JP2019046966A - Substrate manufacturing method - Google Patents

Abstract

To provide a substrate manufacturing method capable of easily forming a groove or space having a desired shape even when firing is performed at a high temperature.SOLUTION: When a ceramic substrate 1 is manufactured, a boron nitride paste containing boron nitride is used as a disappearance material, and a borosilicate glass having a softening temperature of 800°C or higher is used as a part of the material of the ceramic substrate 1. Then, co-firing is performed under a firing condition of firing at 950°C or higher in an oxidizing atmosphere to manufacture the ceramic substrate 1 having a groove 3. Since the ceramic substrate 1 is manufactured by such a manufacturing method, the groove 3 having a desired shape can be easily formed even when firing is performed at a high temperature of 950°C or higher.SELECTED DRAWING: Figure 2

Description

  The present disclosure relates to a method of manufacturing a substrate such as a package of an electronic component, a wireless communication module substrate, a substrate for a control circuit, a ceramic substrate used for a semiconductor inspection device, and the like.

  Conventionally, for example, as a method of forming irregularities or spaces serving as flow paths or air passages in a ceramic substrate, a green sheet is filled with a disappearing material such as a resin or carbon which disappears by degreasing or firing, and the green sheet is fired. There is known a method of forming irregularities and spaces on a ceramic substrate by extinguishing the extinguishing material.

  For example, Patent Document 1 discloses a method of forming a flow path using a resin film or a material that disappears by firing at a temperature of less than 800 ° C. in a method of manufacturing a solid electrolyte fuel cell. It is disclosed.

  Further, Patent Document 2 discloses a technique of using a heat dissipating sheet which contains an organic binder as a main component and does not contain a ceramic powder in a method of manufacturing a multilayer ceramic electronic component.

  Further, Patent Document 3 discloses a technique for filling, in a powder form, a filling material made of a paste-like resin, not a filling material made of a paste-like resin, in a powdery partition-wall fired material of a discharge display device.

JP 2005-128024 A JP, 2016-201503, A Japanese Patent Application Publication No. 2001-34390

By the way, in the above-mentioned prior art, there are the following problems, and their improvement has been demanded.
For example, when carbon is used as the extinguishing material, carbon is not efficiently extinguished, so that a carbon residue may remain on the ceramic substrate after firing.

As a countermeasure for this, when a special firing profile is set to efficiently dissipate carbon, the firing time may be prolonged.
Further, it is known that when the residue remains in the ceramic substrate or in the electrode provided on the ceramic substrate, it causes defects, cracks, voids and the like.

  Furthermore, when carbon is used, it starts to disappear from a temperature range of less than 800 ° C., and therefore, if a component such as glass in the ceramic substrate softens and flows at a higher temperature, the flow path formation is hindered (for example, the flow path Problems such as blocking) may occur.

  On the other hand, when a resin is used, most of the resin disappears in a low temperature range of less than 350 ° C. Therefore, when components such as glass in the ceramic substrate soften and flow at a higher temperature, similar to the case of using carbon. In some cases, problems such as the formation of the flow path being disturbed may occur.

That is, in the above-mentioned prior art, when manufacturing substrates, such as a ceramic substrate, by baking at high temperature, it was not easy to form a channel etc. of a desired shape in a substrate.
The present disclosure has been made in view of the above problems, and an object thereof is to provide a method of manufacturing a substrate capable of easily forming a groove portion or a space portion having a desired shape even when firing is performed at high temperature. It is.

  (1) According to a first aspect of the present disclosure, a groove portion or a groove portion is formed by forming a vanishing pattern on a substrate sheet formed of a substrate material using a vanishing material that vanishes during firing and co-firing the substrate sheet and the vanishing pattern. The present invention relates to a method of manufacturing a substrate having a space portion.

  In this method of manufacturing a substrate, a material containing boron nitride is used as the disappearance material, and a material having a softening temperature of 800 ° C. or more is used as part of the substrate material, and firing conditions are fired at 950 ° C. or more in an oxidizing atmosphere. Alternatively, co-firing is performed under a firing condition of firing at a temperature of 1800 ° C. or more in an inert atmosphere to manufacture a substrate having a groove portion or a space portion.

