JP2018153035A - Vibration wave motor, imaging apparatus, drive stage - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a vibration wave motor of high response.SOLUTION: A vibration wave motor 1 includes a first transducer 11 and a second transducer 12 movable relatively, and a slide member 13 movable relatively to the first and second transducers 11, 12, respectively, and with which the first and second transducers 11, 12 come into contact. The first transducer 11, the second transducer 12 and the slide member 13 are in contact in series, and when the first and second transducers 11, 12 vibrate, the first transducer 11, the second transducer 12 and the slide member 13 move relatively.SELECTED DRAWING: Figure 3

Description

  The present invention relates to a vibration wave motor, an imaging device, and a drive stage.

  2. Description of the Related Art Conventionally, in an imaging apparatus that captures a still image or a moving image, technology has been developed so that a subject that moves at high speed in one direction can be followed and focused. Patent Document 1 discloses a focus mechanism with improved mobility so that it can follow a subject moving at high speed. However, the movement of the subject and the movement of the image pickup apparatus at the time of shooting vary. For this reason, in order to cope with a case where the moving direction of the subject or the imaging apparatus changes frequently, further improvement in responsiveness is required. Further, in an industrial drive stage or the like, high drive speed and high responsiveness are required.

JP-A-5-066336

  In view of the above circumstances, the problem to be solved by the present invention is to provide a vibration wave motor, an imaging device, and a drive stage that are excellent in responsiveness.

  In order to solve the above-described problems, the present invention provides a plurality of vibrators that can move relatively, and one vibrator that can move relative to each of the plurality of vibrators, and the plurality of vibrators contact each other. Or a plurality of sliding members, wherein the plurality of vibrators and the sliding member are in series contact, and the vibrators that vibrate when the plurality of vibrators vibrate and the sliding members, Is relatively moved.

  According to the present invention, it is possible to provide a vibration wave motor, an imaging device, and a drive stage that are excellent in responsiveness.

It is a figure which shows typically the structural example of the vibrator | oscillator and sliding member of a vibration wave motor. It is a figure which shows typically the structural example of a vibration wave motor. It is a figure which shows typically the structural example of a vibration wave motor. It is a figure which shows typically the structural example of a vibration wave motor. It is a figure which shows typically the structural example of the lens unit of an imaging device. It is a block diagram which shows the structural example of an imaging device. It is a flowchart which shows the example of a process of an imaging device. It is a figure which shows typically the structural example of a drive stage.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the following embodiments, the three-dimensional directions of the vibration wave motor are indicated by the X direction, the Y direction, and the Z direction. The X direction is the direction of the driving force output by the vibration wave motor (driving direction, moving direction). The Z direction is a direction perpendicular to the X direction, and is a stacking direction of a first vibrator, a sliding member, and a second vibrator, which will be described later. The Y direction is a direction perpendicular to the X direction and the Y direction.

(Vibration wave motor)
(First embodiment)
First, a configuration example of the vibration wave motor 1 that is the drive device according to the first embodiment will be described with reference to FIGS. 1 and 2. FIG. 1 is a diagram schematically illustrating a configuration example of a first vibrator 11, a sliding member 13, and a second vibrator 12 provided in the vibration wave motor 1 according to the first embodiment. (A) is a perspective view, (b) is a side view as viewed in the Y direction. FIG. 2 is a diagram schematically illustrating a configuration example of the vibration wave motor 1 according to the first embodiment, in which (a) is a cross-sectional view as viewed in the Y direction, and is a view taken along the line AB of (b). (B) is sectional drawing of a X direction view, Comprising: It is a CD arrow view of (a).

  The vibration wave motor 1 includes a first vibrator 11, a sliding member 13, and a second vibrator 12. As shown in FIG. 1, the first vibrator 11, the sliding member 13, and the second vibrator 12 are provided so as to overlap in the Z direction. A sliding member 13 is provided between 11 and the second vibrator 12.

  The first vibrator 11 and the second vibrator 12 have the same configuration and are provided in opposite directions. The first vibrator 11 and the second vibrator 12 have a piezoelectric element 101 and a diaphragm 102, respectively. The piezoelectric element 101 and the diaphragm 102 are bonded with an adhesive. The piezoelectric element 101 vibrates ultrasonically when a high frequency driving voltage is applied during driving. The configuration of the piezoelectric element 101 is not particularly limited, and various known piezoelectric elements can be applied. The diaphragm 102 is provided with two protrusions 103 that protrude toward the sliding member 13 side by side in the X direction. The tip portions of the two protrusions 103 are in contact with the surface of the sliding member 13 by a biasing force F in the Z direction of first biasing means 14 and second biasing means 15 described later. doing.

  When the vibration wave motor 1 is driven, a two-phase high-frequency driving voltage is applied to the piezoelectric element 101 in each of the first vibrator 11 and the second vibrator 12. As a result, ultrasonic vibrations are excited to generate two-phase synthesized ultrasonic vibrations, and the tips of the two protrusions 103 of the diaphragm 102 move elliptically. And between the front-end | tip part of the two projection parts 103 of the diaphragm 102 of the 1st vibrator | oscillator 11, and the sliding member 13, the 1st vibrator | oscillator 11 and the sliding member 13 are relatively made to a X direction. A frictional force to move is generated. Similarly, the second vibrator 12 and the sliding member 13 are relatively moved in the X direction between the tip of the two protrusions 103 of the diaphragm 102 of the second vibrator 12 and the sliding member 13. A frictional force that moves the These frictional forces become driving forces. By appropriately changing the frequency and phase of the two-phase high-frequency driving voltage applied to the piezoelectric element 101, the rotation direction of the tip portions of the two protrusions 103 and the ratio of the major axis to the minor axis of the elliptical motion can be appropriately changed. Can generate exercise.

  Thus, the vibration wave motor 1 according to the first embodiment is provided between two vibrators (the first vibrator 11 and the second vibrator 12) and these two vibrators. And one sliding member 13. Each of the two vibrators generates a driving force (frictional force) with the one sliding member 13. That is, each of the two vibrators (the first vibrator 11 and the second vibrator 12) does not generate a driving force (friction force) with a separate sliding member, but a common 1 A driving force (frictional force) is generated between the two sliding members 13. In the first embodiment, the first vibrator 11 and the second vibrator 12 are provided in a symmetric direction with the sliding member 13 interposed therebetween in the X direction view and the Y direction view. With such a configuration, the first vibrator 11 generates a driving force (friction force) between one surface of the sliding member 13 in the Z direction. Further, the second vibrator 12 has the other surface in the Z direction of the sliding member 13 (the surface on the side opposite to the side on which the projection 103 of the diaphragm 102 of the first vibrator 11 is in contact). A driving force (frictional force) is generated between the two. That is, the first vibrator 11 and the second vibrator 12 generate a driving force (friction force) between the surfaces of the sliding member 13 opposite to each other.

  As shown in FIG. 2, the vibration wave motor 1 further includes a unit base 16 and a lid portion 17.

