JP2019011237A - Method for manufacturing glass substrate and glass substrate manufacturing apparatus - Google Patents

Abstract

To suppress distortion, bending, breakage, etc. of pipes forming a flow path of molten glass.SOLUTION: In a method for manufacturing a glass substrate, a molten glass processing apparatus is constituted by connecting a plurality of pipes between pipes and the end portion of a melting furnace so as to form a flow path of molten glass between the end portion of the melting furnace and a molding device. A first pipe includes a pipe body and a flange-shaped electrode projecting to the outside of the pipe body and electrically heating the pipe body. The flange-shaped electrode is provided at the end of the pipe body so as to be sandwiched between the pipe body and a second pipe connected to the first pipe. At least in a portion sandwiched between the pipe body and the second pipe, the flange-shaped electrode has an uneven shape where a bulging protrusion and a recessed recess are adjacent to each other along an extending direction of the flow path. In the present method, before a melting step, the first pipe and the second pipe are heated to be thermally expanded, and the uneven shape is sandwiched and deformed by the pipe body and the second pipe to connect the first and second pipes.SELECTED DRAWING: Figure 6

Description

  The present invention relates to a glass substrate manufacturing method and a glass substrate manufacturing apparatus.

When manufacturing a glass substrate, a glass raw material is melted in a melting furnace to produce a molten glass, and then the molten glass is clarified with a clarification tube, and the clarified molten glass is formed into a sheet glass using, for example, a molded body. . The molten glass produced in the melting furnace is sent to the clarification tube through the transfer tube.
Regarding the transfer pipe and the clarification pipe, a transfer pipe and a clarification pipe made of platinum or a platinum alloy are known (Patent Document 1).

  By the way, in the glass substrate manufacturing method, after connecting the melting furnace, the transfer pipe, and the clarification pipe, and after securing the flow path of the molten glass from the clarification pipe to the molding apparatus for producing sheet glass from the molten glass The production of the glass substrate is started. At this time, the transfer pipe and the clarification pipe made of platinum or a platinum alloy are heated to a few hundred degrees, so that they thermally expand. In addition, since the transfer pipe and the clarification pipe are fixed and assembled between the melting furnace and the molding apparatus, the thermal expansion of the transfer pipe and the clarification pipe to extend in the flow direction of the molten glass is restricted, Compressive stress is applied to the transfer pipe and clarification pipe. As a result, the transfer tube and the clarification tube may be bent and eventually broken.

In recent years, SnO ₂ is often used as a fining agent in place of harmful As ₂ O ₃ that has been used as a fining agent in order to reduce environmental burden. SnO ₂ is effective in terms of reducing the environmental load, but the temperature of the molten glass must be set higher than that of As ₂ O ₃ in order to effectively exhibit the fining function. Therefore, in order to heat a molten glass to high temperature, the heating temperature of a transfer pipe and a clarification pipe also becomes high, and the thermal expansion of a transfer pipe and a clarification pipe is also larger than before.
Therefore, it is increasingly desired to prevent the transfer pipe and the clarification pipe from being damaged by thermal expansion after the start of production.

Special table 2008-539162

  Therefore, the present invention relates to a tube forming a flow path of molten glass, more specifically, a distortion of the tube in a molten glass processing apparatus having a plurality of pipes connected to each other, forming a flow path of molten glass, An object of the present invention is to provide a glass substrate manufacturing method and a glass substrate manufacturing apparatus capable of suppressing distortion such as bending and breakage, bending and breakage, and the like.

  The present invention includes a glass substrate manufacturing method and a glass substrate manufacturing apparatus in the following forms (1) to (7).

(1) A method for producing a glass substrate,
A melting process for melting glass raw material in a melting furnace to produce molten glass;
A processing step of processing the molten glass using a molten glass processing apparatus;
A molding step of molding the processed molten glass into a sheet glass using a molding apparatus,
In order to form a flow path of molten glass between the end of the melting furnace and the molding apparatus, the molten glass processing apparatus includes a plurality of tubes, between the tubes, and with the end of the melting furnace. It is composed by being connected between
The first of the tubes is
A tube body;
A flange-shaped electrode that protrudes outside the tube body and energizes and heats the tube body; and
The flange-shaped electrode is disposed at the end of the tube body so as to be sandwiched between the tube body, the second tube connected to the first tube, and the end of the melting furnace. Provided,
The flange-shaped electrode has an uneven shape in which a convex portion and a concave portion that swell along the extending direction of the flow path are adjacent to each other, and the end of the tube main body, the second tube, and the melting furnace. At least a portion sandwiched between the one of the portions,
Prior to the melting step, the first tube is heated and thermally expanded, and the uneven shape is sandwiched between the tube body and the one of the second tube and the end of the melting furnace. And manufacturing the glass substrate, wherein the first tube is connected to the one of the second tube and the end of the melting furnace.
In the method (1), a gap is provided between the pipe body and the one of the second pipe and the end of the melting furnace before the heating of the first pipe. ing.

  In the method of (1), the abutting end portions of the first tube, the second tube, and the one of the end portions of the melting furnace are cooled from the outside. It is preferable that the flow path is formed by the end portion cooling and solidifying the molten glass that passes through the end portion and enters the gap between the end portions.

  In the method (1), when the first tube is heated, it is preferable that at least one of the second tube and the end of the melting furnace is also heated.

(2) The molten glass processing apparatus further includes a heat insulating member disposed around each of the tubes,
The flange-shaped electrode is provided to be sandwiched between a first heat insulating member around the first tube and a second heat insulating member around the second tube,
The flange-shaped electrode has the uneven shape also on an outer peripheral portion of the flange-shaped electrode sandwiched between the first heat insulating member and the second heat insulating member,
When heating the first tube, the first heat insulating member is heated and thermally expanded, and the first heat insulating member and the second heat insulating member are positioned on an outer peripheral portion of the flange-shaped electrode. The method for producing a glass substrate according to (1), wherein the concave and convex portions to be deformed are deformed.

(3) The flange-shaped electrode has a shape in which the concavo-convex shape repeatedly appears in the extending direction of the flange-shaped electrode,
The method for producing a glass substrate according to (1) or (2), wherein a length of the repeating unit of the uneven shape in a direction in which the convex portions and the concave portions are arranged is smaller than a diameter of the tube main body.

(4) The flange-shaped electrode is disposed so as to be sandwiched between the tube body and the second tube,
The tube main body, the flange-shaped electrode, the convex portion, the concave portion, and the concave-convex shape are respectively defined as a first tube main body, a first flange-shaped electrode, a first convex portion, a first concave portion, When we say 1 uneven shape,
The second tube is
A second tube body;
A second flange-shaped electrode protruding outside the second tube body,
The second flange-shaped electrode is provided at an end of the second tube body so as to be sandwiched between the second tube body and the first flange-shaped electrode of the first tube,
The second flange-shaped electrode includes a second convex portion that swells in the extending direction of the flow path, and a second concave portion that is recessed toward the second tube body with respect to the second convex portion. At least in the portion sandwiched between the second tube main body and the first flange-shaped electrode,
When the first tube is heated, the second tube main body and the first flange-shaped electrode are deformed with the second concavo-convex shape interposed therebetween, and the first tube and the second tube are deformed. The method for producing a glass substrate according to any one of (1) to (3), wherein a tube is connected.

