JP2019052826A - Temperature control device - Google Patents

Abstract

To provide a temperature control device capable of inhibiting a temperature of a temperature control target from becoming non-uniform.SOLUTION: A temperature control device 30 (second temperature control section 32) includes: a first storage chamber 321 and a second storage chamber 322 that store heating media; and a heating medium flow passage 323 for connecting the first storage chamber 321 and the second storage chamber 322 and provided to enable heat exchange with a first temperature control section 31 serving as one example of a temperature control target. The temperature control device 30 generates a pressure difference between a heating medium stored in the first storage chamber 321 and a heating medium stored in the second storage chamber 322 and transferring the heating medium between the first storage chamber 321 and the second storage chamber 322.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a temperature control device that adjusts the temperature of an object using a heat medium.

  Patent Document 1 describes a cooling device that cools a nozzle head that discharges droplets as an example of a temperature control device. This cooling device includes a flow path for circulating a liquid cooling medium and a water cooling pump for circulating the cooling medium in the flow path.

JP 2016-16355 A

  However, in the cooling device as described above, the cooling medium gradually increases in temperature by taking heat away from the nozzle head when circulating through the flow path. For this reason, the cooling device as described above may not be able to cool the nozzle head uniformly depending on the arrangement of the flow path with respect to the nozzle head. In other words, in the nozzle head, a portion provided with a flow path through which a relatively low-temperature cooling medium flows is sufficiently cooled, while a portion provided with a flow path through which the cooling medium heated by cooling the portion is provided. May not be cooled sufficiently.

  Such a situation is not limited to the case of cooling the object to be cooled, but is generally common when the object to be heated is heated. The objective of this invention is providing the temperature control apparatus which can suppress that the temperature of a temperature control target object becomes non-uniform | heterogenous.

Hereinafter, means for solving the above-described problems and the effects thereof will be described.
The temperature control apparatus that solves the above problem connects the first storage chamber and the second storage chamber that store the heat medium, the first storage chamber, and the second storage chamber, and is capable of exchanging heat with the temperature control object. A pressure difference is generated between the heat medium flow path provided, the heat medium stored in the first storage chamber, and the heat medium stored in the second storage chamber, and the first storage chamber and A pressure adjusting unit that transfers the heat medium between the second storage chambers.

  According to the above configuration, the pressure adjusting unit makes the pressure of the heat medium stored in the first storage chamber higher than the pressure of the heat medium stored in the second storage chamber, so that the heat medium is removed from the first storage chamber. It is transferred to the second storage chamber. Further, the pressure adjusting unit makes the pressure of the heat medium stored in the second storage chamber higher than the pressure of the heat medium stored in the first storage chamber, thereby transferring the pressure from the second storage chamber to the first storage chamber. The Thus, the temperature control device can cause the heat medium to flow through the heat medium flow path in both directions. For this reason, unlike the case where the heat medium is allowed to flow only in one direction through the heat medium flow path, it is possible to suppress the temperature of the temperature adjustment object from becoming uneven.

  In the temperature control apparatus, the first storage chamber and the second storage chamber are closed spaces partitioned from outside air, and the pressure adjusting unit connects the first storage chamber to a gas supply source and A switching valve that switches between a first state in which the second storage chamber is connected to the outside air and a second state in which the first storage chamber is connected to the outside air and the second storage chamber is connected to the gas supply source. Is preferred.

  According to the above configuration, the pressure of the heat medium stored in the first storage chamber can be increased by switching the switching valve to the first state. On the other hand, the pressure of the heat medium stored in the second storage chamber can be increased by switching the switching valve to the second state. That is, the heat medium can be transferred bidirectionally between the first storage chamber and the second storage chamber without using a rotating device such as a pump. In this respect, it is possible to suppress the configuration of the temperature control device from becoming complicated.

  The temperature control device includes: a first heat medium amount detection unit that detects a heat medium amount in the first storage chamber; a second heat medium amount detection unit that detects a heat medium amount in the second storage chamber; When the amount of heat medium in one storage chamber is less than a predetermined first predetermined amount, the switching valve is switched from the first state to the second state, while the amount of heat medium in the second storage chamber is And a controller that switches the switching valve from the second state to the first state when the amount is less than the set second specified amount.

  According to the above-described configuration, the temperature adjustment device is configured so that the second heat storage medium is transferred to the second storage chamber from the first storage chamber before the amount of the heat medium in the first storage chamber becomes 0 (zero). It can transfer to the state which transfers a thermal medium from a storage chamber to a 1st storage chamber. Similarly, the temperature control apparatus is configured to remove the heat medium from the first storage chamber before the amount of the heat medium in the second storage chamber becomes 0 (zero) in a situation where the heat medium is transferred from the second storage chamber to the first storage chamber. It can transfer to the state which transfers a thermal medium to a 2nd storage chamber. Thus, the temperature control device can suppress the occurrence of a situation in which the heat medium cannot be transferred from one storage chamber to the other storage chamber.

In the temperature control device, it is preferable that the volume of the first storage chamber is equal to the volume of the second storage chamber.
According to the above configuration, when the temperature control device transfers the heat medium bidirectionally between the first storage chamber and the second storage chamber, the temperature control device transfers the heat medium in one direction and the heat medium in the other direction. It can be equal to the time for transferring. For this reason, it becomes easier to adjust the temperature control target to a more constant temperature.

  According to the temperature control apparatus having the above configuration, it is possible to suppress the temperature of the temperature control object from becoming uneven.

FIG. 3 is a schematic diagram illustrating a schematic configuration of a liquid discharge unit according to an embodiment. The block diagram which shows the electrical constitution of a liquid discharge unit. The flowchart which shows the flow of the process which a control part performs when determining whether a discharge part can discharge a liquid normally. The flowchart which shows the flow of the process which a control part performs when a discharge part discharges a liquid. The flowchart which shows the flow of the process which a control part performs when cleaning a discharge part. The flowchart which shows the flow of the process which a control part performs when driving a 2nd temperature control part. The flowchart which shows the flow of the process which a control part performs when determining whether the discharge part was able to discharge the liquid normally. (A)-(c) is a timing chart which shows the state change at the time of an ejection part ejecting a liquid. (A), (b) is a timing chart which shows the state change at the time of a supply part supplying a liquid to a discharge part. The schematic diagram which shows schematic structure of the 2nd temperature control part which concerns on other embodiment. The perspective view which shows schematic structure of the 3rd object detection part with which the observation part which concerns on other embodiment is provided. The schematic diagram which shows the method of calculating the volume of the liquid discharged from a discharge part based on the detection result of the said 3rd object detection part.

  Hereinafter, an embodiment of a discharge unit that discharges liquid toward a workpiece will be described with reference to the drawings. Note that the discharge unit of the present embodiment is a lubricant discharge unit that discharges a lubricant such as grease toward the sliding portion of the workpiece. The sliding portion of the workpiece is, for example, a portion where a gear as a component member of the workpiece is engaged, or a portion where a bearing and a shaft as a component member of the workpiece are in contact.

  As shown in FIG. 1, the discharge unit 10 includes a discharge device 20 that discharges liquid toward the workpiece W, a temperature adjustment device 30 that adjusts the temperature of the liquid discharged from the discharge device 20, and the liquid of the discharge device 20. And an inspection device 40 for confirming the discharge state of

  As shown in FIG. 1, the ejection device 20 cleans the ejection unit 21 that ejects liquid, the supply unit 23 that supplies liquid to the ejection unit 21, the support unit 24 that supports the workpiece W, and the ejection unit 21. And a cleaning unit 25. As shown in FIG. 2, the ejection device 20 includes an attitude changing unit 26 that changes the attitude (position and angle) of the ejection unit 21, a pressure detection unit 27 that detects the pressure of the liquid supplied to the ejection unit 21, And a first control unit 51 that controls components of the discharge device 20.

  The discharge unit 21 includes a cylinder 211 having a cylindrical space inside, a seal member 214 that partitions the internal space of the cylinder 211 into a liquid chamber 212 and an air chamber 213, and the air chamber 213 as the first air chamber 215 and the second air chamber 213. It has a moving body 217 partitioned into an air chamber 216 and a coil spring 218 disposed in the second air chamber 216. Further, the discharge unit 21 includes a gas supply source 11 that supplies a gas that is equal to or higher than the atmospheric pressure (air that is equal to or higher than atmospheric pressure), a first gas flow path 221 that connects the first air chamber 215, and the gas supply source 11 and the second gas supply source 11. It has the 2nd gas flow path 222 which connects the air chamber 216, the 1st switching valve 223 provided in the 1st gas flow path 221, and the 2nd switching valve 224 provided in the 2nd gas flow path 222.

  A nozzle 225 connected to the liquid chamber 212 is formed at the tip of the cylinder 211. The internal space of the cylinder 211 is shielded from the outside air except for the connection portion between the nozzle 225, the first gas flow path 221 and the second gas flow path 222. Inside the cylinder 211, the liquid chamber 212 stores the liquid supplied from the supply unit 23, and the first air chamber 215 and the second air chamber 216 store the gas supplied from the gas supply source 11.

