JP2019043817A - Molding method of quartz glass - Google Patents

Molding method of quartz glass Download PDF

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JP2019043817A
JP2019043817A JP2017169572A JP2017169572A JP2019043817A JP 2019043817 A JP2019043817 A JP 2019043817A JP 2017169572 A JP2017169572 A JP 2017169572A JP 2017169572 A JP2017169572 A JP 2017169572A JP 2019043817 A JP2019043817 A JP 2019043817A
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quartz glass
thickness
molding
forming
plate
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阿曽　大輔
Daisuke Aso
大輔 阿曽
隆介 森田
Ryusuke Morita
隆介 森田
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AGC Inc
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Asahi Glass Co Ltd
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    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

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Abstract

To improve yield at a quartz glass molding time.SOLUTION: In a molding method of quartz glass, molding glass is placed on a sole plate arranged on a bottom plate in a molding tool enclosed by the bottom plate, a side wall and a top plate, and a weight for pressing the quartz glass is placed on the quartz glass, and the quartz glass is heated up to a softening point or higher and molded. In the molding method of quartz glass, a plurality of columnar jigs, not deformed substantially to a load of the weight, and having a height lower than an assumed thickness of molded glass, and higher than a required thickness of a product, are installed on the periphery of the sole plate.SELECTED DRAWING: Figure 1

Description

本発明は、石英ガラスの成形方法に関する。   The present invention relates to a method of forming quartz glass.

石英ガラスは、高い純度、優れた光学特性を有することから半導体産業をはじめとして、多くの産業分野で用いられている。石英ガラスは水晶粉の溶融や有機ケイ素原料の加水分解などによって製造され、それぞれの用途に必要な形状に加熱成形される。石英ガラスを成形する際は、型枠内で石英ガラスを軟化点以上に加熱し、一旦溶融させた後、所望の形状に応じた成形体とする。   Quartz glass is used in many industrial fields including the semiconductor industry because of its high purity and excellent optical properties. Quartz glass is manufactured by melting quartz powder, hydrolysis of organic silicon raw material, etc., and is thermoformed into the shape required for each application. When forming quartz glass, the quartz glass is heated to a temperature higher than the softening point in a mold, and once melted, it is made a molded body according to a desired shape.

成形された石英ガラス成形体は、適宜切断、研削されて最終製品の形状となって、各用途に用いられる。そのため、石英ガラス成形体の形状を最終製品の形状に近くすることで、歩留まりを良くすることができる。石英ガラス成形体は、例えば、円柱状、角柱状、平板状であり、互いに平行な上下面を有している。   The formed quartz glass molded body is appropriately cut and ground to be in the shape of a final product, and used for each application. Therefore, the yield can be improved by making the shape of the quartz glass compact close to the shape of the final product. The quartz glass molded body has, for example, a cylindrical shape, a prismatic shape, and a flat plate shape, and has upper and lower surfaces parallel to each other.

この互いに平行な上下面を有する成形体を得るための方法として、底板と側壁と天板とで囲まれた成形型枠内に石英ガラスを載置し、載置した石英ガラスの上方に重石を載せて石英ガラスを加熱しつつ垂直方向に押圧する成形方法がある（例えば、特許文献１参照）。   As a method for obtaining a molded product having the upper and lower surfaces parallel to each other, quartz glass is placed in a molding form surrounded by a bottom plate, a side wall and a top plate, and a weight is placed above the placed quartz glass. There is a molding method in which the quartz glass is heated and pressed in the vertical direction while being placed thereon (see, for example, Patent Document 1).

