JP2018192749A - Screen printing plate, and manufacturing method of screen printing plate - Google Patents

Abstract

To provide a screen printing plate with suppression of generation of blur and fade on a printed image.SOLUTION: A screen printing plate has a first metal layer 1 and a second metal layer 2, in which an aperture 3 is formed with penetration between both main surfaces of the second metal layer 2, a mesh pore 4 is formed in the first metal layer 1 in an inner side than a marginal part of the aperture 3 when the first metal layer 1 and the second metal layer 2 are viewed from a second metal layer 2 side, and a coating layer 5 is formed on a main surface of the second metal layer 2 in an outer side than the marginal part of the aperture 3. Surface free energy of a surface of the coating layer 5 is smaller than surface free energy of surfaces of the first metal layer 1 and the second metal layer 2.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a screen printing plate. The present invention also relates to a method for producing a screen printing plate suitable for producing the screen printing plate of the present invention.

  Patent Document 1 (Japanese Patent Laid-Open No. 2015-131426) discloses a screen printing plate in which mesh holes are formed in a metal layer. FIG. 13 shows a screen printing plate 1100 disclosed in Patent Document 1.

  The screen printing plate 1100 includes a metal layer (printing sheet) 103 in which a first metal layer (first layer) 101 and a second metal layer (second layer) 102 are laminated. A mesh hole 104 is formed through the first metal layer 101. An opening 105 is formed through the second metal layer 102. When the metal layer 103 is viewed from the second metal layer 102 side, the mesh hole 104 is formed inside the outer edge of the opening 105.

  In the screen printing plate 1100, the upper side in FIG. 13 is a surface that comes into contact with the printing material, and the opening 105 of the second metal layer 102 forms a printing part P that applies printing paste to the printing material, and the second metal layer 102. The portion other than the opening 105 constitutes a non-printing portion NP that does not apply the printing paste to the substrate. The screen printing plate 1100 supplies printing paste to the printing part P from the lower side in FIG. 13 through the mesh holes 104 by using squeegee rubber or the like, and performs printing on the printing material.

  On the screen printing plate 1100, when the printing pressure, the distance between the metal layer 103 and the printing material, the selection of squeegee rubber, or the like is inappropriate, or when printing is performed continuously for a long time, the printing portion P is not In some cases, the printing paste wraps around the printing unit NP, and the printed image (hereinafter referred to as “printed image”) is smeared. That is, the print paste may adhere to the portion of the substrate to which the print paste should not be originally attached.

  A screen printing plate that solves this problem is disclosed in Japanese Patent Application Laid-Open No. 2012-6390. FIG. 14 shows a screen printing plate (screen printing stencil) 1200 disclosed in Patent Document 2. As shown in FIG.

  The screen printing plate 1200 includes a mesh 201 made of metal, resin, carbon fiber, or the like. An emulsion 203 is formed on the mesh 201 by providing openings (print pattern openings) 202 having a predetermined pattern shape. In the screen printing plate 1200, the portion of the opening 202 constitutes the printing portion P, and the portion of the emulsion 203 constitutes the non-printing portion NP.

  The screen printing plate 1200 further includes a thin film 204 of a fluorine-containing silane coupling agent that repels the printing paste on the mesh 201 inside the opening 202, the inner wall of the opening 202, and the non-printing part NP around the opening 202, respectively. Is formed. The screen printing plate 1200 uses the thin film 204 to suppress the wraparound of the printing paste from the printing part P to the non-printing part NP, and to prevent the printed image from being blurred.

JP2015-131426A JP 2012-6390 A

  In the screen printing plate 1200, a thin film 204 of a fluorine-containing silane coupling agent is formed not only on the non-printing portion NP around the opening 202 but also on the mesh 201 inside the opening 202 and the inner wall of the opening 202. For this reason, the thin film 204 repels the printing paste inside the opening 202, and the printing paste is not sufficiently supplied inside the opening 202, which may cause blurring in the printed image. That is, there is a case where the amount of the printing paste is insufficient at the portion of the printing material to which the printing paste is to adhere, and printing with high accuracy cannot be performed.

