JP2018184270A - Conveying apparatus and method of manufacturing laminate - Google Patents

Conveying apparatus and method of manufacturing laminate Download PDF

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Publication number
JP2018184270A
JP2018184270A JP2017087489A JP2017087489A JP2018184270A JP 2018184270 A JP2018184270 A JP 2018184270A JP 2017087489 A JP2017087489 A JP 2017087489A JP 2017087489 A JP2017087489 A JP 2017087489A JP 2018184270 A JP2018184270 A JP 2018184270A
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sheet
suction
suction force
conveying
belt
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JP6976074B2 (en
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寛文 井上
Hirofumi Inoue
寛文 井上
松本　周三
Shuzo Matsumoto
周三 松本
松本　大輔
Daisuke Matsumoto
大輔 松本
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Sumitomo Chemical Co Ltd
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Sumitomo Chemical Co Ltd
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Priority to CN201810376510.7A priority patent/CN108792690B/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H5/00—Feeding articles separated from piles; Feeding articles to machines
    • B65H5/22—Feeding articles separated from piles; Feeding articles to machines by air-blast or suction device
    • B65H5/222—Feeding articles separated from piles; Feeding articles to machines by air-blast or suction device by suction devices
    • B65H5/224—Feeding articles separated from piles; Feeding articles to machines by air-blast or suction device by suction devices by suction belts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/0007—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding involving treatment or provisions in order to avoid deformation or air inclusion, e.g. to improve surface quality
    • B32B37/0015—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding involving treatment or provisions in order to avoid deformation or air inclusion, e.g. to improve surface quality to avoid warp or curl
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/0046—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by constructional aspects of the apparatus
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/14—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers
    • B32B37/142—Laminating of sheets, panels or inserts, e.g. stiffeners, by wrapping in at least one outer layer, or inserting into a preformed pocket
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/14—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers
    • B32B37/16—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with all layers existing as coherent layers before laminating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H37/00—Article or web delivery apparatus incorporating devices for performing specified auxiliary operations
    • B65H37/04—Article or web delivery apparatus incorporating devices for performing specified auxiliary operations for securing together articles or webs, e.g. by adhesive, stitching or stapling
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2301/00—Handling processes for sheets or webs
    • B65H2301/50—Auxiliary process performed during handling process
    • B65H2301/51—Modifying a characteristic of handled material
    • B65H2301/512—Changing form of handled material
    • B65H2301/5125—Restoring form
    • B65H2301/51254—Unshirring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2301/00—Handling processes for sheets or webs
    • B65H2301/50—Auxiliary process performed during handling process
    • B65H2301/51—Modifying a characteristic of handled material
    • B65H2301/516—Securing handled material to another material
    • B65H2301/5161—Binding processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2406/00—Means using fluid
    • B65H2406/30—Suction means
    • B65H2406/32—Suction belts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2406/00—Means using fluid
    • B65H2406/30—Suction means
    • B65H2406/32—Suction belts
    • B65H2406/322—Suction distributing means
    • B65H2406/3223—Suction distributing means details of the openings in the belt, e.g. shape, distribution

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Textile Engineering (AREA)
  • Quality & Reliability (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
  • Collation Of Sheets And Webs (AREA)
  • Absorbent Articles And Supports Therefor (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a conveying apparatus capable of conveying a sheet-like item in a flat state, suppressing wrinkle generation on the sheet-like item and elongating a wrinkle on the sheet-like item, and further a method of manufacturing a laminate including conveyance of the sheet-like item by using the conveying apparatus.SOLUTION: A conveying apparatus 1 for conveying a sheet-like item 20 comprises: a belt-like member 10 for placing and conveying the sheet-like item in a conveying direction, which has a plurality of holes 11 penetrating in a thickness direction; and a suction portion 30 disposed on the opposite side, with respect to the belt-like member, to the side on which the sheet-like item is placed, for holding the sheet-like item onto the belt-like member with a suction force generated through the holes of the belt-like member by an ambient atmosphere being sucked. The conveying apparatus has a conveying area 12 in which the suction force acting on the sheet-like item is different in at least two areas of the sheet-like item when the sheet-like item is conveyed.SELECTED DRAWING: Figure 1

Description

本発明は、シート状部材を搬送するための搬送装置および積層体の製造方法に関する。   The present invention relates to a transport device for transporting a sheet-like member and a method for manufacturing a laminate.

シート状部材は、例えば、吸着部材、プリント配線基板及び光学部材等、様々な分野で使用されている。このようなシート状部材は、それを含む積層体の製造工程等において、ベルト状部材を用いて搬送されることが多い。
しかし、ベルト状部材を用いてシート状部材を搬送すると、シート状部材がばたつくことがある。シート状部材がばたつくと、シート状部材にカールが生じたり、シワが生じたりすることがある。
近年においては、薄型のシート状部材が多用されており、薄型のシート状部材は、特に、シワ、カールが生じやすい。シート状部材にシワ、カールなどが生じると、作業効率が悪くなり、製品の歩留まりに悪影響が生じるおそれがある。 The sheet-like member is used in various fields such as an adsorption member, a printed wiring board, and an optical member. Such a sheet-like member is often conveyed using a belt-like member in a production process of a laminate including the sheet-like member.
However, when a sheet-like member is conveyed using a belt-like member, the sheet-like member may flutter. When the sheet-like member flutters, the sheet-like member may be curled or wrinkled.
In recent years, thin sheet-like members have been frequently used, and the thin sheet-like members are particularly prone to wrinkles and curls. If the sheet-like member is wrinkled, curled, etc., the working efficiency is deteriorated, and there is a possibility that the yield of the product is adversely affected.

例えば、特許文献１（特開２００８−５３５７２号公報）には、多層プリント配線基板の製造に用いるプリプレグシートにシワが発生することを抑制する試みとして、プリプレグシート固定装置が開示されている。
具体的には、プリプレグシートを真空吸着する吸着ステージと、前記プリプレグシートの周辺部を掴んで、前記吸着ステージの上に前記プリプレグシートを移動させる移動部と、からなるプリプレグシート固定装置を用い、前記吸着ステージが、時間差をつけながら独立して真空吸着する複数個の真空吸着部を有しているプリプレグシート固定装置が開示されている（特許文献１の請求項１）。 For example, Patent Document 1 (Japanese Patent Application Laid-Open No. 2008-53572) discloses a prepreg sheet fixing device as an attempt to suppress the occurrence of wrinkles in a prepreg sheet used for manufacturing a multilayer printed wiring board.
Specifically, using a prepreg sheet fixing device comprising a suction stage that vacuum-sucks a prepreg sheet, and a moving unit that moves the prepreg sheet onto the suction stage by grasping a peripheral part of the prepreg sheet, There is disclosed a prepreg sheet fixing device in which the suction stage has a plurality of vacuum suction portions that vacuum-suck independently with a time difference (Claim 1 of Patent Document 1).

特開２００８−５３５７２号公報JP 2008-53572 A

しかし、特許文献１に開示された、プリプレグシートの周辺部を掴み、吸着ステージ上に吸着させる技術の場合、シート状部材を平坦な状態に載置し、搬送することができない場合がある。また、特許文献１に開示された固定装置の場合、搬送中に生じたシワを取り除くことができないという問題がある。   However, in the case of the technique disclosed in Patent Document 1 in which the peripheral portion of the prepreg sheet is gripped and sucked on the suction stage, the sheet-like member may not be placed and transported in a flat state. Moreover, in the case of the fixing device disclosed in Patent Document 1, there is a problem that wrinkles generated during conveyance cannot be removed.

また、近年においては、シート状部材の厚さが薄くなっており、例えば、光学積層体に用いるシート状部材においては、厚さが５０〜３００μｍのものがあり、平坦な状態で搬送でき、シワの発生を低減又は抑制でき、発止したシワを伸ばすことができる搬送装置が要求されている。   In recent years, the thickness of sheet-like members has been reduced. For example, some sheet-like members used for optical laminates have a thickness of 50 to 300 μm, and can be conveyed in a flat state. Therefore, there is a demand for a transport device that can reduce or suppress the occurrence of wrinkles and extend wrinkles that have stopped.

従って、本発明は、シート状部材を平坦な状態で搬送でき、また、シート状部材へのシワの発生を抑制でき、シート状部材に存在するシワを伸ばすことができる搬送装置を提供することを目的とする。さらに、本発明は、このような搬送装置を用いてシート状部材を搬送することを含む、積層体の製造方法を提供する。   Therefore, the present invention provides a transport device that can transport the sheet-like member in a flat state, can suppress the occurrence of wrinkles on the sheet-like member, and can extend the wrinkles present in the sheet-like member. Objective. Furthermore, this invention provides the manufacturing method of a laminated body including conveying a sheet-like member using such a conveying apparatus.

