JP2018170306A - Method for manufacturing gallium oxide semiconductor device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce a damage to a cut section of a gallium oxide substrate.SOLUTION: A method for manufacturing a gallium oxide semiconductor device comprises the steps of: (S2) forming, by dry etching, a plurality of slits 60 in a first electrode formation face 20a of a gallium oxide substrate; (S4) forming an anode electrode 40 in a region surrounded by the plurality of slits 60 in the first electrode formation face 20a; and (S6) dicing the gallium oxide substrate into individual pieces by grinding a lower face of the gallium oxide substrate, which is located on a side opposite to the first electrode formation face 20a until reaching the plurality of slits 60. According to the present invention, the gallium oxide substrate is diced into individual pieces by grinding the gallium oxide substrate from the backside thereof after slit formation by dry etching and thus a side face of the substrate is not damaged mechanically. Hence, the cracking, chipping, cleavage and the like which can be caused in the side face of the gallium oxide substrate can be prevented unlike the dicing by use of a dicing blade or the like.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a method for manufacturing a gallium oxide semiconductor device, and more particularly to a method for separating a gallium oxide substrate.

A semiconductor device for a power device needs to secure a sufficient reverse breakdown voltage as compared with a general semiconductor device. Therefore, instead of silicon (Si), silicon carbide (SiC) having a larger band gap, nitriding Gallium (GaN), gallium oxide (Ga ₂ O ₃ ), or the like may be used. Among them, gallium oxide has a very large band gap of 4.8 to 4.9 eV and a dielectric breakdown electric field of 7 to 8 MV / cm. Therefore, a semiconductor device using gallium oxide is a semiconductor device for power devices. As very promising.

  In general, a semiconductor device is manufactured by manufacturing a large number of elements on a wafer, separating the wafer by cutting and separating, and then mounting the separated semiconductor device on a package. In the case of a substrate made of silicon (Si) or the like, cutting and separation are performed by blade dicing using a diamond blade. However, a semiconductor substrate made of gallium oxide has high cleaving properties. Cleavage could occur due to surface damage.

  As another method for dividing a semiconductor device into pieces, a so-called tip dicing method is proposed in which a semiconductor substrate is half-cut from the front surface side and then ground and polished from the back surface side. For example, Patent Documents 1 and 2 propose a method of dividing the wafer by grinding and polishing the wafer from the back side after forming a slit deeper than the final chip thickness in the semiconductor substrate along the dicing line of the wafer. ing.

JP-A-5-335411 JP 11-40520 A

  However, since the methods described in Patent Documents 1 and 2 both form slits by blade dicing using a dicing apparatus, there is a problem that the cut surface is damaged and cleaved as described above. there were.

  Therefore, an object of the present invention is to provide a method of manufacturing a gallium oxide semiconductor device capable of preventing the gallium oxide substrate from being cleaved by reducing damage given to the cut surface.

  A method of manufacturing a semiconductor device according to the present invention includes a step of forming a plurality of slits on a first electrode formation surface of a gallium oxide substrate by dry etching, and the first electrode formation surface surrounded by the plurality of slits. Forming the first electrode in a region, and polishing the lower surface of the gallium oxide substrate opposite to the first electrode formation surface until the slit is reached, thereby separating the gallium oxide substrate into individual pieces. And a step of performing.

  According to the present invention, after the slit is formed by dry etching, the gallium oxide substrate is separated into pieces by polishing from the back side, so that the side surface of the substrate is not mechanically damaged. For this reason, unlike the case of dividing into pieces using a dicing blade or the like, it is possible to prevent cracking, chipping, cleavage and the like occurring on the side surface of the gallium oxide substrate.

  The method for manufacturing a semiconductor device according to the present invention preferably further includes a step of forming an insulating film on the inner wall of the slit before the gallium oxide substrate is separated. According to this, since the side surface of the separated semiconductor device is covered with the insulating film, the leakage current along the side surface is reduced. Further, since the side surface is protected by the insulating film, the side surface is less likely to be cracked, chipped, cleaved, or the like.

