JP2019042613A - Gas separation device - Google Patents

Gas separation device Download PDF

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JP2019042613A
JP2019042613A JP2017165019A JP2017165019A JP2019042613A JP 2019042613 A JP2019042613 A JP 2019042613A JP 2017165019 A JP2017165019 A JP 2017165019A JP 2017165019 A JP2017165019 A JP 2017165019A JP 2019042613 A JP2019042613 A JP 2019042613A
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gas separation
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compressed air
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JP7064835B2 (en
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妙朗 高橋
Shiro Takahashi
妙朗 高橋
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Hitachi Industrial Equipment Systems Co Ltd
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Abstract

To improve convenience of a user at a failure time of a gas separation device.SOLUTION: There is provided a gas separation system having pressure detection means for detecting a pressure of compressed gas between a compressed air supply source and an adsorption tank, and a control part for controlling operation according to a detected pressure. In a gas separation device, when the detected pressure falls lower than a first specified value, the control part elongates a time of an adsorption process or stops the compressed air supply source.SELECTED DRAWING: Figure 1

Description

本発明は、PSA(Pressure Swing Adsorption)式気体分離装置に関する。   The present invention relates to a pressure swing adsorption (PSA) gas separation device.

従来のPSA(Pressure Swing Adsorption)式気体分離装置に、特許文献1がある。   Patent Document 1 is a conventional pressure swing adsorption (PSA) type gas separation apparatus.

特許文献1は、第1、第2吸着筒の導出側と外部使用側との間に、吸着後の気体の流通量を絞るメーンオリフィス18を設けることで、吸着筒内の急激な圧力低下と、不用意な運転停止を阻止することができるとするものである。   Patent Document 1 discloses a rapid pressure drop in the adsorption cylinder by providing a main orifice 18 for throttling the amount of flowing gas after adsorption between the lead-out side of the first and second adsorption cylinders and the external use side. , It is possible to prevent an unscheduled shutdown.

ただし、メーンオリフィス18が機能しない場合の安全装置として、圧縮機1、圧力調整器3、ドレンフィルタ4、ミストフィルタ5の順に供給する圧縮空気の経路中、ドレンフィルタ4とミストフィルタ5の間に圧力センサ6を設け、検知圧力が設定圧力以下になったときに、圧縮機1の運転を停止したものと判断して、再生運転を停止することが、段落番号0017乃至0042に記載されている。   However, as a safety device when the main orifice 18 does not function, the compressor 1, the pressure regulator 3, the drain filter 4, and the mist filter 5 in the order of the compressed air supplied between the drain filter 4 and the mist filter 5 It is described in paragraph numbers 0017 to 0042 that the pressure sensor 6 is provided and it is determined that the operation of the compressor 1 is stopped when the detected pressure becomes lower than the set pressure, and the regeneration operation is stopped. .

特開2002-143631号公報JP 2002-143631 A

上記従来の気体分離装置では、メーンオリフィス18が機能するしないにかかわらず、圧力センサ6により、圧縮機1または圧力調整器3からの圧縮気体圧力が低下すると、再生運転が停止するが、圧縮機へ停止指示をしていない。圧縮機の劣化や配管漏れのような異常の場合、圧縮機の運転は継続することになり、ユーザが異常に気が付けない可能性がある。   In the above conventional gas separation apparatus, the regeneration operation is stopped when the pressure of the compressed gas from the compressor 1 or the pressure regulator 3 is decreased by the pressure sensor 6 regardless of the main orifice 18 not functioning. I did not give a stop instruction. In the case of an abnormality such as a deterioration of the compressor or a pipe leak, the operation of the compressor will be continued and the user may not notice the abnormality.

また、上記従来の気体分離装置では、再生運転がいきなり停止される点でも、ユーザの利便性が低い。   In addition, in the above-described conventional gas separation apparatus, the user's convenience is low also because the regeneration operation is suddenly stopped.

本発明の目的は、気体分離装置の異常発生時におけるユーザの利便性を向上することにある。   An object of the present invention is to improve the convenience of the user when an abnormality occurs in the gas separation device.

本発明は上記課題を解決するものであるが、代表例を挙げると次のとおである。   Although the present invention solves the above-mentioned subject, if a representative example is given, it is as follows.