本発明は、以下を含む。
［１］シート状部材を搬送するための搬送装置であって、
シート状部材を載置して搬送方向に搬送するためのベルト状部材であって、厚さ方向に貫通した複数の孔を有するベルト状部材と、
ベルト状部材に対して、シート状部材が載置される側と反対側に配置される吸引部であって、周囲雰囲気を吸引することにより、ベルト状部材の前記孔を通じた吸引力でシート状部材をベルト状部材に対して保持する吸引部とを有し、および
シート状部材が搬送されるときにシート状部材に作用する吸引力が、該シート状部材の少なくとも２つの領域において相違する搬送領域を有する、搬送装置。
［２］搬送方向において、シート状部材の下流側の領域に作用する吸引力が、シート状部材の上流側の領域に作用する吸引力より大きい、［１］に記載の搬送装置。
［３］シート状部材に作用する吸引力が、搬送方向に対して平行な方向において段階的に分布する、［１］または［２］に記載の搬送装置。
［４］吸引部が前記段階に応じて複数の吸引部を含んで成る、［３］に記載の搬送装置。
［５］シート状部材に作用する吸引力が、搬送方向に対して平行な方向において連続的に分布する、［１］または［２］に記載の搬送装置。
［６］シート状部材に作用する吸引力が、搬送方向に対して垂直な方向にある少なくとも２つの領域において相違する、［１］から［５］のいずれか１に記載の搬送装置。
［７］ベルト状部材に対して、シート状部材が載置される側の上方に配置されるロールであって、シート状部材が搬送されるときに該ロールが回転しながらベルト状部材上のシート状部材と接触するように配置されるロールを更に有する、［１］から［６］のいずれか１に記載の搬送装置。
［８］第１のシート状部材と第２のシート状部材とを有する積層体の製造方法であって、上記［１］から［７］のいずれか１に記載の搬送装置を用いて第１のシート状部材を搬送すること、および
該第１のシート状部材と第２のシート状部材とを貼合すること
を含む、積層体の製造方法。
［９］シート状部材と長尺状部材とを有する積層体の製造方法であって、［１］から［７］のいずれか１に記載の搬送装置を用いてシート状部材を搬送すること、および
該シート状部材と長尺状部材とを貼合すること
を含む、積層体の製造方法。 The present invention includes the following.
[1] A transport device for transporting a sheet-like member,
A belt-like member for placing a sheet-like member and transporting it in the transport direction, and having a plurality of holes penetrating in the thickness direction;
A suction part disposed on the side opposite to the side on which the sheet-like member is placed with respect to the belt-like member, and by sucking the ambient atmosphere, the suction force through the hole of the belt-like member causes the sheet-like member to A suction section that holds the member with respect to the belt-shaped member, and the suction force acting on the sheet-shaped member when the sheet-shaped member is transported differs in at least two regions of the sheet-shaped member. A conveying device having an area.
[2] The transport device according to [1], wherein in the transport direction, the suction force acting on the downstream region of the sheet-like member is larger than the suction force acting on the upstream region of the sheet-like member.
[3] The transport device according to [1] or [2], wherein the suction force acting on the sheet-like member is distributed stepwise in a direction parallel to the transport direction.
[4] The transport device according to [3], wherein the suction unit includes a plurality of suction units according to the stage.
[5] The transport apparatus according to [1] or [2], wherein the suction force acting on the sheet-like member is continuously distributed in a direction parallel to the transport direction.
[6] The transport device according to any one of [1] to [5], wherein suction forces acting on the sheet-like member are different in at least two regions in a direction perpendicular to the transport direction.
[7] A roll disposed above the side on which the sheet-like member is placed with respect to the belt-like member, and the roll is rotated on the belt-like member when the sheet-like member is conveyed. The conveying apparatus according to any one of [1] to [6], further including a roll disposed so as to contact the sheet-like member.
[8] A method for manufacturing a laminate having a first sheet-like member and a second sheet-like member, the first using the transport device according to any one of [1] to [7]. The manufacturing method of a laminated body including conveying this sheet-like member and bonding this 1st sheet-like member and a 2nd sheet-like member.
[9] A method for producing a laminate having a sheet-like member and an elongated member, wherein the sheet-like member is conveyed using the conveying device according to any one of [1] to [7], And the manufacturing method of a laminated body including bonding this sheet-like member and an elongate member.

本発明は、シート状部材を平坦な状態で搬送でき、また、シート状部材へのシワの発生を抑制でき、シート状部材に存在するシワを伸ばすことができる。   The present invention can convey a sheet-like member in a flat state, can suppress generation of wrinkles on the sheet-like member, and can extend wrinkles present in the sheet-like member.

本発明の搬送装置の概略を示す上面図である。It is a top view which shows the outline of the conveying apparatus of this invention. 上記態様における搬送装置の概略を示す側面図である。It is a side view which shows the outline of the conveying apparatus in the said aspect. 本発明の搬送装置の一態様における概略を示す上面図である。It is a top view which shows the outline in the one aspect | mode of the conveying apparatus of this invention. 上記本発明の一態様における搬送装置の概略を示す側面図である。It is a side view which shows the outline of the conveying apparatus in 1 aspect of the said invention. 本発明の搬送装置の一態様における概略を示す上面図である。It is a top view which shows the outline in the one aspect | mode of the conveying apparatus of this invention. 上記本発明の一態様における搬送装置の概略を示す側面図である。It is a side view which shows the outline of the conveying apparatus in 1 aspect of the said invention. 本発明の搬送装置の一態様における概略を示す上面図である。It is a top view which shows the outline in the one aspect | mode of the conveying apparatus of this invention. 上記本発明の一態様における搬送装置の概略を示す側面図である。It is a side view which shows the outline of the conveying apparatus in 1 aspect of the said invention.

本発明によると、シート状部材を搬送するための搬送装置であって、
シート状部材を載置して搬送方向に搬送するためのベルト状部材であって、厚さ方向に貫通した複数の孔を有するベルト状部材と、
ベルト状部材に対して、シート状部材が載置される側と反対側に配置される吸引部であって、周囲雰囲気を吸引することにより、ベルト状部材の前記孔を通じた吸引力でシート状部材をベルト状部材に対して保持する吸引部とを有し、および、
シート状部材が搬送されるときにシート状部材に作用する吸引力が、該シート状部材の少なくとも２つの領域において相違する搬送領域を有する、搬送装置が提供される。 According to the present invention, a conveying device for conveying a sheet-like member,
A belt-like member for placing a sheet-like member and carrying it in the carrying direction, and having a plurality of holes penetrating in the thickness direction; and
A suction part disposed on the side opposite to the side on which the sheet-like member is placed with respect to the belt-like member, and by sucking the ambient atmosphere, the suction force through the hole of the belt-like member causes the sheet-like member to A suction part for holding the member with respect to the belt-like member, and
There is provided a transport device having a transport area in which suction force acting on the sheet-shaped member when the sheet-shaped member is transported is different in at least two regions of the sheet-shaped member.

以下、本発明による、シート状部材を搬送するための搬送装置について、図面を参照しながら説明する。   Hereinafter, a conveying device for conveying a sheet-like member according to the present invention will be described with reference to the drawings.

図１は、本発明の搬送装置の概略を示す上面図である。また、図２は、上記態様における搬送装置の概略を示す側面図である。図１および図２において、１は搬送装置、１０はベルト状部材、１１はベルト状部材１０の厚さ方向に貫通した孔、２０はシート状部材、２１はシート状部材２０における一領域、２２はシート状部材２０における別の領域、３０は吸引部、４１ａは一領域における吸引力、４１ｂは別の領域における吸引力、５０はテールローラー、６０は搬送方向である。
搬送装置１は、シート状部材が搬送されるときにシート状部材に作用する吸引力が該シート状部材の少なくとも２つの領域において相違する搬送領域１２を有する。
ここで、搬送領域１２は、ベルト状部材１０における孔１１を通じた吸引力でシート状部材２０を吸引しながら搬送する領域であって、ベルト状部材１０が吸引部３０と対面する領域に一致する。
例えば、図１および図２で示される態様において、搬送領域１２は、ベルト状部材１０の孔１１を介して、吸引部３０からシート状部材２０への吸引力（４１ａ, ４１ｂ）が作用する領域である。このような搬送領域１２において、シート状部材が搬送されるときにシート状部材に作用する吸引力が、該シート状部材の少なくとも２つの領域において相違する。なおベルト状部材１０は、シート状部材に吸引力が作用しない領域を有してもよい。すなわち、本発明の搬送装置においては、シート状部材を搬送する際に、シート状部材に対して吸引力が作用する領域と、実質的に吸引力が作用しない領域が混在してもよい。 FIG. 1 is a top view showing an outline of the conveying apparatus of the present invention. FIG. 2 is a side view showing an outline of the transport device in the above embodiment. 1 and FIG. 2, 1 is a conveying device, 10 is a belt-like member, 11 is a hole penetrating in the thickness direction of the belt-like member 10, 20 is a sheet-like member, 21 is a region in the sheet-like member 20, 22 Is another area in the sheet-like member 20, 30 is a suction portion, 41a is a suction force in one area, 41b is a suction force in another area, 50 is a tail roller, and 60 is a conveyance direction.
The conveyance device 1 has a conveyance region 12 in which suction force acting on the sheet-like member when the sheet-like member is conveyed is different in at least two regions of the sheet-like member.
Here, the conveyance area 12 is an area where the sheet-like member 20 is conveyed while being sucked by the suction force through the holes 11 in the belt-like member 10, and coincides with an area where the belt-like member 10 faces the suction portion 30. .
For example, in the embodiment shown in FIGS. 1 and 2, the conveyance region 12 is a region where the suction force (41 a, 41 b) acts from the suction unit 30 to the sheet-like member 20 through the hole 11 of the belt-like member 10. It is. In such a conveyance area | region 12, the attraction | suction force which acts on a sheet-like member when a sheet-like member is conveyed differs in at least 2 area | region of this sheet-like member. The belt-like member 10 may have a region where no suction force acts on the sheet-like member. That is, in the transport apparatus of the present invention, when transporting the sheet-like member, a region where the suction force acts on the sheet-like member and a region where the suction force does not substantially act may coexist.

