JP2018141494A - Mounting structure of diaphragm valve and attaching/detaching method of diaphragm valve - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a mounting structure of a diaphragm valve and an attaching/detaching method of the diaphragm valve capable of constituting the diaphragm valve by easily and accurately mounting a valve unit including a diaphragm to an arbitrary mounted side, replacing and maintaining the diaphragm by easily detaching the valve unit from the mounted side, increasing a speed in switching a flow channel by minimizing a dead volume, and improving durability.SOLUTION: A valve mounting portion 10 including a circular recessed portion 12 formed on a mounted body 2 and having an opening portion 11, a valve seat face 13, an annular bearing face 14, and a female screw portion 15, is constituted. In the valve mounting portion, a diaphragm assembly unit 3 in which a diaphram 30 is assembled is mounted, a male screw portion 55 at a lower portion of an actuator 4 is engaged with the female screw portion 15, and a lower end face 55a of the male screw portion and the bearing face are fixed through the diaphragm assembly unit in a state of holding an outer periphery of the diaphragm to constitute an outer peripheral seal portion 65.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a diaphragm valve mounting structure and a diaphragm valve attaching / detaching method used mainly in a gas supply piping system of a semiconductor manufacturing apparatus, a solar cell manufacturing apparatus, and a liquid crystal manufacturing apparatus.

  Conventionally, in a gas supply piping system such as a semiconductor manufacturing apparatus, a diaphragm valve is used as a part of a pipe line as an on-off valve because it suppresses generation of particles and can be installed in a narrow pipe line space. Often.

As a diaphragm valve used in this type of gas supply piping system, for example, a valve of Patent Document 1 is disclosed. In this valve, a valve seat seat mounting portion is provided at the upper opening edge of the gas inflow passage vertically provided in the valve box body, and the valve seat seat is fixed to the mounting portion by caulking. Yes. On the other hand, the diaphragm, which is a valve body, is mounted in a state where the peripheral edge thereof is pressed against the peripheral edge of the bottom surface in the body by the bonnet, and is fixed by tightening the connecting portion outer cylinder of the driving portion to the bonnet. The body is integrated with the flow path block by an external screw nut.
In this valve, the diaphragm is operated by pressing a presser piece mounted so as to be movable up and down, and the flow path is provided so as to be opened and closed by contacting and separating the diaphragm from the valve seat.

In the metal diaphragm type valve of Patent Document 2, a bonnet nut is screwed onto a body that is a valve box, and a stem is supported on the bonnet nut so as to be movable up and down. A seat holder is attached to the lower end of the stem, and a seat is mounted on the lower side of the seat holder. A metal diaphragm is mounted between the stem and the seat holder while being welded to the deflection limiter. The outer peripheral edge of this diaphragm is sandwiched between the body and the bonnet nut, It is provided in a structure in which the diaphragm is supported by clamping by tightening.
In this valve, the seat holder is moved up and down with respect to the bonnet nut together with the stem, and the fluid passage is opened or closed by bringing the seat on the lower side of the seat holder into contact with or separating from the valve seat provided inside the body.

Japanese Patent Laid-Open No. 10-47514 Japanese Patent No. 4286934

  Patent Document 1 and Patent Document 2 are integrated diaphragm valves. In these valves, a valve unit using a diaphragm is attached to a valve box (body), and each valve unit is a valve box. It is not versatile because it is intended to be attached and detached.

For this reason, the detachability of the valve unit to the valve box is poor. For example, in Patent Document 1, the external thread nut is removed, the valve body is removed from the flow path block, the screwing of the drive unit is loosened, and the hood is It is necessary to replace the diaphragm and valve seat, or to perform internal maintenance in a state where it has been removed.
In Patent Document 2, after exchanging the diaphragm and maintaining the inside of the valve, it is necessary to align the lifting and lowering parts such as the stem and the seat holder and the diaphragm using a dedicated jig, and accurate assembly work is difficult. It has become.

  Further, in the case of a structure in which a valve seat is embedded in the upper end opening side of the gas inflow passage on the body side as in the valve of Patent Document 1, the thickness for accommodating the valve seat increases, and the vertical direction is accordingly increased The flow path will be extended. As a result, the dead volume (dead space) of the flow path increases and the fluid tends to remain, and there is a problem that the switching time of the flow path becomes long.

  When the diaphragm is welded to the stainless steel sheet holder side as in Patent Document 2, for example, when the diaphragm is stainless steel, the durability is poor, and the number of times that the valve can be repeatedly opened and closed is reduced. In order to avoid this, for example, when the diaphragm is formed of a highly durable material such as a Co—Ni alloy, the diaphragm and the sheet holder become different metals, and it becomes difficult to weld them firmly. On the other hand, it is conceivable to provide both the diaphragm and the sheet holder side with a Co—Ni alloy, but the cost increases because the Co—Ni alloy is expensive.

  The present invention has been developed to solve the above-described problems, and the object of the present invention is to configure a diaphragm valve by easily and accurately mounting a valve unit including a diaphragm on an arbitrary mounting side. On the other hand, the valve unit can be easily removed from the mounted side, the diaphragm can be replaced and maintenance can be performed, and the dead volume is kept to a minimum, the flow path switching speeds up, and the diaphragm valve has excellent durability. And a method for attaching and detaching the diaphragm valve.