(5) A method for producing a glass substrate,
A melting process for melting glass raw material in a melting furnace to produce molten glass;
A processing step of processing the molten glass using a molten glass processing apparatus;
A molding step of molding the processed molten glass into a sheet glass using a molding apparatus,
The molten glass processing device includes a plurality of tubes, between the tubes, and the processing so as to form a flow path of the molten glass between an end of the processing tank connected to the melting furnace and the molding device. Consists of being connected between the ends of the tank,
The first of the tubes is
A tube body;
A flange-shaped electrode that protrudes outside the tube body and energizes and heats the tube body; and
The flange-shaped electrode is disposed at the end of the tube body so as to be sandwiched between the tube body, the second tube connected to the first tube, and the end of the treatment tank. Provided,
The flange-shaped electrode has an uneven shape in which a convex portion and a concave portion that swell along the extending direction of the flow path are adjacent to each other, and the end of the tube body, the second tube, and the treatment tank. At least a portion sandwiched between the one of the portions,
Prior to the melting step, the first tube is heated and thermally expanded, and the uneven shape is sandwiched between the tube main body and the one of the second tube and the end of the treatment tank. And manufacturing the glass substrate, wherein the first tube is connected to the one of the second tube and the end of the treatment tank.
In the method of (5), a gap is provided between the tube main body and the one of the second tube and the end of the treatment tank before the heating of the first tube. ing.

  In the method of (5) above, each of the first tube, the second tube, and the one of the end portions of the processing tank is in contact with each other and is cooled from the outside. It is preferable that the flow path is formed by the end portion cooling and solidifying the molten glass that passes through the end portion and enters the gap between the end portions.

  In the method (5), when the first tube is heated, it is preferable that at least one of the second tube and the end of the treatment tank is also heated.

(6) a melting furnace for melting glass raw material to make molten glass;
A molten glass processing apparatus for processing the molten glass;
A molding apparatus for molding the processed molten glass into a sheet glass,
In order to form a flow path of the molten glass between the end of the melting furnace and the molding apparatus, the molten glass processing apparatus includes a plurality of tubes, between the tubes, and an end of the melting furnace. Composed of being connected between,
The first of the tubes is
A tube body;
A flange-shaped electrode protruding outside the tube body,
The flange-shaped electrode is disposed at the end of the tube body so as to be sandwiched between the tube body, the second tube connected to the first tube, and the end of the melting furnace. Provided,
The flange-shaped electrode has an uneven shape in which a convex portion and a concave portion that swell along the extending direction of the flow path are adjacent to each other, and the end of the tube main body, the second tube, and the melting furnace. At least a portion sandwiched between the one of the portions,
With the first tube thermally expanded, the irregular shape is sandwiched and deformed between the tube main body and the one of the second tube and the end of the melting furnace, The glass substrate manufacturing apparatus, wherein the first tube, the second tube, and the one of the end portions of the melting furnace are connected.
In the apparatus of (6), before the first tube is thermally expanded, a gap is provided between the tube main body and the one of the second tube and the end of the melting furnace. It has been. The first tube is preheated and thermally expanded.

  In the apparatus of (6), the abutting end portions of the first tube, the second tube, and the one of the end portions of the melting furnace are cooled from the outside. It is preferable that the flow path is formed by the end portion cooling and solidifying the molten glass that passes through the end portion and enters the gap between the end portions.

  In the apparatus of (6), when the first tube is thermally expanded, it is preferable that at least one of the second tube and the end portion of the melting furnace is also thermally expanded.

(7) a melting furnace for melting glass raw material to produce molten glass;
A molten glass processing apparatus for processing the molten glass;
A molding apparatus for molding the processed molten glass into a sheet glass,
In order to form a flow path of the molten glass between an end of a treatment tank connected to the melting furnace and the molding apparatus, the molten glass processing apparatus includes a plurality of tubes, the tubes, and the Consists of being connected with the end of the treatment tank,
The first of the tubes is
A tube body;
A flange-shaped electrode protruding outside the tube body,
The flange-shaped electrode is disposed at the end of the tube body so as to be sandwiched between the tube body, the second tube connected to the first tube, and the end of the treatment tank. Provided,
The flange-shaped electrode has an uneven shape in which a convex portion and a concave portion that swell along the extending direction of the flow path are adjacent to each other, and the end of the tube body, the second tube, and the treatment tank. At least a portion sandwiched between the one of the portions,
With the first tube thermally expanded, the irregular shape is sandwiched and deformed between the tube main body and the one of the second tube and the end of the treatment tank, The glass substrate manufacturing apparatus, wherein the first tube, the second tube, and the one of the end portions of the processing tank are connected.
In the apparatus of the above (7), a gap is provided between the pipe body and the one of the second pipe and the end of the treatment tank before thermally expanding the first pipe. It has been. The first tube is preheated and thermally expanded.

  In the apparatus of (7), the abutting end portions of the first tube, the second tube, and the one of the end portions of the processing tank are cooled from the outside. It is preferable that the flow path is formed by the end portion cooling and solidifying the molten glass that passes through the end portion and enters the gap between the end portions.

  In the apparatus of (7), when the first tube is thermally expanded, it is preferable that at least one of the second tube and the end of the processing tank is also thermally expanded.

  According to the present invention, distortion, bending, breakage, etc. of the tube forming the molten glass flow path, more specifically, molten glass treatment having a plurality of mutually connected tubes forming the molten glass flow path In the apparatus, distortion, bending, breakage, etc. of the tube can be suppressed.

It is a figure which shows an example of the process of the manufacturing method of the glass substrate of this embodiment. It is a figure which shows typically an example of the apparatus which performs the melting process-cutting process in this embodiment. (A) is a side view which shows the pipe | tube before an assembly provided with the pipe | tube main body and the flange-shaped electrode, (b) is a side view which shows the pipe | tube of (a) after an assembly. (A) is a front view which shows the flange-shaped electrode shown in FIG. 3, (b) is a front view which shows the modification of a flange-shaped electrode. (A) is a side view which shows another modification of a flange-shaped electrode, (b) is a side view which shows another modification of a flange-shaped electrode. It is a figure explaining the state before the heating at the time of the assembly of the glass supply pipe | tube and clarification pipe | tube in the manufacturing method of the glass plate of this embodiment. It is a figure explaining the state after the heating of the glass supply pipe | tube and clarification pipe | tube shown in FIG. It is a figure explaining the state before the heating at the time of the assembly of the glass supply pipe | tube and clarification pipe | tube in the manufacturing method of the glass plate of a modification. It is a figure explaining the state after the heating of the glass supply pipe | tube and clarification pipe | tube in the assembly shown in FIG.

  Hereinafter, the manufacturing method and glass substrate manufacturing apparatus of the glass substrate of this embodiment are demonstrated.

  Hereinafter, the manufacturing method of the glass substrate of this invention is demonstrated in detail. Drawing 1 is a figure showing an example of a process of a manufacturing method of a glass substrate of this embodiment.