In the first aspect, since the substrate is manufactured under the conditions described above, even when firing is performed at a high temperature of 950 ° C. or higher, it is possible to easily form a groove or a space with a desired shape.
Here, the principle of the present disclosure will be described.

  Boron nitride has the property of becoming nitrided oxide (NOx) and boric acid when fired at a temperature of 950 ° C. or higher in an oxidizing atmosphere such as the air. Similarly, when firing is performed at a temperature of 1800 ° C. or higher in an inert atmosphere, it has the property of becoming nitrided oxide and boric acid. Moreover, at the above temperature, nitrogen oxides disappear as gas, and since the boiling point of boric acid is 300 ° C., boric acid also disappears.

  Therefore, by using a material (for example, boron nitride paste) containing boron nitride as the dissipating material to form a dissipating pattern on the substrate sheet and co-firing, it is possible to efficiently dissipate the boron nitride having the dissipating pattern. Therefore, a groove or space having a desired shape can be easily formed.

  As described above, in the first aspect, by the above-described manufacturing method, even when firing at a high temperature of 950 ° C. or higher, the occurrence of defects such as deformation or blockage of the flow path as in the case of using carbon or resin is suppressed Thus, it is possible to easily form a groove or space of a desired shape on the surface or inside of the substrate.

In addition, it is possible to precisely form fine grooves and spaces by a method such as forming a vanishing pattern by screen printing using the above-described vanishing material.
Further, since the groove and the space can be formed without using carbon, it is possible to suppress the occurrence of a defect due to the use of carbon, for example, a defect such as a defect, a crack, or a void in a substrate.

(2) In the second aspect of the present disclosure, a boron nitride paste containing boron nitride may be used as the extinguishing material.
A minute groove or space can be formed with high accuracy by forming a vanishing pattern by screen printing, for example, using a boron nitride paste.

(3) In the third aspect of the present disclosure, a solid material containing boron nitride may be used as the extinguishing material.
For example, a groove or a space can be easily formed by disposing a vanishing material (eg, a film or the like) obtained by adding boron nitride to a resin material at a location where the groove or space of the substrate sheet is desired to be formed. Can.

(4) In the fourth aspect of the present disclosure, the substrate material may be a ceramic material containing ceramic as a main component, and the substrate may be a ceramic substrate containing ceramic as a main component.
The fourth aspect exemplifies preferable substrate materials and substrates.

<The following describes each configuration and the like of the present disclosure>
-As a board | substrate sheet, the board | substrate sheet which consists of a sheet | seat of 1 layer, or the board | substrate sheet which laminated | stacked several sheets is mentioned.

  -As a sheet | seat, the ceramic green sheet which is a non-baked sheet | seat is mentioned. In addition, a ceramic green sheet is a sheet which has a ceramic as a solid component as a main component. In addition, a main component is the component (for example, 50 volume% or more) most among each component.

The groove portion is a recessed portion formed on the surface of the substrate, and the space portion is a space such as a flow path formed inside the substrate.
In addition to boron nitride, a resin component may be contained as the disappearance material.

As the oxidizing atmosphere, an atmospheric atmosphere can be mentioned. As inert atmosphere, non-oxidizing atmospheres, such as nitrogen atmosphere, are mentioned.
The boron nitride paste may contain, in addition to boron nitride, a component for paste formation, such as a binder and a solvent.

Examples of the material having a softening temperature of 800 ° C. or higher include borosilicate glass, aluminosilicate glass, quartz glass and the like.
As the ceramic, for example, alumina, mullite, cordierite or the like can be adopted. In addition to the ceramic, for example, a sintering aid such as glass or metal oxide may be contained.

