JP2018199256A - Method for producing ceramic plate-like body - Google Patents

Abstract

To provide a method for producing a ceramic plate-like body which efficiently produces a ceramic plate-like body having a through hole that suppresses occurrence of a projection without providing a polishing step after burning.SOLUTION: A method for producing a ceramic plate-like body includes: a first step of preparing a non-sintered plate-like body 1s; a second step of preparing a plurality of resin sheets 2g of a resin slurry containing resin powder formed of a resin material that is slightly soluble in an organic solvent and is burned down during burning; a third step of laminating and pressure-bonding the non-sintered plate-like body 1s and the resin sheet 2g to prepare a non-sintered laminate 10g; a fourth step of forming a non-sintered laminate through hole 10gh by drill; a fifth step of burning the non-sintered laminate 10g so that ceramic plate-like bodes obtained by burning the non-sintered plate-like body 1s are bonding to each other through a dispersed fine to produce a ceramic laminate; and a sixth step of breaking the junction in the ceramic laminate so that the ceramic laminate is divided into the plurality of ceramic plate-like bodies.SELECTED DRAWING: Figure 4

Description

  The present invention relates to a method for manufacturing a ceramic plate-like body having a through hole penetrating between one main surface and the other main surface.

  The ceramic plate-like body is used as a constituent member of a battery cell of a solid oxide fuel cell, for example. As an example of such a method for producing a ceramic plate, there is a method for producing a ceramic plate described in JP2013-208876A (Patent Document 1).

  The manufacturing method of the ceramic plate-shaped body described in Patent Document 1 includes a forming step, a peripheral edge pressing step, and a firing step. In the forming step, the unsintered plate-like body is cut into a predetermined shape. In the peripheral pressing step, at least a part of the peripheral portion of the unsintered plate-like body having a predetermined shape obtained by the forming step is pressed in the thickness direction of the unsintered plate-like body. In the firing step, the unsintered plate-like body that has undergone the peripheral pressing step is fired. In the method of manufacturing a ceramic plate described in Patent Document 1, it is said that a ceramic plate satisfying a high strength reliability standard is manufactured with a high yield.

JP 2013-208876 A

  A ceramic plate used for a battery cell of a solid oxide fuel cell may be formed with a through-hole penetrating between one main surface and the other main surface as a gas flow path. In the above method for producing a ceramic plate-like body, the forming step is performed by punching an unsintered plate-like body with a mold provided with a core portion and a cavity portion. At that time, the cutting of the unsintered plate-like body into a predetermined outer shape and the formation of the unsintered plate-like body through-hole are simultaneously performed.

  When the unsintered plate-like body is punched out by the mold to form the unsintered plate-like body through-hole, at least a part of the unsintered plate-like body around the unsintered plate-like body through-hole is There is a risk of deformation in the direction in which the core portion of the mold proceeds. FIG. 9 shows a process in which the unsintered plate-like body 100s is punched out by the core part C of the mold to form the unsintered plate-like body through-hole 100sh. The thickness of the green plate 100s is exaggerated from the actual thickness.

  As the core portion C driven from one main surface of the unsintered plate body 100s passes through the unsintered plate body 100s, the thickness of the unsintered plate body 100s in front of the core portion C gradually increases. getting thin. The thin unsintered plate-like body 100s is deformed so as to be convex in the direction in which the core portion C proceeds. Then, after the core portion C is pulled out to the other main surface of the unsintered plate-like body 100s, a deformation residue (hereinafter sometimes referred to as “burr”) is generated.

  Even if this unsintered plate-like body through-hole is formed separately using a drill, the unsintered plate-like body may be similarly deformed. FIG. 10 shows a process in which an unsintered plate-like body 100s is drilled with a drill D to form an unsintered plate-like body through-hole 100sh.

  Also in this case, as the drill D proceeding from one main surface of the unsintered plate 100s passes through the unsintered plate 100s, the thickness of the unsintered plate 100s in front of the drill D is: It becomes thinner gradually. The thin unsintered plate-like body 100s is deformed so as to be convex in the direction in which the drill D proceeds. Then, after the drill D is pulled out to the other main surface of the unsintered plate-like body 100s, burrs are similarly generated.

  That is, in the above manufacturing method, there is a possibility that the convex portion derived from the above burr remains on the other main surface of the ceramic plate obtained after firing. If such ceramic plates are stacked or if further vibrations are applied in that state, local load concentration may occur on another ceramic plate that is in contact with the projections and may be damaged. There is. In order to eliminate such a concern, it is necessary to remove the convex portion by polishing the main surface of the ceramic plate-like body by some method, which is not desirable in terms of labor and cost.

  Therefore, an object of the present invention is to produce a ceramic plate-like body that does not include a polishing step after firing and can efficiently produce a ceramic plate-like body having a through hole in which the occurrence of convex portions derived from burrs is suppressed. Is to provide a method.

  In the method for manufacturing a ceramic plate according to the present invention, the method for forming a through hole in an unsintered plate is improved.

  The first embodiment of the method for producing a ceramic plate according to the present invention does not include a polishing step after firing. And the 1st form of the manufacturing method of the ceramic plate-shaped body which concerns on this invention is equipped with the following 1st thru | or 6th processes.

  The first step is a step in which a plurality of unsintered plate-like bodies containing ceramic material powder are produced or prepared. A 2nd process is a process by which a some resin sheet is produced or prepared using the resin slurry containing the organic solvent and the resin powder which consists of the resin material which is hardly soluble in this organic solvent and burns down at the time of baking. A 3rd process is a process by which a non-sintered laminated body is produced by alternately laminating | stacking a non-sintered plate-shaped body and a resin sheet, and crimping | bonding it.