  In order to achieve the above object, the invention according to claim 1 includes a circular recess having an opening provided in a mounted body, a valve seat surface on the bottom side of the circular recess, and an annular position rising from an outer peripheral side of the bottom. A valve mounting portion is provided that includes an annular bearing surface formed on the inner surface of the circular recessed portion and an internal thread portion for screwing the actuator formed toward the opening side of the circular recess. The valve mounting portion includes a diaphragm. A diaphragm suspension unit with a built-in diaphragm is inserted, and the male thread formed on the lower part of the actuator is screwed into the female thread. This is a diaphragm valve mounting structure in which an outer peripheral seal portion is formed by fixing the outer periphery of the diaphragm in a sandwiched state via a diaphragm built-in unit.

  The invention according to claim 2 uses the outer peripheral side of the lower end surface of the bonnet provided on the outer peripheral side of the diaphragm built-in unit as a diaphragm restraining surface, and the diaphragm is sandwiched between the diaphragm restraining surface and the support surface, and This is a diaphragm valve mounting structure in which the diaphragm holding surface is located outside the inner peripheral edge of the support surface.

  The invention according to claim 3 is the diaphragm valve mounting structure in which the diaphragm built-in unit is inserted into the circular recess, and the upper end of the diaphragm built-in unit is faced above the opening of the circular recess.

  The invention according to claim 4 is a diaphragm valve mounting structure in which a plurality of circular recesses are provided in a body to be mounted, and these circular recesses serve as valve mounting parts.

  The invention according to claim 5 is that a diaphragm suspension type diaphragm assembly unit in which a diaphragm is incorporated is inserted into a valve mounting portion provided in a circular recess of an attached body, and then a female thread portion of the circular recess Screw the male screw provided at the lower part of the actuator and press the bonnet provided at the outer peripheral position of the diaphragm assembly unit with the lower end surface of this male screw portion to provide the lower end surface of the bonnet and the inner peripheral side of the circular recess The outer periphery of the diaphragm is clamped between the bearing surface and the outer periphery of the diaphragm is fixed in a sealed state. On the other hand, when removing the diaphragm from the mounted body, loosen the screw and female thread of the actuator. The actuator is removed from the circular recess, and then a part of the diaphragm built-in unit inserted in the circular recess is picked and removed. Ramubarubu is a detachable way.

  In the invention according to claim 6, when the diaphragm valve is a normally closed type, the actuator is screwed and attached to the circular recess while the valve is opened by supplying operating air to the actuator from the outside, or the actuator is mounted on the circular recess. This is a method of attaching / detaching a diaphragm valve in which a screw is further loosened and removed.

  According to the first aspect of the present invention, the diaphragm built-in unit can be accurately and easily mounted by simply inserting the diaphragm built-in unit into the valve mounting portion of an arbitrary mounted body and screwing the actuator into the mounted body. The diaphragm valve can be set. Since it is not necessary to weld the diaphragm, it is excellent in durability, and the fluid is reliably prevented by installing the diaphragm built-in unit while ensuring high sealing performance. When removing the diaphragm, the screwing of the actuator can be loosened and removed from the mounted body, the diaphragm built-in unit can be lifted upward and removed from the mounted side, and the diaphragm can be easily replaced and maintenance can be performed. Since the valve seat surface is provided on the bottom side of the circular recess of the mounted body and this valve seat surface is provided so that it can be opened and closed with a diaphragm suspension type diaphragm built-in unit, the volume on the primary side of the valve seat surface is increased. The dead volume can be reduced by minimizing it, and the switching of the flow path can be speeded up by suppressing the retention of fluid.

  According to the invention of claim 2, the diaphragm is sandwiched and positioned between the diaphragm restraining surface and the support surface, and the diaphragm restraining surface is located outside the inner peripheral edge of the support surface. The area when the diaphragm is sandwiched is reduced to increase the surface pressure, and the sealing performance of the outer peripheral seal portion to the diaphragm is improved to prevent leakage.

  According to the third aspect of the present invention, if the actuator is loosened and removed from the mounted body, the upper end of the diaphragm built-in unit can be exposed above the opening of the circular recess and exposed to the outside. By picking out the upper end of the diaphragm built-in unit in the state, the diaphragm built-in unit can be easily taken out without touching the gas contact part.

  According to invention of Claim 4, the diaphragm valve unit which connected the several diaphragm built-in unit to the one to-be-attached body can be comprised, and each diaphragm built-in unit can be controlled separately and a flow path can be opened and closed. A dead valve is suppressed as much as possible, while providing an arbitrary internal flow path in the mounted body while making the whole compact, and providing a valve mounting portion on the mounted body provides a diaphragm valve unit with a high degree of freedom due to excellent workability. It becomes possible.

