JP2019012030A - Spectroscope - Google Patents

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JP2019012030A
JP2019012030A JP2017129232A JP2017129232A JP2019012030A JP 2019012030 A JP2019012030 A JP 2019012030A JP 2017129232 A JP2017129232 A JP 2017129232A JP 2017129232 A JP2017129232 A JP 2017129232A JP 2019012030 A JP2019012030 A JP 2019012030A
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diffractive
spectroscope
diffraction
sphere
frame
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JP6809991B2 (en
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威男 馬目
Takeo Umame
威男 馬目
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Kyocera Corp
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Abstract

To provide a spectroscope capable of obtaining a large amount of information with high sensitivity and high accuracy.SOLUTION: A spectroscope comprises a first diffraction body having a first diffraction surface and a second diffraction body having a second diffraction surface and a frame body housing the first diffraction body and the second diffraction body so that the first diffraction surface and the second diffraction surface are exposed alongside each other. At least one of opposite surfaces of the first diffraction body and the second diffraction body has a recess. The spectroscope has a ceramic solid sphere protruding more than the recess.SELECTED DRAWING: Figure 5

Description

本開示は、分光器に関する。   The present disclosure relates to a spectrometer.

分光装置においては、情報量を増やすために、回折面の大型化が望まれている。しかしながら、回折面を有する回折体の大型化は困難であることから、複数の回折体を組み合わせることにより、大型化を図ることが行われている（非特許文献１参照）。   In a spectroscopic device, it is desired to increase the size of the diffraction surface in order to increase the amount of information. However, since it is difficult to increase the size of a diffractive body having a diffractive surface, it has been attempted to increase the size by combining a plurality of diffractive bodies (see Non-Patent Document 1).

このような複数の回折体を有する分光器においては、例えば回折体が２つであるとき、２つの回折体の回折面同士のなす角度が所定の範囲になるように精密に制御することが必要である。また、２つの回折体を接触させて固定すると、２つの回折体同士に反力が掛かって回折面に歪みを生じさせてしまうため、２つの回折体同士の間には小さな隙間を有していることが必要である。   In such a spectroscope having a plurality of diffractive bodies, for example, when there are two diffractive bodies, it is necessary to precisely control the angle formed by the diffractive surfaces of the two diffractive bodies to be within a predetermined range. It is. In addition, if the two diffractors are fixed in contact with each other, a reaction force is applied between the two diffractors and distortion occurs on the diffractive surface. Therefore, there is a small gap between the two diffractors. It is necessary to be.

特許文献１には、分光器ではないものの、２つの部材の間に軟質金属（例えば、インジウム又は鉛すず合金）からなるスペーサを介在させることで２つの部材同士に掛かる反力を抑制することが記載されている。   Although it is not a spectroscope in Patent Document 1, it is possible to suppress a reaction force applied to two members by interposing a spacer made of a soft metal (for example, indium or lead tin alloy) between the two members. Have been described.

特開平１１−２０２１６１号公報JP-A-11-202161 First high-efficiency and high-resolution (R=80,000) NIR spectroscopy with high-blazed echelle grating: WINERED HIRES modes（大坪翔悟 等）First high-efficiency and high-resolution (R = 80,000) NIR spectroscopy with high-blazed echelle grating: WINERED HIRES modes (Shogo Ohtsubo, etc.)

軟質金属を用いた場合、それぞれの回折面を精度よく位置調整することが困難であるとともに、調整した位置を持続させることが困難であった。多くの情報量を高感度かつ高精度に得ることができる分光器が求められている。   When a soft metal is used, it is difficult to accurately adjust the position of each diffraction surface and it is difficult to maintain the adjusted position. There is a need for a spectrometer that can obtain a large amount of information with high sensitivity and high accuracy.

本開示は、多くの情報量を高感度かつ高精度に得ることができる分光器を提供することを目的とする。   An object of the present disclosure is to provide a spectroscope capable of obtaining a large amount of information with high sensitivity and high accuracy.

本開示の分光器は、第１回折面を有する第１回折体と、第２回折面を有する第２回折体と、前記第１回折面および前記第２回折面が並んで露出するように、前記第１回折体および前記第２回折体を収容する枠体とを備え、前記第１回折体および前記第２回折体の対向面の少なくともいずれかに凹部を有し、該凹部よりも突出する、セラミックスからなる球体を有する。   In the spectroscope of the present disclosure, a first diffractive body having a first diffractive surface, a second diffractive body having a second diffractive surface, and the first diffractive surface and the second diffractive surface are exposed side by side. A frame that houses the first diffractive body and the second diffractive body, and has a recess on at least one of the opposing surfaces of the first diffractive body and the second diffractive body, and protrudes beyond the recess. And a sphere made of ceramics.

