JP2018133193A - Mold vacuum valve - Google Patents

Mold vacuum valve Download PDF

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JP2018133193A
JP2018133193A JP2017025872A JP2017025872A JP2018133193A JP 2018133193 A JP2018133193 A JP 2018133193A JP 2017025872 A JP2017025872 A JP 2017025872A JP 2017025872 A JP2017025872 A JP 2017025872A JP 2018133193 A JP2018133193 A JP 2018133193A
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movable
mold
vacuum valve
heat transfer
insulating
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JP6815888B2 (en
Inventor
丹羽 芳充
Yoshimitsu Niwa
芳充 丹羽
裕希 関森
Hiroki Sekimori
裕希 関森
康寿 宮内
Yasuhisa Miyauchi
康寿 宮内
亙 坂口
Wataru Sakaguchi
亙 坂口
昂 大坊
Akira Daibo
昂 大坊
直紀 浅利
Naoki Asari
直紀 浅利
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Toshiba Corp
Toshiba Infrastructure Systems and Solutions Corp
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Toshiba Corp
Toshiba Infrastructure Systems and Solutions Corp
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Abstract

PROBLEM TO BE SOLVED: To provide a mold vacuum valve capable of suppressing a rise in temperature due to heat generation caused by energization, without increasing the size of the mold vacuum valve.SOLUTION: A mold vacuum valve includes: a vacuum vessel; an insulation mold disposed to surround the circumference of the vacuum vessel; electrodes disposed inside the vacuum vessel to be capable of coming in contact with and being separated from each other; a movable-side conductive shaft connected to one of the electrode; a fixed-side conductive shaft connected to another electrode; a movable-side conductor electrically connected to the movable-side conductive shaft and making the movable-side conductive shaft slidable; and an extension formed in the circumference of a sliding portion with the movable-side conductive shaft and extending toward the outer peripheral direction of the insulation mold.SELECTED DRAWING: Figure 1

Description

本発明の実施形態は、モールド真空バルブに関する。   Embodiments of the present invention relate to a mold vacuum valve.

従来から、遮断器等としてモールド真空バルブが使用されている。モールド真空バルブでは、真空容器内の真空雰囲気中に電極が配設されており、その周囲は絶縁モールドで覆われている。このような構成のモールド真空バルブでは、電極部分などにおいて通電に伴う熱が発生する。しかし、電極の周囲は真空雰囲気であり、その周囲は絶縁モールドで覆われているため、放熱性が悪い。このため、絶縁モールド内に熱伝導性の良い材料からなるパイプ等を埋設して放熱性を高めることが提案されている(例えば、特許文献1参照。)。   Conventionally, a mold vacuum valve has been used as a circuit breaker or the like. In the mold vacuum valve, electrodes are arranged in a vacuum atmosphere in a vacuum vessel, and the periphery thereof is covered with an insulating mold. In the mold vacuum valve having such a configuration, heat accompanying energization is generated in the electrode portion and the like. However, since the periphery of the electrode is in a vacuum atmosphere and the periphery is covered with an insulating mold, heat dissipation is poor. For this reason, it has been proposed to embed a pipe or the like made of a material having good thermal conductivity in the insulating mold to improve heat dissipation (see, for example, Patent Document 1).

しかしながら、単に絶縁モールド内に熱伝導性の良い材料からなるパイプ等を埋設したとしても、真空雰囲気及び絶縁モールドを通じて電極等からの放熱が行われるため、十分な放熱性を得ることは難しい。このため、通電量を多くした場合、温度の上昇を避けられない。   However, even if a pipe made of a material with good thermal conductivity is simply embedded in the insulating mold, it is difficult to obtain sufficient heat dissipation because heat is radiated from the electrodes and the like through the vacuum atmosphere and the insulating mold. For this reason, when the energization amount is increased, an increase in temperature is inevitable.