  The screen printing plate 1200 suppresses the occurrence of blurring in the printed image, but has a problem that the printed image may be blurred instead. Therefore, development of a new screen printing plate in which the occurrence of both blurring and blurring is suppressed has been demanded.

  The present invention has been made to solve the above-described conventional problems, and the screen printing plate according to one aspect of the present invention includes a metal layer as a means thereof, and the metal layer includes a printing unit and a non-printing unit. A plurality of mesh holes are formed in the printed part of the metal layer so as to penetrate between both main surfaces, and the surface of the non-printed part of one main surface of the metal layer is more free than the surface of the metal layer. It is assumed that a coating layer with low energy is formed.

  Further, in the screen printing plate according to another aspect of the present invention, the metal layer includes at least two layers of a first metal layer and a second metal layer laminated on each other. When the first metal layer and the second metal layer are viewed in the stacking direction of the first metal layer and the second metal layer from the second metal layer side through the opening between the main surfaces, It is assumed that a mesh hole is formed in the first metal layer inside the edge of the opening, and a coating layer is formed on the main surface of the second metal layer outside the edge of the opening. In this case, since the coating layer can suppress the wraparound of the printing paste to the printing portion, the occurrence of blurring of the printed image is suppressed. Moreover, since the coating layer is not formed in the 1st metal layer in which the mesh hole was formed, printing paste is fully supplied to a printing part, and generation | occurrence | production of the blur of a printed image is suppressed.

  Further, the screen printing plate according to another aspect of the present invention has a single metal layer. Also in this case, the coating layer suppresses the wrapping of the printing paste to the printing portion, and the occurrence of the printed image blur is suppressed. In addition, since the coating layer is not formed on the printing portion in which the mesh holes are formed, the printing paste is sufficiently supplied, and the occurrence of blurring of the printed image is suppressed.

  The surface free energy of the surface of the coating layer is preferably 20 mN / m or less. In this case, since the coating layer can effectively suppress the wrapping of the printing paste to the printing portion, the occurrence of blurring can be more reliably suppressed.

  The method for producing a screen printing plate according to one aspect of the present invention includes a step of preparing a conductive base, a step of applying a first photosensitive resist on one main surface of the base, and a first step. On one main surface of the base on which the step of exposing the photosensitive resist to a predetermined pattern shape, the step of developing the first photosensitive resist, and the first photosensitive resist having the predetermined pattern shape are formed. Plating, forming a first metal layer in which mesh holes are formed in the portion where the first photosensitive resist is formed, removing the first photosensitive resist from the base, and first steps including mesh holes. A step of applying a second photosensitive resist on one metal layer; a step of exposing the second photosensitive resist to a predetermined pattern shape; a step of developing the second photosensitive resist; and a predetermined pattern shape. Second photosensitive resist is in shape Plating the first metal layer and forming a second metal layer having an opening in a portion where the second photosensitive resist is formed; and the second metal layer and the second photosensitive resist. And forming a coating layer whose surface free energy is smaller than the surface free energy of the surfaces of the first metal layer and the second metal layer, and forming the second photosensitive resist on the second photosensitive resist. And a step of removing together with the coating layer formed thereon.

  Moreover, the method for producing a screen printing plate according to another aspect of the present invention includes a step of preparing a conductive base, a step of applying a first photosensitive resist on one main surface of the base, On one main surface of the base on which the step of exposing the first photosensitive resist to a predetermined pattern shape, the step of developing the first photosensitive resist, and the first photosensitive resist having the predetermined pattern shape are formed. And a step of forming a metal layer having a mesh hole formed in a portion where the first photosensitive resist is formed, a step of removing the first photosensitive resist from the base, and a metal including the mesh hole. A step of applying a second photosensitive resist on the layer, a step of exposing the second photosensitive resist in a predetermined pattern shape, a step of developing the second photosensitive resist, a metal layer and the second photosensitive resist On the surface, surface free Forming a coating layer whose energy is smaller than the surface free energy of the surface of the metal layer, and removing the second photosensitive resist together with the coating layer formed on the second photosensitive resist. Shall be.

  In the printed image printed using the screen printing plate of the present invention, both the occurrence of blurring and blurring are suppressed.