  The moving body 217 includes a piston 226 having a disk shape and a rod-shaped rod 227 extending from the piston 226. The piston 226 moves in the air chamber 213 according to the pressure difference between the first air chamber 215 and the second air chamber 216. The first air chamber 215 is provided near the tip of the cylinder 211, and the second air chamber 216 is provided near the rear end of the cylinder 211. The tip of the rod 227 opposite to the base end connected to the piston 226 has a hemispherical shape larger than the opening of the nozzle 225. The rod 227 moves in the internal space of the cylinder 211 together with the piston 226 to block the nozzle 225 or open the nozzle 225.

  In the following description, the position of the moving body 217 when the tip of the rod 227 blocks the nozzle 225 and blocks the liquid chamber 212 from the outside air is referred to as a “closed position”, the tip of the rod 227 opens the nozzle 225, and the nozzle 225 The position of the moving body 217 when the liquid chamber 212 is connected to the outside air via the “open position”. That is, the moving body 217 moves between the closed position and the open position according to the pressure difference between the first air chamber 215 and the second air chamber 216.

  The coil spring 218 pushes the piston 226 in the direction in which the volume of the second air chamber 216 increases. For this reason, when there is no pressure difference between the first air chamber 215 and the second air chamber 216, the piston 226 moves in a direction in which the volume of the first air chamber 215 decreases. In this case, the volume of the first air chamber 215 is the smallest and the volume of the second air chamber 216 is the largest.

  The first switching valve 223 switches between a supply state in which the first air chamber 215 is connected to the gas supply source 11 and an open state in which the first air chamber 215 is connected to outside air. Similarly, the second switching valve 224 switches between a supply state in which the second air chamber 216 is connected to the gas supply source 11 and an open state in which the second air chamber 216 is connected to outside air. The supply state is a state in which a gas compressed to an external pressure or higher is supplied to the first air chamber 215 or the second air chamber 216, and the open state is the first air chamber 215 or the second air chamber 216. It is in a state where it is open to the outside air. Note that the gas supply source 11 may be, for example, an air pipe through which air compressed to atmospheric pressure or higher flows, a compressor that supplies air compressed to atmospheric pressure or higher, and the like. Moreover, the 1st switching valve 223 and the 2nd switching valve 224 should just be a three-way solenoid valve, for example.

  In the discharge unit 21, when the first switching valve 223 is switched from the supply state to the open state and the second switching valve 224 is switched from the open state to the supply state, gas flows out from the first air chamber 215 while the second air chamber Gas flows into 216. As a result, the pressure in the first air chamber 215 becomes lower than the pressure in the second air chamber 216, and the moving body 217 moves from the open position toward the closed position. Precisely, when the force in which the gas in the first air chamber 215 pushes the piston 226 becomes smaller than the force in the gas in the second air chamber 216 and the coil spring 218 pushes the piston 226, the moving body 217 is moved from the open position. Move towards the closed position.

  On the other hand, in the discharge unit 21, when the first switching valve 223 is switched from the open state to the supply state and the second switching valve 224 is switched from the supply state to the open state, the gas flows into the first air chamber 215 while the second Gas flows out of the air chamber 216. As a result, the pressure in the first air chamber 215 becomes higher than the pressure in the second air chamber 216, and the moving body 217 moves from the closed position toward the open position. Precisely, when the force with which the gas in the first air chamber 215 pushes the piston 226 becomes larger than the force with which the gas in the second air chamber 216 and the coil spring 218 push the piston 226, the moving body 217 opens from the closed position. Move towards position.

  The supply unit 23 intermittently supplies the liquid from the liquid supply source 231 serving as a liquid supply source, the liquid flow path 232 connecting the liquid supply source 231 and the discharge unit 21, and the discharge unit 21 from the liquid supply source 231. A reciprocating pump 233. In addition, the supply unit 23 includes an accumulator 234 that suppresses the pressure fluctuation of the liquid in the liquid channel 232 and a regulator 235 that adjusts the pressure of the liquid in the liquid channel 232.

  The liquid supply source 231 may be any container that stores liquid. The liquid supply source 231 may be an open container for the outside air, or may be a closed container for the outside air. The reciprocating pump 233 may be a piston pump, a plunger pump, a diaphragm pump, or the like that supplies liquid by a reciprocating motion of the piston, plunger, and diaphragm. For this reason, when supplying the liquid, the reciprocating pump 233 repeats the suction process of mainly sucking the liquid from the liquid supply source 231 and the discharge process of discharging the liquid mainly toward the discharge unit 21. Then, by driving the reciprocating pump 233, the pressure of the liquid flowing in the liquid flow path 232 and the liquid stored in the liquid chamber 212 of the discharge unit 21 becomes equal to or higher than the external atmospheric pressure.

  The cleaning unit 25 includes a nozzle receiving unit 251 having a concave shape corresponding to the shape of the nozzle 225 of the discharge unit 21, a waste liquid channel 252 having one end connected to the nozzle receiving unit 251, and the other end of the waste liquid channel 252. A suction pump 253 connected thereto. As shown in FIG. 1, the cleaning unit 25 drives the suction pump 253 in a state where the nozzle 225 is accommodated in the nozzle receiving unit 251, and generates a negative pressure in the nozzle receiving unit 251. In this way, the cleaning unit 25 sucks and removes the foreign matter attached to the nozzle 225.

  In the following description, the position of the discharge unit 21 when the nozzle 225 of the discharge unit 21 is accommodated in the nozzle receiving unit 251 is also referred to as a “cleaning position”. On the other hand, the position of the discharge unit 21 when the nozzle 225 of the discharge unit 21 faces the support unit 24 or the workpiece W supported by the support unit 24 is also referred to as a “discharge position”.

  As shown in FIG. 1, the pressure detection unit 27 may be provided in the liquid channel 232 or in the liquid chamber 212. What is necessary is just to comprise the pressure detection part 27 so that the pressure according to the pressure of the liquid supplied to the liquid chamber 212 of the discharge part 21 or the said pressure can be detected.

  The first control unit 51 (control unit 50) controls the posture changing unit 26 to change the posture of the discharge unit 21 with respect to the workpiece W supported by the support unit 24. That is, the first control unit 51 changes the position and angle of the discharge unit 21 so that the region where the liquid of the workpiece W is to be attached is located in the direction of the nozzle 225 of the discharge unit 21. Thereafter, the first control unit 51 acquires the pressure of the liquid supplied to the liquid chamber 212 of the discharge unit 21 (hereinafter also referred to as “detected pressure Pd”) based on the detection result of the pressure detection unit 27. And the 1st control part 51 permits or restricts discharge of the liquid of discharge part 21 based on detection pressure Pd.

  When discharging the liquid, the first control unit 51 switches the states of the first switching valve 223 and the second switching valve 224 to move the moving body 217 from the closed position to the open position for a short time. Then, the liquid chamber 212 of the discharge unit 21 that stores liquid at a pressure equal to or higher than the external atmospheric pressure and the outside air are connected for a short time. As a result, the liquid stored in the liquid chamber 212 is discharged as droplets through the nozzle 225 due to the pressure difference between the liquid chamber 212 and the outside air.

  Further, the first control unit 51 drives the reciprocating pump 233 to supply liquid from the liquid supply source 231 to the discharge unit 21. At this time, the first control unit 51 controls the supply amount of the liquid in the discharge process of the reciprocating pump 233 so that the discharge unit 21 discharges the liquid to supplement the amount of liquid consumed per unit time. Note that the amount of liquid supplied by the reciprocating pump 233 in one discharge process is much larger than the amount of liquid discharged by the discharge unit 21 at a time.

Next, the temperature control device 30 will be described.
As shown in FIGS. 1 and 2, the temperature adjustment device 30 includes a first temperature adjustment unit 31 that adjusts the temperature of the liquid supplied to the liquid chamber 212 of the discharge unit 21, and a first temperature adjustment object as an example. The 1st temperature control part 31 The 2nd temperature control part 32 which adjusts the temperature, and the 2nd control part 52 which controls the 1st temperature control part 31 and the 2nd temperature control part 32 are provided.

  The first temperature adjustment unit 31 is a so-called Peltier element. A plurality (two in the present embodiment) of the first temperature control unit 31 is provided so as to cover a part of the cylinder 211 of the discharge unit 21. In the first temperature adjustment unit 31, the first surface 311 faces the wall portion constituting the liquid chamber 212 in the cylinder 211 of the discharge unit 21, and the second surface 312 faces the second temperature adjustment unit 32. . In the first temperature adjustment unit 31, the temperature of one surface of the first surface 311 and the second surface 312 increases and the temperature of the other surface decreases depending on the direction of current flow.

  The second temperature adjustment unit 32 includes a first storage chamber 321 and a second storage chamber 322 that store the heat medium, a heat medium flow path 323 that connects the first storage chamber 321 and the second storage chamber 322, and a first temperature. A heat exchanging member 324 for exchanging heat with the adjusting portion 31. The second temperature adjustment unit 32 includes a third gas flow path 325 having one end connected to the first storage chamber 321, a fourth gas flow path 326 having one end connected to the second storage chamber 322, and a third It has the 3rd switching valve 327 to which the other end of the gas flow path 325 and the 4th gas flow path 326 is connected, and the 5th gas flow path 328 which connects the 3rd switching valve 327 and the gas supply source 11. Further, the second temperature control unit 32 includes a first heat medium amount detection unit 331 that detects the amount of heat medium in the first storage chamber 321 and a second heat medium amount detection that detects the amount of heat medium in the second storage chamber 322. And a temperature detection unit 333 that detects the temperature of the liquid stored in the liquid chamber 212 of the discharge unit 21.

