JP2019042881A - Water jet processing device and water jet processing method - Google Patents

Abstract

To provide a water jet processing device which can detect penetration through a workpiece without specially providing a member which vibrates intensively.SOLUTION: A water jet processing device includes: a support table 10 for supporting a workpiece 80; and a high pressure water jet nozzle 20 for jetting high pressure water 90 to the workpiece 80 supported by the support table 10. The water jet processing device processes the workpiece 80 by causing the high pressure water 90 jetted from the high pressure water jet nozzle 20 to penetrate from one side to the other side of the workpiece 80. The water jet processing device is provided with: a sound sensor 30 for detecting sound generated by the high pressure water 90 penetrating through the workpiece 80 to the other side; and penetration determining means which determines whether the high pressure water 90 penetrates through the workpiece 80 from an output result of the sound sensor 30.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a water jet machining apparatus and a water jet machining method for machining a workpiece with high-pressure water.

  A water jet machining apparatus (for example, refer to Patent Document 1) that processes a workpiece (workpiece) with high-pressure water ejected from a high-pressure water ejection nozzle. It is advantageous in that it is small, the processing tool (high-pressure water ejection nozzle) is less likely to be consumed (worn), and processing waste is less likely to be generated, and is used for cutting various materials. When cutting a workpiece using this type of water jet machining apparatus, the workpiece is cut by applying high-pressure water to one surface of the workpiece, and the high-pressure water is used to cut the workpiece. When it comes out from the other surface of the workpiece through the surface, control is performed to move the high-pressure water jet nozzle relative to the workpiece. The determination as to whether the high-pressure water has penetrated the workpiece is often made based on the elapsed time from the start of applying the high-pressure water to the workpiece.

  However, the time from when high-pressure water starts to be applied to the workpiece until the high-pressure water actually penetrates the workpiece (hereinafter sometimes referred to as “penetration time of the workpiece”) is the workpiece. Of course, even when processing a workpiece formed of the same material having the same thickness, the variation may occur. For this reason, in the conventional water jet processing apparatus, the elapsed time is set to be longer. Therefore, in the conventional water jet processing apparatus, even though the high pressure water has already penetrated the workpiece, there is wasted time to continue to eject the high pressure water at that location, and the processing time of the workpiece is long. There was a problem of becoming.

  In this respect, as shown in FIG. 1 and the like of Patent Document 2, a catcher tank 4 for receiving high-pressure water that has penetrated the workpiece 3 (workpiece) from one side to the other side has been provided so far. A water jet cutting device (water jet processing device) provided on the back side of the support table 2 (the side opposite to the side where the jet nozzle 1 for jetting high pressure water is disposed) and having a vibration detector 5 attached to the catcher tank 4 Has been proposed. This water jet machining apparatus determines that the workpiece has penetrated when the output level of the vibration detector 5 increases. In addition, as shown in FIG. 5 and the like of Patent Document 2, a receptacle 7 for receiving high-pressure water bounced off by the workpiece 3 (workpiece) is provided on the outer peripheral portion of the ejection nozzle 1 and the receptacle. A water jet cutting device (water jet processing device) in which a vibration detector 5 is attached to 7 is also proposed. This water jet machining apparatus determines that the workpiece has penetrated when the output level of the vibration detector 5 decreases.

JP-A-62-199400 JP 05-220700 A

  However, in the water jet machining apparatus shown in FIG. 1 of Patent Document 2, when the high-pressure water that has penetrated the workpiece 3 hits the catcher tank 4, the workpiece 3 is penetrated by vibration generated in the catcher tank 4. To detect. Further, in the water jet machining apparatus shown in FIG. 5 of Patent Document 2, the workpiece 3 is penetrated by the vibration generated in the receiver 7 when high-pressure water bounced off from the workpiece 3 hits the receiver 7. Detect not. For this reason, in the water jet processing apparatus shown in FIG. 1 and FIG. 5 of Patent Document 2, it is necessary to provide the catcher tank 4 and the receiver 7 in a state in which they can easily vibrate. Therefore, in the water jet machining apparatus of the same document, there is a possibility that a large noise is generated because the vibration noise of the catcher tank 4 becomes intense. In addition, there is a possibility that a portion where the catcher tank 4 is fixed to the support table 2 and a portion where the receiving body 7 is fixed to the ejection nozzle 1 are detached by vibration.

