JP2018189492A - Analyzer - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an analyzer with which it is possible to identify the type of sample holder easily.SOLUTION: A plurality of first terminals 31, provided on a sample holder 2, each include a terminal electrically connected to an electrical component equipped to the sample holder 2. A plurality of second terminals 32, provided on a sample stage 3, each come in contact with the plurality of terminals 31 of the sample holder 2 attached to the sample stage 3. A controller 300, provided on the outside of a vacuum chamber, input/output a signal between the plurality of first terminals 31 via the plurality of second terminals 32. Out of the plurality of first terminals 31, a pair of electrically unconnected terminals are shorted together. The controller 300 identifies the type of the sample holder 2 on the basis of a change of electrical conduction state between terminals, out of the plurality of second terminals 32, that come in contact with the pair of terminals when the sample holder 2 is attached to the sample stage 3.SELECTED DRAWING: Figure 2

Description

  The present invention relates to an analyzer for performing analysis by irradiating a sample in a vacuum chamber with an electron beam or X-ray.

  An electron probe microanalyzer (EPMA), which is an example of an analyzer, performs elemental analysis of a sample by irradiating the sample with an electron beam and detecting X-rays generated from the sample by this irradiation. it can. A sample holder for holding a sample can be attached to and detached from the EPMA. A plurality of sample holders are prepared depending on the application, and analysis can be performed by mounting a sample holder suitable for the application on the sample stage.

  The sample stage is provided in a vacuum chamber, and a sample holder can be attached to and detached from the sample stage. The sample holder is provided with a plurality of electronic components (not shown) such as a motor, and a first terminal electrically connected to each of these electronic components is formed on the lower surface of the sample holder. On the other hand, a plurality of second terminals that come into contact with the first terminals when the sample holder is attached are formed on the upper surface of the sample stage. Such a configuration in which electrical connection is made by contact of connection terminals is generally employed in analyzers (see, for example, Patent Document 1 below).

  A controller provided outside the vacuum chamber is connected to the sample stage via a connector. Thereby, control with respect to the electronic component with which the sample holder was equipped can be performed from the controller connected to the sample holder via the 1st terminal and the 2nd terminal.

Japanese Patent Laying-Open No. 2015-83989

  A dedicated controller must be connected to each of the plurality of sample holders prepared according to the application. Therefore, every time the sample holder is replaced, it is necessary to attach and detach the connector and manually connect another controller, which causes a problem that the operation becomes complicated.

  In addition, since the sample holder on the sample stage installed in the vacuum chamber cannot be viewed from the outside of the vacuum chamber, the sample holder after installation cannot be easily identified. For this reason, there is a possibility that a controller that does not correspond to the installed sample holder may be erroneously connected. In this case, the sample holder and the controller may be damaged.

  The present invention has been made in view of the above circumstances, and an object thereof is to provide an analyzer that can easily identify the type of a sample holder.

(1) An analyzer according to the present invention is an analyzer that performs an analysis by irradiating a sample in a vacuum chamber with an electron beam or an X-ray, and includes a sample holder, a mounting portion, and a plurality of first terminals. And a plurality of second terminals and a controller. The sample holder holds a sample. The attachment portion is provided in the vacuum chamber, and the sample holder can be attached and detached. The plurality of first terminals include terminals provided on the sample holder and electrically connected to electrical components provided on the sample holder. The plurality of second terminals are provided in the attachment portion and contact the plurality of first terminals of the sample holder attached to the attachment portion. The controller is provided outside the vacuum chamber, and inputs or outputs a signal with the plurality of first terminals via the plurality of second terminals. Of the plurality of first terminals, a pair of terminals that are not connected to the electrical component are short-circuited. The controller determines the type of the sample holder based on a change in an energization state between the terminals that contact the pair of terminals when the sample holder is attached to the attachment portion among the plurality of second terminals. Identify.

  According to such a configuration, among the plurality of first terminals provided on the sample holder, a pair of terminals that are not connected to the electrical component are short-circuited, whereby a plurality of second terminals provided on the attachment portion. Of the terminals, the type of the sample holder can be identified based on a change in the energization state between the terminals that are in contact with the pair of terminals. Therefore, it is possible to easily identify the type of the sample holder by using an unused terminal among the plurality of first terminals provided on the sample holder.