  The unit base 16 is a member that supports each member of the vibration wave motor 1. The unit base 16 includes, for example, a bottom portion 161 and two side portions 162 provided along both edges of the bottom portion 161 in the Y direction, and one side of the Z direction (the bottom portion 161 is provided). The cross section that is open on the side opposite to the side to be formed is a U-shaped structure. The lid portion 17 has, for example, a flat configuration. The lid portion 17 is provided with a through-hole-shaped opening portion 171 that penetrates in the Z direction. The lid portion 17 is provided on one side in the Z direction of the unit base 16 so as to face the bottom portion 161 with a predetermined distance.

  As shown in FIG. 2, the region surrounded by the bottom portion 161, the two side portions 162, and the lid portion 17 of the unit base 16 includes the first vibrator 11 in order from the side close to the bottom portion 161. The sliding member 13 and the second vibrator 12 are provided so as to overlap in the Z direction. That is, the first vibrator 11 is provided on the side close to the bottom portion 161 when viewed from the sliding member 13, and the second vibrator 12 is provided on the side close to the lid portion 17.

  The first vibrator 11 is provided at the bottom 161 of the unit base 16 so that it cannot be displaced in the X and Y directions with respect to the unit base 16 but can be displaced (reciprocated) in the Z direction. For example, the fixing member 18 is provided on the inner peripheral surface side of the bottom portion 161 of the unit base 16, and the first vibrator holding member 19 is provided on the side of the fixing member 18 that faces the lid portion 17. . The first vibrator 11 is attached to the lid 17 side of the first vibrator holding member 19. The fixing member 18 is fixed to, for example, the bottom portion 161 of the unit base 16 so that it cannot be displaced with respect to the unit base 16. The first vibrator holding member 19 is provided so that it cannot be displaced in the X and Y directions with respect to the fixed member 18 but can be displaced (reciprocated) in the Z direction. For this reason, the first vibrator 11 cannot be displaced in the X direction and the Y direction with respect to the unit base 16 but can be displaced in the Z direction. Note that the first vibrator holding member 19 may be configured to hold the first vibrator 11 and the specific configuration is not particularly limited.

  A first urging means 14 is provided inside the fixing member 18. The first biasing means 14 biases the first vibrator 11 together with the first vibrator holding member 19 toward the sliding member 13 with a predetermined biasing force F. Then, by the urging force F in the Z direction, the tip ends of the two protrusions 103 of the diaphragm 102 of the first vibrator 11 are urged to the surface on the side facing the bottom 161 of the sliding member 13. It will be in contact. The first urging means 14 includes, for example, an urging spring and a spring shaft that moves according to deformation of the urging spring. Then, the biasing spring of the first biasing means 14 presses the first vibrator holding member 19 via the spring shaft. Thereby, the first vibrator 11 is biased toward the sliding member 13. The first biasing means 14 may be any configuration that can bias the first vibrator 11 toward the sliding member 13 in the Z direction, and the specific configuration is not particularly limited. The first urging means 14 may not be provided inside the fixing member 18 but may be provided outside the fixing member 18.

  The sliding member 13 is provided so as to reciprocate in the X direction inside the unit base 16. For example, the following configuration is applied. Guide grooves 131 extending in the X direction are provided on both end surfaces of the sliding member 13 in the Y direction (surfaces facing the side portions 162). Similarly, a guide groove 163 extending in the X direction is provided on each of the two side portions 162 of the unit base 16. A rollable rolling member 22 such as a spherical body is fitted in the guide groove 131 of the sliding member 13 and the guide groove 163 of the side portion 162. In FIG. 2, a configuration in which two rolling members 22 are provided is shown as an example, but the number of rolling members 22 is not limited. According to such a configuration, the rolling member 22 rolls in a state of being fitted in the guide groove 131 of the sliding member 13 and the guide groove 163 of the side portion 162. Thereby, the sliding member 13 can linearly reciprocate in the X direction (the extending direction of the guide groove 131 of the sliding member 13 and the guide groove 163 of the side portion 162). The support structure of the sliding member 13 is not limited to such a configuration. The sliding member 13 only needs to be configured to be linearly reciprocable in the X direction inside the unit base 16.

  The second vibrator 12 is provided between the sliding member 13 and the lid part 17 so as to be linearly reciprocable in the X direction and displaceable (reciprocally movable) in the Z direction. For example, the following configuration can be applied.

  A movable member 21 is provided inside the unit base 16, and a second vibrator holding member 20 is provided on the side of the movable member 21 that faces the bottom 161. The second vibrator 12 is provided on the bottom 161 side of the second vibrator holding member 20. The movable member 21 can reciprocate in the X direction inside the unit base 16. For example, a guide groove 172 extending in the X direction is provided on the inner peripheral surface of the lid portion 17, and a guide groove 211 extending in the X direction is also provided on the surface of the movable member 21 facing the lid portion 17. It has been. A predetermined number of rolling members 22 such as spherical bodies are provided so as to fit into the guide grooves 172 of the lid portion 17 and the guide grooves 211 of the movable member 21. Then, the rolling member 22 rolls in a state of being fitted in the guide groove 172 of the lid portion 17 and the guide groove 211 of the movable member 21. Thereby, the movable member 21 can be linearly reciprocated in the X direction (the extending direction of the guide grooves 172 and 211). For this reason, the second vibrator 12 can linearly reciprocate in the X direction inside the unit base 16 together with the movable member 21 and the second vibrator holding member 20.

  The second vibrator holding member 20 is provided on the movable member 21 so as to be displaceable (reciprocally movable) in the Z direction. Therefore, the second vibrator 12 can be linearly reciprocated in the X direction together with the movable member 21 and the second vibrator holding member 20, and can be displaced in the Z direction with respect to the movable member 21 and the unit base 16 ( Reciprocal movement). The second vibrator holding member 20 only needs to be configured to hold the second vibrator 12, and the specific configuration is not limited.

  A second urging means 15 is provided inside the movable member 21. The second urging means 15 urges the second vibrator 12 together with the second vibrator holding member 20 toward the sliding member 13 with the urging force F in the Z direction. As a result, the tip portions of the two protrusions 103 of the diaphragm 102 of the second vibrator 12 are positioned on the surfaces of the sliding member 13 facing the lid 17 (two diaphragms of the diaphragm 102 of the first vibrator 11). The surface of the protruding portion 103 is urged and brought into contact with the surface opposite to the surface with which the tip portion is in contact. The configuration of the second urging means 15 may be the same as that of the first urging means 14. The second urging means 15 may be configured to urge the second vibrator 12 toward the sliding member 13, and the specific configuration is not limited.

  Thus, the urging forces of the first urging means 14 and the second urging means 15 are opposite to each other. The first urging means 14 and the second urging means 15 urge the first vibrator 11 and the second vibrator 12 in a direction in which they approach each other with the sliding member 13 interposed therebetween. To do. For this reason, the sliding member 13 is sandwiched between the first vibrator 11 and the second vibrator 12 by the first biasing means 14 and the second biasing means 15 with the biasing force F (nipping). ) State.

  The vibration wave motor 1 can drive the driven object connected to the movable member 21 in the X direction. As described above, since the opening portion 171 is provided in the lid portion 17, the movable member 21 can be connected to the driven object through the opening portion 171. When the second vibrator 12 is vibrated, a driving force in the X direction is generated between the second vibrator 12 and the sliding member 13, so that the movable member 21 moves in the X direction, and the movable member 21 The driven object connected to 21 can be driven in the X direction. When both the first vibrator 11 and the second vibrator 12 are vibrated, the sliding member 13 moves in the X direction with respect to the unit base 16, and the movable member 21 moves relative to the sliding member 13. Move in the X direction. Therefore, the driven object can be driven by the combined speed of the moving speed of the sliding member 13 relative to the first vibrator 11 and the moving speed of the movable member 21 relative to the sliding member 13.

