JP2018143025A - Heat radiation photovoltaic generator - Google Patents

Heat radiation photovoltaic generator Download PDF

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JP2018143025A
JP2018143025A JP2017034724A JP2017034724A JP2018143025A JP 2018143025 A JP2018143025 A JP 2018143025A JP 2017034724 A JP2017034724 A JP 2017034724A JP 2017034724 A JP2017034724 A JP 2017034724A JP 2018143025 A JP2018143025 A JP 2018143025A
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photoelectric conversion
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野田 進
Susumu Noda
進 野田
卓也 井上
Takuya Inoue
卓也 井上
晃平 渡辺
Kohei Watabe
晃平 渡辺
卓 浅野
Taku Asano
卓 浅野
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Kyoto University
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Abstract

PROBLEM TO BE SOLVED: To provide a heat radiation photovoltaic generator having high output density and high generation efficiency.SOLUTION: A heat radiation photovoltaic generator comprises: a heat radiation body 12; a photoelectric conversion element 11 which is arranged apart from the heat radiation body 12 and comprises semiconductor layers 1111, 1112, 1121 and 1122; and an intermediate member 13 which is brought into contact with the photoelectric conversion element 11, is arranged apart from the heat radiation body 12 by a distance of 1/3 or less of a band gap wavelength being a wavelength corresponding to minimum band gap energy in bandgap energies of a semiconductor constituting respective semiconductor layers between the heat radiation body 12 and the photoelectric conversion element 11, and is formed of a material in which a real part of a dielectric constant has a positive value on light of wavelength 0.5 to 1000 μm and through which at least light of a part of the wavelength in a wavelength range which is photoelectrically converted in the photoelectric conversion element 11 passes. Since near-field light can be used as the heat radiation body 12 and the intermediate member 13 are near, output density is high, and power generation efficiency is high since light of the long wavelength, which does not contribute to power generation in the photoelectric conversion element 11, can be prevented from passing on a surface of the semiconductor layer of the photoelectric conversion element 11.SELECTED DRAWING: Figure 1

Description

本発明は、物体を加熱することにより生じる熱輻射光を光電変換することにより発電を行う熱輻射光発電装置に関する。なお、本明細書では「熱輻射光」には、可視光及び赤外線以外の電磁波を含むものとする。   The present invention relates to a thermal radiation light power generation apparatus that generates electric power by photoelectrically converting thermal radiation generated by heating an object. In this specification, “thermal radiation light” includes electromagnetic waves other than visible light and infrared rays.

一般に、物体を加熱すると、物体を構成する物質及び物体の温度に応じたスペクトルを有する熱輻射光が放出される。この熱輻射光を光電変換素子に照射することにより、発電を行うことができる。この原理を用いて、例えば火力発電所やエンジンを用いた発電機において発電に寄与することなく発生する熱で生じる熱輻射光により発電を行うことで、エネルギーの利用効率を高めることができる。また、熱源さえあれば、別途電源を用意することなく電力を得ることができる。例えば赤外線を用いてエンジンの排ガス中の成分を分析するための排ガスセンサにおいて、エンジンの廃熱で生じる熱輻射光により発電を行うことで、別途電源を用意することなく排ガスセンサを動作させるための電力を得ることができる。   In general, when an object is heated, thermal radiation light having a spectrum corresponding to the material constituting the object and the temperature of the object is emitted. Electric power can be generated by irradiating the photoelectric conversion element with this heat radiation light. By using this principle, for example, in a power generator using a thermal power plant or an engine, power generation is performed by heat radiation generated by heat generated without contributing to power generation, so that the energy use efficiency can be increased. Moreover, as long as there is a heat source, electric power can be obtained without preparing a separate power source. For example, in an exhaust gas sensor for analyzing components in engine exhaust gas using infrared rays, power generation is performed by heat radiation generated by engine waste heat, and the exhaust gas sensor can be operated without preparing a separate power source. Electric power can be obtained.

熱輻射光発電装置は、加熱によって熱輻射光を発する熱輻射体と、該熱輻射光を電気に変換する光電変換素子で構成されるが、光電変換素子を保護するため、両者を直接接触させることはできず、両者の間には隙間を設けなければならない。熱輻射体を加熱した際には、その内部を含む全体から熱輻射光が放出されるが、内部で生成された熱輻射光は、熱輻射体の表面から外部に放出される他、例えばその表面で全反射することにより熱輻射体内に留まるものも存在する。但し、このように熱輻射体内に留まる光であっても、その表面からわずかに外側(例えば表面から1μm未満の範囲内)には浸出している。このような光を近接場光という。近接場光も光電変換素子に取り込むことができれば、発電の出力密度を高くすることができる。そこで特許文献1に記載の熱輻射光発電装置は、熱輻射体と光電変換素子を構成する半導体層の距離(隙間の大きさ)を、熱輻射体の表面付近に生成される近接場光が該半導体層に伝播するように十分に小さく(例えばナノオーダー、すなわち1μm未満に)する、という構成をとっている。   The thermal radiation power generation device is composed of a heat radiator that emits heat radiation light by heating and a photoelectric conversion element that converts the heat radiation light into electricity. In order to protect the photoelectric conversion element, the two are in direct contact with each other. It is not possible to make a gap between them. When the heat radiator is heated, heat radiation light is emitted from the whole including the inside, but the heat radiation light generated inside is emitted from the surface of the heat radiator to the outside. Some remain in the heat radiating body due to total reflection at the surface. However, even the light staying in the heat radiating body in this way is leached slightly outside the surface (for example, within a range of less than 1 μm from the surface). Such light is called near-field light. If near-field light can also be taken into the photoelectric conversion element, the output density of power generation can be increased. Therefore, in the thermal radiation light power generation device described in Patent Document 1, the distance between the thermal radiator and the semiconductor layer constituting the photoelectric conversion element (the size of the gap) is determined by the near-field light generated near the surface of the thermal radiator. It is configured to be sufficiently small (for example, nano-order, that is, less than 1 μm) so as to propagate to the semiconductor layer.

特開2008-300626号公報JP 2008-300626 Gazette

光電変換素子のキャリアがドーピングされた半導体層では、発電に寄与する波長範囲よりも波長が長い領域において、誘電率の実部が負の値となる波長が存在する。これは、光の波長が長い、すなわち、周波数が小さく、電界の変化が遅いことにより、半導体中の電荷が光の電界を打ち消すように移動することができるためである。また、2種類以上の原子から構成される化合物半導体においては、その格子振動が光と結合することによっても、発電に寄与する波長範囲よりも波長が長い領域において、誘電率の実部が負の値となる波長が生じる。このような長波長の光は、半導体層内では電界の打ち消しが生じることにより伝播することができず、半導体層の表面付近に局在し、該表面に平行な方向に進行するもののみが伝播することができる。特許文献1に記載の熱輻射光発電装置において、熱輻射光源で生成された光のうちの一部が近接場光として半導体層に伝播したとしても、そのうちのこのように半導体層の表面付近でそれに平行な方向に伝播する長波長の光は発電に寄与することなく熱として消費されてしまい、有効に利用されない。以下、半導体層の表面付近に局在し、該表面に平行な方向に伝播する光を表面波と呼ぶ。   In the semiconductor layer doped with carriers of the photoelectric conversion element, there is a wavelength at which the real part of the dielectric constant has a negative value in a region where the wavelength is longer than the wavelength range contributing to power generation. This is because the light in the semiconductor can move so as to cancel the electric field of the light because the wavelength of the light is long, that is, the frequency is small and the electric field changes slowly. In addition, in compound semiconductors composed of two or more types of atoms, the real part of the dielectric constant is negative in the region where the wavelength is longer than the wavelength range that contributes to power generation, even when the lattice vibration couples with light. The resulting wavelength is generated. Such long-wavelength light cannot propagate in the semiconductor layer due to the cancellation of the electric field, but only the light that is localized near the surface of the semiconductor layer and travels in a direction parallel to the surface is propagated. can do. Even if a part of the light generated by the thermal radiation light source propagates to the semiconductor layer as near-field light in the thermal radiation light-power generating device described in Patent Document 1, it is thus near the surface of the semiconductor layer. Long-wavelength light propagating in a direction parallel thereto is consumed as heat without contributing to power generation, and is not used effectively. Hereinafter, light that is localized near the surface of the semiconductor layer and propagates in a direction parallel to the surface is referred to as a surface wave.

本発明が解決しようとする課題は、熱輻射体から光電変換素子の半導体層に、発電に寄与する波長の近接場光は伝播させつつ、発電に寄与しない長波長の表面波が伝播することを防ぐことができ、それにより出力密度及び発電効率が共に高い熱輻射光発電装置を提供することである。   The problem to be solved by the present invention is that a near-wavelength light having a wavelength contributing to power generation propagates from a heat radiator to a semiconductor layer of a photoelectric conversion element while a long-wavelength surface wave not contributing to power generation propagates. It is possible to provide a thermal radiation power generation device that can be prevented and thereby has both high power density and high power generation efficiency.