特開２０１２−２５０８６７号公報JP 2012-250867 A

図４は従来技術における石英ガラスの成形手順を示した模式断面図であり、成形開始時を示している。図４における成形型１００は、天板１１０、側壁１２０、および底板１３０で構成されており、底板１３０上には石英ガラス４００を載置するための敷板１４０が配置されている。石英ガラス４００上には重石２００が載置されている。図５は、図４に示す成形型１００の平面図である。但し、敷板１４０と、石英ガラス４００との位置関係を示すため、天板１１０および側壁１２０は省略されている。
従来技術における石英ガラスの成形手順では、図４に示す状態から、石英ガラス４００を軟化点以上に加熱しつつ、重石２００により該石英ガラス４００を垂直方向に押圧する。
図６は、図４と同様の図であり、成形後を示している。図４に示す成形型１００は、型枠内で重石２００をスムーズに降下させるために、重石２００と側壁１２０との間には隙間が設けられている。そのため、重石２００が降下する過程で該重石２００が大きく傾く場合がある。重石２００が大きく傾いた状態で石英ガラス４００が成形された場合、重石２００の傾きに倣って石英ガラス成形体５００に大きな板厚偏差が生じていた。これにより製品厚みが確保できず、歩留を著しく低下させていた。 FIG. 4 is a schematic cross-sectional view showing a forming procedure of quartz glass in the prior art, and shows a time when the forming is started. The forming die 100 in FIG. 4 is configured of a top plate 110, a side wall 120, and a bottom plate 130, and a bottom plate 140 for mounting the quartz glass 400 is disposed on the bottom plate 130. A weight 200 is placed on the quartz glass 400. FIG. 5 is a plan view of the mold 100 shown in FIG. However, in order to show the positional relationship between the base plate 140 and the quartz glass 400, the top plate 110 and the side wall 120 are omitted.
In the forming procedure of quartz glass in the prior art, the quartz glass 400 is pressed vertically by the weight 200 while heating the quartz glass 400 to the softening point or higher from the state shown in FIG.
FIG. 6 is a view similar to FIG. 4 and shows after molding. In the mold 100 shown in FIG. 4, a gap is provided between the weight 200 and the side wall 120 in order to smoothly lower the weight 200 in the mold. Therefore, the weight 200 may be greatly inclined while the weight 200 descends. When the quartz glass 400 is formed in a state in which the weight 200 is largely inclined, a large thickness deviation occurs in the quartz glass formed body 500 in accordance with the inclination of the weight 200. As a result, the product thickness can not be secured, and the yield is significantly reduced.

本願発明は、石英ガラス成形時における歩留りの向上を目的とする。   The present invention aims to improve the yield at the time of forming quartz glass.

上記の目的を達成するため、本発明は、底板と側壁と天板とで囲まれた成形型内で、前記底板上に配置された敷板上に成形ガラスを載置し、該石英ガラス上に該石英ガラスを押圧するための重石を載置して、軟化点以上に前記石英ガラスを加熱して成形する石英ガラスの成形方法において、
前記敷板の外周部に、重石の荷重に対して実質的に変形せず、高さが成形後のガラスの想定厚みよりも低く、製品の必要厚みよりも高い、柱状の治具を複数設置することを特徴とする石英ガラスの成形方法を提供する。 In order to achieve the above object, according to the present invention, in the mold surrounded by the bottom plate, the side wall and the top plate, the formed glass is placed on a base plate disposed on the bottom plate, and the quartz glass is placed on the bottom plate. In a method for forming quartz glass, comprising placing a weight for pressing the quartz glass and heating and molding the quartz glass to a temperature above the softening point,
A plurality of pillar-shaped jigs, which are substantially undeformable to the load of the weight and whose height is lower than the assumed thickness of the glass after molding and higher than the required thickness of the product, are installed on the outer peripheral portion of the floor plate. The present invention provides a method of forming quartz glass characterized by

本発明の石英ガラスの成形方法において、前記柱状の治具が前記敷板と前記側壁との間に設けられた隙間に設置されていることが好ましい。   In the method for forming quartz glass according to the present invention, preferably, the columnar jig is installed in a gap provided between the bottom plate and the side wall.

本発明の石英ガラスの成形方法において、成形後の石英ガラスが平板形状であることが好ましい。   In the method of forming quartz glass according to the present invention, it is preferable that the formed quartz glass has a flat plate shape.

本発明の石英ガラスの成形方法において、前記柱状の治具が三角柱形状であり、かつ前記敷板の４隅に配置されることが好ましい。   In the method of forming quartz glass according to the present invention, preferably, the columnar jig has a triangular prism shape and is disposed at four corners of the base plate.

本発明の石英ガラスの成形方法において、前記成形型枠、前記敷板及び前記治具がカーボン製であることが好ましい。   In the method of molding quartz glass according to the present invention, preferably, the mold, the base plate and the jig are made of carbon.