It is sectional drawing which shows the cross section which fractured | ruptured the ceramic substrate of 1st Embodiment in the thickness direction. It is explanatory drawing which shows the manufacturing method of the ceramic substrate of 1st Embodiment. It is explanatory drawing which shows the manufacturing method of the ceramic substrate of 2nd Embodiment. It is a graph which shows the experimental result of Experimental example 1, and shows the height before and behind a press of the disappearance pattern at the time of using boron nitride of an example, and carbon of a comparative example. It is a perspective view which shows the ceramic substrate used for Experimental example 2. It is a photograph which shows the space part corresponding | compatible part of the board | substrate sheet of the Example and comparative example which image | photographed using the magnifying glass in Experimental example 2. FIG. It is a photograph which shows the space part corresponding | compatible part of the ceramic substrate of the Example and comparative example which image | photographed using the magnifying glass in Experimental example 2. FIG. It is a SEM photograph which shows the space part corresponding | compatible part of the ceramic substrate of the Example and comparative example which image | photographed using the scanning electron microscope in Experimental example 3. FIG. It is a photograph which shows the shape of the disappearance pattern of the example and comparative example which photoed using a magnifying glass in example 4 of an experiment. It is a photograph which shows the shape of the groove part of the Example and comparative example which image | photographed using the magnifying glass in Experimental example 5. FIG. The photograph by the magnifying glass of the Example in experiment example 6 and a comparative example and the 3D image by high-speed high-precision shape measurement system are shown.

Next, an embodiment of a method of manufacturing a substrate of the present disclosure will be described.
[1. First embodiment]
Here, a ceramic substrate will be described as an example of the substrate.

[1-1. Configuration of ceramic substrate]
First, a ceramic substrate manufactured by the manufacturing method of the first embodiment will be described.
As shown in FIG. 1, the ceramic substrate 1 of the first embodiment is a flat substrate having, for example, alumina and borosilicate glass as main components, and a groove 3 as a recess (cavity) is formed on the surface thereof. It is formed.

  Examples of the material of the ceramic substrate 1 include a ceramic component such as alumina crystallized at the time of firing and a glass component having a softening temperature of 800 ° C. or higher. Other than that, known sintering aid components may be included.

  The shape of the groove 3 may be, for example, a linear shape extending in the longitudinal direction in a plan view (when viewed from the upper side in FIG. 1), but the width is not limited, and various concave configurations Can be adopted.

[1-2. Method of manufacturing ceramic substrate]
Next, a method of manufacturing the ceramic substrate 1 of the first embodiment will be described.
<Preparation of green sheet>
As shown in FIG. 2A, in the first embodiment, the green sheet 5 is manufactured using the above-described material of the ceramic substrate 1 (substrate material).

Specifically, first, a borosilicate glass powder containing SiO ₂ , Al ₂ O ₃ and B ₂ O ₃ as main components and an alumina powder were prepared as ceramic raw material powder. The alumina powder used had an average particle diameter of 2.0 μm and a specific surface area of 3.0 m ² / g. In addition, the softening temperature of borosilicate glass is 800 ° C. or more (for example, 950 ° C.).

  Next, a binder component (for example, an acrylic binder made of an acrylic resin) at the time of sheet formation, a solvent (for example, IPA.toluene), and a plasticizer (for example, DOP: dioctyl phthalate) were prepared.

Next, the above-mentioned borosilicate glass powder and alumina powder were weighed into a pot made of alumina so as to have a total weight of 1 kg at a weight ratio of 50:50.
Add 120 g of the above acrylic resin, and the amount of solvent (IPA, toluene) and plasticizer (DOP) necessary to give adequate slurry viscosity and sheet strength to the same pot as above, 5 The ceramic slurry was obtained by time mixing.

For example, a green sheet 5 having a thickness of 0.25 mm was obtained by a doctor blade method using the obtained ceramic slurry.
<Preparation of boron nitride paste>
Moreover, the boron nitride paste containing a boron nitride was produced as a lose | disappearance material which lose | disappears at the time of baking.

  Specifically, first, BN powder was prepared as a main component. For example, BN powder manufactured by Denka Co., Ltd./HC grade / SP3-7 was prepared. In addition, an ethyl cellulose resin and a butyl carbitol solvent were prepared as a varnish component of the paste.

Then, the BN powder and the varnish component were made to have a ratio of 40:60 in volume%, and these were kneaded with a three-roll mill to obtain a boron nitride paste.
<Formation of laminate>
Next, as shown in FIG. 2 (b), a plurality of green sheets 5 were laminated to prepare a laminate (substrate sheet) 7. For example, the substrate sheet 7 which is a 1-mm-thick laminated body was produced by laminating | stacking four layers of green sheets. The substrate sheet 7 may be a green sheet single layer.