ベルト状部材１０は、シート状部材２０を載置して搬送方向に搬送するための部材であり、ベルト状部材１０が上流側から下流側に向かって走行すると共に、所定の距離だけベルト状部材１０に載置したシート状部材２０を搬送できる。なお、上流側は、搬送装置にシート状部材を載置する側であり、下流側は、例えば、貼合工程等の別工程が続き得る側である。
ここで、ベルト状部材１０は、厚さ方向に貫通した孔１１を複数個有する。厚さ方向に貫通した孔１１を有することにより、ベルト状部材１０に対して、シート状部材２０が載置される側と反対側に配置される吸引部３０を介して周囲雰囲気を吸引することにより、ベルト状部材１０の孔１１を通じた吸引力（例えば、図２における吸引力４１aおよび４１ｂ）でシート状部材２０をベルト状部材１０に対して保持できる。
吸引力を介して、シート状部材２０をベルト状部材１０に対して保持できるので、シート状部材の搬送中に起こり得るばたつきを低減または抑制できる。また、搬送中におけるシートのズレを抑制できる。これにより、例えば、薄型（厚さ１００μｍ程度）のシート状部材２０であっても、安定して搬送でき、生産工程の短縮を導ける。 The belt-like member 10 is a member for placing the sheet-like member 20 and carrying it in the carrying direction. The belt-like member 10 travels from the upstream side to the downstream side, and the belt-like member is moved by a predetermined distance. The sheet-like member 20 placed on the plate 10 can be conveyed. The upstream side is a side on which the sheet-like member is placed on the transport device, and the downstream side is a side on which another process such as a bonding process can be continued.
Here, the belt-like member 10 has a plurality of holes 11 penetrating in the thickness direction. By having the hole 11 penetrating in the thickness direction, the ambient atmosphere is sucked with respect to the belt-like member 10 via the suction portion 30 disposed on the side opposite to the side on which the sheet-like member 20 is placed. Thus, the sheet-like member 20 can be held with respect to the belt-like member 10 by the suction force (for example, the suction forces 41a and 41b in FIG. 2) through the hole 11 of the belt-like member 10.
Since the sheet-like member 20 can be held with respect to the belt-like member 10 via the suction force, fluttering that may occur during conveyance of the sheet-like member can be reduced or suppressed. In addition, it is possible to suppress sheet misalignment during conveyance. Thereby, for example, even the thin sheet-like member 20 (thickness of about 100 μm) can be stably conveyed, leading to shortening of the production process.

ベルト状部材１０の材質は、搬送するシート状部材２０に含まれる成分に応じて適宜選択できる。例えば、合成ゴム製、シリコンゴム製であってもよく、金属製であってもよい。また、ベルト状部材１０の幅などについても、搬送するシート状部材に応じて適宜選択できる。ある態様において、ベルト状部材１０は、メッシュ状の合成ゴムベルト、樹脂製ベルトであってもよい。これにより、例えば、薄型のシート状部材２０の搬送時に、シート状部材に傷が生じることを抑制できる。   The material of the belt-like member 10 can be appropriately selected according to the components contained in the sheet-like member 20 to be conveyed. For example, it may be made of synthetic rubber, silicon rubber, or metal. Further, the width of the belt-like member 10 can be appropriately selected according to the sheet-like member to be conveyed. In one embodiment, the belt-like member 10 may be a mesh-like synthetic rubber belt or a resin belt. Thereby, for example, it is possible to prevent the sheet-like member from being damaged when the thin sheet-like member 20 is conveyed.

厚さ方向に貫通した孔１１の形状、すなわち、ベルト状部材１０の搬送面に存在する孔の形状は特に限定されず、例えば、円状、楕円状、多角形等であっても良く、ベルト状部材１０の搬送方向に対して垂直方向に延びた形状（例えば、スリット状）であってもよく、ベルト状部材１０の搬送方向に対して、所定の角度を設けて配置した形状であってもよい。また、孔のサイズは特に限定されず、例えば四角形の場合、一辺が０．３５ｍｍ〜５．０ｍｍの範囲内であり、円の場合、直径が０．４ｍｍ〜３．０ｍｍの範囲内であり得る。
ある態様において、ベルト状部材１０の厚さ方向に貫通した孔１１は、少なくともシート状部材２０の搬送方向に対して垂直な方向（シート状部材２０の幅方向）に沿って、均等に配置される。これにより、シート状部材２０は、均等な力で吸引される。
厚さ方向に貫通した孔１１の数は限定されず、シート状部材が搬送されるときにシート状部材に作用する吸引力が、該シート状部材の少なくとも２つの領域において相違するよう、適宜配置できる。例えば、シート状部材の全面を均等に吸引できるように孔１１を配置できる。 The shape of the hole 11 penetrating in the thickness direction, that is, the shape of the hole existing on the conveying surface of the belt-like member 10 is not particularly limited, and may be, for example, a circle, an ellipse, a polygon, etc. The shape may be a shape (for example, a slit shape) extending in a direction perpendicular to the conveyance direction of the belt-shaped member 10, and is a shape arranged with a predetermined angle with respect to the conveyance direction of the belt-shaped member 10. Also good. The size of the hole is not particularly limited. For example, in the case of a quadrangle, one side may be in the range of 0.35 mm to 5.0 mm, and in the case of a circle, the diameter may be in the range of 0.4 mm to 3.0 mm. .
In one embodiment, the holes 11 penetrating in the thickness direction of the belt-like member 10 are evenly arranged along at least a direction perpendicular to the conveying direction of the sheet-like member 20 (width direction of the sheet-like member 20). The Thereby, the sheet-like member 20 is attracted | sucked with equal force.
The number of holes 11 penetrating in the thickness direction is not limited, and is appropriately arranged so that the suction force acting on the sheet-like member when the sheet-like member is conveyed is different in at least two regions of the sheet-like member. it can. For example, the holes 11 can be arranged so that the entire surface of the sheet-like member can be sucked evenly.

本発明の搬送装置によると、ベルト状部材に対して、シート状部材が載置される側と反対側に配置される吸引部３０は、周囲雰囲気を吸引することにより、ベルト状部材の前記孔１１を通じた吸引力（例えば、図２における吸引力４１ａおよび４１ｂ）でシート状部材２０をベルト状部材１０に対して保持できる。
本発明の搬送装置によると、シート状部材２０が搬送されるときに、シート状部材に作用する吸引力が、該シート状部材の少なくとも２つの領域において相違する。
例えば、図１および２において、シート状部材２０における一領域２１と、シート状部材２０における別の領域２２とにおける吸引力は、相違する。
本明細書において、シート状部材２０における一領域とは、シート状部材における任意の領域であり、別の領域とは同一のシート状部材または他のシート状部材における上記一領域とは異なる任意の領域である。
なお、一の吸引部において吸引力の違いを生じさせることは、当該技術分野において既知の手段により行える。 According to the conveying device of the present invention, the suction part 30 disposed on the side opposite to the side on which the sheet-like member is placed with respect to the belt-like member sucks the ambient atmosphere, thereby the hole of the belt-like member. The sheet-like member 20 can be held with respect to the belt-like member 10 by the suction force (for example, the suction forces 41a and 41b in FIG.
According to the conveying apparatus of the present invention, when the sheet-like member 20 is conveyed, the suction force acting on the sheet-like member is different in at least two regions of the sheet-like member.
For example, in FIGS. 1 and 2, the suction force in one region 21 in the sheet-like member 20 and another region 22 in the sheet-like member 20 are different.
In this specification, one area in the sheet-like member 20 is an arbitrary area in the sheet-like member, and an arbitrary area different from the one area in the same sheet-like member or another sheet-like member from another area. It is an area.
Note that the difference in suction force in one suction part can be generated by means known in the art.

このように、シート状部材に作用する吸引力（例えば、図２における吸引力４１ａおよび４１ｂ）が、該シート状部材の少なくとも２つの領域において相違することにより、シート状部材２０が一気に吸引されることを抑制でき、シート状部材に対するシワの発生を抑制できる。
また、シート状部材を平坦な状態で搬送でき、シート状部材のカールを抑制できる。さらに、薄型（厚さ５０〜３００μｍ）程度のシート状部材であっても、搬送中にシートを伸ばすことができ、カールの発生を抑制できる。
例えば、薄いシート状部材２０の場合、搬送時のシワを防止でき、シートの位置合わせ調整前にシートを平坦な状態に保持できる。よって、本発明の搬送装置を用いることにより、シート状部材の位置合わせを高精度に行うことができる。例えば、予め貼合軸を調整したシート状部材を、本発明の搬送装置で搬送することにより、シート状部材の位置合わせを更に高精度に行うことができる。 As described above, the suction force acting on the sheet-like member (for example, the suction forces 41a and 41b in FIG. 2) is different in at least two regions of the sheet-like member, whereby the sheet-like member 20 is sucked at a stretch. This can be suppressed, and the generation of wrinkles on the sheet-like member can be suppressed.
Further, the sheet-like member can be conveyed in a flat state, and curling of the sheet-like member can be suppressed. Furthermore, even if it is a thin sheet-like (thickness 50-300 micrometers) sheet-like member, a sheet | seat can be extended during conveyance and generation | occurrence | production of a curl can be suppressed.
For example, in the case of the thin sheet-like member 20, wrinkles at the time of conveyance can be prevented, and the sheet can be held in a flat state before adjusting the alignment of the sheet. Therefore, the sheet-like member can be aligned with high accuracy by using the conveying device of the present invention. For example, the sheet-like member whose bonding axis has been adjusted in advance can be conveyed with the conveying device of the present invention, whereby the sheet-like member can be aligned with higher accuracy.

