JP2018194529A - Pressure sensor device - Google Patents

Abstract

To provide a pressure sensor device that can clarify the difference in the state of a current between when a pressure sensing body is not subjected to pressure and when is subjected to pressure.SOLUTION: The pressure sensor device includes: a sensor substrate having a substrate and a plurality of sensors on the substrate, the sensors arranging in a first direction and a second direction intersecting with each other and including a first electrode; a pressure sensing part having a pressure sensing body facing the sensor part and a plurality of protrusions located on the opposite side of the sensor substrate with respect to the pressure sensing body; and a plurality of supporting parts between the sensor substrate and the pressure sensing part. The plurality of protrusions do not overlap with the supporting parts at the top of the protrusions when viewed along the normal direction of the substrate.SELECTED DRAWING: Figure 2

Description

  Embodiments of the present disclosure relate to a pressure sensor device including a plurality of sensor units and a pressure sensitive body facing the sensor units.

  Conventionally, a pressure sensor device using a pressure sensitive body is known. A pressure-sensitive body is a member configured such that electrical characteristics such as electrical resistance or capacitance change according to applied pressure. The pressure sensor device calculates the value and distribution of the pressure applied to the pressure sensitive body based on the change in the electrical characteristics of the pressure sensitive body.

  Various pressure sensor devices including the pressure sensitive body as described above have been conventionally proposed. For example, Patent Document 1 discloses a pressure sensor including a substrate, a plurality of transistors provided on the substrate, a pressure sensitive body connected to the drain electrode of each transistor, and a common electrode connected to the pressure sensitive body. An apparatus is disclosed. When pressure is applied to the pressure sensitive body, the electrical resistance of the pressure sensitive body changes, and as a result, the current flowing from one of the drain electrode or the common electrode through the pressure sensitive body to the other changes. Based on the change in current, the distribution of pressure applied to the pressure sensitive body can be calculated.

Japanese Patent Laying-Open No. 2014-4940

  In the pressure sensor device described in Patent Document 1, the pressure sensitive body is in contact with the drain electrode and the common electrode even when no pressure is applied to the pressure sensitive body. For this reason, even when no pressure is applied to the pressure sensitive body, a current flows through the drain electrode and the common electrode. As a result, it is considered that the difference between the current state when no pressure is applied to the pressure-sensitive body and the current state when pressure is applied to the pressure-sensitive body becomes unclear.

  An object of the embodiment of the present disclosure is to provide a pressure sensor device that can effectively solve such a problem.

  One embodiment of the present disclosure includes a substrate and a plurality of sensor units that are arranged on the substrate along a first direction and a second direction intersecting the first direction and include at least a first electrode. A pressure-sensitive member that includes a pressure-sensitive member that faces the sensor unit, and a plurality of protrusions that are located on the opposite side of the sensor substrate with respect to the pressure-sensitive member, and the sensor substrate and the pressure-sensitive member. A plurality of support portions, and the plurality of protrusion portions are arranged such that the top portions of the protrusion portions do not overlap the support portions when viewed along the normal direction of the substrate. This is a pressure sensor device.

  In the pressure sensor device according to an embodiment of the present disclosure, the width of the protrusion in the first direction may be smaller than the interval between the two support portions adjacent in the first direction, or The width of the protrusion in the second direction may be smaller than the interval between the two support portions adjacent in the second direction.

  In the pressure sensor device according to an embodiment of the present disclosure, each of the plurality of sensor units includes a first terminal and a second terminal connected to the semiconductor layer, and a gate terminal facing the semiconductor layer through the insulating layer. A transistor may be included.

  In the pressure sensor device according to an embodiment of the present disclosure, the sensor substrate is electrically connected to the plurality of gate terminals, extends in the first direction, and the plurality of first terminals or the plurality of the plurality of the terminal. And a second line connected to the second terminal and extending in the second direction, wherein the width of the protrusion in the second direction is between the two support parts adjacent in the second direction. It may be smaller than the interval.

  In the pressure sensor device according to an embodiment of the present disclosure, at least some of the first electrodes of the plurality of first electrodes do not overlap with the support when viewed along the first direction. They may be arranged in the first direction.

  In the pressure sensor device according to the embodiment of the present disclosure, the protrusion extends along the first direction so as to intersect the plurality of second lines when viewed along the normal direction of the substrate. May be.