  Thus, in the vibration wave motor 1 according to the first embodiment, the first vibrator 11, the sliding member 13, and the second member that generate the driving force between the fixed member 18 and the movable member 21. The vibrators are provided in series and are in contact with each other. A force that moves the movable member 21 relative to the fixed member 18 is output as a driving force of the vibration wave motor 1. For this reason, the driven object can be driven by connecting the movable member 21 to the driven object via various connecting members. Since the first vibrator 11, the sliding member 13, and the second vibrator 12 are provided in series and in contact with each other, the relative speed of the movable member 21 with respect to the fixed member 18 is This is a combined speed of the relative speed of the first vibrator 11 and the sliding member 13 and the relative speed of the sliding member 13 and the second vibrator 12. In addition, the connection member should just be the structure which can connect the movable member 21 and a to-be-driven member, and a specific structure is not limited.

  According to such a configuration, the responsiveness of the vibration wave motor 1 can be improved. In particular, the drive characteristics (drive amount, drive direction, and drive speed) are individually given to the first vibrator 11 and the second vibrator 12, and the drive response is individually controlled. Can be increased. For example, when the driven object is driven in a predetermined direction in a certain period and the driven object is driven in the opposite direction in the next period after the certain period has elapsed, the following operation is performed. That is, in the certain period, the first vibrator 11 and the second vibrator 12 are driven in the predetermined direction. Then, before the end of the certain period, driving in the opposite direction is started for the other of the first vibrator 11 and the second vibrator 12 (one not driven). According to such a configuration, the driving direction of the vibration wave motor 1 can be quickly changed. Further, when the driving direction is frequently changed, the driving direction can be quickly switched by repeating the above operation. Thus, the responsiveness of the vibration wave motor 1 can be improved.

  Moreover, according to such a structure, the inertia of a movable part can be made small. For example, in the case where a set of vibrators and sliding members is multi-staged, if each of a plurality of vibrators is configured to generate a driving force with a separate sliding member, the same number of sliding members as the vibrators are provided. Must be provided. In such a configuration, since the same number of sliding members as the vibrator is provided, the mass of the member to be moved when generating the driving force (the mass of the movable portion) is increased. For this reason, an agile operation is hindered, and it becomes difficult to improve responsiveness. On the other hand, in the first embodiment, the two vibrators (the first vibrator 11 and the second vibrator 12) generate a driving force between the common sliding member 13. It is a configuration. With such a configuration, the number of sliding members can be reduced and the mass (inertia) of the movable portion can be reduced compared to a configuration in which one sliding member is provided for one vibrator. Therefore, the responsiveness of the vibration wave motor 1 can be improved. Moreover, since the number of sliding members can be reduced, the vibration wave motor 1 can be reduced in size.

  Further, with such a configuration, it is possible to achieve high speed driving and power saving. For example, by simultaneously driving the first vibrator 11 and the second vibrator 12 in the same direction, the driving speed can be increased as compared with the case of driving only one of them. Further, by driving only one of the first vibrator 11 and the second vibrator 12, power saving during driving can be achieved. Furthermore, it is possible to increase the speed and the accuracy of position control. For example, in a certain period, both the first vibrator 11 and the second vibrator 12 are driven at the same time to increase the driving speed. After a certain period of time, only one of them is driven to control the position. High accuracy can be achieved.

  In the above-described embodiment, the configuration in which the first vibrator 11 and the second vibrator 12 are provided so as to overlap in the Z direction has been described. However, the present invention is not limited to such a configuration. For example, the first vibrator 11 and the second vibrator 12 may be arranged side by side in the Y direction on the same side of the sliding member 13. That is, the first vibrator 11 and the second vibrator 12 may be configured to generate a driving force between the same side surfaces of the sliding member 13.

  For example, the first vibrator 11 is provided on the bottom 161 of the unit base 16 so as not to be displaced in the X direction, and the second vibrator 12 is provided so as to be displaceable in the X direction (linear reciprocation is possible). The sliding member 13 is provided so as to be displaceable in the X direction (linearly reciprocable) so as to cover the first vibrator 11 and the second vibrator 12. In this case, an opening (corresponding to the opening 171 of the lid 17) is provided in the bottom 161 of the unit base 16, and the second vibrator holding member that holds the second vibrator 12 through the opening. 20 and the driven object can be connected. Even if it is such a structure, there can exist an effect similar to the above-mentioned.

(Second Embodiment)
Next, a configuration example of the vibration wave motor 3 according to the second embodiment will be described. FIG. 3 is a diagram schematically illustrating a configuration example of the vibration wave motor 3 according to the second embodiment. 3A is an EF arrow view of (b), (b) is a GH arrow view of (a), and (c) is an IJ arrow view of (b). . In addition, the same code | symbol as 1st Embodiment is attached | subjected to the structure which is common in 1st Embodiment, and description is abbreviate | omitted.

  As shown in FIG. 3, the vibration wave motor 3 according to the second embodiment includes a first vibrator 11, a second vibrator 12, a third vibrator 33, and a fourth vibrator 34. And a first sliding member 35 and a second sliding member 36. Furthermore, the vibration wave motor 3 according to the second embodiment includes a fixed member 18, a first movable member 37, and a second movable member 38. In the unit base 16, the fixing member 18, the first vibrator 11, the first sliding member 35, the third vibrator 33, and the second movable member are sequentially arranged from the bottom 161 side. The member 38, the fourth vibrator 34, the second sliding member 36, the second vibrator 12, and the first movable member 37 are provided so as to overlap in the Z direction.

  Compared with the first embodiment, the vibration wave motor 3 according to the second embodiment includes a first sliding member 35 and a first sliding member 35 between the first vibrator 11 and the second vibrator 12. The third vibrator 33, the second movable member 38, the fourth vibrator 34, and the second sliding member 36 are different.

  The first to fourth vibrators 11, 12, 33, and 34 of the second embodiment can be configured in common with the first vibrator 11 and the second vibrator 12 of the first embodiment. That is, the first to fourth vibrators 11, 12, 33, and 34 may have the same configuration, and each includes the piezoelectric element 101 and the diaphragm 102 that are fixed to each other by an adhesive or the like. The diaphragm 102 is provided with two protrusions 103 that protrude in the Z direction and are arranged in the X direction. The operations of the first to fourth vibrators 11, 12, 33, and 34 are the same as those of the first vibrator 11 and the second vibrator 12 of the first embodiment.