  Moreover, according to the method for producing a screen printing plate of the present invention, the screen printing plate of the present invention can be easily produced.

FIG. 1A is a cross-sectional view of the screen printing plate 100 according to the first embodiment. FIG. 1B is a cross-sectional view of a main part of the screen printing plate 100. FIG. 2 is a cross-sectional view of a screen printing plate 1300 according to a comparative example. FIG. 3 is a graph showing changes in area 3 CV when continuous printing is performed using the screen printing plate 100 and the screen printing plate 1300, respectively. 4A to 4D are cross-sectional views showing steps performed in an example of a method for manufacturing the screen printing plate 100. FIG. FIGS. 5E to 5H are continuations of FIG. 4D, and are cross-sectional views illustrating steps performed in an example of a method for manufacturing the screen printing plate 100. 6 (I) to 6 (L) are continuations of FIG. 5 (H), and are cross-sectional views illustrating steps performed in an example of a method for manufacturing the screen printing plate 100, respectively. FIG. 7A is a cross-sectional view of the screen printing plate 200 according to the second embodiment. FIG. 7B is a cross-sectional view of the main part of the screen printing plate 200. FIG. 8A is a cross-sectional view of a print image printed with the screen printing plate 200. FIG. 8B is a cross-sectional view of a print image printed with the screen printing plate 1300 according to the comparative example. FIG. 9 is a graph showing the relationship between the surface free energy of the surface of the coating layer 15 of the screen printing plate 200 and the area 3CV of the printed image. FIGS. 10A to 10D are cross-sectional views illustrating steps performed in an example of a method for manufacturing the screen printing plate 200. FIGS. 11E to 11H are continuations of FIG. 10D, and are cross-sectional views illustrating steps performed in an example of a method for manufacturing the screen printing plate 200. 12 (I) to 12 (K) are continuations of FIG. 11 (H) and are cross-sectional views illustrating steps performed in an example of a method for manufacturing the screen printing plate 200, respectively. 1 is a cross-sectional view of a screen printing plate 1100 disclosed in Patent Document 1. FIG. 2 is a cross-sectional view of a screen printing plate 1200 disclosed in Patent Document 2. FIG.

  Hereinafter, embodiments for carrying out the present invention will be described with reference to the drawings.

  Each embodiment shows an embodiment of the present invention exemplarily, and the present invention is not limited to the content of the embodiment. Moreover, it is also possible to implement combining the content described in different embodiment, and the implementation content in that case is also included in this invention.

[First Embodiment]
1A and 1B show a screen printing plate 100 according to the first embodiment, respectively. However, FIG. 1A is a cross-sectional view of the screen printing plate 100. FIG. 1B is a cross-sectional view of a main part of the screen printing plate 100, and shows an enlarged portion indicated by a broken line X in FIG.

  The screen printing plate 100 includes a first metal layer 1 and a second metal layer 2 that are laminated and integrated with each other.

  The types of metals constituting the first metal layer 1 and the second metal layer 2 are arbitrary, but in the present embodiment, a metal mainly composed of nickel is used. Note that the first metal layer 1 and the second metal layer 2 may have different metal types.

  The thicknesses of the first metal layer 1 and the second metal layer 2 are also arbitrary. In the present embodiment, the thickness of the first metal layer 1 is 10 μm, and the thickness of the second metal layer is 8 μm.

  A plurality of openings 3 are formed through both main surfaces of the second metal layer 2. The shape of the opening 3 seen in the plane direction is arbitrary, but in the present embodiment, it is rectangular. When the second metal layer 2 is viewed in the planar direction, the plurality of openings 3 are formed in a matrix on the second metal layer 2.

  A plurality of mesh holes 4 are formed in the first metal layer 1. When the first metal layer 1 and the second metal layer 2 are viewed in the stacking direction of the first metal layer 1 and the second metal layer 2 from the second metal layer 2 side, the mesh hole 4 has each opening portion. 3 is formed inside the edge portion.

  When the first metal layer 1 and the second metal layer 2 are viewed from the side of the second metal layer 2 in the stacking direction of the first metal layer 1 and the second metal layer 2, rather than the edge of the opening 3. A coating layer 5 is formed on the main surface of the outer second metal layer 2. Although the thickness of the coating layer 5 is arbitrary, in this embodiment, it was 50 nm.