上記課題を解決するために成された本発明に係る熱輻射光発電装置は、
a) 熱輻射体と、
b) 前記熱輻射体から離間して配置された、1層又は複数層の半導体層を有する光電変換素子と、
c) 前記熱輻射体と前記光電変換素子の間に、該光電変換素子に接し、前記1層の半導体層を構成する半導体のバンドギャップエネルギーに対応する波長又は前記複数層の各半導体層を構成する半導体のバンドギャップエネルギーのうちの最小のものに対応する波長であるバンドギャップ波長の1/3以下の距離だけ前記熱輻射体から離間して配置された、波長0.5〜1000μmの光に関して誘電率の実部が正の値を有し且つ前記光電変換素子において光電変換される波長範囲内の少なくとも一部の波長の光を透過する材料から成る中間部材と
を備えることを特徴とする。
The thermal radiation power generation device according to the present invention, which has been made to solve the above problems,
a) a heat radiator;
b) a photoelectric conversion element having one or more semiconductor layers disposed apart from the heat radiator;
c) Between the thermal radiator and the photoelectric conversion element, a wavelength corresponding to a band gap energy of a semiconductor constituting the one semiconductor layer, or each semiconductor layer of the plurality of layers is in contact with the photoelectric conversion element Dielectric constant for light with a wavelength of 0.5 to 1000 μm arranged at a distance of 1/3 or less of the bandgap wavelength, which is the wavelength corresponding to the smallest of the semiconductor bandgap energy And an intermediate member made of a material that transmits light of at least a part of wavelengths within a wavelength range that is photoelectrically converted by the photoelectric conversion element.

本発明に係る熱輻射光発電装置によれば、中間部材はバンドギャップ波長の1/3以下という十分に短い距離だけ熱輻射体から離間して配置されていると共に、中間部材の材料が、光電変換素子において光電変換される(発電に寄与する)波長範囲内の少なくとも一部の波長の光を透過するため、当該波長の光は近接場光を含めて熱輻射体から中間部材を通して光電変換素子に導入され、光電変換がなされて発電される。そのため、本発明に係る熱輻射光発電装置は出力密度が高い。   According to the thermal radiation light-emitting power generation device according to the present invention, the intermediate member is disposed away from the heat radiator by a sufficiently short distance of 1/3 or less of the band gap wavelength, and the material of the intermediate member is photoelectric. In order to transmit light of at least a part of the wavelength within the wavelength range that is photoelectrically converted (contributes to power generation) in the conversion element, the light of the wavelength including the near-field light passes through the intermediate member from the thermal radiator and the photoelectric conversion element And photoelectrically converted to generate electricity. Therefore, the thermal radiation light power generation device according to the present invention has a high output density.

一方、中間部材の材料が、0.5〜1000μmの波長範囲内にある波長の光に関して誘電率の実部が正の値を有することにより、上記の波長範囲内では、熱輻射体に対向した中間部材の表面に表面波が生じない。また、表面波が中間部材の内部を伝播することがないため、熱輻射体から生じる熱輻射によって光電変換素子の半導体層の表面において表面波が誘起されることもない。従って、熱輻射体によって実用上得られる0.5〜1000μmの全ての波長において、発電に寄与しない長波長の光が表面波となって中間部材や光電変換素子で熱として消費されてしまうことを防止することができる。これにより、本発明に係る熱輻射光発電装置は発電効率が高くなる。   On the other hand, since the real part of the dielectric constant of the material of the intermediate member has a positive value with respect to light having a wavelength in the wavelength range of 0.5 to 1000 μm, the intermediate member facing the heat radiator within the above wavelength range Surface waves do not occur on the surface. Further, since the surface wave does not propagate inside the intermediate member, the surface wave is not induced on the surface of the semiconductor layer of the photoelectric conversion element by the heat radiation generated from the heat radiator. Therefore, in all wavelengths of 0.5 to 1000 μm obtained practically by the heat radiator, long wavelength light that does not contribute to power generation is prevented from being consumed as heat by the intermediate member or the photoelectric conversion element as a surface wave. be able to. Thereby, the thermal radiation light power generation device according to the present invention has high power generation efficiency.

光電変換素子には、1層の半導体層と金属層を有するものと、複数層の半導体層を有するものがある。バンドギャップ波長は、前述のように、半導体層が1層である場合には当該半導体層を構成する半導体のバンドギャップエネルギーに対応する波長により定義し、半導体層が複数である場合には、各半導体層を構成する半導体のバンドギャップエネルギーのうちの最小のものに対応する波長により定義する。バンドギャップ波長は、光電変換素子において光電変換される波長範囲の最大値に対応する。   Some photoelectric conversion elements have one semiconductor layer and a metal layer, and others have a plurality of semiconductor layers. As described above, the band gap wavelength is defined by the wavelength corresponding to the band gap energy of the semiconductor constituting the semiconductor layer when the semiconductor layer is a single layer, and when there are a plurality of semiconductor layers, It is defined by a wavelength corresponding to the minimum band gap energy of the semiconductor constituting the semiconductor layer. The band gap wavelength corresponds to the maximum value of the wavelength range in which photoelectric conversion is performed in the photoelectric conversion element.

前記熱輻射体と前記中間部材の距離は、中間部材を配置することなく前記熱輻射体と前記光電変換素子を離間して配置した構成(これは本発明に係る熱輻射光発電装置の構成とは異なることに注意)において、該光電変換素子が表面波を吸収することにより生じるエネルギーの損失が顕著となる0.2μm以下とすることが望ましい。この要件は、従来の熱輻射光発電装置では表面波の吸収により発電効率の低下が顕著になる距離以下まで、本発明に係る熱輻射光発電装置における熱輻射体と中間部材を近づけても、中間部材による表面波の吸収がほとんど生じないため、従来の熱輻射光発電装置に対する本発明に係る熱輻射光発電装置の効率の向上の効果が顕著になることを意味している。   The distance between the thermal radiator and the intermediate member is a configuration in which the thermal radiator and the photoelectric conversion element are separated from each other without arranging an intermediate member (this is the configuration of the thermal radiation photovoltaic power generation device according to the present invention). In this case, it is desirable that the photoelectric conversion element has a thickness of 0.2 μm or less where energy loss caused by absorption of surface waves becomes significant. This requirement is such that the thermal radiation generator and the intermediate member in the thermal radiation generator according to the present invention are brought close to the distance where the decrease in power generation efficiency becomes remarkable due to absorption of surface waves in the conventional thermal radiation generator, Since the intermediate member hardly absorbs the surface wave, it means that the effect of improving the efficiency of the thermal radiation light power generation apparatus according to the present invention with respect to the conventional heat radiation light power generation apparatus becomes remarkable.

同様の理由により、前記熱輻射体と前記中間部材の距離は、前記中間部材を配置することなく前記熱輻射体と前記光電変換素子を離間して配置した構成において、熱輻射体で生成される熱輻射光の全エネルギーに占める、該光電変換素子が表面波を吸収することにより生じるエネルギーの損失の割合が10%となる場合の該熱輻射体と該光電変換素子の距離よりも短いことが望ましい。熱輻射体で生成される熱輻射光の全エネルギー及び光電変換素子が表面波を吸収することにより生じるエネルギーの損失の大きさは、数値計算により求めることができる。   For the same reason, the distance between the thermal radiator and the intermediate member is generated by the thermal radiator in a configuration in which the thermal radiator and the photoelectric conversion element are spaced apart without arranging the intermediate member. It is shorter than the distance between the thermal radiator and the photoelectric conversion element when the ratio of the loss of energy caused by the photoelectric conversion element absorbing surface waves in the total energy of the heat radiation light is 10%. desirable. The total energy of the heat radiation generated by the heat radiator and the magnitude of the energy loss caused by the photoelectric conversion element absorbing the surface wave can be obtained by numerical calculation.

近接場光を介して中間部材が光電変換素子に伝達することができる熱輻射光のエネルギーは、屈折率の2乗に比例するため、前記中間部材の材料は、光電変換素子において光電変換される波長範囲内において屈折率が高いことが望ましく、例えば3以上であることが望ましい。そのような高い屈折率を有し、且つ、前述のように波長5〜1000μmの光に関して誘電率の実部が正の値を有すると共に、熱輻射光発電装置で一般的に用いられている温度1000〜2000Kの熱輻射体から発生する熱輻射光において主に発電に寄与する波長1.1〜2.5μmの赤外光を透過する材料として、真性半導体の(すなわちキャリアが添加されていない)Siが挙げられる。   Since the energy of the heat radiation light that can be transmitted to the photoelectric conversion element by the intermediate member via the near-field light is proportional to the square of the refractive index, the material of the intermediate member is photoelectrically converted in the photoelectric conversion element. It is desirable that the refractive index be high within the wavelength range, for example, 3 or more. A temperature that has such a high refractive index and has a positive real part of the dielectric constant with respect to light having a wavelength of 5 to 1000 μm as described above, and is generally used in a thermal radiation power generator. As a material that transmits infrared light having a wavelength of 1.1 to 2.5 μm that mainly contributes to power generation in heat radiation generated from a heat radiator of 1000 to 2000K, intrinsic semiconductor (that is, no carrier added) Si is cited. It is done.