  Further, in the water jet machining apparatus shown in FIG. 1 of Patent Document 2, the location where the vibration detector 5 is attached is far from the location where the high pressure water hits the catcher tank 4 or near the location where the catcher tank 4 is fixed. If this happens, it becomes difficult for the vibration detector 5 to detect the vibration of the catcher tank 4. For this reason, the water jet machining apparatus shown in FIG. 1 of Patent Document 2 detects vibration at a location near the location where the high-pressure water hits in the catcher tank 4 and at some distance from the location where the catcher tank 4 is fixed. It is necessary to install the vessel 5. Similarly, in the water jet machining apparatus shown in FIG. 5 of Patent Document 2, the location where the vibration detector 5 is attached is far from the location where the high-pressure water hits the receiver 7 or near the location where the receiver 7 is fixed. If there is, it becomes difficult for the vibration detector to detect the vibration of the five catcher tank 4. For this reason, the water jet machining apparatus shown in FIG. 5 of Patent Document 2 detects vibrations at a location near the location where the high-pressure water hits the receiver 7 and at some distance from the location where the receiver 7 is fixed. It is necessary to install the vessel 5. As described above, the water jet machining apparatus shown in FIG. 1 and FIG. 5 of Patent Document 2 also has a drawback that the location where the vibration detector 5 is attached is greatly limited.

  Further, since the water jet machining apparatus shown in FIG. 1 of Patent Document 2 is provided with the catcher tank 4 locally only in a limited range below the high pressure water jet nozzle 1, the workpiece 3 Has a drawback that it is difficult to cut along a cutting line having a complicated shape. This is because when the workpiece 3 is to be cut into a wave shape by the water jet machining apparatus of this aspect, [1] the high pressure water jet nozzle 1 is moved in a wave shape relative to the workpiece 3 or [2 It is necessary to move the workpiece 3 in a wave shape with respect to the high-pressure water jet nozzle 1. However, in the case of [1], a complicated mechanism for moving the catcher tank 4 in accordance with the high-pressure water jet nozzle 1 is required. In the case of [2], a wide support table 2 is secured. This is because the size of the water jet machining apparatus is increased by the amount that must be performed, and a large-scale mechanism for moving the workpiece 3 is also required. In the water jet machining apparatus shown in FIG. 1 of Patent Document 2, the reason why the catcher tank 4 is locally provided only in a limited range below the high-pressure water jet nozzle 1 is not clear, but the vibration in the catcher tank 4 It is presumed that the variation in the vibration mode at the location where the detector 5 is attached is also considered to be less likely to occur.

  In addition, in the water jet processing apparatus, not only when processing the workpiece by jetting high-pressure water in a direction perpendicular to the surface on one side of the workpiece, but also on one side of the workpiece High pressure water is ejected in a direction inclined with respect to (non-perpendicular direction) (hereinafter sometimes referred to as “inclined ejection”. This inclined ejection is sometimes performed while the ejection nozzle is swung). Assuming the case of processing a workpiece, the water jet processing apparatus shown in FIG. 1 of Patent Document 2 also has a drawback that it is difficult to perform processing by such inclined jetting of high-pressure water. This is because, in the water jet machining apparatus shown in FIG. 1 of Patent Document 2, when high-pressure water is applied from a direction inclined with respect to one surface (upper surface) of the workpiece 3, the workpiece 3 is penetrated. This is because the high pressure water hits the side wall portion instead of the bottom wall portion of the catcher tank 4 and the vibration detector 5 may not be able to accurately detect the vibration of the catcher tank 4.

  Further, the water jet machining apparatus shown in FIG. 5 of Patent Document 2 also has a drawback that it is difficult to machine by inclined jetting of high-pressure water. This is because, in the water jet machining apparatus shown in FIG. 5 of Patent Document 2, when high-pressure water is applied from a direction inclined with respect to one surface (upper surface) of the workpiece 3, the workpiece 3 rebounds. This is because there is a risk that the high-pressure water will come off the receiver 7 and will not hit the receiver 7.