  A 4th process is a process by which the unsintered laminated body through-hole which penetrates between one main surface and the other main surface of an unsintered laminated body is formed with a drill. The fifth step is a step in which the green laminate is fired. In this step, the plurality of resin sheets are burned out. Further, a plurality of unsintered plate-like bodies are sintered to form a plurality of ceramic plate-like bodies having through holes, and are joined via minute joints in which the plurality of ceramic plate-like bodies are scattered. It becomes a ceramic laminate. The sixth step is a step in which the joint portion in the ceramic laminate is broken so that the ceramic laminate is divided into a plurality of ceramic plates.

  In the above method for producing a ceramic plate, a convex portion derived from a burr may remain on the ceramic plate that has formed the other main surface of the ceramic laminate. Generation of the part is reliably suppressed. In the non-sintered plate-like body other than the non-sintered plate-like body forming the other main surface of the non-sintered laminated body, when the drill penetrates, the resin sheet and the unfired tip ahead of the direction in which the drill proceeds This is because the deformation of the unsintered plate-like body is suppressed by the plate-like body.

  That is, the above manufacturing method does not require a polishing step after firing. The ceramic plate-like body that has formed the other main surface of the ceramic laminate has a small convex portion and is adopted as a product if it is within a defined standard. If the convex part is large and it is out of the defined standard, it should not be adopted as a product.

  Moreover, since the ceramic laminated body by which the several ceramic plate-like body was laminated | stacked is divided | segmented into each ceramic plate-like body, a ceramic plate-like body is manufactured efficiently.

  In the above method for producing a ceramic plate, the first step and the second step may be performed in any order.

  The 2nd form of the manufacturing method of the ceramic plate-shaped body which concerns on this invention does not include the grinding | polishing process after baking similarly to the 1st form. And the 1st form of the manufacturing method of the ceramic plate-shaped body which concerns on this invention is equipped with the following 1st thru | or 6th processes.

  The first step is a step in which a plurality of unsintered plate-like bodies containing ceramic material powder are produced or prepared. The second step uses a resin slurry containing an organic solvent and a resin powder made of a resin material that is hardly soluble in the organic solvent and burned off during firing, on one main surface of the plurality of unsintered plate-like bodies. This is a step of applying a resin layer. A 3rd process is a process by which a non-sintered laminated body is produced by laminating | stacking and crimping | bonding the some unsintered plate-shaped body to which the resin layer was provided on one main surface.

  A 4th process is a process by which the unsintered laminated body through-hole which penetrates between one main surface and the other main surface of an unsintered laminated body is formed with a drill. The fifth step is a step in which the green laminate is fired. In this step, the plurality of resin sheets are burned out. Further, a plurality of unsintered plate-like bodies are sintered to form a plurality of ceramic plate-like bodies having through holes, and are joined via minute joints in which the plurality of ceramic plate-like bodies are scattered. It becomes a ceramic laminate. The sixth step is a step in which the joint portion in the ceramic laminate is broken so that the ceramic laminate is divided into a plurality of ceramic plates.

  Even in the above method for producing a ceramic plate, a convex portion derived from a burr may remain on the ceramic plate that has formed the other main surface of the ceramic laminate. Generation of the part is reliably suppressed. That is, the above manufacturing method does not require a polishing step after firing. Moreover, since the ceramic laminated body by which the several ceramic plate-like body was laminated | stacked is divided | segmented into each ceramic plate-like body, a ceramic plate-like body is manufactured efficiently.

  It is preferable that the 1st form and 2nd form of the manufacturing method of the ceramic plate-shaped body concerning this invention are provided with the following characteristics. That is, in the above-mentioned fourth step, the unsintered laminated body through-hole is in a state where an easily peelable resin member is applied to the other main surface of the unsintered laminated body, It is formed by proceeding from the main surface toward the other main surface.

  In the above method for producing a ceramic plate, since the easily peelable resin member is applied to the other main surface of the unsintered laminate, the other main surface of the unsintered laminate is used when the drill penetrates. The deformation of the unsintered plate-like body is suppressed. After the unsintered laminate through-hole is formed in the unsintered laminate by the drill, the easily peelable resin member is peeled off from the other main surface of the unsintered laminate. According to this manufacturing method, since all the ceramic plate-like bodies obtained by dividing the ceramic laminate can be adopted as products, the ceramic plate-like bodies are more efficiently produced.

  The first and second embodiments of the method for producing a ceramic plate according to the present invention preferably include the following features. That is, in the above-mentioned fourth step, the unsintered laminated body through-hole is formed in a state in which the above-mentioned resin sheet is applied to the other main surface of the non-sintered laminated body, and the drill is the one main It is formed by proceeding from the surface toward the other main surface.

  In the above method for producing a ceramic plate, since the resin sheet is applied to the other main surface of the unsintered laminate, when the drill penetrates, the non-fired that forms the other main surface of the unsintered laminate Deformation of the plate-like body is suppressed. After the unsintered laminate through-holes are formed in the unsintered laminate by the drill, the resin sheet is burned out during firing of the unsintered laminate. Also in this manufacturing method, since the ceramic plate-like body obtained by dividing the ceramic laminate can be adopted as a product, the ceramic plate-like body can be manufactured more efficiently.