(2) The analyzer may further include a signal switching device connected to the plurality of second terminals. In this case, a plurality of types of the controllers may be connectable to the plurality of second terminals via the signal switching device. In addition, the signal switching device automatically performs a wiring switching operation according to the type of the sample holder when the sample holder is mounted on the mounting portion, so that the controller corresponding to the sample holder is used. May be connected to the plurality of second terminals.

  According to such a configuration, the switching operation of the wiring is automatically performed by the signal switching device, and the controller of the type corresponding to the sample holder attached to the attachment portion can be automatically connected to the plurality of second terminals. . Therefore, since it is not necessary to manually reconnect the controller corresponding to the sample holder, the work can be prevented from becoming complicated.

(3) The plurality of first terminals may include a plurality of pairs of terminals not connected to the electrical component, and the terminals of each pair may be short-circuited. In this case, the signal switching device may include a switching unit that switches a connection state of wirings to the plurality of pairs of terminals.

  According to such a configuration, it is possible to easily identify more types of sample holders by switching the connection state of wirings to a plurality of pairs of short-circuited terminals by the switching unit.

  According to the present invention, the type of the sample holder can be easily identified using the unused terminal among the plurality of first terminals provided on the sample holder.

It is the schematic which showed the structural example of EPMA which concerns on one Embodiment of this invention. It is the schematic for demonstrating the electrical structure regarding a sample holder. It is the circuit diagram which showed an example of the signal switching apparatus. It is the circuit diagram which showed 1st Example of the sample holder. It is a circuit diagram when the sample holder of FIG. 4 is attached to the sample stage. It is the circuit diagram which showed 2nd Example of the sample holder. It is a circuit diagram when the sample holder of FIG. 6 is attached to the sample stage. It is a circuit diagram when a jumper pin is switched from the state of FIG.

1. Overall Configuration of Electron Beam Microanalyzer FIG. 1 is a schematic diagram showing a configuration example of an EPMA 100 according to an embodiment of the present invention. An EPMA (electron beam microanalyzer) 100 is an example of an analysis apparatus, and in order to detect and analyze X-rays generated from the sample S by installing the sample S in the housing 1 and irradiating the electron beam. It is a device. At the time of analysis, the inside of the housing 1 is evacuated, so that the housing 1 functions as a vacuum chamber. The EPMA 100 includes a sample holder 2, a sample stage 3, an electron beam irradiation unit 4, an EDS 5, a WDS 6, a secondary electron detector 7, and the like.

  The sample holder 2 is a member for holding a sample and is detachable from the sample stage 3. The sample stage 3 is provided in the housing 1 and can be displaced along two axes (X axis and Y axis) orthogonal to each other in the horizontal plane and the vertical Z axis. The sample holder 2 constitutes an attachment part to which the sample stage 3 can be attached and detached. By controlling the displacement of the sample stage 3, the measurement region (the region irradiated with the electron beam) on the surface of the sample S can be adjusted.

  The electron beam irradiation unit 4 includes an electron source 41, a condenser lens 42, a diaphragm 43, a scanning coil 44, an objective lens 45, and the like. The electron beam emitted from the electron source 41 is collected by the condenser lens 42, the light beam is narrowed by the diaphragm 43, and then irradiated onto the surface of the sample S in a smaller spot shape on the objective lens 45. The electron beam applied to the surface of the sample S is scanned in the horizontal direction (X direction and Y direction) within the measurement region by the scanning coil 44. X-rays are generated from the surface of the sample S irradiated with the electron beam, and the X-rays enter the EDS 5 and the WDS 6.