圧縮空気を貯蔵する空気槽から吸着槽に供給される間の経路に圧力検出手段を設け、圧力が規定の圧力を下回った場合、吸着工程を長くするか、気体分離装置だけでなく、圧縮空気供給源の運転も停止する。   A pressure detection means is provided in the path between the air tank storing compressed air and supplied to the adsorption tank, and if the pressure falls below a specified pressure, the adsorption step is lengthened or not only the gas separation apparatus but also compressed air Stop the operation of the supply source.

本発明によれば、気体分離装置の異常発生時におけるユーザの利便性を向上することができる。   According to the present invention, it is possible to improve the convenience of the user when an abnormality occurs in the gas separation device.

実施例1における気体分離装置を示す全体構成図である。FIG. 1 is an overall configuration view showing a gas separation device in a first embodiment. 実施例1の各工程の吸着槽の状態を示す。The state of the adsorption tank of each process of Example 1 is shown.

以下、本実施例を説明する。   Hereinafter, the present embodiment will be described.

以下、本発明に係る実施例を図面に基づいて説明する。   Hereinafter, an embodiment according to the present invention will be described based on the drawings.

図1は本発明に係る第1実施形態の気体分離装置を示す構成図である。図1に示す実施例1の気体分離装置1はPSA式の気体分離装置である。気体分離装置1には、圧縮空気を供給する圧縮空気供給源2と圧縮空気を流す配管3と、配管3の途中に設けられて圧縮空気から塵埃等を除去するエアフィルタ4が接続されている。   FIG. 1 is a block diagram showing a gas separation apparatus according to a first embodiment of the present invention. The gas separation device 1 of the first embodiment shown in FIG. 1 is a PSA type gas separation device. The gas separation apparatus 1 is connected to a compressed air supply source 2 for supplying compressed air and a pipe 3 for flowing the compressed air, and an air filter 4 provided in the middle of the pipe 3 for removing dust and the like from the compressed air. .

気体分離装置には、配管3の端末に接続されエアフィルタ4で清浄処理された圧縮空気を貯留させる空気槽5と圧縮空気を流す配管6を有している。   The gas separation apparatus includes an air tank 5 connected to the end of the pipe 3 and storing the compressed air cleaned by the air filter 4 and a pipe 6 for flowing the compressed air.

圧力検知手段7は、吸着槽の一次側にあり、本実施例では配管6の途中に設けられている。圧力検知手段7の位置は、配管3にあってもよいが圧力変動を考慮し、空気槽5や配管6に設置することが好ましい。   The pressure detection means 7 is on the primary side of the adsorption tank, and is provided in the middle of the pipe 6 in the present embodiment. The position of the pressure detection means 7 may be in the pipe 3 but is preferably installed in the air tank 5 or the pipe 6 in consideration of pressure fluctuation.

配管6の端末位置には一対の配管8が接続されている。これら配管8には、それぞれ流路を開閉する供給弁9が途中に設けられており、端末には酸素分子を吸着して窒素ガスを製品ガスとして取り出すための吸着槽10がそれぞれ接続されている。   A pair of pipes 8 is connected to the end position of the pipe 6. A supply valve 9 for opening and closing the flow path is provided in the middle of each of the pipes 8, and an adsorption tank 10 for adsorbing oxygen molecules and extracting nitrogen gas as a product gas is connected to the terminal. .

また、一対の配管8には、それぞれ供給弁9と吸着槽10との間位置に配管11が接続されており、これら配管11には、途中に流路を開閉する排気弁12が、端末に消音用のフィルタ付きの排気サイレンサ13が設けられている。また、一対の配管8には、互いの配管11と吸着槽10との間位置を結ぶように配管14が接続されており、この配管14には流路を開閉する一対の下均圧弁15が設けられている。   In addition, a pipe 11 is connected to the pair of pipes 8 at a position between the supply valve 9 and the adsorption tank 10, respectively, and an exhaust valve 12 for opening and closing the flow path in the middle is connected to these pipes 11 An exhaust silencer 13 with a filter for silencing is provided. Further, a pipe 14 is connected to the pair of pipes 8 so as to connect the positions of the pipe 11 and the adsorption tank 10 to each other, and the pipe 14 has a pair of lower pressure equalizing valves 15 for opening and closing a flow path. It is provided.

一対の吸着槽10には、酸素分子を吸着する吸着手段である吸着剤が充填されている。吸着剤は、具体的には分子ふるいカーボンやゼオライト等を用いている。   The pair of adsorption vessels 10 is filled with an adsorbent which is an adsorption means for adsorbing oxygen molecules. Specifically, molecular sieve carbon, zeolite or the like is used as the adsorbent.