  The first and second embodiments of the method for producing a ceramic plate according to the present invention preferably include the following features. That is, in the fourth step, after the unsintered laminated body through-hole is formed in the unsintered laminate by a drill, 5% or more and 50% or less of the pressure at the time of pressure bonding in the third step described above. A sub-process in which the green laminate is pressed with a pressure of If the pressing force in the sub-process is lower than the above, the burr is not sufficiently flattened. On the other hand, when the pressing force in the sub-process is higher than the above, the unsintered laminated body through-holes are crushed.

  In the above method for producing a ceramic plate-like body, even if burrs are generated around the through-holes of the unsintered laminated body after the drill has been pulled out to the other main surface of the unsintered laminated body, It flattens by pressing a sintered laminated body on said conditions. Also in this manufacturing method, since the ceramic plate-like body obtained by dividing the ceramic laminate can be adopted as a product, the ceramic plate-like body can be manufactured more efficiently.

  It is preferable that the 1st form and 2nd form of the manufacturing method of the ceramic plate-shaped body which concerns on this invention, and those preferable forms are equipped with the following characteristics. That is, the unsintered plate-like body includes at least one ceramic green sheet. In addition, when a non-sintered plate-shaped object contains several ceramic green sheets, they may be in the state where they were simply laminated and not pressure-bonded. In that case, in the second step of the second form and its preferred form, the application of the resin layer may be performed on the uppermost ceramic green sheet included in the unsintered green plate-like body. Good.

  In the above method for producing a ceramic plate, the thickness of the ceramic plate can be controlled appropriately and easily.

  In the method for producing a ceramic plate according to the present invention, a ceramic plate having a through-hole in which the generation of convex portions derived from burrs is suppressed is efficiently produced without including a polishing step after firing.

It is sectional drawing of the ceramic plate-shaped object 10 manufactured by 1st Embodiment of the manufacturing method of the ceramic plate-shaped object which concerns on this invention. It is a figure for demonstrating 1st Embodiment of the manufacturing method of a ceramic plate-shaped object, and is sectional drawing for demonstrating a part of process (1st thru | or 3rd process) typically. It is a figure for demonstrating 1st Embodiment of the manufacturing method of a ceramic plate-shaped object, and is sectional drawing for demonstrating the process (4th process) following FIG. 2 typically. It is sectional drawing of the unsintered laminated body 10g in which the unsintered laminated body through-hole 10gh was formed through the 4th process. It is a figure for demonstrating 1st Embodiment of the manufacturing method of a ceramic plate-shaped object, and is sectional drawing for demonstrating the process (5th and 6th process) following FIG. 3 typically. It is a figure for demonstrating the 1st modification of 1st Embodiment of the manufacturing method of a ceramic plate-shaped object, and the cross section for demonstrating a process (4th process) different from 1st Embodiment typically FIG. It is a figure for demonstrating the 2nd modification of 1st Embodiment of the manufacturing method of a ceramic plate-shaped object, and the cross section for demonstrating a process (4th process) different from 1st Embodiment typically FIG. It is a figure for demonstrating 2nd Embodiment of the manufacturing method of the ceramic plate-shaped body which concerns on this invention, and for demonstrating the process (2nd and 3rd process) different from 1st Embodiment typically It is sectional drawing. It is sectional drawing for demonstrating the process in which the unsintered plate-shaped object 100s is punched by the core part C of a metal mold | die, and the unsintered plate-shaped body through-hole 100sh is formed. 10 is a cross-sectional view for explaining a process in which an unsintered plate-like body 100s is drilled with a drill D to form an unsintered plate-like body through hole 100sh. FIG.

  Embodiments of the present invention will be described below to describe the features of the present invention in more detail. The present invention is widely applied to the production of ceramic plate bodies such as battery cells of solid oxide fuel cells.

-Embodiment of manufacturing method of ceramic plate-
<A 1st embodiment of a manufacturing method of a ceramic plate-like object>
A first embodiment of a method for producing a ceramic plate according to the present invention will be described with reference to FIGS.

  Each drawing is a schematic diagram, and the shape of each element is exaggerated for easy understanding. In addition, variations in the shape of each element generated in the manufacturing process are not necessarily reflected in each drawing. That is, hereinafter, the drawings used for explanation in this specification can be said to represent an actual product in an essential aspect even if there are different parts from the actual product.

  FIG. 1 is a cross-sectional view of a ceramic plate 10 manufactured by the first embodiment of the method for manufacturing a ceramic plate according to the present invention. The ceramic plate 10 is a sintered body of a solid electrolyte such as scandia-stabilized zirconia and yttria-stabilized zirconia, and is used as a power generation material for battery cells of a solid oxide fuel cell. The one main surface 10a and the other main surface 10b of the ceramic plate-like body 10 are not polished after firing.

  The ceramic plate-like body 10 has a through hole 10h penetrating between the one main surface 10a and the other main surface 10b. For example, when the ceramic plate-like body 10 is used as a power generation material of a battery cell of a solid oxide fuel cell, the through hole becomes a gas flow path.

  In the periphery of the through hole 10h, the occurrence of convex portions derived from the above-described burrs is suppressed. For example, a battery cell of a solid oxide fuel cell is manufactured by stacking several tens of ceramic plate-like bodies having a positive electrode formed on one main surface and a negative electrode formed on the other main surface through metal plates. The That is, a large load is applied to the lower ceramic plate-like body when stacked. At this time, if there is a convex portion around the through hole of the ceramic plate-like body, local load concentration may occur on another ceramic plate-like body in contact with the convex portion, which may cause damage.

  On the other hand, the ceramic plate-like body 10 having high smoothness as described above is less likely to be damaged because local load concentration is suppressed even when the ceramic plate-like body 10 is stacked or further subjected to vibration in that state. Therefore, a solid oxide fuel cell with high reliability can be obtained. Moreover, since it is not necessary to sandwich a buffer material between the ceramic plate-like bodies 10 at the time of storage and transportation, there is an advantage that labor and cost are not required.