  According to the fifth aspect of the invention, when the diaphragm built-in unit is mounted, the diaphragm built-in unit is inserted into the valve mounting portion of the mounted body, and the actuator is fixed accurately and easily by simply screwing the actuator into the mounted body. Then, the diaphragm valve can be set. On the other hand, when removing the diaphragm built-in unit, if the screwing of the actuator is loosened and removed from the mounted body, it can be easily removed from the mounted side by picking up the diaphragm built-in unit and lifting it upward.

  According to the sixth aspect of the present invention, when the actuator is attached or detached, the transmission of the force from the actuator to the diaphragm built-in unit is interrupted to open the valve so that the load is applied to the valve body seal side. The actuator can be attached or detached without adding a valve, and the valve can be safely assembled or disassembled while preventing the valve body seal side from being damaged or damaging the diaphragm.

It is a longitudinal cross-sectional view which shows an example of a diaphragm valve. FIG. 2 is a separated sectional view of the diaphragm valve of FIG. 1. It is an expanded sectional view which shows the support surface vicinity in FIG. It is a longitudinal cross-sectional view which shows the other example of a diaphragm valve.

  Hereinafter, a diaphragm valve mounting structure according to the present invention will be described in detail with reference to the drawings. FIG. 1 is a longitudinal sectional view showing an example of a diaphragm valve provided by the diaphragm valve mounting structure of the present invention, and FIG. 2 is an exploded sectional view of the diaphragm valve of FIG.

  In the figure, a diaphragm valve 1 includes a mounted body 2 formed of a metal material such as stainless steel, a diaphragm built-in unit (hereinafter simply referred to as a built-in unit) 3 mounted in the mounted body 2, and an actuator 4. The built-in unit 3 is operated by the actuator 4 so that the valve can be opened and closed.

  The mounted body 2 is provided in an arbitrary shape, and is formed in, for example, a block shape, a long shape, or an annular shape. FIG. 1 shows a part of the mounting unit 3 and the actuator 4 in the vicinity of the mounting portion of the mounted body 2, which are mounted on a valve mounting portion 10 provided on the mounted body 2. Are provided with a circular recess 12 having an opening 11, a valve seat surface 13, a support surface 14, and a female screw portion 15.

  The opening 11 of the valve mounting portion 10 is provided with a diameter that allows the built-in unit 3 to be inserted, and a circular recess 12 is formed following the opening 11. The circular recess 12 is provided at a diameter that can be fitted to the lower outer periphery of the bonnet 16 provided at the outer peripheral position of the built-in unit 3 to be described later, and the bonnet 16 can be inserted in a centered state by the fitting. Yes.

  Below the circular recess 12, a communication portion 18 is provided as a flow path switching portion to which a later-described seat 17 is contacted and separated. Further, a valve seat surface 13 is formed flat on the bottom side of the communication portion 18. Is formed. In the communication portion 18, a main channel 20 in the depth direction in the figure and a plurality of communication channels 21, 21 in a direction intersecting the main channel 20 are formed to communicate with each other, and the built-in unit 3 serves as the valve seat surface 13. These channels 20 and 21 are provided so as to be openable and closable by being in contact with and separating from each other. The connection flow path 22 between the communication section 18 and the main flow path 20 is provided with a very small volume, so that the dead volume on the primary side with respect to the communication section 18 is suppressed.

  The support surface 14 is formed in an annular substantially flat surface at an annular position rising from the outer peripheral side of the bottom portion, and the support unit 14 can support the built-in unit 3 inserted from the circular recess 12. Provided. The female thread 15 is formed for screwing the actuator 4 from the circular recess 12 toward the opening 11.

  The built-in unit 3 shown in FIG. 2 is assembled in advance as a diaphragm suspension type in which the diaphragm 30 is incorporated, and is provided so as to be able to be inserted into the valve mounting portion 10 as an integrated unit. In addition to the diaphragm 30, the built-in unit 3 includes a diaphragm piece 31, a sheet holder 32, a sheet 17, a bonnet 16, a stopper 33, and a spring 34.

  The diaphragm 30 is provided with a different metal from the diaphragm piece 31 and the sheet holder 32, and is formed into a disk shape with an elastically deformable metal material such as a Co-Ni alloy material. An inner diameter hole 36 through which a male screw 35 (described later) of the holder 32 can be inserted is formed. As shown in FIG. 3, the diaphragm 30 has a two-layer structure of a gas contact diaphragm 30a and a backup diaphragm 30b, and is formed by sticking and integrating them in a laminated state.

  The diaphragm piece 31 is formed in a substantially cylindrical shape by a metal material such as stainless steel such as SUS304, and is slid vertically with respect to the hood 16 so that the diaphragm 30 and the seat holder 32 can be moved up and down in the valve seat direction. Mounted movably. A female screw 37 is provided at the center of the bottom surface side of the diaphragm piece 31, and a male screw 35 of the sheet holder 32 is provided on the female screw 37 so as to be screwable.