本発明では、その高さが、成形後の石英ガラスの想定厚みよりも低く、製品の必要厚みよりも高い柱状の治具を予め複数、敷板の外周部に設置して成形を行うことで、重石が傾斜しても最終的には重石が治具に載ることで水平となり、板厚偏差の小さい石英ガラス成形体が製造できる。
本発明の石英ガラスの成形方法は、平板形状の石英ガラスの成形に対し特に効果が大きい。 In the present invention, by forming a plurality of columnar jigs whose height is lower than the assumed thickness of the quartz glass after molding and higher than the required thickness of the product, the jig is formed on the outer periphery of the base plate in advance. Even if the weight is inclined, the weight is finally placed on the jig to be horizontal, and a quartz glass compact having a small thickness deviation can be manufactured.
The method for forming quartz glass of the present invention is particularly effective for forming a flat plate-shaped quartz glass.

図１は、本願発明における石英ガラスの成形手順を示した模式断面図であり、成形開始時を示している。FIG. 1 is a schematic cross-sectional view showing a forming procedure of quartz glass in the present invention, and shows a time of starting forming. 図２は、本願発明における石英ガラスの成形手順を示した平面図である。FIG. 2 is a plan view showing a forming procedure of quartz glass in the present invention. 図３は、本願発明における石英ガラスの成形手順を示した模式断面図であり、成形後を示している。FIG. 3 is a schematic cross-sectional view showing a forming procedure of quartz glass in the present invention, and shows after forming. 図４は、従来技術における石英ガラスの成形手順を示した模式断面図であり、成形開始時を示している。FIG. 4 is a schematic cross-sectional view showing a forming procedure of quartz glass in the prior art, and shows a time when the forming is started. 図５は、従来技術における石英ガラスの成形手順を示した平面図である。FIG. 5 is a plan view showing a molding procedure of quartz glass in the prior art. 図６は、従来技術における石英ガラスの成形手順を示した模式断面図であり、成形後を示している。FIG. 6 is a schematic cross-sectional view showing a forming procedure of quartz glass in the prior art, and shows after forming.

以下、図面を参照して、本発明の実施形態について詳しく説明する。   Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

図１は、本願発明における石英ガラスの成形手順を示した模式断面図であり、成形開始時を示している。図１における成形型１０は、天板１１、側壁１２、および底板１３で構成されており、底板１３上に石英ガラス４０を載置するための敷板１４が配置されている点、および石英ガラス４０上に重石２０が載置されている点は図４における成形型１００と同様である。
図２は、図１に示す成形型１０の平面図である。但し、敷板１４と、石英ガラス４０との位置関係を示すため、天板１１および側壁１２は省略されている。
図１，２における成形型１０では、敷板１４の外周部に柱状の治具３０が複数設置されている。なお、図示した態様では、三角柱形状の治具３０が敷板１４の４隅に配置されている。また、柱状の治具３０は、敷板１４と側壁１２との間に設けられた隙間に設置されている。 FIG. 1 is a schematic cross-sectional view showing the procedure for forming quartz glass in the present invention, and shows the time when the forming is started. The mold 10 in FIG. 1 is composed of a top plate 11, a side wall 12 and a bottom plate 13, and a bottom plate 14 for placing a quartz glass 40 is disposed on the bottom plate 13, and a quartz glass 40. The point that the weight 20 is placed on the top is the same as the forming die 100 in FIG. 4.
FIG. 2 is a plan view of the mold 10 shown in FIG. However, in order to show the positional relationship between the bottom plate 14 and the quartz glass 40, the top plate 11 and the side wall 12 are omitted.
In the forming die 10 in FIGS. 1 and 2, a plurality of columnar jigs 30 are installed on the outer peripheral portion of the bottom plate 14. In the illustrated embodiment, triangular prism-shaped jigs 30 are disposed at four corners of the floor plate 14. Further, the columnar jig 30 is installed in a gap provided between the bottom plate 14 and the side wall 12.