Next, as shown in FIG. 2C, a disappearing pattern 9 was formed on the substrate sheet 7 using boron nitride paste, for example, by screen printing, at the place where the groove 3 is desired to be formed.
Next, as shown in FIG. 2 (d), the missing pattern 9 on the substrate sheet 7 was pressed from the front side (upper side in the figure) to embed the missing pattern 9 in the substrate sheet 7.

<Simultaneous firing>
Next, the substrate sheet 7 in which the disappearance pattern 9 was embedded was degreased and then co-fired at a predetermined firing temperature. For example, in the case of co-firing in an oxidizing atmosphere (for example, in the air), the firing temperature is set to 950 ° C. or more (for example, 1000 ° C.). In the case of co-firing in an inert atmosphere (for example, nitrogen), the firing temperature is set to 1800 ° C. or more (for example, 1820 ° C.).

Specifically, the substrate sheet 7 in which the disappearance pattern 7 was embedded was degreased by holding the degreasing temperature at 250 ° C. for 5 hours at a temperature rising / falling rate of 2 ° C./min.
Thereafter, the degreased substrate sheet 7 was fired. Specifically, the firing temperature was kept at 1000 ° C. for 1 hour in an oxidizing atmosphere (for example, in the air).

By this baking, as shown in FIG. 2E, the ceramic substrate 1 having the groove 3 on the surface was obtained.
[1-3. effect]
In the first embodiment, a boron nitride paste containing boron nitride is used as the disappearance material, and a borosilicate glass having a softening temperature of 800 ° C. or higher is used as a part of the material of the ceramic substrate 1. Then, co-firing was performed under the firing conditions of firing at 950 ° C. or higher in an oxidizing atmosphere to produce the ceramic substrate 1 having the groove portion 3.

Since the ceramic substrate 1 is manufactured by such a manufacturing method, the groove 3 having a desired shape can be easily formed even when firing is performed at a high temperature of 950 ° C. or higher.
Specifically, in the first embodiment, even when firing at a high temperature of 950 ° C. or higher, the occurrence of defects such as deformation or blockage of the flow path as in the case of using carbon or resin is suppressed by the above-described manufacturing method Thus, the groove 3 having a target shape can be easily formed on the surface of the ceramic substrate 1.

Further, in the first embodiment, since the vanishing pattern 9 is formed by screen printing using a silicon nitride paste, even the minute grooves 3 can be formed with high accuracy.
Furthermore, in the first embodiment, since the groove 3 can be formed without using carbon, a defect due to the use of carbon, for example, a defect such as a defect, a crack, or a void occurs in the ceramic substrate 1. Can be suppressed.

[2. Second embodiment]
Next, a second embodiment will be described, but the description of the same contents as those of the first embodiment will be omitted or simplified.

  As shown in FIG. 3 (d), the ceramic substrate 11 of the second embodiment is a flat substrate having, for example, alumina and borosilicate glass as main components, and a gas or liquid flow channel in the inside thereof. A space 13 is formed. The material of the ceramic substrate 11 is the same as that of the first embodiment.

Next, a method of manufacturing the ceramic substrate 11 of the second embodiment will be described.
As shown in FIG. 3A, in the second embodiment, the green sheet 15 is manufactured using the same material as that of the first embodiment.

  Next, as shown in FIG. 3B, another green sheet 15b was laminated on a predetermined green sheet 15a. The other green sheet 15 b is a rectangular frame-shaped member in which the space 17 is formed at a position corresponding to the space portion 13.

Thereafter, a boron nitride paste similar to that of the first embodiment was filled to fill the spaces 17 of the other green sheets 15 b to form a disappearing pattern 19.
Next, as shown in FIG. 3 (c), another green sheet is laminated so as to sandwich the predetermined green sheet 15a and the other green sheets 15b, and the substrate sheet 21 which is a laminated body having a five-layer structure is obtained. Made.

Next, after degreasing, the substrate sheet 21 and the disappearance pattern 19 were co-fired at a predetermined firing temperature as in the first embodiment.
By this baking, as shown in FIG. 3D, a ceramic substrate 11 having a space 13 inside was obtained.

The second embodiment exhibits the same effect as the first embodiment. In particular, in the second embodiment, the space portion 13 used for the flow passage or the like can be formed inside the ceramic substrate 11.
[3. Experimental example]
Next, experimental examples performed to confirm the effects of the present disclosure will be described.