  The first storage chamber 321 is cut off from the outside air except for the connection portion of the heat medium flow path 323 and the third gas flow path 325, and the second storage chamber 322 includes the heat medium flow path 323 and the fourth gas flow path 326. It is blocked from the outside air except for the connection part. In the present embodiment, the first storage chamber 321 and the second storage chamber 322 have substantially the same volume. Moreover, it is preferable to comprise the 1st storage chamber 321 and the 2nd storage chamber 322 with material with high heat conductivity, such as a metal. In this case, the 1st storage chamber 321 and the 2nd storage chamber 322 may have composition, such as a fin for improving the efficiency of heat exchange with outside air. The heat medium stored in the first storage chamber 321 and the second storage chamber 322 may be a liquid such as water and oil, or may be a gas.

  A plurality (two in this embodiment) of heat exchange members 324 are provided so as to cover the first temperature adjustment unit 31. The heat exchange member 324 is made of a material having high thermal conductivity such as metal, and a part of the heat medium flow path 323 is provided inside. In the heat exchange member 324, the heat medium flow path 323 is preferably meandered or branched into a plurality of thin tubes in order to increase the efficiency of heat exchange. Moreover, in this point, in this embodiment, the heat medium flow path 323 is provided so that heat exchange with the 1st temperature control part 31 as an example of a temperature control target object is possible.

  The third switching valve 327 is an electromagnetic valve that switches a connection mode between the first storage chamber 321 and the second storage chamber 322 and the outside air and the gas supply source 11. Specifically, the third switching valve 327 connects the first storage chamber 321 to the gas supply source 11 and connects the second storage chamber 322 to the outside air, and connects the first storage chamber 321 to the outside air. The second storage chamber 322 is switched to three states: a second state in which the gas supply source 11 is connected, and a third state in which both the first storage chamber 321 and the second storage chamber 322 are connected to the outside air.

  The first state is a state in which the first storage chamber 321 connected to the gas supply source 11 is supplied with a gas compressed to an external pressure or higher and the second storage chamber 322 is opened to the outside air. The second state is a state in which the first storage chamber 321 is opened to the outside air while the gas compressed to the external pressure or higher is supplied to the second storage chamber 322 connected to the gas supply source 11. The third state is a state in which both the first storage chamber 321 and the second storage chamber 322 are opened to the outside air.

  For this reason, when the 3rd switching valve 327 is switched to a 1st state, since the 1st storage chamber 321 becomes a pressure higher than the 2nd storage chamber 322, the heat medium of the 1st storage chamber 321 goes through the heat-medium flow path 323. Through the second storage chamber 322. On the other hand, when the third switching valve 327 is switched to the second state, the second storage chamber 322 has a higher pressure than the first storage chamber 321, so that the heat medium in the second storage chamber 322 passes through the heat medium flow path 323. To the first storage chamber 321. On the other hand, when the third switching valve 327 is switched to the third state, there is no pressure difference between the first storage chamber 321 and the second storage chamber 322, so that the heat medium does not flow through the heat medium flow path 323.

  In this respect, in the present embodiment, the third gas channel 325, the fourth gas channel 326, the third switching valve 327, and the fifth gas channel 328 are the heat medium and the second storage chamber of the first storage chamber 321. The third switching valve 327 corresponds to an example of a “switching valve”, and corresponds to an example of a “pressure adjusting unit” that generates a pressure difference between the heat medium 322.

  Note that the third switching valve 327 does not have to be configured with one switching valve. For example, the third switching valve 327 includes a switching valve that switches the connection destination of the first storage chamber 321 to the outside air or gas supply source 11, and a switching valve that switches the connection destination of the second storage chamber 322 to the outside air or gas supply source 11. You may comprise.

  For example, when the heat medium is a liquid, the first heat medium amount detection unit 331 and the second heat medium amount detection unit 332 may be level sensors that detect the liquid level of the heat medium. In the following description, in the first storage chamber 321 and the second storage chamber 322, the heat medium amount when the amount of the stored heat medium decreases is referred to as a first specified amount VL1th and a second specified amount VL2th. As an example, the first specified amount VL1th and the second specified amount VL2th may be about 10% of the volume of the first storage chamber 321 and the second storage chamber 322. In the present embodiment, since the volumes of the first storage chamber 321 and the second storage chamber 322 are equal, the first specified amount VL1th and the second specified amount VL2th are also set to the same value.

  In this embodiment, since the 2nd temperature control part 32 transfers a heat medium between the 1st storage chamber 321 and the 2nd storage chamber 322, when the amount of heat media of one storage chamber increases, the other The amount of heat medium in the storage chamber is reduced. For this reason, when the amount of heat medium in the first storage chamber 321 is about the first specified amount VL1th, the second temperature adjustment unit 32 handles the amount of heat medium in the second storage chamber 322 to be about the maximum amount. It is preferable to determine the total amount of the heat medium.

  The temperature detection unit 333 may be configured to detect the temperature of the liquid stored in the liquid chamber 212 of the discharge unit 21 directly or indirectly. For example, the temperature detection unit 333 may be configured to detect a temperature according to the temperature of the liquid stored in the liquid chamber 212 of the discharge unit 21 by detecting the temperature in the vicinity of the nozzle 225 of the discharge unit 21. .

  The second control unit 52 acquires the temperature of the liquid stored in the liquid chamber 212 of the ejection unit 21 (hereinafter also referred to as “detected temperature”) based on the detection result from the temperature detection unit 333. Then, when the detected temperature is lower than the set temperature, the second control unit 52 drives the first temperature adjustment unit 31 so that the temperature of the first surface 311 facing the discharge unit 21 is high, and the detected temperature is When the temperature is higher than the set temperature, the first temperature adjustment unit 31 is driven so that the temperature of the first surface 311 facing the discharge unit 21 is lowered.

  In the following description, driving the first temperature control unit 31 to heat the liquid stored in the liquid chamber 212 of the discharge unit 21 is also referred to as “heating drive” and is stored in the liquid chamber 212 of the discharge unit 21. Driving the first temperature control unit 31 to cool the liquid is also referred to as “cooling driving”. The set temperature is a temperature of the liquid when the liquid can be normally discharged from the discharge unit 21 and is a temperature determined in advance by an experiment or the like.

  By the way, when the 1st temperature control part 31 is heated and driven, the temperature of the 2nd surface 312 gradually becomes low, and when the 1st temperature control part 31 is cooled and driven, the temperature of the 2nd surface 312 is It gets higher gradually. For this reason, when the first temperature adjustment unit 31 is continuously driven, heat is transferred from the high temperature side surface to the low temperature side surface among the first surface 311 and the second surface 312, and the first temperature adjustment unit 31. The heating efficiency and the cooling efficiency are likely to decrease.

  Therefore, when driving the first temperature control unit 31, the second control unit 52 drives the second temperature control unit 32 together. That is, when driving the 1st temperature control part 31, the 2nd control part 52 switches the 3rd switching valve 327 to a 1st state and a 2nd state, and the 1st storage chamber 321 and the 2nd storage chamber 322 are switched. The heat medium is transferred between the two. Thus, the second temperature adjustment unit 32 suppresses the temperature of the second surface 312 from becoming too low when the first temperature adjustment unit 31 is heated and driven, and the first temperature adjustment unit 31 is cooled and driven. The temperature of the second surface 312 is prevented from becoming too high.

Next, the inspection apparatus 40 will be described.
As shown in FIG. 1, the inspection apparatus 40 includes a pair of extending plates 41 extending from the tip of the cylinder 211 of the discharge unit 21, and a first object detecting unit 42 and a second object disposed on one extending plate 41. The detection part 43 and the reflecting plate 44 arrange | positioned at the other extension board 41 are provided. In addition, as illustrated in FIG. 2, the inspection device 40 includes a notification unit 45 that notifies a liquid discharge state of the discharge unit 21 and a third control unit 53 that controls the constituent members of the inspection device 40.

  The pair of extending plates 41 are provided at intervals in a direction orthogonal to the axis AX of the opening of the nozzle 225 of the discharge unit 21. The pair of extending plates 41 are provided so that the nozzle 225 of the discharge unit 21 is located between them.

  The first object detection unit 42 includes a first light projecting unit 421 that projects laser light so as to pass through a first position P1 that is a position on the axis AX of the opening of the nozzle 225, and a first light projecting unit 421. And a first light receiving portion 422 for receiving the laser light projected by the. The second object detection unit 43 projects a laser beam so as to pass through a second position P2, which is a position on the axis AX of the opening of the nozzle 225, and a second light projection unit 431. And a second light receiving portion 432 for receiving the laser light projected by the.

  The first position P1 is a position immediately below the nozzle 225 in the liquid discharge direction of the discharge unit 21, and the second position P2 is a position farther from the nozzle 225 than the first position P1. The first light projecting unit 421 and the second light projecting unit 431 project laser light in a direction intersecting (orthogonal) with the axis AX of the opening of the nozzle 225. The first light receiving unit 422 receives the laser light projected by the first light projecting unit 421 and reflected by the reflecting plate 44, and the second light receiving unit 432 is projected by the second light projecting unit 431. The laser light that is reflected by the reflector 44 is received.