  The first vibrator 11 cannot be displaced in the X and Y directions with respect to the unit base 16 between the first sliding member 35 and the bottom 161, but is displaceable in the Z direction (reciprocable) ). The first vibrator 11 is biased by the first biasing means 14 toward the first sliding member 35 in the Z direction. The second vibrator 12 is provided between the second sliding member 36 and the lid portion 17 so as to be capable of linear reciprocation in the X direction. Further, the second vibrator 12 is provided so as to be displaceable (reciprocating) in the Z direction. The second vibrator 12 is biased toward the second sliding member 36 in the Z direction by the second biasing means 15. Note that the configurations of the first vibrator 11 and the second vibrator 12 can be the same as those in the first embodiment. In addition, a configuration common to the first embodiment can be applied to a configuration for supporting and urging each of the first transducer 11 and the second transducer 12.

  The first sliding member 35, the second sliding member 36, and the second movable member 38 are all provided so as to be linearly reciprocable in the X direction and displaceable in the Z direction. For example, the following configuration is applied. The first sliding member 35, the second sliding member 36, and the second movable member 38 are extended in the X direction on both end surfaces in the Y direction (surfaces facing the side portion 162 of the unit base 16). Guide grooves 351, 361, and 381 are provided.

  In addition, three guide groove members 41 are provided on each of the inner peripheral surfaces of the two side portions 162 of the unit base 16 so as to be displaceable (reciprocally movable) in the Z direction. For example, a guide rail fixed shaft 39 extending in the Z direction is provided on each of the inner peripheral surfaces of the two side portions 162 of the unit base 16. FIG. 3 shows an example in which two fixed shafts 39 are provided. Each of the fixed shafts 39 is provided with three slide members 40 that are engaged with the fixed shaft 39 so as to be reciprocally movable in the extending direction. Three guide groove members 41 are attached to each of the three slide members 40 provided on the fixed shaft 39. For this reason, when the slide member 40 reciprocates on the fixed shaft 39, the three guide groove members 41 can reciprocate in the Z direction.

  Each of the three guide groove members 41 is a rod-shaped member. Then, guide grooves 411 extending in the X direction are formed on the surfaces of the first sliding member 35, the second sliding member 36, and the second movable member 38 on the opposite sides of the both end surfaces in the Y direction. Is provided. The guide grooves 351, 361, 381 of the first sliding member 35, the second sliding member 36, and the second movable member 38, and the guide grooves 411 of the three guide groove members 41, respectively. Is provided with a rolling member 22 such as a spherical body fitted therein.

  With such a configuration, the first sliding member 35, the second sliding member 36, and the second movable member 38 are linearly reciprocated in the X direction when the rolling member 22 rolls. Is possible. The first sliding member 35, the second sliding member 36, and the second movable member 38 are moved by moving each of the three guide groove members 41 along the fixed shaft 39 in the Z direction. , Can be reciprocated in the Z direction. The first sliding member 35, the second sliding member 36, and the second movable member 38 can be linearly reciprocated individually in the X direction, and can be individually reciprocated in the Z direction. Is provided.

  FIG. 3 shows an example in which two fixed shafts 39 are provided on each of the two side portions 162 of the unit base 16. However, the number of the fixed shafts 39 provided on the two side portions 162 of the unit base 16 is not limited.

  The second movable member 38 is provided between the first sliding member 35 and the second sliding member 36. A third vibrator 33 is provided on the side of the first sliding member 35 in the second movable member 38, and a fourth sliding member 36 on the opposite side is provided with a fourth vibrator. A vibrator 34 is provided. In addition, the third vibrator 33 and the fourth vibrator 34 are provided back to back so as to be symmetrical with respect to the second movable member 38. The tip portions of the two protrusions 103 of the diaphragm 102 of the third vibrator 33 are in contact with the surface of the first sliding member 35 on the side facing the lid portion 17. Further, the tip ends of the two protrusions 103 of the diaphragm 102 of the fourth vibrator 34 are in contact with the surface of the second sliding member 36 on the side facing the bottom 161. The third vibrator 33 and the fourth vibrator 34 cannot be displaced in the X direction and the Y direction with respect to the second movable member 38, but are allowed to be displaced in the Z direction (there is a backlash). ) Is provided.

  As described above, the first urging means 14 urges the first vibrator 11 in the Z direction toward the first sliding member 35, and the second urging means 15 includes the second vibration. The child 12 is urged toward the second sliding member 36 in the Z direction. The first sliding member 35, the second sliding member 36, and the second movable member 38 are movable in the Z direction. For this reason, due to the biasing force F in the Z direction of the first biasing means 14 and the second biasing means 15, the tips of the two protrusions 103 of the diaphragm 102 of the first vibrator 11 are The sliding member 35 is in a state of being urged and in contact with the surface on the bottom 161 side. Similarly, the tip portions of the two protrusions 103 of the diaphragm 102 of the second vibrator 12 are urged and in contact with the surface of the second sliding member 36 on the lid portion 17 side. Become. Further, due to the urging force F of the first urging means 14 and the second urging means 15, the tip portions of the two protrusions 103 of the diaphragm 102 of the third vibrator 33 are moved to the first sliding member. The surface of the 35 on the side of the lid portion 17 is biased and is in contact. Similarly, the tip portions of the two protrusions 103 of the diaphragm 102 of the fourth vibrator 34 are in a state of being urged and in contact with the surface of the second sliding member 36 on the bottom 161 side. .

  With such a configuration, when a high frequency driving voltage is applied to the first vibrator 11, the first vibrator 11 and the first sliding member 35 are A driving force that relatively displaces the first sliding member 35 in the X direction is generated. When a high frequency driving voltage is applied to the third vibrator 33, the third vibrator 33 and the first sliding member 35 are interposed between the third vibrator 33 and the first sliding member 35. A driving force is generated that relatively displaces X in the X direction. Thus, the first vibrator 11 and the third vibrator 33 generate a driving force (friction force) between the first sliding member 35. That is, the first vibrator 11 and the third vibrator 33 separately generate driving force between one common sliding member (first sliding member 35).

  When a high frequency driving voltage is applied to the second vibrator 12, the second vibrator 12 and the second sliding member 36 are interposed between the second vibrator 12 and the second sliding member 36. A driving force (frictional force) that relatively moves the X in the X direction is generated. When a high frequency drive voltage is applied to the fourth vibrator 34, the fourth vibrator 34 and the second sliding member 36 are interposed between the fourth vibrator 34 and the second sliding member 36. A driving force (frictional force) that relatively moves the X in the X direction is generated. As described above, the second vibrator 12 and the fourth vibrator 34 generate a frictional force (driving force) between the second sliding member 36. That is, the second vibrator 12 and the fourth vibrator 34 individually generate driving force between one common sliding member (second sliding member 36).

  Then, by applying a high frequency driving voltage to all or a part of the first to fourth vibrators 11, 12, 33, 34, the first movable member 37, the second movable member 38, and the first sliding member are applied. The moving member 35 and the second sliding member 36 can be moved in the X direction with respect to the fixed member 18. In the second embodiment, the force that moves the first movable member 37 is output as the driving force of the vibration wave motor 3.

  According to the second embodiment, the same effects as those of the first embodiment can be obtained. Furthermore, as compared with the first embodiment, the combination of the vibrator and the sliding member is multistaged. That is, in the first embodiment, there is one set of two vibrators and one sliding member in contact with the two vibrators, whereas in the second embodiment, such a set is used. Have multiple. Between the fixed member 18 and the first movable member 37, the first vibrator 11, the first sliding member 35, the third vibrator 33, the second movable member 38, The fourth vibrator 34, the second sliding member 36, and the second vibrator 12 are provided so as to contact each other in series. With such a configuration, the moving speed of the first movable member 37 relative to the unit base 16 is the combined speed of the first sliding member 35, the second sliding member 36, and the first movable member 37. Therefore, further speedup can be achieved. For this reason, the responsiveness can be further improved.