シート状部材が搬送されるときにシート状部材に作用する吸引力が、該シート状部材の少なくとも２つの領域において相違する限り、作用する吸引力の大きさは限定されず、例えば、吸引力は、０．０１〜５５ｋＰａの範囲内であってもよい。シート状部材の少なくとも２つの領域において吸引力が相違できるよう、このような範囲で吸引力を適宜設定できる。
例えば、図１および図２における下流側に位置するシート状部材の領域２２における吸引力と、上流側に位置するシート状部材の領域２１における吸引力は異なっており、下流側の吸引力を０．０２〜５５ｋＰａの範囲内、上流側の吸引力を０．０１〜５０ｋＰａの範囲内に設定できる。
このように、シート状部材が搬送されるときにシート状部材に作用する吸引力が、該シート状部材の少なくとも２つの領域において相違することにより、シート状部材のばたつきを抑え、シート状部材を平坦な状態で搬送でき、また、搬送時におけるシート状部材へのシワの発生を抑制でき、更にシート状部材に存在し得るシワを伸ばすことができる。
また、例えば、他のシート状部材との貼合時において、貼合軸の位置合わせ精度を高めることができ、タクトタイムの短縮を導ける。 As long as the suction force acting on the sheet-like member when the sheet-like member is conveyed is different in at least two regions of the sheet-like member, the magnitude of the acting suction force is not limited. For example, the suction force is In the range of 0.01 to 55 kPa. The suction force can be appropriately set within such a range so that the suction force can be different in at least two regions of the sheet-like member.
For example, the suction force in the region 22 of the sheet-like member located on the downstream side in FIGS. 1 and 2 is different from the suction force in the region 21 of the sheet-like member located on the upstream side. In the range of 0.02 to 55 kPa, the upstream suction force can be set in the range of 0.01 to 50 kPa.
As described above, when the sheet-like member is conveyed, the suction force acting on the sheet-like member is different in at least two regions of the sheet-like member, thereby suppressing the fluttering of the sheet-like member. The sheet can be conveyed in a flat state, and the generation of wrinkles on the sheet-like member during conveyance can be suppressed, and the wrinkles that can exist on the sheet-like member can be further extended.
Moreover, for example, at the time of bonding with another sheet-like member, the alignment accuracy of the bonding shaft can be increased, and the tact time can be reduced.

ある態様において、シート状部材が搬送されるときにシート状部材に作用する吸引力が、該シート状部材の少なくとも２つの領域において相違するとは、シート状部材に作用する吸引力の差の絶対値が、０．０１〜５０ｋＰａ、例えば、０．１〜２０ｋＰａの範囲内である。   In one aspect, the suction force acting on the sheet-like member when the sheet-like member is conveyed is different in at least two regions of the sheet-like member. The absolute value of the difference in suction force acting on the sheet-like member Is in the range of 0.01 to 50 kPa, for example, 0.1 to 20 kPa.

例えば、搬送方向において、シート状部材の下流側の領域に作用する吸引力が、シート状部材の上流側の領域に作用する吸引力よりも大きい態様の場合、下流側の領域に作用する吸引力から上流側の領域に作用する吸引力を差引いた値は、０．０１〜５０ｋＰａ、例えば、０．１〜２０ｋＰａの範囲内である。
このような範囲で吸引力の差を設けることにより、吸引力が急激に変化することを抑制でき、シート状部材を平坦な状態で搬送でき、また、搬送時におけるシート状部材へのシワの発生を抑制でき、シート状部材に存在し得るシワを伸ばすことができる。 For example, when the suction force acting on the downstream region of the sheet-like member is larger than the suction force acting on the upstream region of the sheet-like member in the transport direction, the suction force acting on the downstream region The value obtained by subtracting the suction force acting on the upstream region from 0.01 to 50 kPa, for example, 0.1 to 20 kPa.
By providing a difference in suction force in such a range, it is possible to suppress a sudden change in suction force, and the sheet-like member can be transported in a flat state, and generation of wrinkles on the sheet-like member during transportation is generated. Can be suppressed, and wrinkles that may exist in the sheet-like member can be extended.

また、例えば、シート状部材２０における別の領域２２から下流側において、シート状部材に作用する吸引力は、領域２２における吸引力と同一であってもよく、段階的に分布してもよく、または連続的に分布してもよい。
本明細書において段階的に分布するとは、上流側から下流側に向かって、吸引力が階層的に変化することを意味する。例えば、所定の間隔または任意の間隔で吸引力が変化し、次の領域における吸引力が前の領域における吸引力とは異なることを指す。一方、連続的に分布するとは、上流側から下流側に向かって、吸引力の変化勾配が一定であることを意味する。 Further, for example, the suction force acting on the sheet-like member on the downstream side from another region 22 in the sheet-like member 20 may be the same as the suction force in the region 22 or may be distributed stepwise. Or you may distribute continuously.
In this specification, the stepwise distribution means that the suction force changes hierarchically from the upstream side toward the downstream side. For example, the suction force changes at a predetermined interval or an arbitrary interval, and the suction force in the next region is different from the suction force in the previous region. On the other hand, continuous distribution means that the gradient of change in suction force is constant from the upstream side toward the downstream side.

本発明により搬送できるシート状部材は、例えば、吸着部材、プリント配線基板及び光学部材等が挙げられ、薄く、カール、シワ等が生じやすい部材に対して好適に利用できる。ある態様においては、シート状部材は、光学部材であり、例えば、厚さ５０〜５００μｍのものを使用できる。シート状部材のサイズは、例えば、幅３０ｃｍ〜１５０ｃｍ、長さ、３０ｃｍ〜１５０ｃｍである。
光学部材は、例えば、位相差フィルム、偏光フィルム、反射防止フィルム、視野角向上フィルム、輝度向上フィルムなどから選択される少なくとも１の光学フィルムを有することができる。光学部材は、これらの光学フィルムの単層構造であってもよく、上記のような光学フィルムを含む、複数のフィルムを積層した複層構造であってもよい。
本発明により、異なる領域における吸引力が相違することにより、例えば、厚さ１２０μｍ以下のシート状部材、および多層構造を有する部材のように、カール、シワ等が生じやすい構成の（積層）部材に対して、安定した搬送が可能である。例えば、偏光フィルムを有する多層構造のシート状部材などであっても、このような顕著な効果を得ることができる。 Examples of the sheet-like member that can be conveyed according to the present invention include an adsorbing member, a printed wiring board, and an optical member. The sheet-like member can be suitably used for a thin member that easily causes curling, wrinkling, and the like. In a certain aspect, a sheet-like member is an optical member, For example, the thing of thickness 50-500 micrometers can be used. The size of the sheet-like member is, for example, a width of 30 cm to 150 cm, a length, and 30 cm to 150 cm.
The optical member can have at least one optical film selected from, for example, a retardation film, a polarizing film, an antireflection film, a viewing angle enhancement film, a brightness enhancement film, and the like. The optical member may have a single layer structure of these optical films, or may have a multilayer structure in which a plurality of films including the above optical film are laminated.
According to the present invention, the difference in the suction force in different regions makes it possible to produce a (laminate) member that is likely to cause curling, wrinkles, etc., such as a sheet-like member having a thickness of 120 μm or less and a member having a multilayer structure. On the other hand, stable conveyance is possible. For example, such a remarkable effect can be obtained even with a sheet-like member having a multilayer structure having a polarizing film.

また、本発明の搬送装置であれば、シート状部材の変形例として、例えば、後述の図７および図８に示されるような長尺状部材２５を搬送できる。本発明においては、全ての態様において、長尺状部材を用いることができる。本発明の搬送装置であれば、長尺状部材のシワを効果的に伸ばすことができ、また、長尺状部材を平坦な状態で搬送できる。   Moreover, if it is a conveying apparatus of this invention, the elongate member 25 as shown in FIG. 7 and FIG. 8 mentioned later can be conveyed as a modification of a sheet-like member, for example. In the present invention, an elongated member can be used in all aspects. If it is the conveying apparatus of this invention, the wrinkle of a long member can be extended effectively, and a long member can be conveyed in a flat state.

