JP2019020442A - Coaxial epi-illumination device - Google Patents

Coaxial epi-illumination device Download PDF

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JP2019020442A
JP2019020442A JP2017135628A JP2017135628A JP2019020442A JP 2019020442 A JP2019020442 A JP 2019020442A JP 2017135628 A JP2017135628 A JP 2017135628A JP 2017135628 A JP2017135628 A JP 2017135628A JP 2019020442 A JP2019020442 A JP 2019020442A
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light
light guide
emitting elements
light emitting
lens
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JP7046511B2 (en
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常夫 馬場
Tsuneo Baba
常夫 馬場
康平 高橋
Kohei Takahashi
康平 高橋
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Vs Tech Co Ltd
VS TECHNOLOGY CO Ltd
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VS TECHNOLOGY CO Ltd
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Abstract

To provide a coaxial epi-illumination device which can emit compact and stable light.SOLUTION: A light source 21 is composed of a plurality of light-emitting elements 46, 47 and 48 and a lens 51. Each of the light-emitting elements 46 to 48 is integrally covered with a light transmissive resin 50. The lens 51 is constituted of the light transmissive resin 50. Light from the lens 51 is guided by a first light guide material 22. The light from the first light guide material 22 is diffused by a first diffusion material 23. Light from the first diffusion material 23 is guided by a second light guide material 24. Light from the second light guide material 24 is diffused by a second diffusion material 25. The first light guide material 22, the first diffusion material 23, the second light guide material 24 and the second diffusion material 25 are aligned in this order to transmit light from the lens 51, and thereby light guide and diffusion are performed in two stages. The size of an illumination device can be reduced by reduction in the length of the whole device. Uniform illumination light having no irradiation unevenness is obtained.SELECTED DRAWING: Figure 3

Description

本発明は、同軸落射照明装置に関するものである。   The present invention relates to a coaxial epi-illumination device.

製品検査等において、人の目の代わりにカメラで被検査物を撮影し、得られた画像を認識し、位置決めや種別、計測、検査を行うマシンビジョン(Machine Vision)が広く利用されている。このマシンビジョンでは、カメラと同じ方向から被検査物に照明光を照射する場合に、同軸落射照明装置が用いられている(例えば特許文献1参照)。   In product inspection and the like, machine vision is widely used in which an object to be inspected is photographed with a camera instead of a human eye, the obtained image is recognized, and positioning, type, measurement, and inspection are performed. In this machine vision, a coaxial epi-illumination device is used when illuminating an object to be inspected from the same direction as the camera (see, for example, Patent Document 1).

照明装置の光源としては、例えば赤(R),緑(G),青(B)の三色のLED(light emitting diode)が用いられる。そして、各色のLEDの輝度を調節することにより、所望の色の光を得ている(例えば特許文献1,2参照)。   For example, red (R), green (G), and blue (B) LEDs (light emitting diodes) are used as the light source of the illumination device. And the light of the desired color is obtained by adjusting the brightness | luminance of LED of each color (for example, refer patent document 1, 2).

特開2006−308702号公報JP 2006-308702 A 特開2004−363061号公報JP 2004-330661 A

しかしながら、特許文献1に記載の照明装置では、LEDの前面に光拡散手段と透明な球状部材を配置する構成となっており、レンズに並行光を集めている。従って、光拡散板により拡散した光が球状部材により分光されるため、LEDの配置による配光特性の影響が強く出て、結果的に光を均一にミキシングできないという欠点がある。   However, the illumination device described in Patent Document 1 has a configuration in which a light diffusing unit and a transparent spherical member are arranged on the front surface of the LED, and collects parallel light in the lens. Therefore, since the light diffused by the light diffusing plate is dispersed by the spherical member, the influence of the light distribution characteristics due to the arrangement of the LEDs is strong, and as a result, there is a disadvantage that the light cannot be mixed uniformly.

また、特許文献2に記載の照明装置では、R,G,Bの各色LEDによる照明光を混合するバンドルファイバが配され、その光入射端がLEDの数に応じて分岐形成されている。そして、光射出端はそれらのファイバがランダムに束ねられた構成となっている。このように光ファイバを使用して光をミキシングしている点から、同軸落射照明装置としては大がかりになり、且つ製造コストも高くなるという問題がある。   Moreover, in the illuminating device described in Patent Document 2, a bundle fiber that mixes illumination light from each of the R, G, and B color LEDs is arranged, and its light incident end is branched according to the number of LEDs. The light exit end has a configuration in which these fibers are randomly bundled. Since light is mixed using an optical fiber in this way, there is a problem that the coaxial epi-illumination apparatus becomes large and the manufacturing cost increases.