  In the pressure sensor device according to the embodiment of the present disclosure, the support portion extends along the first direction so as to intersect the plurality of second lines when viewed along the normal direction of the substrate. May be.

  According to the embodiment of the present disclosure, it is possible to clarify the difference between the current state when no pressure is applied to the pressure-sensitive body and the current state when pressure is applied to the pressure-sensitive body. it can.

It is sectional drawing which shows the pressure sensor apparatus which concerns on one embodiment. It is sectional drawing which expands and shows the pressure sensor apparatus of FIG. It is a top view which shows the sensor board | substrate of a pressure sensor apparatus. It is a top view which shows a pressure sensor apparatus. It is a figure which shows the state which the pressure sensitive body contacted the 1st electrode and the 2nd electrode. It is a figure which shows a mode that an object applies force to the several projection part of a pressure-sensitive part. It is sectional drawing which shows the pressure sensor apparatus which concerns on a 1st modification. It is sectional drawing which shows the pressure sensor apparatus which concerns on a 2nd modification. It is sectional drawing which shows the pressure sensor apparatus which concerns on a 3rd modification. It is sectional drawing which shows the pressure sensor apparatus which concerns on a 4th modification. It is a top view which shows the sensor board | substrate of the pressure sensor apparatus which concerns on a 5th modification. It is a top view which shows the pressure sensor apparatus which concerns on a 5th modification. It is a top view which shows the sensor board | substrate of the pressure sensor apparatus which concerns on a 6th modification. It is a top view which shows the pressure sensor apparatus which concerns on a 6th modification. It is a top view which shows the sensor board | substrate of the pressure sensor apparatus which concerns on a 7th modification. It is a top view which shows the pressure sensor apparatus which concerns on a 7th modification. It is a top view which shows the pressure sensor apparatus which concerns on an 8th modification.

  Hereinafter, the pressure sensor device 10 according to an embodiment of the present disclosure will be described in detail with reference to the drawings. The following embodiments are examples of embodiments of the present disclosure, and the present disclosure is not construed as being limited to these embodiments. Further, in this specification, terms such as “substrate”, “base material”, “sheet”, and “film” are not distinguished from each other only based on the difference in names. For example, “substrate” and “base material” are concepts including members that can be called sheets and films. Furthermore, as used in this specification, the shape and geometric conditions and the degree thereof are specified. For example, terms such as “parallel” and “orthogonal”, length and angle values, and the like are bound to a strict meaning. Therefore, it should be interpreted including the extent to which similar functions can be expected. In the drawings referred to in this embodiment, the same portions or portions having similar functions are denoted by the same reference symbols or similar reference symbols, and repeated description thereof may be omitted. In addition, the dimensional ratio in the drawing may be different from the actual ratio for convenience of explanation, or a part of the configuration may be omitted from the drawing.

(Pressure sensor device)
With reference to FIG.1 and FIG.2, the pressure sensor apparatus 10 which concerns on this Embodiment is demonstrated. FIG. 1 is a cross-sectional view showing the pressure sensor device 10. FIG. 2 is an enlarged sectional view showing the pressure sensor device 10 of FIG. Although the use of the pressure sensor device 10 is not particularly limited, for example, as one of the uses, it is conceivable to use the pressure sensor device 10 by being incorporated in an instrument that receives a load of a human body such as a bed.

  The pressure sensor device 10 includes a sensor substrate 20, a pressure sensitive part 40, and a plurality of support parts 50. The sensor substrate 20 includes a substrate 21 and a plurality of sensor units 23 provided on the substrate 21. The pressure-sensitive part 40 includes a pressure-sensitive body 41 that faces the sensor part 23 and a protrusion 42. The pressure sensitive body 41 is a member configured such that electric characteristics such as electric resistance or capacitance change according to applied pressure. The support part 50 is located between the sensor substrate 20 and the pressure sensitive body 41. One end of the support portion 50 in the normal direction of the substrate 21 is in contact with the sensor substrate 20, and the other end of the support portion 50 is in contact with the pressure sensitive body 41.