前記熱輻射体は、前記中間部材が透過する波長の光を増幅するフォトニック結晶構造を有することが望ましい。フォトニック結晶構造は、周期的な屈折率の分布が形成された構造をいい、波長が異なる様々な光のうち、この周期に応じた特定の波長の光を選択的に、干渉により増幅するという特徴を有する。熱輻射体がこのようなフォトニック結晶構造を有することにより、中間部材を透過して光電変換素子で発電に寄与する波長の光を増幅することができ、それにより出力密度及び発電効率をより高くすることができる。また、フォトニック結晶構造を有する熱輻射体に太陽光を照射することで該熱輻射体を加熱し、該熱輻射体から放出される、発電に寄与する波長が増幅された光を光電変換素子に照射して光電変換をすることにより、太陽光を直接光電変換素子に照射して光電変換をする場合よりも光電変換の効率を高くすることができる。フォトニック結晶構造は、例えば半導体等から成る部材を周期的に配置することや、半導体等から成る板状の母材に該母材とは屈折率が異なる領域(異屈折率領域)を周期的に設けることにより形成することができる。異屈折率領域には、典型的には空孔を用いることができるが、母材とは異なる部材を空孔に埋め込んだものを用いてもよい。   The thermal radiator preferably has a photonic crystal structure that amplifies light having a wavelength that is transmitted by the intermediate member. The photonic crystal structure is a structure in which a periodic refractive index distribution is formed. Among various lights having different wavelengths, light having a specific wavelength corresponding to this period is selectively amplified by interference. Has characteristics. When the heat radiator has such a photonic crystal structure, it is possible to amplify light having a wavelength that passes through the intermediate member and contributes to power generation by the photoelectric conversion element, thereby further increasing output density and power generation efficiency. can do. In addition, the heat radiating body having a photonic crystal structure is irradiated with sunlight to heat the heat radiating body, and light emitted from the heat radiating body and having a wavelength contributing to power generation is amplified. The photoelectric conversion efficiency can be made higher by performing photoelectric conversion by irradiating the solar cell than when performing photoelectric conversion by directly irradiating the photoelectric conversion element with sunlight. The photonic crystal structure has, for example, a periodic arrangement of members made of a semiconductor or the like, or a plate-like base material made of a semiconductor or the like that has a region having a refractive index different from that of the base material (a different refractive index region). It can form by providing. In the different refractive index region, a hole can be typically used, but a member different from the base material embedded in the hole may be used.

本発明により、熱輻射体から光電変換素子の半導体層に、発電に寄与する波長の近接場光は伝播させつつ、発電に寄与しない長波長の光が伝播することを防ぐことができ、それにより出力密度及び発電効率が共に高い熱輻射光発電装置を得ることができる。   According to the present invention, it is possible to prevent the propagation of near-wavelength light that does not contribute to power generation while propagating near-field light having a wavelength that contributes to power generation from the heat radiator to the semiconductor layer of the photoelectric conversion element. It is possible to obtain a thermal radiation light power generation device having both high output density and power generation efficiency.

本発明に係る熱輻射光発電装置の一実施形態の要部を示す概略構成図。BRIEF DESCRIPTION OF THE DRAWINGS The schematic block diagram which shows the principal part of one Embodiment of the thermal radiation light power generator which concerns on this invention. 本実施形態の熱輻射光発電装置における熱輻射体の一部分の構造を示す、光電変換素子と対向する表面の反対側からの斜視図。The perspective view from the opposite side of the surface which opposes a photoelectric conversion element which shows the structure of a part of thermal radiation body in the thermal radiation light-power generation apparatus of this embodiment. 半導体層の材料の一例であるn-InP、及び中間部材の材料の一例であるキャリアが添加されていないSiにつき、波長の相違による誘電率の実部の値の相違を示すグラフ。The graph which shows the difference in the value of the real part of the dielectric constant by the difference in wavelength about n-InP which is an example of the material of a semiconductor layer, and Si which is not added the carrier which is an example of the material of an intermediate member. InGaAs/InP光電変換素子を用いる場合において、厚み10μmの中間部材を有し、中間部材と熱輻射体の距離が(a)0.01μm(実施例1)及び(b)100μmを超える十分に長い距離(比較例1)である場合、並びに、中間部材が無く第1n型半導体層と熱輻射体の距離が(c)0.01μm(比較例2)及び(b)100μmを超える十分に長い距離(比較例3)である場合につき、熱輻射体から光電変換素子に達する熱輻射光のスペクトルを計算により求めた結果を示すグラフ。In the case of using an InGaAs / InP photoelectric conversion element, it has an intermediate member having a thickness of 10 μm, and the distance between the intermediate member and the heat radiator is sufficiently long to exceed (a) 0.01 μm (Example 1) and (b) 100 μm. In the case of (Comparative Example 1), there is no intermediate member, and the distance between the first n-type semiconductor layer and the heat radiator is (c) 0.01 μm (Comparative Example 2) and (b) a sufficiently long distance exceeding 100 μm (Comparison The graph which shows the result of having calculated | required the spectrum of the heat radiation light which reaches | attains a photoelectric conversion element from a heat radiator about the case of Example 3). InGaAs/InP光電変換素子を用いる場合において、(a)厚み10μmの中間部材を有する場合と、(b)中間部材がない場合につき、発電に寄与する熱輻射光及び損失となる熱輻射光の強度を全波長について積算した値を計算で求めた結果を示すグラフ。In the case of using an InGaAs / InP photoelectric conversion element, the intensity of thermal radiation that contributes to power generation and the loss of thermal radiation that contributes to power generation when (a) has an intermediate member with a thickness of 10 μm and (b) has no intermediate member. The graph which shows the result of having calculated | required the value which integrated | accumulated about all the wavelengths by calculation. InGaAs/InP光電変換素子を用いる場合において、中間部材の厚みtが0.1μm、1μm、10μm及び100μmの場合、並びに中間部材が無い場合についてそれぞれ、熱輻射体から放出される熱輻射光のうち発電に寄与するものの強度の割合(発電寄与率)を複数の距離d又はd'を対象として計算で求めた結果を示すグラフ。In the case of using an InGaAs / InP photoelectric conversion element, power generation out of the heat radiation emitted from the heat radiator when the thickness t of the intermediate member is 0.1 μm, 1 μm, 10 μm and 100 μm, and when there is no intermediate member, respectively. The graph which shows the result of having calculated | required the ratio of the intensity | strength (electric power generation contribution rate) of what contributes to several distance d or d 'by calculation. InGaAs/InP光電変換素子を用いる場合において、第1n型半導体層の電子の添加量が(a)1×1019cm-3、(b)1×1018cm-3、及び(c)1×1017cm-3の場合について、厚み10μmの中間部材が有る場合と無い場合の発電寄与率を計算で求めた結果を示すグラフ。When an InGaAs / InP photoelectric conversion element is used, the amount of electrons added to the first n-type semiconductor layer is (a) 1 × 10 19 cm −3 , (b) 1 × 10 18 cm −3 , and (c) 1 × The graph which shows the result of having calculated | required the electric power generation contribution rate with and without the case where the intermediate member of 10 micrometers in thickness is in the case of 10 < 17 > cm <-3 >. GaSb光電変換素子を用いる場合において、(a)厚み10μmの中間部材を有する場合と、(b)中間部材がない場合につき、発電に寄与する熱輻射光及び損失となる熱輻射光の強度を全波長について積算した値を計算で求めた結果を示すグラフ。In the case of using a GaSb photoelectric conversion element, the intensity of thermal radiation that contributes to power generation and the loss of thermal radiation that contributes to power generation are reduced when (a) the intermediate member has a thickness of 10 μm and (b) there is no intermediate member. The graph which shows the result of having calculated | required the value integrated about the wavelength by calculation. GaSb光電変換素子を用いる場合において、厚み10μmの中間部材が有る場合と無い場合の発電寄与率を計算で求めた結果を示す。In the case of using a GaSb photoelectric conversion element, the results of calculating the power generation contribution ratio with and without an intermediate member having a thickness of 10 μm are shown. 本発明に係る熱輻射光発電装置の全体構成の一例を示す概略図。Schematic which shows an example of the whole structure of the thermal radiation light power generator which concerns on this invention. 熱輻射体におけるフォトニック結晶構造の他の例を示す斜視図。The perspective view which shows the other example of the photonic crystal structure in a heat radiator. 本発明に係る熱輻射光発電装置の変形例である、熱輻射体がフォトニック結晶構造を有しない例を示す、要部の概略構成図。The schematic block diagram of the principal part which shows the example which is a modification of the thermal radiation light-power generation apparatus which concerns on this invention, and a heat radiator does not have a photonic crystal structure.

図1〜図12を用いて、本発明に係る熱輻射光発電装置の実施形態を説明する。図1は、本実施形態の熱輻射光発電装置10の構成を概略図で示したものである。熱輻射光発電装置10は、光電変換素子11と、熱輻射体12と、中間部材(中間基板)13を有する。   1 to 12, an embodiment of a thermal radiation light power generation device according to the present invention will be described. FIG. 1 is a schematic diagram illustrating the configuration of a thermal radiation light power generation apparatus 10 according to the present embodiment. The thermal radiation light power generation apparatus 10 includes a photoelectric conversion element 11, a heat radiator 12, and an intermediate member (intermediate substrate) 13.