本発明は、上記課題を鑑みてなされたものであり、小型であり且つ安定した光を供給することができる同軸落射照明装置を提供することを目的とする。   The present invention has been made in view of the above problems, and an object thereof is to provide a coaxial epi-illumination device that is small in size and can supply stable light.

上記目的を達成するために、本発明の同軸落射照明装置は、光源、第1導光材、第1拡散材、第2導光材、第2拡散材、及びケースを有する。光源は、複数の発光素子とレンズとを有する。複数の発光素子は、互いに近接して配置される。レンズは、発光素子からの光を集める。第1導光材は、レンズからの光を導く。第1拡散材は、第1導光材からの光を拡散する。第2導光材は、第1拡散材からの光を導く。第2拡散材は、第2導光材からの光を拡散する。ケースは、光源、第1導光材、第1拡散材、第2導光材、及び第2拡散材を光路に保持する。   In order to achieve the above object, the coaxial epi-illumination device of the present invention includes a light source, a first light guide material, a first diffusion material, a second light guide material, a second diffusion material, and a case. The light source has a plurality of light emitting elements and a lens. The plurality of light emitting elements are arranged close to each other. The lens collects light from the light emitting element. The first light guide member guides light from the lens. The first diffusion material diffuses light from the first light guide material. The second light guide material guides light from the first diffusion material. The second diffusion material diffuses light from the second light guide material. The case holds the light source, the first light guide material, the first diffusion material, the second light guide material, and the second diffusion material in the optical path.

ケースは先端部、基端部、蓋部を順に連結した有底筒状体であり、有底筒状体の筒心に光路を有することが好ましい。光源及び第1導光材が基端部に配され、第2導光材及び第2拡散材が先端部に配され、第1拡散材が基端部又は先端部に配されることが好ましい。   The case is a bottomed cylindrical body in which a distal end portion, a base end portion, and a lid portion are connected in order, and it is preferable that the case has an optical path in a cylindrical center of the bottomed cylindrical body. It is preferable that the light source and the first light guide material are arranged at the base end portion, the second light guide material and the second diffusion material are arranged at the tip end portion, and the first diffusion material is arranged at the base end portion or the tip end portion. .

複数の発光素子は三色光の各光をそれぞれ発光し、且つ各光の光量が個別に制御され、レンズは発光素子を覆う湾曲突出面を有する光透過性樹脂であることが好ましい。   It is preferable that the plurality of light emitting elements respectively emit three colors of light, the amount of each light is individually controlled, and the lens is a light transmissive resin having a curved protruding surface that covers the light emitting elements.

本発明によれば、小型で安定した光を供給することができる同軸落射照明装置を提供することができる。   ADVANTAGE OF THE INVENTION According to this invention, the coaxial epi-illumination device which can supply the small and stable light can be provided.

同軸落射照明装置を有する検査装置を示す概略の側面図である。It is a schematic side view which shows the test | inspection apparatus which has a coaxial epi-illumination apparatus. 同軸落射照明装置の光軸に沿う断面図である。It is sectional drawing which follows the optical axis of a coaxial epi-illumination device. 同軸落射照明装置を先端部、基端部、蓋部に分解して示す斜視図である。It is a perspective view which decomposes | disassembles and shows a coaxial epi-illumination apparatus to a front-end | tip part, a base end part, and a cover part. 同軸落射照明装置の図2におけるIV−IV線に沿う断面図である。It is sectional drawing which follows the IV-IV line in FIG. 2 of a coaxial epi-illumination device. 3個の発光素子を近接させた光源の変形例1を示す図2におけるIV−IV線から見た正面図である。It is the front view seen from the IV-IV line in FIG. 2 which shows the modification 1 of the light source which made three light emitting elements adjoin. 光軸を中心にした放射線方向で且つ同心円上に3個の発光素子を配列した光源の変形例2を示す図2におけるIV−IV線から見た正面図である。It is the front view seen from the IV-IV line in FIG. 2 which shows the modification 2 of the light source which arranged the three light emitting elements on the concentric circle in the radiation direction centering on an optical axis. 変形例2の各発光素子を回転させて光軸を中心にした放射線方向で且つ同心円上に配列した光源の変形例3を示す図2におけるIV−IV線から見た正面図である。It is the front view seen from the IV-IV line | wire in FIG. 2 which shows the modification 3 of the light source which rotated each light emitting element of the modification 2, and was arranged in the radiation direction centering on the optical axis, and concentric. 9個の発光素子をマトリックス状に配列した光源の変形例4を示す図2におけるIV−IV線から見た正面図である。It is the front view seen from the IV-IV line in FIG. 2 which shows the modification 4 of the light source which arranged nine light emitting elements in the matrix form. 変形例4に、さらに赤外線発光素子を加えた光源の変形例5を示す図2におけるIV−IV線から見た正面図である。It is the front view seen from the IV-IV line in FIG. 2 which shows the modification 5 of the light source which added the infrared rays light emitting element to the modification 4. FIG. 比較例の概略構成を示す断面図である。It is sectional drawing which shows schematic structure of a comparative example.