  The present invention has been made in order to solve the above-described problems. Even if a member that vibrates vigorously (a member corresponding to the catcher tank 4 in the water jet machining apparatus of Patent Document 2) is not particularly provided, the workpiece is provided. A water jet machining apparatus capable of detecting penetration of the water is provided. It is also an object of the present invention to provide a water jet machining apparatus having a high degree of freedom in arrangement of sensors for detecting penetration of a workpiece. Furthermore, it is another object of the present invention to provide a water jet machining apparatus capable of cutting a workpiece along a cutting line having a complicated shape. Furthermore, a water jet machining apparatus capable of stably detecting the penetration of the workpiece even when machining by inclined jetting of high-pressure water is performed (including the case where the jet nozzle is swung) is provided. It is also an object of the present invention. Another object of the present invention is to provide a water jet machining method for machining a workpiece using this water jet machining apparatus.

The above issues
A support table for supporting the workpiece;
A high-pressure water jet nozzle for jetting high-pressure water to the work piece supported by the support table;
The high-pressure water ejected from the high-pressure water ejection nozzle is from one side of the workpiece (the side where the high-pressure water ejection nozzle is arranged; the same applies hereinafter) to the other side (the side opposite to the side where the high-pressure water ejection nozzle is arranged). The same shall apply hereinafter)), a water jet processing device for processing a workpiece by penetrating,
A sound sensor for detecting the sound generated by the high-pressure water that has penetrated the workpiece to the other side;
This can be solved by providing a water jet machining apparatus further comprising a penetration discriminating unit for discriminating from the output result of the sound sensor that high-pressure water has penetrated the workpiece.

In the water jet machining apparatus of the present invention, the support table has a structure in which an outer peripheral portion thereof is surrounded by a sound insulation plate, and the sound sensor is disposed in a space surrounded by the sound insulation plate in the support table. Is also preferable. In this case, it is preferable that the sound insulating plate is arranged in a square cylinder shape, and the sound sensor is arranged in the vicinity of the four corners in the internal space of the support table.
In the water jet machining apparatus of the present invention, the sound sensor is disposed in the vicinity of a surface of the support table that supports the workpiece (hereinafter sometimes referred to as “workpiece support surface”). Is preferred.
Furthermore, it is preferable that the water jet machining apparatus of the present invention further includes nozzle moving means for moving the high pressure water jet nozzle two-dimensionally with respect to the stationary support table.

The water jet machining apparatus of the present invention detects penetration of a workpiece by sound. For this reason, in the water jet machining apparatus of the present invention, it is possible to detect the penetration of the workpiece without particularly providing a member that vibrates violently like the catcher tank in the water jet machining apparatus of Patent Document 2. . Therefore, not only the noise generated from the water jet machining apparatus can be suppressed, but also the member fixed to the support table can be made difficult to fall off due to vibration. And even if it is a case where the processing by the inclined jet of high-pressure water is performed (including the case where the jet nozzle is swung), the penetration of the workpiece can be detected stably.
In addition, the sound generated from high-pressure water varies greatly before and after high-pressure water penetrates the workpiece, but after high-pressure water penetrates the workpiece, On the side) not significantly changed. Therefore, the water jet machining apparatus of the present invention is not particularly limited in the location where a sensor (sound sensor) for detecting penetration of the workpiece is attached, and the degree of freedom in arrangement is high.
In the water jet machining apparatus of the present invention, it is also possible to adopt a configuration in which a catcher tank is provided over substantially the entire area below the workpiece support surface of the support table, or a configuration in which no catcher tank is provided in the first place. . For this reason, by making the high-pressure water jet nozzle move two-dimensionally, the workpiece can be cut into a complicated shape without providing a mechanism for moving the catcher tank or a mechanism for moving the workpiece. It is also possible to cut along.

It is the side view which showed the state which looked at the water jet processing apparatus which concerns on this invention from the side. It is sectional drawing which expanded and showed the mode that the workpiece was processed with the water jet processing apparatus which concerns on this invention in the periphery of a high pressure water ejection nozzle. It is the top view which showed the state which looked at the water jet processing apparatus which concerns on this invention from upper direction. It is the perspective view which showed the support table in the water jet processing apparatus which concerns on this invention.

  A preferred embodiment of the water jet machining apparatus of the present invention will be described more specifically with reference to the drawings. 1-4 shown later show the x-axis, y-axis, and z-axis. The directions of the x-axis, y-axis, and z-axis are made to coincide with each other even in different drawings. In the following, for convenience of explanation, the x-axis positive side is “right”, the x-axis negative is “left”, the y-axis positive is “front”, and the y-axis negative is “rear”. The z-axis direction positive side is called the “upper” side, and the z-axis direction negative side is called the “lower” side.