(Overall overview of glass substrate manufacturing method)
The glass substrate manufacturing method includes a melting step (ST1), a clarification step (ST2), a homogenization step (ST3), a supply step (ST4), a forming step (ST5), and a slow cooling step (ST6). And a cutting step (ST7). The manufacturing method of a glass substrate has a molten glass processing process which performs predetermined | prescribed process (clarification, homogenization, supply, etc.) with respect to molten glass, Among the above-mentioned processes, a clarification process (ST2), homogenization The step (ST3) and the supply step (ST4) are each included in the molten glass processing step. In addition, a plurality of glass substrates that have a grinding process, a polishing process, a cleaning process, an inspection process, a packing process, and the like and are stacked in the packing process are transported to a supplier.

The melting step (ST1) is performed in a melting furnace. In a melting furnace, a glass raw material is put into a liquid surface of molten glass stored in a melting furnace and heated to make molten glass. Furthermore, molten glass is flowed toward the downstream process from the outflow port 101a provided in one bottom part of the inner side wall of the melting furnace.
In addition to the method in which electricity flows through the molten glass itself and heats itself by heating, the glass raw material can be melted by supplementing a flame with a burner. A clarifier is added to the glass raw material. SnO ₂ , As ₂ O ₃ , Sb ₂ O _{3 and the} like are known as fining agents, but are not particularly limited. However, it is preferable to use SnO ₂ (tin oxide) as a clarifying agent from the viewpoint of reducing environmental burden.

The clarification step (ST2) is performed at least in the clarification tube. In the clarification process, when the molten glass in the clarification tube is heated, the bubbles containing O ₂ , CO ₂ or SO ₂ contained in the molten glass absorb O ₂ produced by the reductive reaction of the clarifier. The bubbles rise to the surface of the molten glass and are released. Furthermore, in the clarification step, the reducing substance obtained by the reduction reaction of the clarifier undergoes an oxidation reaction by lowering the temperature of the molten glass. Thereby, gas components such as O ₂ in the foam remaining in the molten glass are reabsorbed in the molten glass, and the foam disappears. The oxidation reaction and reduction reaction by the fining agent are performed by controlling the temperature of the molten glass. In the clarification step, a reduced pressure defoaming method can be used in which a space in a reduced pressure atmosphere is formed in a clarified tube, and bubbles existing in the molten glass are grown in a reduced pressure atmosphere and defoamed. In this case, it is effective in that no clarifier is used. In the clarification step, a clarification method using tin oxide as a clarifier is used.

In the homogenization step (ST3), the glass component is homogenized by stirring the molten glass in the stirring tank supplied through the pipe extending from the clarification pipe using a stirrer. Thereby, the composition unevenness of the glass which is a cause of striae or the like can be reduced.
In the supply step (ST4), the molten glass is supplied to the forming apparatus through a pipe extending from the stirring tank.

In the molding apparatus, a molding step (ST5) and a slow cooling step (ST6) are performed.
In the forming step (ST5), the molten glass is formed into a sheet glass to make a flow of the sheet glass. For forming, an overflow downdraw method is used.
In the slow cooling step (ST6), the sheet glass that has been formed and flowed is cooled to a desired thickness, so that internal distortion does not occur and warpage does not occur.
In the cutting step (ST7), the sheet glass supplied from the forming device is cut into a predetermined length in the cutting device to obtain a plate-like glass substrate. The cut glass substrate is further cut into a predetermined size to produce a glass substrate having a target size. After this, the end surface of the glass substrate is ground and polished, the glass substrate is cleaned, and after checking for abnormal defects such as bubbles, the glass substrate that has passed the inspection is packed as the final product. The

Drawing 2 is a figure showing typically an example of a glass substrate manufacture device which performs a melting process (ST1)-cutting process (ST7) in this embodiment. As shown in FIG. 2, the apparatus mainly includes a melting apparatus 100, a forming apparatus 200, and a cutting apparatus 300. The melting apparatus 100 includes a melting furnace 101, a clarification tube 102, a stirring tank 103, and glass supply tubes 104, 105, and 106. The glass substrate manufacturing apparatus has a molten glass processing apparatus that performs a predetermined treatment on the molten glass, and the clarification tube 102, the stirring tank 103, and the glass supply tubes 104, 105, and 106 described above are respectively molten glass. Included in processing equipment.
In the melting apparatus 100 shown in FIG. 2, the glass raw material is charged using the bucket 101d. In the clarification tube 102, the temperature of the molten glass MG is adjusted, and the clarification of the molten glass MG is performed using the oxidation-reduction reaction of the clarifier. The clarification tube 102 is configured by connecting one tube or a plurality of tubes to each other. Further, in the stirring vessel 103, the molten glass MG is stirred and homogenized by the stirrer 103a. In the forming apparatus 200, the sheet glass SG is formed from the molten glass MG by the overflow down draw method using the formed body 210.
In FIG. 2, the glass supply pipe 104 is a transfer pipe that connects the melting furnace 101 and the clarification pipe 102, but the glass supply pipe 104 connects the treatment tank connected to the melting furnace 101 and the clarification pipe 102. It may be a transfer tube. As a processing tank, while supplying oxygen gas to molten glass, the processing tank which lowers the temperature of molten glass MG and makes a fining agent absorb a part of said oxygen gas is mentioned, for example.

(Tube of molten glass processing equipment)
In order to form a molten glass flow path between the end of melting furnace 101 and molding apparatus 200, the molten glass processing apparatus includes a plurality of tubes, between the tubes, and between the ends of melting furnace 101. It is configured by being connected. Examples of such a tube include the clarification tube 102, the stirring tank 103, and the glass supply tubes 104, 105, and 106 described above. These tubes are made of platinum or a platinum alloy, but may be made of reinforced platinum or reinforced platinum alloy. Reinforced platinum or a reinforced platinum alloy is a material in which metal oxide particles such as Al ₂ O ₃ , ZrO _2, or Y ₂ O ₃ are dispersed in platinum or a platinum alloy.
Moreover, each pipe | tube which comprises a clarification pipe | tube in case a clarification pipe | tube consists of a some pipe | tube is mentioned as said pipe | tube which forms the flow path of molten glass.

  At least some of the tubes of the molten glass processing apparatus include a tube main body, and a flange-shaped electrode that protrudes outside the tube main body and energizes and heats the tube main body. Examples of such a tube include a clarification tube 102 and glass supply tubes 104 and 105, but the agitation tank 103 and the glass supply tube 106 may be formed of a tube including a tube body and a flange-shaped electrode. .

Hereinafter, a clarification tube 102 will be described as an example of a tube having a tube body and a flange-shaped electrode.
FIG. 3 (a) is a side view showing the clarification tube 102 before assembling provided with the clarification tube main body and the flange-shaped electrode, and FIG. 3 (b) is the clarification tube of FIG. 3 (a) after assembling. FIG.

The clarification tube 102 includes a clarification tube main body 102c and electrodes 102a and 102b. The electrodes 102a and 102b are attached to both ends of the clarification tube main body 102c in the extending direction by welding or the like. Among these, the electrode 102 a is provided at one end of the clarification tube main body 102 c so as to be sandwiched between the clarification tube main body 102 c and the glass supply tube 104. The electrode 102b is provided at the other end of the clarification tube main body 102c so as to be sandwiched between the clarification tube main body 102c and the glass supply tube 105. The clarification tube main body 102c is a member having a cylindrical shape or a rectangular tube shape. Specifically, the one end and the other end of the clarification tube main body 102c are end faces facing the extending direction of the clarification tube main body 102c.
The electrodes 102a and 102b are connected to a power supply device (not shown) and energize and heat the clarification tube main body 102c. The electrodes 102a and 102b have a flange shape protruding outside (outer peripheral side) of the clarification tube main body 102c, and are cooled from the outside of the tube.
Although not shown, the clarification tube 102 is provided with an opening that communicates the gas phase in the inner space of the clarification tube 102 and the outside of the tube.