  In the second embodiment, the configuration in which the third vibrator 33 and the fourth vibrator 34 are provided on the second movable member 38 is shown as an example. It is not limited to the configuration. For example, instead of the third vibrator 33, the fourth vibrator 34, and the second movable member 38, a vibrator having protrusions 103 provided on both sides in the Z direction is provided. May be. In this case, the vibrator generates a driving force (friction force) between each of the first sliding member 35 and the second sliding member 36. With such a configuration, the vibration wave motor 3 can be further reduced in size.

  In the second embodiment, the first sliding member 35 is sandwiched between the first vibrator 11 and the third vibrator 33, and the second sliding member 36 is joined to the second vibrator 12 and the second vibrator 12. Although the configuration sandwiched between the four transducers 34 has been described as an example, the configuration is not limited to such a configuration.

  Further, in the second embodiment, a set including two vibrators and one sliding member in common contact between the two vibrators between the fixed member 18 and the first movable member 37. However, the number of such sets is not limited to two. In short, any configuration having a plurality of such sets is sufficient, and a configuration having three or more sets may be used.

(Third embodiment)
Next, a configuration example of the vibration wave motor 5 according to the third embodiment will be described with reference to FIG. FIG. 4 is a diagram schematically illustrating a configuration example of the vibration wave motor 5 according to the third embodiment, in which (a) is a cross-sectional view as viewed in the Y direction, and is a view taken along the line Q-R in (b). (B) is sectional drawing of a X direction view, Comprising: It is a MN arrow line view of (a).

  As shown in FIG. 4, the vibration wave motor 5 according to the third embodiment includes a fixed sliding member 53, a movable sliding member 54, a movable housing 55, a first vibrator 51, and a second. Vibrator 52 and urging means 56. The fixed sliding member 53 and the movable sliding member 54 are provided parallel to each other with a predetermined distance in the Z direction. Further, in the vibration wave motor 5 according to the third embodiment, the first vibrator 51, the biasing means 56, and the second vibrator 52 include a fixed sliding member 53 and a movable sliding member 54. They are provided so as to be overlapped in the Z direction.

  The fixed sliding member 53 is a member fixed to an external member other than the vibration wave motor 5. The movable sliding member 54 is not fixed to each member of the vibration wave motor 5, and can be displaced relative to the fixed sliding member 53 in the X direction. The specific dimensions and shapes of the fixed sliding member 53 and the movable sliding member 54 are not particularly limited.

  The first vibrator 51 and the second vibrator 52 can have the same configuration as the first vibrator 11 and the second vibrator 12 of the first embodiment. That is, each of the first vibrator 51 and the second vibrator 52 includes the piezoelectric element 101 and the diaphragm 102 that are bonded to each other with an adhesive. The diaphragm 102 is provided with two protrusions 103 that protrude in the Z direction and are arranged in the X direction.

  The movable housing 55 is an example of support means, and is a member that connects the members of the vibration wave motor 5 so as to have a predetermined relationship with each other. The movable housing 55, the fixed sliding member 53, and the movable sliding member 54 are connected so as to be relatively displaceable in the X direction but not relatively displaceable in the Y direction and the Z direction. . For example, the movable housing 55 is provided with two through holes 551 penetrating in the X direction, and the fixed sliding member 53 and the movable sliding member 54 are inserted into the through holes 551, respectively. Yes. In other words, the fixed sliding member 53 and the movable sliding member 54 are pivotally supported by the movable housing 55 so as to be displaceable in the X direction. In addition, the movable housing 55 includes a first vibrator holding member 57 that holds the first vibrator 51 and a second vibrator holding member 58 that holds the second vibrator 52 in the X direction. Although it cannot be displaced in the Y direction, it is configured to be displaceably supported in the Z direction.

  The first vibrator 51 is accommodated in the movable housing 55 so as to be reciprocally movable in the Z direction while being supported by the first vibrator holding member 57. The second vibrator 52 is accommodated in the movable housing 55 so as to be reciprocally movable in the Z direction while being supported by the second vibrator holding member 58. The first vibrator 51 and the second vibrator 52 are movable together with the movable housing 55 in the X direction relative to the fixed sliding member 53 and the movable sliding member 54. is there. Biasing means 56 is provided between the first vibrator holding member 57 and the second vibrator holding member 58. Various known elastic bodies such as a spring and rubber can be applied to the urging means 56, for example. The urging means 56 is provided so as to be deformable in the Z direction with respect to the movable housing 55 but cannot be displaced in the X direction and the Y direction.

  The first vibrator 51 is biased toward the fixed sliding member 53 and the second vibrator 52 is biased toward the movable sliding member 54 by the biasing force F in the Z direction of the biasing means 56. It is energized. In this way, one urging means 56 urges the two vibrators (the first vibrator 51 and the second vibrator 52) in directions opposite to each other in the Z direction and away from each other. Then, due to the urging force F of the urging means 56, the tip portions of the two protrusions 103 of the diaphragm 102 of the first vibrator 51 are urged and in contact with the surface of the fixed sliding member 53. It becomes. Similarly, the tip ends of the two protrusions 103 of the diaphragm 102 of the second vibrator 52 are in a state of being urged and in contact with the surface of the movable sliding member 54.

  When a high-frequency driving voltage is applied to the piezoelectric element 101 of the first vibrator 51, ultrasonic vibration is excited in the first vibrator 51, and fixed sliding with the distal ends of the two protrusions 103 of the diaphragm 102. A driving force (frictional force) is generated between the member 53 and the member 53. As a result, the first vibrator 51 and the movable housing 55 provided with the first vibrator 51 are moved in the X direction with respect to the fixed sliding member 53. Further, when a high-frequency driving voltage is applied to the piezoelectric element 101 of the second vibrator 52, ultrasonic vibration is excited in the second vibrator 52, so that the tip of the two protrusions 103 of the diaphragm 102 can move with the tip. A driving force (frictional force) is generated between the sliding member 54 and the sliding member 54. As a result, the movable sliding member 54 moves in the X direction with respect to the second vibrator 52 and the movable housing 55 provided with the second vibrator 52. Thus, the vibration wave motor 5 according to the third embodiment can drive the movable sliding member 54 in the X direction.

  As described above, the first vibrator 51 and the second vibrator 52 are accommodated in the movable casing 55, and together with the movable casing 55 with respect to the fixed sliding member 53 and the movable sliding member 54. Move relatively together. That is, when a driving force is generated between the first vibrator 51 and the fixed sliding member 53, the first vibrator 51 and the second vibrator 52 are integrated with each other on the fixed sliding member 53. Move relative to it. Similarly, when a driving force is generated between the second vibrator 52 and the movable sliding member 54, the first vibrator 51 and the second vibrator 52 are integrated with each other and the movable sliding member 54. Move relative to. For this reason, the fixed sliding member 53 and the movable sliding member 54 move relatively by vibrating at least one of the first vibrator 51 and the second vibrator 52. A force that relatively moves the fixed sliding member 53 and the movable sliding member 54 is output as a driving force of the vibration wave motor 5.