  The surface free energy on the surface of the coating layer 5 is smaller than the surface free energy on the surfaces of the first metal layer 1 and the second metal layer 2. The surface free energy on the surface of the coating layer 5 is preferably 20 mN / m or less. This is because if it is 20 mN / m or less, the coating layer 5 exhibits good water repellency with respect to the printing paste.

  As the material of the coating layer 5, for example, a fluorine compound, a hydrophobic silane coupling agent, DLC (Diamond-like Carbon), or the like can be used. In the present embodiment, a fluorine compound is used as the material of the coating layer 5. However, the material of the coating layer 5 is arbitrary, and other than the above may be used.

  In the screen printing plate 100, the lower side in FIGS. 1A and 1B is a surface that comes into contact with a printing material during printing. And the opening part 3 formed in the 2nd metal layer 2 comprises the printing part P which provides a printing paste to to-be-printed material. Moreover, the part in which the coating layer 5 of the main surface of the 2nd metal layer 2 is formed comprises the non-printing part NP which does not provide printing paste to a to-be-printed material.

  The screen printing plate 100 supplies a printing paste from the upper side in FIGS. 1A and 1B to the printing part P through the mesh holes 4 by squeegee rubber or the like, and prints on the printing material.

  In the screen printing plate 100 having the above structure, the coating layer 5 suppresses the wrapping of the printing paste to the non-printing portion NP during printing, and thus the printed image is less likely to be blurred. In addition, since the coating layer 5 is not formed on the first metal layer 1 in which the mesh holes 4 are formed, the printing paste is sufficiently supplied to the printing portion P, and the printed image is less likely to be blurred.

  In order to confirm the effectiveness of the present invention, the following experiment was conducted.

(Experiment 1)
First, as an example, a screen printing plate 100 according to the first embodiment was produced. Moreover, the screen printing plate 1300 shown in FIG. 2 was produced as a comparative example. In the screen printing plate 1300, the coating layer 5 is not formed on the second metal layer 2. That is, the screen printing plate 1300 is obtained by omitting the coating layer 5 from the screen printing plate 100.

  The screen printing plates 100 and 1300 are openings 3 (printing portion P) as screen printing plates for printing a conductive paste (printing paste) for internal electrodes on a ceramic green sheet in a manufacturing process of a multilayer ceramic electronic component. ) Was formed. Examples of the multilayer ceramic electronic component include a multilayer ceramic thermistor and a multilayer ceramic capacitor.

  Specifically, in the screen printing plates 100 and 1300, the first metal layer 1 and the second metal layer 2 are squares having a vertical dimension of 120 mm and a horizontal dimension of 120 mm. In addition, the opening 3 is a rectangle having a horizontal dimension of 0.470 mm and a vertical dimension of 0.120 mm in accordance with the shape and size of the internal electrode of the multilayer ceramic electronic component. Then, the openings 3 were continuously formed in the second metal layer 2 in a matrix shape with a horizontal interval of 0.660 mm and a vertical interval of 0.130 mm. In addition, a cylindrical mesh hole 4 having a diameter of 16 μm was formed in the first metal layer 1, with a total of 95 in the form of 19 horizontal × 5 vertical for one opening 3.

  In the screen printing plate 100, the coating layer 5 was formed by vacuum deposition of a fluorine compound, and the thickness was 50 nm. Moreover, the surface free energy of the surface of the coating layer 5 was 14 mNm. On the other hand, the surface free energy of the surface of the non-printing part NP of the screen printing plate 1300, that is, the surface free energy of the surface of the second metal layer 2 was 90 mNm.

Using the screen printing plate 100, a conductive paste was printed on a ceramic green sheet. Similarly, the conductive paste was printed on the ceramic green sheet using the screen printing plate 1300. And the variation of both printed images was measured. Specifically, using an optical measuring machine, the printed image in the ceramic green sheet surface after printing is measured at 25 points of 5 × 5 at intervals of 2.4 cm, and the area, horizontal dimension, and vertical dimension are measured. The variation was evaluated at 3 CV. 3CV is defined by Equation 1 below.