  The dimension of the support portion 50 in the normal direction of the substrate 21 is determined so that the pressure sensitive body 41 does not contact the sensor portion 23 when no pressure is applied to the pressure sensitive body 41. For this reason, it can suppress that an electric current flows into the sensor part 23 when the pressure is not applied to the pressure sensitive body 41. FIG. Further, the dimension of the support portion 50 in the normal direction of the substrate 21 is determined so that the pressure sensitive body 41 contacts the sensor portion 23 when pressure is applied to the pressure sensitive body 41. For example, when the pressure applied to the pressure sensitive body 41 is 1 Pa or more, the pressure sensitive body 41 contacts the sensor unit 23. Therefore, the difference between the state of the current flowing through the sensor unit 23 when no pressure is applied to the pressure sensitive body 41 and the state of the current flowing through the sensor unit 23 when pressure is applied to the pressure sensitive body 41. Can be clarified.

  Hereinafter, each component of the pressure sensor device 10 will be described in detail.

(Sensor board)
First, the sensor substrate 20 will be described with reference to FIGS. FIG. 3 is a plan view showing the sensor substrate 20 of the pressure sensor device 10.

  First, the substrate 21 of the sensor substrate 20 will be described. As shown in FIG. 1, the substrate 21 is a member that supports a plurality of sensor units 23. The substrate 21 may be a flexible substrate having flexibility or a rigid substrate having no flexibility. Examples of the material constituting the substrate 21 include polyethylene naphthalate, polyethylene terephthalate, polyimide, polypropylene, polyethylene and the like. The thickness of the substrate 21 is, for example, 1 μm or more and 200 μm or less. As shown in FIG. 3, the substrate 21 has a rectangular shape including a pair of first sides 21 a extending along a first direction D <b> 1 described below and a pair of second sides 21 b extending along a second direction D <b> 2 described below. You may have the external shape of a shape.

  The sensor substrate 20 may have a planarization layer 22 located between the substrate 21 and the sensor unit 23. The planarization layer 22 includes, for example, a curable resin. By providing the flattening layer 22, the flatness of the surface on which the sensor unit 23 is provided can be improved. Thereby, it can suppress that defects, such as a disconnection, arise in the transistor 30 etc. of the sensor part 23 mentioned later.

  Next, the sensor unit 23 of the sensor substrate 20 will be described. As shown in FIGS. 1 and 2, the sensor unit 23 includes at least a first electrode 24 and a transistor 30. The first electrode 24 is an electrode arranged to face the pressure sensitive body 41. The transistor 30 is electrically connected to the first electrode 24. When pressure is applied to the pressure sensitive body 41, the pressure sensitive body 41 comes into contact with the first electrode 24, and a current flows through the pressure sensitive body 41, the first electrode 24, and the transistor 30. By calculating the currents flowing through the first electrodes 24 of the plurality of sensor units 23, the pressure applied to the pressure sensitive body 41 at the position of each first electrode 24 can be calculated.

  As shown in FIG. 2, the transistor 30 includes a gate terminal 31, an insulating layer 32, a first terminal 33, a second terminal 34, a semiconductor layer 35, and an insulating layer 36. The first terminal 33 is connected to one end of the semiconductor layer 35, and the second terminal 34 is connected to the other end of the semiconductor layer 35. One of the first terminal 33 and the second terminal 34 functions as a so-called source terminal and the other functions as a so-called drain terminal according to the voltage between the first terminal 33 and the second terminal 34.

  In the example shown in FIG. 2, the first terminal 33, the second terminal 34, and the semiconductor layer 35 are provided on the planarization layer 22 on the substrate 21. The insulating layer 32 that functions as a gate insulating film is provided so as to cover the first terminal 33, the second terminal 34, and the semiconductor layer 35. The gate terminal 31 is provided on the insulating layer 32 so as to face the semiconductor layer 35 with the insulating layer 32 interposed therebetween. The insulating layer 36 is, for example, a passivation layer, and covers the gate terminal 31 and the insulating layer 32. As described above, the transistor 30 illustrated in FIG. 2 is a so-called top-gate transistor.

  The first electrode 24 is electrically connected to either the first terminal 33 or the second terminal 34. In the example shown in FIG. 2, the first electrode 24 is electrically connected to the first electrode 24 via a connection portion 37 that penetrates the insulating layer 32.