一対の吸着槽10には、端末位置で互いに合流する配管16がそれぞれ接続されている。これら配管16には、互いの吸着槽10側同士を結ぶように配管17が接続されており、この配管17には絞り18が設けられている。また、一対の配管16には、互いの配管17よりも吸着槽10とは反対側同士を結ぶように配管19が接続されており、この配管19には流路を開閉する一対の上均圧弁20が設けられている。また、一対の配管16には、それぞれの配管19よりも吸着槽10とは反対側に流路を開閉する取出弁21がそれぞれ設けられている。   The piping 16 which mutually joins in a terminal position is connected to a pair of adsorption tank 10, respectively. The pipes 17 are connected to the pipes 16 so as to connect the adsorption tank 10 sides with each other, and the pipe 18 is provided with a throttle 18. Further, a pipe 19 is connected to the pair of pipes 16 so as to connect opposite sides of the adsorption tank 10 with each other than the pipes 17, and the pipe 19 is a pair of upper pressure equalizing valves for opening and closing the flow path. 20 are provided. Further, the pair of pipes 16 is provided with a discharge valve 21 for opening and closing the flow path on the opposite side to the adsorption tank 10 with respect to each of the pipes 19.

一対の配管16の合流位置には配管22が接続されており、この配管22の端末位置には窒素ガスを貯留させる製品槽としての窒素槽23が接続されている。この窒素槽23には、端末位置が吐出口24とされた配管25が接続されており、この配管25の途中位置には窒素槽23側から順に、塵埃等を除去するとともにガスの流量を調整するフィルタレギュレータ26、流路を開閉する吐出弁27、ガスの流量を調整する流量調整弁28が設けられている。   A pipe 22 is connected to the joining position of the pair of pipes 16, and a nitrogen tank 23 as a product tank for storing nitrogen gas is connected to an end position of the pipe 22. A pipe 25 whose end position is a discharge port 24 is connected to the nitrogen tank 23. At an intermediate position of the pipe 25, dust and the like are sequentially removed from the nitrogen tank 23 side and the flow rate of gas is adjusted. A filter regulator 26, a discharge valve 27 for opening and closing the flow path, and a flow control valve 28 for adjusting the flow rate of the gas are provided.

配管25のフィルタレギュレータ26と吐出弁24との間位置には配管29および配管30が接続されており、配管29には、配管29側から順に、流路を開閉する開閉弁31と、ガスの流量を調整する流量調整弁32と、サイレンサ33とが設けられている。配管30には、配管30側から順に、流路を開閉する開閉弁34と、ガスの流量を調整する流量調整弁35と、酸素濃度を検出する酸素センサ36とが設けられている。   A pipe 29 and a pipe 30 are connected to a position between the filter regulator 26 of the pipe 25 and the discharge valve 24, and the pipe 29 includes an on-off valve 31 for opening and closing the flow path in order from the pipe 29 side. A flow control valve 32 for adjusting the flow rate and a silencer 33 are provided. The pipe 30 is provided with an on-off valve 34 for opening and closing the flow path, a flow rate adjusting valve 35 for adjusting the flow rate of gas, and an oxygen sensor 36 for detecting an oxygen concentration in order from the pipe 30 side.

圧力検知手段7および酸素センサ36は制御部37に通信可能に接続されており、検出信号を制御部37に出力する。   The pressure detection means 7 and the oxygen sensor 36 are communicably connected to the control unit 37, and output a detection signal to the control unit 37.

また、供給弁9、排気弁12、下均圧弁15、上均圧弁20、取出弁21、吐出弁27、流量調整弁28、開閉弁31、流量調整弁32、開閉弁34および流量調整弁35は、制御部37に通信可能に接続されており、制御部37からの指令で作動する。   Also, the supply valve 9, the exhaust valve 12, the lower pressure equalizing valve 15, the upper pressure equalizing valve 20, the outlet valve 21, the discharge valve 27, the flow control valve 28, the on-off valve 31, the flow control valve 32, the on-off valve 34, and the flow control valve 35 Is communicably connected to the control unit 37, and operates in accordance with a command from the control unit 37.

気体分離装置1にあっては、以下の(a)〜(d)の工程を順次行うように構成されている。図2に各工程の吸着槽の状態を示す。   In the gas separation device 1, the following steps (a) to (d) are sequentially performed. The state of the adsorption tank of each process is shown in FIG.