Table 1 shows a comparison result of the area 3CV, the horizontal dimension 3CV, and the vertical dimension 3CV.

  As can be seen from Table 1, when the screen printing plate 100 according to the example is used, 3 CV is reduced in all of the area, the horizontal dimension, and the vertical dimension compared to the case where the screen printing plate 1300 according to the comparative example is used. It was confirmed that variation was suppressed in all of the area, the horizontal dimension, and the vertical dimension. That is, it has been found that if the screen printing plate 100 according to the example is used, a highly accurate print image without blurring can be obtained.

(Experiment 2)
Next, continuous printing of 100 shots was performed using the screen printing plate 100. Similarly, 100-shot continuous printing was performed using a screen printing plate 1300. Then, the transition of the area 3CV of both printed images was compared. The results are shown in FIG.

  As can be seen from FIG. 3, when the screen printing plate 1300 according to the comparative example is used, the area 3CV gradually increases as the number of print shots increases. On the other hand, when the screen printing plate 100 according to the embodiment is used, the area 3CV does not increase even when the number of print shots increases, and is stable. From this, it was found that if the screen printing plate 100 according to the example is used, a high-precision printed image without blurring can be obtained even if continuous printing is performed.

(Example of method for producing screen printing plate 100)
An example of a method for manufacturing the screen printing plate 100 will be described with reference to FIGS. 4 (A) to 6 (L).

  First, as shown to FIG. 4 (A), the electroconductive base 50 used for manufacture is prepared. Although the kind of metal which comprises the base 50 is arbitrary, in this embodiment, stainless steel (SUS) was used.

  Next, as shown in FIG. 4B, a first photosensitive resist 51 is applied on one main surface of the base 50. In this embodiment, the first photosensitive resist 51 is a negative type.

  Next, as shown in FIG. 4C, the first photosensitive resist 51 is exposed using a mask 52 in which through holes corresponding to the shape and number of mesh holes 4 to be formed are formed.

  Next, as shown in FIG. 4D, the first photosensitive resist 51 is developed. As a result, the first photosensitive resist 51 having the shape and the number corresponding to the shape and the number of the mesh holes 4 to be formed is developed on the base 50.

  Next, as shown in FIG. 5E, electrolytic plating is performed on one main surface of the base 50 on which the first photosensitive resist 51 is developed to form the first metal layer 1. In the present embodiment, nickel electrolytic plating is used for electrolytic plating.

  Next, as shown in FIG. 5F, the first photosensitive resist 51 is removed from the base 50. As a result, mesh holes 4 are formed in the first metal layer 1.

  Next, as shown in FIG. 5G, a second photosensitive resist 53 is applied on the first metal layer 1 including the mesh holes 4. As the second photosensitive resist 53, the same one as the first photosensitive resist 51 was used.

  Next, as shown in FIG. 5 (H), the second photosensitive resist 53 is exposed using a mask 54 in which through holes corresponding to the shape and number of the openings 3 to be formed are formed.

  Next, as shown in FIG. 6I, the second photosensitive resist 53 is developed. As a result, the second photosensitive resist 53 having the shape and the number corresponding to the shape and the number of the opening 3 to be formed is developed on the first metal layer 1.

  Next, as shown in FIG. 6J, electrolytic plating is performed on the first metal layer 1 on which the second photosensitive resist 53 has been developed to form the second metal layer 2. Also in this step, nickel electrolytic plating was used for electrolytic plating.

  Next, as shown in FIG. 6K, the coating layer 5 is formed on the second metal layer 2 and the second photosensitive resist 53 by vacuum deposition. However, the formation method of the coating layer 5 is not limited to vacuum vapor deposition, You may form the coating layer 5 using other thin film techniques, such as sputtering and CVD (Chemical Vapor Deposition; Chemical vapor deposition).

  Next, as shown in FIG. 6L, the second photosensitive resist 53 is removed from the first metal layer 1 together with the coating layer 5 formed on the second photosensitive resist 53. As a result, the opening 3 is formed in the second metal layer 2, and the screen printing plate 100 is formed on the base 50.

  Finally, although not shown, the screen printing plate 100 is removed from the base 50. Thus, the screen printing plate 100 is completed.