  A diameter-expanded cylindrical part 31a is formed at the lower part of the diaphragm piece 31, and a reduced-diameter shaft part 31b is provided above the diameter-expanded cylindrical part 31a, and a part of the intermediate position of the shaft part 31b is provided. A male screw 38 is formed. The male screw 38 is provided with a female screw 39 formed on the stopper 33 so as to be screwable. Between the stopper 33 and the bonnet 16, for example, a spring 34 made of a coil spring formed of a metal material such as stainless steel such as SUS304-WPB is provided so as to be elastically mounted. The diaphragm holder 31 and the seat holder 32 fitted with the seat 17 are forcibly biased in the valve opening direction.

  The stopper 33 is made of, for example, a metal material such as stainless steel such as SUS304, and is provided so as to be screwable to the shaft portion 31b by a spanner or the like (not shown). At that time, the load of the spring 34 can be adjusted by changing the mounting height of the stopper 33, and the biasing force to the diaphragm piece 31 and the seat holder 32 can be adjusted.

  The sheet holder 32 is made of, for example, a metal material such as stainless steel such as SUS316L, and includes a male screw 35 that is screwed into the female screw 37 and a diameter-enlarged portion 40 for mounting the seat that is larger in diameter than the male screw 35. Have. A mounting recess 41 for mounting the seat 17 is provided on the valve seat side of the enlarged diameter portion 40, and the diaphragm 30 is sandwiched between the diaphragm piece 31 and the diaphragm piece 31 side of the enlarged diameter portion 40. An annular projection (not shown) is formed so that the inner peripheral seal portion 42 can be formed. The sheet holder 32 is provided with a two-sided width portion for fixing with a vise (not shown).

  The sheet 17 is formed of, for example, a resin material and attached to the mounting recess 41 of the sheet holder 32 by caulking. An annular protrusion 43 that can contact the valve seat surface 13 is formed on the front end side of the seat 17, and when the valve seat surface 13 contacts and seals with the annular protrusion 43, the valve is closed. The annular protrusion 43 is formed to protrude to a very small height, and a high contact property can be exhibited by a small contact area of the annular protrusion 43 to the valve seat surface 13.

  For example, the bonnet 16 is made of a metal material such as stainless steel such as SUS304, and the outermost diameter portion is formed to have an outer diameter that fits into the circular recess. On the inner peripheral side of the bonnet 16, a guide hole 47 capable of guiding the diaphragm piece 31 and a restricting portion 48 that abuts the upper surface of the enlarged cylindrical portion 31 a of the diaphragm piece 31 and restricts its rise are formed. .

  In the case where the built-in unit 3 is provided, in FIG. 2, a male screw 35 is inserted into the inner diameter hole 36, and the diaphragm 30 is temporarily attached to the sheet holder 32 to which the sheet 17 is previously attached. A tool such as a spanner (not shown) is hung on the width portion and is fastened to the diaphragm piece 31. After tightening, the vicinity of the center portion of the diaphragm 30 is sandwiched and fixed between the sheet holder 32 and the diaphragm piece 31. At this time, if the contact area between the diaphragm 30, the seat holder 32, and the diaphragm piece 31 is set to be extremely small, the inner peripheral seal portion 42 exhibits high sealing performance, and fluid leakage from the inner diameter hole 36 side is ensured. Is prevented.

  Then, the sheet holder 32 in which the diaphragm 30 and the sheet holder 32 are integrated is inserted from below the bonnet 16 and is fitted until the upper surface side comes into contact with the regulating portion 48. The spring 34 is placed on the bonnet 16 from above the diaphragm piece 31, and the stopper 33 is fixed to the diaphragm piece 31 through the screwing of the male screw 38 and the female screw 39, whereby the bonnet 16 and the stopper 33 are fixed. A spring 34 is mounted in a compressed state between them, and the built-in unit 3 is provided.

  On the other hand, the actuator 4 shown in FIGS. 1 and 2 has a casing 50, a cylinder 51, a piston 52, and a spring 53, and can be attached from above with the built-in unit 3 attached to the mounted body 2. Provided.

  The casing 50 has a male screw portion 55 that can be screwed to the female screw portion 15 on the lower side, a storage hole portion 56 on the lower inner peripheral side, and a reduced-diameter through hole 57 that communicates with the storage hole portion 56. Is provided. The upper side of the bonnet 16 can be inserted into the storage hole 56, and the built-in unit 3 is stored in the storage hole 56 by this insertion. The through hole 57 is provided so that the lower side of the piston 52 can be fitted, and the piston 52 can reciprocate in the casing 50. A male screw part 58 is provided on the upper outer periphery of the casing 50.

  The cylinder 51 has a female screw portion 59 that can be screwed into the male screw portion 58, and is fixed to the upper portion of the casing 50 by screwing of the male screw portion 58 and the female screw portion 59. Between these, a space in which the piston 52 can reciprocate is formed. The cylinder 51 is provided with an air supply port 60 for supplying air and an exhaust port 61 for exhausting air. When air is supplied from the air supply port 60, the piston 52 moves forward in the valve opening direction, and the air on the spring 53 side of the cylinder 51 is exhausted from the exhaust port 61. On the other hand, when the air supply from the air supply port 60 is stopped and exhausted, the piston 52 is moved back in the valve closing direction by the spring 53. Thereby, the diaphragm valve 1 is NC (normally closed type) in which the valve is closed during normal operation.