図1に示すように、本発明の同軸落射照明装置(以下、単に照明装置という)10は検査装置11に装着される。検査装置11は、例えばCCD等のイメージエリアセンサ12aを有するカメラ12と撮影レンズ13とを有する。撮影レンズ13は、イメージエリアセンサ12aに被検査物15の光学像を結像する。   As shown in FIG. 1, a coaxial epi-illumination device (hereinafter simply referred to as illumination device) 10 of the present invention is attached to an inspection device 11. The inspection apparatus 11 includes a camera 12 having an image area sensor 12a such as a CCD and a photographing lens 13. The taking lens 13 forms an optical image of the inspection object 15 on the image area sensor 12a.

撮影レンズ13には、取付フランジ14が設けられている。取付フランジ14には照明装置10の先端部26aが挿入され、図示しないネジによりに照明装置10が撮影レンズ13に固定される。この固定によって、撮影レンズ13の撮影光軸CL1と照明装置10の照明光軸CL2とが直交する。   The taking lens 13 is provided with a mounting flange 14. The front end portion 26a of the illuminating device 10 is inserted into the mounting flange 14, and the illuminating device 10 is fixed to the photographing lens 13 by screws (not shown). By this fixing, the photographing optical axis CL1 of the photographing lens 13 and the illumination optical axis CL2 of the illumination device 10 are orthogonal to each other.

撮影光軸CL1と照明光軸CL2との交差位置で撮影レンズ13には、ビームスプリッタ17が配されている。ビームスプリッタ17は、照明光を反射して、被検査物15に照明光を照射する。また、ビームスプリッタ17は、撮影光を透過する。これにより、照明光で照射された被検査物15の画像はイメージエリアセンサ12aに結像し、撮像される。   A beam splitter 17 is disposed on the photographing lens 13 at a crossing position between the photographing optical axis CL1 and the illumination optical axis CL2. The beam splitter 17 reflects the illumination light and irradiates the inspection object 15 with the illumination light. Further, the beam splitter 17 transmits photographing light. Thereby, the image of the inspection object 15 irradiated with the illumination light forms an image on the image area sensor 12a and is captured.

図2及び図3に示すように、同軸落射照明装置10は、光源21、第1導光材22、第1拡散材23、第2導光材24、第2拡散材25、及びケース26を有する。   As shown in FIGS. 2 and 3, the coaxial incident illumination device 10 includes a light source 21, a first light guide material 22, a first diffusion material 23, a second light guide material 24, a second diffusion material 25, and a case 26. Have.

ケース26は、先端部26a、基端部26b、蓋部26cの3部品を順に連結した有底筒状体から構成されている。ケース26は、光源21、第1導光材22、第1拡散材23、第2導光材24、及び第2拡散材25を順に筒心(光路)に沿って保持している。   The case 26 is composed of a bottomed cylindrical body in which three components, that is, a distal end portion 26a, a proximal end portion 26b, and a lid portion 26c are sequentially connected. The case 26 holds the light source 21, the first light guide material 22, the first diffusing material 23, the second light guide material 24, and the second diffusing material 25 in order along the cylinder core (optical path).

先端部26a及び基端部26bは筒状に構成されている。基端部26bには、筒心に沿って先端側から順に、第1拡散材収納穴31と第1導光材収納孔32と光源収納穴33とが形成されている。蓋部26cは、取付枠40とこの取付枠40に連続するフランジ41とを有する。   The distal end portion 26a and the proximal end portion 26b are formed in a cylindrical shape. A first diffusing material accommodation hole 31, a first light guide material accommodation hole 32, and a light source accommodation hole 33 are formed in the base end portion 26b in order from the distal end side along the cylindrical center. The lid portion 26 c includes an attachment frame 40 and a flange 41 that is continuous with the attachment frame 40.

第1拡散材収納穴31の内径は第1拡散材23の外径と略同じであり、第1拡散材23が収納される。第1導光材収納孔32の内径は第1導光材22の外径と略同じであり、第1導光材22が収納される。光源収納穴33の内径は取付枠40の外径と略同じであり、蓋部26cの取付枠40が収納される。   The inner diameter of the first diffusing material accommodation hole 31 is substantially the same as the outer diameter of the first diffusing material 23, and the first diffusing material 23 is accommodated therein. The inner diameter of the first light guide material accommodation hole 32 is substantially the same as the outer diameter of the first light guide material 22, and the first light guide material 22 is accommodated. The inner diameter of the light source accommodation hole 33 is substantially the same as the outer diameter of the attachment frame 40, and the attachment frame 40 of the lid portion 26c is accommodated.