  The electrodes 102a and 102b have an uneven shape 124. The concavo-convex shape 124 is a shape in which the convex portion 124a and the concave portion 124b are adjacent to each other. The convex portion 124a is a portion that swells from the end of the clarification tube main body 102c along the extending direction of the flow path of the molten glass (the extension direction of the clarification tube main body 102c in FIG. 3). The recessed part 124b is a part that is recessed (along the extending direction) on the clarification tube main body 102c side with respect to the protruding part 124a. In the example shown in FIG. 3, the uneven shape 124 is formed in all parts of the electrodes 102 a and 102 b, but is formed at least in a part sandwiched between the clarification tube main body 102 c and the glass supply tubes 104 and 105. Just do it. In the drawings after FIG. 3, the length of the repeating unit of unevenness, the height difference of the unevenness, and the thickness of the plate-like member, which will be described later, are exaggerated for easy understanding.

FIG. 4A is a front view showing the electrode 102a shown in FIG. 3, and FIG. 4B is a front view showing a modification of the electrode 102a.
In the example shown in FIG. 3, the concave and convex shapes 124 of the electrodes 102a and 102b are, as shown in FIG. 4A, the maximum protruding position of the convex portion 124a indicated by a thin straight line and the maximum concave position of the concave portion 124b indicated by a thick straight line. 4 extend in parallel with each other and are alternately arranged in the vertical direction of FIG. 4, but as shown in FIG. 4B, the maximum projecting position and the maximum recess position extend radially, and the periphery of the electrodes 102a and 102b. The shape may be alternately arranged in the direction.

  Further, in the example shown in FIG. 3A, the concavo-convex shape 124 is a corrugated shape in which the convex portion 124a and the concave portion 124b are curved, but is not limited to such a form. For example, as shown in FIG. As shown, the zigzag shape in which the convex portions 124a and the concave portions 124b are bent may be used, and as shown in FIG. 5B, a rectangular wave shape may be used. Fig.5 (a) is a side view which shows another modification of the electrode 102a, and FIG.5 (b) is a side view which shows another modification of the electrode 102a.

  The electrodes 102a and 102b having the concavo-convex shape 124 are produced by, for example, bending a plate-like member so that the concavo-convex shape 124 described above appears. The plate-like member is made of, for example, platinum or a platinum alloy, and has a thickness of about several millimeters, for example. When the concavo-convex shape 124 is pressed from both sides in the thickness direction of the electrodes 102a and 102b, the concavo-convex shape 124 can be plastically deformed so that the bulge of the convex portion 124a and the dent of the concave portion 124b become small. For example, in the example shown in FIG. 3B, the concavo-convex shape 124 is sandwiched between the clarification tube main body 102c and the glass supply tubes 104 and 105 and is plastically deformed so as to extend in the vertical direction.

The example in which both the electrodes 102a and 102b of the clarification tube 102 have the concavo-convex shape 124 has been described above, but the concavo-convex shape 124 may be provided only in one of the electrodes.
Moreover, although the clarification pipe | tube 102 was demonstrated to the example as a pipe | tube provided with the pipe | tube main body and the flange-shaped electrode, such a pipe | tube is not restricted to the clarification pipe | tube 102, For example, it is glass supply pipes 104 and 105, Also good. For example, in the glass supply pipe 104, when an electrode having a concavo-convex shape is provided at the end connected to the end of the melting furnace 101, the concavo-convex shape, as will be described later, It is sandwiched between the end of the melting furnace 101 and deformed.

(Assembly of glass substrate manufacturing equipment)
Next, the assembly of the glass substrate manufacturing apparatus, particularly the assembly of the melting furnace 101, the glass supply pipe 104, and the clarification pipe 102 will be described.
FIG. 6 is a view for explaining assembly of the glass supply pipe 104 and the clarification pipe 102 with respect to the melting furnace 101 of the present embodiment. In addition, since the same process is performed also when assembling the glass supply pipe | tube 104 and the clarification pipe | tube 102 with respect to the processing tank 110, description is abbreviate | omitted.

  The melting furnace 101 is capable of storing the molten glass MG with a refractory material such as a refractory brick, and creating a high temperature atmosphere by heating the gas phase with a burner or the like, and a lower tank provided with an electrode for energizing and heating the molten glass. It is built at the manufacturing site to have a tank.

  On the other hand, the glass supply pipe 104 is manufactured at a factory or the like and is carried into the manufacturing site. Similarly, the clarification pipe | tube 102 is produced in a factory etc. and carried in to a manufacturing site. At this time, the glass supply tube 104 and the clarification tube 102 are arranged as shown in FIG. 6 in consideration of thermal expansion when the glass supply tube 104 and the clarification tube 102 are heated to a predetermined temperature (for example, 1000 ° C. or more). In addition, the end portion of the melting furnace 101, both end portions of the glass supply tube 104, and the end portion of the clarification tube 102 are arranged with a gap so as not to contact each other in advance. Thermal expansion refers to thermal expansion in the tube extending direction (length direction). In FIG. 6, electrodes 104 a and 104 b are disposed at both ends of the glass supply tube 104, and an electrode 102 a is disposed at the end of the clarification tube 102 facing the glass supply tube 104.

FIG. 6 shows the bottom of the melting furnace 101 and a part of the side wall. The electrode 104a of the glass supply tube 104 is separated from the end of the outlet of the melting furnace 101, specifically, the end 101b of the outlet 101a of the molten glass MG on the side wall so as not to contact. .
The glass supply pipe 104 is covered with alumina cement 114a, and heat insulating members 114b such as refractory bricks are stacked on the outside thereof. Thereby, the transfer pipe unit 114 is formed. Similarly, the clarification pipe | tube 102 is coat | covered with the alumina cement 112a, and the heat insulation members 112b, such as a refractory brick, are piled up on the outer side. Thereby, a clarification tube unit 112 is formed.
As described above, the transfer pipe unit 114 and the clarification pipe unit 112 are connected to the ends of the melting furnace 101, the glass supply pipe 104, and the clarification pipe 102 only by thermal expansion by heating at a predetermined temperature. Located at the manufacturing site. That is, between the end portion 101b of the outlet 101a of the molten glass MG of the melting furnace 101 and the electrode 104a of the glass supply tube 104, and between the electrode 104b of the glass supply tube 104 and the electrode 102a of the clarification tube 102, They are arranged with a gap in consideration of the amount of thermal expansion described above.