  As shown in FIG. 2, the sensor substrate 20 further includes a second electrode 25. The second electrode 25 is an electrode that is maintained at a stable potential such as a ground potential or a power supply potential. In the example shown in FIG. 2, the second electrode 25 is located on the insulating layer 36 similarly to the first electrode 24. That is, the second electrode 25 is located in the same plane as the first electrode 24. Further, the second electrode 25 faces the pressure sensitive body 41 in the same manner as the first electrode 24. In this case, when pressure is applied to the pressure sensitive body 41, the pressure sensitive body 41 comes into contact with the first electrode 24 and the second electrode 25. As a result, the second electrode 25, the pressure sensitive body 41, the first electrode 24, and Current flows in a path through transistor 30. “Located in the same plane” means that the first electrode 24 and the second electrode 25 overlap at least partially when viewed in the in-plane direction of the substrate 21.

  Next, the configuration of the sensor substrate 20 when viewed along the normal direction of the substrate 21 will be described. As shown in FIG. 3, the plurality of sensor units 23 are arranged on the substrate 21 along the first direction D1 and the second direction D2 intersecting the first direction D1. In the example shown in FIG. 3, the second direction D2 is orthogonal to the first direction D1. Although not shown, the second direction D2 may be a direction inclined with respect to a direction orthogonal to the first direction D1.

  As shown in FIG. 3, the sensor substrate 20 includes a plurality of first lines X1 to Xm extending in the first direction D1, and a plurality of second lines Y1 to Yn extending in the second direction D2. In the following description, when describing matters common to the first lines X1 to Xm, the first lines X1 to Xm may be referred to as the first line X in some cases. Further, when describing matters common to the second lines Y1 to Yn, the second lines Y1 to Yn may be referred to as the second line Y in some cases.

  The first line X is electrically connected to the gate terminals 31 of the plurality of transistors 30 arranged in the first direction D1. For example, the first line X is located on the same plane as the gate terminal 31. The first line X is a line also called a scan line, a scan line, a word line, or the like. The second line Y is electrically connected to the first terminal 33 or the second terminal 34 of the plurality of transistors 30 arranged in the second direction D2. In the present embodiment, the second line Y is electrically connected to the first terminal 33. For example, the second line Y is located on the same plane as the first terminal 33 and the second terminal 34. The second line Y is a line also called a signal line, a data line, a bit line, or the like.

  As shown in FIG. 3, the second electrode 25 may extend parallel to the second line Y. In addition, as long as an electric current can flow between the 1st electrode 24 and the 2nd electrode 25 via the pressure sensitive body 41 when a pressure is applied to the pressure sensitive body 41, the concrete of the 2nd electrode 25 is demonstrated. The arrangement and shape are not particularly limited.

(Pressure sensitive part)
Next, the pressure sensitive unit 40 will be described with reference to FIGS. 1, 2, and 4. FIG. 4 is a plan view illustrating the pressure sensor device 10 as viewed from the pressure sensing unit 40 side.

  As shown in FIGS. 1 and 2, the pressure sensing unit 40 includes a pressure sensing body 41 and a plurality of protrusions 42 positioned on the opposite side of the sensor substrate 20 with respect to the pressure sensing body 41. The protrusion 42 extends along the normal direction of the substrate 21. Further, the protruding portion 42 has a top portion 421 constituting one end in the normal direction of the substrate 21. In the example shown in FIGS. 1 and 2, the top portion 421 constitutes one end of the projection portion 42 on the side far from the pressure sensitive body 41.

  The pressure sensitive body 41 is a member whose electrical resistance or capacitance changes according to the pressure applied to the pressure sensitive body 41. The pressure-sensitive body 41 is, for example, a so-called pressure-sensitive conductor configured such that the electrical resistance changes according to the pressure applied to the pressure-sensitive body. The pressure-sensitive conductor includes, for example, rubber such as silicone rubber and a plurality of particles having conductivity such as carbon added to the rubber.

  The protrusion 42 is a member for concentrating the pressure applied to the pressure sensor device 10 on a part of the pressure-sensitive body 41. The protrusion 42 has a size smaller than that of the pressure sensitive body 41 in the in-plane direction of the substrate 21. For example, as shown in FIG. 4, the pressure-sensitive body 41 extends so as to overlap the plurality of first electrodes 24 when viewed along the normal direction of the substrate 21. On the other hand, at least a part of the plurality of protrusions 42 has only one first electrode 24 when viewed along the normal direction of the substrate 21 as shown in FIGS. 1 and 2. overlapping. Preferably, at least some of the plurality of protrusions 42 overlap the second electrode 25 when viewed along the normal direction of the substrate 21.