フランジ41の外径は、基端部26bの外径と略同じであり、基端部26bの光源収納穴33を塞ぐ。光源収納穴33には段部33aが形成されている。この段部33aに取付枠40の先端面40aが係止することで、光源収納穴33内に光源21が位置決めされる。   The outer diameter of the flange 41 is substantially the same as the outer diameter of the base end portion 26b, and closes the light source accommodation hole 33 of the base end portion 26b. A step portion 33 a is formed in the light source accommodation hole 33. The light source 21 is positioned in the light source accommodation hole 33 by the front end surface 40a of the mounting frame 40 being locked to the stepped portion 33a.

基端部26bの外周面には、複数の周溝34の形成により例えば筒心方向に沿って3個の冷却フィン35が形成されている。また、図2に示すように、筒心方向の中央の周溝34には、ネジ孔36が形成されている。ネジ孔36には取付ネジ37が取り付けられ、第1導光材22を第1導光材収納孔32に固定する。また、基端部26bの外周面で基端近くには、外周方向に等ピッチでネジ孔38が形成されている。ネジ孔38には取付ネジ39が挿入され、基端部26bに蓋部26cが固定される。   On the outer peripheral surface of the base end portion 26b, for example, three cooling fins 35 are formed along the cylinder center direction by forming a plurality of peripheral grooves 34. As shown in FIG. 2, a screw hole 36 is formed in the circumferential groove 34 at the center in the cylinder center direction. An attachment screw 37 is attached to the screw hole 36 to fix the first light guide material 22 to the first light guide material accommodation hole 32. Further, screw holes 38 are formed at an equal pitch in the outer peripheral direction near the base end on the outer peripheral surface of the base end portion 26b. A mounting screw 39 is inserted into the screw hole 38, and the lid portion 26c is fixed to the base end portion 26b.

図4に示すように、取付枠40の先端面40aの中央には、取付ネジ42により光源21が取り付けられる。光源21は、基板45に発光素子46〜48を取り付けて構成されている。   As shown in FIG. 4, the light source 21 is attached to the center of the front end surface 40 a of the attachment frame 40 by an attachment screw 42. The light source 21 is configured by attaching light emitting elements 46 to 48 to a substrate 45.

発光素子46〜48は、R,G,BのLEDからなるウェハー素子から構成されている。各発光素子46〜48は、基板45の中心に形成される直径が2.5mmの同心円49上で周方向に120°間隔で、基板45にワイヤーボンディングされている。発光素子46〜48は例えば一辺が1mmの正方形の発光面を持ち、消費電力が1Wである。各発光素子46〜48は、シリコン、ポリカーボネイト等の光透過性樹脂50により一体的に覆われて、図2に示すように、表面は外側に突出した湾曲突出面50aとなっている。この湾曲突出面50aを有する光透過性樹脂50がレンズ51となって、第1導光材22の入射面22aにむけて各発光素子46〜48からの照射光が集光される。   The light emitting elements 46 to 48 are constituted by wafer elements composed of R, G, and B LEDs. The light emitting elements 46 to 48 are wire-bonded to the substrate 45 at 120 ° intervals in the circumferential direction on a concentric circle 49 having a diameter of 2.5 mm formed at the center of the substrate 45. The light emitting elements 46 to 48 have, for example, a square light emitting surface with a side of 1 mm and power consumption is 1 W. Each of the light emitting elements 46 to 48 is integrally covered with a light transmissive resin 50 such as silicon or polycarbonate, and as shown in FIG. 2, the surface is a curved projecting surface 50a projecting outward. The light transmissive resin 50 having the curved projecting surface 50a becomes the lens 51, and the irradiation light from each of the light emitting elements 46 to 48 is collected toward the incident surface 22a of the first light guide material 22.

本実施形態では、発光素子46〜48をワイヤーボンディングしてR,G,Bの発光部面積が極力小さくなるようにコンパクト化を図り、且つ発光素子46〜48を覆う光透過性樹脂50によるレンズ51によって集光している。このため、高輝度であり照射出力が高い光源21が得られる。なお、光透過性樹脂50によりレンズ効果を出して集光性を高めているが、光透過性樹脂50に代えて又は加えて個別のレンズを用いてもよい。   In the present embodiment, the light emitting elements 46 to 48 are wire-bonded to make the R, G, B light emitting area as small as possible, and the lens made of the light-transmitting resin 50 that covers the light emitting elements 46 to 48 is used. Condensed by 51. For this reason, the light source 21 with high luminance and high irradiation output is obtained. In addition, although the lens effect is taken out by the light transmissive resin 50 and the light condensing property is enhanced, an individual lens may be used instead of or in addition to the light transmissive resin 50.