本発明における石英ガラスの成形手順では、図１に示す状態から、石英ガラス４０を軟化点以上に加熱しつつ、重石２０により該石英ガラス４０を垂直方向に押圧する。
図３は、図１と同様の図であり、成形後を示している。
本発明における石英ガラスの成形手順では、降下する過程で重石２０が傾いても、最終的には重石２０が柱状の治具３０に載ることで水平となる。これにより、板厚偏差の小さい石英ガラス成形体５０が製造できる。
図３に示す石英ガラス成形体は平板形状である。平板形状の石英ガラス成形体では板厚偏差が特に問題となる。本発明の方法は、平板形状の石英ガラスの成形に特に好ましい。 In the procedure for forming quartz glass in the present invention, the silica glass 40 is pressed in the vertical direction by the weight 20 while heating the quartz glass 40 to the softening point or higher from the state shown in FIG.
FIG. 3 is a view similar to FIG. 1 and shows after shaping.
In the forming procedure of quartz glass in the present invention, even if the weight 20 inclines in the process of falling, the weight 20 finally becomes horizontal by being placed on the columnar jig 30. Thereby, the quartz glass molded body 50 with a small plate thickness deviation can be manufactured.
The quartz glass molded body shown in FIG. 3 has a flat plate shape. In the case of a flat plate-shaped molded article of quartz glass, the thickness deviation is a particular problem. The method of the present invention is particularly preferred for the formation of flat quartz glass.

但し、上記の効果を奏するためには、底板１３の外周部に設置された柱状の治具３０が以下に述べる条件を満たす必要がある。   However, in order to exhibit the above-mentioned effect, it is necessary for the columnar jig 30 disposed on the outer peripheral portion of the bottom plate 13 to satisfy the conditions described below.

条件１ 柱状の治具３０は重石２０の荷重に対して実質的に変形しない。
図３に示す段階で、柱状の治具３０が重石２０の荷重により変形すると、柱状の治具３０に載った際に重石２０が水平にならない。
重石２０の荷重は成形する石英ガラスの寸法にもより異なる。一例を以下に示す。
石英ガラス成形体の寸法 重石の荷重
６００ｍｍ×７００ｍｍ×６０ｍｍ ２０ｇ／ｃｍ2
７００ｍｍ×１０００ｍｍ×５１ｍｍ ２５ｇ／ｃｍ2
１０００ｍｍ×１１００ｍｍ×４０ｍｍ ２０ｇ／ｃｍ2
１１００ｍｍ×１４００ｍｍ×１７ｍｍ ２０ｇ／ｃｍ2
１１００ｍｍ×１５００ｍｍ×１７ｍｍ ２０ｇ／ｃｍ2
１４５０ｍｍ×１７００ｍｍ×１７ｍｍ ２０ｇ／ｃｍ2 Condition 1 The columnar jig 30 is not substantially deformed by the load of the weight 20.
When the columnar jig 30 is deformed by the load of the weight 20 at the stage shown in FIG. 3, when placed on the columnar jig 30, the weight 20 does not become horizontal.
The load of the weight 20 also differs depending on the size of the quartz glass to be formed. An example is shown below.
Dimensions of the molded silica glass Load of the weight 600mm x 700mm x 60mm 20g / cm 2
700 mm x 1000 mm x 51 mm 25 g / cm 2
1000 mm x 1100 mm x 40 mm 20 g / cm 2
1100 mm x 1400 mm x 17 mm 20 g / cm 2
1100 mm × 1500 mm × 17 mm 20 g / cm 2
1450 mm x 1700 mm x 17 mm 20 g / cm 2

柱状の治具３０は、条件１を満たすことに加えて、ガラス成形時には石英ガラスの軟化点以上に加熱されることを考慮すると、成形型枠や敷板の構成材料として広く用いられるカーボン製が好ましい。   The columnar jig 30 is preferably made of carbon widely used as a constituent material of a molding frame or a base plate, in consideration of heating to a temperature above the softening point of quartz glass at the time of glass molding in addition to satisfying condition 1 .

条件２ 柱状の治具３０の高さが成形後のガラスの想定厚みよりも低く、製品の必要厚みよりも高い。
上記の手順で石英ガラスを成形する場合、成形後の石英ガラス（石英ガラス成形体５０）の厚みが最終製品の必要厚みよりも大きくなるように、成形後の石英ガラスの想定厚みを設定する。成形後の石英ガラス（石英ガラス成形体５０）の想定厚みを最終製品の必要厚みと同一に設定した場合、最終製品の厚みわずかでも偏りが生じると、実際に得られる石英ガラス成形体５０の厚みが最終製品の必要厚みよりも小さくなる可能性が高いためである。通常は、成形後のガラスの想定厚みは、最終製品の必要厚みよりも２０％程度大きく設定される。 Condition 2 The height of the columnar jig 30 is lower than the assumed thickness of the glass after molding and higher than the required thickness of the product.
When forming quartz glass according to the above-described procedure, the assumed thickness of the formed quartz glass is set such that the thickness of the formed quartz glass (quartz glass molded body 50) becomes larger than the required thickness of the final product. When the assumed thickness of the molded quartz glass (quartz glass molded body 50) is set to be the same as the required thickness of the final product, the thickness of the molded quartz glass molded body 50 actually obtained if deviation occurs even with a slight thickness of the final product Is likely to be smaller than the required thickness of the final product. Usually, the assumed thickness of the glass after molding is set to be about 20% larger than the required thickness of the final product.