実開昭59−4141号公報Japanese Utility Model Publication No.59-4141

上記のように、モールド真空バルブでは、真空雰囲気中に電極が配設されており、その周囲が絶縁モールドで覆われている構成となっている。このため、通電により発生した熱の放出が難しく、通電量を多くした場合、温度が上昇してしまうという課題があった。   As described above, in the mold vacuum valve, the electrode is disposed in the vacuum atmosphere, and the periphery thereof is covered with the insulating mold. For this reason, it is difficult to release heat generated by energization, and there is a problem that the temperature rises when the energization amount is increased.

このため、通電量を多くする場合、電流経路となる導体の断面積を増やし、低抵抗化を図って温度上昇を抑制する必要があり、モールド真空バルブが大型化してしまうという課題があった。   For this reason, when energizing amount is increased, it is necessary to increase the cross-sectional area of the conductor serving as a current path, to reduce resistance, and to suppress the temperature rise, and there is a problem that the mold vacuum valve is increased in size.

本発明の目的は、モールド真空バルブの大型化を招くことなく、通電に伴う発熱による温度上昇を抑制することのできるモールド真空バルブを提供することにある。   The objective of this invention is providing the mold vacuum valve which can suppress the temperature rise by the heat_generation | fever accompanying energization, without causing the enlargement of a mold vacuum valve.

実施形態のモールド真空バルブは、真空容器と、前記真空容器の周囲を囲むように配設された絶縁モールドと、前記真空容器の内部に配設された離接可能な電極と、前記電極のうちの一方と接続された可動側通電軸と、前記電極のうちの他方と接続された固定側通電軸と、前記可動側通電軸と電気的に接続されると共に、前記可動側通電軸が摺動自在とされた可動側導体とを具備している。さらに、前記可動側導体の、前記可動側通電軸との摺動部の周囲に形成され、前記絶縁モールドの外周方向に向けて拡がる拡張部を具備している。   The mold vacuum valve according to the embodiment includes a vacuum container, an insulating mold disposed so as to surround the vacuum container, a separable electrode disposed in the vacuum container, and the electrode A movable energizing shaft connected to one of the electrodes, a fixed energizing shaft connected to the other of the electrodes, and an electrically connected to the movable energizing shaft, and the movable energizing shaft slides. And a movable-side conductor that is made free. Furthermore, the movable-side conductor has an extended portion that is formed around a sliding portion of the movable-side conductor with respect to the movable-side conductive shaft and extends toward the outer peripheral direction of the insulating mold.

実施形態に係るモールド真空バルブの断面概略構成を示す図。The figure which shows the cross-sectional schematic structure of the mold vacuum valve which concerns on embodiment. 図1のモールド真空バルブの可動側導体の構成を示す図。The figure which shows the structure of the movable side conductor of the mold vacuum valve of FIG. 図1のモールド真空バルブの要部断面構成を示す図。The figure which shows the principal part cross-section structure of the mold vacuum valve of FIG. 拡張部を有しない可動側導体の構成を示す図。The figure which shows the structure of the movable side conductor which does not have an expansion part.

以下、実施形態のモールド真空バルブを、図面を参照して説明する。   Hereinafter, the mold vacuum valve of an embodiment is explained with reference to drawings.

図1は、実施形態に係るモールド真空バルブ100の断面構成を示す図である。図1に示すように、モールド真空バルブ100は、碍管4を具備しており、この碍管4の内部は、真空容器14とされている。真空容器14の内部には、一対の電極1a,1bからなる電極1が配設されている。また、電極1の周囲を囲むように、略円筒状のアークシールド13が配設されている。   FIG. 1 is a diagram illustrating a cross-sectional configuration of a mold vacuum valve 100 according to the embodiment. As shown in FIG. 1, the mold vacuum valve 100 includes a soot tube 4, and the inside of this soot tube 4 is a vacuum container 14. An electrode 1 including a pair of electrodes 1 a and 1 b is disposed inside the vacuum vessel 14. A substantially cylindrical arc shield 13 is disposed so as to surround the periphery of the electrode 1.