  About the sample used for this experiment, in the case of the sample which has a groove part on the surface, it produced using the manufacturing method of the said 1st Embodiment. Moreover, in the case of the sample which has a space part inside, it produced using the manufacturing method of the said 2nd Embodiment.

Experimental Example 1
In Experimental Example 1, as an example within the scope of the present disclosure, a substrate sheet was produced as in the first embodiment, and a vanishing pattern was formed on the surface using a boron nitride paste. And the height of the vanishing pattern was measured before and after pressing the vanishing pattern.

  In addition, as a comparative example, a carbon paste was used to form a disappearing pattern on the surface of the substrate sheet in the same manner as the boron nitride paste. And the height of the disappearance pattern was measured before and after pressing. The carbon paste is obtained by adding 150% by volume of a binder component and a solvent to 100% by volume of carbon powder to form a paste.

The height from the surface of the substrate sheet of each disappearance pattern was measured using a contact surface roughness meter. For details, we used “Tokyo Precision Surface Roughness Profiler SURFCOM”.
The results are shown in FIG. The vertical axis in FIG. 4 indicates the height from the surface (i.e., 0 point), and the horizontal axis indicates the position in the width direction of the disappearance pattern. Further, in FIG. 4, the column of “boron nitride” on the left side shows an example, and the column of “carbon” on the right side shows a comparative example. The upper column of "after printing" in FIG. 4 shows a graph of the height before pressing, and the lower column of "lowering" in FIG. 4 shows a graph of the height after pressing.

  As apparent from FIG. 4, it is understood that the height of the disappearance pattern (for example, the height based on the zero point of the vertical axis) is reduced by the press in both the example and the comparative example. In addition, it turns out that the height is lower in the comparative example.

<Experimental Example 2>
In Experimental Example 2, the appearance of the ceramic substrate was observed before and after firing.
Using the same boron nitride paste as in Experimental Example 1 as a sample of the example to be observed, a laminate (that is, a substrate sheet) having an elimination paste inside is prepared by the same manufacturing method as in the second embodiment. The substrate sheet was degreased and then fired to produce a ceramic substrate 31 shown in FIG.

  The composition of the ceramic substrate 31 is the same as that of the first embodiment, but the shape is different from that of the first embodiment. That is, the ceramic substrate 31 has a concave portion (cavity) 33 having a rectangular plan view on one surface in the thickness direction, and a plurality of space portions 35 are opened in the concave portion 33. The space portion 35 extends in the direction perpendicular to the thickness direction inside the ceramic substrate 31.

  As a comparative example, a carbon paste was used to prepare a substrate sheet in the same manner as in the above example, and the substrate sheet was degreased and then fired to prepare a ceramic substrate having a similar shape.

  In this experimental example 2, the sample of the substrate sheet before firing is broken in the thickness direction at the position of A-A in FIG. 5, and the appearance viewed from the vertical direction of the A-A cross section, specifically, the space portion 35 The appearance of the portion corresponding to the opening end and the periphery thereof (hereinafter referred to as a space portion corresponding portion) was observed with a magnifying glass. Further, even after firing of the substrate sheet, the appearance of the space-corresponding portion was observed with a magnifying glass. As a magnifying glass, "Digital Microscope KEYENCE VHX-500 series" was used.

  FIG. 6 shows a photograph of a space-corresponding portion of the substrate sheet by a magnifying glass. In FIG. 6, the column of "boron nitride" shows an example, and the column of "carbon" shows a comparative example. The upper side of FIG. 6 shows a photograph taken at a magnification of 100 times, and the lower side of FIG. 6 shows a photograph taken at a magnification of 300 times. Note that points 1 and 2 in FIG. 6 indicate that they are photographs of the positions of point 1 and point 2 in FIG.

As is clear from FIG. 6, in both the embodiment and the comparative example, it is understood that in the substrate sheet, vanishing patterns are respectively formed at intended positions for forming the space.
Further, FIG. 7 shows a photograph of a space corresponding portion of the substrate sheet (that is, the ceramic substrate) after firing by the magnifying glass. The meaning of "boron nitride" and "carbon" in FIG. 7 and the meaning of the magnification are the same as in FIG.