(a)吸着工程:圧縮空気供給源2により圧縮され空気槽5に貯留された圧縮空気を、供給弁9を開くことで、吸着剤が充填された吸着槽A10-aに導入するとともに、窒素槽23に残存する窒素ガスを、取出弁21-aを開くことで吸着槽A10-aに還流して吸着槽10-a内を昇圧させ、圧力を利用して吸着剤に酸素分子を吸着させる工程。   (A) Adsorption step: The compressed air compressed by the compressed air supply source 2 and stored in the air tank 5 is introduced into the adsorption tank A10-a filled with the adsorbent by opening the supply valve 9, and The nitrogen gas remaining in the tank 23 is returned to the adsorption tank A10-a by opening the takeout valve 21-a to raise the pressure in the adsorption tank 10-a, and the pressure is used to adsorb the oxygen molecule to the adsorbent Process.

(b)取出工程:吸着工程から引き続いて、空気槽5から圧縮空気を吸着槽A10-aに導入し続けると同時に、吸着剤により分離生成された窒素ガスを吸着槽A10-aより取り出して窒素槽23に貯留させる工程。   (B) Take-out step: Continue to introduce compressed air from the air tank 5 to the adsorption tank A10-a continuously from the adsorption step, and at the same time take out nitrogen gas separated and produced by the adsorbent from the adsorption tank A10-a A step of storing in the tank 23;

(c)均圧工程:上均圧弁20および下均圧弁15の開閉により取出工程終了後の均圧化を図り、次回の吸着工程の吸着効率を高めて、より高純度の窒素ガスを生成するための工程。   (C) Pressure equalization process: pressure equalization after completion of the take-out process is achieved by opening and closing upper pressure equalization valve 20 and lower pressure equalization valve 15, and adsorption efficiency of the next adsorption process is enhanced to generate nitrogen gas of higher purity. Process.

(d)再生工程:均圧工程終了後の吸着槽A10-a内を排気弁12-aを開くことにより配管11を介して大気開放して吸着剤に吸着された酸素分子を脱着することにより吸着剤を再生する工程。なお、この再生工程において、排気弁12-a以外の吸着槽A10-aに関連する供給弁9-a、下均圧弁15、上均圧弁20および取出弁21-aは、閉状態とする。   (D) Regeneration process: By opening the exhaust valve 12-a in the adsorption tank A10-a after completion of the pressure equalization process, the atmosphere is opened via the pipe 11 to desorb the oxygen molecules adsorbed by the adsorbent. Step of regenerating the adsorbent. In this regeneration process, the supply valve 9-a, the lower pressure equalizing valve 15, the upper pressure equalizing valve 20 and the takeout valve 21-a related to the adsorption tank A10-a other than the exhaust valve 12-a are in a closed state.

制御部37は、これらの各工程(a)〜(d)の切り替えを、あらかじめ設定された時間、あるいは空気槽5、吸着槽A10-a, 吸着槽B10- bおよび窒素槽23等の圧力条件に基づいて、吸着槽A10-a, 吸着槽B10- bに配置された供給弁9-a,b、排気弁12-a,b、下均圧弁15、上均圧弁20および取出弁21-a,bの開閉を制御することにより行う。しかも、各工程(a)〜(d)の切り替えを、各吸着槽毎に繰り返し行い、各吸着槽における工程が連携して実行されるように、すなわち、一方の吸着槽で吸着工程および取出工程が完了し、他方の吸着槽で再生工程が完了した後、均圧工程を行うように、制御部37は制御する。   The control unit 37 switches these respective steps (a) to (d) for a preset time, or pressure conditions of the air tank 5, the adsorption tank A10-a, the adsorption tank B10-b, the nitrogen tank 23, etc. Supply valve 9-a, b, exhaust valve 12-a, b, lower pressure equalizing valve 15, upper pressure equalizing valve 20, and outlet valve 21-a, which are disposed in adsorption tank A10-a and adsorption tank B10-b. This is done by controlling the opening and closing of, b. Moreover, switching of each step (a) to (d) is repeatedly performed for each adsorption tank, and the steps in each adsorption tank are performed in cooperation, that is, the adsorption step and the extraction step in one adsorption tank. Is completed, and after the regeneration process is completed in the other adsorption tank, the controller 37 controls the pressure equalization process.