In this state, the melting furnace 101, the transfer pipe unit 114, and the clarification pipe unit 112 are energized from outside by a heating device (not shown) and a heater electrode (not shown) provided around the glass supply pipe 104 and the clarification pipe 102. The melting furnace 101, the glass supply pipe 104, and the clarification pipe 102 are heated to a predetermined temperature. At this time, the electrodes 104b, 102a of the glass supply tube 104 and the clarification tube 102 facing each other are brought into contact with each other due to thermal expansion (lateral arrows in FIG. 6) generated in the glass supply tube 104 and the clarification tube 102. The gap between the electrode 102a is eliminated, and the electrode 104b and the electrode 102a are sandwiched between the glass supply tube main body 104c and the clarification tube main body 102c, and the concave and convex portions of the concavo-convex shape are deformed so as to be crushed. 102 and the glass supply pipe 104 are connected. Further, the electrodes 101b and 104a facing each other in the melting furnace 101 and the glass supply pipe 104 are in contact with each other, there is no gap between the end 101b and the electrode 104a, and the electrode 104a is connected to the end 101b and the glass supply pipe main body. The concave portion and the convex portion of the concavo-convex shape are deformed so as to be crushed by being sandwiched by 104c, and the end portion 101b and the glass supply pipe 104 are connected.
Further, the heat insulating members 114b and 112b are heated by heat conduction from the glass supply pipe 104 and the clarification pipe 102 heated as described above. The heat insulating members 114b and 112b can be heated by a heater (not shown) provided around the heat insulating members 114b and 112a.

  In this embodiment, the melting furnace 101, the glass supply pipe 104, and the clarification pipe 102 are heated and assembled, but the glass supply pipe 104 is heated alone, or the glass supply pipe 104 and the clarification pipe 102 are heated, It is also possible to assemble the both ends of the thermally expanded glass supply pipe 104 (first pipe) in contact with the end of the melting furnace 101 and the end of the refining pipe 102 (second pipe). As described above, the heating may be performed by heating the transfer tube unit 114 including the glass supply tube 104 alone, or alternatively, the transfer tube unit 114 including the glass supply tube 104 and the clarification tube including the clarification tube 102. The unit 112 may be heated.

Thus, as shown in FIG. 7, the end of the melting furnace 101 and the glass supply pipe 104 are connected, and the glass supply pipe 104 and the clarification pipe 102 are connected. At this time, a small gap exists between the end portion 101b of the melting furnace 101 and the glass supply pipe main body and the deformed electrode 104a. Similarly, there is a small gap between the glass supply tube main body, the clarification tube main body, and the deformed electrodes 104b and 102a.
After the end portion of the melting furnace 101, the glass supply pipe 104, and the clarification pipe 102 are connected, the glass raw material is supplied to the melting furnace 101 while the high temperature state of the melting furnace 101, the transfer pipe unit 114, and the clarification pipe unit 112 is maintained. And a glass raw material is melted by a burner and an electrode (not shown) to produce a molten glass MG.
In this state, the outlet 101a is opened, and the molten glass MG stored in the melting furnace 101 starts to flow from the outlet 101a to the glass supply pipe 104 and further to the clarification pipe 102. The molten glass MG is heated to, for example, 1500 to 1700 ° C. by a heater (not shown) provided in the glass supply pipe 104 and the clarification pipe 102. And when molten glass MG passes the edge part which contact | abutted, molten glass MG approachs the said space | gap. Since the electrodes 104a, 104b, and 102a have a flange shape and are easily cooled from the outside of the tube, the molten glass MG entering the gap is easily cooled and solidified to fill the gap. In this way, a flow path from the melting furnace 101 to the glass supply pipe 104 and further to the clarification pipe 102, that is, a flow path without leakage of the molten glass MG is formed.

Conventionally, in a method of assembling a melting furnace, a transfer pipe, and a clarification pipe, for example, considering the thermal expansion of the transfer pipe and the clarification pipe so that they contact each other without gap when they are heated and thermally expanded, In some cases, a gap is provided. However, the amount of thermal expansion of the melting furnace, the transfer tube, and the clarification tube varies depending on the operating conditions such as the temperature of the molten glass and is difficult to predict accurately. In addition, it is difficult to accurately arrange the melting furnace, the transfer pipe, and the clarification pipe according to the gap determined in consideration of thermal expansion. For this reason, when the assembly is actually performed, there is often a deviation between the thermal expansion amount of the transfer pipe and the clarification pipe and the gap provided between the melting furnace, the transfer pipe and the clarification pipe before the assembly. . In particular, in order to avoid such a situation, the molten glass may leak if the transfer pipe and the clarification pipe do not have enough thermal expansion and the gap provided before assembly is not blocked. In many cases, the gap between the furnace, the transfer pipe, and the clarification pipe is set short. For this reason, the thermal expansion of the transfer tube and the clarification tube is restricted, compressive stress is applied to the transfer tube and the clarification tube, and the transfer tube and the clarification tube may be distorted, bent, and eventually damaged.
In the present embodiment, as described above, since the uneven shape 124 of the electrodes 104a, 104b, and 102b can be deformed in the direction along the flow path, the deformation amount (deformation allowance) of these uneven shapes 124 is taken into consideration. , A gap provided between the melting furnace 101, the glass supply tube main body 104c, and the clarification tube main body 102c, the amount of thermal expansion of the glass supply tube main body 104c, the amount of thermal expansion of the clarification tube main body 102c, and an electrode having no uneven shape ( It can be set to a length with a margin that is larger than the total thickness of the plate-like members. For this reason, thermal expansion of the glass supply tube 104 and the clarification tube 102 is restrained, and it is possible to avoid applying compressive stress to the glass supply tube 104 and the clarification tube 102. Damage or the like can be suppressed.
In particular, when the electrodes having the concavo-convex shape 124 are arranged at both the ends of the glass supply pipe main body 104c and the clarification tube main body 102c facing each other like the electrodes 104b and 102a, the deformation amount of the concavo-convex shape 124 is reduced. Since the total is large, the above-mentioned gap provided before assembly can be set to a length with more margin, and the assembly of the apparatus can be performed more easily.

In the present embodiment, the heat insulating member 114b (first heat insulating member) around the glass supply tube 104 and the heat insulating member 112b (second heat insulating member) around the clarification tube 102 sandwich the electrodes 102a and 104b therebetween. Be placed. At this time, since the uneven shape 124 of the electrodes 102a and 104b is also formed on the outer periphery of the electrodes 102a and 104b sandwiched between the heat insulating member 114b and the heat insulating member 112b, the amount of thermal expansion of the heat insulating members 114b and 112b is glass. Even if it is smaller than the thermal expansion amount of the supply pipe 104 and the clarification pipe 102, the uneven shape 124 of the electrodes 104b and 102a is slightly deformed by being sandwiched between the heat insulating members 114b and 112b, and the electrodes 104b and 102a can be supported from both sides. it can.
If there is a gap between the heat insulating member 114b located on the outer periphery of the electrodes 104b and 102a and the heat insulating member 112b, for example, when the clarification tube 102 and the glass supply tube 104 are damaged by being maintained at a high temperature, There is a possibility that the molten glass MG leaks from the damaged portion of the clarification tube 102 and the glass supply tube 104 to the outside through this gap. In this embodiment, an uneven shape 124 is also provided on the outer peripheral portion of the electrodes 104b and 102a, and sandwiched between the heat insulating members 114b and 112b and supported from both sides, so that the gap between the heat insulating member 114b and the heat insulating member 112b is eliminated. Leakage of glass MG can be prevented.
In order to increase the effect of supporting the electrodes 104b, 102a from both sides by the heat insulating members 114b, 112b, the uneven shape of the portions of the electrodes 104b, 102a sandwiched between the heat insulating members 114b, 112b is different from that of the glass supply pipe main body 104c. Compared to the concave / convex shape of the portion sandwiched between the tube main body 102c, at least one of the length L of the concave / convex repeating unit (the period of the concave / convex) and the height difference of the concave / convex (the amplitude of the concave / convex) is greater. Is also preferable.