[Second Embodiment]
FIGS. 7A and 7B show a screen printing plate 200 according to the second embodiment, respectively. However, FIG. 7A is a cross-sectional view of the screen printing plate 200. FIG. 7B is a cross-sectional view of a main part of the screen printing plate 200, and shows an enlarged portion indicated by a broken line X in FIG.

  The screen printing plate 100 according to the first embodiment described above includes two layers of the first metal layer 1 and the second metal layer 2 that are laminated and integrated with each other. On the other hand, the screen printing plate 100 according to the second embodiment includes a single metal layer 11.

  In the present embodiment, the metal layer 11 is made of a metal whose main component is nickel and has a thickness of 10 μm.

  A plurality of mesh holes 14 are formed in the metal layer 11. A plurality of mesh holes 14 are collected and formed in groups.

  A coating layer 15 is formed on one main surface (the lower main surface in FIG. 7) of the metal layer 11. The coating layer 15 is not formed in the region where the mesh hole 14 is formed, and the portion is cut out to constitute a non-forming portion 15 a of the coating layer 15. One non-forming portion 15a is formed for each of the plurality of mesh holes 14 that are collected and formed. In this embodiment, the shape of each non-formation part 15a seen in the plane direction was made into the rectangle. Also in this embodiment, a fluorine compound is used as the material of the coating layer 5. The surface free energy on the surface of the coating layer 15 is smaller than the surface free energy on the surface of the metal layer 11.

  In the screen printing plate 200, the lower side in FIGS. 7A and 7B is a surface that comes into contact with a printing material during printing. And the non-formation part 15a of the coating layer 15 of the main surface of the metal layer 11 comprises the printing part P which provides a printing paste to a to-be-printed material. Moreover, the part in which the coating layer 15 of the main surface of the metal layer 11 is formed comprises the non-printing part NP which does not provide printing paste to a to-be-printed object.

  The screen printing plate 200 supplies printing paste to the printing part P from the upper side in FIGS. 7A and 7B through the mesh holes 14 by using squeegee rubber or the like, and performs printing on the substrate.

  In the screen printing plate 200 having the above-described structure, the coating layer 15 suppresses the wrapping of the printing paste to the non-printing part NP during printing. In addition, since the coating layer 15 is not formed in the area of the metal layer 11 where the mesh holes 14 are formed, the printing paste is sufficiently supplied to the printing part P, and the printed image is less likely to be blurred.

  As shown in Table 1, the area 3CV of the printed image printed with the screen printing plate 1300 according to the comparative example shown in FIG. 2 was 2.43%. As shown in Table 1, the area 3CV of the printed image printed with the screen printing plate 100 according to the first embodiment was 0.85%. On the other hand, the area 3CV of the printed image printed with the screen printing plate 200 according to the second embodiment under the same conditions was 0.80. It has been found that if the screen printing plate 200 according to the second embodiment is used, a printed image with higher accuracy can be obtained than when the screen printing plate 100 according to the first embodiment is used.

  FIG. 8A shows a cross section of a print image printed by the screen printing plate 200 according to the second embodiment. For comparison, FIG. 8B shows a cross section of a printed image printed with the screen printing plate 1300 according to the comparative example.

  As can be seen from FIG. 8A, the print image printed by the screen printing plate 200 has a flat top surface and a well-shaped shape. On the other hand, the printed image printed with the screen printing plate 1300 according to the comparative example has a so-called saddle shape in which both shoulder portions on the upper surface are greatly raised. For example, when the printed image is a conductive paste for an internal electrode printed on a ceramic green sheet in a manufacturing process of a multilayer ceramic electronic component, the shape is a saddle shape. It will cause individual variation in the electrical characteristics of the. In other words, the bulge of both shoulder parts of the printed image is crushed by pressing the ceramic green sheets on the upper and lower surfaces at the time of press molding. Large variations occur in the shape and area of the formed internal electrodes. This is because variations in the electrical characteristics of the completed multilayer ceramic electronic component occur due to variations in the shape and area of the internal electrodes.