  The EDS 5 is a spectrometer (energy dispersive X-ray spectrometer) that obtains an X-ray energy spectrum, and includes a semiconductor detector and a multi-channel analyzer (not shown). X-rays from the sample S enter the semiconductor detector and are converted into electrical signals, and pulses having a height proportional to the energy of the incident X-rays are guided to the multichannel analyzer. Thereby, the number of pulses can be integrated to each channel corresponding to the X-ray energy, and X-ray spectrum data can be acquired. The EDS 5 is detachable from the outside of the housing 1 and can be additionally provided in the EPMA 100 as in the present embodiment, but can be omitted.

  The WDS 6 is a spectrometer (wavelength dispersive X-ray spectrometer) that utilizes an X-ray diffraction phenomenon, and includes a spectral crystal 61 and an X-ray detector 62. X-rays from the sample S are split by a spectroscopic crystal 61 as a spectroscopic element and enter an X-ray detector 62. At this time, by controlling the incident angle of the X-ray with respect to the spectroscopic crystal 61, only the X-ray having a wavelength satisfying the Bragg diffraction condition can be detected by the X-ray detector 62, and X-ray spectrum data can be obtained. . A plurality of WDSs 6 are provided in the housing 1. Thereby, the same number of elements as the number of WDS 6 can be analyzed simultaneously.

  The measurement area is a rectangular area set on the surface of the sample S, and includes a plurality of pixels (measurement positions) arranged in a matrix in the X direction and the Y direction. For each pixel in the measurement region, X-rays having a wavelength corresponding to the selected element are detected by the X-ray detector 62 of the WDS 6 to obtain spectrum data, and X-rays representing the X-ray intensity of each spectrum data. An intensity distribution is obtained. The X-ray intensity is a value proportional to the X-ray intensity detected by the X-ray detector 62, for example, an X-ray count value per certain time in the X-ray detector 62.

  The secondary electron detector 7 detects secondary electrons generated from the surface of the sample S. A secondary electron image can be obtained based on the detection signal from the secondary electron detector 7.

2. FIG. 2 is a schematic diagram for explaining an electrical configuration related to the sample holder 2. The sample holder 2 is provided with various electric parts such as a motor, an encoder or a sensor. In order to input or output signals to these electrical components, the sample holder 2 is provided with a plurality of first terminals 31. At least some of the plurality of first terminals 31 are electrically connected to the electrical components provided in the sample holder 2.

  The sample stage 3 is provided with a plurality of second terminals 32. The number of second terminals 32 is the same as the number of first terminals 31, for example. When the sample holder 2 is attached to the sample stage 3, the plurality of first terminals 31 of the sample holder 2 are in contact with the plurality of second terminals 32 of the sample stage 3 on a one-to-one basis. .

  Wiring is connected to the plurality of second terminals 32 of the sample stage 3, and the wiring is connected to the signal switching device 200 via the connector 10. The connector 10 is a so-called feedthrough connector, and enables electrical connection between the vacuum chamber (in the housing 1) and the atmosphere. In this example, the connector 10 is composed of the first connector 11 and the second connector 12, but may be composed of one connector, or may be composed of three or more connectors. Good.

  A plurality of types of controllers 300 are connected to the signal switching device 200. The signal switching device 200 is a device for automatically switching which controller 300 is connected to the plurality of second terminals 32 of the sample stage 3. That is, the plurality of types of controllers 300 can be connected to the plurality of second terminals 32 via the signal switching device 200 in accordance with the switching operation by the signal switching device 200.

  Each controller 300 is provided outside the housing 1 and connected to the plurality of first terminals 31 of the sample holder 2 via the plurality of second terminals 32 of the sample stage 3 connected by the switching operation of the signal switching device 200. Input or output signals between. Specifically, a signal is input to each controller 300 from an electrical component such as an encoder or a sensor provided in the sample holder 2 via the first terminal 31 and the second terminal 32. Each controller 300 outputs a signal to the electric component such as a motor provided in the sample holder 2 via the second terminal 32 and the first terminal 31.

3. Circuit Diagram of Signal Switching Device FIG. 3 is a circuit diagram showing an example of the signal switching device 200. In this example, a case where two controllers, an X controller and a Y controller, are connected to the signal switching device 200 will be described.