  FIG. 1 is a side view showing a state of the water jet machining apparatus of this embodiment as viewed from the side. FIG. 2 is an enlarged cross-sectional view showing the state of processing the workpiece W by the water jet processing apparatus of FIG. FIG. 2A shows a state before the high-pressure water 90 penetrates the workpiece 80, and FIG. 2B shows a state after the high-pressure water 90 penetrates the workpiece 80.

  As shown in FIG. 1, the water jet machining apparatus according to this embodiment includes a support table 10 for supporting a workpiece 80 and high-pressure water 90 on the upper surface of the workpiece 80 supported by the support table 10. And a high-pressure water jet nozzle 20 for jetting downward, as shown in FIG. 2, the high-pressure water 90 jetted from the high-pressure water jet nozzle 20 is penetrated from the upper surface side to the lower surface side of the workpiece 80. Thus, the workpiece 80 is processed.

  The high-pressure water ejection nozzle 20 is capable of ejecting high-pressure water 90 (ultra-high pressure water) having a pressure exceeding 400 MPa from an orifice of about 0.1 to 0.4 mm incorporated at its tip (lower end). ing. As shown in FIG. 2 (a), the workpiece 80 is cut by the impact of the high-pressure water 90 continuously colliding with the workpiece 80, and as shown in FIG. 2 (b), the workpiece is processed. It will be in the state which the object 80 penetrated. In the state of FIG. 2A before the workpiece 80 penetrates, the high-pressure water 90 is rebounded to the upper side of the workpiece 80, but in FIG. 2B after the workpiece 80 penetrates. In the state, the high-pressure water 90 penetrates to the lower side of the workpiece 80.

  When the high-pressure water jet nozzle 20 is moved relative to the workpiece 80 after the high-pressure water 90 has processed the workpiece 80, the through-hole 81 formed in the workpiece 80 is enlarged, The workpiece 80 can be cut linearly. As already described, the water jet machining apparatus is such that the workpiece 80 is unlikely to generate heat during machining, the machining margin is small, the machining tool (high-pressure water ejection nozzle 20) is less likely to wear out (wear, etc.), and machining waste. Therefore, it can be suitably used when various materials are cut. For example, paper materials, rubber materials, fiber materials, leather materials, wood, various resin materials, FRP materials, glass materials, ceramic materials, stone materials, metal materials (stainless materials, titanium materials, copper materials, brass materials, aluminum materials, etc. ), Various composite materials can be cut into an arbitrary shape as the workpiece 80.

  When cutting the workpiece 80 using such a water jet processing apparatus, if the high-pressure water ejection nozzle 20 is moved relative to the workpiece 80 in a state where the workpiece 80 does not penetrate, the cutting is performed. Defects occur. For this reason, it is necessary to detect penetration of the workpiece 80. In this respect, the water jet machining apparatus of the present embodiment is provided with a sound sensor 30 as shown in FIG. 2 and is connected to a penetration determining means (not shown). The penetration determining means determines whether or not the workpiece 80 has penetrated from the output result of the sound sensor 30. In the water jet machining apparatus of this embodiment, the sound sensor control apparatus 40 shown in FIG. It is implemented in a programmatic manner or an electric circuit. The sound sensor control device 40 is connected to a main control device 50 that performs overall control of the water jet machining device (control of ejection of high-pressure water 90 from the high-pressure water ejection nozzle 20, control of nozzle moving means 60 described later, and the like). Has been. As shown in FIG. 1, the sound sensor control device 40 may be externally attached to the main control device 50 or may be incorporated in the main control device 50.

  That is, the magnitude and quality (frequency waveform, etc.) of the sound generated by the high-pressure water 90 are processed before the workpiece 80 penetrates as shown in FIG. 2 (a) and as shown in FIG. 2 (b). Where the object 80 is greatly penetrated, the sound generated by the high-pressure water 90 is detected by the sound sensor 30, and the change in the sound is analyzed by the penetration determining means, thereby determining whether the workpiece 80 has been penetrated. Like to do. The algorithm for determining whether or not the workpiece 80 has penetrated by the penetration discriminating means is not particularly limited. For example, by comparing the frequency waveform of the sound detected from the sound sensor 30 with a reference frequency waveform, the workpiece is processed. The presence or absence of penetration of the object 80 may be determined. However, in this case, the discrimination algorithm tends to be complicated.