  The material of the protrusion 42 is selected so that the pressure applied to the pressure sensor device 10 can be properly transmitted to the portion of the pressure sensitive body 41 that contacts the protrusion 42. For example, the protrusion 42 can be made of a metal, a thermosetting resin, a thermoplastic resin, or the like.

  A method for producing the protrusion 42 on the pressure-sensitive body 41 is arbitrary. For example, the protrusion 42 can be produced by providing the material of the protrusion 42 on the pressure-sensitive body 41 by a printing method such as screen printing and then solidifying the material. Alternatively, the protrusion 42 may be formed by forming a layer of the material of the protrusion 42 on the pressure-sensitive body 41 and then shaping the layer using a mold. Further, the protrusion 42 may be provided on the pressure sensitive body 41 by transfer.

(Support part)
Next, the support part 50 is demonstrated. As shown in FIG. 2, the support unit 50 is configured so that an appropriate gap exists between the pressure sensitive body 41 and the first electrode 24 when pressure from an external object is not applied to the pressure sensitive body 41. It is a member interposed between the pressure sensitive body 41 and the sensor substrate 20. As shown in FIG. 2, one end of the support portion 50 in the normal direction of the substrate 21 is in contact with, for example, the insulating layer 36 of the sensor substrate 20, and the other end of the support portion 50 is in contact with the pressure sensitive body 41. . The gap s is, for example, not less than 1 μm and not more than 500 μm. The height t of the support part 50 is, for example, not less than 1 μm and not more than 1000 μm.

  The support part 50 contains an adhesive agent, for example. The adhesive may be an inorganic adhesive containing an inorganic material or an organic adhesive containing an organic material. Examples of adhesives include acrylic resin adhesives, urethane resin adhesives, and epoxy resin adhesives.

(Position relationship between first electrode, protrusion, and support)
Next, with reference to FIG. 3 and FIG. 4, the positional relationship among the first electrode 24, the protrusion 42, and the support 50 when the sensor substrate 20 is viewed along the normal direction of the substrate 21 will be described.

  First, the positional relationship between the first electrode 24 and the support portion 50 will be described with reference to FIG. As shown in FIG. 3, each of the plurality of first electrodes 24 is positioned between two adjacent support portions 50. For example, the first electrode 24 is located between two support portions 50 adjacent in the second direction D2. Accordingly, it is possible to more reliably suppress the pressure sensitive body 41 from contacting the first electrode 24 when no pressure is applied to the pressure sensitive body 41.

  As shown in FIG. 3, the first electrode 24 may not be located between the two support portions 50 adjacent in the first direction D1. For example, at least some of the first electrodes 24 among the plurality of first electrodes 24 are arranged in the first direction D1 so as not to overlap the support portion 50 when viewed along the first direction D1. Thereby, as will be described later, the distribution in the first direction D1 of the pressure applied to the pressure-sensitive body 41 can be calculated accurately.

  Subsequently, the positional relationship between the protrusion 42 and the support 50 will be described with reference to FIG. As shown in FIG. 4, the plurality of support portions 50 are arranged so as not to overlap the top portions 421 of the protrusion portions 42 when viewed along the normal direction of the substrate 21. For example, the top portions 421 of the plurality of projecting portions 42 are each positioned between two adjacent support portions 50. In the example illustrated in FIG. 4, the top portions 421 of the plurality of projecting portions 42 are each positioned between two support portions 50 adjacent in the second direction D2.

  In FIG. 4, the symbol W <b> 1 represents the distance between the two support portions 50 adjacent in the second direction D <b> 2, and the symbol W <b> 2 represents the width of the protrusion 42 in the second direction D <b> 2. As shown in FIG. 4, the width W <b> 2 of the protrusion 42 is smaller than the interval W <b> 1 between the two support portions 50. For example, the width W2 of the protrusion 42 is 0.1 × W1 or more and 0.9 × W1 or less. As a result, when pressure is applied to the pressure sensitive body 41, the protrusion 42 is displaced toward the sensor substrate 20, and the pressure sensitive body 41 can come into contact with the first electrode 24. In addition, when the top part 421 of the projection part 42 is a flat surface as shown in FIG. 2, the width W2 of the projection part 42 is equal to the width of the flat surface of the top part 421.