  The signal switching device 200 includes a first connection unit 201 connected to the X controller and a second connection unit 202 connected to the Y controller. The first connection unit 201 and the second connection unit 202 are connected to the connector 10 (the first connector 11 and the second connector 12) via the relay 203. That is, by switching the relay 203, either the X controller connected to the first connection unit 201 or the Y controller connected to the second connection unit 202 can be connected to the connector 10. .

  The signal switching device 200 is provided with photocouplers 211, 212, and 213 for switching the energized state to on or off. The photocoupler 211 electrically connects the connector 10 (second connector 12) and the first connection unit 201 when in the on state. The photocoupler 212 electrically connects the connector 10 (second connector 12) and the second connection unit 202 when in the on state. The photocoupler 213 energizes the relay 203 when in the on state, and switches the relay 203. Further, the signal switching device 200 is provided with a jumper pin 220 for switching the connection state of the wiring to the photocoupler 212 and the photocoupler 213.

4). First Example of Sample Holder FIG. 4 is a circuit diagram showing a first example of the sample holder 2. The sample holder 2 (sample holder 2A) in the first embodiment is provided with twelve first terminals 31 to which numbers “1” to “12” are assigned.

  The sample holder 2 </ b> A includes electrical components such as a DC motor and an encoder, and these electrical components are connected to some first terminals 31. Further, at least a part of the remaining first terminals 31 to which no electrical component is connected are short-circuited to each other. In this example, a pair of first terminals 31 corresponding to the numbers “9” and “11” are short-circuited by being connected by wiring or the like.

5. FIG. 5 is a circuit diagram when the sample holder 2 </ b> A of FIG. 4 is attached to the sample stage 3.

  The connector 10 (the first connector 11 and the second connector 12) is provided with terminals that are associated one-to-one with the plurality of first terminals 31 of the sample holder 2A. Specifically, the first connector 11 includes seven terminals assigned numbers “1” to “7”, and the second connector 12 includes “1” to “7”. Seven terminals to which numbers are assigned are assigned. In FIG. 5, wiring from the sample stage 3 to the connector 10 is omitted, but the terminals of the connector 10 correspond one-to-one with the plurality of second terminals 32 provided in the sample stage 3. It is attached.

  In the state where the sample holder 2A is attached to the sample stage 3, as shown in FIG. 5, the pair of first terminals 31 (“9” and “11”) short-circuited to each other of the sample holder 2A are connected to the second connector 12. Are connected to corresponding terminals ("3" and "5"). As a result, the photocoupler 211 connected to the terminal “3” of the second connector 12 is energized and turned on. As a result, since the second connector 12 is connected to the X controller via the photocoupler 211 and the first connection unit 201, the X controller confirms that the sample holder 2A is attached to the sample stage 3. Can do. That is, the X controller is based on a change in energization state (change from non-energization to energization) between the second terminals 32 that are in contact with the pair of first terminals 31 ("9" and "11") that are short-circuited with each other. It can be identified that the type of the sample holder 2 is the sample holder 2A corresponding to the X controller.

  In this state, the connector 10 is connected to the first connection portion 201 via the relay 203, whereby each electrical component of the sample holder 2A is connected to the X controller. Therefore, the X controller can input or output a signal with each electric component of the sample holder 2A.

6). Second Example of Sample Holder FIG. 6 is a circuit diagram showing a second example of the sample holder 2. The sample holder 2 (sample holder 2B) in the second embodiment is provided with twelve first terminals 31 to which numbers “1” to “12” are assigned.

  The sample holder 2 </ b> B includes electrical components such as a DC motor and a position sensor, and these electrical components are connected to some first terminals 31. Further, at least a part of the remaining first terminals 31 to which no electrical component is connected are short-circuited to each other. In this example, a pair of first terminals 31 corresponding to the numbers “11” and “12” are short-circuited, and a pair of first terminals 31 corresponding to the numbers “7” and “8” are connected to each other. Is short-circuited.

  That is, in the plurality of first terminals 31 of the sample holder 2B in the second embodiment, there are a plurality of pairs (for example, two pairs) of terminals that are not connected to electrical components, and the terminals of each pair are short-circuited. The jumper pin 220 provided in the signal switching device 200 functions as a switching unit for switching the connection state of the wiring to the plurality of pairs of first terminals 31 not connected to the electrical component.