  In this case, in the step of forming the slit, it is preferable to form a forward tapered slit whose width is narrowed in the depth direction. According to this, it becomes easy to form an insulating film on the inner wall of the slit.

  The step of forming the insulating film is performed before forming the first electrode. In the step of forming the insulating film, the insulating film is simultaneously formed on the first electrode forming surface and the inner wall of the slit. In the step of forming the first electrode, it is preferable that a part of the first electrode is formed on the insulating film formed on the first electrode formation surface. According to this, a so-called field plate structure can be obtained without increasing the number of manufacturing steps.

  In this case, the method further includes the step of forming the second electrode on the second electrode formation surface located on the opposite side of the first electrode formation surface of the gallium oxide substrate after the gallium oxide substrate is separated into pieces. It is preferable. This makes it possible to obtain a vertical device structure in which current flows in the thickness direction of the substrate.

  In this case, it is preferable that the method further includes a step of forming the gallium oxide substrate by forming an epitaxial layer on the gallium oxide wafer. According to this, a Schottky barrier diode using a gallium oxide substrate can be configured.

  The semiconductor device manufacturing method according to the present invention preferably further comprises a step of embedding a protective member in the slit before forming the second electrode. According to this, when forming the second electrode, the electrode material constituting the second electrode does not wrap around the first electrode through the slit.

  In this case, before separating the gallium oxide substrate into individual pieces, the method further comprises a step of attaching a flexible support member to the first electrode formation surface side of the gallium oxide substrate, It preferably consists of a part of the support member. According to this, it becomes possible to prevent the electrode material from wrapping around by a simple method without increasing the number of steps.

  In the present invention, the step of forming the second electrode is preferably performed by a thin film method with the slit covered with a mask. According to this, it becomes difficult for the electrode material which comprises a 2nd electrode to penetrate | invade in a slit.

In the present invention, the gallium oxide substrate may be made of β-Ga ₂ O ₃ and the first electrode formation surface may be a (001) surface. In this case, cleavage from the side surface tends to occur in the horizontal direction. However, in the present invention, since the damage to the side surface is greatly reduced, it is possible to prevent such cleavage in the horizontal direction.

  As described above, according to the present invention, since the damage given to the cut surface is greatly reduced, it is possible to prevent cleavage generated in the gallium oxide substrate.

FIG. 1 is a cross-sectional view showing a configuration of a semiconductor device 10 according to an embodiment of the present invention. FIG. 2 is a top view of the semiconductor device 10. FIG. 3 is a flowchart showing a manufacturing process of the semiconductor device 10. FIG. 4 is a cross-sectional view of the semiconductor device 10 during manufacture. FIG. 5 is a cross-sectional view in the course of manufacturing the semiconductor device 10. FIG. 6A is a plan view in the middle of manufacturing the semiconductor device 10, and FIG. 6B is a cross-sectional view taken along the line BB. FIG. 7 is a cross-sectional view in the middle of manufacturing the semiconductor device 10. FIG. 8 is a cross-sectional view in the middle of manufacturing the semiconductor device 10. FIG. 9 is a cross-sectional view in the middle of manufacturing the semiconductor device 10. FIG. 10 is a cross-sectional view of the semiconductor device 10 during manufacture. FIG. 11 is a cross-sectional view of the semiconductor device 10 during manufacture. FIG. 12 is a cross-sectional view in the middle of manufacturing the semiconductor device 10. FIG. 13 is a cross-sectional view of the semiconductor device 10 during manufacture. FIG. 14 is a cross-sectional view for explaining a manufacturing method according to a modification of the semiconductor device 10. FIG. 15 is a cross-sectional view for explaining a manufacturing method according to a modification of the semiconductor device 10. FIG. 16 is a cross-sectional view showing the semiconductor device 10 having a tapered cross section.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

  FIG. 1 is a cross-sectional view showing a configuration of a semiconductor device 10 according to an embodiment of the present invention. FIG. 2 is a top view of the semiconductor device 10. The cross section shown in FIG. 1 corresponds to the cross section along the line AA in FIG.