The electrodes 104a, 104b, and 102a preferably have a shape in which the concavo-convex shape 124 appears repeatedly in the extending direction of the electrode, as in the examples shown in FIGS. By such a form, it can be equally sandwiched between the melting furnace 101 and the glass supply pipe 104 and between the glass supply pipe 104 and the clarification pipe 102 and can be deformed. On the other hand, the portions of the electrodes 104a, 104b, and 102a excluding the portion sandwiched between the melting furnace 101 and the glass supply tube 104 and the portion sandwiched between the glass supply tube 104 and the clarification tube 102 are flat. If the shape is flat, the flat portion may be distorted, cracked, broken, or the like so as to follow the deformation of the concavo-convex shape of the sandwiched portion.
In the case where the electrodes 104a, 104b, and 102a have a shape in which the concavo-convex shape 124 appears repeatedly, the length L of the repeating unit (the concavo-convex cycle) of the concavo-convex shape 124 in the direction in which the convex portions 124a and the concave portions 124b are arranged (see FIG. 4 (a) and FIG. 4 (b)) are preferably smaller than the diameter of the tube body provided with the electrodes. Since the length L of the repeating unit is smaller than the diameter, the gap remaining between the tube body and the electrode after connecting the tubes can be reduced. The length L of the repeating unit is preferably not more than 0.5 times the diameter of the tube body.
Note that the length L of the repeating unit when the uneven shape 124 is repeated in a non-linear manner is an average value of the minimum length and the maximum length. For example, as in the example shown in FIG. 4B, the length L of the repeating unit when the concavo-convex shape 124 is repeated in the circumferential direction is equal to the circumferential length at the inner circumferential end of the electrode 102a and the electrode 102a. It is the average value of the circumferential direction length in the edge of the outer peripheral side.

The height of the concavo-convex shape of the concavo-convex shape 124 (the height difference of the concavo-convex along the extending direction of the flow path of the molten glass) can be set as appropriate. If the height difference of the unevenness (distance between the maximum protruding position and the maximum recessed position) is too small, the deformation amount of the electrodes 104a, 104b, 102a is reduced, and between the melting furnace 101, the glass supply pipe body 104c, and the clarification tube body 102c. It is impossible to increase the gap provided in the case. For this reason, the thermal expansion of the glass supply tube 104 and the clarification tube 102 is restrained, and a compressive stress is applied to the glass supply tube 104 and the clarification tube 102, and the glass supply tube 104 and the clarification tube 102 are distorted, curved, and eventually damaged. There is a case. On the other hand, if the height difference of the unevenness is too large, it becomes difficult to provide a cooling pipe around the electrodes 104a, 104b, and 102a. Therefore, the electrodes 104a, 104b, and 102a cannot be sufficiently cooled, and the electrodes 104a, 104b, 104b and 102a may be damaged. The cooling pipe is configured such that the tubular member is in contact with the outer peripheral edges of the electrodes 104a, 104b, and 102a and is annularly surrounded, and is connected to the refrigerant supply device, such as water supplied from the refrigerant supply device. As the refrigerant passes through the cooling pipe, the electrode in contact with the cooling pipe is cooled.
Further, the ease of deformation of the electrodes 104a, 104b, and 102a (the hardness of the electrodes) when the pressure contact force is applied from both sides of the electrodes 104a, 104b, and 102a can be set as appropriate. The hardness of the electrode is such that the deformation amount of the electrodes 104a, 104b, 102a, the buffering action that relaxes the force with which the adjacent tubes are pressed against each other, and the durability against damage caused by the electrodes 104a, 104b, 102a being maintained at high temperatures. Influence. Considering these points, the length L, height difference, and hardness of the electrodes 104a, 104b, and 102a can be set as appropriate. In particular, from the viewpoint of securing a buffering action, the length L and the height difference of the unevenness are each 0.05 to 5% of the length of the tube body to which the electrode having the uneven shape is attached, preferably Is set to a length of 0.1 to 2%. The hardness of the electrode can be set, for example, by appropriately selecting the material, thickness, shape, and the like of the plate-like member that becomes the electrode. Of these, the thickness of the plate member is 0.001 to 0.5%, preferably 0.005 to 0.3% of the length of the tube main body to which the electrode formed from the plate member is attached. It is preferable that

(Modification)
FIG. 8 is a diagram for explaining an assembly modification of the glass substrate manufacturing apparatus. The structure of the melting furnace 101, the transfer pipe unit 114, and the clarification pipe unit 112 shown in FIG. 8 is the same as the structure of the said embodiment. Here, a description will be given focusing on the difference from the above embodiment.

In the modification, before heating the melting furnace 101, the glass supply pipe 104, and the clarification pipe 102, the one electrode 104a of the glass supply pipe 104 and the melting furnace 101 are compared with the gap before assembly described in the above embodiment. A wide gap is provided between the end portion 101 b and between the other electrode 104 b of the glass supply tube 104 and the electrode 102 a of the clarification tube 102.
The transfer tube unit 114 and the clarification tube unit 112 are configured to be movable with respect to the melting furnace 101. Specifically, a roller 114c and a roller 112c that can move on the floor of the manufacturing site are provided at the bottoms of the transfer tube unit 114 and the clarification tube unit 112, respectively.

In the state shown in FIG. 8, in the melting furnace 101, the transfer pipe unit 114, and the clarification pipe unit 112, the glass supply pipe 104 and the clarification pipe 102 are heated to a predetermined temperature (for example, 1000 ° C. or higher). However, the gap before heating is wide enough to remain after heating the glass supply tube 104 and the fining tube 102. FIG. 9 is a diagram for explaining a state after heating of the glass supply tube 104 and the fining tube 102 of the modification. In FIG. 9, the gaps Z ₁ and Z ₂ remain.
The transfer pipe unit 114 including the glass supply pipe 104 thermally expanded by heating is moved toward the melting furnace 101 by rolling the roller 114c using a drive mechanism (not shown), so that the electrode 102a and the electrode 104b are in contact with each other. The electrode 102a and the electrode 104b are sandwiched between the clarification tube main body 102c and the glass supply tube main body 104c, and are deformed so that the concavo-convex recesses and protrusions are crushed, and the clarification tube 102 and the glass supply tube 104 are connected. Further, the clarification tube unit 112 including the clarification tube 102 is moved toward the glass supply tube 104 by rolling the roller 112c via a drive mechanism (not shown), so that the end portion 101b and the electrode 104a come into contact with each other. Is sandwiched between the melting furnace 101 and the glass supply pipe main body 104c and deformed so that the concave and convex portions of the concavo-convex shape are crushed, and the end portion 101b and the electrode 104a are connected.

  After the end of the melting furnace 101, the glass supply pipe 104, and the clarification pipe 102 are connected, the molten glass MG is produced in the melting furnace 101 and starts flowing through the glass supply pipe 104 and the clarification pipe 102 as in the above embodiment. . And when the molten glass MG passes through the mutually abutting end portions of the melting furnace 101, the transfer tube unit 114, and the clarification tube unit 112, the molten glass MG enters a gap existing between the abutting end portions, The void is filled by cooling and solidifying. In this way, a flow path from the melting furnace 101 to the glass supply pipe 104 and further to the clarification pipe 102 where the molten glass MG does not leak is formed.