本開示の分光器は、多くの情報量を高感度かつ高精度に得ることができる。   The spectroscope of the present disclosure can obtain a large amount of information with high sensitivity and high accuracy.

本実施形態の分光器を備えた分光装置の一例を示す模式図である。It is a schematic diagram which shows an example of the spectroscopic device provided with the spectroscope of this embodiment. 図１に示す分光装置に用いられる分光器を示す斜視図である。It is a perspective view which shows the spectrometer used for the spectrometer shown in FIG. 図２に示す分光器を構成する回折体と球体を示す模式図である。It is a schematic diagram which shows the diffractive body and sphere which comprise the spectrometer shown in FIG. （ａ）は、本実施形態における枠体の斜視図であり、（ｂ）は、本実施形態における分光器を組み立てる手順を示す斜視図である。(A) is a perspective view of the frame in this embodiment, (b) is a perspective view which shows the procedure of assembling the spectrometer in this embodiment. 他の実施形態の分光器の横断面図である。It is a cross-sectional view of the spectrometer of another embodiment.

本開示の分光器について図を参照しながら説明する。   The spectroscope of the present disclosure will be described with reference to the drawings.

図１は、本実施形態の分光器を備えた分光装置の一例を示す模式図である。   FIG. 1 is a schematic diagram illustrating an example of a spectroscopic device including the spectroscope of the present embodiment.

図１に示す分光装置１００は、外部からの電磁波Ｗを制限して通過させるスリット２０と、スリット２０を通過した電磁波Ｗを平行にするコリレーションレンズ３０と、平行にされた電磁波Ｗを反射するための金が表面に被覆されたミラー４０と、反射された電磁波Ｗを波長ごとに分光する分光器５０と、分光の光路に沿って順次配置されるクロスディスパーザ（補助用の反射型回折格子）６０およびカメラレンズ群７０と、分光を結像する検出器（赤外線アレイ）８０と、を備えている。   A spectroscopic device 100 shown in FIG. 1 reflects a slit 20 that restricts and passes an electromagnetic wave W from the outside, a correlation lens 30 that collimates the electromagnetic wave W that has passed through the slit 20, and the paralleled electromagnetic wave W. A mirror 40 whose surface is coated with gold, a spectroscope 50 that splits the reflected electromagnetic wave W for each wavelength, and a cross disperser (auxiliary reflective diffraction grating) that is sequentially arranged along the optical path of the spectrum ) 60 and a camera lens group 70, and a detector (infrared array) 80 for imaging the spectrum.

クロスディスパーザ（補助用の反射型回折格子）６０およびカメラレンズ群７０は、分光を導入する窓部９０ａを備えた低温保持機構９０に収容され、温度変動が抑制されている。   The cross disperser (auxiliary reflective diffraction grating) 60 and the camera lens group 70 are accommodated in a low temperature holding mechanism 90 having a window 90a for introducing a spectrum, and temperature fluctuation is suppressed.

外部から分光装置１００内に入射した電磁波Ｗは、光路に沿って進行し、検出器（赤外線アレイ）８０で結像される。そして、この結像により、エシェルグラムやスポットダイアグラム等の画像が得られ、観測対象物の情報を解析することができる。   The electromagnetic wave W incident on the spectroscopic device 100 from the outside travels along the optical path and is imaged by the detector (infrared array) 80. By this imaging, an image such as an echellegram or a spot diagram can be obtained, and information on the observation object can be analyzed.

図２は、図１に示す分光装置に用いられる分光器５０を示す斜視図である。図２に示すように、分光器５０は、第１回折面１ａを有する第１回折体１および第２回折面２ａを備える第２回折体２を備える。また、第１回折面１ａおよび第２回折面２ａが並んで露出するように、第１回折体１および第２回折体２を収容する枠体３とを備える。   FIG. 2 is a perspective view showing a spectroscope 50 used in the spectroscopic device shown in FIG. As shown in FIG. 2, the spectroscope 50 includes a first diffractive body 1 having a first diffractive surface 1a and a second diffractive body 2 having a second diffractive surface 2a. In addition, a frame body 3 that houses the first diffractive body 1 and the second diffractive body 2 is provided so that the first diffractive surface 1a and the second diffractive surface 2a are exposed side by side.