光電変換素子11は、第1n型半導体層1111、第2n型半導体層1112、第2p型半導体層1122、及び第1p型半導体層1121がこの順で積層した複数の半導体層から成る光電変換部110を有する。これら4層の半導体層の材料には例えば、上記の順に、n-InP、n-InGaAs、p-InGaAs、p-InPを用いることができる。以下、これら4層の半導体層を用いた光電変換素子を「InGaAs/InP光電変換素子」と呼ぶ。InGaAs/InP光電変換素子では、1.68μm以下の波長範囲内の光により光電変換が生じる。あるいは、これら4層の半導体層の材料に、上記の順に、n+-GaSb、n-GaSb、p-GaSb、p+-GaSbを用いることもできる。以下、これら4層の半導体層を用いた光電変換素子を「GaSb光電変換素子」と呼ぶ。ここでn+-GaSbはn-GaSbよりも電子の添加量が多いことを示し、p+-GaSbはp-GaSbよりも正孔の添加量が多いことを示している。GaSb光電変換素子では、1.77μm以下の波長範囲内の光により光電変換が生じる。 The photoelectric conversion element 11 includes a first n-type semiconductor layer 1111, a second n-type semiconductor layer 1112, a second p-type semiconductor layer 1122, and a first p-type semiconductor layer 1121 formed of a plurality of semiconductor layers stacked in this order. Have For example, n-InP, n-InGaAs, p-InGaAs, and p-InP can be used as materials for these four semiconductor layers in the order described above. Hereinafter, a photoelectric conversion element using these four semiconductor layers is referred to as an “InGaAs / InP photoelectric conversion element”. In an InGaAs / InP photoelectric conversion element, photoelectric conversion occurs due to light within a wavelength range of 1.68 μm or less. Alternatively, n.sup. + -GaSb, n-GaSb, p-GaSb, and p.sup. + -GaSb can be used in the order described above for the material of these four semiconductor layers. Hereinafter, a photoelectric conversion element using these four semiconductor layers is referred to as a “GaSb photoelectric conversion element”. Here, n + -GaSb indicates that the amount of added electrons is larger than that of n-GaSb, and p + -GaSb indicates that the amount of added holes is larger than that of p-GaSb. In the GaSb photoelectric conversion element, photoelectric conversion occurs due to light in the wavelength range of 1.77 μm or less.

第1n型半導体層1111には第1電極1131が接続され、第1p型半導体層1121には第2電極1132が接続されている。   A first electrode 1131 is connected to the first n-type semiconductor layer 1111, and a second electrode 1132 is connected to the first p-type semiconductor layer 1121.

熱輻射体12は、キャリアが添加されていないSi(以下、「無添加Si」とする)から成り、光電変換素子11の第1n型半導体層1111に対向して該第1n型半導体層1111に平行に配置された板状部121と、板状部121の裏側(第1n型半導体層1111と対向する表面の反対側)の表面に設けられたフォトニック結晶部122を有する。フォトニック結晶部122は、図2に示すように、Siから成るロッド状の部材であるロッド部材1221を平行に周期(間隔)aで多数、板状部121の裏側の表面に配置することにより構成されている。熱輻射体12は、外部の熱源から熱を受けて熱輻射光を発光し、フォトニック結晶部122において周期aに対応する波長の光を選択的に増幅する。なお、ここで増幅される光の波長は、フォトニック結晶部122内における波長を指し、真空中における波長λ0をフォトニック結晶部122の有効屈折率neffで除した値である。有効屈折率neffは、フォトニック結晶部122に分布する光の電界強度の割合、及びフォトニック結晶部122全体に対するロッド部材1221の充填率を考慮した屈折率である。周期aの具体例は、中間部材13の構成と共に後述する。 The heat radiator 12 is made of Si to which no carrier is added (hereinafter, referred to as “non-added Si”), and faces the first n-type semiconductor layer 1111 of the photoelectric conversion element 11 to the first n-type semiconductor layer 1111. A plate-like portion 121 arranged in parallel and a photonic crystal portion 122 provided on the surface of the back side of the plate-like portion 121 (opposite the surface facing the first n-type semiconductor layer 1111) are provided. As shown in FIG. 2, the photonic crystal portion 122 is formed by arranging a number of rod members 1221, which are rod-shaped members made of Si, in parallel with a period (interval) a on the surface on the back side of the plate-like portion 121. It is configured. The heat radiator 12 receives heat from an external heat source to emit heat radiation light, and selectively amplifies light having a wavelength corresponding to the period a in the photonic crystal part 122. The wavelength of the light amplified here refers to the wavelength in the photonic crystal part 122 and is a value obtained by dividing the wavelength λ 0 in vacuum by the effective refractive index n eff of the photonic crystal part 122. The effective refractive index n eff is a refractive index in consideration of the ratio of the electric field intensity of light distributed in the photonic crystal part 122 and the filling rate of the rod member 1221 with respect to the entire photonic crystal part 122. A specific example of the period a will be described later together with the configuration of the intermediate member 13.

中間部材13は、無添加Siから成る板状の部材であり、光電変換素子11の第1n型半導体層1111及び熱輻射体12の板状部121の間に、それら第1n型半導体層1111及び熱輻射体12と平行に配置されている。中間部材13は、光電変換素子11の第1n型半導体層1111には接しているのに対して、熱輻射体12の板状部121との間は所定の距離dだけ離間されている。距離dは、光電変換素子11の4層の半導体層をそれぞれ構成する半導体のバンドギャップエネルギーのうち最小の値に対応するバンドギャップ波長の1/3以下とする。この距離dは、波長が光電変換素子11において発電に寄与する範囲内にある、熱輻射による近接場光が、熱輻射体に対向する物体に伝播可能となる距離に対応する。例えば、InGaAs/InP光電変換素子では、バンドギャップ波長は1.68μmであり、距離dは0.560μm以下である。GaSb光電変換素子では、バンドギャップ波長は1.77μmであり、距離dは0.590μm以下である。   The intermediate member 13 is a plate-like member made of additive-free Si, and between the first n-type semiconductor layer 1111 of the photoelectric conversion element 11 and the plate-like portion 121 of the heat radiator 12, the first n-type semiconductor layer 1111 and The heat radiator 12 is arranged in parallel. The intermediate member 13 is in contact with the first n-type semiconductor layer 1111 of the photoelectric conversion element 11, but is separated from the plate-like portion 121 of the thermal radiator 12 by a predetermined distance d. The distance d is set to 1/3 or less of the band gap wavelength corresponding to the minimum value among the band gap energies of the semiconductors constituting the four semiconductor layers of the photoelectric conversion element 11. This distance d corresponds to a distance in which near-field light due to thermal radiation whose wavelength is in a range contributing to power generation in the photoelectric conversion element 11 can propagate to an object facing the thermal radiator. For example, in the InGaAs / InP photoelectric conversion element, the band gap wavelength is 1.68 μm, and the distance d is 0.560 μm or less. In the GaSb photoelectric conversion element, the band gap wavelength is 1.77 μm, and the distance d is 0.590 μm or less.

本実施形態における中間部材13の材料である無添加Siは、図3に示すように、0.5〜1000μmの全ての波長において、誘電率の実部が正の値を有する。これは、中間部材13の表面において表面波が伝播しないことを意味している。また、無添加Siは、1.1〜1.7μmの範囲内の波長を有する光を透過する。この波長範囲は、InGaAs/InP光電変換素子及びGaSb光電変換素子のいずれの例に関しても、光電変換素子において光電変換される波長範囲に含まれている。従って、熱輻射体12において熱輻射により発光する、1.1〜1.7μmの範囲内の波長を有する光は、中間部材13を透過して光電変換素子11に到達することができ、光電変換素子11で光電変換される。熱輻射体12のフォトニック結晶部122において増幅される光の波長をこの中間部材13を透過して光電変換素子11で光電変換される波長範囲内の波長に合わせるように、ロッド部材1221の周期aを設定する。   As shown in FIG. 3, additive-free Si, which is the material of the intermediate member 13 in the present embodiment, has a positive value of the real part of the dielectric constant at all wavelengths of 0.5 to 1000 μm. This means that surface waves do not propagate on the surface of the intermediate member 13. Further, the additive-free Si transmits light having a wavelength in the range of 1.1 to 1.7 μm. This wavelength range is included in the wavelength range in which photoelectric conversion is performed in the photoelectric conversion element for any example of the InGaAs / InP photoelectric conversion element and the GaSb photoelectric conversion element. Accordingly, light having a wavelength in the range of 1.1 to 1.7 μm that is emitted by thermal radiation in the thermal radiator 12 can pass through the intermediate member 13 and reach the photoelectric conversion element 11. It is photoelectrically converted. The period of the rod member 1221 is adjusted so that the wavelength of the light amplified in the photonic crystal part 122 of the thermal radiator 12 matches the wavelength within the wavelength range that is transmitted through the intermediate member 13 and photoelectrically converted by the photoelectric conversion element 11. Set a.