  That is, when an object is present at the first position P1, the laser light projected by the first light projecting unit 421 is blocked by the object, and the amount of light received by the first light receiving unit 422 changes. Similarly, when an object is present at the second position P2, the laser light projected by the second light projecting unit 431 is blocked by the object, and the amount of light received by the second light receiving unit 432 changes. Thus, in the present embodiment, the first object detection unit 42 and the second object detection unit 43 constitute a reflection type optical sensor. The first object detection unit 42 and the second object detection unit 43 may be transmissive optical sensors.

  Note that the beam diameter at the first position P1 of the laser light projected by the first light projecting unit 421 and the beam diameter at the second position P2 of the laser light projected by the second light projecting unit 431 are determined by the ejection unit 21. It is preferable to change according to the size of the liquid discharged from the liquid.

  Then, the first object detection unit 42 detects the presence or absence of an object at the first position P1 based on the amount of light received by the first light receiving unit 422, and the second object detection unit 43 receives the light received by the second light receiving unit 432. Based on the quantity, the presence or absence of an object at the second position P2 is detected. Thus, in the present embodiment, the first object detection unit 42 and the second object detection unit 43 correspond to an example of an “observation unit” that observes the liquid ejected from the nozzle 225.

  The notification unit 45 may be a device that can output light or sound such as a liquid crystal panel, a warning light, and a buzzer, or may be a device that outputs data such as a log file. In addition, the notification part 45 should just be able to notify that when the liquid is not normally discharged from the discharge part 21 at least.

  Based on the detection results of the first object detection unit 42 and the second object detection unit 43, the third control unit 53 passes the liquid discharged from the discharge unit 21 through the first position P1 and the second position P2. Get timing. Then, the third control unit 53 determines the timing at which the liquid ejected from the ejection unit 21 passes through the first position P1 and the second position P2, and the distance from the first position P1 to the second position P2. Based on the above, the speed of the liquid ejected from the ejection section 21 (hereinafter also referred to as “detected speed Vd”) is calculated. Furthermore, the third control unit 53 determines whether or not the liquid is normally ejected from the ejection unit 21 based on the calculated detection speed Vd, or whether or not the ejection unit 21 is capable of ejecting the liquid normally. Judgment.

  Next, a flow of processing executed by the control unit 50 (first control unit 51) in order to determine whether or not liquid can be ejected will be described with reference to the flowchart shown in FIG. This process is a process executed every predetermined control cycle.

  As shown in FIG. 3, the control unit 50 determines whether or not the detected pressure Pd acquired based on the detection result of the pressure detecting unit 27 is within the allowable pressure range Rp (step S11). The allowable pressure range Rp is a pressure range suitable for discharging liquid in the discharge unit 21, and is preferably obtained in advance through experiments or the like. The allowable pressure range Rp is preferably changed according to the type of liquid to be discharged and the temperature of the liquid.

  When the detected pressure Pd is within the allowable pressure range Rp (step S11: YES), the control unit 50 allows the liquid to be discharged (step S12), and ends the present process. On the other hand, when the detected pressure Pd is not within the allowable pressure range Rp (step S11: NO), the control unit 50 starts measuring the elapsed time T1 after the negative determination is made in step S11 (step S13). . Subsequently, the control unit 50 restricts the discharge of the liquid from the discharge unit 21 (step S14). Thereafter, the control unit 50 determines again whether or not the detected pressure Pd is within the allowable pressure range Rp (step S15).

  When the detected pressure Pd is within the allowable pressure range Rp (step S15: YES), the control unit 50 shifts the process to the previous step S12. On the other hand, when the detected pressure Pd is not within the allowable pressure range Rp (step S15: NO), the control unit 50 determines that the elapsed time T1 after the negative determination in step S11 is equal to or longer than the predetermined determination time T1th. Is determined (step S16).

  When the elapsed time T1 is less than the determination time T1th (step S16: NO), the control unit 50 shifts the process to the previous step S15. On the other hand, when the elapsed time T1 is equal to or longer than the determination time T1th (step S16: YES), the control unit 50 notifies the notification unit 45 that the pressure of the liquid supplied to the liquid chamber 212 of the discharge unit 21 is abnormal. (Step S17). Thereafter, the control unit 50 ends this process.

  According to the process described above, even if the detected pressure Pd may not be within the allowable pressure range Rp, the control unit 50 causes the notification unit 45 to notify the pressure of the liquid chamber 212 of the discharge unit 21 until the determination time T1th has elapsed. Do not let you know the abnormality. For this reason, in the reciprocating pump 233 of the supply unit 23, even when the detection stroke Pd changes greatly (pulsation) for a short time, for example, when the suction stroke and the discharge process are switched, the control unit 50 does not change the liquid chamber 212. The abnormal pressure is not reported. In this respect, the determination time T1th may be determined according to the suction stroke and the discharge process of the reciprocating pump 233.

  Next, the flow of processing executed by the control unit 50 (first control unit 51) when discharging liquid will be described with reference to the flowchart shown in FIG. This process is a process executed when liquid ejection is permitted.

  As shown in FIG. 4, the control unit 50 drives the posture changing unit 26 to change the posture of the discharge unit 21 (step S21). Specifically, the control unit 50 changes the posture of the discharge unit 21 so that the part of the workpiece W to which the liquid 225 is to be attached is located in the direction in which the nozzle 225 of the discharge unit 21 faces.

  Subsequently, the control unit 50 switches the second switching valve 224 to an open state (step S22), and connects the second air chamber 216 of the discharge unit 21 to the outside air. That is, the control unit 50 sets both the pressures of the first air chamber 215 and the second air chamber 216 of the discharge unit 21 to the external atmospheric pressure. Thereafter, the control unit 50 switches the first switching valve 223 to the supply state (step S23), and connects the first air chamber 215 of the discharge unit 21 to the gas supply source 11. That is, the control unit 50 makes the pressure of the first air chamber 215 of the discharge unit 21 higher than the pressure of the second air chamber 216. As a result, the moving body 217 moves from the closed position to the open position. In this respect, in the present embodiment, when the moving body 217 is moved from the closed position to the open position, the first switching valve 223 and the second switching valve 224 are switched at different timings.

  Subsequently, the control unit 50 switches the second switching valve 224 to the supply state (step S24), and connects the second air chamber 216 to the gas supply source 11. That is, the control unit 50 sets the pressures of the first air chamber 215 and the second air chamber 216 of the discharge unit 21 to a pressure corresponding to the pressure of the gas supplied from the gas supply source 11. Then, the control part 50 switches the 1st switching valve 223 to an open state (step S25), and connects the 1st air chamber 215 to external air. That is, the control unit 50 makes the pressure of the first air chamber 215 of the discharge unit 21 lower than the pressure of the second air chamber 216. As a result, the moving body 217 moves from the open position to the closed position. In this respect, in the present embodiment, when the moving body 217 is moved from the open position to the closed position, the first switching valve 223 and the second switching valve 224 are switched at different timings.

  Note that step S24 is preferably executed before the moving body 217 starts moving from the open position toward the closed position by executing step S23. In step S23, when the pressure difference between the first air chamber 215 and the second air chamber 216 of the discharge unit 21 becomes 0 (zero) by switching the second switching valve 224 to the supply state, the coil spring 218 This is because the piston 226 may start to be displaced in a direction in which the volume of the first air chamber 215 decreases due to the action. In other words, it is for starting the movement of the moving body 217 from the open position to the closed position at the timing of starting the process of step S24.

  Subsequently, the control unit 50 starts measuring the elapsed time T2 after executing Step S25 (Step S26). Then, the control unit 50 determines whether or not the first received light amount L1, which is the received light amount in the first light receiving unit 422, has started to change based on the detection result of the first light receiving unit 422 (step S27). When the first received light amount L1 starts to change (step S27: YES), that is, when the liquid discharged from the discharge unit 21 starts to pass through the first position P1, the control unit 50 performs the first received light amount. It is determined whether or not L1 has finished changing (step S28). When the first received light amount L1 remains changed (step S28: NO), that is, when the liquid ejected from the ejection unit 21 is in the middle of passing through the first position P1, the control unit 50 again performs step S28. Execute the process. On the other hand, when the first received light amount L1 has finished changing (step S28: YES), that is, when the liquid ejected from the ejection unit 21 has finished passing through the first position P1, the control unit 50 performs this process. Exit.

  On the other hand, in the previous step S27, when the first received light amount L1 does not start changing (step S27: NO), that is, when the liquid that should have been ejected by the ejection unit 21 does not reach the first position P1, the control unit 50 determines whether or not the elapsed time T2 after the execution of the process of step S25 is equal to or longer than the determination time T2th (step S29). When the elapsed time T2 is less than the determination time T2th (step S29: NO), the control unit 50 shifts the process to the previous step S27. On the other hand, when the elapsed time T2 is equal to or longer than the determination time T2th (step S29: YES), that is, when the liquid that should have been discharged by the discharge unit 21 does not reach the first position P1, the control unit 50 The discharge is limited (step S30), and the liquid discharge failure of the discharge unit 21 is notified to the notification unit 45 (step S31). Thereafter, the control unit 50 ends this process.

  According to the processing described above, the discharge unit 21 cannot discharge the next liquid unless the liquid discharged by the discharge unit 21 passes through the first position P1. If the liquid ejected by the ejection unit 21 does not reach the first position P1, the ejection of the next liquid from the ejection unit 21 is restricted, and a ejection failure is notified.