柱状の治具３０の高さが最終製品の必要厚みよりも低いと、図３に示す段階で、重石２０は柱状の治具３０よりも上方に位置する。そのため、最終的に重石２０が柱状の治具３０に載らず、降下する過程で重石２０が傾いた場合、重石２０の傾きに倣って石英ガラス成形体５０に大きな板厚偏差が生じる。   If the height of the columnar jig 30 is lower than the required thickness of the final product, the weight 20 is positioned above the columnar jig 30 at the stage shown in FIG. 3. Therefore, when the weight 20 is finally not placed on the column-like jig 30 and the weight 20 is inclined in the process of falling, a large thickness deviation occurs in the quartz glass compact 50 according to the inclination of the weight 20.

一方、柱状の治具３０の高さが成形後のガラスの想定厚みよりも高いと、成形後のガラスの想定厚みに達する前に、重石２０による垂直方向の押圧が終了するので、ガラスへの荷重により発生が抑制されていた欠点（例えば、型枠とガラスとの反応によるガスがガラス体内部に入り込み空洞を生じる）が問題となるおそれがある。   On the other hand, if the height of the columnar jig 30 is higher than the assumed thickness of the glass after molding, the pressing in the vertical direction by the weight 20 ends before the assumed thickness of the glass after molding is reached. There is a possibility that a defect in which generation is suppressed by a load (for example, a gas resulting from a reaction between the mold and the glass enters the inside of the glass body to form a cavity) may become a problem.

柱状の治具３０の高さと、成形後のガラスの想定厚みとの差は、１ｍｍ以上１０ｍｍ以下が好ましく、２ｍｍ以上５ｍｍ以下がより好ましい。   1 mm or more and 10 mm or less are preferable, and, as for the difference between the height of the columnar jig 30 and the assumed thickness of the glass after molding, 2 mm or more and 5 mm or less is more preferable.

図示した態様では、底板１３の４隅に三角柱形状の治具を設置しているが、本発明において、底板の外周部に設置する柱状の治具の形状、および個数はこれに限定されない。例えば、柱状の治具の形状は、円柱形状、四角柱形状等の他の角柱形状であってもよく、平板形状であってもよい。底板の外周部に設置する柱状の個数は複数であればよく、例えば、２つであってもよい。柱状の治具を２つ設置する場合、底板１３の平面形状において、対向する２辺に設置する。図示した態様の場合、平面形状が長方形の底板１３の対向する２つの短辺に配置することが好ましい。   In the illustrated embodiment, triangular prism-shaped jigs are installed at four corners of the bottom plate 13. However, in the present invention, the shape and number of columnar jigs installed at the outer peripheral portion of the bottom plate are not limited thereto. For example, the shape of the columnar jig may be another prismatic shape such as a cylindrical shape or a quadrangular prism shape, or may be a flat plate shape. The number of columns provided on the outer peripheral portion of the bottom plate may be plural, for example, two. When two columnar jigs are installed, they are installed on two opposing sides in the planar shape of the bottom plate 13. In the case of the illustrated embodiment, it is preferable to dispose on two opposite short sides of the bottom plate 13 having a rectangular planar shape.