本実施形態の熱輻射光発電装置10の動作を説明する。外部の熱源により、熱輻射体12を加熱する。これにより、熱輻射体12は、加熱温度に対応したスペクトルを有する熱輻射光を生成する。この熱輻射光のうち、フォトニック結晶部122に設けられたロッド部材1221の周期aに対応する波長の光が増幅される。そのため、熱輻射体12から放出される熱輻射光のスペクトルは、周期aに対応する波長における強度が強められたものとなる。熱輻射体12から放出された熱輻射光のうち、周期aに対応する波長を含む、中間部材13を透過する波長の光は、光電変換素子11に到達し、光電変換される。このように周期aに対応する波長の光の強度が増幅されていることは、光電変換の出力密度及び効率を高めることに寄与する。   Operation | movement of the thermal radiation light power generation apparatus 10 of this embodiment is demonstrated. The heat radiator 12 is heated by an external heat source. Thereby, the heat radiator 12 produces | generates the heat radiation light which has a spectrum corresponding to heating temperature. Of the heat radiation light, light having a wavelength corresponding to the period a of the rod member 1221 provided in the photonic crystal portion 122 is amplified. Therefore, the spectrum of the heat radiation light emitted from the heat radiator 12 is enhanced in intensity at the wavelength corresponding to the period a. Of the heat radiation light emitted from the heat radiator 12, light having a wavelength that passes through the intermediate member 13 including the wavelength corresponding to the period a reaches the photoelectric conversion element 11 and is subjected to photoelectric conversion. The amplification of the intensity of light having a wavelength corresponding to the period a in this way contributes to increasing the output density and efficiency of photoelectric conversion.

また、熱輻射体12の板状部121の表面には、そのままでは熱輻射体12の外には放出されない近接場光が浸出している。このうち、中間部材13に対向する表面に浸出し、中間部材13を透過する波長を有する近接場光は、熱輻射体12と中間部材13が前記バンドギャップ波長の1/3以下という短い距離しか離間されていないため、熱輻射体12から中間部材13に伝播することができ、それにより光電変換素子11に到達して光電変換される。この点において、熱輻射光発電装置10は光電変換の出力密度が高い。   Further, near-field light that is not emitted out of the heat radiator 12 as it is is leached on the surface of the plate-like portion 121 of the heat radiator 12. Among these, the near-field light having a wavelength that leaches out on the surface facing the intermediate member 13 and passes through the intermediate member 13 is only a short distance of 1/3 or less of the band gap wavelength between the heat radiator 12 and the intermediate member 13. Since it is not spaced apart, it can propagate from the heat radiator 12 to the intermediate member 13, thereby reaching the photoelectric conversion element 11 and being subjected to photoelectric conversion. In this respect, the thermal radiation power generation apparatus 10 has a high output density of photoelectric conversion.

一方、中間部材13が無添加Siから成るため、中間部材13の表面には0.5〜1000μmの全ての波長において表面波が生成されない。そのため、熱輻射体12で生成された熱輻射光のうち、光電変換素子11において発電に寄与しないバンドギャップ波長よりも長波長の光が表面波として熱輻射体12から中間部材13に伝播することを防ぐことができる。光電変換素子11の第1n型半導体層1111は表面に表面波が存在可能な材料から成るが、表面波が中間部材13内を伝播することがないため、熱輻射体から生じる熱輻射によって該表面に表面波が誘起されることはない。従って、このような長波長の光は、熱輻射体12内に留まり、熱として熱輻射体12に吸収される。こうして熱輻射体12に吸収された熱の一部は、熱輻射により、中間部材13を透過して光電変換素子11で光電変換が可能な波長となるため、光電変換の効率は高くなる。   On the other hand, since the intermediate member 13 is made of additive-free Si, surface waves are not generated on the surface of the intermediate member 13 at all wavelengths of 0.5 to 1000 μm. Therefore, among the heat radiation light generated by the heat radiator 12, light having a wavelength longer than the band gap wavelength that does not contribute to power generation in the photoelectric conversion element 11 propagates from the heat radiator 12 to the intermediate member 13 as a surface wave. Can be prevented. The first n-type semiconductor layer 1111 of the photoelectric conversion element 11 is made of a material in which surface waves can exist on the surface. However, since the surface waves do not propagate in the intermediate member 13, the surface is generated by heat radiation generated from the heat radiator. Surface waves are not induced in Therefore, such long-wavelength light stays in the heat radiator 12 and is absorbed by the heat radiator 12 as heat. A part of the heat absorbed by the heat radiating body 12 thus passes through the intermediate member 13 by heat radiation and becomes a wavelength that can be subjected to photoelectric conversion by the photoelectric conversion element 11, so that the efficiency of photoelectric conversion is increased.

以上のように、本実施形態の熱輻射光発電装置10は、3つの要因により光電変換の出力密度及び効率が共に高くなる。特に、長波長の表面波が中間部材13の表面に伝播しないことによる光電変換の効率の向上は、従来の熱輻射光発電装置には無い顕著な効果である。   As described above, the thermal radiation light power generation apparatus 10 of the present embodiment increases both the output density and efficiency of photoelectric conversion due to three factors. In particular, the improvement in the efficiency of photoelectric conversion due to the fact that long-wavelength surface waves do not propagate to the surface of the intermediate member 13 is a remarkable effect that is not found in conventional thermal radiation light power generation devices.

以下、より具体的な例においてシミュレーションを行った結果を示す。まず、InGaAs/InP光電変換素子につき、以下の条件1でシミュレーションを行った。
第1n型半導体層1111:n-InP製、厚み0.1μm、電子添加密度2×1018cm-1
第2n型半導体層1112:n-InGaAs製、厚み0.3μm、電子添加密度1×1018cm-1
第2p型半導体層1122:p-InGaAs製、厚み2.0μm、正孔添加密度1×1017cm-1
第1p型半導体層1121:p-InP製、厚み0.1μm、正孔添加密度2×1018cm-1
板状部121:無添加Si製、厚み1.5μm。
フォトニック結晶部122:無添加Si製、厚み0.5μm、周期a0.4μm、ロッド部材1221の幅0.28μm。
熱輻射体12の加熱温度:1400K。
中間部材13:無添加Si製、厚みtはシミュレーション毎に異なる。
距離d:シミュレーション毎に異なる。
Hereinafter, the result of having performed simulation in a more specific example is shown. First, an InGaAs / InP photoelectric conversion element was simulated under the following condition 1.
First n-type semiconductor layer 1111: made of n-InP, thickness 0.1 μm, electron addition density 2 × 10 18 cm −1 .
Second n-type semiconductor layer 1112: made of n-InGaAs, thickness 0.3 μm, electron addition density 1 × 10 18 cm −1 .
Second p-type semiconductor layer 1122: made of p-InGaAs, thickness 2.0 μm, hole addition density 1 × 10 17 cm −1 .
First p-type semiconductor layer 1121: made of p-InP, thickness 0.1 μm, hole addition density 2 × 10 18 cm −1 .
Plate-like part 121: made of additive-free Si, thickness 1.5 μm.
Photonic crystal part 122: made of additive-free Si, thickness 0.5 μm, period a 0.4 μm, rod member 1221 width 0.28 μm.
Heating temperature of the heat radiator 12: 1400K.
Intermediate member 13: made of additive-free Si, thickness t varies from simulation to simulation.
Distance d: Different for each simulation.

条件1において、中間部材13の厚みtを10μmとし、距離dを(a)0.01μm(実施例1)及び(b)100μmを超える十分に長い距離(比較例1)とした場合について、熱輻射体12から光電変換素子11に達する熱輻射光のスペクトルを計算により求めた。また、光電変換素子11及び熱輻射体12は上記と同様の構成であって、中間部材13が無い場合について、板状部121と第1n型半導体層1111の距離(d'とする)を(c)0.01μm(比較例2)及び(d)100μmを超える十分に長い距離(比較例3)とした場合についても、同様の計算を行った。   In the case where the thickness t of the intermediate member 13 is 10 μm and the distance d is a sufficiently long distance (Comparative Example 1) exceeding (a) 0.01 μm (Example 1) and (b) 100 μm in Condition 1, thermal radiation The spectrum of heat radiation reaching the photoelectric conversion element 11 from the body 12 was obtained by calculation. Further, the photoelectric conversion element 11 and the heat radiator 12 have the same configuration as described above, and when the intermediate member 13 is not provided, the distance (d ′) between the plate-like portion 121 and the first n-type semiconductor layer 1111 is ( The same calculation was performed for c) 0.01 μm (Comparative Example 2) and (d) a sufficiently long distance exceeding 100 μm (Comparative Example 3).

この計算の結果を図4に示す。図4には、光電変換素子11における発電に寄与する熱輻射光の強度と、発電に寄与することなく光電変換素子11の各半導体層を通過する熱輻射光の強度(透過損失)と、中間部材13(実施例1及び比較例1)又は第1n型半導体層1111(比較例2及び3)の表面における表面波の強度を示した。併せて、各図に、1400Kの黒体輻射のスペクトルを示した。   The result of this calculation is shown in FIG. FIG. 4 shows the intensity of thermal radiation light that contributes to power generation in the photoelectric conversion element 11, the intensity (transmission loss) of thermal radiation light that passes through each semiconductor layer of the photoelectric conversion element 11 without contributing to power generation, The intensity of surface waves on the surface of the member 13 (Example 1 and Comparative Example 1) or the first n-type semiconductor layer 1111 (Comparative Examples 2 and 3) is shown. In addition, the spectrum of black body radiation at 1400K is shown in each figure.