  Next, referring to the flowchart shown in FIG. 5, when the discharge unit 21 has a discharge failure or a liquid dripping from the nozzle 225 and the discharge of the liquid is restricted, the control unit The flow of processing executed by 50 (first control unit 51) will be described.

  As shown in FIG. 5, the control unit 50 drives the posture changing unit 26 to move the discharge unit 21 to the cleaning position (step S41). Subsequently, the control unit 50 causes the nozzle 225 of the ejection unit 21 to be cleaned (step S42), and removes liquid and foreign matters attached to the opening of the nozzle 225. Thereafter, the control unit 50 determines whether or not the liquid ejection failure of the ejection unit 21 has been recovered (step S43). Whether or not the ejection failure of the ejection unit 21 has been recovered may be determined based on, for example, the speed of the liquid when ejecting the liquid to the nozzle receiving unit 251, or the user of the ejection unit 10 may visually check. You may judge. When the ejection failure has not recovered (step S43: NO), the control unit 50 shifts the process to the previous step S42. On the other hand, when the ejection failure is recovered (step S43: YES), the control unit 50 permits the ejection unit 21 to eject the liquid (step S44), and ends the present process.

  Next, with reference to the flowchart shown in FIG. 6, the content of the process which the control part 50 (2nd control part 52) performs in order to reciprocate a thermal medium between the 1st storage chamber 321 and the 2nd storage chamber 322. Will be described. In addition, this process is a process performed when driving the 1st temperature control part 31. FIG.

  As illustrated in FIG. 6, the controller 50 determines whether or not the heat medium amount VL1 of the first storage chamber 321 is equal to or greater than the heat medium amount VL2 of the second storage chamber 322 (step S51). When the heat medium amount VL1 of the first storage chamber 321 is equal to or larger than the heat medium amount VL2 of the second storage chamber 322 (step S51: YES), the control unit 50 supplies liquid from the first storage chamber 321 to the second storage chamber 322. The 3rd switching valve 327 is switched to the 1st state which is the state to transfer (step S52). Subsequently, the control unit 50 determines whether or not the heat medium amount VL1 of the first storage chamber 321 is less than the first specified amount VL1th (step S53). When the heat medium amount VL1 of the first storage chamber 321 is less than the first specified amount VL1th (step S53: YES), that is, when the transfer of the liquid from the first storage chamber 321 to the second storage chamber 322 cannot be continued, The control unit 50 proceeds to step S56, which will be described later.

  On the other hand, when the heat medium amount VL1 in the first storage chamber 321 is greater than or equal to the first specified amount VL1th (step S53: NO), that is, when the liquid transfer from the first storage chamber 321 to the second storage chamber 322 can be continued. The control unit 50 determines whether or not a stop condition for stopping the liquid transfer is satisfied (step S54). When the stop condition is not satisfied (step S54: NO), the control unit 50 shifts the process to the previous step S53. On the other hand, when the stop condition is satisfied (step S54: YES), the control unit 50 causes the third switching valve 327 to stop the liquid transfer between the first storage chamber 321 and the second storage chamber 322. The state is switched (step S55), and this process is terminated. The stop condition is a condition that is established when temperature control of the first temperature control unit 31 is not necessary, for example, when driving of the first temperature control unit 31 is stopped.

  In the previous step S51, when the heat medium amount VL1 of the first storage chamber 321 is less than the heat medium amount VL2 of the second storage chamber 322 (step S51: NO), the control unit 50 starts from the second storage chamber 322. The third switching valve 327 is switched to the second state in which the liquid is transferred to the storage chamber 321 (step S56). Subsequently, the control unit 50 determines whether or not the heat medium amount VL2 of the second storage chamber 322 is less than the second specified amount VL2th (step S57). When the heat medium amount VL2 of the second storage chamber 322 is less than the second specified amount VL2th (step S57: YES), that is, when the transfer of the liquid from the second storage chamber 322 to the first storage chamber 321 cannot be continued, The control unit 50 shifts the process to the previous step S52.

  On the other hand, when the heat medium amount VL2 in the second storage chamber 322 is greater than or equal to the second specified amount VL2th (step S57: NO), that is, when the liquid transfer from the second storage chamber 322 to the first storage chamber 321 can be continued. The second controller 52 determines whether or not a condition for stopping the liquid transfer is satisfied (step S58). When the stop condition is not satisfied (step S58: NO), the control unit 50 shifts the process to the previous step S57. On the other hand, when the stop condition is satisfied (step S58: YES), the control unit 50 shifts the process to step S55.

  Next, a flow of processing executed by the third control unit 53 (control unit 50) will be described with reference to the flowchart shown in FIG. This process is a process executed when the discharge device 20 discharges a liquid.

  As shown in FIG. 7, the control unit 50 determines whether or not the first received light amount L1 has changed based on the detection result of the first object detection unit 42 (first light receiving unit 422) (step S61). . When the first received light amount L1 does not change (step S61: NO), that is, when the liquid ejected by the ejection unit 21 has not reached the first position P1, the control unit 50 executes the process of step S61 again. To do. On the other hand, when the first received light amount L1 changes (step S61: YES), that is, when the liquid ejected by the ejection unit 21 reaches the first position P1, the control unit 50 determines that the process of step S61 is affirmative. The elapsed time T3 from the start is started (step S62).

  And the control part 50 determines whether the elapsed time T3 after the process of step S61 is affirmed is more than predetermined | prescribed determination time T3th (step S63). When the elapsed time T3 is less than the determination time T3th (step S63: NO), the control unit 50 determines that the second received light amount L2 that is the received light amount in the second light receiving unit 432 is based on the detection result of the second light receiving unit 432. It is determined whether or not it has changed (step S64). When the second received light amount L2 does not change (step S64: NO), that is, when the liquid that has reached the first position P1 does not reach the second position P2, the control unit 50 performs the process in the previous step S63. Migrate to

  When the second received light amount L2 changes (step S64: YES), that is, when the liquid that has passed through the first position P1 reaches the second position P2, the control unit 50 includes the first object detection unit 42 and Based on the detection result of the second object detection unit 43, a detection speed Vd that is the speed of the liquid discharged from the discharge unit 21 is calculated (step S65). Specifically, the control unit 50 divides the distance from the first position P1 to the second position P2 by the time from the timing at which the first received light amount L1 starts to change to the timing at which the second received light amount L2 starts to change. Thus, the detection speed Vd is calculated. That is, in the present embodiment, the control unit 50 calculates the detection speed Vd based on the timing at which the tip of the liquid ejected from the ejection unit 21 reaches the first position P1 and the second position P2.

  Subsequently, the control unit 50 determines whether or not the calculated detection speed Vd is within the allowable speed range Rv (step S66). The allowable speed range Rv is a speed range determined in advance by experiments or the like, and defines the upper and lower limits of the speed required to land the liquid on the part of the workpiece W where the liquid is desired to adhere.

  When the detected speed Vd is within the allowable speed range Rv (step S66: YES), the control unit 50 ends this process. In this case, since the discharge unit 21 can normally discharge the liquid, the control unit 50 does not restrict the discharge of the liquid from the discharge unit 21. On the other hand, when the detection speed Vd is not within the allowable speed range Rv (step S66: NO), the control unit 50 restricts the discharge of the liquid from the discharge unit 21 because the discharge unit 21 cannot discharge the liquid normally. Then (step S67), the notification unit 45 is notified of this (step S68). The detection speed Vd does not fall within the allowable speed range Rv, for example, when the liquid chamber 212 of the discharge unit 21 contains foreign matters such as bubbles, and when the liquid cannot be discharged normally, or when the nozzle of the discharge unit 21 The case where a liquid cannot be normally discharged by a foreign material adhering to 225 opening vicinity etc. is mentioned. Thereafter, the control unit 50 ends this process.

  On the other hand, in the previous step S63, when the elapsed time T3 is equal to or longer than the determination time T3th (step S63: YES), the control unit 50 restricts the discharge of the liquid from the discharge unit 21 (step S69). The notification unit 45 is notified that liquid dripping has occurred in the nozzle 225 (step S70). That is, in this case, since the object (liquid) continues to exist at the first position P1 immediately below the nozzle 225 of the discharge unit 21, the control unit 50 causes the liquid to drip from the nozzle 225. It is determined that it exists in the state. Thereafter, the control unit 50 ends this process.

  In the above process, the determination time T3th is slightly longer than the time required for the liquid normally ejected from the ejection unit 21 to fly from the first position P1 to the second position P2. Good. In the above process, the processes in steps S67 and S69 may be omitted. According to this, although discharge failure and liquid dripping are notified, liquid discharge is continued.

Next, with reference to the timing chart shown in FIG. 8, the operation when the discharge unit 10 (discharge device 20) discharges the liquid toward the workpiece W will be described.
As shown in FIGS. 8A, 8B, and 8C, when the discharge unit 10 discharges liquid, the second switching valve 224 switches from the supply state to the open state at the first time t11. Thereafter, at the second time t12, the first switching valve 223 is switched from the open state to the supply state. Therefore, at the second time t12, the moving body 217 moves from the closed position to the open position, and the nozzle 225 is opened.

  Subsequently, at the third time t13, the second switching valve 224 is switched from the open state to the supply state, and at the subsequent fourth time t14, the first switching valve 223 is switched from the supply state to the open state. Therefore, at the fourth time t14, the moving body 217 moves from the open position to the closed position, and the nozzle 225 is closed.