  According to the third embodiment, the same effects as those of the first embodiment can be obtained. That is, different drive target values (drive amount, drive direction, and drive speed) are given to the first vibrator 51 and the second vibrator 52, and drive control is performed individually, so that responsiveness can be obtained even during reverse drive. Can be increased.

  In the above-described embodiment, the first vibrator 51 and the second vibrator 52 are provided so as to be stacked in the Z direction with the urging means 56 interposed therebetween. However, the present invention is not limited to such a configuration. Not. For example, the first vibrator 51 and the second vibrator 52 are provided side by side in the Y direction, and the fixed sliding member 53 and the movable sliding member 54 are arranged on the same side in the Z direction in the Y direction. The structure provided side by side may be sufficient. In this case, the movable casing 55 is provided with an urging means for urging the first vibrator 51 and an urging means for urging the second vibrator 52. Each of these urging means However, the first vibrator 51 and the second vibrator 52 are biased in the same direction in the Z direction. Even if it is such a structure, there can exist an effect similar to the above-mentioned.

(Imaging device)
Next, an application example of the vibration wave motors 1, 3, 5 to the imaging device 7 will be described. FIG. 5 is a diagram schematically illustrating a configuration example of the lens unit 72 of the imaging device 7 to which the vibration wave motor 1 according to the first embodiment of the present invention is applied. Here, an example is shown in which the vibration wave motor 1 according to the first embodiment of the present invention is applied to the driving force source (driving device) of the focusing operation (focusing operation) of the lens unit 72. That is, an example in which the focus lens 732 is applied as an optical element that is a driven object of the vibration wave motors 1, 3, and 5 will be described. Here, an example is shown in which the vibration wave motor 1 according to the first embodiment is applied, but the vibration wave motor 3 according to the second embodiment and the vibration wave motor 5 according to the third embodiment are also applicable. Is possible.

  The imaging optical system of the lens unit 72 includes, in order from the side facing the subject, a first lens barrel 731, a lens moving frame 733 that holds the focus lens 732 and the focus lens 732, and a second lens barrel 734. And have. A fixed lens 735 is incorporated in each of the first lens barrel 731 and the second lens barrel 734. Furthermore, the imaging optical system of the lens unit 72 includes two main guide bars 736 that guide the lens moving frame 733 so as to reciprocate in the optical axis L direction of the imaging optical system, and the vibration wave according to each embodiment of the present invention. Motors 1, 3 and 5 are included. The two main guide bars 736 are attached inside the housing 721 of the lens unit 72.

  The vibration wave motors 1, 3, and 5 are provided so that the focus lens 732 (an optical element that is a driven object) can be driven along with the lens moving frame 733 in the optical axis L direction of the imaging optical system. That is, the X direction of the vibration wave motors 1, 3, 5 according to the above embodiments is provided in a direction parallel to the optical axis L direction of the imaging optical system. If the vibration wave motor 1 according to the first embodiment is applied, the unit base 16 of the vibration wave motor 1 is fixed to the housing 721 of the lens unit 72, and the movable member 21 connects the connecting member 74. Via the lens moving frame 733. In the configuration to which the vibration wave motor 3 according to the second embodiment is applied, the unit base 16 of the vibration wave motor 3 is fixed to the housing 721 of the lens unit 72, and the first movable member 37 is connected. The lens 74 is connected to the lens moving frame 733 via the member 74. In the configuration to which the vibration wave motor 5 according to the third embodiment is applied, the fixed sliding member 53 is fixed to the housing 721 of the lens unit 72, and the movable sliding member 54 is attached to the lens moving frame 733. It is connected. With such a configuration, the focus lens 732, which is an example of an optical element as a driven object, is driven together with the lens moving frame 733 by the driving force of the vibration wave motors 1, 3, 5. Reciprocates in the L direction.

  FIG. 6A is a block diagram schematically illustrating a configuration example of the imaging device 7 to which the vibration wave motor 1 according to the first embodiment of the present invention is applied. The imaging device 7 includes the lens unit 72 and the imaging device main body 71 described above. The lens unit 72 includes vibration wave motors 1, 3, 5 according to the embodiments of the present invention, a focus lens 732 that is an optical element of a driven object of the vibration wave motors 1, 3, 5, and the focus lens 732. The lens moving frame 733 is provided. The imaging apparatus main body 71 has a release button 711 operated by the user and an imaging element 712 that generates and outputs image data from light from the subject (optical image of the subject) received through the imaging optical system 73. doing.

  Further, the imaging apparatus 7 includes a control unit 701, a first signal processing unit 702, a second signal processing unit 703, a third signal processing unit 704, a first driving unit 705, and a second driving. Means 706. The control unit 701 controls each part of the imaging device 7. The first signal processing unit 702, the second signal processing unit 703, and the third signal processing unit 704 execute predetermined processing on the image data output from the image sensor 712. The first drive unit 705 and the second drive unit 706 drive the vibration wave motor 1 in accordance with an instruction from the control unit 701.

  When receiving light through the imaging optical system 73, the imaging element 712 generates and outputs an image signal. Various known imaging elements such as a CCD sensor and a CMOS sensor can be applied to the imaging element 712.

  The control unit 701 controls each part of the imaging device 7. For example, the control unit 701 uses the first driving unit based on the driving target value of the focus lens 732 calculated by the first signal processing unit 702, the second signal processing unit 703, and the third signal processing unit 704. 705 and the second driving means 706 are controlled.

The first signal processing means 702 acquires the image data S ₁ of the first area A ₁ of the image sensor 712, and calculates the focus state of the main subject in the _first area A ₁ from the acquired image data S ₁ . The drive target value of the focus lens 732 is calculated from the calculated focus state. The second signal processing means 703 acquires the image data S ₂ of the second area A ₂ of the image sensor 712 and performs the same calculation, and the third signal processing means 704 performs the third signal processing of the image sensor 712. It performs the same calculation to obtain the image data S ₃ region a _3.

  Note that the first signal processing unit 702, the second signal processing unit 703, and the third signal processing unit 704 also acquire the signal of the release button 711. Then, the first signal processing unit 702, the second signal processing unit 703, and the third signal processing unit 704 detect that the release button 711 is half-pressed (when the operation of the instruction of the focusing operation by the user is detected). ) As described above, the drive target value of the focus lens 732 is calculated for each region.

For example, when a CMOS sensor is applied to the image sensor 712 and an image signal is constantly output, processing is performed as follows. That is, as shown in FIG. 6B, the first one-third time of one frame image is set as the first area A _1, and the first signal processing means 702 performs the first one-third time. The image data S ₁ of the time period is acquired and the drive target value of the focus lens 732 is calculated. The middle 1/3 time of the image of one frame is set as the second area A _2, and the second signal processing means 703 obtains the image data S ₂ of the middle 1/3 time to focus. A drive target value of the lens 732 is calculated. The last 1/3 time of the image of one frame is set as the third area A _3, and the third signal processing means 704 obtains the image data S ₃ of the last 1/3 time and performs focus. A drive target value of the lens 732 is calculated.