  Next, details of the first embodiment of the method for producing a ceramic plate according to the present invention will be described. A first embodiment of a method for producing a ceramic plate according to the present invention includes first to sixth steps. 2 (A) to (D), FIG. 3, FIG. 4, and FIG. 5 (A) and FIG. 5 (B) are sequentially performed in the first embodiment of the method for manufacturing a ceramic plate according to the present invention. It is sectional drawing showing each process typically.

  FIG. 2A is a cross-sectional view showing a process in which the ceramic green sheet 1g is prepared or produced. The ceramic green sheet 1g is obtained by coating a ceramic slurry formed by mixing ceramic material powder, additives such as a binder and a dispersant, and an organic solvent on a carrier film. When the ceramic plate 10 is used as a power generation material for a battery cell of a solid oxide fuel cell as described above, the ceramic material powder may be a solid electrolyte powder such as scandia-stabilized zirconia powder and yttria-stabilized zirconia powder. Is used.

  FIG. 2B is a cross-sectional view illustrating a process in which the ceramic green sheet 1g is formed into an unsintered plate-like body 1s. In FIG. 2B, a process of forming the green plate 1s by pressing the three ceramic green sheets 1g is shown, but the number of sheets is not limited to this. The plurality of ceramic green sheets 1g may be simply laminated and not crimped. When the unsintered plate 1s is formed from the plurality of ceramic green sheets 1g, the thickness of the ceramic plate 10 is appropriately and easily controlled. One ceramic green sheet 1g may be an unsintered plate 1s. In that case, the step of FIG. 2B is omitted.

  Together with the steps shown in the cross-sectional views of FIGS. 2 (A) and 2 (B), this is a step (first step) in which a plurality of unsintered plate-like bodies 1s containing ceramic material powder are produced or prepared. .

  FIG. 2C is a cross-sectional view showing a step (second step) in which a plurality of resin sheets 2g are produced or prepared. For the preparation or preparation of the resin sheet 2g, a resin slurry containing an organic solvent and a resin powder 2b made of a resin material that is hardly soluble in the organic solvent and burns down upon firing is used. The order of performing the first step and the second step is not limited.

  The resin sheet 2g is obtained by coating a resin film obtained by mixing a resin powder 2b, an additive as necessary such as a binder and a dispersant, and an organic solvent on a carrier film. As described above, a resin material that is hardly soluble in the organic solvent used for preparing the resin slurry is used for the resin powder 2b. The shape of the resin powder 2b is, for example, a spherical shape having a median diameter of 0.5 μm to 10 μm.

The median diameter is, for example, a particle size distribution (D ₅₀ ) at which the integrated value is 50% when the particle size distribution of the resin powder 2b is measured by a laser diffraction particle size distribution measuring apparatus and expressed as an integrated% with respect to the particle size scale. Is defined as The shape of the resin powder 2b includes distortion generated in the manufacturing process, and the median diameter is an equivalent circle equivalent diameter.

  Here, “slightly soluble in an organic solvent” is defined as visually undissolved when 100 g of an organic solvent and 0.1 g of a resin powder are mixed for 24 hours at room temperature (25 ° C.). Is done. The organic solvent used for preparing the resin slurry is at least one (single or mixed) selected from, for example, toluene, ethanol, isopropanol, butyl acetate, ethyl acetate, terpineol, and water. In that case, as a material of the resin powder 2b, for example, a crosslinked acrylic resin is used.

  FIG. 2D shows a step (third step) in which the unsintered laminated body 10g is produced by alternately laminating and pressing the unsintered plate-like body 1s and the resin sheet 2g. It is sectional drawing. When the unsintered plate-like body 1s and the resin sheet 2g are pressure-bonded, the spherical resin powder 2b in the resin sheet 2g is deformed so as to be flat. In this state, the resin sheet 2g is pressed against one main surface of the unsintered plate-like body 1s, and another resin sheet 2g is pressed against the other main surface of the unsintered plate-like body 1s.

  As a result, concave portions derived from the shape of the flat resin powder 2b are formed scattered on one main surface and the other main surface of the unsintered plate-like body 1s. The form of the recess is controlled by the median diameter of the resin powder 2b. For example, when the shape of the resin powder is a sphere having a median diameter of 0.5 μm or more and 10 μm or less, the arithmetic average roughness of the main surface of the ceramic plate after the unsintered plate is fired is small. . Therefore, a ceramic plate having a main surface with high smoothness can be obtained without performing a polishing step after firing.

  3 and 4 show a step (fourth step) in which a non-sintered laminated body through hole 10gh penetrating between one main surface and the other main surface of the unsintered laminated body 10g is formed by the drill D. It is sectional drawing shown. The unsintered laminated body through-hole 10gh is drilled as the drill D advances from one main surface to the other main surface of the unsintered laminated body 10g.

  In the unsintered plate-like body 1s other than the unsintered plate-like body 1s forming the other main surface of the unsintered laminated body 10g, when the drill D penetrates, the resin sheet at the tip of the direction in which the drill D proceeds The deformation of the unsintered plate 1s is suppressed by 2g and the unsintered plate 1s. Therefore, after the drill D is pulled out to the other main surface of the unsintered laminate 10g, burrs may remain on the unsintered plate-like body 1s forming the other main surface of the unsintered laminate 10g. Generation | occurrence | production of the burr | flash in non-sintered plate-shaped body 1s other than these is suppressed reliably.