  Since the printed image printed using the screen printing plate 200 has a flat cross-sectional top surface and a regular shape, the screen printing plate 200 is used to conduct electricity for the internal electrodes of the multilayer ceramic electronic component. If the conductive paste is printed, it is possible to suppress variation in electrical characteristics of the completed multilayer ceramic electronic component.

  Next, in order to investigate the optimum value of the surface free energy of the surface of the coating layer 15, the following experiment was performed.

(Experiment 3)
First, five screen printing plates 200 according to the second embodiment were produced.

  When the surface free energy of the surface of the coating layer 15 of the produced screen printing plate 200 was examined, it was 11 mN / m. On the other hand, the surface free energy of the surface of the metal layer 11 on which the coating layer 15 was not formed was 90 N / m. The surface free energy was examined by a method of measuring a specific solvent with a contact angle.

  Next, plasma treatment was performed on the surfaces of the coating layers 15 of the four screen printing plates 200 with different strengths. The surface free energy of the surface of each coating layer 15 after the plasma treatment was 17 mN / m, 20 mN / m, 25 mN / m, and 30 mN / m. That is, the surface free energy of the surface of each coating layer 15 increased by performing the plasma treatment.

  Next, using 5 screen printing plates 200, the conductive paste was printed on the ceramic green sheet under the same conditions as in Experiment 1 described above, and the area 3CV of each printed image was examined. The results are shown in FIG.

  As can be seen from FIG. 9, when the surface free energy on the surface of the coating layer is 20 mN / m or less, the area 3CV is small and an excellent printed image can be obtained. From the above results, it is considered that the surface free energy of the coating layer is preferably 20 mN / m or less in order to suppress the occurrence of blurring of the printed image.

(Example of manufacturing method of screen printing plate 200)
An example of a method for producing the screen printing plate 200 will be described with reference to FIGS. 10 (A) to 12 (K).

  First, as shown in FIG. 10A, a conductive base 60 is prepared.

  Next, as shown in FIG. 10B, a first photosensitive resist 61 is applied on one main surface of the base 60.

  Next, as shown in FIG. 10C, the first photosensitive resist 61 is exposed using a mask 62 in which through holes corresponding to the shape and number of mesh holes 14 to be formed are formed.

  Next, as shown in FIG. 10D, the first photosensitive resist 61 is developed.

  Next, as shown in FIG. 11E, electrolytic plating is performed on one main surface of the base 60 on which the first photosensitive resist 61 is developed to form the metal layer 11.

  Next, as shown in FIG. 11F, the first photosensitive resist 61 is removed from the base 60. As a result, mesh holes 14 are formed in the metal layer 11.

  Next, as shown in FIG. 11G, a second photosensitive resist 63 is applied on the metal layer 11 including the mesh holes 14.

  Next, as shown in FIG. 11 (H), the second photosensitive resist 63 is exposed using a mask 64 in which through holes corresponding to the shape and number of the non-formed portions 15a of the coating layer 15 to be formed are formed. To do.

  Next, as shown in FIG. 12I, the second photosensitive resist 63 is developed. As a result, the second photosensitive resist 63 having the shape and the number corresponding to the shape and the number of the non-forming portions 15a of the coating layer 15 to be formed is developed on the metal layer 11.

  Next, as shown in FIG. 12J, the coating layer 15 is formed on the metal layer 11 and the second photosensitive resist 63 by vacuum deposition.

  Next, as shown in FIG. 12K, the second photosensitive resist 63 is removed from the metal layer 11 together with the coating layer 15 formed on the second photosensitive resist 63. As a result, the coating layer 15 and the non-forming portion 15 a of the coating layer 15 are formed on the metal layer 11, and the screen printing plate 200 is formed on the base 60.

  Finally, although not shown, the screen printing plate 200 is removed from the base 60. Thus, the screen printing plate 200 is completed.

  The screen printing plate 100 according to the first embodiment, the screen printing plate 200 according to the second embodiment, an example of a method for manufacturing the screen printing plate 100, and an example of a method for manufacturing the screen printing plate 200 have been described. However, the present invention is not limited to the contents described above, and various modifications can be made in accordance with the spirit of the invention.

  For example, in the screen printing plates 100 and 200, a fluorine compound is used as the material of the coating layers 5 and 15. However, the material of the coating layers 5 and 15 is arbitrary, and a hydrophobic silane coupling agent or DLC may be used. good.