  As apparent from FIG. 7, in the embodiment, it is understood that the shape of the space is clear, and a space having a sufficient space is formed. On the other hand, in the comparative example, it can be seen that the shape of the space portion is unclear, and there is a portion that is partially crushed and does not have a sufficient space.

<Experimental Example 3>
Experimental Example 3 is a cross-sectional observation of a ceramic substrate.
Specifically, in the ceramic substrate of Experimental Example 2, the open end at the position of point 1 in the example and the comparative example was observed by a scanning electron microscope (SEM) to obtain a SEM photograph. In addition, "JEOL JSM-6000 series" was used as SEM.

The results are shown in FIG. In FIG. 8, the meanings of “boron nitride” and “carbon” and the meaning of magnification are the same as in FIG. 6 (however, the magnification is the magnification by SEM).
As apparent from FIG. 8, in the embodiment, the shape of the space is clear, and it can be seen that the space having a sufficient space is formed. For example, the thickness of the space portion (flow path) is 0.086 mm on average. On the other hand, in the comparative example, it can be seen that the shape of the space portion is unclear, and there is a portion that is partially crushed and does not have a sufficient space. For example, the thickness of the space portion (flow path) is 0.016 mm on average.

<Experimental Example 4>
Experimental example 4 observes the state in which the fine disappearance pattern was formed on the surface of the substrate sheet.

  Specifically, as shown in FIG. 9 by screen printing using the boron nitride paste of the same example as the experimental example 1 or the carbon paste of the comparative example on the same substrate sheet as the first embodiment. Two kinds of fine disappearance patterns of 100 μm and 200 μm were formed from the right side in the right and left columns of FIG. In addition, after forming the disappearance pattern, it was pressed to embed the disappearance pattern on the surface of the substrate sheet.

  The state is shown in FIG. In addition, the column of "boron nitride" of FIG. 9 shows the photograph of 20 times the magnification by the magnifying glass of an Example, and the column of "carbon" of FIG. 9 shows the photograph of the magnification 20 times by the magnifying glass of a comparative example. ing.

As apparent from FIG. 9, it is understood that both the example and the comparative example can form a fine disappearance pattern at the stage of forming the disappearance pattern.
Experimental Example 5
In the experimental example 5, the groove portion on the surface of the ceramic substrate provided with or without the Au electrode was observed.

(Example)
In Experimental Example 5, an Au electrode pattern is formed on the surface of a substrate sheet similar to that of the first embodiment using Au paste, and on the surface of the Au pattern, a boron nitride paste similar to Experimental Example 1 is used. A fine linear vanishing pattern as shown in FIG. 9 was formed. Then, after pressing, the substrate sheet was co-fired to prepare a ceramic substrate provided with an Au electrode having fine grooves on the surface. The Au paste is obtained by adding 20% by volume of a binder component and a solvent to 100% by volume of Au powder to form a paste.

  And the surface of this Au electrode was image | photographed using the magnifying glass. The photograph is shown in the "Au electrode on-electrode wiring pattern" column in the "boron nitride" column of FIG. In FIG. 10, low magnification indicates 20 times and high magnification indicates 50 times.

  In addition, an Au electrode pattern is formed on the surface of the substrate sheet similar to that of the first embodiment using the Au paste, and a boron nitride paste similar to Experimental Example 1 is used on the surface of the Au pattern. Formed a 2 mm square disappearance pattern. Then, after pressing, the substrate sheet was co-fired to prepare a ceramic substrate provided with an Au electrode having square grooves on the surface.

And the surface of this Au electrode was image | photographed using the magnifying glass. The photograph is shown in the "solid pattern on Au electrode" column in the "boron nitride" column of FIG.
Furthermore, aside from the examples of the “Au electrode wiring pattern” and the “Au electrode solid pattern”, fine linear loss patterns or square patterns are directly formed on the surface of each substrate sheet without providing an Au electrode. A loss pattern was formed. Thereafter, the ceramic substrate was fired to prepare a ceramic substrate provided with a groove.

  Then, as in the case of providing the Au electrode, the surface of each ceramic substrate was photographed using a magnifying glass. Those photographs are described in the column of "Serra upper wiring pattern" and the column of "Sera upper solid pattern" in the column of "boron nitride" in FIG.