図3に示すように、第1導光材22は、透明なアクリル製の円柱体であり、例えば外径が6mmで長さが21mmである。   As shown in FIG. 3, the first light guide member 22 is a transparent acrylic cylinder, and has an outer diameter of 6 mm and a length of 21 mm, for example.

第1拡散材23及び第2拡散材25は、外径6mmで厚みが0.10mm以上0.40mm以下の円盤状のポリカーボネイトやアクリル製の光拡散フィルムであり、例えば株式会社オプティカルソリューションズ製やクラレ製のものが用いられる。   The first diffusing material 23 and the second diffusing material 25 are disc-shaped polycarbonate or acrylic light diffusing film having an outer diameter of 6 mm and a thickness of 0.10 mm to 0.40 mm, for example, optical solutions manufactured by Kuraray Co., Ltd. The product made from is used.

第1拡散材23の入射面23aには、ミクロンサイズのマイクロレンズが例えばランダムな状態で多数配置されている。これにより、光源21の輝度むらを無くして、任意の角度に拡散する均質度の高い光を得ることができる。しかも、光透過率が約90%と高いため、光源21の光を無駄にすることなく利用することができる。第1拡散材23は本実施形態では拡散指向角が15°以上30°以下で厚みが0.12mmのクラレ製のマイクロレンズを用いている。   A large number of micron-sized microlenses are arranged on the incident surface 23a of the first diffusing material 23 in a random state, for example. Thereby, the brightness nonuniformity of the light source 21 is eliminated, and light with high homogeneity that diffuses at an arbitrary angle can be obtained. Moreover, since the light transmittance is as high as about 90%, the light from the light source 21 can be used without being wasted. In this embodiment, the first diffusing material 23 uses a Kuraray microlens having a diffusion directing angle of 15 ° to 30 ° and a thickness of 0.12 mm.

ケース26の先端部26aは、基端側で基端部26bに嵌合する接続筒53と、中間位置で中間筒54と、先端側で撮影レンズ13の取付フランジ14に嵌合する嵌合筒55とを有する。先端部26aには、筒心に沿って第2導光材24及び第2拡散材25を収納する収納孔61が形成されている。中間筒54の外周面にはネジ孔58が形成されている。ネジ孔58には取付ネジ59が取り付けられ、第2導光材24を収納孔61に固定する。接続筒53には、基端部嵌合穴53aが形成されている。第2導光材24は、第1導光材22と同様に、透明なアクリル製の円柱体であり、サイズは例えば外径が6mmで長さが23mmである。   The distal end portion 26a of the case 26 has a connecting tube 53 fitted to the proximal end portion 26b on the proximal end side, an intermediate tube 54 at the intermediate position, and a fitting tube fitted to the mounting flange 14 of the photographing lens 13 on the distal end side. 55. A storage hole 61 for storing the second light guide material 24 and the second diffusion material 25 is formed in the distal end portion 26a along the cylindrical center. A screw hole 58 is formed on the outer peripheral surface of the intermediate cylinder 54. An attachment screw 59 is attached to the screw hole 58 to fix the second light guide material 24 to the accommodation hole 61. The connection tube 53 is formed with a base end fitting hole 53a. Similar to the first light guide member 22, the second light guide member 24 is a transparent acrylic cylinder, and the size is, for example, an outer diameter of 6 mm and a length of 23 mm.

第2拡散材25も、第1拡散材23と同様に、その入射面25aには微細なマイクロレンズが多数配されている。第2拡散材25は、例えば拡散指向角が60°で厚みが0.35mmのオプティカルソリューションズ製のマイクロレンズを用いている。   Similarly to the first diffusing material 23, the second diffusing material 25 is also provided with a large number of fine microlenses on the incident surface 25a. As the second diffusing material 25, for example, a micro lens manufactured by Optical Solutions having a diffusion directivity angle of 60 ° and a thickness of 0.35 mm is used.

図2に示すように、ケース26の先端部26aの照射孔60の内径は、第2導光材24の収納孔61の内径及び第2拡散材25の外径よりも小さくなっている。これにより、第2拡散材25が照射孔60から脱落することがない。   As shown in FIG. 2, the inner diameter of the irradiation hole 60 of the tip portion 26 a of the case 26 is smaller than the inner diameter of the storage hole 61 of the second light guide material 24 and the outer diameter of the second diffusion material 25. Thereby, the second diffusing material 25 does not fall off from the irradiation hole 60.