The semiconductor device 10 according to the present embodiment is a Schottky barrier diode, and as shown in FIG. 1, each includes a semiconductor layer 20 including a gallium oxide substrate 21 made of gallium oxide (β-Ga ₂ O ₃ ) and an epitaxial layer 22. Prepare. In the present invention, the semiconductor layer 20 may be collectively referred to as a “gallium oxide substrate”. Silicon (Si) or tin (Sn) is introduced into the gallium oxide substrate 21 and the epitaxial layer 22 as an n-type dopant. The dopant concentration is higher in the gallium oxide substrate 21 than in the epitaxial layer 22, whereby the gallium oxide substrate 21 functions as an n ⁺ layer and the epitaxial layer 22 functions as an n ⁻ layer.

The semiconductor layer 20 includes a first electrode formation surface 20a constituting an XY plane, a second electrode formation surface 20b constituting an XY plane located on the opposite side of the first electrode formation surface 20a, and an XZ plane or a YZ plane. It has four side surfaces 20c constituting the surface. The first and second electrode formation surfaces 20a and 20b are (001) surfaces of β-Ga ₂ O ₃ . The first electrode formation surface 20 a is constituted by the upper surface of the epitaxial layer 22, and the second electrode formation surface 20 b is constituted by the lower surface of the gallium oxide substrate 21. The boundary between the first electrode formation surface 20a and the side surface 20c constitutes the first edge E1, and the boundary between the second electrode formation surface 20b and the side surface 20c constitutes the second edge E2.

As shown in FIGS. 1 and 2, an insulating film 30 made of SiO ₂ , Si ₃ N ₄ , Al ₂ O ₃ , HfO ₂ or the like is formed on the first electrode formation surface 20a and the side surface 20c. The insulating film 30 includes a first portion 31 that covers the first electrode formation surface 20a and a second portion 32 that covers the side surface 20c, and extends from the first electrode formation surface 20a so as to cover the first edge E1. It is formed continuously over the side surface 20c. The insulating film 30 is made of, for example, silicon oxide (SiO ₂ ) and has a thickness of about 300 nm.

  The first portion 31 of the insulating film 30 has an opening 30a that exposes the first electrode formation surface 20a. An anode electrode 40 as a first electrode is formed on the first electrode formation surface 20a through the opening 30a. As a result, the anode electrode 40 is in Schottky contact with the epitaxial layer 22. The anode electrode 40 is made of, for example, a laminated film of platinum (Pt), titanium (Ti), and aluminum (Al). The film thickness is, for example, about 50 nm for the platinum layer, about 5 nm for the titanium layer, and about 1 μm for the aluminum layer. It is.

  Most of the anode electrode 40 is in Schottky contact with the epitaxial layer 22, but the other part covers the first portion 31 of the insulating film 30. Thereby, a so-called field plate structure is obtained. In general, in a shot barrier diode, an electric field concentrates on the end portion of an anode electrode. Therefore, if this portion exceeds the breakdown electric field strength, the element is destroyed. However, if the end portion of the anode electrode 40 is formed on the insulating film 30 as in this embodiment, the current concentration at the end portion is alleviated, so that the reverse breakdown voltage can be increased.

  On the other hand, a cathode electrode 50 as a second electrode is provided on the second electrode formation surface 20 b of the semiconductor layer 20. The cathode electrode 50 is made of a laminated film of titanium (Ti), nickel (Ni), and gold (Au), and is in ohmic contact with the gallium oxide substrate 21. For example, the thickness of the titanium layer is about 50 nm, the thickness of the nickel layer is about 0.2 μm, and the thickness of the gold layer is about 0.2 μm.