先記のように (a)の吸着工程では、吸着槽A10-aの昇圧には、圧縮空気を導入するとともに、窒素槽23から窒素ガスを還流している。圧縮空気の圧力が低下した場合は、窒素槽23からの還流が増える。圧縮空気の導入が少ない分、窒素ガスの生成量が少なくなり、窒素槽23の窒素ガスの圧力、純度が低下する。また均圧工程で、もう一方の吸着槽B10-bと均圧したうえ、再生工程で排気されるため、還流が増えるほど、生成した窒素ガスの放気が増えることとなる。   As described above, in the adsorption step (a), compressed air is introduced to the pressure increase of the adsorption tank A10-a, and nitrogen gas is refluxed from the nitrogen tank 23. When the pressure of the compressed air decreases, the reflux from the nitrogen tank 23 increases. Since the amount of compressed air introduced is small, the amount of nitrogen gas generated is small, and the pressure and purity of nitrogen gas in the nitrogen tank 23 are reduced. Further, since the pressure is equalized with the other adsorption tank B10-b in the pressure equalization step, and exhausted in the regeneration step, the more the reflux, the more the generated nitrogen gas is released.

そのため制御部37は、圧力検知手段7で検出した吸着槽の一次側圧力が一定時間規定値より低下した場合に異常と判断し、気体分離装置1だけでなく、圧縮空気供給源2も停止させる。   Therefore, when the primary pressure of the adsorption tank detected by the pressure detection means 7 falls below the specified value for a certain period of time, the control unit 37 determines that it is abnormal and stops not only the gas separation device 1 but also the compressed air supply source 2 .

従来の気体分離装置は窒素ガスの純度が悪化して仕様値を満足しなくなると窒素ガスの吐出を停止させる。その場合でも、気体分離装置の運転は継続し、圧縮空気の圧力が低い状態では、純度が改善せずに圧縮空気供給源2の無駄な運転も続いてしまう。本発明では、気体分離装置1だけでなく、圧縮空気供給源2も停止しているので無駄な運転の防止になる。また気体分離装置が停止することで、還流の増加による精製した窒素の圧力、純度の低下を防ぎ、省エネと修理後の窒素ガスの取出しまでの時間の短縮となる。   The conventional gas separation apparatus stops the discharge of nitrogen gas when the purity of nitrogen gas deteriorates and the specification value is not satisfied. Even in that case, the operation of the gas separation apparatus continues, and when the pressure of the compressed air is low, the useless operation of the compressed air supply source 2 also continues without improving the purity. In the present invention, since not only the gas separation device 1 but also the compressed air supply source 2 is stopped, unnecessary operation can be prevented. In addition, by stopping the gas separation apparatus, it is possible to prevent the decrease in pressure and purity of the purified nitrogen due to the increase of the reflux, and to save energy and shorten the time to take out the nitrogen gas after repair.

さらに、大きな音を発生する圧縮空気供給源2が停止することで、ユーザは早期に異常に気が付くことができる。   Furthermore, by stopping the compressed air supply source 2 that generates a loud noise, the user can notice abnormal early.

吸着工程に入った直後、圧縮空気の圧力は低下するが、吸着槽10の圧力が上昇していくとともに、吸着工程前の程度まで戻る。停止するまでの時間は、例えば吸着工程の半分程度の時間で、圧縮空気の圧力が規定値以上にならない場合は、異常と判断し、圧縮空気供給源2を停止させても良い。   Immediately after entering the adsorption step, the pressure of the compressed air decreases, but the pressure of the adsorption tank 10 rises and returns to a level before the adsorption step. The time until the stop is, for example, about half of the time of the adsorption step, and when the pressure of the compressed air does not reach the specified value or more, it may be judged as abnormal and the compressed air supply source 2 may be stopped.

本実施例については、圧縮空気の圧力の規定値に段階を設けて制御する気体分離装置について説明する。実施例1と異なる点は、制御部37は圧縮空気の圧力が第1規定値以下になった場合、気体分離装置1及び圧縮空気供給源2は運転を継続するが、気体分離装置1が警報を出力する点及び圧縮空気の圧力が更に低下し、第2規定値(第1規定値未満)以下になった場合、実施例1と同様に気体分離装置1及び圧縮空気供給源2を停止させる点である。本実施例では2段階としたが、3段階以上の多段階であっても良い。   In the present embodiment, a gas separation apparatus will be described in which steps are provided to control specified values of pressure of compressed air. The difference from the first embodiment is that the control unit 37 continues the operation of the gas separation device 1 and the compressed air supply source 2 when the pressure of the compressed air becomes equal to or less than the first specified value, but the gas separation device 1 gives an alarm When the pressure output point and the pressure of the compressed air further decrease and become less than or equal to the second predetermined value (less than the first predetermined value), the gas separation apparatus 1 and the compressed air supply source 2 are stopped as in the first embodiment. It is a point. In this embodiment, two stages are used, but three or more stages may be used.