  The piston 52 is provided in a shape having a piston rod 62, can reciprocate in the cylinder 51 and the casing 50, and is mounted in a state where the bottom surface 62 a of the piston rod 62 is pressed against the diaphragm piece 31 by a spring 53. Thus, when the piston 52 reciprocates, the diaphragm piece 31 moves up and down in accordance with this operation. The piston 52 is provided with a through hole portion 63, and the through hole portion 63 communicates with the air supply port 60. When air is supplied from the air supply port 60, this air is supplied between the piston 51 and the cylinder 51 on the side facing the spring 53 mounting side via the through-hole portion 63, and the piston 52 as described above. Goes forward.

  The spring 53 is mounted in a state of being elastically urged between the piston 52 and the cylinder 51, and by this spring 53, the piston 52 always operates the diaphragm piece 31 and the seat holder 32 in the closing direction. Be energized by.

  When the above-described diaphragm valve 1 is provided by the mounting structure of the present invention, the built-in unit 3 is inserted into the valve mounting portion 10 from the opening 11 and the lower side of the bonnet 16 is fitted in the circular recess 12. . At the same time, when the male screw portion 55 of the lower portion of the casing 50 of the actuator 4 is screwed into the female screw portion 15 of the mounted body 2 and these are tightened, the lower end surface 55a and the bearing surface of the male screw portion 55 are obtained. 14, the outer periphery of the diaphragm 30 is fixed in a sandwiched state via the built-in unit 3. Therefore, an outer peripheral seal portion 65 is formed between the lower end surface 55a of the external thread portion, the support surface 14, and the diaphragm 30. By the outer peripheral seal portion 65, the built-in unit 3 and the mounted body 2 are separated. The gap is sealed.

  At that time, the outer peripheral side of the lower end surface 16 a of the bonnet 16 provided on the outer peripheral side of the built-in unit 3 becomes the diaphragm restraining surface 70, and the diaphragm 30 is sandwiched between the diaphragm restraining surface 70 and the support surface 14.

  As shown in the enlarged sectional view of FIG. 3, the diaphragm holding surface 70 has, for example, a tapered portion 71 inclined in the central direction at an angle of about 2.5 ° from the horizontal direction, and a predetermined portion following the tapered portion 71. The rounded portion 72 is formed, and the position from the center of the rounded portion 72 is provided at substantially the same position as the inner peripheral edge of the support surface 14. Thus, when the bonnet 16 is tightened, the outer surface (outer diameter side) of the tapered portion 71 is preferentially brought into close contact with the upper surface of the diaphragm 30, and after the tightening, the diaphragm restraining surface 70 is more than the inner peripheral edge 14 a of the support surface 14. The diaphragm 30 is sealed on the support surface 14 side by the outer peripheral seal portion 65 in the range of the width W.

  As described above, by providing the tapered portion 71 on the diaphragm holding surface 70, when the bonnet 16 descends due to the screwing of the actuator 4, the contact area between the diaphragm 30 and the support surface 14 gradually increases. To do. At the beginning of tightening, since the contact surface 14 receives a large surface pressure from the contact surface, the actuator 4 can be screwed with a light force, and the support surface 14 increases as the contact area between the diaphragm 30 and the support surface 14 increases. Since the surface pressure that the receiving surface 14 receives from the contact surface becomes small, a large torque is required to screw the actuator 4, and it becomes difficult to screw the actuator 4. From this, it is possible to prevent the operator from screwing into the actuator 4 due to excessive torque, and to prevent damage to the outer peripheral seal portion 65 due to overtightening of the actuator 4.

  Since the diaphragm restraining surface 70 is positioned outside the inner peripheral edge 14a of the support surface 14, the support surface 14 can be set wider and its strength can be improved, and the support surface 14 is crushed when the diaphragm 30 is tightened. Is suppressed.

  As described above, the diaphragm 30 is provided with the inner peripheral seal portion 42 with the inner side (inner diameter side) being sandwiched by being incorporated into the built-in unit 3, while the built-in unit 3 includes the mounted body 2, the actuator. 4, when the diaphragm valve 1 is configured, the outer side (outer diameter side) is sandwiched and the outer peripheral seal portion 65 is provided, whereby the actuator 4 from the main flow path 20 and the communication flow path 21 is provided. Leakage to the side is prevented.

  After the actuator 4 is screwed onto the mounted body 2, the bottom surface 62 a of the piston rod 62 presses the upper end side of the shaft portion 31 b of the diaphragm piece 31 by the piston 52 and the spring 53 built in the actuator 4 at normal times. Then, the seat holder 32 to which the diaphragm piece 31 and the seat 17 are mounted is lowered, and the valve is closed (normally closed) in which the seat 17 is seated on the valve seat surface 13. With respect to the diaphragm valve 1 in the normally closed state, air is sucked and exhausted into the cylinder 51, whereby the piston 52 is reciprocated to operate the diaphragm piece 31 and the seat holder 32, and the seat 17 is moved to the valve seat surface 13. It is possible to open and close the valve by contacting and separating.