  With the above configuration, the semiconductor device 10 according to the present embodiment forms a Schottky barrier diode. The Schottky barrier diode is used as a switching element. By applying a forward bias between the anode electrode 40 and the cathode electrode 50, the Schottky barrier at the interface between the anode electrode 40 and the epitaxial layer 22 is lowered, and the anode electrode A current flows from 40 to the cathode electrode 50. On the other hand, when a reverse bias is applied between the anode electrode 40 and the cathode electrode 50, the Schottky barrier at the interface between the anode electrode 40 and the epitaxial layer 22 becomes high, and almost no current flows.

  In the semiconductor device 10 according to the present embodiment, since the side surface 20c of the semiconductor layer 20 is covered with the insulating film, the leakage current along the side surface 20c is reduced, and the side surface 20c is cracked, chipped, cleaved, and the like. Is less likely to occur. Moreover, since the insulating film 30 is continuously formed from the first electrode forming surface 20a to the side surface 20c so as to cover the first edge E1, the insulating film and the side surface covering the first electrode forming surface 20a The above effect is further enhanced as compared with the case where the insulating films covering 20c are formed separately. In addition, cracking or chipping of the gallium oxide substrate at the first edge E1 is prevented.

  Next, the method for manufacturing the semiconductor device 10 according to the present embodiment will be explained.

  FIG. 3 is a flowchart showing the manufacturing process of the semiconductor device 10 according to the present embodiment.

First, as shown in FIG. 4, a gallium oxide wafer W formed by slicing a bulk crystal grown using a melt growth method or the like is prepared, and an epitaxial layer 22 is formed on the surface thereof. The epitaxial layer 22 can be formed by epitaxially growing gallium oxide on the surface of the gallium oxide wafer W using reactive sputtering, PLD method, MBE method, MOCVD method, HVPE method or the like. The carrier concentration and film thickness of the epitaxial layer 22 are adjusted to ensure a breakdown voltage according to the design. As an example, in order to obtain a reverse breakdown voltage of about 600 V, the thickness may be 7 to 8 μm and the carrier concentration may be about 1 × 10 ¹⁶ cm ⁻³ . The carrier concentration is controlled by introducing a desired amount of a dopant that functions as an n-type carrier such as Si or Sn during film formation. Thereby, a gallium oxide substrate having the epitaxial layer 22 formed on the surface of the gallium oxide wafer W is completed (step S1).

  Next, as shown in FIG. 5, dry etching is performed in a state where the element formation region where the element is formed is covered with the etching mask M <b> 1 in the first electrode formation surface 20 a which is the surface of the epitaxial layer 22. Thus, a plurality of slits 60 are formed in the gallium oxide substrate (step S2). The slit 60 is set to a depth that penetrates the epitaxial layer 22 and reaches the gallium oxide wafer W. Specifically, the depth of the slit 60 is set slightly deeper than the final thickness of the semiconductor layer 20. For example, if the final thickness of the semiconductor layer 20 is 50 μm, the depth of the slit 60 may be set to about 55 μm.

The slit 60 can be formed by an RIE method using a chlorine-based gas such as BCl ₃ . In particular, in order to shorten the etching time, it is preferable to use an ICP-RIE method capable of high-speed etching. As the etching mask M1, for example, it is preferable to use a metal film such as nickel (Ni) that is not etched with a chlorine-based gas in order to have selectivity with respect to Ga ₂ O ₃ . In this case, the metal film as the etching mask M1 may be formed to about 100 nm by using an EB vapor deposition method, a sputtering method, or the like. After forming the etching mask M1 on the entire surface of the epitaxial layer 22, patterning is performed by a photolithography method. do it. A plurality of slits 60 are formed in the gallium oxide substrate by performing dry etching using the patterned etching mask M1 as a mask.