電極1a,1bのうち、図1中上側に位置する電極1aには、固定側通電軸2が取り付けられている。また、図1中下側に位置する電極1bには、可動側通電軸3が取り付けられている。固定側通電軸2と可動側通電軸3は真空容器14の外部に導出されている。可動側通電軸3が真空容器14の外部に導出されている部分には、気密封止のためのベローズ10が配設されている。このベローズ10は、可動側通電軸3を移動可能な状態としつつ、真空容器14内を気密に維持する。   A fixed energizing shaft 2 is attached to the electrode 1a located on the upper side in FIG. 1 among the electrodes 1a and 1b. In addition, a movable energizing shaft 3 is attached to the electrode 1b located on the lower side in FIG. The stationary energizing shaft 2 and the movable energizing shaft 3 are led out of the vacuum vessel 14. A bellows 10 for hermetic sealing is disposed at a portion where the movable side energizing shaft 3 is led out of the vacuum vessel 14. The bellows 10 keeps the inside of the vacuum vessel 14 airtight while making the movable-side energizing shaft 3 movable.

真空容器14より、可動側通電軸3側(図1中下側)には、可動側通電軸3と接触し、可動側通電軸3と電気的に接続された可動側導体9が配設されている。可動側通電軸3は、可動側導体9に対して摺動自在とされている。そして、可動側導体9との電気的な接続を維持した状態で、可動側通電軸3が所定方向(図1中上下方向)に移動できるよう構成されている。   A movable-side conductor 9 that is in contact with the movable-side conductive shaft 3 and is electrically connected to the movable-side conductive shaft 3 is disposed on the movable-side conductive shaft 3 side (lower side in FIG. 1) from the vacuum vessel 14. ing. The movable energizing shaft 3 is slidable with respect to the movable conductor 9. The movable-side energizing shaft 3 is configured to be movable in a predetermined direction (vertical direction in FIG. 1) while maintaining an electrical connection with the movable-side conductor 9.

モールド真空バルブ100において、真空容器14の周囲、及び可動側導体9等の周囲は、絶縁モールド5にて覆われている。さらに、絶縁モールド5の表面は、接地電位とされた導電性の接地層6で覆われている。図1の上下方向におけるモールド真空バルブ100の外形は、略円柱状とされており、可動側導体9が、略円柱状の部分から側方に延びた形状とされている。   In the mold vacuum valve 100, the periphery of the vacuum container 14 and the periphery of the movable conductor 9 and the like are covered with an insulating mold 5. Furthermore, the surface of the insulating mold 5 is covered with a conductive ground layer 6 that is set to the ground potential. The outer shape of the mold vacuum valve 100 in the vertical direction in FIG. 1 is substantially cylindrical, and the movable conductor 9 is formed in a shape extending laterally from the substantially cylindrical portion.

絶縁モールド5内の可動側通電軸3側には、可動部内部空間8が形成されている。可動側通電軸3は、可動部内部空間8内において、絶縁ロッド7の一端に接続されている。絶縁ロッド7の他端は、図示しない操作機構に接続されており、絶縁ロッド7を所定方向(図1中上下方向)に動かすことで、電極1を開閉する。電流は、固定側通電軸2、電極1、可動側通電軸3、可動側導体9の経路で流れる。   A movable portion internal space 8 is formed on the movable energizing shaft 3 side in the insulating mold 5. The movable energizing shaft 3 is connected to one end of the insulating rod 7 in the movable portion internal space 8. The other end of the insulating rod 7 is connected to an operating mechanism (not shown), and the electrode 1 is opened and closed by moving the insulating rod 7 in a predetermined direction (vertical direction in FIG. 1). The current flows through the path of the fixed-side conduction shaft 2, the electrode 1, the movable-side conduction shaft 3, and the movable-side conductor 9.