  On the other hand, if the screwing between the external thread part 55 and the internal thread part 15 is loosened to remove the actuator 4 from the mounted body 2, the assembly unit 3 is inserted in the circular recess 12 in the state where the assembly unit 3 is inserted. The upper end of the unit 3 is in a state of facing upward from the opening 11 of the circular recess 12. As a result, the built-in unit 3 can be detached from the mounted body 2 and the portion where the built-in unit 3 is exposed can be grasped and taken out, so that the removal is easy. In this case, the entire parts constituting the built-in unit 3 can be taken out simply by picking out the exposed front end side. This eliminates the need to insert a finger or tweezers to the back of the circular recess 12 and take out the bonnet or diaphragm.

  When the mounted body 2 is installed upside down, the diaphragm piece 31, the spring 34, and the small diameter portion of the bonnet 16 are stored in the storage hole 56 of the actuator 4, and the actuator 4 is mounted. The built-in unit 3 can be removed together with the actuator 4 by removing the body 2 downward. In this way, by simply loosening the actuator 4, it is possible to easily remove other parts while leaving only the mounted body 2, and when the actuator 4 is removed, each part can be dropped separately or scattered. There is no scattering.

  In addition, the to-be-attached body may be provided with a plurality of circular recesses 12, and these circular recesses 12 may be used as the valve mounting portion 10 (not shown). In this case, if a predetermined flow path is formed inside one mounted body, and the built-in unit 3 and the actuator 4 are mounted on each valve mounting portion 10 to mount a plurality of diaphragm valves 1, the mounted The flow path of the body 2 can be controlled to open and close. In that case, for example, it becomes possible to make a to-be-attached body elongate, or to provide cyclic | annular form.

Next, a method for attaching / detaching the above-described diaphragm valve will be described.
Before assembling the diaphragm valve 1, the interior of the mounted body 2 and the diaphragm 30 mounting side of the built-in unit 3 should be sufficiently purged with an inert gas to remove foreign matters such as dust. To do.

  In FIG. 2, when the diaphragm valve 1 is assembled, the mounted body 2 is fixed with a vise or the like (not shown), and is assembled in advance in the valve mounting portion 10 of the circular recess 12 of the mounted body 2. Pick unit 3 with your finger and insert. At this time, the lower part of the outer periphery of the bonnet 16 is fitted into the circular recess 12, so that the built-in unit 3 is attached to the valve mounting part 10 in an aligned state. After mounting the built-in unit 3, a small amount of grease made of fluorine-based synthetic oil is applied to the diaphragm piece 31 in the vicinity of the upper end surface, which is a contact portion with the piston rod bottom surface 62a, with a clean cotton swab or the like that suppresses dust generation.

  Next, while setting the casing 50 of the actuator 4 on the attachment side of the mounted body 2, for example, operating air having a pressure of 0.5 to 0.7 MPa is supplied from the outside to the actuator 4 to open the valve. In this state, the actuator 4 is rotated in the tightening direction (clockwise), and the male thread portion 55 of the actuator 4 is screwed into the female thread portion 15 of the circular recess 12 for attachment. Thus, the piston rod 62 can be screwed in while preventing the piston rod 62 from being pushed toward the upper end surface of the diaphragm piece 31, and no thrust force acts on the diaphragm piece 31 from the piston rod bottom surface 62 a.

Thus, the generation of twisting force between the diaphragm piece 31 and the diaphragm 30 is prevented, and damage to the diaphragm 30 due to these twists and damage due to an extra load on the inner peripheral seal portion 42 are avoided.
The sealing performance of the outer peripheral seal portion 65 via the diaphragm 30 can be maintained without the diaphragm 30 rotating and rubbing against the supporting surface 14 to damage the supporting surface 14.

  Since the seat 17 can be prevented from contacting and rubbing against the valve seat surface 13 before the male thread lower end surface 55a contacts the upper surface side of the bonnet 16, the seat 17 due to rubbing between the seat 17 and the valve seat surface 13 can be prevented. Prevent damage.

  When the actuator 4 is screwed in, the casing 50 is held by the hand until the built-in unit 3 is attached to the bottom of the mounted body 2, that is, until the diaphragm 30 restrained by the diaphragm restraining surface 70 contacts the bearing surface 14. After screwing, it is recommended to tighten with a tool such as a torque wrench. When tightening with a torque wrench, tightening with excessive force can be avoided. For example, by using a tightening torque of about 56 N · m, damage to the valve can be prevented and its performance can be maintained.

  By tightening the actuator 4, the bonnet 16 at the outer peripheral position of the built-in unit 3 is pressed by the lower end surface 55 a of the external thread portion 55, and the support surface provided on the lower end surface 16 a of the bonnet 16 and the inner peripheral side of the circular recess 12. By sandwiching the outer peripheral edge of the diaphragm 30 with 14, the diaphragm 30 can be fixed in a sealed state.

  After the diaphragm valve 1 is assembled, if the actuator 4 is supplied with air having a pressure of 0.5 to 0.7 MPa, for example, the actuator 4 can be operated in the valve open state. After assembly, the diaphragm valve 1 is connected to an appropriate pipeline, and high purity nitrogen is sealed from the secondary side in the open / closed state to confirm that there is no pressure drop. It is desirable to confirm that there is not.