  Although not shown, the top portion 421 of the protrusion 42 may be located between two adjacent support portions 50 in the first direction D1. In this case, the width of the protrusion 42 in the first direction D1 is smaller than the interval between the two support portions 50 adjacent in the first direction D1.

(Operation of pressure sensor device)
Next, the operation of the pressure sensor device 10 will be described.

  First, the operation of the pressure sensor device 10 when pressure from an external object is not applied to the pressure sensor device 10 will be described. As described above, the pressure sensor device 10 includes the support portion 50 positioned between the pressure sensitive body 41 and the sensor substrate 20. Therefore, an appropriate gap can be generated between the pressure sensitive body 41 and the first electrode 24 when pressure from an external object is not applied to the pressure sensor device 10. As a result, no or little current flows through the first electrode 24 and the second electrode 25 when pressure from an external object is not applied to the pressure sensor device 10.

  Next, the operation of the pressure sensor device 10 when pressure from an external object is applied to the pressure sensor device 10 will be described with reference to FIG. When pressure F from an external object is applied to the pressure sensor device 10, the protrusion 42 is pressed toward the sensor substrate 20 side. Here, in the present embodiment, the support portion 50 is disposed so as not to overlap the top portion 421 of the projection portion 42 when viewed along the normal direction of the substrate 21. For this reason, the protrusion 42 is displaced toward the sensor substrate 20, and the pressure sensitive body 41 can come into contact with the first electrode 24 and the second electrode 25. When the pressure sensitive body 41 contacts the first electrode 24 and the second electrode 25, a current flows between the first electrode 24 and the second electrode 25 via the pressure sensitive body 41.

  Thus, in the present embodiment, when no pressure is applied to the pressure sensor device 10, no or little current flows through the first electrode 24 and the second electrode 25, and pressure is applied to the pressure sensor device 10. Only after this, a significant current flows through the first electrode 24 and the second electrode 25. Thus, according to the present embodiment, the difference between the current state when no pressure is applied to the pressure sensor device 10 and the current state when pressure is applied to the pressure sensor device 10 is calculated. Can be clear. Thereby, the change of a pressure can be detected rapidly. In addition, it is possible to accurately detect a change in pressure. For example, occurrence of erroneous pressure detection can be suppressed.

  Preferably, as described above, at least some of the first electrodes 24 among the plurality of first electrodes 24 do not overlap the support portion 50 when viewed along the first direction D1. Are lined up. In addition, preferably, the projecting portion 42 is also arranged so as not to overlap the support portion 50 in the first direction D1. The effect obtained by this will be described with reference to FIG. 6 is a cross-sectional view showing a case where the pressure sensor device 10 is cut along the line AA in FIG.

  As described above, the first line X electrically connected to the gate terminals 31 of the plurality of transistors 30 extends in the first direction D1. For this reason, the plurality of transistors 30 arranged in the first direction D1 are simultaneously turned on. Here, in the present embodiment, the protruding portion 42 and the first electrode 24 do not overlap the support portion 50 in the first direction D1. For this reason, as shown in FIG. 6, the pressure sensitive body 41 can be simultaneously brought into contact with the plurality of first electrodes 24 electrically connected to the plurality of transistors 30 in the on state. Therefore, it is possible to accurately detect a difference in the degree of contact of the pressure sensitive body 41 with the plurality of first electrodes 24 arranged in the first direction D1 depending on the position of the first electrode 24. Thereby, the pressure distribution in the first direction D1 can be calculated with high accuracy.

  In the present embodiment, the second electrode 25 extends in the second direction D2 intersecting the first direction D1 in which the first line X extends. For this reason, it is possible to prevent the current flowing through the plurality of transistors 30 that are simultaneously turned on from flowing into the single second electrode 25. Thereby, it is possible to suppress a voltage drop from occurring in the second electrode 25.

  Note that various modifications can be made to the above-described embodiment. Hereinafter, modified examples will be described with reference to the drawings as necessary. In the following description and the drawings used in the following description, the same reference numerals as those used for the corresponding parts in the above embodiment are used for the parts that can be configured in the same manner as in the above embodiment. A duplicate description is omitted. In addition, when it is clear that the operational effects obtained in the above-described embodiment can be obtained in the modified example, the description thereof may be omitted.