In this way, by processing each of the image data S _{1 to} S ₃ of each of the areas A _{1 to} A ₃ by the dedicated signal processing means (first to third signal processing means 702 to 704), The drive target value of the focus lens 732 can be calculated at high speed. In addition, with such a configuration, it is possible to calculate the drive target value of the focus lens 732 even during the shooting of one frame (before the acquisition of image data for the last 1/3 time). In this way, by acquiring a plurality of drive target values in one frame, it is possible to adjust the focus with high responsiveness. In addition, as shown in FIG.6 (c), when acquiring image data at random, the following methods are applicable, for example. In other words, the first signal processing unit 702, the second signal processing unit 703, and the third signal processing unit 704 each acquire an image signal of a different area and drive target value of the focus lens 732 for each different area. Calculate

  Then, the first signal processing unit 702, the second signal processing unit 703, and the third signal processing unit 704 transmit the calculated drive target value of the focus lens 732 in each region to the control unit 701. The control unit 701 sets the drive target values of the first vibrator 11 and the second vibrator 12 according to the acquired drive target value of the focus lens 732, and the first drive unit 705 and the second drive unit. By controlling 706, the focusing operation is performed. At this time, the control unit 701 can set the drive target value of the first vibrator 11 and the drive target value of the second vibrator 12 to different values.

  The first driving unit 705 drives the first vibrator 11 based on the control of the control unit 701. The second driving unit 706 drives the second vibrator 12 based on the control of the control unit 701. For example, the first drive unit 705 and the second drive unit 706 generate high frequency drive signals based on the control by the control unit 701, respectively, and the piezoelectric element 101 and the first element of the first vibrator 11 of the vibration wave motor 1. The voltage is applied to each of the piezoelectric elements 101 of the two vibrators 12. As the first driving unit 705 and the second driving unit 706, for example, a driving circuit that generates a high-frequency driving voltage can be applied. The control means 701 makes the drive target value of the first vibrator 11 by the first drive means 705 different from the drive target value of the second vibrator 12 by the second drive means 706. Can do.

With such a configuration, one of the first vibrator 11 and the second vibrator 12 can be accelerated and the other can be decelerated within the same period. For example, the focus lens 732 (first lens processing unit 702 and second signal processing unit 703 calculate using the image data A ₁ and A ₂ of the first area A ₁ and the second area A ₂ , respectively. Lens movement frame 733) It is assumed that the drive target value is movement in the same direction. In this case, the control unit 701 controls the first driving unit 705 to drive the first vibrator 11 and drives the focus lens 732 in a predetermined direction. Thereafter, the focus lens 732 drive target value calculated using the image data S ₃ of the third area A ₃ uses the image data S ₁ and S ₂ of the first area A ₁ and the second area A _2. It is assumed that the direction is opposite to the calculated focus lens 732 drive target value. In this case, the first drive unit 705 performs an operation of decelerating the first vibrator 11, and the second control unit 701 moves the second vibrator 12 to the side opposite to the first vibrator 11. Accelerate.

  As described above, the control unit 701 determines that the drive target value of the first vibrator 11 by the first drive unit 705 and the drive target value of the second vibrator 12 by the second drive unit 706 are different from each other. Make it. Thereby, for example, the first vibrator 11 and the second vibrator 12 can be simultaneously driven in opposite directions, and the driving direction of the focus lens 732 can be quickly changed. Therefore, when high responsiveness is required, high-speed focus operation can be realized. That is, the drive target value of the first vibrator 11 by the first drive unit 705 and the drive target value of the second vibrator 12 by the second drive unit 706 are made different from each other, thereby improving the responsiveness. be able to.

  Furthermore, the drive speed of the focus lens 732 can be increased and the power consumption of the drive can be reduced. For example, the first driving means 705 and the second driving means 706 drive the first vibrator 11 and the second vibrator 12 in the same direction, so that the driving speed can be increased. Further, by driving only one of the first vibrator 11 and the second vibrator 12, power saving during driving can be achieved. Furthermore, when high speed and high precision of position control are required, the speed is increased by driving both the first vibrator 11 and the second vibrator 12 at the same time. Only one of the first vibrator 11 and the second vibrator 12 may be driven.

  The imaging device 7 has a computer including a CPU, a ROM, and a RAM. In the ROM of this computer, a computer program for controlling each part of the imaging device 7 including a vibration wave motor as a driving device is stored in advance. Then, the CPU reads this computer program from the ROM, expands it in the RAM, and executes it. Thus, the computer functions as each of the above-described means.

  Next, a method for controlling the vibration wave motor 1 in the imaging device 7 will be described with reference to FIG. FIG. 7 is a flowchart illustrating an example of control processing of the vibration wave motors 1, 3, and 5 in the imaging device 7. A computer program for executing this processing is stored in advance in the ROM of the computer of the imaging device 7. The CPU of the computer reads this computer program from the ROM and executes it using the RAM as a work area. Thereby, this process is realized. The CPU of the computer starts this processing when the main power supply of the imaging device 7 is turned on.

In “image data acquisition” in step S101, the first signal processing unit 702 acquires the image data S ₁ corresponding to the first area A ₁ of the image sensor 712. The second signal processing unit 703 The image data S ₂ corresponding to the _second area A ₂ is acquired. The third signal processing means 704 acquires image data S ₃ corresponding to the third area A ₃ .

In “drive target value calculation” in step S102, the first signal processing unit 702, the second signal processing unit 703, and the third signal processing unit 704 use the acquired image data S ₁ , S ₂ , and S ₃ . To process. By this processing, the focus state of the main subject in each of the first region A ₁ , the second region A _2, and the third region A ₃ is detected, and the focus lens 732 for focusing is detected from the detected focus state. The drive target value is calculated.

  In “in-focus operation instruction present” in step S103, the control unit 701 determines whether or not the release button 711 has been half-pressed (that is, whether the operation of the in-focus operation instruction by the user has been detected). The process waits in step S103 until the release button 711 is half-pressed. If the release button 711 is half-pressed, the process proceeds to step S104.

In “focus lens driving” in step S104, the control unit 701 includes the first region A ₁ and the second region calculated by the first signal processing unit 702, the second signal processing unit 703, and the third signal processing unit 704. The drive target value of the focus lens 732 in each of the area A ₂ and the third area A ₃ is acquired. Then, the control unit 701 determines the drive target values of the first vibrator 11 and the second vibrator 12 from the obtained drive target values of the focus lens 732. The control unit 701 instructs the first driving unit 705 and the second driving unit 706 to drive the vibration wave motor 1, and the first driving unit 705 and the second driving unit 706 The vibration wave motor 1 (the first vibrator 11 and the second vibrator 12) is driven so as to obtain a value. Here, as described above, the first driving unit 705 drives the first vibrator 11 of the vibration wave motor 1 and the second driving unit 706 drives the second vibrator 12. Then, the process proceeds to step S105.

  At the start of movement of the focus lens 732 (lens moving frame 733), either the first vibrator 11 or the second vibrator 12 is driven to move the focus lens 732 (lens moving frame 733). The focus lens 732 is moved in a predetermined direction according to the drive target value. When the drive target value of the focus lens 732 is opposite to the moving direction during the movement (in the case of reverse driving), one of the first vibrator 11 and the second vibrator 12 is driven. Is started, and the other not driven is started to accelerate in the opposite direction (drive is started). That is, the drive target value of the first vibrator 11 and the drive target value of the second vibrator 12 are made different from each other (drive directions are made different). According to such a configuration, the drive responsiveness of the focus lens 732 can be improved.