  On the other hand, when removing the diaphragm 30 from the mounted body 2, first, in a state where the mounted body 2 is fixed with a vise or the like, the casing 50 is gripped by a torque wrench and the actuator 4 is loosened (counterclockwise). The actuator 4 is rotated to loosen the male thread portion 55 of the actuator 4 and the female thread portion 15 of the body 2 to be attached, and the actuator 4 is lifted upward and removed from the circular recess 12.

  At this time, as in assembly, working air having a pressure of 0.5 to 0.7 MPa is supplied to the actuator 4 from the outside. With this supply, the valve is opened, and in this state, the actuator 4 is removed by loosening the screw from the circular recess 12. According to this, since the piston rod 62 can be separated from the upper end of the shaft portion 31b of the diaphragm piece 31 and the transmission of force to the built-in unit 3 can be cut off, when the actuator 4 is loosened, the built-in unit 3 is provided. This prevents the seat 17 from rotating and being damaged with respect to the valve seat surface 13 or from being damaged by applying an excessive force such as twisting to the diaphragm 30. After removal of the actuator 4, the upper end of the built-in unit 3 inserted in the circular recess 12 is in a state of facing upward from the opening 11 of the circular recess 12.

  Next, a part of the built-in unit 3 is picked and lifted with tweezers or the like, and the built-in unit 3 is detached from the attached body 2. Since the built-in unit 3 has an integral unit structure, the entire unit can be replaced. Further, after the sheet holder 32 is removed from the diaphragm piece 31, the diaphragm 30 is removed, and the built-in unit 3 is attached to the diaphragm 30 or the sheet holder 32. Only the new sheet 17 may be replaced.

  As described above, the diaphragm mounting structure of the present invention has a circular recess 12 having an opening 11, a valve seat surface 13, an annular bearing surface 14, and a female screw portion 15 in the mounted body 2. The provided valve mounting portion 10 is provided, the built-in unit 3 is inserted into the valve mounting portion 10, and the male screw portion 55 of the actuator 4 is screwed into the female screw portion 15. Since the outer periphery of the diaphragm 30 is fixed in a sandwiched state by the lower end surface 55a and the support surface 14, the outer peripheral seal portion 65 is configured. Therefore, various shapes can be used without targeting only the valve box for the diaphragm valve. A diaphragm valve can be configured by mounting the built-in unit 3 and the actuator 4 on an arbitrary mounted body 2 in which an internal flow path is formed. For this reason, it is excellent in versatility and it becomes possible to provide a diaphragm valve in the to-be-attached body 2 of various pipe lines.

  In this case, since the diaphragm 30 can be sandwiched between the support surface 14 of the mounted body 2 and the diaphragm restraining surface 70 of the built-in unit 3 by screwing the actuator 4, sealing performance can be exhibited. Durability can be improved without any problems.

  The diaphragm 30 is sandwiched between a diaphragm restraining surface 70 having a taper portion 71 having an angle of 2.5 ° and a rounded portion 72 and a substantially flat support surface 14, and the diaphragm restraining surface 70 is supported by the support surface 14. The outer peripheral seal portion 65 for sealing the diaphragm 30 is provided on the outer peripheral side with a small contact area. As a result, the surface pressure of the outer peripheral seal portion 65 is increased, and fluid leakage from the communication portion 18 to the outside through the built-in unit 3 and the actuator 4 is reliably prevented.

  Since the volume of the connection flow path 22 is formed to be extremely small and the dead volume is suppressed, the entire diaphragm valve 1 can be made compact, and when supplying different fluids, the residual fluid is minimized and high-speed flow is achieved. The road can be switched.

  When assembling the diaphragm valve 1, the built-in unit 3 is inserted into the valve mounting portion 10, and then the male screw portion 55 of the actuator 4 is screwed into the female screw portion 15, and the lower end surface 55 a of the male screw portion 55 is Since the outer periphery of the diaphragm 30 can be clamped by pressing the bonnet 16 and the outer periphery thereof can be fixed in a sealed state by the outer peripheral seal portion 65, the seat 17 can be attached to the valve seat surface 13 without requiring a dedicated tool or the like. The diaphragm valve 1 can be configured by easily fixing the built-in unit 3 and the actuator 4 to the mounted body 2 while accurately centering.

  On the other hand, when the diaphragm valve 1 is disassembled, the external thread portion 55 and the internal thread portion 15 are loosened to remove the actuator 4, and then a part of the built-in unit 3 is picked and removed. It can be easily removed without needing or damaging the built-in unit 3.

FIG. 4 shows another example of the diaphragm valve. In addition, in this example, the same part as the said embodiment is represented by the same code | symbol, and the description is abbreviate | omitted.
The diaphragm valve 80 has a recessed groove 82 formed in a part of the mounted body 81, and an embedded mounting structure in which the diaphragm built-in unit 3 is mounted on a valve mounting portion 83 provided at the bottom of the recessed groove 82. Is provided by.