  In the modification, it is not necessary to provide a gap between the ends of the melting furnace 101, the glass supply tube 104, and the clarification tube 102 in consideration of the thermal expansion of the glass supply tube 104 and the clarification tube 102. Easy to do. Further, in the modification, at least the glass supply pipe 104 is in contact with the ends in a state where the glass supply pipe 104 is sufficiently thermally expanded by heating, so that during the production of the glass substrate, the distortion, curvature, Damage or the like can be more effectively suppressed as compared to the above embodiment.

  As mentioned above, although the example which assembles the glass supply pipe | tube 104 and the clarification pipe | tube 102 with respect to the melting furnace 101 was demonstrated, for example, the case where the clarification pipe | tube 102, the glass supply pipe | tube 105, the stirring tank 103, the glass supply pipe | tube 106, and the molded object 210 are assembled. The same connection can also be made when assembling the clarification tube 102 composed of a plurality of tubes. On the other hand, the assembly of the clarification tube 102, the glass supply tube 105, the stirring tank 103, the glass supply tube 106, the molded body 210, and the assembly of the clarification tube 102 composed of a plurality of tubes are connected by welding or special welding. May be performed.

(Glass substrate)
Although the magnitude | size of the glass substrate manufactured in this embodiment is not restrict | limited in particular, For example, each of a vertical dimension and a horizontal dimension is 500 mm-3500mm, 1500mm-3500mm, 1800-3500mm, 2000mm-3500mm, and 2000mm-3500mm It is preferable that
The thickness of the glass substrate is, for example, 0.1 to 1.1 mm, more preferably a very thin rectangular plate of 0.75 mm or less, for example, 0.55 mm or less, and further 0.45 mm or less. Thickness is more preferred. The lower limit value of the thickness of the glass substrate is preferably 0.15 mm, and more preferably 0.25 mm.

<Glass composition>
As such a glass substrate, the glass substrate of the following glass compositions is illustrated. That is, the raw material of molten glass is prepared so that the glass substrate of the following glass compositions is manufactured.
SiO ₂ 55~80 mol%,
Al ₂ O ₃ 8-20 mol%,
B ₂ O ₃ 0 to 12 mol%,
RO 0 to 17 mol% (RO is the total amount of MgO, CaO, SrO and BaO).

SiO ₂ is preferably 60 to 75 mol%, and more preferably 63 to 72 mol%, from the viewpoint of reducing the heat shrinkage rate.
Among RO, it is preferable that MgO is 0-10 mol%, CaO is 0-15 mol%, SrO is 0-10%, and BaO is 0-10%.

Further, at least SiO ₂ , Al ₂ O ₃ , B ₂ O ₃ , and RO are included, and the molar ratio ((2 × SiO ₂ ) + Al ₂ O ₃ ) / ((2 × B ₂ O ₃ ) + RO) is 4. The glass which is 5 or more may be sufficient. In addition, it is preferable that at least one of MgO, CaO, SrO, and BaO is included, and the molar ratio (BaO + SrO) / RO is 0.1 or more.

The total content of 2-fold and mol% of RO for the content of mol% of B ₂ O ₃ is 30 mol% or less, it is preferred that preferably 10 to 30 mol%.
Moreover, 0 mol% or more and 0.4 mol% or less may be sufficient as the content rate of the alkali metal oxide in the glass substrate of the said glass composition.
Further, it contains 0.05 to 1.5 mol% of metal oxides (tin oxide and iron oxide) whose valence fluctuates in the glass, and substantially contains As ₂ O ₃ , Sb ₂ O ₃ and PbO. It is not essential but optional.

Moreover, it is preferable to use a non-alkali boroaluminosilicate glass or a trace amount of alkali-containing glass for the glass substrate produced by the present embodiment.
It is preferable that the glass substrate manufactured by this embodiment consists of an alkali free glass containing the following compositions, for example.
The following is mentioned as a glass composition of the glass substrate manufactured by this embodiment (mass% display), for example.
SiO _2: 50~70% _{(preferably, 57~64%), Al 2 O} 3: 5~25% ( _{preferably, 12~18%), B 2 O} 3: 0~15% ( preferably, 6 ~ 13%), and may optionally contain the following composition. As optional components, MgO: 0 to 10% (preferably 0.5 to 4%), CaO: 0 to 20% (preferably 3 to 7%), SrO: 0 to 20% (preferably, from 0.5 to 8%, more preferably 3~7%), BaO: 0~10% ( preferably 0-3%, more preferably _{0~1%), ZrO 2: 0~10} % ( preferably 0 to 4%, more preferably 0 to 1%). Furthermore, it is more preferable that R ′ ₂ O: more than 0.10% and 2.0% or less (provided that R ′ is at least one selected from Li, Na, and K).

_{Alternatively,} SiO 2: _{50~70% (preferably, 55~65%), B 2 O} 3: 0~10% ( _{preferably, 0~5%, 1.3~5%),} Al 2 O 3: 10-25% (preferably 16-22%), MgO: 0-10% (preferably 0.5-4%), CaO: 0-20% (preferably 2-10%, 2-6 %), SrO: 0 to 20% (preferably 0 to 4%, 0.4 to 3%), BaO: 0 to 15% (preferably 4 to 11%), RO: 5 to 20% (preferably Is preferably 8 to 20%, 14 to 19%) (wherein R is at least one selected from Mg, Ca, Sr and Ba). Furthermore, it is more preferable that R ′ ₂ O contains more than 0.10% and 2.0% or less (provided that R ′ is at least one selected from Li, Na and K).

<Young's modulus>
As a Young's modulus of the glass substrate manufactured by this embodiment, 72 GPa or more is preferable, for example, 75 GPa or more is more preferable, and 77 GPa or more is still more preferable.

<Strain point>
As a distortion rate of the glass substrate manufactured by this embodiment, 650 degreeC or more is preferable, for example, 680 degreeC or more is more preferable, 700 degreeC or more and 720 degreeC or more are still more preferable.

<Heat shrinkage>
The thermal contraction rate of the glass substrate manufactured by this embodiment is, for example, 50 ppm or less, preferably 40 ppm or less, more preferably 30 ppm or less, and even more preferably 20 ppm or less.

The glass substrate manufactured in this embodiment is suitable as a glass substrate for a display including a glass substrate for a flat panel display and a glass substrate for a curved panel display. For example, a glass substrate for a liquid crystal display or a glass for an organic EL display It is suitable as a substrate. Furthermore, the glass substrate manufactured in this embodiment is a glass substrate for an oxide semiconductor display that uses an oxide semiconductor such as IGZO (indium, gallium, zinc, oxygen), and LTPS (low It is suitable for a glass substrate for LTPS display using a (temperature polysilicon) semiconductor.
Moreover, the glass substrate manufactured by this embodiment is applicable also to a cover glass, the glass for magnetic discs, the glass substrate for solar cells, etc.

  As described above, the glass substrate manufacturing apparatus and the glass substrate manufacturing method of the present invention have been described in detail. However, the present invention is not limited to the above-described embodiment, and various improvements and modifications can be made without departing from the gist of the present invention. Of course.