(First modification)
In the above-described embodiment, the example in which the second electrode 25 is located in the same plane as the first electrode 24 has been described. However, as long as current can flow between the first electrode 24 and the second electrode 25 through the pressure sensitive body 41 when pressure is applied to the pressure sensitive body 41, the specifics of the second electrode 25 are not limited. The arrangement is not particularly limited. For example, as shown in FIG. 7, the second electrode 25 may be located between the pressure sensitive body 41 and the protrusion 42.

(Second modification)
As shown in FIG. 8, the pressure-sensitive portion 40 may further include a cover portion 43 that extends so as to overlap with the plurality of protrusion portions 42 when viewed along the normal direction of the substrate 21. The cover 43 is located on the opposite side of the sensor substrate 20 with respect to the protrusion 42. Examples of the material constituting the cover portion 43 include metals, thermosetting resins, thermoplastic resins, and the like. The cover portion 43 has a thickness of, for example, 1 μm or more and 1000 μm or less.

(Third Modification)
In the above-described embodiment, an example in which the pressure-sensitive body 41 and the protrusion 42 are separate members has been described. However, the present invention is not limited to this, and as shown in FIG. 9, the pressure-sensitive body 41 and the protrusion 42 may be integrally formed of the same material.

(Fourth modification)
In the above-described embodiment, an example in which the top 421 of the protrusion 42 is a flat surface has been described. However, the shape of the protrusion 42 is not particularly limited as long as the pressure applied to the pressure sensor device 10 can be concentrated on a part of the pressure-sensitive body 41. For example, as shown in FIG. 10, the protrusion 42 may have a tapered shape whose width decreases as the distance from the sensor substrate 20 increases. In this case, the top 421 is the tip of the protrusion 42. In the example shown in FIG. 10, the width W <b> 2 of the protrusion 42 is, for example, the width of the protrusion 42 at the intermediate position of the protrusion 42 in the normal direction of the substrate 21.

(Fifth modification)
FIG. 11 is a plan view showing the sensor substrate 20 of the pressure sensor device 10 according to this modification. FIG. 12 is a plan view showing a case where the pressure sensor device 10 according to the present modification is viewed from the pressure sensing unit 40 side.

  As shown in FIG. 11, the support portion 50 may extend so as to intersect the first line X or the second line Y when viewed along the normal direction of the substrate 21. In the example illustrated in FIG. 11, the support portion 50 extends in the first direction D1 so as to intersect the second line Y.

  Similar to the support portion 50, the protruding portion 42 may extend so as to intersect the first line X or the second line Y when viewed along the normal direction of the substrate 21. In the example shown in FIG. 12, the support part 50 extends in the first direction D1 so as to intersect the second line Y. In this case, the support portion 50 may overlap the plurality of first electrodes 24 when viewed along the normal direction of the substrate 21.

  Also in the present modification, as in the case of the above-described embodiment, the support portion 50 is disposed so as not to overlap the top portion 421 of the projection portion 42 when viewed along the normal direction of the substrate 21. . For this reason, when pressure is applied to the pressure sensor device 10, the protrusion 42 is displaced toward the sensor substrate 20, and the pressure sensitive body 41 can contact the first electrode 24 and the second electrode 25.

  Further, the protrusion 42 extends in parallel to the first direction D1 in which the first line X extends. For this reason, the pressure sensitive body 41 can be simultaneously brought into contact with the plurality of first electrodes 24 electrically connected to the plurality of transistors 30 that are turned on simultaneously. Thereby, the pressure distribution in the first direction D1 can be calculated with high accuracy.

(Sixth Modification)
FIG. 13 is a plan view showing the sensor substrate 20 of the pressure sensor device 10 according to this modification. FIG. 14 is a plan view showing a case where the pressure sensor device 10 according to the present modification is viewed from the pressure sensing unit 40 side.

  In the above-described embodiment, the example in which the first electrode 24 is located between the two support portions 50 adjacent in the first direction D1 or the second direction D2 has been described. However, the present invention is not limited to this, and the support portion 50 does not have to be located between two adjacent support portions 50 as shown in FIG. Although not shown, some of the support portions 50 are located in a region between two adjacent support portions 50, and the other support portions 50 are located in a region other than between the two adjacent support portions 50. May be located.