  The valve mounting portion 83 is provided with a female thread portion 15, a circular recess 12, a bearing surface 14, and a valve seat surface 13 in this order from the opening 11 side in the same manner as in the above embodiment. In FIG. 1, a substantially vertical inlet-side channel 84 is communicated, and an outlet-side channel 85, which is an obliquely bent channel, is formed from the inlet-side channel 84 through the communication portion 18 to the outside. . The inlet-side channel 84 is provided with a very small volume, and the dead volume in the mounted body 81 is suppressed.

  An annular groove is formed on the outlet side of the outlet-side channel 85, and an external channel or device can be connected to the annular groove via an O-ring (not shown).

  Thus, the shape of the mounted body is not particular, and the built-in unit 3 and the actuator 4 can be easily attached to and detached from the mounted body of various shapes with high accuracy by using the same mounting structure and mounting method as described above. A diaphragm valve can be configured.

  Further, although not shown, a plurality of valve mounting portions may be provided on the mounted body, and a diaphragm valve may be provided on each valve mounting portion. In this case, each actuator can be controlled to perform fluid control from the inlet side flow path to the outlet side flow path of each valve, and at that time, the volume of the primary side flow path to the communication portion is minimized. By reducing the overall dead volume as much as possible, it is possible to reduce the residual fluid at the time of channel switching and to perform high-speed channel switching control.

  For defective or worn sheets etc., replacement and maintenance can be performed by attaching and detaching the built-in unit, so there is no need to remanufacture the entire mounted body, and for problems such as individual diaphragm bubble sheets, sheet caulking, etc. But it will be possible. Since the seat on the seat holder side is attached, the valve seat inside the mounted body can be easily repaired by grinding or other processing even if the valve seat inside the mounted body is rubbed and the sealing performance is reduced. Can be restored with minimal processing, and man-hours and material waste can be reduced.

  The present invention is not limited to the description of the above-described embodiment, and various modifications can be made without departing from the spirit of the invention described in the claims of the present invention.

DESCRIPTION OF SYMBOLS 1 Diaphragm valve 2 To-be-attached body 3 Diaphragm built-in unit 4 Actuator 10 Valve mounting part 11 Opening part 12 Circular recessed part 13 Valve seat surface 14 Bearing surface 14a Inner peripheral edge 15 Female thread part 16 Bonnet 16a Lower end surface 30 Diaphragm 55 Male thread part 55a Lower end surface 65 Outer peripheral seal portion 70 Diaphragm restraining surface

Claims (6)

  A circular recess having an opening provided in the mounted body, a valve seat surface on the bottom side of the circular recess, an annular support surface formed at an annular position rising from an outer peripheral side of the bottom, and the circular recess A valve mounting portion having a female screw portion for screwing an actuator formed toward the opening side of the diaphragm is configured, and a diaphragm suspension type diaphragm mounting unit in which a diaphragm is incorporated in the valve mounting portion And the lower end surface of the male screw portion and the support surface are connected to the diaphragm built-in unit in a state where the male screw portion formed in the lower portion of the actuator is screwed into the female screw portion. A diaphragm valve mounting structure, wherein an outer peripheral seal portion is formed by fixing an outer periphery of the diaphragm in a sandwiched state via a gap.   The outer peripheral side of the lower end surface of the bonnet provided on the outer peripheral side of the diaphragm built-in unit is a diaphragm restraining surface, the diaphragm is sandwiched between the diaphragm restraining surface and the support surface, and the diaphragm restraining surface is The diaphragm valve mounting structure according to claim 1, wherein the diaphragm valve is positioned outside an inner peripheral edge of the support surface.   The diaphragm valve mounting structure according to claim 1 or 2, wherein an upper end of the diaphragm built-in unit faces above an opening of the circular recessed portion in a state where the diaphragm built-in unit is inserted into the circular recessed portion. .   The diaphragm valve mounting structure according to any one of claims 1 to 3, wherein a plurality of the circular concave portions are provided in the mounted body, and the circular concave portions serve as valve mounting portions.   A diaphragm suspension type diaphragm built-in unit in which a diaphragm is incorporated is inserted into a valve mounting portion provided in a circular concave portion of the mounted body, and then a female screw portion of the circular concave portion is provided below the actuator. Screw the male screw part and press the bonnet provided at the outer peripheral position of the diaphragm built-in unit with the lower end surface of the male screw part so that the lower end surface of the bonnet and the support surface provided on the inner peripheral side of the circular recess The outer peripheral edge of the diaphragm is sandwiched between them, and the outer periphery of the diaphragm is fixed in a sealed state. On the other hand, when removing the diaphragm from the mounted body, loosen the threaded part of the actuator and the female threaded part. The actuator is removed from the circular recess, and then a part of the diaphragm built-in unit inserted in the circular recess is picked and removed. METHOD removable diaphragm valve, characterized in that as.   When the diaphragm valve is a normally closed type, the actuator is screwed and attached to the circular recess with the operating air supplied to the actuator from the outside to open the valve, or the actuator is screwed from the circular recess. 6. The method for attaching and detaching the diaphragm valve according to claim 5, wherein the diaphragm valve is loosened and removed.

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