図2に示すように、本実施形態において、可動側導体9の端部には、絶縁モールド5の外周方向に向けて、絶縁モールド5の表面に近付くように可動側導体9の幅方向に拡がる拡張部9aが形成されている。本実施形態において、拡張部9aは、略円板状の形状とされている。そして、この拡張部9aの略中央部に摺動孔9bが形成されている。可動側通電軸3は、この摺動孔9b内に位置するように、摺動可能に配設されている。摺動孔9b内には、例えば、摺動孔9b内壁と可動側導体9の外周部との間に介在するように、バネ状の導体等が配設される。   As shown in FIG. 2, in this embodiment, the end of the movable side conductor 9 extends in the width direction of the movable side conductor 9 toward the outer peripheral direction of the insulating mold 5 so as to approach the surface of the insulating mold 5. An extended portion 9a is formed. In the present embodiment, the extended portion 9a has a substantially disk shape. And the sliding hole 9b is formed in the approximate center part of this expansion part 9a. The movable energizing shaft 3 is slidably disposed so as to be positioned in the sliding hole 9b. In the sliding hole 9 b, for example, a spring-like conductor or the like is disposed so as to be interposed between the inner wall of the sliding hole 9 b and the outer peripheral portion of the movable conductor 9.

また、本実施形態において、拡張部9aには、伝熱部材として図1中上側に位置する第1伝熱筒11と、図1中下側に位置する第2伝熱筒12とが配設されている。これらの第1伝熱筒11及び第2伝熱筒12は、円筒状とされており、図3にも示すように、絶縁モールド5の表面から絶縁性を確保することのできる所定距離を隔てて絶縁モールド5の内部に埋設されている。すなわち、第1伝熱筒11及び第2伝熱筒12は、略円筒状の絶縁モールド5の表面(接地層6)に沿うように配設されている。   In the present embodiment, the expansion portion 9a is provided with a first heat transfer cylinder 11 located on the upper side in FIG. 1 and a second heat transfer cylinder 12 located on the lower side in FIG. 1 as heat transfer members. Has been. The first heat transfer cylinder 11 and the second heat transfer cylinder 12 are formed in a cylindrical shape, and as shown in FIG. 3, the first heat transfer cylinder 11 and the second heat transfer cylinder 12 are separated from the surface of the insulating mold 5 by a predetermined distance that can ensure insulation. Embedded in the insulating mold 5. That is, the first heat transfer cylinder 11 and the second heat transfer cylinder 12 are arranged along the surface (grounding layer 6) of the substantially cylindrical insulating mold 5.

なお、本実施形態では、絶縁モールド5の外形が略円柱状とされており、この形状に合わせて、拡張部9aが円板状とされ、第1伝熱筒11及び第2伝熱筒12は、円筒状とされている。しかしながら、例えば、絶縁モールド5の外形が略四角柱状とされているような場合は、この形状に合わせて、拡張部9aを略四角状とし、第1伝熱筒11及び第2伝熱筒12を四角筒状としてもよい。   In the present embodiment, the outer shape of the insulating mold 5 is substantially cylindrical, and the expanded portion 9a is formed in a disk shape in accordance with this shape, and the first heat transfer cylinder 11 and the second heat transfer cylinder 12 are used. Is cylindrical. However, for example, when the outer shape of the insulating mold 5 is a substantially quadrangular prism shape, the expanded portion 9a is formed in a substantially square shape in accordance with this shape, and the first heat transfer cylinder 11 and the second heat transfer cylinder 12 are formed. It is good also as a square cylinder shape.

第1伝熱筒11及び第2伝熱筒12は、絶縁モールド5より熱伝導率が高い材料によって構成されている。このような材料としては、例えば金属を使用することができ、金属の中でも、例えば、銅又はアルミニウム等を使用することができる。第1伝熱筒11及び第2伝熱筒12を、熱伝導率の高い材料によって構成することにより、通電により発生した熱をより効率的に外部に放出することができる。   The first heat transfer cylinder 11 and the second heat transfer cylinder 12 are made of a material having a higher thermal conductivity than the insulating mold 5. As such a material, for example, a metal can be used, and among metals, for example, copper or aluminum can be used. By configuring the first heat transfer cylinder 11 and the second heat transfer cylinder 12 with a material having high thermal conductivity, the heat generated by energization can be released more efficiently to the outside.