  As shown in FIG. 6A, which is a plan view, a plurality of slits 60 are formed in the X direction and the Y direction, and a rectangular region surrounded by the slits 60 in plan view is a portion that finally becomes an element. FIG. 6B is a schematic cross-sectional view along the line BB shown in FIG. As an example, when the element size is 1 mm × 1 mm, slits 60 having a width of 20 μm may be formed in the X direction and the Y direction at a pitch of 1.02 mm. After the slit 60 is formed, the etching mask M1 is removed using a general acid-based etching solution, and the substrate is cleaned.

  The slit 60 formed in this way hardly causes damage to the inner wall 61, unlike the case of machining using a dicing blade or the like. Further, the flatness of the inner wall 61 is very high. Specifically, the unevenness is 1 μm or less, and the surface property is almost uniform.

Next, as shown in FIG. 7, the insulating film 30 made of SiO ₂ , Si ₃ N ₄ , Al ₂ O ₃ , HfO ₂ or the like is formed on the surface of the epitaxial layer 22 and the inner wall 61 of the slit 60 (step S3). ). As a method for forming the insulating film 30, it is preferable to use a film forming method having excellent coverage, such as an ALD method or a CVD method, so that not only the surface of the epitaxial layer 22 but also almost the entire inner wall 61 of the slit 60 is formed on the insulating film. 30. Further, the first edge E <b> 1 portion that is the opening of the slit 60 is also covered with the insulating film 30. The insulating film 30 may be stacked by combining a plurality of deposition methods.

  Next, after forming an opening 30a in the insulating film 30 as shown in FIG. 8, the anode electrode 40 is formed as shown in FIG. 9 (step S4). The opening 30a may be formed by patterning a resist by a normal photolithography method and then dry etching or wet etching the insulating film 30 using the resist as a mask. However, since a plurality of slits 60 are formed in the gallium oxide substrate at this time, it is preferable to use a film type solid resist as the resist rather than a coating type liquid resist.

  The anode electrode 40 can be formed by an evaporation method, and can be patterned using a lift-off process. That is, first, after forming a resist pattern whose planar size is about 5 μm larger than the opening 30 a of the insulating film 30, platinum (Pt) is formed by 50 nm, titanium (Ti) is formed by 5 nm, and aluminum (Al) is formed by about 1 μm by vapor deposition. To do. If the resist pattern is removed, the metal layer on the resist pattern can be removed together with the resist pattern. Here, in order to suppress adhesion of the metal film into the slit 60, it is preferable to use a film-type solid resist. Alternatively, instead of patterning the anode electrode 40 formed on the entire surface, the anode electrode 40 may be selectively formed by vapor deposition through a lattice-shaped metal mask or the like. However, in this embodiment, since the inner wall 61 of the slit 60 is covered with the insulating film 30, even if a small amount of metal material enters the slit 60, it does not contact the gallium oxide substrate.

  Next, as shown in FIG. 10, a flexible support member 70 is attached to the surface of the gallium oxide substrate (step S5). As the support member 70 having flexibility, it is preferable to use a highly flexible member such as a thick resin film. After affixing such a highly flexible support member 70 to the surface of the gallium oxide substrate, if a certain amount of pressure is applied, the support member 70 is deformed, and the protective member 80 partially embedded in the slit 60 and Become. The anode electrode 40 is spatially shielded from the slit 60 by the protective member 80.

  Next, as shown in FIG. 11, with the gallium oxide substrate supported by the support member 70, the back side, that is, the lower surface of the gallium oxide wafer W is ground and polished (step S6). Grinding and polishing can be performed in the same manner as ordinary silicon substrate grinding and polishing. The grinding and polishing of the gallium oxide wafer W is performed until the slit 60 is reached, whereby the gallium oxide substrate including the gallium oxide substrate 21 and the epitaxial layer 22 is separated into a plurality of pieces. After grinding and polishing, the polished surface is cleaned by cleaning. In addition, you may divide into pieces only by grinding | polishing, without performing grinding.