ある態様において、複数の吸引部を設けることにより、シート状部材２０が搬送されるときに、シート状部材に作用する吸引力を、該シート状部材の少なくとも２つの領域において相違させることができる。例えば、図３および図４は、複数の吸引部を含んで成る搬送装置の態様を示す概略図である。
図３および図４において、１０はベルト状部材、１１はベルト状部材の厚さ方向に貫通した孔、２０はシート状部材、２１はシート状部材２０における一領域、２２はシート状部材２０における別の領域、２３は吸引力の境界部、３１は第１の吸引部、３２は第２の吸引部、４１は第１の吸引部における吸引力、４２は第２の吸引部における吸引力、５０はテールローラー、６０は搬送方向である。
搬送装置１は、シート状部材２０が搬送されるときにシート状部材２０に作用する吸引力が該シート状部材の少なくとも２つの領域において相違する搬送領域（１２ａ,１２ｂ）を有する。
ここで、搬送領域１２ａは、ベルト状部材１０における孔１１を通じた吸引力でシート状部材２０を吸引しながら搬送する領域であって、ベルト状部材１０が第１の吸引部３１と対面する領域に一致する。
搬送領域１２ｂは、ベルト状部材１０における孔１１を通じた吸引力でシート状部材２０を吸引しながら搬送する領域であって、ベルト状部材１０が第２の吸引部３２と対面する領域に一致する。
例えば、図３および図４で示される態様において、搬送領域(１２ａ,１２ｂ)は、ベルト状部材１０の孔１１を介して、吸引部（３１,３２）からシート状部材２０への吸引力（４１,４２）が作用する領域である。このような搬送領域１２において、シート状部材が搬送されるときにシート状部材に作用する吸引力が、該シート状部材の少なくとも２つの領域において相違する。
また、ベルト状部材１０は、シート状部材に吸引力が作用しない領域を有してもよい。すなわち、本発明の搬送装置においては、シート状部材を搬送する際に、シート状部材に対して吸引力が作用する領域と、実質的に吸引力が作用しない領域が混在してもよい。
なお、図３および図４において示される態様において、第１の吸引部３１と第２の吸引部３２とが異なる吸引力を有する形態であってもよい。別の態様においては、第１の吸引部３１に対応する搬送領域１２ａ内で、シート状部材に作用する吸引力が少なくとも２つの領域において相違していてもよい。また、第２の吸引部３２に対応する搬送領域１２ｂ内で、シート状部材に作用する吸引力が少なくとも２つの領域において相違していてもよい。 In one aspect, by providing a plurality of suction portions, the suction force acting on the sheet-like member when the sheet-like member 20 is conveyed can be made different in at least two regions of the sheet-like member. For example, FIG. 3 and FIG. 4 are schematic views showing an aspect of a transport device including a plurality of suction units.
3 and 4, 10 is a belt-like member, 11 is a hole penetrating in the thickness direction of the belt-like member, 20 is a sheet-like member, 21 is a region in the sheet-like member 20, and 22 is in the sheet-like member 20. Another area, 23 is a boundary of suction force, 31 is a first suction portion, 32 is a second suction portion, 41 is a suction force in the first suction portion, 42 is a suction force in the second suction portion, 50 is a tail roller, and 60 is a conveyance direction.
The conveyance device 1 has conveyance areas (12a, 12b) in which suction forces acting on the sheet-like member 20 when the sheet-like member 20 is conveyed are different in at least two areas of the sheet-like member.
Here, the conveyance region 12 a is a region in which the sheet-like member 20 is conveyed while being sucked by the suction force through the hole 11 in the belt-like member 10, and the belt-like member 10 faces the first suction part 31. Matches.
The conveyance region 12 b is a region where the sheet-like member 20 is conveyed while being sucked by the suction force through the hole 11 in the belt-like member 10, and coincides with a region where the belt-like member 10 faces the second suction part 32. .
For example, in the embodiment shown in FIG. 3 and FIG. 4, the conveyance region (12 a, 12 b) has a suction force (31, 32) to the sheet-like member 20 through the hole 11 of the belt-like member 10. 41, 42). In such a conveyance area | region 12, the attraction | suction force which acts on a sheet-like member when a sheet-like member is conveyed differs in at least 2 area | region of this sheet-like member.
Further, the belt-like member 10 may have a region where no suction force acts on the sheet-like member. That is, in the transport apparatus of the present invention, when transporting the sheet-like member, a region where the suction force acts on the sheet-like member and a region where the suction force does not substantially act may coexist.
3 and 4, the first suction unit 31 and the second suction unit 32 may have different suction forces. In another aspect, in the conveyance area | region 12a corresponding to the 1st suction part 31, the suction | attraction force which acts on a sheet-like member may differ in at least 2 area | region. Moreover, in the conveyance area | region 12b corresponding to the 2nd suction part 32, the attraction | suction force which acts on a sheet-like member may differ in at least 2 area | region.

複数の吸引部を有する態様において、例えば、図３および図４に示すように、第１の吸引部３１における吸引力４１と、第２の吸引部３２における吸引力４２を相違させることができる。ある態様においては、下流側の吸引部の吸引力が、上流側の吸引部の吸引力よりも大きい態様を挙げられる。
図３および図４によると、例えば、第２の吸引部３２における吸引力４２が第１の吸引部３１における吸引力４１よりも大きい。
例えば、下流側の吸引力を０．０２〜５５ｋＰａの範囲内、上流側の吸引力を０．０１〜５０ｋＰａの範囲内に設定できる。 In an embodiment having a plurality of suction portions, for example, as shown in FIGS. 3 and 4, the suction force 41 in the first suction portion 31 and the suction force 42 in the second suction portion 32 can be made different. In a certain aspect, the suction force of the downstream suction part is larger than the suction force of the upstream suction part.
According to FIGS. 3 and 4, for example, the suction force 42 in the second suction part 32 is larger than the suction force 41 in the first suction part 31.
For example, the downstream suction force can be set in the range of 0.02 to 55 kPa, and the upstream suction force can be set in the range of 0.01 to 50 kPa.

また、搬送方向において、シート状部材の下流側の領域に作用する吸引力が、シート状部材の上流側の領域に作用する吸引力よりも大きい態様の場合、下流側の領域に作用する吸引力から、上流側の領域に作用する吸引力を差引いた値は、０．０１〜５０ｋＰａ、例えば、０．１〜２０ｋＰａの範囲内である。
このような範囲で吸引力の差を設けることにより、吸引力が急激に変化することを抑制でき、シート状部材を平坦な状態で搬送でき、また、搬送時におけるシート状部材へのシワの発生を抑制でき、シート状部材に存在し得るシワを伸ばすことができる。 Further, in the transport direction, when the suction force acting on the downstream region of the sheet-like member is larger than the suction force acting on the upstream region of the sheet-like member, the suction force acting on the downstream region. The value obtained by subtracting the suction force acting on the upstream region is in the range of 0.01 to 50 kPa, for example, 0.1 to 20 kPa.
By providing a difference in suction force in such a range, it is possible to suppress a sudden change in suction force, and the sheet-like member can be transported in a flat state, and generation of wrinkles on the sheet-like member during transportation is generated. Can be suppressed, and wrinkles that may exist in the sheet-like member can be extended.

複数の吸引部を有する態様において、同じ吸引部の上流側から下流側に向かって吸引力を変化させてもよい。   In the aspect having a plurality of suction portions, the suction force may be changed from the upstream side to the downstream side of the same suction portion.

また、複数の吸引部を設ける場合、一の吸引部と、他の吸引部との間に、吸引力の境界部２３を設けてもよい。境界部を設けることにより、より効率的にシート状部材を伸ばすことができ、シワの除去、シート状部材の平坦化を行うことができる。吸引力の境界部２３は、隣接する吸引部を、間隔を開けて配置することで設けることができる。   Moreover, when providing a some suction part, you may provide the boundary part 23 of a suction force between one suction part and another suction part. By providing the boundary portion, the sheet-like member can be more efficiently extended, and wrinkles can be removed and the sheet-like member can be flattened. The boundary portion 23 of the suction force can be provided by arranging adjacent suction portions at intervals.