さらに、分光器５０は、図３に示すように、第１回折体１と第２回折体２と対向面にセラミックスからなる球体１０が位置する。   Furthermore, as shown in FIG. 3, the spectroscope 50 has a spherical body 10 made of ceramics positioned on the opposing surface of the first diffractive body 1 and the second diffractive body 2.

図２、３においては、直方体状の第１回折体１と直方体状の第２回折体を示しているが、第１回折体１および第２回折体２の形状は、これに限定されるものではない。   2 and 3, the rectangular parallelepiped first diffracting body 1 and the rectangular parallelepiped second diffracting body are shown, but the shapes of the first diffracting body 1 and the second diffracting body 2 are limited to this. is not.

図３に示す例において第１回折体１は、第１回折面１ａと、第１回折面１ａの反対に位置する第１下面１ｂと、第１回折面１ａと略直交する第１対向面１ｃとを有している。また、第２回折体２は、第２回折面２ａと、第２回折面２ａの反対に位置する第２下面２ｂと、第２回折面２ａと略直交する第２対向面２ｃとを有している。   In the example shown in FIG. 3, the first diffractive body 1 includes a first diffractive surface 1a, a first lower surface 1b positioned opposite to the first diffractive surface 1a, and a first facing surface 1c substantially orthogonal to the first diffractive surface 1a. And have. The second diffractive body 2 has a second diffractive surface 2a, a second lower surface 2b positioned opposite to the second diffractive surface 2a, and a second opposing surface 2c substantially orthogonal to the second diffractive surface 2a. ing.

そして、本開示の分光器５０は、第１対向面１ｃおよび第２対向面２ｃの少なくともいずれかに凹部４を有するものであり、図３においては、第２対向面２ｃに凹部４を有している例を示している。なお、第１対向面１ｃに凹部４を有するものであってもよい。ここで、セラミックスからなる球体１０は、凹部４から突出しているものであり、第１回折体１と第２回折体２とを組み合わせた場合において、小さな隙間が生じるものである。   And the spectrometer 50 of this indication has the recessed part 4 in at least any one of the 1st opposing surface 1c and the 2nd opposing surface 2c, and has the recessed part 4 in the 2nd opposing surface 2c in FIG. An example is shown. In addition, you may have the recessed part 4 in the 1st opposing surface 1c. Here, the sphere 10 made of ceramic protrudes from the recess 4, and a small gap is generated when the first diffractive body 1 and the second diffractive body 2 are combined.

第１回折面１ａおよび第２回折面２ａは、いずれも等間隔に形成されたブリーズ面（回折格子）を複数備えている。第１回折面１ａおよび第２回折面２ａに導かれた電磁波Ｗは、それぞれ反射し、波長ごとに分光された反射波となり、この反射波から観測対象物の情報を解析することができる。   Each of the first diffractive surface 1a and the second diffractive surface 2a includes a plurality of breeze surfaces (diffraction gratings) formed at equal intervals. The electromagnetic waves W guided to the first diffractive surface 1a and the second diffractive surface 2a are reflected and converted into reflected waves for each wavelength, and information on the observation object can be analyzed from the reflected waves.

本開示の分光器５０は、平行な電磁波Ｗが入射させたときの双方の反射波のなす角度が、例えば、１秒角(arcsec)以内となるように、第１回折面１ａおよび第２回折面２ａの位置が調整されている。なお、反射波のなす角度は、第１回折面１ａおよび第２回折面２ａに、例えば、Ｈｅ−Ｎｅレーザ―光を入射させ、双方の反射波のなす角度を光干渉計で測定すればよい。   The spectroscope 50 according to the present disclosure includes the first diffraction surface 1a and the second diffraction so that the angle formed by the two reflected waves when the parallel electromagnetic wave W is incident is, for example, within 1 sec (arcsec). The position of the surface 2a is adjusted. Note that the angle formed by the reflected wave may be, for example, by allowing He-Ne laser-light to enter the first diffractive surface 1a and the second diffractive surface 2a and measuring the angle formed by both reflected waves with an optical interferometer. .