  Next, as shown in FIG. 12, the cathode electrode 50 is formed on the lower surface of the gallium oxide substrate 21 (step S7). The cathode electrode 50 is preferably formed using a thin film method with low coverage, such as a vapor deposition method or a sputtering method. According to this, while the cathode electrode 50 is correctly formed on the lower surface of the gallium oxide substrate 21, the electrode material hardly wraps around the inner wall 61 of the slit 60, so that almost no electrode is formed on the inner wall 61. Part of the electrode material of the cathode electrode 50 penetrates into the slit 60, but as shown in FIG. 12, the upper portion of the slit 60 is embedded with a protective member 80 made of a part of the support member 70. The electrode material of the cathode electrode 50 does not reach the anode electrode 40. In order to prevent intrusion of the electrode material into the slit 60, the cathode electrode 50 is selectively applied to the lower surface of the gallium oxide substrate 21 by performing vapor deposition or the like while covering the slit 60 with a lattice-like metal mask or the like. It is preferable to form a film.

  And as shown in FIG. 13, if the support member 70 is peeled, the production of the plurality of semiconductor devices 10 is completed (step S8). The separated semiconductor device 10 is mounted on a package as necessary. The package has a base plate made of copper (Cu) or the like, and the base plate and the cathode electrode 50 of the semiconductor device 10 are connected via solder. The anode electrode 40 of the semiconductor device 10 is connected to the lead frame of the package via a bonding wire.

As described above, according to the method of manufacturing the semiconductor device 10 according to the present embodiment, after forming the plurality of slits 60 on the upper surface side of the gallium oxide substrate by dry etching, the lower surface side of the gallium oxide substrate is ground and polished. Since it is separated into pieces, the side surface 20c of the semiconductor layer 20 is not mechanically damaged. For this reason, unlike the case of dividing into pieces using a dicing blade or the like, the side surface 20c is not cracked, chipped or cleaved. In particular, since β-Ga ₂ O ₃ has a (100) plane and a (001) plane that are cleaved, electrode formation surfaces 20a and 20b are β-Ga ₂ O ₃ (001) planes. When separated into pieces by using a dicing blade or the like, a large number of cleavages may occur on the side surface 20c in the horizontal direction. When such cleavage occurs, not only device characteristics may be changed, but also gallium oxide powder produced by cleavage may be scattered. However, according to the method for manufacturing the semiconductor device 10 according to the present embodiment, since the side surface 20c is a surface formed by dry etching, such a cleavage hardly occurs. Even if slight cleaving or the like occurs, the gallium oxide powder is not scattered because the side surface 20c is covered with the insulating film 30. In addition, since gallium oxide has low thermal conductivity, heat generated by a forward current is not efficiently radiated to the outside of the device, and the device is liable to deteriorate. However, in this embodiment, since the semiconductor layer 20 is thinned by polishing the back surface of the gallium oxide wafer W, it is also possible to improve heat dissipation.

  In addition, when the insulating film 30 for obtaining the field plate structure is formed, since the insulating film 30 is also formed on the inner wall 61 of the slit 60 at the same time, the first electrode forming surface 20a and The insulating film 30 can be formed on both the inner walls 61 of the slit 60. Thus, since the insulating film 30 (first portion 31) formed on the first electrode formation surface 20a and the insulating film 30 (second portion 32) formed on the side surface 20c are formed simultaneously, There are no joints between the two. For this reason, the leakage current along the side surface 20c can be effectively suppressed.

  In the manufacturing method described above, the protective member 80, which is a part of the support member 70, is embedded in the upper portion of the slit 60 by using the flexible support member 70. When the support member 70 with low flexibility is used, as shown in FIG. 14, after the slit 60 is formed, the protective member 80 different from the support member 70 is slit before the gallium oxide substrate is separated. 60 may be embedded. Further, the protective member 80 may be embedded after the gallium oxide substrate is separated and before the cathode electrode 50 is formed. In any case, if the protective member 80 is embedded in the slit 60 when the cathode electrode 50 is formed, the electrode material reaches the anode electrode 40 even if the electrode material of the cathode electrode 50 enters the slit 60. There is nothing.