照明装置10の組み立てに際しては、先端部26aの収納孔61に先端から順に第2拡散材25、第2導光材24を収納し、これら24,25を取付ネジ59で先端部26aに固定する。また、基端部26bの第1拡散材収納穴31に第1拡散材23を配し、この状態で、先端部26aの基端側を基端部26bに嵌合し、両部26a,26bを取付ネジ39により固定する。   When the lighting device 10 is assembled, the second diffusing material 25 and the second light guide material 24 are accommodated in order from the distal end in the accommodating hole 61 of the distal end portion 26 a, and these 24 and 25 are fixed to the distal end portion 26 a with mounting screws 59. . Further, the first diffusing material 23 is disposed in the first diffusing material accommodating hole 31 of the base end portion 26b, and in this state, the base end side of the tip end portion 26a is fitted to the base end portion 26b, and both the portions 26a and 26b are fitted. Is fixed by a mounting screw 39.

次に、基端部26bの第1導光材収納孔32に第1導光材22を収納する。第1導光材22の収納後に、取付ネジ37を締めつけて第1導光材22を第1導光材収納孔32に固定する。次に、光源21が取り付けられた蓋部26cを基端部26bの光源収納穴33に嵌合し、両部26b,26cを取付ネジ39により固定する。このようにして、3分割されたケース26の先端部26a、基端部26b、蓋部26cを用いて、照明装置10を構成するため、第1拡散材23及び第2拡散材25、第1導光材22及び第2導光材24をケース26内に簡単に組み込むことができる。   Next, the 1st light guide material 22 is accommodated in the 1st light guide material accommodation hole 32 of the base end part 26b. After the first light guide member 22 is stored, the mounting screw 37 is tightened to fix the first light guide member 22 in the first light guide member storage hole 32. Next, the lid portion 26 c to which the light source 21 is attached is fitted into the light source accommodation hole 33 of the base end portion 26 b, and both the portions 26 b and 26 c are fixed by the attachment screws 39. Thus, in order to comprise the illuminating device 10 using the front-end | tip part 26a of the case 26 divided | segmented into 3 parts, the base end part 26b, and the cover part 26c, the 1st diffuser 23, the 2nd diffuser 25, 1st The light guide member 22 and the second light guide member 24 can be easily incorporated into the case 26.

図1に示すように、照明装置10の蓋部26cからは電源線70が出ている。電源線70は、R,G,Bの各発光素子46〜48(図2参照)を駆動するためのものであり、各発光素子46〜48と光源コントローラ71とを接続している。光源コントローラ71は、R,G,Bの各発光素子46〜48を個別に駆動するものであり、周知のLED駆動回路が用いられる。光源コントローラ71の各つまみ72〜74を調節することにより、各発光素子46〜48への供給電力が制御され、R,G,Bの各発光素子46〜48を個別の光量で駆動させることができる。従って、カメラ12の感度特性にあった波長の光が供給可能になる。また、様々な撮影条件下で分光反射率の異なる材質が混在している被検査物15であっても良好なコントラストが得られる。   As shown in FIG. 1, the power supply line 70 protrudes from the lid portion 26 c of the lighting device 10. The power supply line 70 is for driving the R, G, and B light emitting elements 46 to 48 (see FIG. 2), and connects the light emitting elements 46 to 48 and the light source controller 71. The light source controller 71 individually drives the R, G, and B light emitting elements 46 to 48, and uses a well-known LED drive circuit. By adjusting the knobs 72 to 74 of the light source controller 71, the power supplied to the light emitting elements 46 to 48 is controlled, and the R, G, and B light emitting elements 46 to 48 can be driven with individual light amounts. it can. Accordingly, it is possible to supply light having a wavelength that matches the sensitivity characteristics of the camera 12. In addition, a good contrast can be obtained even with the inspection object 15 in which materials having different spectral reflectances are mixed under various photographing conditions.

図10は本実施形態の照明装置10の効果を確認するための比較例の構成を示している。比較例は、本発明の第2拡散材25と第2導光材24と同じ材質のものを用いた1段構成であり、第2導光材24の長さが16mmとなっている。また、光源21は本実施形態と同じものを用いている。   FIG. 10 shows a configuration of a comparative example for confirming the effect of the illumination device 10 of the present embodiment. The comparative example has a one-stage configuration using the same material as the second diffusion material 25 and the second light guide material 24 of the present invention, and the length of the second light guide material 24 is 16 mm. The light source 21 is the same as that in the present embodiment.