  FIG. 5A is a cross-sectional view showing a step (fifth step) in which the unsintered laminated body 10g is fired. By this step, the plurality of resin sheets 2g are burned out. In addition, a plurality of unsintered plate-like bodies 1s are sintered to form a plurality of ceramic plate-like bodies 10 each having a through hole 10h, and through a small joint where a plurality of ceramic plate-like bodies 10 are scattered. Thus, the laminated ceramic body 10s is obtained.

  FIG. 5B is a cross-sectional view showing a step (sixth step) in which the above-mentioned joint portion in the ceramic laminate 10s is broken so that the ceramic laminate 10s is divided into a plurality of ceramic plate-like bodies 10. It is. By passing through this process, the ceramic plate-like body 10 having the through hole 10h is manufactured.

  In the first embodiment of the method for manufacturing a ceramic plate described above, the occurrence of a convex portion in the ceramic plate 10 other than the ceramic plate 10 that has formed the other main surface of the ceramic laminate 10s is ensured. It is suppressed. That is, the above manufacturing method does not require a polishing step after firing. The ceramic plate-like body that has formed the other main surface of the ceramic laminate is employed as a product if the convex portions derived from the above-mentioned burrs are small and within the defined standards. If the convex part is large and it is out of the defined standard, it should not be adopted as a product.

  Moreover, since the ceramic laminated body 10s in which the plurality of ceramic plate-like bodies 10 are laminated is manufactured and then divided into individual ceramic plate-like bodies 10, the ceramic plate-like body 10 is efficiently manufactured.

<The 1st modification of 1st Embodiment of the manufacturing method of a ceramic plate-shaped object>
A first modification of the first embodiment of the method for producing a ceramic plate according to the present invention will be described with reference to FIG. The first modification of the first embodiment is a modification of the fourth step in the first embodiment. Since the first to third steps and the fifth and sixth steps are the same as those in the first embodiment, description thereof will be omitted.

  In the 4th process in the 1st modification of a 1st embodiment, in the state where easy peelable resin member P was given to the other principal surface of unsintered laminated body 10g, a non-sintered laminated body through-hole 10 gh (see FIG. 4) is formed. The drill D advances from one main surface of the unsintered laminated body 10g toward the other main surface. The material and shape of the easily peelable resin member P are not particularly limited. As an example, a so-called foam release sheet is used.

  That is, in the 4th process in the 1st modification of 1st Embodiment, when the drill D penetrates by the easily peelable resin member P, the unbaking which makes the other main surface of the unsintered laminated body 10g The deformation of the plate-like body 1s is suppressed. After the unsintered laminate through hole 10gh is formed in the unsintered laminate 10g by the drill D, the easily peelable resin member P is peeled off from the other main surface of the unsintered laminate 10g.

  According to this manufacturing method, since the ceramic plate-like body 10 (see FIG. 5) obtained by dividing the ceramic laminated body 10s (see FIG. 5) can be adopted as a product, the ceramic plate-like body 10 is more efficient. Manufactured.

<The 2nd modification of 1st Embodiment of the manufacturing method of a ceramic plate-shaped object>
A second modification of the first embodiment of the method for producing a ceramic plate according to the present invention will be described with reference to FIG. The second modification of the first embodiment is also a modification of the fourth step in the first embodiment. Since the first to third steps and the fifth and sixth steps are the same as those in the first embodiment, description thereof will be omitted.

  In the 4th process in the 1st modification of a 1st embodiment, in the state where the above-mentioned resin sheet 2g was given to the other principal surface of unsintered laminated body 10g, unsintered laminated body through-hole 10gh (See FIG. 4) is formed. The drill D advances from one main surface of the unsintered laminated body 10g toward the other main surface.

  That is, even in the fourth step in the second modification of the first embodiment, when the drill D penetrates through the resin sheet 2g, the unsintered plate shape that forms the other main surface of the unsintered laminated body 10g. The deformation of the body 1s is suppressed. After the unsintered laminated body through-hole 10gh is formed in the unsintered laminated body 10g by the drill D, the resin sheet 2g is burned out during firing of the unsintered laminated body 10g.

  Also by this manufacturing method, the ceramic plate 10 (see FIG. 5) obtained by dividing the ceramic laminate 10s (see FIG. 5) can be used as a product, so that the ceramic plate 10 can be manufactured more efficiently. Is done.

<The 3rd modification of 1st Embodiment of the manufacturing method of a ceramic plate-shaped object>
A third modification of the first embodiment of the method for producing a ceramic plate according to the present invention will be described. The third modification of the first embodiment is also a modification of the fourth step in the first embodiment. Since the first to third steps and the fifth and sixth steps are the same as those in the first embodiment, description thereof will be omitted.

  In the fourth step in the third modification of the first embodiment, the unsintered laminate through-hole 10gh (see FIG. 4) is transferred to the unsintered laminate 10g (see FIG. 4) by the drill D (see FIG. 3). ), And a sub-process in which the unsintered laminated body 10g is pressed. The pressing force at that time is 5% or more and 50% or less of the pressure at the time of pressure bonding in the third step.

  That is, in the fourth step in the second modification of the first embodiment, the burr generated after the drill D is pulled out to the other main surface of the unsintered laminate 10g causes the unsintered laminate 10g to It is crushed by pressing under the conditions.

  Also by this manufacturing method, the ceramic plate 10 (see FIG. 5) obtained by dividing the ceramic laminate 10s (see FIG. 5) can be used as a product, so that the ceramic plate 10 can be manufactured more efficiently. Is done.