(Comparative example)
On the other hand, a sample of each ceramic substrate provided with grooves was produced in the same manner as in the above-described example except that the boron nitride paste was changed to a carbon paste.

Specifically, a carbon paste was used to prepare a sample in which a linear or rectangular groove was provided on an Au electrode, or a sample in which a linear or rectangular groove was directly provided on a ceramic substrate.
The photograph of each sample of these comparative examples is put together in the column of "carbon" of FIG.

  As apparent from FIG. 10, when observed at a magnification of 50 times, it can be seen that grooves having substantially the same shape can be formed in both the example using the boron nitride paste and the comparative example using the carbon paste. .

Experimental Example 6
Experimental example 6 observes the three-dimensional shape of a groove part.
In this experimental example 6, each substrate sheet on which each elimination pattern of the example using the boron nitride paste shown in FIG. 9 and the comparative example using the carbon paste is formed is fired, and each elimination of the example and the comparative example is performed. Samples of each ceramic substrate having grooves corresponding to the patterns were produced.

  Then, using the “KEYENCE high-speed high-accuracy shape measurement system KS-1100 series”, the three-dimensional shape of the groove of each sample was measured. The results are shown in FIG. The measurement position of each groove is a position corresponding to S1 and S2 in FIG.

  The "appearance" column corresponding to each column of "boron nitride" of the example of FIG. 11 and "carbon" of the comparative example shows a photograph with a magnification of 200 times by the digital microscope KEYENCE VHX-500 series.

  Further, the "3D" column corresponding to each column of "boron nitride" and "carbon" in FIG. 11 shows a 3D image by the high-speed high-accuracy shape measurement system, and the dark part of the color is deep in the groove Is shown. In addition, the three-dimensional shape which looked at the groove part from the diagonal direction is shown in the lower right of each column.

Specifically, in the examples, the depths of the groove portions were 23.096 μm and 23.045 μm. On the other hand, in the comparative example, the depths of the groove portions were 13.351 μm and 13.525 μm.
As apparent from FIG. 11, it can be seen that, in the example, the groove can be formed sufficiently deep as compared with the comparative example.

[3. Other Embodiments]
As mentioned above, although embodiment of this indication was described, this indication is not limited to the above-mentioned embodiment, It is possible in the range which does not deviate from the gist of this indication to carry out in various modes.

(1) For example, with respect to the material of the ceramic substrate, various compositions can be adopted without being limited to the composition of the above embodiment.
(2) Not only the boron nitride paste but also a solid material such as a sheet containing boron nitride can be adopted as the vanishing material.

(3) As conditions for simultaneous firing, an inert atmosphere can be adopted other than the oxidizing atmosphere.
(4) The function possessed by one component in each of the above embodiments may be shared by a plurality of components, or the function possessed by a plurality of components may be exhibited by one component. In addition, part of the configuration of each of the above embodiments may be omitted. In addition, at least a part of the configuration of each of the above-described embodiments may be added to or replaced with the configuration of the other embodiments. In addition, all the aspects contained in the technical thought specified from the wording as described in a claim are an embodiment of this indication.

1, 11 ... ceramic substrate 3 ... groove 9, 19 ... disappearance pattern 13 ... space

Claims (4)

A substrate for manufacturing a substrate having a groove or a space portion by forming a vanishing pattern on a substrate sheet formed of a substrate material using a vanishing material that vanishes at the time of firing and co-firing the substrate sheet and the vanishing pattern In the manufacturing method of
A material containing boron nitride is used as the vanishing material, and a material having a softening temperature of 800 ° C. or more is used as part of the substrate material,
The co-firing is performed under a firing condition of firing at 950 ° C. or more in an oxidizing atmosphere, or a firing condition of firing at 1800 ° C. or more in an inert atmosphere, to manufacture a substrate having the groove portion or the space portion. Do,
Method of manufacturing a substrate The dissipation material is a boron nitride paste containing boron nitride,
A method of manufacturing a substrate according to claim 1. The fugitive material is a solid material containing boron nitride,
A method of manufacturing a substrate according to claim 1. The substrate material is a ceramic material whose main component is ceramic, and the substrate is a ceramic substrate whose main component is ceramic.
The manufacturing method of the board | substrate of any one of Claims 1-3.