球体１０は、セラミックスであり、軟質金属に比べ高い硬度、剛性を有し、変形しがたいものである。そして、球体１０が、第１対向面１ｃと第２対向面２ｃとの間に位置し、球体１０が凹部４から突出しているものであることにより、第１対向面１ｃと第２対向面２ｃとは直に接触していないため、反力による歪みが抑制される。また、球体１０が、形状が球であること、材質がセラミックスからなることにより、位置調整が容易であり、調整した位置を持続することができる。そのため、本開示の分光器５０は、多くの情報量を高感度かつ高精度に得ることができる。   The sphere 10 is a ceramic, has a higher hardness and rigidity than a soft metal, and is difficult to deform. And since the spherical body 10 is located between the 1st opposing surface 1c and the 2nd opposing surface 2c, and the spherical body 10 protrudes from the recessed part 4, the 1st opposing surface 1c and the 2nd opposing surface 2c Since it is not in direct contact, distortion due to reaction force is suppressed. In addition, since the spherical body 10 has a spherical shape and is made of a ceramic material, the position adjustment is easy and the adjusted position can be maintained. Therefore, the spectroscope 50 according to the present disclosure can obtain a large amount of information with high sensitivity and high accuracy.

以下に本開示の分光器５０の組立方法を説明する。図４（ａ）に枠体３を示す。図４（ａ）に示す例の枠体３は、底板３ａと側板３ｂと端板３ｃとを有しており、これらの組み合わせにより、第１回折体１と第２回折体とを挿入するための開口部３ｄを備えている。なお、枠体３は、底板３ａに側板３ｂと端板３ｃとが一体となったものの組み合わせでもよいし、底板３ａと側板３ｂと端板３ｃが一体となったものでもよい。   Hereinafter, a method for assembling the spectrometer 50 according to the present disclosure will be described. The frame 3 is shown in FIG. The frame 3 in the example shown in FIG. 4A has a bottom plate 3a, a side plate 3b, and an end plate 3c, and in order to insert the first diffractive body 1 and the second diffractive body by a combination thereof. The opening 3d is provided. The frame 3 may be a combination of the bottom plate 3a and the side plate 3b and the end plate 3c, or may be a combination of the bottom plate 3a, the side plate 3b, and the end plate 3c.

図４（ｂ）に示すように、この枠体３に第１回折体１と第２回折体２とを挿入する。その際、第１回折体１の第１対向面１ｃと第２回折体２の第２対向面２ｃの間に球体１０を挟みこんで挿入する。   As shown in FIG. 4B, the first diffractive body 1 and the second diffractive body 2 are inserted into the frame 3. At that time, the sphere 10 is inserted between the first facing surface 1 c of the first diffractive body 1 and the second facing surface 2 c of the second diffracting body 2.

図５は、枠体３に第１回折体１と第２回折体２と球体１０とを挿入した状態を示す横断面図である。   FIG. 5 is a cross-sectional view showing a state in which the first diffractive body 1, the second diffractive body 2, and the sphere 10 are inserted into the frame 3.

このような構成において、底板３ａと、第１下面１ｃおよび第２下面２ｃとが高い面精度を有し、第１下面１ｃと第１回折面１ａおよび第２下面２ｃと第２回折面２ａとがそれぞれ高い平行度を有し、第１回折体１および第２回折体２が高い厚み精度を有するものであれば、枠体３に挿入するのみで位置調整を行うことができる。   In such a configuration, the bottom plate 3a, the first lower surface 1c, and the second lower surface 2c have high surface accuracy, and the first lower surface 1c, the first diffractive surface 1a, the second lower surface 2c, and the second diffractive surface 2a If the first diffracting body 1 and the second diffracting body 2 have a high thickness accuracy, the position can be adjusted only by being inserted into the frame 3.

球体１０は、第１対向面１ｃと第２対向面２ｃの対向する領域の中央部に設けてもよく、このような構造であるときには、球体１０から第１対向面１ｃと第２対向面２ｃに掛かる力が第１回折面１ａや第２回折面２ａ、第１下面１ｂ、第２下面２ｂにおよびにくくなる。   The spherical body 10 may be provided in the center of the region where the first opposing surface 1c and the second opposing surface 2c are opposed to each other, and in such a structure, the first opposing surface 1c and the second opposing surface 2c from the spherical body 10 are provided. The force applied to the first diffractive surface 1a, the second diffractive surface 2a, the first lower surface 1b, and the second lower surface 2b becomes difficult.