実施例1では、バンドギャップ波長以下の波長領域において、1400Kの黒体輻射よりも大きい強度で発電に寄与する熱輻射光が光電変換素子11に達している。それに対して比較例1及び3ではいずれも、バンドギャップ波長以下の波長領域において、発電に寄与する熱輻射光の強度は1400Kの黒体輻射の強度よりも小さい。これは、実施例1では、熱輻射体12と中間部材13の距離dがバンドギャップ波長の1/3以下である0.01μmという十分に短いことにより、黒体輻射では熱輻射体12の外に放出されない近接場光が中間部材13を通して光電変換素子11に導入されるのに対して、比較例1及び3では距離d又はd'が100μmを超えて十分に長いため、近接場光が光電変換素子11に導入されないことによる。なお、比較例2は、発電に寄与する熱輻射光の強度が実施例1と同程度の強度を有し、近接場光が光電変換素子11に導入されていると考えられる。しかし、比較例2は次に述べる問題を有している。   In Example 1, thermal radiation light that contributes to power generation has reached the photoelectric conversion element 11 with an intensity greater than 1400K blackbody radiation in a wavelength region equal to or less than the band gap wavelength. On the other hand, in both Comparative Examples 1 and 3, the intensity of the thermal radiation that contributes to power generation is smaller than the intensity of the black body radiation of 1400K in the wavelength region below the band gap wavelength. This is because in Example 1, the distance d between the heat radiator 12 and the intermediate member 13 is sufficiently short, 0.01 μm, which is 1/3 or less of the band gap wavelength, so that black body radiation is outside the heat radiator 12. While the near-field light that is not emitted is introduced into the photoelectric conversion element 11 through the intermediate member 13, the distance d or d ′ is sufficiently long exceeding 100 μm in Comparative Examples 1 and 3, so that the near-field light is photoelectrically converted. This is because it is not introduced into the element 11. In Comparative Example 2, it is considered that the intensity of the heat radiation light contributing to power generation has the same intensity as that of Example 1, and the near-field light is introduced into the photoelectric conversion element 11. However, Comparative Example 2 has the following problem.

比較例2では、発電に寄与しない10μmを超える波長範囲において、表面波による吸収損失が生じるのに対して、実施例1では表面波による吸収損失は見られない。これは、実施例1では光電変換素子11と熱輻射体12の間に、0.5〜1000μmの全ての波長において誘電率の実部が正の値を有する無添加Siから成る中間部材13が設けられていることにより、表面波の生成が阻止されていることによる。   In Comparative Example 2, absorption loss due to surface waves occurs in a wavelength range exceeding 10 μm which does not contribute to power generation, whereas in Example 1, no absorption loss due to surface waves is observed. In the first embodiment, an intermediate member 13 made of additive-free Si having a positive real part of dielectric constant at all wavelengths of 0.5 to 1000 μm is provided between the photoelectric conversion element 11 and the thermal radiator 12 in the first embodiment. This is because the generation of surface waves is prevented.

以上のように、実施例1では近接場光を光電変換素子11に導入することで出力密度を高くしつつ、表面波による吸収損失を抑制することができるため発電の効率を高くすることができる。   As described above, in Example 1, by introducing near-field light into the photoelectric conversion element 11, it is possible to increase the power density and suppress the absorption loss due to the surface wave, thereby increasing the power generation efficiency. .

次に、厚みtが10μmである中間部材13を有する場合について距離dが異なる複数の例につき、発電に寄与する熱輻射光及び損失となる熱輻射光の強度を全波長について積算した値を計算で求めた結果を図5(a)に示す。同様に、中間部材13が無い場合について、距離d'が異なる複数の例につき同様の計算を行った結果を図5(b)に示す。図5(a)より、熱輻射体から生じる熱輻射光の全体の強度の積算値は、バンドギャップ波長の1/3の波長(同図中に「λgap/3」と記載)に対応する長さよりも距離dが長い場合にはほとんど変わらないのに対して、λgap/3よりも距離dが短い場合には、距離dが短くなるに従って増加することがわかる。これは、バンドギャップ波長の1/3の波長よりも距離dを短くすることにより、中間部材13を介して近接場光を光電変換素子11に導入することができることを意味している。 Next, for the case where the intermediate member 13 having a thickness t of 10 μm is provided, a value obtained by integrating the intensities of the heat radiation light contributing to power generation and the heat radiation light causing loss for all wavelengths is calculated for a plurality of examples having different distances d. FIG. 5 (a) shows the result obtained in the above. Similarly, FIG. 5B shows the result of the same calculation performed for a plurality of examples having different distances d ′ when the intermediate member 13 is not provided. From FIG. 5 (a), the integrated value of the total intensity of the heat radiation generated from the heat radiator corresponds to 1/3 of the band gap wavelength (denoted as “λ gap / 3” in the figure). When the distance d is longer than the length, it hardly changes, whereas when the distance d is shorter than λ gap / 3, it increases as the distance d becomes shorter. This means that near-field light can be introduced into the photoelectric conversion element 11 through the intermediate member 13 by shortening the distance d to be shorter than 1/3 of the band gap wavelength.

図5(a)と(b)を対比すると、距離d又はd'が0.2μmよりも小さい範囲において、中間部材13を有する場合よりも中間部材13が無い場合の方が、光電変換素子11中で熱輻射体12に最も近い第1n型半導体層1111における吸収損失が高くなっていることがわかる。これは、中間部材13が無い場合には第1n型半導体層1111の表面に長波長の表面波が伝播することによる損失が生じるのに対して、中間部材13を有する場合にはそのような損失が生じないことによる。また、距離dが0.2μmよりも小さい範囲は、中間部材13が無い場合(図5(b))において第1n型半導体層1111の吸収損失が熱輻射体から生じる熱輻射光の全体の強度の積算値の10%以上となる範囲とも対応しており、中間部材13を挿入することで損失の割合を減少させることができることがわかる。   5A and 5B, when the distance d or d ′ is smaller than 0.2 μm, the case where there is no intermediate member 13 is larger in the photoelectric conversion element 11 than when the intermediate member 13 is provided. It can be seen that the absorption loss in the first n-type semiconductor layer 1111 closest to the heat radiator 12 is high. This is because when there is no intermediate member 13, a loss occurs due to propagation of a long-wave surface wave on the surface of the first n-type semiconductor layer 1111, whereas when the intermediate member 13 is provided, such a loss occurs. This is because it does not occur. Further, the range where the distance d is smaller than 0.2 μm is that the absorption loss of the first n-type semiconductor layer 1111 in the absence of the intermediate member 13 (FIG. 5B) is the overall intensity of the heat radiation light generated from the heat radiator. This also corresponds to a range of 10% or more of the integrated value, and it can be seen that the loss ratio can be reduced by inserting the intermediate member 13.

図6に、中間部材13の厚みtが0.1μm、1μm、10μm及び100μmの場合についてそれぞれ、熱輻射体12から放出される熱輻射光のうち発電に寄与するものの強度の割合(発電寄与率)を複数の距離dを対象として計算で求めた結果を示す。同図には併せて、中間部材13が無い場合について、複数の距離d'を対象として同様の計算を行った結果を示す。中間部材13が有る場合と無い場合を、距離dと距離d'が同じであるときについて対比すると、中間部材13の厚みがいずれの場合にも、距離dが0.2μm以下の領域において、中間部材13が無い場合との発電寄与率の差が顕著となる。また、距離dが0.2μm以下の領域において、中間部材13の厚みが1μm及び10μmの場合には、0.1μm及び100μmの場合よりも、発電寄与率がやや高くなる。これは、厚みtが小さくなるほど、光電変換素子11の表面に生成される表面波に、熱輻射体12から中間部材13を超えて直接結合する長波長の光の比率が高くなることと、厚みtが大きくなるほど中間部材13において光が吸収される比率が高くなることから、これら2つの発電寄与率の減少の要因が相対的に小さい、厚みtが1μm及び10μmの場合に発電寄与率が高くなっていると考えられる。   FIG. 6 shows the proportion of the intensity of the heat radiation emitted from the thermal radiator 12 that contributes to power generation (power generation contribution ratio) when the thickness t of the intermediate member 13 is 0.1 μm, 1 μm, 10 μm, and 100 μm. Shows the result of calculation for a plurality of distances d. The figure also shows the result of performing the same calculation for a plurality of distances d ′ when there is no intermediate member 13. When the case where the intermediate member 13 is present is compared with the case where the distance d is the same as the distance d ′, the intermediate member 13 is in the region where the distance d is 0.2 μm or less regardless of the thickness of the intermediate member 13. The difference in the power generation contribution rate from the case of no 13 is significant. Further, in the region where the distance d is 0.2 μm or less, the power generation contribution rate is slightly higher when the thickness of the intermediate member 13 is 1 μm and 10 μm than when the thickness is 0.1 μm and 100 μm. This is because, as the thickness t decreases, the ratio of long-wavelength light directly coupled from the heat radiator 12 to the surface wave generated on the surface of the photoelectric conversion element 11 beyond the intermediate member 13 increases. Since the ratio of light absorption in the intermediate member 13 increases as t increases, the power generation contribution ratio increases when the thickness t is 1 μm and 10 μm. It is thought that it has become.