ここで、図4に示す可動側導体90のように、通常の角板状の外形を有し、摺動孔90bの周囲に、外側に向けて延在する、拡張部9aに相当する構成(図4中一点鎖線で示す。)を具備しない場合、可動側導体90の端部と絶縁モールド5の表面(接地層6)との間には広い間隔が空いた状態となる。この場合、可動側導体90に伝わった熱は、厚い絶縁モールド5を伝わってその表面(接地層6)から周囲の大気中に放熱されるため、放熱の効率が悪い。   Here, like the movable-side conductor 90 shown in FIG. 4, a configuration corresponding to the extended portion 9a having a normal square plate-like outer shape and extending outward around the sliding hole 90b ( 4), a wide space is left between the end of the movable conductor 90 and the surface of the insulating mold 5 (grounding layer 6). In this case, the heat transmitted to the movable conductor 90 is transmitted through the thick insulating mold 5 and radiated from the surface (grounding layer 6) to the surrounding atmosphere, so the efficiency of heat dissipation is poor.

一方、本実施形態における可動側導体9のように、拡張部9aを有する場合、可動側導体90の場合と比べて、可動側導体9の端部と絶縁モールド5の表面(接地層6)との間の間隔を狭くすることができる。これによって、電極1や、可動側導体9と可動側通電軸3との摺動部等に通電による発熱があった場合に、拡張部9aに伝わった熱を、拡張部9aの端部から、厚さの薄い絶縁モールド5を介して周辺の大気に効率良く放出することができる。   On the other hand, as in the case of the movable side conductor 9 in the present embodiment, when the extended portion 9a is provided, compared to the case of the movable side conductor 90, the end of the movable side conductor 9 and the surface of the insulating mold 5 (ground layer 6) The interval between the two can be narrowed. Thereby, when heat is generated by energization in the sliding portion of the electrode 1 or the movable side conductor 9 and the movable side energization shaft 3, the heat transmitted to the expansion portion 9 a is transferred from the end of the expansion portion 9 a. It can be efficiently discharged to the surrounding atmosphere through the thin insulating mold 5.

さらに、本実施形態では、拡張部9aに、伝熱部材として第1伝熱筒11及び第2伝熱筒12が配設されている。これによって、拡張部9aに伝わった熱は、これらの第1伝熱筒11及び第2伝熱筒12に伝わる。そして、第1伝熱筒11及び第2伝熱筒12に伝わった熱を、絶縁モールド5を介して接地層6の周囲の大気中に効率良く放出することができる。   Furthermore, in this embodiment, the 1st heat transfer cylinder 11 and the 2nd heat transfer cylinder 12 are arrange | positioned as the heat transfer member in the expansion part 9a. Thereby, the heat transmitted to the expansion part 9 a is transmitted to the first heat transfer cylinder 11 and the second heat transfer cylinder 12. The heat transferred to the first heat transfer cylinder 11 and the second heat transfer cylinder 12 can be efficiently released into the atmosphere around the ground layer 6 through the insulating mold 5.

また、図3にも示すように、第2伝熱筒12は、絶縁ロッド7の周囲の可動部内部空間8と接地層6の間の絶縁モールド5内に配設されている。このため、可動側導体9から第2伝熱筒12に伝わった熱は、絶縁モールド5を介して接地層6の周囲の大気中に放出されると共に、可動部内部空間8内にも放出される。これによって、より効率良く熱を放出することができる。   Further, as shown in FIG. 3, the second heat transfer cylinder 12 is disposed in the insulating mold 5 between the movable portion inner space 8 around the insulating rod 7 and the ground layer 6. For this reason, the heat transmitted from the movable conductor 9 to the second heat transfer cylinder 12 is released into the atmosphere around the ground layer 6 through the insulating mold 5 and also into the movable part internal space 8. The Thereby, heat can be released more efficiently.