第１対向面１ｃと第２対向面２ｃとは少なくとも一部が対向していればよい。例えば、第１回折面１ａと第２回折面２ａとを正面視したとき、第１回折面１ａと第２回折面２ａとがずれて配置されていてもよい。その様な場合、第１対向面１ｃと第２対向面２ｃとが向かい合う領域の中央部に球体１０を配置すればよい。   It suffices that at least a part of the first facing surface 1c and the second facing surface 2c face each other. For example, when the first diffractive surface 1a and the second diffractive surface 2a are viewed from the front, the first diffractive surface 1a and the second diffractive surface 2a may be shifted from each other. In such a case, the sphere 10 may be arranged in the center of the region where the first facing surface 1c and the second facing surface 2c face each other.

なお、図１〜図５においては、第１回折体１および第２回折体２が同形状のものを示したが、第１回折面１ａおよび第２回折面２ａの位置調整が図られているものであればよいため、形状が異なったり、厚みが異なるものであってもよい。   1 to 5, the first diffractive body 1 and the second diffractive body 2 have the same shape, but the positions of the first diffractive surface 1a and the second diffractive surface 2a are adjusted. Since what is necessary is just a thing, a shape may differ and thickness may differ.

また、凹部４の深さや球体１０の大きさは、組み立てる前に第１回折体１と第２回折体２の間に、どのような隙間を設ければ、第１回折体１と第２回折体２とが適切な位置関係となるかを、予め算出した寸法とすればよい。   Further, the depth of the recess 4 and the size of the sphere 10 can be set such that any gap is provided between the first diffractive body 1 and the second diffractive body 2 before assembling. Whether or not the body 2 has an appropriate positional relationship may be a dimension calculated in advance.

また、凹部４は、球体１０と接する面の算術平均粗さＲａが、０．５μｍ以下であってもよい。このような構成であるときには、球体１０に対する接触面積が増加し、微細な振動を受けたとしても球体１０は位置ずれしにくいため、信頼性が向上する。さらに、算術平均粗さＲａが０．２μｍ以下であれば、さらに信頼性が向上する。この算術平均粗さＲａは、ＪＩＳ Ｂ ０６０１：２０１３に準拠して求めればよい。   Further, the concave portion 4 may have an arithmetic average roughness Ra of a surface in contact with the sphere 10 of 0.5 μm or less. With such a configuration, the contact area with the sphere 10 is increased, and the sphere 10 is less likely to be displaced even when subjected to minute vibrations, thereby improving reliability. Furthermore, if arithmetic average roughness Ra is 0.2 micrometer or less, reliability will improve further. The arithmetic average roughness Ra may be obtained in accordance with JIS B 0601: 2013.

また、図５に示すように、断面が三角で、円錐状の凹部４を有する場合には、球体１０は、凹部４の壁面に環状に線接触することになり安定しやすいものとなる。球体１０は、例えば、凹部４と３点以上で接してもよい。なお、３点以上で接するとは、例えば、線で接することも含んでいる。このような構造であるときには、凹部４と球体１０との相対位置が定まりやすくなる。   Further, as shown in FIG. 5, when the cross section is triangular and the conical concave portion 4 is provided, the spherical body 10 is in an annular line contact with the wall surface of the concave portion 4 and is easily stabilized. For example, the sphere 10 may be in contact with the recess 4 at three or more points. In addition, contacting with 3 or more points includes contacting with a line, for example. In such a structure, the relative position between the recess 4 and the sphere 10 is easily determined.

第１対向面１ｃと第２対向面２ｃとの隙間は、０．０５ｍｍ以上０．１５ｍｍ以下としてもよい。このような構造であるときには、第１対向面１ｃおよび第２対向面２ｃとの隙間を小さくしながら、第１対向面１ｃおよび第２対向面２ｃとが直に接触することを抑制することができるとともに、回折面の大型化を図りながらも分光器５０を小型化することができる。   The gap between the first facing surface 1c and the second facing surface 2c may be 0.05 mm or more and 0.15 mm or less. In such a structure, it is possible to suppress direct contact between the first facing surface 1c and the second facing surface 2c while reducing the gap between the first facing surface 1c and the second facing surface 2c. In addition, the spectroscope 50 can be reduced in size while increasing the size of the diffraction surface.