本発明により成形される石英ガラスは、石英のみに構成されていてもよいが、ドーパントとして他の元素を含有していてもよい。例えば、ドーパントとして、ＴｉＯ2を４〜９質量％含有していてもよい。
石英ガラスの軟化点は、ドーパントの有無により多少異なるが、通常１７００℃程度である。そのため、１７００℃以上に加熱して石英ガラスを成形すればよい。
石英ガラスの成形は、１７００℃以上１８００℃以下の温度で行うことが好ましい。
石英ガラスの成形は、真空又は減圧下、アルゴン、ヘリウム等の不活性ガス雰囲気下で、上記温度を、０．５〜数十時間保持することにより行うことができる。
成形時における最高温度の保持時間は、０．５時間以上が好ましく、１時間以上がより好ましい。また、１０時間以下が好ましく、８時間以下がより好ましい。 The quartz glass formed according to the present invention may be composed only of quartz, but may contain other elements as a dopant. For example, 4-9 mass% of TiO 2 may be contained as a dopant.
The softening point of quartz glass is usually around 1700 ° C., although it varies somewhat depending on the presence or absence of a dopant. Therefore, the quartz glass may be formed by heating to 1700 ° C. or higher.
It is preferable to perform formation of quartz glass at a temperature of 1700 ° C. or more and 1800 ° C. or less.
The formation of the quartz glass can be carried out by maintaining the above temperature for 0.5 to several tens of hours under vacuum or under reduced pressure and under an inert gas atmosphere such as argon and helium.
The retention time of the maximum temperature at the time of molding is preferably 0.5 hours or more, and more preferably 1 hour or more. Moreover, 10 hours or less are preferable, and 8 hours or less are more preferable.

以下に具体的な実施例を挙げて説明するが、本発明はこれらの実施例に限定されない。   The present invention will be described with reference to specific examples, but the present invention is not limited to these examples.

（実施例１）
実施例１では、図１〜３に示す手順で石英ガラスを成形した。成形温度は１７５０℃、成形温度は５時間とした。成形温度および成形時間は、後述する他の実施例および比較例も同様である。製品必要板厚１７ｍｍとして、平板製品（１１００ｍｍ×１５００ｍｍ）を５０ロット作製したところ、成形後の板厚差が最も大きなもので、最大板厚が２４．５ｃｍ、最小板厚が１９．０ｍｍ、板厚差５．５ｍｍであり、歩留りは１００％であった。 Example 1
In Example 1, quartz glass was formed in the procedure shown in FIGS. The molding temperature was 1750 ° C., and the molding temperature was 5 hours. The molding temperature and the molding time are the same as in the other examples and comparative examples described later. When 50 lots of flat products (1100 mm × 1500 mm) are manufactured as the required product thickness 17 mm, the difference in thickness after molding is the largest, the maximum thickness is 24.5 cm, the minimum thickness is 19.0 mm, and The thickness difference was 5.5 mm, and the yield was 100%.

（比較例１）
比較例１では、図４〜６に示す手順で石英ガラスを成形した。製品必要板厚１７ｍｍとして、平板製品（１１００ｍｍ×１５００ｍｍ）を５０ロット作製したところ、成形後の板厚差が最も大きなもので、最大板厚が３０．０ｃｍ、最小板厚が１４．５ｍｍ、板厚差１５．５ｍｍであり、歩留りは８９％であった。 (Comparative example 1)
In the comparative example 1, the quartz glass was shape | molded in the procedure shown to FIGS. When 50 lots of flat products (1100 mm × 1500 mm) are manufactured as the required product thickness 17 mm, the difference in thickness after forming is the largest, the maximum thickness is 30.0 cm, the minimum thickness is 14.5 mm, and The thickness difference was 15.5 mm, and the yield was 89%.

なお、石英ガラスの長辺長さをＬ１（ｃｍ）、短辺長さをＬ２（ｃｍ）、厚みをＴ（ｃｍ）とし、石英ガラスの密度をｋ（ｇ／ｃｍ3）とすると、石英ガラスの質量はＬ１×Ｌ２×Ｔ×ｋで求まる。実施例１の平板製品の場合、Ｌ１＝１５０ｃｍ、Ｌ２＝１１０ｃｍ、Ｔ＝１．７ｃｍであり、石英ガラスの密度ｋは一般に２．２ｇ／ｃｍ3であるので、へ平板製品の必要最低質量は６１．７ｋｇとなる。実施例１の平板製品は板厚差が５．５ｍｍであるため、板厚差分のガラス質量は１０．０ｋｇとなる。一方、比較例１の平板製品は板厚差が１５．５ｍｍであるため、板厚差分のガラス質量は２８．１ｋｇとなる。これら板厚差分のガラス質量を加えると、実施例１の平板製品の質量は７１．７ｋｇ、比較例１の平板製品の質量は８９．８ｋｇとなる。よって、７１．７ｋｇ／８９．８ｋｇ≒２０．２％となり、約２０％の質量削減が見込まれる。 When the long side length of quartz glass is L 1 (cm), the short side length is L 2 (cm), the thickness is T (cm), and the density of quartz glass is k (g / cm 3 ), quartz glass is The mass of is obtained by L1 × L2 × T × k. In the case of the flat plate product of Example 1, since L1 = 150 cm, L2 = 110 cm, T = 1.7 cm, and the density k of quartz glass is generally 2.2 g / cm 3 , the minimum required mass of the flat plate product is It will be 61.7 kg. Since the flat plate product of Example 1 has a plate thickness difference of 5.5 mm, the glass mass of the plate thickness difference is 10.0 kg. On the other hand, since the plate thickness difference of the flat product of Comparative Example 1 is 15.5 mm, the glass mass of the plate thickness difference is 28.1 kg. When the glass mass of these plate thickness differences is added, the mass of the flat plate product of Example 1 is 71.7 kg, and the mass of the flat plate product of Comparative Example 1 is 89.8 kg. Therefore, 71.7 kg / 89.8 kg ≒ 20.2%, and a mass reduction of about 20% is expected.