上記のように、本実施形態のモールド真空バルブ100では、電極1や、可動側導体9と可動側通電軸3との摺動部(摺動孔9bの部分)等に通電による発熱があった場合、この熱が拡張部9aに伝わる。そして、拡張部9aに伝わった熱が、第1伝熱筒11及び第2伝熱筒12に伝わる。このため、第1伝熱筒11及び第2伝熱筒12と拡張部9aとの接続部は、第1伝熱筒11及び第2伝熱筒12の端部全体と拡張部9aとが接続された状態とすることが好ましい。このような構成とすることによって、拡張部9aから第1伝熱筒11及び第2伝熱筒12への熱伝導が促進され、第1伝熱筒11及び第2伝熱筒12から、より効率的に熱を放出することができる。なお、第1伝熱筒11及び第2伝熱筒12と、拡張部9aとの接続部は、例えば、溶接やろう付け等によって接続することが好ましい。   As described above, in the mold vacuum valve 100 of the present embodiment, heat was generated due to energization at the electrode 1 and the sliding portion (the portion of the sliding hole 9b) between the movable conductor 9 and the movable energizing shaft 3. In this case, this heat is transmitted to the expansion portion 9a. Then, the heat transmitted to the expansion portion 9 a is transmitted to the first heat transfer cylinder 11 and the second heat transfer cylinder 12. For this reason, as for the connection part of the 1st heat transfer cylinder 11 and the 2nd heat transfer cylinder 12, and the expansion part 9a, the whole edge part of the 1st heat transfer cylinder 11 and the 2nd heat transfer cylinder 12 and the expansion part 9a connect. It is preferable to be in a state of being made. By setting it as such a structure, the heat conduction from the expansion part 9a to the 1st heat exchanger tube 11 and the 2nd heat exchanger tube 12 is accelerated | stimulated, and from the 1st heat exchanger tube 11 and the 2nd heat exchanger tube 12, more Heat can be released efficiently. In addition, it is preferable to connect the connection part of the 1st heat transfer cylinder 11 and the 2nd heat transfer cylinder 12, and the expansion part 9a by welding, brazing, etc., for example.

以上のように、本実施形態のモールド真空バルブ100では、通電電流を大きくして通電発熱量が多くなった場合においても、放熱を促進することによって、温度上昇を抑制することができる。したがって、固定側通電軸2、電極1、可動側通電軸3、可動側導体9等の断面積を増やし、低抵抗化を図って温度上昇を抑制する必要がなく、モールド真空バルブ100が大型化することもない。   As described above, in the mold vacuum valve 100 of the present embodiment, even when the energization current is increased and the energization heat generation amount is increased, the temperature rise can be suppressed by promoting the heat dissipation. Therefore, there is no need to increase the cross-sectional area of the fixed-side energizing shaft 2, the electrode 1, the movable-side energizing shaft 3, the movable-side conductor 9, and the like to reduce the resistance and suppress the temperature rise, and the mold vacuum valve 100 is enlarged. I don't have to.

以上、本発明のいくつかの実施形態を説明したが、これらの実施形態は、例として提示したものであり、発明の範囲を限定することは意図していない。これら新規な実施形態は、その他の様々な形態で実施されることが可能であり、発明の要旨を逸脱しない範囲で、種々の省略、置き換え、変更を行うことができる。これら実施形態やその変形は、発明の範囲や要旨に含まれるとともに、特許請求の範囲に記載された発明とその均等の範囲に含まれる。   As mentioned above, although some embodiment of this invention was described, these embodiment is shown as an example and is not intending limiting the range of invention. These novel embodiments can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the scope of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are included in the invention described in the claims and the equivalents thereof.