本実施形態では、導光材と拡散材とを連結したものを2段構成で用いており、全体としてコンパクト化を図りつつ照射むらのない均質な照明光を照射することができる。また、光源21としてR,G,Bの三色光のLEDを用いる光源の場合には、光の色むらを無くして、被検査物15を均一に照明することができる。   In the present embodiment, a structure in which a light guide material and a diffusing material are connected is used in a two-stage configuration, and uniform illumination light without uneven irradiation can be irradiated while achieving compactness as a whole. Further, in the case of a light source using LEDs of three colors of R, G, and B as the light source 21, it is possible to uniformly illuminate the inspection object 15 with no color unevenness.

図5〜図9は、各発光素子46〜48の配置を変更した光源81〜85の変形例1〜5を示している。図5に示す変形例1の光源81では、各発光素子46〜48を可能な限り接近させたものであり、各発光素子46〜48間の最小隙間は0.1mmであり、同心円91の直径は1.38mmである。各発光素子46〜48は光透過性樹脂50により覆われて第1実施形態とおなじように、レンズ効果を持たせている。なお、他の変形例2〜5においても、同様に光透過性樹脂50により各発光素子46〜48が覆われている。   5 to 9 show modified examples 1 to 5 of the light sources 81 to 85 in which the arrangement of the light emitting elements 46 to 48 is changed. In the light source 81 of Modification 1 shown in FIG. 5, the light emitting elements 46 to 48 are made as close as possible, the minimum gap between the light emitting elements 46 to 48 is 0.1 mm, and the diameter of the concentric circle 91 is Is 1.38 mm. Each of the light emitting elements 46 to 48 is covered with a light transmissive resin 50 and has a lens effect as in the first embodiment. In other modified examples 2 to 5, the light emitting elements 46 to 48 are similarly covered with the light transmissive resin 50.

図6に示す変形例2の光源82では、照明光軸CL2を中心にした放射線方向で且つ同心円92上に3個の発光素子46〜48を配列したものであり、各発光素子46〜48間の最小隙間は0.1mmであり、同心円92の直径は1.69mmである。   In the light source 82 of Modification 2 shown in FIG. 6, three light emitting elements 46 to 48 are arranged on a concentric circle 92 in the radial direction centered on the illumination optical axis CL <b> 2, and between the light emitting elements 46 to 48. The minimum gap is 0.1 mm, and the diameter of the concentric circle 92 is 1.69 mm.

図7に示す変形例3の光源83では、照明光軸CL2を中心にした放射線方向で且つ同心円93上に3個の発光素子46〜48を配列したものであり、各発光素子46〜48の各角部を近接させている。各発光素子46〜48間の最小隙間は0.1mmであり、同心円93の直径は1.52mmである。   In the light source 83 of Modification 3 shown in FIG. 7, three light emitting elements 46 to 48 are arranged on a concentric circle 93 in the radiation direction centered on the illumination optical axis CL <b> 2, and each of the light emitting elements 46 to 48 is arranged. The corners are close to each other. The minimum gap between the light emitting elements 46 to 48 is 0.1 mm, and the diameter of the concentric circle 93 is 1.52 mm.

図8に示す変形例4の光源84では9個の発光素子46〜48をマトリックス状に配列したものであり、各発光素子46〜48の各辺を近接させている。各発光素子46〜48間の各辺間の隙間は0.3mmである。なお、各発光素子46〜48の各辺を接近させる代わりに、各発光素子46〜48を変形例4のものよりも45度回転させて、各角を接近させるように、各発光素子46〜48をマトリックスに配置してもよい。また、図9に示す変形例5の光源85のように、変形例4の光源84に対して、赤外線発光素子87を加えてもよい。また、赤外線発光素子87に代えて又は加えて紫外線発光素子を追加してもよい。   In the light source 84 of the modification 4 shown in FIG. 8, nine light emitting elements 46 to 48 are arranged in a matrix, and the respective sides of the light emitting elements 46 to 48 are brought close to each other. A gap between each side between the light emitting elements 46 to 48 is 0.3 mm. In addition, instead of making each side of each light emitting element 46-48 approach, each light emitting element 46-48 is rotated 45 degree | times from the thing of the modification 4, and each light emitting element 46- is approached so that each angle may approach. 48 may be arranged in a matrix. Moreover, you may add the infrared rays light emitting element 87 with respect to the light source 84 of the modification 4 like the light source 85 of the modification 5 shown in FIG. Further, instead of or in addition to the infrared light emitting element 87, an ultraviolet light emitting element may be added.

実施形態及び変形例1〜5での光源21,81〜85を用いることにより、コンパクトでありながら照射効率が高い光源が得られ、カメラ12の感度特性に合わせた波長の光を被検査物15に照射することができる。   By using the light sources 21 and 81 to 85 in the embodiment and the first to fifth modifications, a light source that is compact but has high irradiation efficiency is obtained, and light having a wavelength that matches the sensitivity characteristics of the camera 12 is obtained. Can be irradiated.