  For this reason, the discrimination algorithm for determining whether or not the workpiece 80 has penetrated by the penetration discrimination means compares the volume of sound detected by the sound sensor 30 (for example, acoustic power) with a reference value, thereby allowing the workpiece 80 to be processed. It is preferable to determine whether or not there is penetration. As a result, the discrimination algorithm can be simplified. However, at this time, it is more preferable to use the acoustic power only in the frequency band of the sound generated by the high-pressure water 90 instead of using the acoustic power in the entire frequency band. This is because the vibration noise of the workpiece 80 and the noise around the water jet machining apparatus do not adversely affect the discrimination result by the penetration discrimination means, and the discrimination accuracy can be further improved. In the water jet machining apparatus according to this embodiment, even if a relatively simple discrimination algorithm that compares the loudness detected by the sound sensor 30 with a reference value as described above is employed, the workpiece 80 penetrates. It is possible to determine the presence or absence of high accuracy.

  2, assuming that the sound sensor 30 is provided below the workpiece 80 (on the side opposite to the high-pressure water ejection nozzle 20 as viewed from the workpiece 80), as shown in FIG. As shown in FIG. 2A, when the workpiece 80 does not penetrate, the sound generated by the high-pressure water 90 is blocked by the workpiece 80 and hardly reaches the sound sensor 30, whereas FIG. As shown in FIG. 5, when the workpiece 80 penetrates, the sound generated by the high-pressure water 90 is likely to reach the sound sensor 30. For this reason, when the volume of the sound detected by the sound sensor 30 is equal to or less than the reference value, it is determined that the workpiece 80 has not penetrated, and the volume of the sound detected by the sound sensor 30 exceeds the reference value. In this case, it is possible to determine with high accuracy whether or not the workpiece 80 has penetrated by determining that the workpiece 80 has penetrated.

  On the other hand, assuming that the sound sensor 30 is provided on the upper side of the workpiece 80 (the same side as the high-pressure water ejection nozzle 20 when viewed from the workpiece 80), for example, the high-pressure water bounced back to the workpiece 80 If 90 sounds (reflected sound) are detected, the presence or absence of penetration of the workpiece 80 can be determined by comparing the volume of the sound detected by the sound sensor 30 with a reference value. However, the reflected sound of the high-pressure water 90 varies depending on the material of the workpiece 80 and the like. For this reason, not only is it difficult to determine how much the reference value is set, but it is also necessary to change the reference value according to the type of workpiece 80 and the like. Therefore, the sound sensor 30 is preferably provided below the workpiece 80 (on the side opposite to the high-pressure water ejection nozzle 20 as viewed from the workpiece 80). This eliminates the need to change the reference value according to the type of workpiece 80 and the like. Also in the water jet machining apparatus of this embodiment, the sound sensor 30 is provided at a position below the workpiece 80.

  When the sound sensor 30 is provided on the lower side of the workpiece 80, the sound sensor 30 is preferably disposed in the vicinity of the surface of the support table 10 that supports the workpiece 80 (support surface α in FIG. 2). Thereby, the sound sensor 30 can easily detect the sound generated by the high-pressure water 90 penetrating the workpiece 80 and penetrating to the lower surface side of the workpiece 80. The workpiece 80 may be supported in a state where there is no support surface α and the workpiece 80 is hung on the upper edge of the support table 10, but the workpiece 80 regardless of the size and shape of the workpiece 80. Can be supported on the support table 10, a support surface material (not shown) such as a wire net that does not obstruct the passage of the high-pressure water 90 may be disposed on the support surface α of the support table 10.