1(1a,1b)……電極、2……固定側通電軸、3……可動側通電軸、4……碍管、5……絶縁モールド、6……接地層、7……絶縁ロッド、8……可動部内部空間、9……可動側導体、9a……拡張部、9b……摺動孔、10……ベローズ、11……第1伝熱筒、12……第2伝熱筒、13……アークシールド、14……真空容器、100……モールド真空バルブ。   DESCRIPTION OF SYMBOLS 1 (1a, 1b) ... Electrode, 2 ... Fixed side energizing shaft, 3 ... Movable side energizing shaft, 4 ... Steel pipe, 5 ... Insulation mold, 6 ... Grounding layer, 7 ... Insulating rod, 8 ...... Moving part internal space, 9 ... Moving side conductor, 9a ... Expansion part, 9b ... Sliding hole, 10 ... Bellows, 11 ... First heat transfer cylinder, 12 ... Second heat transfer cylinder, 13 ... Arc shield, 14 ... Vacuum container, 100 ... Mold vacuum valve.

Claims (7)

真空容器と、
前記真空容器の周囲を囲むように配設された絶縁モールドと、
前記真空容器の内部に配設された離接可能な電極と、
前記電極のうちの一方と接続された可動側通電軸と、
前記電極のうちの他方と接続された固定側通電軸と、
前記可動側通電軸と電気的に接続されると共に、前記可動側通電軸が摺動自在とされた可動側導体と、
前記可動側導体の、前記可動側通電軸との摺動部の周囲に形成され、前記絶縁モールドの外周方向に向けて拡がる拡張部と、
を具備したことを特徴とするモールド真空バルブ。
A vacuum vessel;
An insulating mold disposed so as to surround the vacuum vessel;
A separable electrode disposed inside the vacuum vessel;
A movable energizing shaft connected to one of the electrodes;
A fixed energizing shaft connected to the other of the electrodes;
A movable-side conductor electrically connected to the movable-side conductive shaft, the movable-side conductive shaft being slidable;
An extension portion that is formed around a sliding portion of the movable side conductor with the movable side energizing shaft and extends toward an outer peripheral direction of the insulating mold;
A mold vacuum valve characterized by comprising:
前記拡張部が、略円板状とされていることを特徴とする請求項1記載のモールド真空バルブ。   The mold vacuum valve according to claim 1, wherein the extended portion has a substantially disc shape. 前記拡張部に配設され、前記絶縁モールドより熱伝導率が高い材料によって構成された伝熱部材を具備したことを特徴とする請求項1又は2記載のモールド真空バルブ。   The mold vacuum valve according to claim 1, further comprising a heat transfer member that is disposed in the extension portion and is made of a material having a higher thermal conductivity than the insulating mold. 前記伝熱部材は、略筒状の形状を有することを特徴とする請求項3記載のモールド真空バルブ。   The mold vacuum valve according to claim 3, wherein the heat transfer member has a substantially cylindrical shape. 前記伝熱部材は、前記拡張部の両面に夫々配設されていることを特徴とする請求項3又は4記載のモールド真空バルブ。   The mold vacuum valve according to claim 3 or 4, wherein the heat transfer members are respectively disposed on both surfaces of the extended portion. 前記伝熱部材を金属から構成したことを特徴とする請求項3〜5いずれか1項記載のモールド真空バルブ。   The mold vacuum valve according to claim 3, wherein the heat transfer member is made of metal. 前記絶縁モールドの表面に設けられ、接地電位とされた導電性の接地層を具備し、
前記伝熱部材は、前記絶縁モールド内に、前記接地層に沿って設けられていることを特徴とする請求項3〜6いずれか1項記載のモールド真空バルブ。
A conductive ground layer provided on the surface of the insulating mold and having a ground potential;
The mold vacuum valve according to claim 3, wherein the heat transfer member is provided along the ground layer in the insulating mold.
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