図7に、第1n型半導体層1111の電子の添加量が(a)1×1019cm-3、(b)1×1018cm-3、及び(c)1×1017cm-3の場合について、厚み10μmの中間部材13が有る場合と無い場合の発電寄与率を計算で求めた結果を示す。電子の添加量が最も多い(a)では、距離dを小さくすると発電寄与率が(b)及び(c)よりもやや低くなっている。これは、電子が多くなることによって第1n型半導体層1111において光の吸収による損失が大きくなることによる。それ以外の点では、第1n型半導体層1111の電子の添加量の相違による影響はほとんど見られず、いずれの場合にも、距離dが0.2μmよりも小さいときに、中間部材13が無い場合よりも発電寄与率が顕著に高くなっている。 FIG. 7 shows that the addition amount of electrons in the first n-type semiconductor layer 1111 is (a) 1 × 10 19 cm −3 , (b) 1 × 10 18 cm −3 , and (c) 1 × 10 17 cm −3 . The result of having calculated | required the electric power generation contribution rate with and without the case where the intermediate member 13 with a thickness of 10 μm is present is shown. In (a) with the largest amount of added electrons, the power generation contribution rate is slightly lower than in (b) and (c) when the distance d is reduced. This is because loss due to light absorption increases in the first n-type semiconductor layer 1111 due to an increase in electrons. In other respects, there is almost no influence due to the difference in the amount of electrons added to the first n-type semiconductor layer 1111. In any case, when the distance d is smaller than 0.2 μm, the intermediate member 13 is not present. The power generation contribution rate is significantly higher than that.

次に、GaSb光電変換素子につき、以下の条件2について、図5及び図6と同様の計算を行った。
第1n型半導体層1111:n-GaSb製、厚み0.05μm、電子添加密度2×1018cm-1
第2n型半導体層1112:n-GaSb製、厚み0.3μm、電子添加密度1×1018cm-1
第2p型半導体層1122:p-GaSb製、厚み2.0μm、正孔添加密度1×1017cm-1
第1p型半導体層1121:p-GaSb製、厚み0.05μm、正孔添加密度2×1018cm-1
板状部121:無添加Si製、厚み1.5μm。
フォトニック結晶部122:無添加Si製、厚み0.5μm、周期a0.4μm、ロッド部材1221の幅0.28μm。
熱輻射体12の加熱温度:1400K。
中間部材13:無添加Si製、厚み10μm。
距離d:複数の値。
Next, the calculation similar to FIG.5 and FIG.6 was performed about the following conditions 2 about the GaSb photoelectric conversion element.
First n-type semiconductor layer 1111: made of n-GaSb, thickness 0.05 μm, electron addition density 2 × 10 18 cm −1 .
Second n-type semiconductor layer 1112: made of n-GaSb, thickness 0.3 μm, electron addition density 1 × 10 18 cm −1 .
Second p-type semiconductor layer 1122: made of p-GaSb, thickness 2.0 μm, hole addition density 1 × 10 17 cm −1 .
First p-type semiconductor layer 1121: made of p-GaSb, thickness 0.05 μm, hole addition density 2 × 10 18 cm −1 .
Plate-like part 121: made of additive-free Si, thickness 1.5 μm.
Photonic crystal part 122: made of additive-free Si, thickness 0.5 μm, period a 0.4 μm, rod member 1221 width 0.28 μm.
Heating temperature of the heat radiator 12: 1400K.
Intermediate member 13: made of additive-free Si, thickness 10 μm.
Distance d: Multiple values.

図8に示すように、条件2においても条件1の場合と同様に、距離dがバンドギャップ波長の1/3よりも短い範囲内で、距離dが短くなるほど、発電に寄与する熱輻射光の強度が大きくなる。また、距離d又はd'が0.2μmよりも小さい範囲において、中間部材13を有する場合よりも中間部材13が無い場合の方が、光電変換素子11中で熱輻射体12に最も近い第1n型半導体層1111における吸収損失が高くなっている。   As shown in FIG. 8, in the condition 2 as well as in the case of the condition 1, the shorter the distance d is within the range where the distance d is shorter than 1/3 of the band gap wavelength, the more the heat radiation light contributing to power generation becomes. Strength increases. Further, in the range where the distance d or d ′ is smaller than 0.2 μm, the first n-type closest to the heat radiator 12 in the photoelectric conversion element 11 when the intermediate member 13 is not provided is more than when the intermediate member 13 is provided. The absorption loss in the semiconductor layer 1111 is high.

また、図9に示すように、条件2においても条件1の場合と同様に、距離d又はd'が0.2μmよりも小さい範囲において、中間部材13が有る場合と無い場合の発電寄与率の差が顕著となる。   Further, as shown in FIG. 9, in the condition 2 as well as in the case of the condition 1, the difference in the power generation contribution ratio between the case where the intermediate member 13 is present and the case where the intermediate member 13 is not present in the range where the distance d or d ′ is smaller than 0.2 μm. Becomes prominent.

図10に、光電変換素子11、熱輻射体12及び中間部材13以外の構成要素を含む、本発明の熱輻射光発電装置の全体構成の一例を示す。この例では、熱輻射体12を支持する支持基体(支持基板)14を用いている。熱輻射体12に面する支持基体14の表面には、該表面から支持基体14内に向かって空洞141が複数設けられており、最近接の空洞141同士の間に柱状部142が形成されている。熱輻射体12は、柱状部142においてのみ、支持基体14と接している。このような構成により、空洞141の無い支持基体で熱輻射体12を支持する場合よりも、支持基体14における熱伝導の損失を小さくすることができるうえに、支持基体14の熱膨張による熱輻射光発電装置の変形が生じることを抑えることができる。空洞141は、複数の溝を平行に設けたものや、複数の孔を2次元状に配置したものを用いることができる。熱源として太陽光を用いる場合には、支持基体14の材料には、太陽光を透過し、且つウエットエッチングにより空洞141及び柱状部142を容易に作製することができるという点で、SiO2を好適に用いることができる。 In FIG. 10, an example of the whole structure of the thermal radiation light-emitting power generator of this invention containing components other than the photoelectric conversion element 11, the heat radiator 12, and the intermediate member 13 is shown. In this example, a support base (support substrate) 14 that supports the heat radiator 12 is used. A plurality of cavities 141 are provided on the surface of the support base 14 facing the heat radiator 12 from the surface into the support base 14, and a columnar portion 142 is formed between the nearest cavities 141. Yes. The heat radiator 12 is in contact with the support base 14 only at the columnar portion 142. With such a configuration, it is possible to reduce the heat conduction loss in the support base 14 as compared with the case where the heat radiator 12 is supported by the support base without the cavity 141, and also the heat radiation due to the thermal expansion of the support base 14. The deformation of the photovoltaic device can be suppressed. As the cavity 141, one provided with a plurality of grooves in parallel or one provided with a plurality of holes arranged two-dimensionally can be used. In the case where sunlight is used as the heat source, SiO 2 is preferably used as the material of the support base 14 because it transmits sunlight and can easily form the cavity 141 and the columnar portion 142 by wet etching. Can be used.

支持基体14の上面の縁(空洞141が設けられた領域の外側)の上にはスペーサ15が設けられており、スペーサ15の上に中間部材13が載置されている。このスペーサ15の厚みにより、熱輻射体12と中間部材13の距離dを設定することができる。   A spacer 15 is provided on the edge of the upper surface of the support base 14 (outside the region where the cavity 141 is provided), and the intermediate member 13 is placed on the spacer 15. The distance d between the heat radiator 12 and the intermediate member 13 can be set by the thickness of the spacer 15.

本発明は上記の実施形態には限定されない。
例えば、上記各実施形態では、光電変換素子はn型半導体から成る層とp型半導体から成る層をそれぞれ2層ずつ有しているが、それらが1層ずつ、あるいは3層以上ずつであってもよい。また、n型又はp型の半導体から成る1層の半導体層と金属層を接合した構成を有する、ショットキー接合を利用した光電変換素子を用いてもよい。光電変換素子の各半導体層の材料は上記の例には限定されず、通常の光電変換素子(太陽電池)に用いられている光電変換層の半導体の材料であれば、適用することができる。熱輻射体12の材料も上記のものには限定されない。さらには、中間部材13の材料も上記のものには限定されず、波長0.5〜1000μmの光に関して誘電率の実部が正の値を有し、且つ前記バンドギャップ波長以下の波長の光(すなわち、光電変換素子で発電に寄与する波長の光)を透過する材料であればよい。
The present invention is not limited to the above embodiment.
For example, in each of the embodiments described above, the photoelectric conversion element has two layers each composed of an n-type semiconductor and two layers composed of a p-type semiconductor. However, these are one layer each, or three layers or more. Also good. Alternatively, a photoelectric conversion element using a Schottky junction and having a structure in which a single semiconductor layer made of an n-type or p-type semiconductor and a metal layer are joined may be used. The material of each semiconductor layer of the photoelectric conversion element is not limited to the above example, and any semiconductor material of a photoelectric conversion layer used in a normal photoelectric conversion element (solar cell) can be applied. The material of the heat radiator 12 is not limited to the above. Furthermore, the material of the intermediate member 13 is not limited to the above, and the real part of the dielectric constant has a positive value with respect to light having a wavelength of 0.5 to 1000 μm, and light having a wavelength equal to or less than the band gap wavelength (that is, Any material that transmits light having a wavelength that contributes to power generation by the photoelectric conversion element may be used.