（実施例２）
実施例２では、図１〜３に示す手順で石英ガラスを成形した。製品必要板厚４１ｍｍとして、平板製品（７００ｍｍ×１０００ｍｍ）を５０ロット作製したところ、成形後の板厚差が最も大きなもので、最大板厚が６３ｃｍ、最小板厚が５７ｍｍ、板厚差６．０ｍｍであり、歩留りは１００％であった。 (Example 2)
In Example 2, quartz glass was formed according to the procedure shown in FIGS. When 50 lots of flat products (700 mm × 1000 mm) were manufactured as the required product thickness 41 mm, the difference in thickness after molding was the largest, and the maximum thickness was 63 cm, the minimum thickness was 57 mm, and the thickness difference 6. It was 0 mm and the yield was 100%.

（比較例２）
比較例２では、図４〜６に示す手順で石英ガラスを成形した。製品必要板厚５１ｍｍとして、平板製品（７００ｍｍ×１０００ｍｍ）を５０ロット作製したところ、成形後の板厚差が最も大きなもので、最大板厚が６７．５ｃｍ、最小板厚が４９ｍｍ、板厚差１８．５ｍｍであり、歩留りは８６％であった。 (Comparative example 2)
In Comparative Example 2, quartz glass was formed according to the procedure shown in FIGS. When 50 lots of flat plate products (700 mm × 1000 mm) are manufactured with a product required plate thickness of 51 mm, the difference in plate thickness after molding is the largest, the maximum plate thickness is 67.5 cm, the minimum plate thickness is 49 mm, and the plate thickness difference It was 18.5 mm and the yield was 86%.

（実施例３）
実施例３では、図１〜３に示す手順で石英ガラスを成形した。製品必要板厚４０ｍｍとして、平板製品（１０００ｍｍ×１１００ｍｍ）を５０ロット作製したところ、成形後の板厚差が最も大きなもので、最大板厚が４８ｃｍ、最小板厚が４４ｍｍ、板厚差４．０ｍｍであり、歩留りは１００％であった。 (Example 3)
In Example 3, quartz glass was formed according to the procedure shown in FIGS. When 50 lots of flat plate products (1000 mm × 1100 mm) were produced as the required plate thickness of 40 mm, the difference in plate thickness after molding was the largest, and the maximum plate thickness was 48 cm, the minimum plate thickness was 44 mm, and the plate thickness difference 4. It was 0 mm and the yield was 100%.

（比較例３）
比較例３では、図４〜６に示す手順で石英ガラスを成形した。製品必要板厚４０ｍｍとして、平板製品（１０００ｍｍ×１１００ｍｍ）を５０ロット作製したところ、成形後の板厚差が最も大きなもので、最大板厚が５１．５ｃｍ、最小板厚が３８ｍｍ、板厚差１３．５ｍｍであり、歩留りは８８％であった。 (Comparative example 3)
In Comparative Example 3, quartz glass was formed according to the procedure shown in FIGS. When 50 lots of flat plate products (1000 mm × 1100 mm) are manufactured as the required plate thickness of 40 mm, the difference in plate thickness after molding is the largest, the maximum plate thickness is 51.5 cm, the minimum plate thickness is 38 mm, and the plate thickness difference The yield was 88%.