7). FIG. 7 is a circuit diagram when the sample holder 2 </ b> B of FIG. 6 is attached to the sample stage 3.

  In a state where the sample holder 2B is attached to the sample stage 3, as shown in FIG. 7, a pair of first terminals 31 ("11" and "12") short-circuited to each other of the sample holder 2B are connected to the second connector 12. Are connected to corresponding terminals ("5" and "6"). Further, another pair of first terminals 31 (“7” and “8”) that are short-circuited with each other in the sample holder 2B are connected to corresponding terminals (“1” and “2”) of the second connector 12. .

  In the state of FIG. 7, the photocoupler 212 and the photocoupler 213 are connected to the terminal “6” of the second connector 12 by the jumper pin 220, and both the photocoupler 212 and the photocoupler 213 are energized and turned on. As a result, since the second connector 12 is connected to the Y controller via the photocoupler 212 and the second connecting portion 202, the Y controller confirms that the sample holder 2B is attached to the sample stage 3. Can do. That is, the Y controller is based on a change in energization state (change from non-energization to energization) between the second terminals 32 contacting the pair of first terminals 31 ("11" and "12") that are short-circuited with each other. It can be identified that the type of the sample holder 2 is the sample holder 2B corresponding to the Y controller.

  In this state, when the photocoupler 213 is turned on, the relay 203 is energized, and the relay 203 is switched as shown in FIG. As a result, the connector 10 is connected to the second connection portion 202 via the relay 203, and each electrical component of the sample holder 2B is connected to the Y controller. Therefore, the Y controller can input or output signals to / from each electrical component of the sample holder 2B.

  As described above, the signal switching device 200 performs wiring between when the sample holder 2A corresponding to the X controller is attached to the sample stage 3 and when the sample holder 2B corresponding to the Y controller is attached to the sample stage 3. The switching operation is automatically performed. That is, when the sample holder 2 is attached to the sample stage 3, the signal switching device 200 automatically switches the wiring by the relay 203 in accordance with the type of the sample holder 2 (sample holder 2A or sample holder 2B). By doing so, a type of controller (X controller or Y controller) corresponding to the sample holder 2 is connected to the plurality of second terminals 32 of the sample stage 3.

8). Switching of Jumper Pin FIG. 8 is a circuit diagram when the jumper pin 220 is switched from the state of FIG. For example, when a Z controller different from the Y controller is connected to the second connection unit 202 as the controller 300, the sample holder 2 corresponding to the Z controller can be identified in the Z controller by switching the jumper pin 220. In the example of FIG. 8, one sample holder 2B is configured to be shared by the Y controller and the Z controller.

  In the state of FIG. 8, the jumper pin 220 connects the photocoupler 212 and the photocoupler 213 to the terminal “1” of the second connector 12, and both the photocoupler 212 and the photocoupler 213 are energized and turned on. As a result, since the second connector 12 is connected to the Z controller via the photocoupler 212 and the second connecting portion 202, the Z controller confirms that the sample holder 2B is attached to the sample stage 3. Can do. That is, the Z controller is based on a change in energization state (change from non-energization to energization) between the second terminals 32 that are in contact with the pair of first terminals 31 ("7" and "8") that are short-circuited with each other. It can be identified that the type of the sample holder 2 is the sample holder 2B corresponding to the Z controller.

  In this state, when the photocoupler 213 is turned on, the relay 203 is energized, and the relay 203 is switched as shown in FIG. As a result, the connector 10 is connected to the second connection portion 202 via the relay 203, and each electrical component of the sample holder 2B is connected to the Z controller. Therefore, the Z controller can input or output signals to / from each electrical component of the sample holder 2B.

  In the example of FIG. 8, the configuration in which one sample holder 2B can be shared by the Y controller and the Z controller has been described. However, different sample holders 2 may be used for the Y controller and the Z controller. In this case, in the sample holder 2 for the Y controller, the pair of first terminals 31 corresponding to the numbers “11” and “12” are short-circuited, and in the sample holder 2 for the Z controller, “7”. And the pair of first terminals 31 corresponding to the numbers “8” may be short-circuited.