ある態様において、シート状部材に作用する吸引力が、搬送方向に対して平行な方向において段階的に分布する。図５は、本発明の搬送装置の一態様における概略を示す上面図であり、図６は、上記本発明の一態様における搬送装置の概略を示す側面図である。図５及び図６において、１０はベルト状部材、１１はベルト状部材の厚さ方向に貫通した孔、２０はシート状部材、２１はシート状部材２０における一領域、２２はシート状部材２０における別の領域、２３は吸引力の境界部、３１は第１の吸引部、３２は第２の吸引部、３３は第３の吸引部、４１は第１の吸引部における吸引力、４２は第２の吸引部における吸引力、４３は第３の吸引部における吸引力、５０はテールローラー、５１は貼合ロール、５２はロール、５３は送出しロール、６０は搬送方向、７０は第２のシート状部材、８０は積層体である。
搬送装置１は、シート状部材２０が搬送されるときにシート状部材２０に作用する吸引力が該シート状部材の少なくとも２つの領域において相違する搬送領域（１２ａ,１２ｂ,１２ｃ）を有する。搬送領域（１２ａ,１２ｂ,１２ｃ）のうち、少なくとも２つの搬送領域における吸引力が相違する態様であってもよく、例えば搬送領域（１２ａ,１２ｂ,１２ｃ）のうち、少なくとも１つの搬送領域内で吸引力が相違する態様であってもよい。
ここで、搬送領域１２ａは、ベルト状部材１０における孔１１を通じた吸引力でシート状部材２０を吸引しながら搬送する領域であって、ベルト状部材１０が第１の吸引部３１と対面する領域に一致する。
搬送領域１２ｂは、ベルト状部材１０における孔１１を通じた吸引力でシート状部材２０を吸引しながら搬送する領域であって、ベルト状部材１０が第２の吸引部３２と対面する領域に一致する。
搬送領域１２ｃは、ベルト状部材１０における孔１１を通じた吸引力でシート状部材２０を吸引しながら搬送する領域であって、ベルト状部材１０が第３の吸引部３３と対面する領域に一致する。
このような搬送領域１２において、シート状部材が搬送されるときにシート状部材に作用する吸引力が、該シート状部材の少なくとも２つの領域において相違する。
また、ベルト状部材１０は、シート状部材に吸引力が作用しない領域を有してもよい。すなわち、本発明の搬送装置においては、シート状部材を搬送する際に、シート状部材に対して吸引力が作用する領域と、実質的に吸引力が作用しない領域が混在してもよい。
なお、図５および図６において示される態様において、後述するように、第１の吸引部３１と、第２の吸引部３２と、第３の吸引部３３とが異なる吸引力を有する態様であってもよい。別の態様においては、第１の吸引部３１に対応する搬送領域１２ａ内で、シート状部材に作用する吸引力が少なくとも２つの領域において相違していてもよい。また、第２の吸引部３２に対応する搬送領域１２ｂ内で、シート状部材に作用する吸引力が少なくとも２つの領域において相違していてもよい。さらに、第３の吸引部３３に対応する搬送領域１２ｃ内で、シート状部材に作用する吸引力が少なくとも２つの領域において相違していてもよい。 In one embodiment, the suction force acting on the sheet-like member is distributed stepwise in a direction parallel to the transport direction. FIG. 5 is a top view illustrating an outline of one aspect of the conveyance apparatus of the present invention, and FIG. 6 is a side view illustrating an outline of the conveyance apparatus according to one aspect of the present invention. 5 and 6, 10 is a belt-like member, 11 is a hole penetrating in the thickness direction of the belt-like member, 20 is a sheet-like member, 21 is a region in the sheet-like member 20, and 22 is in the sheet-like member 20. Another area, 23 is a boundary of suction force, 31 is a first suction portion, 32 is a second suction portion, 33 is a third suction portion, 41 is a suction force in the first suction portion, and 42 is a first suction portion. 2 is the suction force in the suction portion, 43 is the suction force in the third suction portion, 50 is the tail roller, 51 is the bonding roll, 52 is the roll, 53 is the delivery roll, 60 is the transport direction, and 70 is the second. A sheet-like member 80 is a laminate.
The conveyance device 1 has conveyance areas (12a, 12b, 12c) in which suction forces acting on the sheet-like member 20 when the sheet-like member 20 is conveyed are different in at least two areas of the sheet-like member. Of the transport areas (12a, 12b, 12c), at least two transport areas may have different suction forces. For example, in the transport areas (12a, 12b, 12c), at least one transport area The aspect from which suction | attraction force differs may be sufficient.
Here, the conveyance region 12 a is a region in which the sheet-like member 20 is conveyed while being sucked by the suction force through the hole 11 in the belt-like member 10, and the belt-like member 10 faces the first suction part 31. Matches.
The conveyance region 12 b is a region where the sheet-like member 20 is conveyed while being sucked by the suction force through the hole 11 in the belt-like member 10, and coincides with a region where the belt-like member 10 faces the second suction part 32. .
The conveyance region 12 c is a region in which the sheet-like member 20 is conveyed while being sucked by the suction force through the hole 11 in the belt-like member 10, and coincides with a region where the belt-like member 10 faces the third suction part 33. .
In such a conveyance area | region 12, the attraction | suction force which acts on a sheet-like member when a sheet-like member is conveyed differs in at least 2 area | region of this sheet-like member.
Further, the belt-like member 10 may have a region where no suction force acts on the sheet-like member. That is, in the transport apparatus of the present invention, when transporting the sheet-like member, a region where the suction force acts on the sheet-like member and a region where the suction force does not substantially act may coexist.
5 and 6, the first suction unit 31, the second suction unit 32, and the third suction unit 33 have different suction forces as described later. May be. In another aspect, in the conveyance area | region 12a corresponding to the 1st suction part 31, the suction | attraction force which acts on a sheet-like member may differ in at least 2 area | region. Moreover, in the conveyance area | region 12b corresponding to the 2nd suction part 32, the attraction | suction force which acts on a sheet-like member may differ in at least 2 area | region. Furthermore, the suction force acting on the sheet-like member may be different in at least two regions in the transport region 12c corresponding to the third suction part 33.

シート状部材に作用する吸引力が、搬送方向に対して平行な方向において段階的に分布する態様において、例えば、図５及び図６に示すように、本発明の搬送装置は、第１の吸引部３１、第２の吸引部３２、第３の吸引部３３を有することができる。
このような態様において、シート状部材が搬送されるときにシート状部材に作用する吸引力が、該シート状部材の少なくとも２つの領域において相違する。例えば、第１の吸引部３１における吸引力４１と、第２の吸引部３２における吸引力４２と、第３の吸引部３３における吸引力４３とが、それぞれ異なる吸引力を示してもよい。また、第１の吸引部３１における吸引力４１と第２の吸引部３２における吸引力４２が同一の吸引力を示し、第３の吸引部３３における吸引力４３が、他の２つの吸引部における吸引力と異なる吸引力を示してもよい。 In an aspect in which the suction force acting on the sheet-like member is distributed stepwise in a direction parallel to the transport direction, for example, as shown in FIGS. 5 and 6, the transport device of the present invention has the first suction. A portion 31, a second suction portion 32, and a third suction portion 33 can be included.
In such an embodiment, the suction force acting on the sheet-like member when the sheet-like member is conveyed is different in at least two regions of the sheet-like member. For example, the suction force 41 in the first suction unit 31, the suction force 42 in the second suction unit 32, and the suction force 43 in the third suction unit 33 may indicate different suction forces. In addition, the suction force 41 in the first suction part 31 and the suction force 42 in the second suction part 32 show the same suction force, and the suction force 43 in the third suction part 33 is the same in the other two suction parts. A suction force different from the suction force may be indicated.

ある態様において、下流側の第３の吸引部３３における吸引力から、第２の吸引部３２における吸引力、および上流側の第１の吸引部３１に吸引力の順で、吸引力は大きくなる。このような関係で吸引力を有することにより、シート状部材から段階的にシワを伸ばして、より安定した搬送ができる。   In one embodiment, the suction force increases in the order of the suction force in the second suction portion 32 and the suction force in the upstream first suction portion 31 from the suction force in the third suction portion 33 on the downstream side. . By having a suction force in such a relationship, wrinkles are gradually extended from the sheet-like member, and more stable conveyance can be performed.

例えば、シート状部材に作用する吸引力が、搬送方向に対して平行な方向において段階的に分布する態様において、最下流に配置される吸引部の吸引力は０．０２〜５５ｋＰａの範囲内であり、最上流側に配置される吸引部の吸引力は０．０１〜５０ｋＰａの範囲内である。また、ある態様において、上記関係に加えて、最下流側に配置される吸引部の吸引力は、最上流側に配置される吸引部の吸引力よりも大きい。
シート状部材に作用する吸引力が、搬送方向に対して平行な方向において段階的に分布する態様において、少なくとも、シート状部材が搬送されるときにシート状部材に作用する吸引力が、該シート状部材の少なくとも２つの領域において相違している限り、用いるシート状部材の性質、厚さなどに応じて、最下流側に配置される吸引部と、最上流側に配置される吸引部との間に配置される吸引部における吸引力は、適宜調整できる。 For example, in a mode in which the suction force acting on the sheet-like member is distributed stepwise in a direction parallel to the transport direction, the suction force of the suction portion disposed at the most downstream is within a range of 0.02 to 55 kPa. Yes, the suction force of the suction part arranged on the most upstream side is in the range of 0.01 to 50 kPa. Moreover, in a certain aspect, in addition to the said relationship, the suction force of the suction part arrange | positioned at the most downstream side is larger than the suction force of the suction part arrange | positioned at the most upstream side.
In an aspect in which the suction force acting on the sheet-like member is distributed stepwise in a direction parallel to the transport direction, at least the suction force acting on the sheet-like member when the sheet-like member is transported is the sheet. As long as it is different in at least two regions of the sheet-like member, the suction part arranged on the most downstream side and the suction part arranged on the most upstream side according to the nature, thickness, etc. of the sheet-like member used The suction force in the suction part disposed between can be adjusted as appropriate.

ある態様において、本発明の搬送装置は、ベルト状部材に対して、シート状部材が載置される側の上方に配置されるロールであって、シート状部材が搬送されるときに該ロールが回転しながらベルト状部材上のシート状部材と接触するように配置されるロールを更に有する。例えば、図５および図６におけるロール５２は、ベルト状部材上のシート状部材と接触するように配置されるロールに該当する。
このロールを有することにより、シート状部材のシワをより効果的に除去できる。ベルト状部材上のシート状部材と接触するように配置されるロール５２は、任意の場所に配置できる。例えば、吸引力の境界部２３の下流側に設けてもよい。このような位置に配置すると、より効果的にシート状部材のシワを除去でき、シワ伸ばし効果に優れる。また、複数のロール５２を配置でき、各ロールを任意の位置に配置できる。 In a certain aspect, the conveying device of the present invention is a roll disposed above the side on which the sheet-like member is placed with respect to the belt-like member, and when the sheet-like member is conveyed, It further has a roll arranged so as to come into contact with the sheet-like member on the belt-like member while rotating. For example, the roll 52 in FIGS. 5 and 6 corresponds to a roll disposed so as to come into contact with the sheet-like member on the belt-like member.
By having this roll, the wrinkles of the sheet-like member can be more effectively removed. The roll 52 arranged so as to come into contact with the sheet-like member on the belt-like member can be arranged at an arbitrary place. For example, you may provide in the downstream of the boundary part 23 of a suction force. If it arrange | positions in such a position, the wrinkle of a sheet-like member can be removed more effectively and it is excellent in the wrinkle extension effect. Moreover, the some roll 52 can be arrange | positioned and each roll can be arrange | positioned in arbitrary positions.