10 同軸落射照明装置
11 検査装置
12 カメラ
12a イメージエリアセンサ
13 撮影レンズ
14 取付フランジ
15 被検査物
17 ビームスプリッタ
21,81〜85 光源
22 第1導光材
22a 入射面
23 第1拡散材
24 第2導光材
25 第2拡散材
26 ケース
26a 先端部
26b 基端部
26c 蓋部
31 第1拡散材収納穴
32 第1導光材収納孔
33 光源収納穴
33a 段部
34 周溝
35 冷却フィン
36,38 ネジ孔
37,39,42 取付ネジ
40 取付枠
40a 先端面
41 フランジ
45 基板
46〜48 発光素子
49,91〜93 同心円
50 光透過性樹脂
50a 湾曲突出面
51 レンズ
53 接続筒
54 中間筒
55 嵌合筒
60 照射孔
61 収納孔
70 電源線
71 光源コントローラ
72〜74 つまみ
CL1 撮影光軸
CL2 照明光軸
DESCRIPTION OF SYMBOLS 10 Coaxial epi-illumination apparatus 11 Inspection apparatus 12 Camera 12a Image area sensor 13 Shooting lens 14 Mounting flange 15 Inspection object 17 Beam splitter 21, 81-85 Light source 22 1st light guide material 22a Incident surface 23 1st diffuser material 24 2nd Light guide material 25 Second diffuser 26 Case 26a Tip end 26b Base end 26c Lid 31 First diffuser storage hole 32 First light guide storage hole 33 Light source storage hole 33a Step 34 Circumferential groove 35 Cooling fin 36, 38 Screw hole 37, 39, 42 Mounting screw 40 Mounting frame 40a Tip surface 41 Flange 45 Substrate 46-48 Light emitting element 49, 91-93 Concentric circle 50 Light transmitting resin 50a Curved protruding surface 51 Lens 53 Connecting cylinder 54 Intermediate cylinder 55 Fitting Joint tube 60 Irradiation hole 61 Storage hole 70 Power line 71 Light source controllers 72 to 74 Knob CL1 Imaging optical axis CL2 Illumination optical axis

Claims (4)

互いに近接して配置される複数の発光素子及び前記発光素子からの光を集めるレンズを有する光源と、
前記レンズからの光を導く第1導光材と、
前記第1導光材からの光を拡散する第1拡散材と、
前記第1拡散材からの光を導く第2導光材と、
前記第2導光材からの光を拡散する第2拡散材と、
前記光源、前記第1導光材、前記第1拡散材、前記第2導光材、及び前記第2拡散材を光路に保持するケースとを、有する同軸落射照明装置。
A light source having a plurality of light emitting elements arranged close to each other and a lens that collects light from the light emitting elements;
A first light guide that guides light from the lens;
A first diffusion material for diffusing light from the first light guide material;
A second light guide material for guiding light from the first diffusion material;
A second diffusion material for diffusing light from the second light guide material;
A coaxial epi-illumination device comprising: the light source, the first light guide material, the first diffusion material, the second light guide material, and a case for holding the second diffusion material in an optical path.
前記ケースは先端部、基端部、蓋部を順に連結した有底筒状体であり、前記有底筒状体の筒心に光路を有する請求項1記載の同軸落射照明装置。   The coaxial epi-illumination device according to claim 1, wherein the case is a bottomed cylindrical body in which a distal end portion, a base end portion, and a lid portion are sequentially connected, and has an optical path in a cylindrical center of the bottomed cylindrical body. 前記光源及び前記第1導光材が前記基端部に配され、前記第2導光材及び前記第2拡散材が前記先端部に配され、前記第1拡散材が前記基端部又は前記先端部に配される請求項2記載の同軸落射照明装置。   The light source and the first light guide material are arranged at the base end portion, the second light guide material and the second diffusion material are arranged at the tip end portion, and the first diffusion material is the base end portion or the The coaxial epi-illumination device according to claim 2, which is disposed at the tip portion. 複数の前記発光素子は三色光の各光をそれぞれ発光し、且つ前記各光の光量が個別に制御され、前記レンズは前記発光素子を覆う湾曲突出面を有する光透過性樹脂である請求項1から3いずれか1項記載の同軸落射照明装置。   The plurality of light emitting elements respectively emit light of three colors, and the amount of each light is individually controlled, and the lens is a light transmissive resin having a curved protruding surface covering the light emitting elements. The coaxial epi-illumination device according to claim 1.
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