  Further, in the screen printing plates 100 and 200, the first metal layer 1, the second metal layer 2, and the metal layer 11 are formed of a metal whose main component is nickel, but the first metal layer 1 and the second metal layer 2 are formed. The type of metal constituting the metal layer 11 is arbitrary, and other types of metals may be used.

  Moreover, the formation method of the 1st metal layer 1, the 2nd metal layer 2, and the metal layer 11 is not restricted to electroplating, Another method can be used.

  In the example of the method for manufacturing the screen printing plates 100 and 200, the first photosensitive resists 51 and 61 and the second photosensitive resists 53 and 63 are negative ones. Instead, a positive type resist is used. You may use things.

DESCRIPTION OF SYMBOLS 1 ... 1st metal layer 2 ... 2nd metal layer 11 ... Metal layer 3 ... Opening part 4, 14 ... Mesh hole 5, 15 ... Coating layer 15a ... (Coating Non-formation part 50, 60 of layer 15 ... base 51, 61 ... first photosensitive resist 53, 63 ... second photosensitive resist 52, 54, 62, 64 ... mask P ..Printing part NP ... Non-printing part

Claims (6)

With a metal layer,
The metal layer includes a printing part and a non-printing part,
A screen printing plate in which a plurality of mesh holes are formed in the printing portion of the metal layer so as to penetrate between both main surfaces,
A screen printing plate in which a coating layer having a surface free energy smaller than the surface of the metal layer is formed on the non-printing portion of one main surface of the metal layer. The metal layer includes at least two layers of a first metal layer and a second metal layer stacked on each other;
An opening is formed in the second metal layer so as to penetrate between both main surfaces,
When viewing the first metal layer and the second metal layer from the second metal layer side in the stacking direction of the first metal layer and the second metal layer,
The mesh hole is formed in the first metal layer inside the edge of the opening,
The screen printing plate according to claim 1, wherein the coating layer is formed on a main surface of the second metal layer outside an edge of the opening.   The screen printing plate according to claim 1, wherein the metal layer comprises one layer.   The screen printing plate according to any one of claims 1 to 3, wherein the surface free energy of the surface of the coating layer is 20 mN / m or less. A step of preparing a conductive base;
Applying a first photosensitive resist on one main surface of the base;
Exposing the first photosensitive resist to a predetermined pattern shape;
Developing the first photosensitive resist;
Plating is performed on one main surface of the base on which the first photosensitive resist having a predetermined pattern shape is formed, and a mesh hole is formed in a portion where the first photosensitive resist is formed. Forming a metal layer;
Removing the first photosensitive resist from the base;
Applying a second photosensitive resist on the first metal layer including the mesh holes;
Exposing the second photosensitive resist to a predetermined pattern shape;
Developing the second photosensitive resist;
Plating is performed on the first metal layer in which the second photosensitive resist having a predetermined pattern shape is formed, and a second metal layer in which an opening is formed in a portion in which the second photosensitive resist is formed. Forming, and
Forming a coating layer on the second metal layer and the second photosensitive resist, the surface free energy of which is smaller than the surface free energy of the surfaces of the first metal layer and the second metal layer; ,
Removing the second photosensitive resist together with the coating layer formed on the second photosensitive resist. A step of preparing a conductive base;
Applying a first photosensitive resist on one main surface of the base;
Exposing the first photosensitive resist to a predetermined pattern shape;
Developing the first photosensitive resist;
Metal on which one main surface of the base on which the first photosensitive resist having a predetermined pattern shape is formed is plated, and mesh holes are formed in a portion where the first photosensitive resist is formed Forming a layer;
Removing the first photosensitive resist from the base;
Applying a second photosensitive resist on the metal layer including the mesh holes;
Exposing the second photosensitive resist to a predetermined pattern shape;
Developing the second photosensitive resist;
Forming a coating layer having a surface free energy on the surface of the metal layer smaller than the surface free energy of the surface of the metal layer on the metal layer and the second photosensitive resist;
Removing the second photosensitive resist together with the coating layer formed on the second photosensitive resist.

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