ある態様において、シート状部材の搬送経路にロールを配置する場合、ロール通過前後で吸引力を調整してもよい。例えば、シート状部材がロールを通過する前における吸引力を強くし、シート状部材がロールを通過する際の吸引力を弱くし、ロールを通過後の吸引力を強くするように調整してもよい。このように、ロールの前後における吸引力を強くし、シート状部材とロールが接触している間の吸引力を弱くすることにより、ロール通過時にシワを効果的に伸ばすことができ、ロールの通過後にしっかりと吸引させることで、シート状部材の平坦化をより効率よく行うことができる。   In a certain aspect, when arrange | positioning a roll to the conveyance path | route of a sheet-like member, you may adjust suction | attraction force before and after roll passing. For example, even if the sheet-like member is adjusted to increase the suction force before passing the roll, weaken the suction force when the sheet-like member passes the roll, and increase the suction force after passing the roll. Good. In this way, by increasing the suction force before and after the roll and weakening the suction force while the sheet-like member and the roll are in contact, the wrinkles can be effectively stretched when passing through the roll, and the passage of the roll Later, the sheet-like member can be flattened more efficiently by suctioning firmly.

また、セパレートフィルム剥離等の処理工程がある場合、その処理工程の通過前後で吸引力を調整してもよい。この態様においても、処理工程の前後における吸引力を強くし、処理工程の間における吸引力を弱くすることにより、処理工程の間にシワを効果的に伸ばすことができ、処理工程の後にしっかりと吸引させることで、シート状部材の平坦化をより効率よく行うことができる。   Moreover, when there exists processing processes, such as separation film peeling, you may adjust suction | attraction force before and after the passage of the processing process. Also in this aspect, by increasing the suction force before and after the treatment process and weakening the suction force during the treatment process, wrinkles can be effectively extended during the treatment process, and firmly after the treatment process. By sucking, the sheet-like member can be flattened more efficiently.

ある態様においては、シート状部材に作用する吸引力が、搬送方向に対して平行な方向において連続的に分布する。図７は、本発明の搬送装置の一態様における概略を示す上面図であり、図８は、上記本発明の一態様における搬送装置の概略を示す側面図である。図７及び図８において、１０はベルト状部材、１１はベルト状部材の厚さ方向に貫通した孔、２５は長尺状部材、２１は長尺状部材２５における一領域、２２は長尺状部材２５における別の領域、２４は長尺状部材２５における更に別の領域、３０は吸引部、４４は吸引部３０における上流側の吸引力、４５は吸引部３０における中流部の吸引力、４６は吸引部３０における下流側の吸引力、５０はテールローラー、５１は貼合ロール、６０は搬送方向である。
搬送装置１は、シート状部材の一態様である長尺状部材２５が搬送されるときに長尺状部材２５に作用する吸引力が該シート状部材の少なくとも２つの領域において相違する搬送領域１２を有する。
ここで、搬送領域１２は、ベルト状部材１０における孔１１を通じた吸引力で長尺状部材２５を吸引しながら搬送する領域であって、ベルト状部材１０が吸引部３０と対面する領域に一致する。
このような搬送領域１２において、シート状部材（長尺状部材）が搬送されるときにシート状部材（長尺状部材）に作用する吸引力が、該シート状部材（長尺状部材）の少なくとも２つの領域において相違する。
また、ベルト状部材１０は、シート状部材（長尺状部材）に吸引力が作用しない領域を有してもよい。すなわち、本発明の搬送装置においては、シート状部材を搬送する際に、シート状部材（長尺状部材）に対して吸引力が作用する領域と、実質的に吸引力が作用しない領域が混在してもよい。 In a certain aspect, the suction | attraction force which acts on a sheet-like member is distributed continuously in the direction parallel to a conveyance direction. FIG. 7 is a top view illustrating an outline of one aspect of the conveyance apparatus of the present invention, and FIG. 8 is a side view illustrating an outline of the conveyance apparatus according to one aspect of the present invention. 7 and 8, 10 is a belt-like member, 11 is a hole penetrating in the thickness direction of the belt-like member, 25 is a long member, 21 is a region in the long member 25, and 22 is long. Another area in the member 25, 24 is still another area in the elongated member 25, 30 is a suction portion, 44 is an upstream suction force in the suction portion 30, 45 is a suction force in the midstream portion in the suction portion 30, 46 Is a suction force on the downstream side of the suction unit 30, 50 is a tail roller, 51 is a bonding roll, and 60 is a conveyance direction.
The conveyance device 1 has a conveyance region 12 in which the suction force acting on the long member 25 is different in at least two regions of the sheet member when the long member 25 which is one aspect of the sheet member is conveyed. Have
Here, the conveyance region 12 is a region where the long member 25 is conveyed while being sucked by the suction force through the hole 11 in the belt-shaped member 10, and coincides with a region where the belt-shaped member 10 faces the suction portion 30. To do.
In such a conveyance area | region 12, when a sheet-like member (elongate member) is conveyed, the suction force which acts on a sheet-like member (elongate member) of this sheet-like member (elongate member) It differs in at least two areas.
Further, the belt-like member 10 may have a region where no suction force acts on the sheet-like member (long member). That is, in the transport device of the present invention, when transporting the sheet-like member, a region where the suction force acts on the sheet-like member (long member) and a region where the suction force does not substantially act are mixed. May be.

シート状部材に作用する吸引力が、搬送方向に対して平行な方向において連続的に分布する態様において、例えば、吸引部３０における上流側の吸引力４４から、吸引部３０における中流部の吸引力４５および吸引部３０における下流側の吸引力４６に向かって、吸引力は連続的に分布する。例えば、吸引部３０における上流側の吸引力４４が弱く、下流側の吸引力４６が強くなるように、連続的に吸引力は分布する。
シート状部材に作用する吸引力が、搬送方向に対して平行な方向において連続的に分布することにより、シート状部材のシワを伸ばして、より安定した搬送ができることに加えて、特に、長尺状部材を搬送する場合により効率よく搬送できる。また、連続的に吸引することによって、反りの生じやすいシート状部材、反りが生じた(カールが大きい)シート状部材に対して、より効率的に搬送でき、反り（カール）、折れを防止または平坦な状態に回復できる。
また、長尺状部材を搬送する場合において、長尺状部材をより平坦に搬送できる。 In an aspect in which the suction force acting on the sheet-like member is continuously distributed in a direction parallel to the conveyance direction, for example, from the suction force 44 on the upstream side of the suction unit 30 to the suction force of the midstream portion in the suction unit 30 The suction force is continuously distributed toward the suction force 46 on the downstream side of 45 and the suction unit 30. For example, the suction force is continuously distributed so that the suction force 44 on the upstream side in the suction unit 30 is weak and the suction force 46 on the downstream side is strong.
In addition to the fact that the suction force acting on the sheet-like member is continuously distributed in a direction parallel to the conveyance direction, the wrinkles of the sheet-like member can be extended and more stable conveyance can be achieved. It can be more efficiently transported when transporting the shaped member. In addition, by continuously sucking, it is possible to more efficiently convey a sheet-like member that is likely to be warped, and a sheet-like member that is warped (large curl), preventing warpage (curling) or bending. It can recover to a flat state.
Moreover, when conveying a long member, a long member can be conveyed more flatly.

この態様においては、上流側における吸引力は０．０１〜５０ｋＰａの範囲内であり、下流域における吸引力は０．０２〜５５ｋＰａの範囲内であることができる。また、ある態様において、上記関係に加えて、下流域における吸引力は上流側における吸引力よりも大きい。   In this embodiment, the suction force on the upstream side can be in the range of 0.01 to 50 kPa, and the suction force in the downstream region can be in the range of 0.02 to 55 kPa. Moreover, in a certain aspect, in addition to the said relationship, the suction force in a downstream area is larger than the suction force in an upstream.

シート状部材に作用する吸引力が、搬送方向に対して平行な方向において連続的に分布する態様において、少なくとも、シート状部材が搬送されるときにシート状部材に作用する吸引力が、該シート状部材の少なくとも２つの領域において相違している限り、用いるシート状部材の性質、厚さなどに応じて、下流域における吸引力と、上流側における吸引力は、適宜調整できる。   In an aspect in which the suction force acting on the sheet-like member is continuously distributed in a direction parallel to the transport direction, at least the suction force acting on the sheet-like member when the sheet-like member is transported is the sheet. As long as it is different in at least two regions of the sheet-like member, the suction force in the downstream region and the suction force in the upstream side can be appropriately adjusted according to the properties, thickness, etc. of the sheet-like member to be used.

ある態様においては、シート状部材に作用する吸引力が、搬送方向に対して垂直な方向にある少なくとも２つの領域において相違する搬送装置が提供される。搬送方向に対して垂直な方向にある少なくとも２つの領域において吸引力が相違することにより、シート状部材のカールを防止でき、シワを効果的に伸ばすことができ、また、シート状部材を平坦な状態で搬送できる。例えば、シート状部材における長手方向周辺部の吸引力と、シート状部材における長手方向に沿った中心領域の吸引力に差を設けてもよい。   In a certain aspect, the conveying apparatus from which the attraction force which acts on a sheet-like member differs in at least 2 area | region which exists in the direction perpendicular | vertical with respect to a conveyance direction is provided. Since the suction force is different in at least two regions perpendicular to the conveying direction, curling of the sheet-like member can be prevented, wrinkles can be effectively stretched, and the sheet-like member can be flattened. Can be transported in a state. For example, a difference may be provided between the suction force in the peripheral portion in the longitudinal direction of the sheet-like member and the suction force in the central region along the longitudinal direction of the sheet-like member.