球体１０の直径は、例えば、０．８ｍｍ以上１．２ｍｍ以下であってもよい。また、その表面の算術平均粗さＲａが０．５μｍ以下であるとよい。球体１０の算術平均粗さＲａをこの範囲とすると、第１回折体１および第２回折体２の相対的な位置関係を精度よく制御することができる。   The diameter of the sphere 10 may be, for example, 0.8 mm or more and 1.2 mm or less. The arithmetic average roughness Ra of the surface is preferably 0.5 μm or less. When the arithmetic average roughness Ra of the sphere 10 is within this range, the relative positional relationship between the first diffractive body 1 and the second diffractive body 2 can be accurately controlled.

また、球体１０は、セラミックスからなるため、球体１０が金属からなる場合よりも常温から４００℃までの球体１０の線膨張係数が小さいため、温度変化によって感度や精度が変化することが少ない。   In addition, since the sphere 10 is made of ceramics, the linear expansion coefficient of the sphere 10 from room temperature to 400 ° C. is smaller than that in the case where the sphere 10 is made of metal, so that the sensitivity and accuracy are less likely to change due to temperature changes.

球体１０の主成分としては、例えば、コージェライト、アルミナ、ジルコニア、アルミナとジルコニアの複合物、窒化珪素などが挙げられる。   Examples of the main component of the sphere 10 include cordierite, alumina, zirconia, a composite of alumina and zirconia, and silicon nitride.

枠体３の材質としては、常温から４００℃までの線膨張係数が小さい、線膨張係数が１．５×１０−６／Ｋ以下のコージェライト、チタン酸アルミニウムまたはＬＡＳ等のアルカリ金属アルミノケイ酸塩を主成分とするセラミックスが挙げられる。枠体３が、このような構成であるときには、温度変化に曝されても膨張しにくいため、分光器５０は高い信頼性を有する。 The material of the frame 3 is a cordierite having a low linear expansion coefficient from room temperature to 400 ° C. and a linear expansion coefficient of 1.5 × 10 −6 / K or less, an alkali metal aluminosilicate such as aluminum titanate or LAS. Ceramics mainly composed of When the frame 3 has such a configuration, the spectroscope 50 has high reliability because it hardly expands even when exposed to a temperature change.

第１回折体１および第２回折体２は、例えば、線膨張係数が１．０×１０−６／Ｋ以下のガラスである。 The first diffractive body 1 and the second diffractive body 2 are, for example, glasses having a linear expansion coefficient of 1.0 × 10 −6 / K or less.

ここで、セラミックスにおける主成分とは、着目するセラミックスを構成する成分の合計１００質量％のうち、６０質量％以上を占める成分をいう。セラミックスを構成する成分は、Ｘ線回折装置（ＸＲＤ）を用いて求めればよい。各成分の含有量は、成分を同定した後、蛍光Ｘ線分析装置（ＸＲＦ）またはＩＣＰ発光分光分析装置を用いて、成分を構成する元素の含有量を求め、同定された成分に換算すればよい。   Here, the main component in a ceramic means the component which occupies 60 mass% or more out of the total 100 mass% of the component which comprises the ceramics to which its attention is paid. What is necessary is just to obtain | require the component which comprises ceramics using an X-ray-diffraction apparatus (XRD). The content of each component is obtained by identifying the component, then obtaining the content of the element constituting the component using an X-ray fluorescence analyzer (XRF) or an ICP emission spectroscopic analyzer, and converting it to the identified component. Good.

球体１０や枠体３を構成するセラミックスは、強度および剛性の観点によれば、相対密度は９８％以上である。   The ceramics constituting the sphere 10 and the frame 3 have a relative density of 98% or more from the viewpoint of strength and rigidity.

以下に、本開示の分光器５０について、詳細に説明する。   Hereinafter, the spectroscope 50 according to the present disclosure will be described in detail.

第１回折体１および第２回折体２は、いずれも、例えば、長さが２００ｍｍ、高さが６０ｍｍ、幅が６０ｍｍの直方体である。   Each of the first diffractive body 1 and the second diffractive body 2 is a rectangular parallelepiped having a length of 200 mm, a height of 60 mm, and a width of 60 mm, for example.