  Further, in the step of forming the slit 60 (step S2), the forward tapered slit 60 may be formed as shown in FIG. 15 by adjusting the dry etching conditions. A forward taper refers to a shape in which the slit width gradually narrows in the depth direction. According to this, in the process of forming the insulating film 30 (step S3), there is an advantage that the insulating film 30 is easily formed on the inner wall 61 of the slit 60. When such a forward tapered slit 60 is formed, the shape of the finally obtained semiconductor device 10 is such that the XY cross section of the semiconductor layer 20 is second from the first electrode forming surface 20a as shown in FIG. The taper shape expands toward the electrode forming surface 20b. Such a shape contributes to mounting stability on the package.

  The preferred embodiments of the present invention have been described above, but the present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the spirit of the present invention. Needless to say, it is included in the range.

  For example, in the above embodiment, the case where the present invention is applied to a Schottky barrier diode has been described as an example. However, the present invention is not limited thereto, and any other semiconductor device using a gallium oxide substrate may be used. It is also possible to apply to this kind of semiconductor device.

  Moreover, in the said embodiment, after forming the slit 60, although the insulating film 30 is formed in the inner wall 61 of the slit 60, this point is not essential in this invention.

DESCRIPTION OF SYMBOLS 10 Semiconductor device 20 Semiconductor layer 20a 1st electrode formation surface 20b 2nd electrode formation surface 20c Side surface 21 Gallium oxide substrate 22 Epitaxial layer 30 Insulating film 30a Opening part 31 1st part 32 2nd part 40 Anode electrode 50 Cathode Electrode 60 Slit 61 Inner wall 70 Support member 80 Protective member E1 First edge E2 Second edge M1 Etching mask W Gallium oxide wafer

Claims (10)

Forming a plurality of slits in the first electrode formation surface of the gallium oxide substrate by dry etching;
Forming a first electrode in a region surrounded by the plurality of slits in the first electrode formation surface;
Polishing the lower surface of the gallium oxide substrate opposite to the first electrode formation surface until the slit is reached, thereby dividing the gallium oxide substrate into pieces. Device manufacturing method.   2. The method of manufacturing a semiconductor device according to claim 1, further comprising a step of forming an insulating film on an inner wall of the slit before dividing the gallium oxide substrate into pieces.   The method of manufacturing a semiconductor device according to claim 2, wherein in the step of forming the slit, a forward tapered slit whose width is narrowed in the depth direction is formed. The step of forming the insulating film is performed before forming the first electrode,
In the step of forming the insulating film, the insulating film is simultaneously formed on the first electrode formation surface and the inner wall of the slit,
4. The method according to claim 2, wherein in the step of forming the first electrode, a part of the first electrode is formed on the insulating film formed on the first electrode formation surface. The manufacturing method of the semiconductor device of description.   The method further comprises the step of forming a second electrode on a second electrode formation surface located on the opposite side of the first electrode formation surface of the gallium oxide substrate after separating the gallium oxide substrate into pieces. A method for manufacturing a semiconductor device according to claim 4.   6. The method of manufacturing a semiconductor device according to claim 5, further comprising a step of forming the gallium oxide substrate by forming an epitaxial layer on the gallium oxide wafer.   The method for manufacturing a semiconductor device according to claim 5, further comprising a step of embedding a protective member in the slit before forming the second electrode. Before separating the gallium oxide substrate into individual pieces, further comprising a step of attaching a flexible support member to the first electrode forming surface side of the gallium oxide substrate;
The method for manufacturing a semiconductor device according to claim 7, wherein the protection member is formed of a part of the support member.   9. The method of manufacturing a semiconductor device according to claim 5, wherein the step of forming the second electrode is performed by a thin film method with the slit covered with a mask. The semiconductor device according to claim 1, wherein the gallium oxide substrate is made of β-Ga ₂ O ₃ , and the first electrode formation surface is a (001) surface. Method.

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