  In addition, in the water jet machining apparatus of the present embodiment, as shown in FIGS. 3 and 4, the support table 10 has a structure in which the outer peripheral portion is surrounded by the sound insulating plates 11, 12, 13, and 14. The sound sensor 30 is disposed in a space surrounded by the sound insulating plates 11 to 14 in the support table 10. FIG. 3 is a plan view showing a state of the water jet machining apparatus of the present embodiment as viewed from above. FIG. 4 is a perspective view showing the support table 10 in the water jet machining apparatus of this embodiment. As described above, by arranging the sound sensor 30 in the space surrounded by the sound insulating plates 11 to 14, the high-pressure water 90 is generated when the workpiece 80 does not penetrate as shown in FIG. It is possible to make it difficult for the sound to be generated to reach the sound sensor 30. Therefore, the sound volume detected by the sound sensor 30 is greatly different between before and after the workpiece 80 penetrates, and the discrimination accuracy of whether or not the workpiece 80 penetrates can be improved. Become. Although how to arrange the sound insulating plates 11 to 14 is not particularly limited, the sound insulating plates 11 to 14 are usually arranged in a polygonal tube shape such as a square tube shape. In the water jet machining apparatus of the present embodiment, as shown in FIG. 3, the sound insulating plates 11 to 14 are arranged in a rectangular tube shape having a substantially rectangular cross section. The sound insulating plates 11 to 14 do not have to be provided with a sound absorbing material or have a sound absorbing structure, but are preferably a closed plate material having no opening or the like.

  The type of the sound sensor 30 is not particularly limited as long as it can detect sound (vibration of air). As the sound sensor 30, one that converts sound into an electrical signal using a piezoelectric effect generated in a piezoelectric element due to air vibration due to sound (crystal microphone or the like), or the air vibration due to sound via an electrodynamic transducer. That convert to electrical signals (such as dynamic microphones), those that output changes in contact resistance of carbon powder caused by air vibration caused by sound (such as carbon microphones), and those caused by air vibration caused by sound Then, a microphone such as one (capacitor microphone or the like) that outputs the change in capacitance generated in the capacitor as an electric signal is exemplified. An amplifier (amplifier) or the like can be connected to the sound sensor 30. If water is applied to the sound sensor 30, the sound sensor 30 may break down. Therefore, the sound sensor 30 may be disposed in the support table 10 as in the water jet machining apparatus of the present embodiment. When there is a possibility that water (splash of high-pressure water 90 or the like) may be applied to the sound sensor 30, it is preferable that the sound sensor 30 be subjected to waterproofing treatment.

  Also in the water jet machining apparatus of this embodiment, while the support table 10 is fixed, the high-pressure water jet nozzle 20 moves two-dimensionally with respect to the fixed support table 10. Specifically, the nozzle moving means 60 shown in FIG. 3 is provided. The nozzle moving means 60 includes a front-rear moving member 62 that can move in the front-rear direction (y-axis direction) with respect to the moving base 61, and a left-right movement that can move in the left-right direction (x-axis direction) with respect to the front-rear moving member 62. It is comprised with the member 63. FIG. The high-pressure water ejection nozzle 20 is attached to the distal end (lower end) of the left / right moving member 63. Thereby, the cutting line of various shapes can be obtained by moving the high-pressure water jet nozzle 20 in the front-rear direction (y-axis direction) and the left-right direction (x-axis direction) with respect to the workpiece 80 supported by the support table 10. The workpiece 80 can be cut along the line.

  The sound sensor 30 may be provided at only one place, but is preferably provided at a plurality of places. Thereby, it becomes possible to more reliably detect the presence or absence of penetration of the workpiece 80. For example, [1] Among the sound sensors 30 provided at a plurality of locations, some of the sound sensors 30 (for example, some of the sound sensors 30 that detect the loudest sound, and conversely, the sound cannot be detected most. Some sound sensors 30, some sound sensors 30 except the sound sensor 30 detecting the loudest sound and the sound sensor 30 not detecting the most sound, etc.) or all the sound sensors 30 From the output result, it may be determined whether or not the work piece 80 has penetrated, or [2] of the sound sensors 30 provided at a plurality of locations (for example, detecting the loudest sound) Some sound sensors 30, some sound sensors 30 that are unable to detect the sound most, sound sensors 30 that detect the most loud sound, and sound sensor 30 that is the least sound detected. Except for some sound sensors 30 etc.) or all From the average value of the output result of the sensor 30 and a median, etc., by or to determine the presence or absence of penetration of the workpiece 80, it becomes easy to obtain a stable discrimination result is not influenced by noise or the like.