Thus, in the period from the first time t11 to the fourth time t14, the moving body 217 temporarily moves to the open position, and the liquid is discharged from the nozzle 225 of the discharge unit 21.
At the fifth time t15 after the ejection unit 21 ejects the liquid, the liquid ejected by the ejection unit 21 starts to pass through the first position P1, and the first received light amount L1 of the first detection unit changes. start. Specifically, the liquid ejected by the ejection unit 21 blocks the laser light projected by the first light projecting unit 421, and the first received light amount L1 decreases. At the sixth time t16, the liquid finishes passing through the first position P1, and the first received light amount L1 of the first detection unit returns to the original received light amount. That is, the liquid ejected by the ejection unit 21 does not block the laser light projected by the first light projecting unit 421, and the first received light amount L1 increases.

  When the liquid ejected by the ejection unit 21 finishes passing through the first position P1 at the sixth time t16, the first liquid is ejected from the seventh time t17 immediately after the sixth time t16. Switching of the switching valve 223 and the second switching valve 224 is started. That is, at the seventh time t17, the eighth time t18, the eleventh time t21, and the twelfth time t22, the first time t11, the second time t12, the third time t13, and the fourth time t14. Similarly, the first switching valve 223 and the second switching valve 224 are switched. Thus, the next liquid can be discharged immediately after the discharge unit 21 discharges the liquid.

  Further, the liquid that has passed through the first position P1 at the sixth time t16 starts to pass through the second position P2 at the ninth time t19, and reaches the second position P2 at the tenth time t20. Finish passing. In the present embodiment, the distance between the first position P1 and the second position P2 is set to the second position P2 from the fifth time t15 at which the liquid ejected by the ejection unit 21 starts to pass through the first position P1. The detection speed Vd is calculated by dividing by the time up to the ninth time t19 when starting to pass. Then, based on the calculated detection speed Vd, when the liquid is not normally ejected from the ejection unit 21, the fact is notified.

Next, with reference to the timing chart shown in FIG. 9, the operation of supplying liquid to the discharge unit 21 in the discharge unit 10 (discharge device 20) will be described.
As shown in FIGS. 9A and 9B, at a first time t31, when a sufficient time has elapsed since the reciprocating pump 233 switched to the discharge process, the detected pressure Pd of the liquid chamber 212 is the allowable pressure. Since it falls within the range Rp, liquid ejection from the ejection unit 21 is allowed. Subsequently, at the second time t32 when the reciprocating pump 233 finishes discharging the liquid sucked in the previous suction process, the reciprocating pump 233 is switched from the discharge process to the suction process. Then, while the supply amount of the liquid from the supply unit 23 to the discharge unit 21 decreases, the detection pressure Pd of the liquid chamber 212 starts to decrease gradually as the liquid continues to be discharged from the discharge unit 21.

  Thereafter, at the third time t33 when the reciprocating pump 233 finishes sucking the liquid, the reciprocating pump 233 is switched from the suction process to the discharge process. Then, the supply amount of the liquid from the supply unit 23 to the discharge unit 21 is rapidly increased, so that the pressure of the liquid in the liquid channel 232 is rapidly increased. As a result, after the third time t33, a temporary pressure increase that cannot be suppressed by the regulator 235 and the accumulator 234 occurs in the liquid chamber 212.

  When the detected pressure Pd in the liquid chamber 212 exceeds the allowable pressure range Rp at the fourth time t34, the discharge of the liquid from the discharge unit 21 is restricted. For this reason, the discharge unit 21 is suppressed from discharging the liquid toward the workpiece W under conditions inappropriate for discharging the liquid. When the detected pressure Pd in the liquid chamber 212 falls within the allowable pressure range Rp at the fifth time t35, the discharge of the liquid from the discharge unit 21 is permitted. For this reason, the discharge part 21 can discharge a liquid toward the workpiece | work W on the conditions which can discharge a liquid stably again.

  If the time from the fourth time t34 when the detected pressure Pd exceeds the allowable pressure range Rp to the fifth time t35 is less than the determination time T1th, the notification unit 45 notifies the pressure abnormality in the liquid chamber 212. Absent. That is, it is suppressed that the alerting | reporting part 45 performs excessive alerting | reporting.

  According to the discharge unit 10 described above, the following effects can be obtained. In the description of the effects shown below, the effects of the discharge device 20, the temperature adjustment device 30, and the inspection device 40 are distinguished and described with numbers in parentheses.

  (1-1) If the detected pressure Pd of the liquid supplied to the liquid chamber 212 of the discharge unit 21 fluctuates (pulsates) as a result of the fluctuation (pulsation) of the discharge device 20, the discharge unit 20 21 discharge of the liquid is limited. That is, the discharge unit 21 does not discharge the liquid when the pressure of the liquid supplied to the liquid chamber 212 is not suitable for discharging the liquid. In other words, the ejection unit 21 ejects liquid when the pressure is suitable for liquid ejection. Thus, the discharge device 20 can stably discharge the liquid.

  (1-2) When liquid is intermittently supplied to the liquid chamber 212 of the discharge unit 21, the pressure of the liquid supplied to the liquid chamber 212 is temporarily increased at a timing when the amount of liquid supplied to the liquid chamber 212 increases or decreases. May fall outside the allowable pressure range Rp. However, in this case, the pressure of the liquid supplied to the liquid chamber 212 tends to fall within the allowable pressure range Rp with time. In this regard, in the present embodiment, the discharge device 20 causes the notification unit 45 to notify the pressure abnormality when the state where the pressure supplied to the liquid chamber 212 does not fall within the allowable pressure range Rp continues for the determination time T1th or longer. For this reason, if the pressure of the liquid supplied to the liquid chamber 212 falls within the allowable pressure range Rp before the determination time T1th has elapsed, the ejection device 20 does not cause the notification unit 45 to notify the pressure abnormality. In this way, the discharge device 20 can make a notification about a serious pressure abnormality that is not resolved with the passage of time, while preventing the notification unit 45 from making an excessive notification.

  (1-3) The inspection device 40 can open and close the nozzle 225 by switching between the first switching valve 223 and the second switching valve 224. That is, the ejection device 20 can eject liquid from the ejection unit 21 with a simple configuration.

  (1-4) When the second switching valve 224 is switched from the supply state to the open state at the same timing as the first switching valve 223 is switched from the open state to the supply state, the pressure in the second air chamber 216 is the first pressure. The first switching valve 223 and the second switching valve 224 are switched in a state higher than the pressure in the air chamber 215. For this reason, after switching the 1st switching valve 223 and the 2nd switching valve 224, time until the pressure of the 2nd air chamber 216 becomes lower than the pressure of the 1st air chamber 215 tends to become long. That is, the time from when the first switching valve 223 and the second switching valve 224 are switched to when the moving body 217 moves to the open position tends to be long.

  On the other hand, in this embodiment, the discharge apparatus 20 switches the 1st switching valve 223 to a supply state, after switching the 2nd switching valve 224 to an open state. Therefore, the discharge device 20 reduces the pressure difference between the first air chamber 215 and the second air chamber 216 by switching the second switching valve 224, and moves the moving body 217 by switching the first switching valve 223. You can start. That is, the time from when the first switching valve 223 is switched to when the moving body 217 moves to the open position tends to be shortened. Thus, the discharge device 20 can easily adjust the liquid discharge start timing associated with the switching of the first switching valve 223 and the second switching valve 224.

  (1-5) When the second switching valve 224 is switched from the open state to the supply state at the same timing as the first switch valve 223 is switched from the supply state to the open state, the pressure in the first air chamber 215 is the second pressure. The first switching valve 223 and the second switching valve 224 are switched in a state higher than the pressure in the air chamber 216. For this reason, after switching the 1st switching valve 223 and the 2nd switching valve 224, time until the pressure of the 1st air chamber 215 becomes a state lower than the pressure of the 2nd air chamber 216 tends to become long. That is, the time from when the first switching valve 223 and the second switching valve 224 are switched to when the moving body 217 moves to the closed position tends to be long.

  On the other hand, in this embodiment, the discharge apparatus 20 switches the 1st switching valve 223 to an open state, after switching the 2nd switching valve 224 to a supply state. Therefore, the discharge device 20 reduces the pressure difference between the first air chamber 215 and the second air chamber 216 by switching the second switching valve 224, and moves the moving body 217 by switching the first switching valve 223. You can start. That is, the time from when the first switching valve 223 is switched to when the moving body 217 moves to the closed position tends to be shortened. In this way, the discharge unit 10 can easily adjust the liquid discharge end timing associated with the switching of the first switching valve 223 and the second switching valve 224.

  (1-6) In the case where the discharge unit 21 continuously discharges liquid, if the period from when the discharge unit 21 discharges the liquid until the next liquid is discharged is short, the discharge of the previous liquid is the next There is a possibility of affecting the discharge of the liquid. On the other hand, if the period from the discharge of the liquid to the discharge of the next liquid is long, the number of times that the discharge unit 21 can discharge the liquid per unit time decreases, and the throughput may decrease. In this regard, according to the present embodiment, the discharge of the next liquid is restricted until the liquid discharged from the discharge unit 21 passes through the first position P1 immediately below the nozzle 225, and the first position P1 directly below the nozzle 225 is reached. After passing through, discharge of the next liquid is permitted. For this reason, in the situation where the discharge unit 21 continuously discharges the liquid, the discharge device 20 suppresses the influence of the discharge of the previous liquid on the discharge of the subsequent liquid and reduces the throughput. Can be suppressed.