（実施例４）
実施例４では、図１〜３に示す手順で石英ガラスを成形した。製品必要板厚１７ｍｍとして、平板製品（１１００ｍｍ×１４００ｍｍ）を５０ロット作製したところ、成形後の板厚差が最も大きなもので、最大板厚が２６ｃｍ、最小板厚が２０ｍｍ、板厚差６．０ｍｍであり、歩留りは１００％であった。 (Example 4)
In Example 4, quartz glass was formed according to the procedure shown in FIGS. When 50 lots of flat products (1100 mm × 1400 mm) are manufactured as the required product thickness 17 mm, the difference in thickness after molding is the largest, the maximum thickness is 26 cm, the minimum thickness is 20 mm, and the thickness difference6. It was 0 mm and the yield was 100%.

（比較例４）
比較例４では、図４〜６に示す手順で石英ガラスを成形した。製品必要板厚１７ｍｍとして、平板製品（１１００ｍｍ×１４００ｍｍ）を５０ロット作製したところ、成形後の板厚差が最も大きなもので、最大板厚が３０ｃｍ、最小板厚が１０．５ｍｍ、板厚差１９．５ｍｍであり、歩留りは８５％であった。 (Comparative example 4)
In the comparative example 4, the quartz glass was shape | molded in the procedure shown to FIGS. When 50 lots of flat products (1100 mm × 1400 mm) are manufactured as the required product thickness 17 mm, the difference in thickness after molding is the largest, the maximum thickness is 30 cm, the minimum thickness is 10.5 mm, the thickness difference It was 19.5 mm and the yield was 85%.

１０，１００ 成形型
１１，１１０ 天板
１２，１２０ 側壁
１３，１３０ 底板
１４，１４０ 敷板
２０，２００ 重石
３０ 治具
４０，４００ 石英ガラス
５０，５００ 石英ガラス成形体 DESCRIPTION OF SYMBOLS 10, 100 Forming mold 11, 110 Top plate 12, 120 Side wall 13, 130 Bottom plate 14, 140 Bottom plate 20, 200 Heavy stone 30 Jig 40, 400 Quartz glass 50, 500 Quartz glass molded object

Claims (5)

底板と側壁と天板とで囲まれた成形型内で、前記底板上に配置された敷板上に成形ガラスを載置し、該石英ガラス上に該石英ガラスを押圧するための重石を載置して、軟化点以上に前記石英ガラスを加熱して成形する石英ガラスの成形方法において、
前記敷板の外周部に、重石の荷重に対して実質的に変形せず、高さが成形後のガラスの想定厚みよりも低く、製品の必要厚みよりも高い、柱状の治具を複数設置することを特徴とする石英ガラスの成形方法。 The forming glass is placed on the bottom plate disposed on the bottom plate in a forming die surrounded by the bottom plate, the side wall, and the top plate, and a weight for pressing the quartz glass is placed on the quartz glass. In the method of molding quartz glass, the quartz glass is heated and molded to a temperature above the softening point,
A plurality of pillar-shaped jigs, which are substantially undeformable to the load of the weight and whose height is lower than the assumed thickness of the glass after molding and higher than the required thickness of the product, are installed on the outer peripheral portion of the floor plate. A method of forming quartz glass characterized by 前記柱状の治具が前記敷板と前記側壁との間に設けられた隙間に設置されている、請求項１に記載の石英ガラスの成形方法。   The method for forming quartz glass according to claim 1, wherein the columnar jig is disposed in a gap provided between the bottom plate and the side wall. 成形後の石英ガラスが平板形状である、請求項１または２に記載の石英ガラスの成形方法。   The method for molding quartz glass according to claim 1 or 2, wherein the quartz glass after molding has a flat plate shape. 前記柱状の治具が三角柱形状であり、かつ前記敷板の４隅に配置される、請求項１〜３のいずれかに記載の石英ガラスの成形方法。   The method for forming quartz glass according to any one of claims 1 to 3, wherein the columnar jig has a triangular prism shape and is disposed at four corners of the floor plate. 前記成形型枠、前記敷板及び前記治具がカーボン製である、請求項１〜４のいずれかに記載の石英ガラスの成形方法。   The method for forming quartz glass according to any one of claims 1 to 4, wherein the forming frame, the base plate, and the jig are made of carbon.
JP2017169572A 2017-09-04 2017-09-04 Molding method of quartz glass Pending JP2019043817A (en)

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