  Moreover, in the above-mentioned embodiment, the example which the top part 421 of the projection part 42 was located between the two support parts 50 adjacent in the 1st direction D1 or the 2nd direction D2 was shown. However, the present invention is not limited to this, and as shown in FIG. 14, the top portion 421 of the protruding portion 42 may not be located between two adjacent support portions 50. Although not shown, the top portions 421 of some of the protrusions 42 are located in a region between the two adjacent support portions 50, and the top portions 421 of the other protrusion portions 42 are the two adjacent support portions 50. You may be located in areas other than between.

(Seventh Modification)
FIG. 15 is a plan view showing the sensor substrate 20 of the pressure sensor device 10 according to this modification. FIG. 16 is a plan view showing a case where the pressure sensor device 10 according to the present modification is viewed from the pressure sensing unit 40 side.

  In the above-described embodiment, an example in which one first electrode 24 is located between two support portions 50 adjacent in the first direction D1 or the second direction D2 has been described. However, the present invention is not limited to this, and as shown in FIG. 15, when viewed along the normal direction of the substrate 21, between the two support portions 50 adjacent in the first direction D <b> 1 or the second direction D <b> 2. A plurality of the first electrodes 24 may be located in the middle.

  In the above-described embodiment, an example in which the top portion 421 of one protrusion 42 is located between two adjacent support portions 50 in the first direction D1 or the second direction D2 has been described. However, the present invention is not limited to this, and as shown in FIG. 16, when viewed along the normal direction of the substrate 21, between the two support portions 50 adjacent in the first direction D <b> 1 or the second direction D <b> 2. The tops 421 of the plurality of protrusions 42 may be located in the top.

(Eighth modification)
FIG. 17 is a plan view showing a case where the pressure sensor device 10 according to the present modification is viewed from the pressure sensing unit 40 side. As shown in FIG. 17, when viewed along the normal direction of the substrate 21, the top portions 421 of one protrusion 42 are arranged in a plurality of first electrodes 24 arranged in the first direction D1 and in the second direction D2. The plurality of first electrodes 24 may overlap.

  In addition, although some modified examples with respect to the above-described embodiment have been described, naturally, a plurality of modified examples can be applied in combination as appropriate.

DESCRIPTION OF SYMBOLS 10 Pressure sensor apparatus 20 Sensor board | substrate 21 Board | substrate 22 Planarization layer 23 Sensor part 24 1st electrode 25 2nd electrode 30 Transistor 31 Gate terminal 32 Insulating layer 33 1st terminal 34 2nd terminal 35 Semiconductor layer 36 Insulating layer 37 Connection part 40 Pressure sensing part 41 Pressure sensing body 42 Protruding part 421 Top part 43 Cover part 50 Supporting part 60 Object X First line Y Second line

Claims (7)

A sensor substrate having a substrate and a plurality of sensor units arranged on the substrate along a first direction and a second direction intersecting the first direction and including at least a first electrode;
A pressure-sensitive part having a pressure-sensitive body facing the sensor part, and a plurality of protrusions located on the opposite side of the sensor substrate with respect to the pressure-sensitive body;
A plurality of support portions positioned between the sensor substrate and the pressure sensitive portion;
The pressure sensor device, wherein the plurality of protrusions are arranged such that a top portion of the protrusion does not overlap the support when viewed along a normal direction of the substrate. The width of the protrusion in the first direction is smaller than the interval between the two support portions adjacent in the first direction, or
2. The pressure sensor device according to claim 1, wherein a width of the protruding portion in the second direction is smaller than a distance between two adjacent support portions in the second direction.   The plurality of sensor units each include a transistor including a first terminal and a second terminal connected to a semiconductor layer, and a gate terminal facing the semiconductor layer with an insulating layer interposed therebetween. Pressure sensor device. The sensor substrate is electrically connected to the plurality of gate terminals, connected to the first line extending in the first direction, the plurality of first terminals or the plurality of second terminals, and extending in the second direction. A second line extending,
4. The pressure sensor device according to claim 3, wherein a width of the protruding portion in the second direction is smaller than a distance between two adjacent support portions in the second direction.   The at least some of the first electrodes of the plurality of first electrodes are arranged in the first direction so as not to overlap the support portion when viewed along the first direction. The pressure sensor device described.   6. The pressure sensor according to claim 4, wherein the protrusion extends along the first direction so as to intersect with the plurality of second lines when viewed along the normal direction of the substrate. apparatus.   The said support part is extended along the said 1st direction so that it may cross | intersect several said 2nd line when it sees along the normal line direction of the said board | substrate. The pressure sensor device according to 1.