  (1-7) When the discharge unit 21 fails to discharge the liquid, the liquid may hang down from the opening of the nozzle 225. In this case, the discharge unit 21 may not be able to normally discharge the liquid due to the liquid dripping from the opening of the nozzle 225. In this regard, in the present embodiment, when the situation in which an object is present at the first position P1 immediately below the nozzle 225 continues, that is, when the liquid hangs down from the opening of the nozzle 225, the liquid in the ejection unit 21 Discharge is limited. For this reason, the ejection device 20 can suppress ejection of the liquid in a situation where the ejection unit 21 cannot normally eject the liquid.

  (1-8) Further, when the state where an object is present at the first position P1 immediately below the nozzle 225 continues, that is, when the liquid hangs down from the opening of the nozzle 225, the ejection device 20 The notification unit 45 is notified of this. For this reason, the discharge device 20 can notify the user of the discharge unit 10 that liquid dripping has occurred in the opening of the nozzle 225.

  (1-9) Further, when the state where the object is present at the first position P1 immediately below the nozzle 225 continues, that is, when the liquid hangs down from the opening of the nozzle 225, the ejection device 20 The nozzle 225 is cleaned to eliminate the dripping of the opening of the 225. Thus, the discharge device 20 can recover the state of the nozzle 225.

  (2-1) The temperature control device 30 changes the pressure of the heat medium stored in the first storage chamber 321 and the second storage chamber 322 to change the liquid between the first storage chamber 321 and the second storage chamber 322. Is transferred in both directions. For this reason, unlike the case where the heat medium is passed through the heat medium flow path 323 only in one direction, it is possible to suppress the temperature of the temperature control object from becoming non-uniform.

  (2-2) With the switching of the third switching valve 327, the temperature adjustment device 30 changes the connection destination of the first storage chamber 321 and the second storage chamber 322 to the outside air or the gas supply source 11. The pressures of the first storage chamber 321 and the second storage chamber 322 can be changed. That is, the temperature control device 30 can transfer the heat medium bidirectionally between the first storage chamber 321 and the second storage chamber 322 without using a rotating device such as a pump. In this respect, it is possible to suppress the configuration of the temperature control device 30 from becoming complicated.

  In addition, the rotating device such as a pump does not have to be used in a region in contact with the heat medium, so that the user of the temperature adjustment device 30 rotates based on the corrosion resistance of the portion that contacts the heat medium in the rotating device such as a pump. There is no need to determine the material of the device or the type of the heat medium.

  (2-3) The temperature control device 30 includes a first heat medium amount detection unit 331 and a second heat medium amount detection unit 332 that detect the heat medium amounts VL1 and VL2 of the first storage chamber 321 and the second storage chamber 322. And switching the third switching valve 327 based on the detection result. For this reason, under the situation where the heat medium is transferred from the first storage chamber 321 to the second storage chamber 322, the heat storage medium amount VL1 of the first storage chamber 321 is reduced from 0 (zero) before the second storage chamber 322 The state can be switched to the state in which the heat medium is transferred to the first storage chamber 321. Similarly, in the situation where the heat medium is transferred from the second storage chamber 322 to the first storage chamber 321, before the heat medium amount VL <b> 2 of the second storage chamber 322 becomes 0 (zero), from the first storage chamber 321. The state can be switched to the state in which the heat medium is transferred to the second storage chamber 322. Thus, the temperature control device 30 can suppress the occurrence of a situation in which the heat medium cannot be transferred from one storage chamber to the other storage chamber.

  (2-4) When the temperature control device 30 transfers the heat medium in both directions between the first storage chamber 321 and the second storage chamber 322, the temperature adjustment device 30 transfers the heat medium in one direction and in the other direction. The time for transferring the heat medium can be made substantially equal. For this reason, it becomes easy for the temperature control device 30 to adjust the temperature control target to a constant temperature.

  (2-5) The temperature adjustment device 30 can adjust the temperature of the liquid stored in the liquid chamber 212 of the discharge unit 21 in detail by driving the first temperature adjustment unit 31. Further, since the temperature adjustment device 30 drives the second temperature adjustment unit 32 when driving the first temperature adjustment unit 31, the temperature of the second surface 312 is driven when the first temperature adjustment unit 31 is heated. Can be prevented from becoming too low, and the temperature of the second surface 312 can be prevented from becoming too high when the first temperature control unit 31 is driven to cool.

  (3-1) Since the liquid that is not normally ejected from the ejection unit 21 changes in size, shape, and the like of the liquid that is normally ejected from the ejection unit 21, the speed of flying in space changes. To do. In this regard, according to the present embodiment, the inspection device 40 determines that the detection speed Vd is not within the allowable speed range Rv, and if it is determined that the liquid is not normally ejected from the ejection unit 21, the notification unit 45 is informed of that. In this way, the inspection apparatus 40 can check the liquid discharge status regardless of the type of liquid discharged by the discharge unit 21.

  (3-2) The inspection device 40 calculates the detection speed Vd based on the timing at which the liquid ejected from the ejection unit 21 passes through the first position P1 and the second position P2. For this reason, the inspection apparatus 40 can calculate the detection speed Vd based on the detection result of a simple detection unit that detects the presence or absence of an object at the first position P1 and the second position P2.

  (3-3) The shape of the liquid discharged from the discharge unit 21 may change during the flight toward the workpiece. In this case, the shape of the liquid discharged from the discharge unit 21 is more likely to change at the rear end in the discharge direction than at the front end. For this reason, the timing at which the received light amounts of the laser beams of the first light receiving unit 422 and the second light receiving unit 432 finish changing, in other words, the rear end of the liquid traveling in the ejection direction has the first position P1 and the second position P2. If the detection speed Vd is calculated based on the passing timing, the calculation accuracy of the detection speed Vd may be reduced. In this regard, the inspection device 40 detects the detection speed in order to calculate the velocity of the liquid ejected from the ejection unit 21 based on the timing at which the liquid tip in the ejection direction passes the first position P1 and the second position P2. It can suppress that the calculation precision of speed Vd falls.

In addition, you may change the said embodiment as shown below.
The discharge device 20 may not be configured to discharge the liquid by the pressure difference between the liquid stored in the liquid chamber 212 of the discharge unit 21 and the outside air. For example, the step of filling the nozzle 225 with liquid by moving the moving body 217 to the open position, and the step of pushing out and discharging the liquid filled in the nozzle 225 by moving the moving body 217 to the closed position. It is good also as a structure including.

  In the ejection device 20, the liquid supplied by the supply unit 23 may be colored in a color that easily absorbs laser light. According to this, the detection accuracy of the 1st object detection part 42 and the 2nd object detection part 43 can be improved.

  In the discharge device 20, the supply unit 23 may have a configuration such as a metering valve that supplies a certain amount of liquid to the discharge unit 21. Even in this case, the pressure of the liquid supplied to the liquid chamber 212 of the discharge unit 21 may fluctuate every time the metering valve repeatedly supplies a certain amount of liquid to the discharge unit 21. Thus, the supply part 23 should just be the structure which supplies a liquid intermittently with respect to the discharge part 21. FIG.

In the discharge device 20, the cleaning unit 25 may include a wiping unit that wipes the opening of the nozzle 225 with a wiping member such as a brush and a scraper.
In the ejection device 20, the control unit 50 may eject the next liquid from the ejection unit 21 after waiting for a predetermined time after ejecting the liquid from the ejection unit 21. That is, the control unit 50 may not control the liquid discharge timing of the discharge unit 21 based on the detection result of the first object detection unit 42.

  In the discharge device 20, when the moving body 217 is moved from the closed position to the open position, the second switching valve 224 may be switched to the open state after the first switching valve 223 is switched to the supply state. Further, when the moving body 217 is moved from the open position to the closed position, the second switching valve 224 may be switched to the supply state after the first switching valve 223 is switched to the open state. Further, the first switching valve 223 and the second switching valve 224 may be switched simultaneously when the moving body 217 is moved from the closed position to the open position or moved from the open position to the closed position.

  -In the temperature control apparatus 30, you may change the 2nd temperature control part 32 as shown in FIG. As shown in FIG. 10, the second temperature adjustment unit 34 includes a cylindrical cylinder 341 that stores a heat medium therein, a piston 342 that moves inside the cylinder 341, and an actuator 343 that drives the piston 342. Have. The inside of the cylinder 341 is partitioned into a first chamber 344 and a second chamber 345 by a piston 342. One end of the heat medium flow path 323 is connected to the first chamber 344, and the other end of the heat medium flow path 323 is connected to the second chamber 345. The actuator 343 may be configured by a motor and a mechanism that converts the rotational motion of the motor into linear motion of the piston 342.

  When the piston 342 moves in the direction in which the volume of the first chamber 344 decreases in the second temperature adjustment unit 34, the heat medium stored in the first chamber 344 is compressed, so that the first chamber 344 is compressed. The stored heat medium is transferred to the second chamber 345 through the heat medium flow path 323. On the other hand, when the piston 342 moves in the direction in which the volume of the first chamber 344 increases in the second temperature control unit 34, the heat medium stored in the second chamber 345 is compressed, so that the second chamber 345 is compressed. The stored heat medium is transferred to the first chamber 344 via the heat medium flow path 323. Thus, the second temperature adjustment unit 34 shown in FIG. 10 can cause the heat medium to flow in the heat medium flow path 323 bidirectionally by reciprocating the piston 342 by driving the actuator 343.