<Second Embodiment of Manufacturing Method of Ceramic Plate>
The detail of 2nd Embodiment of the manufacturing method of the ceramic plate-shaped object based on this invention is demonstrated using FIG. The second embodiment of the method for producing a ceramic plate according to the present invention includes first to sixth steps.

  8A to 8C are cross-sectional views schematically showing the second to fourth steps in the second embodiment of the method for manufacturing the ceramic plate-like body 10, respectively. The second embodiment differs from the first embodiment in the second and third steps. The 2nd form of the manufacturing method of the ceramic plate-shaped body which concerns on this invention does not include the grinding | polishing process after baking similarly to the 1st form.

  Since the first step is the same as that of the first embodiment, description thereof is omitted.

  FIG. 8A is a cross-sectional view showing a step (second step) in which a resin layer 2l is applied on one main surface of a plurality of unsintered plate-like bodies 1s. As described above, when the unsintered plate-like body 1s includes a plurality of ceramic green sheets, they may be simply laminated and not pressed. In that case, the application of the resin layer 2l in the second step may be performed on the uppermost ceramic green sheet included in the unsintered green plate.

  Application of the resin layer 2l to the one main surface of the unsintered plate-like body 1s is performed on the one main surface of the unsintered plate-like body 1s by applying a resin slurry similar to that described in the first embodiment. It is carried out by being coated on. The properties of the resin powder 2b are the same as those described in the first embodiment.

  FIG. 8B shows a step in which a plurality of unsintered plate-like bodies 1s provided with the resin layer 2l on one main surface are laminated and pressed to produce an unsintered laminate 10g ( It is sectional drawing which shows a 3rd process. When the plurality of unsintered plate-like bodies 1s provided with the resin layer 21 on one main surface are pressure-bonded, the spherical resin powder 2b in the resin layer 21 is deformed so as to be flat. In this state, the resin layer 2l is provided on one main surface of the unsintered plate 1s, and the resin layer 2l provided on one main surface of another unsintered plate 1s is the unsintered plate 1s. Pressed against the other main surface.

  As a result, as in the case of the first embodiment, the concave portions derived from the shape of the flat resin powder 2b are formed scattered on one main surface and the other main surface of the unsintered plate-like body 1s. The The form of the recess is controlled by the median diameter of the resin powder 2b.

  FIG. 8 (C) shows a step in which an unsintered laminated body through hole 10gh penetrating between one main surface and the other main surface of the unsintered laminated body 10g is formed by a drill D (see FIG. 3) (first step). It is sectional drawing which shows 4 processes. The unsintered laminated body through-hole 10gh is drilled as the drill D advances from one main surface to the other main surface of the unsintered laminated body 10g.

  In the unsintered plate-like body 1s other than the unsintered plate-like body 1s forming the other main surface of the unsintered laminated body 10g, when the drill D penetrates, the resin layer at the tip of the direction in which the drill D proceeds The deformation of the unsintered plate 1s is suppressed by 2l and the unsintered plate 1s. Therefore, after the drill D is pulled out to the other main surface of the unsintered laminate 10g, burrs may remain on the unsintered plate-like body 1s forming the other main surface of the unsintered laminate 10g. Generation | occurrence | production of the burr | flash in non-sintered plate-shaped body 1s other than these is suppressed reliably.

  Since the fifth step and the sixth step are the same as those in the first embodiment, description thereof will be omitted.

  Also in the second embodiment of the method for producing a ceramic plate according to the present invention, the same effect as in the first embodiment can be obtained. Note that the first to third modifications of the first embodiment can also be applied to the second embodiment.

-Experimental example-
The present invention will be described more specifically based on experimental examples.

<Experimental example 1>
[First step]
The scandia-stabilized zirconia powder, the binder, the dispersant, and the organic solvent were blended in a predetermined ratio. The formulation was stirred for 3 hours at 1000 rpm with media consisting of partially stabilized zirconia to form a ceramic slurry. As the organic solvent, a mixture of toluene 7 and ethanol 3 by weight ratio was used.

  This ceramic slurry was formed into a ceramic green sheet as shown in FIG. 2A by forming a sheet on a carrier film made of polyethylene terephthalate by a known method. The ceramic green sheet was punched by a known method so as to have a predetermined size, and was peeled off from the carrier film. The order of the punching of the ceramic green sheet and the peeling from the carrier film does not matter.

  Three ceramic green sheets peeled from the carrier film were laminated and pressed to form an unsintered plate-like body as shown in FIG. 2 (B).

[Second step]
A spherical resin powder made of a crosslinked acrylic resin having a median diameter of 1 μm, a binder, a dispersant, and an organic solvent were prepared so as to have a predetermined ratio. Since the spherical resin powder has the smallest surface area per weight, the amount of the binder necessary for preparing a highly fluid resin slurry is reduced. Thereby, since the resin sheet with a high content of the resin powder is produced, the density of the recesses on the main surface of the ceramic plate-like body described later is increased. As the organic solvent, a mixture of toluene 7 and ethanol 3 by weight ratio was used.

  The formulation was stirred with a media consisting of partially stabilized zirconia at 1000 rpm for 3 hours to form a resin slurry. This resin slurry was formed into a resin sheet as shown in FIG. 2C by sheet molding on a carrier film made of polyethylene terephthalate by a known method. The thickness of the resin sheet is between 10 μm and 18 μm after drying.

  The resin sheet was punched by a known method so as to have a predetermined size, and was peeled off from the carrier film. The order of the punching of the resin sheet and the peeling from the carrier film does not matter.