＜積層体の製造方法＞
本発明の別の態様によると、第１のシート状部材と第２のシート状部材とを有する積層体の製造方法であって、上記本発明に係る搬送装置を用いて、第１のシート状部材を搬送すること、および該第１のシート状部材と第２のシート状部材とを貼合することを含む、積層体の製造方法が提供される。
別の態様においては、シート状部材と長尺状部材とを有する積層体の製造方法であって、上記本発明に係る搬送装置を用いて、シート状部材を搬送すること、および該シート状部材と長尺状部材とを貼合することを含む、積層体の製造方法が提供される。 <Method for producing laminate>
According to another aspect of the present invention, there is provided a method for manufacturing a laminate having a first sheet-like member and a second sheet-like member, wherein the first sheet-like member is formed using the conveying device according to the present invention. There is provided a method for producing a laminate including conveying a member and bonding the first sheet-like member and the second sheet-like member.
In another aspect, it is a manufacturing method of a layered product which has a sheet-like member and an elongate member, and conveys a sheet-like member using the conveying device concerning the above-mentioned present invention, and this sheet-like member The manufacturing method of a laminated body including bonding an elongate member and a long member is provided.

以下、上述の図５及び図６を参照しながら説明する。図５及び図６において、２０はシート状部材、５１は貼合ロール、５３は送出しロール、６０は搬送方向、７０は第２のシート状部材、８０は積層体である。本発明の搬送装置を用いて搬送することにより、シワが伸ばされたシート状部材（第１のシート状部材）２０と、第２のシート状部材７０とを、貼合ロール５１を用いて貼合し、積層体８０を製造できる。
第１のシート状部材を、本発明の搬送装置を用いて搬送することにより、第１のシート状部材のシワを伸ばし、平坦にできる。さらに、第１のシート状部材のカールに影響されることなく、位置合わせを行え、第１のシート状部材と、第２のシート状部材との貼合を高精度に行える。
ある態様においては、第２のシート状部材が長尺状部材であってもよく、第１のシート状部材が長尺状部材であってもよく、および第１及び第２のシート状部材が共に長尺状部材であってもよい。
第２のシート状部材は、特に限定されず、例えば、セパレートフィルム、保護フィルム、光学部材であることができる。 Hereinafter, a description will be given with reference to FIGS. 5 and 6 described above. 5 and 6, 20 is a sheet-like member, 51 is a bonding roll, 53 is a delivery roll, 60 is a conveyance direction, 70 is a second sheet-like member, and 80 is a laminate. The sheet-like member (first sheet-like member) 20 in which the wrinkles are stretched and the second sheet-like member 70 are pasted using the laminating roll 51 by being transported using the transport device of the present invention. Thus, the laminate 80 can be manufactured.
By conveying the first sheet-like member using the conveying device of the present invention, the wrinkles of the first sheet-like member can be extended and flattened. Furthermore, alignment can be performed without being affected by the curl of the first sheet-like member, and the bonding between the first sheet-like member and the second sheet-like member can be performed with high accuracy.
In an aspect, the second sheet-like member may be a long member, the first sheet-like member may be a long member, and the first and second sheet-like members are Both may be elongated members.
A 2nd sheet-like member is not specifically limited, For example, it can be a separate film, a protective film, and an optical member.

本発明は、シート状部材を平坦な状態で搬送でき、また、シート状部材へのシワの発生を抑制でき、シート状部材に存在するシワを伸ばすことができる搬送装置を提供する。さらに、本発明は、このような搬送装置を用いてシート状部材を搬送することを含む、積層体の製造方法を提供する。   The present invention provides a transport device that can transport a sheet-like member in a flat state, can suppress the occurrence of wrinkles on the sheet-like member, and can extend the wrinkles present on the sheet-like member. Furthermore, this invention provides the manufacturing method of a laminated body including conveying a sheet-like member using such a conveying apparatus.

１ 搬送装置
１０ ベルト状部材
１１ ベルト状部材の厚さ方向に貫通した孔
１２ 搬送領域
２０ シート状部材
２１ シート状部材（長尺状部材）における一領域
２２ シート状部材（長尺状部材）における別の領域
２３ 吸引力の境界部
２４ 長尺状部材における更に別の領域
２５ 長尺状部材
３０ 吸引部
３１ 第１の吸引部
３２ 第２の吸引部
３３ 第３の吸引部
４１ 第１の吸引部における吸引力
４２ 第２の吸引部における吸引力
４３ 第３の吸引部における吸引力
４４ 上流側の吸引力
４５ 中流部の吸引力
４６ 下流側の吸引力
５０ テールローラー
５１ 貼合ロール
５２ ロール
５３ 送出しロール
６０ 搬送方向
７０ 第２のシート状部材
８０ 積層体 DESCRIPTION OF SYMBOLS 1 Conveying device 10 Belt-shaped member 11 Hole penetrated in thickness direction of belt-shaped member 12 Conveying region 20 Sheet-shaped member 21 One region in sheet-shaped member (long-shaped member) 22 In sheet-shaped member (long-shaped member) Another area 23 Boundary part 24 of suction force Still another area in the long member 25 Long member 30 Suction part 31 First suction part 32 Second suction part 33 Third suction part 41 First suction Suction force in the part 42 suction force in the second suction part 43 suction force in the third suction part 44 upstream suction force 45 suction force in the middle stream part 46 downstream suction force 50 tail roller 51 bonding roll 52 roll 53 Delivery roll 60 Conveying direction 70 Second sheet-like member 80 Laminate

Claims (9)

シート状部材を搬送するための搬送装置であって、
シート状部材を載置して搬送方向に搬送するためのベルト状部材であって、厚さ方向に貫通した複数の孔を有するベルト状部材と、
ベルト状部材に対して、シート状部材が載置される側と反対側に配置される吸引部であって、周囲雰囲気を吸引することにより、ベルト状部材の前記孔を通じた吸引力でシート状部材をベルト状部材に対して保持する吸引部とを有し、および
シート状部材が搬送されるときにシート状部材に作用する吸引力が、該シート状部材の少なくとも２つの領域において相違する搬送領域を有する、搬送装置。 A conveying device for conveying a sheet-like member,
A belt-like member for placing a sheet-like member and transporting it in the transport direction, and having a plurality of holes penetrating in the thickness direction;
A suction part disposed on the side opposite to the side on which the sheet-like member is placed with respect to the belt-like member, and by sucking the ambient atmosphere, the suction force through the hole of the belt-like member causes the sheet-like member to A suction section that holds the member with respect to the belt-shaped member, and the suction force acting on the sheet-shaped member when the sheet-shaped member is transported differs in at least two regions of the sheet-shaped member. A conveying device having an area. 搬送方向において、シート状部材の下流側の領域に作用する吸引力が、シート状部材の上流側の領域に作用する吸引力より大きい、請求項１に記載の搬送装置。   The conveying apparatus according to claim 1, wherein in the conveying direction, a suction force acting on a region on the downstream side of the sheet-like member is larger than a suction force acting on a region on the upstream side of the sheet-like member. シート状部材に作用する吸引力が、搬送方向に対して平行な方向において段階的に分布する、請求項１または２に記載の搬送装置。   The conveying apparatus according to claim 1 or 2, wherein the suction force acting on the sheet-like member is distributed stepwise in a direction parallel to the conveying direction. 吸引部が、前記段階に応じて複数の吸引部を含んで成る、請求項３に記載の搬送装置。   The transport device according to claim 3, wherein the suction unit includes a plurality of suction units according to the stage. シート状部材に作用する吸引力が、搬送方向に対して平行な方向において連続的に分布する、請求項１または２に記載の搬送装置。   The conveying apparatus according to claim 1 or 2, wherein the suction force acting on the sheet-like member is continuously distributed in a direction parallel to the conveying direction. シート状部材に作用する吸引力が、搬送方向に対して垂直な方向にある少なくとも２つの領域において相違する、請求項１から５のいずれか１項に記載の搬送装置。   The conveying apparatus according to claim 1, wherein suction forces acting on the sheet-like member are different in at least two regions in a direction perpendicular to the conveying direction. ベルト状部材に対して、シート状部材が載置される側の上方に配置されるロールであって、シート状部材が搬送されるときに該ロールが回転しながらベルト状部材上のシート状部材と接触するように配置されるロールを更に有する、請求項１から６のいずれか１項に記載の搬送装置。   A roll disposed above the side on which the sheet-shaped member is placed with respect to the belt-shaped member, and the sheet-shaped member on the belt-shaped member is rotated while the sheet-shaped member is transported The conveyance apparatus of any one of Claim 1 to 6 which has further a roll arrange | positioned so that it may contact. 第１のシート状部材と第２のシート状部材とを有する積層体の製造方法であって、
請求項１から７のいずれか１項に記載の搬送装置を用いて第１のシート状部材を搬送すること、および
該第１のシート状部材と第２のシート状部材とを貼合すること
を含む、積層体の製造方法。 It is a manufacturing method of a layered product which has the 1st sheet-like member and the 2nd sheet-like member,
Conveying a 1st sheet-like member using the conveying apparatus of any one of Claim 1 to 7, and bonding this 1st sheet-like member and a 2nd sheet-like member. The manufacturing method of a laminated body containing this. シート状部材と長尺状部材とを有する積層体の製造方法であって、
請求項１から７のいずれか１項に記載の搬送装置を用いてシート状部材を搬送すること、および
該シート状部材と長尺状部材とを貼合すること
を含む、積層体の製造方法。 A method for producing a laminate having a sheet-like member and an elongated member,
The manufacturing method of a laminated body including conveying a sheet-like member using the conveying apparatus of any one of Claim 1 to 7, and bonding this sheet-like member and an elongate member. .
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CN108792690B (en) 2021-11-23

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