect shown in part or all of the above-described embodiments, the vibration detector includes a plurality of vibration sensor units including piezoelectric elements adjacent to each other with respect to a predetermined installation surface of the device. Is arranged. The vibration detector detects the vibration component in the thickness direction based on the sum of the sensor outputs of the plurality of vibration sensor units, and is orthogonal to the thickness direction based on the output distribution of the sensor outputs of the plurality of vibration sensor units. The vibration component in at least one direction in the plane is detected.

  According to the second aspect, the vibration detector is arranged such that three or more vibration sensor units are adjacent to each other on the installation surface. The detection processing unit is configured to detect a vibration component in the thickness direction based on the sum of the sensor outputs of the plurality of vibration sensor units. Further, the detection processing unit is configured to detect a vibration component in one direction and a vibration component in the other direction orthogonal to both the thickness direction and the one direction based on the output distribution of the sensor outputs of the plurality of vibration sensor units. ing.

  According to this, the vibration of the device can be detected by dividing it into vibration components in three axial directions orthogonal to each other. For example, it is possible to grasp the direction and magnitude of the vibration of the device from each detected vibration component. become.

  According to the third aspect, the vibration detector is configured such that a part of the plurality of vibration sensor parts includes one vibration sensor part excluding a part of the plurality of vibration sensor parts. It is arranged so as to overlap the part in one direction and the other direction. According to this, it becomes easy to detect the vibration of the device by dividing it into two axial vibration components orthogonal to each other in the plane direction.

  According to the fourth aspect, the vibration detector is composed of a piezoelectric element having a piezo element having flexibility including polyvinylidene fluoride. According to this, even if there is a step or the like on the installation surface of the device, there is an advantage that each vibration sensor unit can be easily installed on the device.

  According to the fifth aspect, in the vibration detector, the plurality of vibration sensor units have a protective member having electrical insulation. And the electrode which comprises a some vibration sensor part is covered with the common protective member. In this way, in the configuration in which the electrodes constituting each vibration sensor unit are covered with a common protective member, the position of each vibration sensor unit is defined by the protective member at the time of manufacture. Misalignment can be suppressed. For this reason, it is possible to improve the accuracy of vibration detection based on the sensor output of each vibration sensor unit.

DESCRIPTION OF SYMBOLS 12 1st vibration sensor part 121 Piezo element 122,123 A pair of electrode 14 2nd vibration sensor part 16 3rd vibration sensor part 18 4th vibration sensor part 40 Weight 50 Control part (detection process part)
TD equipment IS installation surface

Claims (5)

A vibration detector for detecting a device (TD) in which vibration occurs;
A plurality of vibration sensor parts (12, 14, 16, 18) including a film-like piezoelectric element (121) and a pair of film-like electrodes (122, 123) disposed on both sides in the thickness direction of the piezoelectric element;
A weight (40) disposed on one surface in the thickness direction of the plurality of vibration sensor units;
A detection processing unit (50) that performs detection processing of information related to vibration of the device based on sensor outputs from the plurality of vibration sensor units,
The plurality of vibration sensor units are arranged adjacent to each other with respect to a predetermined installation surface (IS) in the device,
The detection processing unit detects a vibration component in the thickness direction based on a sum value of sensor outputs of the plurality of vibration sensor units, and the thickness direction based on an output distribution of sensor outputs of the plurality of vibration sensor units. A vibration detector configured to detect a vibration component in at least one direction within a plane orthogonal to. On the installation surface, three or more vibration sensor units are arranged adjacent to each other,
The detection processing unit detects a vibration component in the thickness direction based on a sum value of sensor outputs of the plurality of vibration sensor units, and the one direction based on an output distribution of sensor outputs of the plurality of vibration sensor units. The vibration detector according to claim 1, which is configured to detect a vibration component in the other direction orthogonal to both the thickness direction and the one direction.   Among the plurality of vibration sensor units, some of the vibration sensor units are arranged in the one direction and the other direction with a part of the other vibration sensor units excluding the part of the vibration sensor units. The vibration detector according to claim 2, which is arranged so as to overlap.   The vibration detector according to any one of claims 1 to 3, wherein the piezo element is formed of a flexible piezoelectric element including polyvinylidene fluoride. The plurality of vibration sensor units have protective members (120, 130) having electrical insulation,
The vibration detector according to any one of claims 1 to 4, wherein the electrodes constituting the plurality of vibration sensor units are covered with the common protective member.

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