装置停止の前に警報を出力することで、圧縮空気供給源2の異常や、配管異常等に事前の対処ができ、顧客への影響を小さくすることができる。   By outputting an alarm before stopping the apparatus, it is possible to cope with abnormalities in the compressed air supply source 2, piping abnormalities, etc. in advance, and it is possible to reduce the impact on customers.

実施例1では、気体分離装置1及び圧縮空気供給源2をいきなり停止していたが、本実施例では、圧縮空気の圧力に規定値に複数の段階を設け、最終段階までの段階では、吸着工程の時間を徐々に長くなるように制御する。   In the first embodiment, the gas separation device 1 and the compressed air supply source 2 are suddenly stopped, but in the present embodiment, a plurality of stages are provided for the pressure of the compressed air at specified values, and adsorption is performed in the stages up to the final stage. Control the process time to be gradually longer.

機器構成は実施例1、2と同構成で、制御部37は実施例2と同様に圧縮空気の圧力の規定値に段階を設けており、圧縮空気が低下し、第1規定値以下になったときに、吸着工程の時間を長くする。吸着工程を長くすることで、吸着槽10の圧力が高くなり、窒素槽23の窒素ガスの圧力と純度が向上する。   The apparatus configuration is the same as in the first and second embodiments, and the control unit 37 sets a stage at the specified value of the pressure of the compressed air as in the second embodiment, so that the compressed air decreases and becomes less than the first specified value. Increase the time of the adsorption step. By lengthening the adsorption step, the pressure in the adsorption tank 10 is increased, and the pressure and purity of nitrogen gas in the nitrogen tank 23 are improved.

それでも、圧縮空気が低下し、第2規定値以下になった場合は、制御部27は、気体分離装置1を停止する。本実施例では、圧縮空気供給源2の停止を付加してもよいが、必須構成ではない。   Even so, when the compressed air decreases and becomes less than or equal to the second predetermined value, the control unit 27 stops the gas separation device 1. In the present embodiment, stopping of the compressed air supply source 2 may be added, but this is not an essential configuration.

本実施例については、実施例1〜3の構成の圧力検知手段7が流量検知手段の場合について説明する。   About the present Example, the pressure detection means 7 of the structure of Examples 1-3 demonstrates the case where it is a flow volume detection means.

機器構成は実施例1〜3と異なる点は、圧力検知手段7が流量検知手段になっており、実施例1〜3の圧縮空気の圧力の規定値を圧縮空気の流量の規定値としている点である。規定値以下となった場合に同様の制御を行う。   The apparatus configuration is different from the first to third embodiments in that the pressure detection means 7 is a flow rate detection means, and the specified value of the pressure of the compressed air in the first to third examples is the specified value of the flow rate of compressed air. It is. The same control is performed when the value is less than the specified value.

本実施例は、実施例1乃至4の気体分離装置1において、気体分離装置1の運転開始時、空気槽5の圧力が規定値を超えていない場合、気体分離装置1の運転を開始させないようしたものである。圧縮空気供給源2を駆動させて空気槽5に規定値の圧力が充填されるまで待つ必要があるからである。これにより、気体分離装置1の無駄な運転を防ぎ、精製した窒素槽の放気を防止する。また気体分離装置1が運転しないため、圧縮空気供給源2の異常や、先行運転の忘れを発見することが可能となる。   In this embodiment, in the gas separation device 1 of the first to fourth embodiments, when the pressure of the air tank 5 does not exceed the specified value at the start of the operation of the gas separation device 1, the operation of the gas separation device 1 is not started. It is This is because it is necessary to drive the compressed air supply source 2 and wait until the air tank 5 is filled with a predetermined pressure. This prevents the wasteful operation of the gas separation device 1 and prevents the discharge of the purified nitrogen tank. In addition, since the gas separation device 1 does not operate, it is possible to discover an abnormality of the compressed air supply source 2 and a forget of the preceding operation.