熱輻射体が有するフォトニック結晶構造は、上記の例には限定されず、例えば図11(a)に示した、板状の母材1222Aに複数の空孔1221Aを2次元状に周期的に設けたものや、空孔1221Aの代わりに母材1222Aとは屈折率が異なる部材を埋め込んだものを用いることができる。あるいは、図11(b)に示すように、柱状部材1221Bを2次元状に配置したものをフォトニック結晶構造として用いてもよい。さらには、図11(c)に示すように、ロッド部材1221Cを井桁状に、3次元状に組み合わせたものをフォトニック結晶構造として用いてもよい。また、上記の例では熱輻射体12の一部のみをフォトニック結晶部122としたが、熱輻射体の全体にフォトニック結晶構造を形成してもよい。   The photonic crystal structure of the heat radiator is not limited to the above example. For example, a plurality of holes 1221A are periodically and two-dimensionally formed in a plate-like base material 1222A shown in FIG. A member provided with a member having a refractive index different from that of the base material 1222A instead of the hole 1221A can be used. Alternatively, as shown in FIG. 11B, a two-dimensional arrangement of columnar members 1221B may be used as the photonic crystal structure. Furthermore, as shown in FIG. 11 (c), a rod member 1221C may be used as a photonic crystal structure by combining the rod members 1221C in a three-dimensional pattern. In the above example, only part of the heat radiator 12 is the photonic crystal portion 122, but a photonic crystal structure may be formed on the entire heat radiator.

本発明の熱輻射光発電装置では、熱輻射体がフォトニック結晶構造を有することは必須ではなく、図12に示すように、フォトニック結晶構造を有しない熱輻射体12Aを用いた構成であってもよい。このような構成を有する熱輻射光発電装置10Aでは、中間基板を透過する波長範囲内の近接場光を光電変換することができることにより出力密度を高くすることができ、バンドギャップ波長よりも長波長の光が表面波として熱輻射体12Aから中間部材13に伝播することを防ぐことができることにより光電変換の効率が高くなる。   In the thermal radiation light-emitting power generation device of the present invention, it is not essential that the thermal radiator has a photonic crystal structure, and as shown in FIG. 12, the thermal radiator 12A does not have a photonic crystal structure. May be. In the thermal radiation power generation device 10A having such a configuration, the output density can be increased by being able to photoelectrically convert near-field light within the wavelength range that transmits the intermediate substrate, and the wavelength is longer than the band gap wavelength. Can be prevented from propagating from the heat radiator 12A to the intermediate member 13 as surface waves, so that the efficiency of photoelectric conversion is increased.

10、10A…熱輻射光発電装置
11…光電変換素子
110…光電変換部
1111…第1n型半導体層
1112…第2n型半導体層
1121…第1p型半導体層
1122…第2p型半導体層
1131…第1電極
1132…第2電極
12、12A…熱輻射体
121…板状部
122…フォトニック結晶部
1221、1221C…ロッド部材
1221A…空孔
1221B…柱状部材
1222A…母材
13…中間部材
14…支持基体
141…空洞
142…柱状部
15…スペーサ
DESCRIPTION OF SYMBOLS 10, 10A ... Thermal radiation light generator 11 ... Photoelectric conversion element 110 ... Photoelectric conversion part 1111 ... 1st n-type semiconductor layer 1112 ... 2n-type semiconductor layer 1121 ... 1st p-type semiconductor layer 1122 ... 2nd p-type semiconductor layer 1131 ... 1st 1 electrode 1132 ... 2nd electrode 12, 12A ... thermal radiator 121 ... plate-like part 122 ... photonic crystal part 1221, 1221C ... rod member 1221A ... hole 1221B ... columnar member 1222A ... base material 13 ... intermediate member 14 ... support Base 141 ... Cavity 142 ... Columnar portion 15 ... Spacer

Claims (6)

a) 熱輻射体と、
b) 前記熱輻射体から離間して配置された、1層又は複数層の半導体層を有する光電変換素子と、
c) 前記熱輻射体と前記光電変換素子の間に、該光電変換素子に接し、前記1層の半導体層を構成する半導体のバンドギャップエネルギーに対応する波長又は前記複数層の各半導体層を構成する半導体のバンドギャップエネルギーのうちの最小のものに対応する波長であるバンドギャップ波長の1/3以下の距離だけ前記熱輻射体から離間して配置された、波長0.5〜1000μmの光に関して誘電率の実部が正の値を有し且つ前記光電変換素子において光電変換される波長範囲内の少なくとも一部の波長の光を透過する材料から成る中間部材と
を備えることを特徴とする熱輻射光発電装置。
a) a heat radiator;
b) a photoelectric conversion element having one or more semiconductor layers disposed apart from the heat radiator;
c) Between the thermal radiator and the photoelectric conversion element, a wavelength corresponding to a band gap energy of a semiconductor constituting the one semiconductor layer, or each semiconductor layer of the plurality of layers is in contact with the photoelectric conversion element Dielectric constant for light with a wavelength of 0.5 to 1000 μm arranged at a distance of 1/3 or less of the bandgap wavelength, which is the wavelength corresponding to the smallest of the semiconductor bandgap energy And an intermediate member made of a material that transmits light of at least a part of the wavelength within a wavelength range that is photoelectrically converted in the photoelectric conversion element. Power generation device.
前記熱輻射体と前記中間部材の距離が0.2μm以下とすることを特徴とする請求項1に記載の熱輻射光発電装置。   The thermal radiation power generation device according to claim 1, wherein a distance between the thermal radiator and the intermediate member is 0.2 μm or less. 前記熱輻射体と前記中間部材の距離が、前記中間部材を配置することなく前記熱輻射体と前記光電変換素子を離間して配置した構成において、該熱輻射体で生成される熱輻射光の全エネルギーに占める、該光電変換素子が表面波を吸収することにより生じるエネルギーの損失の割合が10%となる場合の該熱輻射体と該光電変換素子の距離よりも短いことを特徴とする請求項1又は2に記載の熱輻射光発電装置。   In the configuration in which the thermal radiator and the photoelectric conversion element are arranged apart from each other without disposing the intermediate member, the distance between the thermal radiator and the intermediate member is the amount of thermal radiation generated by the thermal radiator. Claims characterized by being shorter than the distance between the thermal radiator and the photoelectric conversion element when the ratio of the loss of energy caused by the photoelectric conversion element absorbing surface waves in the total energy is 10%. Item 3. The thermal radiation light power generation device according to Item 1 or 2. 前記中間部材の材料の屈折率が、前記光電変換素子において光電変換される波長範囲内において3以上であることを特徴とする請求項1〜3のいずれかに記載の熱輻射光発電装置。   The thermal radiation power generator according to any one of claims 1 to 3, wherein a refractive index of a material of the intermediate member is 3 or more within a wavelength range in which photoelectric conversion is performed in the photoelectric conversion element. 前記熱輻射体が、前記中間部材が透過する波長の光を増幅するフォトニック結晶構造を有することを特徴とする請求項1〜4のいずれかに記載の熱輻射光発電装置。   The thermal radiation generator according to claim 1, wherein the thermal radiator has a photonic crystal structure that amplifies light having a wavelength transmitted by the intermediate member. 前記熱輻射体が、表面に柱状部が複数形成された支持基体の該柱状部に載置されていることを特徴とする請求項1〜5のいずれかに記載の熱輻射光発電装置。   The thermal radiation generator according to any one of claims 1 to 5, wherein the thermal radiator is placed on the columnar portion of a support base having a plurality of columnar portions formed on a surface thereof.
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Cited By (3)

* Cited by examiner, † Cited by third party
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JP2020515067A (en) * 2017-03-24 2020-05-21 三菱電機株式会社 Thermophotovoltaic energy converter and method of manufacturing thermophotovoltaic energy converter
KR20200099025A (en) * 2019-02-13 2020-08-21 주식회사 헥사솔루션 A thermal radiation body for cooling heating element and method for manufacturing the same
CN115163436A (en) * 2022-07-21 2022-10-11 哈尔滨工业大学 Multi-effect space power supply device and method combined with near-field thermal photovoltaic system

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020515067A (en) * 2017-03-24 2020-05-21 三菱電機株式会社 Thermophotovoltaic energy converter and method of manufacturing thermophotovoltaic energy converter
KR20200099025A (en) * 2019-02-13 2020-08-21 주식회사 헥사솔루션 A thermal radiation body for cooling heating element and method for manufacturing the same
KR102204172B1 (en) * 2019-02-13 2021-01-18 주식회사 헥사솔루션 A thermal radiation body for cooling heating element and method for manufacturing the same
US11316059B2 (en) 2019-02-13 2022-04-26 Hexasolution Co., Ltd. Thermal radiation body for cooling heating element and method for manufacturing the same
CN115163436A (en) * 2022-07-21 2022-10-11 哈尔滨工业大学 Multi-effect space power supply device and method combined with near-field thermal photovoltaic system

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