枠体３の側板３ｂには、第１回折体１および第２回折体２を固定するための複数のグラブスクリューを備えていてもよい。地震等の不慮の振動等により、第１回折体１および第２回折体２の相対的な位置がずれた場合は、グラブスクリューを回転させて微調整を施すことにより、第１回折体１および第２回折体２の互いのブリーズ面（回折格子）を平行にすればよい。   The side plate 3b of the frame 3 may include a plurality of grab screws for fixing the first diffractive body 1 and the second diffractive body 2. When the relative positions of the first diffractive body 1 and the second diffractive body 2 are shifted due to an unexpected vibration such as an earthquake, the first diffracting body 1 and the first diffracting body 1 and the What is necessary is just to make the breeze surface (diffraction grating) of the 2nd diffractor 2 mutually parallel.

球体１０のような球状体を第１回折体１と第２回折体との間に配置することで、球体１０と第１回折体１や第２回折体との摩擦を小さくすることができるため、付加的に第１回折体１と第２回折体の位置関係を調整する場合でも、スムーズな調整を行うことができる。なお、球体１０は、真球である必要はなく、楕円であってもよい。   By arranging a spherical body such as the spherical body 10 between the first diffractive body 1 and the second diffractive body, friction between the spherical body 10 and the first diffracting body 1 or the second diffracting body can be reduced. Even when the positional relationship between the first diffractive body 1 and the second diffractive body is additionally adjusted, smooth adjustment can be performed. Note that the sphere 10 need not be a true sphere but may be an ellipse.

また、枠体３には、第１回折面１ａや第２回折面２ａのそれぞれの回折面の一部を覆うように固定する留め具が接続されていてもよい。   Moreover, the fastener which fixes so that a part of each diffraction surface of the 1st diffraction surface 1a and the 2nd diffraction surface 2a may be connected to the frame 3 may be connected.

本発明は前述した実施形態に限定されるものではなく、本発明の要旨を逸脱しない範囲において種々の変更、改良、組合せ等が可能である。   The present invention is not limited to the above-described embodiments, and various modifications, improvements, combinations, and the like can be made without departing from the scope of the present invention.

１ 第１回折体
１ａ 第１回折面
１ｂ 第１下わく面
１ｃ 第１対向面
２ 第２回折体
２ａ 第２回折面
２ｂ 第２下面
２ｃ 第２対向面
３ 枠体
３ａ 底板
３ｂ 横板
３ｃ 端板
４ 凹部
１０ 球体
５０ 分光器 DESCRIPTION OF SYMBOLS 1 1st diffractive body 1a 1st diffractive surface 1b 1st lower surface 1c 1st opposing surface 2 2nd diffractive body 2a 2nd diffractive surface 2b 2nd lower surface 2c 2nd opposing surface 3 Frame 3a Bottom plate 3b Horizontal plate 3c End Plate 4 Recess 10 Sphere 50 Spectroscope

Claims (5)

第１回折面を有する第１回折体と、
第２回折面を有する第２回折体と、
前記第１回折面および前記第２回折面が並んで露出するように、前記第１回折体および前記第２回折体を収容する枠体とを備え、
前記第１回折体および前記第２回折体の対向面の少なくともいずれかに凹部を有し、
該凹部よりも突出する、セラミックスからなる球体を有する、分光器。 A first diffractive body having a first diffractive surface;
A second diffractive body having a second diffractive surface;
A frame housing the first diffractive body and the second diffractive body so that the first diffractive surface and the second diffractive surface are exposed side by side;
Having a recess in at least one of the opposing surfaces of the first and second diffractive bodies;
A spectroscope having a spherical body made of ceramics that protrudes from the recess. 前記凹部は、前記球体と接する面の算術平均粗さＲａが０．５μｍ以下である、請求項１に記載の分光器。   The spectroscope according to claim 1, wherein the concave portion has an arithmetic average roughness Ra of a surface in contact with the sphere of 0.5 µm or less. 前記球体は、前記凹部と３点以上で接する、請求項１または２に記載の分光器。   The spectroscope according to claim 1, wherein the sphere contacts the concave portion at three or more points. 前記対向面間の隙間は、０．０５ｍｍ以上０．１５ｍｍ以下である、請求項１乃至３のいずれかに記載の分光器。   The spectroscope according to any one of claims 1 to 3, wherein a gap between the opposing surfaces is 0.05 mm or more and 0.15 mm or less. 前記枠体は、線膨張係数が１．５×１０−６／Ｋ以下のセラミックスからなる、請求項１乃至４のいずれかに記載の分光器。 The spectroscope according to any one of claims 1 to 4, wherein the frame body is made of ceramics having a linear expansion coefficient of 1.5 x 10-6 / K or less.
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