1…気体分離装置、2…圧縮空気供給源、3…配管、4…エアフィルタ、5…空気槽、6…配管、7…圧力検知手段、8…配管、9…供給弁、10…吸着槽、11…配管、12…排気弁、13…排気サイレンサ、14…配管、15…下均圧弁、16…配管、17…配管、18…絞り、19…配管、20…上均圧弁、21…取出弁、22…配管、23…窒素槽、24…吐出口、25…配管、26…フィルタレギュレータ、27…吐出弁、28…流量調整弁、29…配管、30…配管、31…開閉弁、32…流量調整弁、34…開閉弁、35…流量調整弁、37…制御部 DESCRIPTION OF SYMBOLS 1 ... Gas separation apparatus, 2 ... Compressed air supply source, 3 ... Piping, 4 ... Air filter, 5 ... Air tank, 6 ... Piping, 7 ... Pressure detection means, 8 ... Piping, 9 ... Supply valve, 10 ... Adsorption tank 11: Piping 12: Exhaust valve 13: Exhaust silencer 14: Piping 15: Lower pressure equalizing valve 16: Piping 17: Piping 18: Squeezing 19: Piping 20: Upper pressure equalizing valve 21 Valve 22 22 piping 23 nitrogen tank 24 discharge port 25 piping 26 filter regulator 27 discharge valve 28 flow control valve 29 piping 30 piping 31 opening and closing valve 32 ... Flow adjustment valve, 34 ... on-off valve, 35 ... flow adjustment valve, 37 ... control unit

Claims (6)

圧縮空気供給源と吸着槽との間の供給経路に圧縮気体の圧力を検出する圧力検出手段と、検出圧力に応じて運転を制御する制御部を有し、
前記制御部は、前記検出圧力が第1規定値を下回った場合、吸着工程の時間を長くするか、または前記圧縮空気供給源を停止することを特徴とする気体分離装置。
The pressure detection means for detecting the pressure of the compressed gas in the supply path between the compressed air supply source and the adsorption tank, and the control unit for controlling the operation according to the detected pressure,
The gas separation device according to claim 1, wherein the control unit lengthens the time of the adsorption step or stops the compressed air supply source when the detected pressure falls below a first predetermined value.
請求項1において、
前記圧縮気体の供給経路には圧縮気体を貯留する空気槽を備え、
前記圧力検出手段は、前記空気槽と前記吸着層槽との間の圧力を検出することを特徴とする気体分離装置。
In claim 1,
The compressed gas supply path is provided with an air tank for storing the compressed gas,
The gas separation apparatus, wherein the pressure detection means detects the pressure between the air tank and the adsorption layer tank.
請求項1において、
前記制御部は、前記第1規定よりも低い第2規定値を下回った場合、気体分離装置の運転を停止することを特徴とする気体分離装置。
In claim 1,
The said separation part stops the operation | movement of a gas separation apparatus, when it becomes less than the 2nd predetermined value lower than the said 1st specification, The gas separation apparatus characterized by the above-mentioned.
圧縮空気供給源と、吸着槽と、前記圧縮空気供給源と前記吸着槽との間の圧縮気体の圧力を検出する圧力検出手段と、前記検出圧力に応じて運転を制御する制御部を有する気体分離システムにおいて、
前記制御部は、前記圧縮空気供給源を停止することを特徴とする気体分離装置。
Gas having a compressed air supply source, an adsorption tank, pressure detection means for detecting the pressure of the compressed gas between the compressed air supply source and the adsorption tank, and a control unit for controlling the operation according to the detected pressure In the separation system
The said control part stops the said compressed air supply source, The gas separation apparatus characterized by the above-mentioned.
請求項4において、
前記圧縮気体の供給経路には圧縮気体を貯留する空気槽を備え、
前記圧力検出手段は、前記空気槽と前記吸着層槽との間の圧力を検出することを特徴とする気体分離装置。
In claim 4,
The compressed gas supply path is provided with an air tank for storing the compressed gas,
The gas separation apparatus, wherein the pressure detection means detects the pressure between the air tank and the adsorption layer tank.
請求項4において、
前記制御部は、前記第1規定よりも低い第2規定値を下回った場合、気体分離装置の運転を停止することを特徴とする気体分離装置。
In claim 4,
The said separation part stops the operation | movement of a gas separation apparatus, when it becomes less than the 2nd predetermined value lower than the said 1st specification, The gas separation apparatus characterized by the above-mentioned.
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