9. Effect (1) In this embodiment, it is provided in the sample stage 3 by short-circuiting a pair of terminals which are not connected to the electrical component among the plurality of first terminals 31 provided in the sample holder 2. The type of the sample holder 2 can be identified based on the change in the energization state between the terminals that are in contact with the pair of terminals among the plurality of second terminals 32. Therefore, it is possible to easily identify the type of the sample holder 2 by using an unused terminal among the plurality of first terminals 31 provided on the sample holder 2.

(2) In this embodiment, the signal switching device 200 automatically performs the wiring switching operation, and the controller 300 of the type corresponding to the sample holder 2 attached to the sample stage 3 is automatically applied to the plurality of second terminals 32. Can be connected. Therefore, since it is not necessary to manually reconnect the controller 300 corresponding to the sample holder 2, the work can be prevented from becoming complicated.

(3) Further, in this embodiment, by switching the connection state of the wirings to a plurality of pairs of short-circuited terminals with the jumper pins 220, more types of sample holders 2 can be easily identified.

10. Modification The mounting portion to which the sample holder 2 is mounted is not limited to the sample stage 3 that can be displaced in the X direction, Y direction, and Z direction, but can be displaced only in one direction or two directions of the X direction, Y direction, and Z direction. It may be a possible sample stage, or may be an attachment portion to which the sample holder 2 is simply attached. Moreover, the stage which can be rotated or inclined may be used.

  The present invention is also applicable to EPMA that does not include EDS5. The present invention can also be applied to analyzers other than EPMA. For example, in addition to a scanning electron microscope (SEM) for detecting secondary electrons generated from a sample irradiated with an electron beam and observing the sample surface, analysis is performed by irradiating the sample with X-rays. The present invention can also be applied to an analysis apparatus to be performed.

DESCRIPTION OF SYMBOLS 1 Housing 2, 2A, 2B Sample holder 3 Sample stage 4 Electron beam irradiation part 5 EDS (energy dispersive X-ray spectrometer)
6 WDS (wavelength dispersive X-ray spectrometer)
7 Secondary Electron Detector 10 Connector 31 First Terminal 32 Second Terminal 100 EPMA (Electron Beam Microanalyzer)
200 Signal Switching Device 201 First Connection Unit 202 Second Connection Unit 203 Relay 211, 212, 213 Photocoupler 220 Jumper Pin 300 Controller

Claims (3)

An analyzer that performs analysis by irradiating an electron beam or X-rays to a sample in a vacuum chamber,
A sample holder for holding the sample;
A mounting portion provided in the vacuum chamber, to which the sample holder can be attached and detached;
A plurality of first terminals including terminals provided on the sample holder and electrically connected to electrical components provided on the sample holder;
A plurality of second terminals that are provided in the mounting portion and respectively contact the plurality of first terminals of the sample holder attached to the mounting portion;
A controller that is provided outside the vacuum chamber and that inputs or outputs a signal to or from the plurality of first terminals via the plurality of second terminals,
Of the plurality of first terminals, a pair of terminals not connected to the electrical component are short-circuited,
The controller determines the type of the sample holder based on a change in an energization state between the terminals that contact the pair of terminals when the sample holder is attached to the attachment portion among the plurality of second terminals. An analyzer characterized by identifying. A signal switching device connected to the plurality of second terminals;
A plurality of types of the controllers can be connected to the plurality of second terminals via the signal switching device,
When the sample holder is attached to the attachment portion, the signal switching device automatically performs a wiring switching operation in accordance with the type of the sample holder, so that the type of controller corresponding to the sample holder is The analyzer according to claim 1, wherein the analyzer is connected to a plurality of second terminals. The plurality of first terminals have a plurality of pairs of terminals not connected to the electrical component, and the terminals of each pair are short-circuited,
The analysis apparatus according to claim 2, wherein the signal switching device includes a switching unit that switches a connection state of wirings to the plurality of pairs of terminals.