[Third step]
An unsintered laminated body as shown in FIG. 2 (D) was produced by alternately laminating the unsintered plate-like body and the resin sheet of each condition and press-bonding them. The production conditions for the unsintered laminate are a heating temperature of 60 ° C. and a pressing force of 1500 kgf / cm ² . In this experimental example, the unsintered laminate was produced so that 10 sets were included when the unsintered plate-like body was overlaid with one resin sheet (see FIG. 3). In addition, nothing was provided to the other main surface (lowermost layer in FIG. 3) of the unsintered laminate.

[Fourth step]
As shown in FIG. 4, a non-sintered laminated body through-hole penetrating between one main surface and the other main surface of the non-sintered laminated body was formed by a drill. The processing conditions of the drill are a traveling speed of 0.04 mm / rotation and a rotational speed of 2000 rotations / minute. However, the processing conditions are not limited to this.

[Fifth step]
The green laminate obtained in the fourth step was fired in a firing furnace to obtain a ceramic laminate as shown in FIG. In this experimental example, the ceramic laminate is composed of 10 ceramic plates, so firing one ceramic laminate substantially fires 10 ceramic plates at a time. It will be. Therefore, the efficiency of the charging operation into the firing furnace is significantly higher than that in the case where each ceramic plate is fired individually.

  The firing step, which is the fifth step, undergoes the following specific substeps. That is, the firing process includes a degreasing process and a sintering process. The degreasing step was performed by holding the unsintered laminated body at 400 ° C. for a predetermined time. The sintering process was performed by holding the unsintered laminated body after the degreasing process at 1400 ° C. for 5 hours.

  Since most of the resin sheets are burned off during the degreasing process, the unsintered plate-like bodies come closer to each other by their own weight and come into contact in a minute region. At the contact portion, atomic diffusion occurs during firing. Therefore, the ceramic plates are joined to each other at a portion of the contact portion. However, since the area of the joint portion is small as described above, the fired ceramic laminate can be divided into individual ceramic plates.

  The important point is that the recesses formed by the resin powder have different patterns on the main surfaces of the two ceramic plate-like bodies facing each other across the resin sheet. This is because the resin powder is irregularly arranged in layers within the resin sheet, as shown in FIG. The formation of irregular patterns of recesses between the opposing main surfaces significantly reduces the contact area compared to the case of regular patterns. Therefore, even if the depth of the recess is shallow, the ceramic plate-like body can be easily divided.

[Sixth step]
The ceramic laminate obtained in the fifth step is submerged in degassed water and applied with ultrasonic vibration for 30 seconds to form 10 ceramic plate-like bodies each having a thickness of 90 μm and each having a through hole. Divided.

  Here, the ceramic plate-like body formed by firing the unsintered plate-like body that had formed one main surface of the unsintered laminate was the first ceramic plate-like body. And the ceramic plate-like body formed by baking the non-sintered plate-like body which was making the other main surface of an unsintered laminated body was made into the 10th ceramic plate-like body. That is, the 10th ceramic plate is derived from the unsintered plate from which the drill comes out when the unsintered laminated body is drilled.

  With respect to the first to tenth ceramic plates obtained in this experimental example, the amount of deformation around the through hole was measured by a three-dimensional shape measuring machine (VR-3000 series manufactured by Keyence Corporation).

  As a result, the deformation amount around the through hole in the first to ninth ceramic plate-like bodies was only 3 μm or less even if estimated to be large on the basis of a region sufficiently away from the periphery of the through hole. That is, in these ceramic plate-like bodies, the occurrence of convex portions derived from the above-described burrs was reliably suppressed.

  The amount of deformation around the through hole in the tenth ceramic plate-like body was about 30 μm on the basis of a region sufficiently away from the periphery of the through hole. In such a case, the tenth ceramic plate is not adopted as a product. However, of the 10 ceramic plate-like bodies, 9 are good products, and the proportion of the non-defective products increases as the number of laminated ceramic laminates increases. Therefore, it can be said that the method for producing a ceramic plate having a through hole according to the present invention produces the ceramic plate efficiently.

<Experimental example 2>
In Experimental Example 2, in the fourth step, the unsintered laminated body through-hole was formed in a state where the easily peelable resin member was applied to the other main surface of the unsintered laminated body. Since the first to third steps and the fifth and sixth steps are the same as those in Experimental Example 1, detailed description thereof is omitted. As an easily peelable resin member, Nitto Denko Riva Alpha (registered trademark) was used. The easily peelable resin member may be applied at the same time when the green laminate is produced, or may be provided after the green laminate is produced.

  The drilling of the unsintered laminate with a drill was performed so as to penetrate the easily peelable resin member. The drilling of the unsintered laminate with a drill may be performed so that the drill penetrates the unsintered laminate and does not penetrate the easily peelable resin member. After an unsintered laminated body through-hole is formed in the unsintered laminated body, the easily peelable resin member is foamed and peeled by being heated.

  With respect to the first to tenth ceramic plate-like bodies obtained in this experimental example, the amount of deformation around the through hole was measured by the three-dimensional shape measuring machine used in Experimental example 1, respectively.

  As a result, the amount of deformation around the through hole in the first to tenth ceramic plate-like bodies was only 3 μm or less even when estimated to a large extent on the basis of a region sufficiently away from the periphery of the through hole. That is, in these ceramic plate-like bodies, the occurrence of convex portions derived from the aforementioned burrs was reliably suppressed.

<Experimental example 3>
In Experimental Example 3, in the fourth step, the unsintered laminated body through-hole was formed in a state where the above-described resin sheet was applied to the other main surface of the unsintered laminated body. Since the first to third steps and the fifth and sixth steps are the same as those in Experimental Example 1, detailed description thereof is omitted. The resin sheet may be applied at the same time when the green laminate is produced, or may be provided after the green laminate is produced.