DESCRIPTION OF SYMBOLS 100 Melting apparatus 101 Melting furnace 101a Outlet 101b End part 101d Bucket 102 Clarification pipe | tube 102a, 104a, 104b Electrode 103 Stirrer tank 103a Stirrer 104, 105, 106 Glass supply pipe 104c Pipe extension part 112 Clarification pipe unit 112a, 114a Alumina cement 112b 114b Heat insulation member 114 Transfer pipe unit 124 Concave and convex shape 124a Convex part 124b Concave part 200 Molding device 210 Molded body 300 Cutting device

Claims (7)

A method of manufacturing a glass substrate,
A melting process for melting glass raw material in a melting furnace to produce molten glass;
A processing step of processing the molten glass using a molten glass processing apparatus;
A molding step of molding the processed molten glass into a sheet glass using a molding apparatus,
In order to form a flow path of molten glass between the end of the melting furnace and the molding apparatus, the molten glass processing apparatus includes a plurality of tubes, between the tubes, and with the end of the melting furnace. It is composed by being connected between
The first of the tubes is
A tube body;
A flange-shaped electrode that protrudes outside the tube body and energizes and heats the tube body; and
The flange-shaped electrode is disposed at the end of the tube body so as to be sandwiched between the tube body, the second tube connected to the first tube, and the end of the melting furnace. Provided,
The flange-shaped electrode has an uneven shape in which a convex portion and a concave portion that swell along the extending direction of the flow path are adjacent to each other, and the end of the tube main body, the second tube, and the melting furnace. At least a portion sandwiched between the one of the portions,
Prior to the melting step, the first tube is heated and thermally expanded, and the uneven shape is sandwiched between the tube body and the one of the second tube and the end of the melting furnace. And manufacturing the glass substrate, wherein the first tube is connected to the one of the second tube and the end of the melting furnace. The molten glass processing apparatus further includes a heat insulating member disposed around each of the tubes,
The flange-shaped electrode is provided to be sandwiched between a first heat insulating member around the first tube and a second heat insulating member around the second tube,
The flange-shaped electrode has the uneven shape also on an outer peripheral portion of the flange-shaped electrode sandwiched between the first heat insulating member and the second heat insulating member,
When heating the first tube, the first heat insulating member is heated and thermally expanded, and the first heat insulating member and the second heat insulating member are positioned on an outer peripheral portion of the flange-shaped electrode. The method for producing a glass substrate according to claim 1, wherein the glass substrate is deformed by sandwiching the uneven portion. The flange-shaped electrode has a shape in which the uneven shape repeatedly appears in the extending direction of the flange-shaped electrode,
3. The method of manufacturing a glass substrate according to claim 1, wherein a length of the repeating unit of the uneven shape in a direction in which the convex portions and the concave portions are arranged is smaller than a diameter of the tube main body. The flange-shaped electrode is disposed so as to be sandwiched between the tube body and the second tube,
The tube main body, the flange-shaped electrode, the convex portion, the concave portion, and the concave-convex shape are respectively defined as a first tube main body, a first flange-shaped electrode, a first convex portion, a first concave portion, When we say 1 uneven shape,
The second tube is
A second tube body;
A second flange-shaped electrode protruding outside the second tube body,
The second flange-shaped electrode is provided at an end of the second tube body so as to be sandwiched between the second tube body and the first flange-shaped electrode of the first tube,
The second flange-shaped electrode has a second concavo-convex shape in which a second convex portion and a concave second concave portion swelled along the extending direction of the flow path are adjacent to each other. Having at least a portion sandwiched between the main body and the first flange-shaped electrode;
When the first tube is heated, the second tube main body and the first flange-shaped electrode are deformed with the second concavo-convex shape interposed therebetween, and the first tube and the second tube are deformed. The manufacturing method of the glass substrate of any one of Claim 1 to 3 which connects a pipe | tube. A method of manufacturing a glass substrate,
A melting process for melting glass raw material in a melting furnace to produce molten glass;
A processing step of processing the molten glass using a molten glass processing apparatus;
A molding step of molding the processed molten glass into a sheet glass using a molding apparatus,
The molten glass processing device includes a plurality of tubes, between the tubes, and the processing so as to form a flow path of the molten glass between an end of the processing tank connected to the melting furnace and the molding device. Consists of being connected between the ends of the tank,
The first of the tubes is
A tube body;
A flange-shaped electrode that protrudes outside the tube body and energizes and heats the tube body; and
The flange-shaped electrode is disposed at the end of the tube body so as to be sandwiched between the tube body, the second tube connected to the first tube, and the end of the treatment tank. Provided,
The flange-shaped electrode has an uneven shape in which a convex portion and a concave portion that swell along the extending direction of the flow path are adjacent to each other, and the end of the tube body, the second tube, and the treatment tank. At least a portion sandwiched between the one of the portions,
Prior to the melting step, the first tube is heated and thermally expanded, and the uneven shape is sandwiched between the tube main body and the one of the second tube and the end of the treatment tank. And manufacturing the glass substrate, wherein the first tube is connected to the one of the second tube and the end of the treatment tank. A melting furnace that melts glass raw materials to produce molten glass;
A molten glass processing apparatus for processing the molten glass;
A molding apparatus for molding the processed molten glass into a sheet glass,
In order to form a flow path of the molten glass between the end of the melting furnace and the molding apparatus, the molten glass processing apparatus includes a plurality of tubes, between the tubes, and an end of the melting furnace. And is connected with
The first of the tubes is
A tube body;
A flange-shaped electrode protruding outside the tube body,
The flange-shaped electrode is disposed at the end of the tube body so as to be sandwiched between the tube body, the second tube connected to the first tube, and the end of the melting furnace. Provided,
The flange-shaped electrode has an uneven shape in which a convex portion and a concave portion that swell along the extending direction of the flow path are adjacent to each other, and the end of the tube main body, the second tube, and the melting furnace. At least a portion sandwiched between the one of the portions,
In the state where the first pipe is thermally expanded, the irregular shape is sandwiched and deformed between the first pipe and the one of the second pipe and the end of the melting furnace. The glass substrate manufacturing apparatus, wherein the first tube, the second tube, and the one of the end portions of the melting furnace are connected to each other. A melting furnace that melts glass raw materials to produce molten glass;
A molten glass processing apparatus for processing the molten glass;
A molding apparatus for molding the processed molten glass into a sheet glass,
In order to form a flow path of the molten glass between an end of a treatment tank connected to the melting furnace and the molding apparatus, the molten glass processing apparatus includes a plurality of tubes, It is configured by being connected with the end of the treatment tank,
The first of the tubes is
A tube body;
A flange-shaped electrode protruding outside the tube body,
The flange-shaped electrode is disposed at the end of the tube body so as to be sandwiched between the tube body, the second tube connected to the first tube, and the end of the treatment tank. Provided,
The flange-shaped electrode has an uneven shape in which a convex portion and a concave portion that swell along the extending direction of the flow path are adjacent to each other, and the end of the tube body, the second tube, and the treatment tank. At least a portion sandwiched between the one of the portions,
With the first tube being thermally expanded, the irregular shape is sandwiched and deformed between the first tube and the one of the second tube and the end of the processing tank. The glass substrate manufacturing apparatus, wherein the first tube and the one of the second tube and the end of the processing tank are connected.

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