  The temperature adjustment device 30 may be a heating device that heats a heating object as an example of a temperature adjustment object, or may be a cooling device that cools a cooling object as an example of a temperature adjustment object. Moreover, what is necessary is just to select the temperature control object of the temperature control apparatus 30 suitably. Here, the heat medium flow path 323 may be provided inside the temperature adjustment object or may be provided outside depending on the type of the temperature adjustment object.

  As illustrated in FIG. 11, the inspection device 40 includes a third light projecting unit 461 disposed on one of the pair of extending plates 41 and a plurality of third light receiving units disposed on the other of the pair of extending plates 41. And a third object detection unit 46 (an example of an observation unit) having a unit 462. The third light projecting unit 461 is disposed so as to extend in a direction orthogonal to the axis AX of the opening of the nozzle 225, and the plurality of third light receiving units 462 are disposed so as to be aligned in the longitudinal direction of the third light projecting unit 461. The In the following description, the direction in which the plurality of third light receiving portions 462 are arranged is also referred to as “array direction X”.

  The third light projecting unit 461 projects a laser beam to a region including the third position P3 that is a position on the axis AX of the opening of the nozzle 225 and extending in the arrangement direction X. The plurality of third light receiving units 462 receive the laser light projected from the third light projecting unit 461 and output a detection result corresponding to the amount of received light to the third control unit 53 at predetermined detection intervals. When the liquid passes through the detection region, the amount of light received by the third light receiving unit 462 in which the liquid is present between the third light receiving units 462 and the third light projecting unit 461 decreases. The amount of light received by the third light receiving unit 462 in which no liquid exists between the third light projecting unit 461 does not change. For this reason, the control part 50 can acquire the length of the arrangement | positioning direction X of the liquid which passes a detection area | region for every detection interval based on the length in the arrangement | positioning direction X of the part which received light quantity decreased.

  Here, assuming that the cross-sectional shape orthogonal to the discharge direction of the liquid discharged from the discharge unit 21 is circular, the third control unit 53 passes through the detection region of the third object detection unit 46 as shown in FIG. The diameter D of the liquid to be obtained can be acquired at every detection interval. And as shown in FIG. 12, the control part 50 considers the shape of the liquid which passes a detection area | region per unit time as the cylindrical solid S, and adds the said cylindrical solid S, The discharge part 21 is added. The volume of the liquid discharged from is calculated. The volume of the cylindrical solid S can be calculated by multiplying the bottom area A of the solid S by the height H. Here, the bottom area A is the product of π / 4 and the square of the diameter D, and the height H is the product of the liquid detection speed Vd and the detection interval.

  Subsequently, the third control unit 53 determines whether or not the volume calculated in this way (hereinafter also referred to as “detected volume”) is within the allowable volume range, and the discharge unit 21 normally supplies the liquid. It is determined whether or not the discharge has been completed. Specifically, when the calculated volume of the liquid is not within the allowable volume range, the third control unit 53 notifies the notification unit 45 of that fact. In addition, as a case where the detection speed Vd is not within the allowable volume range, for example, when the liquid chamber 212 of the discharge unit 21 contains foreign substances such as bubbles, the liquid cannot be discharged normally, and the nozzle 225 of the discharge unit 21 For example, there is a case where liquid cannot be ejected normally due to foreign matter adhering to the vicinity of the opening.

  According to this, the inspection apparatus 40 can detect the liquid ejection failure of the ejection unit 21 based on the detected volume in addition to the detection speed Vd. For this reason, the inspection apparatus 40 can improve the detection accuracy of the liquid discharge failure of the discharge unit 21.

  In the inspection apparatus 40, the notification unit 45 does not have to notify the discharge unit 21 every time a discharge failure occurs. For example, the notification unit 45 may collectively report discharge failures after a plurality of times of liquid discharge to one workpiece W are completed.

  -In the inspection apparatus 40, the 1st object detection part 42 and the 2nd object detection part 43 are detection which has a transmission part which transmits a sound wave and electromagnetic waves, and a receiving part which receives the sound wave and electromagnetic waves which were transmitted from the transmission part. Part. Further, the first object detection unit 42 and the second object detection unit 43 may be a camera that images the liquid ejected by the ejection unit 21. That is, the first object detection unit 42 and the second object detection unit 43 may be sensors that can detect the presence or absence of an object at the first position P1 and the second position P2.

  The inspection apparatus 40 is a fourth object detection unit (observation) that detects the presence or absence of an object at a fourth position that is a position on the axis AX of the opening of the nozzle 225 and is further away from the nozzle 225 than the second position P2. An example of a unit). In this case, the controller 50 speeds between the second position P2 and the fourth position in addition to the speed between the first position P1 and the second position P2 of the liquid discharged from the discharge section 21. Or the acceleration of the liquid ejected from the ejection unit 21 can be obtained. For this reason, the control unit 50 can also determine whether or not the liquid is normally ejected from the ejection unit 21 based on the change (acceleration) of the speed of the liquid ejected from the ejection unit 21.

  DESCRIPTION OF SYMBOLS 10 ... Discharge unit, 11 ... Gas supply source, 20 ... Discharge device, 21 ... Discharge part, 211 ... Cylinder, 212 ... Liquid chamber, 213 ... Gas chamber, 214 ... Seal member, 215 ... First air chamber, 216 ... First 2 air chambers, 217 ... moving body, 218 ... coil spring, 221 ... first gas flow path, 222 ... second gas flow path, 223 ... first switching valve, 224 ... second switching valve, 225 ... nozzle, 226 ... Piston, 227 ... Rod, 23 ... Supply part, 231 ... Liquid supply source, 232 ... Liquid flow path, 233 ... Reciprocating pump, 234 ... Accumulator, 235 ... Regulator, 24 ... Support part, 25 ... Cleaning part, 251 ... Nozzle reception 252 ... Waste liquid flow path, 253 ... Suction pump, 26 ... Attitude change unit, 27 ... Pressure detection unit, 30 ... Temperature control device, 31 ... First temperature control unit, 311 ... First surface, 312 ... Second Side of, 32 2nd temperature control part, 321 ... 1st storage chamber, 322 ... 2nd storage chamber, 323 ... Heat medium flow path, 324 ... Heat exchange member, 325 ... 3rd gas flow path which comprises an example of a pressure adjustment part, 326 ... 4th gas flow path which constitutes an example of a pressure adjusting part, 327 ... 3rd switching valve (an example of a switching valve) which constitutes an example of a pressure adjusting part, 328 ... 5th gas flow which constitutes an example of a pressure adjusting part Path, 331 ... first heat medium amount detector, 332 ... second heat medium amount detector, 333 ... temperature detector, 34 ... second temperature controller, 341 ... cylinder, 342 ... piston, 343 ... actuator, 344 ... 1st chamber, 345 ... 2nd chamber, 40 ... inspection apparatus, 41 ... extension board, 42 ... 1st object detection part which comprises an example of an observation part, 421 ... 1st light projection part, 422 ... 1st light reception part , 43 ... a second object detection unit constituting an example of an observation unit, 431 ... a second light projecting unit, 4 2 ... second light receiving unit, 44 ... reflecting plate, 45 ... notification unit, 46 ... third object detection unit constituting an example of observation unit, 461 ... third light projecting unit, 462 ... third light receiving unit, 50 ... control 51, first control unit, 52 ... second control unit, 53 ... third control unit, AX ... axis, L1 ... first received light amount, L2 ... second received light amount, P1 ... first position, P2 ... Second position, P3 ... third position, Pd ... detected pressure, Rp ... allowable pressure range, Rv ... allowable speed range, S ... solid, T1, T2, T3 ... elapsed time, T1th, T2th, T3th ... judgment time , Vd ... detection speed, VL1, VL2 ... heat medium amount, VL1th ... first prescribed amount, VL2th ... second prescribed amount, W ... workpiece, X ... arrangement direction.

Claims (4)

A first storage chamber and a second storage chamber for storing a heat medium;
A heat medium flow path that connects the first storage chamber and the second storage chamber and is provided so as to be capable of exchanging heat with a temperature control object;
A pressure difference is generated between the heat medium stored in the first storage chamber and the heat medium stored in the second storage chamber between the first storage chamber and the second storage chamber. And a pressure adjusting unit for transferring the heat medium. The first storage chamber and the second storage chamber are closed spaces partitioned from outside air,
The pressure adjusting unit connects the first storage chamber to a gas supply source and connects the second storage chamber to the outside air, and connects the first storage chamber to the outside air and the second storage chamber. The temperature control apparatus according to claim 1, further comprising a switching valve that switches between a second state in which a gas is connected to the gas supply source. A first heat medium amount detector for detecting the amount of heat medium in the first storage chamber;
A second heat medium amount detection unit for detecting the amount of heat medium in the second storage chamber;
When the amount of heat medium in the first storage chamber is less than a predetermined first amount, the switching valve is switched from the first state to the second state, while the amount of heat medium in the second storage chamber The temperature control apparatus according to claim 2, further comprising: a control unit that switches the switching valve from the second state to the first state when is less than a preset second specified amount. The temperature control apparatus according to any one of claims 1 to 3, wherein a volume of the first storage chamber is equal to a volume of the second storage chamber.