  In the case where the sound sensors 30 are provided at a plurality of locations, the arrangement of the sound sensors 30 varies depending on the form of the support table 10 and the like, but it is preferable to arrange the sound sensors 30 at the same height in the support table 10. It is more preferable that the arrangement has symmetry in the horizontal cross section. For example, when the support table 10 has a horizontal cross-sectional polygonal shape, the sound sensor 30 is disposed at the corner of the support table 10 (near the corner formed by the sound insulating plates 11 to 14), or is supported. By disposing the central portion in the width direction of each surface of the table 10 (the central portion in the width direction of each of the sound insulating plates 11 to 14), the sound sensor 30 can be arranged in a symmetric state. In the water jet machining apparatus of this embodiment, since the support table 10 has a rectangular horizontal cross section as described above, the four sound sensors 30 are connected to the support table 10 as shown in FIGS. It is arranged near the four corners in the internal space.

  By the way, in the water jet machining apparatus of this embodiment, as shown in FIG. 2, the high pressure water ejection nozzle 20 is arranged perpendicularly to the upper surface of the workpiece 80 and is ejected from the high pressure water ejection nozzle 20. The high-pressure water 90 is incident perpendicularly to the upper surface of the workpiece 80, but depending on the type of processing to be performed, the high-pressure water jet nozzle 20 is inclined with respect to the upper surface of the workpiece 80 ( Alternatively, the high-pressure water 90 ejected from the high-pressure water ejection nozzle 20 may be incident (non-perpendicular) in a state inclined with respect to the upper surface of the workpiece 80. Further, in the water jet machining apparatus of this embodiment, a configuration is adopted in which the high-pressure water ejection nozzle 20 is translated in the left-right direction (x-axis direction) and the front-rear direction (y-axis direction) with respect to the support table 10. However, as described above, when the high-pressure water 90 is incident on the workpiece 80 in a non-perpendicular manner, the high-pressure water ejection nozzle 20 is moved to a certain axis (for example, the z-axis) depending on the type of processing to be performed. It is also possible to swivel around. The water jet machining apparatus of the present embodiment detects the penetration of the workpiece 80 by sound, and it is not necessary to provide a member that vibrates by applying the high-pressure water 90. Even in such a case, the workpiece is processed. 80 penetrations can be detected with high accuracy and stability.

DESCRIPTION OF SYMBOLS 10 Support table 11 Sound insulation board 12 Sound insulation board 13 Sound insulation board 14 Sound insulation board 20 High pressure water ejection nozzle 30 Sound sensor 40 Sound sensor control apparatus (penetration discrimination means)
DESCRIPTION OF SYMBOLS 50 Main control device 60 Nozzle moving means 61 Moving base 62 Front-back moving member 63 Left-right moving member 80 Workpiece 81 Through-hole 90 High-pressure water α Support surface

Claims (8)

A support table for supporting the workpiece;
A high-pressure water jet nozzle for jetting high-pressure water to the work piece supported by the support table;
The high-pressure water ejected from the high-pressure water ejection nozzle is from one side of the workpiece (the side where the high-pressure water ejection nozzle is arranged; the same applies hereinafter) to the other side (the side opposite to the side where the high-pressure water ejection nozzle is arranged). The same shall apply hereinafter)), a water jet processing device for processing a workpiece by penetrating,
A sound sensor for detecting the sound generated by the high-pressure water that has penetrated the workpiece to the other side;
A water jet machining apparatus, further comprising a penetration discriminating means for discriminating from the output result of the sound sensor that high-pressure water has penetrated the workpiece.
The support table has a structure in which the outer periphery is surrounded by a sound insulation board,
The water jet machining apparatus according to claim 1, wherein the sound sensor is disposed in a space surrounded by the sound insulation plate in a support table.
The sound insulation plate is arranged in a square tube shape,
The water jet machining apparatus according to claim 2, wherein the sound sensor is disposed in the vicinity of the four corners in the internal space of the support table.
The water jet machining apparatus according to any one of claims 1 to 3, wherein the sound sensor is disposed near a surface of the support table that supports the workpiece.
The water jet machining apparatus according to any one of claims 1 to 4, further comprising nozzle moving means for translating the high-pressure water jet nozzle along at least two non-parallel axes with respect to the stationary support table.
The water jet machining apparatus according to claim 5, wherein the high pressure water ejection nozzle ejects high pressure water in a direction non-perpendicular to the one side surface of the workpiece.
7. The water jet machining apparatus according to claim 6, wherein the nozzle moving means is capable of turning the high pressure water jet nozzle about an axis that is non-parallel to the two axes that translate the high pressure water jet nozzle. .
The water jet processing method which processes a to-be-processed object using the water jet processing apparatus in any one of Claims 1-7.

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