  When high driving speed and position accuracy are required, the control unit 701 first controls the first driving unit 705 and the second driving unit 706 to control the first vibrator 11 and the second driving unit 706. By driving both of the vibrators 12, the focus lens 732 is driven at high speed. Then, when the drive target value of the focus lens 732 is equal to or smaller than the threshold value (that is, when the focus lens 732 approaches the target position), the control unit 701 selects one of the first vibrator 11 and the second vibrator 12. Either drive is stopped and only the other is driven. As a result, when the focus lens 732 approaches the target position, the driving speed can be lowered to achieve a fine speed driving, so that the position accuracy can be improved. In this way, both high driving speed and position accuracy can be achieved.

  In “drive completed?” In step S105, the control unit 701 determines whether the drive amount of the focus lens 732 (or the drive amount of the vibration wave motor 1) has reached the drive target value. When the drive amount of the focus lens 732 has not reached the drive target value, the first drive unit 705 and the second drive unit 706 continue to drive the vibration wave motor 1. If the drive amount of the focus lens 732 has reached the drive target value, the process returns to step S102.

  Here, the example in which the vibration wave motor 1 according to the first embodiment is applied to the imaging device 7 is shown, but the vibration wave motor 3 according to the second embodiment and the third embodiment are related. The vibration wave motor 5 is also applicable. When the vibration wave motor 3 according to the second embodiment is applied, the imaging device 7 is further provided with the third drive unit and the fourth drive in addition to the first drive unit 705 and the second drive unit 706. Means. Then, the third driving unit drives the third vibrator 33 and the fourth driving unit drives the fourth vibrator 34.

(Drive stage)
Next, an application example to the drive stage 8 (sometimes referred to as an automatic stage) will be described. FIGS. 8A and 8B are diagrams schematically showing a configuration example of the drive stage 8 to which the vibration wave motor 1 according to the first embodiment of the present invention is applied. FIG. 8A is a top view, and FIG. It is a KH arrow line view of a). Here, although the configuration to which the vibration wave motor 1 according to the first embodiment is applied is shown as an example, the vibration wave motor 3 according to the second embodiment and the vibration wave motor 5 according to the third embodiment. Either of these can be applied.

  The drive stage 8 has a base part 81 and a movable part 82 which is an example of a driven object. The movable part 82 is provided so as to be linearly reciprocated in a predetermined direction with respect to the base part 81. And the vibration wave motor which concerns on each embodiment of this invention is applied to the drive force source (drive device) which drives the movable part 82 with respect to the base part 81. FIG. The drive stage 8 includes, for example, a guide shaft 83 that extends in a predetermined direction, and a slide member 84 that is engaged with the guide shaft 83 so as to reciprocate in the extending direction. A guide shaft 83 is provided on one of the base part 81 and the movable part 82, and a slide member 84 is provided on the other. With such a configuration, the movable portion 82 can reciprocate in the extending direction of the guide shaft 83 with respect to the base portion 81.

  8 shows a configuration in which two guide shafts 83 are provided in the base portion 81 and four slide members 84 are provided in the movable portion 82, but the configuration is not limited thereto. For example, a configuration in which the guide shaft 83 is provided in the movable portion 82 and the slide member 84 is provided in the base portion 81 may be employed. Further, the number of guide shafts 83 and slide members 84 is not particularly limited.

  In addition, vibration wave motors 1, 3, and 5 according to the embodiments of the present invention are provided in the center of the drive stage 8 and between the base portion 81 and the movable portion 82. Further, the vibration wave motors 1, 3, and 5 are provided with the X direction parallel to the moving direction of the movable portion 82. Although FIG. 8 shows a configuration in which the vibration wave motor 1 according to the first embodiment is provided, the vibration wave motor 3 according to the second embodiment and the vibration wave motor 5 according to the third embodiment are provided. The provided structure may be sufficient. If the vibration wave motor 1 according to the first embodiment or the vibration wave motor 3 according to the second embodiment is applied, the unit base 16 is attached to the base portion 81 and the first movable The member 37 is connected to the movable portion 82 via a connecting member 85. In the configuration to which the vibration wave motor 5 according to the third embodiment is applied, the fixed sliding member 53 is attached to the base portion 81 and the movable sliding member 54 is attached to the movable portion 82. . With this configuration, the movable portion 82, which is an example of the driven object, is driven so as to linearly move with respect to the base portion 81 by the driving force of the vibration wave motors 1, 3, and 5.

  And according to such a structure, the drive responsiveness of the drive stage 8 can be improved. For example, even when the movable part 82 is moved in a complicated manner, the responsiveness can be improved.

  As mentioned above, although preferable embodiment of this invention was described, this invention is not limited to these embodiment, A various deformation | transformation and change are possible within the range of the summary.

Claims (10)

A plurality of relatively movable vibrators;
One or a plurality of sliding members that are movable relative to each of the plurality of vibrators and in contact with the plurality of vibrators;
Including
The plurality of vibrators and the sliding member are in series contact with each other, and when the plurality of vibrators vibrate, the vibrating vibrator and the sliding member relatively move. Vibration wave motor. The plurality of vibrators include two vibrators that are relatively movable,
The one or more sliding members include a common sliding member in which the two vibrators are in contact with each other,
2. The vibration wave motor according to claim 1, wherein when the two vibrators vibrate, the vibrator and the common sliding member move relatively. One of the two vibrators contacts one surface of the common sliding member,
3. The vibration wave motor according to claim 2, wherein the other one of the two vibrators contacts a surface opposite to the one surface of the common sliding member.   The vibration wave motor according to claim 2, further comprising a biasing unit that biases each of the two vibrators toward the common sliding member.   5. The vibration wave motor according to claim 2, comprising a plurality of sets of the common sliding members in which the two vibrators and the two vibrators are in contact with each other. Two sliding members relatively movable in a predetermined direction;
A first vibrator that is movable relative to the two sliding members in the predetermined direction and that contacts one of the two sliding members, and contacts the other one of the two sliding members. A second vibrator;
Have
The first vibrator and the second vibrator are coupled so as not to move relatively in the predetermined direction,
A vibration wave motor, wherein the two sliding members move relative to each other when at least one of the first vibrator and the second vibrator vibrates.   The vibration wave motor according to claim 6, wherein the first vibrator and the second vibrator are provided between the two sliding members.   Biasing means for biasing the first vibrator toward one of the two sliding members and biasing the second vibrator toward the other one of the two sliding members The vibration wave motor according to claim 7, further comprising: An optical element capable of reciprocating in the direction of the optical axis, and a vibration wave motor for moving the optical element in the direction of the optical axis,
The image pickup apparatus according to claim 1, wherein the vibration wave motor is the vibration wave motor according to claim 1. A base part, a stage provided to be movable relative to the base part, and a vibration wave motor that moves the stage relative to the base part,
The drive stage, wherein the vibration wave motor is the vibration wave motor according to any one of claims 1 to 8.

Images