  Drilling of the unsintered laminate with a drill was performed so that the resin sheet also penetrated. After the unsintered laminate through-holes are formed in the unsintered laminate, the resin sheet is burned off when the unsintered laminate is fired.

  With respect to the first to tenth ceramic plate-like bodies obtained in this experimental example, the amount of deformation around the through hole was measured by the three-dimensional shape measuring machine used in Experimental example 1, respectively.

  As a result, the amount of deformation around the through hole in the first to tenth ceramic plate-like bodies was only 3 μm or less even when estimated to a large extent on the basis of a region sufficiently away from the periphery of the through hole. That is, in these ceramic plate-like bodies, the occurrence of convex portions derived from the aforementioned burrs was reliably suppressed.

<Experimental example 4>
In Experimental Example 4, in the fourth step, after the unsintered laminated body through-hole was formed in the unsintered laminated body by a drill, the unsintered laminated body was pressed again. The pressing force at that time was 5% or more and 50% or less of the pressure at the time of pressure bonding in the above-described third step. Since the first to third steps and the fifth and sixth steps are the same as those in Experimental Example 1, detailed description thereof is omitted.

  With respect to the first to tenth ceramic plate-like bodies obtained in this experimental example, the amount of deformation around the through hole was measured by the three-dimensional shape measuring machine used in Experimental example 1, respectively.

  As a result, the amount of deformation around the through hole in the first to tenth ceramic plate-like bodies was only 3 μm or less even when estimated to a large extent on the basis of a region sufficiently away from the periphery of the through hole. That is, in these ceramic plate-like bodies, the occurrence of convex portions derived from the aforementioned burrs was reliably suppressed.

  The embodiments described in this specification are illustrative, and the present invention is not limited to the above-described embodiments, and various applications and modifications are added within the scope of the present invention. Can do.

1 g Ceramic green sheet 1 s Unsintered plate 2 b Resin powder 2 g Resin sheet 2 l Resin layer 10 Ceramic plate 10 a One main surface 10 b The other main surface 10 g Unsintered laminate 10 gh Unsintered laminate through-hole 10 h Through-hole 10s ceramic laminate

Claims (6)

A method for producing a ceramic plate-like body having a through-hole without a polishing step after firing,
A first step in which a plurality of unsintered plates comprising ceramic material powder are produced or prepared;
A second step in which a plurality of resin sheets are prepared or prepared using a resin slurry containing an organic solvent and a resin powder made of a resin material that is hardly soluble in the organic solvent and burned off during firing;
A third step in which the unsintered plate-like body and the resin sheet are alternately laminated and pressed to produce a plate-like unsintered laminate having one main surface and the other main surface; ,
A fourth step in which a non-sintered laminate through-hole penetrating between one main surface and the other main surface of the non-sintered laminate is formed by a drill;
The plurality of resin sheets are burned out, the plurality of unsintered plate-like bodies are sintered to form a plurality of ceramic plate-like bodies having through holes, and a plurality of the ceramic plate-like bodies are interspersed. A fifth step in which the unsintered laminate is fired so as to be a ceramic laminate formed by joining via a joint portion;
A sixth step of breaking the joint portion in the ceramic laminate so that the ceramic laminate is divided into a plurality of ceramic plate-like bodies. Production method. A method for producing a ceramic plate-like body that does not include a polishing step after firing,
A first step in which a plurality of unsintered plates comprising ceramic material powder are produced or prepared;
A resin layer is provided on one main surface of the plurality of unsintered plate-like bodies using a resin slurry containing an organic solvent and a resin powder made of a resin material that is hardly soluble in the organic solvent and burned off during firing. A second step,
A plurality of the unsintered plate-like bodies provided with the resin layer on one main surface are laminated and pressure-bonded, whereby a third step in which an unsintered laminate is produced;
A fourth step in which a non-sintered laminate through-hole penetrating between one main surface and the other main surface of the non-sintered laminate is formed by a drill;
The plurality of resin sheets are burned out, the plurality of unsintered plate-like bodies are sintered to form a plurality of ceramic plate-like bodies having through holes, and a plurality of the ceramic plate-like bodies are interspersed. A fifth step in which the unsintered laminate is fired so as to be a ceramic laminate formed by joining via a joint portion;
A sixth step of breaking the joint portion in the ceramic laminate so that the ceramic laminate is divided into a plurality of ceramic plate-like bodies. Production method.   In the fourth step, the unsintered laminate through-hole is formed in a state where an easily peelable resin member is applied to the other main surface of the unsintered laminate, and the drill is formed on the unsintered laminate. The method for producing a ceramic plate-like body according to claim 1, wherein the ceramic plate-like body is formed by proceeding from one main surface to the other main surface.   In the fourth step, the unsintered laminated body through-hole is formed in a state in which the resin sheet is applied to the other main surface of the non-sintered laminated body, and the drill is one main part of the unsintered laminated body. The method for producing a ceramic plate-like body according to claim 1, wherein the ceramic plate-like body is formed by proceeding from one surface to the other main surface.   In the fourth step, after the green laminate through-hole is formed in the green laminate by the drill, the pressure is 5% or more and 50% or less of the pressure in the press bonding in the third step. The method for producing a ceramic plate-like body according to claim 1, further comprising a sub-process in which the unsintered laminated body is pressed by pressure.   The method for manufacturing a ceramic plate according to claim 1, wherein the green plate includes at least one ceramic green sheet.